SECTION 4 EXHAUST AND UTILITY PANEL LOCATOR

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SECTION 4 EXHAUST AND UTILITY PANEL LOCATOR 2 Exhaust Panel 1 Utility Panel, 2 Swivel Main Home Page Home Table of Contents

4 PL 105 4 PL 102 4 PL 96 4 PL 87 4 PL 45 11 See Detail C 92 103 12 79 78 67 OVEN DOOR 68 100 103 90 14 18 See Detail A 103 3 PL 104 101 95 100 103 90 77 4 SWIVEL CASSETTE SWIVEL CASSETTE PNEUMATIC WINDOW 108 16 92 15 3 PL 1 44 18 43 88 4 PL 42 19 20 10 107 4 PL 102 4 PL 96 4 PL 41 18 22 23 2 66 65 99 3 4 PL 78 18 40 24 59 91 103 100 See Detail B 64 21 106 75 4 PL 7 5 3 PL 38 58 72 73 32 36 56 90 100 26 60 61 17 54 37 See Detail D 38 57 71 70 3 PL 29 64 103 30 83 82 100 8 8 18 33 36 103 28 25 27 8 36 109 9 108 34 35 91 86 100 103 7100-4256-01 7100-4258-01 7100-2405-01 7100-4257-01 7100-5734-01

120 UTILITY PANEL DETAIL A 126 120 128 120 119 120 118 127 115 119 110 124 114 120 118 115 125 117 120 121 123 113 5 PL 122 20 PL 116 117 84 112 5 PL 111 UTILITY PANEL DETAIL B 131 130 PART OF ITEM 129 PART OF ITEM 129 PART OF ITEM 129 132 129 7100-4256-01 7100-4258-01 7100-2405-01

UTILITY PANEL DETAIL C 8 PL 120 8 PL 135 SWIVEL CASSETTE SWIVEL CASSETTE PNEUMATIC WINDOW OVEN DOOR 141 140 134 142 8 PL 136 8 PL 137 8 PL 138 120 136 4 PL 133 UTILITY PANEL DETAIL D 145 4 PL 144 143 7100-4256-01 7100-4257-01 7100-5734-01

P/N: 7100-4256-01 Rev: M Description: Assembly, Utility Panel, AG Gray P/N: 7100-4258-01 Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: 7100-2405-01 Rev: C Description: Assembly, Extension, 3-Way Valve P/N: 7100-4257-01 Rev: D Description: Assembly, Solenoid Valves P/N: 7100-5734-01 Rev: B Description: Assembly, Flowmeter Bracket 1 7310-4209-01 Panel, Utility, Power Feedthru, AG Gray 7310-4209-01 AG Associates 2 7310-4208-02 Panel, Utility, Front, AG Gray 7310-4208-02 AG Associates 3 7100-2089-04 Harness, DC Power to 6-Gas Interlock 7100-2089-04 AG Associates 4 7310-0683-03 Plate, Utility, Side 7310-0683-03 AG Associates 5 7100-5602-01 Assembly, Cable Com/Utility Panel 7100-5602-01 AG Associates 7 2110-0011 Binding Post, Double 4243-0 ITT Pomona 8 2522-3009-01 Adapter, 1/2 Swagelock to VCO, Bulkhead SS-8-VCO-A1-810 Cajon 9 2522-0832-01 Union, Bulkhead, 1/4 Tube, SST SS-400-61 Swagelok Co. 10 2101-2067-01 Connector, Liquid Tight, 1 1/2 LT150P T &B 11 7100-4254-02 PCA, Swivel Control Board 7100-4254-02 AG Associates 12 7100-4257-01 Solenoid Valve Assembly, 4-Valves 7100-4257-01 AG Associates (See Detail C) 14 7310-0936-02 Bracket, Connector, Molex 7310-0936-02 AG Associates 15 7100-4258-01 Assembly, Pressure Regulator 7100-4258-01 AG Associates (See Detail A) 16 4502-9066-01 Valve, Check, Pneumatic, 1/4NPT, 1 PSI SS-4C-1 Nupro 17 2522-0914-11 Adapter, 1/4T x 1/4NPT, SST SS-400-1-4 Swagelok Corp. 18 2519-0130 Tubing, Nylon, 1/4 OD x.170 ID NN4-040 Parker Hannifin Corp. 19 4502-9061-02 Valve, Needle, Manual, N.C., 2-Way, M, 1/2 SS-18RS8 Sunnyvale Valve & Fitting 20 2522-3008-01 Fitting, 1/2 x 1/2, Port Connector SS-811-PC Swagelok Co. 21 4502-0176-01 Valve, Flow Controller, Manual, M-F, 1/2 4FCRN Numatics Inc. 22 2522-3006-01 Fitting, 1/4, Union, Elbow SS-400-9 Swagelok Co. 23 2522-3007-01 Fitting, 1/2 x 1/4, Port Connector SS-811SPC-4 Swagelok Co. 24 7100-2405-01 Assembly, Extension, 3-Way Valve 7100-2405-01 AG Associates (See Detail B)

