Large Size acuum Module: Ejector System/acuum Pump System Nozzle size (mm): ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 acuum module suitable for handling workpieces of 0.5 to 5 kg. Z MJ 13-3-1
Large Size acuum Module: Ejector System/acuum Pump System acuum module suitable for handling workpieces of 0.5 to 5 kg. Modular design/customized application function through selection of modular components. Modules for use with external vacuum supply (from pump or mainline) or as an air driven ejector system. Safe acuum self-holding function by means of double solenoid valves. Compact, Lightweight Manifolding possible acuum ejector type complete unit Ejector unit With digital vacuum switch With vacuum switch acuum switch/ unit Without vacuum switch Function plate (Option) Double solenoid alve unit ir operated pplication Example One pilot External vacuum supply type complete unit Transferring CRT Escorting printed matter Picking & placing thin plate 13-3-2 lso: Picking & placing copper plates, utomatic labeling machine, Transferring veneers, utomatic screw fastening machine
Large Size acuum Module: Ejector System/acuum Pump System Modular Components Introduction System Ejector System acuum Pump System Component equipment Ejector unit 1-W alve unit 1- acuum pressure switch ZSE2-0R-15 ZSE4-00---105 unit 1-F Function plate 1-R Characteristics Nozzle dia. (mm ø) Maximum suction Type S flow rate (l/min. (NR)) Type L ir consumption (l/min (NR)) Maximum vacuum pressure Exhaust release (Ejector exhaust) Component equipment Function Operation Power supply voltage Set pressure range Hysteresis Operating voltage Operating pressure range Filtration degree Material Symbol R1 R2 R3 R4 1.0 22 42 46 1.3 38 52 78 S: 84 kpa 13-3-4 to 13-3-33 1.5 1.8 54 62 74 88 95 150 L: 53 kpa Built-in silencer, Manifold common or individual exhaust 2.0 84 105 185 (Pilot type)/ (Pilot type) N.C./N.O. Solenoid valve (Double, Single)/ir operated valve 3, 5, 6, 12, 24 DC, 100, 110 C (50/60Hz) 0 to 101 kpa 3% or less 12 to 24 DC (Ripple ±10% or less ) acuum to 100 kpa 30 µm F / / // 13-3-34 to 13-3-49 Z MJ Common specifications Manifold Unit ir supply port acuum pad connection port ir supply port Pilot valve connection port connection port Common exhaust port Rc 1 8 Rc 1 8 Rc 1 8 M5 M5 Rc 1 2 External vacuum supply port Rc 1 8 Refer to pages 13-3-9 to 13-3-20 for further specifications of each unit. Single unit Single unit Manifold Manifold Manifold 13-3-3
Large Size acuum Module: Ejector System For details about certified products conforming to international standards, visit us at www.smcworld.com. Note for model selection Take function plates into consideration. (Refer to page 13-3-7.) Ejector unit Ejector unit Ejector unit Ejector unit Ejector module nozzle diameter 10 1.0 mmø 13 1.3 mmø 15 1.5 mmø 18 1.8 mmø 20 2.0 mmø Nil Y Components self-holding Supply valve N.C. 1 20 unit acuum switch 1 K1 5 M Z E C 1 20 L 1 K2 5 M Z E C unit acuum switch acuum switch unit Filter unit DC: 1 W (With indicator light: 1.05 W) C DC: 0.45 W (With indicator light: 0.5 W) Rated voltage Nil ir operated 5 24 DC 6 12 DC 6 DC S 5 DC R 3 DC D1 100 C ( 50 60 Hz) D2 110 C ( 50 60 Hz) Ejector unit nozzle dia. S 1 20 S 1 1 20 L 1 Maximum vacuum pressure Pilot valve 24 DC and 12 DC are applicable to 0.45 W. When using C, the DC solenoids are operated via a rectifier. Therefore, make sure to combine the connector assembly equipped with a rectifer with the exclusive solenoids. Using other combinations could lead to burned coils or other malfunctions. 706 13-3-4 Caution S L 84 kpa 53 kpa Ejector exhaust Symbol Type alve Manifold 1 Built-in silencer 2 Port exhaust 3 Common exhaust Maximum vacuum pressure Ejector exhaust Combination of supply valve and release valve Refer to Table (1) on page 13-3-5 for details. How to Order Combination of supply valve and release valve Refer to Table (1). Electrical entry Nil ir operated For 24, 12, 6, 3 DC L Lead wire length 0.3 m LN Without lead wire (pplicable to only DC) Plug LO Without connector connector M Lead wire length 0.3 m type MN Without lead wire (pplicable to only DC) MO G H Grommet type Without connector Lead wire length 0.3 m (pplicable to only DC) Lead wire length 0.6 m (pplicable to only DC) 100, 110 C (With rectifier) L Lead wire length 0.3 m Plug LO Without connector connector M Lead wire length 0.3 m type MO Without connector Refer to page 13-3-5 for part no. of lead wire with connector. Pilot valve Rated voltage Electrical entry Light/Surge voltage suppressor Manual override Combination of vacuum switch/ valve and release valve acuum switch electrical entry Nil B E C Non-locking push type Slotted locking type Light/Surge voltage suppressor Nil Z S Unit specifications (pplicable to Series ZSE4) Unit specifications Nil With unit switching function F (1) M SI unit only (2) Note 1) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, 1999). Note 2) Fixed unit: kpa Digital vacuum switch specifications (D1, D2, D3) Symbol Output Lead wire length pplicable specifications switch 25 (L) NPN output Lead wire length 0.6 (3.0)m 26 (L) nalog output Lead wire length 0.6 (3.0)m D1 D2 65 (L) PNP output Lead wire length 0.6 (3.0)m 27 (L) NPN output Lead wire length 0.6 (3.0)m 26 (L) nalog output Lead wire length 0.6 (3.0)m D3 67 (L) PNP output Lead wire length 0.6 (3.0)m acuum switch electrical entry (E) Nil Grommet Lead wire length 0.6 m L type Lead wire length 3.0 m C Lead wire length 0.6 m Connector CL Lead wire length 3.0 m type CN W/o lead wire Refer to page 13-3-5 for part no. of lead wire with connector. Combination of vacuum switch/ Nil None D1 ZSE4 + Filter Digital D2 vacuum switch ZSE4B + Filter D3 ZSE4E + Filter E acuum switch ZSE2 + Filter F Filter Manual override None With light/surge voltage suppressor (Possible only solenoid valve connector type.) With surge voltage suppressor S and Z are not available for grommet style (DC). S is not available for C. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged.
