EXT turbomolecular pumps

Transcription

1 XT turbomolecular pumps XT turbomolecular pumps XT7X turbomolecular pump -4 XT2X turbomolecular pump - XT70 turbomolecular pump -6 XT70H compound molecular pump -7 XT2H compound molecular pump -8 XT20M turbomolecular pump -9 XTH compound molecular pump - XT performance graphs Turbomolecular pump controllers X controllers -12 TI Turbo & instrument controller -14 TI Turbo controller -20 XT accessories -26 XPT combined outfits -28

2 2 XT TUROMOLULR PUMPS N X ONTROLLRS Our range of XT turbomolecular and compound molecular pumps and X ontrollers uses state-of-the-art technology to provide reliable, hydrocarbon-free, high and ultra high vacuum. Key performance factors turbomolecular pump (TMP) is a multi-stage axial-flow turbine in which high speed rotating blades provide compression by increasing the probability of gas molecules moving in the pumping direction. The turbomolecular pump is optimized for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump to exhaust to atmosphere. compound molecular pump (MP) is based on the concept of combining bladed turbomolecular stages with molecular drag stages on the same rotor. This design allows: High critical foreline pressures (typically up to mbar) Options to use smaller backing pumps or dry diaphragm backing pumps Pumping speed (volume flow rate) is determined by the rotor diameter, inlet flange size and rotational speed. The pumping speed reduces at high inlet pressures to a value determined by the size of the backing pump. s the inlet pressure rises, the motor power dissipation and pump temperature increase. Maximum continuous inlet pressure sets the maximum throughput limit for steady state pumping and depends on the cooling method used. bove this pressure, the rotational speed of the pump reduces as temperature sensors limit the pump power. With a water-cooled pump, the actual maximum throughput depends on the size of the backing pump. Quiescent electrical power is the nominal power dissipated by a pump operating normally at full rotational speed and with low gas throughput (inlet pressure below the 3 mbar range). uring the run-up time, or when operating at high gas throughput or above the critical backing pressure, the pump power dissipation will rise and approach the maximum power output for the X ontroller used. ritical backing pressure for conventional turbomolecular pumps is approximately 0.1 to 0.2 mbar. ompression ratio is determined by the rotational speed, the number of pump stages and the molecular weight of the pumped gas. It is higher for heavier gases which explains why the suppression of hydrocarbon backstreaming is so effective and why the ratio for hydrogen is important for ultra high vacuum applications. Ultimate pressure measured according to Pneurop standards, is the lowest pressure achieved in the test system, 48 hours after bakeout. The system is backed only by a two-stage rotary vane pump. luoroelastomer inlet seals are used with ISO-flanged pumps and metal seals are used with -flanged pump models. earing and suspension technologies We use two basic technologies: magnetic bearings and mechanical ceramic ball bearings. eramic bearings, which are lubricated for life by either grease or oil, have replaced conventional steel bearings. The silicon nitride ceramic balls are lighter, harder and smoother than steel equivalents, leading to longer life and lower vibration characteristics. Reliability is increased because the ball and race materials are different, which prevents micro pitting. Magnetic bearings further increase reliability. Our XT turbomolecular pumps up to 40 l s -1 use a hybrid bearing arrangement with a permanent magnet upper bearing and an oil or grease lubricated ceramic lower bearing. The XT range also includes the XT20M where the rotor is entirely supported by magnetic bearings. This offers additional advantages: Oil free - No hydrocarbon contamination from the turbomolecular pump Low maintenance - No bearing contact eliminates mechanical wear Low vibration - Typically an order of magnitude lower than conventional bearings Reduced cooling - mbient cooling is sufficient for many applications ny orientation - Pump can be mounted in any position Rotor technologies We use two basic technologies: conventional full stack turbomolecular (typically 12 stages) compound molecular (combining turbomolecular and drag stages) In addition, XT pumps up to 40 l s -1 use monobloc rotors machined from solid bar by computer controlled high speed milling machines. This technology produces stable, rigid rotors and allows virtually unlimited design flexibility for optimum vacuum performance. Motor technology XT pumps use brushless d.c. motors and are available in 24 and 80 volt variants. or the 24 volt pumps the TI line of controllers are available with the added benefit of integrated instrument controllers. or the 80 volt pumps you can choose from our X line of controllers to optimize the performance and cost options for your application. (The XT20M must use the X300M controller). The ontrollers incorporate a regenerative back-up supply which provides power in the event of electrical supply failure to keep the vent-valve closed for several minutes (and, in the case of the X300M, to ensure safe rundown of the XT20M magnetic bearing). eramic ball bearings orrosive applications or maximum life and reliability in the exacting process conditions encountered in semiconductor wafer processing applications, we recommend that you use turbomolecular pumps from our O dwards STP- and STPH- series (see page 4-). These Maglev pumps have magnetic bearings and are ideal for these harsh duty applications.

3 Purge port The XT pumps (with the exception of the XT70 and XT70H) all have purge-ports which can be used to purge the motor and bearing cavity with an inert gas (such as nitrogen). We recommend that you purge the pump when you pump corrosive and abrasive gas mixtures or those with an oxygen content over 20%. You can use our PRX purge-restrictor to set the purge gas flow rate. This typically adds up to 2 sccm to the total gas load and the backing pump must be sized accordingly. Venting To maintain the cleanliness of your vacuum system, we recommend that you vent a turbomolecular pump at or above half rotational speed, when the rotor is still spinning fast enough to suppress any backstreaming of hydrocarbons from the backing line. The vent port on the XT pump is part way up the rotor stack to ensure maximum cleanliness even with fluoroelastomer sealed vent-valves. ach pump is supplied with a manual vent-valve. If you use this manual valve care must be taken not to open it too quickly, especially if the system volume is small (typically less than the approximate volume of the turbomolecular pump), because if the rate of pressure rise is too high, the pump bearing life may be reduced. In a small volume system, the rate of pressure rise will be greater than in a large volume for a given vent flow rate, and it may be necessary to restrict the vent gas flow. We offer the VRX range of vent restrictors which you can fit to your XT pump, (see page -27). Since the rate of pressure rise cannot be accurately controlled by the manual vent-valve, we recommend that, unless you fit a suitable VRX restrictor to the vent port, you must wait until the turbomolecular pump has slowed down to 0% speed, as indicated by the controller, before you open the manual vent-valve. The maximum rate of pressure rise varies by pump model, and the Instruction Manual supplied with an XT pump gives further guidance on this, and the size of vent restrictor needed to meet the fastest pressure rise allowed. ontrol of the rate of venting is particularly important with pumps using fully magnetic bearings, otherwise the safety bearings may be damaged. The manual vent-valve can be replaced with a TV solenoid valve driven by the X ontroller to allow venting after a 2 second delay on shut-off, or delaying vent until the rotational speed has dropped to 0%. The X ontroller can also control the TV vent-valve in the event of power or pump failure. You can choose from two solenoid vent-valve options; the TV which covers most auto-venting applications, and the TV6 which has a higher conductance than the TV and is designed either for use on larger chambers (typically with a volume greater than liters), or when you want to use a two-stage venting procedure for the fastest possible vent times. or two-stage venting you need two TV valves. y using the appropriately restricted flow for the first stage vent-valve you can start venting when the XT pump is still at full rotational speed. Once the pump has slowed to half rotational speed you can then introduce higher flow rates from the second stage vent-valve. Inlet-screen n inlet-screen is fitted as standard to all XT pumps. The inlet-screen prevents debris from falling into the pump-inlet. In addition, the inletscreen prevents you from coming into contact with the blades of the pump when it is disconnected from your vacuum system. ooling or most applications, we recommend that you use forced-air cooling with the appropriate X air-cooler connected to your XT pump. If the ambient temperature is below 30, the XT70, XT70H and XT20M pumps can be cooled by free convection (dependent on gas load and backing pressure). N: high gas load, high backing pressure and rapid cycling require more cooling. However, if the ambient temperature is above 3 (or above 40 for the XT20M), you must water-cool the XT. The barbed connectors on the water-cooler are suitable for 6 mm internal diameter hose. Water cooling reduces the running temperature of the pump motor and bearings and is particularly recommended when you operate the XT with a continuous high throughput (that is, inlet pressure above 1-3 mbar) or when you bake the XT pump to above 70 (measured at the inlet flange). Scope of supply or end users desiring front panel controls and indications when using an 80 volt pump a minimum operating system requires you to order an XT pump, an X controller and a pump to controller cable. or a 24 volt pump a minimum operating system requires you to order an XT pump, a TI controller and an X controller. (The X controller is not required when using an XT7X or XT2X). ach XT pump is supplied with an inlet-screen, elastomer inlet seal or copper gasket (as appropriate), manual vent valve and water-cooler. XT7X, XT2X and XTM require a water-cooler accessory in addition (if required). ach X/TI controller is supplied with a 2 m unterminated electrical supply cable. 3XT TUROMOLULR PUMPS

