PRODUCT CATALOGUE

Transcription

1 PRODUCT CATALOGUE

2 EDWARDS OUR MARKETS Using our experience and expertise, we can provide the best vacuum solutions for your application needs. Chemical and Process Industries 7 Display 11 Industrial Vacuum 13 LED 21 Photovoltaic 23 Power Generation 25 R&D 29 Scientific Instruments 35 Semiconductor Processing 39 Steel Degassing 45 Shop online at shop.edwardsvacuum.com Contact our customer service team 3.

3 EDWARDS OUR PRODUCTS Small Pumps and Pumping Systems 49 Small Pumps and Pumping Systems 50 Electrical Data 51 Small Pumps and Accessories: Frequently Asked Questions 57 Small Pumps: Application and Accessory Information 58 Small Dry Pumps 61 nxds Dry Scroll Pumps 62 XDS Scroll Vacuum Pumps 68 XDD1 Diaphragm Vacuum Pumps 72 D-LAB Diaphragm Vacuum Pumps 75 Small Oil Sealed Pumps 81 E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps 82 RV Oil Sealed Rotary Vane Pumps 86 RV ATEX Oil Sealed Rotary Vane Pumps 94 EM18 and 28 Oil Sealed Rotary Vane Pumps 97 EM18 and E2M18 Atex Oil Sealed Rotary Vane Pumps 3 Medium and Large Dry Pumps and Systems 5 Drystar 80 Pump and Booster Package 9 ixl Dry Pump Systems 112 GX Dry Pump Systems 115 ixh Dry Pump Systems 118 GXS Dry Pumps 121 GXS/pXH Dry Pumps 131 IDX 00/1300 Dry Pumps 137 EPX High Vacuum Primary Pumps 141 Mechanical Boosters 147 EH Mechanical Booster Pumps 151 pxh Mechanical Booster Pumps 158 Stokes 6 Series Mechanical Booster Pumps 160 HV8000 Mechanical Booster Pump 169 HV30000/40000 Mechanical Booster Pumps 173 Medium and Large Oil Sealed Pumps 177 ES Rotary Vane Pumps 179 ES Pump and Booster Combinations 187 E2M40 and 80 Oil Sealed Rotary Vane Pumps 194 E2M175 and 275 Oil Sealed Rotary Vane Pumps 199 EM Pump and EH Booster Combinations 207 Stokes Microvac Series Oil Sealed Rotary Piston Pumps 208 Stokes Microvac ESI Series Oil Sealed Rotary Piston Pumps 214 MV Series Vertically Oriented Microvac Booster Combinations 220 MV Series Oil Sealed Piston Pumps and Mechanical Booster Combinations 221 Stokes 1700 Series Mechanical Booster Combinations 222 Dry Pumps and Systems for Hazardous Applications 231 CXS Chemical Dry Pumps 233 CDX Dry Vacuum Pumps 239 EDP Chemical Dry Pumps 244 Turbomolecular Pumps 249 EXT/nEXT Turbo Pumps next Turbomolecular Pumps 253 EXT Turbomolecular Pumps 258 T-Station 75 Turbopumping System 262 next Turbopumping Station 265 Turbo and Active Gauge (TAG) Controller 267 TIC Turbo and Instrument Controller 269 TIC Relay Boxes 272 STP Turbo Pumps STP Magnetically Levitated Turbomolecular Pumps 275 STP Integrated Controller Pumps 278 STP Ultra High Vacuum Pumps 293 STP High Throughput pumps

4 Oil Vapour Diffusion Pumps 313 HT Diffusion Pumps 316 Vapour Booster Pumps 323 Vapour Pumps for Scientific Instruments and R&D Applications 327 Liquid Ring Pumps for the Power Industry 333 Liquid Ring Pumps for The Power Industry 334 UHV Pumps 341 Gamma ion Pumps 342 Combined Titanium Sublimation Pumping (TSP) and Non-Evaporable Getter (NEG) 345 Digitel ion Pump Controllers 349 Vacuum Instruments 353 Vacuum Measurement and Control Systems 354 APG0 Active Pirani Vacuum Gauge 358 APGX-H Active Linear Convection Gauge 360 ATC Active Thermocouple Gauge 362 ASG2 Active Strain Gauge 365 AIM Active Inverted Magnetron Gauge 367 WRG Active Wide Range Gauge 370 AIGX Active Ion Gauge 373 napg Active Pirani Gauge 376 naim Active Inverted Magnetron 378 nwrg Wide Range Gauge 380 CG16K Dial Gauge 382 IS16K Vacuum Interlock Switch 384 VS16K Adjustable Vacuum Switch 386 TIC Instrument Controller 388 Profibus Communications Module 390 ADC Active Digital Controller 392 GasCheck G3 394 Vacuum Fittings and Valves 397 Speedivalve 399 IBV Series Vacuum Ball Valves 401 PVMK Manual Operation Right Angle Isolation Valves 403 IPVMK Manual Operation In line Isolation Valves 405 PVPK Pneumatic Operation Right Angle Isolation Valves 407 IPVPK Pneumatic Operation In-Line Isolation Valves 4 PVEK Solenoid Operation Right Angle Isolation Valves 413 IPVEK Solenoid Operation In-Line Isolation Valves 416 LCPVEK Solenoid Operation Isolation V alves 419 BRV Backing/Roughing Valves 421 SIPVP Soft-Start Isolation Valves 423 BGV Manual Gate Valves 426 BGV MK2 Pneumatic Gate Valves 429 GV Manual and Pneumatic Gate Valves 434 QSB Quarter Swing Butterfly Valves 438 AV5A Air Admittance Valve With Couplings 441 AVK Air Admittance Valves 443 IPVAEK Air Admit Valve NW 445 LVK Leak Valve NW Flanges 447 Electropneumatic Control Valves 449 Vacuum Components and Flange Fittings 451 Cord and Tubing 487 Lubricants and Sealants 489 Oils, Fluids, Sealants and Greases 490 Mechanical Pump Oils 491 Mechanical Pump Oil selection chart 493 Vapour Pump Fluids 495 Edwards Silicone Fluids 496 Vapour Pump Fluid Selection Chart 498 Greases and Waxes 499 Exhaust Gas Management 501 Exhaust Management for Semiconductor Processes 502 Product Selection Guide 504 Service 507 Global Support from Edwards 5 Guide to Pump Selection and Pipe Installation 511 Conversions 515 Material Safety Data Sheets 516 Shop online at shop.edwardsvacuum.com Contact our customer service team 5.

