Environment Clean Room Specification ISO Class 4 *1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate. EFS EFB EJS EJB Slider Type Ball Screw Drive/Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Type High Rigidity Slider Type Ball Screw Drive/Series 11-EJS AC Servo Motor Type Page 524 E EM Page 55 AC Servo Motor Type Page 513 EY EYG Vacuum port Vacuum port * Port locations can be selected. EPY EPS Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. Vacuum suction Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. Vacuum suction 11-EFS ER EH ES ESH EY-X5 Support Guide/Series 11-EFG A support guide is designed to support workpieces with significant overhang. As the dimensions are the same as the EF series body, installation is simple and contributes to a reduction in installation and assembly labor. The standard equipped seal bands prevent grease from splashing and external foreign matter from entering. Application example EF (Drive side) Support guide Page 518 Caution After installing the actuator on the drive side, perform the alignment of the support guide. However, when the mounting flatness exceeds.1, install a floating mechanism separately on the workpiece installation surface (table). 11-EJS 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC 5
Series 11-EFSsPages 55, 513 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive/Series 11-EFS Particle Generation Measuring Method AC Servo Motor Clean Room Specification Particle Generation Characteristics The particle generation data for SMC Clean Series are measured in the following test method. Test Method (Example) Place the specimen in the acrylic resin chamber and operate it while supplying the same flow rate of clean air as the suction flow rate of the measuring instrument (28.3 /min). Measure the changes of the particle concentration over time until the number of cycles reaches the specified point. The chamber is placed in an ISO Class 5 equivalent clean bench. Measuring Conditions Chamber Measuring instrument Setting conditions Internal volume Supply air quality Description Minimum measurable particle diameter Suction flow rate Sampling time Interval time Sampling air flow 28.3 Same quality as the supply air for driving aser dust monitor (Automatic particle counter by lightscattering method).1 μm 28.3 /min 5 min 55 min 141.5 Air cleaning system Clean gas filter Clean bench (ISO Class 5 equivalent) Supply rate 28.3 /min Vacuum suction from vacuum port aser dust monitor (Suction flow rate 28.3 /min) Particle generation measuring circuit Evaluation Method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m 3. When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range. Note 1) Sampling air flow rate: Number of particles contained in 141.5 of air Note 2) Actuator: 1 million cycles 51
Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) Particle Generation Characteristics Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification 11-EFS16 Speed 5 mm/s 1 ISO Class 6 upper limit 1 11-EFS25 Speed 5 mm/s 1 ISO Class 6 upper limit 1 EFS EFB EJS EJB Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 1 /min Suction flow rate: /min ISO Class 5 upper limit ISO Class 4 upper limit Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 2 /min Suction flow rate: /min ISO Class 5 upper limit ISO Class 4 upper limit E EM EY EYG ES ESH 1 1 EPY EPS 1 Suction flow rate: 3 /min 1.1.2.3.4.5.6 Particle diameter [µm] 11-EFS32 Speed 5 mm/s 1 Suction flow rate: 3 /min 1.1.2.3.4.5.6 Particle diameter [µm] 11-EFS4 Speed 5 mm/s ER EH EY-X5 1 ISO Class 6 upper limit 1 ISO Class 6 upper limit 11-EFS Particle concentration [particles/m 3 ] Suction flow rate: /min 1 ISO Class 5 upper limit 1 ISO Class 4 upper limit 1 Suction flow rate: 2 /min 1 Suction flow rate: 3 /min 1 1.1.2.3.4.5.6 Particle diameter [µm] Particle concentration [particles/m 3 ] 1 1 1 1 1 Suction flow rate: /min Suction flow rate: 4 /min Suction flow rate: 2 /min Suction flow rate: 5 /min Particle diameter [µm] ISO Class 5 upper limit ISO Class 4 upper limit 1.1.2.3.4.5.6 11-EJS 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC 52
Series 11-EFS AC Servo Motor Clean Room Specification Particle Generation Characteristics AC Servo Motor (1/2/4 W) 11-EFS25 Speed 9 mm/s 1 11-EFS32 Speed 1 mm/s 1 ISO Class 6 upper limit ISO Class 6 upper limit 1 1 Suction flow rate: /min Suction flow rate: /min Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 3 /min Suction flow rate: 5 /min ISO Class 5 upper limit ISO Class 4 upper limit Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 3 /min ISO Class 5 upper limit Suction flow rate: 6 /min ISO Class 4 upper limit 1 1 1.1.2.3.4.5.6 Particle diameter [µm] 1.1.2.3.4.5.6 Particle diameter [µm] 11-EFS4 Speed 1 mm/s 1 1 ISO Class 6 upper limit ISO Class 5 upper limit Suction flow rate: /min Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 8 /min Suction flow rate: 5 /min Suction flow rate: 1 /min ISO Class 4 upper limit 1 1.1.2.3.4.5.6 Particle diameter [µm] A 53
