Environment Clean Room Specification

Environment Clean Room Specification ISO Class 4 *1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate. Slider Type Ball Screw Drive/EFS Series Step Motor (Servo/24 VDC) Page 514 AC Servo Motor Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. Application example Type Servo Motor (24 VDC) Page 522 Vacuum port Vacuum suction Support Guide/EFG Series Type Page 527 Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. A support guide is designed to support workpieces with significant overhang. High Rigidity Slider Type Ball Screw Drive/EJS Series AC Servo Motor Vacuum suction Vacuum port * Port locations can be selected. As the dimensions are the same as the EF series body, installation is simple and contributes to a reduction in installation and assembly labor. The standard equipped seal bands prevent grease from splashing and external foreign matter from entering. Type Page 533 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 EF (Drive side) Support guide Caution After installing the actuator on the drive side, perform the alignment of the support guide. However, when the mounting flatness exceeds.1, install a floating mechanism separately on the workpiece installation surface (table). 59

EFS SeriessPages 514, 522 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive/EFS Series Particle Generation Measuring Method AC Servo Motor Clean Room Specification Particle Generation Characteristics The particle generation data for SMC Clean Series are measured in the following test method. Test Method (Example) Operate the specimen that is placed in an ISO Class 5 equivalent clean bench, and measure the changes of the particle concentration over time until the number of cycles reaches the specified point. Measuring Conditions Description aser dust monitor (Automatic particle counter by lightscattering method) Measuring instrument Minimum measurable particle diameter.1 μm Suction flow rate 28.3 /min (ANR) Sampling time 5 min Setting conditions Interval time 55 min Sampling air flow 141.5 (ANR) Clean bench (ISO Class 5 equivalent) Particle generation measuring circuit Vacuum suction from vacuum port aser dust monitor Evaluation Method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m 3. When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range. Note 1) Sampling air flow rate: Number of particles contained in 141.5 (ANR) of air Note 2) Actuator: 1 million cycles Note 3) The particle generation characteristics (Page 532) provide a guide for selection but is not guaranteed. Note 4) When the suction flow rate is /min, the particle concentration is measured during operation without suction. A 51

Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) Particle Generation Characteristics EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification EFS16 Speed 5 mm/s Particle concentration [particles/m 3 ] 1 1 1 1 1 1 1 ISO Class 6 upper limit Suction flow rate: 1 /min Suction flow rate: /min ISO Class 5 upper limit ISO Class 4 upper limit Suction flow rate: 3 /min 1.1.2.3.4.5.6 ISO Class 6 upper limit Suction flow rate: /min Particle diameter [µm] EFS32 Speed 5 mm/s Particle concentration [particles/m 3 ] 1 1 1 1 1 1 Suction flow rate: 2 /min ISO Class 5 upper limit ISO Class 4 upper limit Suction flow rate: 3 /min EFS25 Speed 5 mm/s Particle concentration [particles/m 3 ] Particle concentration [particles/m 3 ] 1 1 1 1 1 1 1 1 1 1 1 ISO Class 6 upper limit Suction flow rate: 2 /min Suction flow rate: /min ISO Class 5 upper limit ISO Class 4 upper limit Suction flow rate: 3 /min 1.1.2.3.4.5.6 1 1 ISO Class 6 upper limit Suction flow rate: /min Suction flow rate: 4 /min Particle diameter [µm] EFS4 Speed 5 mm/s Suction flow rate: 2 /min Suction flow rate: 5 /min ISO Class 5 upper limit ISO Class 4 upper limit EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 1 1 1.1.2.3.4.5.6 Particle diameter [µm] 1.1.2.3.4.5.6 Particle diameter [µm] 511 A

EFS Series AC Servo Motor Clean Room Specification Particle Generation Characteristics AC Servo Motor (1/2/4 W) EFS25 Speed 9 mm/s 1 EFS32 Speed 1 mm/s 1 ISO Class 6 upper limit ISO Class 6 upper limit 1 1 Suction flow rate: /min Suction flow rate: /min Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 3 /min Suction flow rate: 5 /min ISO Class 5 upper limit ISO Class 4 upper limit Particle concentration [particles/m 3 ] 1 Suction flow rate: 3 /min 1 ISO Class 5 upper limit 1 Suction flow rate: 6 /min 1 ISO Class 4 upper limit 1 1 1.1.2.3.4.5.6 Particle diameter [µm] 1.1.2.3.4.5.6 Particle diameter [µm] EFS4 Speed 1 mm/s 1 1 ISO Class 6 upper limit ISO Class 5 upper limit Suction flow rate: /min Particle concentration [particles/m 3 ] 1 1 1 1 Suction flow rate: 8 /min Suction flow rate: 5 /min Suction flow rate: 1 /min ISO Class 4 upper limit 1 1.1.2.3.4.5.6 Particle diameter [µm] A 512

Selection Procedure Electric Actuator/Slider Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Ball Screw Drive/EFS Series Belt Drive/EFB Series Ball Screw Drive/EFS Series Clean Room Specification Selection EFS SeriessPage 62 EFB SeriessPage 9 EFS SeriessPage 514 Step 1 Check the work load speed. Step 2 Check the cycle time. Step 3 Check the allowable moment. Selection Example Operating conditions Workpiece mass: 5 [kg] Workpiece mounting condition: Speed: 3 [mm/s] W Acceleration/Deceleration: 3 [mm/s 2 ] Stroke: 2 [mm] Mounting orientation: upward Step 1 Check the work load speed. <Speed Work load graph> (Pages 39 to 42) Select the target model based on the workpiece mass and speed with reference to the <Speed Work load graph>. Selection example) The EFS25A-2 is temporarily selected based on the graph shown on the right side. Step 2 Check the cycle time. Calculate the cycle time using the following calculation method. Cycle time: T can be found from the following equation. 3 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. T1 = V/a1 [s] T4: Settling time varies depending on the conditions such as motor types, load and in position of the step data. Therefore, calculate the settling time with reference to the following value. T4 =.2 [s] Mep m T3 = V/a2 [s] T2: Constant speed time can be found from the following equation..5 V (T1 + T3) T2 = [s] V Step 3 Check the guide moment. Overhang: 3 [mm] 1 Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 3/3 =.1 [s], T3 = V/a2 = 3/3 =.1 [s].5 V (T1 + T3) T2 = V 2.5 3 (.1 +.1) = 3 =.57 [s] T4 =.2 [s] Therefore, the cycle time can be obtained as follows. T = T1 + T2 + T3 + T4 =.1 +.57 +.1 +.2 =.97 [s] 2 1 5 5 mm/s 2 1 mm/s 2 3 mm/s 2 3 25 2 1 5 2 4 6 8 1 12 <Speed Work load graph> (EFS25/Step motor) a1 T1 ead 6: EFS25B ead 12: EFS25A ead 2: EFS25H a2 T2 T3 T4 : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s 2 ] (Operating condition) a2: Deceleration [mm/s 2 ] (Operating condition) Time [s] T1: Acceleration time [s] Time until reaching the set speed T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed 5 1 2 Based on the above calculation result, the EFS25A-2 is selected. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38

