CLEAN ROBOTS CLEAN. Type

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LEN Type Product Lineup LEN ROOTS Suitable for electronics component, food, and medical unit related work in clean room. High sealing structure, dust generation prevention, and improvement of suction efficiency are achieved. oth the high cleanliness degree and high performance are established. lean contribute to automation and labor saving of production systems in clean rooms. 48

oth high cleanliness degree and high performance were achieved. lean single-axis, artesian, and SR were added to the product lineup. lean SR G/X type P.462 The Z-axis spline is covered with bellows made of materials with low dust generation and other sliding parts are sealed completely. Harnesses are also incorporated completely and the inside of the robot is sucked from the rear of the base to prevent dust generation. rm length: 18 mm to 1 mm Suction amount: 3 to 6 Nl/min. leanliness degree: LSS ISO3 (ISO14644-1) Maximum payload: LSS1 (FED-STD-29D) 2 kg YK2XG YK4XG POINT 1 Vertical bellows structure improves the reliability of the clean performance. s a beltless structure is used, no dust generation caused by the belt occurs. Furthermore, as the G type was renewed to a structure, in which the bellows are installed on the Z-axis vertically, the reliability of the clean performance was further improved. Note. Except for YKX to YK1X POINT 3 ompletely beltless structure improves the rigidity. completely beltless structure was achieved using a ZR-axis direct coupling structure. s a speed reducer is coupled to the tip rotation axis, the R-axis tolerable moment of inertia is very high and the high-speed movement is possible even with a heavy workpiece or largely offset workpiece. Note. Except for YKX to YK1X POINT 2 High durability s a beltless structure is used, the robot can be operated without worry about belt elongation and secular change Note. dditionally, the bellows installed on the Z-axis use material with high durability to ensure the durability performance. Note. Except for YKX to YK1X onventional model Vertical axis motor Rotation axis motor Drive by pulley and timing belt Rigidity and accuracy are determined by belt. Secular change, such as belt elongation occurs. G/X type (Including YK18X/YK22X) Rotation axis Hollow motor Vertical axis all screw Vertical axis motor (direct coupling) Rotation axis hollow speed reducer High rigidity and high accuracy No worry about belt elongation and breakage Maintenance free Type Model rm length (mm) Maximum payload (kg) Standard cycle time (sec.) eltless structure Page Micro-mini type Small type Medium type Large type YK18X 18 1.42 P.462 YK22X 22 1.4 P.463 YK2XG 2 4.7 P.464 YK3XG 3 4.7 P.466 YK4XG 4 4.7 P.468 YKX 1.3 - P.472 YKXGL 4.74 P.47 YK6X 6 1.6 - P.47 YK6XGL 6 4.74 P.473 YK7X 7 2.7 - P.476 YK8X 8 2.7 - P.477 YK1X 1 2.6 - P.478 49

LEN Type Product Lineup lean single-axis type P.442 The type are single-axis " series" with clean room specifications. ccording to the applications, an optimal robot can be selected from 14 models from a lightweight and compact model to a large model with a maximum payload of 12 kg. s an air joint for suction is provided as standard equipment, grease with low dust generative characteristics is used, and stainless sheets with an excellent durability are used for the slide table surface, high cleanliness degree is achieved. Stroke: to 2 mm Suction amount: 1 to 9 Nl/min. leanliness degree: LSS1 Note Maximum payload: 12 kg (When installed horizontally) Note. 4L/4LH, L/LH, and 6L are LSS ISO3 (ISO14644-1). 6L L 4L POINT Excellent maintenance ability For 4L to 6L models, removing the screws from the side panel of the slider will allow replacement of the inner roller without detaching the tool. For 8 to 2 models, even when the direct coupling structure is used, the motor or ball screw can be replaced individually. s the table top can be slid horizontally by removing the screws, this ensures easy maintenance work. Model Size (mm) Note Lead (mm) Maximum payload (kg) Maximum speed (mm/sec.) Horizontal Vertical Stroke (mm) Page 12 4. 1.2 72 4L 4L : P.442 W4 H 6 6 2.4 36 to 4 4LH 4LH : P.443 2 6 7.2 12 2 3-1 L L : P.444 W H6 12 1.2 8 to 8 LH LH : P.44 6 9 2.4 4 2 1-1 6L W6 H6 12 12 4 8 to 8 P.446 6 3 8 4 2 12-1 8 W8 H7 12 2 4 72 1 to 8 P.447 6 4 8 36 2 2 4 1 8L W8 H7 1 4 8 6 1 to 1 P.448 16 3 2 3-1 8LH W8 H7 1 6-6 1 to 1 P.449 8-3 2 2 4 1 1 W14 H8 1 4 1 1 to 1 P.4 6 2 2 2 3 4 1 14 W136 H96 1 1 1 to 1 P.41 8 2 2 2 4 8 1 14H W136 H96 1 8 2 1 to 1 P.42 1 3 2 17 W168 H114 2 8 1 1 1 12 3 6 2 to 12 P.43 17L W168 H114 1 1 11 to 2 P.44 2 W22 H117 2 12 2 1 1-4 2 to 12 P.4 Note 1. The size shows approximate maximum cross sectional size.

lean single-axis SS type (TRNSERVO) P.439 The SS type are stepping motor single-axis "TRNSERVO series" with clean room specifications. Use of a newly developed vector control method achieves the function and performance equivalent to the servomotor at a low cost even using the stepping motor. s an air joint for suction is provided as standard equipment, grease with low dust generative characteristics is used and stainless sheets with an excellent durability are used for the slide table surface, the high cleanliness degree is achieved. Stroke: to 8 mm Suction amount: 1 to 8 Nl/min. leanliness degree: LSS1 Maximum payload: 12 kg (When installed horizontally) SS4 SS SSH Model Size (mm) Note 1 Lead (mm) SS4 SS SSH W49 H9 W H6 W H6 Maximum payload (kg) Horizontal Vertical Maximum speed (mm/sec.) 12 2 1 6 6 4 2 3 2 6 4 1 2 4-1 12 6 1 6 6 1 2 3 2 6-1 12 8 2 6 (horizontal) / (vertical) 6 12 4 3 (horizontal) / 2 (vertical) Stroke (mm) Page to 4 P.439 to 8 P.44 to 8 P.441 Note 1. The size shows approximate maximum cross sectional size. lean artesian type P.46 This artesian robot type is applicable to clean rooms. s stainless sheets with excellent durability are used, the opening can be designed to be its minimum level and the area applicable to LSS1 with less suction amount. Furthermore, as the ZR-axis of the SXYx uses a super high speed unit of the SR robot, this achieves great reduction of the cycle time. Suction amount: 6 to 9 Nl/min. leanliness degree: LSS1 Note Maximum payload: 2 kg Maximum speed: 1 mm/sec. Note. User wiring: D-Sub 2-pin connector (Numbers 1 to 24 are already wired and number 2 is frame ground.) Note. User tubing: ф 6-air tube, 3 pcs. SXYx Type Model xis Movement range Maximum speed (mm/sec.) Maximum payload (kg) Page 2 axes SXYx SXYx (ZS12) 3 axes SXYx (ZS6) SXYx (ZRS12) 4 axes SXYx (ZRS6) X 1 to 1 mm 1 Y 1 to 6 mm 1 X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm 1 X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm 1 R 36 12 /sec X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm R 36 12 /sec 2 P.46 3 P.48 P.49 3 P.46 P.461 1

rticulated Y LM1 ompact single-axis TRNSERVO Single-axis LEN ROOTS LEN TYPE single-axis PHSER artesian SR ONTENTS LEN ROOTS SPEIFITION SHEET 436 SINGLE-XIS TRNSERVO SS4 439 SS 44 SSH 441 4L 442 4LH 443 L 444 LH 44 6L 446 8 447 8L 448 8LH 449 1 4 14 41 14H 42 17 43 17L 44 2 4 RTESIN 2 axes SXYx 46 3 axes / ZS SXYx 48 4 axes / ZRS SXYx 46 SR YK18X 462 YK22X 463 YK2XG 464 YK3XG 466 YK4XG 468 YKXGL 47 YKX 472 YK6XGL 473 YK6X 47 YK7X 476 YK8X 477 YK1X 478 YP-X LEN ONTROLLER INFORMTION Single-axis artesian SR Main functions P.48 43

rticulated Y LM1 LEN ROOTS SPEIFITION SHEET lean single-axis TRNSERVO Degree of cleanliness LSS 1 Intake air 1 to 8N /min ompact single-axis TRNSERVO Single-axis Model SS4 SS Lead (mm) Payload Stroke (mm) and maximum speed (mm/sec) (kg) Horizontal Vertical 1 1 2 2 3 3 4 4 6 6 7 7 8 12 2 1 6 6 4 2 3 2 6 4 1 2 4 1 933 833 733 633 12 6 1 6 6 44 38 6 1 2 3 28 2 22 19 2 6 1 933 833 733 633 Detailed info page P.439 P.44 single-axis PHSER SSH 12 6 8 6 6 44 38 2 44 38 12 3 28 2 22 19 4 2 22 19 P.441 artesian SR YP-X LEN ONTROLLER INFORMTION Single-axis artesian SR Degree of cleanliness 4L/4LH/L/LH/6L... ISO LSS 3 (ISO14644-1) Note Models other than those shown above... LSS 1 Note. lass 1 (.1µm) equivalent to FED-STD-29D Intake air 2 to 9N /min Model servo Payload Repeatability Lead Stroke (mm) and maximum speed (mm/sec) motor (kg) (mm) (mm) output (W) Horizontal Vertical 1 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 12 4. 1.2 72 4L / 4LH 3 +/-.2 6 6 2.4 36 2 6 7.2 12 2 3 1 L / LH 3 +/-.2 12 1.2 8 6 9 2.4 4 2 1 1 6L 6 +/-.2 12 12 4 8 6 3 8 4 2 12 1 9 8 7 6 8 1 +/-.2 12 2 4 72 648 4 468 432 36 6 4 8 36 324 27 234 216 18 2 2 4 1 9 8 7 6 6 8L 1 +/-.1 1 4 8 6 1 4 39 36 33 3 16 3 2 22 19 18 16 1 2 3 1 9 8 7 6 6 8LH 1 +/-.1 1 6 6 1 4 39 36 33 3 27 8 3 2 22 19 18 16 1 13 2 2 4 1 9 7 6 1 1 +/-.1 1 4 1 47 37 3 6 2 2 237 187 1 2 3 4 1 9 7 6 14 1 +/-.1 1 1 47 37 3 8 2 2 237 187 1 2 4 8 1 9 7 6 14H 2 +/-.1 1 8 2 47 37 3 1 3 2 237 187 1 17 4 +/-.1 2 8 1 1 8 1 12 3 4 17L 6 +/-.2 1 2 6 +/-.1 2 12 2 1 8 1 4 4 436

rticulated Y LM1 ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR 1 1 11 11 12 12 13 13 14 14 1 1 16 16 17 17 18 18 19 19 2 2 27 24 13 12 4 24 21 12 1 6 3 2 1 12 6 3 2 1 12 6 3 2 1 12 8 7 6 4 3 3 2 8 7 6 4 3 3 2 Detailed info page 4L : P.442 4LH : P.443 L : P.444 LH : P.44 P.446 P.447 P.448 P.449 P.4 P.41 P.42 P.43 1 1 1 1 1 1 1 9 8 8 P.44 P.4 YP-X LEN ONTROLLER INFORMTION Single-axis artesian SR 437

rticulated Y LM1 ompact single-axis TRNSERVO LEN ROOTS SPEIFITION SHEET lean cartesian Degree of cleanliness LSS 1 Intake air 6 to 9N /min perture designed to minimal dimensions by use of stainless steel sheet Installed clean robot dedicated cable duct rm variations Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Note : User cable D-Sub 2 pin connector : 24 conductors,.3 sq (No. 1 through 24 are already connected and No.2 is for grounding) Note : User tube three ϕ6 air tubes Type Model xis Moving range Maximun speed (mm/sec) 2 axes SXYX X 1 to 1mm 1 Y 1 to 6mm 1 X 1 to 1mm 1 SXYX (ZS12) Y 1 to 6mm 1 3 axes Z 1mm 1 X 1 to 1mm 1 SXYX (ZS6) Y 1 to 6mm 1 Z 1mm X 1 to 1mm 1 SXYX (ZRS12) Y 1 to 6mm 1 Z 1mm 1 4 axes R 36 12 /sec X 1 to 1mm 1 SXYX (ZRS6) Y 1 to 6mm 1 Z 1mm R 36 12 /sec lean SR Maximum payload (kg) Detailed info page 2 P.46 3 P.48 P.48 3 P.46 P.46 /G/GL Degree of cleanliness... LSS 1 G/GL... ISO LSS 3 (ISO14644-1) Note Intake air 3 to 6N /min Harness placed completely on inside Note. lass 1 (.1µm) equivalent to FED-STD-29D Special model for clean rooms with moving Y-axis carriage installed upward. T1 T3 ellows cover fitted in axial tip M M M M Single-axis artesian SR Type Tiny type Small type Medium type Large type Passed 2 million stroke durability test R axis tolerable moment of inertia (kgm 2 ) rm length (mm) and XY axis combined maximum speed (m/s) Standard Maximum Model cycle time payload 12 1 18 22 2 3 3 4 6 7 8 9 1 12 (sec) (kg) YK18X 3.3m/s.42 1.1 P.462 YK22X 3.4m/s.4 1.1 P.463 Detailed info page YK2XG 4.m/s.7 4. P.464 YK3XG.6m/s.7 4. P.466 YK4XG 6.1m/s.7 4. P.468 YKXGL.1m/s.74 4. P.47 YKX 4.9m/s.3 1.12 P.472 YK6XGL 4.9m/s.74 4. P.473 YK6X.6m/s.6 1.12 P.47 YK7X 6.7m/s.7 2.32 P.476 YK8X 7.3m/s.7 2.32 P.477 YK1X 8.m/s.6 2.32 P.478 438

