Cryogenic Valves. Incorporated. Fujikin. CRYO Series. Certified High-Pressure Gas Product SUS316/SUS316L. CAT. NO.: 112-KV-rus

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Fujikin Manual / Pneumatic / Electric CAT. NO.: 11-KV-rus CRYO Series Cryogenic Valves Certified High-Pressure Gas Product SUS316/SUS316L CRYO N -196 CRYO He Patents registered or pending. -68 CRYO H -53 Printed on recycled paper Incorporated

High Reliability, Durability, Precision Cryogenic Valves Super The Height of Excellence A leader in high-purity flow-control systems, Fujikin plays a key role in 1st century science and technology. Always state of the art, Fujikin manufactures valves and fittings used in such fields as rocketry, semiconductors, nuclear plants, maglev transport, and biotechnology. With the Cryogenic Valves, Fujikin has concentrated its technical and design capabilities to produce equipment of innovative precision and quality. These products make significant contributions to the cryogenic industry, bringing new levels of performance, reliability, quality and safety.

Cryogenic valves for non-military rocket engine testing and launch facilities. High-pressure cryogenic valves for non-military rocket engine testing and launch facilities. Cryogenic valves for large-bore superconducting magnet facilities

Stainless Steel Cryogenic Valves Product overview and reference pages Cryogenic needle valves Name Configuration Nominal Orifice (Ømm) Max. Mass (kg) Part Number Page Threaded Extended Stem Needle Valve ULH 15CY Threaded Extended Stem Needle Valve ULH 15CY Socket weld Extended Stem Needle Valve ULH 55CY Socket weld Extended Stem Needle Valve ULH 65CY Rc 1/8" 6 0.38 1.37 ULH-15CYC-A Rc 1/4" 6 0.5 1.35 ULH-15CYC-B Rc 3/8" 6 0.64 1.35 ULH-15CYC Rc 1/" 8 1.1 1.4 ULH-15CYD Rc 3/4" 10 1.9.3 ULH-15CYE Rc 1" 1.8 3. ULH-15CYF Rc 1/8" 6 0.5 1.37 ULH-35CYC-A Rc 1/4" 6 0.67 1.35 ULH-35CYC-B Rc 3/8" 6 0.78 1.35 ULH-35CYC Rc1/ 8 1.47 1.4 ULH-35CYD Rc 3/4" 10.47.3 ULH-35CYE Rc 1" 1 3.56 3. ULH-35CYF 1/8" 6 0.5 1.4 ULH-55CYC-A 1/4" 6 0.5 1.4 ULH-55CYC-B 3/8" 6 0.64 1.4 ULH-55CYC 1/" 8 1.1 1.5 ULH-55CYD 3/4" 10 1.9.4 ULH-55CYE 1" 1.8 3.4 ULH-55CYF 1/8" 6 0.5 1.4 ULH-65CYC-A 1/4" 6 0.67 1.4 ULH-65CYC-B 3/8" 6 0.78 1.4 ULH-65CYC 1/" 8 1.47 1.5 ULH-65CYD 3/4" 10.47.4 ULH-65CYE 1" 1 3.56 3.4 ULH-65CYF 8 8 9 9 3

Stainless Steel Cryogenic Valves Cryogenic needle valves (for custom orders) Name Configuration Size Orifice (Ømm) Max. Part Number Page Threaded Extended Stem Needle Valve ULH-15CGY MS33649-4 8 0.5 ULH-15CGYD-4 MS33649-6 8 1.0 ULH-15CGYD-6 MS33649-8 1 1.9 ULH-15CGYD-8 MS33649-1 1.4 ULH-15CGYD-1 MS33649-16 1.4 ULH-15CGYD-16 1 Cryogenic flanged valves (for custom orders) Name Configuration Nominal Orifice Dia. (mm) Max. Part Number Page JIS RF Flange Needle Valve JIS 10K, 0K UH-5CY 3/8" 8 1.1 ULH-5CYD-J**R-C 1/" 8 1.1 ULH-5CYD-J**R-D 3/4" 10 1.9 ULH-5CYE-J**R-E 1" 1.8 ULH-5CYF-J**R-F 14 ANSI RF Flange Needle Valve ANSI, 300 1/" 8 1.1 ULH-5CYD-A*R-D 3/4" 10 1.9 ULH-5CYE-A*R-E 15 UH-5CY 1" 1.8 ULH-5CYF-A*R-F ANSI RJ Flange Needle Valve ANSI 900, 0 1/" 8 1.1 ULH-5CYD-A*J-D 3/4" 10 1.9 ULH-5CYE-A*J-E 16 UH-5CY 1" 1.8 ULH-5CYF-A*J-F 4

Stainless Steel Cryogenic Valves Cryogenic valves for LN and LH (for custom orders) Name Configuration Nominal Orifice dia (mm) Max. Part Number Page Butt Weld Full Port Disk Valve 1" 5 1 UL-51CGJYF 1 1/" 40 30 UL-51CGJYH " 50 48 UL-51CGJYI 18 UL-51CGJY 3" 75 98 UL-51CGJYK Socket Weld Stop Valve 6 mm 4 0.37 ULH-61C-6 0 ULH-61C 10 mm 6 0.83 ULH-61C-10 Socket Weld Pneumatic Valve 6 mm 4 0.37 APR-ULH-61C-6 0 APR-ULH-61C 10 mm 6 0.83 APR-ULH-61C-10 Cryogenic check valves for LN and LH Name Configuration Connecting Thread Orifice Max. Mass (kg) Part Number Page Threaded Lift Type Check Valve Rc1/8" 8 0.78 0. UC-15A Rc1/4" 8 0.78 0. UC-15B Rc3/8" 1 1.4 0.7 UC-15C Rc1/" 1.7 0.7 UC-15D Rc3/4" 15 3.9 1. UC-15E UC-15 Rc 1" 15 4.3 1. UC-15F Socket Weld Lift Type Check Valve UC-55 1/8" 8 0.78 0. UC-55A 1/4" 8 0.78 0. UC-55B 3/8" 1 1.4 0.7 UC-55C 1/" 1.7 0.7 UC-55D 3/4" 15 3.9 1. UC-55E 1" 15 4.3 1. UC-55F 5

Stainless Steel Cryogenic Valves Cryogenic automatic control valves Name Configuration Nominal Max. Page Pneumatic Mini Control Valve Needle Valve MINUCON Solenoid Control Valve Needle Valve SR100 Stepper Motor Control Valve Needle Valve AR000 1/4" - 1/" below 0.5 1/4" 0.5 0.7 3/8" 0.5 1.0 1/" 0.5 3.0 3/4" 0.7 5.0 1" 0.7 5.0 1/4" - 1/" below 0.5 1/4" 0.5 0.7 3/8" 0.5 1.0 1/" 0.5 3.0 3/4" 0.7 5.0 1" 0.7 5.0 1/4" - 1/" below 0.5 1/4" 0.5 0.7 3/8" 0.5 1.0 1/" 0.5 3.0 3/4" 0.7 5.0 1" 0.7 5.0 3 6 9 6

Cryogenic Needle Valves Part Number Designation U L H 1 5 CY C Stainless steel Extended bonnet Flow control valve Cryogenic yoke Nominal diameter: C-A 1/8 C-B 1/4 C 3/8 D 1/ E 3/4 F 1 Connection: 1 Threaded, globe pattern Threaded, angle pattern 5 Socket weld, globe pattern 6 Socket weld, angle pattern Features Thread Size Taper pipe thread Pressure rating: 50 kg f/cm (4.5MPa) Designation A B C D E F JIS B 003 (1981) PT 1/8 PT 1/4 PT 3/8 PT 1/ PT 3/4 PT 1 JIS B 003 Male thread R 1/8 R 1/4 R 3/8 R 1/ R 3/4 R 1 (198) (ISO 7/1) Female thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/ Rc 3/4 Rc 1 Thread designation complies with JIS B003 (198) (ISO7/1). Sizes as per JIS B003 (1981) are shown for reference. Guidelines for Adjusting Gland Packing 1. Extended bonnet allows a minimum fluid temperature of -196 (liquid nitrogen) without freezing the gland or compromising valve performance.. Needle design enhances ease of flow adjustment. 3. Combination of gland packing and actuation mechanism reduces handle torque and enhances sealing performance. 4. Easy-to-operate handwheel with large drainage holes; its standard color is metallic blue. 5. Body designed so that it may be secured with U-bolts. 6. High pressure certification assures safe operation. Applications LPG, LNG, liquid nitrogen, and oxygen lines lines, cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, shipyards, and cryogenic lines in other facilities. Because the gland may loosen during shipment, the hexagon nut at the gland should be tightened before the valve is pressurized. Tighten the nut to the value shown in the table to the right. To prevent uneven packing compression, tighten both sides of the nut evenly. Tightening Torque Pipe Size Torque (kg fcm) 1/8" -1/" 10 3/4" 15 1" 5 Nut Gland packing 7

