Single-axis Robot. ISB/SSPA Series. S, M sizes added to the SSPA Series

Transcription

1 Single-axis Robot I S C a s t IS/SSP Series S, M sizes added to the SSP Series w w w. i n t e l l i g e n t a c t u a t o r. c o m

2 major revamp of the single-axis robot IS series with improvements all around from preciseness, rigidity and payload capacity to speed and /deceleration. 1. Improved preciseness The positioning repeatability is twice as high as with a similar conventional product. Conventional product IS series Standard High-precision ±0.02 mm ±0.01 mm ±0.01 mm ±0.00 mm 2. Improved rigidity Due to an improved preciseness of the guide, the dynamic straightness of the slider is now 0.01 mm/m or less. (*) * ased on the SSP of high straightness, precision. Refer to P. 13 for details. The SSP series is an iron base. It has more than twice the allowable moment in the Mc direction in comparison to the old model of the same size. Mc Direction ngular displacement (deg) Moment load (Mc direction) vs ngular displacement Moment load (N m) SSP-SXM SSP-MXM SSP-XM ngular displacement llowable Mc is more than twice than the old model. [ Comparison between the large iron base (SSP-XM) and the old model ] The same payload and Mc-direction rigidity are achieved at a cross-section area of just 0% that of a conventional product of an extra-large (IS-WXM). Comparison with conventional product of same payload and Mc-direction rigidity NEW Iron-base SSP-XM Conventional product Mc 1 Compact size with a crosssection area of just 0% 19 Extra-large IS-WXM 1 The long slider has a longer slider compared to the standard model. Compared to the old model of the same size, the allowable Mc is increased by to 20%. *ong slider is only for the IS/ISP series. NEW Standard slider ong slider 1 2 Type Standard slider (1) ong slider (2) Small S mm 1mm Medium M mm mm arge mm 10mm

3 Medium and small s have been added to the 3. iron base series (IS Cast:SSP/SSPDCR) IS/ISP series SSP series XM ISDCR/ISPDCR series SSPDCR series NEW SSP series SXM/MXM NEW SSPDCR series S/M Standard IS/ISP/SSP series Simple, dustproof ISD/ISPD series Cleanroom ISDCR/ISPDCR/ SSPDCR series 4. Performance Upgrade (note) s will vary depending on the model and lead. The payload has increased by approx. % with all models. The maximum stroke has become longer with all models except Dust Proof and Clean Room M/ size 's Velocity for those with an intermediate support. Conventional The rated has increased from 0.3 G to 0.4 G, while product 00mm/s 0% up the maximum has increased from 1.0 G to 1.2 G. The maximum speed of mm/s (*) is now possible. New product 100mm/s (*) ased on the SSP of lead 0. The maximum speed has increased from 00 mm/s to 100 mm/s with M/-size s of the simple, dustproof or cleanroom.. Easier to use ➊ Q seal is a standard feature. ➍ Greater flexibility of mounting. ➋ Easier to grease the ball screw and guide. ➎ Four cable exit directions to choose from. ➌ reference surface is set on the slider. ➏ The top of the motor does not contact the load on the slider. ➊ Q seal is a standard feature (guide, ball screw). ➌ reference surface was set on the slider to improve mounting preciseness. ➎ You can now choose one of four cable exit directions. ➋ grease nipple is provided on the side face of the slider to make it easier to grease the ball screw and guide. (ubricating is now possible without removing the cover.) ➏ The top of the motor is lower than the slider mounting surface, so the motor no longer contacts the load on the slider. ➍ The mounting hole positions are the same as those on conventional products. However, tapped mounting holes have been added to increase the flexibility of mounting. 2

4 Product ist Use environment ase material Series name [Positioning repeatability ] ctuator size Slider (slider length) (Note 1) Type Small Standard [mm] SXM [ctuator width: mm] ong [1mm] SX Medium Standard [mm] MXM Standard luminum base IS (Standard ) [±0.01] ISP (High precision ) [±0.00] arge [ctuator width: mm] ong [mm] With mid-support [mm] Standard [mm] MX MXMX XM ong [10mm] X [ctuator width: mm] With mid-support [mm] XMX arge Double sliders with mid-support [20mm] XUWX [ctuator width: mm] 3 (Note 1) When the slider is longer, the dynamic allowable moment becomes more than that of the standard slider. When mid-support is provided, high-speed movement is possible, even over a long stroke, because deflection of the ball screw can be suppressed. (Note 2) If the stroke is short, the maximum speed may not be reached. When the stroke increases, the maximum speed will drop to prevent reaching a dangerous speed. For details, refer to the explaining the s of each model. (Note 3) The maximum payload is the value when the actuator is operated at the rated. The maximum payload will drop if the is raised. For details, refer to Table of Payload by cceleration on P. 9. The values in ( ) are payloads when a guide with ball retention mechanism (RT) is used.

5 Stroke 0~0 (in 0mm ) 130~0 (in 0mm ) 0~10 (in 0mm ) ~70 (in 0mm ) 00~0 (in 0mm ) 0~1300 (in 0mm ) ~1270 (in 0mm ) 00~ (in 0mm ) all screw lead speed (Note 2) payload (kg) (Note 3) Dynamic allowable moment (N m) (Note 4) (3.0) (.) (13.) (2.0) (4.) 00 4 (9.) (19.) Horizontal Vertical Ma Mb Mc Designed exclusively for horizontal use (3.0) (9.0) (19.0) Designed exclusively for horizontal use P P P.19 P.20 P.21 P P P.24 P.2 P.2 P.27 P.2 P P.30 00~ (in 0mm ) Designed exclusively for horizontal use P Note 4) The value of moment allowed to be applied when the traveling life of the actuator is set to,000 km. Direction of allowable load moment Ma Mb Mc 4

6 Product ist Use environment ase material Series name [Positioning repeatability ] ctuator size Slider (slider length) (Note 1) Type NEW Small Standard (mm) SXM [ctuator width:0mm] NEW Medium Standard Iron base SSP (High precision ) [±0.00] [ctuator width:130mm] Standard (mm) MXM arge Standard (mm) XM [ctuator width:1mm] Small Standard (14mm) S [ctuator width:mm] Medium Simple, dustproof luminum base ISD (Standard ) [±0.01] ISPD (High precision ) [±0.00] [ctuator width:mm] Standard (194mm) With mid-support (194mm) M MX arge Standard (4mm) [ctuator width:mm] With mid-support (4mm) X (Note 1) When a mid-support is provided, high-speed movement is possible, even over a long stroke, because deflection of the ball screw can be suppressed. (Note 2) If the stroke is short, the maximum speed may not be reached. When the stroke increases, the maximum speed will drop to prevent reaching a dangerous speed. For details, refer to the explaining the s of each model. (Note 3) The maximum payload is the value when the actuator is operated at the rated. The maximum payload will drop if the is raised. For details, refer to Table of Payload by cceleration on P. 9. The values in ( ) are payloads when a guide with ball retention mechanism (RT) is used.

7 Stroke all screw lead speed (Note 2) payload (kg) (Note 3) Dynamic allowable moment (N.m) (Note 4) Horizontal Vertical Ma Mb Mc ~10 (in 0mm ) P ~1300 (in 0mm ) P (.0) 0~0 (in 0mm ) P (23.0) (2.) 0~00 (in 0mm ) (.) P (13.) (1.) 0~10 (in 0mm ) 00~100 (in 0mm ) 0~1300 (in 0mm ) 0~100 (in 0mm ) (Note 4) The value of moment allowed to be applied when the traveling life of the actuator is set to,000 km. Direction of allowable load moment (3.) 00 4 (9.) (19.) Designed exclusively for horizontal use (1.) (.0) (19.0) Ma Mb Mc Designed exclusively for horizontal use P P P.39 P P.41 P P.43

8 Product ist Use environment ase material Series name [Positioning repeatability ] ctuator size Slider (slider length) (Note 1) Type Small Standard (14mm) S [ctuator width: mm] Medium luminum base ISDCR (Standard ) [±0.01] ISPDCR (High precision ) [±0.00] arge [ctuator width:mm] Standard (194mm) With mid-support (192mm) M MX Standard (4mm) Cleanroom [ctuator width:mm] With mid-support (0mm) X NEW Small Standard (10mm) S [ctuator width:0mm] NEW Medium Iron base SSPDCR (High precision ) [±0.00] [ctuator width:130mm] Standard (mm) M arge Standard (230mm) [ctuator width:1mm] 7 (Note 1) When a mid-support is provided, high-speed movement is possible, even over a long stroke, because deflection of the ball screw can be suppressed. (Note 2) If the stroke is short, the maximum speed may not be reached. When the stroke increases, the maximum speed will drop to prevent reaching a dangerous speed. For details, refer to the explaining the s of each model. (Note 3) The maximum payload is the value when the actuator is operated at the rated. The maximum payload will drop if the is raised. For details, refer to Table of Payload by cceleration on P. 9. The values in ( ) are payloads when a guide with ball retention mechanism (RT) is used.

9 Stroke all screw lead speed (Note 2) payload (kg) (Note 3) Dynamic allowable moment (N.m) (Note 4) Horizontal Vertical Ma Mb Mc (2.) 0~00 (in 0mm ) (.) P (13.) (1.) (3.) 00 4 (9.) P.4 0~10 (in 0mm ) (19.) P ~0 (in 0mm ) Designed exclusively for horizontal use P (1.) 0~1300 (in 0mm ) (.0) (19.0) P.49 P ~ (in 0mm ) Designed exclusively for horizontal use P.1 P ~10 (in 0mm ) P ~1300 (in 0mm ) P (.0) 0~0 (in 0mm ) P (23.0) (Note 4) The value of moment allowed to be applied when the traveling life of the actuator is set to,000 km. Direction of allowable load moment Ma Mb Mc

10 9 Table of Payload by cceleration (Guide without the all Retention Mechanism (RT)) cceleration (G) Payload by Horizontal use Vertical use Type/motor /lead SXM SX MXM MX IS (Standard ) MXMX Cannot be used vertically ISP (High precision ) XM X XMX Cannot be used vertically XUWX SXM SSP (High precision MXM XM ISD (Standard ) ISPD (High precision ) ISDCR (Standard ) ISPDCR (High precision ) SSPDCR (High precision ) S 0 M 0 MX X S M Cannot be used vertically Cannot be used vertically The actuators cannot be operated under the conditions in shaded boxes (due to the relationship of lead and.) * If the guide with ball retention mechanism (RT) is used, the vertical payload is reduced on certain models from the applicable value shown in the above table. These models and corresponding amounts of reduction in vertical payload are shown in the table on the right. Series Type mounts of reduction (kg) IS, ISP SXM, MXM (0W) 0. XM (W) 1.0 SSP XM (70W) 2.0 ISD, ISPD, S, M (0W) 0. ISDCR, ISPDCR (W) 1.0 SSPDCR (70W) 2.0

