8.2UHVANDHIGHVACUUMRIGHTANGLEVALVES->Page8.4

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1 UHV and High Vacuum UK: VALVES.UHVANDHIGHVACUUMGATEVALVES ->Page. UHVandHighVacuumGate-Manual UHV and High Vacuum Gate - Pneumatic with Position Indicator UHVandHighVacuumGate-SpareGasketSets High Vacuum Rectangular Gate - Pneumatic with Position Indicator.UHVANDHIGHVACUUMRIGHTANGLEVALVES->Page. SMC, Right Angle- Manual SMC, Right Angle- Pneumatic UHVRightAngle-StainlessSteel-Manual UHV Right Angle - Stainless Steel- Pneumatic. ALL METAL VALVES -> Page. UHVAllmetal-ManualRightAngle UHV Miniature Leak Valve UHV Precision Leak Valve -.-

2 . UHVANDHVGATEVALVES UHVandHighVacuumGate-Manual Pneumatic with Position Indicator As Distribution partner of HVA, Allectra offers a full range of Gate for HV and UHV applications. Morethan0yearsofexperiencemakeHVAvalvestoone of the leading valve manufacturers over the world. Manual and Electro-pneumatic versions Edge Welded Bellows plate movement SparepartsandInHouseService MillionCyclesasoption Specification Gate - Manual Sizes DN- DN0 DN- DN00ISO Material Stainless Steel Max. Temperature open 00 C closed 0 C Bellows Edge Welded Gasket Gate Viton Bonnet seal Metal(UHV)/ Viton(HV) Vacuum <* - mbarl/s Orientation any Cycles to first service For full dimensional information pleaseaskthesalesofficeforthe Gate Valve Data Sheet Specification Gate - Pneumatic Air Cylinder Aluminium-cylinder Air Pressure.-. bar adjustable closure speed Solenoid V DC Standard Position Indicator REED, V max. 0 ma UK: uk@allectra.com UHV and High Vacuum Gate MANUAL FLANGE THICKNESS PART NUMBER, -GV-C 0, -GV-C0, -GV-C 0, -GV-C0 0, -GV-C 00,0 -GV-C00 0, -GV-C0, -GV-K 0 0, -GV-K0 0 0, -GV-K0 -ISO, -GV-ISO 0-ISO, -GV-ISO0 -ISO, -GV-ISO 00-ISO, -GV-ISO00 0-ISO 0, -GV-ISO0 UHV and High Vacuum Gate PNEUMATIC WITH POSITION INDICATOR FLANGE THICKNESS PART NUMBER, -GV-C-P 0, -GV-C0-P, -GV-C-P 0, -GV-C0-P 0, -GV-C-P 00,0 -GV-C00-P 0, -GV-C0-P, -GV-K-P 0 0, -GV-K0-P 0 0, -GV-K0-P -ISO, -GV-ISO-P 0-ISO, -GV-ISO0-P -ISO, -GV-ISO-P 00-ISO, -GV-ISO00-P 0-ISO 0, -GV-ISO0-P,00.,00.,00.,00.,00,00.,00.,00.0,00., ,00.,00.,00.,00.,00,00.,00.,00.,00.0, From left to right: - -GV-C0, manual - -GV-C-P, peneumatic - -GV-C00, manual Gaskets and Bolts: Sec.... Clamps: Sec....