Speed Work oad Graph (Guide) For Step Motor (Servo/24 VDC) P6, P1, PMJ EFS16/Ball Screw Drive Selection EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification For the PA, refer to page 4. The following graph shows the values when moving force is 1%. 16 14 12 1 8 6 4 2 1 2 3 4 5 6 7 8 EFS25/Ball Screw Drive 3 25 2 1 ead H 5 2 4 6 8 1 12 EFS32/Ball Screw Drive 5 4 3 2 ead H 1 2 4 6 8 1 12 EFS4/Ball Screw Drive 7 6 6 4 2 1 2 3 4 5 6 2 1 5 ead H 1 2 3 4 5 6 3 2 1 ead H 1 2 3 4 5 6 3 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 5 4 3 2 1 ead H 2 1 /ead H 2 4 6 8 1 12 1 2 3 4 5 6 39

EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification For the P6/P1/ Speed Work oad Graph (Guide) PMJ, refer to page 39. For Step Motor (Servo/24 VDC) PA The following graph shows the values when moving force is 1%. EFS16/Ball Screw Drive 16 14 12 1 8 6 4 2 1 2 3 4 5 6 7 8 EFS25/Ball Screw Drive 3 25 2 1 ead H 5 2 4 6 8 1 12 EFS32/Ball Screw Drive 5 4 3 2 ead H 1 2 4 6 8 1 12 EFS4/Ball Screw Drive 7 6 5 4 3 ead H 2 1 6 4 2 1 2 3 4 5 6 2 1 5 ead H 1 2 3 4 5 6 3 2 1 ead H 1 2 3 4 5 6 3 2 1 ead H 4 2 4 6 8 1 12 1 2 3 4 5 6

Speed Work oad Graph (Guide) For Step Motor (Servo/24 VDC) P6, P1, PMJ The following graph shows the values when moving force is 1%. EFB/Belt Drive Selection EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification 2 18 16 14 12 EFB25 1 8 6 4 2 EFB16 EFB32 5 1 2 EFB/Belt Drive 14 12 1 8 6 4 2 EFB32 EFB25 EFB16 For Step Motor (Servo/24 VDC) PA 5 1 2 The following graph shows the values when moving force is 1%. EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 41

EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Speed Work oad Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 25%. EFS16A/Ball Screw Drive 12 6 1 8 6 4 4 2 2 1 2 3 4 5 6 7 8 9 EFS25A/Ball Screw Drive 1 2 3 4 5 6 7 8 9 1 2 1 ead H 5 5 ead H 2 4 6 8 1 12 1 2 3 4 5 6 7 8 9 Servo Motor (24 VDC) The following graph shows the values when moving force is 25%. EFB/Belt Drive 4 2 EFB25 EFB16 42 5 1 2

Selection EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Orientation /Bottom Wall oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] 3 5 1 4 Mep Mey 2 m m m Mer X Y Z X Y 1 [mm] 2 [mm] 3 [mm] 4 [mm] 5 [mm] 2 1 5 2 4 6 8 1 12 14 16 1 8 6 4 2 2 4 6 8 1 12 14 16 2 1 5 2 4 6 8 1 12 14 16 2 1 5 2 4 6 8 1 12 14 16 2 1 5 Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 [mm] 2 [mm] 3 [mm] 4 [mm] 5 [mm] 2 1 5 4 8 12 16 2 24 1 8 6 4 2 4 8 12 16 2 24 2 1 5 4 8 12 16 2 24 2 1 5 4 8 12 16 2 24 2 1 5 EF16 EF25 EF32 EF4 1 [mm] 2 [mm] 3 [mm] 4 [mm] 5 [mm] 2 1 5 1 2 3 4 5 1 8 6 4 2 1 2 3 4 5 2 1 5 1 2 3 4 5 2 1 5 1 2 3 4 5 2 1 5 1 [mm] 2 [mm] 3 [mm] 4 [mm] 5 [mm] 2 1 5 1 2 3 4 5 6 1 8 6 4 2 1 2 3 4 5 6 2 1 5 1 2 3 4 5 6 2 1 5 1 2 3 4 5 6 2 1 5 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 2 4 6 8 1 12 14 16 1 4 8 12 16 2 24 1 2 3 4 5 1 1 1 2 3 4 5 6 1 8 8 8 8 6 Z 6 [mm] 6 4 6 [mm] 6 4 6 [mm] 6 4 6 [mm] 6 4 2 2 2 2 2 4 6 8 1 12 14 16 4 8 12 16 2 24 1 2 3 4 5 1 2 3 4 5 6 43

EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Orientation oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 EF16 EF25 EF32 EF4 7 m Mey Y 7 [mm] 1 5 1 2 3 4 5 7 [mm] 1 5 5 1 7 [mm] 1 5 5 1 2 7 [mm] 1 5 5 1 2 25 3 8 m Mep Z 8 [mm] 1 5 1 2 3 4 5 8 [mm] 1 5 5 1 8 [mm] 1 5 5 1 2 8 [mm] 1 5 5 1 2 25 3 Calculation of Guide oad Factor 1. Decide operating conditions. : EFS/EFB Size: 16/25/32/4 Mounting orientation: /Bottom/Wall/ Example 1. Operating conditions : EFS4 Size: 4 Mounting orientation: Acceleration [mm/s 2 ]: 3 : 2 Work load center position [mm]: Xc =, Yc = 5, Zc = 2 2. Select the graphs for horizontal of the EF4 on page 43. Acceleration [mm/s 2 ]: a : m Work load center position [mm]: Xc/Yc/Zc 2. Select the target graph with reference to the model, size and mounting orientation. 3. Based on the acceleration and work load, obtain the overhang [mm]: x/y/z from the graph. 4. Calculate the load factor for each direction. αx = Xc/x, αy = Yc/y, αz = Zc/z 5. Confirm the total of αx, αy and αz is 1 or less. αx + αy + αz 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. 1. z 3. Wall x 2. Bottom x Mounting orientation z y y x 4. 3. x = 4 mm, y = 25 mm, z = mm 4. The load factor for each direction can be obtained as follows. αx = /4 = αy = 5/25 =.2 αz = 2/ =.13 5. αx + αy + αz =.33 1 z y x z y 2 1 2 8 z 1 [mm] 1 2 [mm] 6 4 3 [mm] 1 5 x y 2 5 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 44