11 Explanation of Description *The selections for each item vary depending on the. For details, check the explaining each. Standard Example) IS Series MXM Type 30 ead 10 Stroke T2 M 3E s e sure to specify the Q seal option (Q). For the cable exit direction, be sure to specify an applicable code (1S/1E/ 3S/3E). IS ISP SSP luminum base, standard luminum base, high precision Iron base, high precision SXM Small, X-axis, standard XM arge, X-axis, standard SX Small, X-axis, long slider X arge, X-axis, long slider MXM Medium, X-axis, standard XMX arge, X-axis, mid-support MX Medium, X-axis, long slider XUWX arge, X-axis, mid-support, double-slider MXMX Medium, X-axis, mid-support Simple, dustproof I bsolute 0 0W 0 0W W W 70 70W 0 0mm mm * Varies depending on the model. T1 XSE-J/K XSE-P/Q T2 SSE 4 4mm mm mm N None mm S 3m 1 1mm M m 20 20mm X Specified length 2 2mm * The standard cable is a 30 30mm robot cable mm 0 0mm * The * The selectable leads leads vary vary depending on on the the model. model. 1S 1E Cable exit from the rear left 3S 3E Q Q seal (standard feature) rake C Creep sensor C Creep sensor on the opposite side Home limit switch Home limit switch on the opposite side M Master axis M Master axis (sensor on opposite side) MD Electrolytic black coating* NM Non-motor side RT Guide with ball retention mechanism S Slave axis ST High straightness, precision * Electrolytic black coating (MD) is an option only for the SSP series. Example) ISD Series M Type 20 ead 00 Stroke T2 M s e sure to specify the Q seal option (Q). For the cable exit direction, be sure to specify an applicable code (1S/1E/ 3S/3E). ISD Standard ISPD High precision S Small, standard M Medium, standard MX Medium, mid-support arge, standard X arge, mid-support I bsolute 0 0W 0 0W W W 0 0mm mm * Varies depending on the model. 4 4mm mm mm mm 1 1mm 20 20mm 30 30mm 40 40mm * The selectable leads vary depending on the model. T1 XSE-J/K XSE-P/Q T2 SSE N None S 3m M m X Specified length * The standard cable is a robot cable. 1S 1E 3S 3E Q C C M M NM RT S ST Cable exit from the rear left Q seal (standard feature) rake Creep sensor Creep sensor on opposite side Home limit switch Home limit switch on opposite side Master axis Master axis (sensor on opposite side) Non-motor side Guide with ball retention mechanism Slave axis High straightness, precision Cleanroom Example) ISDCR Series M Type 20 ead 00 Stroke T2 M RT s e sure to specify the Q seal option (Q). For the cable exit direction, be sure to specify an applicable code (1S/1E/ 3S/3E). ISDCR ISPDCR SSPDCR S M MX X luminum base, standard luminum base, high precision Iron base, high precision Small, standard Medium, standard Medium, mid-support arge, standard arge, mid-support I bsolute 0 0W 0 0W W W 70 70W 0 0mm mm * Varies depending on the model. 4 4mm mm mm mm 1 1mm 20 20mm 2 2mm 30 30mm 40 40mm 0 0mm * The selectable leads vary depending on the model. T1 XSE-J/K XSE-P/Q T2 SSE N None S 3m M m X Specified length * The standard cable is a robot cable. 1S 1E 3S 3E Q C C M M NM RT S ST VR Cable exit from the rear left Q seal (standard feature) rake Creep sensor Creep sensor on opposite side Home limit switch Home limit switch on opposite side Master axis Master axis (sensor on opposite side) Non-motor side Guide with ball retention mechanism Slave axis High straightness, precision Suction tube joint on opposite side

12 Explanation of Number s Cable Exit Direction number 1S/1E/3S/3E You can choose one of four cable exit directions. * e sure to specify one of four model numbers. Q seal (lubrication unit) number option Q This unit prevents foreign objects from entering the ball screw and sliding part of number: 3S (exit from the right) number: 1S (exit from the left) the guide, while continuously supplying an appropriate amount of lubricating oil. (Standard feature on all models) * e sure to specify the model number option. number: 3E (exit from the rear right) number: 1E (exit from the rear left) rake number option When the actuator is used vertically, this mechanism holds the slider in place in the event that the power or servo is turned off, so that the slider will not drop and cause damage to the load. When the brake is equipped, the motor cover becomes longer than the without the brake. (Refer to the external view of each model.) Creep sensor number option C (standard) /C (opposite side) This sensor shortens the time required for home return. During the home return, the slider moves to the mechanical end at low speed, so actuators with a long stroke take a longer time to complete the home return. The creep sensor is installed near the mechanical end so that the slider can be moved at high speed to the sensor position and when the sensor actuates, the speed is reduced to the specified low level. This way, the time of home return can be shortened. With the standard option (C), this sensor is installed on the right side of the actuator as viewed from the motor. Select the opposite side option (C) if you want to install the sensor on the opposite side. The external dimensions vary depending on whether or not the sensor and cover are installed. When the creep sensor alone is installed, there is an additional sensor only on the home side and the dimensions change accordingly. If the home limit switch is also used, the dimensions conform to those of the with home limit switch. Home limit switch number option (standard) / (opposite side) Normally actuators adopt the contact home return mechanism whereby the slider moves until it contacts the stopper at the mechanical end, upon which the slider reverses its course and moves until the Z-phase is detected, and the detected phase is set as the home. The home limit switch is a convenient option that lets you adjust the reversing position or check whether or not the slider has reversed. With the standard option (), this switch is installed on the right side of the actuator as viewed from the motor. Select the opposite side option () if you want to install the switch on the opposite side. The external dimensions vary depending on whether or not the sensor and cover are installed. * See reference below. 11 Dimensions with Creep Sensor and Home imit Switch Installed The following dimensions apply when the sensor and switch are installed. Front View 3 Top View 0 0 End View luminum base D 12 ron base D * The above dimensions apply when both the limit switch and creep sensor are installed. If the creep sensor alone is installed, the dimensions on the sensor side (home side) will vary. C ase Series Type C D SXM SX MXM MX IS MXMX ISP XM X XMX XUWX luminum base Iron base ISD ISPD ISDCR ISPDCR S M MX X S M MX X SXM * MXM 4* SSP 19. XM (1.) (3) S M SSPDCR (41.) () (Note) The values in ( ) represent dimensions when the creep sensor alone is installed. * The dimension for SSP-SXM/MXM s indicates the distance overhanging from the base cover end to the motor side.

13 Explanation of s Master axis for synchronized operation number option M (standard) /M (opposite side) Synchronized operation is a function to move two actuator axes of the same one master axis and one slave axis in identical manners, with the slave axis following the master axis at very high-speed control. If you want to use synchronized operation, specify M for the master axis and S for the slave axis. Electrolytic lack Coating number option MD is only for the SSP series. The actuator base, side face, slider top and side face will have a rust preventative coating. Suitable in environments where rust will be an issue. It also can be used to prevent dust. Non-motor side number option NM Normally the home return is implemented on the motor side, but this direction can be set to the non-motor side as well. To change the home return direction, specify it in your order because the encoder must be adjusted. Guide with ball retention mechanism number option RT spacer (retainer) is inserted between guide balls (made of steel) to reduce noise and for a longer operating life. *This option is not available for long slider s (SX/MX/X). *Take note that the payload will vary if the actuator is used vertically. (Refer to the model/ table of each model.) Salve axis number option S Enter this model number to specify the slave axis in synchronized operation. Suction tube joint on the opposite side number option VR On standard cleanroom actuators, the vacuum joint is installed on the left side of the actuator as viewed from the motor. Specify this option if you want to have this joint on the opposite side. 12

14 Explanation of s High straightness, precision number option ST This represents a precision actuator of high traveling preciseness in terms of dynamic parallelism (horizontal/ vertical) and dynamic straightness (horizontal/vertical) of the slider. The running parallelism and squareness is based on stroke length. The values shown in the chart below is per 1m. For calculations based on the stroke length, please use the luminum ase and Iron ase Calculation Examples below. 1 2 Dynamic parallelism [mm/m or less] Dynamic straightness [mm/m or less] Without high straightness, precision luminum base With high straightness, precision (*) Without high straightness, precision Iron base With high straightness, precision (*) However, if the 0.03 than or equal to stroke 00mm, is less 0.03 squareness will be 0.01mm. the 0.0 [ ] [ than However, or equal if the to stroke 00mm, is less ] squareness will be 0.01mm. the However, if than or equal the to stroke 00mm, is less 0.01 squareness will be 0.01mm. the 0.0 [ ] [ than However, or equal if the to stroke 00mm, is less ] squareness will be 0.00 mm. the (*)The method of preciseness measurement conforms to II s inspection standard. luminum ase and Iron ase Calculation Examples. 1 luminum ase IS/ISP/ISD/ISPD/ISDCR/ISPDCR series Ex) When the stroke is 0mm Parallelism during motion 0.03mm/1m (parallelism/meter) x 1.m (stroke) = 0.04mm Squareness during motion 0.02mm/1m (squareness/meter) x 1.m (stroke) = 0.03mm *Round up to the 3rd decimal place 2 Iron ase SSP/SSPDCR Series Ex) When the stroke is 0mm Parallelism during motion 0.03mm/1m (parallelism/meter) x 0.9m (stroke) = 0.027mm Squareness during motion 0.01mm/1m (squareness/meter) x 0.9m (stroke) = 0.014mm *Round up to the 3rd decimal place 1 Dynamic parallelism (horizontal/vertical) 1 Parallelism of the base reference surface and the slider motion (horizontal) With the base affixed on a precision surface plate, an indicator on the slider is caused to contact a straight gauge placed in parallel with two points at both ends of the base reference surface, and then the actuator is moved over the entire stroke. The parallelism of the base reference surface and the slider motion represents the maximum difference between the measured values. Straight gauge point ase reference surface point 2 Parallelism of the base mounting surface and the slider motion (vertical) With the base affixed on a precision surface plate, an indicator on the slider is caused to contact the surface plate, and then the actuator is moved over the entire stroke. The parallelism of the base mounting surface and the slider motion represents the maximum difference between the measured values. ase reference surface Precision surface plate 2 Dynamic straightness (horizontal/vertical) With the base affixed on a precision surface plate, an indicator on the slider is caused to contact a straight gauge placed in parallel with two points at both ends of the base reference surface, and then the actuator is moved over the entire stroke. The parallelism of the base reference surface and the slider motion represents the maximum difference between the measured values. Deviation Measured value ine of representative values Straightness Parallelism 13 Slider travel

15 Cautions for Use [Duty] The duty represents the utilization ratio of the actuator (time during which the actuator is operating in each cycle). Since an estimation for applicable duty varies depending on the operating conditions (transferring mass, / deceleration, etc.), calculate the load factor F and /deceleration time ratio tod using the formula on the right and read off an appropriate duty from the graph. Duty = Operating time Operating time + Stopped time (%) How to calculate duty ➊ Calculate the load factor F using the formula below: oad factor: F= M x α (%) Mr x αr Payload at rated : Mr ctual transferring mass: M /deceleration: αr ctual /deceleration: α (Note) Refer to the model number/ table of each model for the payload at rated and rated / deceleration. ➋ Calculate the /deceleration time ratio t od using the formula below: cceleration/deceleration = cceleration time + Deceleration time cceleration time ratio t od Operating time (%) = Speed (sec) Deceleration = Speed (sec) time cceleration (mm/s 2 ) time Deceleration (mm/s 2 ) cceleration (mm/s 2 ) = cceleration (G) x 9,00 mm/s 2 Deceleration (mm/s 2 ) = Deceleration (G) x 9,00 mm/s 2 ➌ Read off the estimated duty from the calculated load factor F and the /deceleration time ratio t od. Example. When the load factor F is 0% and the /deceleration time ratio t od is 0%, an estimation for duty is approx. 7%. 0 F = ess than 0% Estimated duty (%) pprox. 7% F = 0% F = 70% F = 0% F = % F = 0% cceleration/deceleration time ratio t od (%) 0 0 [Dynamic allowable moment and overhang load length] The dynamic allowable moment, calculated from the traveling life of the guide, is the maximum offset load that can be applied to the slider. The traveling life will decrease when the allowable value is exceeded, so use an auxiliary guide, etc., if it is used within the allowable value or the allowable value is exceeded. The overhang load length represents the maximum length that can overhang from the slider when the requirement for dynamic allowable moment is met. Take note that if the specified overhang load length is exceeded, vibration, etc., may occur. Mb direction Ma direction Mb, Mc directions Mc direction Ma direction Direction of the dynamic allowable moment Direction of the allowable overhang length 14

