ISB/SSPA Series. Single-axis Robot.

G IS/SSP Series Single-axis Robot www.intelligentactuator.de

major revamp of the single-axis robot IS series with improvements all around - from preciseness, rigidity and payload capacity to speed and /deceleration. 1. Improved preciseness The positioning repeatability is twice as high as with a similar conventional product. Conventional product IS series Standard ±0.02 mm ±0.01 mm High-precision ±0.01 mm ±0.00 mm 2. Improved rigidity Due to an improved preciseness of the guide, the dynamic straightness of the slider is now 0.01 mm/m or less. (*) * ased on the SSP of high straightness, precision. Refer to P. 13 for details. The Mc-direction rigidity of a steel-base series (SSP) are achieved more than twice compared to a conventional product of the same size. Displacement angle (deg) Displacement angle due to the moment (Mc direction) 0.07 0.0 0.0 0.04 0.03 0.02 0.01 0.00 0 400 00 00 00 Moment (N m) SSP-SXM SSP-MXM SSP-XM Mc direction Displacement angle > 2x vs. conventional product [Comparison between steel-base (SSP-XM) and conventional product] The same payload and Mc-direction rigidity are achieved at a cross-section area of just 0% that of a conventional product of an extra-large (IS-WXM). Comparison with conventional product of same payload and Mc-direction rigidity NEW Steel-base SSP-XM Conventional product Mc 1 Compact size with a crosssection area of just 0% 19 Extra-large IS-WXM ong slider s, each with a longer slider, have been added. Each time is to 20% more rigid in Mc direction compared to a conventional product of the same size. * ong slider is only available for IS/ISP series. 1 NEW Standard slider ong slider 2 Type Standard slider (1) ong slider (2) Small S mm 1mm Medium M mm mm arge mm 10mm 1

3. Full lineup including the simple, dustproof and the cleanroom IS/ISP series SSP series XM SSP series SXM/MXM ISD/ISPD series ISDCR/ISPDCR series SSPDCR series SSPDCR series S/M Standard IS/ISP/SSP series Simple, dustproof ISD/ISPD series Cleanroom ISDCR/ISPDCR/ SSPDCR series 4. Increased payload, speed, stroke, The payload has increased by approx. % with all models. The maximum stroke has become longer with all models except Max. speed with M/-size of simple, for those with an intermediate support. dustproof or cleanroom The rated has increased from 0.3 G to 0.4 G, while Conventional the maximum has increased from 1.0 G to 1.2 G. product The maximum speed of mm/s (*) is now possible. 00mm/s 0% up (*) ased on the SSP of lead 0. New product 100mm/s The maximum speed has increased from 00 mm/s to 100 mm/s with M/-size s of the simple, dustproof or cleanroom.. Easier to use ➊ Q seal is a standard feature. ➍ Greater flexibility of mounting. ➋ Easier to grease the ball screw and guide. ➎ Four cable exit directions to choose from. ➌ reference surface is set on the slider. ➏ The top of the motor does not contact the load on the slider. ➊ Q seal is a standard feature (guide, ball screw). ➌ reference surface was set on the slider to improve mounting preciseness. ➎ You can now choose one of four cable exit directions. ➋ greasing nipple is provided on the side face of the slider to make it easier to grease the ball screw and guide. (Greasing is now possible without removing the cover.) ➏ The top of the motor is lower than the slider mounting surface, so the motor no longer contacts the load on the slider. ➍ The mounting hole positions are the same as those on conventional products. However, tapped mounting holes have been added to increase the flexibility of mounting. 2

Produc ation ist Use environment ase material Series name [Positioning repeatability ] ctuator size Slider (slider length) (Note 1) Type Small Standard [mm] SXM [ctuator width: mm] ong [1mm] SX Medium Standard [mm] MXM [ctuator width: mm] ong [mm] MX IS Standard luminum base (Standar [±0.01] ISP (High precision ation) [±0.00] ation) arge With intermediate support [mm] MXMX Standard [mm] XM ong [10mm] X [ctuator width: mm] With intermediate support [mm] XMX arge Double sliders with intermediate support [20mm] XUWX [ctuator width: mm] 3 (Note 1) When the slider is longer, the dynamic allowable moment becomes more than that of the standard slider. When mid-support is provided, high-speed movement is possible, even over a long stroke, because de ection of the ball screw can be suppressed. (Note 2) If the stroke is short, the maximum speed may not be reached. When the stroke increases, the maximum speed will drop to prevent reaching a dangerous speed. For details, refer to the explaining the speci cations of each model. (Note 3) The maximum payload is the value when the actuator is operated at the rated. The maximum payload will drop if the is raised. For details, refer to Table of Payload by cceleration on P. 9. The values in ( ) are payloads when a guide with ball retention mechanism (RT) is used.

Stroke 0~0 (in 0mm ) 130~0 (in 0mm ) 0~10 (in 0mm ) ~70 (in 0mm ) 00~0 (in 0mm ) 0~1300 (in 0mm ) ~1270 (in 0mm ) 00~ (in 0mm ) 0 0 0 0 400 400 1 13 3. (3.0) 40 27 7 (.) 4 240 14 (13.) 1 13 3. 40 27 7 4 240 14 30 100 1 2. (2.0) 20 0 23 (4.) 00 4 (9.) 300 20 (19.) 30 100 30 20 0 4 00 20 300 1 40 30 100 1 2. 20 0 23 00 4 300 20 30 100 30 20 0 4 00 20 300 1 40 30 100 30 20 0 4 40 2400 1 4 (3.0) 20 0 4 00 (9.0) 20 (19.0) 40 2400 40 20 0 20 00 40 40 2400 1 4 20 0 4 00 20 40 2400 40 20 0 20 00 40 20 0 4 400 all screw lead speed (Note 2) 40 2400 40 20 0 payload (kg) (Note 3) Dynamic allowable moment (Nm) (Note 4) Horizontal Vertical Ma Mb Mc Designed exclusively for horizontal use Designed exclusively for horizontal use 2.4 40.2.7 39.7.7 7.3 9. 99.0 11.7.3.4 193.7 9. 99.0 11.7 4.9 149.9 24.9 137. 19. 27. 4.9 149.9 24.9 P.17 P.1 P.19 P.20 P.21 P. P.23 P.24 P.2 P.2 P.27 P.2 P.29 20 0 4 P.30 00~ (in 0mm ) 400 40 2400 40 20 0 Designed exclusively for horizontal use 179.3 24. 247.0 P.31 Note 4) The value of moment allowed to be applied when the traveling life of the actuator is set to 000 km. Direction of allowable load moment Ma Mb Mc 4

Produc ation ist Use environment ase material Series name [Positioning repeatability ] ctuator size Slider (slider length) (Note 1) Type Small Standard [mm] SXM [ctuator width: 0 mm] Medium Standard Iron base SSP (High precision ation) [±0.00] [ctuator width: 130 mm] Standard [mm] MXM arge Standard [mm] XM [ctuator width: 1 mm] Small Standard [14mm] S [ctuator width: mm] Medium Simple, dustproof luminum base ISD (Standar [±0.01] ISPD (High precision ation) [±0.00] ation) arge [ctuator width: mm] Standard [194mm] With intermediate support [194mm] M MX Standard [4mm] [ctuator width: mm] With intermediate support [4mm] X (Note 1) When a mid-support is provided, high-speed movement is possible, even over a long stroke, because de ection of the ball screw can be suppressed. (Note 2) If the stroke is short, the maximum speed may not be reached. When the stroke increases, the maximum speed will drop to prevent reaching a dangerous speed. For details, refer to the explaining the speci cations of each model. (Note 3) The maximum payload is the value when the actuator is operated at the rated. The maximum payload will drop if the is raised. For details, refer to Table of Payload by cceleration on P. 9. The values in ( ) are payloads when a guide with ball retention mechanism (RT) is used.

Stroke all screw lead speed (Note 2) payload (kg) (Note 3) Dynamic allowable moment (Nm) (Note 4) Horizontal Vertical Ma Mb Mc 30 100 30 4 0~10 (in 0mm ) 20 0 4 3.0 3.0 9.0 P.32 00 12 40 2400 4 0~1300 (in 0mm ) 400 20 0 12.0.0 230.0 P.33 00 2 0 0 12 (.0) 0~0 (in 0mm ) 70 13. 13. 334. P.34 2 2 (23.0) 1 13 3 (2.) 0~00 (in 0mm ) 0 40 27 (.) 2.4 40.2.7 P.3 4 240 14 (13.) 30 100 1 2 (1.) 0 20 0 23 4 (3.) 00 4 (9.) P.37 0~10 (in 0mm ) 300 20 (20.) 30 100 30 9. 99.0 11.7 20 0 4 00 20 P.3 300 1 40 00~0 (in 0mm ) 30 100 30 20 0 4 Designed exclusively for horizontal use 9. 99.0 11.7 P.39 40 100 1 2. (1.) 0~1300 (in 0mm ) 400 20 0 4 9 (.0) 00 20 (19.0) 40 100 40 20 0 20 4.9 149.9 24.9 P.40 P.41 00 40 00~0 (in 0mm ) 400 40 100 1 20 0 4 40 100 40 20 0 Designed exclusively for horizontal use 4.9 149.9 24.9 P.42 P.43 Note 4) The value of moment allowed to be applied when the traveling life of the actuator is set to 000 km. Direction of allowable load moment Ma Mb Mc

Produc ation ist Use environment ase material Series name [Positioning repeatability ] ctuator size Slider (slider length) (Note 1) Type Small Standard [14mm] S [ctuator width: mm] Medium luminum base ISDCR (Standar [±0.01] ISPDCR (High precision ation) [±0.00] ation) arge [ctuator width: mm] Standard [194mm] With intermediate support [192mm] M MX Standard [4mm] Cleanroom [ctuator width: mm] With intermediate support [0mm] X Small Standard [mm] S [ctuator width: 0 mm] Medium Iron base SSPDCR (High precision ation) [±0.00] [ctuator width: 130 mm] Standard [mm] M arge Standard [230mm] [ctuator width: 1 mm] 7 (Note 1) When a mid-support is provided, high-speed movement is possible, even over a long stroke, because de ection of the ball screw can be suppressed. (Note 2) If the stroke is short, the maximum speed may not be reached. When the stroke increases, the maximum speed will drop to prevent reaching a dangerous speed. For details, refer to the explaining the speci cations of each model. (Note 3) The maximum payload is the value when the actuator is operated at the rated. The maximum payload will drop if the is raised. For details, refer to Table of Payload by cceleration on P. 9. The values in ( ) are payloads when a guide with ball retention mechanism (RT) is used.

Stroke all screw lead speed (Note 2) payload (kg) (Note 3) Dynamic allowable moment (Nm) (Note 4) Horizontal Vertical Ma Mb Mc 1 13 3 (2.) 0~00 (in 0mm ) 0 40 27 (.) 2.4 40.2.7 P.4 4 240 14 (13.) 30 100 1 2 (1.) 0 20 0 23 4 (3.) 00 4 (9.) P.4 0~10 (in 0mm ) 300 20 (19.) 30 100 30 9. 99.0 11.7 20 0 4 00 20 P.47 300 1 40 00~0 (in 0mm ) 30 100 30 20 0 4 Designed exclusively for horizontal use 9. 99.0 11.7 P.4 40 100 1 2. (1.) 0~1300 (in 0mm ) 20 0 4 9 (.0) 00 20 (19.0) 40 100 40 4.9 149.9 24.9 P.49 400 20 0 20 P.0 00 40 00~ (in 0mm ) 400 40 100 1 20 0 4 40 100 40 20 0 Designed exclusively for horizontal use 4.9 149.9 24.9 P.1 P.2 30 0 30 4 0~10 (in 0mm ) 20 10 4 3.0 3.0 9.0 P.3 00 12 40 0 4 0~1300 (in 0mm ) 400 20 10 12.0.0 230.0 P.4 00 2 0 0 0 12 (.0) 0~0 (in 0mm ) 70 13. 13. 334. P. 2 10 20 (23.0) Note 4) The value of moment allowed to be applied when the traveling life of the actuator is set to 000 km. Direction of allowable load moment Ma Mb Mc

Table of Payload by cceleration (Guide without the all Retention Mechanism (RT)) Type/motor /lead SXM SX 0 0 MXM MX IS (Standard ) ISP MXMX (High precision ) XM X 400 cceleration (G) Payload by Horizontal use Vertical use 0.2 0.3 0.4 0. 0. 0.7 0. 0.9 1 1.1 1.2 0.2 0.3 0.4 0. 0. 0.7 0. 0.9 1 1.1 1.2 1 13 13 13.. 7. 4. 4 3. 3. 3. 3. 3 2. 2.3 2 27 27 27 20 1 12 7 7 7 4 0 3 30 14 13 12 30 1 1 1 11 9 7 4 3. 3 2. 2. 2. 2.2 1.9 1.7 1. 1.4 1.2 1.1 1 20 23 23 23 1 1 13 11 9 7 4. 4 3. 3 2. 2. 4 4 4 30 23 20 7 0 0 4 20 17 1 30 30 30 30 24 20 17 1 13 12 9. 4. 4 3. 3 2. 2 20 4 4 4 3 2 23 20 17 1 13 12. 7. 7. 1 40 20 20 20 17 1 1 0 0 40 34 30 30 30 30 30 20 4 4 4 Cannot be used vertically. 40 1 1 1 12. 9 7. 7. 4 4 4 3. 3.1 2. 2. 2.2 2 1. 1. 20 4 4 4 3 2 23 20 17 1 13 12. 7. 7. 1 40 20 20 20 1 14 40 40 40 40 32 27 23 21 19 17 1 1. 7. 7. 4. 4 20 70 7 47 40 3 30 27 24 20 20 20 17 1 14 12 11 92 73 0 40 40 40 34 30 20 4 4 4 XMX 40 40 40 40 400 20 Cannot be used vertically. 20 4 4 4 XUWX 40 40 40 40 400 20 30 30 30 30 24 20 17 1 13 12 11 4 4 4 3.2 2.7 2.3 2 1.7 1.4 1.2 1 SXM 20 4 4 4 3 30 2. 19. 17 4. 4 3.4 3 2.7 2.4 72 0 0 12 12 12 SSP 40 4 4 4 3 30 2.. 19. 17 1 13. 4. 4 3.4 3 2.7 2.4 2.2 2 (High precision ) MXM 400 20 72 0 1 4 39 34 12 12 12 9..9.3 4. 9 0 70 2 2 2 20 1. 0 0 0 0 4 40 34 30 27 24 20 12 12 12 7 4 4 XM 70 ISD (Standard ) ISPD (High precision ) ISDCR (Standard ) ISPDCR (High precision ) SSP (High precision ) S 0 M 0 MX X 400 400 S M 400 70 2 9 0 9 0 3 4 44 40 2 2 2 20 17 14 13 11 9 1 13 13 13.. 7. 4. 3 3 3 2. 2. 2.3 2 27 27 27 20 1 12. 4 0 3 30 14 13 12 30 1 1 1 11 9 7 4 2 2 2 1. 1. 1. 1.4 1.3 1.2 20 23 23 23 1 1 13 11 9 4 4 4 3. 3. 3.3 3 2. 2. 4 4 4 30 23 20 7 0 0 4 20 17 1 30 30 30 30 24 20 17 1 13 12. 4. 4 3. 3 20 4 4 4 3 2 23 20 1 1. 7. 7. 1 40 20 20 20 17 1 1 0 0 40 34 30 30 30 30 30 20 4 4 4 Cannot be used vertically. 40 1 1 1 12. 9 7. 7 2. 2. 2. 2.4 2.3 2.2 2.1 2 2 20 4 4 4 3 2 23 20 17 1 9 9 9. 7. 7. 1 40 20 20 20 1 14 40 40 40 40 32 27 23 21 19 17 7. 7.. 20 70 7 47 40 3 30 20 20 20 17 1 14 12 11 92 73 0 40 40 40 3 30 40 1 1 1 20 4 4 4 40 40 40 40 Cannot be used vertically. 20 30 30 30 30 24 20 17 1 13 12 11 4 4 4 3.2 2.7 2.3 2 1.7 1.4 1.2 1 20 4 4 4 3 30 2. 19. 17 4. 4 3.4 3 2.7 2.4 72 0 0 12 12 12 40 4 4 4 3 30 2.. 19. 17 1 13. 4. 4 3.4 3 2.7 2.4 2.2 2 20 72 0 1 4 39 34 12 12 12 9..9.3 4. 9 0 70 2 2 2 20 1. 0 0 0 0 4 40 34 30 27 24 20 12 12 12 7 4 4 2 9 0 9 0 3 4 44 40 2 2 2 20 17 14 13 11 9 The actuators cannot be operated under the conditions in shaded boxes (due to the relationship of lead and.) 9 * If the guide with ball retention mechanism (RT) is used, the vertical payload is reduced on certain models from the applicable value shown in the above table. These models and corresponding amounts of reduction in vertical payload are shown in the table on the right. Series Type mounts of reduction (kg) IS, ISP SXM, MXM (0W) 0. XM (W) 1.0 SSP XM (70W) 2.0 ISD, ISPD, S, M (0W) 0. ISDCR, ISPDCR (W) 1.0 SSPDCR (70W) 2.0

