Equipment Series Application Page ejector In-line vacuum ejector Multistage ejector ejector with check valve Pad with check valve ejector for water soluble coolant removal ZH ZU ZL1/2 (Special order product) (Special order product) (Special order product) Liquid removal Liquid removal Liquid removal 140 142 143 148 149 150 Equipment 9
Ejector Box Type (with Built-in Silencer) Body Ported Type Series ZH Liquid Removal ø0.5, ø0.7, ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 Type S: Standard L: High flow capacity Compact and Lightweight Composite resin nozzle and body for compact and lightweight construction ø0.5 28g Box type (with built-in silencer) and body ported type Two types are available in the series: Box type with silenced exhaust and body ported type with individual exhaust. SUP EXH AC Body can be mounted and secured Mounting holes for securing the body are provided for body ported type also. and threaded connections can be combined Depending on the operating conditions, port connections can be combined with a choice of and threaded connections. Silenced exhaust Common exhaust type Mounting holes s and Specifications Nozzle diameter mm ZH05B 0.5 ZH07B 0.7 ZH10B 1.0 ZHB 1.3 ZH05D 0.5 ZH07D 0.7 ZH10D 1.0 ZHD 1.3 ZH15D 1.5 ZH18D 1.8 ZH20D 2.0 Body type Box type (with built-in silencer) Body ported type (without silencer) Body ported type (without silencer) Maximum vacuum pressure Maximum suction flow l/min (ANR) Air consumption l/min (ANR) (kpa) S type L type S type L type S type/l type 5 8 88 48 20 23 24 34 46 40 5 70 8 78 88 48 20 23 24 34 46 88 53 40 55 65 85 70 75 110 5 78 95 150 185 Connection (/) SUP AC EXH ø8/rc 1/8 ø8/rc 1/8 ø16/rc 1/2 ø8/rc 1/8 ø16/rc 1/2 Weight (g) 28 28 33 66 11 16 27 43 55 95 Supply pressure: 0.45MPa. 140
Ejector Box Type (with Built-in Silencer)/Body Ported Type Series ZH Note) Refer to tables q and w below for SUP/AC/EXH port connection combinations and port sizes. Box Type (with Built-in Silencer) Body Ported Type (without Silencer) ZH 07 B S 06 06 ZH 07 D S 01 01 01 05 07 ø0.5mm ø0.7mm 10 ø1.0mm ø1.3mm 15 ø1.5mm 18 ø1.8mm 20 ø2.0mm Maximum vacuum pressure S L -88kPa -48kPa SUP port size Note) Symbol Size Type 06 ø6 08 ø8 10 ø10 ø 01 Rc 1/8 02 Rc 1/4 03 Rc 3/8 EXH port size Note) Symbol Size Type 06 08 10 16 01 02 03 04 ø6 ø8 ø10 ø ø16 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AC port size Note) Symbol Size Type ø6 ø10 ø ø16 06 10 16 01 02 03 04 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Table q Connection combinations Body type Box type (with built-in silencer) Body ported type (without silencer) q w e q w e SUP AC EXH Table w Port sizes ZH05B ZH07B ZH10B ZHB ZH05D ZH07D ZH10D ZHD ZH15D ZH18D ZH20D Connection (one-touch/threaded) SUP AC EXH ø8/rc 1/8 ø8/rc 1/8 ø16/rc 1/2 ø8/rc 1/8 ø16/rc 1/2 Equipment 141
In-line Type Ejector Series ZU Liquid Removal Space-saving ejector that can be installed in-line with the piping Body EXH Diffuser : ø0.5, ø0.7 Type S: High vacuum L: High flow capacity SUP fitting fitting AC port and supply port are aligned in a straight line to facilitate piping Lightweight construction achieved through the use of a resin body ø0.5: 6.5g ø0.7: 7.0g The white color matches bright operating environments Built-in fittings (copper free) ZU 05 S Maximum vacuum pressure S 85kPa L 48kPa Specifications 05 ø0.5mm 07 ø0.7mm Fluid Maximum operating pressure Standard supply pressure Operating temperature range Applicable tube O.D. Air 0.7MPa 0.45MPa 5 to 60 C SUP port: ø6, AC port: ø6 s Type Nozzle diameter ø (mm) Maximum vacuum pressure (kpa) Maximum suction flow l/min (ANR) Air consumption l/min (ANR) Weight (g) High vacuum ZU05S ZU07S 0.5 0.7-85 -85 7 9.5 19.0 6.5 7.0 High flow capacity ZU05L ZU07L 0.5 0.7-48 -48 21 9.5 19.0 6.5 7.0 Supply pressure: 0.45 MPa 142