P/N: 7100-4256-01 Rev: M Description: Assembly, Utility Panel, AG Gray P/N: 7100-4258-01 Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: 7100-2405-01 Rev: C Description: Assembly, Extension, 3-Way Valve P/N: 7100-4257-01 Rev: D Description: Assembly, Solenoid Valves P/N: 7100-5734-01 Rev: B Description: Assembly, Flowmeter Bracket 25 2522-0919-18 Elbow, Male, 1/2T x 1/2NPT, SST SS-810-2-8 Swagelok Co. 26 7310-0699-01 Tube, Water Inlet 7310-0699-01 AG Associates 27 2908-0060-01 Meter, Water Flow w/ Switch, 3-6 GPM SMW7117-B Kobold Inst. Inc. 28 7310-0695-01 Label, Coolant 7310-0695-01 AG Associates 29 2522-1009-21 Adapter, 1/2T x 1/2NPT, SST 8AM8-316 Hoke Controls 30 2908-0080-01 Flowmeter SwitchAssembly FSK-6518 Omega Engineering 32 2522-3010-01 Fitting, 1/2 NPT to Female VCO SS-8-WVCO-1-8 Cajon 33 7310-4370-01 Tube, Nitrogen Inlet, Short 7310-4370-01 AG Associates 34 4502-0059-01 Valve, Relief, Adjustable, 1/4 Swagelock SS-4CA-50 Nupro 35 7310-0698-01 Tube, Water Outlet 7310-0698-01 AG Associates 36 2522-3011-01 Fitting, 1/2 NPT to Male VCO SS-8-VCO-1-8 Cajon 37 2522-3100-01 Fitting, 1/2 Male NPT to 1/2 Male NPT SS-8-HN Cajon 38 4502-9063-01 Valve, Diaphragm, Solenoid, N.C., 2W, F, 1/2 8210G37 24/60 Asco 40 2522-3013-01 Fitting, 1/4 Swagelok, Female Branch T SS-400-3-4TTF Swagelok Corp. 41 4502-9065-01 Valve, Check, 1/4 NPT, 1PSI SS-4C2-1 Nupro 42 4100-0007-01 Tank, Air Volume AVT-32-12 Clippard 43 7310-0937-01 Bracket, Air Volume Tank, Left 7310-0937-01 AG Associates 44 7310-0937-02 Bracket, Air Volume Tank, Right 7310-0937-02 AG Associates 45 2507-0305-15 Standoff, 1/4 Hex, M/F, 6-32 x 1-1/8 L, Brass 4544-632-B-O RAF 3104-0050 Tape, Teflon, Thread Seal, 1/4 Inch S22 Sanders Company 54 7310-5734-01 Bracket, Kobold Flow Meter 7310-5734-01 AG Associates 56 7300-0944-01 Bracket, Utility Mounting, Bottom 7300-0944-01 AG Associates 57 7310-1060-06 Label, Utility Panel, Cooling Air 7310-1060-06 AG Associates 58 7310-1060-07 Label, Utility Panel, Oven Coolant 7310-1060-07 AG Associates 59 7310-1060-08 Label, Utility Panel, Purge Valve 7310-1060-08 AG Associates

