EST_CSN_4_E_ EST CE/SEMI/NRTL «PRECISION MACHINERY COMPANY» EBARA PM40U
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1 EST_CSN_4_E_ 0 EST CESEMINRTL : : [ ] «PRECISION MACHINERY COMPANY» PM40U
2 -
3 i
4 ii 3
5 iii N2 N2
6 iv
7 v
8 vi ! 2!
9 vii 3 N2! 4 5!
10 viii 6! !
11 MF SS ix
12 MF x SS
13 xi
14 xii
15 MF SS xiii
16 MF xiv SS
17 YS IS xv
18 YS xvi IS
19 xvii 6 -
20 xviii LCD RS-485 EST EMO ESTN4025E-HW
21 LCD RS-485 EMO ESTN4025E-HW xix EST
22 xx EST : 1 2 3
23 xxi : - : 11-1 ku Tokyo Japan : : Haneda Asahi-cho Ota- : EST «««EN :1996 2: EN :2007»» EN :2006 EN :2005» : 6-2: 6-4: 1: : «Precision Machinery Company» Fujisawa Kanagawa pref Japan : : Honfujisawa «Precision Machinery»
24 xxii i ii iii xvii xx xxi xxii N N EST10N 13 EST25N 14
25 xxiii EST100WN 15 EST200WN 16 EST300WN 17 EST500WN LCD42 LCD42 LCD N LCD
26 xxiv
27 1 1 EST [ ] 2 21 : : : %
28
29 PFPE 32 N : 84 3
30 CB 1 : 321
31 5 EST UERR A AA AAS 73 SEMI 1 2 EST 322 LCD
32 6 332
33 SEMI S2 «OFF» OSHA «OFF»
34 8 343 N
35 EST10N NW40 NW40 : N2 [ ] [ ] * ** D-sub 15 ]*** Rc : " Swagelok : [ : ] Ø BARRIERTA J100ES NOK **** 50 [ EST25N JL04HV-2E22-22PE-B «Japan Aviation Electronics Industry» + D-sub 2560
36 EST100WN EST200WN NW50 NW100 NW [ N2 ] [ ] * ** ]*** Rc : : " Swagelok : [ : Ø BARRIERTA J100ES NOK [ 90 ***** HARTING HARTING K D-sub 15+ D-sub 2560 ] *****
37 EST300WN EST500WN NW100 ISO160 NW [ N2 ] [ ] * ** : : " Swagelok : [ : Ø BARRIERTA J100ES NOK A 40A 135 [ ]*** Rc ***** ] ***** HARTING HARTING K D-sub 15+ D-sub 2560
38 12 [ ]* LCD- ** 30 *** : 84 3 : **** EST1025N ***** EST1025N
39 HF SS ¼ LCD M16 ø 50 NW40 NW40 ¼ LAN Rc 38 LCD Rc 38 SEMINRTL : 13 :
40 HF SS ¼ ø 50 LCD M16 NW40 NW40 ¼ LAN Rc 38 LCD Rc 38 SEMINRTL : :
41 HF SS ¼ ø M16 NW40 LCD LAN NW40 ¼ LCD Rc 38 Rc 38 SEMINRTL : 15 :
42 HF SS ¼ ø 50 M16 NW40 LCD NW40 LAN ¼ LCD Rc 38 Rc 38 SEMINRTL : :
43 HF SS ø 50 ¼ M20 NW100 LCD NW40 LAN ¼ LCD Rc 38 Rc 38 SEMINRTL : 17 :
44 HF ¼ 220 SS ø 50 M20 ISO 160 LCD NW40 LAN ¼ LCD Rc 38 Rc 38 SEMINRTL : :
45 EST200WN EST500WN EST100WN EST300WN EST25N EST10N 31 19
46 20 LCD 1 2 N2 N N2 : EST1025N
47
48 [ ] [ ] 412 SEMI
49 HF SS MF SS : :
50 HF SS MF SS : :
51 HF SS MF SS : :
52 HF SS MF SS : :
