Your Trusted Technology Partner for Advanced Measurement and Control

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Jocelin Chandler
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Your Trusted Technology Partner for Advanced Measurement and Control HORIBA

2 HORIBA Consolidated sales 1,400 M US$ 5200 employees worldwide Founder: Dr. Masao Horiba Incorporated: 1953 President and CEO: Atsushi Horiba Kyoto, Japan

3 HORIBA Worldwide Sales of FY2012: BJPY ( 1473 MUSD) Sales Ratio by Region Europe 26% America 16% Asia 18% Japan 40% The Number of Group Companies by region (As of December 31, 2012) America 6 Europe 16 Asia 15 (4 in Japan, including HORIBA, Ltd.) Total 37

4 Business Segments Automotive Test Systems Emission Measurement Systems (EMS) Mechatronics Devices (MCT) Test Automation Systems (TAS) Driving Control Systems (HIT) Process & Environmental Environmental Systems Environmental Radiation Monitor Environmental Regulation & Process Business Medical In-Vitro Diagnostic (IVD) Systems Integration of HORIBA ABX s Technology & Marketing Know-How Semiconductor Mass Flow Controller In-situ Analysis Synergy among HORIBA HQ, HORIBA STEC and HORIBA Jobin Yvon s Technologies Scientific Synergy of HORIBA and HORIBA Jobin Yvon s Technologies Raman, Grating, and Fluorescence

Business Segments Automotive Test Systems Mechatronics Devices (MCT) Emission Measurement Systems (EMS) Test Automation Systems (TAS) Driving Control Systems (HIT) Process & Environmental

Semiconductor Mass Flow Controller Synergy among HORIBA HQ, HORIBA STEC and HORIBA Jobin Yvon s Technologies Scientific Synergy of HORIBA Ltd and HORIBA Jobin Yvon s Technologies Raman, Gratings, and

5 Business Segments Automotive Test Systems Mechatronics Devices (MCT) Emission Measurement Systems (EMS) Test Automation Systems (TAS) Driving Control Systems (HIT) Process & Environmental Environmental Systems Environmental Radiation Monitor Environmental Regulation & Process Business Medical In-Vitro Diagnostic (IVD) Systems Integration of HORIBA ABX s Technology & Marketing Know-How Semiconductor Mass Flow Controller Synergy among HORIBA HQ, HORIBA STEC and HORIBA Jobin Yvon s Technologies Scientific Synergy of HORIBA Ltd and HORIBA Jobin Yvon s Technologies Raman, Gratings, and Fluorescence Sales Breakdown by Segment Sales: BJPY Semicon 17.8 (223) Medical 22.4 (280) (1,473 MUSD) Scientific 20.4 (255) ( )= Segment Sales in MUSD % = Segment Sales Ratio As of December 31, 2012 Automotive 43.2 (541) P&E 13.7 (171)

Semiconductor 15% of Activity Sales: 17.

Fluid Control Mass Flow Controller Liquid

Analyzer Plasma Diagnosis Endpoint Monitor

Detection Multi range Multi Gas Mass Flow

Particle Detection System Liquid Vaporization

6 Semiconductor 15% of Activity Sales: 17.8 BJPY (223 MUSD) Headcount: 781 Main Products Fluid Control Mass Flow Controller Liquid Vaporization System Wet Process Monitoring Chemical Solution Monitor Dry Process Monitoring FTIR Gas Analyzer Residual Gas Analyzer Plasma Diagnosis Endpoint Monitor Metrology Product Reticle/Mask Particle Detection Multi range Multi Gas Mass Flow controller Residual Gas Analyzer Reticle/Mask Particle Detection System Liquid Vaporization System Chemical Solution Monitor Plasma Diagnosis Endpoint Monitor 2013 HORIBA, Ltd. All rights reserved.

Key Products Multi Range Multi Gas Digital Mass Flow Controllers (SEC-Z500X Series) Compact, high precision (set point accuracy), fast response (variable PID),

monitor, reduced lot failures boost yields in the cleaning process.

