High-Precision, Direct-Drive Linear Servo Systems

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High-Precision, Direct-Drive Linear Servo Systems (EM and LVD) pending The is a direct drive linear actuator servo system. Each complete system consists of a brushless linear servo motor, microprocessor-based servo drive with integrated power supply, precision linear guide with rugged square rail bearings and an optical linear encoder for servo feedback. The primary benefit of the system is the simplicity of the design. The provides precise linear motion without belts and pulleys, gearboxes, leadscrews or other rotary-to-linear conversion devices that introduce inaccuracies and system complexities. The performance difference between the LM1000 and LM5000 Series are maximum force, positional accuracy, maximum speed, encoder resolution and repeatability. Drive Features Two input power range versions 100 115V or 200 230V ompatible with all ompumotor controllers Step-and-direction input for position mode ±10VD analog input for velocity mode ±8VD analog input for force mode Seven segment LED for drive status and system diagnostics Internal mechanical resonance filter an operate in lass 10 clean room applications with proper preparation Smooth linear motion at slow speeds bility to operate in position, velocity or force control mode LM1000 Series Three motor sizes available: LM1050 provides 50 N of maximum linear force LM1100 provides 100 N of maximum linear force LM1300 provides 300 N of maximum linear force Linear stroke lengths from 50 mm to 1,500 mm Standard speeds up to 0.83 m/s Positional repeatability of ±0.5 µm Positional accuracy of 10 µm resolution of 0.5 µm Ultra precision version improves repeatability and resolution by a factor of 5 High rigidity models are available for increased load and moment capabilities LM5000 Series Three motor sizes available: LM5040 provides 40 N of maximum linear force LM5090 provides 90 N of maximum linear force LM5270 provides 270 N of maximum linear force Linear stroke lengths from 50 mm to 1,500 mm Standard speeds up to 2 m/s Positional repeatability of ±1.0 µm Positional accuracy of 50 +(50/1,000) * L s [µm] (Ls = stroke length in mm) resolution of 1.0 µm High rigidity models are available for increased load and moment capabilities Find Your Local Factory uthorized Distributor at www. or all 1-800-358-9070. 187 Parker Hannifin orporation

LM1000 Series Motor Specifications LM1000 Series Motor Data Performance LM1050 LM1100 LM1300 Maximum force lb 11.25 22.5 67.5 N 50 100 300 Positional accuracy in x 10-4 3.9 3.9 3.9 µm 10 10 10 Maximum speed in/s 32 (6) 32 (6) 32 (6) m/s 0.83 (0.16) 0.83 (0.16) 0.83 (0.16) resolution in x 10-5 /pulse 1.95 (0.39) 1.95 (0.39) 1.95 (0.39) µm/pulse 0.5 (±0.1) 0.5 (±0.1) 0.5 (±0.1) Repeatability in x 10-5 ±1.95 (±0.39) ±1.95 (±0.39) ±1.95 (±0.39) µm ±0.5 (±0.1) ±0.5 (±0.1) ±0.5 (±0.1) Parallelism in x 10-5 39 39 39 µm 10 10 10 Max load* lb 45 45 225 N 200 200 