Cryogenic Needle Valves Threaded (Rc) ULH-15CY Dimensions Connecting thread A Threaded (Rc) ULH-35CY Orifice (D1) Face-to-face dimension L H1 Height H Lift L1 Handle D B Max value Mass (kg) Part number Rc1/8" 6 55 17 303 4.5 68 6 0.38 1.37 ULH-15CYC-A Rc1/4" 6 55 17 303 4.5 68 6 0.5 1.35 ULH-15CYC-B Rc3/8" 6 55 17 303 4.5 68 6 0.64 1.35 ULH-15CYC Rc1/" 8 60 0 306 7.5 68 3 1.1 1.4 ULH-15CYD Rc3/4" 10 70 40 340 10 78 38 1.9.3 ULH-15CYE Rc 1" 1 85 55 368 1 88 46.8 3. ULH-15CYF Dimensions Connecting Orifice thread A (D1) Face-to-face dimensions L H1 Height H Lift L1 Handle D B Max Mass (kg) Part Number Rc 1/8" 6 7.5 17 303 4.5 68 6 0.5 1.37 ULH-35CYC-A Rc 1/4" 6 7.5 17 303 4.5 68 6 0.67 1.35 ULH-35CYC-B Rc 3/8" 6 7.5 17 303 4.5 68 6 0.78 1.35 ULH-35CYC Rc 1/" 8 30 0 306 7.5 68 3 1.47 1.4 ULH-35CYD Rc 3/4" 10 35 40 340 10 78 38.47.3 ULH-35CYE Rc 1" 1 4.5 55 368 1 88 46 3.56 3. ULH-35CYF Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 8

Cryogenic Needle Valves Socket Weld ULH-55CY Welding precautions: (1) During welding, keep the valve partially open, and cover it with a wet towel to protect it from the heat. () After wielding one side, wait at least 10 minutes for the valve to cool to room temperature before welding the other side. Dimensions Orifice Face-to-face Pipe Nominal Max Mass H1 Height Lift Handle dimensions Connection B H L1 D (kg) (D1) L D S Part Number 1/8" 6 60 11 10 17 303 4.5 68 1.3 0.5 1.4 ULH-55CYC-A 1/4" 6 60 14.3 10 17 303 4.5 68 1.3 0.5 1.4 ULH-55CYC-B 3/8" 6 65 17.8 13 17 303 4.5 68 5.3 0.64 1.4 ULH-55CYC 1/" 8 75. 13 0 306 7.5 68 31 1.1 1.5 ULH-55CYD 3/4" 10 85 7.7 16 40 340 10 78 37 1.9.4 ULH-55CYE 1" 1 100 34.5 16 55 368 1 88 45.5.8 3.4 ULH-55CYF Socket Weld ULH-65CY Welding precautions: (1) During welding, keep the valve partially open, and cover it with a wet towel to protect it from the heat. () After wielding one side, wait at least 10 minutes for the valve to cool to room temperature before welding the other side. Dimensions Orifice Face-to-face Pipe Nominal dimensions Connection H1 Height Lift Handle Max Mass B H L1 D (kg) (D1) L D S Part Number 1/8" 6 30 11 10 17 303 4.5 68 1.3 0.5 1.4 ULH-65CYC-A 1/4" 6 30 14.3 10 17 303 4.5 68 1.3 0.67 1.4 ULH-65CYC-B 3/8" 6 3.5 17.8 13 17 303 4.5 68 5.3 0.78 1.4 ULH-65CYC 1/" 8 37.5. 13 0 306 7.5 68 31 1.47 1.5 ULH-65CYD 3/4" 10 4.5 7.7 16 40 340 10 78 37.47.4 ULH-65CYE 1" 1 50 34.5 16 55 368 1 88 45.5 3.56 3.4 ULH-65CYF Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 9

Cryogenic Needle Valves Materials Part Material Body SUS 316 Bonnet SUS 316 Stem SUS 316 Disk SUS 316L (Stelliting) Gland packing PTFE+PCTFE Handle ADC 1 Specifications Max. Operating Fluid Temperature Pressure Range 4.5 MPa -196 C to + C Pressure (kgf/cm ) Pressure-Temperature Curve 300 50 00 100 50 40 C 50kgf/cm 50 C 4kgf/cm 100 C 13kgf/cm C 194kgf/cm -196 - -100-50 0 50 100 Temperature ( C) Curves (Globe Pattern) 8 1" Precautions (1) This valve was not designed to be throttled at an almost-closed position. Using it in such a manner may result in damage to the disk and/or seat. Notify Fujikin in advance if you are planning to throttle this valve with the handle less than a 1/ turn from the fully closed position. () Do not use this valve with ammonia, acetylene or similar gases as bronze gaskets are used for sealing. (3) As the extended bonnet design is meant to prevent the transfer of cold to the gland, do not expose the actuator to freezing temperatures. Welding Precautions (1) During welding, keep the valve partially open, and cover it with a wet towel to protect it from the heat. () After wielding one side, wait at least 10 minutes for the valve to cool to room temperature before welding the other side. No. of handwheel rotations No. of handwheel rotations 7 6 5 4 3 1 8 7 6 5 4 3 1 1/4" 1/8" 3/8" 0 0.5 1 1.5.5 3 3.5 1/4" 3/8" 1/8" 1/" 1/" 3/4" Curves (Angle Pattern) 3/4" 1" 0 0.5 1 1.5.5 3 3.5 Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 10

Cryogenic Needle Valves with Travel Indicator Part Number Designation (for custom orders) U L H 15 CGY D 4 Stainless steel Extended bonnet 4 MS 33649-4 6 MS 33649-6 8 MS 33649-8 1 MS 33649-1 16 MS 33649-16 Flow control valve Connection: 1 Threaded, globe pattern 3 Threaded, angle pattern 5 Socket weld, globe pattern 6 Socket weld, angle pattern Taper pipe thread Pressure rating: 50 kgf/cm (4.5MPa) Thread Size Body diameter Cryogenic yoke with travel indicator Designation A B C D E F JIS B 003 (1981) PT 1/8 PT 1/4 PT 3/8 PT 1/ PT 3/4 PT 1 JIS B 003 Male thread R 1/8 R 1/4 R 3/8 R 1/ R 3/4 R 1 (198) (ISO 7/1) Female thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/ Rc 3/4 Rc 1 Thread designation complies with JIS B003 (198) (ISO7/1). Sizes as per JIS B003 (1981) are shown for reference. Due to the relatively small demand for this valve type, it has been removed from Fujikin s standard product line. It is available as a custom order only. Features Guidelines for Adjusting Gland Packing 1. Extended bonnet allows a minimum fluid temperature of -196 C (liquid nitrogen) without freezing the gland or compromising valve performance.. Needle design enhances ease of flow adjustment. 3. Combination of gland packing, O-rings, and actuation mechanism reduces handle torque and enhances sealing performance. 4. Standard end connection: MS thread (US AS3350/3354). Rc thread, and socket weld end connections available as options. 5. Easy-to-operate handwheel with large drainage holes; its standard color is metallic blue. 6. Body designed so that it may be secured with U-bolts. 7. High pressure certification assures safe operation. Applications Non-military rocket launch and testing facilities; liquid hydrogen, liquid nitrogen, and liquid oxygen production; cryogenic lines in other facilities. Because the gland may loosen during shipment, the hexagon nut at the gland should be tightened before the valve is pressurized. Tighten the nut to the value shown in the table to the right. To prevent uneven packing compression, tighten both sides of the nut evenly. Tightening Torque Pipe Size Torque (kg fcm) 1/8" -1/" 10 3/4" 15 1" 5 Nut Gland packing 11