16 Cautions for Use [Mounting] Check the mounting orientation of each model in the table below. : Installable : Not installable Horizontal, flat Vertical Note 1 Side-mounted Ceiling-mounted Mounting orientation Series IS ISP Type SXM, SX, MXM, MX, XM, X Note 2 Note 3 MXMX, XMX, XUWX SSP SXM, MXM, XM Note 2 Note 3 ISD ISPD ISDCR ISPDCR S, M, Note 4 Note 4 MX, X SSPDCR S, M, Note 1 When installing the actuator vertically, bring the motor to the top whenever possible. If the actuator is mounted with the motor at the bottom, problems won t occur during normal operation, but if the actuator is stopped for a prolonged period of time, grease may separate depending on the ambient environment (especially when the ambient temperature is high), in which case base oil may flow into the motor unit and could cause problems on rare occasions. Note 2 The base oil may separate from the grease and can flow out from the opening on the side of the actuator. lso, foreign debris is able to fall into the actuator through the opening on the side of it. Note 3 When the actuator with screw cover is ceiling mounted, the screw cover can bend and it may interfere with the work part. If the stroke of the IS exceeds 00mm, or if the stroke of the SSP exceeds 00mm, please attach the work part by an offset distance away from the slider. The table below shows the distance from the slider seating surface. Series Stroke Distance IS ISP SSP 00mm or greater but less than 00mm 00mm or greater but less than 1300mm 00 mm or greater but less than 0mm mm or greater mm or greater mm or greater Note 4 When a 400mm stroke actuator with a stainless sheet is side mounted or ceiling mounted, the stainless sheet may be subjected to flexure and can be misaligned. If continued to be used in those conditions, the stainless sheet can be damaged. Please maintain daily and use the manual as a reference for the maintenance procedure of the stainless sheet. 1

17 Standard Type IS / ISP / SSP Small X-axis, Standard Type Width: mm IS (ISP)-SXM P.17 X-axis, ong Slider Type Width: mm IS (ISP)-SX P.1 Medium X-axis, Standard Type X-axis, ong Slider Type Width: mm IS (ISP)-MXM-0 P.19 Width: mm IS (ISP)-MXM- P.20 Width: mm IS (ISP)-MX-0 P.21 Width: mm IS (ISP)-MX- P. IS ISP Standard (High Precision) Type X-axis, Mid-Support Type Width: mm IS (ISP)-MXMX- P.23 Width: mm IS (ISP)-XM- P.24 X-axis, Standard Type Width: mm IS (ISP)-XM-400 P.2 arge X-axis, ong Slider Type X-axis, Mid-Support Type Width: mm IS (ISP)-X- P.2 Width: mm IS (ISP)-X-400 P.27 Width: mm IS (ISP)-XMX- P.2 Width: mm IS (ISP)-XMX-400 P.29 X-axis, Mid-Support, Double-Slider Type Width: mm IS (ISP)-XUWX- P.30 Width: mm IS (ISP)-XUWX-400 P.31 SSP High Precision Type Small Medium arge X-axis, High-Rigidity, Iron-ase Type X-axis, High-Rigidity, Iron-ase Type X-axis, High-Rigidity, Iron-ase Type Width: 0mm SSP-SXM- P.32 Width: 130mm SSP-MXM-400 P.33 Width: 1mm SSP-XM-70 P.34 1

18 0 IS-SXM ISP-SXM Number/ 4 (standard + 3) (with brake) X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 17 IS-SXM/ISP-SXM Detail view of base mounting hole, T slot Slider reference surface T slot ase reference surface ase reference surface pplicable Controller s ME SE M3, depth (same on the opposite side) Grease nipple (same on the opposite side) 0 K J H x pitch Oblong hole, depth ± ± Home G 7 (from reference surface) F D C x pitch 0 E-ø7 hole, ø11 counterbored (from opposite side).0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). CD drawings ±0.01mm [±0.00mm] Drive method (Note 3) all screw 012mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 2.4N m Mb: 40.2N m Mc:.7N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) 3 2-øH7, depth 4-M, depth 1 ME 14 9 (without brake) Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2-øH7, depth 3 P-M, depth øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Washer-assembled screw M3 (for FG, 2 locations) (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.3 kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K P Mass (kg) ead speed ead ead pplicable Controller X-SE-P/Q number number of controlled axes axes Single-axis robot/small, X-axis, standard slider /ctuator width: mm/0w Straight shape Single-axis robot/small, X-axis, standard slider /ctuator width: mm/0w Straight shape High precision Series Type ead Stroke s IS: Standard 0: 0mm T1: XSE-J/K T2: ISP: High precision SXM 0 Connectable encoder : bsolute * Refer to P. for the details of items comprising the model number. Operating method 0: 0W 1 : 1mm : mm 4 : 4mm Power-supply voltage VC 0: 0mm (in 0mm ) ead Stroke in 0mm Speed thrust (N) IS[ISP]-SXM ~ IS[ISP]-SXM bsolute 0 0~0 1~ IS[ISP]-SXM ~ CD SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

19 0 IS-SX ISP-SX Number/ number Detail view of base mounting hole, T slot Slider reference surface 2 1 T slot ase reference surface 4 (standard + 3) (with brake) ase reference surface ME SE M3, depth (same on the opposite side) Grease nipple (same on the opposite side) Oblong hole, depth J ±0.02 H x pitch 70± (from reference surface) G F D C x pitch E-ø7 hole, ø11 counterbored (from opposite side).0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ead Stroke in 0mm Speed 1 Home øH7, depth 3 P-M, depth øH7, depth 0 2-øH7, depth -M, depth 1 ME 14 9 (without brake) Cable joint connector Washer-assembled screw M3 (for FG, 2 locations) thrust (N) IS[ISP]-SX ~ IS[ISP]-SX bsolute 0 130~0 1~ IS[ISP]-SX ~ S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on the opposite side C P11 Single-axis robot/small, X-axis, long slider /ctuator width: mm/0w Straight shape Single-axis robot/small, X-axis, long slider /ctuator width: mm/0w Straight shape High precision Series Type ead Stroke s IS: Standard 130: 130mm T1: XSE-J/K T2: ISP: High precision SX 0 : bsolute * Refer to P. for the details of items comprising the model number. CD drawings CD 0: 0W 1 : 1mm : mm 4 : 4mm 0: 0mm (in 0 mm ) ±0.01mm [±0.00mm] Drive method (Note 3) all screw 012mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 39.7N m Mb:.7N m Mc: 7.3N m Ma direction: 0mm max. Mb, Mc directions: 0mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.3 kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J P Mass (kg) ead speed ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control SSE XSE-P/Q N : None Refer to the options S : 3m table below. M : m X : Specified length * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-SX/ISP-SX 1

20 0 IS-MXM-0 ISP-MXM-0 Number/ number Slider reference surface T slot ase reference surface 7 (standard + 24) Detail view of base mounting hole, T slot ME SE X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 19 IS-MXM-0/ISP-MXM J øH7, depth 0 H x pitch Grease nipple (same on the opposite side) M3, depth Home (same on the opposite side) 24 ±0.02 ± M, depth 1 4-M, depth 1 ME 14 3 (without brake) Cable joint connector 2-øH7, depth K-M, depth øH7, depth (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 (model number: 3E) Cable exit from the rear left (model number: 1E) Oblong hole, G (from reference surface) depth (with brake) F 0 D C x pitch 0 ase reference surface * Take note that to change the home direction, the actuator must be returned to us for adjustment. E-ø9 hole, ø1 counterbored (from opposite side) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) ead ead speed ead ead pplicable Controller s ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** thrust (N) IS[ISP]-MXM ~ IS[ISP]-MXM bsolute 20 1~ ~10 IS[ISP]-MXM ~ IS[ISP]-MXM ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/0w Straight shape Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/0w Straight shape High precision Series Type ead Stroke s IS: Standard 0: 0mm T1: XSE-J/K T2: ISP: High precision MXM 0 : bsolute * Refer to P. for the details of items comprising the model number. CD CD drawings Operating method 0: 0W 30 : 30mm 20 : 20mm : mm : mm Power-supply voltage VC 10: 10mm (in 0 mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

21 0 IS-MXM- ISP-MXM- * Refer to P. for the details of items comprising the model number. Number/ Slider reference surface 0 T slot ase reference surface 113 (standard + 3) Detail view of base mounting hole, T slot ME SE J øH7, depth 0 ME M3, depth Home (same on the opposite side) (without brake) Grease nipple (same on the opposite side) H x pitch ± ± M, depth 1 4-M, depth 1 Cable joint connector 2-øH7, depth K-M, depth øH7, depth (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) (with brake) Oblong hole, G (from reference surface) Cable exit from the rear left depth F (model number: 1E) 0 D C x pitch 0 ase reference surface * Take note that to change the home direction, the E-ø9 hole, ø1 counterbored (from opposite side) actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) speed Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard 0: 0mm T1: XSE-J/K T2: ISP: High precision MXM : bsolute : W 30 : 30mm 20 : 20mm : mm : mm 10: 10mm (in 0 mm ).0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) number Stroke in ead 0mm Speed thrust (N) IS[ISP]-MXM ~ IS[ISP]-MXM bsolute 20 1~ ~10 IS[ISP]-MXM ~ IS[ISP]-MXM ~ *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). CD CD drawings Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/w Straight shape ±0.01mm [±0.00mm] Drive method (Note 3) all screw 01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. ead ead ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-MXM-/ISP-MXM- 20

22 0 IS-MX-0 ISP-MX-0 Number/ CD drawings number Detail view of base mounting hole, T slot Slider reference surface 134 ME 0 T slot X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 21 IS-MX-0/ISP-MX SE øH7, depth 7 -M, depth 1 2-M3, depth Home (same on the opposite side) ±0.02 ± ME 14 3 (without brake) Cable joint connector (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 ase reference surface Grease nipple (same on the opposite side) 1 2-øH7, depth J H x pitch K-M, depth øH7, depth (model number: 3E) 7 (standard + 24) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Oblong hole, depth G (from reference surface) Cable exit from the rear left (with brake) F (model number: 1E) ase reference surface 0 D C x pitch 0 * Take note that to change the home direction, the actuator must be returned to us for adjustment. E-ø9 hole, ø1 counterbored (from opposite side) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) ead ead speed (mm/s ead ead pplicable Controller s.0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ead Stroke in 0mm Speed thrust (N) IS[ISP]-MX ~ IS[ISP]-MX bsolute 20 1~ ~70 IS[ISP]-MX ~ IS[ISP]-MX ~ pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Single-axis robot/medium, X-axis, long slider /ctuator width: mm/0w Straight shape Single-axis robot/medium, X-axis, long slider /ctuator width: mm/0w Straight shape High precision Series Type ead Stroke s IS: Standard : mm T1: XSE-J/K T2: ISP: High precision MX 0 : bsolute * Refer to P. for the details of items comprising the model number. CD Operating method 0: 0W 30 : 30mm 20 : 20mm : mm : mm Power-supply voltage VC 70: 70mm (in 0 mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on the opposite side C P11 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma:.3N m Mb:.4N m Mc: 193.7N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