SS4 E compliance Origin on the non-motor side is selectable SS4 asic specifications S Model Lead Type rake Direction of air coupler installation Origin position Stroke able length Note 2 12: 12mm S: Straight N: With no brake RJ: Right (Standard) N: Standard Note 1 to 4 1L: 1m 6: 6mm : With brake LJ: Left Z: Non-motor side (mm pitch) 3L: 3m 2: 2mm L: m 1L: 1m Note 1. If changing from the origin position at the time of purchase, the machine reference amount must be reset. For details, refer to the manual. Note 2. The robot cable is flexible and resists bending. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. Motor 42 Step motor Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw ϕ8 (lass 1) Maximum motor torque (N. m).27 all screw lead (mm) 12 6 2 Maximum speed (mm/sec) 6 3 1 Maximum Horizontal 2 4 6 payload (kg) Vertical 1 2 4 Max. pressing force (N) 4 9 1 Stroke (mm) to 4 (mm pitch) Overall length Horizontal Stroke+216 (mm) Vertical Stroke+261 Maximum outside dimension of body cross-section (mm) W49 H9 able length (m) Standard: 1 / Option: 3,, 1 Degree of cleanliness LSS 1 Note 2 Intake air (N /min) Lead 2 3 1 Note 1. Positioning repeatability in one direction. Note 2. Per 1cf (.1μm base), when suction blower is used. SS4 1 2. 8 3. 13 24 4. 12. 2-ϕ6 Suction air joint Mounting direction: RJ (Note 2) 34. (1) 1 49 llowable overhang Note Static loading moment Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg 87 218 292 1kg 274 24 776.kg 47 48 2kg 667 17 12 2kg 133 93 611 1kg 24 24 2kg 687 116 169 2kg 149 12 66 1kg 223 223 3kg 6 76 112 3kg 92 62 16 2kg 17 17 4kg 67 6 84 4kg 63 43 7 2kg 118 118 4kg 869 61 92 4kg 72 48 829 4kg 3 3 6kg 863 4 6 6kg 39 29 789 Lead 2 Lead 2 Note. Distance from center of slider upper surface to conveyor center-of-gravity at a guide service life of 1, km (Service life is calculated for 4mm stroke models). pprox. 2 (able length) 161+/-2: When origin is on motor side (161: When origin is on non-motor side) Effective stroke able securing position (Note 3) 124+/-1 (Note 1) 21 2-ϕ3H7 Depth6 4-M4 x.7 Depth8 9 Mounting direction: LJ 169+/-1 (with brake) (Note 1) 26+/-2 (with brake): When origin is on motor side (26 with brake: When origin is on non-motor side) 176 (with brake) 182. (with brake) 137. 33 (between knocks +/-.2) 131 68 3 162. 27. (with brake) L L+4 (with brake) Lead 2 x -M x.8 Depth8 +.12 ϕ4h7( ) Depth 6 D S2 Robot positioner I/O S2: TS-S2 Note 3 NP: NPN PN: PNP : -Link DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SH Robot positioner I/O attery SH: TS-SH NP: NPN : With battery PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SD 1 Robot driver SD: TS-SD 4 +.2 Depth 6 I/O cable 1: 1m MR Operation method TS-S2 TS-SH TS-SD MY MP (Unit: N. m) MY MP MR 16 19 17 Remote command Pulse train control (: When origin is on motor side) +/-2: When origin is on non-motor side 18+/-1 (Note1) R 2 (ϕ34) 4 1 (Slider top face). 41 2 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Effective stroke 1 1 2 2 3 3 4 Note 1. Stop positions are determined by the mechanical stoppers at both ends. L 266 316 366 416 466 16 66 616 Note 2. Either right or left can be selected for the suction air joint mounting direction. This drawing shows the RJ (standard) direction. 2 3 4 6 7 8 9 Note 3. Secure the cable with a tie-band 1mm or less from unit s end face to prevent the cable from being 3 4 6 7 8 9 1 subjected to excessive loads. Note 4. The cable s minimum bend radius is R3. 1 1 2 2 3 3 4 Note. These are the weights without a brake. The weights are.2kg heavier when equipped with a brake. Weight (kg) Note 1. 1.6 1.7 1.8 2. 2.1 2.2 2.3 TS-S2 u 49 TS-SH u 49 TS-SD u 439

rticulated Y SS High lead: Lead 2 E compliance Origin on the non-motor side is selectable LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SS asic specifications Motor 42 Step motor Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw ϕ12 (lass 1) Maximum motor torque (N. m).27 all screw lead (mm) 2 12 6 Maximum speed (mm/sec) Note 2 1 6 3 Maximum Horizontal 4 6 1 payload (kg) Vertical 1 2 Max. pressing force (N) 27 4 9 Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+23 (mm) Vertical Stroke+27 Maximum outside dimension of body cross-section (mm) W H6 able length (m) Standard: 1 / Option: 3,, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) Lead 2 8 3 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. S Note 1 Direction of air Model Lead Type rake Origin position Stroke able length coupler installation 2: 2mm S: Straight N: With no brake RJ: Right (Standard) N: Standard Note 2 to 8 1L: 1m 12: 12mm : With brake LJ: Left Z: Non-motor side (mm pitch) 3L: 3m 6: 6mm L: m 1L: 1m Note 1. Only the model with a lead of 12mm or 6mm can select specifications with brake. Note 2. If changing from the origin position at the time of purchase, the machine reference amount must be reset. For details, refer to the manual. Note 3. The robot cable is flexible and resists bending. Note 4. See P.498 for DIN rail mounting bracket. Note. Select this selection when using the gateway function. For details, see P.6. SS 1 2. 8 3. 13 24 4. 12. 2-ϕ6 Suction air joint Mounting direction: RJ (Note 2) 36 (17) 24 pprox. 2 (able length) able securing position (Note 3) 6 Mounting direction: LJ Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Either right or left can be selected for suction air joint mounting direction. This drawing shows the RJ (standard) direction. Note 3. Secure the cable with a tie-band 1mm or less from unit s end face to prevent the cable from being subjected to excessive loads. Note 4. The cable s minimum bend radius is R3. Note. These are the weights without a brake. The weights are.2kg heavier when equipped with a brake. Note 6. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. llowable overhang Note Static loading moment Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg 413 139 218 2kg 192 123 372.kg 78 79 4kg 334 67 12 4kg 92 1 26 1kg 286 286 4kg 347 72 139 4kg 19 7 3 1kg 312 312 6kg 33 47 9 6kg 63 31 263 2kg 148 148 4kg 3 78 16 4kg 134 63 496 8kg 332 37 79 6kg 76 3 377 1kg 344 29 62 8kg 47 22 3 Lead 2 Lead 2 Note. Distance from center of slider upper surface to conveyor center-of-gravity at a guide service life of 1, km (Service life is calculated for 6mm stroke models). 178+/-2: When origin is on motor side (178: When origin is on non-motor side) 14+/-1 (Note 1) 34 18+/-1 (with brake) (Note 1) 218+/-2 (with brake): When origin is on motor side (218 with brake: When origin is on non-motor side) 178 (with brake) 138 7 42 141. (with brake) 11. Effective stroke 2-ϕ4H7 Depth6 4-M4 x.7 Depth8 42 (between knocks +/-.2) L L+4 (with brake) x -M6 x 1 Depth8 +.12 ϕ4h7 ( ) Depth 6 126. D 166. (with brake) S2 Robot positioner I/O S2: TS-S2 Note 4 NP: NPN PN: PNP : -Link DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note SH Robot positioner I/O attery SH: TS-SH NP: NPN : With battery PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note (Incremental) SD 1 Robot driver SD: TS-SD +.2 Depth 6 4 I/O cable 1: 1m MR Operation method TS-S2 TS-SH TS-SD MY MP (Unit: N. m) MY MP MR 2 33 3 Remote command Pulse train control (2: When origin is on motor side) 2+/-2: When origin is on non-motor side 2 R (ϕ34) 14+/-1(Note 1) 1 7 (Slider top face) (.) Effective stroke 1 1 2 2 3 3 4 4 6 6 7 7 8 L 28 33 38 43 48 3 8 63 68 73 78 83 88 93 98 13 3 4 6 7 8 9 1 11 12 13 14 1 16 17 18 4 6 7 8 9 1 11 12 13 14 1 16 17 18 19 1 1 2 2 3 3 4 4 Weight (kg) Note 2.1 2.3 2. 2.7 2.8 3. 3.2 3.4 3.6 3.8 4. 4.2 4.4 4.6 4.8. Maximum speed for each stroke (mm/sec) Note 6 Lead 2 1 933 833 733 633 6 6 44 38 3 28 2 22 19 3 34 44 TS-S2 u 49 TS-SH u 49 TS-SD u

SSH High lead: Lead 2 E compliance Origin on the non-motor side is selectable rticulated Y SSH asic specifications S Note 1 Direction of air Model Lead Type rake Origin position Stroke able length coupler installation 2: 2mm S: Straight N: With no brake RJ: Right (Standard) N: Standard Note 2 to 8 1L: 1m 12: 12mm : With brake LJ: Left Z: Non-motor side (mm pitch) 3L: 3m 6: 6mm L: m 1L: 1m Note 1. Only the model with a lead of 12mm or 6mm can select specifications with brake. Note 2. If changing from the origin position at the time of purchase, the machine reference amount must be reset. For details, refer to the manual. Note 3. The robot cable is flexible and resists bending. Note 4. See P.498 for DIN rail mounting bracket. Note. Select this selection when using the gateway function. For details, see P.6. Motor 42 Step motor Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw ϕ12 (lass 1) Maximum motor torque (N. m).47 all screw lead (mm) 2 12 6 Maximum speed Note 2 Horizontal 1 6 3 (mm/sec) Vertical 2 Maximum Horizontal 6 8 12 payload (kg) Vertical 2 4 Max. pressing force (N) 36 6 12 Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+286 (mm) Vertical Stroke+36 Maximum outside dimension of body cross-section (mm) W H6 able length (m) Standard: 1 / Option: 3,, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) Lead 2 8 3 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. SSH 1 2. 8 3. 13 24 4. 12. 2-ϕ6 Suction air joint Mounting direction: RJ (Note 2) 36 (17) pprox. 2 (able length) 24 able securing position (Note 3) 6 Mounting direction: LJ Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Either right or left can be selected for the suction air joint mounting direction. This drawing shows the RJ (standard) direction. Note 3. Secure the cable with a tie-band 1mm or less from unit s end face to prevent the cable from being subjected to excessive loads. Note 4. The cable s minimum bend radius is R3. Note. These are the weights without a brake. The weights are.2kg heavier when equipped with a brake. Note 6. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. llowable overhang Note Static loading moment Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg 99 22 291 2kg 262 23 4 1kg 48 49 4kg 366 19 148 4kg 118 88 39 2kg 224 224 6kg 32 71 14 6kg 71 49 262 2kg 244 24 4kg 118 179 4kg 146 96 449 4kg 113 113 6kg 399 79 118 6kg 8 334 8kg 43 6 88 8kg 34 3 6kg 73 83 136 6kg 11 62 19 8kg 48 61 1 8kg 64 39 413 1kg 442 47 78 1kg 43 26 3 12kg 46 39 64 12kg 28 17 338 Lead 2 Lead 2 Note. Distance from center of slider upper surface to conveyor center-of-gravity at a guide service life of 1, km (Service life is calculated for 6mm stroke models). 223.+/-2: When origin is on motor side (223.: When origin is on non-motor side) 17.+/-1 (Note 1) 43 19.+/-1 (with brake) (Note 1) 243.+/-2 (with brake): When origin is on motor side (243. with brake: When origin is on non-motor side) 214 (with brake) 194 161. (with brake) 141. 9 3 L L+2 (with brake) Effective stroke 2-ϕ4H7 Depth6 4-M x.8 Depth1 43 (between knocks +/-.2) x -M6 x 1 Depth8 +.12 ϕ4h7 ( ) Depth6 166. D 186. (with brake) S2 Robot positioner I/O S2: TS-S2 Note 4 NP: NPN PN: PNP : -Link DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note SH Robot positioner I/O attery SH: TS-SH NP: NPN : With battery PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note (Incremental) SD 1 Robot driver SD: TS-SD I/O cable 1: 1m MR Operation method TS-S2 TS-SH TS-SD MY MP (Unit: N. m) MY MP MR 32 38 34 Remote command Pulse train control (62. When origin is on motor side) 62.+/-2: When origin is on non-motor side 14.+/-1 (Note 1) Effective stroke 1 1 2 2 3 3 4 4 6 6 7 7 8 L 336 386 436 486 36 86 636 686 736 786 836 886 936 986 136 186 3 4 6 7 8 9 1 11 12 13 14 1 16 17 18 4 6 7 8 9 1 11 12 13 14 1 16 17 18 19 1 1 2 2 3 3 4 4 Weight (kg) Note 2.4 2.6 2.8 3. 3.2 3.4 3.6 3.8 4. 4.2 4.4 4. 4.7 4.9.1.3 Lead 2 1 933 833 733 633 Maximum speed (Horizontal) 6 6 44 38 for each stroke (Vertical) 44 38 (mm/sec) Note 6 (Horizontal) 3 28 2 22 19 (Vertical) 2 22 19 +.2 Depth 6 4 2 R (ϕ34) 1 6 (Slider top face) (.) 2 34 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION TS-S2 u 49 TS-SH u 49 TS-SD u 441

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 4L 4L Model servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 8 (lass 1) all screw lead (mm) 12 6 2 Maximum speed (mm/sec) 72 36 12 Maximum Horizontal 4. 6 6 payload (kg) Vertical 1.2 2.4 7.2 Rated thrust (N) 32 64 13 Stroke (mm) to 4 (mm pitch) Overall length Horizontal Stroke+2 (mm) Vertical Stroke+24 Maximum outside dimension of body cross-section (mm) W4 H able length (m) Standard: 3. / Option: 1,, 1 Degree of cleanliness ISO LSS 3 (ISO14644-1) Note 2 Intake air (N /min) Note 3 3 1 Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 4L pprox. 2 (Motor cable length) 9. (3: Screw head) 18 11. (with brakes) (2) 132+/-3 Effective stroke 73+/-3 When origin is on motor side When origin is 81+/-2 (Note 1) 44 ϕ3h7 Depth 7 on non-motor side 22+/-1 (Note 1) 24 4-M4.7 Depth 1 (3) ϕ6 suction air joint 116+/-2 (with brakes) (Note 1) 167+/- 3 (with brakes) 7. 37 2 (9) (9) Grounding terminal (M4) 14 (with brakes) 11 9 12 (with brakes) R 38 3H7 Depth 7 ϕ4h7 Depth 6 () L L+3 (with brakes) ϕ6 suction air joint S 2 -M4.7 Depth 6 Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg 429 87 179 2kg 14 2 368 4.kg 219 32 74 4.kg 46 139 1.2kg 121 122 3kg 11 8 13 3kg 13 22 37 6kg 336 26 62 6kg 27 18 2.4kg 2 4 3kg 171 8 142 3kg 19 23 11 3kg 37 39 6kg 71 27 66 6kg 27 42 7.2kg Lead 2 Lead 2 ERD Lead Direction of air rake designation coupler installation Origin position change Stroke able length Note 1 I/O connector specification 12: 12mm No entry: With no brake LJ: Left (Standard) None: Standard to 4 1L: 1m N1: I/O flat cable 1m (Standard) 6: 6mm K: With brake RJ: Right Z: Non-motor side (mm pitch) 3L: 3.m N2: Twisted-pair cable 2m (pulse train function) 2: 2mm L: m 1L: 1m 1K/3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (1L/3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Effective stroke 1 1 2 2 3 3 4 L 2 3 3 4 4 6 4 6 6 8 8 1 1 1 1 2 2 2 2 3 3 4 1 1 12 12 12 12 12 12 E 1 2 7 S 7 12 17 22 27 32 37 42 Weight (kg) Note 3 1.4 1. 1.7 1.8 2 2.1 2.3 2.4 Maximum speed for each stroke (mm/sec) 72 36 Lead 2 12 Origin on the non-motor side is selectable asic specifications llowable overhang Note Static loading moment Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 3mm stroke models. 4 H7 Depth 6 Lead 2 R E 23. ϕ41 4 23 41.6 (4) 31 1.6 MR MY 4 28 MP (Unit: N. m) MY MP MR 1 19 18 ERD Operation method Pulse train control / Operation using RS-232 communication LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. External view of 4LH is identical to 4L. 442 ERD u 1

