Substrate Characteristics. Electrical Characteristics of CPW Line Standards

Transcription

1 AC-2 Calibration Substrate AC-2 calibration substrate is designed to provide accurate probe tip calibration of MPI TITAN RF probe family with ground-signal-ground (GSG) probe tips configuration and accommodates 1 to 25 µm probe pitch variation. It supports industry standard short-open-load-thru (SOLT) calibration method, as well as advanced line-reflect-match (LRM), and thru-reflect-line (TRL). AC-2 contains 26 groups of the lumped standard elements, as well as the full set of coplanar transmission lines for multiline TRL calibration from 5 to 11 GHz. T11A-GSG1 probes in separation on the AC-2 thru standard after 1 µm overtravel contact. Typical Electrical Figures AC-2 and T11A-GSG1 AC-2 and T11A-GSG1 2 6 Characteristic Impedance Characteristic Impedance Imag(Z ) ( Ω ) Real(Z ) ( Ω ) AC-2 and T11A-GSG1 AC-2 and T11A-GSG1 1. Effective Dielectric Constant Effective Dielectric Constant.5 EFF ) ) Imag( EFF 8 6. Real( Typical characteristic impedance and the effective dielectric constant of the AC-2 line standard measured using the method of National Institute of Standard and Technologies (NIST, Bolder, CO, USA) [1, 2]. MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. 1

2 Substrate Characteristics Material Alumina Size 16.5 x 12.5 mm Thickness 635 µm Design or standards Coplanar Probe configuration GSG Supported probe pitch 1 to 25 µm Number of lumped standard groups 26 Number of calibration and verification lines 5 Calibration verification elements yes Supported calibration methods SOLT, LRM, SOLR, TRL and multiline TRL Typical resistance of the load 5 Ω Typical load trimming accuracy error ±.3 % Open standard Au pads on substrate Ruler scale to 3 mm Ruler step size 1 µm Recommended overtravel for TITAN probes 1 µm Electrical Characteristics of CPW Line Standards Nominal capacitance per unit length, pf/cm Nominal characteristic GHz 5 Ω Effective dielectric GHz, real part 4.94 Effective velocity GHz.45 Parameters of the simplified model of line losses Reference loss, db.34 Reference delay, ps 25.5 Reference frequency, GHz 2 Electrical length of line, ps Thru 1.1 Line 1 (39) 3. Line 2 (59) 6.5 Line 3 (79) 13. Line 4 (139) 25.5 Line 5 (11) 38.5 MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. 2

3 Substrate Layout S O T L S L T *Location reference elements are marked blue. Short Open Load Thru AC-2 calibration substrate on ceramic AUX chuck of TS5 manual probe system. Reference Elements Reference for SOLT/LRM elements Reference for TRL line elements MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. Note Reference for reciprocal elements 3

4 Thru Standards Type Length µm Line Standards Type Length µm l Note MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. 4

5 Load Standards Type 13 LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD LOAD 625 MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. 5

6 Short Standards Type 14 SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT 5 26 SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT SHORT 5 MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. 6

7 Open Standards Type References [1] R. B. Marks and D. F. Williams, "Characteristic impedance determination using propagation constant measurement," IEEE Microwave and Guided Wave Letters, vol. 1, pp , June [2] D. F. Williams and R. B. Marks, "Transmission line capacitance measurement," Microwave and Guided Wave Letters, IEEE, vol. 1, pp , See MPI Corporation s Terms and Conditions of Sale for more details. Asia region: EMEA region: America region: MPI Global Presence Direct contact: ast-asia@mpi-corporation.com ast-europe@mpi-corporation.com ast-americas@mpi-corporation.com MPI global presence: for your local support, please find the right contact here: MANUAL - AC-2 v2., MPI Corporation 217. Data subject to change without further notice. 7