Multistage Ejector Series ZL1/2 Energy saving, high flow rate, 3-stage diffuser construction Suction flow rate increased 250% and air consumption reduced 20% with 3-stage diffuser construction (ersus ø1.3, one-stage model) pressure 1-stage performance Series ZL2 Q1 Q2 Q3 Q1 Q2 Q3 2-stage performance 250 % suction flow rate increase 3-stage performance Suction flow rate Diffusers stacked and integrated Compact size and high flow rate (twice the flow rate of the ZL1) Maximum suction flow rate Air consumption l/min (ANR) l/min (ANR) ZL1 100 ZL2 200 63 6 Series ZL1 valve option now available (ZL1 only) Release valve Supply valve pressure sensor With digital vacuum pressure switch Release flow rate adjustment needle fitting feature Simplifies piping work (ZL1 only) Exhaust port options Built-in silencer SMC PRESSURE SWITCH SMC PRESSURE SWITCH SMC PRESSURE SWITCH RESET SET LCD display/zse4 With vacuum adapter RESET SET LCD display with back light/zse4b With vacuum pressure gauge UNIT RESET SET LED display/zse4e Ported exhaust Equipment Series variations Series Maximum suction flow rate l/min (ANR) Air consumption l/min (ANR) Exhaust port Built-in silencer Ported exhaust With valve With With supply valve/ release valve supply valve pressure sensor options Digital vacuum pressure switch pressure ZSE4E ZSE4B ZSE4 gauge adapter ZL1 100 63 ZL2 200 6 143
Series ZL1/2 Without valve With valve ZL1 ZL1 K1 5 M Z E 25 ø1.2mm Exhaust specification K1 K2 P Built-in silencer Ported exhaust Exhaust port thread specification (ported exhaust only) F N T Rc 1/2 G 1/2 1/2-14NPT 1/2-14NPTF Supply valve/release valve combination With supply and release valves With supply valve G H L LN LO M MN MO 5 6 S R AC specifications (50/60Hz) 1 100AC 2 200AC 3 110AC [115] 4 220AC [230] Grommet Rated voltage DC specifications 24DC DC 6DC 5DC 3DC L type plug connector M type plug connector Electrical entry Lead wire length 0.3m Lead wire length 0.6m Lead wire length 0.3m Without lead wire Without connector Lead wire length 0.3m Without lead wire Without connector D Digital vacuum pressure switch specification For E (ZSE4) EB (ZSE4B) 25 26 65 NPN output Analog output PNP output Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m For EE (ZSE4E) 27 26 67 NPN output Analog output PNP output Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required when none (), vacuum adapter (GN) or vacuum pressure gauge (G) is specified for vacuum pressure sensor. pressure sensor GN G E EB EE Manual override L None adapter Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E Non-locking push type Push-turn slotted locking type Lead wire length 0.5m 2.9m Indicator light/surge voltage suppressor S Z U Without indicator light/surge voltage suppressor With surge voltage suppressor With indicator light/surge voltage suppressor With indicator light/surge voltage suppressor (non-polar type) Note 1) Type "U" is for 24 or DC only. Note 2) Since surge voltage is prevented by a rectifier in the case of AC, there is no "S" type. 144
Multistage Ejector Series ZL1/2 Series ZL1 Standard type Ejector Specifications Maximum suction flow rate Air consumption Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range ZL1 ø1.2mm 100l/min (ANR) 63l/min (ANR) 84kPa 0.7MPa 0.2 to 0.5MPa 0.4MPa 5 to 50 C With valve Supply/Release alve Specifications With vacuum pressure gauge Adapter Ported exhaust Part Number Type of actuation Fluid Operating pressure range Internal pilot type Ambient and fluid temperature Response time (for 0.5MPa) Note 1) Maximum operating frequency Manual operation Pilot exhaust type Lubrication Mounting orientation Impact/ibration resistance Note 2) Enclosure Option Specifications pressure gauge specifications Part number Fluid Pressure