Large Size acuum Module: Ejector System Table (1) Combination of Supply alve and Release alve alve unit function Components Solenoid valve ir operated Solenoid valve Operation acuum acuum Supply Release Symbol Double SOL. Double SOL. N.C. Double SOL. Double SOL. stop adsorption release valve valve (J3130) (J3233-17) (J3233-18) (J3133) (J3233-17) (J3233-18) N.C. (J3133) ir operated (J3130) N.O. (J3133) Double SOL. N.C. ir operated N.C. N.C. ir operated (J3233-17) (J3133) (J3130) (J3133) (J3133) (J3130) K1 K2 K3 C1 C2 C3 Double SOL. Common with C4 (J3233-18) supply valve : Possible : Possible with limitations (without self-holding function) : Not possible Nil Without valve module Table (2) How to Order alve Plug Connector ssembly DC J10 20 4 N.C. (J3133) Common with supply valve Common with supply valve ir operated (J3130) Common with supply valve Table (3) acuum Switch Plug Connector ssembly ZS 10 5 Z MJ 100 C (with rectifier) 110 C (with rectifier) J10 J10 36 36 1 3 Lead wire length Nil 30 50 0.6 m 3 m 5 m Nil 6 10 15 20 25 30 Lead wire length 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m lead wire connector separately. Example) 1--CN... 1 pc. ZS-10-5-50... 1 pc. How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) 120S1-K15MZ-EC... 1 pc. J10-20-4-6... 2 pcs. 13-3-5
Ejector System/Combination of Supply alve and Release alve Combination Symbol: K1 Feature: Double solenoid supply valve allows for self-holding. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop ON SOL.b ON ON SOL.c ON Combination Symbol: K2 Feature: Single solenoid valve is provided for supply valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop ON SOL.c ON Note The supply valve will hold the operation even during stoppage of power supply. Note When power supply is stopped, all operations will be stopped. Combination Symbol: K3 Feature: Operation can be controlled by an external pilot valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop Pilot air Pilot air ir operated a ir operated a ON SOL.b Release valve Release valve SOL.c SOL.c ir operated b Release valve ir operated b ON Ejector Ejector Ejector Note Suitable when solenoid valves cannot be used or for centralized control using external pilot air. Combination Symbol: C1 Feature: dsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release / ON Combination Symbol: C2 How to Operate Combination Symbol: C3 Note Be careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Feature: dsorption of workpieces and release of vacuum are switched by external pilot valve. ir operated a Pilot air Pilot valve operation Operation 1. dsorption 2. acuum release How to Operate / ir operated a ON Note Be careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Feature: dsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by single solenoid valve. Pilot valve operation Operation 1. dsorption 2. acuum release Release valve / ON Ejector Note Be careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Combination Symbol: C4 Feature: dsorption of workpieces and release of vacuum are switched by double solenoid valve. Release valve Release valve Ejector SOL.b Ejector Caution When pipe connection is made to one port connection ( port) only, use a function plate (1-R1). Refer to page 13-3-7 for further information. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release Release valve / SOL.b ON ON Ejector Note When power supply is stopped supply valve/vacuum release valve will hold the operation. 13-3-6
Large Size acuum Module: Ejector System Function Plate/1-R function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to,, and ports respectively. Without Function Plate (Standard) pplicable system: Ejector system External vacum supply system acuum release ari supply port Pilot exhaust port (Release) Pilot valve air supply port Ejector air supply port Pipe connection Circuit diagram SOL.b SOL.c Release valve acuum switch Ejector Z With Function Plate/pplicable to Ejector System Only When 1/R1 ( ) is Selected Since, and ports are made common via the function plate, pipe only to the port. acuum release ari supply port Pilot exhaust port (Release) Pilot valve air supply port Ejector air supply port Pipe connection Circuit diagram SOL.b SOL.c Release valve 1-R1 acuum switch Ejector MJ When 1/R2 ( /) is Selected When the work should be kept clean or contaminant-free, it is possible to use a nitrogen, dry air, etc. connection to the port. acuum release ari supply port Pilot valve air supply port Pilot exhaust port (Release) Ejector air supply port Pipe connection Circuit diagram SOL.b SOL.c Release valve 1-R2 acuum switch Ejector How to Order Function Plate Unit 1 R 1 Piping specifications Symbol 1 2 Indication port port port Common / Common Individual How to order Indicate the model numbers of the vacuum module and the function plate. Example) 120S1-K15MZ-EC... 1 pc. 1-R1... 1 pc. Caution Length of assembling screw varies when adding function plate. Prepare mounting screw for assembling unit among parts list posted on the last page of catalog. 13-3-7
Construction Component Parts No. Description q Manifold base w Release flow rate adjustment needle e Function plate r Individual spacer t Note) Filter case Material luminum Stainless steel PBT PBT Polycarbonate Note Refer to page 13-3-7. Refer to page 13-3-22. Note) Precautions on handling the filter case 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Replacement Parts No. y u i o!0!1 Description Pilot valve assembly alve body assembly Ejector assembly element Filter element acuum switch Material F F Part no. Refer to (1) below. Refer to (2) below. Refer to (3) below. Refer to (4) below. 1-FZ (30 µm) ZSE2-OR-15- ZSE4-00---105 (1) How to Order Pilot alves Combination Symbol K1 C4 K3 Components Double solenoid valve N.C. (J3233) Double solenoid valve N.O. (J3233) ir operated N.C (J3130) Single solenoid valve N.C. (J3133) Double solenoid valve N.O. (J3233) ir operated N.O (J3130) Model Refer to How to Order below. 1-J3233--17 Refer to How to Order below. 1-J3233--18 1-J3130 How to Order Solenoid alves/ir Operated alves ir operated 1 Solenoid valve 1 J3130 J3233 Pilot valve oltage Electrical entry 5 M Z Refer to page 13-3-4 for detailed specifications of each code. 17 18 Manual operation With light/surge voltage suppressor (2) How to Order alve Body ssembly 1 D K1 Combination of supply valve and release valve Pilot valve oltage 5 M Z With light/surge voltage suppressor Electrical entry Refer to page 13-3-4 for detailed specifications of each code. (3) How to Order Ejector ssembly 1 WD 10 S 1 Nozzle diameter 10 1.0 mmø 13 1.3 mmø 15 1.5 mmø 18 1.8 mmø 20 2.0 mmø Maximum vacuum pressure S L Ejector exhaust 1 Built-in silencer 2 Port exhaust 3 Common exhaust 84 kpa 53 kpa (4) How to Order Element 1 SZ 10 Nozzle diameter 10 13 1.0 mmø 1.3 mmø 15 1.5 mmø 18 1.8 mmø 20 2.0 mmø Manual operation 13-3-8
Large Size acuum Module: Ejector System Ejector Unit/1 JIS Symbol Model/Max. acuum Pressure 84 kpa (S: Standard type) Model 1-W10S 1-W13S 1-W15S 1-W18S 1-W20S Nozzle dia. (mmø) 1.0 1.3 1.5 1.8 2.0 Maximum suction flow rate (l/min (NR)) 22 38 54 62 84 ir consumption (l/min (NR)) 46 78 95 150 185 Model/Max. acuum Pressure 53 kpa (L: Large flow type) Model 1-W10L 1-W13L 1-W15L 1-W18L 1-W20L Nozzle dia. (mmø) 1.0 1.3 1.5 1.8 2.0 Common Specifications Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range Model (Ejector exhaust method) Standard accessory Maximum suction flow rate (l/min (NR)) 42 52 74 88 105 ir consumption (l/min (NR)) 46 78 95 150 185 Weight (With bracket) (kg) 0.132 0.134 0.136 0.154 0.156 Weight (With bracket) (kg) 0.133 0.133 0.135 0.155 0.154 0.7 MPa 0.2 to 0.55 MPa 0.45 MPa 5 to 50 C Code 1: Built-in silencer For unit and manifold Code 2: Individual exhaust For unit and manifold Bracket How to Order: Code 1 and 2 are the suffixes in the ordering number to indicate the exhaust method. Note) If not operating within the specified range of pressure and temperature, trouble may result. 1 W 20 S 1 How to Order Z MJ Nozzle diameter 10 13 1.0 mmø 1.3 mmø 15 1.5 mmø 18 1.8 mmø 20 2.0 mmø Ejector exhaust 1 Built-in silencer 2 Individual exhaust Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mmø) RC 1/4 (Nozzle dia. 1.8, 2.0 mmø) Maximum vacuum pressure S L 84 kpa 53 kpa 13-3-9