4LH 4LH Model servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 8 (lass 1) all screw lead (mm) 12 6 2 Maximum speed (mm/sec) 72 36 12 Maximum Horizontal 4. 6 6 payload (kg) Vertical 1.2 2.4 7.2 Rated thrust (N) 32 64 13 Stroke (mm) to 4 (mm pitch) Overall length Horizontal Stroke+2 (mm) Vertical Stroke+24 Maximum outside dimension of body cross-section (mm) W4 H able length (m) Standard: 3. / Option:, 1 Degree of cleanliness ISO LSS 3 (ISO14644-1) Note 2 Intake air (N /min) Note 3 3 1 Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 4LH Lead Direction of air Origin position rake designation coupler installation change Stroke able length Note 1 12: 12mm No entry: With no brake LJ: Left (Standard) None: Standard to 4 3L: 3.m 6: 6mm K: With brake RJ: Right Z: Non-motor side (mm pitch) L: m 2: 2mm 1L: 1m 3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. pprox. 2 (Motor cable length) 9. (3: Screw head) 18 11. (with brakes) (2) (3) 7. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg 339 9 174 2kg 136 72 29 4.kg 169 37 72 4.kg 44 2 111 1.2kg 118 118 3kg 32 8 133 3kg 11 41 24 6kg 234 27 62 6kg 27 1 127 2.4kg 2 4 3kg 11 9 142 3kg 11 41 8 3kg 38 39 6kg 2 27 66 6kg 28 1 29 7.2kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 3mm stroke models. Lead 2 132+/-3 Effective stroke 73+/-3 When origin is on motor side When origin is 81+/-2 (Note 1) 44 ϕ3h7 Depth 7 on non-motor side 22+/-1 (Note 1) 24 4-M4.7 Depth 1 ϕ6 suction air joint 116+/-2 (with brakes) (Note 1) 167+/- 3 (with brakes) 2 (9) (9) Grounding terminal (M4) 14 (with brakes) 11 9 12 (with brakes) 37 R 38 3H7 Depth 7 ϕ4h7 Depth 6 Effective stroke 1 1 2 2 3 3 4 L 2 3 3 4 4 6 4 6 6 8 8 1 1 1 1 2 2 2 2 3 3 4 1 1 12 12 12 12 12 12 E 1 2 7 S 7 12 17 22 27 32 37 42 Weight (kg) Note 3 1.4 1. 1.7 1.8 2 2.1 2.3 2.4 Maximum speed for each stroke (mm/sec) 72 36 Lead 2 12 Origin on the non-motor side is selectable () L L+3 (with brakes) Lead 2 ϕ6 suction air joint S 2 -M4.7 Depth 6 TSX Positioner Note 2 Driver: Power-supply voltage / LD monitor I/O selection attery TS-X Power capacity No entry: None NP: NPN : With battery 1: 1V/1W or less L: With LD PN: PNP (bsolute) 2: 2V/1W or less : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 (Incremental) SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 Driver Power-supply voltage Driver: Power capacity 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4 H7 Depth 6 Lead 2 R E 23. ϕ41 4 23 41.6 (4) 31 MR MY MP (Unit: N. m) MY MP MR 1 19 18 SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2 Pulse train control 1.6 4 28 LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. External view of 4LH is identical to 4L. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 443

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION L L Model servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 12 (lass 1) all screw lead (mm) 2 12 6 Maximum speed (mm/sec) 1 8 4 Maximum Horizontal 3 9 payload (kg) Vertical - 1.2 2.4 Rated thrust (N) 19 32 64 Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+21. (mm) Vertical Stroke+236. Maximum outside dimension of body cross-section (mm) W H6 L pprox. 2 (Motor cable length) 126+/-3 Effective stroke 7.+/-3 When origin is on motor side When origin is on 72+/-2 (Note 1) ϕ4h7 Depth 7 non-motor side 21.+/-1 (Note 1) 34 4-M4.7 Depth 1 9 Grounding terminal (M4) (3: Screw head) 18 (3) ϕ6 suction air joint 17+/-2 (with brakes) (Note 1) 161+/-3 (with brakes) (2) High lead: Lead 2 Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (1L/3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. able length (m) Standard: 3. / Option: 1,, 1 Degree of cleanliness ISO LSS 3 (ISO14644-1) Note 2 Intake air (N /min) Note 3 8 3 Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 79 114 (with brakes) 2 39. 16. (with brakes) 12. 77 112 (with brakes) R (11) (96) 4 4H7 Depth 7 ϕ4h7 Depth 6 L L+3 (with brakes) ϕ6 suction air joint S 2 4 H7 Depth 6 -M.8 Depth 6 2 E Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg 184 324 74 1kg 679 33 1 3kg 699 14 21 3kg 21 87 6 1.2kg 246 24 2kg 1166 19 46 2kg 364 126 173 kg 1 9 1 kg 123 28 438 2.4kg 11 11 3kg 1194 14 294 3kg 29 72 34 9kg 624 31 89 9kg 14 Lead 2 Lead 2 ERD Lead Direction of air rake designation coupler installation Origin position change Stroke able length Note 2 I/O connector specification 2: 2mm No entry: With no brake LJ: Left (Standard) None: Standard to 8 1L: 1m N1: I/O flat cable 1m (Standard) 12: 12mm K: With brake RJ: Right Z: Non-motor side (mm pitch) 3L: 3.m N2: Twisted-pair cable 2m (pulse train function) 6: 6mm L: m 1L: 1m 1K/3K/K/1K (Flexible cable) Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 6mm stroke models. Effective stroke 1 1 2 2 3 3 4 4 6 6 7 7 8 L 21. 31. 31. 41. 41. 1. 1. 61. 61. 71. 71. 81. 81. 91. 91. 11. 4 4 4 6 6 6 6 8 8 8 8 1 1 1 1 12 1 1 1 1 2 2 2 2 3 3 3 3 4 E 1 2 2 1 1 2 2 1 1 2 2 1 1 2 2 1 S 1 1 2 2 3 3 4 4 6 6 7 7 8 Weight (kg) Note 3 1.7 2. 2.2 2. 2.7 3. 3.2 3.4 3.7 3.9 4.2 4.4 4.7 4.9.1.4 Lead 2 1 9 8 7 Maximum speed for each stroke Note (mm/sec) Origin on the non-motor side is selectable asic specifications llowable overhang Note Static loading moment Speed setting - 9% 8% 7% 8 64 6 48 44 4 32 28 24 22 Speed setting - 8% 7% 6% % R ϕ41 2 23 1. () 38 6 MR 1.7 MY 32 MP (Unit: N. m) MY MP MR 3 34 4 ERD Operation method Pulse train control / Operation using RS-232 communication LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. Note 6. External view of LH is identical to L. 444 ERD u 1

LH LH Model Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 12 (lass 1) all screw lead (mm) 2 12 6 Maximum speed (mm/sec) 1 8 4 Maximum Horizontal 3 9 payload (kg) Vertical - 1.2 2.4 Rated thrust (N) 19 32 64 Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+21. (mm) Vertical Stroke+236. Maximum outside dimension of body cross-section (mm) W H6 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness ISO LSS 3 (ISO14644-1) Note 2 Intake air (N /min) Note 3 8 3 Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. LH 9 Grounding terminal (M4) (3: Screw head) 79 (2) 114 (with brakes) Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg 199 324 64 1kg 62 33 9 3kg 488 14 241 3kg 197 87 432 1.2kg 24 239 2kg 916 19 398 2kg 347 141 8 kg 436 6 12 kg 119 44 3 2.4kg 19 11 3kg 1194 1 294 3kg 29 87 9 9kg 624 31 89 9kg 1 38 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 6mm stroke models. Lead 2 R ϕ6 suction air joint 4H7 Depth 7 17+/-2 (with brakes) (Note 1) 161+/-3 (with brakes) (11) 18 (96) (3) L Lead 2 L+3 (with brakes) ϕ41 2 1. () MR MY MP (Unit: N. m) MY MP MR 3 34 4 SR1-X RX221/222 RX24/34 pprox. 2 (Motor cable length) 126+/-3 Effective stroke 7.+/-3 When origin is on motor side When origin is on 72+/-2 (Note 1) ϕ4h7 Depth 7 non-motor side 21.+/-1 (Note 1) 34 4-M4.7 Depth 1 2 39. 16. (with brakes) 12. 77 112 (with brakes) High lead: Lead 2 Lead Direction of air Origin position rake designation coupler installation change Stroke able length Note 2 2: 2mm No entry: With no brake LJ: Left (Standard) None: Standard to 8 3L: 3.m 12: 12mm K: With brake RJ: Right Z: Non-motor side (mm pitch) L: m 6: 6mm 1L: 1m 3K/K/1K (Flexible cable) 4 ϕ4h7 Depth 6 TSX ϕ6 suction air joint S 2 4 H7 Depth 6 -M.8 Depth 6 2 E Positioner Note 3 Driver: Power-supply voltage / LD monitor I/O selection attery TS-X Power capacity No entry: None NP: NPN : With battery 1: 1V/1W or less L: With LD PN: PNP (bsolute) 2: 2V/1W or less : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SR1-X Effective stroke 1 1 2 2 3 3 4 4 6 6 7 7 8 L 21. 31. 31. 41. 41. 1. 1. 61. 61. 71. 71. 81. 81. 91. 91. 11. 4 4 4 6 6 6 6 8 8 8 8 1 1 1 1 12 1 1 1 1 2 2 2 2 3 3 3 3 4 E 1 2 2 1 1 2 2 1 1 2 2 1 1 2 2 1 S 1 1 2 2 3 3 4 4 6 6 7 7 8 Weight (kg) Note 3 1.7 2. 2.2 2. 2.7 3. 3.2 3.4 3.7 3.9 4.2 4.4 4.7 4.9.1.4 Lead 2 1 9 8 7 Maximum speed for each stroke Note (mm/sec) Origin on the non-motor side is selectable Speed setting - 9% 8% 7% 8 64 6 48 44 4 32 28 24 22 Speed setting - 8% 7% 6% % Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 Driver Power-supply voltage Driver: Power capacity 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment R 23 38 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2 Pulse train control 6 1.7 32 LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. Note 6. External view of LH is identical to L. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 44

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 6L 6L Model servo motor output (W) 6 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 12 (lass 1) all screw lead (mm) 2 12 6 Maximum speed (mm/sec) 1 8 4 Maximum Horizontal 1 12 3 payload (kg) Vertical - 4 8 Rated thrust (N) 1 8 17 Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+247. (mm) Vertical Stroke+282. Maximum outside dimension of body cross-section (mm) W6 H6 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness ISO LSS 3 (ISO14644-1) Note 2 Intake air (N /min) Note 3 8 3 Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 6L 6. (3: Screw head) (3) 133.(with brakes) 18 98. (11) (96) Grounding terminal (M4) Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg 433 192 29 2kg 3 174 36 1kg 33 31 6kg 14 9 14 6kg 83 44 1 2kg 163 164 1kg 11 33 7 1kg 43 18 71 4kg 68 7 3kg 622 12 336 3kg 291 96 317 2kg 169 17 8kg 271 41 121 8kg 87 13 11 4kg 71 73 12kg 214 24 76 12kg 41 126 8kg 21 24 kg 692 73 236 kg 22 4 237 1kg 372 33 19 1kg 7 97 3kg 17 2 3kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 6mm stroke models. Lead 2 pprox. 2 (Motor cable length) 18+/-3 Effective stroke 89.+/-3 When origin is on motor side When origin is on 14+/-2 (Note 1) ϕ4h7 Depth 7 non-motor side 3.+/-1 (Note 1) 34 4-M4.7 Depth 1 26 39. 2 ϕ6 suction air joint 139+/-2(with brakes)(note 1) 193+/-3(with brakes) (2) High lead: Lead 2 Lead Direction of air Origin position rake designation coupler installation change Stroke able length Note 2 2: 2mm No entry: With no brake LJ: Left (Standard) None: Standard to 8 3L: 3.m 12: 12mm K: With brake RJ: Right Z: Non-motor side (mm pitch) L: m 6: 6mm 1L: 1m 3K/K/1K (Flexible cable) Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. 193 (with brakes) 18 16. 141. (with brakes) 4 R 4 4H7 Depth7 ϕ4h7 Depth 6 -M.8 Depth 6 Lead 2 L L+3 (with brakes) TSX ϕ6 suction air joint S 2 2 E Positioner Note 3 Driver: Power-supply voltage / LD monitor I/O selection attery TS-X Power capacity No entry: None NP: NPN : With battery 1: 1V/1W or less L: With LD PN: PNP (bsolute) 2: 2V/1W or less : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SR1-X Effective stroke 1 1 2 2 3 3 4 4 6 6 7 7 8 L 297. 347. 397. 447. 497. 47. 97. 647. 697. 747. 797. 847. 897. 947. 997. 147. 1 1 1 12 12 12 12 14 14 14 14 16 16 16 16 18 1 1 1 1 2 2 2 2 3 3 3 3 4 E 1 2 2 1 1 2 2 1 1 2 2 1 1 2 2 1 S 1 1 2 2 3 3 4 4 6 6 7 7 8 Weight (kg) Note 3 2.6 2.9 3.1 3.4 3.7 4. 4.3 4.6 4.9.2.4.7 6. 6.3 6.6 6.8 Maximum speed for each stroke Note (mm/sec) Origin on the non-motor side is selectable Lead 2 1 9 8 7 Speed setting - 9% 8% 7% 8 68 6 2 48 4 34 3 26 24 Speed setting - 8% 7% 6% 6% Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4 H7 Depth 6 R ϕ41 33 6 23 1. () MR MY MP (Unit: N. m) MY MP MR 3 4 SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control 6 1.7 32 LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 446 SR1-X u 16 TS-X u 49 RDV-X u 4

