CSKR. NEW Clean-Room Actuator. Low dust generation structure High speed (maximum speed 2000[mm/s]) Compact size and high rigidity

Transcription

1 NEW Clean-Room ctuator Low dust generation structure High speed (maximum speed 2000[mm/s]) Compact size and high rigidity CSKR For details, visit THK at Product information is updated regularly on the THK website. CTLOG No.355-2E

2 Structure Model CSKR is the clean-room actuator using the Caged Ball LM Guide ctuator Model SKR. Slider Top cover End cover Sealing sheet Vacuum fittings Intermediate flange Side cover Enlarged view Outer rail Ball screw shaft Inner block Caged Ball Structure of Clean-Room ctuator Model CSKR Features 1. Low dust generation structure With a unique covering mechanism using a sealing sheet, models CSKR20 and 26 have achieved the classification of clean-room level of ISO16-1* 1 class 3* 2 (equivalent to FED209E class 1) and models and 6 have achieved the classification of clean-room level of ISO16-1* 1 class * 2 (equivalent to FED209E class ). 2. High speed Models and 6 are capable of continuous operation* 3 at the maximum speed of 2000[mm/s] under the environment of ISO16-1* 1 class * 2 (equivalent to FED209E class ). 3. Compact size and high rigidity Model CSKR uses a highly rigid U-shaped outer rail. It is a compact clean-room actuator integrating the Caged Ball LM Guide and ball screws. (For models CSKR 20 and 26, only the LM Guide Unit uses Caged-Ball Technology. Lubrication unit QZ is installed in the ball screw unit.) With use of Caged-Ball Technology, excellent high speed, low noise, and longterm maintenance free characteristics are achieved.. High corrosion resistance The outer rail, inner block and ball screw shaft are treated with P-C which is highly resistant to corrosion. (P-C treatment is an industrial black chrome coating with better corrosion resistance than martensitic stainless steel). 5. For clean-room application Model CSKR uses THK Grease FE-C, which is excellent in low dust generative characteristics, and Clean One-Touch Fittings KPQL (by SMC) for clean-room application. *1 ISO16-1 is equivalent to JIS B9920. *2 Negative pressure through the vacuum fittings must be induced to achieve a class 3 or class rating. *3 With use of THK FE-C grease. 1

3 Particle Generation Test Measurement method Testing environment: Inside a clean bench crylic cover Clean-Room ctuator CSKR ir flow intake: Flow rate [m 3 /min] <Testing conditions> Item Model no. Stroke Speed cceleration/ deceleration speed Vacuum rate Operating load Description 20B (precision grade) 289[mm] 2000[mm/s] 1.7[m/s 2 ] (1.5[G]) 70-3 [m 3 /min] (70[ /min]) None Flow speed: 0.25m/s Measured flow rate: 1 x -3 [m 3 ] Connection to the vacuum pump Sampling tube Connected to the particle counter <Measuring conditions> Item Description Measurement devices Particle counter (KC-18 by Rion) Flow speed of the measurement section 250[mm/s] ir intake rate [m 3 /min] (0.3[ /min]) Measured air rate 1-3 [m 3 ] (1[ ]) Measurement time 50[h] Measurement results Evaluation result of model CSKR 50-hour continuous operation (maximum speed 2000[mm/s]) Cleanliness class: ISO16-1 Particle emission rate [pc./ ] Maximum value 2 Maximum value 2 Maximum value 1 Maximum value 1 verage verage verage value 0.03 value 0.03 value or greater or greater or greater or greater or greater Particle diameter [µm] verage value 0.02 Maximum value 1 verage value 0.01 Particle density [pc./m 3 ] (Compatible with ISO16-1) Upper limit class 5 Upper limit class Upper limit class 3 Upper limit class 2 Upper limit class or greater or greater or greater or greater or greater Particle diameter [µm] Evaluation result of model CSKR cleanliness level Model no. Stroke [mm] Speed [mm/s] cceleration/deceleration speed [m/s 2 ] Vacuum rate* 1-3 [m 3 /min] Cleanliness level* 2 (ISO16-1) CSKR2006 (precision grade) CSKR2606 (precision grade) (precision grade) B (precision grade) (precision grade) B (precision grade) *1 The effects of pipe flow resistance are not taken into consideration when the vacuum rate is determined. Pipe fl ow resistance is the resistance value arising from pipe length or pipe diameter. Consider the fl ow rate reduction due to peripheral components. *2 Cleanliness level varies depending on the operating conditions. Upper limit cleanliness density level according to ISO16-1 Unit: pc./m 3 Particle diameter Class 1 Class 2 Class 3 Class Class 5 Class 6 0.1µm or greater µm or greater µm or greater µm or greater

