Specifications. Fluid Operating pressure range Proof pressure Operating temperature range Filtration Element proof pressure differential

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Air Suction Filter Series ZFA Prevents vacuum equipment trouble due to airborne contaminants. The collected dust does not remain in the case. Dust is removed easily at the time the filter element is replaced. As a result, the dust does not remain in the case. Compact and lightweight The aluminum alloy case and box-shaped exterior design create a lightweight and compact package. Adaptable for a manifold application Up to units can be linked in a manifold to save space. Large filter element surface The pleat-shaped element provides a large filtering surface so that maintenance can be performed at longer intervals. Easily replaced filter element The filter element can be replaced in a short time without requiring any tools. Mountable in any direction The function of the filter is not affected by its mounting orientation. Specifications Port Recommended air flow (l/min (ANR)) Weight (kg) ZFA 0 1 8 50 0.14 ZFA 1 4 0.19 Fluid Operating pressure range Proof pressure Operating temperature range Filtration Element proof pressure differential Air/Nitrogen Negative pressure 0.5MPa 5 to 60 C 30µm 0.15MPa Note 1) Consult SMC when INLET and OUTLET are to be prepared on the bottom of the case or if a vacuum switch is to be installed on the filter. Note 2) Avoid use under pressurization. Accessories/Options ZFA0 ZFA Note Bracket Assembly BP-1H-1A BP-1H-2A Bracket for manifold (1 to stations) Base Material Cover Case Gasket/Seal Element ZZFA1- Number of station ZZFA2- Number of station Material Zinc die cast Aluminum die cast NBR Polyester, ABS of Element EJ001H-030N EJ1H-030N Applicable filter model ZFA0 ZFA With bolt, nut, washer With bracket, connection bolt, nut, washer, each 2 pcs. Element (mm) 43 X 42 X 12 43 X 40 X 22 ZFA0 ZFA How to Order ZFA 0 01 Air suction filter Applicable filter (Recommended air flow) 0 50 /min (ANR) /min (ANR) Port thread Rc(PT) T NPTF F G(PF) Accessories (Bracket) None L With bracket (1 pc. on the left) R With bracket (1 pc. on the right) L or R shows the left or right of the filter IN when viewed from front. Port Size 01 02 1 / 8 B (ZFA0) 1 4 B (ZFA) How to Order Manifold Indicate both the symbles for air suction filter and bracket for manifold. Example: In case of 6 stations of air suction filter ZFA (single) ZFA0 01 6 pcs. (Brackets for 6 stations) ZZFA1 06 1 pc. Both left and right brackets. -5

Series ZFA Application Example Field Machines Functions Semiconductor/Electronics Related Industry, Automobile Assembly, Food Industry, Medical Instruments, General Assembly Machines. Robot Hand/Material Handling, Automatic Assembly Machine, Automatic Transport Machine, Pick And Place, Printing. Vacuum Adsorption Transporting, Vacuum Adsorption Affixing, Vacuum Generated Air Flow. Flow Characteristics Fluid Air Material Polyester Filtration 30µm Pressure Secondary pressure side is opened to air Precautions Mounting Be extremely careful with the piping connection screw seal to prevent leakage. Failure to observe this precaution could cause a picking malfunction. Construction Verify the " " marks for IN and OUT that are indicated on the body to ensure a proper connection. It is not possible to ensure the sealing performance of the filter element if connections are reversed. Maintenance If the filter element becomes clogged, stop operation. After the internal pressure in the filter has reached atmospheric pressure, clean or replace the filter element. Replacement Parts No. ZFA0 ZFA Gasket for cover case AL-204H AL-205H Replace the filter element when the pressure drops approximately 0.02 MPa {0.2 kgf/cm 2 }. During disassembly or reassembly, make sure the gaskets and the seals are not cut or damaged. To install the filter element in the case, verify the IN and OUT flow directions that are indicated on the filter element. If the direction is reversed, the filter element will not be properly installed on the cover. For maintenance purposes, provide ample space on the side of the cover so that the filter element can be removed. Selection Do not use it in a line that is kept pressurized because it could cause the body to break. -6