Selection EF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Table Accuracy D side.25.2 B side w A side C side Table Displacement (Reference Value) W q Displacement [mm].8.6.4.2 EF16 EF16 ( = 2 mm) EF25 ( = 25 mm).12.1 Traveling parallelism [mm] (Every 3 mm) q C side traveling w D side traveling parallelism to A side parallelism to B side EF16.5.3 EF25.5.3 EF32.5.3 EF4.5.3 Note) Traveling parallelism does not include the mounting surface accuracy. 1 2 3 4 5 oad W [N] EF4 ( = 37 mm) EF32 ( = 3 mm) Note 1) This displacement is measured when a mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately. Overhang Displacement Due to Table Clearance (Reference Value) Basic type High precision type EF16 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 Displacement [mm]..1 EF25 EF4 Displacement [mm].8.6.4 EF25 EF4.5 EF32.2 EF32 1 2 3 Overhang distance [mm] 1 2 3 Overhang distance [mm] 45

Selection Procedure Electric Actuator/Slider Type EFS SeriessPage 76 EFS SeriessPage 522 AC Servo Motor Ball Screw Drive/EFS Series Ball Screw Drive/EFS Series Selection Clean Room Specification Step 1 Check the work load speed. Step 2 Check the cycle time. Step 3 Check the allowable moment. Selection Example Operating Workpiece mass: 45 [kg] conditions Speed: 3 [mm/s] Acceleration/Deceleration: 3 [mm/s 2 ] Stroke: 2 [mm] Mounting position: upward 3 Mep m Overhang: 3 [mm] Workpiece mounting condition: Step 1 Check the work load speed. <Speed Work load graph> (Page 47) Select the target model based on the workpiece mass and speed with reference to the <Speed Work load graph>. Selection example) The EFS4S4B-2 is temporarily selected based on the graph shown on the right side. Step 2 Check the cycle time. Calculate the cycle time using the following calculation method. Cycle time: T can be found from the following equation. T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. T1 = V/a1 [s] T3 = V/a2 [s] T2: Constant speed time can be found from the following equation..5 V (T1 + T3) T2 = [s] V T4: Settling time varies depending on the motor type and load. The value below is recommended. T4 =.5 [s] Step 3 Check the guide moment. 1 1 5 W Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 3/3 =.1 [s], T3 = V/a2 = 3/3 =.1 [s].5 V (T1 + T3) T2 = V 2.5 3 (.1 +.1) = 3 =.57 [s] T4 =.5 [s] Therefore, the cycle time can be obtained as follows. T = T1 + T2 + T3 + T4 =.1 +.57 +.1 +.5 =.82 [s] 1 mm/s 2 3 mm/s 2 7 6 5 4 3 2 1 2 4 6 8 1 <Speed Work load graph> (EFS4) a1 T1 ead 1: EFS4 B ead 2: EFS4 A a2 T2 T3 T4 : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s 2 ] (Operating condition) a2: Deceleration [mm/s 2 ] (Operating condition) Time [s] T1: Acceleration time [s] Time until reaching the set speed T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed Based on the above calculation result, the EFS4S4B-2 is selected. 5 mm/s 2 1 2 3 4 5 6 46

Selection EFS Series AC Servo Motor Clean Room Specification Speed Work oad Graph/Required Conditions for Regeneration Option (Guide) EFS25/Ball Screw Drive 3 25 2 1 5 ead 6: EFS25 B ead 12: EFS25 A ead 2: EFS25 H 2 4 6 8 1 12 14 16 Speed [mm/s] EFS32/Ball Screw Drive 6 5 4 3 2 1 7 6 5 4 3 2 1 ead 8: EFS32 B 2 4 6 8 1 12 14 16 Speed [mm/s] EFS4/Ball Screw Drive ead 1: EFS4 B 2 4 6 8 1 12 14 16 Speed [mm/s] A A ead 16: EFS32 A ead 24: EFS32 H ead 2: EFS4 A Required conditions for Regeneration option ead 3: EFS4 H Regeneration option is required when using product above regeneration line in graph. (Order separately.) Allowable Stroke Speed AC servo motor EFS25 1 W /l4 EFS32 2 W /l6 A 2 1 5 ead 6: EFS25 B ead 12: EFS25 A Use a regeneration option. ead 2: EFS25 H 2 4 6 8 1 12 14 16 Speed [mm/s] 3 25 2 1 5 2 4 6 8 1 12 14 16 Speed [mm/s] 4 35 3 25 2 1 5 ead 8: EFS32 B A The allowable speed is restricted depending on the stroke. Select it by referring to Allowable Stroke Speed below. ead 1: EFS4 B A ead 16: EFS32 A ead 2: EFS4 A 2 4 6 8 1 12 14 16 Speed [mm/s] B A ead 24: EFS32 H ead 3: EFS4 H Regeneration Option s Operating condition A B -MR-RB-32 -MR-RB-12 ead Stroke [mm] Symbol [mm] Up to 1 Up to 2 Up to 3 Up to 4 Up to 5 Up to 6 Up to 7 Up to 8 Up to 9 Up to 1 Up to 11 Up to 12 H 2 12 9 7 55 A 12 9 72 54 42 33 B 6 45 36 27 21 16 (Motor rotation speed) (45 rpm) (365 rpm) (27 rpm) (21 rpm) (165 rpm) H 24 12 93 75 61 51 A 16 1 8 62 5 41 34 B 8 5 4 31 25 2 17 (Motor rotation speed) (375 rpm) (3 rpm) (2325 rpm) (1875 rpm) (37 rpm) (1275 rpm) H 3 141 114 93 78 5 5 EFS4 4 W A 2 1 94 76 62 52 44 38 /l6 B 1 5 47 38 31 26 22 19 (Motor rotation speed) (3 rpm) (282 rpm) (228 rpm) (186 rpm) (6 rpm) (132 rpm) (114 rpm) 47 [mm/s] EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2