Explanation of Description *The selections for each item vary depending on the. For details, check the explaining each. Standard Example) IS Series MXM Type 30 ead 10 Stroke T2 pplicable controller M 3E s e sure to specify the Q seal option (Q). For the cable exit direction, be sure to specify an applicable code (1S/1E/ 3S/3E). IS ISP SSP luminum base, standard luminum base, high precision Steel base, high precision SXM Small, X-axis, standard XM arge, X-axis, standard SX Small, X-axis, long slider X arge, X-axis, long slider MXM Medium, X-axis, standard XMX arge, X-axis, mid-support MX Medium, X-axis, long slider XUWX arge, X-axis, mid-support, doubleslider MXMX Medium, X-axis, mid-support I bsolute 0 0W 0 0W W 400 400W 70 70W 0 0mm mm * Varies depending on the model. 4 4mm mm mm mm 1 1mm 20 20mm 2 2mm 30 30mm 40 40mm 0 0mm * The selectable leads vary depending on the model. T1 XSE-KE/KET XSE-P/Q T2 SSE N None S 3m M m X Specified length * The standard cable is a robot cable. 1S 1E Cable exit from the rear left 3S 3E Q Q seal (standard feature) rake C Creep sensor C Creep sensor on opposite side EU Metal cable joint connector (standard feature) Home limit switch Home limit switch on opposite side M Master axis M Master axis spec. (sensor on opposite side) MD Steel base with anti-corrosive protection NM Non-motor side RT Guide with ball retention mechanism S Slave axis ST High straightness, precision * The option MD is only available for SSP series. Simple, dustproof Example) ISD Series M Type 20 ead 00 Stroke T2 pplicable controller M s e sure to specify the Q seal option (Q). For the cable exit direction, be sure to specify an applicable code (1S/1E/ 3S/3E). ISD Standard ISPD High precision S Small, standard M Medium, standard MX Medium, mid-support arge, standard X arge, mid-support I bsolute 0 0W 0 0W W 400 400W 0 0mm 0 0mm * Varies depending on the model. 4 4mm mm mm mm 1 1mm 20 20mm 30 30mm 40 40mm * The selectable leads vary depending on the model. T1 XSE-KE/KET XSE-P/Q T2 SSE N None S 3m M m X Specified length * The standard cable is a robot cable. 1S 1E 3S 3E Q C C EU M M NM RT S ST Cable exit from the rear left Q seal (standard feature) rake Creep sensor Creep sensor on opposite side Metal cable joint connector (standard feature) Home limit switch Home limit switch on opposite side Master axis Master axis spec. (sensor on opposite side) Non-motor side Guide with ball retention mechanism Slave axis High straightness, precision Cleanroom Example) ISDCR Series M Type 20 ead 00 Stroke T2 pplicable controller M RT s e sure to specify the Q seal option (Q). For the cable exit direction, be sure to specify an applicable code (1S/1E/ 3S/3E). ISDCR ISPDCR SSPDCR S M MX X luminum base, standard luminum base, high precision Steel base, high precision Small, standard Medium, standard Medium, mid-support arge, standard arge, mid-support I bsolute 0 0W 0 0W W 400 400W 70 70W 0 0mm mm * Varies depending on the model. 4 4mm mm mm mm 1 1mm 20 20mm 2 2mm 30 30mm 40 40mm 0 0mm * The selectable leads vary depending on the model. T1 XSE-KE/KET XSE-P/Q T2 SSE N None S 3m M m X Specified length * The standard cable is a robot cable. 1S 1E 3S 3E Q C C EU M M NM RT S ST VR Cable exit from the rear left Q seal (standard feature) rake Creep sensor Creep sensor on opposite side Metal cable joint connector (standard feature) Home limit switch Home limit switch on opposite side Master axis Master axis spec. (sensor on opposite side) Non-motor side Guide with ball retention mechanism Slave axis High straightness, precision Suction tube joint on opposite side

11 Explanation of Number s Cable Exit Direction number 1S/1E/3S/3E You can choose one of four cable exit directions. * e sure to specify one of four model numbers. Q seal (lubrication unit) number option Q This unit prevents foreign objects from entering the ball screw and sliding part of the guide, while continuously supplying an appropriate amount of lubricating oil. (Standard feature on all models) * e sure to specify the model number option. rake number option When the actuator is used vertically, this mechanism holds the slider in place in the event that the power or servo is turned off, so that the slider will not drop and cause damage to the load. When the brake is equipped, the motor cover becomes longer than the without the brake. (Refer to the external view of each model.) Creep sensor number option C (standard) /C (opposite side) This sensor shortens the time required for home return. During the home return, the slider moves to the mechanical end at low speed, so actuators with a long stroke take a longer time to complete the home return. The creep sensor is installed near the mechanical end so that the slider can be moved at high speed to the sensor position and when the sensor actuates, the speed is reduced to the specified low level. This way, the time of home return can be shortened. With the standard option (C), this sensor is installed on the right side of the actuator as viewed from the motor. Select the opposite side option (C) if you want to install the sensor on the opposite side. The external dimensions vary depending on whether or not the sensor and cover are installed. When the creep sensor alone is installed, there is an additional sensor only on the home side and the dimensions change accordingly. If the home limit switch is also used, the dimensions conform to those of the with home limit switch. * Refer to the "Dimensions with creep sensor and home limit switch" below. Home limit switch number option (standard) / (opposite side) number: 3S (exit from the right) number: 1S (exit from the left) number: 3E (exit from the rear right) number: 1E (exit from the rear left) Normally actuators adopt the contact home return mechanism whereby the slider moves until it contacts the stopper at the mechanical end, upon which the slider reverses its course and moves until the Z-phase is detected, and the detected phase is set as the home. The home limit switch is a convenient option that lets you adjust the reversing position or check whether or not the slider has reversed. With the standard option (), this switch is installed on the right side of the actuator as viewed from the motor. Select the opposite side option () if you want to install the switch on the opposite side. The external dimensions vary depending on whether or not the sensor and cover are installed. * Refer to the "Dimensions with creep sensor and home limit switch" below. Dimensions with Creep Sensor and Home imit Switch The following dimensions apply when the sensor and switch are installed. 0 0 * The above dimensions apply when both the limit switch and creep sensor are installed. If the creep sensor alone is installed, the dimensions on the sensor side (home side) will vary. 3 C luminum base D 12 Steel base D 12 19 ase Series Type C D SXM 9 34 7 29 SX 19 44 17 29 MXM 1 7 2 34. MX 33 93 17 34. IS MXMX 12 2 34. ISP XM 3 94 17 42. X 41 119 42. XMX 140 17 42. XUWX 3 24 12 42. luminum Steel ISD ISPD ISDCR ISPDCR S 0 37 29 M 20 9 4 34. MX 137 4 34. 31 119 7 42. X 77 1 7 42. S 0 37 29 M 20 9 4 34. MX 137 4 34. 31 119 7 42. X 77 1 42. SXM * 40 3 34. MXM 4 * 74 3 34. SSP XM 19. (1.) (3) 24 42. S 31. 9. 3 34. M 40. 91. 43 34. SSPDCR 44. 111 (41.) () 4 42. The values in ( ) represent dimensions when the creep sensor alone is installed. * The dimension of for SSP-SXM/MXM is overhanging toward motor side from the base-edge.

12 Explanation of s Master axis for synchronized operation number option M (standard) /M (opposite side) Synchronized operation is a function to move two actuator axes of the same one master axis and one slave axis in identical manners, with the slave axis following the master axis at very high-speed control. If you want to use synchronized operation, specify M for the master axis and S for the slave axis. Steel base with anti-corrosive protection number option MD This is the option only for SSP series. ntirust treatment (by manufacturer Microdent) is performed on the base reference surface (bottom-side) and the slider reference surface. It is used in case of easy to rust operations and supress dust. Non-motor side number option NM Normally the home return is implemented on the motor side, but this direction can be set to the non-motor side as well. To change the home return direction, specify it in your order because the encoder must be adjusted. Guide with ball retention mechanism number option RT spacer (retainer) is inserted between guide balls (made of steel) to reduce noise and for a longer operating life. *This option is not available for long slider s (SX/MX/X). *Take note that the payload will vary if the actuator is used vertically. (Refer to the model/ table of each model.) Salve axis number option S Enter this model number to specify the slave axis in synchronized operation. Suction tube joint on opposite side number option VR On standard cleanroom actuators, the vacuum joint is installed on the left side of the actuator as viewed from the motor. Specify this option if you want to have this joint on the opposite side. Metal cablejoint connector number option EU Select this option for a motor/encoder cable with metal cable plugs. Without this option plastic plugs are default. y this option cable lengths to m are without surcharge, too.

13 Explanation of s High straightness, precision number option ST This represents a precision actuator of high traveling preciseness in terms of dynamic parallelism (horizontal/ vertical) and dynamic straightness (horizontal/vertical) of the slider. Each traveling preciseness is defined for each stroke of actuators. The following table is a standard value per 1m stroke. Refer to the calculation example below for the calculation of s per stroke. Without high straightness, precision 1 Dynamic parallelism [mm/m or less] 0.0 2 Dynamic straightness [mm/m or less] 0.0 luminum base Calculation example "aluminum base" and "steel base" With high straightness, precision (*) 0.03 (however in case the stroke is less than 00mm, the value becomes 0.01mm uniformly) 0.02 (however in case the stroke is less than 00mm, the value becomes 0.01mm uniformly) Without high straightness, precision 0.0 0.0 Steel base With high straightness, precision (*) 0.03 (however in case the stroke is less than 00mm, the value becomes 0.01mm uniformly) 0.01 (however in case the stroke is less than 00mm, the value becomes 0.00mm uniformly) (*)The of preciseness measurement conforms to II s inspection standard. luminum base IS/ISP/ISD/ISPD/ISDCR/ISPDCR (Example) In case of stroke 0mm Dynamic parallelism -> 0.03mm (s per 1m) x 1.m (stroke) = 0.04mm Dynamic straightness -> 0.02mm (s per 1m) x 1.m (stroke) = 0.03mm Steel base SSP/SSPDCR (Example) In case of stroke 0mm Dynamic parallelism -> 0.03mm (s per 1m) x 0.9m (stroke) = 0.027mm Dynamic straightness -> 0.01mm (s per 1m) x 0.9m (stroke) = 0.014mm * Round up of the fourth decimal place * Round up of the fourth decimal place 1 Dynamic parallelism (horizontal/vertical) 1 Parallelism of the base reference surface and the slider motion (horizontal) With the base affixed on a precision surface plate, an indicator on the slider is caused to contact a straight gauge placed in parallel with two points at both ends of the base reference surface, and then the actuator is moved over the entire stroke. Parallelism of the base reference surface and the slider motion represents the maximum difference between the measured values. Straight gauge point ase reference surface point 2 Parallelism of the base mounting surface and the slider motion (vertical) With the base affixed on a precision surface plate, an indicator on the slider is caused to contact the surface plate, and then the actuator is moved over the entire stroke. Parallelism of the base mounting surface and the slider motion represents the maximum difference between the measured values. ase reference surface Precision surface plate 2 Dynamic straightness (horizontal/vertical) With the base affixed on a precision surface plate, an indicator on the slider is caused to contact a straight gauge placed in parallel with two points at both ends of the base reference surface, and then the actuator is moved over the entire stroke. Parallelism of the base reference surface and the slider motion represents the maximum difference between the measured values. Deviation Measured value ine of representative values Straightness Parallelism Slider travel

14 Cautions for Use [Duty] The duty represents the utilization ratio of the actuator (time during which the actuator is operating in each cycle). Since an estimation for applicable duty varies depending on the operating conditions (transferring mass, / deceleration, etc.), calculate the load factor F and /deceleration time ratio tod using the formula on the right and read off an appropriate duty from the graph. Duty = time time + Stopped time (%) How to calculate duty ➊ Calculate the load factor F using the formula below: oad factor: F= M x a (%) Mr x ar Payload at rated : Mr /deceleration: ar ctual transferring mass: M ctual /deceleration: a (Note) Refer to the model number/ table of each model for the payload at rated and rated / deceleration. ➋ Calculate the /deceleration time ratio t od using the formula below: cceleration/deceleration = cceleration time + Deceleration time cceleration time ratio t od time (%) = (sec) Deceleration = (sec) time cceleration (mm/s 2 ) time Deceleration (mm/s 2 ) cceleration (mm/s 2 ) = cceleration (G) x 9.00 mm/s 2 Deceleration (mm/s 2 ) = Deceleration (G) x 9.00 mm/s 2 ➌ Read off the estimated duty from the calculated load factor F and /deceleration time ratio t od. Example. When the load factor F is 0% and /deceleration time ratio t od is 0%, an estimation for duty is approx. 7%. 0 F = ess than 0% Estimated duty (%) 0 0 40 20 pprox. 7% F = 0% F = 70% F = 0% F = % F = 0% 0 0 20 40 0 cceleration/deceleration time ratio t od (%) 0 0 [Dynamic allowable moment and overhang load length] The dynamic allowable moment, calculated from the traveling life of the guide, is the maximum offset load that can be applied to the slider. The traveling life will decrease when the allowable value is exceeded, so use an auxiliary guide, etc., if it is used within the allowable value or the allowable value is exceeded. The overhang load length represents the maximum length that can overhang from the slider when the requirement for dynamic allowable moment is met. Take note that if the specified overhang load length is exceeded, vibration, etc., may occur. Mb direction Ma direction Mb, Mc directions Mc direction Ma direction Direction of the dynamic allowable moment Direction of the allowable overhang length

Cautions for Use [Mounting] Check the mounting orientation of each model in the table below. : Installable : Not installable Horizontal, flat Vertical Note 1 On side Ceiling-mounted Mounting orientation Series IS ISP Type SXM, SX, MXM, MX, XM, X Note 2 Note 3 MXMX, XMX, XUWX SSP SXM, MXM, XM Note 2 Note 3 ISD ISPD ISDCR ISPDCR S, M, Note 4 Note 4 MX, X SSPDCR S, M, Note 1 When installing the actuator vertically, bring the motor to the top whenever possible. If the actuator is mounted with the motor at the bottom, problems won t occur during normal operation, but if the actuator is stopped for a prolonged period of time, grease may separate depending on the ambient environment (especially when the ambient temperature is high), in which case base oil may flow into the motor unit and could cause problems on rare occasions. Note 2 The separated oil from grease may drip from and also parts dropped from machine may enter into the opening section on the side of the actuator. Note 3 If an actuator with a screw cover is mounted on the ceiling, the screw cover deflects and may interfere with the work. When the stroke of IS series is over 00mm or if the stroke of SSP series is over 00mm, assemble the work away from the seating surface. The table below shows the distance from the seating surface. Series Stroke Distance IS ISP 00mm or more, less than 00mm 00mm or more, less than 1300mm mm or more mm or more SSP 00mm or more, less than 0mm mm or more Note 4 If an actuator with stainless sheet whose stroke is over 400 mm is installed on its side or is mounted on the ceiling, the stainless sheet may become slacked or shift. If the actuator is used continuously in this condition, the stainless sheet may break or other problems may occur. Inspect the stainless sheet daily and make adjustment as necessary. [For the stainless sheet adjustment procedure, refer to Replacing/djusting the Stainless Sheet in the operation manual.] 1

1 Standard Type IS / ISP / SSP Small X-axis, Standard Type Width: mm IS (ISP)-SXM P.17 X-axis, ong Slider Type Width: mm IS (ISP)-SX P.1 Medium X-axis, Standard Type X-axis, ong Slider Type Width: mm IS (ISP)-MXM-0 P.19 Width: mm IS (ISP)-MXM- P.20 Width: mm IS (ISP)-MX-0 P.21 Width: mm IS (ISP)-MX- P. IS ISP Standard (High Precision) Type X-axis, Mid-Support Type Width: mm IS (ISP)-MXMX- P.23 Width: mm IS (ISP)-XM- P.24 X-axis, Standard Type Width: mm IS (ISP)-XM-400 P.2 arge X-axis, ong Slider Type X-axis, Mid-Support Type Width: mm IS (ISP)-X- P.2 Width: mm IS (ISP)-X-400 P.27 Width: mm IS (ISP)-XMX- P.2 Width: mm IS (ISP)-XMX-400 P.29 X-axis, Mid-Support, Double-Slider Type Width: mm IS (ISP)-XUWX- P.30 Width: mm IS (ISP)-XUWX-400 P.31 SSP High Precision Type Small Medium arge X-axis, High-Rigidity, Steel-ase Type X-axis, High-Rigidity, Steel-ase Type X-axis, High-Rigidity, Steel-ase Type Width: 0mm SSP-SXM- P.32 Width: 130mm SSP-MXM-400 P.33 Width: 1mm SSP-XM-70 P.34

0 IS-SXM ISP-SXM * Refer to P. for the details of items comprising the model number. Number/ number 4 (standard + 3) (with brake) 7.3 4.3 2 1 1 1. 4. T slot ase reference surface 4 ase reference surface 011 4 70 0 7 17 42 23 ME SE 2-M3, depth (same on the opposite side) Greasing nipple (same on the opposite side) +0.012 70 4 Home 14 1 3 2-øH7, depth 4-M, depth 1 ME 14 9 (without brake) Cable joint connector 2-øH7, depth 20 0 K J H x pitch 3 P-M, depth 1 0 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit Oblong hole, G 7 (from reference surface) surrounding parts. depth F 0 D C x pitch 0 E-ø7 hole, ø11 counterbored (from opposite side) ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** ±0.02 70±0.02 14 Washer-assembled screw M3 (for FG, 2 locations) 77 1 9 2 thrust (N) IS[ISP]-SXM- 1-0-1-2 - 3-4 - 1 1~ 0.4 1.2 0.4 0. 13 3. 3. 2 3.1 IS[ISP]-SXM- 1-0-- 2-3 - 4 - bsolute 0 0~0 1~40 0.4 0.7 0.4 0. 27 12 7.1 IS[ISP]-SXM- 1-0-4-2 - 3-4 - 4 1~240 0.2 0. 0.2 0.4 30 14 12 212.3 * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 CD drawings Series Type ead Stroke pplicable controller s IS: Standard 0: 0mm T1: XSE-KE/KET T2: ISP: High precision 07 CD Detail view of base mounting hole, T slot Slider reference surface 0 1 Single-axis robot/small, X-axis, standard slider /ctuator width: mm/0w Straight shape Single-axis robot/small, X-axis, standard slider /ctuator width: mm/0w Straight shape High precision SXM 0 : bsolute 0: 0W 1 : 1mm : mm 4 : 4mm 0: 0mm (in 0mm ) SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. ±0.01mm [±0.00mm] Drive (Note 3) all screw012mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 2.4N m Mb: 40.2N m Mc:.7N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.3 kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 without brake 344 394 444 494 44 94 44 94 744 794 44 94 944 994 44 94 1144 with brake 379 429 479 29 79 29 79 729 779 29 79 929 979 29 79 1129 1179 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 21 301 31 401 41 01 1 01 1 701 71 01 1 1 91 01 1 C 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 D 11 201 21 1 11 201 21 1 11 201 21 1 11 201 21 1 11 E 4 4 4 12 12 F 11 201 21 301 31 401 41 01 1 01 1 701 71 01 1 1 91 G 131 131 11 231 21 331 31 431 41 31 1 31 1 731 71 31 1 H 0 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 J 1 20 2 1 20 2 1 20 2 1 20 K 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 P 12 12 12 12 14 14 14 14 1 1 1 Mass (kg) 3.0 3.4 3. 4.2 4. 4.9.2..9.3. 7.0 7.3 7.7.0.4.7 ead 1 1 41 speed ead 40 330 20 2 ead 4 240 1 130 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 17 IS-SXM/ISP-SXM