3 UHVandHighVacuumGate-Spare Gasket-Sets Rectangular Pneumatic Gate UK: UHVANDHVGATEVALVES. Allectra Gate are designed for convenient user servicing. The valve mechanism can be removed leaving thebodyinthevacuumsystem. All constructional bolts are metric. Spares are readily avilable. Specification for UHV/ HV Gate Spare Gasket Sets UHVGate SPARE GASKET SETS(Viton, Metal),00,00,00,00 0,00,00,00,00,00,00,00,00,00 Gaskets Spare Parts Replacement Gasket Sets include two Gaskets(UHV: Viton + Metal) A full range of Spare Parts including bellows and pneumatic cylinders are available on request. FLANGE GASKETS PART NUMBER -GVG-C 0 -GVG-C0 I -GVG-C 0 -GVG-C0 -GVG-C 00 -GVG-C00 0 -GVG-C0 HV /ISO Gate SPARE GASKET SETS(xViton) Spare Gate Valve Gasket set FLANGE GASKETS PART NUMBER -GVG-K 0 -GVG-K0 0 -GVG-K0 ISO -GVG-ISO 0ISO -GVG-ISO0 ISO -GVG-ISO 00ISO -GVG-ISO00 0ISO -GVG-ISO0 Specification for Rectangular Gate Vacuum HV - mbar Bakeout 0 C open and closed (Sensor 0 C max) Air cylinder Aluminium-cylinder Air Pressure.. bar adjustable closure speed Solonoid V DC Standard Position Indicator REED, V max. 0mA First service cycles High Vacuum Rectangular Gate PNEUMATIC WITH POSITION INDICATOR APERTURE THICKNESS PART NUMBER X 0 0 -RAGV-x0 X 0 -RAGV-x X 0 -RAGV-x 0 X 0 -RAGV-0x For full dimensional information on the Rectangular Gate, please ask Sales Office for the Data Sheet...ISO-F Bolt Sets: Sec....ISO Centring Rings: Sec

4 . Size Seal Leakrate Bake Temp. Port Length 0 0 Lifetime HV Right Angle Allectra represents the high quality SMC pneumatic and manual angle valve. With a standard lifetime of cycles they are suitable for demanding applications also in industrial applications. Here are only listed the basic versions, many options are available: Manual and Pneumatic versions versionswithssbody Normally open pneumatic valves -Step control with bypass(to avoid turbulences) Please ask for the full SMC catalogue! Specification SMC Right Angle - Aluminium Manual + Pneumatic / / 0/0/, Viton <x - mbarl/s 0 C/ 0 C as option (symmetric) from port to centre axis 0 mm 0 mm mm 0 mm mm manual/ Mio pneum. Pneumatic valves need an air pressureof-bar.asolenoidvalve V DC is included as standard. listed here are normally closed. UK: uk@allectra.com High Vacuum Right Angle Aluminium- MANUAL FLANGE SEAL PART NUMBER VITON -AV-K-V-ALU VITON -AV-K-V-ALU 0 VITON -AV-K0-V-ALU 0 VITON -AV-K0-V-ALU High Vacuum Right Angle Aluminium- PNEUMATIC FLANGE SEAL PART NUMBER VITON -AVP-K-V-V VITON -AVP-K-V-V 0 VITON -AVP-K0-V-V 0 VITON -AVP-K0-V-V VITON -AVP-ISO-V-V,00 0,00,00,00,00,00,00,00,00 Specification for Right Angle - Stainless Steel flanges, Manual + Pneumatic UHV Right Angle Stainless Steel MANUAL Size Seal Leakrate Bakeout temp Port Length 0 /0/ Viton <-mbarl/s 0 C closed (symmetric) from port to centre axis 0mm mm mm FLANGE SEAL PART NUMBER VITON -AV-C-V 0 VITON -AV-C0-V VITON -AV-C-V UHV Right Angle Stainless Steel PNEUMATIC,00 0,00.0,00 PleaseasktheSalesOfficefora full catalogue of the SMC valves! Inline are available as well. FLANGE SEAL PART NUMBER VITON -AVP-C-V 0 VITON -AVP-C0-V VITON -AVP-C-V,00,00.,00 Viton Sealed Right Angle -SMC Gaskets and Bolts: Sec.... Clamps: Sec....

5 All Metal - Manual Right Angle All Metal Right Angle valves are designed and specially built forallectrabyamajoruhvvalvecompany.theyare suitable for ultimate UHV service. Copper Gasket to Stainless Steel knife edge seal With two rotatable through hole flanges Bakeableto0 o C UK: uk@allectra.com ALL METAL VALVES. Stainless Steel construction with a replaceable Copper sealing pad.,00,00,00 0,00 Vacuum Leakrate Material Max. Temp. Specification All Metal UHV( - mbartoatmosphere) < - mbarl/s SS and Copper 0 C open 00 C closed Port length from valve axis mm 0 mm Sealing Pad Cu- replaceable through side port Conductance l/s 0 l/s UHV All metal MANUAL RIGHT ANGLE FLANGE TUBE PART NUMBER -. -AMV. -AMV-C -. -AMV0 0. -AMV0-C0 UHV All metal Replacement Copper Pads FLANGE SEAL PART NUMBER Cu -AMV-PAD Closure Torque 0 Cu -AMV0-PAD AllmetalRightAngleareprovidedwitha closuremark.theycanbeclosedbyaligningthe indicatormarksonthebodyandthetopnut. Alternatively they can be shut with a torque wrench. The torque required is as below: -AMV. to. Nm -AMV0. to. Nm -AMV0-C0 For full dimensional details, please asksalesofficefortheallmetal Valve Data Sheet...UHV Leak : Page

