Business and Market Update
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1 Business and Market Update Dr. Bastian Marheineke Dr. Bastian Marheineke Vice President Sales AIXTRON IC-MOVPE User Meeting Nevada, USA May 26, 2010
2 AIXTRON Global Presence AIXTRON Inc., Sunnyvale AIXTRON AG, Herzogenrath AIXTRON Taiwan Co. Ltd., Hsinchu AIXTRON Shanghai Rep. Office AIXTRON Co. Ltd., Seoul AIXTRON K.K., Tokyo AIXTRON Ltd., Cambridge P 2
3 Manufacturing Centre Headquarters, Germany Final Assembly and Test P 3
4 Equipment Revenues by Application 300 AIXTRON Equipment Revenues (excl. spares) in EUR m Q1/10 LED Consumer-/Optoelectronics Display & others Telecom/Datacom Solar Silicon P 4
5 24 - Month Business Development ( million) Equipment (only) Order Intake 72,5 52,2 40,6 31,2 57,9 117,6 163,3 168,5 Equipment (only) Order Backlog 165,1 158,1 105,0 100,7 109,4 152,4 203,8 229,9 * Total Revenues (incl. equipment, service, spare parts) 65,6 63,9 82,3 46,2 56,7 82,0 117,9 154,5 Q2/2008 Q3/2008 Q4/2008 Q1/2009 Q2/2009 Q3/2009 Q4/2009 Q1/2010 P 5 *) revalued at 1/1/2010 to 190.9m at US$ 1.50 per
6 Global MOCVD Market Shares $113m $164m $238m $340m $185m $133m $231m $155m $202m $289m $486m $533m 100% 90% 80% 70% 60% 50% 40% 30% 20% 10% 0% AIXTRON AG Taiyo Nippon Sanso Corp. Veeco Instruments, Inc. Others (EMC,JPE,POWDEC,EMF) Compilation of VLSI RESEARCH Inc. and Gartner Dataquest P 6
7 AIXTRON Revenue Analysis Q1/10 Q1/2010: by technology 1% 7% Q1/2010: by end application (equipment only) 3% 3% 1% Q1/2010: by region 4% 2% 92% 93% 94% Compound Silicon Spares LED Telecom/Datacom Consumer/Optoelectronic Solar Display & Others Silicon Asia Europe USA P 7
8 LED Product Applications Motorola Phone Audi R8 LED Headlight Dell Laptop Samsung LED backlight TV LED Street Lighting LED Ceiling Light P 8
9 High Brightness LED Market Forecast HB LED summary forecast by application 2009 Market Size (USD million) CAGR 31% 17% 17% 12% 12% 41% 1% 2014e 8% e 2011e 2012e 2013e 2014e Signs / Displays Mobile Appliances Signals Automotive Illumination Electronic equip. / Other 21% 6% 12% 53% Source: Strategies In Light February 2010 P 9
10 LCD TV BLU Market Forecast Strong LCD TV unit growth (TAM) Rapid adoption towards full LED BLU implementation LCD TV Market (million units) LED-TV penetration ( ) 100% 80% 60% 40% 20% LED BLU Penetration Rate LED-TV product line-up by size in inches (2009/2010) 2009 Samsung LG Sony Sharp e 2011e 2012e 2013e 2014e 0% LCD TV LED BLU Penetration Vizio P 10 Based on: AIXTRON; Display Search Q1/2010; DAIWA 2010
11 Solid State Lighting Market Estimates Globalization and urbanization to drive LED lighting opportunities: Emerging countries: need for energy efficient lighting solutions Developed countries: SSL driven by expanding renovation market Target: 50% worldwide LED penetration by 2014 Early adoption: >150m unit replacement streetlight market P 11 USD million Total (new & replaced) Lamp Market e 2011e 2012e 2013e 2014e Traditional Lamp Replacement/New LED Replacement/New LED Penetration Rate Source: JPMorgan March 2010; Clinton Foundation 100% 80% 60% 40% 20% 0% 26% e 12% 19% 4% 39% 14% 25% 1% 8% 52% LED Comp. Fluorescent Fluorescent Incandescent Other Type of Lamp # Replacement LEDs Incandescent Lamp 5-12 Fluorescent Lamp Compact Fluorescent Lamp 5-12 Other Lamps
12 Haitz Law The LED challenge Dr. Roland Haitz, former Hewlett Packard / Agilent Technologies / Lumileds 1,E+04 1,E+03 1,E+02 Cost/Lumen Flux/Package 1,E+01 1,E+00 1,E-01 1,E-02 1,E x/Decade -10x/Decade How can MOCVD contribute? New applications change performance / cost requirements P 12
13 LED performance and cost drivers Cost per Wafer (area) Uptime Reactor scaling Wafer size Cycle time Material efficiency Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield P 13
14 Compound Semiconductors (G5 and CRIUS II) AIXTRON s Flagship: One common platform for Close Coupled Showerhead and Planetary Reactor Planetary Reactor 56x2 Integrated Concept System IC 2 Close Coupled Showerhead 55x2 P 14
15 P 15 AIX G5 HT Planetary Reactor
16 P 16 CRIUS II Reactor
17 High Capacity MOCVD for red/orange/yellow LED and solar cell manufacturing Standard for high throughput and low operating cost Fully automated robot operation AIXTRON Planetary Reactor AIX 2800G4-R 60x2 or 15x4 P 17
18 P 18 Source: IMEC 2008
19 P 19 CRIUS 300mm III-V MOCVD reactor
20 P mm MOCVD tool in cluster configuration
21 P 21
22 Organic Vapor Phase Deposition - OVPD Equipment Advanced Bus Control Organic Sources / Furnaces Deposition Chamber with Mask Alignment Mask magazine and Loadlock P 22
23 PVPD : Gen 3.5 manufacturing equipment sold to Plastic Logic New Fab in Dresden, Germany Production start in 2009 with 1 Mio. Displays/year Equipment based on AIXTRON s proprietary Closed Coupled Showerhead Technology P 23
24 P 24 PVPD : Gen 3.5 manufacturing equipment
25 P 25 QUE E-Reader launched in January 2010
26 P 26 Carbon Nanotube CVD equipment
27 Carbon Nanotubes 300mm CNT tool Based on CRIUS /CRIUS -R platform Transistors Top gated FETs with high-k dielectric exhibit: Mobility ~3,000 cm2v-1s-1 Subthreshold slope ~70mV/dec Need to improve density and semiconducting ratio Top view of horizontal CNTs Vias and interconnects High current density of 109 A/cm2 No electromigration Need to improve density to get resistance down CNTs on CMOS Thermal Interface mat. CVD and PECVD 300mm wafer P 27 High axial thermal conductivity Extremely compliant Can be in a matrix of polymer or Cu CNTs on heatspreader/sink
28 Silicon Semiconductor Systems Memory and emerging applications to drive ALD equipment industry ALD/AVD multi generation film development on complex materials for memory & logic Design to transfer from pre-production R&D to high volume manufacturing New product for memory and emerging applications being launched ALD/AVD System Two PM QXP Platform QXP Reactor P 28
29 One Technology multiple applications Compound Compound Compound OVPD, PVPD Compound Nanoinstruments Black Magic II - PECVD Silicon MOCVD Planetary Reactor MOCVD Close Coupled Showerhead Silicon Hot Wall SiC CVD Two PM QXP Platform ALD/AVD System P 29
30 Dr. Bastian Marheineke VP Sales AIXTRON AG P 30
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