4 XT7X TUROMOLULR PUMP INLT LNG ISO63/0 63 N40NW Pumping speed (l s -1 ) 3 N He H Ultimate pressure (mbar) With rotary vane backing pump 41 < -9 < - < -9 With diaphragm backing pump 411 < -8 < -9 < -8 Weight (kg) larger backing pump may be required for maximum throughput. suitable diaphragm pump with ultimate < mbar may also be used. 2 bove this inlet pressure, rotational speed drops to below nominal. 3 Power limit set to 80 W. 41 Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing pump. 411 Ultimate pressure 48 hours after bakeout with P b < mbar (00 Pa) 4 eatures & benefits ompatible with TI Turbo and Instrument ontroller Multiple communication modes available - Parallel mode allows traditional control signal interface - Serial mode allows RS-232 interface Numerous user configurable parameters via RS-232 interface - Vent valve control settings - Normal speed indication - Stand-by running speed - Programmable power settings - Power consumption - Pump temperature nhanced monitoring capability including pump speed, power and temperature THNIL T Inlet flange N63ISO-K, N63 or N40NW ompression ratio N 2 >1 11 He 1 x 6 H 2 x 4 Outlet flange N16NW Interstage port (Hi variants) N2NW Recommended backing pump 1 2M0.7 Vent port!/8 inch SP Purge port!/8 inch SP Maximum continuous inlet pressure (light gas pumping) 2 water cooling (water at 1, 2-2 mbar ambient temp at 40 ) forced air cooled, 3 ambient 1-2 mbar Nominal rotational speed rpm Standby rotational speed Variable from 4900 to rpm (63000 rpm default) Start time 90% speed 3 1 s ooling method orced air / water mbient air temperature for forced air cooling -3 Minimum cooling water flow rate (water 1 ) 1 l h -1 Water temperature range -20 Maximum inlet flange temperature 0 Operating attitude Vertical and upright, through to horizontal Noise level at 1 metre <0 d() Maximum magnetic field mt Recommended controller TI0 turbo or turbo and instrument controlled Quiescent electrical power W Interstage pumping speed (Hi variants) ORRING INORMTION PROUT SRIPTION Pump Inlet flange XT7X ISO63 N63ISO XT7X 63 N XT7X NW40 N40NW XT7X ISO0 N0ISO XT7iX ISO63 (interstage) N63ISO (main) N2NW (interstage) SSORIS Manual vent valve in vent port Purge Port (blanked off) Podule Interstage port (XT7iX only) Logic interface connector G Podule connector socket acking Port H arth onnection X7 air cooling accessory WX00 water cooling accessory

5 XT2X TUROMOLULR PUMP INLT LNG N0ISO-K N0 Pumping speed (l s -1 ) 3 N He H Ultimate pressure (mbar) With rotary vane backing pump 41 < -9 < - With diaphragm backing pump 411 < -8 < -9 Weight (kg) larger backing pump may be required for maximum throughput. suitable diaphragm pump with ultimate < mbar may also be used. 2 bove this inlet pressure, rotational speed drops to below nominal. 3 Power limit set to 160 W. 41 Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing pump. 411 Ultimate pressure 48 hours after bakeout with P b < mbar (00 Pa) eatures & benefits ompatible with TI Turbo and Instrument ontroller Multiple communication modes available - Parallel mode allows traditional control signal interface - Serial mode allows RS-232 interface Numerous user configurable parameters via RS-232 interface - Vent valve control settings - Normal speed indication - Stand-by running speed - Programmable power settings - Power consumption - Pump temperature nhanced monitoring capability including pump speed, power and temperature THNIL T Inlet flange N0ISO-K, N0 ompression ratio N 2 >1 8 He 4 x H x 4 Outlet flange N2NW Interstage port (Hi variants) N2NW Recommended backing pump 1 RV3 Vent port!/8 inch SP female Purge port!/8 inch SP female Maximum continuous inlet pressure (light gas pumping) 2 water cooling (water at 1, -3 mbar ambient temp at 40 ) forced air cooled, 3 ambient -3 mbar Nominal rotational speed rpm Standby rotational speed Variable from to rpm (42000 rpm default) Start time 90% speed 3 80 s ooling method orced air / water mbient air temperature for forced air cooling -3 Minimum cooling water flow rate water 1 ) 1 l h -1 Water temperature range -20 Maximum inlet flange temperature 0 Operating attitude Vertical and upright, through to horizontal Noise level at 1 metre <0 d() Maximum magnetic field mt Recommended controller TI200 turbo or turbo and instrument controlled Quiescent electrical power 2 W Interstage pumping speed (Hi variants) ORRING INORMTION PROUT SRIPTION Pump Inlet flange XT2X ISO0 N0ISO-K XT2X 0 N XT2iX ISO0 (interstage) N0ISO-K (main) N2NW (interstage) SSORIS Manual vent valve in vent port Podule connector socket Podule llowance for right-angle cable connector Logic interface connector G arth bond point acking Port X20H air cooling accessory WX00 water cooling accessory XT TUROMOLULR PUMPS

6 XT70 TUROMOLULR PUMP INLT LNG N40NW N0NW N63 N63ISO-K Pumping speed (l s -1 ) 3 N He H Ultimate pressure (mbar) 4 < -9 < -9 < - < -9 Weight (kg) larger backing pump may be required for maximum throughput. 2 bove this inlet pressure, rotational speed drops to below nominal. 3 Pumping speeds are without an inlet screen. Inlet screens are supplied fitted and reduce speed by about %. 4 Ultimate pressure 48 hours after bakeout with 2 stage rotary pump. XT70 with N63ISO-K, N63, NW40 and NW0 inlet flanges N63ISO-K N63 NW40 NW0 6 THNIL T Inlet flange N40NW, N0NW, N63 or N63ISO-K ompression ratio N 2 >1 8 He 6000 H 2 00 Outlet flange N16NW Recommended backing pump 1 2M0.7 Vent-port!/8 inch SP female Maximum continuous inlet pressure 2 water cooling at 1, 40 ambient 3-2 mbar air cooling at 3 ambient 1-2 mbar free convection at 30 ambient 6-3 mbar Nominal rotational speed rpm Standby rotational speed rpm Run-up time 90% speed 90 s ooling method ree convection or forced air, or water Maximum inlet flange temperature 0 mbient air temperature operating range with free convection cooling 0-30 with forced air cooling 0-3 Water temperature range (for water cooling) -20 Minimum water flow rate (at 1 ) 1 l h -1 Operating attitude Vertical and upright, through to horizontal Noise level at 1 metre <0 d() Maximum magnetic field mt Recommended ontroller X0 or X120 Quiescent electrical power W =112 ORRING INORMTION PROUT SRIPTION Ø9 Ø94 Ø0 6 Ø113 4 x M4 x 6 63 G 8 x Ø NW16 Pump Inlet flange XT70 N40NW XT70 N0NW XT70 N XT70 N63ISO-K Ø Ø acking port (outlet flange) ooling-water connector Ø7 lectrical supply connector llowance for right-angle cable connector Vent-valve G arth bond point