range Scale range (angular) Accuracy Class Operating temperature range Material SYJ514- N.C. Air 0.2 to 0.5MPa 5 to 50 C 25ms or less 5Hz Non-locking push type, Push-turn slotted locking type Pilot valve individual exhaust type, Main valve/pilot valve common exhaust Not required Free 150/30m/s² Dust proof Note 1) Based on JIS B8374-1981 dynamic performance test (coil temperature 20 C, at rated voltage, without surge voltage suppressor) Note 2) Impact resistance: No malfunction when tested with a drop tester in the axial direction and at a right angle to the main valve and armature, one time each in both energized and de-energized states. (initial value) ibration resistance: No malfunction when tested with one sweep of 8.3 to 2000Hz in the axial direction and at a right angle to the main valve and armature, one time each in both energized and de-energized states. (initial value) Note 3) Refer to CAT.E143-B "SYJ300/500/700" for details on valves. GZ30S Air -100 to 100kPa 230 ± 3% F.S. (full span) Class 3 0 to 50 C Case: Polycarbonate/ABS resin Equipment Symbol Standard type P 145
Series ZL1/2 Option Specifications With digital vacuum pressure switch (ZSE4) Digital vacuum pressure switch specifications Part number ZSE4-00- -X105 ZSE4B-00- -X105 ZSE4E-00- -X105 Display LCD LCD with back light LED Pressure setting range -101 to 10kPa (-760 to 75mmHg) Maximum operating pressure 200kPa Indicator light OUT1: Green (lights up when ON) Green OUT2: Red Response frequency 200Hz (5ms) Hysteresis mode ariable (3 digits or more) ariable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature characteristics ±3% F.S. or less Repeatability ±1% F.S. or less Operating voltage to 24DC (ripple ±10% or less ) Current consumption -26, -27: 50mA or less 25mA or less 45mA or less -67: 60mA or less Pressure indication 3 1/2 digits (character height 8mm) Self diagnostic function (Overcurrent Note) ), Excess pressure, Data error, Presence of pressure at zero clear Operating temperature range 0 to 50 C (with no condensation) Noise resistance 500p-p, Pulse width: 1µS, Start up: 1nS Withstand voltage 1000AC 50/60Hz for 1 min. between external terminal block and case Insulation resistance 2MΩ (at 500DC) between external terminal block and case ibration resistance 10 to 500Hz at whichever is smaller, amplitude 1.5mm or acceleration 10G, in X, Y, Z directions for 2hrs. each Impact resistance 100G in X, Y, Z directions, 3 times each Note) Not available on analog output type. Refer to CAT.E824-A "Pressure Switch" for details on switches. Output specifications -25 (L) 1 output, NPN open collector 30, 80mA or less ZSE4-26 (L) Analog output (1 to 5) ZSE4B -67 (L) 1 output, PNP open collector 80mA or less -26 (L) Analog output (1 to 5) ZSE4E -27 (L) 2 outputs, NPN open collector 30, 80mA or less -67 (L) 2 outputs, PNP open collector 80mA or less Refer to CAT.E824-A "Pressure Switch" for details on switches. 146
Multistage Ejector Series ZL1/2 Standard type ZL2 ø1.2mm Lead wire length L 0.5m 2.9m With vacuum pressure gauge Exhaust specification P Built-in silencer Ported exhaust Digital vacuum pressure switch specification With digital vacuum pressure switch GN G E EB EE pressure sensor None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E 25 26 65 27 26 67 For E (ZSE4) EB (ZSE4B) NPN output Lead wire length 0.6 (3.0)m Analog output Lead wire length 0.6 (3.0)m PNP output Lead wire length 0.6 (3.0)m For EE (ZSE4E) NPN output Lead wire length 0.6 (3.0)m Analog output Lead wire length 0.6 (3.0)m PNP output Lead wire length 0.6 (3.0)m Not required when none (), vacuum adapter (GN) or vacuum pressure gauge (G) is specified for vacuum pressure sensor. Ejector Specifications ZL2 ø1.2mm x 2 With adaptor Maximum suction flow rate Air consumption 200l/min (ANR) 6l/min (ANR) Maximum vacuum pressure -84kPa Maximum operating pressure 0.7MPa Supply pressure range 0.2 to 0.5MPa Standard supply pressure 0.4MPa Ported exhaust Operating temperature range Symbol Standard type 5 to 50 C Equipment P 147