EFS Series AC Servo Motor Clean Room Specification Work oad Acceleration/Deceleration Graph (Guide) EFS25SlH/Ball Screw Drive 2 Duty ratio: 5% 175 Duty ratio: 1% 125 1 75 5 25 2 4 6 8 1 EFS25SlH/Ball Screw Drive 225 Duty ratio: 5% 2 175 125 1 Duty ratio: 1% 75 5 25 1 2 3 4 EFS25SlA/Ball Screw Drive EFS25SlA/Ball Screw Drive 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 5 1 2 2 4 6 8 EFS25SlB/Ball Screw Drive EFS25SlB/Ball Screw Drive 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 5 1 2 5 1 48

Selection EFS Series AC Servo Motor Clean Room Specification Work oad Acceleration/Deceleration Graph (Guide) EFS32SlH/Ball Screw Drive 225 2 Duty ratio: 5% 175 125 Duty ratio: 1% 1 75 5 25 5 1 2 25 3 EFS32SlA/Ball Screw Drive 2 175 Duty ratio: 5% 125 Duty ratio: 1% 1 75 5 25 1 2 3 4 EFS32SlB/Ball Screw Drive 2 Duty ratio: 5% 175 Duty ratio: 1% 125 1 75 5 25 1 2 3 4 EFS32SlH/Ball Screw Drive 225 2 175 Duty ratio: 5% 125 Duty ratio: 1% 1 75 5 25 1 2 3 4 5 EFS32SlA/Ball Screw Drive 2 175 Duty ratio: 5% 125 1 Duty ratio: 1% 75 5 25 2 4 6 8 1 EFS32SlB/Ball Screw Drive 2 Duty ratio: 5% 175 Duty ratio: 1% 125 1 75 5 25 5 1 2 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 49

EFS Series AC Servo Motor Clean Room Specification Work oad Acceleration/Deceleration Graph (Guide) EFS4SlH/Ball Screw Drive EFS4SlH/Ball Screw Drive 225 Duty ratio: 5% 2 175 Duty ratio: 1% 125 1 75 5 25 225 2 175 Duty ratio: 5% 125 Duty ratio: 1% 1 75 5 25 5 1 2 25 3 1 2 3 4 5 6 7 EFS4SlA/Ball Screw Drive 225 EFS4SlA/Ball Screw Drive 225 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 2 175 125 1 75 5 25 Duty ratio: 5% Duty ratio: 1% 1 2 3 4 5 5 1 EFS4SlB/Ball Screw Drive 225 EFS4SlB/Ball Screw Drive 225 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 2 175 125 1 75 5 25 Duty ratio: 1% Duty ratio: 5% 1 2 3 4 5 6 1 2 3 5

Selection EFS Series AC Servo Motor Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s 2 Orientation oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] EFS25Sl EFS32Sl EFS4Sl EF EJ 1 X 1 [mm] 1 5 1 [mm] 1 5 1 [mm] 1 5 E EM /Bottom 2 m Mer Y 2 [mm] 5 1 2 1 8 6 4 2 5 1 2 2 [mm] 1 2 3 4 1 8 6 4 2 1 2 3 4 2 [mm] 1 2 3 4 5 6 1 8 6 4 2 1 2 3 4 5 6 ES EPY EPS ER EH -X5 EFS 3 Mep m Z 3 [mm] 1 5 3 [mm] 1 5 3 [mm] 1 5 EJS 25A- 5 1 2 1 2 3 4 1 2 3 4 5 6 S SS-T 4 X 4 [mm] 1 5 4 [mm] 1 5 4 [mm] 1 5 Y Motorless 5 1 2 1 2 3 4 1 2 3 4 5 6 AT Z Wall 5 Mey m Y 5 [mm] 1 5 5 [mm] 1 5 5 [mm] 1 5 C3F2 5 1 2 1 2 3 4 1 2 3 4 5 6 1 1 1 8 8 8 6 Z 6 [mm] 6 4 6 [mm] 6 4 6 [mm] 6 4 2 2 2 5 1 2 1 2 3 4 1 2 3 4 5 6 51

EFS Series AC Servo Motor Clean Room Specification Dynamic Allowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to "Calculation of Guide oad Factor" or the Electric Actuator Selection Software for confirmation, http://www.smcworld.com Orientation Acceleration/Deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s 2 oad overhanging direction m : Me: Dynamic allowable moment [N m] : Overhang to the work load center of gravity [mm] EFS25Sl EFS32Sl EFS4Sl 7 Y 7 [mm] 1 5 7 [mm] 1 5 7 [mm] 1 5 m Mey 5 1 2 1 2 3 4 1 2 3 4 5 6 8 Z 8 [mm] 1 5 8 [mm] 1 5 8 [mm] 1 5 m Mep 2 4 6 8 1 5 1 2 1 2 3 1. Decide operating conditions. : EFS Size: 25/32/4 Mounting orientation: /Bottom/Wall/ Example 1. Operating conditions : EFS4 Size: 4 Mounting orientation: Acceleration [mm/s 2 ]: 3 : 2 Work load center position [mm]: Xc =, Yc = 5, Zc = 2 2. Select the graphs for horizontal of the EFS4 on page 51. Calculation of Guide oad Factor Acceleration [mm/s 2 ]: a : m Work load center position [mm]: Xc/Yc/Zc 2. Select the target graph with reference to the model, size and mounting orientation. 3. Based on the acceleration and work load, obtain the overhang [mm]: x/y/z from the graph. 4. Calculate the load factor for each direction. αx = Xc/x, αy = Yc/y, αz = Zc/z 5. Confirm the total of αx, αy and αz is 1 or less. αx + αy + αz 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. 1. z 3. Wall x 2. Bottom x Mounting orientation z y y x 4. 3. x = 25 mm, y = 18 mm, z = 1 mm 4. The load factor for each direction can be obtained as follows. αx = /25 = αy = 5/18 =.27 αz = 2/1 =.2 5. αx + αy + αz =.47 1 z y x z y 1 8 1 [mm] 1 5 2 [mm] 6 4 3 [mm] 1 z 5 x 2 y 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 52