7 XT70H OMPOUN MOLULR PUMP 1 larger backing pump may be required for maximum throughput. suitable diaphragm backing pump with ultimate < mbar may also be used. 2 With backing pressure <0.1 mbar. bove this inlet pressure, rotational speed drops to below nominal. 3 Pumping speeds are without an inlet screen. Inlet screens are supplied fitted and reduce speed by about %. 4 Ultimate pressure 48 hours after bakeout with 2 stage rotary pump. Using diaphragm pump with ultimate < mbar. N63ISO-K N63 NW40 Ø x Ø8.4 Ø9 Ø113 Ø XT70H with N63ISO-K inlet flange G 176 G THNIL T Inlet flange N40NW, N63 or N63ISO-K Outlet flange N16NW Recommended backing pump 1 2M0.7 Vent-port!/8 inch SP female ompression ratio N 2 >1 8 He 4 H Maximum continuous inlet pressure 2 water cooling at mbar air cooling at mbar free convection at mbar Nominal rotational speed rpm Standby rotational speed rpm Run-up time 90% speed 90 s ooling method ree convection or forced air, or water Maximum inlet flange temperature 0 mbient air temperature operating range with free convection cooling 0-30 with forced air cooling 0-3 Water temperature range (for water cooling) -20 Minimum water flow rate (at 1 ) 1 l h -1 Operating attitude Vertical and upright, through to horizontal Noise level at 1 metre <0 d() Maximum magnetic field mt Recommended ontroller (80 V) X0 or X120 (24 V d.c.) X80 & TI Quiescent electrical power W Interstage pumping speed (Hi variants) N 2 6 l s -1 INLT LNG N40NW N63 N63ISO-K Pumping speed (l s -1 ) 3 N He H Ultimate pressure (mbar) Rotary vane pump 4 < -9 < - < -9 iaphragm pump < -8 < -8 < -8 Weight (kg) =112 ORRING INORMTION PROUT SRIPTION Ø94 Ø0 6 4 x M4 x 6 63 NW16 4 acking port (outlet flange) lectrical supply connector Vent-valve 33. Pump Inlet flange XT70H N40NW XT70H N XT70H N63ISO-K XT70Hi N XT70Hi N63ISO-K TI compatible packages* (24 V d.c.) XT70H N63-ISOK XT70H N XT70H N40NW * X-80 control module (P/N ) also required See the entry for the TI Turbo/Instrument controller at the end of this section for more information. ooling-water connector 33. llowance for right-angle cable connector G arth bond point 7XT TUROMOLULR PUMPS

8 XT2H OMPOUN MOLULR PUMP INLT LNG N0ISO-K N0 Ultimate pressure (mbar) Rotary vane pump 4 < -9 < - iaphragm pump < -8 < -9 Weight (kg) Pumping speeds are without an inlet screen. Inlet screens are supplied fitted and reduce speed by about %. 2 larger backing pump may be required for maximum throughput. suitable diaphragm backing pump with ultimate < mbar may also be used. 3 With backing pressure <0.1 mbar. bove this inlet pressure, rotational speed drops to below nominal. 4 Ultimate pressure 48 hours after bakeout with 2 stage rotary pump. Using a diaphragm pump with ultimate < mbar. N0ISO-K N0 Ø x Ø8.4 XT2H with N0ISO-K inlet flanges Ø130 Ø12 8 THNIL T Inlet flange N0ISO-K or N0 Outlet flange N2NW Vent-port!/8 inch SP female Purge-port!/8 inch SP female Pumping speed 1 N l s -1 He 230 l s -1 H l s -1 ompression ratio N 2 >1 8 He 4 H Recommended backing pump 2 RV3 Maximum continuous inlet pressure 3 water cooling at 1, 40 ambient -3 mbar air cooling at 3 ambient -3 mbar free convection at 40 ambient 4-4 mbar Nominal rotational speed rpm Standby rotational speed rpm Run-up time to 90% speed X0 190 s X s X300 0 s ooling method orced air or water Maximum inlet flange temperature 0 mbient air temperature operating range with forced air cooling 0-3 Water temperature range (for water cooling) -20 Minimum water flow rate (at 1 ) 1 l h -1 Operating attitude Vertical and upright, through to horizontal Noise level at 1 metre <0 d() Maximum magnetic field mt Recommended ontroller (80 V) X0, X120 or X300 (24 V d.c.) X80 and X160 Other compatible ontroller X300 Quiescent electrical power 2 W Interstage pumping speed (Hi variant) N 2 l s -1 H 2 l s ORRING INORMTION PROUT SRIPTION NW Ø12 Pump Inlet flange XT2H N0ISO-K XT2H N XT2Hi N0ISO-K TI compatible packages* (24 V d.c.) XT2H N0ISO-K XT2H N XT2Hi N0ISO-K * X-160 control module (P/N ) also required. See the TI Turbo/Instrument controller entry at the end of this section for more information NW x M x 20 acking port (outlet flange) ooling-water connector Purge-port (adaptor shown fitted) llowance for right-angle cable connector lectrical supply connector G arth bond point Vent-valve G 8. Ø86

9 XT20M TUROMOLULR PUMP N0ISO-K N0 Ø Ø130 Ø12 16 x Ø XT20M with N0 and N0ISO-K inlet flanges THNIL T Inlet flange N0ISO-K or N0 Outlet flange N2NW Vent-port!/8 inch SP female Purge-port!/8 inch SP female Pumping speed 1 N l s -1 He 20 l s -1 H l s -1 ompression ratio N 2 >1 8 He 2 4 H Ultimate pressure (mbar) 2 < -9 (ISO-K) or < - () Recommended backing pump RV Maximum continuous inlet pressure 4 X300M, water cooling at mbar air cooling at mbar Nominal rotational speed rpm Standby rotational speed rpm Run-up time to 90% speed 90 s raking time with venting 1 min without venting 11 min ooling method ree convection or forced air, or water Maximum inlet flange temperature 0 mbient air temperature operating range with free convection cooling 0-3 with forced air cooling 0-40 Water temperature range (for water cooling) - 30 Minimum water flow rate (at 1 ) 1 l h -1 Operating attitude ny orientation Weight N0ISO-K inlet 8. kg Weight N0 inlet 11 kg Noise level at 1 metre <0 d() Maximum magnetic field mt ontroller X300M Quiescent electrical power 1 W acking port (outlet flange) Vent-valve Purge-port (adaptor shown fitted) ooling-water connector lectrical supply connector llowance for right-angle cable connector The XT20M is supplied in a kit, together with an X300M controller and a pump-to-controller cable. ORRING INORMTION PROUT SRIPTION 0.8 Ø117 XT20M pump, X300M controller and cable N0ISO-K flange, 1 m cable N0ISO-K flange, 3 m cable N0ISO-K flange, m cable N0 flange, 1 m cable N0 flange, 3 m cable N0 flange, m cable NW NW Ø x M6 x 7 = XT TUROMOLULR PUMPS 1 Pumping speeds are without an inlet screen. Inlet screens are supplied fitted and reduce speed by about %. 2 Ultimate pressure 48 hours after bakeout with 2 stage rotary pump. 3 larger backing pump may be required for maximum throughput. 4 bove this pressure, rotational speed drops to below nominal. The braking time without venting will be reduced if the X300M controller provides the electrical supply for an air-cooler or vent-valve.