8 8 Model Lead rake Note 1 Option Stroke able length Note 2 2: 2mm No entry: With no brake Origin None: Standard 1 to 8 3L: 3.m 12: 12mm K: With brake position Z: Nonmotor (mm pitch) L: m 6: 6mm side change 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw (lass 1) all screw lead (mm) 2 12 6 Maximum speed Note 2 (mm/sec) 1 72 36 Maximum Horizontal 12 2 4 payload (kg) Vertical 4 8 Rated thrust (N) 84 141 283 Stroke (mm) 1 to 8 (mm pitch) Overall length Horizontal Stroke+32 (mm) Vertical Stroke+3 Maximum outside dimension of body cross-section (mm) W8 H7 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 8 E 39 6.4 3. 74 1. 2 Note Recommended plate nut: M3 ( 6*t1.6) E: Detail of T-groove High lead: Lead 2 Origin on the non-motor side is selectable Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. pprox. 23 (Motor cable length) 8 64 (etween knocks +/-.2) pprox. 2 (Motor cable length) (.4) 7 Slider upper surface Grounding terminal (M4) ϕ1 ir join (63.4) 6. 6 Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg 24 8 146 kg 121 71 211 1kg 44 442 1kg 131 39 69 1kg 42 24 88 2kg 27 29 12kg 11 31 7 12kg 29 16 66 3kg 13 132 kg 364 92 192 kg 164 78 328 4kg 91 92 1kg 27 43 92 1kg 62 29 18 2kg 237 238 1kg 144 26 41 1kg 26 12 83 4kg 16 96 2kg 112 18 4 2kg 7 4 32 6kg 62 62 1kg 46 47 124 1kg 87 33 33 8kg 34 4 2kg 22 2 4 2kg 18 6 127 3kg 162 11 31 3kg 4kg 168 7 2 4kg Lead 2 Lead 2 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. MR MY MP (Unit: N. m) MY MP MR 7 9 11 SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control 23+/-3: When origin is on motor side (23): When origin is on non-motor side 7 Effective stroke (117): When origin is on motor side 117+/-3: When origin is on non-motor side 117+/-1 (Note 1) 31+/-1 (Note 1) 12+/-1 (With brake) (Note 1) 238+/-3 (With brake): When origin is on motor side (238): When origin is on non-motor side (27) (16) L + 3 (With brake) L 188 (With brake) 13 x 1 -M x.8 Depth1 1 143 178 (With brake) TSX Note 3 Driver: Power-supply voltage / Positioner LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None NP: NPN : With battery 2: 2V/1W or less L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4-M6 x 1. Depth1 2-ϕH7 Depth1 ϕ1h7 Plate thickness 8 Effective stroke 1 2 2 3 3 4 4 6 6 7 7 8 L 47 2 7 62 67 72 77 82 87 92 97 12 17 112 1 1 2 2 3 3 4 4 6 6 7 1 1 1 1 1 1 1 1 1 1 1 1 1 1 8 1 1 12 12 14 14 16 16 18 18 2 2 22 D 28 33 38 43 48 3 8 63 68 73 78 83 88 93 Weight (kg) Note 3 3.6 3.9 4.1 4.4 4.7..3.6.9 6.2 6.4 6.7 7. 7.3 Lead 2 1 9 8 7 6 Maximum speed Note 4 (mm/sec) Speed setting 9% 8% 7% 6% 72 648 4 468 432 36 36 324 27 234 216 18 Speed setting 9% 7% 6% 6% % D (67) R 2 1H7 Plate thickness 8 Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake. The weight of brake-attached models is.3 kg heavier than the models with no brake shown in the table. Note 4. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 447

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 8L 8L Model Lead rake Option Stroke able length Note 1 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Nonmotor (mm pitch) L: m : mm side change 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 6 3 Maximum Horizontal 2 4 payload (kg) Vertical 4 8 16 Rated thrust (N) 84 169 339 Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+32 (mm) Vertical Stroke+36 Maximum outside dimension of body cross-section (mm) W8 H7 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 8L 6.4 3. E 39 1. 74 Note Recommended plate nut: M3 ( 6*t1.6) E: Detail of T-groove 2 pprox. 23 (Motor cable length) 8 64 (etween knocks +/-.2) pprox. 2 (Motor cable length) (.4) 7 (63.4) 6. Grounding terminal (M4) Origin on the non-motor side is selectable Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. ϕ1 ir join Slider upper surface 6 (27) Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg 29 122 179 kg 147 1 22 2kg 2 26 1kg 149 89 1kg 3 32 97 4kg 111 11 1kg 1 33 6 1kg 17 1 39 2kg 3 32 2kg 9 22 41 2kg 4kg 131 133 1kg 21 61 13 1kg 87 41 197 6kg 7 77 2kg 127 2 2kg 1 4 37 8kg 47 49 3kg 9 14 31 3kg kg 113 114 4kg 69 8 18 4kg 1kg 37 38 2kg 26 29 76 2kg 24 9 12 1kg 12 12 3kg 188 16 43 3kg 16kg 9 9 4kg 96 1 28 4kg kg 33 6 18 kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Lead 2 Lead 1 Lead 213+/-3: When origin is on motor side (213): When origin is on non-motor side 7 128+/-1 (Note 1) 163+/-1 (With brake) (Note 1) 248+/-3 (With brake): When origin is on motor side (248): When origin is on non-motor side (16) Lead 2 Lead 1 Lead Effective stroke L + 3 (With brake) L 198 (With brake) 163 x 1 -M x.8 Depth1 1 13 188 (With brake) TSX Note 2 Driver: Power-supply voltage / Positioner LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None NP: NPN : With battery 2: 2V/1W or less L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4-M6 x 1. Depth1 2-ϕH7 Depth1 ϕ1h7 Plate thickness 8 Lead 2 Lead 1 Lead MR MY MP (Unit: N. m) MY MP MR 7 9 11 SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control (112): When origin is on motor side 112+/-3: When origin is on non-motor side 27+/-1 (Note 1) (62) R D 2 Effective stroke 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 Note 1. Stop positions are determined by L 47 2 7 62 67 72 77 82 87 92 97 12 17 112 117 122 127 132 137 the mechanical stoppers at both 1 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 ends. Note 2. Minimum bend radius of motor 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 cable is R. Note 3. Weight of models with no brake. 8 1 1 12 12 14 14 16 16 18 18 2 2 22 22 24 24 26 26 The weight of brake-attached models is.3 kg heavier than the D 28 33 38 43 48 3 8 63 68 73 78 83 88 93 98 13 18 113 118 models with no brake shown in Weight (kg) Note 3 3.9 4.2 4. 4.8.1.4.7 6. 6.4 6.7 7. 7.3 7.6 7.9 8.2 8. 8.8 9.2 9. the table. Lead 2 1 9 8 7 6 6 Note 4. When the stroke is longer than 7mm, resonance of the ball Maximum Speed setting 9% 8% 7% 6% 6% % % screw may occur depending on the operation conditions (critical speed Note 4 Lead 1 6 1 4 39 36 33 3 27 24 speed). In this case, reduce the (mm/sec) speed setting on the program by Lead 3 2 22 19 18 16 1 13 12 referring to the maximum speeds Speed setting 8% 7% 6% 6% % % 4% 4% shown in the table at the left. 1H7 Plate thickness 8 448 SR1-X u 16 TS-X u 49 RDV-X u 4

8LH 8LH Model Lead Option Stroke able length Note 1 2: 2mm Origin None: Standard 1 to 1 3L: 3.m 1: 1mm position Z: Non-motor (mm pitch) L: m : mm change side 1L: 1m 3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 6 3 Maximum payload (kg) Horizontal 3 6 8 Rated thrust (N) 84 169 339 Stroke (mm) 1 to 1 (mm pitch) Overall length (mm) Stroke+389 Maximum outside dimension of body cross-section (mm) W8 H7 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 8LH E 39 6.4 3. 1. 74 Note Recommended plate nut: M3 ( 6*t1.6) E: Detail of T-groove pprox. 23 (Motor cable length) 2 (.4) 7 8 64 ϕ1 ir joint Slider upper surface (63.4) 6. Grounding terminal (M4) (etween knocks +/-.2) 6 (27) Origin on the non-motor side is selectable Lead 2 Lead 1 Lead Horizontal installation (Unit: mm) Wall installation (Unit: mm) 1kg 687 274 2 Lead 2 1kg 163 22 617 2kg 41 12 92 2kg 6 76 32 3kg 338 76 7 3kg 2 27 182 2kg 622 137 111 Lead 1 2kg 74 9 17 4kg 472 7 47 4kg 8 11 196 6kg 37 3 2 6kg 2kg 187 148 127 Lead 2kg 89 14 974 4kg 844 63 4 4kg 1 18 6kg 77 34 29 6kg 8kg 94 2 17 8kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. 24+/-3: When origin is on motor side (24): When origin is on non-motor side 14+/-1 (Note 1) 1 8 (19) L MR MY MP (Unit: N. m) MY MP MR 128 163 143 (144): When origin is on motor side 144+/-3: When origin is on non-motor side 44+/-1 (Note 1) 17 x 1 1 (69) 1 -M x.8 Depth1 16 TSX Note 2 Driver: Power-supply voltage / Positioner LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None NP: NPN : With battery 2: 2V/1W or less L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment ϕ1h7 Plate thickness 8 8-M6 x 1. Depth1 2-ϕH7 Depth1 Effective stroke SR1-X RX221/222 RX24/34 R D 2 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control Effective stroke 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 Note 1. Stop positions are L 39 89 639 689 739 789 839 889 939 989 139 189 1139 1189 1239 1289 1339 1389 1439 1 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 8 8 1 1 12 12 14 14 16 16 18 18 2 2 22 22 24 24 26 D 33 38 43 48 3 8 63 68 73 78 83 88 93 98 13 18 113 118 123 Weight (kg) 4.7..3.6.9 6.2 6.6 6.9 7.2 7. 7.8 8.1 8.4 8.7 9. 9.3 9.7 1. 1.3 Maximum speed Note 3 (mm/sec) Lead 2 1 9 8 7 6 6 4 Speed setting 9% 8% 7% 6% 6% % % 4% Lead 1 6 1 4 39 36 33 3 27 24 21 Lead 3 2 22 19 18 16 1 13 12 1 Speed setting 8% 7% 6% 6% % % 4% 4% 3% 1H7 Plate thickness 8 determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 449

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 1 1 Model Lead rake Option Stroke able length Note 2 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Non-motor (mm pitch) L: m : mm change side Note 1 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 2 Maximum Horizontal 2 4 6 payload (kg) Vertical 4 1 2 Rated thrust (N) 84 169 339 Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+283 (mm) Vertical Stroke+313 Maximum outside dimension of body cross-section (mm) W14 H8 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 1 8 84 47. 17. 14 98 88 68 Origin on the non-motor side is selectable: Lead 2 1 Note 1. If selecting mm lead specifications then the origin point cannot be changed to the non-motor side. Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg 187 3 1 kg 496 41 1826 1kg 2461 2492 1kg 179 247 242 1kg 218 168 12 2kg 1213 1244 2kg 628 16 17 2kg 78 27 497 4kg 8 617 1kg 76 16 164 1kg 23 17 136 4kg 627 68 3kg 42 62 66 2kg 8 29 6 8kg 28 312 4kg 3 38 42 3kg 3 311 1kg 21 242 3kg 96 63 68 1kg 234 17 2716 1kg 213 244 kg 6 2 28 2kg 82 29 126 1kg 119 11 6kg 47 16 17 3kg 31 711 2kg 72 14 Lead 2 Lead 1 Lead 16+/-3: When origin is pprox. 2 (Motor cable length) on motor side (16): When origin is on non-motor side (33) ϕ12 air joint 78 (etween knocks +/-.2) 11+/-1 (With brake) (Note 1) (pprox. 2) 69.8 66. 3 (With brake) 8 Lead 2 Lead 1 Lead Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. 8+/-1 (Note 1) 19+/-3: (With brake) When origin is on motor side (234): When origin is on non-motor side 33 16 7 4 4-M x.8 Depth of screw 12 +.12 2-ϕH7( ) Depth1 Effective stroke L Grounding terminal (The same position on the opposite surface at 2 locations) 16 TSX 2 M x 2 19 (With brake) N-M x.8 Depth of screw 1 Note 3 Driver: Power-supply voltage / Positioner Regenerative unit LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None No entry: None NP: NPN : With battery 2: 2V/1W or less R: With RGT L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SR1-X Driver: Power capacity Usable for E Regenerative unit I/O selection attery : 1W or less No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment Lead 2 Lead 1 Lead MR MY SR1-X Note RX221/222 RX24/34 MP (Unit: N. m) MY MP MR 119 119 1 Operation method Operation using RS- 232 communication TS-X1 Note TS-X2 Note Remote command RDV-X2-RR1 Pulse train control Note. Regenerative unit is required when the models used vertically and with 7mm or larger stroke. (118): When origin is on motor side 118+/-3: When origin is on non-motor side 33+/-1 (Note 1) Effective stroke 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 Note 1. Stop positions are determined by the L 433 483 33 83 633 683 733 783 833 883 933 983 133 183 1133 1183 1233 1283 1333 mechanical stoppers at both ends. 2 1 1 2 1 1 2 1 1 2 1 1 2 1 Note 2. Minimum bend radius of motor cable is M R. 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 Note 3. Weight of models with no brake. The N 4 6 6 6 6 8 8 8 8 1 1 1 1 12 12 12 12 14 14 weight of brake-attached models is.4 Weight (kg) Note 3 4.4.. 6.1 6.7 7.3 7.8 8.4 9. 9.6 1.1 1.7 11.3 11.9 12.4 13. 13.6 14.2 14.7 kg heavier than the models with no brake shown in the table. Maximum speed Note 4 (mm/sec) Lead 2 1 9 9 7 7 6 6 Lead 1 47 47 37 37 3 3 2 Lead 2 237 237 187 187 1 1 12 Speed setting 9% 9% 7% 7% 6% 6% % Note 4. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 4 SR1-X u 16 TS-X u 49 RDV-X u 4