Cryogenic Needle Valves Threaded (MS) ULH-15CGYD Travel indicator Dimensions Nominal Orifice (D1) A 1/4" 8 70 0.4375-0UNJF-3B(MS33649-4) 0 306 7.5 68 3 0.6 1.8 ULH-15CGYD-4 3/8" 8 75 0.565-18UNJF-3B(MS33649-6) 0 306 7.5 68 3 1.1 1.6 ULH-15CGYD-6 1/" 1 100 0.7500-16UNJF-3B(MS33649-8) 55 368 1 88 46 1.9 3. ULH-15CGYF-8 3/4" 1 100 1.065-1UNJF-3B(MS33649-1) 55 368 1 88 46.8 3.3 ULH-15CGYF-1 1" 1 100 1.315-1UNJF-3B(MS33649-16) 55 368 1 88 46.8 3.4 ULH-15CGYF-16 Materials Face-to-face dimension L Connecting thread Part Material Body SUS 316 Bonnet SUS 316 Stem SUS 316 Disk SUS 316L (Stelliting) Gland packing PTFE+PCTFE O-Ring FKM Handle ADC 1 H1 Height H Pressure (kgf/cm ) Lift L1 50 00 100 50 Handle D B Max value 40 50kgf/cm 50 4kgf/cm Mas s (kg) Pressure-Temperature Curve 100 13kgf/cm 194kgf/cm Part number Specifications Max. Operating Fluid Temperature Pressure Range 4.5 MPa -196 C to + C Precautions (1) This valve was not designed to be throttled at an almostclosed position. Using it in such a manner may result in damage to the disk and/or seat. Notify Fujikin in advance if you are planning to throttle this valve with the handle less than a 1/ turn from the fully closed position. () Do not use this valve with ammonia, acetylene or similar gases as bronze gaskets are used for sealing. (3) As the extended bonnet design is meant to prevent the transfer of cold to the gland, do not expose the actuator to freezing temperatures. No. of handwheel rotations 8 7 6 5 4 3 1-196 - Curves 1/4" -100-50 0 50 Temperature () 3/8" 1/" 100 3/4" and 1" 0 0.5 1 1.5.5 3 3.5 Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 1

Flanged Cryogenic Needle Valves Part Number Designation (for custom orders) U L H 5 CYD J10R C Stainless steel Flange size: C 3/8 D 1/ E 3/4 F 1 Extended bonnet R Raised face flange J Ring joint flange Flow control valve Flanged, globe pattern Pressure rating: 50 kgf/cm (4.5 MPa) Cryogenic yoke Body diameter before welding of flange Nominal pressure: J10 JIS 10K J0 JIS 0K J30 JIS 30K J40 JIS 40K J63 JIS 63K A ANSI A3 ANSI 300 A6 ANSI 600 A9 ANSI 900 A15 ANSI 0 Features Due to the relatively small demand for this valve type, it has been removed from Fujikin s standard product line. It is available as a custom order only. Guidelines for Adjusting Gland Packing 1. Extended bonnet allows a minimum fluid temperature of -196 C (liquid nitrogen) without freezing the gland or compromising valve performance.. Needle design enhances ease of flow adjustment. 3. Combination of gland packing and actuation mechanism reduces handle torque and enhances sealing performance. 4. Easy-to-operate handwheel with large drainage holes; its standard color is metallic blue. 5. Body designed so that it may be secured with U-bolts. 6. High pressure certification assures safe operation. Applications LPG, LNG, liquid nitrogen, and oxygen lines lines, cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, shipyards, and cryogenic lines in other facilities. Because the gland may loosen during shipment, the hexagon nut at the gland should be tightened before the valve is pressurized. Tighten the nut to the value shown in the table to the right. To prevent uneven packing compression, tighten both sides of the nut evenly. Tightening Torque Pipe Size Torque (kg fcm) 1/8" -1/" 10 3/4" 15 1" 5 Nut Gland packing 13

JIS RF Flanged Cryogenic Needle Valve RF Flange Connection JIS 10K, 0K ULH-5CYD-J* RF JIS 10K Dimensions Orifice Nominal D1 L D T C G H F D (kg) 3/8 8 10 16 90 1 65 46 15 1 0 306 7.5 68 1.1.7 ULH-5CYD-J10R-C 1/ 8 15 16 95 1 70 51 15 1 0 306 7.5 68 1.1.8 ULH-5CYD-J10R-D 3/4 10 0 141 100 14 75 56 15 1 40 340 10 78 1.9 4.1 ULH-5CYE-J10R-E 1 1 5 156 15 14 90 67 19 1 55 368 1 88.8 5.9 ULH-5CYF-J10R-F JIS 0K Dimensions Nominal Orifice D1 L D T C G H F D value (kg) 3/8 8 10 130 90 14 65 46 15 1 0 306 7.5 68 1.1.9 ULH-5CYD-J0R-C 1/ 8 15 130 95 14 70 51 15 1 0 306 7.5 68 1.1 3.0 ULH-5CYD-J0R-D 3/4 10 0 145 100 16 75 56 15 1 40 340 10 78 1.9 4.3 ULH-5CYE-J0R-E 1 1 5 160 15 16 90 67 19 1 55 368 1 88.8 6.4 ULH-5CYF-J0R-F Materials Precautions Bore D3 Bore D3 Face-to-face dimension Face-to-face dimension Part Material Body SUS 316 Bonnet SUS 316 Stem SUS 316 Disk SUS 316L (Stellite) Gland packing PTFE+PCTFE Handle ADC 1 Flange Flange Pressure-Temperature Curve JIS 10K(JIS 0K) (1) This valve was not designed to be throttled at an (5) almost-closed position. Using it in such a manner may result in damage to the disk and/or seat. Notify Fujikin in advance if you are planning to throttle this valve with the handle less than a 1/ turn from the fully closed position. () Do not use this valve with ammonia, acetylene or similar gases as bronze gaskets are used for sealing. (3) As the extended bonnet design is meant to prevent the transfer of cold to the gland, do not expose the actuator to freezing temperatures. Pressure (kgf/cm ) 14(35) 1(30) 10(5) 8(0) 6(15) 4(10) H1 H1 Height H Height H Lift L1 Lift L1-196 - -100-50 0 50 100 Temperature () 31kgf/cm 1kgf/cm Handle Handle No. of handwheel rotations Max Max 8 7 6 5 4 3 1 Mas s Mas s Curves Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 3/8" 1/" Part number Part number 3/4" 0 0.5 1 1.5.5 3 3.5 1" 14

ANSI RF Flanged Cryogenic Needle Valves RF Flange Connection: ANSI, 300 ULH-5CYD-A* RF ANSI Dimensions Orifice Nominal Bore D3 D1 ANSI 300 Dimensions Nominal Pressure (kgf/cm ) 19.3 18 16 14 1 10 8 6 4 Orifice D1 38 19.3 kgf/cm Bore D3 100 16.7 kgf/cm 50 18.8 kgf/cm 15.1 kgf/cm Face-to-face dimension L Face-to-face dimension L Pressure-Temperature Curves Pressure (kgf/cm ) 50.6 40 30 0 10 Flange H1 Part number D T C G H F 1/ 8 15 15 88.9 11. 60.5 35.1 16 1.6 0 306 7.5 68 1.1.5 ULH-5CYD-AR-D 3/4 10 0 139 98.6 1.7 69.9 43 16 1.6 40 340 10 78 1.9 3.8 ULH-5CYE-AR-E 1 1 5 157 108 14.3 79.3 50.8 16 1.6 55 368 1 88.8 5.4 ULH-5CYF-AR-F Flange H1 Part number D T C G H F 1/ 8 15 131 95.3 14.3 66.6 35.1 16 1.6 0 306 7.5 68 1.1.9 ULH-5CYD-A3R-D 3/4 10 0 147 117 15.8 8.6 43 19.5 1.6 40 340 10 78 1.9 4.7 ULH-5CYE-A3R-E 1 1 5 163 14 17.6 88.9 50.8 19.5 1.6 55 368 1 88.8 6.5 ULH-5CYF-A3R-F 38 50.6kgf/cm 50 49.1kgf/cm 100 4.9kgf/cm 39.3kgf/cm Height H Height H No. of handwheel rotations Curves ANSI ANSI 300 ANSI, 300 Lift L1 Lift L1 Handle D Handle D 8 7 6 5 4 3 1 Max value Max value 1/" Mas s (kg) Mas s (kg) 3/4" 1" -100-50 0 50-196 - 100 Temperature ( C) Materials Part Material Body SUS 316 Bonnet SUS 316 Stem SUS 316 Disk SUS 316L (Stellite) Gland packing PTFE+PCTFE Handle ADC 1-100 -50 0 50-196 - 100 Temperature ( C) Precautions 0 0.5 1 1.5.5 3 3.5 (1) This valve was not designed to be throttled at an almost-closed position. Using it in such a manner may result in damage to the disk and/or seat. Notify Fujikin in advance if you are planning to throttle this valve with the handle less than a 1/ turn from the fully closed position. () Do not use this valve with ammonia, acetylene or similar gases as bronze gaskets are used for sealing. (3) As the extended bonnet design is meant to prevent the transfer of cold to the gland, do not expose the actuator to freezing temperatures. Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 15