23 0 IS-MX- ISP-MX- Number/ CD drawings number T slot ase reference surface 113 (standard + 3) (with brake) ase reference surface Detail view of base mounting hole, T slot ME Slider reference surface Single-axis robot/medium, X-axis, long slider /ctuator width: mm/w Straight shape Single-axis robot/medium, X-axis, long slider /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard : mm T1: XSE-J/K T2: ISP: High precision MX : bsolute * Refer to P. for the details of items comprising the model number. SE : W 30 : 30mm 20 : 20mm : mm : mm Oblong hole, depth 0 D 70: 70mm (in 0 mm ) Grease nipple (same on the opposite side) J øH7, depth 7 -M, depth1 2-M3, depth Home (same on the opposite side) H x pitch 19 7 ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side).0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ead Stroke in 0mm 2 2-øH7, depth K-M, depth øH7, depth 0 ME 14 7 (without brake) Cable joint connector (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) ead ead speed ead ead Speed thrust (N) IS[ISP]-MX ~ IS[ISP]-MX bsolute 20 1~ ~70 IS[ISP]-MX ~ IS[ISP]-MX ~ CD pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on the opposite side C P11 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma:.3N m Mb:.4N m Mc: 193.7N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-MX-/ISP-MX-

24 0 IS-MXMX- ISP-MXMX- Number/ number Single-axis robot/medium, X-axis, mid-support /ctuator width: mm/w Straight shape Single-axis robot/medium, X-axis, mid-support /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard : W 30 : 30mm 00: 00mm T1: XSE-J/K 20 : 20mm T2: ISP: High precision MXMX : bsolute * Refer to P. for the details of items comprising the model number. 0: 0mm (in 0 mm ) ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) IS[ISP]-MXMX bsolute 30 1~ Designed 30 Designed ~0 exclusively for exclusively for IS[ISP]-MXMX ~0 0.4 horizontal use 4 horizontal use SSE XSE-P/Q N : None Refer to the options S : 3m table below. M : m X : Specified length *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw 01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD øH7, depth ± M, depth 1 4-M, depth 1 Cable joint connector (model number: 3S) Slider reference surface 0 T slot ase reference surface 09 Detail view of base mounting hole, T slot ase reference surface ME SE Oblong hole, depth G H 0 C D F D C 0 F-ø9 hole, ø1 counterbored (from opposite side) M3, depth Home ME (same on the opposite side) without brake: 7 with brake: 113 Grease nipple (same on the opposite side) 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H Mass (kg) ead speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 23 IS-MXMX-/ISP-MXMX- (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

25 0 IS-XM- ISP-XM- Number/ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 1.0 kg. (Please also refer to P.9). speed number 9 Slider reference surface T slot ase reference surface 1 (standard + 34) Detail view of base mounting hole, T slot ME SE J ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) øH7, depth 7 -M, depth 20 Cable joint connector (model number: 3S) 2-M3, depth Home (same on the opposite side) Grease nipple (same on the opposite side) 2-øH7, depth K-M, depth 20 H x pitch 3 1 ± ±0.02 ME Connect the motor cable 23 7 and encoder (without cable. Refer brake) to P. 7 for the cables. 2-øH7, depth (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) Cable exit from the rear left (model number: 1E) Oblong hole, depth G (from reference surface) F (with brake) 0 D C x pitch 0 * Take note that to change the home direction, the ase reference surface actuator must be returned to us for adjustment. E-ø9 hole, ø1 counterbored (from opposite side) *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke Dimensions, Mass and Speed by Stroke without brake with brake C D E F G H J K Mass (kg) ead ead ead pplicable Controller s ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** 2 thrust (N) IS[ISP]-XM ~ IS[ISP]-XM bsolute 20 0~1300 1~ IS[ISP]-XM ~ pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard 0: 0mm T1: XSE-J/K T2: ISP: High precision XM : bsolute * Refer to P. for the details of items comprising the model number. CD CD drawings : W 40 : 40mm 20 : 20mm : mm 1300: 1300mm (in 0 mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-XM-/ISP-XM- 24

26 0 IS-XM-400 ISP-XM-400 Number/ CD drawings pplicable Controller X-SE-P/Q number 9 Slider reference surface T slot ase reference surface 7.3 X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control VC 2 IS-XM-400/ISP-XM Detail view of base mounting hole, T slot 132 (standard + 34) number of controlled axes axes (with brake) ase reference surface Connectable encoder 1 33 ME SE Oblong hole, depth D Operating method Power-supply voltage VC øH7, depth 7 -M, depth 20 2-M3, depth (same on the opposite side) Grease nipple (same on the opposite side) 2-øH7, depth H x pitch 2 ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) 23 9 Home K-M, depth ME (without brake) Cable joint connector 2-øH7, depth Washer-assembled screw M4 (for FG, 2 locations) (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) ead speed ead ead pplicable Controller s Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/400w Straight shape High precision Series Type ead Stroke s IS: Standard 0: 0mm T1: XSE-J/K T2: ISP: High precision XM 400 : bsolute * Refer to P. for the details of items comprising the model number. 400: 400W 40 : 40mm 20 : 20mm : mm 1300: 1300mm (in 0 mm ).0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ead Stroke in 0mm Speed thrust (N) IS[ISP]-XM ~ IS[ISP]-XM bsolute ~1300 1~ IS[ISP]-XM ~ CD SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

27 0 IS-X- ISP-X- Number/ CD drawings number Slider reference surface Detail view of base mounting hole, T slot 9 T slot ase reference surface 1 (standard + 34) ME SE J øH7, depth 4 4 -M, depth M3, depth (same on the opposite side) Grease nipple (same on the opposite side) 2-øH7, depth H x pitch 2 ±0.02 K-M, depth ±0.02 ME 23 7 Home (without brake) 24 2 Cable joint connector 2-øH7, depth Washer-assembled screw M4 (for FG, 2 locations) (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Oblong hole, depth G (from reference surface) (with brake) F 0 D C x pitch 0 * Take note that to change the home direction, the ase reference surface actuator must be returned to us for adjustment. E-ø9 hole, ø1 counterbored (from opposite side) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) ead speed ead ead pplicable Controller s.0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ead Stroke in 0mm Speed thrust (N) IS[ISP]-X ~ IS[ISP]-X bsolute 20 0~1270 1~ IS[ISP]-X ~ pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Single-axis robot/arge, X-axis, long slider /ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, long slider /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard : mm T1: XSE-J/K T2: ISP: High precision X : bsolute * Refer to P. for the details of items comprising the model number. CD Operating method : W 40 : 40mm 20 : 20mm : mm Power-supply voltage VC 1270: 1270mm (in 0 mm ) X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on the opposite side C P11 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 137.N m Mb: 19.N m Mc: 27.N m Ma direction: 0mm max. Mb, Mc directions: 0mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-X-/ISP-X- 2

28 0 IS-X-400 ISP-X-400 Number/ Slider reference surface Detail view of base mounting hole, T slot 9 T slot ase reference surface 132 (standard + 34) X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC 27 IS-X-400/ISP-X ME SE J øH7, depth 4 4 -M, depth M3, depth (same on the opposite side) Grease nipple (same on the opposite side) 2-øH7, depth H x pitch 2 ±0.02 K-M, depth ±0.02 ME 23 9 Home (without brake) 24 2 Cable joint connector 2-øH7, depth Washer-assembled screw M4 (for FG, 2 locations) (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Oblong hole, depth G (from reference surface) (with brake) F 0 D C x pitch 0 * Take note that to change the home direction, the ase reference surface actuator must be returned to us for adjustment. E-ø9 hole, ø1 counterbored (from opposite side) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G H J K Mass (kg) speed number ead ead ead pplicable Controller s.0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ead Stroke in 0mm Speed thrust (N) IS[ISP]-X ~ IS[ISP]-X bsolute ~1270 1~ IS[ISP]-X ~ pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Single-axis robot/arge, X-axis, long slider /ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, long slider /ctuator width: mm/400w Straight shape High precision Series Type ead Stroke s IS: Standard : mm T1: XSE-J/K T2: ISP: High precision X 400 : bsolute * Refer to P. for the details of items comprising the model number. CD CD drawings Operating method 400: 400W 40 : 40mm 20 : 20mm : mm Power-supply voltage VC 1270: 1270mm (in 0 mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on the opposite side C P11 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 137.N m Mb: 19.N m Mc: 27.N m Ma direction: 0mm max. Mb, Mc directions: 0mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

29 IS-XMX- ISP-XMX- Number/ number IS[ISP]-XMX Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard : W 20 : 20mm 00: 00mm T1: XSE-J/K T2: ISP: High precision XMX : bsolute * Refer to P. for the details of items comprising the model number. bsolute : mm (in 0 mm ) ead SSE XSE-P/Q Stroke in 0mm Speed N : None Refer to the options S : 3m table below. M : m X : Specified length 20 00~ 1~ G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) Designed exclusively for horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 4 Designed exclusively for horizontal use thrust (N) S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD Slider reference surface Detail view of base mounting hole, T slot T slot ase reference surface ME SE øH7, depth 7 -M, depth 20 2-M3, depth (same on the opposite side) Grease nipple (same on the opposite side) Home ME ±0.02 (without brake) Cable joint connector 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (model number: 3S) 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) 1 (standard + 34) (with brake) ase reference surface Oblong hole, depth C x pitch D G F 400 D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G Mass (kg) speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-XMX-/ISP-XMX- 2

30 IS-XMX-400 ISP-XMX-400 Number/ number Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/400w Straight shape High precision Series Type ead Stroke s IS: Standard 400: 400W 40 : 40mm 00: 00mm T1: XSE-J/K 20 : 20mm T2: ISP: High precision XMX 400 : bsolute * Refer to P. for the details of items comprising the model number. : mm (in 0 mm ) ead Stroke in 0mm Speed cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) IS[ISP]-XMX bsolute ~ 1~ Designed 40 Designed 19. exclusively for exclusively for IS[ISP]-XMX ~0 0.4 horizontal use horizontal use SSE XSE-P/Q N : None Refer to the options S : 3m table below. M : m X : Specified length.0g=900mm/sec 2 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD Slider reference surface Detail view of base mounting hole, T slot T slot ase reference surface ME SE øH7, depth 7 -M, depth M3, depth Home ME (without (same on the opposite side) brake) Grease nipple (same on the opposite side) 2 ±0.02 Cable joint connector 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (model number: 3S) 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) 132 (standard + 34) (with brake) ase reference surface Oblong hole, depth C x pitch D F 400 G D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G Mass (kg) ead speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control VC 29 IS-XMX-400/ISP-XMX-400 (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

31 IS-XUWX- ISP-XUWX- Number/ number IS[ISP]-XUWX Single-axis robot/arge, X-axis, mid-support, double-slider / ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, mid-support, double-slider /ctuator width: mm/w Straight shape High precision Series Type ead Stroke s IS: Standard : W 20 : 20mm 00: 00mm T1: XSE-J/K T2: ISP: High precision XUWX : bsolute * Refer to P. for the details of items comprising the model number. bsolute : mm (in 0 mm ) ead SSE XSE-P/Q Stroke in 0mm Speed N : None Refer to the options S : 3m table below. M : m X : Specified length 20 00~ 1~ G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) Designed exclusively for horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 4 Designed exclusively for horizontal use thrust (N) S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 179.3N m Mb: 24.N m Mc: 247.0N m Ma direction: mm max. Mb, Mc directions: mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD Slider reference surface Detail view of base mounting hole, T slot T slot ase reference surface 1 (standard + 34) (with brake) ase reference surface 1 79 ME 70 0 SE Oblong hole, depth C x pitch Grease nipple (same on the opposite side) D x2-øH7, depth x4-M, depth 20 Cable joint connector ± M3, depth Home ME (without (same on the opposite side) brake) G F 400 D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) ±0.02 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G Mass (kg) speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-XUWX-/ISP-XUWX- 30