Selection Procedure Electric Actuator/Slider Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Ball Screw Drive/Series EFS Belt Drive/Series EFB Ball Screw Drive/Series 11-EFS Clean Room Specification Model Selection Series EFSsPage 53 Series EFBsPage 81 Series 11-EFSsPage 55 Step 1 Check the work load speed. Step 2 Check the cycle time. Step 3 Check the allowable moment. Selection Example Operating conditions Step 2 3 Workpiece mass: 5 [kg] Workpiece mounting condition: Speed: 3 [mm/s] W Acceleration/Deceleration: 3 [mm/s 2 ] Stroke: 2 [mm] Mounting orientation: upward Step 1 Check the work load speed. <Speed Work load graph> (Pages 3 to 33) Select the target model based on the workpiece mass and speed with reference to the <Speed Work load graph>. Selection example) The EFS25A-2 is temporarily selected based on the graph shown on the right side. Check the cycle time. Calculate the cycle time using the following calculation method. Cycle time: T can be found from the following equation. T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. T1 = V/a1 [s] T4 =.2 [s] Mep m T3 = V/a2 [s] T2: Constant speed time can be found from the following equation. T2 =.5 V (T1 + T3) [s] V T4: Settling time varies depending on the conditions such as motor types, load and in position of the step data. Therefore, calculate the settling time with reference to the following value. Step 3 Check the guide moment. Overhang: 3 [mm] 1 Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 3/3 =.1 [s], T3 = V/a2 = 3/3 =.1 [s].5 V (T1 + T3) T2 = V 2.5 3 (.1 +.1) = 3 =.57 [s] T4 =.2 [s] Therefore, the cycle time can be obtained as follows. T = T1 + T2 + T3 + T4 =.1 +.57 +.1 +.2 =.97 [s] 2 1 5 5 mm/s 2 1 mm/s 2 3 mm/s 2 3 25 2 1 5 2 4 6 8 1 12 <Speed Work load graph> (EFS25/Step motor) a1 T1 ead 6: EFS25B ead 12: EFS25A ead 2: EFS25H a2 T2 T3 T4 : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s 2 ] (Operating condition) a2: Deceleration [mm/s 2 ] (Operating condition) Time [s] T1: Acceleration time [s] Time until reaching the set speed T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed Based on the above calculation result, the EFS25A-2 is selected. 5 1 2 * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 37). 29
Speed Work oad Graph (Guide) For Step Motor (Servo/24 VDC) ECP6, ECP1, ECPMJ EFS16/Ball Screw Drive Model Selection Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification For the ECPA, refer to page 31. The following graph shows the values when moving force is 1%. 16 14 12 1 8 6 4 2 1 2 3 4 5 6 7 8 EFS25/Ball Screw Drive 6 4 2 1 2 3 4 5 6 EFS EFB EJS EJB E EM EY EYG 3 2 ES ESH 25 2 1 5 ead H 1 5 ead H EPY EPS ER 2 4 6 8 1 12 EFS32/Ball Screw Drive 5 1 2 3 4 5 6 3 EH EY-X5 11-EFS 4 3 2 1 ead H 2 1 ead H 11-EJS 25A- 2 4 6 8 1 12 EFS4/Ball Screw Drive 7 6 5 4 3 2 ead H 1 2 4 6 8 1 12 1 2 3 4 5 6 3 2 1 /ead H 1 2 3 4 5 6 3 AT3 Motorless ECYM ECYU ECSS-T ECS EC
Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Speed Work oad Graph (Guide) For Step Motor (Servo/24 VDC) ECPA The following graph shows the values when moving force is 1%. EFS16/Ball Screw Drive For the ECP6/ECP1/ ECPMJ, refer to page 3. 16 14 12 1 8 6 4 2 1 2 3 4 5 6 7 8 EFS25/Ball Screw Drive 6 4 2 1 2 3 4 5 6 3 25 2 1 5 ead H 2 1 5 ead H 2 4 6 8 1 12 EFS32/Ball Screw Drive 1 2 3 4 5 6 5 3 4 3 2 1 ead H 2 1 ead H 2 4 6 8 1 12 EFS4/Ball Screw Drive 1 2 3 4 5 6 7 6 5 4 3 2 1 ead H 3 2 1 ead H 31 2 4 6 8 1 12 1 2 3 4 5 6
Speed Work oad Graph (Guide) For Step Motor (Servo/24 VDC) ECP6, ECP1, ECPMJ The following graph shows the values when moving force is 1%. EFB/Belt Drive Model Selection Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification 2 18 16 14 12 1 8 6 4 2 EFB25 EFB16 EFB32 5 1 2 EFS EFB EJS EJB E EM EY EYG ES ESH For Step Motor (Servo/24 VDC) ECPA EFB/Belt Drive The following graph shows the values when moving force is 1%. EPY EPS 14 12 EFB32 1 8 6 4 EFB25 2 EFB16 5 1 2 AT3 Motorless ECYM ECYU ECSS-T ECS EC ER EH EY-X5 11-EFS 11-EJS 25A- 32
Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Speed Work oad Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 25%. EFS16A/Ball Screw Drive 12 6 1 8 6 4 4 2 2 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 EFS25A/Ball Screw Drive 1 2 1 ead H 5 5 ead H 2 4 6 8 1 12 1 2 3 4 5 6 7 8 9 Servo Motor (24 VDC) The following graph shows the values when moving force is 25%. EFB/Belt Drive 4 2 EFB25 EFB16 33 5 1 2
Model Selection Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 Orientation oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] Model EF16 EF25 EF32 EF4 EFS EFB 1 X 1 [mm] 2 1 5 1 [mm] 2 1 5 1 [mm] 2 1 5 1 [mm] 2 1 5 EJS EJB E 2 4 6 8 1 12 14 16 4 8 12 16 2 24 1 2 3 4 5 1 2 3 4 5 6 EM /Bottom 2 m Mer Y 2 [mm] 1 8 6 4 2 2 4 6 8 1 12 14 16 2 [mm] 1 8 6 4 2 4 8 12 16 2 24 2 [mm] 1 8 6 4 2 1 2 3 4 5 2 [mm] 1 8 6 4 2 1 2 3 4 5 6 EY EYG ES ESH EPY EPS 3 Mep m Z 3 [mm] 2 1 5 3 [mm] 2 1 5 3 [mm] 2 1 5 3 [mm] 2 1 5 ER EH 2 4 6 8 1 12 14 16 4 8 12 16 2 24 1 2 3 4 5 1 2 3 4 5 6 EY-X5 4 X 4 [mm] 2 1 5 4 [mm] 2 1 5 4 [mm] 2 1 5 4 [mm] 2 1 5 11-EFS 11-EJS 2 4 6 8 1 12 14 16 4 8 12 16 2 24 1 2 3 4 5 1 2 3 4 5 6 25A- Wall 5 Mey m 6 Y Z 5 [mm] 6 [mm] 2 1 5 2 4 6 8 1 12 14 16 1 8 6 4 2 2 4 6 8 1 12 14 16 6 [mm] 5 [mm] 2 1 5 5 [mm] 2 1 5 4 8 12 16 2 24 1 2 3 4 5 1 8 6 4 2 4 8 12 16 2 24 6 [mm] 1 8 6 4 2 6 [mm] 5 [mm] 2 1 5 1 2 3 4 5 6 1 8 6 4 2 1 2 3 4 5 1 2 3 4 5 6 34 AT3 Motorless ECYM ECYU ECSS-T ECS EC
Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 Orientation oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] Model EF16 EF25 EF32 EF4 7 m Mep Y 7 [mm] 1 5 1 2 3 4 5 7 [mm] 1 5 5 1 7 [mm] 1 5 5 1 2 7 [mm] 1 5 5 1 2 25 3 8 m Mey Z 8 [mm] 1 5 1 2 3 4 5 8 [mm] 1 5 5 1 8 [mm] 1 5 5 1 2 8 [mm] 1 5 5 1 2 25 3 Calculation of Guide oad Factor 1. Decide operating conditions. Model: EFS/EFB Size: 16/25/32/4 Mounting orientation: /Bottom/Wall/ Example 1. Operating conditions Model: EFS4 Size: 4 Mounting orientation: Acceleration [mm/s 2 ]: 3 : 2 Work load center position [mm]: Xc =, Yc = 5, Zc = 2 2. Select the graphs for horizontal of the EF4 on page 34. Acceleration [mm/s 2 ]: a : m Work load center position [mm]: Xc/Yc/Zc 2. Select the target graph with reference to the model, size and mounting orientation. 3. Based on the acceleration and work load, obtain the overhang [mm]: x/y/z from the graph. 4. Calculate the load factor for each direction. αx = Xc/x, αy = Yc/y, αz = Zc/z 5. Confirm the total of αx, αy and αz is 1 or less. αx + αy + αz 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. 1. z 3. Wall x 2. Bottom x Mounting orientation z y y x 4. 3. x = 4 mm, y = 25 mm, z = mm 4. The load factor for each direction can be obtained as follows. αx = /4 = αy = 5/25 =.2 αz = 2/ =.13 5. αx + αy + αz =.33 1 z y x z y 2 1 2 8 z 1 [mm] 1 2 [mm] 6 4 3 [mm] 1 5 x y 2 5 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 35
Model Selection Series EF Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Table Accuracy A side B side q w C side D side Table Displacement (Reference Value).8 Model Traveling parallelism [mm] (Every 3 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side EF16.5.3 EF25.5.3 EF32.5.3 EF4.5.3 Note) Traveling parallelism does not include the mounting surface accuracy. EFS EFB EJS EJB E EM EY EYG W Displacement [mm].6.4.2 EF16 ( = 2 mm) EF25 ( = 25 mm) EF4 ( = 37 mm) EF32 ( = 3 mm) ES ESH EPY EPS ER EH.25 1 2 3 4 5.12 oad W [N] Note 1) This displacement is measured when a mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately. Overhang Displacement Due to Table Clearance (Reference Value) Basic type High precision type 25A- 11-EJS 11-EFS EY-X5 Displacement [mm] EF16.2 EF25..1 EF4.5 EF32 1 2 3 Overhang distance [mm] Displacement [mm].1 EF16.8 EF25.6.4 EF4.2 EF32 1 2 3 Overhang distance [mm] AT3 Motorless ECYM ECYU ECSS-T ECS EC 36
Series EFSsPage 67 Selection Procedure Electric Actuator/Slider Type Series 11-EFSsPage 513 AC Servo Motor Ball Screw Drive/Series EFS Ball Screw Drive/Series 11-EFS Model Selection Clean Room Specification Step 1 Check the work load speed. Step 2 Check the cycle time. Step 3 Check the allowable moment. Selection Example Operating conditions 3 Workpiece mass: 45 [kg] Speed: 3 [mm/s] Acceleration/Deceleration: 3 [mm/s 2 ] Stroke: 2 [mm] Mounting position: upward Mep m Overhang: 3 [mm] Workpiece mounting condition: Step 1 Check the work load speed. <Speed Work load graph> (Page 38) Select the target model based on the workpiece mass and speed with reference to the <Speed Work load graph>. Selection example) The EFS4S4B-2 is temporarily selected based on the graph shown on the right side. Step 2 Check the cycle time. Calculate the cycle time using the following calculation method. Cycle time: T can be found from the following equation. T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. T1 = V/a1 [s] T4 =.5 [s] T3 = V/a2 [s] T2: Constant speed time can be found from the following equation..5 V (T1 + T3) T2 = [s] V T4: Settling time varies depending on the motor type and load. The value below is recommended. Step 3 Check the guide moment. 1 1 5 W Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 3/3 =.1 [s], T3 = V/a2 = 3/3 =.1 [s].5 V (T1 + T3) T2 = V 2.5 3 (.1 +.1) = 3 =.57 [s] T4 =.5 [s] Therefore, the cycle time can be obtained as follows. T = T1 + T2 + T3 + T4 =.1 +.57 +.1 +.5 =.82 [s] 1 mm/s 2 3 mm/s 2 7 6 5 4 3 2 1 2 4 6 8 1 <Speed Work load graph> (EFS4) a1 T1 ead 1: EFS4 B ead 2: EFS4 A a2 T2 T3 T4 : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s 2 ] (Operating condition) a2: Deceleration [mm/s 2 ] (Operating condition) Time [s] T1: Acceleration time [s] Time until reaching the set speed T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed Based on the above calculation result, the EFS4S4B-2 is selected. 5 mm/s 2 1 2 3 4 5 6 37
Model Selection Series EFS AC Servo Motor Clean Room Specification Speed Work oad Graph/Required Conditions for Regeneration Option (Guide) The allowable speed is restricted depending on the stroke. Select it by referring to Allowable Stroke Speed below. EFS25/Ball Screw Drive 3 25 2 1 5 ead 6: EFS25 B ead 12: EFS25 A ead 2: EFS25 H 2 4 6 8 1 12 14 16 Speed [mm/s] EFS32/Ball Screw Drive 6 5 4 3 2 1 7 6 5 4 3 2 1 ead 8: EFS32 B 2 4 6 8 1 12 14 16 Speed [mm/s] EFS4/Ball Screw Drive ead 1: EFS4 B 2 4 6 8 1 12 14 16 Speed [mm/s] A A ead 16: EFS32 A ead 24: EFS32 H ead 2: EFS4 A ead 3: EFS4 H A 2 1 5 ead 6: EFS25 B ead 12: EFS25 A Use a regeneration option. ead 2: EFS25 H 2 4 6 8 1 12 14 16 Speed [mm/s] 3 25 2 1 5 2 4 6 8 1 12 14 16 Speed [mm/s] 4 35 3 25 2 1 5 ead 8: EFS32 B A ead 1: EFS4 B A ead 16: EFS32 A ead 2: EFS4 A 2 4 6 8 1 12 14 16 Speed [mm/s] B A ead 24: EFS32 H ead 3: EFS4 H EFS EFB EJS EJB E EM EY EYG ES ESH EPY EPS ER EH EY-X5 11-EFS 11-EJS Required conditions for Regeneration option Regeneration option is required when using product above regeneration line in graph. (Order separately.) Allowable Stroke Speed Model AC servo motor EFS25 1 W /l4 EFS32 2 W /l6 EFS4 4 W /l6 Regeneration Option Models Operating condition A B Model EC-MR-RB-32 EC-MR-RB-12 ead Stroke [mm] Symbol [mm] Up to 1 Up to 2 Up to 3 Up to 4 Up to 5 Up to 6 Up to 7 Up to 8 Up to 9 Up to 1 Up to 11 Up to 12 H 2 11 86 7 55 A 12 9 72 54 42 33 B 6 45 36 27 21 16 (Motor rotation speed) (45 rpm) (365 rpm) (27 rpm) (21 rpm) (165 rpm) H 24 12 93 75 61 51 A 16 1 8 62 5 41 34 B 8 5 4 31 25 2 17 (Motor rotation speed) (375 rpm) (3 rpm) (2325 rpm) (1875 rpm) (37 rpm) (1275 rpm) H 3 141 114 93 78 66 57 A 2 1 94 76 62 52 44 38 B 1 5 47 38 31 26 22 19 (Motor rotation speed) (3 rpm) (282 rpm) (228 rpm) (186 rpm) (6 rpm) (132 rpm) (114 rpm) 38 [mm/s] 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC
