TURBOVAC i Turbomolecular pumps

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1 TURBOVAC i Turbomolecular pumps

2 A giant leap in vacuum performance! It as never been so easy to improve your processes until now. TURBOVAC (T) i will allow you to optimize pump down times and consistently it your target in terms of pressures and gas flows. Designed to offer te best performance/size ratio in te ISO 100 and 160 size range, tey feature a cutting edge rotor and drag stage design resulting in ig performance and unparalleled pumping speed, especially for ligt gases. Not only does te flexibility of te rotor and drag stage design offer bencmark performance, it also ensures tat te performance of your pump is perfectly adapted to your specific application. In addition, you can also coose between different electronic control options, various ousing and flange configurations as well as a wide range of accessories. Te unique maintenance and oil free ybrid bearing system will boost your productivity and reduce cost of ownersip. Te result: a vacuum system operation wic is more efficient tan ever! Advantages at a glance Price & Performance: Best performance for your investment Flexible & Fast: Hig level of product flexibility a perfect matc for your application requirements Plug & Play: Simple and easy installation, operation and control tanks to flexible product design, integrated electronics and wide range of communication interfaces Fit & Forget: Superior reliability due to an innovative pump and bearing design wic offers te only maintenance and oil free ybrid bearing pump in te market 02 TURBOVAC i

3 Typical applications Analytical tecnologies/ Researc & Development Mass spectrometry Electron microscopy Surface analysis X-ray analysis Particle accelerators and syncrotrons Laboratory coating systems MBE (Molecular Beam Epitaxy) UHV systems Life Sciences Proton terapy Gamma sterilization Production of ig quality implants Industrial and coating applications PVD (Pysical Vapour Deposition) - Optical coatings - CD/DVD/Blu-Ray disc production - Tin film tecnologies, potovoltaics Load locks, transfer cambers, andling systems Electron beam welders Insulation vacuum and leak detection TURBOVAC i 03

4 Performance you can rely on Tanks to its variable rotor and drag stage design, te new TURBOVAC i line provides te rigt performance for different applications: For UHV applications and compact pump system solutions, TURBOVAC 350 i and 450 i are te products of coice. Wit a ligt gas pumping speed of up to 60% above current reference products and compression values around 100 times iger tan previous generation products, tey are especially suitable for operation wit small backing pumps. Your benefits: a considerably smaller vacuum system, lower initial and operating costs and a more compact footprint. Wen it comes to demanding process and ig gas trougput applications, TURBOVAC T 350 i and T 450 i deliver unequaled efficiency wit faster run up times and increased gas trougput. Superior reliability Te unique maintenance and oil free ybrid bearing system is caracterized by its extreme reliability and durability. Tis is acieved by an integrated lifetime lubrication system tat never needs an oil cange. Te simply-supported saft system results in a low vibration pump design wic reduces noise, mecanical stress and negative impact on vibration sensitive applications. Optimized cooling of te bearings is ensured troug termal isolation and a igly efficient motor. Te pump is also equipped wit a purge port tat protects te bearings from critical gases and particles. As a result, te up-time and lifespan of te pump as well as your productivity are increased considerably. In combination wit low costs of ownersip, your vacuum system will be more efficient tan ever. 04 TURBOVAC i

5 Countless options Te TURBOVAC i family offers numerous options to meet all of your application s requirements. Bot models (350 i and 450 i) are available wit an additional interstage port tat will allow you to pump down a second camber. In order to reac te igest possible level of comfort during installation, operation and control, TURBOVAC i offers features suc as a rotatable fore-vacuum flange connection, an integrated electronic drive wit 24/48V DC supply and an operator interface wit USB, RS485 and digital I/O connections. Addition al interface options are available on demand. A flexible and wide accessory program completes te new product range. It includes cost-efficient power supplies for V mains supply (as onboard or stand-alone units), adjustable air or water cooling units, eaters, venting and purge accessories as well as installation and mounting kits to simplify pump installation. Discover infinite possibilities wit te flexibility of TURBOVAC i. TURBOVAC i 05

6 More in it for you... Performance Industry-leading pumping speed especially for ligt gases (up to 60% iger tan existing products) Optimized rotor diameter for ISO 100 and 160 flanges to provide maximum pumping performance Flexibility Vacuum port design flexibility Rotatable fore-vacuum port Interstage port options Variable rotor and drag stage configurations for perfect matc to application requirements Installation, operation and control Integrated 24/48V DC drive electronics to avoid expensive cabling Widest range of communication interfaces: USB, RS485 and remote 15 pin digital I/O as standard options Higly efficient motor Termal isolation by design for optimized cooling of bearing and improved pump lifetime Simply-supported saft reduces vibration Maintenance free upper passive magnetic bearing Oil free, lifetime lubricated lower mecanical ceramic ball bearing, field-replaceable 06 TURBOVAC i

