CV - 6SL INSTRUCTION MANUAL 6000W POWER SUPPLY

Transcription

1 CV - 6SL INSTRUCTION MANUAL 6000W POWER SUPPLY 1

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3 TABLE OF CONTENTS 1.0 Specification Installation Rack Mounted Cooling Filament Module Electrical Power Input Grounds Power Supply to Filament Module Filament Transformer Connection Power Supply Control Connectors Remote I/O Control Remote Interface Remote Wiring Gun Control High Voltage Control Customer EPO Controls and Operation High Voltage Controls High Voltage Interlock Chain High Voltage Ready High Voltage On High Voltage Power Supply Meter Remote Operation "High Voltage" Gun Controls 21 3

4 TABLE OF CONTENTS CONTINUED 3.8 Gun Operation Using Control Panel Gun Interlocks Gun Ready Gun On Gun Supply Metering Gun Control Indicators Remote Operation "Gun Supply" Gun "Position" Control Bias Control Emission Current Control Theory Of Operation Overall Control "High Voltage" Control "Gun" Power Supply Chassis High Voltage Regulator High Voltage Power Card Gun Supply High Voltage Circuit Filament Transformer Module Trouble Shooting Equipment Turn On Regulator Card Adjustments Card Tests Drawing List Parts List 44 4

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6 1.0 SPECIFICATION 1.1 INPUT POWER Model CV-6SL 208V Input Voltage Frequency Phase Current : 280V±10% : 50/60Hz : Three - 4 Wire : 32 Amps Model CV-6SL 400V Input Voltage : 400V±10% For operation from 0ºC to 40ºC. Input as low as 342 VAC may be accommodated but unit must be operated at less than 35ºC due to reduced fan speed. Frequency : 50/60Hz Phase : Three - 5 Wire Current : 20 Amps 1.2 Output "High Voltage" Voltage Current Regulation Ripple : 0-10,000V DC (Negative Polarity) : Milliamperes DC : 0.5% (+/- 50 Volts) : 0.5% RMS (140V P-P) 1.3 Output "Filament" Voltage Current Frequency Regulation : 0-10V AC RMS : 0-75 Amperes : 34 khz or Higher : +1.0% (0.75 Amps) 1.4 Power Supply Front Panel Meter Switch Potentiometers : Digital 3.5 Digits LCD : Accuracy + 2% : Select kv "10.00"kV : Select ma "600" ma : Select Filament 75.0 A : Meter Select kv - ma : Bias (0-75A) (Screwdriver) 10 Turn 6

7 Indicators : KV Overvoltage Fault : KV Overcurrent Fault : KV Out of Reg : ARC Counter Fault : Rail Fault : Step Start Fault : PWR OK : HV ON : Gun ON : PS Fault 1.5 Main Circuit Breaker : Emergency Off (mechanical latch) 7

8 1.6 Mechanical Power Supply : Panel 8.75" High X 19" Wide : Chassis 21" Deep : Weight 42 Pounds One Gun Filament Module D : Base 6 ½" X 11 ¼" : Height 4" : Weight 5 Pounds 1.7 Interconnect Power Supply to Filament Transformer Module (3 Cables) : B (W-103B) 12 Feet : B (W-104A) 12 Feet : B (W-105B) 12.5 Feet Filament to Chamber : 3 Feet : D (W-111) 2.0 INSTALLATION 2.1 Rack Mounted The power supply can be rack mounted in a standard 19" rack cabinet. It must be supported by two side shelf supports to hold the power supply weight. Caution should be used as the supports should not block the power supply side air input and exit. The rack vertical height required is 8 3/4 inches. The chassis depth is 21". An additional 3" is required for clearance of terminals, plugs and wiring. The panel should be secured to the rack cabinet by the six mounting holes provided. 2.2 Cooling The power supply is air cooled by an internal fan that pulls air into the power supply chassis from the rear and side panels. The power supply is approximately 85% efficient, thus, 1100 watts of heat must be removed from the cabinet. The customer must ensure a free flow of air is maintained through the cabinet and keep the ambient air temperature at the input to the power supply below 104 F (40 C) or even cooler (<35ºC) if 400VAC unit is operated at less than 360 VAC input. The main air input to the power supply is on the right side. Auxiliary air inputs are on the rear panel. The fan is located on the left side. All air passages must be unobstructed. If air filters are used on the cabinet air input, they should be checked on a regular schedule for dirt and dust accumulation. The inverters have a temperature sensor that will shut down and latch out further operation if an over temperature condition should occur. 8

9 2.3 Filament Module The Filament Module is a stand-alone assembly and is located close to the filament and the vacuum chamber. The high current (up to 75 amperes) in the secondary of the transformer can produce excessive losses if the connections are not short and low in inductance. The box cover can be removed for mounting the assembly to a secure location close to the bushings feeding power to the filament. The cover is interlocked and must be reinstalled for operation to commence. 2.4 Electrical Power The customers' input power plugs to a square flange receptacle TB-1 located on the lower left corner of the rear panel of the power supply. All the power required for the system inputs at this point. A mating plug is provided for the customers input power wires, four female pins and cable clamp are included as part of the assembly. The CV-6SL can be ordered for the following input voltage sources. MODEL #CV-6SL 208V # V-50/60Hz-3 Phase-4 Wire Connect using AWG #10 stranded UL1015 wire MODEL #CV-6SL 400V # V-50/60Hz-3 Phase-5 Wire Connect using AWG #12 stranded UL1015 wire The 400V systems require an electrical neutral. The neutral supplies power to the single phase gun loads. The neutral current is typically 6 amperes. An external EMI filter such as Schaffner FN or FNL may be needed if conducted noise is a problem in the installation. 2.5 Grounds Two ground studs are provided on the HVPS rear panel. Also the filament output box has a ground stud. In addition, the interconnect cable has a ground conductor that ensures all assemblies are grounded when interconnected. Connect a #10 AWG minimum protective earth ground wire to the ground studs provided. Power Supply: Filament Transformer Module: Rear Panel Interface Panel Each assembly should be connected to its local ground. Power Supply: A protective earth ground should be provided as part of the electrical power input. The user should make sure that each cabinet containing the power supply is grounded. Filament Module: Ground to base of vacuum enclosure 9