1,000 Max transportable moment loads* Rolling moment ft-lb 3.69 5.16 45.73 N-m 5.0 7.0 62.0 Pitching moment ft-lb 5.16 5.16 45.73 Yaw moment ft-lb 5.16 5.16 45.73 Slider weight lb 2.2 3.1 11.0 kg 1.0 1.4 5.0 Rail weight lb/in 0.73 0.84 1.40 kg/m 13 15 25 Z-channel pulse/in 1/0.0806 1/0.0806 1/0.0806 pulse/mm 1/2.048 1/2.048 1/2.048 Stroke length in 1.9 59 1.9 59 1.9 59 mm 50 1,500 50 1,500 50 1,500 Life km [2,000/(200 W/4)] 3 x 50 [2,000/(200 W/4)] 3 x 50 [8,330/(600 W/4)] 3 x 50 W: Load (N) W: Load (N) W: Load (N) Notes: Shown the specification of ±0.1 (µm) version, which can be requested through ustom Products. Shown the value at 22 (coefficient of linear expansion 8 x 10-6 / ) Shown here is the positional accuracy for L s 700 mm (27.5 in), positional accuracy for L s 800 mm (31.5 in) = 50 + (50/1,000) * L s [µm] English units are provided for convenience. * When designing a system, de-rate the maximum loads to the values specified. Linear Series Standard Product onfiguration End Plate MOTOR Slider DRIVER over LED Scale Linear Guide ase De-rate pplication Factor Smooth, rotary motion 1/3 Intermittent press loading 1/5 Repetitive shock loading 1/10 Up PD Down HED MPLIFIER 188 Parker Hannifin orporation

LM5000 Series Motor Data LM5000 Series Motor Specifications Performance LM5040 LM5090 LM5270 Maximum force lb 9.0 20.2 60.7 N 40 90 270 Positional accuracy in x 10-4 19.5 + (0.0195) * L s 19.5 + (0.0195) * L s 19.5 + (0.0195) * L s µm 50 + (50/1,000) * L s 50 + (50/1,000) * L s 50 + (50/1,000) * L s Maximum speed in/s 78 78 78 m/s 2.0 2.0 2.0 resolution in x 10-5 /pulse 3.9 3.9 3.9 µm/pulse 1.0 1.0 1.0 Repeatability in x 10-5 ±3.9 ±3.9 ±3.9 µm ±1 ±1 ±1 Parallelism in x 10-5 39 39 39 µm 10 10 10 Max load* lb 45 45 225 N 200 200 1,000 Max transportable moment loads* Rolling moment ft-lb 3.69 5.16 45.73 N-m 5.0 7.0 62.0 Pitching moment ft-lb 5.16 5.16 45.73 Yaw moment ft-lb 5.16 5.16 45.73 Slider weight lb 2.2 3.1 11.0 kg 1.0 1.4 5.0 Rail weight lb/in 0.73 0.84 1.40 kg/m 13 15 25 Z-channel pulse/in 1/0.161 1/0.161 1/0.161 pulse/mm 1/4.096 1/4.096 1/4.096 Stroke length in 1.9 59 1.9 59 1.9 59 mm 50 1,500 50 1,500 50 1,500 Life km [2,000/(200 W/4)] 3 x 50 [2,000/(200 W/4)] 3 x 50 [8,330/(600 W/4)] 3 x 50 W: Load (N) W: Load (N) W: Load (N) Notes: L s = stroke length in mm Shown the value at 22 (oefficient of linear expansion 8 x 10-6 / ) L s = stroke length in inches English units are provided for convenience. * When designing a system, de-rate the maximum loads to the values specified. Linear Series Standard Product onfiguration End Plate MOTOR Slider DRIVER over LED Scale Linear Guide ase De-rate pplication Factor Smooth, rotary motion 1/3 Intermittent press loading 1/5 Repetitive shock loading 1/10 Up PD Down HED MPLIFIER Find Your Local Factory uthorized Distributor at www. or all 1-800-358-9070. 189 Parker Hannifin orporation