P/N: 7100-4256-01 Rev: M Description: Assembly, Utility Panel, AG Gray P/N: 7100-4258-01 Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: 7100-2405-01 Rev: C Description: Assembly, Extension, 3-Way Valve P/N: 7100-4257-01 Rev: D Description: Assembly, Solenoid Valves P/N: 7100-5734-01 Rev: B Description: Assembly, Flowmeter Bracket 60 7310-1060-09 Label, Utility Panel, Purge 7310-1060-09 AG Associates 61 7310-1060-10 Label, Utility Panel, Normal Operation 7310-1060-10 AG Associates 64 2519-0001 Tubing, Nylon, 1/2 OD PN18-10R Panduit 65 2104-8001-01 Connector, CPC, 14-Pin, Plug 206044-1 Amp, Inc. 66 2103-1015-01 Connector, CPC Strain Relief 206070-1 Amp, Inc. 67 7100-3109-02 Harness, Utility Panel, J1U to N2, H2O 7100-3109-02 AG Associates 68 7100-3110-01 Harness, Utility Panel, J2U to Ext. Pyro, TC 7100-3110-01 AG Associates 70 2101-0610 Contact, Pin, Gold-Plated, 18-24 AWG 350690-7 Amp, Inc. 71 2101-0503 Housing, Nylon, Cap, 3-Position 1-480701-0 Amp, Inc. 72 2101-0303 Housing, Nylon, Plug, 3-Position 1-480700-0 Amp, Inc. 73 2101-0630 Contact, Socket, Gold-Plated, 18-24 AWG 350689-7 Amp, Inc. 75 7310-1184-01 Cover, Utility Panel Port, Warm Gray 7310-1184-01 AG Associates 77 6011-0215-01 Duct, Elbow, Ash/Telecom. 8202A-L 3M 78 6011-0213-01 Duct, Ash/Telecom., 1.25 x 0.75 x 48 802A 3M 79 2519-0150-08 Tubing, Urethane, Black MP1890-100 Steven Engineering Inc. 82 2522-3101-01 Red Bushing, 1 x 1/2 NPT SS-16-RB-8 Swagelok 83 2806-0410-10 Screw, Sockethead, 8-32 x.625 86 2806-0408-04 Screw, Sockethead, 4-40 x.25 87 2806-0512-06 Screw, Button Head, 6-32 x.38 88 2806-0512-08 Screw, Button Head, 6-32 x.50 90 2806-0414-06 Screw, Socket Head, 8-32 x.38 91 2806-0414-08 Screw, Socket Head, 8-32 x.50 92 2806-0414-16 Screw, Socket Head, 8-32 x 1.00 95 2806-0517-06 Screw, Button Head, 10-32 x.38 96 2815-1042 Washer, Nylon, Black, Flat #6,.35 OD 99 2816-1041 Washer, Stainless Steel, Flat #6,.31 OD