14 14 Model Lead rake Option Stroke able length Note 1 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Nonmotor (mm pitch) L: m : mm change side 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 2 Maximum Horizontal 3 8 payload (kg) Vertical 4 1 2 Rated thrust (N) 84 169 339 Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+28 (mm) Vertical Stroke+31 Maximum outside dimension of body cross-section (mm) W136 H96 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 14 96 9 6 22. 3. 1. Z 136 11 16 72 1.. 8.3 Origin on the non-motor side is selectable Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. Z Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) Lead 2 Lead 1 Lead kg 2127 1384 968 Lead 2 kg 147 968 13 Lead 2 1kg 6 6 1kg 1177 49 42 1kg 387 264 748 2kg 12 12 3kg 1247 242 291 3kg 26 97 633 4kg 1141 88 2kg 112 349 33 Lead 1 2kg 299 18 68 Lead 1 4kg 1216 943 4kg 87 179 21 4kg 127 49 363 8kg 621 482 kg 932 138 182 kg 79 16 296 1kg 3 39 kg 217 2 33 Lead kg 233 13 133 Lead 1kg 74 44 6kg 1477 134 192 6kg 7 13 433 1kg 37 287 8kg 142 16 17 8kg 3 242 2kg 268 28 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. pprox. 2 (Motor cable length) ϕ12 air joint 84 (etween knocks +/-.2) pprox. 2 8. 77. 3 (With brake) 1 1 16+/-3: When origin is on motor side (16): When origin is on non-motor side (33) 8+/-1 7 (Note 1) 4 11+/-1 (With brake) (Note 1) 33 16 19+/-3 (With brake): When origin is on motor side (19): When origin is on non-motor side Grounding terminal (The same position on the opposite surface at 2 location) L 16 1 19 (With brake) TSX Note 2 Driver: Power-supply voltage / Positioner Regenerative unit LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None No entry: None NP: NPN : With battery 2: 2V/1W or less R: With RGT L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 SR1-X Driver: Power capacity Usable for E Regenerative unit I/O selection attery : 1W or less No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment Effective stroke 2-ϕ6H7( +.12 ) Depth 1 4-M6 x 1. Depth of screw 12 M x 2 N-M6 x 1. Depth of screw 1 MR MY MP (Unit: N. m) MY MP MR 232 233 24 SR1-X- Note RX221/222 RX24/34 Operation method Operation using RS- 232 communication TS-X1 Note TS-X2 Note Remote command RDV-X2-RR1 Pulse train control Note. Regenerative unit is required when the models used vertically and with 7mm or larger stroke. (12): When origin is on motor side 12+/-3: When origin is on non-motor side (7) 3+/-1 (Note 1) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Effective stroke 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 Note 1. Stop positions are determined by the L 43 48 3 8 63 68 73 78 83 88 93 98 13 18 113 118 123 128 133 mechanical stoppers at both ends. 2 1 1 2 1 1 2 1 1 2 1 1 2 1 Note 2. Minimum bend radius of motor cable is R. M 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 Note 3. Weight of models with no brake. The weight N 6 8 8 8 8 1 1 1 1 12 12 12 12 14 14 14 14 16 16 of brake-attached models is.4 kg heavier Weight (kg) Note 3 9.2 9.9 1. 11.2 11.7 12.4 13. 13.7 14.3 1. 1. 16.2 16.8 17. 18.1 18.8 19.3 2. 2.6 than the models with no brake shown in the table. Maximum speed Note 4 (mm/sec) Lead 2 1 9 9 7 7 6 6 Lead 1 47 47 37 37 3 3 2 Lead 2 237 237 187 187 1 1 12 Speed setting 9% 9% 7% 7% 6% 6% % Note 4. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. SR1-X u 16 TS-X u 49 RDV-X u 4 41

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 14H 14H Model Lead rake Option Stroke able length Note 2 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Non-motor (mm pitch) L: m : mm change side Note 1 1L: 1m 3K/K/1K (Flexible cable) Note 1. If selecting mm lead specifications then the origin point cannot be changed to the non-motor side. Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. servo motor output (W) 2 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 2 Maximum Horizontal 4 8 1 payload (kg) Vertical 8 2 3 Rated thrust (N) 17 341 683 Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+349 (mm) Vertical Stroke+379 Maximum outside dimension of body cross-section (mm) W136 H96 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 14H 96 9 6 22. 3. 1. Z 136 11 16 72 1.. 8.3 Z Origin on the non-motor side is selectable: Lead 2 1 Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) (Unit: N. m) MY MP MR 1kg 2247 167 98 1kg 987 121 1678 4kg 24 28 293 294 28 2kg 1397 8 28 2kg 497 48 98 6kg 1687 138 4kg 137 44 318 4kg 247 217 98 8kg 1287 133 3kg 1937 83 478 3kg 42 328 1238 1kg 1347 188 kg 1637 364 323 kg 227 12 878 1kg 887 718 Operation method 8kg 1717 242 23 8kg 119 74 678 2kg 67 38 SR1-X1 Note 6kg 2443 311 313 6kg 197 18 138 2kg 747 68 RX221/222 8kg 2193 242 2 8kg 127 3 18 2kg 663 484 RX24/34 Operation using RS- 232 communication 1kg 2 22 213 1kg 8 2 788 3kg 491 396 TS-X11 Note Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. TS-X21 Note Remote command RDV-X21-RR1 Pulse train control Note. Regenerative unit is required when used vertically. Lead 2 Lead 1 Lead Lead 2 Lead 1 Lead pprox. 2 24+/-3: When origin is on motor side (Motor cable length) (24): When origin is on non-motor side (33) 14+/-1 (Note 1) 19 1 ϕ12 air joint 7 84 (etween knocks +/-.2) (pprox. 2) 8. 77. 3 (With brake) 1 1 134+/-1 (With brake) (Note 1) 33 Grounding terminal (The same position on the opposite surface at 2 location) L 179 M x 2 (12) 1 N-M6 x 1. Depth of screw 1 29 (With brake) TSX Note 3 Driver: Power-supply voltage / Positioner Regenerative unit LD monitor I/O selection attery Power capacity TS-X 11: 1V/2W No entry: None No entry: None NP: NPN : With battery 21: 2V/2W R: With RGT L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SR1-X 1 Driver: Power capacity Usable for E Regenerative unit I/O selection attery 1: 2W No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 1 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V 1: 2W or less asic specifications llowable overhang Note Static loading moment Lead 2 Lead 1 Lead Effective stroke 2-ϕ6H7( +.12 ) Depth 1 4-M6 x 1. Depth of screw 12 234+/-3 (With brake): When origin is on motor side (234): When origin is on non-motor side MR MY MP (14): When origin is on motor side 14+/-3: When origin is on non-motor side 4+/-1 (Note 1) Effective stroke 1 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 Note 1. Stop positions are determined by the mechanical stoppers at both ends. L 499 49 99 649 699 749 799 849 899 949 999 149 199 1149 1199 1249 1299 1349 1399 2 1 1 2 1 1 2 1 1 2 1 1 2 1 M 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 N 6 8 8 8 8 1 1 1 1 12 12 12 12 14 14 14 14 16 16 Weight (kg) Note 3 1.7 11.4 12. 12.7 13.2 13.9 14. 1.2 1.8 16. 17. 17.7 18.3 19. 19.6 2.3 2.8 21. 22.1 Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake. The weight of brake-attached models is.4 kg heavier than the models with no brake shown in the table. Lead 2 1 9 9 7 7 6 6 Maximum Lead 1 47 47 37 37 3 3 2 speed Note 4 Lead 2 237 237 187 187 1 1 12 (mm/sec) Speed setting 9% 9% 7% 7% 6% 6% % Note 4. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 42 SR1-X u 16 TS-X u 49 RDV-X u 4

17 17 Model Lead rake Option Stroke 2: 2mm No entry: With no brake Origin None: Standard 2 to 12 1: 1mm K: With brake position Z: Non-motor (mm pitch) change side servo motor output (W) 4 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 6 Maximum Horizontal 8 12 payload (kg) Vertical 1 3 Rated thrust (N) 339 678 Stroke (mm) 2 to 12 (mm pitch) Overall length Horizontal Stroke+39 (mm) Vertical Stroke+42 Maximum outside dimension of body cross-section (mm) W168 H114 able length (m) Standard: 3. / OP:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 17 114 113 1 1. Z 3.7 2. 168 1 141 14. 8.6 28 2 Origin on the non-motor side is selectable Z 9 92 18 3 (With brake) N-M8 x 1.2 Depth of screw 18 132 able length Note 1 3L: 3.m L: m 1L: 1m 3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 3kg 266 871 14 3kg 117 789 276 kg 3 3 kg 1911 8 61 kg 83 426 188 1kg 2443 2443 8kg 141 33 377 8kg 338 221 138 1kg 1633 1633 6kg 2443 418 8 6kg 2 336 2443 1kg 1728 1728 1kg 2 237 33 1kg 271 1 2 2kg 113 113 12kg 1841 192 268 12kg 27 19 1841 3kg 77 77 Lead 2 Lead 1 Lead 2 Lead 1 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Grounding terminal (The same position on the opposite surface at 2 location) L 243 M x 2 2 273 (With brake) 121 (etween knocks +/-.2) Lead 2 Lead 1 136 22 272.+/-3 (With brake): When origin is on motor side (272.): When origin is on non-motor side MR MY MP (Unit: N. m) MY MP MR 132 134 98 SR1-X2 Note RX221/222 RX24/34 TS-X22 Operation method Operation using RS- 232 communication Note Remote command RDV-X22-RR1 Pulse train control (Horizontal) RDV-X22-RR2 Pulse train control (Vertical) Note. Regenerative unit is required when used perpendicularly and moving at maximum speeds exceeding 1mm/sec. pprox. 2 (Motor cable length) 242.+/-3: When origin is on motor side (242.): When origin is on non-motor side Effective stroke (12.): When origin is on motor side 12.+/-3: When origin is on non-motor side 94 7 (etween knocks +/-.2) (33) 127.+/-1 (Note 1) 4-M6 x 1. Depth of screw 2 37.+/-1 ϕ12 air joint 4-ϕ6H7( +.12 ) Depth 1 (Note 1) 4-M8 x 1.2 Depth of screw 2 (pprox. 2) 17.+/-1 (With brake) (Note 1) TSX 22 Note 2 Driver: Power-supply voltage / I/O selection attery Positioner Regenerative unit LD monitor Power capacity NP: NPN : With battery TS-X 22: 2V/4 to 6W No entry: None No entry: None PN: PNP (bsolute) R: With RGT L: With LD : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 (Incremental) SR1-X 2 Driver: Power capacity Usable for E Regenerative unit I/O selection attery 2: 4 to 6W No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 2 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V 2: 4W or less RR1 (Horizontal) RR2 (Vertical) asic specifications llowable overhang Note Static loading moment Effective stroke 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 11 11 12 12 Note 1. Stop positions are determined L 9 64 69 74 79 84 89 94 99 14 19 114 119 124 129 134 139 144 149 14 19 164 by the mechanical stoppers at both ends. 1 1 2 1 1 2 1 1 2 1 1 2 1 1 2 1 Note 2. Minimum bend radius of motor M 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 6 6 cable is R. N 8 8 8 8 1 1 1 1 12 12 12 12 14 14 14 14 16 16 16 16 18 18 Note 3. Weight of models with no brake. Weight (kg) Note 3 1. 16. 17. 17.9 18.9 19.8 2.8 21.7 22.7 23.6 24.6 2. 26. 27.4 28.4 29.3 3.3 31.2 32.2 33.1 34.1 3. The weight of brake-attached Maximum Lead 2 1 8 8 7 7 6 6 models is 1. kg heavier than the models with no brake shown speed Note 4 Lead 1 4 4 3 3 3 3 2 in the table. (mm/sec) Speed setting 8% 8% 7% 7% 6% 6% % Note 4. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. (12) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 43

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 17L Note. 17L uilt-to-order product. ontact us for the delivery period. Model Lead rake Option Stroke able length Note 1 No entry: With no brake Origin None: Standard 11 to 2 3L: 3.m K: With brake position Z: Nonmotor side change (1mm pitch) L: m 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 6 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw (lass 1) all screw lead (mm) Maximum speed Note 2 (mm/sec) 1 Maximum Horizontal payload (kg) Vertical 1 Rated thrust (N) 24 Stroke (mm) 11 to 2 (1 pitch) Overall length Horizontal Stroke+48 (mm) Vertical Stroke+1 Maximum outside dimension of body cross-section (mm) W168 H114 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 18mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 17L 114 113 1 168 1 141 14 3.7 1. 2. Z. 8.6. 2 28 Z Origin on the non-motor side is selectable Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. cceleration / deceleration is different depending the Positioner or or Driver. Note 4. Select this selection when using the gateway function. For details, see P.6. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg 4 2687 3327 1kg 3436 26 4 2kg 12 12 3kg 34 872 929 3kg 1169 79 34 kg 3 3 kg 262 9 714 kg 666 427 262 1kg 279 279 Lead Lead Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. pprox. 2 299+/-7: When origin is on motor side (Motor cable length) (299): When origin is on non-motor side 94 (33) 176.+/-2 (Note 1) ϕ12 air joint (pprox. 2) 9 92 18 3 (With brake) 26.+/-2 (With brake) (Note 1) 329+/-7 (With brake): When origin is on motor side (329): When origin is on non-motor side 136 22 Grounding terminal (The same position on the opposite surface at 2 location) L 299 2 TSX 22 R Note 2 Driver: Power-supply voltage / Positioner Power capacity Regenerative unit LD monitor I/O selection attery Note 3 NP: NPN : With battery TS-X 22: 2V/4 to 6W R: With RGT No entry: None PN: PNP (bsolute) L: With LD : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SR1-X 2 R Driver: Usable for E Regenerative unit I/O selection attery Power capacity Note 3 No entry: Standard R: With RG1 N: NPN : With battery 2: 4 to 6W E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 2 Driver Power-supply voltage Driver: Power capacity Note 3 Regenerative unit 2: 2V 2: 4W or less RR1 (Horizontal) RR2 (Vertical) asic specifications llowable overhang Note Static loading moment Lead Effective stroke 7 (etween knocks +/-.2) 4-M6 x 1. Depth of screw 2 4-ϕ6H7( +.12 ) Depth 1 4-M8 x 1.2 Depth of screw 2 121 (etween knocks +/-.2) M x 2 N-M8 x 1.2 Depth of screw 18 MR MY MP (Unit: N. m) MY MP MR 132 134 98 SR1-X2-R RX221/222 RX24/34 Operation method Operation using RS- 232 communication TS-X22-R Remote command RDV-X22-RR1 (Horizontal) Pulse train control RDV-X22-RR2 (Vertical) (186): When origin is on motor side 186+/-7: When origin is on non-motor side 66.+/-2 (Note 1) 136 92 9 132 329 (With brake) Effective stroke 11 12 13 14 1 16 17 18 19 2 L 163 173 183 193 23 213 223 233 243 23 2 1 2 1 2 1 2 1 2 1 M 6 6 7 7 8 8 9 9 1 N 16 18 18 2 2 22 22 24 24 26 Weight (kg) Note 3 39.1 41.2 43.2 4.2 47.3 49.3 1.3 3.4.4 7.4 Maximum speed Lead 1 9 8 (mm/sec) Note 4 Speed setting 9% 8% Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake. The weight of brake-attached models is 1. kg heavier than the models with no brake shown in the table. Note 4. When the stroke is longer than 18mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 44 SR1-X u 16 TS-X u 49 RDV-X u 4