0 IS-SX ISP-SX SX 0 Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/small, X-axis, long slider /ctuator width: mm/0w Straight shape Single-axis robot/small, X-axis, long slider /ctuator width: mm/0w Straight shape High precision 0: 0W 1 : 1mm : mm 4 : 4mm 130: 130mm 0: 0mm (in 0 mm ) ead Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) IS[ISP]-SX- 1-0-1-2 - 3-4 - 1 1~ 0.4 1.2 0.4 0. 13 3. 3. 2 3.1 IS[ISP]-SX- 1-0-- 2-3 - 4 - bsolute 0 130~0 1~40 0.4 0.7 0.4 0. 27 12 7.1 IS[ISP]-SX- 1-0-4-2 - 3-4 - 4 1~240 0.2 0. 0.2 0.4 30 14 12 212.3 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Master axis M P12 Q seal (standard feature) Q P11 Master axis (sensor on opposite side) M P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on opposite side C P11 ±0.01mm [±0.00mm] Drive (Note 3) all screw012mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 39.7N m Mb:.7N m Mc: 7.3N m Ma direction: 0mm max. Mb, Mc directions: 0mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 7.3 4.3 1 1. 4. 011 07 0 1 4 Detail view of base mounting hole, T slot Slider reference surface 2 1 T slot ase reference surface 4 (standard + 3) (with brake) ase reference surface 4 70 0 7 17 42 23 ME SE 20 0 0 2-M3, depth (same on the opposite side) Greasing nipple (same on the opposite side) 0 +0.012 Oblong hole, depth J 1 0 70 20 20 ±0.02 H x pitch 70±0.02 7 (from reference surface) G F D C x pitch E-ø7 hole, ø11 counterbored (from opposite side) 1 Home 14 2 14 3 2-øH7, depth 3 P-M, depth 1 0 2-øH7, depth 0 2-øH7, depth 4-M, depth 1 ME 14 9 (without brake) Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Washer-assembled screw M3 (for FG, 2 locations) 77 1 9 2 (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.3 kg. *The maximum speed varies depending on the stroke. Stroke 130 10 230 20 330 30 430 40 30 0 30 0 730 70 30 0 without brake 394 444 494 44 94 44 94 744 794 44 94 944 994 44 94 1144 with brake 429 479 29 79 29 79 729 779 29 79 929 979 29 79 1129 1179 130 10 230 20 330 30 430 40 30 0 30 0 730 70 30 0 301 31 401 41 01 1 01 1 701 71 01 1 1 91 01 1 C 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 D 201 21 1 11 201 21 1 11 201 21 1 11 201 21 1 11 E 4 4 12 12 F 201 21 301 31 401 41 01 1 01 1 701 71 01 1 1 91 G 131 11 231 21 331 31 431 41 31 1 31 1 731 71 31 1 H 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 J 1 20 2 1 20 2 1 20 2 1 20 P 12 12 12 12 14 14 14 14 1 1 1 Mass (kg) 3.1 3. 3.9 4.3 4..0.3.7.0.4.7 7.1 7.4 7..1. ead 1 1 41 speed ead 40 330 20 2 ead 4 240 1 130 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-SX/ISP-SX 1

0 IS-MXM-0 ISP-MXM-0 * Refer to P. for the details of items comprising the model number. Number/ 0 7.3 4.3 Slider reference surface T slot ase reference surface 7 (standard + 24) (with brake) MXM 0 Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision number 1. 4. 01 09 Detail view of base mounting hole, T slot 134 ase reference surface 7 12 32 ME SE 1 20 0 1 20 70 Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/0w Straight shape Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/0w Straight shape High precision : bsolute +0.01 0 Oblong hole, depth 0 D 0: 0W 30 : 30mm 20 : 20mm : mm : mm J 0: 0mm 10: 10mm (in 0 mm ) ead Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q 1 1 2 70 2 2-øH7, depth 0 H x pitch N : None S : 3m M : m X : Spec. length 19 7 2 2-M3, depth (same on the opposite side) Home 2 4 Greasing nipple (same on the opposite side) ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** 4-M, depth 1 4-M, depth 1 2-øH7, depth K-M, depth 20 40 0 2-øH7, depth 0 ME 14 3 (without brake) Cable joint connector 1 77 2 (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 393 443 493 43 93 43 93 743 793 43 93 943 993 43 93 1143 1193 1243 1293 1343 1393 with brake 417 47 17 7 17 7 717 77 17 7 917 97 17 7 1117 117 1217 127 1317 137 1417 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 304 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 124 1304 C 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 204 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 E 4 4 12 12 12 12 14 14 14 F 204 24 304 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 G 134 14 234 24 334 34 434 44 34 4 34 4 734 74 34 4 934 94 34 4 1134 H 0 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 J 24 74 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 Mass (kg).0. 7.2 7.9. 9.2 9..4 11.0 11.7 12.3 13.0 13. 14.2 14. 1. 1.1 1. 17.4 1.1 1.7 ead 30 100 12 4 0 ead 20 0 0 9 70 40 speed ead 00 430 34 20 230 ead 300 21 170 140 11 thrust (N) IS[ISP]-MXM- 1-0-30-2 - 3-4 - 30 1~100 0.4 1.2 0.4 1.2 1 3 2. 1. IS[ISP]-MXM- 1-0-20-2 - 3-4 - bsolute 20 1~0 0.4 1.2 0.4 1 23 2. 4.9 0 0~10 IS[ISP]-MXM- 1-0-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 4 20 7 19. IS[ISP]-MXM- 1-0-- 2-3 - 4-1~300 0.2 0. 0.2 0.4 4 20 1 339.7 * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). ±0.01mm [±0.00mm] Drive (Note 3) all screw01mm, rolled C [equivalent to rolled C] 1S P11 Home limit switch P11 ost Motion (Note 4) 0.0mm [0.02mm] max. Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m 3S P11 Non-motor side NM P12 Ma direction: 00mm max. Mb, Mc directions: 00mm max. 3E P11 Guide with ball retention mechanism RT P12 Dynamic straightness (Note ) Q seal (standard feature) Q P11 Master axis M P12 ase Material: luminum, with white alumite treatment rake P11 Master axis (sensor on opposite side) M P12 pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, Creep sensor C P11 Slave axis S P12 (Note 7) N: None, S: 3m, M: m, X : Specified length Creep sensor on opposite side C P11 High straightness, precision ST P13 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD EU: Metal cable joint connector (stand. feature) Refer to the other options table below. Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 19 IS-MXM-0/ISP-MXM-0

0 IS-MXM- ISP-MXM- Series Type ead Stroke pplicable controller s IS: Standard 0: 0mm T1: XSE-KE/KET T2: ISP: High precision MXM : bsolute * Refer to P. for the details of items comprising the model number. Number/ Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/w Straight shape Single-axis robot/medium, X-axis, standard slider /ctuator width: mm/w Straight shape High precision : W 30 : 30mm 20 : 20mm : mm : mm 10: 10mm (in 0 mm ) SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) number Stroke in ead 0mm thrust (N) IS[ISP]-MXM- 1 --30-2 - 3-4 - 30 1~100 0.4 1.2 0.4 1.2 30 9 2 113.9 IS[ISP]-MXM- 1 --20-2 - 3-4 - bsolute 20 1~0 0.4 1.2 0.4 1 4 12 170.9 0~10 IS[ISP]-MXM- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 1 341. IS[ISP]-MXM- 1 --- 2-3 - 4-1~300 0.2 0. 0.2 0.4 1 0 40 30 3. *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 7.3 4.3 Slider reference surface 0 T slot ase reference surface 113 (standard + 3) (with brake) 1. 4. 01 7 09 Detail view of base mounting hole, T slot 134 1 ase reference surface 1 70 20 12 32 ME SE 20 0 0 J +0.01 Oblong hole, depth 0 D 1 1 2 70 2 2-øH7, depth 0 ME 2 14 7 2-M3, depth Home (same on the opposite side) (without brake) 2 4 19 Greasing nipple (same on the opposite side) H x pitch ±0.02 7 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) 4-M, depth 1 4-M, depth 1 Cable joint connector 2-øH7, depth K-M, depth 20 40 0 2-øH7, depth 0 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 1 77 2 During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 40 4 0 0 70 7 0 9 0 1 11 12 130 13 140 with brake 443 493 43 93 43 93 743 793 43 93 943 993 43 93 1143 1193 1243 1293 1343 1393 1443 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 304 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 124 1304 C 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 204 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 E 4 4 12 12 12 12 14 14 14 F 204 24 304 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 G 134 14 234 24 334 34 434 44 34 4 34 4 734 74 34 4 934 94 34 4 1134 H 0 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 J 24 74 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 Mass (kg).4 7.1 7.7.4 9.0 9..2.9 11. 12.2 12. 13.4 14.0 14.7 1.3 1.0 1. 17.3 17.9 1. 19.1 ead 30 100 12 4 0 ead 20 0 0 9 70 40 speed ead 00 430 34 20 230 ead 300 21 170 140 11 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-MXM-/ISP-MXM- 20

0 IS-MX-0 ISP-MX-0 MX 0 Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ Single-axis robot/medium, X-axis, long slider /ctuator width: mm/0w Straight shape Single-axis robot/medium, X-axis, long slider /ctuator width: mm/0w Straight shape High precision 0: 0W 30 : 30mm 20 : 20mm : mm : mm : mm 70: 70mm (in 0 mm ) T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) number Stroke in ead 0mm thrust (N) IS[ISP]-MX- 1-0-30-2 - 3-4 - 30 1~100 0.4 1.2 0.4 1.2 1 3 2. 1. IS[ISP]-MX- 1-0-20-2 - 3-4 - bsolute 20 1~0 0.4 1.2 0.4 1 23 2. 4.9 0 ~70 IS[ISP]-MX- 1-0-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 4 20 7 19. IS[ISP]-MX- 1-0-- 2-3 - 4-1~300 0.2 0. 0.2 0.4 4 20 1 339.7 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Master axis M P12 Q seal (standard feature) Q P11 Master axis (sensor on opposite side) M P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on opposite side C P11 ±0.01mm [±0.00mm] Drive (Note 3) all screw01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma:.3N m Mb:.4N m Mc: 193.7N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 0 7.3 4.3 T slot ase reference surface 7 (standard + 24) (with brake) 1. 4. 01 CD 09 Detail view of base mounting hole, T slot 12 32 Slider reference surface 134 ME 1 ase reference surface 1 7 70 20 SE 20 0 0 J +0.01 Oblong hole, depth 0 D 1 1 30 30 2-øH7, depth 7 -M, depth 1 2-M3, depth Home (same on the opposite side) 24 23 Greasing nipple (same on the opposite side) H x pitch 19 7 ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) 2 2-øH7, depth K-M, depth 20 40 0 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. 0 Cable joint connector Connect the ME motor cable 14 3 and encoder (without cable. Refer brake) to P. 7 for the cables. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 1 77 2 (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 without brake 443 493 43 93 43 93 743 793 43 93 943 993 43 93 1143 1193 1243 1293 1343 1393 with brake 47 17 7 17 7 717 77 17 7 917 97 17 7 1117 117 1217 127 1317 137 1417 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 124 1304 C 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 E 4 12 12 12 12 14 14 14 F 24 304 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 G 14 234 24 334 34 434 44 34 4 34 4 734 74 34 4 934 94 34 4 1134 H 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 J 74 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 Mass (kg).3.9 7..2. 9..1.7 11.3 12.0 12. 13.3 13.9 14. 1.1 1. 1.4 17.1 17.7 1.4 ead 30 100 12 4 0 ead 20 0 0 9 70 40 speed (mm/s ead 00 430 34 20 230 ead 300 21 170 140 11 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 21 IS-MX-0/ISP-MX-0

0 IS-MX- ISP-MX- MX Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ Single-axis robot/medium, X-axis, long slider /ctuator width: mm/w Straight shape Single-axis robot/medium, X-axis, long slider /ctuator width: mm/w Straight shape High precision : W 30 : 30mm 20 : 20mm : mm : mm : mm 70: 70mm (in 0 mm ) T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) number Stroke in ead 0mm thrust (N) IS[ISP]-MX- 1 --30-2 - 3-4 - 30 1~100 0.4 1.2 0.4 1.2 30 9 2 113.9 IS[ISP]-MX- 1 --20-2 - 3-4 - bsolute 20 1~0 0.4 1.2 0.4 1 4 12 170.9 ~70 IS[ISP]-MX- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 1 341. IS[ISP]-MX- 1 --- 2-3 - 4-1~300 0.2 0. 0.2 0.4 1 0 40 30 3. *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Master axis M P12 Q seal (standard feature) Q P11 Master axis (sensor on opposite side) M P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on opposite side C P11 ±0.01mm [±0.00mm] Drive (Note 3) all screw01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma:.3N m Mb:.4N m Mc: 193.7N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 7.3 4.3 0 T slot ase reference surface 113 (standard + 3) (with brake) 1. 4. 01 CD 09 Detail view of base mounting hole, T slot 12 32 134 ME Slider reference surface 1 ase reference surface 1 7 70 20 SE 20 0 0 +0.01 Oblong hole, depth 0 D Greasing nipple (same on the opposite side) J 1 1 30 30 2-øH7, depth 7 -M, depth1 2-M3, depth Home (same on the opposite side) 24 23 H x pitch 19 7 ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) 2 Cable joint connector Connect the ME motor cable and encoder 14 7 cable. Refer (without brake) to P. 7 for the cables. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 2-øH7, depth K-M, depth 20 40 0 2-øH7, depth (model number: 3E) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Cable exit from the rear left (model number: 1E) 0 Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 without brake 4 0 0 70 7 0 9 0 1 11 12 130 13 140 with brake 493 43 93 43 93 743 793 43 93 943 993 43 93 1143 1193 1243 1293 1343 1393 1443 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 124 1304 C 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 24 4 14 204 E 4 12 12 12 12 14 14 14 F 24 304 34 404 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 G 14 234 24 334 34 434 44 34 4 34 4 734 74 34 4 934 94 34 4 1134 H 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 J 74 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 274 124 174 4 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 Mass (kg).7 7.4.0.7 9.3 9.9. 11.2 11. 12. 13.1 13.7 14.3 1.0 1. 1.3 1.9 17. 1.2 1.9 ead 30 100 12 4 0 ead 20 0 0 9 70 40 speed ead 00 430 34 20 230 ead 300 21 170 140 11 1 77 2 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-MX-/ISP-MX-

0 IS-MXMX- ISP-MXMX- IS: Standard ISP: High precision number : bsolute * Refer to P. for the details of items comprising the model number. Number/ Single-axis robot/medium, X-axis, mid-support /ctuator width: mm/w Straight shape Single-axis robot/medium, X-axis, mid-support /ctuator width: mm/w Straight shape High precision MXMX Series Type ead Stroke pplicable controller s : W 30 : 30mm 20 : 20mm ead 00: 00mm 0: 0mm (in 0 mm ) Stroke in 0mm T1: XSE-KE/KET T2: cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) IS[ISP]-MXMX- 1 --30-2 - 3-4 - bsolute 30 1~100 0.4 Designed 30 Designed 113.9 00~0 exclusively for exclusively for IS[ISP]-MXMX- 1 --20-2 - 3-4 - 20 1~0 0.4 horizontal use 4 horizontal use 170.9 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw01mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 0 7.3 4.3 Slider reference surface T slot ase reference surface 1. 4. 01 09 Detail view of base mounting hole, T slot ase reference surface 134 1 1 70 20 7 12 0 ME +0.01 SE Oblong hole, depth G H 0 C D F D C 0 F-ø9 hole, ø1 counterbored (from opposite side) 1 1 2 70 2 2-øH7, depth 0 14 2-M3, depth Home ME (same on the opposite side) 24 19 ±0.02 4-M, depth 1 4-M, depth 1 without brake: 7 with brake: 113 Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) 2 1 77 2 (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 0 00 10 0 1300 1400 0 0 1700 100 10 0 without brake 4 1304 1404 4 4 1704 104 14 4 24 04 2304 2404 with brake 1239 1339 1439 139 139 1739 139 1939 2039 2139 39 2339 2439 00 0 00 10 0 1300 1400 0 0 1700 100 10 0 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 C 20 300 30 400 40 00 0 D 0 0 0 0 0 0 0 0 0 0 400 40 00 E 300 400 400 400 400 400 400 400 400 400 400 400 F 12 12 12 12 12 12 12 12 12 12 1 1 1 G 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 H 00 0 00 10 0 1300 1400 0 0 1700 100 10 0 Mass (kg) 1. 17. 19.1 20.3 21..9 24.1 2.4 2.7 2.0 29.2 30. 31. ead 30 100 0 142 0 0 0 2 70 7 speed ead 20 0 10 00 00 700 00 0 00 40 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 23 IS-MXMX-/ISP-MXMX-

0 IS-XM- ISP-XM- * Refer to P. for the details of items comprising the model number. Number/ 9 Slider reference surface 1. 4. 4.3 T slot ase reference surface 1 (standard + 34) (with brake) XM Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision number 7.3 01 09 Detail view of base mounting hole, T slot 1 134 140 140 2 ase reference surface ME SE 1 33 70 Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/w Straight shape High precision : bsolute 20 0 0 +0.01 Oblong hole, depth 0 : W 40 : 40mm 20 : 20mm : mm D J 0: 0mm 1300: 1300mm (in 0 mm ) ead Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length 1 1 30 30 2-øH7, depth 7 -M, depth 20 Cable joint connector 2-M3, depth Home (same on the opposite side) 24 23 2 Greasing nipple (same on the opposite side) 2-øH7, depth K-M, depth 20 H x pitch 3 1 ±0.02 7 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** 0 ME 23 7 (without brake) 2-øH7, depth (model number: 3S) (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 2 (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 42 02 2 02 2 702 72 02 2 2 92 02 2 12 112 2 1 1302 132 1402 142 2 12 2 12 with brake 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 14 13 1 13 1 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 33 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 14 13 C 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 E 4 4 12 12 12 12 14 14 14 14 1 1 1 F 23 2 33 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 G 1 21 2 31 3 41 4 1 1 71 7 1 91 9 1 111 11 121 12 131 13 H 0 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 J 33 3 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 20 Mass (kg) 9.4.3 11.1 12.0 12. 13.7 14. 1. 1.3 17.2 1.0 1.9 19. 20.7 21..4 23.2 24.1 2.0 2.9 2.7 27. 2.4 29.3 30.2 ead 40 2400 140 130 12 10 0 speed ead 20 0 920 7 4 0 440 ead 00 40 30 320 270 0 thrust (N) IS[ISP]-XM- 1 --40-2 - 3-4 - 40 1~2400 0.4 1.2 0.4 1.2 1 4 1.. IS[ISP]-XM- 1 --20-2 - 3-4 - bsolute 20 0~1300 1~0 0.4 1.2 0.4 1 4 12 170.9 IS[ISP]-XM- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 14 341. * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 1.0kg. (Please also refer to P.9). ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] 1S P11 Home limit switch P11 ost Motion (Note 4) 0.0mm [0.02mm] max. Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m 3S P11 Non-motor side NM P12 Ma direction: 70mm max. Mb, Mc directions: 70mm max. 3E P11 Guide with ball retention mechanism RT P12 Dynamic straightness (Note ) Q seal (standard feature) Q P11 Master axis M P12 ase Material: luminum, with white alumite treatment rake P11 Master axis (sensor on opposite side) M P12 pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, Creep sensor C P11 Slave axis S P12 (Note 7) N: None, S: 3m, M: m, X : Specified length Creep sensor on opposite side C P11 High straightness, precision ST P13 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD EU: Metal cable joint connector (stand. feature) Refer to the other options table below. Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-XM-/ISP-XM- 24