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6 CHEMICAL AND PROCESS INDUSTRIES MORE THAN PUMPS, COMPLETE VACUUM SOLUTIONS Chemical and Process Industries 8 Pharmaceuticals Speciality and Fine Chemicals Petrochemicals Shop online at shop.edwardsvacuum.com Contact our customer service team Chemical & Process Industries 7.

7 CHEMICAL AND PROCESS INDUSTRIES Many chemical processing and manufacturing applications require vacuum, for a wide variety of purposes and benefits. Vacuum pumping systems need to handle organic solvents and compounds in a reliable and safe way while ensuring control and reduction of environmental pollution and cost of ownership. Our expertise in chemical processes and applications has allowed us to design rugged, non-contacting dry mechanisms able to pump a comprehensive range of organic and inorganic materials, flammables and corrosives, with excellent liquid and solids handling capabilities, ensuring high reliability in every condition. Our dry pumps are designed to minimise maintenance interventions and to lower utilities consumptions for a low cost of ownership. Pumping Technology Chemical Dry Pumps Mechanical Boosters Rotary Piston Pumps Rotary Vane Pumps Key Applications Liquid Ring Pumps Steam Ejectors Normal Distillation Short Path Distillation Molecular Distillation Reactor Service Central Vacuum (flammables and corrosives) Fatty Acid Deodorisation, Biofuels Drying, Evaporation, Crystallisation, Concentration Gas Recovery/Recirculation Degassing Absorption, Adsorption, Desorption Pervaporation Solvent Recovery Isocyanates Production Impregnation Polymers and Plastics Production Paints, Pigments, Coatings and Ink Production Soaps/ Detergents Production Ethylene Oxide Sterilisation Oil Treatment Plants Dewatering and Filtration Flammable and Corrosive Gases Lowest Cost of Ownership (Typically) Preferred Technology or Widespread Use High Cost of Ownership (Typically) Some Applications Highest Cost of Ownership (Typically) 8. Chemical & Process Industries

8 Recommended Technology: CXS Dry Screw Vacuum Pumps CXS is Edwards most advanced chemical dry pump featuring new tapered-screw technology for exceptional energy efficiency and performance. Low installation costs integral controller and safety systems for Plug and Pump, flexible operation Robust and reliable cutting edge screw technology for corrosion-free operation and robust liquid and solids handling during process upsets Environmentally friendly smooth, quiet running, <64 db(a), no effluent generation and low utilities consumption For non-hazardous applications we can offer our GXS range of pumps incorporating the same patented tapered-screw technology used in CXS. CDX Chemical Dry Pumps The CDX00 pump is optimised for processes requiring large pumping speeds, delivering a 900 m 3 h -1 pumping speed and an ultimate vacuum of mbar. Industry proven, tried and tested specifically designed for larger, continuous chemical processes Peace of mind in continuous processes tolerant to process malfunctions High uptime designed for in situ preventive maintenance Benefits: Robust and environmentally friendly clean, reliable dry vacuum solutions Low cost of ownership low maintenance and utilities costs Not just pumps, complete solutions fully engineered vacuum systems Process repeatability and traceability programmable vacuum control and storage of pump parameters and events High reliability and productivity high up-time solutions No cross contamination clean ability of swept volume with automatic solvent flush routines Configured for your process optimum solution for your application Low carbon footprint and cost of ownership energy saving technology High up-time and low maintenance robust, corrosion free operation Industry proven vacuum solutions specifically designed for large, continuous petrochemical processes Peace of mind tolerant to process malfunctions Environmental friendly reduced maintenance cost and low environmental impact EDP Chemical Dry Pumps In the 1980s, Edwards successfully pioneered the use of environmentally friendly dry vacuum pumps with the EDP. Industry proven, tried and tested specifically designed for chemical applications Designed and tested for safety and reliability several built-in controls and protection Low cost of ownership easy maintenance, low utilities consumption Shop online at shop.edwardsvacuum.com Contact our customer service team Chemical & Process Industries 9.