10 XTH OMPOUN MOLULR PUMP Maximum magnetic field (standard envelopes) xial < 7 mt Radial < 3 mt Maximum magnetic field (martensitic envelopes) xial < 0 mt Radial < 0 mt Recommended controllers X20, X300 Quiescent power consumption 3 W * Measured without inlet screen. Inlet screens are supplied fitted and reduce speed by up to 20% ** With backing pressure < 0.3 mbar. bove this inlet pressure rotational speed drops. N160 N160ISO-K Ø x Ø8.4 Ø202.4 Ø180 XTH with N160ISO-K inlet flange THNIL T Main inlet flange N160ISO-K / N160 Outlet flange N2NW Interstage port (Hi variants) N2NW Vent port 1/8 inch SP Purge port 1/8 inch SP Inlet pumping speed* N 2 40 l s -1 He 80 l s -1 H 2 00 l s -1 r l s -1 Interstage pumping speed (Hi variants) N 2 8 l s -1 He 6 l s -1 H 2 8 l s -1 ompression ratio N 2 > He 8 H 2 6 r > Ultimate pressure ( variant) < - mbar Recommended backing pump RV12 Maximum continuous inlet pressure (N 2, He, H 2 )** forced air cooled, 30 ambient 1x -3 mbar forced air cooled, 3 ambient x -4 mbar water cooling at 1 2x -3 mbar Nominal rotational speed 0000 rpm Start time to 90% speed X20 min X min X160 8 min ooling method forced air / water mbient air temperature for forced air cooling 0-3 Recommended cooling water flow rate (water at 1 ) 1 l h -1 Water temperature - 20 Maximum inlet flange temperature 80 Noise level at 1m <60 d ORRING INORMTION PROUT SRIPTION G 4 Ø168 Ø2 Pump Inlet flange XTH N160ISO-K XTH N XTHi N160ISO-K (shown) Martensitic envelope XTH N160ISO-K XTH N x M8 x 2 xhaust port arth bond point Interstage port llowance for right-angle cable connector lectrical connector G Purge point Vent port SSORIS or safe and reliable operation, the XTH requires one of the following external cooling accessories X ir cooling accessory WX Water cooling accessory

11 XT PRORMN GRPHS Pumping speed (pumping speed vs inlet pressure) Throughput (throughput vs inlet pressure) Nitrogen Helium XTH N ls XT20M/2H/2X 1 XTH XT20M/2H/2X XT70/70H/7X mbar -1 mbar ls 0-1 XT70/70H/7X Pa Helium -2 R ls -1-1 ls XTH XT20M/2H/2X XT70/70H/7X XTH XT20M/2H/2X XT70/70H/7X Hydrogen -2-1 He H He H 2 R H 2 H 2 1 He He 2 N 2 N 2 mbar Pa mbar Pa mbar ls XTH ompression ratio (compression ration R vs backing pressure) R He H 2 He mbar Nitrogen Pa XT20M/2H/2X XT70/70H/7X N Pa N 2 N 2 He H 2 R H 2 He mbar 11XT TUROMOLULR PUMPS mbar mbar mbar mbar Pa Pa Pa Pa XT7X 12 * N 2 ompression > XT70 XT70H XT20M XT2H/ XT2X XTH 12 * N 2 ompression >

12 X ONTROLLRS gauge heads, allowing the operation of the gauge head and the turbomolecular pump to be interlocked. eatures & benefits ontrollers can drive different pumps (except the X300M which is dedicated to the XT20M pump). Switched-mode power supplies which automatically adjust to any electrical supply. lectromagnetic compatibility which exceeds the requirements of the uropean generic immunity and emission standards. Regenerative power supply which provides vent-valve control options. Rear panel sockets for vent-valve, air-cooler and ctive vacuum gauge. ull remote control. Standby and bakeout band control from front panel (except X0, X0L, X20 and X20L). User selectable normal speed and time-out settings. 0- V d.c. analog output proportional to turbomolecular pump rotational speed. (0- V d.c. for X0 and X0L). 12 X0, X0L, X120, X300M and X300 controllers X controller range Our electronic drive X ontrollers provide power and control for XT pumps and accessories. There are seven ontrollers: X0, X0L, X20, X20L, X120, X300 and X300M. ll of these controllers, except the X300M, are compatible with our 80 V d.c. XT turbomolecular pumps with brushless d.c. motors. The X300M is compatible with our magnetic bearing pump, the XT20M. The X120 with a maximum power output of 120W covers most pumping applications. The X300 is a high power version of the X120 and will run XT pumps up to full speed faster than the X120 and will maintain pump performance at higher inlet pressures. The X0 and X20 range of controllers have no front panel controls, and are intended for remote control only. The X0 and X20 have an external connector for use with the 1M, 3M and M pump-to-controller cables listed in the XT accessories. The X0L and X20L are equipped with an integral 1M pump-to-controller cable. ront panel controls and indicators With the exception of the X0 and X20 range, all controllers have the following front panel controls and indicators: Start/Stop - to switch the pump on and off Standby - to switch the pump into standby mode, at 70% of full speed Heater - to switch the bakeout band on and off ail indicator L - is lit when the turbomolecular pump has tripped due to over-temperature or overload. lectrical supply indicator L - is lit when the X is switched on. Speed indicator bar graph - has a four segment display to show when the turbomolecular pump is operating and has reached 2%, 0% and 7% of nominal speed. Rear panel connections ll of the X ontrollers have rear panel connectors for logic interface (for remote control), air-cooler, vent-valve and ctive vacuum gauge. In addition, the X120, X300 and X300M have connectors for bakeout band electrical supply and rotary pump electrical supply switching. The logic interface facilities are: Remote control of Start, Stop and Standby. Vacuum system interlocks to prevent incorrect operation of the turbomolecular pump. Normal and fault condition outputs 0- V d.c. analog output proportional to turbomolecular pump speed (0- V d.c. for X0 and X20 range) The air-cooler and vent-valve electrical supplies are 24 V d.c. outputs which are suitable for use with O dwards XT accessories. The ctive gauge connector is suitable for use with the O dwards ctive vacuum TUR X0/L X20/L X120 X300 X300M ontrol functions available: Manual control Remote control Standby akeout band front panel switch Rotary pump switching relay Hours counter isplay functions available: lectrical supply Speed (4 segment bar graph) Pump on Pump awaiting interlock Pump fail Pump axial emergency Standby on akeout band on (pump normal) ompatible turbomolecular pumps: XT70, XT70H XT2H XT20M XTH series irect connection possible for: X air cooler TV vent-valve X bakeout band Rotary pump switching ctive gauge ORRING INORMTION The X300M ontroller is supplied in a kit with an XT20M pump and a pump-tocontroller cable: for ordering information, see page -9. PROUT SRIPTION X X0L X X20L X X lectrical supply cables 2 m no plug m UK plug m US plug m Northern uropean plug

13 THNIL T X0/L X20/L X120 X300 X300M lectrical supply voltage (V) and and lectrical supply frequency (Hz) Maximum input power (V) Including bakeout band With no bakeout band Maximum power output (W) mbient temperature range ( ) nclosure protection rating IP20 IP20 IP20 IP20 IP20 lectromagnetic emissions N61326 class N61326 class N61326 class N61326 class N61326 class lectromagnetic immunity N61326 N61326 N61326 N61326 N61326 Rotary pump contact rating 1 Maximum current () Maximum voltage (V a.c.) Weight (kg) Set-points Timeout range on <0% speed (min) actory set timeout (speed rising) (min) Timeout on speed falling (Y/N option) factory setting no no no no no Normal speed set-point range (%) actory set normal speed (%) Vent options, factory settings Vent on ontroller Stop, at 0% speed 0% speed 0% speed 0% speed 0% speed Vent on electrical supply fail, at 0% speed 0% speed 0% speed 0% speed 0% speed Vent on pump fail, at 0% speed 0% speed 0% speed 0% speed 0% speed Vent on axial emergency s Vent options, alternative selectable options Vent on ontroller Stop, after 2 s 2 s 2 s 2 s 2 s Vent on pump fail, after 2 s 2 s 2 s 2 s 2 s Vent on axial emergency No vent 1 Inductive load with power factor of 0. 2 % of pump nominal rotational speed W pump + 20 W accessories X0/L X M3 6.8 G X20/L 11 1 X300/X300M 0 M G XT TUROMOLULR PUMPS 127 Ø Ø3. 1 Ø Ø ront panel View from top llowance for cable bend Panel cut-out View from side learance for ventilation G Optional adaptor plate, to fit X0 in place of X120

