M-2800 Series. Inline Ultrasonic Flow Meter. Description. Measurement Principle. Key Features. Applications

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1 M2800 Series Inline Ultrasonic Flow Meter Description The M2800 consists of an inline flow sensor and electronics in one package. The flow sensor is a straightthrough PFA tube with a pair of assemblies of angled wedges and piezoelectric crystals mounted on it. The M2800 utilizes the latest digital signal processing (DSP) technology and provides flow measuring solutions with minimum compromise in performance. The compact integrated package includes sensor and electronics, and saves space and minimizes cabling, facilitating an easier installation. There are no moving parts or mechanical seals. The M2800 is an ideal choice for use in the semiconductor industry where minimal footprint, high purity and corrosion resistant wetted parts are required. Key Features Sensor and electronics in one package No dead legs, no obstructions No moving parts in the flow path Straight flow path Minimal pressure loss Accuracy ±1% F.S. Repeatability ±0.5% F.S. All wetted parts made of PFA Free from ion or particle contamination Corrosion resistant Wide rangeability Easy installation with compact meter body Measurement Principle The flow meter utilizes transittime ultrasonic technology to determine flow rate of the liquid. Two piezoelectric crystals (transducers) are attached on the outer diameter of the flow tube (or on angled wedges attached on the outer diameter of the flow tube) and are excited producing ultrasound signals. Each transducer alternately transmits and receives ultrasound signals. The difference in transit time of the signals (transmitting upstream and downstream) is proportional to the velocity of the fluid allowing determination of flow rate. Applications CMP, ECD, Electroless Deposition, Wet Clean and Track tools in semiconductor manufacturing Solar PV equipments Medical devices Wet process / Chemical distribution system Laser Equipment Cooling systems

2 Operation Specifications Measurable Fluid: Liquids Fluid Temperature: F (10 60 C) Fluid Pressure: 0 70 psig Ambient Temperature: F (0 46 C) PFA Tube End or others * Enclosure Classification: IP64 * Consult Malema for any special requirements Performance Specifications Tube Size/ End connections 1/4 3/8 1/2 3/ /8 Standard Full Scale Range * 3 l/min 8 l/min 40 l/min 80 l/min 200 l/min 250 l/min Accuracy ±1% F.S.* Repeatability ±0.5% F.S.* * Custom flow ranges available upon request. Consult factory for any other special requirements Electrical Specifications Output Options Digital Input Analog Output Digital Output Current O/p: Active: 4 20 ma (Max. Load < 900 ohms) Passive: 4 20 ma (Max. Load < V max.) Voltage O/p: 0 10 Vdc (min. impedance > 10 K) Open Collector / Max. 30 Vdc, 200 ma max. Configurable for Low flow rate, High flow rate, Totalizer greater than, Totalizer less than, Signal strength less, Positive totalizer pulse * Zeroing Momentary pullup to 24 Vdc for activation Power Supply 24 Vdc ±10% Power Consumption 100 ma Digital MODBUS over RS485 Communication * Pulse frequency configurable up to 10 KHz; Pulse weight configurable from 0.01 ml Material Specifications Enclosure Classification Optional Cable Nonwetted Parts Wetted Parts IP64 Consult factory for available cable lengths and configurations PEEK, PP, SS High Purity PFA 2

3 Connector or Mating Cable (Optional) Specification Pin # Wire Color Function 1 White Signal OUT (4 20 ma or 0 10 Vdc) 2 Brown Power IN (+24 Vdc) 3 Green Remote Zero IN * 4 Yellow Alarm or Pulse OUT 5 Gray RS485 A, Data 6 Pink RS485 B, Data + 7 Blue Ground (Power and signal) 8 Red Not Used * Momentary pullup to 24 Vdc NOTE: Consult factory for other cable and pin out options Front View Dimensional Drawings FOR REFERENCE ONLY 1/4 Tube Ends Version B 8 Pin Turck P/n FSFDV 80.5 for I/O C.53 A D E d F H G M3 x.30" Dp 3

4 Dimensional Drawings (Continued) FOR REFERENCE ONLY 3/8 Tube End Version B 8 Pin Turck P/n FSFDV 80.5 for I/O C.73 A 1.40 E D d 3.00 L F H G M3 x.30" Dp 1/2 S300 Pillar Version n Flow direction /2" S300 Pillar Fitting Both ends Mounting hole M3 x.25" dp 2 places

5 Dimensional Drawings (Continued) FOR REFERENCE ONLY 34mm GF Version Flow direction Tube OD x Tube ID 32mm GF connection Both ends Mounting Hole for M4 screw S300 Pillar Version Flow direction Tube OD x Tube ID Mounting Hole for M4 screw 1" Female S300 Pillar Fitting Both ends NOTE: Drawings show mating cable option. 6 pigtail cable with free leads standard.

6 Ordering Information Model Code M2800 * * * * * * *** Electronics Type I Description Integrated Electronics Wetted Parts F PFA Connection Size (O.D.) Fluid Connection Local Display Analog Output *** Future versions 2 1/4 3 3/8 4 1/2 6 3/4 8 1 S 1 1/8 1 Tube Ends 2 Pillar S300 Union Ends 3 Pillar S300 Welded Ends 5 Flare Union Ends 6 Others 1 Yes *** 2 No Vdc ma active ma passive 4 Others XXX Unique PN Identifier 2015 Malema Engineering Corporation. All rights reserved. Malema, Malema Sensors, and Malema Engineering Corporation are service marks of Malema Engineering Corpration. All other trademarks are property of their respective owners. 6 Malema supplies this publication for informational purposes only. While every effort has been made to ensure accuracy, this publication is not intended to make performance claims or process recommendations. Malema does not warrant, guarantee, or assume any legal liability for the accuracy, completeness, timeliness, reliability, or usefulness of any information, product, or process described herein. We reserve the right to modify or improve the designs or specifications of our products at any time without notice. For actual product information and recommendations, please contact your local Malema representative. Corporate Headquarters West Coast Headquarters Asia Pacific Headquarters 1060 S Rogers Circle 2329 Zanker Road 35 Marsiling Industrial Estate Road 3 #0206 Boca Raton, FL San Jose, CA Singapore P: (561) F: (561) P: (408) F: (408) P: (65) F: (65) DS.M2800/518201