6 . UHV Miniature Leak Valve UHV Precision Leak Valve Allectra offers two types of UHV leak valves. Both types are an All metal bakeable construction Miniature type has Nickel diaphragm suitable for hot or corrosive gases or 0 flanges Spare parts available ALL METAL VALVES UK: uk@allectra.com Specification Miniature Leak Valve Vacuum UHV Minleak - mbar-l/sec Closedleak < - mbarl/s Max. Inlet Pressure bar Max. Conductance 0. l/s Max Temp open 0 C Max. Temp. closed 0 C Materials SS, Nickel Diaphragm Gas inlet Gas outlet T(tapped M) suitable for hot or corrosive gases Miniature UHV Leak Valve TappedFlangeinbaseofbody BASE FL. SIDE FL. PART NUMBER TAPPED -LVF-C 0,00 Specification Precision Leak Valve Vacuum UHV Minleak - mbar-l/sec Closedleak < - mbarl/s Max. Inlet Pressure bar Max. Conductance 0. l/s Max Temp open 0 C Max. Temp. closed 0 C Materials SS, Sapphire Seal Gas inlet Gas outlet T(tapped UNC) or 0 UHV All Metal Precision Leak Valve BASE FL. SIDE FL. PART NUMBER TAPPED -LVP-C 0 -LVP-C0.0,00.0,00 The Precision Leak valve with outlet flange is only availablewithanunctappedflange.asetofscrewsis delivered with this valve. For full dimensional details oftheuhvleak, please ask the Sales Office fortheleakdata Sheet All metal valves: Page... Gaskets and Bolts: Sec....

7 UK: MOTION& MANIPULATION Linear Drives, Rotary Drives and Manipulators. LINEAR DRIVES: MANUAL, MOTORIZED, PNEUMATIC -> Page. UHV bellows COMPACT Drives- Manual Knurled-Knob-Types UHV bellows COMPACT Drives- Stepper-Motor-Driven-Types UHV bellows Linear Drives- Manual Push-Pull-Types UHV bellows Linear Drives- Pneumatic-Types and other options. ROTARY MOTION DRIVES -> Page. Rotary Drives- UHV-Bellows-Types, Length from flange mm Rotary Drives- UHV-Bellows-Types, Extended length types Rotary Drives- Magnetically-Coupled-Type. Z-SHIFTERS(LINEAR TRANSLATORS) -> Page. Z-Shifters- UHV bellows type Z-Shifters-MiniZtype Rotary/Linear Push Pull- Differentially pumped. UHV MANIPULATORS AND ACCESSORIES -> Page. Compact UHV-Manipulators High Precision UHV-Manipulators UHV Long Travel Z-Translator Compact X-Y Stages Precision Rotary Drives Single axis Precision Rotary Drives Rotation + Linear. MAGNETIC TRANSTERS AND ACCESSORIES -> Page. UHV Magnetic Transporters High Vacuum Magnetic Transporters Guide Option for Linear Only Quick Access Doors No Viewport Quick Access Doors with Viewport Load Lock. WOBBLE STICKS AND T ALIGNERS -> Page. Simple Wobble Stick- no locking mechanism Compact Tilting Port Aligner Precision Tilting Port Aligner. In-VACUUM STEPPER MOTORS AND SLIDES -> Page. In-vacuum Stepper Motor/ Fine Vacuum Motor In-vacuum Stepper Motor/ High Vacuum Motor In-vacuum Stepper Motor/ UHV with special lubricant In-vacuum Stepper Motor/ UHV- NO lubricant In-vacuum Motorised Slides -.-