14 14 TI TURO & INSTRUMNT ONTROLLR compact turbo and instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control and data logging functions via a new Windows TM based P program. The controller automatically recognizes and supports up to three gauges from the O dwards range (excluding IG and arocels), and one 24 V turbomolecular pump from the XT range. ooling and vent valve support is provided directly from the controller. acking pump control is provided either for a compact 24 V diaphragm pump (on 200 W versions only), or where greater pumping speeds are required, mains backing pumps (up to 2M28) may be controlled via an optional relay box. The relay box also controls a mains heater band and backing line isolation valve and may include three 20 V a.c. 3 changeover relays, which are activated by the gauge open collector set point outputs. High pressure gauges may be used to initiate turbo pumps and low pressure gauges; alternatively, time delays and normal signals may be used to control events such as turbo and instrument start. There is a comprehensive selection of protection and safety interlock features. The TI turbo and instrument controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations. eatures & benefits Universal turbo & instrument controller TI automatically recognizes and controls up to three active gauges and one 24 V turbomolecular pump from either the X or X ranges. The 200 W version provides sufficient power to ensure optimum performance of larger 2 turbos. X turbos have full serial communication with TI and may be both configured and report status via TI. acking pump support oth mains and 24 V backing pumps may be controlled by TI. The 200 W version supports the new X1 dry diaphragm pump. or larger vacuum systems both the 0 W and 200 W versions may control mains backing pumps, including XS and up to RV12, via the optional relay box. Relay options Three optional relay boxes are available for use with TI. These include a version with three 20 V 3 changeover relays, activated by the TI internal open collector set point outputs. nother version controls a mains backing pump, turbo heater band and backing line isolation valve. The final relay box combines these features to provide 20 V changeover relays, backing pump and auxiliary controls. ll relay boxes include a logic bypass facility for further system integration. Simple system configuration In most instances, TI systems may be simply and quickly configured using the range of standard cables on offer, there is therefore no need for the customer to prepare loom assemblies or relay boxes and special interfaces. irect pressure readout TI includes lookup tables for a range of commonly encountered process gasses (N 2, He, r, O 2, Kr & Ne). Selecting the appropriate gas enables direct readout of the correct pressure without the need to apply conversion factors. ompact instrument TI is packaged in a compact case and may be panel or rack (¼ 19" rack 3U) mounted. With the addition of the bezel it becomes an attractive bench-top instrument. lear, easy to use graphical user interface The large 128 x 64 pixel backlit graphics L and mobile phone style menu system simplifies programing and with a choice of summary screens excellent visibility of displayed parameters is assured. Universal power supply TI will operate from mains supplies with voltages between 90 and 264 V a.c., and frequencies between 47 and 63 Hz. No user intervention being required. Serial communications To enable complete integration into P and PL controlled processes, all TI variants include RS232 and RS48 interfaces as standard. Windows TM P program TI is supplied with a new Windows TM P program which enables full setup and control from a P, using the RS232 interface. Software upgrades s new compatible products are released, TI software may be simply upgraded using the special utility supplied with the Windows TM P program. TI software upgrades will be made available via and the Internet. THNIL T TURO PUMP 24 V TURO PUMP OPTIONS TI VRINT 0 W 200 W XT7X ast ast XT70H & X80 ast ast XT2H & X80* Slow Slow XT2H & X160 N/ ast XT2X Slow** ast * Ramp speed is limited by the use of the X80 ** When configured to low power start Logic Interface ontrol inputs Turbo start/stop* Turbo standby Gauge enable 1, 2, 3 acking pump start/stop* System interlock SYSI The logic interface connector includes the functions listed below. It may be used either to link to system relays, a higher-level control system, or an optional relay box. y utilizing the relay box pass-through connector, a combination of a higher-level control system and relay box may be used. losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c.

15 ontrol outputs Vent valve control Heater band control acking pump control ir cooler Status outputs nalog output Set point,, Turbo normal speed larm Serial interface * Start/stop commands are edge triggered. O/ 24 V d.c. 0 m O/ 24 V d.c. 0 m O/ 24 V d.c. 0 m O/ 24 V d.c. 200 m 0- V d.c. O/ 24 V d.c. 0 m O/ 24 V d.c. 0 m O/ 24 V d.c. 0m The TI has two built-in communications protocols, RS232 and RS48. These may be used either to interface to a PL or, using the Windows TM P software package supplied connected to a P for full monitoring and control of a TI system. ench and rack mounting options (1/4 19" 3U sub rack) O WRS Mains input lectrical supply Power consumption (max) Peak inrush current use arth stud uxiliary terminals ir cooling fan Vent valve Interface cables imensions lectronics housing TI TURO ONTROLLR INSTRUMNTS 0 W RS232 TI TURO ONTROLLR INSTRUMNTS 200 W RS to 264 V a.c. 47 to 63 Hz 21 V 30 1 V a.c. 230 V a.c. TI is self-protecting and has no user replaceable fuse. The unit will recover when the overload is removed M4 24 V d.c. 3 W max, X70, X7 & X20H 24 V d.c. 2 W max, TV & TV6 Use cables as specified in ordering information 1 mm high x mm wide x 24 mm deep 6 mm wide x 128 mm high ront panel Weight Turbo & instrument controller 0 W RS kg Turbo & instrument controller 200 W RS kg Operating temperature +0 to +40 Storage temperature -30 to +70 Maximum ambient operating humidity 90% RH non-condensing at 40 Maximum operating altitude 3000 m lectronic esign N 6-1 lectromagnetic ompatibility N Industrial Location, lass missions nclosure rating IP20 O WRS xternal interfaces 1XT TUROMOLULR PUMPS isplay x 64 pixel backlit graphics L ront panel keypad control functions include: Scroll up button Scroll down button nter/select button Menu/ack button ycle button