Series EFS AC Servo Motor Clean Room Specification Work oad Acceleration/Deceleration Graph (Guide) EFS25SlH/Ball Screw Drive EFS25SlH/Ball Screw Drive 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 225 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 2 4 6 8 1 1 2 3 4 EFS25SlA/Ball Screw Drive EFS25SlA/Ball Screw Drive 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 5 1 2 2 4 6 8 EFS25SlB/Ball Screw Drive EFS25SlB/Ball Screw Drive 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 5 1 2 5 1 39
Model Selection Series EFS AC Servo Motor Clean Room Specification Work oad Acceleration/Deceleration Graph (Guide) EFS32SlH/Ball Screw Drive 225 2 175 Duty ratio: 5% 125 Duty ratio: 1% 1 75 5 25 5 1 2 25 3 EFS32SlA/Ball Screw Drive EFS32SlH/Ball Screw Drive 225 2 175 Duty ratio: 5% 125 1 Duty ratio: 1% 75 5 25 1 2 3 4 5 EFS32SlA/Ball Screw Drive EFS EFB EJS EJB E EM EY EYG ES ESH EPY EPS 2 175 Duty ratio: 5% 125 Duty ratio: 1% 1 75 5 25 1 2 3 4 2 175 Duty ratio: 5% 125 1 Duty ratio: 1% 75 5 25 2 4 6 8 1 11-EJS 11-EFS EY-X5 EH ER EFS32SlB/Ball Screw Drive 2 Duty ratio: 5% 175 Duty ratio: 1% 125 1 75 5 25 1 2 3 4 EFS32SlB/Ball Screw Drive 2 Duty ratio: 5% 175 Duty ratio: 1% 125 1 75 5 25 5 1 2 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC 4
Series EFS AC Servo Motor Clean Room Specification Work oad Acceleration/Deceleration Graph (Guide) EFS4SlH/Ball Screw Drive EFS4SlH/Ball Screw Drive 225 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 225 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 5 1 2 25 3 1 2 3 4 5 6 7 EFS4SlA/Ball Screw Drive 225 EFS4SlA/Ball Screw Drive 225 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 1 2 3 4 5 5 1 EFS4SlB/Ball Screw Drive 225 EFS4SlB/Ball Screw Drive 225 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 1 2 3 4 5 6 1 2 3 41
Model Selection Series EFS AC Servo Motor Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s 2 Orientation oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] Model EFS25Sl EFS32Sl EFS4Sl EFS EFB EJS EJB 1 X 1 [mm] 1 5 1 [mm] 1 5 1 [mm] 1 5 E 5 1 2 1 2 3 4 1 2 3 4 5 6 EM /Bottom 2 m Mer Y 2 [mm] 1 8 6 4 2 5 1 2 2 [mm] 1 8 6 4 2 1 2 3 4 2 [mm] 1 8 6 4 2 1 2 3 4 5 6 EY EYG ES ESH EPY EPS 3 Mep m Z 3 [mm] 1 5 3 [mm] 1 5 3 [mm] 1 5 ER EH 5 1 2 1 2 3 4 1 2 3 4 5 6 EY-X5 4 X 4 [mm] 1 5 4 [mm] 1 5 4 [mm] 1 5 11-EFS 11-EJS 5 1 2 1 2 3 4 1 2 3 4 5 6 25A- Wall 5 Mey m 6 Y Z 5 [mm] 6 [mm] 1 5 5 1 2 1 8 6 4 2 5 1 2 5 [mm] 6 [mm] 1 5 1 2 3 4 1 8 6 4 2 1 2 3 4 5 [mm] 6 [mm] 1 5 1 2 3 4 5 6 1 8 6 4 2 1 2 3 4 5 6 AT3 Motorless ECYM ECYU ECSS-T ECS EC 42
Series EFS AC Servo Motor Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Orientation Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s 2 oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] Model EFS25Sl EFS32Sl EFS4Sl 7 Y 7 [mm] 1 5 7 [mm] 1 5 7 [mm] 1 5 m Mep 5 1 2 1 2 3 4 1 2 3 4 5 6 8 Z 8 [mm] 1 5 8 [mm] 1 5 8 [mm] 1 5 m Mey 2 4 6 8 1 5 1 2 1 2 3 1. Decide operating conditions. Model: EFS Size: 25/32/4 Mounting orientation: /Bottom/Wall/ Example 1. Operating conditions Model: EFS4 Size: 4 Mounting orientation: Acceleration [mm/s 2 ]: 3 : 2 Work load center position [mm]: Xc =, Yc = 5, Zc = 2 2. Select the graphs for horizontal of the EFS4 on page 42. Calculation of Guide oad Factor Acceleration [mm/s 2 ]: a : m Work load center position [mm]: Xc/Yc/Zc 2. Select the target graph with reference to the model, size and mounting orientation. 3. Based on the acceleration and work load, obtain the overhang [mm]: x/y/z from the graph. 4. Calculate the load factor for each direction. αx = Xc/x, αy = Yc/y, αz = Zc/z 5. Confirm the total of αx, αy and αz is 1 or less. αx + αy + αz 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. 1. z 3. Wall x 2. Bottom x Mounting orientation z y y x 4. 3. x = 25 mm, y = 18 mm, z = 1 mm 4. The load factor for each direction can be obtained as follows. αx = /25 = αy = 5/18 =.27 αz = 2/1 =.2 5. αx + αy + αz =.47 1 z y x z y 1 8 1 [mm] 1 5 2 [mm] 6 4 3 [mm] 1 z 5 x 2 y 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 43
Model Selection Series EFS AC Servo Motor Clean Room Specification Table Accuracy B side A side Traveling parallelism [mm] (Every 3 mm) EFS EFB D side w q C side Model q C side traveling parallelism to A side w D side traveling parallelism to B side EFS25.5.3 EFS32.5.3 EFS4.5.3 Note) Traveling parallelism does not include the mounting surface accuracy. EJS EJB E Table Displacement (Reference Value).8 EM EY EYG W Displacement [mm].6.4.2 EFS25 ( = 25 mm) EFS4 ( = 37 mm) EFS32 ( = 3 mm) ES ESH EPY EPS ER EH.25 1 2 3 4 5.12 oad W [N] Note 1) This displacement is measured when a mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately. Overhang Displacement Due to Table Clearance (Reference Value) Basic type High precision type 25A- 11-EJS 11-EFS EY-X5 Displacement [mm] EF16.2 EF25..1 EF4.5 EF32 1 2 3 Overhang distance [mm] Displacement [mm].1 EF16.8 EF25.6.4 EF4.2 EF32 1 2 3 Overhang distance [mm] AT3 Motorless ECYM ECYU ECSS-T ECS EC 44