9 Pharmaceuticals Our first dry pump was installed in a pharmaceutical application in 1988 and it was never replaced. We have vast experience in the pharmaceutical sector, typically covering the production of active pharmaceutical ingredients (APIs). Our latest Dry Pump range, the CXS, is the most appropriate answer to pharmaceutical customers needs. The advanced tapered screw technology and the on-board controller with extensive communication and automated control capabilities will deliver: Applications: Distillation Reactor Service House/Central Vacuum System Solvent Recovery API Production Ethylene Oxide Sterilisation Dewatering and Filtration Flammable and Corrosive Gases Speciality and Fine Chemicals Our application specialists have a thorough knowledge and understanding of customer processes in the specialty and fine chemicals industries. Our combination of applications expertise, product portfolio, engineering strength and global presence puts us in a unique position to be able to work with you to design the best solution for your process. Applications: Normal Distillation Short Path Distillation Molecular Distillation Reactor Service Central Vacuum (flammables and corrosives) Fatty Acid Deodorisation Biofuels Drying, Evaporation, Crystallisation, Concentration Degassing Absorption, Adsorption, Desorption Petrochemicals Pervaporation Solvent Recovery Isocyanates Production Impregnation Polymers and Plastics Production Paints, Pigments, Coating and Ink Production Soaps/Detergents Production Ethylene Oxide Sterilisation Oil Treatment Plants Dewatering and Filtration Flammable and Corrosive Gases We are world leaders in designing pumps and pumping systems for safe pumping of hazardous inflammable material. We have worked with industries doing aromatics extraction and production of BTX, (Benzene, Toluene, Xylene), LAB, (Linear Alkyl Benzene), styrene, polymer, adhesives and MMA (Methyl Meth Acrylate) and provided customised solutions for their processes. Applications: Distillation Reactor Service Drying, Evaporation, Concentration Degassing Absorption, Adsorption, Desorption Solvent Recovery Polymers and Plastics Production Flammable and Corrosive Gases Aromatics Production. Chemical & Process Industries

10 DISPLAY EXPERIENCE YOU CAN TRUST Display 12 Shop online at shop.edwardsvacuum.com Contact our customer service team Display 11.

11 DISPLAY Display manufacturing processes require vacuum and abatement equipment capable of supporting huge processing chambers and delivering high gas-flow rates with maximum reliability. Vacuum pumps are needed to pump toxic, pyrophoric and corrosive gases, and handle a large amount of solid process by-products that are formed in the manufacturing process chambers. Our technology leadership is clearly demonstrated by our customers who time and time again select us as their partner of choice. Our experience in FPD has enabled us to develop solutions which solve customers process issues and optimise productivity. Our extensive range of dry and turbomolecular pumps (TMPs) are designed to maximise substrate throughput and ultimate zero humidity process condition, while minimising power, footprint and weight. Combined with our exhaust management systems, our pumps are capable of managing high gas flows and the efficient abatement of toxic and flammable gases, with long service intervals and the potential to connect multiple chambers to one tool, for a complete integrated vacuum and abatement solution. The introduction of new innovative designs of dry pump, including ixh, ixl and ixm, has reduced the number of process pumps required per chamber yet still delivers high production throughput with low power input there is also a Green Mode for reduced utilities during idle periods. Enabling the future demand for higher-resolution, more interactive, ultra-slim and flexible devices challenges us to develop smarter solutions which will reduce the cost of ownership and improve process uptime. Whatever the display future holds, you can rest assured we will rise to the challenge and continue to be a key enabler in display manufacturing processes. Applications Load Lock Transfer Test PVD Cell OLED Evaporation OLED Encapsulation Touchscreen Lamination Coater Developer Dry Pumps Implant Etch PECVD ixh ixl250/500/750 GXS igx STP-iXR Series Turbo Pumps STP-iX Series STP-iXA Series STP-iXL/L Series Abatement Systems ATLAS SPECTRA A/C NEPTUNE Integrated Solutions EZENITH ZENITH SPECTRA ZW2 12. Display

12 INDUSTRIAL VACUUM MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE Industrial Vacuum 14 Metallurgy 15 Heat Treatment 16 Industrial Coating 17 Industrial Drying 18 Lithium-Ion Battery Manufacturing 19 Shop online at shop.edwardsvacuum.com Contact our customer service team Industrial Vacuum 13.

13 INDUSTRIAL VACUUM We encompass a vast range of subsectors and applications within the industrial vacuum market. With our breadth of experience in the industrial market we understand the challenges that vacuum pumps face with each application as well as customer key drivers, and are able to recommend the best technology and vacuum solution in each industrial process. Our approach and our vacuum systems help to make manufacturing cleaner, smarter, more economical and environmentally friendly. Benefits: Right solutions for your application broad product portfolio and application expertise Configured to your needs choice of individual vacuum pumps or customised combinations Predictable performance advanced pumping modelling techniques Your reliable partner close to a century of vacuum experience Leak Detection Gas Cylinder Filling Vacuum Insulation Panels / Glass Applications General Industrial Cryo Interspace Evacuation Food Processing Oil / Resin Degassing Plasma Cleaning Sterilising Gas Sterilisation House Vacuum Space Simulation Chambers Gas Recovery / Circulation Pumping Technology STP Turbomolecular Pumps GXS Dry Pumps and MAXX Systems Microvac Piston Pumps and Booster Combinations ES Single Stage and EH Booster Combinations EM Double Stage and EH Booster Combinations Recommended technology Conventional technology 14. Industrial Vacuum