2 2 Model Lead Note 1 rake Option Stroke 2: 2mm No entry: With no brake Origin None: Standard 2 to 12 1: 1mm K: With brake position Z: Non-motor (mm pitch) change side servo motor output (W) 6 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 Maximum Horizontal 12 payload (kg) Vertical 2 4 Rated thrust (N) 1 12 Stroke (mm) 2 to 12 (mm pitch) Overall length Horizontal Stroke+441 (mm) Vertical Stroke+471 Maximum outside dimension of body cross-section (mm) W22 H117 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 2 117 116 6 3.7 1. 2. Z 22 1 141 14. 8.6. Origin on the non-motor side is selectable Z Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg 262 869 114 kg 1144 798 262 1kg 2711 2711 8kg 2193 28 72 8kg 717 46 2193 2kg 24 24 12kg 1841 339 12kg 466 267 1841 2kg 1647 1647 2kg 2182 2182 3kg 1437 1437 4kg 939 939 Lead 2 able length Note 2 3L: 3.m L: m 1L: 1m 3K/K/1K (Flexible cable) Note 1. Only the model with specifications with brake (vertical specifications) can select a lead of 1mm. Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. cceleration / deceleration is different depending the Positioner or or Driver. Note. Select this selection when using the gateway function. For details, see P.6. 28 2 Lead 2 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. pprox. 2 281+/-3: When origin is on motor side (Motor cable length) (281): When origin is on non-motor side 94 (33) 166+/-1 (Note 1) 7 (+/-.2) ϕ12 air joint (pprox. 2) 98 9 38 3 (With brake) 162 136 196+/-1 (With brake) (Note 1) 22 311+/-3 (With brake): When origin is on motor side (311): When origin is on non-motor side 33 Grounding terminal (The same position on the opposite surface at 2 location) L 281 2 311 (With brake) TSX 22 Note 3 Driver: Power-supply voltage / Positioner Power capacity Regenerative unit LD monitor I/O selection attery Note 4 NP: NPN : With battery TS-X 22: 2V/4 to 6W No entry: None No entry: None PN: PNP (bsolute) R: With RGT L: With LD : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note (Incremental) SR1-X 2 Driver: Usable for E Regenerative unit I/O selection attery Power capacity Note 4 No entry: Standard No entry: None N: NPN : With battery 2: 4 to 6W E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 2 Driver Power-supply voltage Driver: Power capacity Note 4 Regenerative unit 2: 2V 2: 4W or less RR1 (Horizontal) RR2 (Vertical) asic specifications llowable overhang Note Static loading moment M x 2 N-M8 x 1.2 Depth of screw 2 Lead 2 Lead 1 Effective stroke 4-M6 x 1. Depth of screw 2 4-M8 x 1.2 Depth of screw 2 4-ϕ6H7( +.12 ) Depth 1 121 (etween knocks +/-.2) MR MY MP (Unit: N. m) MY MP MR 111 113 968 SR1-X2 Note RX221/222 RX24/34 TS-X22 Operation method Operation using RS- 232 communication Note Remote command RDV-X22-RR1 Pulse train control (Horizontal) RDV-X22-RR2 Pulse train control (Vertical) Note. Regenerative unit is required when used vertically and moving at maximum speeds exceeding 1mm/sec. (16): When origin is on motor side 16+/-3: When origin is on non-motor side 4+/-1 (Note 1) (11) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Effective stroke 2 2 3 3 4 4 6 6 7 7 8 8 9 9 1 1 11 11 12 12 Note 1. Stop positions are determined L 641 691 741 791 841 891 941 991 141 191 1141 1191 1241 1291 1341 1391 1441 1491 141 191 1641 1691 by the mechanical stoppers at both ends. 1 1 2 1 1 2 1 1 2 1 1 2 1 1 2 1 Note 2. Minimum bend radius of motor M 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 6 6 cable is R. N 8 8 8 8 1 1 1 1 12 12 12 12 14 14 14 14 16 16 16 16 18 18 Note 3. Weight of models with no brake. Weight (kg) Note 3 2. 26. 27. 28. 29. 3. 31. 32. 33. 34. 3. 36. 37. 38. 39. 4. 41. 42. 43. 44. 4. 46. The weight of brake-attached models is 2. kg heavier than the models with no brake shown in the table. Maximum speed Note 4 (mm/sec) Lead 2 1 8 8 7 7 6 6 Lead 1 4 4 3 3 3 3 2 Speed setting 8% 8% 7% 7% 6% 6% % Note 4. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. SR1-X u 16 TS-X u 49 RDV-X u 4 4

rticulated Y SXYx lean type able duct 2 axes LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SXYx D RX222 Model able ombination X axis stroke Y axis stroke able length Usable for E Input/Output selection 1 Input/Output selection 2 D: able duct T1 1 to 1cm 1 to 6cm 3L: 3.m RX222 No entry: Standard N: NPN Note 1 No entry: None T3 L: m E: E marking P: PNP N1: OP.DIO24/16 1L: 1m : -Link (NPN) Note 2 DN: DeviceNet TM P1: OP.DIO24/17 P: PROFIUS (PNP) Note 1. NPN cannot be selected if using E marking. EN: Ethernet EN: Ethernet Note 3 Note 2. vailable only for the master. See P.66 for details on Y-Link system. Note 3. Only when or DN or P was selected for I/O select 1 above, EN can be selected in I/O select 2. Y: Y-Link Note 2 asic specifications Maximum payload (kg) X axis Y axis xis construction Note 1 14H 14 servo motor output (W) 2 1 Repeatability Note 2 (mm) +/-.1 +/-.1 Drive system all screw (lass 7) all screw (lass 7) all screw lead Note 3 (Deceleration ratio) (mm) 2 2 Maximum speed Note 4 (mm/sec) 1 1 Moving range (mm) 1 to 1 1 to 6 Robot cable length (m) Standard: 3. Option:, 1 Degree of cleanliness LSS 1 Note Intake air (N /min) 6 Note 6 Note 1. Use caution that the frame machining (installation holes, tap holes) differs from single-axis '. Note 2. Positioning repeatability in one direction. Note 3. Leads not listed in the catalog are also available. ontact us for details. Note 4. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note. Per 1cf (.1μm base), when suction blower is used. Note 6. The necessary intake amount varies depending on the use conditions and environment. SXYx 2 axes T1 Grounding terminal (M4) 2. 2. 216 68 17 Grounding terminal (M4) MX.9 39 ϕ38 1 282+/-3 X stroke 136 82 11 16 M (1) 38 1 M 82 19 X stroke + 34 L (X stroke + 478) 11 Grounding terminal (M4) M x 2 2 (Note 1) X stroke 1 2 3 4 6 7 8 9 1 L 628 728 828 928 128 1128 1228 1328 1428 128 K 2 1 2 1 2 1 2 1 2 1 M 1 1 2 2 3 3 4 4 N 6 8 8 1 1 12 12 14 14 16 K 17+/-3 Y stroke Y stroke + 28 (Y-axis length) 136 77. 8. 2. 13 N-M6 x 1. Depth of screw 1 1 78 117. 78 Y stroke (mm) XY 2 axes 1 2 2 17 3 1 4 13 11 6 9 RX222 4-M6 x 1. Depth of screw 12 2-ϕ6H7( +.12 ) Depth 1 (68) 7 322 Operation method Operation using RS-232 communication 7 2 2 1 84 (etween knocks +/-.2) 11 16 72 Detail of section 77. 8. 78. 11. 116. Note 1. The moving range when returning to origin and the stop position when stopping by mechanical stopper. 212. Y stroke 1 2 3 4 6 Maximum speed for each X axis 1 8 6 stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 46 RX222 u 24

SXYx 2 axes rticulated Y SXYx 2 axes T3 4-M6 x 1. Depth of screw 12 2-ϕ6H7( +.12 ) Depth 1 212. 8. 77. 116. 11. 78. 7 2 2 1 84 (etween knocks +/-.2) 11 16 72 Detail of section 7 322 (68) 78 78 117. Y stroke + 28 (Y-axis length) 2. 13 Y stroke 17+/-3 136 8. 77. N-M6 x 1. Depth of screw 1 1 X stroke (Note 1) Grounding terminal (M4) 282+/-3 136 11 16 82 19 (1) X stroke + 34 82 L (X stroke + 478) 11 K M x 2 2 X stroke 1 2 3 4 6 7 8 9 1 L 628 728 828 928 128 1128 1228 1328 1428 128 K 2 1 2 1 2 1 2 1 2 1 M 1 1 2 2 3 3 4 4 N 6 8 8 1 1 12 12 14 14 16 M M 38 1 1 68 2. ϕ38 17 2. 216 Grounding terminal (M4) 39 MX.94 Grounding terminal (M4) Note 1. The moving range when returning to origin and the stop position when stopping by mechanical stopper. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Y stroke 1 2 3 4 6 Maximum speed for each X axis 1 8 6 stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. RX222 u 24 47

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SXYx 3 axes / ZS lean type able duct Z-axis shaft vertical type SXYx D 1 Model able ombination stroke stroke axis stroke length X axis Y axis ZR Z axis able D: able duct T1 1 to 1cm 1 to 6cm ZS12 3L: 3.m T3 ZS6 L: m 1L: 1m X axis Y axis Z axis: ZS12 xis construction Note 1 14H 14 servo motor output (W) 2 1 6 Z axis: ZS6 Repeatability Note 2 (mm) +/-.1 +/-.1 +/-.2 Drive system all screw (lass 7) all screw (lass 7) all screw (lass 1) all screw lead Note 3 (Deceleration ratio) (mm) 2 2 12 6 Maximum speed Note 4 (mm/sec) 1 1 1 Moving range (mm) 1 to 1 1 to 6 1 Robot cable length (m) Standard: 3. Option:, 1 Degree of cleanliness LSS 1 Note Intake air (N /min) 9 Note 6 Note 1. Use caution that the frame machining (installation holes, tap holes) differs from single-axis '. Note 2. Positioning repeatability in one direction. Note 3. Leads not listed in the catalog are also available. ontact us for details. Note 4. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note. Per 1cf (.1μm base), when suction blower is used. Note 6. The necessary intake amount varies depending on the use conditions and environment. SXYx 3 axes / ZS Grounding terminal (M4) 2. MX.9 68 2. 216 17 ϕ38 T1 Grounding terminal (M4) 39 1 481+/-3 X stroke 136 82 11 16 M (1) 38 1 M 82 19 X stroke + 34 L (X stroke + 478) 11 M x 2 2 (Note 1) Grounding terminal (M4) K 17+/-3 Y stroke Y stroke + 28 (Y-axis length) 136 1 77. 8. 2. 13 78 117. 78 N-M6 x 1. Depth of screw 1 RX34-3 / Number of controllable axes (68) 4 72 7 Safety standard 322 Option (OP.) Y stroke (mm) ZS12 ZS6 1 to 6 3 RX34 RX24S Option (OP.) ϕ6 Operation method Operation using RS-232 communication 2 M8 x 1.2 Depth 1 Detail of section 77. 8. 78. 11. 116. Option (OP.) ϕ12h7( -.18 ) 319 143. 61.+/-2 Z stroke: 1 4 Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S 149 199 119 Option E (OP.E) (62) 78 226. 236. bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications Maximum payload (kg) X stroke 1 2 3 4 6 7 8 9 1 Note 1. The moving range when returning to origin and the stop position when stopping L 628 728 828 928 128 1128 1228 1328 1428 128 by mechanical stopper. K 2 1 2 1 2 1 2 1 2 1 M 1 1 2 2 3 3 4 4 N 6 8 8 1 1 12 12 14 14 16 Y stroke 1 2 3 4 6 Z stroke 1 Maximum speed for each X axis 1 8 6 stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 48 RX34 u 42 RX24S u 32

SXYx 3 axes / ZS rticulated Y SXYx 3 axes / ZS 78 236. 226. (62) 119 149 199 4 Z stroke : 1 61.+/-2 319 143. T3 ϕ6 8. 77. 2 Detail of section ϕ12h7( -.18 ) 116. 11. 78. M8 x 1.2 Depth 1 4 72 7 322 (68) 78 78 117. Ystroke + 28 (Y-axis length) 17+/-3 Y stroke 2. 13 136 8. 77. N-M6 x 1. Depth of screw 1 1 X stroke (Note 1) Grounding terminal (M4) K M x 2 2 11 82 19 (1) X stroke + 34 82 L (X stroke + 478) 11 481+/-3 136 M 16 M 38 1 1 68 39 2. 38 17 2. 216 Grounding terminal (M4) MX.9 Grounding terminal (M4) X stroke 1 2 3 4 6 7 8 9 1 Note 1. The moving range when returning to origin and the stop position when stopping L 628 728 828 928 128 1128 1228 1328 1428 128 by mechanical stopper. K 2 1 2 1 2 1 2 1 2 1 M 1 1 2 2 3 3 4 4 N 6 8 8 1 1 12 12 14 14 16 Y stroke 1 2 3 4 6 Z stroke 1 Maximum speed for each X axis 1 8 6 stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 49

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SXYx lean type able duct ZR-axis integrated type 4 axes / ZRS SXYx D 1 Model able ombination X axis Y axis Z axis able ZR axis stroke stroke stroke length D: able duct T1 1 to 1cm 1 to 6cm ZRS12 3L: 3.m T3 ZRS6 L: m 1L: 1m X axis Y axis Z axis ZRS12 Z axis ZRS6 R axis xis construction Note 1 14H 14 R servo motor output (W) 2 1 6 1 Repeatability Note 2 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.2 +/-. Drive system all screw (lass 7) all screw (lass 7) all screw (lass 1) Harmonic gear all screw lead Note 3 (Deceleration ratio) (mm) 2 2 12 6 (1/) Maximum speed Note 4 (XYZ: mm/sec) (R: /sec) 1 1 1 12 Moving range (XYZ: mm) (R: ) 1 to 1 1 to 6 1 36 Robot cable length (m) Standard: 3. Option:, 1 Degree of cleanliness LSS 1 Note Intake air (N /min) 9 Note 6 Note 1. Use caution that the frame machining (installation holes, tap holes) differs from single-axis '. Note 2. Positioning repeatability in one direction. Note 3. Leads not listed in the catalog are also available. ontact us for details. Note 4. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note. Per 1cf (.1μm base), when suction blower is used. Note 6. The necessary intake amount varies depending on the use conditions and environment. SXYx 4 axes / ZRS Grounding terminal (M4) 2. 68 2. 216 17 38 Grounding terminal (M4) MX.9 39 T1 1 481+/-3 X stroke 136 82 11 16 M (1) 38 1 M 82 19 X stroke + 34 L (X stroke + 478) 11 M x 2 2 (Note 1) Grounding terminal (M4) K 136 77. 8. 1 17+/-3 Y stroke Y stroke + 28 (Y-axis length) 2. 13 78 117. 78 N-M6 x 1. Depth of screw 1 RX34-4 / Number of controllable axes (68) 4 72 7 Safety standard 322 Option (OP.) Y stroke (mm) ZRS12 ZRS6 1 2 3 3 4 6 4 RX34 RX24S Option (OP.) ϕ6 77. 8. 78. 11. 116. Operation method Operation using RS-232 communication 2 Detail of section Option (OP.) ϕ12h7( -.18 ) M8 x 1.2 Depth 1 322 14. 8.+/-2 Z stroke: 1 4 Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S 149 199 119 Option E (OP.E) (62) 78 226. 236. bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications Maximum payload (kg) X stroke 1 2 3 4 6 7 8 9 1 Note 1. The moving range when returning to origin and the stop position when stopping by L 628 728 828 928 128 1128 1228 1328 1428 128 mechanical stopper. K 2 1 2 1 2 1 2 1 2 1 M 1 1 2 2 3 3 4 4 N 6 8 8 1 1 12 12 14 14 16 Y stroke 1 2 3 4 6 Z stroke 1 Maximum speed for each X axis 1 8 6 stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 46 RX34 u 42 RX24S u 32