8 . Vacuum Temp. Materials Seal Bellows Shaft Shaft tip LINEAR DRIVES Linear Drives Manual and Motorised COMPACT type A new range of linear drives designed for demanding applications where precise positioning of components is required. Manual drive with knurled knob and position scale (min readout: µm) Stepper Motor version with scale and limit switches option Typical applications include shutter control. Specification Compact Drives UHV 0 C max(stepper Motors removed) Stainless Steel, Aluminium TIG weld Edge welded mm M tapped hole UK: uk@allectra.com MANUAL KNURLED KNOB types mmshaft mm -CLD-C 0 mm -CLD0-C 0 mm -CLD0-C Note: also available on 0 and other flanges,00,00 0,00 Specification Manual types Travel/ rev. mm Min readout µm Dimensions-pleaseaskforafulldatasheet MANUAL KNURLED KNOB types mmshaft mm -CLD-K 0 mm -CLD0-K 0 mm -CLD0-K Note: also available on and 0 flanges,00,00 0,00 Motor Wires Current max Travel Repeatability Manual knob Limit Switches Specification Motorised types phase stepper wire A per phase(bipolar wiring) µm/fullstep +/- µm typical included Optional UHV bellows COMPACT Drives STEPPERMOTORdriventypes-mmshaft mm -CLD-SM-C 0 mm -CLD0-SM-C 0 mm -CLD0-SM-C Note: also available on and other flanges UHV bellows COMPACT Drives STEPPER MOTOR with LIMIT SWITCH BOX mm -CLD-SM-LS-C 0 mm -CLD0-SM-LS-C 0 mm -CLD0-SM-LS-C Note: also available on and other flanges 0,00.00,00.,00 POA.0,00 POA -.- Drive with limit switch box. A single connector is used for stepper motor connection and mechanical limit switches Thestandardaxishasadiameterofmm withanmventedthreadinthetip. Min.Lengthis0mmfor,mmfor 0andmmforallversions. We can offer special axis with competitie prices. Please ask for your quote...rotary drives: Page...UHV Manipulators: Page...

9 Linear Drives, Push-Pull and Pneumatic Linear drives are designed for rapid full travel operation where fast response is required. Note that the drivers are interchageable and the Manual one can be exchanged for Pneumatic. Additionally a Manual knob allowing intermediate position control is available as an option. Manual version Quick Action Push-Pull Pneumatic option All metal edge welded bellows construction UK: uk@allectra.com LINEAR DRIVES. Specification Linear Drives Vacuum UHV Temperature 0 C max Materials Stainless Steel Seal weld Bellows Edge welded Shaft mm Cycles >.000 Operation Manual Push-Pull( Rotary Knob + Pneumatic actuator option) UHV bellows Linear Drives MANUAL PUSH-PULL types mm -LD-PP-C 0 mm -LD0-PP-C 0 mm -LD0-PP-C Note: also available on 0 and other flanges,00,00,00 bellows Linear Drives MANUAL PUSH-PULL types mm -LD-PP-K 0 mm -LD0-PP-K 0 mm -LD0-PP-K Note: also available on, 0 and other flanges,00,00,00 -LD0-PP-C, Push-Pull drive with 0 mm travel Specification Pneumatic types Air pressure - bar Voltage V DC VACand0VACoption UHV bellows Linear Drives PNEUMATIC types mm -LD-PM-C 0 mm -LD0-PM-C 0 mm -LD0-PM-C Note: also available on and other flanges,00,00,00 Pneumatic linear drive -LD0-PM-C with rotary knob exchange kit OPTION Position indicator Double axis UHV bellows Linear Drives OPTIONS PART NUMBER -LD-PI -LD-DD Solenoid V DC -SV-VDC Solenoid 0V AC -SV-0V Rot. Knob exchange kit Push-Pull exchange kit Pneumatic exchange kit...z Shifters: Page...In-vacuum Stepper Motors: Page... -KIT-RD-XXX -KIT-PP-XXX -KIT-PM-XXX,00 0,00,00,00 -.-