0 IS-XM-400 ISP-XM-400 Series Type ead Stroke pplicable controller s IS: Standard 0: 0mm T1: XSE-KE/KET T2: ISP: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, standard slider /ctuator width: mm/400w Straight shape High precision XM 400 : bsolute 400: 400W 40 : 40mm 20 : 20mm : mm 1300: 1300mm (in 0 mm ) ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) IS[ISP]-XM- 1-400-40-2 - 3-4 - 40 1~2400 0.4 1.2 0.4 1.2 40 1 4 19. IS[ISP]-XM- 1-400-20-2 - 3-4 - bsolute 400 20 0~1300 1~0 0.4 1.2 0.4 1 24 20 339.1 IS[ISP]-XM- 1-400-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 0 40 30 7.3 SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 9 Slider reference surface 1. 4. 4.3 T slot ase reference surface 7.3 01 09 Detail view of base mounting hole, T slot 132 (standard + 34) 1 134 140 140 70 2 (with brake) ase reference surface 1 33 ME SE 20 0 0 Oblong hole, depth +0.01 0 D 1 1 30 30 2-øH7, depth 7 -M, depth 20 2-M3, depth (same on the opposite side) Greasing nipple (same on the opposite side) 2-øH7, depth H x pitch 2 ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) 23 9 Home 24 23 K-M, depth 20 3 1 0 ME (without brake) Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Washer-assembled screw M4 (for FG, 2 locations) 130 2 (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 474 24 74 24 74 724 774 24 74 924 974 24 74 1124 1174 14 1274 1324 1374 1424 1474 124 174 124 174 with brake 0 0 70 7 0 9 0 1 11 12 130 13 140 14 1 1 170 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 33 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 14 13 C 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 E 4 4 12 12 12 12 14 14 14 14 1 1 1 F 23 2 33 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 G 1 21 2 31 3 41 4 1 1 71 7 1 91 9 1 111 11 121 12 131 13 H 0 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 J 33 3 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 20 Mass (kg) 9..7 11. 12. 13.3 14.2 1.0 1.9 1. 17.7 1. 19.4 20.2 21.1.0.9 23.7 24. 2.4 2.3 27.2 2.1 2.9 29. 30. ead 40 2400 140 130 12 10 0 speed ead 20 0 920 7 4 0 440 ead 00 40 30 320 270 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 2 IS-XM-400/ISP-XM-400

0 IS-X- ISP-X- Series Type ead Stroke pplicable controller s IS: Standard : mm T1: XSE-KE/KET T2: ISP: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, X-axis, long slider /ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, long slider /ctuator width: mm/w Straight shape High precision X : bsolute : W 40 : 40mm 20 : 20mm : mm 1270: 1270mm (in 0 mm ) ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) IS[ISP]-X- 1 --40-2 - 3-4 - 40 1~2400 0.4 1.2 0.4 1.2 1 4 1.. IS[ISP]-X- 1 --20-2 - 3-4 - bsolute 20 0~1270 1~0 0.4 1.2 0.4 1 4 12 170.9 IS[ISP]-X- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 14 341. SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Master axis M P12 Q seal (standard feature) Q P11 Master axis (sensor on opposite side) M P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on opposite side C P11 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 137.N m Mb: 19.N m Mc: 27.N m Ma direction: 0mm max. Mb, Mc directions: 0mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 1. 4. 4.3 Slider reference surface 7.3 01 09 Detail view of base mounting hole, T slot 9 T slot ase reference surface 1 (standard + 34) 1 134 140 140 2 1 33 ME SE 70 20 0 0 +0.01 J 10 2-øH7, depth 4 4 -M, depth 20 10 2-M3, depth (same on the opposite side) Greasing nipple (same on the opposite side) 2-øH7, depth H x pitch 2 ±0.02 K-M, depth 20 3 1 ±0.02 ME 23 7 Home (without brake) 24 2 Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Washer-assembled screw M4 (for FG, 2 locations) 130 2 (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Oblong hole, depth G (from reference surface) (with brake) F 0 D C x pitch 0 ase reference surface E-ø9 hole, ø1 counterbored (from opposite side) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 without brake 02 2 02 2 702 72 02 2 2 92 02 2 12 112 2 1 1302 132 1402 142 2 12 2 12 with brake 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 14 13 1 13 1 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 14 13 C 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 E 4 12 12 12 12 14 14 14 14 1 1 1 F 2 33 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 G 21 2 31 3 41 4 1 1 71 7 1 91 9 1 111 11 121 12 131 13 H 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 J 3 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 20 Mass (kg) 9..7 11. 12.4 13.2 14.1 1.0 1.9 1.7 17. 1.4 19.3 20.2 21.1 21.9. 23. 24. 2.4 2.3 27.1 2.0 2. 29.7 ead 40 2400 140 130 12 10 0 speed ead 20 0 920 7 4 0 440 ead 00 40 30 320 270 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-X-/ISP-X- 2

0 IS-X-400 ISP-X-400 Series Type ead Stroke pplicable controller s IS: Standard : mm T1: XSE-KE/KET T2: ISP: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, X-axis, long slider /ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, long slider /ctuator width: mm/400w Straight shape High precision X 400 : bsolute 400: 400W 40 : 40mm 20 : 20mm : mm 1270: 1270mm (in 0 mm ) ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) IS[ISP]-X- 1-400-40-2 - 3-4 - 40 1~2400 0.4 1.2 0.4 1.2 40 1 4 19. IS[ISP]-X- 1-400-20-2 - 3-4 - bsolute 400 20 0~1270 1~0 0.4 1.2 0.4 1 24 20 339.1 IS[ISP]-X- 1-400-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 0 40 30 7.3 SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Master axis M P12 Q seal (standard feature) Q P11 Master axis (sensor on opposite side) M P12 rake P11 Slave axis S P12 Creep sensor C P11 High straightness, precision ST P13 Creep sensor on opposite side C P11 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 137.N m Mb: 19.N m Mc: 27.N m Ma direction: 0mm max. Mb, Mc directions: 0mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 9 Slider reference surface 1. 4. 4.3 T slot ase reference surface 7.3 01 09 Detail view of base mounting hole, T slot 132 (standard + 34) 1 134 140 140 70 2 (with brake) ase reference surface 1 33 ME SE 20 0 0 Oblong hole, depth +0.01 0 D 1 1 30 30 2-øH7, depth 7 -M, depth 20 2-M3, depth (same on the opposite side) Greasing nipple (same on the opposite side) 2-øH7, depth H x pitch 2 ±0.02 ±0.02 G (from reference surface) F C x pitch E-ø9 hole, ø1 counterbored (from opposite side) 23 9 Home 24 23 K-M, depth 20 3 1 0 ME (without brake) Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2-øH7, depth During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Washer-assembled screw M4 (for FG, 2 locations) 130 2 (model number: 3S) (model number: 1S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke by *If the brake is equipped, the mass increases 0.kg. *The maximum speed varies depending on the stroke. Stroke 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 without brake 24 74 24 74 724 774 24 74 924 974 24 74 1124 1174 14 1274 1324 1374 1424 1474 124 174 124 174 with brake 0 70 7 0 9 0 1 11 12 130 13 140 14 1 1 170 170 0 270 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 14 13 C 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 D 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 2 13 1 23 E 4 12 12 12 12 14 14 14 14 1 1 1 F 2 33 3 43 4 3 3 73 7 3 93 9 3 113 11 123 12 133 13 143 G 21 2 31 3 41 4 1 1 71 7 1 91 9 1 111 11 121 12 131 13 H 0 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 J 3 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 23 133 13 233 K 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 20 Mass (kg).2 11.1 12.0 12.9 13.7 14. 1.4 1.3 17.2 1.1 1.9 19. 20. 21..4 23.3 24.1 2.0 2. 2.7 27. 2. 29.3 30.2 ead 40 2400 140 130 12 10 0 speed ead 20 0 920 7 4 0 440 ead 00 40 30 320 270 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 27 IS-X-400/ISP-X-400

IS-XMX- ISP-XMX- IS: Standard ISP: High precision XMX Series Type ead Stroke pplicable controller s : W 20 : 20mm 0: 0mm T1: XSE-KE/KET T2: * Refer to P. for the details of items comprising the model number. Number/ number IS[ISP]-XMX- 1 --20-2 - 3-4 - : bsolute Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/w Straight shape High precision bsolute : mm (in 0 mm ) ead Stroke in 0mm SSE XSE-P/Q N : None S : 3m M : m X : Spec. length 20 00~ 1~0 0.4 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) Designed exclusively for horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 4 Designed exclusively for horizontal use thrust (N) 170.9 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 1. 4. 4.3 7.3 01 1 1 30 30 2-øH7, depth 7 -M, depth 20 ±0.02 Cable joint connector (model number: 3S) Slider reference surface 9 09 Detail view of base mounting hole, T slot T slot ase reference surface 1 134 140 1 79 ME SE 2-M3, depth (same on the opposite side) Greasing nipple (same on the opposite side) 7 2 3 7 Home ME 24 23 2 (without brake) 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) 1 (standard + 34) (with brake) 140 2 70 ase reference surface 0 +0.01 0 Oblong hole, depth C x pitch D F 400 G D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 2400 without brake 144 14 14 174 14 194 204 214 4 234 244 24 24 274 24 294 with brake 149 19 19 179 19 199 209 219 9 239 249 29 29 279 29 299 14 1114 1214 1314 1414 114 114 1714 114 1914 2014 2114 14 2314 2414 214 130 140 170 10 1 2 0 230 240 20 20 270 20 C 1 1 1 1 1 1 1 1 2 2 2 2 3 3 3 3 D 27 32 37 42 47 2 7 42 47 2 7 42 47 2 7 E 12 12 12 12 12 12 12 12 1 1 1 1 20 20 20 20 F 130 140 170 10 1 2 0 230 240 20 20 270 G 0 1 130 140 170 10 1 2 0 230 240 20 Mass (kg) 27.3 29.0 30. 32. 34.3 3.1 37. 39. 41.3 43.1 44. 4. 4.3 0.1 1. 3. speed ead 20 0 1 00 30 740 0 40 4 440 4 370 340 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-XMX-/ISP-XMX- 2

IS-XMX-400 ISP-XMX-400 XMX 400 Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, mid-support /ctuator width: mm/400w Straight shape High precision 400: 400W 40 : 40mm 20 : 20mm 0: 0mm : mm (in 0 mm ) ead Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) 40 Designed thrust (N) IS[ISP]-XMX- 1-400-40-2 - 3-4 - bsolute 40 400 00~ 1~2400 0.4 Designed 19. exclusively for exclusively for IS[ISP]-XMX- 1-400-20-2 - 3-4 - 20 1~0 0.4 horizontal use horizontal use 339.1 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 9 1. 4. 4.3 Slider reference surface 7.3 01 09 Detail view of base mounting hole, T slot T slot ase reference surface 1 134 140 1 79 ME SE 1 1 30 30 2-øH7, depth 7 -M, depth 20 7 2 3 9 2-M3, depth Home ME (without (same on the opposite side) brake) 24 23 Greasing nipple (same on the opposite side) 2 ±0.02 Cable joint connector 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (model number: 3S) 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) 132 (standard + 34) (with brake) 140 2 70 ase reference surface 0 +0.01 0 Oblong hole, depth C x pitch D F 400 G D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 2400 without brake 14 1 1 17 1 19 20 21 23 24 2 2 27 2 29 with brake 1720 120 1920 2020 2 20 2320 2420 0 0 2720 220 2920 3020 14 1114 1214 1314 1414 114 114 1714 114 1914 2014 2114 14 2314 2414 214 130 140 170 10 1 2 0 230 240 20 20 270 20 C 1 1 1 1 1 1 1 1 2 2 2 2 3 3 3 3 D 27 32 37 42 47 2 7 42 47 2 7 42 47 2 7 E 12 12 12 12 12 12 12 12 1 1 1 1 20 20 20 20 F 130 140 170 10 1 2 0 230 240 20 20 270 G 0 1 130 140 170 10 1 2 0 230 240 20 Mass (kg) 27.7 29. 31.3 33.0 34. 3. 3.3 40.0 41. 43. 4.3 47.0 4. 0. 2.3 4.1 ead 40 2400 2300 0 10 140 1300 110 0 90 0 20 740 0 speed ead 20 0 1 00 30 740 0 40 4 440 4 370 340 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 29 IS-XMX-400/ISP-XMX-400

IS-XUWX- ISP-XUWX- IS: Standard ISP: High precision XUWX Series Type ead Stroke pplicable controller s : W 20 : 20mm 00: 00mm T1: XSE-KE/KET T2: * Refer to P. for the details of items comprising the model number. Number/ number IS[ISP]-XUWX- 1 --20-2 - 3-4 - : bsolute Single-axis robot/arge, X-axis, mid-support, double-slider / ctuator width: mm/w Straight shape Single-axis robot/arge, X-axis, mid-support, double-slider /ctuator width: mm/w Straight shape High precision bsolute : mm (in 0 mm ) ead Stroke in 0mm SSE XSE-P/Q N : None S : 3m M : m X : Spec. length 20 00~ 1~0 0.4 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) Designed exclusively for horizontal use *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 4 Designed exclusively for horizontal use thrust (N) 170.1 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 179.3N m Mb: 24.N m Mc: 247.0N m Ma direction: mm max. Mb, Mc directions: mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD 9 1. 4. 4.3 Slider reference surface 7.3 01 09 Detail view of base mounting hole, T slot T slot ase reference surface 1 (standard + 34) (with brake) 1 134 140 140 2 ase reference surface 1 79 ME 70 0 SE +0.01 0 Oblong hole, depth C x pitch Greasing nipple (same on the opposite side) D 20 0 0 0 0 2x2-øH7, depth 40 40 2x4-M, depth 20 Cable joint connector ±0.02 20 7 23 7 2-M3, depth Home ME (without (same on the opposite side) brake) 241 2 G F 400 D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) ±0.02 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) 2 (model number: 1S) Washer-assembled screw M4 (for FG, 2 locations) 130 (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 2400 without brake 14 14 174 14 194 204 214 4 234 244 24 24 274 24 294 304 with brake 19 19 179 19 199 209 219 9 239 249 29 29 279 29 299 309 14 1114 1214 1314 1414 114 114 1714 114 1914 2014 2114 14 2314 2414 214 140 170 10 1 2 0 230 240 20 20 270 20 2 C 1 1 1 1 1 1 1 2 2 2 2 3 3 3 3 3 D 27 32 37 42 47 2 7 42 47 2 7 42 47 2 7 2 E 12 12 12 12 12 12 12 1 1 1 1 20 20 20 20 20 F 130 140 170 10 1 2 0 230 240 20 20 270 20 G 1 130 140 170 10 1 2 0 230 240 20 20 Mass (kg) 30.4 32.1 33.9 3. 37.4 39.1 40.9 42. 44.4 4.1 47.9 49.7 1.4 3.2 4.9.7 speed ead 20 0 1 00 30 740 0 40 4 440 4 370 340 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) IS-XUWX-/ISP-XUWX- 30

IS-XUWX-400 ISP-XUWX-400 XUWX 400 Series Type ead Stroke pplicable controller s IS: Standard ISP: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, X-axis, mid-support, double-slider / ctuator width: mm/400w Straight shape Single-axis robot/arge, X-axis, mid-support, double-slider /ctuator width: mm/400w Straight shape High precision 400: 400W 40 : 40mm 20 : 20mm 00: 00mm : mm (in 0 mm ) ead Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) 40 Designed thrust (N) IS[ISP]-XUWX- 1-400-40-2 - 3-4 - bsolute 40 400 00~ 1~2400 0.4 Designed 19. exclusively for exclusively for IS[ISP]-XUWX- 1-400-20-2 - 3-4 - 20 1~0 0.4 horizontal use horizontal use 339.1 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw020mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 179.3N m Mb: 24.N m Mc: 247.0N m Ma direction: mm max. Mb, Mc directions: mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD Slider reference surface 9 T slot ase reference surface 1. 4. 4.3 7.3 01 09 Detail view of base mounting hole, T slot 1 134 140 1 79 ME SE Greasing nipple (same on the opposite side) 20 0 0 0 0 40 40 ±0.02 ±0.02 20 7 23 9 2-M3, depth Home ME (without (same on the opposite side) brake) 241 2 2x2-øH7, depth 2x4-M, depth 20 Cable joint connector 2-øH7, depth Connect the motor cable and encoder cable. Refer to P. 7 for the cables. (model number: 3S) Washer-assembled screw M4 (for FG, 2 locations) 130 2 (model number: 1S) (model number: 3E) 132 (standard + 34) (with brake) 140 2 70 ase reference surface 0 +0.01 0 Oblong hole, depth C x pitch D G F 400 D C x pitch 0 E-ø9 hole, ø1 counterbored (from opposite side) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 2400 without brake 1 1 17 1 19 20 21 23 24 2 2 27 2 29 30 with brake 1720 120 1920 2020 2 20 2320 2420 0 0 2720 220 2920 3020 3 14 1114 1214 1314 1414 114 114 1714 114 1914 2014 2114 14 2314 2414 214 140 170 10 1 2 0 230 240 20 20 270 20 2 C 1 1 1 1 1 1 1 2 2 2 2 3 3 3 3 3 D 27 32 37 42 47 2 7 42 47 2 7 42 47 2 7 2 E 12 12 12 12 12 12 12 1 1 1 1 20 20 20 20 20 F 130 140 170 10 1 2 0 230 240 20 20 270 20 G 1 130 140 170 10 1 2 0 230 240 20 20 Mass (kg) 30. 32. 34.3 3.1 37. 39. 41.4 43.1 44.9 4. 4.4 0.1 1.9 3..4 7.1 ead 40 2400 2300 0 10 140 1300 110 0 90 0 20 740 0 speed ead 20 0 1 00 30 740 0 40 4 440 4 370 340 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISP series. Other values apply commonly to the IS and ISP. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 31 IS-XUWX-400/ISP-XUWX-400