10 2.6 Power Supply Chassis To Filament Module There are three cables interconnecting the power supply with the Filament Module. One cable is coaxial and carries the high voltage. The high voltage cable plugs into the power chassis. The outer shield is grounded to the power supply by a multi turn shell connector. The high voltage cable connection to the filament module is filtered with a special shielded plug. The plug pushes directly into the jack mounted in the filament module. A second cable connects the primary of the filament transformer to its power source. The primary power is alternating voltage high frequency, approximately 34kHz. The conductors are contained within an outer shield that is connected to ground at each end. The third cable carries the position power supply output along with control power for the relays and interlock circuits. POWER SUPPLY CHASSIS HIGH VOLTAGE FILAMENT PRIMARY CONTROLS/POSITION J-104 J-106 J-108 W105 W103 W104 J-302 J-303 J-301 FILAMENT MODULE 2.7 Filament Transformer Connection The filament module output connection is made by a dual conductor high voltage cable contained in a flexible shielded conduit. The dual conductor consists of 15kV insulated wire twisted together and run through the flexible conduit. CAUTION It is the customers responsibility to protect the cables extending beyond the end of the flexible conduit. The cables operate at high voltage and must be interlocked to the power supply system. 2.8 Power Supply Control Connectors There are two methods of connecting to the Power supply for control and monitoring signals. Three connectors on the rear panel of the Power Supply are provided for controlling the power supply. There is no switching implemented for selecting between the two control schemes, so that only one type of control mode can be connected at any given time. 1) Remote I/O control: The Rear Panel J112 Connector can be used to fully control and monitor both the HV and the GUN power supplies. 2) Local Control Compatibility with the controls and monitoring of the original CV-6S is provided via J101 (HV control) and J103 (Gun Control) connectors. The local controls are separated into a high voltage control section and a gun control section. All cables described in the next two sections are available as separate items from the CV-6SL 10

11 2.9 Remote I/O control DB-25 Name 1 GUN ON + 2 GUN ON - Ribbon Pin (Ref) Input +24 VDC (from Interlock chain). Connect To Momentary (Normally Open Switch) 1 Output from Momentary contact to +24VDC (Normally Open Switch). Momentary Close to turn Gun On 3 3 GUN OFF + Input +24 VDC (from Interlock chain). To Normally Closed Switch. 5 4 GUN OFF - Output from Momentary contact to +24 VDC (Normally Closed Switch). Momentary Open to turn Gun Off 7 5 EMISSION SET + 0 to 10 V Control. 100kohm input resistance. 9 6 EMISSION MON + 0 to 6 V Output = 0 to 600 ma. 100 ohm source resistance FILAMENT I MON + 0 to 7.5V Output = 0 to 75 A. Source resistance approx. 1k ohm 13 From opto output, +24 VDC when True, 25mA 8 GUN ON CONFIRM + maximum 15 9 GUN SIG CNFRM PWR Connect to +24 VDC Source such as DB pin GUN OFF CONFIRM + From opto output, +24 VDC when True, 25mA maximum H2O INTERLOCK Opto input, Apply +24 VDC to satisfy Interlock INTERLOCKS PWR +24 VDC Source from Power Supply VAC INTERLOCK From Vacuum Interlock, apply +24 VDC to satisfy Interlock 25 Connected to DB pin 11 inside Power Supply. Use as source +24 VDC Vacuum interlock 2 14 VAC INTERLOCK PWR 15 SHIELD COMMON GND 4 16 MONITOR COMMON GND 6 17 HV OFF+ +24 VDC Source from Power Supply 8 18 HV OFF - 19 HV ON + Input +24 VDC (from DB pin 12). To Normally Closed Switch. Momentary Open to turn HV Off. Also should be connected to DB pin Opto Input +24 VDC. Should be connected to DB pin 18. Also should be connected to Momentary (Normally Open Switch) HV ON - Output from Momentary contact to +24 VDC (Normally Closed Switch). Momentary Open to turn HV Off KV SET + 0 to 10V Control. 220 kohm input resistance KV MON + 0 to 10V Output = 0 to 10,000 V. 100 ohm source resistance. 18 From opto output, +24VDC when True, 25mA 23 HV ON CONFIRM maximum HV SIG CNFRM PWR Connect to +24 VDC such as DB pin HV READY CONFIRM + From opto output, +24 VDC when True, 25mA maximum 24 11

12 Sample Remote I/O Connections 12

13 2.10 Remote Interface: The remote interface designed and supplied with the CV-6S may be connected to the CV-6SL using the J-101 and J-102 cables: HV CONTROL J1 GUN CONTROL J1 25 COND. W COND. W102 RIBBON RIBBON J-101 J-103 POWER SUPPLY CHASSIS Remote Interface Connections: If you are not going to implement any remote control or monitoring functions, the only system I/O lines that must be connected are: (1) those supplying interlock signals to the gun control unit (Section 2.11) (2) the green-black wire pair in the gun control system I/O cable which must be jumpered together to complete the normally-closed GUN GO OFF*ENABLE loop (3) the green-black wire pair in the HV control system I/O cable which must be jumpered together to complete the normally-closed HV GO OFF*/ENABLE loop NOTE The gun filament current cannot be switched on if the GUN GO OFF*/ENABLE loop is not complete and the high voltage cannot be switched on if the HV OFF*/ENABLE loop is not complete. Either function can be switched on with the other off, but emission current cannot be obtained unless both OFF*/ENABLE loops are closed. Guidelines For Connecting The External Interlocks Each of the interlock signals listed in Section 2.11 supplied to each remote gun control unit. If all guns are in one vacuum chamber, the TANK and VACUUM GAUGE interlocks must be connected in parallel. NOTE All statements regarding operator and equipment safety are void if the external interlocks are not correctly installed. CAUTION The interlocks are internally supplied with 24V DC. Only contact closure need be supplied. The application of voltages to the interlock circuits will cause them serious damage. Other I/O's: Control and Status Signals The remote control inputs and status outputs include both digital and analog signals. Digital inputs require a simple contact closure and carry 24V DC at approximately 20mA. All digital outputs are from contact closures rated for 220V AC or 30V DC. 13