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification Series 11-EFS EFS16, 25, 32, 4 Refer to page 29 for model selection and page 51 for particle generation characteristics. 11 EFS H 16 B 1 S 1 6N 1 Clean Series 11 Vacuum type q How to Order w e r t y u i o!!1!2 q Accuracy Nil Basic type H High precision type r ead [mm] Symbol 11-EFS16 11-EFS25 11-EFS32 11-EFS4 A 1 12 16 2 B 5 6 8 1 t Stroke [mm] 5 5 to to 1 1 * Refer to the applicable stroke table. w Size 16 25 32 4 e Motor type Symbol Nil A Type Step motor (Servo/24 VDC) Servo motor (24 VDC) Caution Applicable size 11-EFS16 11-EFS25 11-EFS32 11-EFS4 V V V V Compatible controller/ driver ECP6 ECP1 ECPA ECPMJ V V ECA6 [CE-compliant products] q EMC compliance was tested by combining the electric actuator EF series and the controller EC series. The EMC depends on the configuration of the customer s control panel and the relationship with other electrical equipment and wiring. Therefore, conformity to the EMC directive cannot be certified for SMC components incorporated into the customer s equipment under actual operating conditions. As a result, it is necessary for the customer to verify conformity to the EMC directive for the machinery and equipment as a whole. w For the servo motor (24 VDC) specification, EMC compliance was tested by installing a noise filter set (EC-NFA). Refer to page 559 for the noise filter set. Refer to the ECA series Operation Manual for installation. e CC-ink direct input type (ECPMJ) is not CE-compliant. [U-compliant products] When conformity to U is required, the electric actuator and controller/driver should be used with a U131 Class 2 power supply. Applicable Stroke Table V: Standard Stroke Manufacturable [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 Model stroke range [mm] 11-EFS16 V V V V V V V V V V 5 to 5 11-EFS25 V V V V V V V V V V V V 5 to 6 11-EFS32 V V V V V V V V V V V V V V V V 5 to 8 11-EFS4 V V V V V V V V V V V V V V V V V V to 1 * Please consult with SMC for non-standard strokes as they are produced as special orders. Support Guide/Series EFG A support guide is designed to support workpieces with significant overhang. Page 518 The actuator and controller/driver are sold as a package. Confirm that the combination of the controller/driver and the actuator is correct. <Check the following before use.> q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). * Refer to the Operation Manual for using the products. Please download it via our website, http://www.smcworld.com 55 q w
Electric Actuator/Slider Type Ball Screw Drive Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification E EJS EJB EFS EFB y Motor option Nil Without option B With lock u Vacuum port Nil R R: Right *1 The standard cable should be used on fixed o Actuator cable length parts. For using on moving parts, select the robotic cable. Nil Without cable *2 Only available for the motor type Step 1 1.5 m Nil: eft motor. 3 3 m *3 Fix the motor cable protruding from the actuator to keep it unmovable. For details 5 5 m about fixing method, refer to Wiring/Cables 8 8 m * in the Electric Actuators Precautions. A 1 m *! Controller/Driver type *1 B m * Nil Without controller/driver!1 I/O cable length *1, Communication plug C 2 m * 6N ECP6/ECA6 NPN Nil Without cable (Without communication plug connector) *3 * Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 2) on pages 57 and 58. 6P 1N (Step data input type) ECP1 *2 PNP NPN 1 3 1.5 m 3 m *2 1P (Programless type) PNP 5 5 m *2 *2 *3 ECPMJ S Straight type communication plug connector!2 Controller/Driver mounting MJ (CC-ink direct input type) T T-branch type communication plug connector *3 Nil Screw mounting AN *2 *4 ECPA NPN D DIN rail mounting * *1 When Without controller/driver is selected for AP (Pulse input type) PNP controller/driver types, I/O cable cannot be selected. * DIN rail is not included. Order it separately. *1 For details about controller/driver and Refer to page 559 (For ECP6/ECA6), page 573 compatible motor, refer to the compatible (For ECP1) or page 587 (For ECPA) if I/O cable controller/driver below. is required. *2 Only available for the motor type Step motor. *2 When Pulse input type is selected for controller/ *3 Not applicable to CE. driver types, pulse input usable only with differential. *4 When pulse signals are open collector, order Only 1.5 m cables usable with open collector. the current limiting resistor (EC-PA-R-l) *3 For the ECPMJ, only Nil, S and T are on page 587 separately. selectable since I/O cable is not included. Compatible Controller/Driver Step data input type Step data input type eft Right CC-ink direct input type i Actuator cable type *1 Nil Without cable S Standard cable *2 R Robotic cable (Flexible cable) *3 Programless type Pulse input type EM EY EYG ES ESH EPY EPS ER EH EY-X5 11-EFS 11-EJS 25A- Type Series ECP6 ECA6 ECPMJ ECP1 ECPA Features Compatible motor Step motor (Servo/24 VDC) Value (Step data) input Standard controller Servo motor (24 VDC) CC-ink direct input Capable of setting up operation (step data) without using a PC or teaching box Step motor (Servo/24 VDC) Operation by pulse signals Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 551 Page 551 Page 591 Page 567 Page 581 56 A AT3 Motorless ECYM ECYU ECSS-T ECS EC
Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Specifications Step Motor (Servo/24 VDC) Actuator specifications Electric specifications ock unit specifications Model 11-EFS16 11-EFS25 11-EFS32 11-EFS4 Stroke [mm] Note 1) 5 to 5 5 to 6 5 to 8 to 1 Note 2) ECP6/ECP1/ECPMJ 14 25 3 45 5 55 65 Work load ECPA 9 1 2 2 4 45 5 6 [kg] 2 4 7.5 1 2 2 23 Speed [mm/s] Note 2) 1 to 5 5 to 25 12 to 5 6 to 25 16 to 5 8 to 25 2 to 5 1 to 25 Max. acceleration/deceleration [mm/s 2 ] 3 Positioning Basic type ±.2 repeatability [mm] High precision type ±. ost motion Note 3) Basic type.1 or less [mm] High precision type.5 or less ead [mm] 1 5 12 6 16 8 2 1 Impact/Vibration resistance [m/s 2 ] Note 4) 5/2 Actuation type Ball screw Guide type inear guide Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) Grease Ball screw /inear guide portion ow particle generation grease Motor size 28 42 56.4 Motor type Step motor (Servo/24 VDC) Encoder Incremental A/B phase (8 pulse/rotation) Rated voltage [V] 24 VDC ±1% Power consumption [W] Note 6) 22 38 5 1 Standby power consumption when operating [W] Note 7) 18 16 44 43 Max. instantaneous power consumption [W] Note 8) 51 57 123 141 Type Note 9) Non-magnetizing lock Holding force [N] 2 39 78 7 18 216 113 225 Power consumption [W] Note 1) 2.9 5 5 5 Rated voltage [V] 24 VDC ±1% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) Speed changes according to the controller/driver type and work load. Check Speed Work oad Graph (Guide) on pages 3 and 31. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 1% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation. Note 4) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 5) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 6) The power consumption (including the controller) is for when the actuator is operating. Note 7) The standby power consumption when operating (including the controller) is for when the actuator is stopped in the set position during the operation. Note 8) The maximum instantaneous power consumption (including the controller) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 9) With lock only Note 1) For an actuator with lock, add the power consumption for the lock. 57
Electric Actuator/Slider Type Ball Screw Drive Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Specifications Servo Motor (24 VDC) Model 11-EFS16A 11-EFS25A Stroke [mm] Note 1) 5 to 5 5 to 6 Actuator specifications Electric specifications ock unit specifications Work load Note 2) [kg] 7 1 11 18 2 4 2.5 5 Speed [mm/s] Note 2) 1 to 5 1 to 25 2 to 5 1 to 25 Max. acceleration/deceleration [mm/s 2 ] 3 Positioning Basic type ±.2 repeatability [mm] High precision type ±. ost motion Note 3) Basic type.1 or less [mm] High precision type.5 or less ead [mm] 1 5 12 6 Impact/Vibration resistance [m/s 2 ] Note 4) 5/2 Actuation type Ball screw Guide type inear guide Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) Grease Ball screw /inear guide portion ow particle generation grease Motor size 28 42 Motor output [W] 3 36 Motor type Servo motor (24 VDC) Encoder Incremental A/B (8 pulse/rotation)/z phase Rated voltage [V] 24 VDC ±1% Power consumption [W] Note 6) 63 12 Standby power consumption when operating [W] Note 7) 4/ 9 4/ 9 Max. instantaneous power consumption [W] Note 8) 7 113 Type Note 9) Non-magnetizing lock Holding force [N] 2 39 78 7 Power consumption [W] Note 1) 2.9 5 Rated voltage [V] 24 VDC ±1% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) Check Speed Work oad Graph (Guide) on page 33 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 1% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation. Note 4) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 5) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 6) The power consumption (including the controller) is for when the actuator is operating. Note 7) The standby power consumption when operating (including the controller) is for when the actuator is stopped in the set position during operation. Note 8) The maximum instantaneous power consumption (including the controller) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 9) With lock only Note 1) For an actuator with lock, add the power consumption for the lock. Weight EFS EFB EJS EJB E EM EY EYG ES ESH EPY EPS ER EH EY-X5 11-EFS 11-EJS 25A- Series 11-EFS16 Stroke [mm] 5 1 2 25 3 35 4 45 5 Product weight [kg].83.9.98 1.5 1.13 1.2 1.28 1.35 1.43 1.5 Additional weight with lock [kg].12 Series 11-EFS25 Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 Product weight [kg] 1.7 1.84 1.98 2.12 2.26 2.4 2.54 2.68 2.82 2.96 3.1 3.24 Additional weight with lock [kg].26 Series 11-EFS32 Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 Product weight [kg] 3. 3.35 3.55 3.75 3.95 4. 4.35 4.55 4.75 4.95 5. 5.35 5.55 5.75 5.95 6. Additional weight with lock [kg].53 Series 11-EFS4 Stroke [mm] 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7. 7.33 7.61 7.89 8.17 8.45 8.75 9.1 9.29 9.57 9.85 1.13 Additional weight with lock [kg].53 58 AT3 Motorless ECYM ECYU ECSS-T ECS EC
Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive 11-EFS16 Body mounting Note 1) reference plane ø3h9 +.25 ( ) depth 3 4 x M4 x.7 thread depth 6.4 (72) 4 24 28 39.4 3.5 +.25 ( ) 3H9 depth 3 4 27 2 7 (37) A (Table traveling distance) Note 2) 37 (11) (41) [39] Stroke 39 [(41)] 4 [2] [Origin] Note 4) Origin Note 3) 2 [4] 46 9.2 Cable length 25 (2.4) 65 Motor cable (2 x ø5) Step motor Servo motor n x ø3.5 34 2 2 24 2 6 5.5 M4 x.7 thread depth 7 (F.G. terminal) 33 4 6.5 Vacuum port M5 x.8 x 5 Motor option: With lock (2) Cable length 25 65 ock cable (ø3.5) 2 24 4 +.25 ( ) 3H9 depth 3 D x 1 (= E) B 1 F 8 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 2 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. Dimensions [mm] Model Without lock With lock A B n D E F 11-EFS16l-5l 247 289 56 13 4 11-EFS16l-1l 297 339 16 18 4 11-EFS16l-l 347 389 6 23 4 11-EFS16l-2l 397 439 26 28 6 2 2 11-EFS16l-25l 447 489 256 33 6 2 2 11-EFS16l-3l 497 539 36 38 8 3 3 4 11-EFS16l-35l 547 589 356 43 8 3 3 11-EFS16l-4l 597 639 46 48 1 4 4 11-EFS16l-45l 647 689 456 53 1 4 4 11-EFS16l-5l 697 739 56 58 12 5 5 59