SXYx 4 axes / ZRS rticulated Y SXYx 4 axes / ZRS 78 236. 226. ϕ6 (62) 119 149 199 2 Detail of section ϕ12h7( -.18 ) M8 x 1.2 Depth 1 4 Z stroke: 1 8.+/-2 322 14. T3 8. 77. 116. 11. 78. 4 72 7 322 (68) 78 78 117. Y stroke + 28 (Y-axis length) 2. 13 Y stroke 17+/-3 136 8. 1 77. N-M6 x 1. Depth of screw 1 X stroke (Note 1) Grounding terminal (M4) K M x 2 2 11 16 82 19 (1) X stroke + 34 82 L (X stroke + 478) 11 481+/-3 136 M M 38 1 1 68 39 2. 38 17 2. 216 Grounding terminal (M4) MX.9 Grounding terminal (M4) X stroke 1 2 3 4 6 7 8 9 1 Note 1. The moving range when returning to origin and the stop position when stopping by L 628 728 828 928 128 1128 1228 1328 1428 128 mechanical stopper. K 2 1 2 1 2 1 2 1 2 1 M 1 1 2 2 3 3 4 4 N 6 8 8 1 1 12 12 14 14 16 Y stroke 1 2 3 4 6 Z stroke 1 Maximum speed for each X axis 1 8 6 stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 461

rticulated Y YK18X rm length 18mm Maximum payload 1kg Note. uilt-to-order product. ontact us for the delivery period. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK18X 1 Model Z axis stroke able length 1: 1mm 3L: 3.m L: m 1L: 1m RX34-4 / Number of controllable axes X axis Y axis Z axis R axis xis rm length (mm) 71 19 1 specifications Rotation angle ( ) +/-12 +/-14 +/-36 servo motor output (W) 3 3 3 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) 3.3.7 17 Maximum payload (kg) 1. Standard cycle time: with.1kg payload Note 2 (sec).42 R-axis tolerable moment of inertia Note 3 (kgm 2 ).1 User wiring (sq wires).1 8 User tubing (Outer diameter) ϕ3 2 Travel limit 1.Soft limit, 2.Mechanical limit (X, Y, Zaxis) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) (Excluding robot cable) Note 4 6. Robot cable weight 1.kg (3.m) 2.1kg (m) 4.2kg (1m) Degree of cleanliness LSS 1 (.1 µm base) Intake air (N /min) 3 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When moving 2mm in vertical direction and 1mm in horizontal direction reciprocally. Note 3. There are limits to acceleration coefficient settings. Note 4. The total robot weight is the sum of the robot body weight and the cable weight. Safety standard Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S RX34 RX24S Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK18X 12:User tool installation area 4-M3 x. Depth6 User tool installation tap D-sub connector for user cables 9 pin (dapted to #1 to 8) over ϕ3h7 -.21 Details of 16 24.3.3 484 223 1+/-2 (Z-axis origin position) R32. 1 Z axis stroke ϕ1h7 +.1 Depth 2 4-M3 x. Depth 6 Rise by mm 64 User tubes 1 (arb fitting ϕ3) User tubes 2 (arb fitting ϕ3) fter returning to origin of Z axis 44 19 71 4 Z-axis flange 1 92 4. 12 4-ϕ7 4 M6 bolts used for installation 74 9 1 (When the arm turns 1) 33 183 11 28 Keep enough space for the maintenance work at the rear of the base. 3 12 14 M3 grounding terminal 3 7 R19 X axis origin point is +/- from the base front surface R3 R71 Power capacity (V) Operation method Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. If the robot enters the inside of R3, the Z-axis flange may be in contact with the base. So, do not perform such motion. 14 12 D-sub connector for user cables 9 pin (dapted to #1 to 8) over internal intake pipe (bulkhead union ϕ8) X, Y, R axis joint section intake pipe (bulkhead union ϕ6) User tubes 2 (bulkhead union ϕ3) User tubes 1 (bulkhead union ϕ3) 133 +/- R18 R19 67 Z-axis flange is in contact with the base in an area 67 inside from the inner limit of this working envelope. So, do not perform any motion in this area. Right-hand side system operation range Left-hand side system operation range 26.3 12 14 R19 R18 R19 R3 3 R71 7 14 12 26.3 Details of R27 (Min. cable bending radius) Do not move the cable. The user tool installation flange center line is offset within +/- relative to the R axis origin point. 4-ϕ9 X-axis and Y-axis origin positions Move counterclockwise in advance from the above position when performing origin return. 462 RX34 u 42 RX24S u 32

YK22X rm length 22mm Maximum payload 1kg Note. uilt-to-order product. ontact us for the delivery period. rticulated Y YK22X 1 X axis Y axis Z axis R axis xis rm length (mm) 111 19 1 specifications Rotation angle ( ) +/-12 +/-14 +/-36 servo motor output (W) 3 3 3 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) 3.4.7 17 Maximum payload (kg) 1. Standard cycle time: with.1kg payload Note 2 (sec).4 R-axis tolerable moment of inertia Note 3 (kgm 2 ).1 User wiring (sq wires).1 8 User tubing (Outer diameter) ϕ3 2 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) (Excluding robot cable) Note 4 6. Robot cable weight Degree of cleanliness Model Z axis stroke able length 1: 1mm 3L: 3.m L: m 1L: 1m RX34-4 / Number of controllable axes 1.kg (3.m) 2.1kg (m) 4.2kg (1m) LSS 1 (.1 µm base) Intake air (N /min) 3 Note 1. This is the value at a constant ambient temperature. Note 2. When reciprocating 1mm in horizontal and 2mm in vertical directions. Note 3. There are limits to acceleration coefficient settings. Note 4. The total robot weight is the sum of the robot body weight and the cable weight. Safety standard Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S RX34 RX24S Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK22X 12:User tool installation area 4-M3 x. Depth6 User tool installation tap 26.3 D-sub connector for user cables 9 pin (dapted to #1 to 8) over R32. 64 User tubes 1 (arb fitting ϕ3) User tubes 2 (arb fitting ϕ3) 484 223 1+/-2 (Z-axis origin position) fter returning to origin of Z axis 1Z axis stroke ϕ3h 7 -.21 Details of 16 24 ϕ1h7 +.1 Depth 2.3.3 4-M3 x. Depth 6 Rise by mm 44 19 111 4 Z-axis flange 1 92 4. 12 4-ϕ7 4 M6 bolts used for installation 74 9 1 (When the arm turns 1) 33 183 28 M3 Keep enough space for the maintenance grounding terminal work at the rear of the base. X axis origin point is 3 +/- from the base front surface 11 12 14 R7 R22 R19 7 Power capacity (V) Operation method Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. If the robot enters the inside of R3, the Z-axis flange may be in contact with the base. So, do not perform such motion. R3 3 14 12 R19 R19 67 Z-axis flange is in contact with the base in an area 67 inside from the inner limit of this working envelope. So, do not perform any motion in this area. Right-hand side system operation range Left-hand side system operation range 12 14 D-sub connector for user cables 9 pin (dapted to #1 to 8) over internal intake pipe (bulkhead union ϕ8) X, Y, R axis joint section intake pipe (bulkhead union ϕ6) User tubes 2 (bulkhead union ϕ3) User tubes 1 (bulkhead union ϕ3) 133 +/- 3 R3 R19 14 7 R22 12 R7 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 26.3 Details of R27 (Min. cable bending radius) Do not move the cable. The user tool installation flange center line is offset within +/- relative to the R axis origin point. 4-ϕ9 X-axis and Y-axis origin positions Move counterclockwise in advance from the above position when performing origin return. RX34 u 42 RX24S u 32 463

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK2XG rm length 2mm Maximum payload 4kg YK2XG 1 S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) 1 1 1 specifications Rotation angle ( ) +/-129 +/-134 +/-36 servo motor output (W) 2 1 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) 4. 1.1 12 Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.7 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 21. Degree of cleanliness ISO LSS 3 (ISO 14644-1) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.67. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YK2XG Width across flats: 1 onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. User tubing 1 (ϕ4 black) Insert the plug provided when not used. 3 62 4-ϕ9 M8 bolt for installation, 4 bolts used User tubing 2 (ϕ4 red) 1 3 13 12 183 (ase size) 6 F 1 1 117 839 Maximum 24 during arm rotation 89 Hollow diameter: ϕ11 ross section - 689 661 614 283 264 234 173 133 12 4.±2 9. (1) 9 1 ϕ9 39 1 39 1 4 4 1 43 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 212 96 Z-axis bellows 7 48 14 6 632±1 Maximum 66 during arm rotation 1 428 6 246 221 22 167 14 Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position 28 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes Machine Harness 4-ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Hollow diameter: ϕ11 93 71 8 12 32 4 M4 ground terminal Safety standard 4-M3. Depth 6 1 31 7.8 7.8 13.4 13.4 View of F Keep enough space for the maintenance work at the rear of the base. Option (OP.) 98 61 32 22. 26 Option (OP.) RX34 RX24S 129 User tubing 2 (ϕ4 red) Option (OP.) 134 R2 R18 46 1 1 ϕ16 h7 -.18 Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Power capacity (V) Operation method ϕ7 184 1 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 User tubing 1 (ϕ4 black) Insert the plug provided when not used. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. ϕ38 42 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. If the robot enters the inside of R4, the Z-axis bellows may be in contact with the base. So, do not perform such motion. 2 Since this port is not used, cover it with the cap supplied with the joint. R4 Z axis tip shape 134 R1 46 Option E (OP.E) 213 63 129 bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications User tool installation range 464 RX34 u 42 RX24S u 32

YK2XG rticulated Y YK2XG Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) 6.±2 99. 1 39 1 39 1 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 212 96 Z-axis bellows D 14 6 6 14 3 62 4-ϕ9 M8 bolt for installation, 4 bolts used 13.4 13.4 1 3 13 12 183 (ase size) View of F R32 (Min. cable bending radius) Do not move the cable. Machine Harness 28 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 4-ϕ11 Hollow diameter: ϕ11 93 71 8 12 32 4 M4 ground terminal 4-M3. Depth 6 1 31 Keep enough space for the maintenance work at the rear of the base. (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 2 7.8 7.8 98 61 32 22. 26 ϕ3 4 129 E ϕ3 h7 -.21 ϕ Detailed drawing D 134 R2 R18 46 184 R4 22.6±.2 134 R1 46 213 63 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. If the robot enters the inside of R4, the Z-axis bellows may be in contact with the base. So, do not 2 perform such motion. Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 4-ϕ4. through-hole Hollow diameter: ϕ11 +.12 ϕ4 H7 through-hole 129 22.6 22.6 7±.2 22.6 22.6 View of E 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 46

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK3XG rm length 3mm Maximum payload 4kg YK3XG 1 S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) 2 1 1 specifications Rotation angle ( ) +/-129 +/-134 +/-36 servo motor output (W) 2 1 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec).6 1.1 12 Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.7 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 22 Degree of cleanliness ISO LSS 3 (ISO 14644-1) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.67. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YK3XG onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. Width across flats: 1 Hollow diameter: ϕ11 ross section - 839 89 689 661 614 283 264 234 173 133 12 4.±2 3 62 4-ϕ9 M8 bolt for installation, 4 bolts used User tubing 2 (ϕ4 red) 1 3 13 12 13.4 13.4 183 (ase size) View of F 6 F 1 2 117 Maximum 19 during arm rotation 9. (1) 39 1 39 1 ϕ9 1 96 212 Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position 7 2 28 4 4 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. 1 43 Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 7 48 R32 (Min. cable bending radius) Do not move the cable. 14 6 1 428 6 Machine Harness 246 221 22 167 14 632±1 Maximum 66 during arm rotation 4-ϕ11 RX34-4 / Number of controllable axes Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal 93 71 8 12 32 4 Safety standard 4-M3. Depth 6 1 31 Keep enough space for the maintenance work at the rear of the base. 7.8 7.8 98 61 32 22. 26 Option (OP.) 129 RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 1 1 R3 ϕ16 h7 -.18 Option (OP.) 134 ϕ7 R144 76 User tubing 2 (ϕ4 red) ϕ38 42 Z axis tip shape Option (OP.) Power capacity (V) Operation method 184 76 134 R1 1 User tubing 1 (ϕ4 black) Insert the plug provided when not used. Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S 276 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 129 User tool installation range Option E (OP.E) Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. Since this port is not used, cover it with the cap supplied with the joint. bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications 466 RX34 u 42 RX24S u 32

YK3XG rticulated Y YK3XG Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 6.±2 99. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) 39 1 39 1 1 D 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 96 3 62 212 14 6 6 1 3 13 12 183 (ase size) 14 4-ϕ9 M8 bolt for installation, 4 bolts used 28 R32 (Min. cable bending radius) Do not move the cable. Machine Harness 4-ϕ11 Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal 93 71 8 12 32 4 4-M3. Depth 6 1 31 7.8 7.8 13.4 13.4 View of F Keep enough space for the maintenance work at the rear of the base. (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 98 61 32 22. 26 2 129 E ϕ R3 ϕ3 4 134 Detailed drawing D R144 76 ϕ3 h7-.21 184 76 134 R1 276 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 129 4-ϕ4. through-hole 22.6 ±.2 +.12 ϕ4 H7 through-hole If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. Hollow diameter: ϕ11 22.6 22.6 7 ±.2 22.6 22.6 View of E 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 467

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK4XG rm length 4mm Maximum payload 4kg YK4XG 1 X axis Y axis Z axis R axis xis rm length (mm) 2 1 1 specifications Rotation angle ( ) +/-129 +/-144 +/-36 servo motor output (W) 2 1 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) 6.1 1.1 12 Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.7 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 22. Degree of cleanliness ISO LSS 3 (ISO 14644-1) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.68. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m YK4XG onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Width across flats: 1 Hollow diameter: ϕ11 ross section - 839 89 689 661 614 283 264 234 173 133 12 4.±2 9. (1) 1 ϕ9 39 1 39 1 F 6 96 212 Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position 7 2 28 4 4 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. 1 1 43 Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 7 2 14 6 6 14 3 62 4-ϕ9 M8 bolt for installation, 4 bolts used 1 3 13 12 13.4 13.4 183 (ase size) View of F 48 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes 117 Maximum 19 during arm rotation Machine Harness 632±1 Maximum 66 during arm rotation 1 428 246 221 22 167 4-ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 93 71 8 12 32 4 M4 ground terminal Safety standard Hollow diameter: ϕ11 4-M3. Depth 6 1 31 Keep enough space for the maintenance work at the rear of the base. Option (OP.) 7.8 7.8 98 61 32 22. 26 Option (OP.) 129 RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 1 1 ϕ16 h7-.18 144 R4 94 ϕ7 Option (OP.) R1 ϕ38 42 184 Power capacity (V) Operation method 144 94 1 R16 129 37 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. Z axis tip shape Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Option E (OP.E) User tool installation range bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. 468 RX34 u 42 RX24S u 32