16 1 The three set point relays which are highlighted when tripped, may be linked to any gauge. Gauge inputs Instrument supporting TI variants recognize and control the following gauges: 2 PG, PGX, T, SG, IM, WRG & IGX* Gauge inputs 68 (RJ4) 2 Logic Interface 2-way '' socket 3 acking pump 24 V 1-way '' socket * 4 Turbo pump 24 V 1-way '' socket RS232/48 9-way '' socket 6 arth stud M4 7 Mains input /I 320 plug 8 Mains on/off switch 9 uxiliary vent valve and fan terminals (24 V supply)4 -way screw term * vailable on 200 W versions only isplay interface * No more than one IGX gauge may be connected to TI at a time. acking pump 24 V (or mains backing pump support, see below.) 200 W turbo supporting TI variants recognize and control the following 24 V backing pumps: X1 Relay box (optional) General description range of relay boxes has been developed to allow TI to operate three 20 V a.c. 3 (non-inductive) changeover relays, mains backing pumps and accessories. The changeover relays are activated by the TI set point outputs. The mains backing pump relay controls a backing line isolation valve, such that when the backing pump is switched off the isolation valve closes. The relay box is connected to the TI via the logic interface connector, which is also provided with a bypass connector for interfacing with OM equipment. Relay box options hangeover relays (3 off 20 V a.c. 3 ) Heater band & backing line isolation valve Small backing pump TI Relay ox Instruments TI Relay ox Small acking pump TI Relay ox Inst & Small acking pump ompatible mains backing pumps and accessories Small backing pumps: 2M0.7 & 1., RV3,, 8 & 12, XS &, XS & & SP12 Heater band: X70 & X20 acking line isolation valve: LPV16K & LPV2K TI software is structured through a series of easily accessible screens, similar to a mobile telephone. TI automatically recognizes which gauges and turbo are connected and displays the appropriate information on the default summary screen. Scrolling and selecting accesses the control and set-up menus for that item. Turbo speed is shown as a proportion of full speed by a bar graph. Norm indicates that the turbo has reached its Normal Speed, whilst forward or reverse facing chevrons indicate acceleration and deceleration. Pump status is displayed, which combined with gauge outputs and relay status gives a clear indication of what is currently happening in the vacuum system. There are a number of display options for maximum clarity. In addition, two levels of password protection may be applied, effectively restricting or preventing unauthorized intervention. In the event of an error occurring, TI will display either a WRNING or flash an LRM. warning advises of a condition outside normal parameters, requiring no action, but an alarm must be cleared before normal operation may resume. isplay units may be in mbar, Torr, Pa or Volts.

17 TI system configurations may be created and saved for use at a later date, thus saving programing time. The P software includes an upgrade utility, which enables the TI software to be upgraded over the serial link from files supplied electronically. 1 Mains input /I 320 plug 2 acking line isolation valve 3-way IN socket 3 20 V 3 changeover relays 12-way Positronic plug * 4 Logic interface (from TI) 2-way '' socket * Logic bypass (to P, PL etc.) 2-way '' socket * 6 arth stud M4 * 7 Heater band fuse 8 Heater band /I 320 socket 9 Mains backing pump fuse Mains backing pump /I 320 socket * vailable on TI Relay ox Instruments vailable on TI Relay ox Small acking Note: ombined instrument and small backing pump variant shown. Windows TM P program TI is supplied with fully functional Windows TM based P software, which replicates and adds to the TI control menus. 17XT TUROMOLULR PUMPS The P software enables TI systems to be configured, controlled and monitored from a single P. useful data logging facility is also included, which saves user selectable parameters to file (in.csv format) for later analysis using suitable software.

18 onfiguration examples ITM SRIPTION TI turbo/inst cont 200 W RS232* m UK mains cable WRG-S-NW X1 24 V d.c. diaphragm pump XT7X ISO X7 air-cooler G X/X/X extension cable 2 m H X/X/X extension cable 2 m (optional) J m active gauge cable J H G * When using an X1 pump, the turbo should be either controlled by a gauge or be subjected to a start delay. 18 J ITM SRIPTION TI turbo/inst cont 0 W RS m UK mains cable TI relay box small backing PGX-M-NW2 STST IGX-S-NW WRG-S-NW2 G RV3 pump 1-phase H XT7X ISO63 J X70 heater band 240 V 60 W* K TV vent valve L X7 air-cooler M TI logic interface cable 2 m N TI mains cable I320 M/ 2 m P TI logic interface cable 2 m Q X/X/X extension cable 2 m (optional) R TI RS232 interface cable 2 m (optional S m active gauge cable T N/ P with RS232 interface (optional) S T H L K S R Q G P N M * or use with water cooled pumps only.

19 . onfiguration examples ORRING INORMTION J R S H ITM SRIPTION TI turbo/inst cont 200 W RS m UK mains cable TI relay box sml backing PGX-M-NW16 L IGX-S-NW WRG-S-NW2 G XS H XT2H N0ISO-K 24 V J X V K TV vent valve L L X20H air-cooler R M TI mains cable I320 M/ 2 m N TI logic interface cable 2 m P X/X/X extension cable 2 m (optional) Q RS232 interface cable 2 m (optional) R m active gauge cable S N/ P with RS232 interface (optional) K Q P N M G PROUT SRIPTION ontrollers (supplied with manuals and software) TI turbo & instrument controller 0 W RS TI turbo & instrument controller 200 W RS Relay boxes (supplied with a set of mating connectors) TI relay box instruments (3 x 20 V a.c. 3 changeover relays) TI relay box small backing pump TI relay box instruments & small backing pump ables Mains cables (TI and relay box supply) 2 m UK plug m US plug m Northern uropean plug Mains cables (relay box to RV and XS type pumps) 2 m TI mains cable I320 m/f m TI mains cable I320 m/f Interface cables 2 m TI logic interface cable m TI RS232 interface cable V pump extension cables (use with X, X & X1 type pumps) 1 m X/X/X extension cable m X/X/X extension cable m X/X/X extension cable ctive gauge cables (include 68 compatible connections at both ends) 0. m active gauge cable m active gauge cable m active gauge cable m active gauge cable m active gauge cable m active gauge cable m active gauge cable (24 WG) m active gauge cable m active gauge cable (24 WG) m active gauge cable m active gauge cable Other accessories and supporting products TI front bezel kit (spare) XT TUROMOLULR PUMPS

20 . 20 TI TURO ONTROLLR compact turbo controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control and data logging functions via a new Windows TM based P program. The controller automatically recognizes and supports one 24 V turbomolecular pump from the XT range. ooling and vent valve support is provided directly from the controller. acking pump control is provided for a compact 24 V diaphragm pump (on 200 W versions only), or where greater pumping speeds are required, mains backing pumps (up to 2M28) may be controlled via an optional relay box. The relay box can also be used to control a mains heater band and backing line isolation valve. Time delays and normal speed signals may be used to control events such as turbo start and there is a comprehensive selection of protection and safety interlock features. The TI turbo controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations. eatures & benefits Universal turbo & instrument controller TI automatically recognizes and controls one 24 V turbomolecular pump from either the X or X ranges. The 200 W version provides sufficient power to ensure optimum performance of larger 2 turbos. X turbos have full serial communication with TI and may be both configured and report status via TI. acking pump support oth mains and 24 V backing pumps may be controlled by TI. The 200 W version supports the new X1 dry diaphragm pump. or larger vacuum systems both the 0 W and 200 W versions may control mains backing pumps, including XS and up to RV12, via the optional relay box. Relay options The optional external relay box enables mains backing pumps to be controlled and also provides interfaces for a turbo heater band, a backing line isolation valve and a logic bypass. ll relay boxes include a logic bypass facility for further system integration. Simple system configuration In most instances, TI systems may be simply and quickly configured using the range of standard cables on offer, there is therefore no need for the customer to prepare loom assemblies or relay boxes and special interfaces. ompact instrument TI is packaged in a compact case and may be panel or rack (¼ 19" rack 3U) mounted. With the addition of the bezel it becomes an attractive bench-top instrument. lear, easy to use graphical user interface The large 128 x 64 pixel backlit graphics L and mobile phone style menu system simplifies programing and with a choice of summary screens excellent visibility of displayed parameters is assured. Universal power supply TI will operate from mains supplies with voltages between 90 and 264 V a.c., and frequencies between 47 and 63 Hz. No user intervention being required. Serial communications To enable complete integration into P and PL controlled processes, all TI variants include RS232 and RS48 interfaces as standard. Windows TM P program TI is supplied with a new Windows TM P program which enables full setup and control from a P using the RS232 interface. Software upgrades s new compatible products are released, TI software may be simply upgraded using the special utility supplied with the Windows TM P program. TI software upgrades will be made available via and the Internet. THNIL T TURO PUMP 24 V TURO PUMP OPTIONS TI VRINT 0 W 200 W XT7X ast ast XT70H & X80 ast ast XT2H & X80* Slow Slow XT2H & X160 N/ ast * Ramp speed is limited by the use of the X80. Logic Interface The logic interface connector includes the functions listed below. It may be used either to link to system relays, a higher-level control system, or an optional relay box. y utilizing the relay box pass-through connector, a combination of a higher-level control system and relay box may be used. ontrol inputs Turbo start/stop* losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. Turbo standby losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. acking pump start/stop* losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. System interlock SYSI losed when low: < 0. V d.c. Open when High: 4 to 24 V d.c. ontrol outputs Vent valve control O/ 24 V d.c. 0 m Heater band control O/ 24 V d.c. 0 m acking pump control O/ 24 V d.c. 0 m ir cooler O/ 24 V d.c. 200 m Status outputs nalog output 0- V d.c. Set point,, O/ 24 V d.c. 0 m Turbo normal speed/alarm O/ 24 V d.c. 0m Serial interface The TI has two built-in communications protocols, RS232 and RS48. These may be used either to interface to a PL or, using the Windows TM P software package supplied connected to a P for full monitoring and control of a TI system. * Start/stop commands are edge triggered.