SSP-SXM- Single-axis robot/small, X-axis, high-rigidity, steel-base /ctuator width: 0mm/W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ CD 70 CD drawings 1 4 φ12 Slider reference surface 2. SSP SXM Series Type ead Stroke pplicable controller s SSP: High precision number 0 9 92 0 ase reference surface 4. φ7 M 1 4 : bsolute 12 ME 2 0 R SE : W 30 : 30mm 20: 20mm : mm P 0: 0mm 10: 10mm (in 0 mm ) ead 2-φH7, depth Slider reference surface M pitch xn 9. 17. ±0.02 17.. -M, depth 9 7. 37. 37. 7. 70 without brake: 134 Stroke (ST) 2 12 with brake: 19 2-M3, depth Home ME (same on the opposite side) 33 4. pitch xm Greasing nipple (same on the opposite side) for guide and ball screw Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Steel base with anti-corrosive protection MD P12 High straightness, precision ST P13 9 X ±0.02 20 N : None S : 3m M : m X : Spec. length Positioning repeatability ±0.00mm Drive all screw01mm, equivalent to rolled C ost Motion (Note 4) 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 3N m Mb: 3N m Mc: 9N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) R 0 desired cable exit direction can be selected. 1 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 0 0 92 21 2. (M3 tap) t-m3, depth 3 (same on the opposite side) r-m, depth 9 r-07 hole Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. 2. 2. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) Detail view X-X (Detail of base mounting hole) ±0.02 +0.012 (from reference surface) 0 ±0.02 (from reference surface) X 30 Oblong hole, depth N φh7, depth ase reference surface 70 Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 39 44 49 4 9 4 9 74 79 4 9 94 99 4 9 114 119 124 129 134 139 with brake 433 43 33 3 33 3 733 73 33 3 933 93 33 3 1133 113 1233 123 1333 133 1433 M 240 2 340 3 440 4 40 40 740 7 40 940 9 40 1140 11 1240 N 140 1 240 2 340 3 440 4 40 40 740 7 40 940 9 40 1140 P 140 40 140 40 140 40 140 40 140 40 140 40 140 40 R 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 m 1 1 2 2 2 3 3 3 4 4 4 7 7 7 n 0 1 1 1 2 2 2 3 3 3 4 4 4 7 7 r 4 12 12 12 14 14 14 1 1 1 1 1 t 2 2 3 3 3 4 4 4 7 7 7 9 Mass (kg). 7.4.1.7 9.3.0. 11.2 11.9 12. 13.1 13. 14.4 1.0 1. 1.3 1.9 17. 1.2 1. 19.4 thrust (N) SSP-SXM- 1 --30-2 - 3-4 - 30 1~100 0.4 1.2 0.4 1.2 30 4 1 113.9 SSP-SXM- 1 --20-2 - 3-4 - bsolute 20 0~10 1~0 0.4 1.0 0.4 1.0 4 17 2.4 170.9 SSP-SXM- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 0 12 341. speed ead 30 100 10 140 1320 110 0 70 7 730 70 ead 20 0 1 9 0 70 7 40 0 30 40 440 ead 00 0 4 440 3 30 320 2 20 240 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is 000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) SSP-SXM- 32

SSP-MXM-400 Single-axis robot/medium, X-axis, high-rigidity, steel-base /ctuator width: 130mm/400W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ 0 CD. CD drawings 1 Slider reference surface 2. 130 12 1 130 ase reference surface φ1 SSP MXM 400 Series Type ead Stroke pplicable controller s SSP: High precision number. M φ9 : bsolute 1 29 ME SE R 0 12 P 400: 400W 40 : 40mm 20 : 20mm : mm Slider reference surface 0: 0mm 1300: 1300mm (in 0 mm ) ead 2-φH7, depth M pitch xn 9 12 1 2 70±0.02 2 9 ±0.02 -M, depth 12 0 0 9 without brake: Stroke (ST) 29 1 with brake: 1 2-M3, depth Home (same on the opposite side) 33 4. ME pitch xm Stroke in 0mm Greasing nipple (same on the opposite side) for guide and ball screw T1: XSE-KE/KET T2: SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Steel base with anti-corrosive protection MD P12 High straightness, precision ST P13 X 29 N : None S : 3m M : m X : Spec. length Positioning repeatability ±0.00mm Drive all screw020mm, equivalent to rolled C ost Motion (Note 4) 0.02mm max. Dynamic allowable load moment (Note 2) Ma: N m Mb: N m Mc: 230N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) R 0 desired cable exit direction can be selected. 17 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 34. (M3 tap) t-m3, depth 4 (same on the opposite side) r-m, depth 12 r-09 hole 70 0 2 Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. 2. 7 2. (model number: 3S) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) Detail view X-X ±0.02 +0.01 0 X ±0.02 (from reference surface) (Detail of base mounting hole) (from reference surface) Oblong hole, depth φh7, depth ase reference surface 29 N 9 Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) SSP-MXM- 1-400-40-2 - 3-4 - 40 1~2400 0.4 1.2 0.4 1.2 4 13. 2 19. SSP-MXM- 1-400-20-2 - 3-4 - bsolute 400 20 0~1300 1~0 0.4 1.0 0.4 1.0 34 12 4. 339.1 SSP-MXM- 1-400-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 70 2 1. 7.3 speed without brake 4 0 0 70 7 0 9 0 1 11 12 130 13 140 14 1 1 with brake 493 43 93 43 93 743 793 43 93 943 993 43 93 1143 1193 1243 1293 1343 1393 1443 1493 143 193 143 193 M 27 32 37 42 47 2 7 2 7 72 77 2 7 92 97 2 7 112 117 1 127 132 137 142 147 N 2 20 3 30 4 40 0 0 7 70 0 9 0 11 1 12 13 130 P 1 20 1 20 1 20 1 20 1 20 1 20 1 R 4 14 39 4 14 39 4 14 39 4 14 39 4 14 39 4 14 39 4 14 39 4 14 39 4 m 1 2 2 2 3 3 3 4 4 4 7 7 7 9 9 9 n 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 r 4 4 12 12 12 12 14 14 14 14 1 1 1 t 2 3 3 3 4 4 4 7 7 7 9 9 9 Mass (kg) 12.4 13. 14. 1.7 1.7 17. 1.9 20.0 21.1.2 23.2 24.3 2.4 2. 27. 2.7 29.7 30. 31.9 33.0 34.1 3.2 3.2 37.3 3.4 ead 40 2400 2 1930 1740 10 1440 1320 12 1 30 30 ead 20 0 70 70 7 720 0 00 0 40 440 4 ead 00 30 40 430 3 30 330 300 20 20 240 0 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 230 VC (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is 000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) 33 SSP-MXM-400

SSP-XM-70 Single-axis robot/arge, X-axis, high-rigidity, steel-base /ctuator width: 1mm/70W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ number Slider reference surface SSP XM 70 Series Type ead Stroke pplicable controller s SSP: High precision 13 1 1 1 2. : bsolute 70: 70W 0 : 0mm 2 : 2mm ead 0: 0mm 0: 0mm (in 0 mm ) Stroke in 0mm T1: XSE-KE/KET T2: +0.01 2-øH7 0 depth 12 Slider reference surface 9 13 13 2 0±0.02 2 -M, depth 1 1 : ST + 440 without brake, ST + 477 with brake 1 3 Stroke (ST) 4-M3, depth SE (same on the opposite side) ME 4-M4, depth (same on the opposite side) 9±0.02 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** SSP-XM- 1-70-0-2 - 3-4 - bsolute 0 1~ 0.4 1.2 0.4 1.2 0 20 12 4 2 70 0~0 SSP-XM- 1-70-2-2 - 3-4 - 2 1~ 0.4 1.2 0.4 1.2 40 2 SSE XSE-P/Q N : None S : 3m M : m X : Spec. length * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 2.0kg. (Please also refer to P.7). CD CD drawings 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Steel base with anti-corrosive protection MD P12 High straightness, precision ST P13 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 3 31. 4 19. 19. 4. desired cable exit direction can be selected. without brake: 174 with brake: 211 34 20 ME Home Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. Washer-assembled screw M4 (for FG, 2 locations) 1 2. thrust (N) Positioning repeatability ±0.00mm Drive all screw02mm, equivalent to rolled C ost Motion (Note 4) 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 13.N m Mb: 13.N m Mc: 334.N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) (model number: 1S) 9 ase reference surface 2 1 7. 140 7. R pitch xm R 3. (M3 tap) Greasing nipple (same on the opposite side) for guide and ball screw t-m3, depth 4 r-m, depth 1 r-09 hole (same on the opposite side) M 7 P pitch xn 7 3 2. (model number: 3E) ø1 ø9 M ø12 Detail view X-X ase reference surface (Detail of base mounting hole) 140 2 ±0.02 (from reference surface) 1 12 H7 +0.01 0 Oblong hole, depth 12 N ±0.02 (from reference surface) +0.01 0H7 0 depth 12 X X 1 Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 1.0kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 130 1400 140 0 without brake 40 40 740 7 40 940 9 40 1140 11 1240 12 1340 13 1440 14 140 1 140 1 1740 17 140 1 1940 with brake 77 27 77 727 777 27 77 927 977 27 77 1127 1177 17 1277 1327 1377 1427 1477 127 177 127 177 1727 1777 127 177 1927 1977 M 320 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 1320 1370 1420 1470 170 170 1720 N 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 130 1400 140 0 P 170 0 70 170 0 70 170 0 70 170 0 70 170 0 70 170 0 70 170 0 70 170 R 0 3 0 3 0 3 0 3 0 3 0 3 0 3 0 m 1 1 2 2 2 2 3 3 3 3 4 4 4 4 7 7 7 7 n 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 7 7 7 r 4 4 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 t 4 4 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 Mass (kg) 21.0 23.0 2.0 2. 2.0 29. 31.0 33.0 3.0 3. 3.0 39. 41.0 43.0 4.0 4. 4.0 49. 1.0 2. 4.0.0.0 9. 1.0 2. 4.0.0.0 ead 0 2320 1 1440 10 speed ead 2 1 970 30 720 20 0 pplicable s pplicable number encoder X-SE-P/Q axes 230 VC X-SE-KE/KET 4 axes 11/230 VC bsolute/ Program - - - SSE 2 axes 230 VC (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is 000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) SSP-XM-70 34

3 Simple, Dustproof Type ISD / ISPD Small Standard Type Width: mm ISD (ISPD)-S P.3 Medium Standard Type Width: mm ISD (ISPD)-M-0 P.37 Width: mm ISD (ISPD)-M- P.3 ISD ISPD Simple, Dustproof Type arge Mid-Support Type Width: mm ISD (ISPD)-MX- P.39 Width: mm ISD (ISPD)-- P.40 Standard Type Width: mm ISD (ISPD)--400 P.41 Width: mm ISD (ISPD)-X- P.42 Mid-Support Type Width: mm ISD (ISPD)-X-400 P.4 3

ISD-S ISPD-S S 0 Series Type ead Stroke pplicable controller s ISD: Standard ISPD: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/small, dustproof /ctuator width: mm/0w Straight shape Single-axis robot/small, dustproof /ctuator width: mm/0w Straight shape High precision : bsolute 0: 0W 1 : 1mm : mm 4 : 4mm ead 0: 0mm 00: 00mm (in 0mm ) Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). thrust (N) ISD[ISPD]-S- 1-0-1-2 - 3-4 - 1 1~ 0.4 1.0 0.4 0. 13 4. 3 2 3.1 ISD[ISPD]-S- 1-0-- 2-3 - 4 - bsolute 0 0~00 1~40 0.4 0.7 0.4 0. 27 12.1 ISD[ISPD]-S- 1-0-4-2 - 3-4 - 4 1~240 0.2 0. 0.2 0.4 30 14 12 212.3 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. ±0.01mm [±0.00mm] Drive (Note 3) all screw ø12mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 2.4N m Mb: 40.2N m Mc:.7N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 1. 4. 70 4 4 2-øH7, depth 4-M, depth 19 (model number: 3S) (model number: 3E) Cable joint connector CD 74. 4. (2.) 7.3 4.3 Detail view of (1) 70 1 ME SE Stroke 0 0±0.02 14 Home 4 ME Cable exit from the rear left (model number: 1E) (model number: 1S) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) 0 surface 3 (3) 4 Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of high precision Dimensions, Mass and by Stroke speed 1 70 7 surface Tapered screw for tube (Rc 3/") Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) (uried plug screw, same on the opposite side) 11 7. 2 7. 0 0 +0.012 2-oblong hole H7 0 depth 4-øH7, depth F 7 (from reference surface) D 70±0.02 0 0 7. 2. 2. (without brake) 117. (with brake) E-M, depth 17 Slider center position (home) Ground wire connection screw (M3, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. *If the brake is equipped, the mass increases by 0.2kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 without brake 32. 432. 42. 32. 2. 32. 2. 732. 72. 32. 2. 932. 92. 32. 2. with brake 417. 47. 17. 7. 17. 7. 717. 77. 17. 7. 917. 97. 17. 7. 1117. 27 32 37 42 47 2 7 2 7 72 77 2 7 92 97 D 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 E 12 12 12 12 14 14 14 F 4 9 14 19 4 9 14 19 4 9 14 19 4 9 14 Mass (kg) 4.1 4.4 4..1..9.2. 7.0 7.3 7.7.1.4. 9.1 ead 1 920 79 40 40 ead 40 40 400 34 30 270 240 ead 4 240 230 170 13 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD-S/ISPD-S 3

ISD-M-0 ISPD-M-0 Number/ number ISD[ISPD]-M- 1-0-30-2 - 3-4 - ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** thrust (N) 1~100 0.4 1.0 0.4 1.0 1 4 2 1.2. ISD[ISPD]-M- 1-0-20-2 - 3-4 - bsolute 20 1~0 0.4 1.0 0.4 1.0 23 4 2. 4.9 0 0~10 ISD[ISPD]-M- 1-0- - 2-3 - 4-1~00 0.4 0.7 0.4 0. 4 20 7 19. ISD[ISPD]-M- 1-0-- 2-3 - 4-1~300 0.2 0. 0.2 0.4 4 20 1 339.7 * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). Series Type ead Stroke pplicable controller s ISD: Standard 0: 0mm T1: XSE-KE/KET T2: ISPD: High precision * Refer to P. for the details of items comprising the model number. Single-axis robot/medium, dustproof /ctuator width: mm/0w Straight shape Single-axis robot/medium, dustproof /ctuator width: mm/0w Straight shape High precision M 0 : bsolute 0: 0W 30 : 30mm 20: 20mm : mm : mm 30 10: 10mm (in 0mm ) SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 1. 4. 4-M, depth 1 7 1 2 70 2 1 0 0 7 2-øH7, depth 4-M, depth 19 (model number: 3S) (model number: 3E) Cable joint connector CD (2.) (1) 7.3 4.3 11 94 9 Detail view of ME SE Stroke 0 0±0.02 194 Home ME Cable exit from the rear left (model number: 1E) (model number: 1S) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) 94 9. surface (4) 1. Processing jig holes are provided over the entire bottom surface of the base. surface They are not used for mounting the actuator. They are plugged with rubber grommets. 12. ase mounting surface when the guide is of high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 12 30 72. 0 +0.01 2-oblong hole H7 0 depth F Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) ±0.02 (from reference surface) 0 2. D 42. 91 (without brake) 11 (with brake) Ground wire connection screw (M3, 2 locations) 4-øH7, depth E-M, depth 20 7 Slider center position (home) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.3kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 430 40 30 0 30 0 730 70 30 0 930 90 30 0 1130 110 1230 120 1330 130 1430 with brake 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 124 1304 134 1404 144 317 37 417 47 17 7 17 7 717 77 17 7 917 97 17 7 1117 117 1217 127 1317 D 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 F 72 1 172 72 1 172 72 1 172 72 1 172 72 1 172 Mass (kg) 7..1. 9.4.0.7 11.3 11.9 12. 13.2 13. 14. 1.1 1.7 1.4 17.0 17. 1.3 1.9 19. 20.2 ead 30 100 130 1440 120 1 3 93 0 70 71 0 ead 20 0 7 2 70 20 47 440 speed ead 00 4 40 430 30 34 3 2 20 240 0 ead 300 270 240 21 1 170 1 140 130 1 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 7 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 37 ISD-M-0/ISPD-M-0