Ejector Unit/Standard Type (S): Max. acuum Pressure 84 kpa t 0.45 MPa 1-W10S1 1-W18S1 acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Supply pressure (MPa) Suction flow (l /min (NR)) Supply pressure (MPa) Suction flow (l /min (NR)) 1-W13S1 1-W20S1 acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Supply pressure (MPa) Suction flow (l /min (NR)) Supply pressure (MPa) Suction flow (l /min (NR)) 1-W15S1 How to Read Flow Characteristics Graph acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure Suction flow Supply pressure (MPa) Suction flow (l /min (NR)) Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, the vacuum pressure will also be changed. Normally this relationship is expressed in ejector standard use. In graph, Pmax is max. vacuum pressure and Qmax is maximum suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0 (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. In the case when ventirative or leaky work should be adsorbed, please note that vacuum pressure will not be high. 13-3-10
Large Size acuum Module: Ejector System Ejector Unit/Large Flow Type (L): Max. acuum Pressure 53 kpa t 0.45 MPa 1-W10L1 1-W18L1 acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Z Supply pressure (MPa) Suction flow (l /min (NR)) Supply pressure (MPa) Suction flow (l /min (NR)) 1-W13L1 1-W20L1 acuum pressure (kpa) ir consumption acuum pressure Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) acuum pressure (kpa) acuum pressure ir consumption Suction flow ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) MJ Supply pressure (MPa) Suction flow (l /min (NR)) Supply pressure (MPa) Suction flow (l /min (NR)) 1-W15L1 How to Read Flow Characteristics Graph acuum pressure (kpa) ir consumption acuum pressure Suction flow Supply pressure (MPa) ir consumption (l /min (NR)) Suction flow (l /min (NR)) acuum pressure (kpa) Suction flow (l /min (NR)) acuum pressure Suction flow Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, the vacuum pressure will also be changed. Normally this relationship is expressed in ejector standard use. In graph, Pmax is max. vacuum pressure and Qmax is maximum suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0 (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. In the case when ventirative or leaky work should be adsorbed, please note that vacuum pressure will not be high. 13-3-11
Ejector Unit Ejector exhaust acuum pad connection port Nozzle Dia./ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 mm Nozzle dia./ø1.0, ø1.3, ø1.5 mm 10 1-W 131 15 Ejector supply P port Ejector indication dapter B 2 2 2 Circuit diagram Ejector (Mounting hole) dapter E (Mounting hole) Spacer B M5 port (acuum release pressure port) Remove tha plug from port at external release. 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3) 2 2 Rc1/8 port (acuum port) Bracket B Bracket B Ejector Nozzle dia./ø1.8, ø2.0 mm 18 1-W 201 Ejector indication dapter B 2 2 2 Note) Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting. Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 (Mounting hole) dapter E (Mounting hole) Spacer B Rc 1/8 P port (ir supply port) M5 port (acuum release pressure port) Remove tha plug from port at external release. Rc 1/8 port (acuum port) Rc 1/8 P port (ir supply port) 2 2 Bracket B Bracket B Ejector 13-3-12
Large Size acuum Module: Ejector System acuum Pressure Switch Unit/Pressure Switch for acuum: ZSE2-0R-15 Quick response: 10 ms Compact size: 39H x 20W x 15D (except the connecting portion) Improved wiring: Connector style Uses a carrier diffusion semiconductor pressure sensor Pressure detector ( carrier diffusion semiconductor pressure sensor is used.) Sensor chip Specifications acuum pressure switch part no. Fluid Setting pressure range Hysteresis Temperature characteristics Operating voltage Output Indicator light Current consumption Max. operating pressure Operating temperature range Wiring ZSE2-0R-15 ir 0 to 101 kpa 3% or less ±3% Full span (5 to 40 C) ±5% Full span (0 to 60 C) 12 to 24 DC (Ripple ±10% or less) Open collector 30, 80 m Lights up when ON 17 m or less (when 24 DC is ON) 0.2 MPa 5 to 50 C When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) If not operating within the specified range of pressure and temperature, trouble may result. ZSE2 connection Switch Red White Black Main circuit of switch Load ZSE2 0R 15 L Connection with PLC at negative COM terminal Switch How to Order Red White Black Main circuit of switch PLC input terminal Z MJ Switch specifications/oltage Solid state/12 to 24 DC Piping specifications Nil Lead wire length 0.6 m Grommet type L Lead wire length 3 m C Lead wire length 0.6 m CL Connector type Lead wire length 3 m CN W/o lead wire With Connector/How to Order Without lead wire (housing and 3 sockets)... ZS-10- With lead wire... ZS-10-5- Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Lead wire length Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN... 1 pc. ZS-10-5-50... 1 pc. 13-3-13
acuum Pressure Switch Unit/Pressure Switch for acuum: ZSE2-0R-15 Guidelines for Use of acuum Pressure Switch Unit System circuit for work adsorption Ejector style When pads and switches are common to one vacuum source, sometimes there is a possibility, depending on the number of adsorption and non-adsorption applications at each point in time, that the switches will not work within the range of set pressures due to pressure variations from the vacuum source. In particular, when small diameter nozzles are used for adsorption, the switches are greatly influenced by pressure variations. In order to remedy this situation, the following circuit is recommended. acuum regulator Tank acuum source Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable. Sometimes the switch will turn ON even when adsorption is not complete. Needle valve External vacuum supply style acuum line acuum pressure switch Pad Work djust the needle valve to reduce the pressure fluctuation between picking and non-picking. Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines. Thus, in the case of an error, each valve can be turned to minimize the influences on other pads. acuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L Pressure setting trimmer L SET H Indicator light (Red) ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Pressure setting trimmer L SET H Indicator light (Red) 25 31 13 11 9 3 3 49.5 40 42 40 600(3000) 600(3000) 9 15 25 31 20 18 16 20 18 16 13 11 9 9 15 2-M2.5 Mounting thread 2-M2.5 Mounting thread acuum supply port ø3.3 acuum supply port ø3.3 13-3-14
Large Size acuum Module: Ejector System How to Set acuum Pressure Hysteresis Pressure trimmer selects the ON pressure. Clockwise rotation increases high vacuum set point. Pressure setting trimmer Indicator light How to Use Connector SET 1. ttaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until the level locks into the housing slot. When removing the connector from the switch housing, push the lever down to unlock it from the slot and then withdraw the connector straight off of the pins. Hook + O\r Lead wire 0.2 to 0.33 mm 2 Max. covering dia. ø1.7 mm Socket Hook Connector DC polarity indication Lever 0.2 to 0.33 mm 2 Lead wire Max. covering dia. Socket ø1.7 mm Connector DC polarity indication Lever Pin Slot Housing High vacuum When using the switch to confirm correct adsorption, the set pressure should be as low as possible, but not so low that a false confirmation signal is given when adsorption is incomplete. Supply pressure Setting pressure tmospheric pressure Reliable adsorption Unstable adsorption No adsorption 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm at the end of the lead wires, insert the ends of core wires evenly into the sockets, and then crimp with a crimping tool. When this is done, take care that the coverings of the lead wires do not enter the core wire crimping area. (Crimping tool: model no. DT170-75-1) Core wire Covering crimping area retainer Socket Hook Core wire Lead wire Covering 3. ttaching and detaching of socket to connector with lead wire ttaching Insert the sockets into the square holes of the connector (with +, 1, 2, indication), and continue to push the sockets all the way in until they lock by hooking into the seats in the connector. (When they are pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. Detaching To detach a socket from a connector, pull out the lead wire while pressing the socket's hook with a stick having a thin tip (about 1 mm). If the socket will be used again, first spread the hook outward. Hysteresis is the actual pressure variance from set pressure occuring when the output signal turns from ON to. The set pressure is the pressure selected to switch from to ON mode. High vacuum Setting pressure tmospheric pressure Be sure to read before handling. Refer to page 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and 13-1-5 for Precautions on every series. Mounting Warning Hysteresis Precautions 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1000 m/s 2 ) when handling. Even if the switch body is not damaged, the switch may suffer internal damage that will lead to malfunction. 