4 Product Specifications Specifications Model no. CSKR20 CSKR26 Ball screw lead [mm] Effective stroke Note 1) [mm] 0.9 to to to to Positioning repeatability Note 2) [mm] Normal grade:±0.01, high grade: ±0.005, precision grade: ±0.003 Maximum carrying weight Note 3) Motor Size 50W Horizontal Vertical W Horizontal Vertical [kg] 200W Horizontal Vertical 18 8 Horizontal W Vertical Vacuum rate Recommendation Note ) -3 [m 3 /min] 3 to 12 to 1 to to 86 Note 1: Effective stroke is shortened according to the slider length. For details, confi rm with the dimensional drawing. Note 2: Positioning repeatability is determined according to an ambient temperature is 20 C. Note 3: The guideline for the maximum carrying weight is the weight when the motor is at the rated revolution and the acceleration/deceleration speed is 0.3G (0.15G for 6mm or less lead). The motor capacity is decided based on an C servo motor. Note : The effects of pipe fl ow resistance are not taken into consideration when the vacuum rates are determined. Maximum speed /s Model no. CSKR20 CSKR26 Ball screw lead [mm] Outer rail length [mm] Note: The maximum speed is the speed limited by the motor revolution (6000[min -1 ]) or the permissible rotational speed of the ball screw. Geometrical moment of inertia and mass Model no. Geometrical moment of inertia Mass Ix [mm ] IY [mm ] [kg/m] CSKR CSKR xis Y Center of gravity xis X 3

5 Load rating and radial clearance Model no. CSKR20 CSKR26 Ball screw lead [mm] LM Guide unit Ball screw unit Bearing unit (Fixed side) Basic dynamic load rating C [N] Note) Basic static load rating C0 [N] Note) Radial clearance [mm] Basic dynamic load rating Ca [N] Basic static load rating C0a [N] xial direction Normal grade, high grade to to to to 0 Precision grade to to to to Normal grade, high grade Precision grade Normal grade, high grade Precision grade Basic dynamic load rating Ca [N] Basic static load rating P0a [N] Note: The load ratings in the LM Guide unit indicate the load rating per inner block. Type Model CSKR- (slider type ) Representative type of model CSKR. Model CSKR-B (slider type B) Type with two inner blocks for model CSKR- and the slider overall length is extended.

6 ccuracy Standard The accuracy of model CSKR is defined in positioning repeatability, positioning accuracy, backlash and running parallelism (vertical). Positioning repeatability fter repeated positioning to a given point in the same direction seven times, measure the resting point and calculate the value of half the maximum difference. Perform this measurement at the center and at both ends of the travel distance; the largest value becomes the measurement value, and the positioning repeatability is expressed by placing the symbol "±" next to the value of half the maximum difference. Positioning accuracy Using the maximum stroke as the reference length, express as an absolute value the maximum error between the actual distance traveled from the reference point and the commanded value in as positioning accuracy. Running parallelism (vertical) Placing a straightedge on the surface where model CSKR is mounted, measure throughout the travel distance of the inner block using a dial indicator. Use the maximum difference between the readings within this travel distance as the measurement of running parallelism. (+) (Error) Reference point Command value Travel distance = ctual travel distance Travel distance of command value ( ) Straightedge Backlash dvance the inner block forward and record the measurement on the test indicator as a reference value. Subsequently, apply load to the inner block from the same direction (table feed direction), and then release the nut block from this load. Use the difference between the reference value and the return value as the backlash measurement. Perform this measurement in the center and near both ends, and use the maximum value as the measurement value. Backlash Return Screw feed Load displacement Load (including elastic displacement) The accuracies of model CSKR are classified into normal grade (no symbol), high grade (H) and precision grade (P). The tables below show standards for all the accuracies. Normal grade (no symbol) Model no. CSKR20 CSKR26 Outer rail length Positioning repeatability Positioning accuracy Running parallelism (vertical) Backlash Start torque [N-cm] ±0.01 No standard defi ned No standard defi ned ±0.01 No standard defi ned No standard defi ned ±0.01 No standard defi ned No standard defi ned ±0.01 No standard defi ned No standard defi ned