10 . Rotary Drives ROTARY MOTION DRIVES Allectra offers both bellows sealed type Rotary Dives and Magnetically Coupled types. A new High Torque Magnetically Coupled Drive is now available. The Bellows Type Rotary Drives are also offered in extended length versions. UK: uk@allectra.com Specification Bellows Type Rotary Drives Vacuum UHV Temp. 0 C max Materials Stainless Steel Bellows Edge welded Shaft mm with flat Shaft length mm Cycles >.000 FLANGE Rotary Drives UHV bellows types, Length from flange mm SHAFT DIAM. PART NUMBER mm -RD-C 0 mm -RD-C0,00,00 Rotary Drives UHV bellows types, Extended length types FLANGE SHAFT DIAM. PART NUMBER mm -RD-C-XX -RD-C 0 mm -RD-C0-XX Extended length versions are built to order. ThePartNumber"XX"referstothelength fromtheflangefacetothetip.pleasecall or the Sales Office for a quotation. Specification Magnetically Coupled Drives Vacuum Temp. Torque Shaft UHV to 0 C/ 0 C with magnet removed see product table 0mm long, M tapped hole at tip ømm()/ømm(0) Shaft concentricity > +/- 0.mm Max. Speed 00rpm Motor DC or Stepper option Pneumatic actuator option Rotary Drives Magnetically Coupled type FLANGE TORQUE PART NUMBER 0.Nm -MRD-CL 0.Nm -MRD-C 0.Nm -MRD-C0,00,00,00 The following options are available for Magnetically Coupled Rotary Drives -DCMotor - Pneumatic actuator - Stepper motor Please contact Sales Office for details High Torque magnetic rotary drive on 0 Flange. With more than.nm,itcanbe used for demanding applications UHV Manipulators: Page...In-vacuum Stepper Motors: Page...

11 Z-Shifters(Linear Translators) Z-Shifter Mini-Z type Differentially Pumped Push-Pull Vacuum Temp. Materials Bellows Flanges Through Bore UK: Z SHIFTERS. Allectra offers a range of devices for moving components inside the Vacuum. BellowsallmetalZ-Shifterswithtravelupto00mm MiniZ-Shifterswithtravelupto0mm AlowcostRotary/LinearPushPulldevicewithadouble O ring seal and differential pumping. Specification Z Shifters UHV 0 C max Stainless Steel Edge welded : both tapped 0: top flange tapped : through holes : mm 0: mm(mm on request) : mm Z-Shifters UHV bellows type 0 mm -LT-C0-0 0 mm -LT-C mm -LT-C mm -LT-C mm -LT-C mm -LT-C-0 0 mm -LT-C-0.0,00.,00.,00.,00,00,00,00 Z-Shifters UHVMiniZtype mm -LTM-C- 0 mm -LTM-C-0 -LTM-C- -RLHD00-K0 00mm Travel Version without pumping port Long travel O-ring sealed push-pull drive Rotary/LinearPushPull00mm/00mmtravel Differentially pumped dual O rings 0 00 mm -RLD00-DP-C0 00 mm -RLD00-DP-K 0 00 mm -RLD00-DP-K0 NEW,00,00,00 -RLD00-DP-C0 with Pumping Port 0 00 mm -RLHD00-DP-C mm -RLHD00-DP-K mm -RLHD00-DP-C mm -RLHD00-DP-K0 Other lengths are available on request. Versions are availiable also without pumping port.,00,00,00,00...x-y-z Manipulators: Page...Rotary drives: Page

