Linear Alignment. motion. 2 Flexible combination of XY. 4 High resolution and high responsiveness. accuracy. Optical linear encoder scale head

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1 SADE SADE/X SADE/S 2 2

2 Alignment Stage SA Linear motor drive SA DE Crossed roller bearing -table Linear Alignment Points 1Compact XY-table motion. Using a Linear Way L miniature linear motion rolling guide in the linear motion guiding parts and Crossed Roller Bearing in the rotation guiding parts respectively and adopting direct drive method in the drive section, this is an alignment stage for achieving low profile and compact XY Moving magnet Mechanical stopper 2 Flexible combination of XY XY-axis can be easily configured. X-table for linear movement and -table serving as rotary positioning section are listed on lineup as basic configuration. Combination of and -axis and alignment table for Thin and compact Coreless linear motor, Linear Way L and Crossed Roller Bearing are adopted. As compared with ball screw-driven stage, extremely low profile is achieved. Stator coil X-table Credit card Moving magnet XY-axis XY-axis Stator coil Major product specifications Driving method Linear motor Linear motion rolling XY-axis: Linear Wayball type guide and bearing -axis: Crossed Roller Bearing Lubrication part "C-Lube" is built-in Lubrication -axis is not included. Material of table and bed High carbon steel Sensor Provided as standard Accuracy Positioning repeatability Positioning accuracy Lost motion Parallelism in table motion A Parallelism in table motion B Attitude accuracy Straightness Backlash Linear Way Optical linear encoder scale head Mechanical stopper XY-axis: ± axis: ±0. 1. sec unit: mm 4 High resolution and high responsiveness accuracy. Driving conditions Command speed Performing full-closed loop control of direct drive-type stage with high resolution linear encoder built-in has achieved high resolution and high Speed Acceleration / deceleration time Stroke Carrying mass Enables high-speed positioning against command! Alignment Stage SA specification list Model and size Sectional shape Maximum thrust Rated thrust Maximum load mass Effective stroke length Resolution Maximum speed N N kg mm m mm/s Positioning repeatability m Speed mm/s 0.1 SADE/X SADE/X SADE/S SADE/S SA200DE/S Positioning complete signal 0. 1 Time s Actual speed Measuring condition Carrying mass Feeding command Max. torque 0.N m Rated torque 0.0N m 2.2 Effective operating angle 0degree 0.4sec 2pulse/deg 720deg/sec 1.44 sec Securely makes a step for minute feeding!! Max. torque 2.0N m Rated torque 0.4N m.8 Effective operating angle 0degree 0.sec 000pulse/deg 400deg/sec Max. torque 4.0N m Rated torque 1.2N m 12. Effective operating angle 280degree 0.2sec 14400pulse/deg 270deg/sec ±0. ±0. ±1.sec ±0.8sec ±0.sec 22 Traveling distance sec Traveling time s SADE/X SADE/S 27 1mm=0.097inch 28

3 Identification Number 1 2 Example of an Identification Number SA DE / XYS R 2 Model Size Page -270 Page -270 Identification Number and Specification Model Size Resolution Axial configuration SADE: Alignment Stage SA :, :, 200: 200 1: 0.1m : 0.m Specify the resolution of the encoder for or XY-axis. When selecting only S: -axis in the entry of section 4, set "No symbol" for the resolution. Select an axial configuration from the list of Table 1. Resolution Page -270 Table 1 Axial configuration and application Axial configuration SADE SADE SA200DE 4 Axial configuration Surface treatment Specification number Page -270 Page -270 Page -270 X : Only S : Only -axis XY : XY -based two-axis configuration XS : X -based two-axis configuration XYS : X, Y, and -based three-axis configuration Surface treatment Specification number No symbol : Electroless nickel plating R : Black chrome surface treatment Surface treatment is performed on the surfaces of table and bed. 2: Specification number 2 The specification number is limited to 2. SADE/X SADE/S 29 1mm=0.097inch 270