P/N: 7100-4256-01 Rev: M Description: Assembly, Utility Panel, AG Gray P/N: 7100-4258-01 Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: 7100-2405-01 Rev: C Description: Assembly, Extension, 3-Way Valve P/N: 7100-4257-01 Rev: D Description: Assembly, Solenoid Valves P/N: 7100-5734-01 Rev: B Description: Assembly, Flowmeter Bracket 100 2816-1051 Washer, Stainless Steel, Flat #8,.38 OD 101 2816-1061 Washer, Stainless Steel, Flat #10,.31 OD 102 2816-2042 Washer, Stainless Steel, Splitlock #6,.25 OD 103 2816-2052 Washer, Stainless Steel, Splitlock #8,.29 OD 104 2816-2064 Washer, Stainless Steel, Splitlock #10,.34 OD 104 2816-3040 Washer, Stainless Steel, Internal Tooth #6 106 2826-1080 Nut, Stainless Steel, KEP 4-40 UNC 107 2826-2120 Nut, Stainless Steel, HEX 6-32 UNC 108 2840-0016-01 Nut, Bulk Head, 3/4-20 UNEF SS-812-61 Cajon 109 2522-0963-01 Y 1/4 Tubing MN2YUBW Parker Hannifin 110 7310-0402-01 Manifold, Distribution, Air` 7310-0402-01 AG Associates 111 7100-4259-01 Switch, Pressure, 1/8 NPT, Adjustable 10-D11 United Electric 112 4502-0062-01 Pressure Reg., Manifold Mount, 1-100 PSI 101-0500-VM Monnier, Inc. 113 7310-0926-01 Gasket, Pressure Regulator, Manifold Mount 7310-0926-01 AG Associates 114 2900-0035-01 Gauge, Pressure, 0-100 PSI, 1/8 NPT, 1.5 In. 1015-2CB-100 Wika 115 2900-0035-02 Gauge, Pressure, 0-60 PSI, 1/8 NPT 1015-2CB-160 Wika 116 2900-0035-03 Gauge, Pressure, 01-160 PSI, 1/8 NPT 8985834 Wika 117 2522-0919-06 Elbow, Male, 1/4T x 1/8NPT, SST SS-400-2-2 Swagelok 118 2522-3014-01 Fitting, 1/4 Tube to 10-32 Tube 6511-04-32 Camozzi Pneumatics 119 2522-3015-01 Fitting, 5/32 Tube x 10-32 Elbow 6520--32 Camozzi Pneumatics 120 2504-0020 Gasket, Fibre, #10 2-433-5604-70 Parker Seals 121 2806-0517-04 Screw, SST, Socket Buttonhead, 10-32 x.25 122 2806-0404-06 Screw, SST, Sockethead, 2-56 x.38 123 7310-1060-01 Label, Utility Panel, Pneumatic Valves 7310-1060-01 AG Associates 124 7310-1060-02 Label, Utility Panel, Oven Door 7310-1060-02 AG Associates

P/N: 7100-4256-01 Rev: M Description: Assembly, Utility Panel, AG Gray P/N: 7100-4258-01 Rev: C Description: Assembly, Pressure Regulator, 8108 P/N: 7100-2405-01 Rev: C Description: Assembly, Extension, 3-Way Valve P/N: 7100-4257-01 Rev: D Description: Assembly, Solenoid Valves P/N: 7100-5734-01 Rev: B Description: Assembly, Flowmeter Bracket 125 7310-1060-03 Label, Utility Panel, Pneumatic Window 7310-1060-03 AG Associates 126 7310-1060-04 Label, Swivel Cassette 7310-1060-04 AG Associates 127 7310-1060-05 Label, Utility Panel, Oven Purge 7310-1060-05 AG Associates 128 2522-0882-01 Elbow, Double Branch, 5/32 PAX 5/32-U10U Pisco USA, Inc. 129 4502-9060-01 Valve, Ball, Manual, N.C., 3-Way, M, 1/2 SS-45XS8 Sunnyvale Valve & Fitting 130 7310-0888-01 Handle, 3-Way Valve 7310-0888-01 AG Associates 131 7310-0889-01 Extension, 3-Way Valve 7310-0889-01 AG Associates 132 7310-0899-02 Bracket, 3-Way Valve 7310-0899-02 AG Associates 133 4502-0041-01 Valve, Solenoid, Normally-Closed, 4-Way H110-4E2 12VDC Bay Pneumatic, Inc. 134 7310-3626-01 Manifold, 4-Solenoid, Pneumatic 7310-3626-01 AG Associates 135 2522-3014-01 Fitting, 1/4 Tube x 10-32 6510-04-32 Camozzi Pneumatics 136 2522-3015-01 Elbow, 5/32T to 10-32 6520--32 Camozzi Pneumatics 137 2806-0404-18 Screw, SST, Sockethead, 2-56 x 1.25 138 2816-1022 Washer, SST, Flat, #2,.25 OD 139 2806-0517-06 Screw, SST, Socket Buttonhead, 10-32 x.38 140 7310-1060-02 Label, Utility Panel Oven Door 7310-1060-02 AG Associates 141 7310-1060-03 Label, Utility Panel Pneumatic Window 7310-1060-03 AG Associates 142 7310-1060-04 Label, Swivel Cassette 7310-1060-04 AG Associates 143 7310-4750-01 Assembly, Flowmeter Bracket 7310-4750-01 AG Associates 144 7310-4773-01 Base, Flowmeter Bracket 7310-4773-01 AG Associates 145 2806-0414-08 Screw, Socket Head, 8-32 x.50