3.2 Element extracted dimensions 55 45 70 2 3.2 50 25 16 38 50 25 60 (67.5) Air Suction Filter/Series ZFA Series ZFA: ZFA 0 - OUT Cover opened-up dimensions 70 2-ø4.5 70 60 INLET OUTLET 2-Port Bracket 45 2 R 2.75 A B Note) The diagram on the left is for ZFA. The bracket location is on the left side. Port A B ZFA0 1/ 8 18 ZFA 1/ 4 20 28 F OUT OUT OUT OUT OUT 60 (67.5) F Port (The above diagram is for ZFA) F-F' Cross-sectional drawing R 2.75 A Pitch B L1 L2 A Port A B ZFA0 1/ 8 19 18 ZFA 1/ 4 24 28 ZFA0 ZFA L1 1 38 L2 50 L1 48 L2 60 2 56 68 76 88 3 74 86 4 116 Number of stations 4 5 6 7 92 1 128 148 4 122 140 158 132 160 188 216 144 172 228 8 164 176 244 256 9 182 194 272 284 212 300 312-7

Air Suction Filter With One-touch Fittings Series ZFB Prevents vacuum equipment trouble due to airborne contaminants. Unrestricted 360 piping tube mounting The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360. Easily replaced filter element The filter element can be replaced quickly through One-touch removal of the transparent cover without having to disconnect the tubing. One-touch tube installation and removal The metric tube connector has a blue release bushing and the inch tube connector has a red release bushing. Lightweight and compact It has been made compact with composite formed resin. Inch (2) Specifications ZFB0-04 ZFB0-06 ZFB-06 ZFB-08 ZFB300-08 ZFB300- ZFB1-05 ZFB1-07 ZFB201-07 ZFB301-11 ZFB401-13 Port (Applicable tube O.D.) IN side, OUT side Recommended air flow l/min (ANR) (1) Weight g ø4 22 ø6 20 22 ø6 30 30 ø8 50 30 ø8 75 39 ø 75 39 ø 3 / 16 " ø 1 / 4 " ø 1 / 4 " ø 3 / 8 " ø 1 / 2 " Note 1) Flow rate is less than 0.003MPa of the initial pressure drop. Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization. Fluid Operating pressure Proof pressure Operating and ambient range Filtration Element proof pressure differential Applicable tube material (1) Note 1) Refer to p.- for applicable tube model. 20 22 20 22 30 30 75 40 0 62 Air/Nitrogen Negative pressure 0.5MPa 0 to 60 C (Non-freezing) 30µm 0.15MPa Nylon/Soft Nylon/Polyurethane How to Order ZFB 0 04 of Element I-34S I-35S I-36S I-39S Applicable filter model ZFB0 ZFB1 ZFB ZFB201 ZFB300 ZFB301 ZFB401 Element (mm) ø X ø6 X L33 ø12 X ø8 X L42 ø14 X ø X L45 ø18 X ø14 X L60 Note) Place a " A" at the end of the part number when ordering spare elements. spare elements and O rings are included in one set. Example) I-34S-A Release button: Light grey Inch Release button: Orange Body Cover Universal joint Plug Element O ring/seal Air suction filter with One-touch fittings 0 300 1 201 301 401 Component Parts Basic Flow l/min (ANR) MAX.20 MAX.50 MAX.75 MAX.20 MAX.30 MAX.60 MAX.0 Material Polyester Transparent special nylon Polyester Brass (Electroless nickel plated) PVF NBR IN/OUT applicable tube O.D. Inch 04 06 08 05 07 11 13 Tube ø4 ø6 ø8 ø ø 3 / 16 " ø 1 / 4 " ø 3 / 8 " ø 1 / 2 " ZFB0 ZFB0 ZFB ZFB ZFB300 ZFB300 ZFB1 ZFB1 ZFB201 ZFB301 ZFB401-8