7 Model no. CSKR20 CSKR26 Outer rail length 0 Positioning repeatability High grade (H) Positioning accuracy Running parallelism (vertical) Backlash Start torque [N-cm] ± ± ± ± Model no. CSKR20 CSKR26 Outer rail length Positioning repeatability Precision grade (P) Positioning accuracy Running parallelism (vertical) Backlash Start torque [N-cm] ± ± ± ±

8 Model CSKR (Slider B) (Slider ) (L) (1.2) M3 depth 6 Detailed view of thru View of 13 PCD29 Intermediate flange M3 depth 5 2-ø2.5H7 depth 3 ø20h7 9 1 (23) 8 øh ± E 60 D P 60 Outer rail length Stroke range (Slider ) Stroke range (Slider B) 8-M3 depth 5 2-ø2.5H7 depth 3 2-Vacuum fittings Connecting screw R1/8 for ø6 tube ± n-m3 depth 5 (21) (Slider height) M2.6 depth M2.6 depth 7 15 depth depth 1.5 Detailed view of slider Detailed view of slider B Outer rail length [mm] Stroke range [mm] Reference main unit mass [kg] L [mm] D [mm] P n [pcs] E [mm] Slider type Slider type B Slider type Slider type B Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specifi cation can also be provided. For more information, please contact THK. Model Number Chart CSKR L P 0-0 N Ball screw lead 01, 06 Slider type (With one inner block)/b (With two inner blocks) Outer rail length 0 to 200 ccuracy standard With/without motor No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor Sensor specification 0 : Without sensor ttached table ( Page 17) : With sensor Intermediate flange ttached table ( Pages 11 and 12) Base plate (Optional) N : Without base plate B : With base plate 7

9 Model CSKR (Slider ) (L) 128 (1.7) (Slider B) Detailed view of -M3 depth thru View of PCD Intermediate flange -M depth 6 2-ø3H7 depth 5 ø2h7 85 E 60 Outer rail length Stroke range (Slider ) (29.5) Stroke range (Slider B) ø5h7 6 5 ± D P 65 2-ø3H7 depth 5 8-M depth n-m depth ± Vacuum fittings Connecting screw R1/8 for ø6 tube 28 (20.5) (9) (36) 50 (Slider height) M2.6 depth 7 -M2.6 depth 7 15 depth 2 15 depth 2 Detailed view of slider Detailed view of slider B Outer rail length [mm] Stroke range [mm] Reference main unit mass [kg] L [mm] D [mm] P n [pcs] E [mm] Slider type Slider type B Slider type Slider type B Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specifi cation can also be provided. For more information, please contact THK. Model Number Chart CSKR L P 0-0 N Ball screw lead 02, 06 Slider type (With one inner block)/b (With two inner blocks) Outer rail length 150 to 300 ccuracy standard With/without motor No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor Sensor specification 0 : Without sensor ttached table ( Page 17) : With sensor Intermediate flange ttached table ( Pages 11 and 12) Base plate (Optional) N : Without base plate B : With base plate 8

10 Model (Slider ) 152 (Slider B) (L) (2.2) Detailed view of -M depth M depth 8 PCD0 23 Intermediate flange ø36h8 ø3 ø8h7 75 E 59 Outer rail length Stroke range (Slider ) (21) 9 Stroke range (Slider B) 3 90 D P 90 2 n-m6 depth 8 2-Vacuum fittings Connecting screw R1/8 for ø8 tube (8.) (5) (59.2) 61 (Slider height) View of -M5 depth 2-øH7 depth ± øH7 depth 6 8-M5 depth ± M3 depth 5 22 depth 3 -M3 depth 5 22 depth 3 7 Detailed view of slider Detailed view of slider B Outer rail length [mm] Stroke range [mm] Reference main unit mass [kg] L [mm] D [mm] P n [pcs] E [mm] Slider type Slider type B Slider type Slider type B Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specifi cation can also be provided. For more information, please contact THK. Model Number Chart + 500L P 0-0 N Ball screw lead 06,, 20 Slider type (With one inner block)/b (With two inner blocks) Outer rail length 150 to 700 ccuracy standard With/without motor No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor Sensor specification 0 : Without sensor ttached table ( Page 17) : With sensor Intermediate flange ttached table ( Pages 11 and 12) Base plate (Optional) N : Without base plate B : With base plate 9