YK4XG rticulated Y YK4XG Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red).±2 6 99. 39 1 39 1 1 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows D User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 96 212 14 6 6 14 3 62 4-ϕ9 13.4 M8 bolt for installation, 4 bolts used 13.4 1 3 13 12 View of F 183 (ase size) Machine Harness 28 R32 (Min. cable bending radius) Do not move the cable. 4-ϕ11 Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 93 71 8 12 32 4 M4 ground terminal Keep enough space for the maintenance work at the rear of the base. 4-M3. Depth (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 6 1 31 7.8 7.8 98 61 32 22. 26 129 ϕ3 4 144 R4 94 2 E ϕ3 h7-.21 ϕ Detailed drawing D R1 184 144 94 R16 129 4-ϕ4. through-hole 22.6±.2 37 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. Hollow diameter: ϕ11 +.12 ϕ4 H7 through-hole If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. 22.6 22.6 7±.2 22.6 22.6 View of E 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 469

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YKXGL rm length mm Maximum payload 4kg YKXGL 1 S X axis Y axis Z axis R axis xis rm length (mm) 2 2 1 specifications Rotation angle ( ) +/-129 +/-144 +/-36 servo motor output (W) 2 1 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec).1 1.1 12 Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.74 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 2 Degree of cleanliness ISO LSS 3 (ISO 14644-1) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.68. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YKXGL onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Width across flats: 1 Hollow diameter: ϕ11 ross section - 82 822 72 674 627 296 274 247 186 146 133 67.±2 82. (1) 1 ϕ9 39 39 1 1 96 212 14 6 6 14 93 71 8 12 32 4 6 1 31 7.8 7.8 13.4 13.4 4-ϕ9 View of F 3 62 M8 bolt for installation, 4 bolts used 1 3 13 12 183 (ase size) F 6 2 2 117 Maximum 16 during arm rotation 67±1 Maximum 73 during arm rotation 26 221 22 167 Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. M4 ground terminal Z-axis lower end mechanical stopper position 7 2 28 4 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. 4 Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Machine Harness 1 7 43 48 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes 23 441 4-ϕ11 Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Safety standard 4-M3. Depth 98 61 32 22. 26 RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Keep enough space for the maintenance work at the rear of the base. Option (OP.) 129 1 1 Option (OP.) 144 R2 ϕ7 R R1 7 ϕ38 42 ϕ16 h7-.18 Z axis tip shape Power capacity (V) Operation method 184 144 7 1 129 47 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) Option (OP.) User tubing 2 (ϕ4 red) Insert the plug provided when not used. Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. User tool installation range Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. 47 RX34 u 42 RX24S u 32

YKXGL rticulated Y YKXGL Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 78 63.±2 86. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) 1 39 39 1 1 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows D 7 2 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 96 212 4-ϕ9 3 62 M8 bolt for installation, 4 bolts used 1 3 13 12 183 (ase size) Machine Harness 28 R32 (Min. cable bending radius) Do not move the cable. 14 6 6 14 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal Keep enough space for the maintenance work at the rear of the base. 4-ϕ11 Hollow diameter: ϕ11 4-M3. Depth (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 93 71 8 12 32 4 13.4 7.8 7.8 View of F 6 1 31 13.4 98 61 32 22. 26 ϕ3 4 2 E ϕ3h7-.21 ϕ Detailed drawing D 129 144 R2 R R1 7 User tubing 1 (ϕ4 black) 184 7 User tubing 2 (ϕ4 red) Insert the plug provided when not used. Since this port is not used, cover it with the cap supplied with the joint. 129 onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 144 22.6±.2 47 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 Hollow diameter: ϕ11 +.12 ϕ4h7 through-hole If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. 22.6 View of E 22.6 7±.2 22.6 22.6 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 471

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YKX rm length mm Maximum payload 1kg YKX X axis Y axis Z axis R axis xis rm length (mm) 2 2 2 3 specifications Rotation angle ( ) +/-12 +/-142 +/-18 servo motor output (W) 4 2 2 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) 4.9 1.7 876 Maximum payload (kg) 1 Standard cycle time: with 2kg payload (sec).3 R-axis tolerable moment of inertia Note 2 (kgm 2 ).12 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 3: 3mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 31 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YKX Z3mm stroke 876 Z2mm stroke 741 363 22.+/-2 R-axis rotating radius 2 x 2-M4 x.7 Depth 1 (same for opposing side) 3 36 3 2 94 4. 47 User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 2 2 122. D-sub connector for user wiring User tubes 1 (dapted to No.1 to 2) (ϕ6 lack) 7 73 4-ϕ11 166 Use M1 bolt for installation (base dimensions) MX 94 ϕ68 ϕ9 4 2 ϕ18 -.18 M12 x 1.7 Depth 1 R 9 R2 Keep enough space for the maintenance work at the rear of the base. R8 7 11 6 6 16 R27 (Min. cable bending radius) Do not move the cable. 667 61 364 282 91 48 1 4-ф9 M4 grounding terminal User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) Power capacity (V) Operation method 1 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ 12 122 R163 R 142 142 Working envelope R142 147 147 12 R R2 R2 73 69 3 3 36 Note: For details about tubing work, refer to the User s Manual. 122 12 X,Y axis mechanical stopper position D-sub connector for user wiring (dapted to No.1 to 2) Joint (Note) (ϕ12 x 3 pcs.) 472 RX34 u 42 RX24 u 32

R2 YK6XGL rm length 6mm Maximum payload 4kg YK6XGL 1 S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) 3 2 1 specifications Rotation angle ( ) +/-129 +/-144 +/-36 servo motor output (W) 2 1 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) 4.9 1.1 12 Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.74 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 26 Degree of cleanliness ISO LSS 3 (ISO 14644-1) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.68. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YK6XGL onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Width across flats: 1 Hollow diameter: ϕ11 ross section - 82 822 72 674 627 296 274 247 186 146 133 67.±2 82. (1) 1 ϕ9 39 39 1 1 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. 96 212 14 6 6 14 7.8 4-ϕ9 3 62 M8 bolt for installation, 4 bolts used 1 3 13 12 13.4 13.4 183 (ase size) View of F F 6 2 3 117 Maximum 17 during arm rotation 4 Z-axis bellows 4 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Machine Harness 1 7 43 48 Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position 28 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes 67±1 Maximum 74 during arm rotation 23 441 26 221 22 167 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal 4-ϕ11 93 71 8 12 32 4 6 1 31 7.8 98 61 32 22. 26 RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Hollow diameter: ϕ11 Safety standard 4-M3. Depth Keep enough space for the maintenance work at the rear of the base. Option (OP.) 129 User tubing 1 (ϕ4 black) Power capacity (V) Operation method 1 User tubing 2 (ϕ4 red) Insert the plug provided when not used. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. Operation using RS-232 communication Since this port is not used, cover it with the cap supplied with the joint. ϕ16 h7 Option (OP.) R6 1 1 -.18 97 144 R28 ϕ7 Option (OP.) 184 ϕ38 42 Z axis tip shape 144 97 Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S 129 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 Option E (OP.E) Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ The arm may be in contact with the machine harness in an area inside from the inner limit of this working envelope. So, do not operate the arm in this area. User tool installation range bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 473

R2 rticulated Y YK6XGL LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK6XGL Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 63.±2 78 86. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) 1 39 39 1 1 D 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 96 212 2 7.8 4-ϕ9 M8 bolt for installation, 4 bolts used 3 62 13.4 13.4 1 3 13 12 183 (ase size) View of F Machine Harness 28 R32 (Min. cable bending radius) Do not move the cable. 14 6 6 14 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 93 71 8 12 32 4 M4 ground terminal (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Hollow diameter: ϕ11 Keep enough space for the maintenance work at the rear of the base. 4-ϕ11 4-M3. Depth 6 1 31 7.8 98 61 32 22. 26 129 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) User tubing 2 (ϕ4 red) Insert the plug provided when not used. Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. ϕ3 4 Detailed drawing D R6 97 144 R28 184 144 97 22.6±.2 129 Hollow diameter: ϕ11 E ϕ3 h7-.21 +.12 ϕ ϕ4 H7 through-hole The arm may be in contact with the machine harness in an area inside from the inner limit of this working envelope. So, do not operate the arm in this area. 22.6 View of E 22.6 7±.2 22.6 22.6 9 474 RX34 u 42 RX24S u 32

YK6X rm length 6mm Maximum payload 1kg YK6X Model Z axis able stroke length 2: 2mm 3L: 3.m 3: 3mm L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) 3 2 2 3 specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) 4 2 2 1 Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec).6 1.7 876 Maximum payload (kg) 1 Standard cycle time: with 2kg payload (sec).6 R-axis tolerable moment of inertia Note 2 (kgm 2 ).12 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 33 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK6X Z3mm stroke 876 Z2mm stroke 741 363 22.+/-2 R-axis rotating radius 3 36 3 2 94 2 x 2-M4 x.7 Depth 1 (same for opposing side) 4. 47 User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) D-sub connector for user wiring (dapted to No.1 to 2) 4 2 2 3 122. R 9 User tubes 1 (ϕ6 lack) R2 R8 7 73 166 (base dimensions) 7 11 6 6 16 4-ϕ11 Use M1 bolt for installation Power capacity (V) Operation method 1 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. MX 94 667. 6.9 364 Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ 12 122 R24 14 R196 147 14 Working envelope 147 R6 R6 R2 R2 12 122 X,Y axis mechanical stopper position D-sub connector for user wiring (dapted to No.1 to 2) Joint (Note) 282 (ϕ12 x 3 pcs.) M4 grounding terminal ϕ18 -.18 User tubes 1 (ϕ6 lack) R27 (Min. cable ϕ68 bending radius) User tubes 2 (ϕ6 Red) ϕ9 Do not move the User tubes 3 (ϕ6 lue) M12 x 1.7 Depth 1 cable. 12 91 73 69 3 48 3 36 1 4-ф9 Note: For details about tubing work, refer to the User s Manual. Keep enough space for the maintenance work at the rear of the base. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24 u 32 47

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK7X rm length 7mm Maximum payload 2kg YK7X X axis Y axis Z axis R axis xis rm length (mm) 3 3 2 4 specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) 8 4 4 2 Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) 6.7 1.7 6 Maximum payload (kg) 2 Standard cycle time: with 2kg payload (sec).7 R-axis tolerable moment of inertia Note 2 (kgm 2 ).32 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 4: 4mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 7 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK7X 96 Z4mm stroke 76 Z2mm stroke 376 226+/-2 3 4 16 2 R9. 8 ϕ9 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 3 R-axis rotating radius ϕ22 -.21 M12 x 1.7 Depth 1 R76 D-sub connector for user wiring (dapted to No.1 to 2) 126 3 R16 R1 7 8 16 93 147 119. Keep enough space for the maintenance work at the rear of the base. 7 112 7 7 18 4-ϕ14 Use M12 bolt for installation 18 MX 12 683 86 377 279 R27 (Min. cable bending radius) Do not move the cable. 97 4 2 4-ф9 Power capacity (V) Operation method 2 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. 12 123 Joint (Note) (ϕ12 x 2 pcs.) 18 14 M4 grounding terminal Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ R21 14 Working envelope R199 147 R7 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 18 16 14 Joint (Note) (ϕ12) D-sub connector for user wiring (dapted to No.1 to 2) Note: For details about tubing work, refer to the User s Manual. 9 R3 14 R7 147 R3 12 X,Y axis mechanical stopper position 123 (174) 476 RX34 u 42 RX24 u 32

YK8X rm length 8mm Maximum payload 2kg YK8X X axis Y axis Z axis R axis xis rm length (mm) 4 3 2 4 specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) 8 4 4 2 Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) 7.3 1.7 6 Maximum payload (kg) 2 Standard cycle time: with 2kg payload (sec).7 R-axis tolerable moment of inertia Note 2 (kgm 2 ).32 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 4: 4mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 8 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK8X 96 Z4mm stroke 76 Z2mm stroke 376 226+/-2 3 4 16 2 R9. User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 8 3 ϕ9 R-axis rotating radius ϕ22 -.21 M12 x 1.7 Depth 1 R76 D-sub connector for user wiring (dapted to No.1 to 2) 4 126 R16 R1 7 8 16 93 147 119. Keep enough space for the maintenance work at the rear of the base. 7 112 7 7 18 4-ϕ14 Use M12 bolt for installation MX12 18 683 86 377 279 R27 (Min. cable bending radius) Do not move the cable. 97 4 2 4-ф9 Power capacity (V) Operation method 2 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. 12 123 Joint (Note) (ϕ12 x 2 pcs.) Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ 18 14 Joint (Note) (ϕ12) 14 R29 Working envelope R247 147 147 R8 14 R8 R3 R3 X,Y axis mechanical stopper position M4 grounding 9 terminal 12 123 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 18 16 14 D-sub connector for user wiring (dapted to No.1 to 2) Note: For details about tubing work, refer to the User s Manual. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION (174) RX34 u 42 RX24 u 32 477

rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK1X rm length 1mm Maximum payload 2kg YK1X X axis Y axis Z axis R axis xis rm length (mm) 4 2 4 specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) 8 4 4 2 Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) 8. 1.7 6 Maximum payload (kg) 2 Standard cycle time: with 2kg payload (sec).6 R-axis tolerable moment of inertia Note 2 (kgm 2 ).32 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 4: 4mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 9 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment., Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK1X 96 Z4mm stroke 76 Z2mm stroke 376 226+/-2 3 4 16 R9. 2 8 ϕ9 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) D-sub connector for user wiring User tubes 3 (ϕ6 lue) (dapted to No.1 to 2) 4 147 R-axis rotating radius ϕ22 -.21 M12 x 1.7 Depth 1 R76 126 R16 R1 7 16 8 93 119. Keep enough space for the maintenance work at the rear of the base. 7 112 7 7 MX12 671 86 377 18 4-ϕ14 Use M12 bolt for installation 18 Power capacity (V) Operation method 2 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Our robot manuals (installation manuals) can be downloaded from our website at the address below: http://global.yamaha-motor.com/business/robot/ 12 123 R31 14 R3 147 14 147 R1 Working envelope R1 R4 279 User tubes 1 (ϕ6 lack) Joint (Note) User tubes 2 (ϕ6 Red) (ϕ12 x 2 pcs.) User tubes 3 (ϕ6 lue) R27 (Min. cable 18 18 bending radius) 16 14 Do not move the cable. 14 97 M4 grounding 4 terminal 9 2 Joint (Note) D-sub connector for user wiring 4-ф9 (ϕ12) (dapted to No.1 to 2) Note: For details about tubing work, refer to the User s Manual. R4 Maximum working envelope 12 123 (174) 478 RX34 u 42 RX24 u 32

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