Rainbow. Section 7. Entrance Loadlock

Transcription

1 Rainbow Section 7 Entrance Loadlock 10

2 RA01E072 Entrance Loadlock Installation A Rev. A 106 Revision A

3 Rainbow Section 7 Entrance Loadlock Entrance Loadlock Installation Rev. A Item Part No. Description Cover, 90 Degree Loadlock Screw, Socket Head, 1/4-20 x 3/4, SST Screw, Socket Head, 1/4-20 x 3/8, SST 4 Go To Page 109 Entrance Loadlock Assembly Screw, Hex Head, /16-18 x 3/4 Long Washer, Split-Lock, /16, SST O-Ring, 8.0 ID x.12 C/S Grease, Fomblin, Vac-3 Revision A 107

4 RA01E078 Entrance Loadlock Assembly A Rev. E 108 Revision A

5 Rainbow Section 7 Entrance Loadlock Entrance Loadlock Assembly Rev. E Item Part No. Description Screw, Socket Head, Vented, 3/8-16 x 1 Inch Washer, Lock, 3/8 Inch Washer, Flat,.390 x.62, SST 4 Go To Page 119 Inner Gate Assembly Filler, Loadlock Chamber, Left Screw, Socket Head, Vented, 8-32 x 3/ Filler, Loadlock Chamber, Right Screw, Socket Head, 1/4-20 x 3/4, SST Screw, Socket Head, 1/4-20 x 3/8, SST 10 Go To Page 121 Inner Gate Drive Assembly O-Ring, 8.0 ID x.12 C/S Grease, Fomblin, Vac-3 12 Go To Page 127 Outer Gate Assembly Screw, Socket Head Cap, 8-32 x 7/ Screen, Vacuum Port Ring, Vacuum Port Screw, Socket Head, Vented, 6-32 x 1/ Screen, Convectron Tube Ring, Convectron Tube Screw, Socket Head, Vent 4-40 x 3/ Housing, 90 Degree Loadlock Plate, Vent Port, 90 Degree Loadlock Screw, Socket Head, Vented, 6-32 x 3/4 24 Go To Page 133 Arm Housing Assembly Cover, 90 Degree Loadlock Screw, Socket Head Cap, 1/4-20 x 1 Revision A 109

6 RA01E079 Entrance Loadlock Bottom View Assembly B Rev. E 110 Revision A

7 Rainbow Section 7 Entrance Loadlock Entrance Loadlock Bottom View Assembly part of Rev. E Item Part No. Description 1 Go To Page 114 Harmonic Arm Drive Assembly Screw, Socket Head, x 7/8 Long Cleat, Synchro Clamp 4 Go To Page 121 Inner Gate Drive Assembly O-Ring, 3-1/4 x 1/8 C/S Housing, 90 Degree Loadlock Screw, Socket Head, 3/8-16 x 1-1/4 Long Screw, Socket Head Cap, 3/8-16 x 3/4 Long Plate, Blank-Off, Inner Gate Seal, Centering Ring, NW O-Ring, 11/16 Inch ID x 1/16 C/S, Viton O-Ring, 3 Inch ID x 3/32 C/S, Viton Screw, Socket Head Cap, x / Weldment, Spool Section, Loadlock Isotropic Valve Switch, Vacuum, Torr Gauge Gasket, VCR, Unplated Nickel Clamp, Flange, Long Label, Tie Wrap, Small Filter, Millipore, With O-Ring Seal O-Ring, 7/16 ID x Connector, Male, 7/16-20 to VCR Gasket, VCR, Unplated Nickel Weldment, L.L. Vacuum Gauges/L.L. Equipment Plug, Male, VCR, SST, / Gasket, VCR, Unplated Nickel Convectron, Tube Gasket, VCR, Unplated Nickel Revision A 111

8 Continued on Next Page RA01E06 Harmonic Arm Drive Assembly A Rev. G 112 Revision A

9 Continued from Previous Page ~ Assy. 2 Places Assy. 3 Places RA01E092 Harmonic Arm Drive Housing Assembly Rev. G Revision A 113

10 Section 7 Entrance Loadlock Rainbow Harmonic Arm Drive Assembly Rev. G Item Part No. Description Quad Ring,.938 ID x.094 C/S Tube, Arm DR, One Piece O-ring, ID x.103 C/S, VTN Housing, Bearing, Upper Bearing, Angular Contact Spacers, Precision Bearing Retainer, Upper, Bearing Interrupter, Rotation Assembly, Harmonic Drive Component Screw, Socket HD, 8-32 x 3/ Screw, Soc HD, 8-32 x 3/ Washer, Flat, #8, SST Ring, Rotation Limit Spacer, Bearing, Short Shield, Limit Block Screw, Soc HD, 8-32 x 3/ Screw, Soc HD Cap, 8-32 x 1/ Screw, Soc HD, 4-40 x 1/ Washer, LK, #4, SST Block, Rotation Limit Ring, Retaining,.984 I.D Cap, Bearing, One-piece Arm HSG Screw, Socket Head, Vent, 8-32 x /8LG Cap, Protective Ring, Bearing Retaining Bearing, Radial Ball, 2mm Bore Shaft, Wave Generator Assembly, Harmonic Drive Component Pulley, 108 Tooth Spacer, Bearing, Long Screw, SCH Cap, 4-40 x / Washer, LK, #4, SST Housing, Bearing, Lower Assembly, OPT Sensor Darlington, Bracket, Sensor, Long 114 Revision A

11 Rainbow Section 7 Entrance Loadlock Harmonic Arm Drive Assembly (Cont d) Rev. G Item Part No. Description Tie Wrap, White, 3-7/8 LG Connector, Cap, End PNL MTG (MTA) Bracket, Sensor, Short Assembly, OPT Sensor Darlington, Belt, Pos Drive,.080 Pitch, 19T Retainer, Lower Bearing Interrupter, Extension Pulley, 10 Tooth Flange, Pulley, Segmented Plate, Bottom Screw, Soc HD, 6-32 x 1/ Washer, Split-LK, #6, SST Standoff, 6-32, 1/4SQ x 1-1/2L Bracket, Input Cable Mount, CA Tie, 4 Way, White Screw, Soc HD, 6-32 x 1/ Screw, Soc HD Cap, 8-32 x 1/ Bracket, Motor Connector Block, Shaft Retaining Screw, Soc HD, 2-6 x 1/ Washer, Split-Lock, #2, SST Washer, Flat, #2, SST Screw, Soc HD, Vent, 8-32 x /8LG Screw, Soc HD Cap, 8-32 x 1/ Screw, Soc HD, SHLDR, x Block, Motor Pivot Assembly, Motor, Stepper, (Harmonic) Block, Motor Mount Screw, Soc HD, 8-32 x 3/ Screw, SCH Cap, 4-4 x 1/ Washer, LK, #4, SST Bearing, Spherical, Self-Align Spacer, Bearing Spring, Compression,.420 OD Revision A 11

12 Section 7 Entrance Loadlock Rainbow Harmonic Arm Drive Assembly (Cont d) Rev. G Item Part No. Description Screw, Soc HD Cap, 8-32 x 1/ Washer, Flat, #8, SST Bracket, Motor Limit Pulley, Idler Flange, Pulley, Aluminum Pulley, 108 tooth, Motor Mount Cam, Follower Pulley 1 tooth Spacer, Idler Pivot Clamp, Split Hub, 1/4 Shaft Assembly, Motor, Stepper, (Harmonic) Belt, Pos Drive,.080 Pitch, 20T Screw, SCH Cap, 6-32 x /8L Washer, Split-LK, #6, SST 116 Revision A

13 Revision A 117