2. Hold the product from the body side when handling. The tensile stregth of the power cord is 49 N, and pulling it with a force greater than this can cause failure. Hold by the body when handling. Z MJ Connector Lead wire Socket Hook 13-3-15
acuum Pressure Switch Unit/Pressure Switch for acuum: ZSE4-00---105 Digital acuum Switch Specifications: Series ZSE4 Digital acuum Pressure Switch Part no. ZSE4-00---105 ZSE4B-00---105 ZSE4E-00---105 Display LCD LCD with backlight LED Pressure setting range 101 to 0 kpa 101 to 10 kpa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode ariable (3 digits or more) ariable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Temperature characteristics Repeatability ir, Non-corrosive gas ±3% F.S. or less ±1% F.S. or less Operating voltage 12 to 24 DC (Ripple ±10% or less) Current consumption 25 m or less 45 m or less Pressure indication Self-diagnostic function Operating temperature range 31/2 digits (Letter height 8 mm) 26, 27: 50 m or less 67: 60 m or less Over current (1), Over pressure, Data error, Confirmation of pressure at zero clear 0 to 50 C (With no condensation) Noise resistance 500 p-p, Pulse width: 1 m S, Start up: 1 ns Withstand voltage Insulation resistance ibration resistance Impact resistance Note) Not available on analog output type. 1000 C(50/60 Hz) for 1 min. between lead wires and body 2 MΩ (at 500 DC) between lead wires and body 2 hrs. each in, Y, Z directions at smaller of 10 to 500 Hz with amplitude 1.5 mm, or acceleration 10 G 100 G in, Y, Z directions, 3 times each Output Specifications ZSE4 ZSE4B ZSE4E 25 (L) 26 (L) 67 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30, 80 m or less nalog output (1 to 5 ) 1 output PNP open collector 80 m or less nalog output (1 to 5 ) 2 outputs NPN open collector 30, 80 m or less 2 outputs PNP open collector 80 m or less 13-3-16
Large Size acuum Module: Ejector System Z MJ 13-3-17
acuum Switch + Suction Filter Unit: 1-F Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination. Specifications Unit no. Operating pressure range Suction Operating temperature range filter Filtration degree Filtration material acuum pressure switch Standard option 1-F acuum to 100 kpa 5 to 50 C 30 µm F Refer to page 13-3-13 regarding vacuum switch. Bracket Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. How to Replace Elements Combination of acuum Switch + Suction Filter Combination symbol E F dapter is attached on vacuum switch mounting area. 1 F How to Order E L Combination of vacuum switch + suction filter Unit specifications Nil None Nil With unit switching function (1) D1 ZSE4 + Filter M SI unit only (2) Digital D2 ZSE4B + Filter Note 1) This is no longer sold for use in vacuum switch Japan due to the Weight and D3 ZSE4E + Filter Measure ct (implemented October, E acuum switch ZSE2 + Filter 1999). F Filter Note 2) Fixed unit: kpa How to order Digital vacuum switch specifications (D1, D2, D3) When requiring a switch with lead wire of 5 m, Symbol Output specifications Lead wire length pplicable switch indicate separately the model numbers of a 25 (L) NPN output Lead wire length 0.6 (3.0) m vacuum switch unit without a lead wire 26 (L) nalog output Lead wire length 0.6 (3.0) m D1 connector and the 5 m lead wire connector. D2 65 (L) PNP output Lead wire length 0.6 (3.0) m Ex.) 1--CN... 1 pc. 27 (L) NPN output Lead wire length 0.6 (3.0) m ZS-10-5-50... 2 pcs. 26 (L) nalog output Lead wire length 0.6 (3.0) m D3 67 (L) PNP output Lead wire length 0.6 (3.0) m (1) Lead wire length for vacuum switch connector assembly ZS 10 5 acuum switch Weight (with bracket ) (kg) None 0.15 0.15 acuum switch electrical entry (E) Nil Grommet Lead wire length 0.6 m L type Lead wire length 3.0 m C Lead wire length 0.6 m Connector CL Lead wire length 3.0 m type CN W/o lead wire Refer to Table (1) for part numbers for lead wire with connector. Lead wire length Nil 30 50 0.6 m 3 m 5 m When an element becomes clogged, adsorption performance and response times are degraded. Stop operation and replace element. (Element no. 1-FZ). Please ensure that gasket is in slot before re-installation. O-ring Filter case Filter element (1-FZ) Filter gasket Gasket slot acuum switch Filter block 13-3-18
Large Size acuum Module: Ejector System Dimensions: 1-F Circuit diagram 1-FE Spacer P Rc 1/8 P port (External vacuum pressure port) 11 Bracket D1 1- D2- D3 acuum pressure setting trimmer acuum switch 6.5 8 M5 port (acuum release port) Remove tha plug from port at external release. 9 Bracket Indicator light (Red) 79 70 31 dapter F 30 4.6 10 2 23 2 10 2 L SET M 23 3 63 2 Slitted hole (Mounting hole) 57 67 5.6 2 ø4.6 8 8 3 (Mounting hole) 10.2 acuum switch 9 Filter block 2 ø4.2 (Mounting hole) 28 8 10 43 23 2 ø4.5 Thickness 1.2 Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. 16 4 Rc 1/8 port (acuum pad connecting port) Z MJ SMC PRESURRE SWITCH RESET SET ttachment D Digital pressure switch 81 61 71.3 (73.3 for D2, D3 types) SMC Filter block D 78.8 Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer Bracket part no. : P3270153 (Standard accessory) Spacer part no. : P3270156 3 13-3-19
Suction Filter: 1-F 1-F is to be used alone and cannot be combined with other units. Specifications Model 1-F Operating pressure range acuum to 0.5 MPa Operating temperature range 5 to 50 C Filtration efficiency 30 µm Element F Weight (With bracket) 0.1 kg Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Dimensions: 1-F Circuit diagram (Mounting hole) Rc 1/8 Out port M5 port (acuum release pressure port) Remove tha plug from port at external release. Rc 1/8 IN port Bracket C Bracket C Note) Dimensions for mounting bracket C Bracket C part no. : P3270155 13-3-20
Large Size acuum Module: Ejector System Z MJ 13-3-21
B B B J3233-17 SMC PRESSURE SWITCH RESET SET Ejector System Complete Unit Ejector exhaust acuum pad connection port <Components> Ejector + alve + acuum Switch + Filter acuum release air supply port Pilot valve air Pilot exhaust port supply port Ejector air supply port Nozzle dia./ø1.0, ø1.3, ø1.5 mm 10 1 131-K1M-E 15 Circuit diagram SOL.b SOL.c Release valve acuum switch Ejector Indicator lilght (Red) acuum pressure setting trimmer Ejector indication Manual override 2 2 Slotted holes (Mounting holes) Spacer Thickness 1.2 Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. 2-ø 4.6 (Mounting hole) 2 2 Manual override Interface Interface B Light acuum switch M5 port (acuum release pressure port) M5 port (Pilot valve supply pressure port) M5 port (Pilot valve exhaust port) Release flow adjustment needle Rc 1/8 port (ir supply pressure port) alve unit Filter block 2-ø 4.2 (Mounting hole) 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3) 2 2 Spacer dapter C Ejector Bracket Bracket Rc 1/8 port (acuum port) 10.2 10 1 131-K1M- 15 D1 D2 D3 - PRESS. 2.5~7kgf/cm 2 SOL.b Digital pressure switch - + - + - + 65 74 (76 for D2, D3 types) 85 SMC 143 13-3-22