14 Connecting the Gun Control-System I/O Cables(s) (PN B : 10 Ft.) (PN B : 20 Ft.) Follow the procedure described below in connecting the gun control system I/O cable(s). Refer also to page 11A shows the pinout for the signals that can be interfaced to the gun control unit via its system I/O connector (G1-J13). Section 2.11 provides more detailed information about these signals. STEP ACTION 1. Refer to Section 2.11 and determine which wires will be needed to interface the power supply to the evaporation system. Tie the unused wires back to the cable insulation and cover the ends with electrical tape. make sure that the exposed ends of the unused conductors do not touch each other or ground. 2. Strip 1/4 inch of insulation away from the end of each of the remaining wires. 3. Attach one of the spade lugs provided with the cables to the end of each wire. Hollingsworth crimping tool H-7B is recommended for this operation. 4. Carefully note the function of each color-coded wired (See Section 2.11) and connect each spade lug to the appropriate terminal on the system terminal strip. 5. Plug the other end of the cable into rear panel connector, G1-J2, on the gun control unit. Repeat this procedure for each additional gun, making sure that signals are routed correctly to either gun control. Connecting the HV Control System I/O Cable (PN B ) 20 ft. Follow the procedure described below in connecting the HV control system I/O cable(s). Refer also to page 11A which shows the pinout for the signals that can be interfaced to the HV control unit via its system I/O connector, HV-J11. Section 2.11 provides more detailed information about these signals. STEP ACTION 1. Refer to Section 2.11 and determine which wires will be needed to interface the power supply to the evaporation system. Tie the unused wires back to the cable insulation and cover the ends with electrical tape. Make sure that the exposed ends of the unused conductors do not touch each other. 2. Strip 1/4 inch of insulation away from the end of each of the wires that will be used. 3. Attach one of the spade lugs provided with the cables to the end of each wire. Hollingsworth crimping tool H-7B recommended for this operation. 4. Carefully note the function of each color-coded wire (See Section 2.11) and connect each spade lug to the appropriate terminal on the system terminal strip. 14

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16 2.11 Remote Wiring Gun Control Digital Interlock Inputs (Required) INTERLOCK PIN WIRE FUNCTION TANK 13, 14 O, BK Prevents the gun from being switched on unless all vacuum system doors and covers are closed and locked so that personnel cannot come into contact with high voltage within the vacuum cubicle. VACuum 15, 16 W, R Protects the gun filament GAUGE by ensuring that the product chamber ion gauge is on before the gun is switched on AUXiliary 18, 19 G, R Customer defined. Used with multi pocket sources to ensure that the beam is OFF while the turret is rotating. Must be jumpered ON if not used; can also be jumpered on at JP1 on the display panel PCB. GUN WATER 20, 21 BL, R Prevents the gun from being switched on unless it is receiving sufficient cooling water. Signal to be supplied by a customer- installed flow switch. POSITION 22, 23 Y, R Prevents the gun from being switched on unless the beam is correctly positioned in the pocket. Signal can be supplied via these lines by an external beam sweep controller. If no external sweep controller is used, the position PCB in the gun interface chassis supplies this signal internally. Analog Control Inputs SIGNAL G1-J13 WIRE FUNCTION REMOTE EMISSION CURRENT REQUEST Digital Control Inputs SIGNAL G1-J13 WIRE PAIR REMOTE GUN GO OFF*/ENABLE PAIR 56, 57 O(+), R(-) If the gun control unit's REMote/RANGE switch is in the REMOTE position, this input linearly controls emission current within the selected range: 0 V = min. current for the selected range; + 10V = max. current for that range FUNCTION 5, 6 G, BK A momentary open pulse switched off the gun. If all gun control interlocks are made, the gun can be switched on again. REMOTE GUN GO ON FILAMENT CURRENT MONITOR NOTE If these pins are not connected to a remote contact closure, they must be jumpered together or the gun cannot be switched on. 7, 8 BL, BK If all gun control interlocks are made and the GUN GO OFF*/ENABLE loop is closed, a 2- sec. contact closure across these pins switches on the gun. 24, 25 Y, BK A 0 to 7.5 volt signal proportional to 0-75 amperes is available for driving a remote meter. The impedance should be 1 megohm or higher. 16