32 IS-XUWX-400 ISP-XUWX-400 * Refer to P. for the details of items comprising the model number. Number/ Slider reference surface 9 T slot ase reference surface number (standard + 34) (with brake) Detail view of base mounting hole, T slot ase reference surface 1 79 ME 0 SE Oblong hole, depth C x pitch ead D Stroke in 0mm Grease nipple (same on the opposite side) ±0.02 ± M3, depth Home ME (without (same on the opposite side) brake) G F 400 D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) 2x2-øH7, depth 2x4-M, depth 20 Cable joint connector 2-øH7, depth (model number: 3S) 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake C D E F G Mass (kg) ead speed ead Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) IS[ISP]-XUWX bsolute ~ 1~ Designed 40 Designed 19. exclusively for exclusively for IS[ISP]-XUWX ~0 0.4 horizontal use horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). CD drawings CD Single-axis robot/arge, X-axis, mid-support, double-slider / ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, mid-support, double-slider /ctuator width: mm/400w Straight shape High precision Series Type ead Stroke s IS: Standard 400: 400W 40 : 40mm 00: 00mm T1: XSE-J/K 20 : 20mm T2: ISP: High precision XUWX 400 : bsolute : mm (in 0 mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw 020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 179.3N m Mb: 24.N m Mc: 247.0N m Ma direction: mm max. Mb, Mc directions: mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control VC 31 IS-XUWX-400/ISP-XUWX-400 (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

33 SSP-SXM- Single-axis robot/small, X-axis, high-rigidity, iron-base /ctuator width: 0mm/W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Guide with ball retention mechanism M P12 Q seal (standard feature) Q P11 Electrolytic black coating MD P12 rake P11 Non-motor side NM P12 Creep sensor C P11 Master axis (sensor on the opposite side) RT P12 Creep sensor on the opposite side C P11 Slave axis S P12 High straightness, precision ST P ø12 SSP SXM Series Type ead Stroke s SSP: High precision 0: 0mm T1: XSE-J/K T2: Slider reference surface ase reference surface 4. ø7 M Detail view X-X (Detail of base mounting hole) 1 4 : bsolute ±0.02 (from reference surface) 12 2 ME : W 30 : 30mm 20 : 20mm : mm R pitch x m Grease nipple (same on the opposite side) for the guide and ball screw M 0 P pitch x n 30 9 SE 10: 10mm (in 0 mm ) 2-øH7, depth Slider reference surface -M, depth 9 SSE XSE-P/Q. 9 Stroke 2-M3, depth (same on the opposite side) 17. ± Home ±0.02 (from reference surface) X Oblong hole, depth N øh7, depth 70. ±0.02 N : None Refer to the options S : 3m table below. M : m X : Specified length.0g=900mm/sec 2 number Stroke in cceleration (Note 1) Payload (Note 1) ead 0mm Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) SSP-SXM ~ SSP-SXM bsolute 20 0~10 1~ SSP-SXM ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). CD drawings CD X Positioning repeatability ±0.00mm Drive method all screw 01mm, equivalent to rolled C ost Motion 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 3N m Mb: 3N m Mc: 9N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) 0 desired cable exit direction can be selected Without brake: 134 With brake: 19 ME 1 R 2. (M3 tap) t-m3, depth 3 (same on the opposite side) r-m, depth 9 r-ø7 hole ase reference surface Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake M N P R m n r t Mass (kg) ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is,000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) SSP-SXM- 32

34 SSP-MXM-400 Single-axis robot/medium, X-axis, high-rigidity, iron-base /ctuator width: 130mm/400W Straight shape High precision SSP MXM 400 Series Type ead Stroke s SSP: High precision 0: 0mm T1: XSE-J/K T2: : bsolute * Refer to P. for the details of items comprising the model number. Number/ 400: 400W40 : 40mm 20 : 20mm : mm 1300: 1300mm (in 0 mm ) SSE XSE-P/Q N : None Refer to the options S : 3m table below. M : m X : Specified length.0g=900mm/sec 2 number Stroke in cceleration (Note 1) Payload (Note 1) ead 0mm Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) SSP-MXM ~ SSP-MXM bsolute ~1300 1~ SSP-MXM ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Guide with ball retention mechanism M P12 Q seal (standard feature) Q P11 Electrolytic black coating MD P12 rake P11 Non-motor side NM P12 Creep sensor C P11 Master axis (sensor on the opposite side) RT P12 Creep sensor on the opposite side C P11 Slave axis S P12 High straightness, precision ST P13 Positioning repeatability Drive method ost Motion Dynamic allowable load moment (Note 2) Dynamic straightness (Note 3) ase (Note 4) mbient operating temperature/humidity ±0.00mm all screw 020mm, equivalent to rolled C 0.02mm max. Ma: N m Mb: N m Mc: 230N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. 0.01mm/m max. Material: Cast iron with coating T1: XSE-J/K T2: XSE-P/Q, SSE, N: None, S: 3m, M: m, X : Specified length 0 to 40 C, %RH max. (non-condensing) CD drawings CD 0. Slider reference surface ase reference surface ø1. M ø9 Detail view X-X (Detail of base mounting hole) pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder ±0.02 (from reference surface) 1 29 ME SE X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC 33 SSP-MXM R 0 12 Operating method Slider reference surface P 2-øH7, depth pitch x m Grease nipple (same on the opposite side) for the guide and ball screw M pitch x n ±0.02 (from reference surface) Oblong hole, depth øh7, depth N Power-supply voltage VC 2 70± ±0.02 -M, depth Without brake: Stroke 29 1 With brake: 1 2-M3, depth Home (same on the opposite side) ME X 29 X R 9 0 desired cable exit direction can be selected. 17 t-m3, depth 4 (same on the opposite side) r-m, depth 12 r-ø9 hole (M3 tap) ase reference surface Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake M N P R m n r t Mass (kg) ead speed ead ead (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is,000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m)

35 SSP-XM-70 Single-axis robot/arge, X-axis, high-rigidity, iron-base /ctuator width: 1mm/70W Straight shape High precision Number/ number Slider reference surface 9 ase reference surface ead 1 3 Stroke (ST) SE ME Stroke in 0mm Speed øH7 0 depth 12 Slider reference surface 2 0± M, depth 1 1 : ST without brake, ST with brake 2-M3, depth (same on the opposite side) 2-M4, depth (same on the opposite side) without brake: 174 with brake: 211 R pitch xm R 3 (M3 tap) Grease nipple (same on the opposite side) for guide and ball screw t-m3, depth 4 r-m, depth 1 r-09 hole (same on the opposite side) M 7 P pitch xn ±0.02.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** SSP-XM bsolute 0 1~ ~0 SSP-XM ~ SSP XM 70 Series Type ead Stroke s SSP: High precision 70: 70W 0 : 0mm 0: 0mm T1: XSE-J/K 2 : 2mm T2: : bsolute * Refer to P. for the details of items comprising the model number. 0: 0mm (in 0 mm ) SSE XSE-P/Q N : None Refer to the options S : 3m table below. M : m X : Specified length * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 2.0kg. (Please also refer to P.9). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Guide with ball retention mechanism M P12 Q seal (standard feature) Q P11 Electrolytic black coating MD P12 rake P11 Non-motor side NM P12 Creep sensor C P11 Master axis (sensor on the opposite side) RT P12 Creep sensor on the opposite side C P11 Slave axis S P12 High straightness, precision ST P13 CD drawings CD desired cable exit direction can be selected ME Home Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. Washer-assembled screw M4 (for FG, 2 locations) thrust (N) Positioning repeatability ±0.00mm Drive method all screw 02mm, equivalent to rolled C ost Motion (Note 4) 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 13.N m Mb: 13.N m Mc: 334.N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) (model number: 1S) (model number: 3E) ø1 ø9 M ø X Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. ± ±0.02 Detail view X-X ase reference surface (from reference surface) H7 0 (from reference surface) X 1 N 1 (Detail of base mounting hole) Oblong hole, depth H7 0 depth 12 Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 1.0kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake M N P R m n r t Mass (kg) ead speed ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-K 4 axes 0/ VC bsolute/ Program X-SE-J *(note ) 4 axes SSE 2 axes VC Positioner pulse train control (Note 1) (Note 2) (Note 3) (Note 4) (Note ) Refer to P. 9 for the relationship of and payload. When the traveling life is,000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) If the actuator is to be used vertically, use a controller other than the XSE-J. SSP-XM-70 34

36 Simple, Dustproof Type ISD / ISPD Small Standard Type Width: mm ISD (ISPD)-S P.3 Medium Standard Type Width: mm ISD (ISPD)-M-0 P.37 Width: mm ISD (ISPD)-M- P.3 3 ISD ISPD Simple, Dustproof Type arge Mid-Support Type Width: mm ISD (ISPD)-MX- P.39 Width: mm ISD (ISPD)-- P.40 Standard Type Width: mm ISD (ISPD)--400 P.41 Width: mm ISD (ISPD)-X- P.42 Mid-Support Type Width: mm ISD (ISPD)-X-400 P.43

37 ISD-S ISPD-S Number/ (2.) number Detail view of (1) 70 1 ME SE Stroke ead Stroke in 0mm Speed 0 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø12mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 2.4N m Mb: 40.2N m Mc:.7N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) ± G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** Home 2-øH7, depth 4-M, depth 19 4 ME (model number: 3S) (model number: 3E) Cable exit from the rear left (model number: 1E) (model number: 1S) Cable joint connector ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) 0 thrust (N) ISD[ISPD]-S ~ ISD[ISPD]-S bsolute 0 0~00 1~ ISD[ISPD]-S ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). S 0 Series Type ead Stroke s ISD: Standard ISPD: High precision : bsolute 0: 0W 1 : 1mm : mm 4 : 4mm 0: 0mm 00: 00mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. CD CD drawings Single-axis robot/small, dustproof /ctuator width: mm/0w Straight shape Single-axis robot/small, dustproof /ctuator width: mm/0w Straight shape High precision 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 surface (3) 4 Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of the high precision surface Tapered screw for tube (Rc 3/") Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) (uried plug screw, same on the opposite side) oblong hole H7 0 depth 4-øH7, depth F 7 (from reference surface) D 70± (without brake) 117. (with brake) E-M, depth 17 Slider center position (home) Ground wire connection screw (M3, 2 locations) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.2kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD-S/ISPD-S 3