Selection EFS Series AC Servo Motor Clean Room Specification Table Accuracy D side.25.2 B side w A side q C side Table Displacement (Reference Value) W Displacement [mm].8.6.4.2 EF16 EFS25 ( = 25 mm).12.1 Traveling parallelism [mm] (Every 3 mm) q C side traveling w D side traveling parallelism to A side parallelism to B side EFS25.5.3 EFS32.5.3 EFS4.5.3 Note) Traveling parallelism does not include the mounting surface accuracy. 1 2 3 4 5 oad W [N] EFS4 ( = 37 mm) EFS32 ( = 3 mm) Note 1) This displacement is measured when a mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately. Overhang Displacement Due to Table Clearance (Reference Value) Basic type High precision type EF16 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 Displacement [mm]..1 EF25 EF4 Displacement [mm].8.6.4 EF25 EF4.5 EF32.2 EF32 1 2 3 Overhang distance [mm] 1 2 3 Overhang distance [mm] 53

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification EFS Series EFS16, 25, 32, 4 Refer to page 38 for model selection and page 51 for particle generation characteristics. 11 EFS H 16 B 1 S 1 6N 1 Clean Series 11 Vacuum type q How to Order w e r t y u i o!!1!2 q Accuracy Nil Basic type H High precision type r ead [mm] Symbol EFS16 EFS25 EFS32 EFS4 A 1 12 16 2 B 5 6 8 1 t Stroke [mm] 5 5 to to 1 1 * Refer to the applicable stroke table. w Size 16 25 32 4 e Motor type Symbol Nil A Type Step motor (Servo/24 VDC) Servo motor (24 VDC) Caution Applicable size EFS16 EFS25 EFS32 EFS4 V V V V Compatible controller/ driver P6 P1 PA PMJ V V A6 [CE-compliant products] q EMC compliance was tested by combining the electric actuator EF series and the controller series. The EMC depends on the configuration of the customer s control panel and the relationship with other electrical equipment and wiring. Therefore, conformity to the EMC directive cannot be certified for SMC components incorporated into the customer s equipment under actual operating conditions. As a result, it is necessary for the customer to verify conformity to the EMC directive for the machinery and equipment as a whole. w For the servo motor (24 VDC) specification, EMC compliance was tested by installing a noise filter set (-NFA). Refer to page 568 for the noise filter set. Refer to the A series Operation Manual for installation. e CC-ink direct input type (PMJ) is not CE-compliant. [U-compliant products] When conformity to U is required, the electric actuator and controller/driver should be used with a U131 Class 2 power supply. Applicable Stroke Table V: Standard Stroke Manufacturable [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 stroke range [mm] EFS16 V V V V V V V V V V 5 to 5 EFS25 V V V V V V V V V V V V 5 to 6 EFS32 V V V V V V V V V V V V V V V V 5 to 8 EFS4 V V V V V V V V V V V V V V V V V V to 1 * Please consult with SMC for non-standard strokes as they are produced as special orders. Support Guide/EFG Series A support guide is designed to support workpieces with significant overhang. Page 527 The actuator and controller/driver are sold as a package. Confirm that the combination of the controller/driver and the actuator is correct. <Check the following before use.> q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q * Refer to the Operation Manual for using the products. Please download it via our website, http://www.smcworld.com 514 w

Electric Actuator/Slider Type Ball Screw Drive EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification y Motor option Nil Without option B With lock u Vacuum port Nil R R: Right *1 The standard cable should be used on fixed EPY o Actuator cable length parts. For using on moving parts, select the EPS Nil Without cable robotic cable. *2 Only available for the motor type Step 1 1.5 m Nil: eft motor. ER 3 3 m *3 Fix the motor cable protruding from the actuator to keep it unmovable. For details EH 5 5 m about fixing method, refer to Wiring/Cables 8 8 m * in the Electric Actuators Precautions. A 1 m *! Controller/Driver type *1 -X5 B m * Nil Without controller/driver!1 I/O cable length *1, Communication plug C 2 m * EFS 6N P6/A6 NPN Nil Without cable (Without communication plug connector) *3 * Produced upon receipt of order (Robotic cable only) 6P (Step data input type) PNP 1 1.5 m Refer to the specifications Note 2) on pages 516 and 517. EJS 1N P1 *2 NPN 3 3 m *2 1P (Programless type) PNP 5 5 m *2 25A- *2 *3 PMJ S Straight type communication plug connector!2 Controller/Driver mounting MJ (CC-ink direct input type) T T-branch type communication plug connector *3 Nil Screw mounting AN *2 *4 PA NPN D DIN rail mounting * *1 When Without controller/driver is selected for AP (Pulse input type) PNP controller/driver types, I/O cable cannot be selected. * DIN rail is not included. Order it separately. *1 For details about controller/driver and Refer to page 568 (For P6/A6), page 582 S compatible motor, refer to the compatible (For P1) or page 596 (For PA) if I/O cable controller/driver below. is required. SS-T *2 Only available for the motor type Step motor. *2 When Pulse input type is selected for controller/ *3 Not applicable to CE. driver types, pulse input usable only with differential. *4 When pulse signals are open collector, order Only 1.5 m cables usable with open collector. Y the current limiting resistor (-PA-R-l) *3 For the PMJ, only Nil, S and T are Motorless on page 596 separately. selectable since I/O cable is not included. Compatible Controller/Driver Type Step data input type Step data input type eft Right CC-ink direct input type i Actuator cable type *1 Nil Without cable S Standard cable *2 R Robotic cable (Flexible cable) *3 Programless type Pulse input type EF EJ E EM ES AT Z C3F2 Series P6 A6 PMJ P1 PA Features Compatible motor Step motor (Servo/24 VDC) Value (Step data) input Standard controller Servo motor (24 VDC) CC-ink direct input Capable of setting up operation (step data) without Operation by pulse signals using a PC or teaching box Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 56 Page 56 Page 6 Page 576 Page 59 5

EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Specifications Step Motor (Servo/24 VDC) EFS16 EFS25 EFS32 EFS4 Stroke [mm] Note 1) 5 to 5 5 to 6 5 to 8 to 1 Note 2) P6/P1/PMJ 14 25 3 45 5 55 65 Work load PA 9 1 2 2 4 45 5 6 [kg] 2 4 7.5 1 2 2 23 Speed [mm/s] Note 2) 1 to 5 5 to 25 12 to 5 6 to 25 16 to 5 8 to 25 2 to 5 1 to 25 Max. acceleration/deceleration [mm/s 2 ] 3 Positioning Basic type ±.2 repeatability [mm] High precision type ±. ost motion Note 3) Basic type.1 or less [mm] High precision type.5 or less ead [mm] 1 5 12 6 16 8 2 1 Impact/Vibration resistance [m/s 2 ] Note 4) 5/2 Actuation type Ball screw Guide type inear guide Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) Grease Ball screw /inear guide portion ow particle generation grease Motor size 28 42 56.4 Motor type Step motor (Servo/24 VDC) Encoder Incremental A/B phase (8 pulse/rotation) Rated voltage [V] 24 VDC ±1% Power consumption [W] Note 6) 22 38 5 1 Standby power consumption when operating [W] Note 7) 18 16 44 43 Max. instantaneous power consumption [W] Note 8) 51 57 123 141 Type Note 9) Non-magnetizing lock Holding force [N] 2 39 78 7 18 216 113 225 Power consumption [W] Note 1) 2.9 5 5 5 Rated voltage [V] 24 VDC ±1% Actuator specifications Electric specifications ock unit specifications Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) Speed changes according to the controller/driver type and work load. Check Speed Work oad Graph (Guide) on pages 39 and 4. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 1% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation. Note 4) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 5) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 6) The power consumption (including the controller) is for when the actuator is operating. Note 7) The standby power consumption when operating (including the controller) is for when the actuator is stopped in the set position during the operation. Note 8) The maximum instantaneous power consumption (including the controller) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 9) With lock only Note 1) For an actuator with lock, add the power consumption for the lock. 516

Electric Actuator/Slider Type Ball Screw Drive EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Specifications Servo Motor (24 VDC) EFS16A EFS25A Stroke [mm] Note 1) 5 to 5 5 to 6 Actuator specifications Electric specifications ock unit specifications Work load Note 2) [kg] 7 1 11 18 2 4 2.5 5 Speed [mm/s] Note 2) 1 to 5 1 to 25 2 to 5 1 to 25 Max. acceleration/deceleration [mm/s 2 ] 3 Positioning Basic type ±.2 repeatability [mm] High precision type ±. ost motion Note 3) Basic type.1 or less [mm] High precision type.5 or less ead [mm] 1 5 12 6 Impact/Vibration resistance [m/s 2 ] Note 4) 5/2 Actuation type Ball screw Guide type inear guide Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) Grease Ball screw /inear guide portion ow particle generation grease Motor size 28 42 Motor output [W] 3 36 Motor type Servo motor (24 VDC) Encoder Incremental A/B (8 pulse/rotation)/z phase Rated voltage [V] 24 VDC ±1% Power consumption [W] Note 6) 63 12 Standby power consumption when operating [W] Note 7) 4/ 9 4/ 9 Max. instantaneous power consumption [W] Note 8) 7 113 Type Note 9) Non-magnetizing lock Holding force [N] 2 39 78 7 Power consumption [W] Note 1) 2.9 5 Rated voltage [V] 24 VDC ±1% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) Check Speed Work oad Graph (Guide) on page 42 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 1% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation. Note 4) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 5) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 6) The power consumption (including the controller) is for when the actuator is operating. Note 7) The standby power consumption when operating (including the controller) is for when the actuator is stopped in the set position during operation. Note 8) The maximum instantaneous power consumption (including the controller) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 9) With lock only Note 1) For an actuator with lock, add the power consumption for the lock. Weight Series EFS16 Stroke [mm] 5 1 2 25 3 35 4 45 5 Product weight [kg].83.9.98 1.5 1.13 1.2 1.28 1.35 1.43 1.5 Additional weight with lock [kg].12 Series EFS25 Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 Product weight [kg] 1.7 1.84 1.98 2.12 2.26 2.4 2.54 2.68 2.82 2.96 3.1 3.24 Additional weight with lock [kg].26 Series EFS32 Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 Product weight [kg] 3. 3.35 3.55 3.75 3.95 4. 4.35 4.55 4.75 4.95 5. 5.35 5.55 5.75 5.95 6. Additional weight with lock [kg].53 Series EFS4 Stroke [mm] 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7. 7.33 7.61 7.89 8.17 8.45 8.75 9.1 9.29 9.57 9.85 1.13 Additional weight with lock [kg].53 517 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2

46 2 EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive EFS16 Body mounting Note 1) reference plane +.25 ø3h9 ( ) depth 3 4 x M4 x.7 thread depth 6.4 (72) 4 24 28 39.4 3.5 +.25 3H9 ( ) depth 3 4 27 7 (37) A (Table traveling distance) Note 2) 37 (11) (41) [39] Stroke 39 [(41)] 4 [2] [Origin] Note 4) Origin Note 3) 2 [4] 9.2 Cable length 25 (2.4) 65 Motor cable (2 x ø5) Step motor Servo motor n x ø3.5 34 2 2 24 2 6 5.5 M4 x.7 thread depth 7 (F.G. terminal) 33 4 6.5 Vacuum port M5 x.8 x 5 Motor option: With lock (2) Cable length 25 65 ock cable (ø3.5) 2 24 4 +.25 3H9 ( ) depth 3 D x 1 (= E) B 1 F 8 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 2 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. Dimensions [mm] Without lock With lock A B n D E F EFS16l-5l 247 289 56 13 4 EFS16l-1l 297 339 16 18 4 EFS16l-l 347 389 6 23 4 EFS16l-2l 397 439 26 28 6 2 2 EFS16l-25l 447 489 256 33 6 2 2 EFS16l-3l 497 539 36 38 8 3 3 4 EFS16l-35l 547 589 356 43 8 3 3 EFS16l-4l 597 639 46 48 1 4 4 EFS16l-45l 647 689 456 53 1 4 4 EFS16l-5l 697 739 56 58 12 5 5 518