11 Model 0 (L) (Slider B) (2.2) (Slider ) Detailed view of 0 E 2-Vacuum fittings Connecting screw R1/ for ø tube 32 -M depth 8 View of Intermediate flange PCD ø6h8 ø2 -M6 depth 2-ø5H7 depth Outer rail length 23.8 (3.5) 28 Stroke range (Slider ) 18 Stroke range (Slider B) øh P ± ø5H7 depth 8 8-M6 depth ± n-m8 depth (61.2) (61.5) (75.2) 77 (Slider height) 8 -M3 depth 5 -M3 depth 5 22 depth 3 22 depth 3 8 Detailed view of slider Detailed view of slider B Outer rail length [mm] Stroke range [mm] Reference main unit mass [kg] L [mm] P n [pcs] E [mm] Slider type Slider type B Slider type Slider type B Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specifi cation can also be provided. For more information, please contact THK. Model Number Chart L P 0-0 N Ball screw lead, 20 Slider type (With one inner block)/b (With two inner blocks) Outer rail length 30 to 90 ccuracy standard With/without motor No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor Sensor specification 0 : Without sensor ttached table ( Page 17) : With sensor Intermediate flange ttached table ( Pages 11 and 12) Base plate (Optional) N : Without base plate B : With base plate

12 Optional Intermediate flange Intermediate flanges are available so that various motors may be mounted. Specify the intermediate flange suitable for your motor. C servo motor Yaskawa Electric Mitsubishi Electric Panasonic MINS MELSERVO Σ-Ⅱ Σ-V E Ⅲ J2 Super J3 Table of motors used and corresponding intermediate flanges (1) Motor type Rated output Flange angle CSKR20 CSKR26 SGMJV-5 50W SGMV-5 SGMJV W SGMV-01 SGMV-C2 150W SGMJV W SGMV B SGMJV-0 00W SGMV-0 SGMH-3 30W SGMH-5 50W 0 SGMH-01 0W SGMPH-01 B SGMH W 60 B SGMH-0 00W SGMPH W 80 C SGMPH-0 00W HF-MP053 50W HF-KP053 HF-MP13 HF-KP13 HF-MP23 HF-KP23 HF-MP3 HF-KP3 HC-MFS053 HC-KFS053 HC-MFS13 HC-KFS13 HC-MFS23 HC-KFS23 HC-MFS3 HC-KFS3 MSMD 5 MSMD 01 MQM 01 MSMD 02 MM 02 MSMD 0 MM 0 MQM 02 MQM 0 MSM 3 MSM 5 0 0W 200W 60 B 00W 50W 0 0W 200W 60 B 00W 50W B B 38 C D 0W D 200W 60 E 00W 200W 00W 80 F 30W B B 50W 38 C D MSM 01 0W MSM 02 MM W MSM 0 MM 0 00W 60 E MUM W MUM 0 00W 11

13 C servo motor Stepping motor Sanyo Denki Oriental Motor OMRON Sanyo Denki Table of motors used and corresponding intermediate flanges (2) Motor type Rated output Flange angle CSKR20 CSKR26 αstep αgrde OMNUC G OMNUC G5 SNMOTION Q2 SNMOTION Q1 5-phase 5-phase RK CSKⅡ Q003D 30W Q005D 50W 0 Q0D 0W Q6020D 200W Q600D 00W 60 B Q20006D 60W Q200D 0W 2 E Q205005D 50W F Q2050D 0W 5 G Q205020D 200W Q207020D 76 F Q207030D 300W R88M-K W 0 R88M-K030 0W R88M-K W R88M-K W 60 E R88M-G W 0 R88M-G030 0W R88M-GP030 D R88M-G W 60 E R88M-G W R88M-GP W R88M-GP W 80 F R6 2 D C G H R66 H 60 R69 I R98 85 J SC3 28 C S6, SC6 2 D C G H S66, SC66 H 60 S69 I S98 85 J CSK52 28 C CSK5 2 D C G H CSK56, CSK566 H 60 CSK569 I CSK J RK5 2 D C G H RK56, RK H I 3F35 28 C 3F55 2 D C G H 3F H I 12