38 ISD-M-0 ISPD-M-0 Number/ (2.) number ISD[ISPD]-M (1) Detail view of ME SE ead 30 Stroke Stroke in 0mm.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** thrust (N) 1~ ISD[ISPD]-M bsolute 20 1~ ~10 ISD[ISPD]-M ~ ISD[ISPD]-M ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). M 0 Series Type ead Stroke s ISD: Standard ISPD: High precision : bsolute 0: 0W 30 : 30mm 20: 20mm : mm 0: 0mm 10: 10mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. : mm (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. CD CD drawings Single-axis robot/medium, dustproof /ctuator width: mm/0w Straight shape Single-axis robot/medium, dustproof /ctuator width: mm/0w Straight shape High precision 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) M, depth ± øH7, depth 4-M, depth 19 Home ME (model number: 3S) (model number: 3E) Cable exit from the rear left (model number: 1E) (model number: 1S) Cable joint connector ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) surface (4) 1. Processing jig holes are provided over the entire bottom surface of the base. surface They are not used for mounting the actuator. They are plugged with rubber grommets. 12. ase mounting surface when the guide is of the high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) oblong hole H7 0 depth X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 37 ISD-M-0/ISPD-M-0 F Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) ±0.02 (from reference surface) 0 2. D Slider center position (home) 7 91 (without brake) 11 (with brake) Ground wire connection screw (M3, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 4-øH7, depth E-M, depth 20 During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.3kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

39 ISD-M- ISPD-M- Number/ number M Series Type ead Stroke s ISD: Standard ISPD: High precision : bsolute : W 30 : 30mm 20: 20mm : mm 0: 0mm 10: 10mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. : mm (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. ead Stroke in 0mm.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) 1~ ISD[ISPD]-M ISD[ISPD]-M bsolute 20 1~ ~10 ISD[ISPD]-M ~ ISD[ISPD]-M ~ *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). CD drawings Single-axis robot/medium, dustproof /ctuator width: mm/w Straight shape Single-axis robot/medium, dustproof /ctuator width: mm/w Straight shape High precision 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P M, depth 1 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector CD (2.) (1) Detail view of ME SE Stroke 0 0± Home ME Cable exit from the rear left (model number: 1E) (model number: 1S) ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) surface (4) Processing jig holes are provided over 12 the entire bottom surface of the base. surface They are not used for mounting the actuator. They are plugged with rubber grommets. 12. ase mounting surface when the guide is of the high precision Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) oblong hole H7 0 depth F Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) ±0.02 (from reference surface) D (without brake) 141 (with brake) 4-øH7, depth E-M, depth 20 7 Slider center position (home) Ground wire connection screw (M3, 2 locations) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.4kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead ead speed ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD-M-/ISPD-M- 3 7 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment.

40 ISD-MX- ISPD-MX- Number/ MX Series Type ead Stroke s : W 30 : 30mm 20: 20mm 00: 00mm T1: XSE-J/K T2: ISD: Standard ISPD: High precision number : bsolute * Refer to P. for the details of items comprising the model number. ead Stroke in0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-MX bsolute 30 1~ Designed 30 Designed ~100 exclusively for exclusively for ISD[ISPD]-MX ~0 0.4 horizontal use 4 horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). Single-axis robot/medium, dustproof, mid-support /ctuator width: mm/w Straight shape Single-axis robot/medium, dustproof, mid-support /ctuator width: mm/w Straight shape High precision 100: 100mm (in 0mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 N : None Refer to the options S : 3m table below. M : m X : Specified length ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD (2.) surface (4) Detail view of Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of the high precision ME SE oblong hole H7 0 depth Stroke Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) M, depth (from reference surface). F D ±0.02 ± Home Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 2-øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector (model number: 1S) ME (without brake) 141 (with brake) Cable exit from the rear left (model number: 1E) 4-øH7, depth E-M, depth 20 Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Ground wire connection screw (M3, 2 locations) 7 During the home return, the slider 1 moves to the ME, so Slider center position (home) pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. ø Connect the motor cable and encoder cable. Refer to P. 7 for the cables. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 39 ISD-MX-/ISPD-MX- (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

41 ISD-- ISPD-- Number/ (3) number (1.) Detail view of 19 ME SE ead Stroke Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** ±0.02 (model number: 1S) 4 Home ME 12 2-øH7, depth (model number: 3S) -M, depth 20 (model number: 3E) Cable exit from the rear left (model number: 1E) Cable joint connector ø thrust (N) ISD[ISPD] ~ ISD[ISPD] bsolute 20 0~1300 1~ ISD[ISPD] ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 1.0kg. (Please also refer to P.9). Series Type ead Stroke s ISD: Standard ISPD: High precision : bsolute : W 40 : 40mm 20 : 20mm : mm 0: 0mm 1300: 1300mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. CD CD drawings Single-axis robot/arge, dustproof /ctuator width: mm/w Straight shape Single-axis robot/arge, dustproof /ctuator width: mm/w Straight shape High precision 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) surface (74) 140 Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of the high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) F oblong hole H7 0 depth pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) (from reference surface) D 24. ± (without brake) 11 (with brake) 4-øH7, depth E-M, depth 20 1 Slider center position (home) Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead ead (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD--/ISPD-- 40

42 ISD--400 ISPD Series Type ead Stroke s ISD: Standard ISPD: High precision Single-axis robot/arge, dustproof /ctuator width: mm/400w Straight shape Single-axis robot/arge, dustproof /ctuator width: mm/400w Straight shape High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ number 400: 400W 40 : 40mm 20 : 20mm : mm ead 0: 0mm 1300: 1300mm (in 0mm ) T1: XSE-J/K T2: Stroke in 0mm SSE XSE-P/Q Speed N : None Refer to the options S : 3m table below. M : m X : Specified length.0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) øH7, depth -M, depth 20 (model number: 3S) (model number: 3E) Cable joint connector thrust (N) ISD[ISPD] ~ ISD[ISPD] bsolute ~1300 1~ ISD[ISPD] ~ *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] 1S P11 Home limit switch P11 ost Motion (Note 4) 0.0mm [0.02mm] max. Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m 3S P11 Master axis M P12 Ma direction: 70mm max. Mb, Mc directions: 70mm max. 3E P11 Master axis (sensor on the opposite side) M P12 Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment Q seal (standard feature) Q P11 Non-motor side NM P12 T1: XSE-J/K T2: XSE-P/Q, SSE, rake P11 Guide with ball retention mechanism RT P12 (Note 7) N: None, S: 3m, M: m, X : Specified length Creep sensor C P11 Slave axis S P12 Protection structure IP30 Creep sensor on the opposite side C P11 High straightness, precision ST P13 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD (3) (1.) Detail view of ME SE Stroke ±0.02 (model number: 1S) 4 Home ME 12 ø Grease nipple for ball screw Cable exit from Grease nipple for guide the rear left (for greasing the guide on (model number: 1E) the mounting surface side) View (Grease nipple, same on the opposite side) surface (74) 140 Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are surface plugged with rubber grommets. ase mounting surface when the guide is of the high precision X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC 41 ISD--400/ISPD Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) F 2-oblong hole H depth Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) (from reference surface) D 24. ± (without brake) 173 (with brake) 4-øH7, depth E-M, depth 20 1 Slider center position (home) Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

43 ISD-X- ISPD-X- ISD: Standard ISPD: High precision Number/ number X Series Type ead Stroke s : bsolute : W 40: 40mm 20: 20mm 00: 00mm T1: XSE-J/K T2: N : None S : 3m Refer to the options table below. 100: 100mm SSE M : m (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/w Straight shape Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/w Straight shape High precision ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-X bsolute 40 1~ Designed 1 Designed. 00~100 exclusively for exclusively for ISD[ISPD]-X ~0 0.4 horizontal use 4 horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD (3) Detail view of ME SE Stroke ± øH7, depth -M, depth 20 (model number: 1S) 4 1 Home ME 12 (model number: 3S) (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) 93 surface (74) Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 117 (without brake) 11 (with brake) Ground wire connection screw (M4, 2 locations) 12 Processing jig holes are provided 2 over the entire bottom surface of 0 the base. They are not used for 0 F mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of the high precision 2-oblong hole H depth ± øH7, depth E-M, depth 20 1 (from reference surface) Slider center position(home) D Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD-X-/ISPD-X- 42

44 ISD-X-400 ISPD-X-400 Number/ number X 400 Series Type ead Stroke s ISD: Standard ISPD: High precision : bsolute 400: 400W 40: 40mm 20: 20mm 00: 00mm 100: 100mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/400w Straight shape Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/400w Straight shape High precision ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-X bsolute 40 1~ Designed 40 Designed ~100 exclusively for exclusively for ISD[ISPD]-X ~0 0.4 horizontal use horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings øH7, depth -M, depth 20 (model number: 3S) (model number: 3E) Cable joint connector CD (3) Detail view of ME SE Stroke ± Home ME 12 ø Grease nipple for ball screw Cable exit from Grease nipple for guide the rear left (for greasing the guide on (model number: 1E) the mounting surface side) (model number: 1S) View (Grease nipple, same on the opposite side) surface (74) Processing jig holes are provided 2 over the entire bottom surface of 0 the base. They are not used for 0 mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of the high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 2-oblong hole H depth F Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) ± (without brake) 173 (with brake) Ground wire connection screw (M4, 2 locations) 4-øH7, depth E-M, depth 20 1 (from reference surface) Slider center position (home) D Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC 43 ISD-X-400/ISPD-X-400 (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

45 Cleanroom Type ISDCR / ISPDCR / SSPDCR Small Standard Type Width: mm ISDCR (ISPDCR)-S P.4 Medium Standard Type Width: mm ISDCR (ISPDCR)-M-0 P.4 Width: mm ISDCR (ISPDCR)-M- P.47 ISDCR ISPDCR Standard (High Precision) Type arge Mid-Support Type Width: mm ISDCR (ISPDCR)-MX- P.4 Width: mm ISDCR (ISPDCR)-- P.49 Standard Type Width: mm ISDCR (ISPDCR)--400 P.0 Width: mm ISDCR (ISPDCR)-X- P.1 Mid-Support Type Width: mm ISDCR (ISPDCR)-X-400 P.2 Small High-Rigidity, Iron-ase Type Width: 0mm SSPDCR-S- P.3 SSPDCR High Precision Type Medium High-Rigidity, Iron-ase Type Width: 130mm SSPDCR-M-400 P.4 arge High-Rigidity, Iron-ase Type Width: 1mm SSPDCR--70 P. 44

46 ISDCR-S ISPDCR-S * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD (2.) surface 3 (1) Detail view of 1 (3) 4 (32.) Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of the high precision X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 4 ISDCR-S/ISPDCR-S (3.) 70 7 ME surface 7. SE F Stroke ir tube joint pplicable tube outer diameter ø12 (inner diameterø) (uried plug screw on the opposite side: Rc 3/") 2-oblong hole H depth 7 (from reference surface) D ±0.02 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø12mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 2.4N m Mb: 40.2N m Mc:.7N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 0± Home ME (3.) 2-øH7, depth 4-M, depth (without brake) 117. (with brake) 4-øH7, depth E-M, depth 17 Slider center position (home) (model number: 3S) (model number: 3E) Cable exit from the rear left (model number: 1E) (model number: 1S) Cable joint connector Ground wire connection screw (M3, 2 locations) ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.2kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number number of controlled axes axes Series Type ead Stroke s : bsolute 0: 0W 1 : 1mm : mm 0: 0mm T1: XSE-J/K T2: N : None S : 3m Refer to the options table below. 4 : 4mm 00: 00mm SSE M : m (in 0mm ) XSE-P/Q X : Specified length ISDCR: Standard ISPDCR: High precision Connectable encoder Operating method Power-supply voltage VC ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** ISDCR[ISPDCR]-S ~ ISDCR[ISPDCR]-S bsolute 0 0~00 1~ ISDCR[ISPDCR]-S ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). Single-axis robot for cleanroom/small/ctuator width: mm/0 W Straight shape Single-axis robot for cleanroom/small/ctuator width: mm/0 W Straight shape High precision S 0 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 thrust (N) 0 Suction flow rate (N /min) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