12 . UHV Compact Manipulator CMX The Compact Manipulator features: UHV Compatibility bakeable to 00 C 0Flangewithmm throughbore Optionalor0 baseflange UHV MANIPULATORS +/-mm of X/Y movement by micrometer High Precision X-Y-Z Manipulators HPMX 0mountingflangewithxaccessoryports Single and dual axis Precision Rotary Drive options Specification Compact X-Y-Z Manipulators Vacuum Materials Temperature Bellows X-Y Operation Flange Clear Bore Travel 0mm 0mm 0mm 00mm UHV Stainless Steel, Anodised Aluminium 00 C max. Edge Welded Micrometer driven Manual with mm-scale for Z travel with Tapped holes at top and with through holes at bottom mm Overall height 0mm mm mm 0mm UK: uk@allectra.com -CMX-0-C0 with base flange option COMPACT UHV MANIPULATORS TappedFlanges,Boremm 0 0 mm -CMX-0-C0 0 0 mm -CMX-0-C0 0 0 mm -CMX-0-C mm -CMX-00-C0 Note: or 0 bottom flange available to order.,00.,00.0,00.,00 Specification High Precision X-Y-Z Manipulators Vacuum UHV Materials Stainless Steel, Anodised Aluminium Temperature 00 C max. Bellows Edge Welded X-Y Cross Roller Slides with Precision Micrometers +/-.mm (+/-mm option) Z Re-circulating ball guides 0mm up to 00mm Flange 0 tapped at top and 0 through holes at bottom Accessoryports x Clear Bore Standard mm Wide bellows option mm HIGH PRECISION UHV Manipulators 0T top flange, 0 bottom flange Z TRAVEL BORE PART NUMBER 0 mm mm -HPMX-0 0 mm mm -HPMX-0 0 mm mm -HPMX-0 00 mm mm -HPMX-00 0 mm mm -HPMX-0-W 0 mm mm -HPMX-0-W 0 mm mm -HPMX-0-W 00 mm mm -HPMX-00-W Allectra can offer custom built sample heating and cooling stages for many appliactions. Please call or Sales Office to discuss your requiremnents Detail of a version with additional springs Precision Extended Rotary Drives: Page....

13 UHV Z Axis Long Travel Translator UK: uk@allectra.com UHV MANIPULATORS. A range of UHV compatible Linear Translators with travel from0mmupto00mm. 0 Through Hole Flanges top and bottom ClearBoreofmm 0. mm Z resolution Motorised option Vacuum Temp. Materials Flanges Bellows Z resolution Drive Screw Specification Long Travel Z Stages Compact X-Y stage UHV 0 C max Stainless Steel, Anodised Aluminium 0 with through holes attopandbottom Edge welded mm clear bore 0. mm -axis type LONG TRAVEL Z Shifters UHV bellows type 0 0 mm -ZLT-C mm -ZLT-C mm -ZLT-C mm -ZLT-C mm -ZLT-C mm -ZLT-C0-00 +/-mm of X-Y travel 0T, T or 0T tapped flanges top and bottom LongtravelTranslatorsmaybemountedontopoftheX-Y stages to form a Long travel manipulator. Vacuum Materials Temperature Bellows X-Y Flange Clear Bore Specification Compact X-Y Stages UHV Stainless Steel 00 C max. Edge Welded +/- mm Micrometer driven,tapped holes at top and bottom 0 mm 0 mm 0 0mm Compact X-Y Stages Tapped Flanges FLANGE BORE PART NUMBER 0 mm -XY--C0 0 mm -XY--C 0 0 mm -XY--C0 0,00 Precision Rotary Drives Precision extended length Rotary Drives are custom made to suit the application. They are available with Primary Rotation only or Primary and Secondary for use with Sample Holders which have azimuthal motion(tilt) as well as Primary Rotation. Precision Rotary Drives Length to order UHV bellows types, Single axis FLANGE SHAFT DIAM. PART NUMBER 0. mm -PRD-C0-XX Precision Rotary Drives Length to order UHVbellowstypes,ROTATION+LINEARmm FLANGE SHAFT DIAM. PART NUMBER 0.0&.0 mm -PRD-C0-XX -PRD-C0-XX... thermocouple feedthroughs: Sec....Kapton Wire: Sec

14 . Magnetic Transporters- High Vacuum& UHV UHV Magnetic Transporters are ideal for long travel applications where High Precision is not required. A typical application is sample transfer from Preparation Chamber to Analysis Chamber. UHVtypesaresuitableforbakingto00 Candcanbe fitted with a guide to prevent rotary motion if required. For special applications, Allectra can also supply other types of Transporters including Rack and Pinion types and custom sample stages General Specification Magnetic Transporters Vacuum Materials Coupling Decoupling force Shaft End fitting Temperature UHV version Standard Lubricant UHV version Standard MAGNETIC TRANSTERS UHV Stainless Steel Magnetic 0N. mm M tapped hole 00 C max C max none 0-MCOTE- UK: uk@allectra.com UHV Magnetic Transporters- No lubricant Linear and Rotary 0 00 mm -MTP-000UHV 0 00 mm -MTP-000UHV 0 00 mm -MTP-000UHV 0 00 mm -MTP-00UHV.,00.,00.0,00.,00 -MTP-000UHV HIGH VACUUM Magnetic Transporters Linear and Rotary 0 00 mm -MTP mm -MTP mm -MTP mm -MTP-00.,00.,00.,00.,00 Allectra can also offer special types of Transporters including - Dual rotatation axes -Rackandpinion Please call or Sales Office with details of your requirement Allectra offers a design and build service for sample holder accessories for use with Magnetic Transporters. Existing designs include Sample Cassettes and heated Plates. ALL Magnetic Transporters Guide Option for Linear Only 0 ALL -LG-OPT, Custom made heater...fast Entry Load Locks: Sec.... Gate : Sec....