ISD-M- ISPD-M- Series Type ead Stroke pplicable controller s ISD: Standard 0: 0mm T1: XSE-KE/KET T2: ISPD: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/medium, dustproof /ctuator width: mm/w Straight shape Single-axis robot/medium, dustproof /ctuator width: mm/w Straight shape High precision M : bsolute : W 30 : 30mm 20: 20mm : mm : mm ead 10: 10mm (in 0mm ) Stroke in 0mm SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) 1~100 0.4 1.0 0.4 1.0 30 12 3 113.9 ISD[ISPD]-M- 1 --30-2 - 3-4 - 30 ISD[ISPD]-M- 1 --20-2 - 3-4 - bsolute 20 1~0 0.4 1.0 0.4 1.0 4 1 170.9 0~10 ISD[ISPD]-M- 1 -- - 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 1 341. ISD[ISPD]-M- 1 --- 2-3 - 4-1~300 0.2 0. 0.2 0.4 1 0 40 30 3. *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 1. 4. 4-M, depth 1 1 2 7 1 70 2 0 0 7 2-øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector CD (2.) (1) 7.3 4.3 11 94 9 Detail view of ME SE Stroke 0 0±0.02 194 Home ME Cable exit from the rear left (model number: 1E) (model number: 1S) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) 94 9. surface (4) 1. 11 Processing jig holes are provided over 12 the entire bottom surface of the base. surface They are not used for mounting the 72. 30 0 actuator. They are plugged with rubber grommets. 12. ase mounting surface when the guide is of high precision Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) +0.01 2-oblong hole H7 0 depth F Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) ±0.02 (from reference surface) D 0 2. 42. (without brake) 141 (with brake) 4-øH7, depth E-M, depth 20 7 Slider center position (home) Ground wire connection screw (M3, 2 locations) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.4kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 44 49 4 9 4 9 74 79 4 9 94 99 4 9 114 119 124 129 134 139 144 with brake 40 30 0 30 0 730 70 30 0 930 90 30 0 1130 110 1230 120 1330 130 1430 140 317 37 417 47 17 7 17 7 717 77 17 7 917 97 17 7 1117 117 1217 127 1317 D 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 F 72 1 172 72 1 172 72 1 172 72 1 172 72 1 172 Mass (kg) 7.9. 9.2 9..4 11.1 11.7 12.3 13.0 13. 14.2 14.9 1. 1.1 1. 17.4 1.0 1.7 19.3 19.9 20. ead 30 100 130 1440 120 1 3 93 0 70 71 0 ead 20 0 7 2 70 20 47 440 speed ead 00 4 40 430 30 34 3 2 20 240 0 ead 300 270 240 21 1 170 1 140 130 1 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 7 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD-M-/ISPD-M- 3

ISD-MX- ISPD-MX- Series Type ead Stroke pplicable controller s ISD: Standard : W 30 : 30mm 20: 20mm 00: 00mm T1: XSE-KE/KET T2: ISPD: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/medium, dustproof, mid-support /ctuator width: mm/w Straight shape Single-axis robot/medium, dustproof, mid-support /ctuator width: mm/w Straight shape High precision MX : bsolute ead 0: 0mm (in 0mm ) Stroke in0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-MX- 1 --30-2 - 3-4 - bsolute 30 1~100 0.4 Designed 30 Designed 113.9 00~0 exclusively for exclusively for ISD[ISPD]-MX- 1 --20-2 - 3-4 - 20 1~0 0.4 horizontal use 4 horizontal use 170.9 SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 94 9. (2.) 7.3 4.3 11 94 9 1. 4. CD Detail view of ME SE Stroke 1 1 1 4-M, depth 1 2 70 2 0 0 0 7 0±0.02 194 3 Home 2-øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector (model number: 1S) ME Cable exit from the rear left (model number: 1E) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) 7 surface (4) 1 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) +0.01 2-oblong hole H7 0 depth Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) (without brake) 141 (with brake) 4-øH7, depth E-M, depth 20 Ground wire connection screw (M3, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of high precision 12 30. 0 0. (from reference surface). F D. ±0.02 0 1 Slider center position (home) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 0 00 10 0 1300 1400 0 0 without brake 1241 1341 1441 141 141 1741 141 1941 2041 with brake 127 137 147 17 17 177 17 197 207 1113 1213 1313 1413 113 113 1713 113 1913 D 3 3 4 4 7 E 14 14 1 1 1 1 20 20 F 1 2 1 2 1 2 1 2 1 Mass (kg) 1.3 19. 20.9.2 23.4 24.7 2.0 27.3 2. ead 30 100 0 142 0 0 speed ead 20 0 10 00 00 700 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 39 ISD-MX-/ISPD-MX-

ISD-- ISPD-- Series Type ead Stroke pplicable controller s ISD: Standard ISPD: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, dustproof /ctuator width: mm/w Straight shape Single-axis robot/arge, dustproof /ctuator width: mm/w Straight shape High precision : W 40 : 40mm 20 : 20mm : mm ead 0: 0mm 1300: 1300mm (in 0mm ) Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** thrust (N) ISD[ISPD]-- 1 --40-2 - 3-4 - 40 1~100 0.4 1.0 0.4 1.0 1 7 2. 2. ISD[ISPD]-- 1 --20-2 - 3-4 - bsolute 20 0~1300 1~0 0.4 1.0 0.4 1.0 4 1 9 170.9 ISD[ISPD]-- 1 -- - 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 14 341. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 1.0kg. (Please also refer to P.9). ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 1. 4. 1 30 1 1 30 7 7 2-øH7, depth (model number: 3S) -M, depth 20 (model number: 3E) Cable joint connector CD (3) (1.) 7.3 4.3 Detail view of 143 121 93 1 9 ME SE Stroke ±0.02 (model number: 1S) 4 Home ME 12 Cable exit from the rear left (model number: 1E) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) 112 1. 93 surface (74) 140 Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 12 2 0 0 0 F +0.01 2-oblong hole H7 0 depth Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 117 (without brake) 11 (with brake) 4-øH7, depth E-M, depth 20 1 Slider center position (from reference surface) (home) 7 99. D 24. ±0.02 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 497 47 97 47 97 747 797 47 97 947 997 47 97 1147 1197 1247 1297 1347 1397 1447 1497 147 197 147 197 with brake 31 1 31 1 731 71 31 1 931 91 31 1 1131 111 1231 121 1331 131 1431 141 131 11 131 11 1731 3 40 4 0 0 70 7 0 9 0 1 11 12 130 13 140 14 1 D 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 F 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. Mass (kg) 11. 12.7 13. 14.4 1.3 1.2 17.0 17.9 1. 19. 20. 21.4.3 23.1 24.0 24.9 2.7 2. 27. 2.3 29.2 30.1 31.0 31. 32.7 ead 40 100 1700 140 14 12 11 9 1 940 7 1 speed ead 20 0 11 4 940 0 770 70 4 9 4 0 470 440 4 ead 00 20 470 42 3 30 320 29 27 2 23 0 20 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD--/ISPD-- 40

ISD--400 ISPD--400 400 Series Type ead Stroke pplicable controller s ISD: Standard ISPD: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, dustproof /ctuator width: mm/400w Straight shape Single-axis robot/arge, dustproof /ctuator width: mm/400w Straight shape High precision 400: 400W 40 : 40mm 20 : 20mm : mm ead 0: 0mm 1300: 1300mm (in 0mm ) Stroke in 0mm T1: XSE-KE/KET T2: SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-- 1-400-40-2 - 3-4 - 40 1~100 0.4 1.0 0.4 1.0 40 17 19. ISD[ISPD]-- 1-400-20-2 - 3-4 - bsolute 400 20 0~1300 1~0 0.4 1.0 0.4 1.0 30 20 339.1 ISD[ISPD]-- 1-400- - 2-3 - 4-1~00 0.4 0.7 0.4 0. 0 40 30 7.3 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings 1. 4. 1 30 7 1 1 30 7 2-øH7, depth -M, depth 20 (model number: 3S) (model number: 3E) Cable joint connector CD (3) (1.) 7.3 4.3 Detail view of 143 121 93 1 9 ME SE Stroke ±0.02 (model number: 1S) 4 Home ME 12 ø Greasing nipple for ball screw Cable exit from Greasing nipple for guide the rear left (for greasing the guide on (model number: 1E) the mounting surface side) View (Greasing nipple, same on the opposite side) 112 1. 93 surface (74) 140 Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are surface plugged with rubber grommets. ase mounting surface when the guide is of high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 12 2 0 0 0 F 2-oblong hole H7+0.01 0 depth Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 139 (without brake) 173 (with brake) 1 Slider center position (from reference surface) (home) 7 99. D 24. ±0.02 4-øH7, depth E-M, depth 20 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 19 9 19 9 719 79 19 9 919 99 19 9 1119 119 1219 129 1319 139 1419 149 119 19 119 19 1719 with brake 3 03 3 703 73 03 3 3 93 03 3 13 113 3 123 1303 133 1403 143 3 13 3 13 1703 173 3 40 4 0 0 70 7 0 9 0 1 11 12 130 13 140 14 1 D 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 F 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. Mass (kg) 12.2 13.1 14.0 14. 1.7 1. 17.4 1.3 19.2 20.0 20.9 21..7 23. 24.4 2.3 2.1 27.0 27.9 2.7 29. 30. 31.4 32.2 33.1 ead 40 100 1700 140 14 12 11 9 1 940 7 1 speed ead 20 0 11 4 940 0 770 70 4 9 4 0 470 440 4 ead 00 20 470 42 3 30 320 29 27 2 23 0 20 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 41 ISD--400/ISPD--400

ISD-X- ISPD-X- Series Type ead Stroke pplicable controller s ISD: Standard : W 40: 40mm 00: 00mm T1: XSE-KE/KET 20: 20mm T2: ISPD: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/w Straight shape Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/w Straight shape High precision X : bsolute 0: 0mm (in 0mm ) ead Stroke in 0mm SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-X- 1 --40-2 - 3-4 - bsolute 40 1~100 0.4 Designed 1 Designed. 00~0 exclusively for exclusively for ISD[ISPD]-X- 1 --20-2 - 3-4 - 20 1~0 0.4 horizontal use 4 horizontal use 170.9 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD (3) 1. 4. 7.3 4.3 Detail view of 143 121 93 ME SE Stroke 1 30 1 1 30 7 7 ±0.02 2-øH7, depth -M, depth 20 (model number: 1S) 4 1 Home ME 12 (model number: 3S) (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) 112 1. surface (74) 140 12 Processing jig holes are provided 2 over the entire bottom surface of 0 the base. They are not used for 0 F mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 2-oblong hole H7+0.01 0 depth Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) (from reference surface) D 7 14. 70. ±0.02 117 (without brake) 11 (with brake) 4-øH7, depth E-M, depth 20 1 Slider center position(home) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 without brake 149 19 19 179 19 199 209 with brake 123 123 1723 123 1923 2023 2123 130 140 170 10 1 D 4 7 7 E 1 1 1 20 20 F 173. 73. 173. 73. 173. 73. 173. Mass (kg) 29.7 31.4 33.2 3.0 3.7 3. 40.2 ead 30 100 speed ead 20 0 1 00 30 93 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-J/K 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISD-X-/ISPD-X- 42

ISD-X-400 ISPD-X-400 Series Type ead Stroke pplicable controller s ISD: Standard 400: 400W 40: 40mm 00: 00mm T1: XSE-KE/KET 20: 20mm T2: ISPD: High precision * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/400w Straight shape Single-axis robot/arge, dustproof, mid-support /ctuator width: mm/400w Straight shape High precision X 400 : bsolute 0: 0mm (in 0mm ) ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) ISD[ISPD]-X- 1-400-40-2 - 3-4 - bsolute 40 1~100 0.4 Designed 40 Designed 19. 400 00~0 exclusively for exclusively for ISD[ISPD]-X- 1-400-20-2 - 3-4 - 20 1~0 0.4 horizontal use horizontal use 339.1 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). SSE XSE-P/Q N : None S : 3m M : m X : Spec. length EU: Metal cable joint connector (stand. feature) Refer to the other options table below. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Protection structure IP30 mbient operating temperature/humidity 0 to 40 C, %RH max. (non-condensing) CD drawings CD (3) 1. 4. 7.3 4.3 Detail view of 143 121 93 ME SE Stroke 1 30 1 1 30 7 7 ±0.02 4 1 Home 2-øH7, depth -M, depth 20 ME 12 (model number: 3S) (model number: 3E) Cable joint connector ø Greasing nipple for ball screw Cable exit from Greasing nipple for guide the rear left (for greasing the guide on (model number: 1E) the mounting surface side) (model number: 1S) View (Greasing nipple, same on the opposite side) 112 1. surface (74) 140 12 Processing jig holes are provided 2 over the entire bottom surface of 0 the base. They are not used for 0 mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of high precision 11 Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 2-oblong hole H7 +0.01 0 depth F Tapered screw for tube (Rc 3/") (uried plug screw, same on the opposite side) 4-øH7, depth E-M, depth 20 (from reference surface) 7 14. D 70. ±0.02 139 (without brake) 173 (with brake) Ground wire connection screw (M4, 2 locations) 1 Slider center position (home) 93 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 without brake 111 111 1711 111 1911 2011 2111 with brake 14 14 174 14 194 204 214 130 140 170 10 1 D 4 7 7 E 1 1 1 20 20 F 173. 73. 173. 73. 173. 73. 173. Mass (kg) 30.1 31. 33. 3.4 37.1 3.9 40. ead 30 100 speed ead 20 0 1 00 30 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program 11/230 VC SSE 2 axes 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPD series. Other values apply commonly to the ISD and ISPD. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 43 ISD-X-400/ISPD-X-400

44 Cleanroom Type ISDCR / ISPDCR / SSPDCR Small Standard Type Width: mm ISDCR (ISPDCR)-S P.4 Medium Standard Type Width: mm ISDCR (ISPDCR)-M-0 P.4 Width: mm ISDCR (ISPDCR)-M- P.47 ISDCR ISPDCR Standard (High Precision) Type arge Mid-Support Type Width: mm ISDCR (ISPDCR)-MX- P.4 Width: mm ISDCR (ISPDCR)-- P.49 Standard Type Width: mm ISDCR (ISPDCR)--400 P.0 Width: mm ISDCR (ISPDCR)-X- P.1 Mid-Support Type Width: mm ISDCR (ISPDCR)-X-400 P.2 SSPDCR High Precision Type Small High-Rigidity, Steel-ase Type Width: 0mm SSPDCR-S- P.3 Medium High-Rigidity, Steel-ase Type Width: 130mm SSPDCR-M-400 P.4 arge High-Rigidity, Steel-ase Type Width: 1mm SSPDCR--70 P.

ISDCR-S ISPDCR-S * Refer to P. for the details of items comprising the model number. Number/ 74. 4. (2.) surface 3 (1) number 70 1 7.3 4.3 1. 4. Detail view of 1 (3) 4 (32.) Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of high precision (3.) 7 0 7 1 0 ME surface 7. SE 2 7. 0 0 F Stroke ead Stroke in 0mm ir tube joint pplicable tube outer diameter ø12 (inner diameterø) (uried plug screw on the opposite side: Rc 3/") 2-oblong hole H7 +0.012 0 depth 7 (from reference surface) D 0 70 4 4 70±0.02 0±0.02 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** ISDCR[ISPDCR]-S- 1-0-1-2 - 3-4 - 1 1~ 0.4 1.0 0.4 0. 13 4. 3 2 3.1 0 ISDCR[ISPDCR]-S- 1-0-- 2-3 - 4 - bsolute 0 0~00 1~40 0.4 0.7 0.4 0. 27 12.1 30 ISDCR[ISPDCR]-S- 1-0-4-2 - 3-4 - 4 1~240 0.2 0. 0.2 0.4 30 14 12 212.3 1 * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. (Please also refer to P.9). Series Type ead Stroke pplicable controller s : bsolute 0: 0W 1 : 1mm 0: 0mm T1: XSE-KE/KET N : None EU: Metal cable joint con : mm T2: S : 3m nector (stand. feature) 4 : 4mm 00: 00mm SSE M : m Refer to the other (in 0mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision Single-axis robot for cleanroom/small/ctuator width: mm/0 W Straight shape Single-axis robot for cleanroom/small/ctuator width: mm/0 W Straight shape High precision S 0 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 CD drawings CD 14 4 Home ME (3.) 2-øH7, depth 4-M, depth 19 2. (without brake) 117. (with brake) 4-øH7, depth E-M, depth 17 Slider center position (home) 0 7. 0 2. (model number: 3S) (model number: 3E) Cable exit from the rear left (model number: 1E) (model number: 1S) Cable joint connector Ground wire connection screw (M3, 2 locations) ø thrust (N) Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 0 Suction flow rate (N /min) ±0.01mm [±0.00mm] Drive (Note 3) all screw ø12mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 2.4N m Mb: 40.2N m Mc:.7N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.2kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 without brake 32. 432. 42. 32. 2. 32. 2. 732. 72. 32. 2. 932. 92. 32. 2. with brake 417. 47. 17. 7. 17. 7. 717. 77. 17. 7. 917. 97. 17. 7. 1117. 27 32 37 42 47 2 7 2 7 72 77 2 7 92 97 D 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 E 12 12 12 12 14 14 14 F 4 9 14 19 4 9 14 19 4 9 14 19 4 9 14 Mass (kg) 4.2 4. 4.9.2..0.3.7 7.0 7.4 7..1..9 9.2 ead 1 920 79 40 40 speed ead 40 40 400 34 30 270 240 ead 4 240 230 170 13 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 4 ISDCR-S/ISPDCR-S

ISDCR-M-0 ISPDCR-M-0 M 0 Series Type ead Stroke pplicable controller s ISDCR: Standard ISPDCR: High precision * Refer to P. for the details of items comprising the model number. Number/ 1. 4. : bsolute Single-axis robot for cleanroom/medium/ctuator width: mm/0w Straight shape Single-axis robot for cleanroom/medium/ctuator width: mm/0w Straight shape High precision 0: 0W 30 : 30mm 20 : 20mm : 20mm : mm 0: 0mm 10: 10mm (in 0mm ) T1: XSE-KE/KET T2: SSE XSE-P/Q 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 CD drawings number ead Stroke in 0mm 1 2 4-M, depth 1 N : None S : 3m M : m X : Spec. length ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 7 1 70 2 0 0 7 EU: Metal cable joint connector (stand. feature) Refer to the other options table below. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** thrust (N) 1~100 0.4 1.0 0.4 1.0 1 4 2 1.2. 10 ISDCR[ISPDCR]-M- 1-0-30-2 - 3-4 - 30 ISDCR[ISPDCR]-M- 1-0-20-2 - 3-4 - bsolute 20 1~0 0.4 1.0 0.4 1.0 23 4 2. 4.9 0 0~10 ISDCR[ISPDCR]-M- 1-0-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 4 20 7 19. 0 ISDCR[ISPDCR]-M- 1-0-- 2-3 - 4-1~300 0.2 0. 0.2 0.4 4 20 1 339.7 20 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). *If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 0.kg. 2-øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector 94 9. (2.) (1) 7.3 4.3 11 94 9 Detail view of () ME SE Stroke 194 Home ME (3.) ø Suction flow rate (N /min) CD 0 0±0.02 Cable exit from the rear left (model number: 1E) (model number: 1S) Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/) Joint installation position: Standard Joint installation position: Opposite side surface (4) 1 (32.) Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. surface They are plugged with rubber grommets. 12. ase mounting surface when the guide is of high precision 12 72. 30 0 2-oblong hole H7 +0.01 0 depth F (from reference surface) D ±0.02 0 4-øH7, depth Ground wire connection screw (M3, 2 locations) E-M, depth 20 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2. 42. 91 (without brake) 11 (with brake) 7 Slider center position (home) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.3kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 430 40 30 0 30 0 730 70 30 0 930 90 30 0 1130 110 1230 120 1330 130 1430 with brake 44 04 4 04 4 704 74 04 4 4 94 04 4 14 114 4 124 1304 134 1404 144 317 37 417 47 17 7 17 7 717 77 17 7 917 97 17 7 1117 117 1217 127 1317 D 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 F 72 1 172 72 1 172 72 1 172 72 1 172 72 1 172 Mass (kg) 7..2. 9..1.7 11.3 12.0 12. 13.2 13.9 14. 1.1 1.7 1.4 17.0 17. 1.2 1.9 19. 20.1 ead 30 100 130 1440 120 1 3 93 0 70 71 0 ead 20 0 7 2 70 20 47 440 speed ead 00 4 40 430 30 34 3 2 20 240 0 ead 300 270 240 21 1 170 1 140 130 1 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 7 During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR-M-0/ISPDCR-M-0 4