14 Metallurgy Vacuum metallurgy encompasses all the processes involving the treatment of liquid metallic materials from alloying (the preparation of a metallic solid solution) to casting (where the liquid alloy solidifies in the desired shape). Melting, refining and casting processes involve vacuum pumps handling large amounts of dust and debris. We know that selecting the right pumping mechanism is a critical decision high reliability is essential, while maintaining a low cost of ownership. Our engineers will help you select the best system to cope with the challenges of your process. Benefits: High reliability robust technologies to cope with harsh process challenges Variety of offerings to suit your investment choice of dry and oil sealed pumps Increased productivity low maintenance and high uptime solutions Applications: Vacuum Induction Melting VIM Vacuum Arc Remelting VAR Electroslag Remelting ESR Precision Investment Casting PIC Metal Injection Moulding MIM Sintering Casting Applications Metallurgy Alloying Vapour Booster Pumps VIM VAR ESR PIC MIM Sintering HT Diffusion Pumps Pumping Technology GXS Dry Pumps and MAXX Systems Microvac Piston Pumps and Booster Combinations Recommended technology Conventional technology Mid-range dry pumps are available for small scale or pilot processes Shop online at shop.edwardsvacuum.com Contact our customer service team Industrial Vacuum 15.

15 Heat Treatment Heat treatment encompasses all the processes carried out on the shaped metallic solid to alter the physical and sometimes chemical properties of the material. Applications: Carbon Vapour Impregnation CVI Low Pressure Carburising LPC Low Pressure Nitriding LPN Nitro Carburising Plasma Nitriding PN Welding Vacuum Brazing VB Quenching Tempering Annealing Benefits: Value for investment cost-effective rotary piston and single stage oil sealed pumps Better end product quality specialised solutions for oil-free clean vacuum Single source partner packaged offerings including high vacuum secondary pumps CVI LPC Propane Applications Heat Treatment Reactive Assembling Heat Treatment LPC Acetylene LPN Nitro Carburising PN EBW Plasma Welding VB Quenching Tempering Annealing Pumping Technology STP Turbomolecular Pumps HT Diffusion Pumps GXS Dry Pumps & MAXX Systems Microvac Piston Pumps & Booster Combinations ES Single Stage & EH Booster Combinations Recommended technology Conventional technology Mid-range dry pumps are available for small scale or pilot processes 16. Industrial Vacuum

16 Industrial Coating Whether fast evacuation of load-locks is required or high performance process pumping in the high vacuum region, we have the right range of product technology configured to your needs. Benefits: Optimum solution for your application environmentally friendly dry vacuum technologies or cost effective oil sealed pumps and combinations Assured and reproducible performance advanced modelling techniques for fast load lock and high vacuum process Higher productivity advanced communications and control technology Low cost of ownership energy-saving vacuum technology and minimal planned maintenance Display Coating Optical Opthalmic Coating Roll Web Coating Applications Coating Surface Coating Plasma Deposition Reflective Decorative Coating Hard Coating CVD DLC Surface Activation Plasma Spary Glass Coating STP Turbomolecular Pumps Pumping Technology HT Diffusion Pumps GXS Dry Pumps and MAXX Systems Microvac Piston Pumps and Booster Combinations ES Single Stage and EH Booster Combinations EM Double Stage and EH Booster Combinations Recommended technology Conventional technology Mid-range dry pumps are available for small scale or pilot processes Applications: Vacuum coating processes involve providing fast pump-down of main loading chambers to a certain degree of pressure using roughing vacuum pumps combined with high displacement blowers. The following stages involve providing high vacuum pumping of the chamber with injection of process gases that then have to be pumped out while ensuring stable and uniform coating on the substrates. There are several coating applications, including: Glass coating glass coating systems for low emissivity processes on glass sheets comprise of large chambers demanding fast cycle times, high vacuum requirements to yield superior layer uniformity, high throughput and reduced cost of ownership. Display coating sputtering coating processes for display applications require precision techniques to ensure ultra-thin layers of metals and Trans Conductive Oxide materials like ITO (indium tin oxide) on display substrates. Extremely reliable vacuum systems with the ability to manage high gas throughput are demanded for this application. Roll coating modern roll coating systems used for manufacturing printed electronic circuits on polymer films and flexible substrates need strong vapour handling capability, and a high ultimate vacuum. Optical coating optical coatings that include reflective, anti-reflective or metallic mirror coatings, using different processes thermal deposition, electron beam or sputtering require stable vacuum systems in a compact foot print. Hard coating hard coating processes enhance the durability of the components by strengthening them with tough materials that need to be deposited in a high vacuum atmosphere. This requires reliable vacuum systems that ensure a long lifetime of the components. Shop online at shop.edwardsvacuum.com Contact our customer service team Industrial Vacuum 17.