47 ISDCR-M-0 ISPDCR-M (2.) ISDCR: Standard ISPDCR: High precision (1) M 0 Series Type ead Stroke s Detail view of () ME SE : bsolute * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD number Single-axis robot for cleanroom/medium/ctuator width: mm/0w Straight shape Single-axis robot for cleanroom/medium/ctuator width: mm/0w Straight shape High precision 0: 0W 30 : 30mm 20 : 20mm : mm : mm Stroke 0: 0mm 10: 10mm (in 0mm ) ead T1: XSE-J/K T2: Stroke in 0mm SSE XSE-P/Q M, depth 1 N : None Refer to the options S : 3m table below. M : m X : Specified length.0g=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** thrust (N) 1~ ISDCR[ISPDCR]-M ISDCR[ISPDCR]-M bsolute 20 1~ ~10 ISDCR[ISPDCR]-M ~ ISDCR[ISPDCR]-M ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 0 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) Dynamic allowable load moment (Note ) Dynamic straightness (Note ) ase (Note 7) Grease Cleanliness degree Suction tube joint ± Home ME (3.) 0.0mm [0.02mm] max. Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, N: None, S: 3m, M: m, X : Specified length ow dust-raising grease (for ball screw and guide) Class (0.1µm per 1cf) Quick connect joint, applicable tube outer diameter ø12mm (model number: 3S) 2-øH7, depth 4-M, depth 1 (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) (model number: 1S) Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/) ø Suction flow rate (N /min) Joint installation position: Standard Joint installation position: Opposite side surface (4) 1 (32.) 2-oblong hole H depth ± (without brake) 11 (with brake) 4-øH7, depth Ground wire connection screw (M3, 2 locations) E-M, depth 20 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Processing jig holes are provided over the 12 7 entire bottom surface of the base. They are not used for mounting the actuator. surface (from reference surface) Slider center position (home) * Take note that to change the They are plugged with rubber grommets. 12. F D 42. home direction, the actuator must be returned to us for adjustment. ase mounting surface when the guide is of the high precision Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.3kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead ead speed ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR-M-0/ISPDCR-M-0 4 7

48 ISDCR-M- ISPDCR-M- M Series Type ead Stroke s ISDCR: Standard : bsolute : W 30 : 30mm 0: 0mm T1: XSE-J/K N : None Refer to the options 20 : 20mm T2: S : 3m table below. ISPDCR: High precision : mm : mm 10: 10mm (in 0mm ) SSE XSE-P/Q M : m X : Specified length * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD (2.) number (1) Detail view of () ME SE Stroke ead Stroke in 0mm.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) 1~ ISDCR[ISPDCR]-M ISDCR[ISPDCR]-M bsolute 20 1~ ~10 ISDCR[ISPDCR]-M ~ ISDCR[ISPDCR]-M ~ *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). Single-axis robot for cleanroom/medium/ctuator width: mm/w Straight shape Single-axis robot for cleanroom/medium/ctuator width: mm/w Straight shape High precision 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P M, depth 1 0 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm ± Home ME (3.) 2-øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) (model number: 1S) ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/) ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Suction flow rate (N /min) Joint installation position: Standard Joint installation position: Opposite side surface (4) 1 (32.) Processing jig holes are provided over the entire bottom surface of the base. They surface are not used for mounting the actuator. They are plugged with rubber grommets. 12. ase mounting surface when the guide is of the high precision X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 47 ISDCR-M-/ISPDCR-M oblong hole H depth F (from reference surface) D ± (without brake) 141 (with brake) 4-øH7, depth E-M, depth 20 7 Slider center position (home) Ground wire connection screw (M3, 2 locations) Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.4kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC 7 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

49 ISDCR-MX- ISPDCR-MX- Single-axis robot for cleanroom/medium, mid-support /ctuator width: mm/ W Straight shape Single-axis robot for cleanroom/medium, mid-support /ctuator width: mm/w Straight shape High precision MX Series Type ead Stroke s ISDCR: Standard : bsolute : W 30 : 30mm 00: 00mm T1: XSE-J/K N : None Refer to the options 20 : 20mm T2: S : 3m table below. ISPDCR: High precision 0: 0mm (in 0mm ) SSE XSE-P/Q M : m X : Specified length * Refer to P. for the details of items comprising the model number. Number/.0G=900mm/sec 2 number Stroke in cceleration (Note 1) Payload (Note 1) ead 0mm Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-MX bsolute 30 1~ Designed 30 Designed ~0 exclusively for exclusively for ISDCR[ISPDCR]-MX ~0 0.4 horizontal use 4 horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) オプション 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm CD drawings CD (1) Detail view of ME SE Stroke 1 4-M, depth ±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") Home 2-øH7, depth 4-M, depth 1 ME (3.) (model number: 3S) (model number: 3E) Cable joint connector Grease nipple Cable exit from for ball screw the rear left Grease nipple for guide (model number: 1E) (for greasing the guide on the mounting surface side) (model number: 1S) View (Grease nipple, same on the opposite side) 0 Joint installation position: Standard Joint installation position: Opposite side surface Processing jig holes are provided overthe entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. () (4) 1 (32.) surface ase mounting surface when the guide is of the high precision oblong hole H depth F (from reference surface) D ± øH7, depth 0.. (without brake) 141 (with brake) E-M, depth 20 1 Slider center position (home) 7 Ground wire connection screw (M3, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR-MX-/ISPDCR-MX- 4

50 ISDCR-- ISPDCR-- * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD (3) Series Type ead Stroke s : bsolute : W 40 : 40mm 20 : 20mm 0: 0mm T1: XSE-J/K T2: N : None S : 3m Refer to the options table below. : mm 1300: 1300mm SSE M : m (in 0 mm ) XSE-P/Q X : Specified length ISDCR: Standard ISPDCR: High precision number (1.) Detail view of ME SE Single-axis robot for cleanroom/arge/ctuator width: mm/ W Straight shape Single-axis robot for cleanroom/arge/ctuator width: mm/w Straight shape High precision ead Stroke in 0mm Stroke Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** ±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 4 Home ME (40.) (model number: 3S) (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) (model number: 1S) thrust (N) ø Suction flow rate (N /min) ISDCR[ISPDCR] ~ ISDCR[ISPDCR] bsolute 20 0~1300 1~ ISDCR[ISPDCR] ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 1.0kg. (Please also refer to P.9). ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] 1S P11 Home limit switch P11 ost Motion (Note 4) 0.0mm [0.02mm] max. Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. 3S P11 Master axis M P12 Dynamic straightness (Note ) 3E P11 Master axis (sensor on the opposite side) M P12 ase Material: luminum, with white alumite treatment Q seal (standard feature) Q P11 Non-motor side NM P12 T1: XSE-J/K T2: XSE-P/Q, SSE, rake P11 Guide with ball retention mechanism RT P12 (Note 7) N: None, S: 3m, M: m, X : Specified length Creep sensor C P11 Slave axis S P12 Grease ow dust-raising grease (for ball screw and guide) Creep sensor on the opposite side C P11 High straightness, precision ST P13 Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm Suction tube joint on the opposite side VR P øH7, depth M, depth Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side (77) 93 surface (74) 140 (32.) Processing jig holes are provided over 12 the entire bottom surface of the base. 2 surface They are not used for mounting the 0 0 actuator. They are plugged with rubber grommets. 0 ase mounting surface when the guide is of the high precision X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 49 ISDCR--/ISPDCR-- F 2-oblong hole H depth D (from reference surface) ± (without brake) 11 (with brake) 4-øH7, depth E-M, depth 20 1 Slider center position (home) Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

51 ISDCR--400 ISPDCR--400 Number/ CD drawings CD (3) ISDCR: Standard ISPDCR: High precision (1.) Series Type ead Stroke s : bsolute 400: 400W 40 : 40mm 20 : 20mm 0: 0mm T1: XSE-J/K T2: N : None S : 3m Refer to the options table below. : mm 1300: 1300mm SSE M : m (in 0 mm ) XSE-P/Q X : Specified length number Detail view of ME 400 * Refer to P. for the details of items comprising the model number. SE Single-axis robot for cleanroom/arge/ctuator width: mm/400w Straight shape Single-axis robot for cleanroom/arge/ctuator width: mm/400 W Straight shape High precision ead Stroke Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR] ~ ISDCR[ISPDCR] bsolute ~1300 1~ ISDCR[ISPDCR] ~ *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm ± ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 4 Home ME (40.) øH7, depth -M, depth 20 Cable exit from the rear left (model number: 1E) (model number: 1S) (model number: 3S) (model number: 3E) Cable joint connector ø thrust (N) Suction flow rate (N /min) Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 93 surface (74) 140 (32.) 2-oblong hole H depth ± (without brake) 173 (with brake) 4-øH7, depth E-M, depth 20 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not 12 1 to let the slider hit Processing jig holes are provided over 2 (from reference surface) Slider center position (home) the entire bottom surface of the base. surface surrounding parts They are not used for mounting the 0 F D 24. * Take note that to change the home actuator. They are plugged with rubber grommets. direction, the actuator must be ase mounting surface when the guide returned to us for adjustment. is of the high precision Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR--400/ISPDCR

52 ISDCR-X- ISPDCR-X- ISDCR: Standard ISPDCR: High precision Number/ number X Series Type ead Stroke s : bsolute : W 40 : 40mm 20 : 20mm 00: 00mm T1: XSE-J/K T2: N : None S : 3m Refer to the options table below. : mm SSE M : m (in 0 mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/w Straight shape Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/w Straight shape High precision ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-X bsolute 40 1~ Designed 1 Designed ~ exclusively for exclusively for ISDCR[ISPDCR]-X ~0 0.4 horizontal use 4 horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm CD drawings CD Detail view of ME SE Stroke ±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 0 Home 3 2-øH7, depth -M, depth 20 ME (40.) (model number: 3S) (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) (model number: 1S) ø Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side surface (74) (77) 140 (32.) Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of the high precision F 2-oblong hole H depth ± (without brake) 11 (with brake) 4-øH7, depth E-M, depth 20 1 (from reference surface) Slider center position (home) D Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 1 ISDCR-X-/ISPDCR-X- (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m)

53 ISDCR-X-400 ISPDCR-X-400 ISDCR: Standard ISPDCR: High precision Number/ number X 400 Series Type ead Stroke s : bsolute 400: 400W 40 : 40mm 20 : 20mm 00: 00mm T1: XSE-J/K T2: N : None S : 3m Refer to the options table below. : mm SSE M : m (in 0mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/400w Straight shape Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/400w Straight shape High precision ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-X bsolute 40 1~ Designed 40 Designed ~ exclusively for exclusively for ISDCR[ISPDCR]-X ~0 0.4 horizontal use horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 ±0.01mm [±0.00mm] Drive method (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm CD drawings (model number: 3S) øH7, depth M, depth 20 (model number: 3E) Cable joint connector 7 ø CD Detail view of ME SE Stroke ±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 0 3 Home ME (40.) Cable exit from the rear left (model number: 1E) (model number: 1S) Grease nipple for ball screw Grease nipple for guide (for greasing the guide on the mounting surface side) View (Grease nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side surface (74) (77) 140 (32.) 12 Processing jig holes are provided 2 over the entire bottom surface of 0 the base. They are not used for surface 0 F D mounting the actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of the high precision 2-oblong hole H depth (from reference surface) ± (without brake) 173 (with brake) 4-øH7, depth 70. E-M, depth 20 1 Slider center position (home) 93 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake D E F Mass (kg) ead speed ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR-X-400/ISPDCR-X-400 2