ISDCR-M- ISPDCR-M- Series Type ead Stroke pplicable controller s : bsolute : W 30 : 30mm 0: 0mm T1: XSE-KE/KET N : None EU: Metal cable joint con 20 : 20mm T2: S : 3m nector (stand. feature) : 20mm 10: 10mm SSE M : m Refer to the other : mm (in 0mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision * Refer to P. for the details of items comprising the model number. Number/ number M Single-axis robot for cleanroom/medium/ctuator width: mm/w Straight shape Single-axis robot for cleanroom/medium/ctuator width: mm/w Straight shape High precision ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) thrust (N) 1~100 0.4 1.0 0.4 1.0 30 12 3 113.9 10 ISDCR[ISPDCR]-M- 1 --30-2 - 3-4 - 30 ISDCR[ISPDCR]-M- 1 --20-2 - 3-4 - bsolute 20 1~0 0.4 1.0 0.4 1.0 4 1 170.9 0~10 ISDCR[ISPDCR]-M- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 1 341. 0 ISDCR[ISPDCR]-M- 1 --- 2-3 - 4-1~300 0.2 0. 0.2 0.4 1 0 40 30 3. 20 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). Suction flow rate (N /min) 94 9. CD drawings CD (2.) (1) 7.3 4.3 11 94 9 1. 4. Detail view of () ME SE Stroke 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 4-M, depth 1 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 1 2 0 7 1 70 2 0 0 7 0±0.02 194 Home ME (3.) 2-øH7, depth 4-M, depth 1 (model number: 3S) (model number: 3E) Cable joint connector Cable exit from the rear left (model number: 1E) (model number: 1S) ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side surface (4) 1 (32.) Processing jig holes are provided over the entire bottom surface of the base. They surface are not used for mounting the actuator. They are plugged with rubber grommets. 12. ase mounting surface when the guide is of high precision 12 72. 30 0 pplicable s 2-oblong hole H7 +0.01 0 depth F (from reference surface) D ±0.02 0 (without brake) 141 (with brake) Ground wire connection screw 4-øH7, depth (M3, 2 locations) E-M, depth 20 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. 2. 42. 7 Slider center position (home) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.4kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 44 49 4 9 4 9 74 79 4 9 94 99 4 9 114 119 124 129 134 139 144 with brake 40 30 0 30 0 730 70 30 0 930 90 30 0 1130 110 1230 120 1330 130 1430 140 317 37 417 47 17 7 17 7 717 77 17 7 917 97 17 7 1117 117 1217 127 1317 D 0 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 F 72 1 172 72 1 172 72 1 172 72 1 172 72 1 172 Mass (kg).0. 9.2 9.9. 11.1 11.7 12.4 13.0 13. 14.3 14.9 1. 1.1 1. 17.4 1.0 1. 19.3 19.9 20. ead 30 100 130 1440 120 1 3 93 0 70 71 0 ead 20 0 7 2 70 20 47 440 speed ead 00 4 40 430 30 34 3 2 20 240 0 ead 300 270 240 21 1 170 1 140 130 1 pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC 7 During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. * Take note that to change the home direction, the actuator must be returned to us for adjustment. (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is,000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 47 ISDCR-M-/ISPDCR-M-

ISDCR-MX- ISPDCR-MX- Series Type ead Stroke pplicable controller s : bsolute : W 30 : 30mm 00: 00mm T1: XSE-KE/KET N : None EU: Metal cable joint con 20 : 20mm T2: S : 3m nector (stand. feature) 0: 0mm SSE M : m Refer to the other (in 0mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision * Refer to P. for the details of items comprising the model number. Number/ number MX Single-axis robot for cleanroom/medium, mid-support /ctuator width: mm/ W Straight shape Single-axis robot for cleanroom/medium, mid-support /ctuator width: mm/w Straight shape High precision ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-MX- 1 --30-2 - 3-4 - bsolute 30 1~100 0.4 Designed 30 Designed 113.9 10 00~0 exclusively for exclusively for ISDCR[ISPDCR]-MX- 1 --20-2 - 3-4 - 20 1~0 0.4 horizontal use 4 horizontal use 170.9 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) ±0.01mm [±0.00mm] Drive (Note 3) all screw ø1mm, rolled C [equivalent to rolled C] 1S P11 Home limit switch P11 ost Motion (Note 4) 0.0mm [0.02mm] max. Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 Dynamic allowable load moment (Note ) Ma: 9.N m Mb: 99.0N m Mc: 11.7N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. 3S P11 Non-motor side NM P12 Dynamic straightness (Note ) 3E P11 Guide with ball retention mechanism RT P12 ase Material: luminum, with white alumite treatment Q seal (standard feature) Q P11 Master axis M P12 pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, rake P11 Master axis (sensor on opposite side) M P12 (Note 7) N: None, S: 3m, M: m, X : Specified length Creep sensor C P11 Slave axis S P12 Grease ow dust-raising grease (for ball screw and guide) Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm High straightness, precision ST P13 1 (model number: 3S) 1 1 2-øH7, depth 4-M, depth 1 CD drawings 2 70 2 4-M, depth 1 (model number: 3E) 0 0 1. 4. Cable joint connector CD (1) 7.3 4.3 Detail view of 117 93 7 ME SE Stroke ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 192 4 Home ME (3.) 94 9. () ±0.02 Greasing nipple Cable exit from for ball screw the rear left Greasing nipple for guide (model number: 1E) (for greasing the guide on the mounting surface side) (model number: 1S) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 0 7 surface (4) 1 (32.) (without brake) 141 (with brake) Ground wire connection screw (M3, 2 locations) 2-oblong hole H7 +0.01 0 depth 4-øH7, depth E-M, depth 20 Connect the motor cable and encoder cable. Refer to P. 7 for the cables. Processing jig holes are provided overthe entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of high precision 12. 30 0 0. F D (from reference surface) ±0.02 0.. 1 Slider center position (home) During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 0 00 10 0 1300 1400 0 0 1700 100 10 0 without brake 1241 1341 1441 141 141 1741 141 1941 2041 2141 41 2341 2441 with brake 127 137 147 17 17 177 17 197 207 217 7 237 247 1113 1213 1313 1413 113 113 1713 113 1913 2013 2113 13 2313 D 3 3 4 4 7 7 9 E 14 14 1 1 1 1 20 20 24 24 2 F 1 2 1 2 1 2 1 2 1 2 1 2 1 Mass (kg) 1. 19. 21.0.3 23. 24.9 2.2 27.4 2.7 30.0 31.3 32. 33. ead 30 100 0 142 0 0 0 2 70 7 speed ead 20 0 10 00 00 700 00 0 00 40 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR-MX-/ISPDCR-MX- 4

ISDCR-- ISPDCR-- * Refer to P. for the details of items comprising the model number. Number/ 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 CD drawings Series Type ead Stroke pplicable controller s : bsolute : W 40 : 40mm 0: 0mm T1: XSE-KE/KET N : None EU: Metal cable joint con 20 : 20mm T2: S : 3m nector (stand. feature) : mm 1300: 1300mm SSE M : m Refer to the other (in 0 mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision number 1. 4. Single-axis robot for cleanroom/arge/ctuator width: mm/ W Straight shape Single-axis robot for cleanroom/arge/ctuator width: mm/w Straight shape High precision ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)** ISDCR[ISPDCR]-- 1 --40-2 - 3-4 - 40 1~100 0.4 1.0 0.4 1.0 1 7 2. 2. 10 ISDCR[ISPDCR]-- 1 --20-2 - 3-4 - bsolute 20 0~1300 1~0 0.4 1.0 0.4 1.0 4 1 9 170.9 ISDCR[ISPDCR]-- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 40 20 14 341. 0 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 1 30 7 1 1 30 7 * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 1.0kg. (Please also refer to P.9). 2-øH7, depth -M, depth 20 (3) (1.) 7.3 4.3 Detail view of 143 121 93 19 ME SE ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 4 Home ME (40.) 112 1. (77) thrust (N) (model number: 3S) (model number: 3E) Cable joint connector ø Suction flow rate (N /min) CD Stroke ±0.02 Cable exit from the rear left (model number: 1E) (model number: 1S) Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 93 surface (74) 140 (32.) Processing jig holes are provided over 12 the entire bottom surface of the base. 2 surface They are not used for mounting the 0 0 actuator. They are plugged with rubber grommets. 0 ase mounting surface when the guide is of high precision F 2-oblong hole H7 +0.01 0 depth D (from reference surface) ±0.02 117 (without brake) 11 (with brake) 4-øH7, depth 7 99. 24. E-M, depth 20 1 Slider center position (home) Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 497 47 97 47 97 747 797 47 97 947 997 47 97 1147 1197 1247 1297 1347 1397 1447 1497 147 197 147 197 with brake 31 1 31 1 731 71 31 1 931 91 31 1 1131 111 1231 121 1331 131 1431 141 131 11 131 11 1731 3 40 4 0 0 70 7 0 9 0 1 11 12 130 13 140 14 1 D 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 F 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. Mass (kg) 11.9 12.7 13. 14.4 1.3 1.2 17.0 17.9 1.7 19. 20.4 21.3.1 23.0 23.9 24.7 2. 2.4 27.3 2.1 29.0 29. 30.7 31. 32.4 ead 40 100 1700 140 14 12 11 9 1 940 7 1 speed ead 20 0 11 4 940 0 770 70 4 9 4 0 470 440 4 ead 00 20 470 42 3 30 320 29 27 2 23 0 20 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 49 ISDCR--/ISPDCR--

ISDCR--400 ISPDCR--400 Series Type ead Stroke pplicable controller s : bsolute 400: 400W 40 : 40mm 0: 0mm T1: XSE-KE/KET N : None EU: Metal cable joint con 20 : 20mm T2: S : 3m nector (stand. feature) : mm 1300: 1300mm SSE M : m Refer to the other (in 0 mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision 400 * Refer to P. for the details of items comprising the model number. Number/ number Single-axis robot for cleanroom/arge/ctuator width: mm/400w Straight shape Single-axis robot for cleanroom/arge/ctuator width: mm/400 W Straight shape High precision ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-- 1-400-40-2 - 3-4 - 40 1~100 0.4 1.0 0.4 1.0 40 17 19. 10 ISDCR[ISPDCR]-- 1-400-20-2 - 3-4 - bsolute 400 20 0~1300 1~0 0.4 1.0 0.4 1.0 30 20 339.1 ISDCR[ISPDCR]-- 1-400-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 0 40 30 7.3 0 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 CD drawings 1. 4. ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 1 30 7 7 1 1 30 2-øH7, depth -M, depth 20 (model number: 3S) (model number: 3E) Cable joint connector ø CD (3) (1.) 7.3 4.3 Detail view of 143 121 93 19 ME SE Stroke 112 1. 77 ±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 4 Home ME (40.) Cable exit from the rear left (model number: 1E) (model number: 1S) Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 93 surface (74) 140 (32.) 2-oblong hole H7 +0.01 0 depth ±0.02 139 (without brake) 173 (with brake) 4-øH7, depth E-M, depth 20 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not 12 1 to let the slider hit Processing jig holes are provided over 2 (from reference surface) Slider center position (home) surrounding parts. the entire bottom surface of the base. surface 0 0 7 99. They are not used for mounting the 0 F D 24. actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of high precision Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 19 9 19 9 719 79 19 9 919 99 19 9 1119 119 1219 129 1319 139 1419 149 119 19 119 19 1719 with brake 3 03 3 703 73 03 3 3 93 03 3 13 113 3 123 1303 133 1403 143 3 13 3 13 1703 173 3 40 4 0 0 70 7 0 9 0 1 11 12 130 13 140 14 1 D 0 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 E 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 20 20 F 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. 123. 173. 23. 73. Mass (kg) 12.3 13.1 14.0 14. 1.7 1. 17.4 1.3 19.1 20.0 20. 21.7. 23.4 24.3 2.1 2.0 2. 27.7 2. 29.4 30.2 31.1 31.9 32. ead 40 100 1700 140 14 12 11 9 1 940 7 1 speed ead 20 0 11 4 940 0 770 70 4 9 4 0 470 440 4 ead 00 20 470 42 3 30 320 29 27 2 23 0 20 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program 11/230 VC SSE 2 axes 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR--400/ISPDCR--400 0

ISDCR-X- ISPDCR-X- Series Type ead Stroke pplicable controller s : bsolute : W 40 : 40mm 00: 00mm T1: XSE-KE/KET N : None EU: Metal cable joint con 20 : 20mm T2: S : 3m nector (stand. feature) : mm SSE M : m Refer to the other (in 0 mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision * Refer to P. for the details of items comprising the model number. Number/ number X Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/w Straight shape Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/w Straight shape High precision ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-X- 1 --40-2 - 3-4 - bsolute 40 1~100 0.4 Designed 1 Designed. 10 00~ exclusively for exclusively for ISDCR[ISPDCR]-X- 1 --20-2 - 3-4 - 20 1~0 0.4 horizontal use 4 horizontal use 170.9 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm CD drawings 1. 4. 1 1 1 30 30 7 7 7 2-øH7, depth -M, depth 20 (model number: 3S) (model number: 3E) Cable joint connector ø CD 7.3 4.3 Detail view of 149 7 144 211 ME SE Stroke 130 130±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 0 Home 3 ME (40.) Cable exit from the rear left (model number: 1E) (model number: 1S) Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 112 1. surface (74) (77) 140 (32.) Processing jig holes are provided over the entire bottom surface of the base. They are not used for mounting the actuator. They are plugged with rubber grommets. surface ase mounting surface when the guide is of high precision 12 2 0 0 F 2-oblong hole H7 +0.01 0 depth 117 (without brake) 11 (with brake) 4-øH7, depth (from reference surface) 7 14. D 70. ±0.02 E-M, depth 20 1 Slider center position (home) 93 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 2400 without brake 149 19 19 179 19 199 209 219 9 239 249 29 29 279 29 299 with brake 123 123 1723 123 1923 2023 2123 23 2323 2423 3 3 2723 223 2923 3023 130 140 170 10 1 2 0 230 240 20 20 270 20 D 4 7 7 9 9 11 11 12 E 1 1 1 20 20 24 24 2 2 2 2 30 30 32 F 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. Mass (kg) 29. 31. 33.2 3.0 3.7 3.4 40.2 41.9 43. 4.4 47.1 4. 0. 2.3 4.0. ead 40 100 140 1300 110 0 90 0 20 740 0 speed ead 20 0 1 00 30 740 0 40 4 440 4 370 340 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) 1 ISDCR-X-/ISPDCR-X-

ISDCR-X-400 ISPDCR-X-400 Series Type ead Stroke pplicable controller s : bsolute 400: 400W 40 : 40mm 00: 00mm T1: XSE-KE/KET N : None EU: Metal cable joint con 20 : 20mm T2: S : 3m nector (stand. feature) : mm SSE M : m Refer to the other (in 0mm ) XSE-P/Q X : Spec. length options table below. ISDCR: Standard ISPDCR: High precision * Refer to P. for the details of items comprising the model number. Number/ number X 400 Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/400w Straight shape Single-axis robot for cleanroom/arge, mid-support /ctuator width: mm/400w Straight shape High precision ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg) ISDCR[ISPDCR]-X- 1-400-40-2 - 3-4 - bsolute 40 1~100 0.4 Designed 40 Designed 19. 10 400 00~ exclusively for exclusively for ISDCR[ISPDCR]-X- 1-400-20-2 - 3-4 - 20 1~0 0.4 horizontal use horizontal use 339.1 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). thrust (N) Suction flow rate (N /min) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 ±0.01mm [±0.00mm] Drive (Note 3) all screw ø20mm, rolled C [equivalent to rolled C] ost Motion (Note 4) 0.0mm [0.02mm] max. Dynamic allowable load moment (Note ) Ma: 4.9N m Mb: 149.9N m Mc: 24.9N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note ) ase Material: luminum, with white alumite treatment pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 7) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm CD drawings 1. 4. 1 (model number: 3S) 1 1 2-øH7, depth 30 30 7 7 -M, depth 20 (model number: 3E) Cable joint connector 7 CD 2 7.3 4.3 Detail view of 149 144 11 7 ME SE Stroke 130 130±0.02 ir tube joint pplicable tube outer diameter ø12 (inner diameter ø) (uried plug screw on the opposite side: Rc 3/") 0 3 Home ME (40.) Cable exit from the rear left (model number: 1E) (model number: 1S) ø Greasing nipple for ball screw Greasing nipple for guide (for greasing the guide on the mounting surface side) View (Greasing nipple, same on the opposite side) Joint installation position: Standard Joint installation position: Opposite side 112 1. surface (74) (77) 140 (32.) 12 Processing jig holes are provided 2 over the entire bottom surface of 0 the base. They are not used for surface 0 F D mounting the actuator. They are plugged with rubber grommets. ase mounting surface when the guide is of high precision 2-oblong hole H7 +0.01 0 depth (from reference surface) ±0.02 7 14. 139 (without brake) 173 (with brake) 4-øH7, depth 70. E-M, depth 20 1 Slider center position (home) 93 Ground wire connection screw (M4, 2 locations) Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 00 10 0 1300 1400 0 0 1700 100 10 0 20 00 2300 2400 without brake 111 111 1711 111 1911 2011 2111 11 2311 2411 211 211 2711 211 2911 3011 with brake 14 14 174 14 194 204 214 4 234 244 24 24 274 24 294 304 130 140 170 10 1 2 0 230 240 20 20 270 20 D 4 7 7 9 9 11 11 12 E 1 1 1 20 20 24 24 2 2 2 2 30 30 32 F 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. 173. 73. Mass (kg) 30.2 31.9 33. 3.4 37.1 3. 40. 42.3 44.0 4. 47. 49.2 1.0 2.7 4.4.2 ead 40 100 140 1300 110 0 90 0 20 740 0 speed ead 20 0 1 00 30 740 0 40 4 440 4 370 340 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program 11/230 VC SSE 2 axes 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Notes 2, 3, 4) The values in [ ] apply to the ISPDCR series. Other values apply commonly to the ISDCR and ISPDCR. (Note ) When the traveling life is 000km. (Note ) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Example. X0 = m) ISDCR-X-400/ISPDCR-X-400 2