14 Dimensions For CSKR20 CSKR20 CSKR20 B ø30h7. ø30h7 -M thread insert 1D PCD M3 thread insert 1.5D PCD ø22h7. ø22h7-3 drill ø5.5 counter bore depth 3.5 (To be mounted from the backside) drill ø6.5 counter bore depth 3.5 (To be mounted from the backside) For CSKR ø30h7 ø ø30h7 ø21 -M thread insert 1D PCD M3 thread insert 1.5D PCD ø22h7 ø21 ø17 ø17 ø17 ø17 CSKR20 CSKR20 C D CSKR26 CSKR26 B CSKR26 C -3.5 drill ø6.5 counter bore depth 3.5 (To be mounted from the backside)

15 For B ø30h ø30h ø3h7 ø ø30 ø22h ø50h7 ø30 -M thread insert 2D PCD 6 -M5 thread insert 2D PCD C D ø50h7 ø30 -M3 thread insert 2D PCD 5 -M thread insert 2D PCD E F ø50h7 ø30 -M3 thread insert 2D PCD 8 -M thread insert 2D PCD G H ø36h7 ø drill ø6.5 counter bore depth 3.5 (To be mounted from the backside) 6 -M thread insert 2D 9.7 1

16 Dimensions For 91.6 B ø30h ø70h7 ø ø50h7 ø ø50h7 ø ø50h7 ø0 -M thread insert 1D PCD 6 7 -M5 thread insert 1D PCD 70 7 C D ø30h7 -M6 thread insert 1.5D PCD M3 thread insert 1.5D PCD 5 7 E F ø70h7 ø0 -M thread insert 1.5D PCD M5 5.5 thread insert 2D PCD G H ø22h7 -M thread insert 1D PCD drill ø6.5 counter bore depth 6.5 (To be mounted from the backside) 5 15

17 I J ø36h ø60h7 ø0 -M 7 thread insert 1.5D -M6 thread insert 1.5D

18 Optional Sensor Various sensors can be mounted on model CSKR using the T slot at the side cover. To select a sensor, indicate the appropriate symbol from the corresponding table. Symbol Type Operation mode Sensor model no. No. of units Manufacturer ccessories 0 No sensor Mounting screw, nut, sensor dog, mounting plate, connector 2 Switching is allowed. EE-SX671 3 (EE-01) Photo sensor OMRON Mounting screw, nut, sensor dog, mounting plate, connector 6 Switching is allowed. EE-SX67 3 (EE-01) C N.O. contact GL-N12F 1 Proximity N.C. contact GL-N12FB 2 SUNX Mounting screw, nut, sensor dog E sensor N.O. contact PM-D N.C. contact PM-D3B Yamatake Mounting screw, nut, sensor dog Note 1: ll sensor outputs are NPN outputs. Note 2: ll sensors are accessories. Note 3: N.O. contact: Normally open contact N.C. contact: Normally closed contact Note : Sensors other than those shown in the table above may be mounted. For more information, please contact THK. [Photo sensor] EE-SX671 [Interchangeable for both N.O. and N.C. contact] (3 pcs.) (OMRON) (a) (b) EE-SX67 [Interchangeable for both N.O. and N.C. contact] (3 pcs.) (OMRON) (a) (b) (c) (d) (e) (c) (d) (e) Model no. a b c d e CSKR CSKR Model no. a b c d e CSKR CSKR [Proximity sensor] GL-N12F [N.O. contact] (1 pc.) (SUNX) GL-N12FB [N.C. contact] (2 pcs.) (SUNX) PM-D-001 [N.O. contact] (1 pc.) (Yamatake) PM-D3B1-003 [N.C. contact] (2 pcs.) (Yamatake) (a) (a) (b) (b) (c) (c) Model no. a b c Model no. a b c CSKR CSKR