4 Specifications Table 2.1 Specification / Performance Item Identification number SADE/1X SADE/X SADE/1X SADE/X Maximum thrust 1 N 2 70 Rated thrust 2 N. 1 Effective stroke length mm 20 Maximum load mass kg Resolution m Maximum speed mm/s Positioning repeatability 4 m 0. Mass of moving table kg Total mass kg Ambient temperature and humidity in operation %RH keep dewdrop free Notes 1 The duration of maximum thrust is up to 1 second. 2 This is based on the case of mounting on a metal mating member material at an ambient temperature of 20. For the case of exceeding the displayed speed, please contact. 4 When the temperature of the product is constant. Mass of the cord is not included. Sensor Specification Table.1 Sensor timing chart for SADE/X () Table 2.2 Specification / Performance Item Identification number SADE/S SADE/S SA200DE/S Maximum torque 1 Nm Rated torque 2 Nm Maximum load mass kg Effective operating angle degree Resolution sec pulse/degree Maximum speed degree/sec Positioning repeatability 4 sec Inertia moment of moving kgm table Total mass kg 0. 2 Ambient temperature and humidity in operation %RH keep dewdrop free Notes 1 The duration of maximum torque is up to 1 second. 2 This is based on the case of mounting on a metal mating member material at an ambient temperature of 20. For the case of exceeding the displayed speed, please contact. 4 When the temperature of the product is constant. Mass of the cord is not included. Dynamic load mass kg XY axis Acceleration m/s 2 SADE/X SADE/X Fig. 1 Dynamic load mass Remark: Dynamic load mass of -axis is a value calculated as cube of steel. And, the acceleration is converted as value of stage periphery. Dynamic load mass kg axis Peripheral acceleration m/s 2 SA200DE/S SADE/S SADE/S E C A Model and size A B C D E F SADE/X SADE/X Remarks 1. Respective values are for reference and are not guaranteed values. For detailed dimensions, please contact. 2. For the specifications of respective sensors, please see the section of sensor specification in General Explanation. B Effective stroke lengthd F Origin Pre-origin direction limit direction limit Mechanical stopper unit: mm SADE/X SADE/S 271 1mm=0.097inch 272

5 Sensor Specification Table.2 Sensor timing chart for SADE/S (-axis) System Configuration There are dedicated driver for alignment stage SA, and the system configuration is shown in Table 4. For the driver specification, please see the section of driver specification on Page 27. When you place an order, please specify desired identification numbers from the list of Table 4. Table 4 System configuration Teaching box TAEM-TB Programmable controller CTN481G Driver Alignment stage SA CCW CW PC interface 1 D Model and size A B C D E SADE/S 4 11 SADE/S SA200DE/S Remarks 1. Respective values are for reference and are not guaranteed values. For detailed dimensions, please contact. 2. For the specifications of respective sensors, please see the section of sensor specification in General Explanation. A Effective operating anglec B E Origin Pre-origin CCW limit CW limit Mechanical stopper unit: degree Model and size Driver cord extension cord relay cord Pulse cord and limit cord RS22C cord SA DE/X TDL1-0/0L TAE20Q4-EC TAER-LD TAE2089-RSP Dsub2-pin SA DE/S TDL1-0/0S TAE2088-EC TAER-LD TAE2090-RSD Dsub 9-pin SA DE/XY TDL1-0/0L2 TAE20Q4-EC2 TAER-LD2 SA DE/XS SA DE/XYS TDL1-0/0L TDL1-0/0S TDL1-0/0L2 TDL1-0/0S TAE20Q4-EC TAE2088-EC TAE20Q4-EC2 TAE2088-EC TAER-LD2 TAER-LD TAE2089-RSP Dsub2-pin TAE2090-RSD Dsub 9-pin 2 TAE2089-RSP Dsub2-pin TAE2090-RSD Dsub 9-pin SADE/X TDL1-0/12L TAE2088-EC TAER-LD TAE2089-RSP Dsub2-pin SADE/S TDL1-0/12S TAE2088-EC TAER-LD TAE2090-RSD Dsub 9-pin SADE/XY TDL1-0/12L2 TAE2088-EC2 TAER-LD2 SADE/XS SADE/XYS TDL1-0/12L TDL1-0/12S TDL1-0/12L2 TDL1-0/12S TAE2088-EC2 TAER-LD2 TAE2088-EC TAER-LD SA200DE/S TDL1-0/20S TAE2088-EC TAE20K-MC0 TAEV7-LC0 TAER-LD TAE2089-RSP Dsub2-pin TAE2090-RSD Dsub 9-pin 2 TAE2089-RSP Dsub2-pin TAE2090-RSD Dsub 9-pin TAE2089-RSP Dsub2-pin TAE2090-RSD Dsub 9-pin Note 1 XY-axis of SADE is not provided with an encoder interface. Remarks 1. The lengths of encoder cord, motor extension cord, and limit relay cord are m. 2. The lengths of pulse cord and limit cord are 1.m.. The length of RS22C cord is 2m. 4. For details on inter axial cable placed between drivers when using SADE in plural axes, please contact. SADE/X SADE/S 27 1mm=0.097inch 274