B B B J3233-17 PRESS. 2.5~7kgf/cm 2 SMC PRESSURE SWITCH RESET SET Large Size acuum Module: Ejector System Nozzle dia./ø1.8, ø2.0 mm 18 1 201-K1M-E Note) Dimensions for mounting bracket 2 Dimensions for mounting spacer Bracket part no. : P3270153 (Standard accessory) Spacer part no. : P3270156 Manual override Interface Interface B Dimensions not indicated are identical to the top drawing. 18 1 1-K1M- D2-20 D1 D3 10.2 SOL.b Digital pressure switch 65 74 (76 for D2, D3 types) 85 Z MJ SMC 147 13-3-23
Ejector System acuum release air supply port Pilot exhaust port Nozzle dia./ø1.0, ø1.3, ø1.5 mm 10 1 131-K1M 15 Pilot valve air supply port Ejector air supply port Ejector exhaust acuum pad connection port with alve Ejector indication dapter B 2 2 2 Circuit diagram SOL.c SOL.b Release valve Ejector 1.2 Manual override (Mounting hole) Manual override Interface Interface B Light Spacer B M5 port (acuum release pressure port) M5 port (Pilot valve supply pressure port) Bracket B M5 port (Pilot valve exhaust port) Release flow adjustment needle Rc 1/8 port (ir supply pressure port) Bracket B alve unit dapter C Ejector (Mounting hole) 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3) Spacer B 2 Rc 1/8 port (acuum port) Thickness 1.2 Spacer B is used to leave space for maintenance (for replacing filter element etc.) on side mounting. Nozzle dia./ø1.8, ø2.0 mm 18 20 1 1-K1M- Note) Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Bracket B part no. : P3270154 (Standard accessory) Spacer B part no. : P3270157 Manual override Dimensions not indicated are identical to the top drawing. 13-3-24
Large Size acuum Module: Ejector System Z MJ 13-3-25
SMC PRESSURE SWITCH RESET SET Ejector System Ejector exhaust acuum pad connection port without alve Circuit diagram Ejector air supply P port Ejector acuum switch Nozzle dia./ø1.0, ø1.3, ø1.5 mm 10 1 131-E 15 Indicator lilght (Red) acuum pressure setting trimmer Ejector indication 2 2 2 2 Slotted holes (Mounting holes) Spacer Thickness 1.2 dapter E (Mounting hole) Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. acuum switch Rc 1/8 P port (ir supply port) M5 port (acuum release pressure port) 70 (Nozzle size: ø1.0, ø1.5) 80 (Nozzle size: ø1.5) Filter block 2-ø4.2 (Mounting hole) Rc 1/8 port (acuum port) Spacer Bracket Bracket Ejector 10 1 13-15 D1 D2 D3-10.2 ttachment D Digital pressure switch 81 61 71.3 (73.3 for D2, D3 types) SMC Filter block D 3 96 13-3-26
SMC PRESSURE SWITCH RESET SET Large Size acuum Module: Ejector System Nozzle dia./ø1.8, ø2.0 mm 18 20 1 1-E Note) Dimensions for mounting bracket 2 Dimensions for mounting spacer Bracket part no.: P3270153 (Standard accessory) Spacer part no.: P3270156 Z 1-18 D1 20 D2 D3-10.2 MJ ttachment D Digital pressure switch 61 71.3 (73.3 for D2, D3 types) SMC Filter block D 3 100 Dimensions not indicated are identical to C1 type. 13-3-27
Ejector System/Manifold Specifications Specifications Max. number of units 6 stations Port Port size Function port port port EH port Rc 1 8 M5 M5 Rc 1 2 ir supply for ejector ir supply for pilot valve ir supply for release Common exhaust Weight Basic weight for one station is 0.28 kg. dditional weight per one station is 0.12 kg. Notes) When using 3 or more stations with 120 manifold, utilize port as supply port on both sides. When using 3 or more stations with 120 3 manifold, utilize EH port as exhaust port on both sides. Manifold ir Supply Manifold Left Right Supply port location Port L (Left side) R (Right side) B (Both sides) ir supply to port Blank plug attached to port Note) Blank plug is attached on all ports of valve unit. Individual Spacer Part no. 1-R1 Port Function Possible to set the air supply pressure individually Possible to set the pilot valve air supply pressure individually Possible to set the release valve supply pressure individually Possible to set the pilot valve exhaust individually Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. Indicate separately the model number of the manifold and the vacuum units, function plates, individual spacers and blank plates to be included. <Manifold base> Z1 Stations 01 1 06 6 06 Nil F T R Port location R Right side L Left side B Both sides iewed from the front side of valve unit, confirm the port location on the right and/or left side. Thread type Rc G NPTF Example) Z106-R... 1 pc. (Manifold base only) 120S1-K15MZ-EC... 5 pcs. (Unit) 1-BM1... 1 pc. (Blank plate) 1-R1-3... 1 pc. (Individual spacer) Symbol 1 2 With reference from valve side, the third station from right side How to Order Manifold <Function plate> 1 R Piping specifications 1 1 Symbol port port port Common / Common Individual <Individual spacer> 1 rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is R1 required, specify all spacers. Example) ttached to the first and third stations 1-R1-1 1-R1-3 1-R1-3 Fill the number 1 rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is required, specify all spacers. Example) ttached to the first and third stations 1-R1-1 1-R1-3 13-3-28
Large Size acuum Module: Ejector System Manifold/System Circuit Example When not using individual air pressure supply When using indivisual air pressure supply Ejector 1 Ejector 2 <System circuit example> : External supply port : supply pressure port : ir supply port for release valve : Pilot exhaust port EH: Common exhaust port <System circuit example> Individual Spacer 1-R1 : External supply port : supply pressure port : ir supply port for release valve : Pilot exhaust port EH: Common exhaust port Z MJ Sol.a Sol.c Sol.b EH EH Sol.c Sol.c Sol.a Sol.b Ejector unit acuum switch Sol.a Sol.b Ejector unit acuum switch Sol.a Sol.b Sol.c Individual spacer R1 EH EH Ejector unit acuum switch Ejector unit acuum switch 13-3-29
J3233-17 SOL.b J3233-17 SOL.b SMC PRESSURE SWITCH RESET SET Ejector System acuum pad connection port acuum pad connection port Manifold Nozzle Dia./ø1.0, ø1.3, ø1.5 mm Common exhaust EH port Common ejector air supply port Common pilot valve air supply port Common vacuum release air supply port Function plate 62 Individual spacer 82 96 5 3 40 4 ø5.7 Mounting hole 4 74 31 37 49 61 80 17 33 28 42 52 80.8 61.5 81.5 109 L2 L1 Pitch 33 13.5 35.5 16.5 31.5 50 31 L SET H 19 B 32.4 B B B PRESS. 2.5~7kgf/cm 2 dapter B B B PRESS. 2.5~7kgf/cm 2 case (Built-in silencer) 19 dapter D Individual spacer acuum pressure switch Pressure setting trimmer case (Common exhaust) Manual override Non-locking push type (SOL.c) () (SOL.b) M5 port Pilot valve exhaust port M5 port acuum release pressure port 28 31 28 52 Manual override Non-locking push type Ejector unit Exhaust port Rc 1/8 case (Port exhaust) EH M5 port Pilot valve supply pressure port Rc 1/8 port ir supply pressure port 3 1.5 4.5 1 2.5 Release flow rate adjustment needle M5 port acuum release pressure port Rc 1/8 port ir supply pressure port 2-M5 port Common vacuum release pressure port 7.5 7.5 2-Rc 1/2 EH port Common exhaust port 2-M5 port Common pilot supply port 2-Rc 1/8 port Common pillot valve supply pressure port (mm) Symbol Stations 1 L1 52 L2 71 2 85 104 3 118 137 4 151 170 5 184 203 6 217 236 13-3-30
Large Size acuum Module: Ejector System Circuit diagram Z Function plate 1-R1-4 Individual spacer 1-R1-4 EH SOL.C SOL. SOL.B Ejector unit acuum switch SOL.C SOL. SOL.B MJ Individual spacer 1-R1-2 Rc 1/8 port acuum port - + - + - + - + - + - + EH 12 70.5 SMC 16.5 35.5 (Pitch) 33 (Pitch) 33 35.5 13-3-31
B B B B B B J3233-17 PRESS. 2.5~7kgf/cm 2 J3233-17 PRESS. 2.5~7kgf/cm 2 EH L H SMC PRESSURE SWITCH acuum pad connection port acuum pad connection port Ejector System Manifold Nozzle Dia./ø1.8, ø2.0 mm Common exhaust EH port Common ejector air supply port Common pilot valve air supply port Common vacuum release air supply port 82 100 62 40 Digital pressure switch Individual spacer 5 3 4 ø5.7 Function plate Mounting hole 32.4 19 Pitch 33 SOL.b SOL.b RESET SET dapter B case Built-in silencer L2 L1 19 31 dapter D Individual spacer SET 4 acuum pressure switch Pressure setting trimmer case Common exhaust Manual override Non-locking push type (SOL.c) () (SOL.b) M5 port Pilot valve exhaust port M5 port acuum release pressure port 74 28 31 Manual override Non-locking push type Ejector unit 28 52 35 41 53 65 84 Exhaust port (Rc 1/2) case (Port exahust) 33 28 17 52 42 80.8 13.5 35.5 31.5 16.5 50 109 M5 port Pilot valve supply pressure port Rc 1/8 port ir supply pressure port 3 1.5 1 4.5 2.5 Release flow rate adjustment needle M5 port acuum release pressure port Rc 1/8 port ir supply pressure port 2-M5 port Common vacuum release pressure port 7.5 7.5 2-Rc 1/2 EH port Common exhaust port 2-M5 port Common pilot supply port 2-Rc 1/8 port Common pillot valve supply pressure port (mm) Symbol Stations 1 L1 52 L2 71 2 85 104 3 118 137 4 151 170 5 184 203 6 217 236 13-3-32