21 Mains input lectrical supply Power consumption (max) Peak inrush current use arth stud TI TURO ONTROLLR INSTRUMNTS 0 W RS232 TI TURO INSTRUMNTS ONTROLLR 200 W RS to 264 V a.c. 47 to 63 Hz 21 V 30 1 V a.c. 230 V a.c. TI is self-protecting and has no user replaceable fuse. The unit will recover when the overload is removed M4 O WRS uxiliary terminals ir cooling fan Vent Valve Interface cables imensions lectronics housing 24 V d.c. 3 W max, X70, X7 & X20H 24 V d.c. 2 W max, TV & TV6 Use cables as specified in ordering information 1 mm high x mm wide x 24 mm deep 6 mm wide x 128 mm high ront panel Weight TI Turbo controller 0 W RS kg TI Turbo controller 200 W RS kg Operating temperature +0 to +40 Storage temperature -30 to +70 Maximum ambient operating humidity 90% RH non-condensing at 40 Maximum operating altitude 3000 m lectronic design N 6-1 lectromagnetic compatibility N (Industrial Location, lass missions) nclosure rating IP20 ench and rack mounting options (1/4 19" 3U sub rack) O WRS xternal interfaces isplay x 64 pixel backlit graphics L ront panel keypad control functions include: Scroll up button Scroll down button nter/select button Menu/ack button ycle button 21XT TUROMOLULR PUMPS

22 1 2 acking pump 24 V (or mains backing pump support, see below.) 200 W turbo supporting TI variants recognize and control the following 24 V backing pumps: X Relay box (optional) General description range of relay boxes has been developed to allow TI to operate mains backing pumps and accessories. The mains backing pump relay controls a backing line isolation valve, such that when the backing pump is switched off the isolation valve closes. The relay box is connected to the TI via the logic interface connector, which is also provided with a bypass connector for interfacing with OM equipment. Relay box options acking pump 24 V 1-way '' socket * 2 Turbo pump 24 V 1-way '' socket 3 Logic Interface 2-way '' socket 4 RS232/48 9-way '' socket arth stud M4 6 Mains input /I 320 plug 7 Mains on/off switch valve and fan 8 uxiliary vent terminals (24 V) supply 4-way screw term * vailable on 200 W versions only isplay interface ompatible mains backing pumps and accessories Small backing pumps: 2M0.7 & 1., RV3,, 8 & 12, XS &, XS &, SP12 Heater band: X70 & X20 hangeover relays (3 off 20 V a.c. 3 ) Heater band & backing line isolation valve TI Relay ox Small acking pump TI Relay ox Inst & Small acking pump acking line isolation valve: LPV16K & LPV2K 1 2 Small backing pump MINS IN ISOLTION VLV 9 3 TI software is structured through a series of easily accessible screens, similar to a mobile telephone. TI automatically recognizes which turbo connected and displays the appropriate information on the default summary screen. Scrolling and selecting accesses the control and set-up menus for that item. Turbo speed is shown as a proportion of full speed by a bar graph. Norm indicates that the turbo has reached its Normal Speed, whilst forward or reverse facing chevrons indicate acceleration and deceleration. Two levels of password protection are available, effectively restricting or preventing unauthorized intervention. Pump status is displayed, giving a clear indication of what is currently happening in the vacuum system. In the event of an error occurring, TI will display either a WRNING or flash an LRM. warning advises of a condition outside normal parameters, requiring no action, but an alarm must be cleared before normal operation may resume The three setpoint relays, which are highlighted when tripped, may be linked to turbo speed KING PUMP 2 HTR USR TI Mains input /I 320 plug 2 acking line isolation valve 3-way IN socket 3 Logic interface (from TI) 2-way '' socket 4 Logic bypass (to P, PL etc.) 2-way '' socket arth stud M4 6 Heater band fuse 7 Heater band /I 320 socket 8 Mains backing pump fuse 9 Mains backing pump /I 320 socket LOGI INTR 30V MX

23 Windows TM P program TI is supplied with a fully functional Windows TM based P software, which replicates and adds to the TI embedded control menus. The P software enables TI systems to be configured, controlled and monitored from a single P. useful data logging facility is also included, which saves user selectable parameters to file (in.csv format) for later analysis using suitable software. TI system configurations may be created and saved for use at a later date, thus saving programing time. The P software includes an upgrade utility, which enables the TI embedded software to be upgraded over the serial link from files supplied electronically. 23XT TUROMOLULR PUMPS

24 onfiguration examples ITM SRIPTION TI turbo 200 W RS232* m UK mains cable X1 24 V d.c. diaphragm pump XT7X ISO X7 air-cooler X/X/X extension cable 2 m G X/X/X extension cable 2 m (optional) * When using an X1 pump, the turbo should be subjected to a short delay. G 24 G ITM SRIPTION TI turbo cont 200 W RS m UK mains cable TI relay box sml bkg H X1 24 V d.c. diaphragm pump XT7X ISO X70 heater band 240 V 60 W* G TV vent valve H X7 air-cooler J TI logic interface cable 2 m K X/X/X extension cable 2 m L X/X/X extension cable 2 m (optional) M TI RS232 interface cable 2 m (optional) N N/ P with RS232 interface (optional) * or use with water cooled pumps only. N M L K J

25 . onfiguration examples ORRING INORMTION M ITM SRIPTION TI turbo cont 0 W RS m UK mains cable TI relay box sml bkg M1. pump 1-phase XT70H N63ISO-K 24 V X80 24 V G TV vent valve H X7 air-cooler H L G J TI logic interface cable 2 m K X/X/X extension cable 2 m (optional) L TI RS232 interface cable 2 m (optional) M N/ P with RS232 Interface (optional) K J PROUT SRIPTION ontrollers (supplied with manuals & software) TI turbo controller 0 W RS TI turbo controller 200 W RS Relay boxes (supplied with a set of mating connectors) TI relay box small backing ables Mains cables (TI and relay box supply) 2 m UK plug m US plug m Northern uropean plug Mains cables (relay box to RV and XS type pumps) 2 m TI mains cable I320 m/f m TI mains cable I320 m/f Interface cables 2 m TI logic interface cable m TI RS232 interface cable V pump extension cables (use with X, X & X1 type pumps) 1 m X/X/X extension cable m X/X/X extension cable m X/X/X extension cable Other accessories and supporting products TI front bezel kit (spare) XT TUROMOLULR PUMPS