17 Industrial Drying As experts in vacuum technology, Edwards has an in-depth understanding of vacuum drying processes and the importance of correct pump selection and sizing, as well as the foreline and exhaust design to ensure the evaporated liquid is efficiently managed and reused if required. With its broad portfolio of vacuum pumps, utilising a variety of different mechanical technologies, Edwards has all the tools necessary to optimize your drying system for performance, cost and reliability. Benefits: Higher reliability robust dry technology to cope with high vapour load Variety of offerings to suit your investment choice between dry and oil sealed technology, Repeatable process performances for delicate pharmaceutical compounds programmable vacuum control Applications: Vacuum drying uses pressure reduction to remove moisture, typically water or organic solvent, from a material or component. Liquid/moisture is removed by being boiled or sublimed while under a vacuum, therefore avoiding the need to apply high temperatures and protecting heat sensitive materials. The process can often create a high vapour load particularly in the early stages of the cycle. Examples of drying applications include: Book & leather drying Dehydration of insulating oils Drying of gas distribution pipelines Drying of lithium-ion battery & super capacitor electrodes Freeze drying (lypholisation) of food, pharmaceutical products, etc Inter-space pumping of vacuum insulated tanks Removing of water from concentrates of yeast extracts, gelatins, etc in food products Removing of moisture from insulation in transformers, capacitors and cables Refrigeration / Air Conditioning Drying Automotive Drying / Filling Freeze Drying Applications Drying Transformer Drying Bushing Filling Transformer Drying Vapour Phase Pipeline Drying Capacitor Drying Lithium Ion Battery Drying Pumping Technology GXS Dry Pumps and MAXX Systems Microvac Piston Pumps and Booster Combinations ES Single Stage and EH Booster Combinations EM Double Stage and EH booster Combinations Recommended technology Conventional technology Mid-range dry pumps are available for small scale or pilot processes 18. Industrial Vacuum

18 Lithium-Ion Battery Manufacturing Lithium-Ion batteries are driving the world s green agenda, and high quality reliable vacuum is a critical element in their production. We have a range of pumps suitable for all battery manufacturing needs, supported by a global service and support network. Benefits: Reduced maintenance costs and low environmental impact dry pumps Lower investment cost oil sealed rotary vane pumps Advanced control capability intelligent pumps Safe operation ATEX certified versions Applications: Assembly, filling & cell formation Electrode degassing Electrode drying Applications Lithium-Ion and Super Capacity Battery Manufacturing Cell Formation Electrode Drying Process Electrolyte Degassing Packaging Process Lithium-Ion Battery Glovebox Systems Pumping Technology Mid-range Dry Pumps GXS Dry Pumps nxds Dry Scroll Pumps ES Single Stage Oil Sealed Pumps RV Oil Sealed Pumps Recommended technology Conventional technology Hazardous duty pumps available on request Mid-range dry pumps are available for small scale or pilot processes Shop online at shop.edwardsvacuum.com Contact our customer service team Industrial Vacuum 19.

19 Recommended Technology: Backing Pumps Clean lubricant-free within the vacuum envelope andd hermetically sealed to prevent cross contamination User-friendly no oil changes and disposal, simple routine maintenance, tip-seal change done in minutes with no special tools, ease of incorporating pump into approved systems, safe product Robust large water vapour handling capacity, no atmosphere to vacuum shaft seal, isolated bearings to prevent process attack, run cooler and last longer GXS Dry Screw Pumps Reduced installation costs easy integration with other systems with intelligent controls Safe operation, consistent output automated control of your process Increased reliability and productivity ability to handle harsh processes with longer intervals between service Small carbon footprint low power and utilities usage MAXX Modules The GXS pump range is complemented by the new generation of pxh large mechanical boosters for an integrated flexible modular skid design Variety of pump combinations ensure optimised configurations delivering the performance required by your processes Easy to upgrade whenever you need more capacity Stokes Microvac Piston Pumps Low rotational speed enables longest pump life cycle value for investment Robust simple mechanism for high reliability and ease of rebuild easy maintenance on site Space saving design which saves up to 50% of valuable floor space small footprint ES Oil Sealed Pumps Stable vacuum performance improved product quality In-built ISO and BSP connections ease of integration Easy oil and filter changes easy to maintain EM Oil Sealed Pumps Process performance higher ultimate vacuum than comparable technology Effective lubrication even under high gas loads reliable and stable process Oil and air suck-back protection no contamination of process Industry proven with large install base peace of mind EH Boosters Peace of mind industry proven with large installed base Faster pump down time increased productivity No need for pressure switches, bypass lines or variable frequency drives simple installation Proven shaft seal design robust operation even for harsh duties HV Boosters Suitable for continuous operation over wide pressure ranges on heavy duty large scale applications stable process for consistent output High performance water cooled mechanical shaft seal, large diameter shaft and large helical gears no unplanned downtime Optional water cooled exhaust gas after cooler, shaft seal safety purge, temperature monitoring and VFD available easy integration and safe STP Turbomolecular Pumps Quicker pump down to base pressure increased productivity Compact size saves space and makes for easy installation Low power and utilities consumption low cost of ownership Maintenance free economical Stokes Microvac Piston Pumps Low rotational speed enables longest pump life cycle value for investment Robust simple mechanism for high reliability and ease of rebuild easy maintenance on site Proven, tested; peace of mind over 80 years of proven time-tested performance Vapour Boosters and HT Diffusion Pumps High throughput pumping increased productivity High backing line pressure stable performance Low oil back streaming better quality end product Clean process stainless steel body Drystar GV80 Pumps Low capital costs and minimal maintenance value for investment Suitable for harsh process conditions reliable and robust Optimised vapour handling and recovery increased productivity 20. Industrial Vacuum

20 LED CLEAN SOLUTIONS FOR A BRIGHT FUTURE LED 22 Shop online at shop.edwardsvacuum.com Contact our customer service team LED 21.