Large Size acuum Module: Ejector System Circuit diagram Z Individual spacer (1-R1-4) Function plate (1-R1-4) EH SOL. SOL.C SOL.B Ejector unit acuum switch SOL.C 70.5 16.5 SMC 12 SOL. SOL.B MJ Individual spacer (1-R1-2) 110.5 105.5 35.5 (Pitch) 33 (Pitch) 33 35.5 EH Rc 1/8 port acuum port 13-3-33
Large Size acuum Module: acuum Pump System Note for model selection Take function plates into consideration. (Refer to page 13-3-37.) alve unit Components acuum switch filter 100 K1 5 M Z E Suction How to Order Combination of vacuum switch valve and release valve Refer to Table (1). Pilot valve Rated oltage Electrical entry Light/Surge voltage suppressor Manual override Combination of vacuum switch/ valve acuum switch electrical entry Unit specifications (pplicable to Series ZSE4) Combination of vacuum valve and release valve Refer to Table (1) in page 13-3-35 for details. Caution When using C, the DC solenoids are operated via a rectifier. Therefore, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other malfunctions. Rated voltage Nil ir operated 5 24 DC 6 12 DC 6 DC S 5 DC R 3 DC D1 100 C ( 50 60 Hz) D2 110 C ( 50 60 Hz) Pilot valve Electrical entry DC: 1 W Nil ir operated Nil (With indicator light: 1.05 W) For 24, 12, 6, 3 DC C L Lead wire length 0.3 m Y DC: 0.45 W LN Without lead wire (pplicable to only DC) (With indicator light: 0.5 W) Plug LO Without connector connector 24 DC and 12 DC are M Lead wire length 0.3 m type applicable to 0.45 W. MN Without lead wire (pplicable to only DC) MO Without connector G Grommet Lead wire length 0.3 m (pplicable to only DC) H type Lead wire length 0.6 m (pplicable to only DC) 100, 110 C (With rectifier) L Lead wire length 0.3 m Plug LO Without connector connector M Lead wire length 0.3 m type MO Without connector Refer to Table (2) on page 13-3-35 for lead wire with connector. Manual override Nil B Digital vacuum switch specifications (D1, D2, D3) acuum switch electrical entry (E) Nil L C CL CN Grommet type Connector type Refer to Table (3) on page 13-3-35 regarding lead wire with connector part no. Combination of vacuum switch/suction filter Nil None D1 ZSE4 + Filter Digital D2 ZSE4B + Filter vacuum switch D3 ZSE4E + Filter E acuum switch ZSE2 + Filter F Filter Non-locking push type Locking slotted type Unit specifications Nil With unit switching function (1) M SI unit only (2) Note 1) This is no longer sold for use in Japan due to the Weight and Measure ct (implemented October, 1999). Note 2) Fixed unit: kpa Symbol Output specifications Lead wire length pplicable switch 25 (L) NPN output Lead wire length 0.6 (3.0) m 26 (L) nalog output Lead wire length 0.6 (3.0) m D1 D2 65 (L) PNP output Lead wire length 0.6 (3.0) m 27 (L) NPN output Lead wire length 0.6 (3.0) m 26 (L) nalog output Lead wire length 0.6 (3.0) m D3 67 (L) PNP output Lead wire length 0.6 (3.0) m Lead wire length 0.6 m Lead wire length 3.0 m Lead wire length 0.6 m Lead wire length 3.0 m W/o lead wire Light/Surge voltage suppressor Nil None With light/surge voltage suppressor Z (Possible only solenoid valve connector type.) S With surge voltage suppressor DC voltage: Be much careful about polarity, because it is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. C voltage: S is not available for C. 13-3-34
Large Size acuum Module: acuum Pump System Table (1) alve Unit/Combination of acuum Switch alve and Release alve alve Unit function alve unit components acuum switch valve acuum Solenoid valve ir operated Solenoid valve Operation acuum acuum Release Symbol switch Double SOL. Double SOL. N.C. Double SOL. Double SOL. stop adsorption release valve (J3130) valve (J3233-17) (J3233-18) (J3133) (J3233-17) (J3233-18) x x x Double SOL. N.C. (J3233-17) (J3133) N.C. (J3133) ir operated J3130 N.O. (J3133) N.C. ir operated N.C. ir operated (J3133) J3130 (J3133) J3130 K1 K2 K3 C1 C2 C3 x Double SOL. Common with C4 vacuum switch (J3233-18) valve : Possible : Possible with limitations (without self-holding function): Not Possible Nil Without valve module Table (2) How to Order alve Plug Connector ssembly DC J10 20 4 N.C. (J3133) Common with vacuum switch valve Common with vacuum switch valve ir operated (J3130) Table (3) acuum Switch Plug Connector ssembly ZS 10 5 Common with vacuum switch valve Z MJ 100 C (with rectifier) 110 C (with rectifier) J10 J10 36 36 1 3 Lead wire length Nil 30 50 0.6 m 3 m 5 m Nil 6 10 15 20 25 30 Lead wire length 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m with lead wire connector separately. Example) 100--CM... 1 pc. ZS-10-5-50... 1 pc. How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass ys separately. Example) 100-K15Z-EC... 1 pc. J10-20-4-6... 2 pc. 13-3-35
acuum Pump System/Combination of vacuum valve and release valve Combination Symbol: K1 Feature: Double solenoid vacuum valve allows for self-holding. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop acuum switching valve SOL.b ON ON ON SOL.c SOL.b SOL.c ON Note When power supply is stopped vacuum switching valve will hold the operation. Combination Symbol: C1 Feature: dsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release acuum valve/ ON Note Be careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Combination Symbol: K2 Feature: Single solenoid valve is provided for vacuum valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop Combination Symbol: K3 Feature: Operation can be controlled by an external pilot valve. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release 3. Operation stop acuum switching valve ON SOL.c Pilot air Pilot air ir operated a SOL.c ON ir operated b acuum switching valve ir operated a ir operated b ON ON Note When power supply is stopped, all operations will be stopped. Note Suitable when solenoid valves can be used or for centralized control using external pilot air. Combination Symbol: C2 Feature: dsorption of workpieces and release of vacuum are switched by an external pilot valve. ir operated a Pilot air How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release Combination Symbol: C3 Feature: dsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by the single solenoid How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release acuum valve/ ir operated a ON acuum valve/ ON Combination Symbol: C4 Note Be careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Note Be careful for blowing off of workpieces or displacement of adsorption position in case of small and/or lightweight workpieces. Feature: dsorption of workpieces and release of vacuum are switched by double solenoid valve. SOL.b Caution When pipe connection is made to one port connection ( port, port) only, use a function plate (1-R3). Refer to page 13-3-37 for further information. How to Operate Pilot valve operation Operation 1. dsorption 2. acuum release acuum valve/ SOL.b ON ON Note When power supply is stopped vacuum valve/vacuum release valve will hold the operation. 13-3-36
Large Size acuum Module: acuum Pump System Function Plate: 1-R3 function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to,, and ports respectively. Without Function Plate (Standard) pplicable system: Ejector system External vacum supply system acuum release air supply port Pilot exhaust port (Release) Pilot valve air supply port acuum supply port Pipe connection With Function Plate/pplicable to External acuum Supply Only When 1-R3 (/ ) is Selected Since compressed air is necessary to operate pilot valve in external vacuum supply system, supply air to port (or port). acuum release air supply port Pilot valve air supply port (W/plug) Pilot exhaust port (Release) acuum supply port Example of circuit diagram acuum switching valve SOL.c SOL.b Example of circuit diagram acuum switching valve SOL.c SOL.b 1-R3 acuum switch acuum switch Z MJ Pipe connection How to Order Function Plate Unit 1 R 3 Piping specifications Symbol / Symbol 3 port Individual / port Common How to order Indicate the model numbers of the vacuum module and the function plate. Example) 100-K15MZ-E... 1 1-R3... 1 Caution Length of assembling screw varies when adding function plate. Prepare mounting screw for assembling unit among parts list posted on the last page of catalog. 13-3-37