53 : a b c 005
54 CaCO3 CaCO
55 %
56 F15-93 SEMI 31 NRTL 434
57 31
58
59 EST10N25N EST100WN-500WN 44
60 34 Hubble EST10N25N A B C D 45 EST10N25N 42 EST100WN-EST500W E 46 R S T R S T EST100WN-EST500WN
61 35 44 [ EST10N EST25N JL04HV-2E22-22PE-B Japan Aviation Electronics Industry Co Ltd JL04V-2E22-22SE-B AWG EST100WN EST200WN EST300WN HAN K HARTING HAN K AWG 10 AWG * 85 95* * ]* EST1025N EST500WN 45 CN-Z CN-Y D SEMI E73 D
62 36 : : Au SEMI E CN-Z D : - - -
63 37 : : Au SEMI E73 4 D : *1 6 CN-Y : + 7 : : : * *2 *2 * * * *1 *2 «:»
64 38 48 CN-Z CN-Y
65 SIGCOM 100 1
66 «EXT IO» «EXT IO» 49 EMO HIROSE DF1B-2EP-25RC HIROSE DF1-PD2428SCB UL1007 AWG#
67 41 5 N2 CB
68 42 6 LCD- 61 LCD- [ ] START STOP LCD- RESET ALARM WARNING BZ OFF ALARM WARNING PRG ENTER [ ] BP RUN MP RUN LOCAL WARNING ALARM 61 LCD-
69 43 62 LCD61 61 LCD- LCD HT N «%» : «LOCAL» «COM» «REMOTE»
70 44 3 «$$$$$$» «$$$$$$»
71 45 : «LOCAL» «COM» «REMOTE» ENTRВ ENTRВ 12- N
72 OC OV OH OH IO CPF UV STA DRE OC OV OH1 OH2 CPF UV STA DRE EMO N N N2
73 47 63 LCD- PRG PRG LCD- SET CONTROL MODE? «COM» : «LOCAL» «REMOTE» SET DIP SW? 64 SET ALARM SP BACK PRES? N2 SET POINT N2 FLOW LOW? N2 : START STOP RESET WARNING ALARM BZ OFF ENTER 63
74 48 3 PRG ENTER N 2 63
75 REMOTE MODE: LCD- LOCAL MODE: COM MODE: RS232C PRG 632 «-» BZOFF
76 N2 - : : : : 20 3 EST10N25N:80 : : : : : 200 «» : 300 : 50 : -20
77 N B N2 * N2 * IF IF 7 8 IF 6 LCD- * 67 C 1 2 N2* N2 3 * DIP SW-A RS232C
78 52 DIP SW-A 2 «2»» N2: «Always» «During operation only» ««During operation only» «15» N2 DIP SW-A 3 DIP SW-A LOCAL 4 REMOTE 4 «[ ]» 3 3 LCD- 10 DIP SW-A REMOTE ««DIP SW-B 4 DIP SW-B 5» N 2 B 4 N2 N2 B 5» N 2 N2
79 53 DIP SW-B 6 B 6 EST «OFF» «ON» DIP SW-B 7 DIP SW-B 8 DIP SW-C 1 DIP SW-C 2 DIP SW-C 3 B 7 B 8 60 N2 C 1 N2 C 2 C 3
80 A1: A2: LCD- A3: A4: A1: A2: A3: A4: A6: A7: A8: A6: A7: A8: B B1: B2: B3: B4: B5: 6 IF 7 : : B6: LCD- N2 : B6: B7: 8 N2 : B5: N2 N2 * B1: B2: B3: B4: N2 N2* 5 B7: B8: B8: LCD- 1 8 LCD- C C1: C1: N2 N2 2 N2 C2: C2: N2 N2 3 N2 C3: C3: C4: C5: C6: C7: C8: C4: C5: C6: C7: C8: * *
81 LCD: START STOP RESET BZ OFF ENTER 63 A 1 B 8 65 [ ] 3
82 56 [ ] 3 LCD 10 [ ]
83 57 66 LCDLCD «LOCAL» «LOCAL»
84 Д Ж 2 N N CB LCD-