17 FILAMENT BIAS SET Digital Outputs SIGNAL J2 PIN # WIRE PAIR 26, 27 BN, BK This feature is not connected in the CV-6SL. The only Bias control is on the front panel of the CV-6SL FUNCTION GUN READY 1, 2 R, BK Indicates that all gun control interlocks are made and that the GUN GO OFF*/ENABLE loop is closed so the gun can be switched on. GUN IS ON 3, 4 W, BK Indicates that the gun is switched on. Analog Outputs SIGNAL J2 PIN # WIRE PAIR ACTUAL EMISSION CURRENT FUNCTION 50, 51 BR(+),R(-) Linearly represents the emission current drawn by the gun controlled by this gun control unit: 0 V = 0 A; 10V =1A High Voltage Control Digital Control Inputs SIGNAL HV-J11 WIRE PAIR HV GO OFF*/ ENABLE FUNCTION 3, 7 G, BK A momentary open pulse switches off the high voltage. If all HV control interlocks are made, contact closure of this line enables the HV to be switched on. NOTE If these pins are not connected to a remote contact closure, they must be jumpered together or the HV cannot be switched on. HV GO ON 4, 9 BL, BK If all HV control interlocks are made and the HV GO OFF*/ENABLE loop is closed, a momentary contact closure switches on the high voltage. Analog Control Inputs SIGNAL HV-J11 WIRE FUNCTION PAIR REMOTE HIGH- 18, 19 W(+),R(-) If the HV control unit's VOLTAGE REQUEST REMote/RANGE switch is in the REMOTE position, this input linearly controls the high voltage within the selected range. NOTE This input must be O V DC to +10V DC. The HV circuit cannot be controlled by a -10V DC input. The local high voltage set, located on the high voltage control panel, can be activated during remote operation. Jumper the yellow wire connected to pin 20 to the white wire connected to pin

18 Digital Outputs SIGNAL HV-J11 WIRE FUNCTION PAIR HV READY 1, 5 R, BK Indicates that all HV control interlocks are made and that the HV GO OFF*/ENABLE loop is closed; the HV is ready to be switched on. HV IS ON 2, 6 W, BK Indicates that the high voltage is on. Analog Outputs SIGNAL HV-J11 WIRE PAIR ACTUAL HIGH 15, 16 BR(+),BK(- ) TOTAL POWER SUPPLY CURRENT FUNCTION Linearly represents the VOLTAGE load (gun) voltage: 0V = 0 kv, 10V = 10kV 22, 23 O(+),BK(-) Linearly represents the total power supply current (i.e., the total emission current drawn by all guns powered by the power supply): 0 V = 0 A; 10V = 1A Customer EPO (Emergency Panic Off) An Amphenol plug is required for the customer connector, AN P, jumper pins C & D for operation. 3.0 CONTROLS AND OPERATION 3.1 Front Panel Indicators and Controls The Front Panel provides ten LED indicators, a Digital Panel Meter with three switch select settings, a Bias Potentiometer, an Emergency Off Switch and the main circuit breaker LED Indicators: PWR ON: HV ON: GUN ON: PS Fault: KV Overvoltage Fault: KV Overcurrent Fault: KV Out of Reg: Arc Counter Fault: Rail Fault: Step Start Fault: AC Power is supplied and LV DC power supplies are on. Will Glow Yellow when the HV Power supply is ready but OFF Will Glow Green when HV is ON Will Glow Yellow when the GUN Supply is ready but OFF Will Glow Green when Filament Supply (Gun) is ON Any of the Fault conditions detailed below is true. HV will be OFF Output HV exceeded 10.6kV Output emission current exceeded 630mA Unit is not Voltage regulating within specification. A series of arcs in excess of the arc counter setting have occurred Excessive current was drawn by the inverter power switches The Inverter DC rail could not be charged during HV turn On Digital Panel Meter: 3 ½ Digit LCD Panel Meter with 3 position selection switch EM I: FIL I: kv: Emission Current, 0 to 600 ma Filament (Gun) Current, 0 to 75.0 A HV output, 0 to kv 18

19 3.1.3 Bias Potentiometer: 10 Turn Pot accessed through Recessed opening. The potentiometer is set at a current below the normal operating current. The bias functions as a preheat or idle for the filament. This is the only control that will affect the bias setting on the CV-6SL Emergency Off Switch: When pushed, opens the interlock and immediately turns off the HV and Gun. When Emergency Off is activated, neither HV nor Gun can be turned on. Rotate CW to clear the Emergency Off condition Main Power On: Turn AC power on and off. Is also a 20A circuit breaker that will open in the event of excessive AC line current. 3.2 High Voltage Controls The high voltage power supply is protected by a main circuit breaker and controlled by a contactor at its input. When the circuit breaker is OFF, all power to the system is OFF. When the circuit breaker is closed and the contactor is open, only the high voltage power supply is OFF. The high voltage power supply is a closed loop voltage regulated supply. There is an internal potentiometer adjust on the regulator circuit card that limits the maximum current available from the supply. When the limit, usually factory set at 660mA, is reached, the regulator automatically transfers from the voltage regulation to current regulation and continues operation in the current regulation mode. This will cause the KV Out of Reg LED to light. 3.3 High Voltage Interlock Chain There is a series chain of interlocks that must be closed for high voltage operation. If any one of the interlocks in the chain is open, the high voltage ON contactor cannot be closed and, if an interlock opens during operation, the contactor opens, turning OFF high voltage. The door interlock LED will be illuminated with a fault or an opening in the interlock chain. The contacts in the interlock chain are: Temperature switch PS-S1 on the inverter heat sink Emergency OFF switch PS-S3 power supply front panel Access switch S-301 in the filament module EPO J110 Pins C and D The Rear Panel Remote I/O connector Interlocks are: VAC Interlock H2O Interlock HV OFF normally closed pushbutton The Control Panel Interlocks are: High voltage OFF push-button HV S1 (If Control Panel is used) Key switch HV-S5 on the high voltage control panel (If Control Panel is used) Remote high voltage OFF HV-J2, wires green and black on the remote interface. The "DOORS" indicator on the control panel (if used) will extinguish when all the interlocks are closed and the interlock chain is satisfied. NOTE: The interlocks will be satisfied if either of the control schemes (Rear Panel Remote I/O, J112 or the Control Panel) properly satisfy their interlock requirements. When using the Control Panel it is not necessary to work the interlocks on the Rear Panel Remote I/O connector. 19