alve Unit: 1- Specifications alve unit part no. Components Operating method acuum valve, release valve individual acuum valve, release valve common Operating pressure range Main valve effective area (mm 2 ) Main valve effective area (Cv) Maximum operating frequency Operating temperature range Standard accessory - Bracket B Solenoid alve/specifications 1- acuum switch valve Pilot operated Double solenoid valve J3233-17 Double solenoid valve J3233-18 Solenoid valve J3133 8.2 0.45 ir operated J3130 Solenoid valve J3133 0.25 to 0.6 MPa 5 Hz 5 to 50 C Pilot operated ir operated J3130 ir operated J3130 Solenoid valve J3133 0.96 0.053 Solenoid J3133-, J3233--17, J3233--18 Rated voltage 24, 12, 6, 5, 3 DC, 100, 110 C ( 50 60 Hz) 100, 110 C-L/M plug connector (With rectifier) Electrical entry 3, 5, 6, 12, 24 DC-L/M plug connector, Grommet Light/Surge voltage suppressor vailable, Not available (at grommet) Manual operation Non-locking push type, Locking slotted type pplicable to plug connector; connector assembly with rectifier is attached. Combination of acuum alve and Release alve Combination symbol K1 acuum switch valve Double SOL. (J3233-17) N.C. (J3133) K2 N.C. (J3133) N.C. (J3133) K3 ir operated J3130 ir operated J3130 C1 N.C. (J3133) C2 ir operated J3130 C3 N.C. (J3133) C4 Double SOL. (J3233-18) Weight includes Bracket B. (Solenoid valve: 24 DC, M plug connector type) Weight (kg) 0.245 0.213 0.194 0.187 0.174 0.184 0.214 How to Order Refer to page 13-3-34 for further part no. information. 1 K1 5 M Z Combination of vacuum valve and release valve Pilot valve Manual override With light/surge voltage suppressor Rated voltage Electrical entry 13-3-38
Large Size acuum Module: acuum Pump System acuum Pressure Switch: ZSE2-0R-15 Refer to page 13-3-13 for further specifications. Specifications acuum Switch/Suction Filter Unit: 1-F Refer to page 13-3-18 for further specifications. acuum pressure switch part no. Fluid Setting pressure range Hysteresis Temperature characteristics Operating voltage Output Indicator light Current consumption Max. operating pressure Operating temperature range Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Filter case ZSE2-0R-15 ir 0 to 101 kpa 3% or less ±3% Full span (5 to 40 C) ±5% Full span (0 to 60 C) 12 to 24 DC (Ripple ±10% or less) Open collector 30, 80 m Lights up when ON 17 m or less (when 24 DC is ON) 0.2 MPa 5 to 50 C When using the ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) Operation outside of the max. operating pressure and max. operating temperature range can cause failure. Specifications Unit no. Operating pressure range Suction Operating temperature range filter Filtration efficiency Material acuum switch Standard option Caution 1-F acuum to 0.5 MPa 5 to 50 C 30 µm F Refer to page 13-3-13 regarding vacuum switch. Bracket 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Z MJ Suction Filter: 1-F Specifications Model Operating pressure range Operating temperature range Filtration efficiency Element Weight (with bracket) 1-F acuum to 0.5 MPa 5 to 50 C 30 µm F 0.1 kg Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Refer to page 13-3-20 for further specifications. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. 13-3-39
Construction Components Parts No. q w e r t Note) Description Manifold Release flow rate adjustment needle Function plate Individual spacer Filter case Material luminum Stainless steel PBT PBT Polycarbonate Note Refer to page 13-3-44. Refer to page 13-3-44. Precautions on handling the filter case 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Replacement Parts No. y u i o Description Pilot valve assembly alve body assembly Filter element acuum switch Material F Part No. Refer to (1) below. Refer to (2) below. 1-FZ (30 µm) ZSE2-OR-15- ZSE4-00---105 Table (1) How to Order Pilot alves Components Symbol acuum switch valve Double solenoid Single solenoid K1 valve N.C. (J3233) valve N.C. (J3133) C4 K3 Double solenoid valve N.O. (J3233) ir operated N.C (J3130) Double solenoid valve N.O. (J3233) Model Refer to How to Order below. 1-J3233--17 How to Order Solenoid alves/ir Operated alves ir operated 1 Solenoid valve 1 J3130 J3233 ir operated N.O (J3130) Refer to How to Order below. 1-J3233--18 5 M Z 1-J3130 17 18 Table (2) How to Order alve Body ssembly 1 D K1 5 M Z Combination of vacuum valve and release valve Pilot valve Rated voltage Refer to page 13-3-34 for further symbol specifications. With light/surge voltage suppressor Electrical entry Manual override Pilot valve Rated voltage Electrical entry Manual override With light/surge voltage suppressor Refer to page 13-3-34 for further symbol specifications. 13-3-40
B B B J3233-17 SMC PRESSURE SWITCH RESET SET Complete Unit Circuit diagram acuum release air supply port SOL.b Pilot valve air SOL.c acuum switching valve Manual override Pilot exhaust port supply port acuum supply port Type K1 acuum valve: Double SOL. : Single SOL. (N.C.) 100-K1M-E M5 port (acuum release pressure port) M5 port (Pilot valve supply pressure port) Interface Interface B acuum switch M5 port (Pilot valve exhaust port) Release flow adjustment needle Rc 1/8 port (ir supply pressure port) acuum pad connection port <Components> alve + acuum Switch + Filter Unit Indicator lilght (Red) acuum pressure setting trimmer Light alve unit Large Size acuum Module: acuum Pump System Manual override 2 2 2 2 Slotted holes (Mounting holes) acuum switch 2-ø4.6 (Mounting hole) Filter block 2-ø4.2 (Mounting hole) Spacer Thickness 1.2 Spacer is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. 2 Spacer Z MJ 2 dapter G Bracket Bracket Rc 1/8 port (acuum pad connection port) 100-K1M- D1 D2 D3-10.2 PRESS. 2.5~7kgf/cm 2 SOL.b Digital pressure switch - + - + - + 65 74 (76 for D2, D3 types) 85 SMC 129 Note) 1 Dimensions for mounting bracket 2 Dimensions for mounting spacer Bracket part no.: P3270153 (Standard accessory) Spacer part no. : P3270156 13-3-41
acuum Pump System acuum release air supply port Pilot exhaust port Pilot valve air supply port acuum supply port acuum pad connection port alve Unit Type K1 1-K1M Type K2 1-K2M Circuit diagram SOL.c SOL.b dapter B Manual override (Mounting hole) 2 2 1.2 2 Rc 1/8 port (acuum pad connection port) Circuit diagram SOL.c Manual override Interface Interface B Light dapter C M5 port (acuum release pressure port) M5 port (Pilot valve supply pressure port) M5 port (Pilot valve exhaust port) Release flow adjustment needle alve unit (Mounting holes) Spacer B Rc 1/8 port (ir supply pressure port) 2 2 Bracket B Bracket B Type K3 1-K3M Circuit diagram Pilot air Pilot air Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of solenoid valve etc.) on side mounting of used on surface mounting. Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 ir operated a ir operated b Pilot valve for release valve Manual override Pilot valve for vacuum switching valve Dimensions not indicated are identical to type K2. 13-3-42
acuum Pump System Type C1 1-C1 Circuit diagram Manual override Blanking plate M5 port (acuum release pressure port) M5 port (Pilot valve supply pressure port) Bracket B Type C2 1-C2 Circuit diagram Pilot air ir operated a acuum release air supply port Interface C Interface D M5 port (Pilot valve exhaust port) Release flow adjustment needle Rc 1/8 port (ir supply pressure port) Bracket B Pilot exhaust port Pilot valve air supply port acuum supply port Light alve unit dapter B Manual override (Mounting hole) acuum pad connection port 2 2 Large Size acuum Module: acuum Pump System alve Unit 2 1.2 dapter C (Mounting holes) Spacer B Rc 1/8 port acuum pad connection port) Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of solenoid valve etc.) on side mounting of used on surface mounting. Bracket B part no.: P3270154 (Standard accessory) Spacer B part no.: P3270157 2 Type C3 1-C3 Circuit diagram Type C4 1-C4 Circuit diagram SOL.b Z MJ Manual override Pilot valve Dimensions not indicated are identical to type C1. 13-3-43