26 XT SSORIS We offer a complete range of accessories and spares for the XT pumps. brief description of each of these items is given below. 1 X IR-OOLR n X air-cooler is used to cool an XT pump when a suitable coolingwater supply is not available or for an XT pump in a mobile pumping system. The X air-cooler is an enclosed electrical fan and fixing bracket assembly which is easily fitted to bolt holes in the base of the pump. The X air-cooler has a 24 V d.c. motor which can be powered and controlled from a rear panel socket on the X/TI ontroller or X pump. It is supplied with 3 m of electrical cable. ORRING INORMTION PROUT SRIPTION TO IT PUMPS X7 XT70, XT70H, XT7X X20 XT20M X20H XT2H, XT2X XH XTH X KOUT N Use a X bakeout band to increase the rate of degassing of the pump body to achieve faster pump down and lower ultimate pressure. akeout bands are only fitted to flanged pumps and/or intended for use in ultra high vacuum systems. akeout bands are available for use with or V a.c. electrical supplies and can be powered from a rear panel socket on the X/ TI ontroller or X pump. It is supplied with 3 m cable and mating 22 connector. ORRING INORMTION 1 Vibration isolator 8 Water-cooler (supplied with pump 2 X akeout band 9 X air-cooler (design varies with pump) 3 Inlet-flange seal (supplied with pump) NW vent-port adaptor 4 Inlet-screen (supplied with pump) 11 TV vent-valve XT pump 12 Vent-port (pump supplied with manual 6 Purge port (NW adaptor fitted) vent-valve) 7 PRX purge-restrictor 13 akeout band position PUMP-TO-ONTROLLR L pump-to-controller cable must be ordered separately for X0 & X20 and is available in 1, 3 and m lengths, to suit your installation, (other lengths are available on request). ORRING INORMTION PROUT SRIPTION 1 m cable m cable m cable PROUT SRIPTION TO IT PUMPS X70, 1 V, 30 W XT70, XT70H, XT7X X70, 240 V, 30 W XT70, XT70H, XT7X X20, 1 V, 60 W XT2H, XT2X, XT20M X20, 240 V, 60 W XT2H, XT2X, XT20M X01, 1 V, 0 W XTH X01, 240 V, 0 W XTH PRX PURG-RSTRITOR The PRX purge-restrictor is used to set the flow-rate of purge gas into the XT pump. ll of the XT pumps (except the XT70 and XT70H) have a purge-port to allow you to purge the motor and bearing cavity with dry nitrogen or another inert gas. it a vent-port adaptor to the purge-port of the XT2H or XT20M pumps to convert it from!/8 inch SP to NNW, before you use the PRX. ORRING INORMTION PROUT SRIPTION PRX purge-restrictor

27 TV VNT-VLV The TV vent-valves are 24 V d.c. solenoid operated valves which you can use to vent your vacuum system with atmospheric air or dry nitrogen when you switch off the XT pump. The valves are supplied with a sintered bronze inlet-filter, a riffled hose connector, 3m of electrical cable and a NNW adaptor. The vent-valves can be powered and controlled from a rear panel socket on the X ontroller. You can either use your TV vent-valve to replace the manual vent-valve supplied with the XT pump, or adapt it to fit any other suitable port on the vacuum system upstream of the turbomolecular pump. or further advice about the choice of TV vent-valve, see page VRX VNT-RSTRITOR it a VRX vent-restrictor to your XT pump if you will vent the pump when the pump speed is above 0% of full rotational speed. The ventrestrictor restricts the flow-rate of the vent gas into the XT pump. You can also use the VRX to replace the standard restrictor supplied with the PRX purge restrictor to obtain a different purge rate.note that the XT20M pump is supplied with a VRX vent-restrictor fitted in the vent and purge ports. You can fit the vent-restrictor to the TV vent-valve, to the vent-port adaptor or directly to the vent or purge port of the XT2H and XT20M pumps. ORRING INORMTION 46 VRX VNT-RSTRITOR ORII IMTR (MM) VRX VRX VRX VRX VRX ORRING INORMTION PROUT SRIPTION TV vent-valve TV6 vent-valve VNT-PORT PTOR This!/8 inch SP male to NNW adaptor can be used to replace the TV vent-valve or the manual vent-valve fitted to the XT pumps. It allows the threaded vent-port on the pump (and the threaded purge-port on the XT2H, XTH and XT20M) to be converted to a NNW flange. The vent-port adaptor is supplied with a removable flow-restrictor and an O ring to seal the adaptor to the pump. ORRING INORMTION PROUT SRIPTION Vent-port adaptor VIRTION ISOLTOR vibration isolator can be fitted to the inlet-flange of the XT pump to reduce the transmission of the small amount of vibration generated by the pump to your vacuum system. The vibration isolator has two flanges separated by a flexible stainless steel bellows and an outer rubber antivibration collar. The vibration isolator is designed for use with vertically mounted pumps only. ORRING INORMTION TO IT PUMP INLT-LNG N63 N63ISO-K N0ISO-K N160ISO-K N0 N XT SPRS ach XT pump is supplied with an inlet seal, inlet screen and water cooler (with the exception of X pumps). These items may also be ordered as spares. ORRING INORMTION PROUT SRIPTION PUMP TYP Inlet flange seals N40NW o-seal, fluoroelastomer N0NW o-seal, fluoroelastomer ISO63 Trapped O ring, fluoroelastomer ISO0 Trapped O ring, fluoroelastomer ISO160 o-seal, fluoroelastomer 63 copper compression gasket (pack of ) 0 copper compression gasket (pack of ) 160 copper compression gasket (pack of ) ISX inlet-screen TO IT INLT LNG SIZ ISX63/4 XT70, XT70H N63ISO-K, N ISX0/6 XT70, XT70H, N0ISO-K, 8001 XT2H, XT2X, N0 XT20M ISX63/4 XT7X N63ISO-K, N ISHX160/8 XTH N160ISO-K, N ISHX160/8 XTH N160ISO-K, N WX water-cooler WX20M XT20M WX00 XT70, XT70H, XT2H, XT7X, XT2X WXH XTH XT TUROMOLULR PUMPS

28 XPT 1 N 2 PUMPING STTIONS Our new range of XPT pumping outfits brings added flexibility with our successful TI Turbo and Instrument ontrollers. large selection of backing and turbo pumps are available in combination with TIs and accessories to suit a wide variety of applications such as: UHV systems eam lines Load locks Surface science High energy physics eatures & benefits ully assembled and ready to use System start/stop from control panel ontrol of both the turbo pump and gauges* from the integrated TI Serial communication control available with RS232 and RS48 ry pumping options with X1, XS and XS XPT1 - ase plate with XT70H turbo pump and X1 diaphragm pump with TI. ORRING INORMTION This information applies to our UK-made turbo casts. or US-made turbo casts, please contact our national sales centre at Turbomolecular pump M XT70X N XT2X Y XT70H Z XT2H lange type 1 N40NW 2 N63ISO-K 3 N63 4 N0ISO-K N0 acking pump 1 2M M1. 3 RV3 4 RV RV8 6 RV12 X1 XS XS Mounting 1 XPT1 2 XPT2 28 XPT2 - ase plate with XT2H turbo pump and XS scroll pump with TI. T or North merica and razil, see photos below. ontact our National Sales entre at Please note, these cart systems are available in North merica & razil only. ll other territories, see information above. Instrumentation Turbo control only 0 W 1 Turbo and instrument control 0 W 2 Turbo control only 200 W 3 Turbo and instrument control 200 W 4 acking pump accessories None 0 M mist filter 1 L20K foreline trap 2 astors astors + silencer 8 Turbomolecular pump accessories None 0 TV vent valve 1 LPVK backing isolation valve lectrical supply V 0/60 Hz (urope) V 0/60 Hz (US) 2 0 V 0/60 Hz (Japan) V 0/60 Hz (UK) 4 * Gauges and cables to be ordered separately. Not all combinations are permissible. Please consult your regional O dwards centre. Units are supplied with integral air cooler. Please refer to working instructions or your regional O dwards center for compatible gases.