20 3.3 High Voltage "Ready" The high voltage power supply is in a "ready" to turn on condition when the interlock chain is closed and the internal faults are reset. The internal faults circuits located on the High Voltage regulator circuit board are summed and if the Control Panel is used, displayed on the high voltage control as HV-I7. Fault The Front Panel LED HV ON will glow yellow when the high voltage power supply is ready. 3.4 High Voltage ON When the high voltage ON push-button is depressed, the regulator circuit card commands the high voltage ON as a two step function. First, the auxiliary contactor K1 pulls in and the DC rail capacitor is charged slowly through a series impedance. When the charge is complete, the main three phase contactor K2 is commanded to close. After the two step function is completed, the inverter is enabled and high voltage ramps ON. The high voltage will ramp up to the voltage commanded. The turn ON has a ramp of approximately 20 milliseconds. The Front Panel LED HV ON will turn Green when the high voltage power supply turns HV ON. 3.5 Control Panel Display and Indicators (if used) High Voltage Power Supply Meters The LCD meter provides two readouts for the power supply: output DC voltage and total output DC current. Switch HV S4 selects voltage as "10.00" kv and current as "600" ma. At initial turn on, the output voltage can be monitored. However, the output current will be zero until the gun has been turned ON and the filament circuit becomes active Out Of Regulation Indicator The "out of regulation" indicator is illuminated anytime high voltage has been turned ON and the output voltage is out of the + 0.5% voltage regulation window. The operator will note the indicator flashes ON at turn-on and is extinguished as the output voltage arrives at the commanded level. 20

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22 3.6 Remote Operation "High Voltage" when using the Control Panel Remote Inputs The remote interface has the following functions available: High Voltage OFF Contact Opening HV-J2 G-BK High Voltage ON Contact Closure HV-J2 BL-BK High Voltage Reference Command 0-10V = 0-10kV Output High Voltage Monitor 0-10V = 0-10kV Output Current Monitor 0-6V = Milliamperes H.V. Ready Response Contact Closure HV-J2 R-BK H.V. ON Response Contact Closure HV-J2 W-BK The remote off, kv monitor, ma monitor, H.V. ready and H.V. ON are always active. The reference command and H.V. ON are switched functions and transfer between local control and remote control. A screwdriver is required to make the through-the-panel selection (HV-S3). A control panel indicator is illuminated to indicate remote operation (HV-I1). 3.7 Gun Controls There are two circuit breakers on the rear panel that protect the gun and controls circuits. These breakers must be ON for system operation. The optional position supply becomes active when the main circuit breaker PSCB1 is turned ON. It will also be seen the 24V control logic circuits are energized with the initial circuit breaker turn ON. The Gun ON and OFF circuits control the following: Filament Power High Voltage Vacuum Relays - located in the filament module. The relay connects high voltage to the output circuit. 3.8 GUN Operation when using Control Panel Gun Interlocks There is an interlock chain or series of contacts that must be satisfied with contact closures before achieving a ready for GUN turn on condition. The contact closures are provided through the remote interface from the users hardware (see Section 2.11). They are connected to G1-J2 on the Gun Control rear panel. G1-J2 Tank Orange - Black G1-J2 Vacuum White - Red G1-J2 Auxiliary Green - Red G1-J2 Water H2O Blue - Red G1-J2 Position Yellow - Red Note: If the internal position control is used, no external contacts are required. Terminal position G1-J2, green - black, Gun OFF must be jumpered for operation in the local or remote mode. If the user does not plan to operate with a remote off switch, he must place a jumper between the two terminals. 22

23 3.8.2 Gun "Ready" When all the interlocks are satisfied, "Closed", the circuit is ready for the gun to be turned ON. The indicator in the gun off switch, G1-I2, will be illuminated. The circuits that must be satisfied for gun operation are: Remote Off G1-J2 Green-Black Gun Control Off G1-S1 Control Panel Tank Interlock G1-J2 Orange-Black Vacuum Interlock G1-J2 Green-Red Auxiliary Interlock G1-J2 Blue-Red Water Interlock G1-J2 Yellow-Red Position Supply Adjustment G1-J2 Brown-Red Gun "ON" The "Gun ON" command turns on the filament power supply. The filament supply is controlled by a closed loop regulated circuit. At turn ON, the filament ramps up and regulates to the current level commanded by the bias potentiometer, a screwdriver adjustment on the control panel. If high voltage is ON, the high voltage regulator sends a signal to the filament regulator to transfer the reference command from the bias adjustment potentiometer to the emission current potentiometer, also located on the control panel, with a calibrated 10 turn dial. If high voltage is off, the filament current command adjustment stays with the bias adjustment pot until such time the high voltage is turned ON. The output vacuum relay, located in the "filament transformer module", switches the high voltage output onto one leg of the high current filament transformer, secondary. In a single gun system, the relay does not transfer until both the high voltage and gun circuits are turned ON Gun Power Supply Metering The 3 1/2 digit LCD meter has a selector switch. G1-S4 that provides the operator with three circuit-monitoring positions. Emission current: The current is monitored in the high voltage leg of the gun circuit. The maximum emission current is read as "600"mA. Filament Current: The primary current of the filament transformer is monitored, rectified and provided as an external readout (7.5V = 75 amperes) and the meter will read "75.0" amperes. A remote filament current monitor is provided as 7.5V = 75 Amps. Position Current: The output current of the position power supply is monitored and will read "3.00" amperes. There is no external readout for position current. 23