21 LED The exploding demand for LEDs is driven by their dramatic advantages relative to other lighting technologies. Compared to incandescent bulbs, for example, they offer lifetimes as much as times longer and consume less than a quarter of the energy. The lighting possibilities are endless, with smaller sizes, faster switching and improved output, LED manufacturers are challenged with meeting high process demands and yet reduce manufacturing costs. Shorter wavelength LEDs (green-blue) use nitride-based materials while the longer wavelengths (red-yellow) use phosphide-based materials. Each material poses unique process challenges in both the vacuum pump and abatement selection, as many of the materials used are particularly noxious or dangerous to handle. Our vast experience gained in the semiconductor field puts us in a unique position to support LED manufacturers in the adoption of more silicon wafer processing technology, such as Etch, PECVD and ICP chip production into their process. Our vacuum and abatement products have the capability to simultaneously handle high hydrogen and ammonia flow rates throughout the entire critical process, with high levels of safety and efficiency. LED manufacturing processes typically use MOCVD with high flows of light hydrogen and highly corrosive ammonia gases. The advanced technology incorporated in our product ranges has been optimised to meet these challenges. Our ih, ixh and ixl dry pump ranges each deliver increased powder handling capability and high resistance to corrosive gases, with reduced footprint and weight. And the latest range of STP maglev turbomolecular pumps are the all-in-one compact solution with low power for large volume, high-flow applications. Abatement products include our award winning Spectra-G 3000 which is designed to handle high gas capacity in GaN applications, allowing up to six MOCVD tools to be connected. For ease of use Atlas is proven in GaAs applications with high flows of hydrogen and incorporates Alzeta inward-fired combustion technology to achieve significantly reduced cost of ownership. All our abatement systems reduce the impact of your operations on the environment and lower operating costs. As the technology for LED manufacturing develops so will Edwards; we are a key enabler and our products have played a significant part in our customers success. Our objective is to deliver real benefits to our customers, which in turn will make the world cleaner and brighter for generations to come. Our applications experts can advise you at all stages of the LED manufacturing process on the most appropriate products to meet your needs. Applications Load Lock Transfer Metrology Lithography PVD Process Strip/Ashing PSS Etch ICP Etch MOCVD PECVD ixh Series igx Series Dry Pumps ixl Series EPX Series GXS Series ih Series Turbomolecular Pumps STP-iXR Series STP-iX Series STP-iXA Series Abatement Systems ATLAS Series SPECTRA Series GRC Series 22. LED

22 PHOTOVOLTAIC PROVING YOUR OPERATIONAL EFFICIENCY Photovoltaic 24 Shop online at shop.edwardsvacuum.com Contact our customer service team Photovoltaic 23.

23 PHOTOVOLTAIC The demand for environmentally friendly renewable energy sources is increasing as we look for ways to reduce our dependence on fossil fuels, without damaging the environment for future generations. One of the greenest solutions is Solar Power. Manufacturers use various processes such as crystalline silicon, CdTe, CIGS or Silicon Thin Film Technology to produce photovoltaic cells which will capture sunlight and convert it into energy. The last ten years has seen significant technology developments to make solar energy economically competitive, with improved efficiencies and lower manufacturing costs. Edwards is leading the way when it comes to vacuum and abatement for solar applications. We have leveraged our product capabilities and application expertise from the semiconductor field, and either transferred or developed our most advanced technology for photovoltaic manufacturing processes. Our ability to diagnose issues and develop innovative and practical solutions by supporting worldwide leading solar OEMs has given real end user benefits, in quality, product yield and cost. We are the only manufacturer that can supply photovoltaic manufacturers worldwide with the complete range of dry vacuum pumps, turbomolecular pumps (TMPs) and exhaust management systems for all processes. Either as individual product ranges or fully integrated pump and abatement solutions, our process knowledge and technical expertise within the photovoltaic industry are key factors in helping you maintain delivery and quality requirements. Our dry pump ranges include ih, GXS, ixl, ixh and STP turbomolecuar pumps, each optimised to meet customer specific applications, with exceptional process gas handling and temperature management for maximum reliability. Green Mode technology will enable reduced power consumption, achieving low running costs and reduced environmental impact. Abatement products including Atlas series and Spectra ZW series burn type scrubbers are widely used within the photovoltaic manufacturing processes, for high reliability with high flows of hydrogen and extremely toxicpyrophoric gases. This enables manufacturers to reduce their impact on the environment and at the same time reduce operating costs The award winning EZENITH integrates vacuum pumping and abatement into a single system to provide manufacturers with a highly efficient, low cost-of-ownership solution that meets the latest manufacturing and environmental requirements. EZENITH is easy to install and use, and it saves valuable fab floor space. It features Green Mode, which provides significant reductions in energy consumption, resulting in reduced environmental impact and additional cost-of-ownership savings. Our high market share, application expertise and strong global service network is testimonial to our success and leadership in photovoltaic manufacturing processes. We have developed cutting-edge technologies in partnership with our customers which have enabled a faster evolving solar industry. Applications Load Lock Transfer PVD Process Laminator INGOT Etch Implant Source MOCVD PECVD LPCVD ALD ixh Series igx Series Dry Pumps ixl Series EPX Series GXS Series ih Series Turbomolecular Pumps Abatement Systems STP-iXR Series STP-iX Series STP-iXA Series ATLAS Series SPECTRA Series GRC Series 24. Photovoltaic