24 Electric Actuator/Slider Type Ball Screw Drive EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive EFS25 6.5 6 Body mounting Note 1) reference plane 58 38 57.5 1 M4 x.7 thread depth 8 (F.G. terminal) 48 +.25 ø3h9 ( ) depth 3 4 x M5 x.8 thread depth 8.5 (52) A (Table traveling distance) D x 12 (= E) B 48 38.5 5 Note 2) (56) [54] Stroke 4 [2] [Origin] Note 4) Origin Note 3) 12 3.5 n x ø4.5 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. (12) 64 45 38 +.25 3H9 ( ) depth 3 52 (1.5) 54 [(56)] 2 [4] 13.9 Motor option: With lock (16.5) Cable length 25 65 4 1 F 34 Vacuum port Rc1/8 +.25 3H9 ( ) depth 3 Cable length 25 (2.4) 65 Motor cable (2 x ø5) ock cable (ø3.5) Step motor 2 2 2 Servo motor Dimensions [mm] Without lock With lock A B n D E F EFS25l-5l 285.5 33.5 56 16 4 2 EFS25l-1l 335.5 38.5 16 21 4 EFS25l-l 385.5 43.5 6 26 4 EFS25l-2l 435.5 48.5 26 31 6 2 24 EFS25l-25l 485.5 53.5 256 36 6 2 24 EFS25l-3l 535.5 58.5 36 41 8 3 36 EFS25l-35l 585.5 63.5 356 46 8 3 36 35 EFS25l-4l 635.5 68.5 46 51 8 3 36 EFS25l-45l 685.5 73.5 456 56 1 4 48 EFS25l-5l 735.5 78.5 56 61 1 4 48 EFS25l-55l 785.5 83.5 556 66 12 5 6 EFS25l-6l 835.5 88.5 66 71 12 5 6 24 2 24 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2 519

EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive EFS32 Body mounting Note 1) reference plane +.3 ø5h9 ( ) depth 5 4 x M6 x 1 thread depth 9.9 (122) 7 42 44 6 5.5 +.3 5H9 ( ) depth 5 7 48 1 (62) A (Table traveling distance) Note 2) 62 (142) (66) [64] Stroke 64 [(66)] 4 [2] [Origin] Note 4) Origin Note 3) 2 [4] 41.8 Cable length 25 (2.4) 65 2 3 6 46.8 n x ø5.5 6 79 Motor option: With lock (194) Motor cable (2 x ø5) Cable length 25 65 Step motor 2 2 2 6.5 7.5 M4 x.7 thread depth 8 (F.G. terminal) 14.9 Vacuum port Rc1/8 ock cable (ø3.5) 2 6 +.3 5H9 ( ) depth 5 D x (= E) B Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. 52 Dimensions [mm] Without lock With lock A B n D E EFS32l-5l 332 384 56 18 4 EFS32l-1l 382 434 16 23 4 EFS32l-l 432 484 6 28 4 EFS32l-2l 482 534 26 33 6 2 3 EFS32l-25l 532 584 256 38 6 2 3 EFS32l-3l 582 634 36 43 6 2 3 EFS32l-35l 632 684 356 48 8 3 45 EFS32l-4l 682 734 46 53 8 3 45 EFS32l-45l 732 784 456 58 8 3 45 EFS32l-5l 782 834 56 63 1 4 6 EFS32l-55l 832 884 556 68 1 4 6 EFS32l-6l 882 934 66 73 1 4 6 EFS32l-65l 932 984 656 78 12 5 75 EFS32l-7l 982 134 76 83 12 5 75 EFS32l-75l 132 184 756 88 12 5 75 EFS32l-8l 182 1134 86 93 14 6 9

Electric Actuator/Slider Type Ball Screw Drive EFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification Dimensions: Ball Screw Drive EFS4 8 8 +.3 ø6h9 ( ) (17) depth 7 16 Body mounting Note 1) 4 x M8 x 1.25 reference plane 6 thread depth 13 9 61 31 (68) M4 x.7 thread depth 8 (F.G. terminal) 76 74 7 (86) A (Table traveling distance) Note 2) (9) [88] 4 [2] Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering. (Recommended height 5 mm) Note 2) Distance within which the table can move when it returns to origin. Make sure a workpiece mounted on the table does not interfere with the workpieces and facilities around the table. Note 3) Position after return to origin Note 4) [ ] for when the direction of return to origin has changed. 13 Stroke 68 53.8 [Origin] Note 4) Origin Note 3) n x ø6.6 D x (= E) B 7 6 58 +.3 6H9 ( ) depth 7 86 (165) 88 [(9)] (3.1) 2 [4] 12.9 48.5 Motor option: With lock (214) +.3 6H9 ( ) depth 6 Vacuum port Rc1/8 65 Cable length 25 Motor cable (2 x ø5) 65 Cable length 25 ock cable (ø3.3) Motor cable (2 x ø5) Dimensions [mm] Without lock With lock A B n D E EFS4l-l 56 555 6 328 4 EFS4l-2l 556 65 26 378 6 2 3 EFS4l-25l 66 655 256 428 6 2 3 EFS4l-3l 656 75 36 478 6 2 3 EFS4l-35l 76 755 356 528 8 3 45 EFS4l-4l 756 85 46 578 8 3 45 EFS4l-45l 86 855 456 628 8 3 45 EFS4l-5l 856 95 56 678 1 4 6 EFS4l-55l 96 955 556 728 1 4 6 EFS4l-6l 956 66 778 1 4 6 EFS4l-65l 16 5 656 828 12 5 75 EFS4l-7l 6 1 76 878 12 5 75 EFS4l-75l 116 15 756 928 12 5 75 EFS4l-8l 16 125 86 978 14 6 9 EFS4l-85l 126 1255 856 128 14 6 9 EFS4l-9l 1256 135 96 178 14 6 9 EFS4l-95l 136 1355 956 1128 16 7 EFS4l-1l 1356 145 16 1178 16 7 521 2 2 2 2 2 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2