24 3.8.5 Gun Control Indicators The LED indicators are powered in a series chain. If the first interlock in the chain is broken, all indicators that follow are not satisfied. The sequence is: 1. Tank G1-I7 2. Vacuum G1-I6 3. Auxiliary G1-I5 4. Water G1-I4 5. Position G1-I3 When each of the above five interlocks are closed, their respective LED's are illuminated. The ready indicator in the GUN Off push-button will be illuminated when the position indicator illuminates. 6. Ready G1-I2 The operator must clear the first unsatisfied interlock to know the status of the second and so on. The "Gun On" indicator is located in the Gun ON push-button. The ready indicator and the ready function disappears when the gun is turned "ON" Remote Operation "Gun Supply" The remote interface has the following functions available: Gun ON Contact Closure Gun OFF Contact Opening Emission Current Command 0-10V = 0-600mA Position Supply Interlock Contact Closure Water Interlock Contact Closure Auxiliary Interlock Contact Closure Vacuum Interlock Contact Closure Tank Interlock Contact Closure Gun ON Response Contact Closure Gun Ready Response Contact Closure Emission Current Monitor 0-6V = 0-600mA Filament Current Monitor 0-7.5V = 75 Amps Filament Bias Command 0-10V = 75 Amps Active Bias Set in Remote G1-J2 Blue-Black G1-J2 Green-Black G1-J2 Orange-Red G1-J2 Yellow-Red G1-J2 Blue-Red G1-J2 Green-Red G1-J2 White-Red G1-J2 Orange-Black G1-J2 White-Black G1-J2 Red-Black G1-J2 Brown-Red G1-J2 Yellow-Black G1-J2 Brown-Black G1-J2 Green-White If the remote control circuit is not used, the Gun Off input G1-J13, Green-Black wires must be jumpered for operation at the local panel. There are three functions transferred between local and remote operation by the local-remote switch. Gun Turn On Emission Current Command Bias Current Command G1-J2 Blue-Black G1-J2 Orange-Red G1-J2 Brown-Black All other readouts, monitor signals and interlocks are active in both modes. When the remote local switch is in remote, a front panel LED is illuminated - G1-I8. 24

25 3.8.7 Gun "Position" Control G1-R1 "Optional" The gun position supply is active when the main circuit breaker is closed on the power supply. The 10-turn potentiometer on the control panel supplies the reference for a 0-3 ampere power supply. The position current is monitored by the panel LCD meter when selector switch G1-S4 is in the "POS I" position. The position of the beam must be within a preset window before operation starts. The limits of the beam are set on the gun supply circuit card in the power supply chassis. There is a low limit setting, R63,and a high limit current setting, R-64. These are factory set and do not require additional adjustment in the field. If a filament supply is purchased without a position supply and a position supply is required at a later date, a new filament supply with position supply will have to be ordered. # Filament Supply With Position Supply # Filament Supply Without Position Supply Bias Control G1-R3 The Bias Control does not work with the CV-6SL. The Bias Pot on the Front Panel of the CV- 6SL is the only active Bias control "Emission Current" Control G1-R2 The emission current control located on the control panel provides a reference for emission current operation. A 10-turn calibrated dial provides the operator with an indication of the set level prior to turn ON; maximum 1000 = 600mA. When the gun is turned On, the "On" function activates the filament supply. The circuit at turn On uses the bias set, (a screwdriver adjustment, as a reference setting). When high voltage is turned ON, the circuit automatically transfers the reference input from the bias pot to the Emission Current pot. This function allows the filament to preheat at an idle level below the operating level. The emission current potentiometer can be preset prior to turn ON. The power supply will automatically go to the bias level, then automatically ramps to the emission current level with high voltage turn ON. The current can be monitored by selecting "Emission Current" on the meter select switch. 25

26 4.0 THEORY OF OPERATION 4.1 Overall The power supply provides three power sources to the CV-6S System. High Voltage Power Filament Power Position Power - 10kV DC - 600mA - 10V AC - 75 Amperes 15V DC - 3 Amperes (Optional) Each power supply operates independently with the addition of emission current control by the filament supply. The system operates as a voltage regulated high voltage power supply; a current regulated filament supply; a current regulated position supply. The sequence of turn ON can vary. The position supply turns ON with the main circuit breaker. The filament supply turns ON with GUN ON. The filament supply turns ON and ramps to a level determined by the "Bias Adjust Pot". The high voltage can be turned on anytime. If high voltage turn ON follows Gun ON, the high voltage ramps to the level preset determined by the screwdriver H.V. Adjust Potentiometer. When the high voltage arrives at the preset voltage, the filament supply reference automatically transfers from the bias reference pot setting to the Emission Current Pot setting. At this operating condition, the temperature of the filament determines the load current out of the high voltage power supply. The filament supply uses high voltage current as feedback, thus, emission current (HV ma) is regulated by the filament supply. High Voltage Power The high voltage power supply utilizes high frequency switching technology to develop the high voltage 6000 watts of power. The AC input power is rectified directly off the input line using the common three phase bridge rectifier circuit. The resulting DC power establishes a+ (positive) rail voltage and - (negative) rail voltage. The DC rail power is converted to high frequency AC at 22k Hz by IGBT solid-state switches. The high frequency power is stepped up in voltage by a transformer and rectified to provide a DC voltage of 10,000 volts. The power supply is rated to deliver 600 ma of current at any voltage from near zero to 10,000 volts. The high voltage power supply functions as a voltage regulated circuit. Filament Power The filament circuit, similar to the high voltage circuit, utilizes high frequency technology. The filament circuit requires single phase power of approximately 208 to 230 volts. A single phase bridge rectifier circuit provides the raw DC power for the high frequency switches. The DC voltage is filtered and a + (positive) rail voltage and a - (negative) rail voltage is established. The filament supply uses FET switches and operates at a higher frequency, 40k Hz. The filament transformer steps down the voltage with a ratio of 8 : 1 to provide the 10 volts at the filament. There are no rectifiers on the output of the transformer as the filament input is high frequency AC. The filament circuit is current regulated. There are two modes of filament operation: One with high voltage OFF and one with HV ON. A. H.V. OFF Filament Reference: Filament Feedback: B. H.V. ON Filament Reference: Filament Feedback: BIAS POT Filament Primary Current Emission Current POT High Voltage Current 26

