non particles Series DIW Supply Floating Valve

Transcription

1 non particles The FV is a revolutionary slight leak mechanism which eliminates the problem of perticles. Our Semiconductor Production Process creates a super-clean environment. DIW Supply Floating Valve

2 DIW Supply Floating Valve Eliminating particles for DIW supply has been a critical objective. This non-touch slight leak mechanism has achieved a particle free environment in the washing process. Unique slight leak mechanism that generates very few particles Test Results Non by-pass type FV P By-pass type AV PW Test No 2 2 Particle size and numbers Measurement of generated particles Control air From DIW production equipment.5mpa Flow rate: 27cc/min Drain Testing Method.Thoroughly flush the air operated valve, and start testing. (Operate each valve times under normal DIW flow conditions). 2.Configure the cycle shown in Fig., and operate each valve 2 times (ON 2.5 sec, OFF 2.5 sec) under normal DIW flow conditions, and count generated particles.

3 DIW Supply Floating Valve PAT. Previous Slight Leak Control The main duct is shut and slight leak begins from the by-pass duct. Valve Operation The valve is opened when the specified pressure is applied to the port (operating air port) after air tubes are connected. (Use the speed controller during valve operation.) Flow Rate Control (Flow rate control when valve is open) Dimension A (stroke) can be adjusted by turning the adjustment rod. Adjustment rod EXH Air supply Stroke A Particles are generated due to contact of the valve seat and diaphragm by ON/OFF valve operation. Single action is standard for the FV-5FV- 7. The valve closes when operating air is cut off. Relationship between stroke and flow rate By-pass Liquid residue clogging causes generation of bacteria. Stroke (dimension A) Slight Leak Control (Slight leak control when valve is closed) Amount of slight leak can be controlled by turning the setter. M M (%) Flow rate Q (%) <Fig.> Rotations of setter Setter Relationship between slight leak control and flow rate tum 2 tums M (%) Amount of slight leak Q (3% of amount when valve is fully open) Refer to the attached sheet for control method. This non-touch slight leak mechanism has revolutionized the washing process. Adjust the stroke by turning the adjustment rod to control flow rate when the valve is open. Duct Structure Previous models have a main duct and a by-pass duct. This causes fluid clogging or generation of particles when the valve is closed (Fig. ). To eliminate this problem, a unique slight leak mechanism that curbs particle generation has been developed (Fig. 2). Connection Integral joint structure is standard. Effective in preventing liquid residues in connecting sections, thus preventing external leakage. Open level of the valve can be fine-adjusted by the setter to 3% of the flow rate when fully closed. New Slight Leak Control The structure below achieves slight leak without closing the main duct. <Fig.2> Water saving and main duct

4 Flow Rate Characteristics FV-5 Main Flow Rate Characteristics FV-7 Main Flow Rate Characteristics Differential pressurep[kg/cm 2 ].5. Differential pressurep[kg/cm 2 ] FV-5 Slight Leak Amount Characteristics 5 Bit-flow rate Q characteristics Parameter Liquid to be measured: Water (room temp.) P=2.5kg/cm 2 P=2.kg/cm 2 3 FV-7 Slight Leak Amount Characteristics Bit-flow rate Q characteristics Parameter Liquid to be measured: Water (room temp.) P=2.5kg/cm 2 P=2.kg/cm 2 P=.5kg/cm 2 P=.kg/cm 2 2 P=.5kg/cm 2 P=.kg/cm 2 5 P=.5kg/cm 2 P=.5kg/cm No. of turns (bit) (2 bit = turn) No. of turns (bit) (2 bit = turn) Notes Notes

5 Standard Specifications Figures in the brackets are dimensions for Fluid pressure Fluid temp. Actuation side OUT side Spring return format Actuating pressure 2-Rc/8 EXH 25(35) 86(98) 59(84) Flowell 2 Pillar Super Type Union Type MA Dimension A 6(7) OUT 2(6) 27(32) 43(56) Union Dimension Table A 8 5(6) 35(4) A B 64(94) 8() series Material Temp. Dimension A Dimension B Provided O ring material Model Configuration List No. /2class /2class /2class /2class /2class Operation Orifice Cv valve Base Flamge Body material Diaphragm material Connection Flowell Pillar Union PVdF Union PVC Union CPVC Flowell Pillar Union PVdF Union PVC Union CPVC 2752 SW 95th Avenue Willsonville,OR 977 Phone: Fax: Check the series of charts from this company for detailed specifications and type selection. The contents of this catalog are subject to change according to various AFVEB