Electric Actuator/Slider Type Ball Screw Drive Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive 11-EFS25 Body mounting Note 1) reference plane +.25 ( ) ø3h9 depth 3 4 x M5 x.8 thread depth 8.5 (12) 64 45 38 EFS EFB 6.5 58 38 24 57.5 5 3.5 3H9 depth 3 Cable length 25 (2.4) 65 Motor cable (2 x ø5) Step motor Servo motor n x ø4.5 ock cable (ø3.5) 2 48 EJS EJB 1 (52) A (Table traveling distance) Note 2) (56) [54] Stroke 4 [2] [Origin] Note 4) Origin Note 3) 54 [(56)] 2 [4] +.25 ( ) 52 (1.5) 34 E EM EY EYG 6 M4 x.7 thread depth 8 (F.G. terminal) 48 38.5 13.9 Vacuum port Rc1/8 Motor option: With lock (16.5) Cable length 25 65 ES ESH EPY EPS 4 +.25 3H9 ( ) depth 3 2 2 24 2 24 ER EH D x 12 (= E) B 12 1 F EY-X5 11-EFS Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. Dimensions [mm] Model Without lock With lock A B n D E F 11-EFS25l-5l 285.5 33.5 56 16 4 2 11-EFS25l-1l 335.5 38.5 16 21 4 11-EFS25l-l 385.5 43.5 6 26 4 11-EFS25l-2l 435.5 48.5 26 31 6 2 24 11-EFS25l-25l 485.5 53.5 256 36 6 2 24 11-EFS25l-3l 535.5 58.5 36 41 8 3 36 11-EFS25l-35l 585.5 63.5 356 46 8 3 36 35 11-EFS25l-4l 635.5 68.5 46 51 8 3 36 11-EFS25l-45l 685.5 73.5 456 56 1 4 48 11-EFS25l-5l 735.5 78.5 56 61 1 4 48 11-EFS25l-55l 785.5 83.5 556 66 12 5 6 11-EFS25l-6l 835.5 88.5 66 71 12 5 6 11-EJS 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC 51
Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive 11-EFS32 Body mounting Note 1) reference plane ø5h9 depth 5 +.3 ( ) 4 x M6 x 1 thread depth 9.9 (122) 7 42 44 6 5.5 +.3 ( ) 5H9 depth 5 7 48 1 (62) A (Table traveling distance) Note 2) 62 (142) (66) [64] Stroke 64 [(66)] 4 [2] [Origin] Note 4) Origin Note 3) 2 [4] 41.8 Cable length 25 (2.4) 65 2 6 46.8 n x ø5.5 6 79 3 Motor option: With lock (194) Motor cable (2 x ø5) Cable length 25 65 Step motor 2 2 2 6.5 7.5 M4 x.7 thread depth 8 (F.G. terminal) 14.9 Vacuum port Rc1/8 ock cable (ø3.5) 2 6 +.3 5H9 ( ) depth 5 D x (= E) B A Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. 511 Dimensions [mm] Model Without lock With lock A B n D E 11-EFS32l-5l 332 384 56 18 4 11-EFS32l-1l 382 434 16 23 4 11-EFS32l-l 432 484 6 28 4 11-EFS32l-2l 482 534 26 33 6 2 3 11-EFS32l-25l 532 584 256 38 6 2 3 11-EFS32l-3l 582 634 36 43 6 2 3 11-EFS32l-35l 632 684 356 48 8 3 45 11-EFS32l-4l 682 734 46 53 8 3 45 11-EFS32l-45l 732 784 456 58 8 3 45 11-EFS32l-5l 782 834 56 63 1 4 6 11-EFS32l-55l 832 884 556 68 1 4 6 11-EFS32l-6l 882 934 66 73 1 4 6 11-EFS32l-65l 932 984 656 78 12 5 75 11-EFS32l-7l 982 134 76 83 12 5 75 11-EFS32l-75l 132 184 756 88 12 5 75 11-EFS32l-8l 182 1134 86 93 14 6 9
Electric Actuator/Slider Type Ball Screw Drive Series 11-EFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive 11-EFS4 ø6h9 +.3 ( ) (17) depth 7 16 Body mounting Note 1) 4 x M8 x 1.25 reference plane 6 thread depth 13 58 EFS EFB 74 7 +.3 ( ) 6H9 depth 7 E 9 61 13 (86) (9) [88] 4 [2] Stroke A (Table traveling distance) Note 2) [Origin] Note 4) Origin Note 3) 86 (165) 88 [(9)] (3.1) 2 [4] 48.5 Cable length 25 8 (68) 2 2 EJS EJB 65 EM EY EYG 8 31 M4 x.7 thread depth 8 (F.G. terminal) 68 53.8 12.9 Vacuum port Rc1/8 Motor option: With lock (214) Motor cable (2 x ø5) 65 Cable length 25 ES ESH EPY EPS n x ø6.6 7 +.3 ( ) 6H9 depth 6 ock cable (ø3.3) Motor cable (2 x ø5) 2 2 2 ER EH 76 D x (= E) B 6 EY-X5 11-EFS Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. Dimensions [mm] Model Without lock With lock A B n D E 11-EFS4l-l 56 555 6 328 4 11-EFS4l-2l 556 65 26 378 6 2 3 11-EFS4l-25l 66 655 256 428 6 2 3 11-EFS4l-3l 656 75 36 478 6 2 3 11-EFS4l-35l 76 755 356 528 8 3 45 11-EFS4l-4l 756 85 46 578 8 3 45 11-EFS4l-45l 86 855 456 628 8 3 45 11-EFS4l-5l 856 95 56 678 1 4 6 11-EFS4l-55l 96 955 556 728 1 4 6 11-EFS4l-6l 956 66 778 1 4 6 11-EFS4l-65l 16 5 656 828 12 5 75 11-EFS4l-7l 6 1 76 878 12 5 75 11-EFS4l-75l 116 15 756 928 12 5 75 11-EFS4l-8l 16 125 86 978 14 6 9 11-EFS4l-85l 126 1255 856 128 14 6 9 11-EFS4l-9l 1256 135 96 178 14 6 9 11-EFS4l-95l 136 1355 956 1128 16 7 11-EFS4l-1l 1356 145 16 1178 16 7 512 11-EJS 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC
Refer to page 37 for model selection and page 51 for particle generation characteristics. 11 EFS i Cable type Note 1) Note 2) Nil Without cable S Standard cable R Robotic cable (Flexible cable) Note 1) The motor and encoder cables are included. (The lock cable is also included when the motor with lock option is selected.) Note 2) Standard cable entry direction is (B) Counter axis side. (Refer to page 614 for details.) Compatible Driver AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification Series 11-EFS EFS25, 32, 4 o Cable length Note 3) Nil Without cable 2 2 m 5 5 m A 1 m Note 3) The length of the encoder, motor and lock cables are the same. How to Order S7 ECSB -S7 AC servo motor 2 32 ECSC -S7 (Absolute encoder) ECSS -S7 ECSB2-S8 S8 4 4 ECSC2-S8 ECSS2-S8 * For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. 