27 The switching between the operational modes is performed automatically on the Gun Supply Circuit Card. The high voltage power supply initiates the switching when the high voltage is turned on and operating in its regulation window. Position Power (Optional) The position supply uses the rail voltage provided on the input to the Gun Supply Card. The position supply is low power, 15 volts at 45 watts. The supply uses a solid-state inverter circuit switching at 100k Hz frequency. The supply is current regulated with feedback from a low end shunt. The position supply has a positive DC output. The negative low end is grounded. The filament supply PCB must be ordered with a position supply. # "Optional" Filament Supply PCB CV-XS (with position supply) # "Standard" Filament Supply PCB CV-XS (without position supply) 27

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29 4.2 Control "High Voltage" (Optional) 1. HV-S4 Meter Select Switch: The switch selects between power supply output voltage and power supply total current. The voltage readout maximum is 10.0kV and the current maximum is 600mA. 2. HV-S3 Remote-Local Switch: The switch transfers the following functions to the remote interface: High Voltage ON H.V. Reference (0-10V) = 0-600mA High voltage OFF is always active on the remote interface and must be jumpered if not used. 3. HV-R1 High Voltage Adjust: The screwdriver adjustment provides a reference for the high voltage. The POT is usually set at one level and does not require additional adjustment. The power supply will turn ON and ramp up to the preset voltage. The pot is a 3-turn adjustment. 4. HV-S5 Key Switch: The key switch is in the high voltage interlock chain and functions as a lockout for high voltage operation. The switch must be ON for high voltage operation. The key can be removed in the OFF position. 5. HV-S2 High Voltage ON: When the interlock chain is complete with the high voltage ready indicator illuminated, high voltage can be turned ON. HV-I6 High Voltage ON: The indicator will be illuminated when high voltage turns ON. 6. HV-S1 High Voltage OFF: The switch is one of several switches that turn high voltage off. HV-I5 Ready For High Voltage: The indicator is the last indicator in a series that must be satisfied for High Voltage Ready. The light is extinguished with High Voltage ON. 7. HV-I4 Out of Regulation: The high voltage power supply functions as a voltage regulator. The light is illuminated when the power supply is out of the voltage regulation window. HV-I2 Power: The indicator is illuminated with the main power applied to the power supply and the main circuit breaker is closed. HV-I3 Doors: The doors indicator is illuminated when several external and internal interlocks are closed: Filament Transformer Module cover in place Power supply cover in place Temperature switch closed in a satisfactory range HV-I1 Remote: The Remote-Local switch selecting remote operation. 8. HV-M1 Meter: The 3.5 digit LCD meter has two readouts selected by switch HV S4. Power Supply Current: "600" ma Power Supply Voltage: "10.0" kv 29

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31 4.3 Control "Gun" (Optional) 1. G1-S4 Selector Switch: Provides a readout of the three gun related circuits. The emission current 0-600mA is high voltage current and requires that both the gun and high voltage power supplies be ON. The filament current amperes provides a readout with Gun ON. The optional position current amperes is active with the main circuit breaker and filament breaker closed. 2. G1-R1 Position Control: The calibrated 10-turn potentiometer provides a reference to the position power supply located on the gun circuit board. The position supply controls the location of the beam. The position indicator illuminates when the beam is positioned within a window determined by the low/high position potentiometers located on the gun circuit board. The position indicator must be illuminated for operation to start. NOTE: The position controls are standard on all GUN control panels. The position supply located on the "Filament Supply PCB" must be ordered as an option. 3. G1-R3 Bias: The bias control adjusts the filament current prior to high voltage turn on. When high voltage is turned ON, the filament reference transfers to emission current regulation and the emission current 10-turn control. The correct bias level is adjusted for long filament life and smooth transfer between filament current feedback and emission current feedback. 4. G1-R2 Emission Current Adjustment: The emission Current potentiometer is used as a reference for high voltage current during system operation. The impedance of the load is determined by the temperature of the filament with high voltage ON. 5. G1-S2 Gun On: The gun can be turned ON at anytime, but the sequence of Gun ON then high voltage ON is the most appropriate. There is a series of interlocks that must be satisfied before the gun can be turned on. All interlocks must close for a ready to turn Gun ON condition. The following is a list of the interlocks: When a remote position supply is used, its contacts, indicating the beam position is correct, should close - G1-J2 Yellow-Red. Remote Gun OFF Switch G1-J2 Green-Black Wires Must be jumpered for operation Gun Off Switch G1-S1 Gun Control Panel Tank Interlock G1-J2 Orange-Black Vacuum Interlock G1-J2 White-Red Auxiliary Interlock G1-J2 Green-Red Water Interlock G1-J2 Blue-Red When the position Power Supply is within a window and with all the interlocks closed, we have a Gun Ready for turn ON. G1-I2 in the off switch is illuminated. G1-I1 Gun On: The Gun On indicator will be illuminated when the gun has been turned on. 31