Manifold Specifications/acuum Pump System Specifications Max. number of units 6 stations Port Port size Function port port port EH port Rc 1 8 M5 M5 Rc 1 2 External vacuum pump connection ir supply for pilot valve ir supply for release Common exhaust Weight Basic weight for one station is 0.275 kg. dditional weight per one station is 0.12 kg. Note) When using 3 or more stations with 100 manifold, utilize port as suction on both sides. Manifold acuum/ir Supply Manifold Left Right Supply port location Port L (Left side) R (Right side) B (Both sides) acuum supply to port. ir supply to port. Blank plug attached to port. Note) Blank plug is attached on all ports of valve unit. Individual Spacer Part no. 1-R1 Port Function Possible to set the external vacuum pressure individually Possible to set the pilot valve air supply pressure individually Possible to set the release valve supply pressure individually Possible to set the pilot valve exhaust individually Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. Indicate separately the model number of the manifold and the vacuum units, function plates, individual spacers and blank plates to be included. <Manifold base> Z1 Stations 01 1 06 6 06 Port location R Right side L Left side B Both sides iewed from the front side of valve unit, confirm the port location on the right and/or left side. Thread type Nil Rc F G T NPTF Example) Z106-R... 1 pc. (Manifold base only) 100-K15MZ-EC... 5 pcs. (Unit) 1-BM1... 1 pc. (Blank plate) 1-R1-3... 1 pc. (Individual spacer) With reference from valve side, the third station from right side How to Order Manifold <Function plate> 1 R3 1 rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations <Individual spacer> 1 If more than one spacer is required, specify all spacers. Example) ttached to the first and third stations 1-R3-1 1-R3-3 1-R3-2 Fill the number R1 1 rrangement (Right valve station which is looked from valve side is first station.) 1 1 station only 6 6 stations only ll stations If more than one spacer is required, specify all spacers. Example) ttached to the first and third stations 1-R1-1 1-R1-3 13-3-44
Large Size acuum Module: acuum Pump System Manifold/System Circuit Example When not using indivisual air pressure supply When using indivisual air pressure supply acuum module 1 acuum module 2 <System circuit example> : External vacuum pressure port : Pilot valve air supply port : / port : Pilot valve exhaust port EH: Common exhaust port <System circuit example> Individual Spacer R1 : External vacuum pressure port : Pilot valve air supply port : / port : Pilot valve exhaust port EH: Common exhaust port Z MJ Sol.a Sol.c Sol.b acuum switching valve EH EH acuum switch Sol.c Sol.a Sol.b acuum switching valve Sol.c Sol.a Sol.b acuum switching valve acuum switch Individual spacer 1-R1 EH EH acuum switch Sol.c Sol.a Sol.b acuum switching valve acuum switch 13-3-45
B B B B B B J3233-17 J3233-17 L H SMC PRESSURE SWITCH RESET SET acuum Pump System acuum pad connection port acuum pad connection port Manifold Common exhaust EH port Common ejector air supply port Common pilot valve air supply port Common vacuum release air supply port 82 79 62 Individual spacer Function plate 5 40 3 Digital pressure switch 4 ø5.7 Mounting hole 32.4 19 PRESS. 2.5~7kgf/cm 2 SOL.b L2 L1 dapter D PRESS. 2.5~7kgf/cm 2 SOL.b dapter B 19 31 Individual spacer SET 4 acuum pressure switch Pressure setting trimmer 31 28 52 Manual override Non-locking push type (SOL.c) acuum valve () acuum valve (SOL.b) M5 port Pilot valve exhaust port M5 port acuum release pressure port EH 17 33 28 52 42 80.8 13.5 35.5 31.5 16.5 50 109 Pitch 33 74 20 32 44 63 Manual override Non-locking push type 81.5 M5 port Pilot valve supply pressure port Rc 1/8 port ir supply pressure port 3 1.5 1 4.5 2.5 Release flow rate adjustment needle M5 port 2-M5 port acuum release Common vacuum pressure port release pressure port Rc 1/8 port ir supply pressure port 7.5 7.5 2-Rc 1/2 EH port Common exhaust port 2-M5 port Common pilot supply port 2-Rc 1/8 port Common air supply pressure port (mm) Symbol Stations 1 L1 52 L2 71 2 85 104 3 118 137 4 151 170 5 184 203 6 217 236 13-3-46
Large Size acuum Module: acuum Pump System Circuit diagram Individual spacer (1-R1-4) Function plate (1-R3-4) SOL. SOL.B SOL.C EH acuum switch Z acuum switch valve SOL. SOL.C SOL.B acuum switc valve Individual spacer 1-R1-2 MJ Rc 1/8 port acuum port - + - + - + - + - + - + 16.5 70.5 SMC 12 EH Individual spacer 1-R1-1 35.5 (Pitch 33) (Pitch 33) 35.5 13-3-47
Ejector System Mounting Thread Parts List for Unit Combination Manifold Specifications Without Manifold Components alve unit + Ejector unit + acuum switch/filter unit Components Components Components alve unit + Ejector unit Ejector unit + acuum switch/filter unit Ejector unit Mounting Thread Parts List for Unit Combination No. Combination specifications Mounting thread Quantity Standard (without options) M2.5 x 0.45 x 33 6 q With individual spacer M2.5 x 0.45 x 35 6 With function plate M2.5 x 0.45 x 37 6 w e With individual spacer + with function plate Individual, common and port exhaust style for nozzle size 10, 13 Common and port exhaust style for nozzle size 15 Individual exhaust style for nozzle size 15 Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter M2.5 x 0.45 x 40 M2 x 0.4 x 13 M2 x 0.4 x 23 M2 x 0.4 x 48 M2 x 0.4 x 53 M2.5 x 0.45 x 41 6 2 2 2 2 2 r For nozzle size 10, 13, 15 M2.5 x 0.45 x 17 2 For nozzle size 18, 20 M2.5 x 0.45 x 21 2 For nozzle size 10, 13, 15 M2.5 x 0.45 x 66 4 t For nozzle size 18, 20 M2.5 x 0.45 x 70 4 For nozzle size 10, 13, 15 [For ZSE4 spec.] M2.5 x 0.45 x 82 4 For nozzle size 18, 20 [For ZSE4 spec.] M2.5 x 0.45 x 86 4 y u i o!0 For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate [For ZSE4 spec.] [For ZSE4 spec.] [For ZSE4 spec.] [For ZSE4 spec.] For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M2.5 x 0.45 x 35 M2.5 x 0.45 x 39 M2.5 x 0.45 x 5 M2.5 x 0.45 x 8 M3 x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 6 6 6 6 2 2 2 2 4 4 4 4 For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 For nozzle size 18, 20 M3 x 0.35 x 88 4 For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 89 4 For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 6 6 6 6 Precautions Be sure to read before handling. Refer to pages 13-15- 3 to 13-15-4 for Safety Instructions and Common Precautions and refer to page 13-1-5 for Precautions on every series. Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data in 13-1-10 to 13-1-19. 13-3-48
acuum Pump System Mounting Thread Parts List for Unit Combination Manifold Specifications Without Manifold Components alve unit + acuum switch/filter unit Large Size acuum Module: acuum Pump System Z Components Components alve unit acuum switch/filter unit Mounting Thread Parts List for Unit Combination No. Combination specifications Mounting thread Quantity Standard (Without options) M2.5 x 0.45 x 33 6 q With individual spacer M2.5 x 0.45 x 35 6 With function plate M2.5 x 0.45 x 37 6 With individual spacer + with function plate M2.5 x 0.45 x 40 6 e For vacuum switch and adapter M2.5 x 0.45 x 41 2 u!1 Standard (Without options) M2.5 x 0.45 x 49 4 Standard (Without options) [For ZSE4 spec.] M2.5 x 0.45 x 65 4 Standard (Without options) M2.5 x 0.45 x 5 6 With individual spacer M2.5 x 0.45 x 8 6!2 Standard (Without options) M2.5 x 0.45 x 18 6!3 Standard (Without options) M2.5 x 0.45 x 33 2 With function plate M2.5 x 0.45 x 38 2 Standard (Without options) M3 x 0.35 x 54 4!4 With function plate M3 x 0.35 x 59 4 Standard (Without options) [For ZSE4 spec.] M3 x 0.35 x 70 4 With function plate [For ZSE4 spec.] M3 x 0.35 x 75 4!5 Standard (Without options) M3 x 0.35 x 19 6 With function plate M3 x 0.35 x 24 6 MJ 13-3-49