Refer to page 46 for model selection and page 51 for particle generation characteristics. 11 EFS H i Cable type Note 1) Note 2) Nil Without cable S Standard cable R Robotic cable (Flexible cable) Note 1) The motor and encoder cables are included. (The lock cable is also included when the motor with lock option is selected.) Note 2) Standard cable entry direction is (B) Counter axis side. (Refer to page 623 for details.) Compatible Driver AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification EFS Series EFS25, 32, 4 o Cable length Note 3) Nil Without cable 2 2 m 5 5 m A 1 m Note 3) The length of the encoder, motor and lock cables are the same. How to Order Clean Series 11 Vacuum type q q Accuracy e Motor type Nil Basic type Symbol Type Output [W] Actuator size Compatible driver H High precision type S2 * AC servo motor 1 25 SA -S1 S3 (Incremental 2 32 SA -S3 S4 encoder) 4 4 SA2-S4 SB -S5 w Size S6 * 1 25 SC -S5 SS -S5 S7 SB -S7 AC servo motor 2 32 SC -S7 (Absolute encoder) SS -S7 SB2-S8 S8 4 4 SC2-S8 SS2-S8 * For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. 25 S2 B 1 S 2 Applicable Stroke Table V: Standard Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 EFS25 V V V V V V V V V V V V EFS32 V V V V V V V V V V V V V V V V EFS4 V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders. Pulse input type/ Positioning type A1 w e r t y u i o!!1 y Motor option Nil Without option 25 B With lock 32 4 u Vacuum port* Pulse input type!1 I/O cable length [m] Note 4) Nil Without cable H Without cable (Connector only) 1 1.5 Note 4) When Without driver is selected for driver type, only Nil: Without cable can be selected. Refer to page 624 if I/ O cable is required. (Options are shown on page 624.) r ead [mm] Symbol EFS25 EFS32 EFS4 A 12 16 2 B 6 8 1 Nil eft R Right D Both left and right * Select D for the vacuum port for suction of 5 /min (ANR) or more. CC-ink direct input type! Driver type Compatible driver t Stroke [mm] 5 5 to to 1 1 * Refer to the applicable stroke table. R: Right Power supply voltage [V] Nil: eft Nil Without driver V V V A1 SA1-S 1 to 12 V V A2 SA2-S 2 to 23 V V V B1 SB1-S 1 to 12 V V B2 SB2-S 2 to 23 V V V C1 SC1-S 1 to 12 V V C2 SC2-S 2 to 23 V V V S1 SS1-S 1 to 12 V V S2 SS2-S 2 to 23 V V V * When the driver type is selected, the cable is included. Select cable type and cable length. Example) S2S2: Standard cable (2 m) + Driver (SS2) S2 : Standard cable (2 m) Nil : Without cable and driver Support Guide/EFG Series A support guide is designed to support workpieces with significant overhang. Page 527 SSCNET # type Size 25 32 4 Driver type Series SA SB SC SS Number of point tables Up to 7 Up to 255 (2 stations occupied) Pulse input v v Applicable network CC-ink SSCNET # Control encoder Incremental Absolute Absolute Absolute 17-bit encoder 18-bit encoder 18-bit encoder 18-bit encoder Communication function USB communication USB communication, RS422 communication USB communication, RS422 communication USB communication Power supply voltage [V] 1 to 12 VAC (5/6 Hz), 2 to 23 VAC (5/6 Hz) Reference page Page 67 522

Electric Actuator/Slider Type Ball Screw Drive EFS Series AC Servo Motor Clean Room Specification Specifications EFS25, 32, 4 AC Servo Motor EFS25S 2 6 EFS32S 3 7 EFS4S 4 8 Stroke [mm] Note 1) 5 to 6 5 to 8 to 1 Note 2) 2 2 4 45 5 6 8 1 2 3 Actuator specifications Electric specifications ock unit specifications Note 3) Max. speed [mm/s] Stroke range Max. acceleration/deceleration [mm/s 2 ] Positioning repeatability [mm] Up to 4 9 45 1 5 1 5 41 to 5 72 36 1 5 1 5 51 to 6 54 27 8 4 1 5 61 to 7 62 31 94 47 71 to 8 5 25 76 38 81 to 9 62 31 91 to 1 52 26 5 (Refer to pages 48 to 5 for limit according to work load and duty ratio.) Basic type ±.2 High precision type ±.1 ost motion [mm] Note 4) Basic type.1 or less High precision type.5 or less ead [mm] 12 6 16 8 2 1 Impact/Vibration resistance [m/s 2 ] Note 5) 5/2 Actuation type Ball screw Guide type inear guide Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) Cleanliness class Note 6) ISO Class 4 (ISO 14644-1) Class 1 (Fed.Std.29E) Grease Ball screw /inear guide portion ow particle generation grease Motor output/size 1 W/ 4 2 W/ 6 4 W/ 6 Motor type AC servo motor (1/2 VAC) Encoder Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 13172 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power 45 65 21 consumption [W] Note 7) 145 175 23 Standby power consumption 2 2 2 when operating [W] Note 8) 8 8 18 Max. instantaneous power consumption [W] Note 9) 445 725 1275 Type Note 1) Non-magnetizing lock Holding force [N] 131 255 197 385 33 66 Power consumption at 2 C [W] Note 11) 6.3 7.9 7.9 Rated voltage [V] 24 VDC 1% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) For details, refer to Speed Work oad Graph (Guide) on page 47. Note 3) The allowable speed changes according to the stroke. Note 4) A reference value for correcting an error in reciprocal operation. Note 5) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test Weight Series EFS25S Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 Motor S2 2. 2.14 2.28 2.44 2.56 2.69 2.84 2.99 3.12 3.24 3.4 3.54 type S6 2.6 2.2 2.34 2.5 2.62 2.75 2.9 3.5 3.18 3.3 3.46 3.6 Additional weight with lock [kg] S2:.2/S6:.3 was performed with the actuator in the initial state.) Note 6) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 7) The power consumption (including the driver) is for when the actuator is operating. Note 8) The standby power consumption when operating (including the driver) is for when the actuator is stopped in the set position during the operation. Note 9) The maximum instantaneous power consumption (including the driver) is for when the actuator is operating. Note 1) Only when motor option With lock is selected. Note 11) For an actuator with lock, add the power consumption for the lock. Series EFS32S Stroke [mm] 5 1 2 25 3 35 4 45 5 55 6 65 7 75 8 Motor S3 3.4 3.6 3.8 4. 4.2 4.4 4.6 4.8 5. 5.2 5.4 5.6 5.8 6. 6.2 6.4 type S7 3.34 3.54 3.74 3.94 4.14 4.34 4.54 4.74 4.94 5.14 5.34 5.54 5.74 5.94 6.14 6.34 Additional weight with lock [kg] S3:.4/S7:.7 Series EFS4S Stroke [mm] 2 25 3 35 4 45 5 55 6 65 7 75 8 85 9 95 1 Motor S4 5.82 6.1 6.38 6.65 6.95 7.25 7.51 7.8 8.7 8.25 8.63 8.9 9.2 9.45 9.76 1.5 1.32 1.6 type S8 5.92 6.2 6.48 6.75 7.5 7.35 7.61 7.9 8.17 8.35 8.73 9. 9.3 9.55 9.86 1. 1.42 1.7 Additional weight with lock [kg] S4:.7/S8:.7 523 EF EJ E EM ES EPY EPS ER EH -X5 Motorless EFS EJS 25A- S SS-T Y AT Z C3F2