Fab Efficiency. A new Power Quality and Energy Monitoring Technology for Fabs and Tools

Transcription

1 Fab Efficiency A new Power Quality and Energy Monitoring Technology for Fabs and Tools

2 Content Introduction of PSL (Power Standards Lab) What is SEMI F47 What is SEMI E6/S23 How to combine SEMI F47 (Power Quality) and SEMI E6 (Power Monitoring) to get a New Embedded Monitoring Technology

3 Power Standards Lab Go Green. Know your power. PSL located near San Francisco, California, USA. PSL staff speak English, German, French, Spanish, Japanese, Kiwi, Mandarin Chinese, Cantonese Chinese, and more. Customers in 45 countries world-wide. 3

4 Power Standards Lab Go Green. Know your power. PSL works with most of the major player in the semiconductor industry on solving interesting electric power problems, world-wide. Experts on electric power measurements. PSL designs and manufactures electric power instruments. PSL provides Testing and Certification Services. And we write IEEE, IEC, SEMI standards. 4

5 SEMI F47-Power Quality (1) Frequency Variation: The deviation of the power system fundamental frequency from its specified nominal value. Undervoltage: Decrease in the RMS AC voltage to less than 90 percent at the power frequency for a duration longer than 1 min. Voltage Sags (dips): Decrease between 10% to 90% in RMS voltage or current. Duration from 0.5 cycles to 1 min Interruption Temporary Interruption is the complete loss of voltage for a period from 3 seconds up to one minute. Sustained interruption is the complete loss of voltage for a greater than one minute.

6 SEMI F47-Power Quality (2) Overvoltage: Increase in the RMS AC voltage greater than 10% above nominal. Duration longer than 1 min. Voltage Swells (surges): Increase 10% in the RMS AC voltage or current Durations from 0.5 cycle to 1 min Described by RMS value and duration Impulsive Transient: Short duration, unidirectional in polarity. Characterized by their rise time, decay times and peak magnitude Typical causes: Lightning, ESD, Load switching

7 SEMI F47-Power Quality (3) Oscillatory Transient: Positive and negative polarity values. Described by peak magnitude, waveform, spectral content (predominate frequency.) Typical causes: Line switching, capacitor switching, load switching. Notching: Periodic, steady-state voltage disturbance. Caused by component switching (commutation) e.g. switch mode DC power supplies. During this period, there is a momentary short circuit between two phases pulling the voltage as close to zero as permitted by system impedances. And more

8 SEMI F47 Tool Failure Cause Tools are sensitive. Unexpected,intermittent failures What causes the failures? Software bug? Bad connection? Operator error? Temperature? Flaw in feed material? Humidity? Bubble in process cooling water? etc... Or power quality disturbance? 8

9 Why don t electric companies fix power quality? Because it is caused by faults... 9

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12 SEMI F47 What is it about SEMI F47 Intent: Lead to improved selection criteria for subcomponents and improvements in equipment systems design. Not intended to proliferate the use of battery based UPS systems Requirement:..Equipment must continue to operate without interrupt during conditions identified in the area above the defined line...re-start without operator invention Equipment based standard, not a process quality standard Voltage Sag/Dip Performance - (Voltage Sag Immunity) (By far the majority of Power Quality Problems)

13 SEMI F47 The Famous Curve

14 SEMI F47-Typical Test Setup

15 SEMI F47 Why is it sucessful Lower maintenance cost No need for unnecessary and expensive power storage devices End-users don t want to deal with regular power problems More Fabs do SEMI F47 incoming inspections for new tools Reduces finger pointing at Facilities Mandatory requirement by more and more end-users Improvement of electrical tool design

16 SEMI E6 What is it about Describes how tool manufacturers must report electric power requirements Fixes Oversized breaker problem Gives idea to distinguish between loads (More loads) Requires graphs, numbers on kwh per wafer or process, kva, worst-case THD, and much more First step towards green semiconductor tools

17 SEMI E6 What is it about Gives every load a carbon emission value! Outlook 2015: Any product, machine, facility will come with a designated carbon emission value

18 SEMI E6 A Typical Recipe

19 SEMI E6-Measure energy use First, any tool consumes energy in two different ways 1. Direct Way Tool hooked up to power 2. Indirect Way The tool is hooked up to a variety of other utilities, such as process cooling water, clean dry air, vacuum, each of which requires energy to produce. So reducing the electric power consumption of a tool can have a multiplier effect by reducing the indirect power as well. Second, any tool energy consumption is influenced and controlled in part by the recipe design, and in part by the tool design (Not a high priority at the moment)

20 SEMI E6-Conversion Factors Example of indirect energy consumption: SEMI S23 provides useful conversion factors that inform process designers of the energy costs of all the important utilities: for example, de-ionized water at room temperature costs 9 kwh per cubic meter, and at 85ºC it costs 92 kwh per cubic meter, while the cooling load for the fab air conditioning is roughly 0.3 kwh for each kwh used by the tool. These conversion factors are especially useful because they are expressed in kilowatt-hours, allowing their results to be directly added to the direct energy consumption of the tool.

21 New Monitoring Technology You have to monitor before you can improve! Where? As close to loads as possible

22 Embedded Monitoring

23 New Technology Driving Factors Price Size Ease of Use Add Benefit to Fabs and Tools

24 The digital camera for electric power As easy to use as a digital camera removable SD card, Windows picture files 24

25 What is New Friendly data and absolute no Software Easy-to-understand pictures, straight from your PQube (no software). If you can use a digital camera, you can use a PQube. Don t want pictures? Excel -compatible files, too! 25

26 Go Green. Know your power. What is New Patent-pending CO 2 meters and trends. Accurately converts power measurements to CO 2 emissions generated or avoided! Graph is straight from PQube no software! 26

27 What is New Works right out of the box. Patent-pending power configuration just connect it to the tool s power, and it automatically figures out what you ve got at this fab, and immediately starts recording disturbances, trends, and statistics. (Want a special power configuration? Just edit text in the setup.ini file on your PQube s SD card.) 27

28 What is New Works with or without a network. No network? No problem! Your PQube gives you all its data on an SD card, just like a digital camera. You can get started today. Network available? Great! With its ETH1 module, your PQube will send you an every time it has interesting data. IT department willing to help you with firewalls and setup? Even better! Use your PQube s built-in web server and FTP server for easy access. Or start today without a network. Add network later. 28

29 Integrated WebServer, , FTP Live real time meters, events, trends see from any browser in the world. Web pages are straight from PQube no software! 29

30 What is New Tiny. Smallest 690-volt-rated power monitor ever made. Snaps onto a DIN-rail almost anywhere. Perfect for embedding in semiconductor tools and sensitive Fab locations. Snaps into standard DIN circuit-breaker box, too. Low cost. One-fifth the cost of comparable instruments. Payback time measured in weeks. 30

31 Final Conclusion - Benefit Separating intermittent equipment problems caused by power quality events from intermittent problems caused by other events Accurate, at-the-equipment-terminal statistics about power quality, it will be particularly interesting to learn how much worse power quality is at equipment terminals, compared with power quality at the main meter Now the equipment can be programmed to respond intelligently to power quality events Finally, obtaining all energy usage and carbon (Co2) emissions information for particular systems or parts of Fabs, helping to reduce and conserve energy and lead to a more green environment in the semi industry

32 Thank You Andreas Eberhard