Air Suction Filter with One-touch Fittings/Series ZFB Application Example Field Machines Functions Semiconductor/Electronics Related Industry, Automobile Assembly, Food Industry, Medical Instruments, General Assembly Machines Robeot Hand/Material Handing, Automatic Assembly machine,automatic Transport Machine, Pick And Place, Printing Vacuum Adsorption Transporting, Vacuum Adsorption Affixing, Vacuum Generated Air Flow Flow Characteristics (Piping Tube:, Inch ) Fluid Air Temperature Ambient temperature Measuring pressure Secondary pressure side is opened to air (Pressurization) Application of Ejector System Application of External Vacuum Supply System Construction Precaution Mounting To connect the tube to the IN and OUT One-touch fitting, observe the precautions that are provided for using One-touch fittings. Verify the " " marks for IN and OUT that are indicated on the body to ensure a proper connection. It is not possible to ensure the sealing performance of the filter element if the connections are reversed. Maintenance If the filter element becomes clogged, stop operation. After the internal pressure in the filter has reached atmospheric pressure, clean or replace the filter element. Replace the filter element when the pressure drops approximately 0.02 MPa. During disassembly or reassembly, make sure that the O ring is not cut or damaged. Selection No. q O ring for trans parent cover ZFB0/1 ZFB/201 ZFB300/301 S11.2 O ring is a set with spare element. ZFB401 S12.5 S16 S18 Do not use it in a line that is kept pressurized because it could cause the body to break. -9

Series ZFB Applicable tube O.D. øm Dimensions ø4.2 holes Maintenance space (I) Element Changing Procedure 1) Stop the operation and reduce the internal pressure of the filter to atmospheric pressure. 2) Turn the transparent cover in counterclockwise direction and position the arrowhead of the collar in the transparent cover from the protruding in the "L" (LOCK) side to the protruding portion in the "O" (OPEN) side. 3) Pull the transparent cover downward to take out the element. Eliminate any dust in the transparent cover by blowing air. (Make sure no damage of the O- ring.) 4) Insert a new element into the body. 5) Set the arrowhead on the collar of the transparent cover to the protruding portion on the "O" side, push the transparent cover into the body and set the arrowhead from the protruding portion on the "O" side to the protruding portion on the "L" side to make the LOCK complete. 6) Restart the operation. Element Exchange Procedure Diagram Body Inch A B C D E F G H I J K L M N ZFB0-04 4 48 26 53 22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 ZFB0-06 6 ZFB-06 6 52 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 15.2 ZFB-08 8 ZFB300-08 8 57 30 69.5 27 14.5 29.5 21 17 65 21.5 18 18.5 ZFB300-8.5 9.5 11 ZFB1-05 ZFB1-07 ZFB201-07 ZFB301-11 ZFB401-13 48 26 53 24 17.5 3/16" 22.5 12.5 15 50 15.5 14.4 12.8 54 24.2 17.7 1/4" 8.5 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 1/4" 9.5 57 30 70 27 14.5 30.2 21.7 17 65 21.5 18 18.5 3/8" 11 64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 1/2" 13.5 Collar part arrow Transparent cover Related Products/Tubing: Nylon, Soft Nylon, Polyurethane Use the kind of tubing indicated at the right for suction filter with One-touch fitting (Series ZFB). Nylon - Refer to p.7-145 to 7-147 in Best Pneumatics 4 for details. Polyurethane Soft nylon Metric Metric Material T Nylon TS Soft nylon TU Polyurethane 0425 0604 0805 0806 65 75 How to Order/Tubing Size O.D. I.D. ø4 ø2.5 ø6 ø4 ø8 ø5 ø8 ø6 ø ø6.5 ø ø7.5 Inch Inch A05 A07 A11 A13 B05 B07 B11 B13 T Tube Material Material TI Nylon TIS Soft nylon TIU Polyurethane Tube Size Nominal O.D. I.D. 4.76 3.48 6.35 4.57 9.53 6.99 12.7 9.56 4.76 3.18 6.35 4.23 9.53 6.35 12.7 8.46 3/ 16" 1/ 4" 3/ 8" 1/ 2" 3/ 16" 1/ 4" 3/ 8" 1/ 2" 0604 B 20 colour B colour Black W White Metric R Red BU Blue Y Yellow G Green C Note) Transparent Length per roll (m) Winding 20 20m (Standard) Note) Polyurethane only. colour Inch B Black BU Blue W White