MFC Integrated Flow Control Module For Slurries and Chemicals. Key Features. applications.

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1 For Slurries and Chemicals Key Features Less than 2 seconds response time [can be less than 100 msec] Capable of controlling a wide range of flow with turn-down as high as 100:1 Controls flow rate within ±1% of set point Broad application range with 2 types of control valves Excellent for fluid blending and/or dispense applications Compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing) Longevity with minimal upkeep (Pinch tube replacement every 3 years or longer on slurry module) Slim package customized for easy installation on CMP tools (includes shut-off valve) The MFC-8100 Series is a line of high-performance closed-loop flow controllers designed for use in a wide variety of high-purity liquids including DI water, harsh chemicals and CMP (Chemical Mechanical Planarization) slurry applications. A typical module for chemicals combines Malema s ultrasonic flow meter with a Malema control valve. The ultrasonic flow meter has an all PFA (Perfluoroalkoxy) construction with no moving parts or seals. It sets the standard for flow measurement in terms of accuracy, repeatability and turndown. Malema s DSP (Digital Signal Processing) technology ensures reliable performance even with a certain degree of bubbles present in the process fluids. The high speed/precision control valve helps provide fast and precise response with minimal overshoot. Malema s control valve has an all PTFE (Polytetrafluoroethylene) construction and minimal dead volume that ensure maximum process purity and reliability. During operation, the user provides a set point via an analog signal. The flow controller s electronic module continuously compares this set point value with the flow rate measured by the flow meter which drives the motor to modulate the control valve to maintain the desired set point. Malema s state of the art control algorithm coupled with a high speed precision flow meter and valve allows for fast, accurate, and repeatable control. Applications Semiconductor CMP tools Used to precisely control the flow of chemicals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump based delivery systems. Wet Cleaning tools for accurate and reliable control of the blending and delivery of cleaning chemistries. Copper plating tools well suited to chemical mixing and dispensing applications.

2 Typical Block Diagram PC EXTERNAL I/O FLOW READING CONTROL SIGNAL SET POINT CONTROLLER ELEC. SERIAL COMMUNICATION FOR PC CONTROL (FOR DIAGNOSTICS) FLOW READING FLOW OUT FLOW METER FLOW IN 2

3 Performance Specifications Flow Controllability Range (Available in 7 ranges) 50 ml/min 100 ml/min 200 ml/min 500 ml/min 1000 ml/min 1250 ml/min 2000 ml/min Accuracy (for room temperature DIW) ±1% of set point or ±2 ml/min (whichever is larger) * Repeatability ±1% of set point or ±1 ml/min (whichever is larger) Control Repeatability ±0.5% of set point or ±0.5 ml/min (whichever is larger) Flow Control Time (to 95 % of Step Change) < 2 sec Fluid Temperature C ** Ambient Temperature/Humidity 0 40 C / 30% 80% RH, without Dew Maximum Expected Operating Pressure 50 psig Maximum Safe Internal Pressure 70 psig Delta Pressure Range 7 psid to 30 psid * Please consult the factory for tighter accuracy spec ** Please consult the factory for higher temperature application Electrical Specifications Electrical Input 24 VDC ±10% Consumption Max 0.5A (Power on: Rush current 0.9A) Withstand Voltage 1200Vac 1mA, 1Minute (Case and Power terminal) Control Signal In * 0 to 10V Flow Signal Out * 0 to 10V *Other options available Material Specifications Wetted parts for Modules of Slurry Application Non Wetted Parts, Enclosure * Only used in the slurry module. Physical Specifications Package Mounting Orientation Fluid Connections Flow Restrictions (orifice) PFA, PTFE, Pt cured Silicone* PEEK, PP, PVC Each Flow Control Channel w/ Two-way Pneumatically Actuated Shutoff Valve Fits in 2 W x 8 H x 17 L Horizontal Φ3/8 in & Φ1/4 out Flare connector > 2 mm 3

4 Power and Signal Connections The electrical connectors (TURCK) are located on the box front. The cables for installation are to be provided by customer. Connector Type of TURCK P1 MFS 4 P2 MFS 3 J3 MFKS 3 Pin Assignment Power Supply (P1) Target Flow Rate Input (P2) Fow Rate Output (P3) Pin No. MFS 4 MFS 3 MFKS DC 24V DC V - + DC 0 10 V Pin Out Diagram 4

5 Dimensional Drawings Slurry Version /4" Flare Fitting OUTLET 8.0 5/32 [4mm] Tube OD Air Inlet /8" Flare Fitting INLET Chemical Version /4" Flare Fitting OUTLET /32 [4mm] Tube OD Air Inlet /8" Flare Fitting INLET 5

6 Ordering Information Model Code Option MFC * * * ** - ** * - * - *** Tube Material T PFA 2 1/4 Tube size 3 3/8 Connection Type 1 Flare ends ml/min ml/min ml/min Scale Range ml/min ml/min ml/min ml/min Flow meter 09 M other Input / Output VDC / 0-10 VDC D Diaphragm Type Valve Type P Pinch Type XXX Unique PN Identifier NOTE: Specifications subject to change without notice Malema Engineering Corporation. All rights reserved. Malema, Malema Sensors, and Malema Engineering Corporation are trademarks of Malema Engineering Corporation. All other trademarks are property of their respective owners. 6 Malema supplies this publication for informational purposes only. While every effort has been made to ensure accuracy, this publication is not intended to make performance claims or process recommendations. Malema does not warrant, guarantee, or assume any legal liability for the accuracy, completeness, timeliness, reliability, or usefulness of any information, product, or process described herein. We reserve the right to modify or improve the designs or specifications of our products at any time without notice. For actual product information and recommendations, please contact your local Malema representative. Corporate Headquarters West Coast Headquarters Asia Pacific Headquarters 1060 S Rogers Circle Boca Raton, FL P: (561) F: (561) Zanker Road San Jose, CA P: (408) F: (408) Marsiling Industrial Estate Road 3 #02-06 Singapore P: (65) F: (65) DS.MFC8100/611030