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1 Coorinate Measuring Machine Applicable Probe Hea ZEISS HSS VAST ZEISS Probe Hea Specifications Probe Hea VAST-XT Stylus + extension maximum length () Stylus minimum tip iameter () Stylus + extension maximum weight 500 mm 0.6 mm 500 g Stylus/Extension M5 Outline Moel all Stylus (Carbie Shaft) imensions M Weight (g) M all Stylus (Thermo Fit) M all Stylus (ThermoFit/Silicon Nitrie all) M

2 M5 Outline Moel all Stylus (Ceramics) imensions M Weight (g) M all Stylus all Stylus M Small iameter all Stylus M Revolute Joint

3 Coorinate Measuring Machine imensions M5 Outline Moel Weight (g) M Stylus Holer (90 ) irection Stylus Holer Ultra-small iameter all Stylus (for HSS) M Small iameter all Stylus Swivel Stylus Holer Stylus for Swivel Holer M isk Stylus Extension (Aluminum) Extension (Stainless Steel)

4 M5 Outline Moel imensions M Weight (g) Extension (Titanium) Extension (Thermo Fit) Cube (Hexaheron) Aaptor (Titanium) (Titanium) (Aluminum) (Aluminum)

5 Coorinate Measuring Machine M5 Outline Moel imensions M Weight (g) isk Stylus M M M M M M M Star Stylus Tip Stylus プ 12 R0.1 M Inirect Joint (Titanium) ± Replacement Plate for HSS an VAST (2 ププ ) Pin Wrench Hook Wrench

6 Coorinate Measuring Machine M5 Stylus kit for large components Moel: Item Name Moel Qty Stylus Kit Item Name Moel Qty Stylus Extension Inirect joint isk an others Extension Cube Tool Stylus kit for small components Moel: Item Name Moel Qty Item Name Moel Qty Stylus Extension Inirect joint Cube Holer Tool tweezers 1 Stylus kit for gear measurement Moel: Item Name Moel Qty Item Name Moel Qty Stylus Extension Holer Tool tweezers Stylus kit for small components Moel: Item Name Moel Qty Item Name Moel Qty Stylus Cube an others Tool Extension

7 M5 Stylus Extension Kit Thermo Fit Extension kit for 11 Moel: Item Name Moel Qty 1 1 Extension Thermo Fit Extension kit for 20 Moel: Item Name Moel Qty Extension Extension Tool Probe Replacement Magazine M5 Item Name Moel imensions W H MSR 800/H FUSION NEX X = 650/850 MSR 1000/H FUSION NEX X = 1000 MSR 1250/H FUSION NEX X = 1200 Machine MSR Probe Socket Outline Moel Probe Socket VAST

8 Coorinate Measuring Machine Stylus for Electronic Probe TP2/TP20/TP200 Outline Moel Name rawing pnumber Ruby all Stylus (Stainless Steel Shaft) imensions A C EW Weight (g) 10 mm A PS9R A PS24R A PS8R A PS26R A PS1R A PS12R A PS13R A PS14R A PS15R mm A PS2R Ruby all Stylus (Carbie Shaft) A PS27R A PS16R A PS17R mm A PS29R A PS10R A PS31R A mm A A A PS23R A PS48R A PS49R A A A A A PS50R mm A PS51R Ruby all Stylus (Ceramic Shaft) A A A A A A mm A A A A A eicate tool (S20) is require for etachment an attachment of carbon shafts. Stylus sets an extension sets are also available. (See next page.) Outline Moel Name rawing pnumber Ruby all Stylus (Ceramic Shaft) imensions A C EW Weight (g) 50 mm A PS66R A PS67R A PS68R A mm A GF504R Ruby all Stylus (Carbon Shaft) A GF505R A GF506R mm A A A mm A A A StylusTool Moel M PS9R Name S7 S20 Remarks For an M3 screw iameter styluses For carbon fiber stylus series Ruby all Stylus (Carbon Shaft) 30 mm A A A Outline Moel Name rawing number Extension (Stainless Steel) imensions A C Weight (g) M SE Ruby all Stylus (Carbie Shaft) 40 mm A A A A A mm A A A M SE M SE M SE M SE Extension (Ceramic) A SE A SE A SE Extension (Carbon) A GF40E A GF50E A GF70E A GF90E EW C A EW (effective length) ength from the position that the shaft oes not interfere with the measure object to the center of the tip when measurement is carrie out at a right angle to the measure object C Custom orers are also accepte. 51