ANSI RJ Flanged Cryogenic Needle Valves RJ Flange Connection ANSI 900, 0 ULH-5CYD-A* RJ Dimensions: ANSI 900 Orifice Nominal Nominal Pressure (kgf/cm ) 151 140 10 100 80 60 40 0 38 53kgf/cm 50 45kgf/cm ANSI 900 ANSI 0 ANSI 900, 0 53 38 151kgf/cm 50 147kgf/cm -196 Orifice D1 Bore D3 D1 L D T C P G H F D (kg) 1/" 8 15 160 11.4 8.6 39.7 60.5.5 6.35 0 306 7.5 68 1.1 5. ULH-5CYD-A9R-D 3/4" 10 0 180 130 5.4 88.9 44.5 66.6.5 6.35 40 340 10 78 1.9 7.4 ULH-5CYE-A9R-E 1" 1 5 05 149 8.5 10 50.8 71.4 5.5 6.35 55 368 1 88.8 11 ULH-5CYF-A9R-F Dimensions: ANSI 0 Bore D3 100 19kgf/cm 117kgf/cm - -100-50 0 50 Temperature ( C) Face-to-face dimension Face-to-face dimension L H1 Part Number D T C P G H F 1/" 8 15 160 11.4 8.6 39.7 60.5.5 6.35 0 306 7.5 68 1.1 5. ULH-5CYD-A15R-D 3/4" 10 0 180 130 5.4 88.9 44.5 66.6.5 6.35 40 340 10 78 1.9 7.4 ULH-5CYE-A15R-E 1" 1 5 05 149 8.5 10 50.8 71.4 5.5 6.35 55 368 1 88.8 11 ULH-5CYF-A15R-F Pressure-Temperature Curves Materials 100 Part Material Body SUS 316 Bonnet SUS 316 Stem SUS 316 Disk SUS 316L (Stelliting) Gland packing PTFE+PCTFE Handle ADC 1 Pressure (kgf/cm ) 00 100 50 Flange Flange -196 100 15kgf/cm 196kgf/cm - -100-50 0 50 100 Temperature ( C) Precautions H1 Height H Height H Lift L1 Lift L1 No. of handwheel rotations 8 7 6 5 4 3 1 Handle Handle D Max Max Curves 1/" Mas s Mas s (kg) 3/4" Part Number 0 0.5 1 1.5.5 3 3.5 (1) This valve was not designed to be throttled at an almost-closed position. Using it in such a manner may result in damage to the disk and/or seat. Notify Fujikin in advance if you are planning to throttle this valve with the handle less than a 1/ turn from the fully closed position. () Do not use this valve with ammonia, acetylene or similar gases as bronze gaskets are used for sealing. (3) As the extended bonnet design is meant to prevent the transfer of cold to the gland, do not expose the actuator to freezing temperatures. Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 1" 16

Full Port Cryogenic Needle Valves Stainless steel Extended Bonnet Connection: 1 Threaded, globe pattern Flanged, globe pattern 5 Welded, globe pattern Pressure rating: 1 10kgf/cm(0.98MPa) 0kgf/cm(1.96MPa) 5 50kgf/cm(4.9MPa) Features U L Part Number Designation (for custom orders) 5 1 1. The SUS 316L body, extended bonnet design, and hollow stem permit minimal thermal conductivity between the fluid and actuator. Total heat transfer is less than -3 W. Thermal conductivity can be reduced by lengthening the bonnet.. Welded cryogenic vacuum jacketing is available. 3. PCTFE valve disk offers excellent sealing performance, even with full port valves. 4. Chevron V-ring packing and O-rings ensure high reliability. 5. High pressure certification assures safe operation. C Thread Size Taper pipe thread JY F Cryogenic Size: D 1/ E 3/4 F 1 G 1 1/4 H 1 1/ I J 1/ K 3 Accessories: G Travel indicator scale J Vacuum jacketing Y Yoke Designation A B C D E F JIS B 003 (1981) PT 1/8 PT 1/4 PT 3/8 PT 1/ PT 3/4 PT 1 JIS B 003 Male thread R 1/8 R 1/4 R 3/8 R 1/ R 3/4 R 1 (198) (ISO 7/1) Female thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/ Rc 3/4 Rc 1 Thread designation complies with JIS B003 (198) (ISO7/1). Sizes as per JIS B003 (1981) are shown for reference. Due to the relatively small demand for this valve type, it has been removed from Fujikin s standard product line. It is available as a custom order only. Guidelines for Adjusting Gland Packing Because the gland may loosen during shipment, the hexagon nut at the gland should be tightened before the valve is pressurized. Tighten the nut to the value shown in the table to the right. To prevent uneven packing compression, tighten both sides of the nut evenly. Tightening Torque Pipe Size Torque (kg fcm) 1/8" -1/" 10 3/4" 15 1" 5 Nut Gland packing Applications LPG and LNG gas lines, cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, shipyards, cryogenic lines in other facilities. Specifications Max. Operating Fluid Temperature Material Pressure Range SUS316L 0.98 MPa -53 C to +80 C 17

Cryogenic Valve with Vacuum Jacket Butt Weld UL-51CGJY Dimensions Orifice Face-to-face Pipe Connection Handle Nominal Height Lift Max. Mass dimensions (butt weld) H1 H L1 (kg) D1 L B t D Part Number 1" 5 300 34.8 300 608 5 15 1 17 UL-51CGJYF 1 1/" 40 380 48.6.8 400 700 30 180 30 30 UL-51CGJYH " 50 440 60.5.8 500 900 40 50 48 90 UL-51CGJYI 3" 75 550 89.1 3.0 550 1100 50 355 98 110 UL-51CGJYK Material Pressure-Temperature Curve Part Body Bonnet Stem Disk Disk packing Handle Material SUS 316L SUS 316L SUS 316L SUS 316L PCTFE FC0 Welding precautions: (1) During welding, keep the valve partially open, and cover it with a wet towel to protect it from the heat. () After wielding one side, wait at least 10 minutes for the valve to cool to room temperature before welding the other side. Presssure (kgf/cm ) 1 10 8 6 4-53 -00 - -100-50 Temperature () 0 50 80 Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 18

Cryogenic Needle Valves for Liquid Helium Pneumatic actuator R Normally closed (Blank) Normally open Part Number Designation (for custom orders) AP R U L H 6 1 C 10 Cryogenic Thread size: 6 6mm 10 10mm Stainless steel Extended bonnet Flow control valve Pressure rating: 1 10kgf/cm(0.98MPa) 0kgf/cm(1.96MPa) Connection: 5 Welded, globe pattern 6 Welded, angle pattern Features Applications Liquid helium equipment (e.g., cryostat, MRI) and cryogenic lines in other facilities. Specifications Due to the relatively small demand for this valve type, it has been removed from Fujikin s standard product line. It is available as a custom order only. 1. The SUS 316L body, extended bonnet design, and hollow stem permit minimal thermal conductivity between the fluid and actuator. Total heat transfer is less than 1 W. Thermal conductivity can be reduced by lengthening the bonnet.. Bonnet flange (JIS B 90, nominal diameter: 40 mm) allows installation inside vacuum insulated equipment and cold boxes. 3. Bellows sealing models available. 4. Fujikin also manufactures low flow control valves (Joule-Thomson expansion valves). 5. High pressure certification assures safe operation. Max. Operating Fluid Temperature Material Pressure Range SUS316L 0.98 MPa -68 C to + C Pressure (kgf/cm ) Pressure-Temperature Curve 1 10 8 6 4-68 -00 Materials 100 C 10kgf/cm 15 C 9.4kgf/cm - -100-50 0 50 100 Temperature ( C) C 8.8kgf/cm Part Material Body SUS 316L Stem SUS 316L Disk SUS 316L Bonnet SUS 316L Handle A 505 Actuator A 505 19