15 Quick Access Doors and Load Locks UK: QUICK ACCESS DOORS. Allectra's QAD series offer unequalled ease of access to the Prep. Chamber work area with maximum open diameter and maximum View Diameter. TheQuickAccessDoorhasaworkaccessdiameter of0mm,theoptionalviewporthasaviewdiameterof mm. An optional Bakable Micro-switch allows the door to be coupled into safety circuits to prevent, for instance, incorrect and possibly hazardous valve opening.,00,00.,00,00.00,00.0,00 General Specification 0-QAD Vacuum UHV Materials SS, Aluminium hinge Viewport 0 glass Viewport Seal Metal sealed, welded Door seal Viton O ring Temp. 00 C max Quick Access Doors NO Viewport Viton door seal, includes Bolt Set FLANGE ID(mm) PART NUMBER 0 0-QAD 0 0-QAD0 0 0-QAD FLANGE Quick Access Doors with Viewport Viton door seal, includes Bolt Set VIEW DIAM. PART NUMBER 0 mm 0-QAD-VP 0 0 mm 0-QAD0-VP mm 0-QAD-VP Quick Access Doors have a tapped mounting positionforamicroswitchtoenablethedoorto be coupled into machine safety circuits. The bakeable microswitch 0-SWITCH-(page 0)canbeusedforhightemperature applications. 0-QAD-VP General Specification 0-LLC see Section Load Lock STAINLESS STEEL with Viton Door& Viewport DOOR VALVE FL. PART NUMBER 0-LLC---VP 0 0-LLC-0--VP LLC-0-0-VP.00,00.00,00.0, LLC--0-VP.0,00 0-LLC---VP.0,00 0-LLC-0--VP Complete Load locks Rectangular Load Locks...Complete Fast Entry Locks: Sec....Standard : Sec

16 . WOBBLE ST./ T ALIGNERS Wobble Sticks and Port Aligners Wobble Sticks: Allectra can offer a selection of Wobble Sticks both single and double action with Pincer Grip Jaws or In-Line-Jaws. Please call Sales Office for details and prices. Port Aligner: This bellows stage allows small adjustments of alignmenttobemade.itisusefulforelectrongunsand similar devices. Please call Sales Office. UK: uk@allectra.com -PA-C0 General Specification Wobble Sticks Vacuum UHV Materials L SS for bellows and flanges Rod, mm ø, outer length mm LengthinVac....mmfor0mmversion...mm for 0mm version Specification Port Aligner Vacuum UHV Temp. -PA: 00 C, -PPA: 0 C Materials L SS for formed bellows Top Flange 0 or through holes Bottom Flange 0T or T tapped Tilt mechanism Rods with position adjustment allowing +/- tilt and +/-mm length Micrometers Option PPA models only Overall height 0: 0mm, : 0mm Simple Wobble Stick No locking mechanism FLANGE ANGLE PART NUMBER 0 0 FLANGE 0 mm +/- 0-SWS0-C0 0 mm +/- 0-SWS0-C0 Compact Tilting Port Aligner Positionalrodswith+/- CLEAR BORE PART NUMBER 0 mm -PA-C0 mm -PA-C,00,00 0-SWS0-C0 0-SWS0-C0,00,00 -PPA-C0 ThePrecisionPortalignerallowsatiltof+/- andashiftof+/-mm.bothdirections are controlled by micrometer screws -PA-C FLANGE Precision Tilting Port Aligner Micrometer adjustment CLEAR BORE PART NUMBER 0 mm -PPA-C0 mm -PPA-C,00, Z Shifters (Linear Translators) : Page. &...