85 59 [ ] 5 «WATER FLOW» 5 LCD «DIL N FLOW» LCD3 EST1025N EST300500WN EST100200WN [ ] «LCD3 «PUMP N2 FLOW» : 84» «7 LCD 10 » «RESET» «RESET» «BZOFF» 8 -
86 60 72» 63 « [ ] 4
87 61 [ ] 30 OVERLOAD2 STEP OUT DRIVER ALARM 4 «REMOTE» «LOCAL» 2 «Constant Monitoring» 721 a «START» «MP RUN» «BP RUN» 61 [ ] «START» - «STARTFAIL» b «STOP» 00 «RUN» 722 a
88 62 DIP SW A-8 => 7000 : DIP SW A-8 => : [ ] «START» - «STARTFAIL» b 723 a DIP SW A-8 => 7000 : DIP SW A-8 => : [ ] «START» - «STARTFAIL» b
89
90 64 82 LCD N «OIL LEVEL LOW» 84 «RESET» «RESET»
91 65 10 LCD- 10 «BZOFF»
92
93
94 68 6 * * 82
95
96 BARRIERTA J100ES 2 C NW40 G55 Viton A 3 C C X80L 4 C WF A3-S3 D3810 T TYPE M8 R C121 N2 N2 EST10N EST25N EST100WN EST200WN EST300WN EST500WN C C C C C A A A A A A A A A A
97 71 83 [ ] C [ ] C [ ] C [ ] C [ ] C [ ] C «Ebara» «Ebara» «Ebara»
98 72 «Ebara» 1 «Ebara» 5 «Ebara» «Ebara» «Ebara» 2 «Ebara» RMA- RMA 5 «Ebara» «Ebara» «Ebara»
99 «Ebara» 1 2 N2 3 N
100 «Ebara» 4 5
101 CB 005
102 76 LCD- «WRONG SELECTION» «START» «Local» «Startfail» LCD- «MP start» LCD«Remote» «Alternate» «Alternate» «Momentary» N2 N2 N2 LCD**MEMORY ERROR**
103 CB 005
104 78 WARNING: WATER FLOW LOW ### 90 WARNING: PUMP N2 FLOW LOW ### N2 N2 N2 N2 N2 N2 WARNING: MP MOTOR TEMP HIGH ### WARNING: BP MOTOR TEMP HIGH ### WARNING: MP CASING TEMP HIGH ### WARNING: BP CASING TEMP HIGH ### WARNING: BP OIL LEVEL LOW WARNING: MP OIL LEVEL LOW N2 N2 WARN: BP DRIVER TEMP HIGH ##### WARN: MP DRIVER TEMP HIGH ##### WARN: ## COMMERROR WARNING: PUMP BOX TEMP HIGH
105 CB 005
106 80 ALARM: BP CASING TEMP HHIGH ALARM: MP CASING TEMP HHIGH ALARM: BP MOTOR TEMP HIGH ALARM: MP MOTOR TEMP HIGH ALARM: BP MOTOR OVERLOAD ALARM: MP MOTOR OVERLOAD ALARM: BP MOTOR STEP OUT ALARM: MP MOTOR STEP OUT 30 ALARM: BP DRIVER ALARM: MP DRIVER ALARM: EMERGENCY STOP 30 ALARM: PHASE ERROR ALARM: STARTFAIL ALARMWARNING EXIST CONTINUOUS ALARM OCCURRED!! «TRIP» 5 LCD-
107 81
108 CB 005 ALARM: WATER LEAKAGE ALARM: BACK PRESS HIGH WARNING: EXT TRAP TEMP HIGH ### WARNING: HEATER ERROR WARNING: HEATER WIRE BROKE WARNING:BACK PRESSHIGH ### WARNING:BACK PRESS WIRE BROKE WARNING: BACK PRESS HIGH 00
109 83 Powered by TCPDF wwwtcpdforg
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