Cryogenic Valves for Liquid Hydrogen Socket Weld ULH-61C Dimensions Orifice Nominal D1 Socket Weld (pneumatic) APR-ULH-61C Connection Body Flange Welding precautions: (1) During welding, keep the valve partially open, and cover it with a wet towel to protect it from the heat. () After wielding one side, wait at least 10 minutes for the valve to cool to room temperature before welding the other side. H1 Part number D D3 S L1 L C D4 T H 6 4 6.1 9 5 0 5 85 105 10 10 400 605 4 35 0.37 1. ULH-61C-6 10 6 10.1 13 5 0 5 85 105 10 10 400 605 4 35 0.83 1.3 ULH-61C-10 Height H Lift L4 Handle D Max Mass (kg) Dimensions Nominal Orifice D1 Connection Body Flange Actuator D H1 Part Number D D3 S L1 L C D4 T H 6" 4 6.1 9 5 0 5 85 105 10 10 400 490 4 48 0.37 1.8 APR-ULH-61C-6 10" 6 10.1 13 5 0 5 85 105 10 10 400 490 4 48 0.83 1.9 APR-ULH-61C-10 Height H Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. Lift L4 Welding precautions: (1) During welding, keep the valve partially open, and cover it with a wet towel to protect it from the heat. () After wielding one side, wait at least 10 minutes for the valve to cool to room temperature before welding the other side. Max. Mass (kg) 0

Cryogenic Check Valves Part Number Designation U C 1 5 C C0.07 Stainless steel C Lift-type check valve CL Inline check valve Thread Size Taper pipe thread Connection: 1 Threaded, globe pattern 5 Welded, globe pattern Designation A B C D E F JIS B 003 (1981) PT 1/8 PT 1/4 PT 3/8 PT 1/ PT 3/4 PT 1 JIS B 003 Male thread R 1/8 R 1/4 R 3/8 R 1/ R 3/4 R 1 (198) (ISO 7/1) Female thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/ Rc 3/4 Rc 1 Thread designation complies with JIS B003 (198) (ISO7/1). Sizes as per JIS B003 (1981) are shown for reference. Features 1. Compact body and simple construction allows minimum temperature of 53 C (Liquid nitrogen). Offers excellent sealing even at the low temperature 3. Soft seal design is available as an option. 4. High pressure certification assures safe operation. Applications Pressure rating: 50 kgf/cm (4.5 MPa) Pressure (kgf/cm ) 300 50 00 100 50 Cracking Pressure (Blank) below 0.5 kgf/cm C0.07 below 0.07 kgf/cm Size: A 1/8 B 1/4 C 3/8 D 1/ E 3/4 F 1 Pressure-Temperature Curve 00 183kgf/cm 40 50kgf/cm 100 13kgf/cm LPG and LNG gas lines, cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, shipyards, and cryogenic lines in other facilities. Specifications Material Max. operating pressure Fluid Temperature Range SUS316 4.5MPa -53 C to +00 C -53-00 -100 0 100 00 300 Temperature ( C) Materials Part Material Body SUS 316L Disk SUS 316L (Stellite) Bonnet SUS 316L Gasket A 505 Precautions Do not use this valve with ammonia, acetylene or similar gases as bronze gaskets are used for sealing. 1

Check Valve Threaded (Rc) UC-15 Dimensions Nominal Orifice D1 Face-to-face dimensions L D1 H1 H Rc1/8" 8 50 5 13 33.5 6.5 46.5 0.78 0. UC-15A Rc1/4" 8 50 6 13 33.5 6.5 46.5 0.78 0. UC-15B Rc3/8" 1 65 8 18 44.5 8.5 6.5 1.4 0.7 UC-15C Rc1/" 1 70 1 18 44.5 8.5 6.5.7 0.7 UC-15D Rc3/4" 15 80 14 5 45.5 8.5 70.5 3.9 1. UC-15E Rc 1" 15 90 15 5 45.5 8.5 70.5 4.3 1. UC-15F Socket Weld UC-55 Lift L1 Height H Max. Mass (kg) Part Number Dimensions Face-to-face Pipe Nominal Orifice Lift Height Max. Mass dimensions connection D H1 H D L1 H (kg) L D1 S Part Number 1/8" 8 60 11.0 10 5 13 33.5 6.5 46.5 0.78 0. UC-55A 1/4" 8 60 14.3 10 6 13 33.5 6.5 46.5 0.78 0. UC-55B 3/8" 1 80 17.8 13 8 18 44.5 8.5 6.5 1.4 0.7 UC-55C 1/" 1 85. 13 1 18 44.5 8.5 6.5.7 0.7 UC-55D 3/4" 15 95 7.7 16 14 5 45.5 8.5 70.5 3.9 1. UC-55E 1" 15 105 34.5 16 15 5 45.5 8.5 70.5 4.3 1. UC-55F Specifications Cracking Pressure Flow Range Back Pressure below 0.5 kgf/cm above 40 m 3 /h above 15 kgf/cm Precaution Please notify Fujikin in advance when planning to use these valves. (Caution: the minimal back pressure is 50kgf/cm ). Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents.

Cryogenic Pneumatic Mini Control Valve E M3 D Actuator: M3 Pneumatic UN Manual Positioner: (blank) None P P/P positioner E E/P positioner (ExdIIBT6X) E1 Explosion-proof E/P positioner (ExdIIB+HT6X) Actuator mode: D Direct (Normally Open) R Reverse (Normally Close) Actuator operating pressure: (blank) ON-OFF: 100kPa; Control: 0-100/140kPa ON-OFF: 00kPa; Control: 40kPa 4 400kPa MINUCON 115CD E 07 R V Actuator Body Disk and seat Connection: 1(3) Threaded, globe pattern (angle) (4) Flanged, globe pattern (angle) 5(6) Socket weld, globe pattern (angle) 7(8) Union fitting, globe pattern (angle) 9(0) Tube fitting, globe pattern (angle) Rangeability: R1 10:1 R 0:1 R10 100:1 value: (See table on next page) Valve characteristics: O ON-OFF L Linear E EQ% * Size: B ¼ (8) C 3/8 (10) Cryogenic D ½ (15) E ¾ (0) F 1 (5) Pressure rate: 15, 30, 50 14.7MPa, 9.4 MPa, 49MPa J1, J, J3, J4, J6 JIS 10K, 0K, 30K, 40K, 60K A, A3, A6, A9, A15 ANSI, 300, 600, 900, 0 JP, JP3, JP6, JP9, JP15 JPI, 300, 600, 900, 0 * - Accessories: AS Regulator L* Limit switch V* Solenoid valve *** Other options Features 1. Extended bonnet allows a minimum fluid temperature of -53 C.. Stellited SUS 316 disc and seat allows long-term use without necessary adjustments to the valve. 3. Because the valve seat is screwed into the body, it is easy to replace. 4. Design can be modified for liquid helium. 5. High pressure certification assures safe operation. Applications LPG, LNG, liquid nitrogen, and oxygen lines; other cryogenic gas lines in cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, and shipyards. 3

Pneumatic Mini Control Valve: MINUCON Materials Part Material Body SUS 316 Disk(Needle) SUS 316L (Stellite) Seat SUS 316L (Stellite) Bonnet SUS 316 Packing PTFE Actuator diaphragm NBR Yoke ADC1 Actuator body ADC1 Specifications Valve characteristic Max. operating pressure Rangeability C ode 01 5 0 3 03 04 1.5 05 1 06 0.7 07 0.5 08 0.35 09 0.5 10 0.15 11 0.1 1 0.07 13 0.05 14 0.035 15 0.05 16 0.015 17 0.01 18 0.007 19 0.005 0 0.0035 1 0.005 0.0015 3 0.001 4 0.0007 5 0.0005 6 0.00035 7 0.0005 8 0.00015 9 0.0001 30 0.00007 31 0.00005 3 0.000035 33 0.00005 34 0.000015 35 0.00001 36 0.000007 37 0.000005 38 0.0000035 39 40 0.000005 0.0000015 ON-OFF R1 10:1 R 0:1 Fluid Temperature Range 14.7, 9.4, 49MPa -53 C to + C, Rangeability Table R3 30:1 R4 40:1 Linear and EQ% R5 R6 50:1 60:1 R7 70:1 R8 80:1 R9 90:1 and ability selection for Code R10 100:1 Pressure (kgf/cm ) value (%) 100 50 100 90 80 70 60 50 40 30 0 10 Media Liquid Pressure-Temperature Curve Curves 0 10-53 -00-100 0 Temperature ( C) ON-OFF Calculation of 0 30 40 50 60 Lift (%) P P = 0.366 Q 1 L 40 kgf/cm 100 139kgf/cm GL P P 1 Same equation as on left Q Q g G g ( + t ) g Gas = = Gg ( 73 + t) 4140 ( P P ) P P 1 73 13kgf/cm Linear Flow rate QL Liquid value (m3/h) Qg Gas value(m3/h) P1 Upstream pressure (MPa abs.) P Downstream pressure (MPa abs.) t Temperature ( C) GL Specific gravity of liquid Gg Specific gravity of gas EQ% 70 80 90 P1 P 070 1 100 Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 4