SSPDCR-S- Single-axis robot for cleanroom/small, high-rigidity, steel-base /ctuator width: 0mm/W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD 7 4 Series Type ead Stroke pplicable controller s SSPDCR: : bsolute : W 30 : 30mm 0: 0mm T1: XSE-KE/KET N : None EU: Metal cable joint con- High precision 20 : 20mm : mm 10: 10mm T2: SSE S : 3m M : m nector (stand. feature) Refer to the other (in 0 mm ) XSE-P/Q X : Spec. length options table below.. SSPDCR S number Quick connect joint (for suction) pplicable tube outer diameter 012 Can be installed on the opposite side. Slider reference surface 1 3. 4 92 4 0 ase reference surface ±0.02 (from reference surface) pplicable s -M, depth 9 7. 37. 37. 7. 9. (32.) 12 9. Stroke (ST) without brake: 134 29. 12 with brake: 19 ME SE 3 3 ME 9 20 11 Home R 49. 0 9 Slider reference surface P +0.012 0 Oblong hole, depth ead N Stroke in 0mm 2-φH7, depth. 3 70 pitch xm Greasing nipple (same on the opposite side). ccess the nipple by removing the guide/ball screw grommet. M pitch xn ±0.02 (from reference surface) 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 17. ±0.02 17.. ±0.02 29. Positioning repeatability ±0.00mm Drive all screwø1mm equivalent to rolled C ost Motion 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 3N m Mb: 3N m Mc: 9N m Ma direction: 40mm max. Mb, Mc directions: 40mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 14 0 r-m, depth 9 φh7, depth 9. cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)* SSPDCR-S- 1 --30-2 - 3-4 - 30 1~0 0.4 1.2 0.4 1.2 30 4 1 113.9 SSPDCR-S- 1 --20-2 - 3-4 - bsolute 20 0~10 1~10 0.4 1.0 0.4 1.0 4 17 2.4 170.9 0 SSPDCR-S- 1 --- 2-3 - 4-1~00 0.4 0.7 0.4 0. 0 12 341.9 0 desired cable exit direction can be selected. 2. (M3 tap) R t-m3, depth 3 (same on the opposite side) 2-M3, depth (same on the opposite side) 0 92 ase reference surface *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) 2. 7. thrust (N) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) Suction flow rate (N /min) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 without brake 47 07 7 07 7 707 77 07 7 7 97 07 7 17 117 7 127 1307 137 1407 147 with brake 492 42 92 42 92 742 792 42 92 942 992 42 92 1142 1192 1242 1292 1342 1392 1442 1492 M 299 349 399 449 499 49 99 49 99 749 799 49 99 949 999 49 99 1149 1199 1249 1299 N 140 1 240 2 340 3 440 4 40 40 740 7 40 940 9 40 1140 P 139 39 9 139 39 9 139 39 9 139 39 9 139 39 9 139 39 9 139 39 9 R 74. 24. 49. 74. 24. 49. 74. 24. 49. 74. 24. 49. 74. 24. 49. 74. 24. 49. 74. 24. 49. m 1 2 2 2 3 3 3 4 4 4 7 7 7 n 0 1 1 1 2 2 2 3 3 3 4 4 4 7 7 r 4 12 12 12 14 14 14 1 1 1 1 1 t 2 3 3 3 4 4 4 7 7 7 9 9 Mass (kg) 7..1.7 9.3.0. 11.2 11. 12.4 13.0 13.7 14.3 14.9 1. 1.1 1.7 17.3 1.0 1. 19.2 19. ead 30 0 140 12 1 40 940 0 70 720 0 speed ead 20 10 970 0 770 30 70 20 40 440 400 ead 00 40 40 430 30 340 3 20 20 240 0 pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is 000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) 3 SSPDCR-S-

SSPDCR-M-400 Single-axis robot for cleanroom/medium, high-rigidity, steel-base /ctuator width: 130mm/400W Straight shape High precision SSPDCR M 400 Series Type ead Stroke pplicable controller s SSPDCR: High precision : bsolute * Refer to P. for the details of items comprising the model number. Number/ CD drawings CD 4. number Slider reference surface. 113. Quick connect joint (for suction) pplicable tube outer diameter 012 Can be installed on the opposite side. 1 130 ase reference surface 400: 400W 40 : 40mm 20 : 20mm : mm 0: 0mm 1300: 1300mm (in 0 mm ) 9 113 9 T1: XSE-KE/KET T2: SSE XSE-P/Q. 7±0.02. N : None S : 3m M : m X : Spec. length -M, depth 12 0 0 133. (32.) 1. Stroke (ST) without brake: 33. 1 with brake: 1 ME 40 40 SE 9 20 11 ME Home ±0.02 (from reference surface) R 4. 12 Slider reference surface pitch xm Greasing nipple (same on the opposite side). ccess the nipple by removing the guide/ball screw grommet. M P pitch xn +0.01 0 Oblong hole, depth ead Stroke in 0mm 2-φH7, depth ±0.02 (from reference surface) N 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 9 ±0.02 cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)* SSPDCR-M- 1-400-40-2 - 3-4 - 40 1~0 0.4 1.2 0.4 1.2 4 13. 2 19. SSPDCR-M- 1-400-20-2 - 3-4 - bsolute 400 20 0~1300 1~10 0.4 1.0 0.4 1.0 34 12 4. 339.1 1 SSPDCR-M- 1-400-- 2-3 - 4-1~00 0.4 0.7 0.4 0. 70 2 1. 7.3 0 *In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). Positioning repeatability ±0.00mm Drive all screwø20mm equivalent to rolled C ost Motion 0.02mm max. Dynamic allowable load moment (Note 2) Ma: N m Mb: N m Mc: 230N m Ma direction: 00mm max. Mb, Mc directions: 00mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm 1 R 43. r-m, depth 12 φh7, depth 133. EU: Metal cable joint connector (stand. feature) Refer to the other options table below. desired cable exit direction can be selected. 34. (M3 tap) t-m3, depth 4 (same on the opposite side) 2-M3, depth (same on the opposite side) 0 ase reference surface Cable joint connector Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) 2. 7 12. thrust (N) (model number: 1S) Washer-assembled screw M3 (for FG, 2 locations) (model number: 3E) Cable exit from the rear left (model number: 1E) Suction flow rate (N /min) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 0.kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 without brake 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 1320 1370 1420 1470 170 170 1720 with brake 0 70 7 0 9 0 1 11 12 130 13 140 14 1 1 170 17 M 340 3 440 4 40 40 740 7 40 940 9 40 1140 11 1240 12 1340 13 1440 14 140 N 2 20 3 30 4 40 0 0 7 70 0 9 0 11 1 12 13 130 P 2 0 1 2 0 1 2 0 1 2 0 1 2 0 1 2 0 1 R 20 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 4 70 20 m 2 2 2 3 3 3 4 4 4 7 7 7 9 9 9 n 0 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 r 4 4 12 12 12 12 14 14 14 14 1 1 1 t 3 3 3 4 4 4 7 7 7 9 9 9 11 Mass (kg) 13.9 1.0 1.0 17.1 1.1 19.2 20.2 21.3.3 23.4 24.4 2. 2. 27. 2.7 29.7 30. 31. 32.9 33.9 3.0 3.0 37.1 3.1 39.2 ead 40 0 140 14 12 110 10 940 0 20 70 speed ead 20 10 40 940 0 770 700 40 0 00 470 440 4 30 ead 00 0 20 470 420 30 30 320 2 270 20 230 0 1 pplicable s pplicable X-SE-P/Q number axes encoder 230 VC X-SE-KE/KET 4 axes bsolute/ Program SSE 2 axes 11/230 VC (Note 1) (Note 2) (Note 3) (Note 4) Refer to P. 9 for the relationship of and payload. When the traveling life is 000 km. The value of dynamic straightness is when the high straightness, precision (option) is specified. The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) SSPDCR-M-400 4

SSPDCR--70 Single-axis robot for cleanroom/arge, high-rigidity, steel-base /ctuator width: 1mm/70W Straight shape High precision * Refer to P. for the details of items comprising the model number. Number/ Slider reference surface 9 4 Slider reference surface number Quick connect joint (for suction) pplicable tube outer diameter 012 Can be installed on the opposite side. 13.. 1 1 1 7. 7. 140 ase reference surface 140 Quick connect joint (for suction) -M, depth 1 pplicable tube outer diameter ø12 13 Can be installed on the opposite side. (32.) : ST + 4 for standard, ST + 27 with brake 1 20 Stroke 230 2031 174 (without brake) 211 (with brake) 40 40 (model number: 1S) SE ME 9 20 32 ME Home Washer-assembled screw M4 (32.) (for FG, 2 locations) 1 (17) ±0.02 (from reference surface) 1 R pitch xm Greasing nipple (same on the opposite side) ccess the nipple by removing the guide/ball screw grommet. M 7 P pitch xn r-m, depth 1 12 ead Stroke in 0mm cceleration (Note 1) Payload (Note 1) Horizontal (G) Vertical (G) Horizontal (kg) Vertical (kg)* SSPDCR-- 1-70-0-2 - 3-4 - bsolute 0 1~0 0.4 1.2 0.4 1.2 0 20 12 4 2 10 70 0~0 SSPDCR-- 1-70-2-2 - 3-4 - 2 1~10 0.4 1.2 0.4 1.2 40 2 CD drawings CD SSPDCR 70 Series Type ead Stroke pplicable controller s SSPDCR: : bsolute 70: 70W 0 : 0mm 0: 0mm T1: XSE-KE/KET N : None EU: Metal cable joint con- High precision 2 : 2mm T2: S : 3m nector (stand. feature) 0: 0mm SSE M : m Refer to the other (in 0 mm ) XSE-P/Q X : Spec. length options table below. 1S P11 Home limit switch P11 Cable exit from the rear left 1E P11 Home limit switch on opposite side P11 3S P11 Non-motor side NM P12 3E P11 Guide with ball retention mechanism RT P12 Q seal (standard feature) Q P11 Master axis M P12 rake P11 Master axis (sensor on opposite side) M P12 Creep sensor C P11 Slave axis S P12 Creep sensor on opposite side C P11 Suction tube joint on opposite side VR P12 High straightness, precision ST P13 2-øH7 +0.01 depth 12 0 2 0±0.02 2 Slider reference surface 9 13 H7+0.01 ±0.02 (from reference surface) 2 0 øh7 +0.01 depth 12 Oblong hole, depth 12 Slider center 13 0 N 1 9±0.02 3 4-M3, depth R (same on the opposite side) t-m3, depth 4 (same on the opposite side) 7 * In the above model numbers, indicates the encoder, indicates the stroke, indicates the applicable controller, indicates the cable length, and indicates the option(s). ** If the guide with ball retention mechanism (RT) is used, the vertical payload decreases by 2.0kg. (Please also refer to P.9). desired cable exit direction can be selected. Cable joint connector 17. 2. thrust (N) Suction flow rate (N /min) Positioning repeatability ±0.00mm Drive all screwø2mm equivalent to rolled C ost Motion 0.02mm max. Dynamic allowable load moment (Note 2) Ma: 13.N m Mb: 13.N m Mc: 334.N m Ma direction: 70mm max. Mb, Mc directions: 70mm max. Dynamic straightness (Note 3) 0.01mm/m max. ase Material: Cast iron with coating pplicable controller T1: XSE-KE/KET T2: XSE-P/Q, SSE, (Note 4) N: None, S: 3m, M: m, X : Specified length Grease ow dust-raising grease (for ball screw and guide) Cleanliness class ISO class 4 (US FED STD class ) Suction tube joint Quick connect joint, applicable tube outer diameter ø12mm Connect the motor cable and encoder cable. Refer to P. 7 for the cables. During the home return, the slider moves to the ME, so pay attention not to let the slider hit surrounding parts. (model number: 3S) (model number: 3E) Cable exit from the rear left (model number: 1E) Dimensions, Mass and by Stroke *If the brake is equipped, the mass increases by 1.0kg. *The maximum speed varies depending on the stroke. Stroke 0 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 130 1400 140 0 without brake 40 740 7 40 940 9 40 1140 11 1240 12 1340 13 1440 14 140 1 140 1 1740 17 140 1 1940 19 with brake 27 77 727 777 27 77 927 977 27 77 1127 1177 17 1277 1327 1377 1427 1477 127 177 127 177 1727 1777 127 177 1927 1977 2027 M 370 420 470 20 70 20 70 720 770 20 70 920 970 20 70 1 1170 10 1270 1320 1370 1420 1470 170 170 1720 1770 N 20 300 30 400 40 00 0 00 0 700 70 00 0 0 00 0 10 1 0 1300 130 1400 140 0 P 0 70 170 0 70 170 0 70 170 0 70 170 0 70 170 0 70 170 0 70 170 0 R 3 0 3 0 3 0 3 0 3 0 3 0 3 0 m 1 2 2 2 2 3 3 3 3 4 4 4 4 7 7 7 7 n 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 7 7 7 7 r 4 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 t 4 12 12 12 12 14 14 14 14 1 1 1 1 1 1 1 1 Mass (kg) 24 2 2 29 31 32 34 3 37 39 40 42 44 4 47 4 0 2 3 0 1 3 70 ead 0 0 1340 1170 40 speed ead 2 10 0 0 770 70 0 20 pplicable s pplicable number encoder X-SE-P/Q axes 230 VC X-SE-KE/KET 4 axes 11/230 VC bsolute/ Program - - - SSE 2 axes 230 VC (Note 1) Refer to P. 9 for the relationship of and payload. (Note 2) When the traveling life is 000 km. (Note 3) The value of dynamic straightness is when the high straightness, precision (option) is specified. (Note 4) The maximum cable length is 30 m. Specify a desired length in (Example. X0 = m) SSPDCR--70

pplicable The IS/ISP/SSP/ISD/ISPD/ISDCR/ISPDCR/SSPDCR can be operated with the following controllers. Select a controller that meets the s of your equipment. *For details, refer to the RoboCylinder General Catalog. series/ SSE KE/KET XSE P/Q External viewπ ase s Control s Features Power capacity Input power supply powersupply range Total maximum of connected axes number Position detection Operation positioner controller supporting up to 12 positioning points For control modes, the pulse-train input mode is supported in addition to the positioner mode. 0W/1V 0W/22V W/49V 400W/44V 70W/19V 11 VC 230 VC W (11-V power-supply ) 70W (230-V power-supply ) program controller capable of 2-axis interpolation operation. Offering excellent cost performance, although scalability is lower than XSE controllers. 0W/19V 0W/294V W/41V 400W/V 70W/11V (The above assumes a 1-axis.) 11 VC 230 VC 400W (11-V power-supply ) 00W (230-V power-supply ) ±% high-function controller capable of interpolation operation involving up to 4 axes. KET is conforming to safety category 4. high-function controller capable of interpolation operation involving up to axes. ctuators of a total wattage of 2400W can be connected. The s vary. Contact II for details. 11 VC 230 VC 00W (11-V power-supply ) 0W (230-V power-supply ) 230 VC Three-phase 230 VC 0W (single-phase, 230 V) 2400W (three-phase, 230 V) 2 axes 4 axes axes Positioner operation Pulse- encoder/bsolute encoder Program operation Positioner operation (switchable) Program operation Program Inputs/Outputs and communication Program language Super SE language Number of programs 12 4 12 Number of program steps 9999 000 9999 Number of multi-task programs 1 1 Number of positions 12 max. 00 3000 00 Data input devices (optional) Standard inputs/ s Extended inputs/ s Teaching pendant number: CON-PT-ENG/CON-T-ENG RCM-E/RCM-P (w/o CE mark) PC software number: RCM-1-MW-EU (for RS232 communication) RCM-1-US-EU (for US communication) 1 input points/1 points (NPN/PNP selectable) Not supported Teaching pendant number: SE-T-J SE-TD-J I-T-X-J (w/o CE mark) I-T-XD-J (w/o CE mark) PC software number: I-1-X-MW-J (for RS232 communication) I-1-X-US (for US communication) 24 input points/ points (NPN/PNP selectable) Teaching pendant number: SE-TG SE-T/TD I-T-X/XD (w/o CE mark) PC software number: I-1-X-MW (for RS232 communication) I-1-X-USMW (for US communication) Teaching pendant number: SE-T/TD/TG I-T-X/XD (w/o CE mark) PC software number: I-1-X-MW I-1-X-USMW (for XSE-P) : I-1-X-MW (for XSE-Q) 32 input points/1 points (NPN/PNP selectable) Total 33 input/ points Total 34 input/ points Field network DeviceNet, CC ink, Profius DeviceNet, CC ink, Profius, Ethernet mbient operating temperature/humidity 0 to 400C to 9% (non-condensing) ambience There shall be no corrosive gases or excessive powder dust. External dimensions x. (H) x 121 (D) (W or less) 72 x. (H) x 121 (D) (400W or more) 0 x 202. (H) x 12 (D) (when the absolute battery installed) 39.4 x 19 (H) x 12.3 (D) (1-axis, 2-axes ) 2 x 19 (H) x 12.3 (D) (XSE-P, 1-axis ) 2 x 19 (H) x 12.3 (D) (XSE-Q, 1-axis ) Mass 0. to 1.1 kg 1.4kg.0 to 7.0 kg.2 to.7 kg (XSE-P) 4. to.0 kg (XSE-Q) ccessories I/O flat cable (40 cores) I/O flat cable (34 cores) I/O flat cable (0 cores)