Ultra Precision Models. Stepper system. Servo system. Delivery content GMT TAMAGAWA SANYO. UP: Ultra Precision. Motor specifications

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1 recision XXY lignment Stage recision XXY lignment Stage 5-Stepper Motor/Driver comparison reference Motor model number : ltra recision : recision type : Standard type Magnetizing max. static torque Rotor inertia(g*cm 2 ) Driver model number Suitable to alignment stage Motor specifications Driver specifications lignment stage model Magnetizing max. static torque(. m) TS x TS36641E2 24x TS366411E2 24x SH x TOH DESHI / TD-5D14 TOH DESHI / TD-5D14 TOH DESHI / TD-5D14 TOH DESHI / TD-5D14 / Model no. /GTR515 GS00-100H /GTR515 GS /GTR515 GS00-160H /GTR515 5-Stepper Motor/Driver comparison reference Stepper system 5-phase stepper motor in Japanese brand and its compatible driver are recommended while ltra recision type is selected. 2-phase stepper motor in Japanese brand and its compatible driver are recommended while recision type is selected. 2-phase stepper motor and driver are recommended while standard type is selected. onnection cable, driver are supplied optionally on request. lease refer to Motor & Driver catalogue for more details. Standard connection cable is corresponding connection type for stage side which is including single-sided connector in 2 m Magnetizing max. static torque(. m) TS36673E TS36243E5 60x TOH DESHI / TD-5D14 TOH DESHI / TD-5D14 long with discrete wires as common accessory stocked for optional purchasing. / Model no. /GTR515 /GTR515 The most preferred driver is recommended to be specified by as considerations. For different needs, please choose the suitable driver based on real functional needs. lease consider to integrate break system in case vertical loading application of the alignment stage. Servo system Servo motor in Japanese brand and its compatible driver are recommended while ltra recision type is selected. Servo motor in Japanese brand and its compatible driver are recommended while recision type is selected. Servo motor in Taiwanese brand and driver are recommended while standard type is selected. lease consider to integrate break system in case vertical loading application of the alignment stage. Delivery content Standard delivery content includes lignment stage, oupling, and Motor. Easy pack delivery contains lignment stage only

2 recision XXY lignment Stage 2-Stepper Motor/Driver comparison reference recision XXY lignment Stage 2-Stepper Motor/Driver comparison reference 2-Stepper Motor/Driver comparison reference recision Models / Model no. TS364111E2 28x /GTR24M3 TS36173E /GTR24M3 TS36064E10 60x /GTR24M3 / Model no. / Model no. 2MS x /GTR22G-D 2MS-28D /DS022 GS00-100H 28x /GTR22G-D /DS022 2MS MS x /GTR32G-D /DS022 /GTR32G-D 2-Stepper Motor/Driver comparison reference 98 99

3 recision XXY lignment Stage Servo Motor/Driver comparison reference recision XXY lignment Stage Recommended 5-Stepper Motor/Driver comparison reference Servo Motor/Driver comparison reference recision Models HG-KR053 50W/ W/ MITSISHI HG-KR13 HG-KR23 MITSISHI MITSISHI MITSISHI MR-J4-10 MR-J4-10 MR-J4-20 MSMD5ZG1S anasonic MSMD012G1S MSMD022G1S 50W/ W/ anasonic anasonic anasonic MDHT1505 MDHT1505 MDHT1507 Recommendation for / Model no. TS366713E x / TD-5D14 / TD-5D14 /GTR515 /GTR515 Recommended 5-Stepper Motor/Driver comparison reference 100 anasonic MSMD5ZG1S 50W/ anasonic MDHT1505 EM-10401ES EM-10602ES 100W/ SD L 37 SD L 101

4 recision XXY lignment Stage Recommended 2-Stepper Motor/Driver comparison reference recision XXY lignment Stage Recommended 2-Stepper Motor/Driver comparison reference Recommended 2-Stepper Motor/Driver comparison reference Recommendation for recision Models SH SH H H H x32 28x32 42x33 42x46 42x Magnetizing max. static torque(. m) *m 0.37*m 0.37*m / Model no. /GTR24M3 /GTR24M3 /GTR24M3 /GTR24M3 /GTR24M3 Recommendation for / Model no. 2MS-42D47 2MS-57D41 57x /GTR32G-D /DS022 /GTR32G-D Recommended 2-Stepper Motor/Driver comparison reference

5 recision XXY lignment Stage Electrical Specifications recision XXY lignment Stage Electrical Specifications Electrical Specifications Sensor and block layout / Sequence Diagram Sensor and block layout / Sequence Diagram Stage Dog(lock) Type- Stepper/Servo motor on the right site Dog(lock) Sensor( ) Dog(lock) Type- lease refer to the following layout : #=W limitation #=W limitation #=Total stroke = +.lock is out of the sensor 1. e sure home sensor is OFF, move the block foward to. (Speed=1000~3000pps) 2. Move the block till the home sensor is O, stop the block. (Speed=1000~3000pps) W.LS W.LS W.LS W.LS Stepper/Servo motor on the left site Stage lease refer to the following layout : #=W limitation #=W limitation #=Total stroke = + 3. Move toward to reversed direction (), till the home sensor is OFF, stop the block. (Speed=500pps) Dog(lock) Type- Dog(lock) Type- 4. sensor is OFF, reversed direction move till the home sensor is O. (Speed=20 ~50pps) Dog(lock) Sensor( ) W.LS W.LS W.LS W.LS.lock is alinged to the sensor 1. Move toward to till the home sensor is OFF, stops the blcok. (Speed=500pps) Dog(lock) Stop Stop Dog(lock) W Limitation W Limitation sensor sensor 2. sensor is OFF, move toward to till the home sensor is O. (Speed=20 ~ 50pps) W Limitation W Limitation Reversed motor site Mechanical W limitation limitation plane reversed plane W limitation Mechanical limitation Motor site