9 Coorinate Measuring Machine Star Stylus Moel A A A A A A rawing pnumber Name PS28R PS6R PS7R Cross iameter all iameter Shaft iameter EW Weight (g) Star Center Moel A A A A Name all iameter Shaft iameter EW Weight (g) isk Stylus Moel A Ruby A Steel A Steel A Steel A Steel rawing pnumber Name PS3R PSR PS33R PS4R PS34R isk iameter isk thickness Roller epth Shaft iameter Weight (g) Cyliner Stylus Moel M Steel M Steel A Ruby A Ruby A Ruby A Ruby rawing pnumber Name PS18R PS19R PS44R PS45R PS35R PS69R Cyliner iameter Shaft iameter EW Weight (g) Hemispherical Tip Cyliner Stylus (Carbie) Moel A A A A A A A rawing pnumber PS70R Cyliner iameter EW Weight (g) Special Stylus Swing Joint 5-irection Joint Moel M A A Steel tungsten carbie Ceramic rawing pnumber Name PS20R PS36R PS21R all iameter 18.0 Tip shape Non-spherical, Raius:0.05 Spherical, Raius:0.1 Weight (g) Taper angle Moel A rawing pnumber Name Screw Siameter SK2 EW mm (inches) 8.0 (0.32) Center offset mm (inch) 4.5 (0.18) Weight (g) 1.6 Moel A rawing pnumber Name Screw Siameter SC2 EW mm (inches) 7.5 (0.30) Center size mm (inch) 7.0 (0.28) Weight (g)

10 PH10T + TP20/TP200 Electronic Probes PH10T + TP20 + MCR20 System PH10T + TP200 + SCR200 System 245mm (200mm) Horizontal Rotation 190mm(145mm) Stylus changer rack (MCR20) Moule changer rack (SCR200) oth are capable of housing a maximum of six probe moules. * The figure shows SCR200 changer rack. MSR20 imensions are in the parentheses. Vertical Rotation Configuration MCR20 Moule changer rack: MCR20 SF moule: 2 pieces Installation kit Stylus for alignment measurement SCR200 Stylus Changer Rack: SCR200 Connection cable (10m) SF moule: 3 pieces Installation kit Stylus for alignment measurement PH10T Specifications Horizontal surface rotation angle Vertical surface rotation angle ±180 (48 positions in 7.5 steps) 0 to +105 (15 positions in 7.5 steps) TP20 Specifications Measurement irection ±X, ±Y, +Z Repeatability Stanar eviation 2 σ = 0.35 μm or less (10 mm stylus) Measuring force About 0.08 N (8 gf, orthogonal to probe shaft center) (SF moule) About 0.75 N (about 75 gf, probe shaft center irection) Stylus (carbon graphite) Shaft for Electronic Probes TP2/TP20/TP TP200 Specifications Measurement irection ±X, ±Y, ±Z Repeatability Stanar eviation 2 σ = 0.4 μm or less (50 mm Stylus) Measuring force About 0.02 N (2 gf, orthogonal to probe shaft center) (SF moule) About 0.07 N (7 gf, probe shaft center irection) Components Probe hea (PH10T) Probe hea controller (PHC10-3PUS) Probe hea river (HCU1) Electronic probe (TP20) With 2 SF moules (TP200) With 1 SF moule 4 all Stylus Magazine Instruction manual Name GF504R GF505R GF506R rawing A A A ightweight Extension ar for PH10T PE3: = 200 PE2: = 100 PE1: = Magazine an spanner set are inclue in the set. Name GF40E GF50E GF70E GF90E rawing A A A A Note) Items above require a eicate tool (S20) for etachment an attachment. 53

11 Coorinate Measuring Machine Electronic Probe PH1 + TP2 40 Probe CM [15 Steps] PH1 Specifications Horizontal surface rotation angle 360 (15 steps) Vertical surface rotation angle ±115 TP2 Specifications Measurement irection ±X, ±Y, +Z Repeatability eviation2σ = 0.35 μmor less Measuring force About 0.07 to 0.15 N (7 to 15gf, orthogonal to probe shaft center) About 0.4 N (about 40 gf, probe shaft center irection) Components Probe hea (PH1) Electronic Probe (TP2) 4 all Stylus Magazine Instruction manual Electronic Probe MH20i 48 MH20i specifications Horizontal surface rotation angle Vertical surface rotation angle ±180 (15 steps) 0 to 90 (15 steps) SF Moule for TP20 Position Repeatability Accuracy Measurement irection ±X, ±Y, +Z Repeatability Stanar eviation 2σ = 0.35 μm Measuring force 0.08 N (orthogonal to probe shaft center) 0.75 N (probe shaft center irection) Components Probe hea MH20i Electronic probe SF moule for TP20 4 all Stylus Instruction manual ± 180 Stylus Set for Electronic Probe TP2/TP20/TP200 Extension ar Set for Electronic Probe TP2/TP20/TP200 Name PS23R PS2R PS17R Name SE7 SE4 SE5 SE6 rawing Magazine is also available. Set consisting of stylus set, extension set an magazine is also available. rawing