Driver Specifications Input Signal ommand Interface Position mode Velocity mode Force mode Output Signal Speed signal signal larm signal Monitor Power source Maximum power consumption Weight LM1050/LM5040 LM1100/LM5090 LM1300/LM5270 Step Input: Low going, low pulse, 150 nanoseconds minimum pulse width, 1.6 MHz max (LM1000) or 2.0 MHz max (LM5000) Input: Logic high = UP direction; Logic low = DOWN direction nalog Input: ±10VD command signal nalog Input: ±8VD command signal +6V (UP direction); -6V (DOWN direction) Track / (4,000 khz max.), Z-channel signal: 1 pulse/2.048 mm (LM1000) or 1 pulse/4.096 mm (LM5000) Over current, over voltage, over temperature of heat sink; Under voltage, encoder abnormal, PU abnormal 2.5 Hz step response output (test mode) 100 115V or 200 230V. +10 15%, 50/60 khz LM1000 Series 300V; LM5000 Series 450V 4 lbs 1.8 kg Environmental Specifications Motor Driver Note Operation Temperature 0 45 0 50 Operation Humidity 20 85% RH 20 90% RH No condensing Storage Temperature -20 85-20 85 Storage Humidity 20 85% RH 20 90% RH No condensing Environment No corrosive gases; dust-free atmosphere LM1050/LM5040 Motor Dimensions 0.83 (21) From slider side suf. 1.34 (34) 4- M6 Thread, 0.39 (10) depth for load attached 2.2 (55) 3.0 (76) 5.4 (136) 1.81 (46) 0.81 (20.5) from base side suf. 0.26 (6.5) 1.97 (50) onnector 4 & 12 terminal / MP o. 3.0 (76) Ls (Stroke length) 5.12 (130) Ø0.18 (4.5) Holes for base fix, Ø0.31 (8) c'sink, 0.31 (8) depth 1.97 (50) Interval Length x N L (Overall length of motor) L= Ls + 6.69 (170) 5 M3 Depth 0.2 (5) 0.59 (15) Stopper 1.38 (35) MODEL LM1050-005 LM1050-010 LM1050-015 LM1050-020 LM1050-030 LM1050-040 LM1050-050 LM1050-060 LM1050-070 LM1050-080 LM1050-090 LM1050-100 LM1050-110 LM1050-120 LM1050-130 LM1050-140 LM1050-150 0.91 (23) 1.77 (45) 1.85 (47) L Ls in mm in mm N No. of Holes 8.66 220 1.97 50 2 x 2 10.63 270 3.94 100 2 x 4 12.60 320 5.91 150 5 2 x 6 14.57 370 7.87 200 6 2 x 7 18.50 470 11.81 300 8 2 x 9 22.44 570 15.75 400 10 2 x 11 26.38 670 19.69 500 12 2 x 13 30.31 770 23.62 600 14 2 x 15 34.25 870 27.56 700 16 2 x 17 38.19 970 31.50 800 18 2 x 19 42.13 1070 35.43 900 20 2 x 21 46.06 1170 39.37 1000 22 2 x 23 50.00 1270 43.31 1100 24 2 x 25 53.94 1370 47.24 1200 26 2 x 27 57.87 1470 51.18 1300 28 2 x 29 61.81 1570 55.12 1400 30 2 x 31 65.75 1670 59.06 1500 32 2 x 33 190 Parker Hannifin orporation

LM1100/LM5090 Motor Dimensions Dimensional Drawings 1.81 (46) 0.83 (21) From slider side suf. 2.17 (55) 4- M6 Thread, 0.39 (10) depth for load attached 3.0 (76) 3.82 (97) 6.18 (157) 0.81 (20.5) from base side suf. 0.26 (6.5) 1.97 (50) onnector 4 & 12 terminal / MP o. Ls (Stroke length) 5.12 (130) Ø0.18 (4.5) Holes for base fix, Ø0.31 (8) c'sink, 0.31 (8) depth 3.0 (76) 5 M3 Depth 0.2 (5) 1.97 (50) Interval Length x N L (Overall length of motor) L= Ls + 6.69 (170) 0.59 (15) Stopper MODEL LM1100-005 LM1100-010 LM1100-015 LM1100-020 LM1100-030 LM1100-040 LM1100-050 LM1100-060 LM1100-070 LM1100-080 LM1100-090 LM1100-100 LM1100-110 LM1100-120 LM1100-130 LM1100-140 LM1100-150 0.91 (23) 1.77 (45) 1.85 (47) L Ls in mm in mm N No. of Holes 8.66 220 1.97 50 2 x 2 10.63 270 3.94 100 2 x 4 12.60 320 5.91 150 5 2 x 6 14.57 370 7.87 200 6 2 x 7 18.50 470 11.81 300 8 2 x 9 22.44 570 15.75 400 10 2 x 11 26.38 670 19.69 500 12 2 x 13 30.31 770 23.62 600 14 2 x 15 34.25 870 27.56 700 16 2 x 17 38.19 970 31.50 800 18 2 x 19 42.13 1070 35.43 900 20 2 x 21 46.06 1170 39.37 1000 22 2 x 23 50.00 1270 43.31 1100 24 2 x 25 53.94 1370 47.24 1200 26 2 x 27 57.87 1470 51.18 1300 28 2 x 29 61.81 1570 55.12 1400 30 2 x 31 65.75 1670 59.06 1500 32 2 x 33 LM1300/LM5270 Motor Dimensions From slider side suf. 0.39 (10) 2.56 (65) 1 3.54 (90) 0.98 (25) from base side suf. 3.94 (100) onnector 4 & 12 terminal / MP o. 4.92 (125) Ls (Stroke length) 7.48 (190) Ø0.28 (7) Holes for base fix Ø0.43 (11) c'sink, 0.35 (9) depth 9 M3 Depth 0.2 (5) 2.56 (65) 1 3.94 (100) Interval Length x N L (Overall length of motor) L= Ls + 9.06 (230) Note: 1 Dimensions for LM1300-005 and LM1300-015 are 1.57 (40) instead of 2.56 (65). Stopper 4.92 (125) 4- M8 Thread, 0.39 (10) depth 6.30 for load (160) attached 8.74 (222) 0.91 (23) 1.90 (48.2) 2.48 (63) 2.56 (65) L Ls MODEL in mm in mm N No. of Holes LM1300-005 11.02 280 1.97 50 2 x 2 LM1300-010 12.99 330 3.94 100 2 x 2 LM1300-015 14.96 380 5.91 150 3 2 x 4 LM1300-020 16.93 430 7.87 200 3 2 x 4 LM1300-030 20.87 530 11.81 300 4 2 x 5 LM1300-040 24.80 630 15.75 400 5 2 x 6 LM1300-050 28.74 730 19.69 500 6 2 x 7 LM1300-060 32.68 830 23.62 600 7 2 x 8 LM1300-070 36.61 930 27.56 700 8 2 x 9 LM1300-080 40.55 1030 31.50 800 9 2 x 10 LM1300-090 44.49 1130 35.43 900 10 2 x 11 LM1300-100 48.43 1230 39.37 1000 11 2 x 12 LM1300-110 52.36 1330 43.31 1100 12 2 x 13 LM1300-120 58.30 1430 47.24 1200 13 2 x 14 LM1300-130 60.24 1530 51.18 1300 14 2 x 15 LM1300-140 64.17 1630 55.12 1400 15 2 x 16 LM1300-150 68.11 1730 59.06 1500 16 2 x 17 Find Your Local Factory uthorized Distributor at www. or all 1-800-358-9070. 191 Parker Hannifin orporation

Speed-Force Performance urves lb (N) 27.0 (120) lb (N) 81.0 (360) 22.5 (100) LM1100 Series 67.5 (300) LM1300 Series 18.0 (80) 54.0 (240) Force 13.5 (60) LM1050 Series Force 40.5 (180) 9.0 (40) 27.0 (120) 4.5 (20) 13.5 (60) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Slider Velocity (m/s) lb (N) 67.5 (300) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Slider Velocity (m/s) 110-115 V 200-230 V Force 56.3 (250) 45.0 (200) 33.8 (150) 22.5 (100) LM5270 Series Head mplifier 0.28 (7) LM5090 Series 11.3 (50) LM5040 Series 0 0 0.25 0.50 0.75 1.00 1.25 1.50 1.75 2.00 Slider Velocity (m/s) Ø0.18 (4.5) x 2 110-115 V 200-230 V The speed-force curves represent peak force available; continuous forces are approximately 2/3 of the peak force value. 8.11 7.56 (206) (192) Drive Dimensions 0.28 (7) 2.24 (57) 1.18 (30) 2.76 (70) 1.97 (50) able Option #1 1 3 m (10 ft) Motor able 9.84 (250) 9.41 (239) 8.46 (215) 2 1.5 m (5 ft) Head-mp able 0.28 (7) 0.67 (17) 5.91 (150) 3 3 m (10 ft) able 192 Parker Hannifin orporation