25 S2 B 1 S 2 Clean Series 11 Vacuum type q q Accuracy e Motor type Nil Basic type Symbol Type Output [W] Actuator size Compatible driver H High precision type S2 * AC servo motor 1 25 ECSA -S1 S3 (Incremental 2 32 ECSA -S3 S4 encoder) 4 4 ECSA2-S4 ECSB -S5 w y Motor option Size S6 * 1 25 ECSC -S5 Nil Without option 25 ECSS -S5 B With lock 32 4 u Vacuum port* Applicable Stroke Table V: Standard Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 Model 11-EFS25 V V V V V V V V V V V V 11-EFS32 V V V V V V V V V V V V V V V V 11-EFS4 V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders. Pulse input type /Positioning type H A1 w e r t y u i o!!1 Pulse input type!1 I/O cable length [m] Note 4) Nil Without cable H Without cable (Connector only) 1 1.5 Note 4) When Without driver is selected for driver type, only Nil: Without cable can be selected. Refer to page 6 if I/ O cable is required. (Options are shown on page 6.) r ead [mm] Symbol 11-EFS25 11-EFS32 11-EFS4 A 12 16 2 B 6 8 1 Nil eft R Right D Both left and right * Select D for the vacuum port for suction of 5 /min (ANR) or more. CC-ink direct input type t Stroke [mm] 5 5 to to 1 1 * Refer to the applicable stroke table. R: Right Nil: eft! Driver type Compatible Power supply Size driver voltage [V] 25 32 4 Nil Without driver V V V A1 ECSA1-S 1 to 12 V V A2 ECSA2-S 2 to 23 V V V B1 ECSB1-S 1 to 12 V V B2 ECSB2-S 2 to 23 V V V C1 ECSC1-S 1 to 12 V V C2 ECSC2-S 2 to 23 V V V S1 ECSS1-S 1 to 12 V V S2 ECSS2-S 2 to 23 V V V * When the driver type is selected, the cable is included. Select cable type and cable length. Example) S2S2: Standard cable (2 m) + Driver (ECSS2) S2.: Standard cable (2 m) Nil.: Without cable and driver Support Guide/Series EFG A support guide is designed to support workpieces with significant overhang. Page 518 SSCNET # type Driver type Series ECSA ECSB ECSC ECSS Number of point tables Up to 7 Up to 255 (2 stations occupied) Pulse input v v Applicable network CC-ink SSCNET # Control encoder Incremental Absolute Absolute Absolute 17-bit encoder 18-bit encoder 18-bit encoder 18-bit encoder Communication function USB communication USB communication, RS422 communication USB communication, RS422 communication USB communication Power supply voltage [V] 1 to 12 VAC (5/6 Hz), 2 to 23 VAC (5/6 Hz) Reference page Page 598 513
Electric Actuator/Slider Type Ball Screw Drive Series 11-EFS AC Servo Motor Clean Room Specification Specifications 11-EFS25, 32, 4 AC Servo Motor Actuator specifications Electric specifications ock unit specifications Model 11-EFS25S 2 6 11-EFS32S 3 7 11-EFS4S 4 8 Stroke [mm] Note 1) 5 to 6 5 to 8 to 1 Note 2) 2 2 4 45 5 6 8 1 2 3 Note 3) Max. speed [mm/s] Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) For details, refer to Speed Work oad Graph (Guide) on page 38. Note 3) The allowable speed changes according to the stroke. Note 4) A reference value for correcting an error in reciprocal operation. Note 5) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test Weight Stroke range Max. acceleration/deceleration [mm/s 2 ] Positioning repeatability [mm] Up to 4 9 45 1 5 1 5 41 to 5 72 36 1 5 1 5 51 to 6 54 27 8 4 1 5 61 to 7 62 31 94 47 71 to 8 5 25 76 38 81 to 9 62 31 91 to 1 52 26 5 (Refer to pages 39 to 41 for limit according to work load and duty ratio.) Basic type ±.2 High precision type ±.1 ost motion [mm] Note 4) Basic type.1 or less High precision type.5 or less ead [mm] 12 6 16 8 2 1 Impact/Vibration resistance [m/s 2 ] Note 5) 5/2 Actuation type Ball screw Guide type inear guide Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) ISO Class 4 (ISO 14644-1) Cleanliness class Note 6) Class 1 (Fed.Std.29E) Grease Ball screw /inear guide portion ow particle generation grease Motor output/size 1 W/ 4 2 W/ 6 4 W/ 6 Motor type AC servo motor (1/2 VAC) Encoder Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 13172 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power 45 65 21 consumption [W] Note 7) 145 175 23 Standby power consumption 2 2 2 when operating [W] Note 8) 8 8 18 Max. instantaneous power consumption [W] Note 9) 445 725 1275 Type Note 1) Non-magnetizing lock Holding force [N] 131 255 197 385 33 66 Power consumption at 2 C [W] Note 11) 6.3 7.9 7.9 Rated voltage [V] 24 VDC 1% Series 11-EFS25S Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 Motor S2 2. 2.14 2.28 2.44 2.56 2.69 2.84 2.99 3.12 3.24 3.4 3.54 type S6 2.6 2.2 2.34 2.5 2.62 2.75 2.9 3.5 3.18 3.3 3.46 3.6 Additional weight with lock [kg] S2:.2/S6:.3 was performed with the actuator in the initial state.) Note 6) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 7) The power consumption (including the driver) is for when the actuator is operating. Note 8) The standby power consumption when operating (including the driver) is for when the actuator is stopped in the set position during the operation. Note 9) The maximum instantaneous power consumption (including the driver) is for when the actuator is operating. Note 1) Only when motor option With lock is selected. Note 11) For an actuator with lock, add the power consumption for the lock. Series 11-EFS32S Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 Motor S3 3.4 3.6 3.8 4. 4.2 4.4 4.6 4.8 5. 5.2 5.4 5.6 5.8 6. 6.2 6.4 type S7 3.34 3.54 3.74 3.94 4.14 4.34 4.54 4.74 4.94 5.14 5.34 5.54 5.74 5.94 6.14 6.34 Additional weight with lock [kg] S3:.4/S7:.7 Series 11-EFS4S Stroke [mm] 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 Motor S4 5.82 6.1 6.38 6.65 6.95 7.25 7.51 7.8 8.7 8.25 8.63 8.9 9.2 9.45 9.76 1.5 1.32 1.6 type S8 5.92 6.2 6.48 6.75 7.5 7.35 7.61 7.9 8.17 8.35 8.73 9. 9.3 9.55 9.86 1. 1.42 1.7 Additional weight with lock [kg] S4:.7/S8:.7 514 EFS EFB EJS EJB E EM EY EYG ES ESH EPY EPS ER EH EY-X5 11-EFS 11-EJS 25A- AT3 Motorless ECYM ECYU ECSS-T ECS EC