7 Key Products Multi Range Multi Gas Digital Mass Flow Controllers (SEC-Z500X Series) Compact, high precision (set point accuracy), fast response (variable PID), RoHS compliance Chemical Solution Monitor (CS-100F1 Series) Real-time, inline measurement, four types of chemical solutions or ranges with single concentration monitor, reduced lot failures boost yields in the cleaning process. Reticle/Mask Particle Detection System (PR-PD2HR) Compact, low operating cost, and a wide range of applications Gas Concentration Monitor Metal-organic Chemical Vapor Deposition (MOCVD) is widely used in the manufacture of LED s, optical devices and other components.

8 Growth Drivers / Strengths To be 1 st Class Solution Provider in Semiconductor / FPD Industry based on: Strong Brand as 1 st class mass flow controller supplier 1 st class chemical concentration monitor supplier 1 st class FPD manufacturing thin film metrology supplier Global Sales and service Network as Covering manufacturing system supplier nearby their site in north America and in Asia pacific Early stage cooperation with front edge player Outstanding Technology as Thermal & piezo fluid control and vaporizer Extensive and robust IR-spectroscopy and ellipsometry 2013 HORIBA, Ltd. All rights reserved.

Wet Four process Business monitoring covered Segments by HORIBA

Technologies HORIBA uses typically 3 kinds of

Absorption Spectroscopy CS-100/100F1 Series 2.

etc. 3. Resistivity Method HE-480R, etc.

Chemical Luminescent, ph, Potentiometry and others.

10 Technologies HORIBA uses typically 3 kinds of Technology for monitoring chemical solutions: 1. Absorption Spectroscopy CS-100/100F1 Series 2. Conductivity Method CM-200/210, HF-960M, HE-480C, etc. 3. Resistivity Method HE-480R, etc. More than above, HORIBA has proven technology: Chemical Luminescent, ph, Potentiometry and others. HORIBA can support Wet Process monitoring using most appropriate technology.

11 Reticle / Photomask Inspection

Visit us at Silicon Saxony, Booth 007 2013 HORIBA, Ltd. All rights reserved.

12 Visit us at Silicon Saxony, Booth HORIBA, Ltd. All rights reserved. Grazie اش ك ر Tacka dig Gracias Thank 謝謝 you dhanyawad ありがとうございました 너를감사하십시요 Danke Σας εσταριστούμε Obrigado ขอบค ณคร บ Большое спасибо

13 Thank you

14 ありがとうございました Dziękuję اش ك ر Tacka Tacka dig Σας εσταριστούμε اش ك ر Σας εσταριστούμε 감사합니다감사합니다 ขอบค ณคร บ Gracias Danke Danke Большое спасибо Большое спасибо 谢谢 धन यव द Cảm ơn Grazie நன ற நன ற Obrigado Obrigado

15 Business Segments Automotive Test Systems Emission Measurement Systems (EMS) Mechatronics Devices (MCT) Test Automation Systems (TAS) Driving Control Systems (HIT) Process & Environmental Environmental Systems Environmental Radiation Monitor Environmental Regulation & Process Business Medical In-Vitro Diagnostic (IVD) Systems Integration of HORIBA ABX s Technology & Marketing Know-How Semiconductor Mass Flow Controller In-situ Analysis Synergy among HORIBA HQ, HORIBA STEC and HORIBA Jobin Yvon s Technologies Scientific Synergy of HORIBA and HORIBA Jobin Yvon s Technologies Raman, Grating, and Fluorescence

2018 HORIBA, Ltd. All rights reserved. 1

2018 HORIBA, Ltd. All rights reserved. 1 HORIBA Ltd, Automotive Measurement R&D Dept. Shun Fukami Development Tools for Advanced On-Board Emissions Measurements of NMHC and Particulates, Plus a Coaching