19 Model CSKR can have the same slider height as that of conventional product (model CKR) by mounting the optional base plate. Intermediate flange End cover* 1 d (Slider height) t Base plate (optional) a b f P b c Base plate e g Intermediate flange a 0.5* 2 f Base plate *1 Models CSKR20 and 26 do not have end covers. *2 The base plate is shortened by 0.5mm from the edge of the intermediate flange ( See the figure above.). Note: When the base plate is used, the positioning accuracy and running parallelism (vertical) of the accuracy standard are equivalent to normal grade. Model CSKR20 Outer rail length a b P c d e f g t M3 thread insert 1.5D M3 thread insert 1.5D M3 thread insert 1.5D Model CSKR26 Outer rail length a b P c d e f g t M thread insert 1.5D M thread insert 1.5D M thread insert 1.5D Model Outer rail length a b P c d e f g t M6 thread insert 1.5D M6 thread insert 1.5D M6 thread insert 1.5D M6 thread insert 1.5D M6 thread insert 1.5D M6 thread insert 1.5D M6 thread insert 1.5D Model Outer rail length a b P c d e f g t M8 thread insert 1.5D 9 0 M8 thread insert 1.5D M8 thread insert 1.5D M8 thread insert 1.5D M8 thread insert 1.5D M8 thread insert 1.5D 9 18

20 Clean-Room ctuator Model CSKR Precautions on Use Handling Do not disassemble this product unnecessarily. Otherwise, dirt may enter or performance may be lost. Do not drop or knock this product. Otherwise, injury or damage may occur. Giving an impact could also cause damage to its function even if the product looks intact. Do not operate the unit in excess of the permissible rotational speed. Otherwise, damage to the unit or an accident may occur. * Contact THK for the permissible rotational speed. If the product is operating or in the ready state, never touch a moving part. In addition, do not enter the operating area of the actuator. If two or more people are involved in the operation, confirm the procedures such as sequences, signs, and abnormalities in advance, and appoint another person for monitoring the operation. Do not press the sealing sheet. Use the sealing sheet without deflection. Since the unit is designed to vacuum the volume inside the cover, particles may come in contact with the sealing sheet or its vicinity. Wipe it regularly with a rag for clean-room and ethanol. Operating environment The wrong environment can cause failure for this product. The suitable environments for application are as follows: When the performance of cleanliness level class 3 or class is required Operating temperature:+16 C to +2 C (No condensation shall occur at the humidity of 20 to 60%RH.) When operation is performed under normal environment (atmosphere) Operating temperature:+ C to +0 C (No condensation shall occur at the humidity of 80%RH or less.) * If considering use of the product outside its operating temperature range, contact THK. n environment free from corrosive gas or flammable gas n environment free from grit, dust, salt or metal powder n environment free from water, oil or chemicals n environment where vibration or impact are not transmitted to the unit When using the product in locations exposed to constant vibrations or in special environments such as vacuum and low/high temperature, contact THK in advance. Mounting the actuator The mounting surface shall be a machined surface or of equivalent properties. The flatness should be within 0.1mm/00mm. Lubrication To maximize the performance of this product, lubrication is required. Using the product with insufficient lubrication may increase wear of the rolling elements or damage the system prematurely. In this product, THK FE-C grease is used as the standard grease. Do not mix lubricants of different physical properties. When planning to use a special lubricant, contact THK before using it. In normal use, the grease must be replenished every 0km as a guide. However, the greasing interval varies according to the conditions. We recommend determining the greasing interval based on the result of the initial inspection. In locations exposed to constant vibrations or in special environments such as vacuum and low/high temperature, normal lubricants may not be used. Contact THK for details. Storage When storing the product, enclose it in a package designated by THK and store it in a horizontal orientation while avoiding high temperature, low temperature and high humidity. LM GUIDE, and are registered trademarks of THK CO., LTD. The actual products may differ from the pictures and photographs in this catalog. Outward appearances and specifications is subject to change without notification for purposes of improvement, please inquire before using them. lthough great care has been taken in the production of this catalog, THK will not take any responsibility for damage resulting from typographical errors or omissions. In exporting our products and technology, or selling them for the purpose of export, THK has a basic policy of observing laws relating to foreign exchange, trade and other laws. For export of THK products as single items, contact THK in advance. ll rights reserved NORTH MERIC NORTH MERIC THK merica,inc. THK merica,inc. 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