38 43 37 1! 44 PART OF ITEM 35 42 41 40 39 36 45 PART OF ITEM 12 34 8 PL 2 3 8 4 7 8 33 4 PL 9 12 4 PL 32 25 31 34 4 PL 13 30 7100-5970-01

P/N: 7100-5970-01 Rev: C Description: Exhaust Panel Assembly, AG Gray 1 7310-5157-01 Panel, Exhaust Weldment, AG Gray 7310-1088-01 AG Associates 2 5103-0020 Switch, 2-Pole, Momentary, 125VAC, 10 A AML 31FBA4AC Microswitch 3 5103-0040 Lens, Push Button Switch, Green AML51-F50G Microswitch 4 5103-0033-01 Lens, Push Button Switch, White AML51-F50R Microswitch 7 5103-0070 Switch Guard, Rectangular, Clear, Type 76F AML76F10T01P Microswitch 8 2451-0030 Lamp, Wedge-Base, 28V,.04 A 85 GTE Sylvania 9 5103-0030 Switch, 1-Pole, Momentary, 125VAC, 3 A AML 21FBA2AA Microswitch 12 2110-0011 Binding Post, Double 4243-0 ITT Pomona 13 7300-4421-01 Cover, Exhaust Panel, Lower, AG Gray 7300-4421-01 AG Associates 25 7310-4422-04 Exhaust Port, AG Gray 7310-4422-04 AG Associates 30 7100-3157-01 Harness, Exhaust Panel, 8108 7100-3157-01 AG Associates 31 7310-4423-01 Cap, Exhaust Weldment 7310-4423-01 AG Associates 32 7310-0249-01 Cap, Reducer, Cooling Exhaust 7310-0249-01 AG Associates 33 2806-1014-04 Set Screw, SST, Cup Point, 8-32 x.25 34 2821-1140 Nut, Steel, KEP, 8-32 UNC 36 5103-0142-01 Switch, Operator, Push Button, Red Mushroom ZB2-BS54 Telemechanique 37 7500-0085-02 Guard, EMO Switch 7500-0085-02 AG Associates 38 5103-0150 Switch, Contact Black, Push Button, NC Mtg ZB2-BZ102 Telemechanique 39 2101-0302 Housing, Nylon Plug, 2-Position 1-480698-0 Amp, Inc. 40 2101-0640 Contact, Socket, Gold-Plated, 20-14 AWG 350550-7 Amp, Inc. 41 6005-0131-01 Cable, 2-Conductor, 18AWG 5062C Alpha 42 3105-0050 Heat Shrink, 1/4 inch HIX 1/4 ICO Rally Corporation 43 2115-0102-01 Terminal Fork, Insulated, 22-18AWG PNF18-6LF-C Panduit 44 2816-4160 Washer, SST, Extension Tooth, 13/16 45 1406-0119-01 Plug, Nylon, Black, 9/16 Diameter 26 Heyco