Pneumatic Mini Control Valve: MINUCON Threaded (Rc) Valve characteristics No positioner E/P positioner P/P positioner Pressure rate Connection Dimensions(mm) Code (mm) Code (mm) Code (mm) H L Norm. Open Norm. Close H1 Norm. Open Norm. Close H Norm. Open Norm. Close H3 14.7МПа 9.4МПа Rc 1/4-1/ < 0.5 414 70 439 463 568 M3D-115C* M3R-115C* EM3D-115C* EM3R-115C* PM3D-115C* PM3R-115C* Rc 1/4-1 > 0.7 419 100 443 467 57 Rc 1/4-1/ < 0.5 417 80 44 466 571 M3D-130C* M3R-130C* EM3D-130C* EM3R-130C* PM3D-130C* PM3R-130C* Rc 1/4-1 > 0.7 419 100 443 467 57 49МПа Rc 1/4-1/ < 0.5 414 100 M3D-C* M3R-C* 439 EM3D-C* EM3R-C* 463 PM3D-C* PM3R-C* 568 14.7МПа SW 1/4-1/ < 0.5 414 80 439 463 568 M3D-515C* M3R-515C* EM3D-515C* EM3R-515C* PM3D-515C* PM3R-515C* SW 1/4-1 > 0.7 419 110 443 467 57 9.4МПа SW 1/4-1/ < 0.5 417 90 44 466 571 M3D-530C* M3R-530C* EM3D-530C* EM3R-530C* PM3D-530C* PM3R-530C* SW 1/4-1 > 0.7 419 110 443 467 57 49МПа SW 1/4-1/ < 0.5 419 110 M3D-550C* M3R-550C* 439 EM3D-550C* EM3R-550C* 463 PM3D-550C* PM3R-550C* 568 Socket Weld Dimensions Nominal D S 1/4" 14.3 10 3/8" 3/4" 17.8 7.7 1/" 1". 34.5 13 16 Flanged Dimensions: JIS Class Flange RF Dimensions (L) 10A 15A 0A 5A below 0.5 10K, 0K, 30K, 40K, 63K 10K, 0K more 0.7 30K 180 40K, 63K 180 Dimensions: ANSIJPI below 0.5 more 0.7 Class, 300, 600 900, 0 300 600 900, 0 Flange RF Flange RJ Dimensions (L) Dimensions (L) 15A 0A 5A 15A 0A 5A 00 00 180 180 180 00 00 Body with RF Flange Body with RJ Flange Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 5

Cryogenic Solenoid Control Valve SR100 Actuator: Solenoid S3 T D 1 15 Cable type: (blank) Connection T Terminal block Actuator mode: D Direct (Normally Open) R Reverse (Normally Close) Actuator Body Disk and seat Connection: 1(3) Threaded, globe pattern (angle) (4) Flanged, globe pattern (angle) 5(6) Socket weld, globe pattern (angle) 7(8) Union fitting, globe pattern (angle) 9(0) Tube fitting, globe pattern (angle) Pressure: 15 14.7MPa J1, J, J3, J4, J6 JIS 10K, 0K, 30K, 40K, 60K A, A3, A6, A9 ANSI, 300, 600, 900 JP, JP3, JP6, JP9 JPI, 300, 600, 900 C D E 07 Cryogenic R Rangeability: R1 10:1 R 0:1 R10 100:1 value: (See table on next page) Valve characteristics: L Linear E EQ% Size: B ¼ (8) C 3/8 (10) D ½ (15) E ¾ (0) F 1 (5) Features 1. Extended bonnet allows a minimum fluid temperature of -53 C.. Electric solenoid actuator allows a response time of less than 0.6 seconds (0.8 seconds in the case of normally-open valves). 3. Choice of control signals: 4-0 ma or 1-5 V. 4. High resolution: Fujikin drive unit maintains continuous control of the current to the actuator. 5. Feed-back mechanism: Precise linear sensor (over million cycles) for stroke detection assures superior repeatability and minimized hysterisis. 6. Stellited SUS 316 disc and seat allows long-term use without necessary adjustments to the valve. 7. Because the valve seat is screwed into the body, it is easy to replace. 8. Design can be modified for liquid helium. 9. High pressure certification assures safe operation. Applications LPG, LNG, liquid nitrogen, and oxygen lines; other cryogenic gas lines in cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, and shipyards. 6

Solenoid Control Valve: SR100 Materials Part Material Body SUS 316 Disk (Needle) SUS 316L (Stellite) Seat SUS 316L (Stellite) Bonnet SUS 316 Packing C-PTFE, PFA Yoke ACA Actuator base A505 Actuator cover ACA Specifications Max. operating Fluid Temperature pressure Range 14.7, 9.4, 49MPa -53 C to + C, Rangeability Table Valve characteristic Rangeability Code 01 5 0 3 03 04 1.5 05 1 06 0.7 07 0.5 08 0.35 09 0.5 10 0.15 11 0.1 1 0.07 13 0.05 14 0.035 15 0.05 16 0.015 17 0.01 18 0.007 19 0.005 0 0.0035 1 0.005 0.0015 3 0.001 4 0.0007 5 0.0005 6 0.00035 7 0.0005 8 0.00015 9 0.0001 30 0.00007 31 0.00005 3 0.000035 33 0.00005 34 0.000015 35 0.00001 36 0.000007 37 0.000005 38 0.0000035 39 0.000005 40 0.0000015 Linear and EQ% R1 R R3 R4 R5 R6 R7 R8 R9 R10 10:1 0:1 30:1 40:1 50:1 60:1 70:1 80:1 90:1 100:1 and ability selection for Code Pressure (kgf/cm ) value (%) Pressure-Temperature Curve 100 50 Curves 100 90 80 70 60 50 40 30 0 10 Media Liquid -53-00 -100 0 Temperature ( C) 0 10 0 30 40 50 60 70 80 90 100 Lift (%) Calculation of P P = 0.366 Q 1 L 40 kgf/cm 100 139kgf/cm GL P P 1 Same equation as on left Q Q g G g ( + t ) g Gas = = Gg ( 73 + t) 4140 ( P P ) P P 1 73 13kgf/cm Linear Flow rate QL Liquid value (m3/h) Qg Gas value(m3/h) P1 Upstream pressure (MPa abs.) P Downstream pressure (MPa abs.) t Temperature (C ) GL Specific gravity of liquid Gg Specific gravity of gas EQ% P1 P 070 1 Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 7

Solenoid Control Valve: SR100 Threaded (Rc) Actu ator Connection Code Dimensions (mm) Code Dimensions (mm) Norm. Open Norm Close L H A B D Norm. Open Norm Close L H A B C D Rc 1/4-1/ < 0.5 70 676 376 70 695 376 S3D-115C* S3R-115C* S3TD-115C* S3TR-115C* Rc 1/4-1 > 0.7 100 715 415 100 734 415 S3 107 17 99 135 17 SW 1/4-1/ < 0.5 80 676 376 80 695 376 S3D-515C* S3R-515C* S3TD-515C* S3TR-515C* SW 1/4-1 > 0.7 110 715 415 110 734 415 Socket Weld Dimensions Nominal D S 1/4" 14.3 10 3/8" 3/4" 17.8 7.7 1/" 1". 34.5 13 16 Flanged Dimensions: JIS Class Flange RF Dimensions (L) 10A 15A 0A 5A below 0.5 10K, 0K, 30K, 40K, 63K 10K, 0K more 0.7 30K 180 40K, 63K 180 Dimensions: ANSIJPI Flange RF Flange RJ Class Dimensions (L) Dimensions (L) 15A 0A 5A 15A 0A 5A below 0.5, 300, 600 900, 0 00 00 more 0.7 300 180 600 180 180 900, 0 00 00 Body with RF Flange Body with RJ Flange Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 8