12 Electronic Probes TP1 (S) Stylus for TP1 (S) Electronic Probe Signal inicator lamp Connection cor Probe Probe all Stylus Unit: mm l H Stylus Weight g g g g g g g g g g g TP1 (S) Specifications Measurement irection ±X, ±Y, +Z Repeatability Stanar eviation 2σ = 0.5μm or less Measuring force About 0.1 to 0.5 N (10 to 15 gf, orthogonal to probe shaft center) About 0.4 to 2.5 N (about 40 to 250 gf, probe shaft center irection) Components Electronic probe [TP1 (S) ] 2, 5 all Stylus 1 each Stylus aaptor (SA7) Magazine all Stylus (Stanar 2, 5) Sharp ege Star Stylus Stylus Cross joint (18.5 g) Cylinrical Stylus l H Stylus Stylus (35 g) 20 isk Stylus Unit: mm Sphere 20 Stylus 3361 High precision touch trigger probe PTS-30 High precision measurement in all irections The non-irectional probe mechanism an embee high sensitivity sensor enable instantaneous measurement at a high accuracy with the measuring force of only 0.01 N. Stylus Sets C1, C2, C3 These three stylus sets (C1, C2, C3) provie ifferent stylus combinations. These are stylus sets for the PTS-30. We also manufacture other special orer sets. Name all Stylus Flexible stylus combinations of up to 200 mm in length an 300 g in weight can be fl exibly combine for measurement of workpieces in iverse shapes. Stylus balance ajustment The balance ajustment function can accurately control the weight balance of the combine styluses. C Qty C C rawing Weight 0.3 g 0.5 g 9.7 g 9.7 g 7.0 g 11.3 g Name all Stylus -M5 joint Swivel joint Nipple joint M5 PTS-30 Specifications Measurement irection ±X, ±Y, ±Z Repeatability Stanar eviation σ = 0.5 μm or less Measuring force About 0.01 N (1gf) Measuring spee 1 to 50 mm/s Maximum stylus length 200 mm Maximum stylus weight 300 gf Components Probe oy (PTS-30) Magazine Instruction manual Aaptor cable for signal Probe CM904 C Qty C C rawing Weight 19.0 g 28.7 g 2.0 g 7.5 g 20 g 54.8 g Name 360 Revolute joint 90 Revolute joint Extension 球 8 Operating principle When the stylus contacts the workpiece, the sensor issues a etection signal at the measuring force of 1gf (0.01N). The etection signal from the sensor is etermine to be vali only after the contact point issues a confirmation signal. Therefore, the signal is rea as the coorinate value of the measure ata only when both the etection signal an the confirmation signal are issue. C Qty C C rawing Weight 14.7 g 42.3 g 10.3 g 15.3 g 20.2 g 75.5 g C1 an C2 are provie with two ruby balls of 2, 4 an 8 an ahesive. C1, C2 an C3 are provie with a stylus replacement jig, a hexagon hea wrench an a magazine. 55

13 Coorinate Measuring Machine Accessories an peripherals Name Moel External View Specifications Remarks Swing Probe Manual rotary TP1 holer For RVF Ceramic all Origin lock CM all 25.4mm Stanar accessory for XYZAX 7021 Material:SS41 Work clamp height: 8 to 40mm Fixture of small workpieces Size 250W Hmm Fixing screw: Top 16-M6, sie 4-M6 Top view Riser locks Material: Gabbro (10372) 2blocks in 1 set Spacer place uner thin workpieces imensions: 200W H mm Clamping Kits M10 Step clamp Stu olts Step block arge, meium an small step clamps (2 each) arge, meium an small step blocks (2 sets each, 2 blocks/set) Stu bolt in 6 ifferent lengths 4 each 8 coupling nuts 4 flange nuts For XYZAX: M10 Coupling nut Flange nut Movable Stan - Operation Panel Height: 665 mm C Height: 750 mm For operation C panelcm Power Supply transformer TWTC-2.1K Input: 90 to 240 V Output: 100 V Capacity: 2.1 KVA Specify the input voltage. imensions:300w H mm Weight :45 kg Uninterruptible power supplies SMU-HA102 SMU-HA302 ackup time 6 min. 120W H mm Rate output 1KVA (computer) 190W H mm Rate output 3KVA (whole system) Max. ischarge: 100/120 /min (50/60 Hz) Refrigerate Air ryer CM99901-S009 Power Consumption: 165/190 W (50/60Hz) Weight:16 kg Power supply single phase: AC100 V (50/60Hz) XYZAX imensions6w H mm Air Purifier Set CM99901-S086 rain catcher, line filter an mist separator set on mounting panel Applicable moels: all moels imensions: 370W H mm Air Pressure ooster Filter Unit CM Maximum pressure boost ratio 2:1 Guarantee withstaning pressure: 1.5 MPa Supply pressure range: 0.1 to 1.0 MPa Set pressure range: 0.2 to 1.0 MPa 56