24 POWER GENERATION VACUUM SOLUTIONS FOR POWER PLANT Power Generation 26 Condenser Air Extraction 26 Flue Gas Desulphurisation 26 Fly Ash Handling 27 Waterbox Priming 27 Shop online at shop.edwardsvacuum.com Contact our customer service team Power Generation 25.

25 POWER GENERATION By working with power sector engineers and operators, we are able to push the limits of vacuum system design, creating solutions to meet the demands of increasingly challenging applications. Benefits: Optimum solution for your requirements standard packages configured to suit you Reliability compliance to global and industry standards Peace of mind full factory acceptance test including saturated air test capability Your local partner of choice local applications expertise and service support Condenser Air Extraction In order to increase the availability, operational performance and reliability of turbine condenser vacuum plants, the dynamic relationship between the vacuum pumping system, condenser performance and turbine back pressure is an important factor in the design requirements and needs careful appraisal when considering overall plant performance. The air load from the turbine condenser system is LR1B Series 1 Stage Liquid Ring Pump saturated with vapour; liquid ring pumps are ideal Recommended Technology for handling high vapour loads, as much of the vapour will be condensed at the pump suction (by the direct condensing action of the inlet water spray or contact with the pump seal water). This condensing reduces the total volume to be handled by the pump, which is a significant advantage when compared to other pumping technologies. Benefits: Standard packages for holding and hogging. Designed to meet HEI specifications. Local service and site commissioning support. Flue Gas Desulphurisation Applications Flue Gas Desulphurisation systems are a common feature on modern coal-fired power plants; a by-product of the process is gypsum which is produced at the outlet of a scrubber. Liquid ring pumps are used to provide vacuum on the dewatering of the gypsum on a vacuum filter, usually belt or rotary drum type. The liquid ring pump, typically a large single-stage design, is selected based upon the surface area of the vacuum filter. Pumping Technology Condenser Air Extraction Waterbox Priming Fly Ash Handling SHR Series 1 Stage Liquid Ring Pump SHR Series 2 Stage Liquid Ring Pump EHR Series 1 Stage Liquid Ring Pump EHR Series 2 Stage Liquid Ring Pump LR1A Series 1 Stage Liquid Ring Pump Vacuum Filtration (FGD) 26. Power Generation

26 Flu Ash Handling Vacuum conveying of fly ash recovered by the Electrostatic Precipitator, ash is collected in hoppers at the base of the ESP and is then conveyed to a storage facility or loading silo. Liquid ring vacuum pumps are tolerant to ash carry over and the single stage pump construction ensures optimum power at pressures required for effective conveying. Benefits: Pump capacities up to 5000 m 3 h -1 Corrosion/erosion resistant materials available Systemised to meet project requirements Once through or partial recirculation seal water Waterbox Priming The ability to handle wet gases without any detrimental effect makes liquid ring vacuum pumps ideal for condenser waterbox priming applications. Waterbox priming serves two functions to create a siphon effect reducing the amount of power required to start the main cooling water pumps; and to ensure maximum condenser cooling efficiency by preventing accumulation of air in the upper parts of the cooling tube bundle. Benefits: 200 and 400 m 3 h -1 pump capacity options Modular package design enables customised scope of supply Duplex Simplex Vacuum receiver Shop online at shop.edwardsvacuum.com Contact our customer service team Power Generation 27.

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28 R&D THINK VACUUM, THINK EDWARDS R&D 30 Universities & Private Laboratories 31 High Energy Physics 31 Space Simulation 33 Shop online at shop.edwardsvacuum.com Contact our customer service team R&D 29.

29 R&D We offer a broad range of vacuum products to meet the challenges of today s research and development laboratories. Collaboration with major scientific instrument manufacturers, universities and major research institutes ensures a deep understanding of research and the role that vacuum plays. Our focus on technological advancement in vacuum as well as investment in R&D enables us to develop the innovative products that meet your specific application requirements. Accelerators/LINAC Applications Beamlines & End Stations Fusion Lasers Gravitational Wave Universities/ Private Labs Universities Chemical Labs Other Labs Others Nanotech Facilities Space Simulation Rotary vane pumps Single stage ES Two stage E2M (small) RV E2M (medium & large) Mechanical boosters EH/pXH Small dry pumps Diaphragm pumps DLAB, XDD1 Scroll nxds, XDS Large dry pumps Multistage roots pumps ixl (clean pumping) & systems ixm (medium duty) Claw pumps ixh (harsh duty) igx (light & medium duty) ih (harsh duty) Screw pumps GXS CXS High vacuum primary pumps epx Turbomolecular pumps hybrid bearing ext, next Magnetic bearing stp Pumping stations turbocart UHV pumps Ion getter pumps Titanium sublimation pumps Non-evaporable getter pumps Oil vapour diffusion pumps Scientific diffusion: Diffstaks Industrial diffusion HT Vapour boosters Vacuum instruments Measurement and control Leak checkers Vacuum hardware Valves Pipeline components Flanges and fittings Lubricants and sealants Oil Exhaust gas management Grease 30. R&D