Cryogenic Stepper Motor Control Valve AR000 Actuator Body Disk and seat C1E 1 15 C D E 07 R Stepper motor actuator: C1 Pressure rate below 14.7MPa C3 Pressure rate below 49MPa C1E Explosion-proof dg4 (below 14.7MPa) C3E Explosion-proof dg4 (below 49MPa) Connection: 1(3) Threaded, globe pattern (angle) (4) Flanged, globe pattern (angle) 5(6) Socket weld, globe pattern (angle) 7(8) Union fitting, globe pattern (angle) 9(0) Tube fitting, globe pattern (angle) Pressure: 15 14.7MPa 30 9.4 MPa 50 49MPa J1, J, J3, J4, J6 JIS 10K, 0K, 30K, 40K, 60K A, A3, A6, A9, A15 ANSI, 300, 600, 900, 0 JP, JP3, JP6, JP9, JP15 JPI, 300, 600, 900, 0 Cryogenic Rangeability: R1 10:1 R 0:1 R10 100:1 value: (See table on next page) Valve characteristics: L Linear E EQ% Size: B ¼ (8) C 3/8 (10) D ½ (15) E ¾ (0) F 1 (5) Features 1. Extended bonnet allows a minimum fluid temperature of -53 C.. Explosion-proof protection dg4 also available. 3. Less than 0.1% hysterisis: AR000 electronic valves use a high precision stepper motor for precise stroke position. 4. Choice of control signal: 4-0 ma or 1-5 V. 5. High resolution: Fujikin drive unit maintains continuous control of the current to the actuator. 6. Stellited SUS 316 disc and seat allows long-term use without necessary adjustments to the valve. 7. Because the valve seat is screwed into the body, it is easy to replace. 8. Design can be modified for liquid helium. 9. High pressure certification assures safe operation. Applications LPG, LNG, liquid nitrogen, and oxygen lines; other cryogenic gas lines in cold evaporators, LNG carriers, superconductivity machinery, petrochemical plants, natural gas processing plants, power plants, steel mills, and shipyards. 9

Stepper Motor Control Valve: AR000 Materials Part Material Body SUS 316 Disk (Needle) SUS 316L (Stellite) Seat SUS 316L (Stellite) Bonnet SUS 316 Packing C-PTFE, PFA Yoke ACA Solenoid - Solenoid cover ACA Specifications Max. operating pressure 14.7MPa, Rangeability table Valve characteristic Rangeability Code 01 5 0 3 03 04 1.5 05 1 06 0.7 07 0.5 08 0.35 09 0.5 10 0.15 11 0.1 1 0.07 13 0.05 14 0.035 15 0.05 16 0.015 17 0.01 18 0.007 19 0.005 0 0.0035 1 0.005 0.0015 3 0.001 4 0.0007 5 0.0005 6 0.00035 7 0.0005 8 0.00015 9 0.0001 30 0.00007 31 0.00005 3 0.000035 33 0.00005 34 0.000015 35 0.00001 36 0.000007 37 0.000005 38 0.0000035 39 0.000005 40 0.0000015 Fluid Temperature Range -53 C to + C Linear and EQ% R1 R R3 R4 R5 R6 R7 R8 R9 R10 10:1 0:1 30:1 40:1 50:1 60:1 70:1 80:1 90:1 100:1 and ability selection for Code Pressure (kgf/cm ) value (%) Pressure-Temperature Curve Calculation of Media Liquid Gas 100 50 Curves 100 90 80 70 60 50 40 30 0 10-53 -00-100 0 0 10 0 30 P P G g ( + t ) ( P P ) Q g = 4140 1 73 P = 0.366 Q Temperature ( C) 1 L 40 kgf/cm 100 139kgf/cm 13kgf/cm 40 50 60 70 Lift (%) GL P P 1 Linear Flow rate QL Liquid value (m3/h) Qg Gas value(m3/h) P1 Upstream pressure (MPa abs.) P Downstream pressure (MPa abs.) t Temperature ( C) GL Specific gravity of liquid Gg Specific gravity of gas EQ% 80 90 100 P1 P Same equation as on left Qg = Gg 73 070 P1 ( + t) Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 30

Stepper Motor Control Valve: AR000 Threaded (Rc) Actuator С1 (C1E) С3 (C3E) Pressure rate 14.7МПа 14.7МПа Dimentions (mm) Code Dimension(mm) Connection Code L H A (Explosion-proof) L H Rc 1/4-1/ < 0.5 70 545 405 70 65 С1-115С* C1E-115C* Rc 1/4-1 > 0.7 100 583 443 100 663 SW 1/4-1/ < 0.5 80 545 405 80 65 SW 1/4-1 > 0.7 С1-515С* 110 583 443 C1E-515C* 110 663 Rc 1/4-1/ < 0.5 70 568 405 70 670 С3-115С* C3E-115C* Rc 1/4-1 > 0.7 100 606 443 100 709 SW 1/4-1/ < 0.5 80 568 405 80 670 С3-515С* C3E-515C* SW 1/4-1 > 0.7 110 606 443 110 709 Socket weld Dimensions Nominal D S 1/4" 14.3 10 3/8" 3/4" 17.8 7.7 1/" 1". 34.5 13 16 Flanged Dimensions: JIS Class Flange RF Dimensions (L) 10A 15A 0A 5A below 0.5 10K, 0K, 30K, 40K, 63K 10K, 0K above 0.7 30K 180 40K, 63K 180 Dimensions: ANSIJPI below 0.5 above 0.7 Class, 300, 600 900, 0 300 600 900, 0 Flange RF Flange RJ Dimensions (L) Dimensions (L) 15A 0A 5A 15A 0A 5A 00 00 180 180 180 00 00 Body with RF Flange Body with RJ Flange Materials and dimensions are subject to change without notice. Products must be selected with regard to the compatibility of the system in which they will be used. Fujikin shall bear no liability for products damaged by misuse, system failure, or accidents. 31

VALVE SPECIFICATIONS APPLICAT IONS CODE CUSTOMER END-USER DESIGN PRESSURE [ MPa G ] DESIGN TEMPERATURE [ ] MAX. PRESS AT SHUT-OFF [ MPa G ] CONNECTION PATTERN TYPE SIZE/CLASS BODY MATERIAL DISK/NEEDLE SEAT MATERIAL BONNET TYPE GLAND PACKING VALVE CHARACTERISTICS RANGEABILITY METI CERTIFICATION CLEAN RATE MUNUCON DATA SHEET FOR INQUIRY ACTUATOR COMPONENT SPECIFICATIONS OPTIONAL ACCESSORIES COLOR ACTUATOR MODE POSITIONER Electric/Air Signal Air Supply ACTUATOR OPERATING PRESSURE SIGNAL PART CONNECTION E/P POSITIONER DIRECTION (No.1 Fujikin Standard) ATUATOR YOKE REGULATOR SOLENOID VALVE EXPLOSION-PROOF LIMIT SWITCH EXPLOSION-PROOF OTHER SEAT / ALLOWABLE LEAKAGE RATE QUANTITY DELIVERY TAG No. 40mA / 0100kPa No.1 140400 Flow direction No. No.4 PT 1/4B No.3 [kpa] [kpa] Fujikin below 10-4 Standard below 5 10-7 Other Cable E/P Positioner REMARKS FLUID SPECIFICATIONS FLOW MEDIA (m 3 /h) UPSTREAM PRESSURE [ MPa G ] DOWNSTREAM PRESSURE [ MPa G ] DIFERENTIAL PRESSURE [ MPa ] OPERATING TEMP. [ ] SPECIFIC GRAVITY [ HO=1, AIR=1 ] VISCOSITY [ c.st, c.p ] SIGNATURE MAX NOR MIN REMARKS NOTES 1. 1. If you do not specify the fluid media, the performance of the valves cannot be guaranteed... If you do not specify the fluid media, please specify the valve materials you require. Otherwise, we will recommnend our standard materials. 3. 3. Fujikin is not liable for any losses, damage, or equipment failures resulting from clogs caused by the use of media containing solids. Fujikin Incorporated APPROVED BY COMPLETED BY