17 In-vacuum Stepper Motors UK: IN-VACUUM STEPPER MOTORS. Allectra offers a range of In-Vacuum Stepper Motors both HighVacuumandUHVTypes.Thesemotorsofferan alternative to mechanical linkages and bellows in vacuum. Allectra In-Vacuum Motors are conventional phase stepper motors with 00(optionally 00) steps per revolution. Theymaybedrivenbyawiderangeofcommercially available lers and Drivers and are suitable for Half Step and Micro-Step systems. Values given here are based on the standard Bi-Polar running mode. General Specification In-vacuum Stepper Motor Electrical phase, wire Stepper Motor Materials SS housing, Kapton wire insulation Phase current. A(Standard) Sizes mm up to mm diameter Holding Torque see product tables Rear Shaft Exten. Standard(motors can be ordered without shaft extension as an option) Steps per Revolution 00 Standard(00 as Option) In-vacuum Stepper Motor: 00 steps per revolution FINE VACUUM Motor SIZE HOLD TORQUE PART NUMBER. mnm -SM-CL-00-. mnm -SM-CL mnm -SM-CL-00-. In-vacuum Stepper Motor: 00 steps per revolution HIGH VACUUM Motor SIZE HOLD TORQUE PART NUMBER. mnm -SM-HV-00-. mnm -SM-HV mnm -SM-HV-00-. Vacuum Specification Base Vacuum Motor type FineVacuum - mbar,max.0 C HighVacuum - mbar,max.00 C UHV(lubricated) - mbar,max.0 C UHV(dry) - mbar,max.0 C built-in K Type-UHV motors only RadiationRes. to J/kg -UHVtypesonly In-vacuum Stepper Motor: 00 steps per revolution UHV with special lubricant SIZE HOLD TORQUE PART NUMBER. mnm -SM-UHVG-00-. mnm -SM-UHVG mnm -SM-UHVG-00-. In-vacuum Stepper Motor: 00 steps per revolution UHV NO lubricant SIZE HOLD TORQUE PART NUMBER. mnm -SM-UHV-00-. mnm -SM-UHV mnm -SM-UHV-00-. Options for Motors: 00 steps per revolution- not available for all types Current per phase 0.A, 0.A,.A,. A, A (depending on size) Cryo-Motors for K to 0 C Reduction Gears : down to : Back side view with rear shaft and outgassing holes Other size motors on request...motorised Vacuum Linear Slides: Page... Feedthroughs: Sec

18 . Miniature Motorised Slides IN-VACUUM SLIDES Designed to have smallest possible size with reasonable resolutionandprice,thisslideoffers0mmtravelforlow loads(typically0g)withanominalresolutionof.µm perfullstep.typicalrepeatabilityis<µm. The vacuum range depends on the choice of Stepper Motor. The slide is UHV compatible. Three different motors are available: HV, UHV-G(with special lubricant) and a drylubricant UHV version. UK: uk@allectra.com General Specification Miniature Slide 0 mm BaseVacuum Material Resolution Dimensions Temp. rating HV - mbar UHV(G) - mbar UHV - mbar Stainless Steel, PEEK, µm/ full step xx0mmmax. 0 C (UHV type only) In-vacuum Motorised Slide XAXIS VACUUM TRAVEL PART NUMBER HV 0 mm -SLIDE0-HV UHV-G 0 mm -SLIDE0-UHVG UHV 0 mm -SLIDE0-UHV In-vacuum Motorised Slide X-Y Slide VACUUM TRAVEL PART NUMBER Allectra also offers an X-Y-table which can pass througha0flange(mmørequired).this slidegivesmmtravelinbothaxes.largermotors are available which give more force or higher speedforhigherloadsuptoamaximum00g. HV mm -SLIDEXY-HV UHV-G mm -SLIDEXY-UHVG UHV mm -SLIDEXY-UHV Allectra offers complete motorised assemblies ready to run, including wiring, feedthroughs and, if required, Stepper Motor ler. Please call or Sales Office for details. Shielded twisted pair wires(page ) are very suitable for In-vacuum Motor wiring. Allectra can offer wiring and Feedthroughs for Invacuum Motors. Please call or Sales Office Feedthroughs: Sec....Shielded Wiring: Sec....