32 6. G1-S1 Gun Off: The gun off switch opens to break the latch on the gun ON holding circuit. The switch's function is the same as an interlock opening. G1-I2 Gun Ready: The gun is ready for turn on after closing a chain of interlocks. See Paragraph 5 for Gun On and the list of interlocks. 7. G1-I7 Tank: The tank interlock is a customer input and must have a contact that closes across the external interlock G1-J2, Orange-Black. If the tank interlock is open, all other interlocks will not provide an indication, as the tank is the first of the series. G1-I6 Vacuum: The vacuum interlock must present a closure across G1-J2, White-Red. If the interlock is open, all the interlocks that follow will not indicate. G1-I5 Auxiliary: The auxiliary interlock is a customer supplied contact closure across G1- J2, Green-Red. If the contact is open, all the interlocks that follow will not indicate. G1-I4 Water: The water interlock must present a contact closure across G1-J2, Blue-Red. If the contact is open, all the interlocks that follow will not indicate. G1-I3 Position: The position interlock closes when the position of the beam is within the limits preset on the gun regulator card. If all the above interlocks are illuminated, the ready light in the Gun OFF switch will be illuminated. The gun is ready for turn ON. G1-I8 Remote: The remote indicator provides the operator an indication that the remotelocal switch is in the remote position. 8. G1-S3 Remote-Local Switch: The remote-local switch transfers the Gun ON function, the emission current set reference, and bias current set from the panel control to the remote interface. all other panel functions remain active. 4.4 Power Supply Chassis The power supply chassis contains all the power supplies in the system. The input AC power connects to an AMP CPC connector located on the rear panel. A main circuit breaker PS-CB1 located on the front panel functions as the main disconnect for the system. If the main breaker is off, all power for the system is off. Note: Maintenance personnel should take caution as the protection circuit located behind the input terminal strip is activated anytime power is connected to the terminal strip. Main power should be disconnected anytime the power supply chassis is accessed. The three-phase AC power at the load side of the main breaker connects to three items: The Power Circuit The Gun Circuit Breaker The Control Circuit Breaker C B CB-2 CB-3 32

33 CB-2: The circuit breaker protects the gun power supply. CB-3: The circuit breaker protects the primary of the control step-down transformer T-2. This circuit provides power for all +24V DC and -24V DC in the system. All control power originates through this breaker. B-1: There is one fan, B-1, that forces air through the power supply. It is very important that the air passages remain clear. A temperature switch located on the main heat sink will shutdown operation, should the fan or the cooling become ineffective. PS-S3: An emergency off switch, located on the front panel, turns off high voltage, should an emergency STOP be required. The emergency Off turns off high voltage and returns the gun to the BIAS level of operation. The switch has a mechanical latch function and must be reset for operation to continue. Turn or rotate the knob to reset the switch. PS-I1: The Mains On indicator on the front panel normally turns ON with the main circuit breaker. There are three fuses that must be intact for the indicator to come ON: Fuse 1 and Fuse 2 on the 24V power supply Fuse 1 on the regulator circuit board L-1 Inductor: L-1 is a filter inductor connected at the input to the rail capacitors. The inductor is part of an L-C filter. The capacitor, part of the L-C filter, is located on the Power Circuit Card, C PS-S1 Switch: S-1 is a temperature switch located on the main inverter heat sink. It is selected to operate at 170ºF. L-2 Indicator: L-2 is a 100 microhenry inductor used on the 400V power supply. The inductor connects between the input, three phase neutral and an artificial neutral located on the power board. 33

34 4.5 High Voltage Regulator The regulator for the high voltage power supply is the heart of the power supply. It controls, regulates the output voltage and current, communicates with the outside system, protects the power supply from internal and external faults. There are three interface connectors: J5 Connection to components in the chassis J7 Ribbon cable to the HV inverter power card J4 Ribbon cable to the Gun Supply card J3 Ribbon cable to the Local Panel Gun control J6 Ribbon cable to the Local Panel HV control J2 Ribbon to rear panel Remote I/O Connector 1. K.V. Regulator: The reference voltage 0-10 volts connects to the regulator by way of J2-18 or J6-21. The signal enters the KV reference inverter U-16, Pin 13. The positive 10V signal is inverted to negative 10 volts at Pin 14. Pot R-86 provides for a small range of calibration of the reference. FET Q-3 clamps the reference to ground, prior to turn ON and during a fault shutdown sequence. Capacitor C-32 in combination with resistor R-76 and R-86 provide an RC for the reference rise at high voltage turn ON ( MFD X 75k ohms = 165 us). The voltage feedback (sample of the output voltage) is connected to J-6, Pins 1 and 2. The feedback voltage divider (20 MEG Ohms) delivers 500 microamperes at 10,000 volts to the K.V. feedback buffer U-16, Pin 2. The divider is capacitive compensated and requires low end compensation by Pot R-58. The buffer provides a positive voltage 10 volt signal at Pin 1 for 10,000 volts on the output. The positive signals combine with an equal negative signal from the reference inverter to give 0 volts at the input to the KV error amp U-16 Pin 6. The KV error amp does what it has to do to keep the signal on Pin 6 at zero. The error amp output is positive during operation. The signal is the input to the pulse width modulator. The level of the voltage is proportional to the pulse width at the output of the PWM (Pulse Width Modulator chip U-15). 2. MA Regulator: The MA regulator is similar to the KV regulator in most of its functions. The MA reference is set by an on board potentiometer R-124. The power supply will deliver load current up to the setting on the pot. If more current is commanded by the load, the power supply functions in the current regulation mode. The pot is set for the power supply to deliver 660mA. The current feedback input is connected to J-6 Pins 3 and 5. The external resistor is selected to deliver 5 volts at 600mA to the current feedback circuit. The current feedback and current reference combine at the ma error amplifier U-21 Pin 6. It is the error amplifiers function when in control under current regulation to keep Pin 6 at zero. The Voltage and Current error amplifiers are tied by diodes CR13 and CR36 so that whichever regulator less power to the output is in control. When U-21 Pin 7 is more negative than U-16 Pin 7, the current regulator is in control. LED CR-53 is illuminated when the current error amp is in control. An optical coupler, U-17, has an LED that turns ON when the voltage error amp is in control. The optical coupler sends a signal to the filament circuit to transfer from the Bias operation to emission operation (J5 - Pins 14 and 15). A second signal is sent to the "out of regulation LED" on the high voltage control panel and extinguishes the LED (J4 - Pin 14). 3. Output Monitor Buffers: kv Monitor: The signal out of the kv feedback buffer, U-16 Pin 1, is designed to be 10V for 10,000 volts output. There is no calibration of the signal. There is calibration on the kv 34