VALVE SPECIFICATIONS CUST OMER END-USER APPLICAT IONS CODE DESIGN PRESSURE [ MPa G ] DESIGN TEMPERATURE [ ] MAX. PRESS AT SHUT-OFF CONNECTION [ MPa G ] PATTERN TYPE VALVE CHARACTERISTICS SIZE/CLASS BODY MATERIAL DISK/NEEDLE SEAT MATERIAL BONNET TYPE GLAND PACKING RANGEABILITY SR100 DATA SHEET FOR INQUIRY ACCESSORIES ACTUATOR COMPONENT SPECIFICATIONS COLOR ACTUATOR MODE EXPLOSION-PROOF NOT REQUIRED INPUT SIGNAL POWER SUPPLY CABLE CONNECTION CABLE CONNECTION DIRECTION Fujikin Standard A ACTUATOR YOKE SWITCH ADAPTERDC4V, 60W CONNECTION CABLE QUANTITY DELIVERY TAG No. C D B Flow direction m A METI CERTIFICATION CLEAN RATE SEAT / ALLOWABLE LEAKAGE RATE Fujikin Standard Other below 10-4 FLUID SPECIFICATIONS FLOW MEDIA (m 3 /h) UPSTREAM PRESSURE [ MPa G ] DOWNSTREAM PRESSURE [ MPa G ] DIFERENTIAL PRESSURE [ MPa ] OPERATING TEMP. [ ] SPECIFIC GRAVITY [ HO=1, AIR=1 ] VISCOSITY [ c.st, c.p ] MAX NOR MIN REMARKS NOTES 1. 1. If you do not specify the fluid media, the performance of the valves cannot be guaranteed... If you do not specify the fluid media, please specify the valve materials you require. Otherwise, we will recommnend our standard materials. 3. 3. Fujikin is not liable for any losses, damage, or equipment failures resulting from clogs caused by the use of media containing solids. SIGNATURE Fujikin Incorporated APPROVED BY COMPLETED BY

AR000 DATA SHEET FOR INQUIRY CUST OMER QUANTITY END-USER DELIVERY APPLICAT IONS CODE TAG No. VALVE SPECIFICATIONS DESIGN PRESSURE [ MPa G ] DESIGN TEMPERATURE [ ] MAX. PRESS AT SHUT-OFF [ MPa G ] CONNECTION PATTERN TYPE SIZE/CLASS BODY MATERIAL DISK/NEEDLE SEAT MATERIAL BONNET TYPE GLAND PACKING ACTUATOR COMPONENT SPECIFICATIONS COLOR ACTUATOR MODE EXPLOSION-PROOF INPUT SIGNAL POWER SUPPLY CABLE CONNECTION CABLE CONNECTION DIRECTION Fujikin Standard A ACTUATOR YOKE NOT REQUIRED Connector(Standard); Terminal block(explosion-proof) C Flow direction D B A VALVE CHARACTERISTICS ACCESSORIES SWITCH ADAPTERDC4V, 60W CONNECTION CABLE m RANGEABILITY METI CERTIFICATION CLEAN RATE SEAT / ALLOWABLE LEAKAGE RATE value compare Fujikin Standard Other below 10-4 FLUID SPECIFICATIONS MEDIA FLOW (m 3 /h) UPSTREAM PRESSURE [ MPa G ] DOWNSTREAM PRESSURE [ MPa G ] DIFERENTIAL PRESSURE [ MPa ] OPERATING TEMP. [ ] SPECIFIC GRAVITY [ HO=1, AIR=1 ] VISCOSITY [ c.st, c.p ] MAX NOR MIN REMARKS NOTES 1. 1. If you do not specify the fluid media, the performance of the valves cannot be guaranteed... If you do not specify the fluid media, please specify the valve materials you require. Otherwise, we will recommnend our standard materials. 3. 3. Fujikin is not liable for any losses, damage, or equipment failures resulting from clogs caused by the use of media containing solids. SIGNATURE Fujikin Incorporated APPROVED BY COMPLETED BY

URL: http://www.fujikin.co.jp E-mail: info@fujikin.co.jp Offices in Japan Headquarters Kita Hankyu Bldg., 1-4-8 Shibata, Kita-ku, Osaka 530-001, Japan Tel: +81-6-637-7141 Fax: +81-6-6375-0697 IP Phone: +81-50-3160-7141 Tokyo Head Office Nittochi Bldg., -3-6 Nihonbashi, Chuo-ku, Tokyo 103-007, Japan Tel: +81-3-373-0301 Fax: +81-3-378-0901 International Business Division Shin-Akihabara Bldg. 10F, 1-18-19 Sotokanda, Chiyoda-ku, Tokyo 101-001, Japan Tel: +81-3-509-8191 Fax: +81-3-509-86 IP Phone: +81-50-3161-8181 Plants in Japan Osaka R&D Center 8--9 Nanko-Higashi, Suminoe-ku, Osaka 559-0031, Japan Tel: +81-6-661-051 Fax: +81-6-661-8541 Osaka Plant 3-9-1 Nagata, Higashi-Osaka, Osaka 577-0015, Japan Tel: +81-6-6787-01 Fax: +81-6-6787-4541 Osaka Kashiwara Plant 1000-45 Enmyo-cho, Kashiwara, Osaka 58-007, Japan Tel: +81-79-77-4661 Fax: +81-79-77-5549 Tsukuba Plant 18 Miyukigaoka, Tsukuba, Ibaraki 305-0841, Japan Tel: +-81-9-856-3301 Fax: +81-9-856-3889 Europe and America Fujikin of America Inc. CA Office 4677 Old Ironsides Dr., Suite #100, Santa Clara, CA 95054, U.S.A. Tel: +1-408-980-869 Fax: +1-408-980-057 NJ Office 4 Alsan Way, Little Ferry, NJ 07463 U.S.A. Tel: +1-01-641-1119 Fax: +1-01-641-1137 TX Office 08 E. Ben White Blvd., Suite #30, Austin, TX 78741, U.S.A. Tel: +1-51-91-9095 Fax: +1-51-91-8095 Carten Controls 604 W.Johnson Avenue, Cheshire, CT 06410, U.S.A. Tel: +1-03-699-100 Fax: +1-03-699-179 Fujikin Deutschland GmbH Leopold Strasse 9, 40111 Düsseldorf, Germany Tel: +49-11-350-458/459 Fax: +49-11-363-990 Carten Controls Ltd. Unit 609, Waterford Industrial Park, Waterford, Ireland Tel: +353-51-355-436 Fax: +353-51-351-837 Fujikin of China Inc. China Service Center Asia No.4, Songhu Industry Minizoom, Song-Jiang High-Technology, Park, Jiuting Zhen, Songjiang, Shanghai. P.R.C. 01615 Tel: +86-1-6769-6576 Fax: +86-1-6769-6536 Fujikin Taiwan Inc. Taiwan Service Center 3F-1, No.3, Tai Yuen St, Chupei City, Hsinchu Country, 30 Taiwan, R.O.C Tel: +866-3-560-0300 Fax: +866-3-560-030 Fujikin Korea Inc. Korea Service Center B-1306, Digital Empire, 980-3, Youngtong-dong. Youngtong-gu, Suwon-shi, Gyeonggi-do, Korea Tel: +8-31-303-780 Fax: +8-31-303-789 Fujikin Vietnam Co. Ltd. H-B Plot, Thang Long Industrial Park, Dong Anh Dist., Hanoi, Vietnam Tel: +84-4-881-566 Fax: +84-4-881-577 Plant ISO 9001 certified Osaka Plant Plant ISO 14001 certified Tsukuba Plant IMPORTANT NOTICE: The product data in this catalogue was obtained under specific test conditions that may vary substantially from actual site conditions and / or customer needs. Purchasers or other end users of Fujikin products should rely solely on their system design engineer(s) when selecting Fujikin products for a particular system, and when determining the suitability of any system in which a Fujikin product is to be installed. Fujikin shall bear no liability regarding product selection criteria or decisions, nor shall Fujikin be liable (including direct, special or consequential damages including, but not limited to, lost profits or income) in regard to any product which has been damaged by misuse, improper handling or accident, or as a result of service or modification by anyone other than an authorized employee or agent of Fujikin, or being subjected to use under conditions, or combinations of conditions, that are not compatible with that particular Fujikin product.