Ejector with Check alve ZM 1 -K5LZ-E15L-X142 Special Order Product 88 ZM 1 K 5 L Z E15 L X142 1 85.4 74 70 62 10 1.5 15.5 P 26 30 Supply 5 (stroke) 8 20 30 3-Rc 1/8 80 103 1 (118) ZM 1 K5LZ-E15L-X142 M5 x 0.8 through hole (P.E.) 600 2-ø4.5 Mounting hole Switch type Conforms to the standard product. Electrical entry Conforms to the standard product. Power supply voltage 24DC With air supply valve/ vacuum release valve Standard supply pressure H 0.5MPa M 0.35MPa (except 05) S 0.45MPa (, 15 only) Body type Conforms to the standard product. 05 07 10 15 0.5mm (H type only) 0.7mm (except S type) 1.0mm (except S type) 1.3mm 1.5mm (S type only) Consult P/A for details. ZMM 1 -K5LZ-E15L-X235 4 No. 1 No. 4 No. 2 No. 3 88 SET L HYS H ZM 1 K 5 L Z E15L X235 1 2 3 Connector pin number ø14 Power supply voltage 24DC 1 85.4 74 70 62 1.5 P Supply 26 30 3-Rc 1/8 2-ø4.5 Mounting hole ZM 1 K5LZ-E15L-X235 ø3.4 500 44 M5 x 0.8 through hole (P.E.) With air supply valve/ vacuum release valve Standard supply pressure H M S 0.5MPa 0.35MPa (except 05) 0.45MPa (,15 only) Body type Conforms to the standard product. 10 15.5 20 30 05 0.5mm (H type only) 07 0.7mm (except S type) 10 1.0mm (except S type) 1.3mm 15 1.5mm (S type only) 5 (stroke) 8 80 103 1 (118) 148
I Pad with Check alve Connecting multiple pads to a single ejector is possible. Prevents leakage from pads that are not used for suction of work pieces. Special Order Product 20 INO-3769-2431- U Pad material N: NBR S: Silicon rubber U: Urethane rubber F: Fluoro rubber GN: Conductive NBR GS: Conductive silicon GF: Conductive fluoro rubber Pad configuration U: Flat Pad diameter 06: ø6 (for ZP06, 08U ) 08: ø8 15.5 M6 x 1 Gasket Width across flats 7 End pin Y Pad material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon Conductive fluoro rubber End pin material Fluoro rubber Conductive fluoro rubber INO-3769-1964- C Width across flats 10 Buffer stroke Buffer specification Pad material Pad configuration M5 x 0.8 Pad diameter 10: 10mm 20: 20mm 30: 30mm 50: 50mm J: Without rotation prevention K: With rotation prevention N: NBR S: Silicon rubber U: Urethane rubber F: Fluoro rubber GN: Conductive NBR GS: Conductive silicon rubber C: Plain with rib (for ZP20 to 32C ) 20: ø20 25: ø25 32: ø32 ø1.6 øa øb INO-3769-2431-06U INO-3769-2431-08U A 6 8 B 7 9 Y 0.8 1 5 5 Width across flats 19 M14 x 1 20 INO-3769-2478- U Pad material N: NBR S: Silicon rubber U: Urethane rubber F: Fluoro rubber GN: Conductive NBR GS: Conductive silicon GF: Conductive fluoro rubber Pad configuration U: Flat Pad diameter 06: ø6 (for ZP06, 08U ) 08: ø8 15.5 ø1.6 øa øb M5 x 0.8 Gasket Width across flats 7 End pin Y Pad material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon Conductive fluoro rubber INO-3769-2478-06U INO-3769-2478-08U End pin material Fluoro rubber Conductive fluoro rubber A 6 8 B 7 9 Y 0.8 1 H G E Width across flats D C ø1.2 øa øb 10mm stroke dimensions INO-3769-1964-20C 10 INO-3769-1964-25C 10 INO-3769-1964-32C 10 A 20 25 32 Gasket F Y B 23 28 35 C 14 14.5 D 26.5 27 Dimensions for other strokes Stroke 20mm 30mm 50mm E 42.5 43 F 2.5 2 G 55 55.5 G +10 +20 +40 H 0 0.5 H +4 +14 +59 I 50 Y 1.7 1.8 2.3 I 0 +25 Add an appropriate value from the 10mm stroke dimensions table. Equipment 149
Ejector for Water Soluble Coolant Removal Special Order Product Liquid Removal INO-3971-77-4 25 Supply ø16.5 18 ø18.5 39.5 57.1 21.5 4.1 6.5 ø10 2-ø5.5 37 52 Exhaust ø25 ø 27 Rc 3/8 Supply pressure 0.5MPa pressure -300mmhg Suction flow 320l/min (ANR) Flow consumption 320l/min (ANR) 150