7 ... get more out of it Best performance for your investment Flexible performance adaptation tailor-made to perfectly meet your requirements Outstanding performance for all applications tanks to innovative tecnology Hassle-free installation, operation and control Plug & Play: integrated electronics, communication options and flexible accessories Installation in any orientation Increased productivity and system uptime at lowest cost Superior reliability tanks to innovative pump and bearing design Fit & Forget: first and only maintenance free ybrid mecanical TMP no need for oil canges Possibility of on-site bearing replacement reduces cost of ownersip and downtime TURBOVAC i 07

8 Tecnical specifications TURBOVAC 450 i Pumping speed (l/s) Pumping speed (l/s) TURBOVAC 350 i Ø Hig-vacuum pressure (mbar) 10 Ø Hig-vacuum pressure (mbar) Nitrogen Argon Helium Hydrogen 100,7 G 1/ ,7 5, PURGE DN 25 KF ,4 G 1/8" 232 P DN 2 PU DN ,8 18,8 216 G 1/8" , ,7 0,8 232 G 1/8" PURGE DN 25 KF 216 TURBOVAC (T) 450 i G 1/8" Ø PURGE DN 25 KF Ø Ø ,4 TURBOVAC (T) 350 i G 1/8" Ø ,8 G 1/8" P

9 Tecnical specifications Tecnical data TURBOVAC 350 i 450 i T 350 i T 450 i Hig-vacuum connection DN Fore-vacuum connection DN 25 KF 25 KF 25 KF 25 KF Pumping speed for I s -1 N Ar He H Gas trougput mbar I s -1 N Ar He H Compression ratio N Ar He H Ultimate pressure / wit mbar < 10-8 /< stage oil-sealed rotary vane pump Max. permissible mbar fore-vacuum pressure for N2 Operating speed rpm Cooling standard Convection Cooling optional Air or water Weigt / kg 7.5/ / / /12.0 Recommended fore-vacuum pumps TRIVAC D 4 B D 4 B D 16 B D 16 B SCROLLVAC SC 5 D/15 D SC 5 D/15 D SC 15 D/30 D SC 15 D/30 D DIVAC 3.8 HV3 3.8 HV3 Supply voltage 24/48V DC ± 10 % Max. current consumption 10A at 24V DC Max. power consumption 240W Interfaces RS 485, USB, 15-pin digital I/O

10 Order information For te operation of a TURBOVAC i, a suitable fore-vacuum pump, a power supply and mains cable are mandatory. Furter accessories migt be required depending on te application and operating conditions. Pumps TURBOVAC 350 i 450 i T 350 i T 450 i Hig-vacuum flange Part Number: V V V V1000 Hig-vacuum flange cf Part Number: V V V V1000 Accessories Power supply, cables and accessories V0003 TURBO.POWER integra V0100 Cable TURBOVAC i TURBO.POWER integra, 1m V0300 Cable TURBOVAC i TURBO.POWER integra, 3m V0500 Cable TURBOVAC i TURBO.POWER integra, 5m V0002 Mains cable, 3m, Euro plug V0003 Mains cable, 3m, UK plug V1002 Mains cable, 3m, US plug 5-15P, 115V V /48 V DC-in plug TURBOVAC i V0021 Start-stop switc TURBOVAC i Cooling V0005 Air cooling TURBOVAC 300 i radial V0006 Air cooling TURBOVAC 300 i axial V0005 Water cooling TURBOVAC 300/400 i Heating V0005 Flange eater DN 100, 230V V0006 Flange eater DN 100, 115V V0007 Flange eater DN 160, 230V V0008 Flange eater DN 160, 115V Headquarter Germany Oerlikon Leybold Vacuum GmbH Bonner Straße 498 D Köln T +49 (0) F +49 (0) info.vacuum@oerlikon.com Venting and Purge 8001V0012 Vent valve TURBOVAC i, 24V DC, G 1/8 8001V0013 Purge gas valve TURBOVAC i, 24V DC, 24 sccm, G 1/8 8001V0014 Purge gas restrictor TURBOVAC i, 24 sccm, G 1/8 8001V0022 Power failure vent valve TURBOVAC i, 24V DC, G 1/ V0022 Air filter for TMP, G 1/8 Installation V0021 Coarse inlet screen DN V0022 Splinter guard DN V0031 Coarse inlet screen DN V0032 Splinter guard DN V0021 Centering ring w. coarse inlet screen DN 100 /F V0022 Centering ring w. splinter guard DN 100 /F V0031 Centering ring w. coarse inlet screen DN 160 /F V0032 Centering ring w. splinter guard DN 160 /F V00 Mounting kit TURBOVAC DN V0021 Mounting kit TURBOVAC DN V0025 Mounting kit TURBOVAC DN 100 to ISO-F V0030 Mounting kit TURBOVAC DN V0031 Mounting kit TURBOVAC DN V0035 Mounting kit TURBOVAC DN 160 to ISO-F reinfaktor Printed in Germany on clorine-free bleaced paper Tecnical alterations reserved

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