6 Driver Specification Alignment Stage SA This device can be controlled by PC using RS22C interface. Adding optional mail box (automatic execution program area) enables automatic operation of only driver without placing a load on the host side such as PC. If needed, please contact. This device can be connected to external devices through sequence I/O, thus allowing you to configure the system with programmable controller CTN480G used SADE/X Cord length: M2. Depth Table Driver specification Item Model number TDL1-0 1 Main power supply AC81V 0/0Hz Continuous rated current 0.7A Max. momentary current 4A Output limitation Current feedback, overheatmotor, driver, thrust force control, servo off, forward direction movement disabled, backward direction movement disabled PWM carrier frequency 40kHz Ambient temperature 040 Radiation fin temperature 70 maxoverheat cutting type Command input Forward direction / backward direction pulse, position command pulse / direction command or A / B phase MHz max A / B phase is at 2.MHz input format Two phase incremental encoder Line driver Response speed 1.m/s maxat resolution of 0.m, 1.0m/s maxat resolution of 0.1m Sequence input Servo on, forward direction movement disabled, backward direction movement disabled, gain LOW, reset, operation Origin signal output Origin position, pre-origin position Sequence output Servo ready, positioning complete, alarm Parameter key 4 keys (digit selection, increment, data / parameter, write) Data display LED 7-segment digits, output current / Parameter / Error code, etc. Parameter itemnon-volatile memory Resolution, mode, electronic gear, gain, positioning complete, electric origin, acceleration filter, etc. Analog monitor 2 channels present speed, output current Vibration, shock Vibration 0.G, Shock G 1time MassRef. 1.2kg Note 1 Small type TDL1-1 is also available. For detailed information, please contact. SADE/S 4-M Depth 4Table 1 Cord length: ccw Note 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer cw M Depth 4 1 evenly distributed Hole for 4-M 22 Hole for 4-M SADE/X SADE/S 27 1mm=0.097inch 27

7 SADE/XY Alignment Stage SA SADE/X 4-M2. Depth M4 Depth 1 4-M Depth 4table 1 7. Y-axis Hole for 4-M SADE/XS Depth 20 -axis CCW CW 4-M Depth 4 1 evenly distributed 4-M Depth 4 1 evenly distributed Hole for 4-M SADE/S SADE/XYS Depth 20 -axis CCW CW 4-M Depth 4 1 evenly distributed M Depth 4 1 evenly distributed Hole for 4-M M4 Depth 8 1 evenly distributed axis ccw cw Note 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer Hole for 4-M SADE/X SADE/S Y-axis Note 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer Remark: For the cable length, please see the dimension tables for SADE/X and SADE/S Hole for 4-M 1mm=0.097inch 278

8 SADE/XY Alignment Stage SA SA200DE/S 8-M4Depth axis ccw cw Y-axis M Depth 1 evenly distributed 140 SADE/XS 88 1 Hole for 4-M axis CCW CW Depth M4 Depth 8 1 evenly distributed 90 1 Note 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer SADE/XYS Depth M4 Depth 8 1 evenly distributed axis CCW CW Y-axis Hole for 4-M4 Note 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer Remark: For the cable length, please see the dimension tables for SADE/X and SADE/S Hole for 4-M4 interface Connector Fixing bracket provided 2.9 Hexagon socket button bolt M4 is recommended. not provided SADE/X SADE/S 279 1mm=0.097inch 280