54 SSPDCR-S- Single-axis robot for cleanroom/small, high-rigidity, iron-base /ctuator width: 0mm/W Straight shape High precision SSPDCR S Series Type ead Stroke s SSPDCR: High precision : bsolute : W 30 : 30mm 20 : 20mm : mm 0: 0mm 10: 10mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. (in 0 mm ) XSE-P/Q X : Specified length * Refer to P. for the details of items comprising the model number. Number/.0G=900mm/sec 2 number Stroke in cceleration (Note 1) Payload (Note 1) ead 0mm Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) SSPDCR-S ~ bsolute SSPDCR-S ~10 1~ SSPDCR-S ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12 thrust (N) Suction flow rate (N /min) Positioning repeatability ±0.00mm Drive method all screw ø1mm equivalent to rolled C ost Motion 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 3N m Mb: 3N m Mc: 9N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm CD drawings CD 7 4. Quick connect joint (for suction). pplicable tube outer diameter ø12 can be installed on the opposite side. Slider reference surface ase reference surface ±0.02 (from reference surface) M, depth (32.) Stroke 10 Without brake: With brake: 19 ME SE 3 3 ME Home R Slider reference surface pitch x m Grease nipple (same on the opposite side) ccess the nipple by removing the guide/ball screw grommet. P 2-øH7, depth 17. ± M pitch x n. ± r-m, depth ±0.02 (from reference surface) øh7, depth Oblong hole, depth N 9. desired cable exit direction can be selected. 2. (M3 tap) R t-m3, depth 3 (same on the opposite side) 2-M3, depth (same on the opposite side) 0 92 ase reference surface Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake M N P R m n r t Mass (kg) ead speed ead ead pplicable Controller s pplicable Controller X-SE-P/Q number of controlled axes axes Connectable encoder Operating method Power-supply voltage VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 0/ VC Positioner pulse train control 3 SSPDCR-S- (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is,000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m)

55 SSPDCR-M-400 Single-axis robot for cleanroom/medium, high-rigidity, iron-base /ctuator width: 130mm/400W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/.0G=900mm/sec 2 number Stroke in cceleration (Note 1) Payload (Note 1) ead 0mm Speed Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) SSPDCR-M ~ bsolute SSPDCR-M ~1300 1~ SSPDCR-M ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). CD drawings CD 4. SSPDCR M 400 Series Type ead Stroke s SSPDCR: High precision : bsolute 400: 400W 40 : 40mm 20 : 20mm : mm 0: 0mm 1300: 1300mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. (in 0 mm ) XSE-P/Q X : Specified length Quick connect joint (for suction). pplicable tube outer diameter ø12 can be installed on the opposite side. -M, depth (32.). Without brake: Slider reference surface 1 Stroke With brake: ME SE ME Home ase reference surface ±0.02 (from reference surface) R øH7, depth Slider reference surface pitch x m Grease nipple (same on the opposite side) ccess the nipple by removing the guide/ball screw grommet. M P pitch x n 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 3S P11 Master axis M P12 3E P11 Master axis (sensor on the opposite side) M P12 Q seal (standard feature) Q P11 Non-motor side NM P12 rake P11 Guide with ball retention mechanism RT P12 Creep sensor C P11 Slave axis S P12 Creep sensor on the opposite side C P11 High straightness, precision ST P13 Suction tube joint on the opposite side VR P12. 7±0.02. ± r-m, depth ±0.02 (from reference surface) øh7, depth Oblong hole, depth N desired cable exit direction can be selected. 0 R 3. (M3 tap) t-m3, depth 4 (same on the opposite side) 2-M3, depth (same on the opposite side) ase reference surface Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts thrust (N) (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) Suction flow rate (N /min) Positioning repeatability ±0.00mm Drive method all screw ø20mm equivalent to rolled C ost Motion 0.02mm max. Dynamic allowable load moment (Note 2) Ma: N m Mb: N m Mc: 230N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating T1: XSE-J/K T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake M N P R m n r t Mass (kg) ead speed ead ead pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-J/K 4 axes bsolute/ Program 0/ VC SSE 2 axes Positioner pulse train control VC (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is,000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) SSPDCR-M-400 4

56 SSPDCR--70 Single-axis robot for cleanroom/arge, high-rigidity, iron-base /ctuator width: 1mm/70W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD Slider reference surface 9 4 Slider reference surface Quick connect joint (for suction) pplicable tube outer diameter 012 Can be installed on the opposite side Quick connect joint (for suction) -M, depth 1 pplicable tube outer diameter ø12 13 Can be installed on the opposite side. (32.) : ST + 4 for standard, ST + 27 with brake 1 20 Stroke (without brake) 211 (with brake) (model number: 1S) SE ME ME Home Washer-assembled screw M4 (32.) (for FG, 2 locations) 1 (17) R pitch xm Grease nipple (same on the opposite side) ccess the nipple by removing the guide/ball screw grommet. M 7 P pitch xn r-m, depth ± R 2-M3, depth 3(M3 tap) (same on the opposite side) t-m3, depth 4 (same on the opposite side) (model number: 3S) (model number: 3E) Cable exit from the rear left (model number: 1E) ase ±0.02 H ±0.02 (from reference surface) 2 reference surface (from reference surface) 0 øh depth 12 Slider center 13 1 Oblong hole, depth 12 0 N 1 Dimensions, Mass and Speed by Stroke *If the brake is equipped, the mass increases by 1.0kg. *The maximum speed varies depending on the stroke. Stroke without brake with brake M N P R m n r t Mass (kg) speed number SSPDCR 70 Series Type ead Stroke s SSPDCR: High precision : bsolute 70: 70W 0 : 0mm 2 : 2mm 0: 0mm 0: 0mm T1: XSE-J/K T2: SSE N : None S : 3m M : m Refer to the options table below. (in 0 mm ) XSE-P/Q X : Specified length ead Stroke in 0mm Speed.0G=900mm/sec 2 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. ead ead thrust (N) Suction flow rate (N /min) SSPDCR bsolute 0 1~ ~0 SSPDCR ~ * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 2.0kg. (Please also refer to P.9). Positioning repeatability ±0.00mm Drive method all screw ø2mm equivalent to rolled C 1S P11 Home limit switch P11 ost Motion 0.02mm max. Cable exit from the rear left 1E P11 Home limit switch on the opposite side P11 Dynamic allowable load moment (Note 2) Ma: 13.N m Mb: 13.N m Mc: 334.N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. 3S P11 Master axis M P12 Dynamic straightness (Note 3) 0.01mm/m max. 3E P11 Master axis (sensor on the opposite side) M P12 ase Material: Cast iron with coating Q seal (standard feature) Q P11 Non-motor side NM P12 T1: XSE-J/K T2: XSE-P/Q, SSE, rake P11 Guide with ball retention mechanism RT P12 (Note 4) N: None, S: 3m, M: m, X : Specified length Creep sensor C P11 Slave axis S P12 Grease ow dust-raising grease (for ball screw and guide) Creep sensor on the opposite side C P11 High straightness, precision ST P13 Cleanliness degree Class (0.1µm per 1cf) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm Suction tube joint on the opposite side VR P12 2-øH depth 12 0 desired cable exit 2 0± Slider reference surface direction can be selected. Cable joint connector pplicable Controller s pplicable number Connectable Operating Power-supply Controller of controlled axes encoder method voltage X-SE-P/Q axes VC X-SE-K 4 axes 0/ VC bsolute/ Program X-SE-J *(note ) 4 axes SSE 2 axes VC Positioner pulse train control SSPDCR--70 (Note 1) Refer to P. 9 for the relationship of and payload. (Note 2) When the traveling life is,000 km. (Note 3) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Note 4) The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) (Note ) If the actuator is to be used vertically, use a controller other than the XSE-J.

57 pplicable Controller The IS/ISP/SSP/ISD/ISPD/ISDCR/ISPDCR/SSPDCR can be operated with the following controllers. Select a controller that meets the s of your equipment. *For details, refer to the ROO Cylinder General Catalog. Controller series/ SSE J/K XSE P/Q External viewπ ase s Control s Features Power capacity Input power supply Operating powersupply voltage range Total maximum of connected axes number of controlled axes Position detection method Operation method positioner controller supporting up to 12 positioning points For control modes, the pulse-train input mode is supported in addition to the positioner mode. 0W/1V 0W/22V W/49V 400W/44V 70W/19V 0 VC VC W (0-V power-supply ) 70W (-V power-supply ) program controller capable of 2-axis interpolation operation. Offering excellent cost performance, although scalability is lower than XSE controllers. 0W/19V 0W/294V W/41V 400W/V 70W/11V (The above assumes a 1-axis.) 0 VC VC 400W (0-V power-supply ) 00W (-V power-supply ) ±% high-function controller capable of interpolation operation involving up to 4 axes. Can be operated on 0 VC. high-function controller capable of interpolation operation involving up to axes. ctuators of a total wattage of 2400W can be connected. The s vary. Contact II for details. 0 VC VC 400W (XSE-J, single-phase, 0 V) 00W (XSE-K, single-phase, 0 V) VC Three-phase VC 100W (single-phase, V) 2400W (three-phase, V) 2 axes 4 axes axes Positioner operation Pulse-train control encoder/bsolute encoder Program operation Positioner operation (switchable) Program operation Program Inputs/Outputs and communication Program language Super SE language Number of programs Number of program steps 9,999,000 9,999 Number of multi-task programs 1 1 Number of positions 12 max. 20,000 3,000 20,000 Data input devices (optional) Standard inputs/ s Extended inputs/ s Teaching pendant number: CON-PT/CON-T RCM-E/RCM-P PC software number: RCM-1-MW (for RS232 communication) RCM-1-US (for US communication) 1 input points/1 points (NPN/PNP selectable) Not supported Teaching pendant number: SE-T-J SE-TD-J I-T-X-J I-T-XD-J PC software number: I-1-X-MW-J (for RS232 communication) I-1-X-US (for US communication) 24 input points/ points (NPN/PNP selectable) Teaching pendant number: I-T-X/XD SE-TG (for both XSE-J/K) SE-T/TD (for XSE-K) PC software number: I-1-X-MW (for RS232 communication) I-1-X-USMW (for US communication) Teaching pendant number: SE-T/TD/TG I-T-X/XD PC software number: I-1-X-MW I-1-X-USMW (for XSE-P) : I-1-X-MW (for XSE-Q) 32 input points/1 points (NPN/PNP selectable) Total 0 input/ points (XSE-J) Total 33 input/ points (XSE-K) Total 34 input/ points Field network DeviceNet, CC ink, Profius DeviceNet, CC ink, Profius, Ethernet mbient operating temperature/humidity Operating ambience External dimensions x. (H) x 121 (D) (W or less) 72 x. (H) x 121 (D) (400W or more) 0 to 400C to 9% (non-condensing) There shall be no corrosive gases or excessive powder dust. 0 x 202. (H) x 12 (D) (when the absolute battery installed) Mass 0. to 1.1 kg 1.4kg 19.4 x 19 (H) x 12.3 (D) (XSE-J, 1-axis ) 39.4 x 19 (H) x 12.3 (D) (XSE-K, 1-axis, 2-axes ) 2. to.0 kg (XSE-J).0 to 7.0 kg (XSE-K) ccessories I/O flat cable (40 cores) I/O flat cable (34 cores) I/O flat cable (0 cores) 2 x 19 (H) x 12.3 (D) (XSE-P, 1-axis ) 2 x 19 (H) x 12.3 (D) (XSE-Q, 1-axis ).2 to.7 kg (XSE-P) 4. to.0 kg (XSE-Q)