30 Universities & Private Laboratories With over 95 years experience Edwards has grown to be the market leader in vacuum technology, with solutions across a broad range of applications. We have developed advanced vacuum system modelling tools to ensure the optimum pumping system to meet your challenges whether you are working in a university or in a large privately funded chemical laboratory. Universities Universities include a broad range of activities that require vacuum, which vary depending on discipline and department. Typical departments that use vacuum include Chemistry, Physics and Materials but this list is not exhaustive. Although the most common pumps used within universities are small pumps such as RV rotary vane pumps, nxds dry scroll pumps and next turbomolecular pumps, in reality any of the products in this catalogue may be equally applicable for use in the university sector. Chemical Laboratories Chemical laboratories are typically using vacuum either to remove substances by evaporation or to stop reactions from taking place. Typically chemical vapours are involved and so vacuum pumps with good vapour handling characteristics and ATEX internal classifications are required. Generally the most used pumps in this sector include RV rotary vane pumps and nxds dry scroll pumps, but also turbomolecular pumping stations are also used where low pressures are required. Other Laboratories Our vacuum equipment will support a wide spectrum of laboratory activities, ranging from small privately funded research laboratories to government national laboratories, and like universities can include a broad range of applications. Any of the products within the Edwards range could be appropriate, but typically RV rotary vane pumps, nxds dry scroll pumps and next turbomolecular pumps are the products of choice. High Energy Physics We have a deep understanding of high energy physics applications and the critical role that vacuum plays at every stage. This experience, coupled with class leading products and application know-how, allows us to offer a broad range of solutions enabling you to push the boundaries of modern physics. From the smallest research facility to huge particle accelerators, our products and services are enabling education, development and scientific evolution across the globe. Synchrotron A synchrotron is a type of particle accelerator able to produce intense beams of x-rays, infrared or ultraviolet light which can be as much as billion times brighter than the sun. These beams can then be used to allow scientists to study samples of any material from metal to bacteria in incredible detail. In order to produce these high intensity beams with particles that travel at almost the speed of light, there is a need for a vacuum similar to that of outer space. Vacuum pump requirements vary depending on whether the pump is used on the linear accelerator, the storage ring or the beamlines. Our broad range of pumps, with models suitable for all these applications, includes Gamma TiTan Ion Getter pumps, next turbomolecular pumping stations, STP magnetically levitated turbomolecular pumps and nxds dry scroll pumps. Shop online at shop.edwardsvacuum.com Contact our customer service team R&D 31.

31 Nuclear Fusion Nuclear fusion is the process of combining atomic nuclei to produce a new bigger atomic nucleus. When atomic nuclei combine they release a large amount of energy, giving hope for a new source of power in the future. Research in this field largely involves attempts to recreate a reaction similar to that occurring in the sun by fusing two types of hydrogen, deuterium and tritium, to create helium. This requires considerable energy as the gas has to be heated to very high temperatures, up to 0 million degrees Celsius, causing it to become a plasma. Nuclear fusion research, to a large extent, involves understanding the behaviour of plasma. One of the major challenges faced by scientists is the ability to sustain plasma by maintaining the right pressure. Hence the need for large-scale, effective vacuum systems that ensure ultra-high vacuum in the large reactor vessels/cryogenic system surrounding the superconducting magnetic field coils, and which can withstand very high temperatures, ionising radiation and highly magnetic fields. Gravitational Waves Gravitational waves are ripples in the curvature of space-time which propagate as a wave, travelling outward from the source. Detecting these waves would help to confirm the explanation of gravity as predicted by Einstein s theory of general relativity. These waves propagate as vibrations in space and travel at the speed of light, which presents a number of experimental challenges to physicists. Current efforts to detect them are by using interferometers on the ground and in space. It is essential that the observatories housing the interferometers are perfectly clean and extremely stable; the whole interferometer must remain as optically perfect as possible. Any residual gas would affect the measurements, so the light beam has to operate under an ultra-high vacuum. Vacuum pumps need to be clean and extremely low vibration, as such common pumps for this application are STP magnetically levitated turbomolecular pumps and nxds dry scroll pumps. Colliders Colliders are extensively used as a research tool for accelerating elementary particles to a very high kinetic energy and letting them collide with other particles. Analysis of the by-products of these collisions gives scientists good evidence of the structure of the subatomic world. Providing the right environment for highly evacuated beam lines and chambers has always been a challenge but Edwards is a pioneer in the development of vacuum products and can offer the best solutions we understand that operating in such extreme domains is essential for the study of successful particle physics. Pump requirements for colliders are similar to those of Synchrotrons and so common products are the same namely Gamma TiTan Ion Getter Pumps, next turbomolecular pumping stations, STP magnetically levitated turbomolecular pumps and nxds dry scroll pumps. High Powered Laser Beams High power laser beams are being increasingly used to investigate a wide range of domains from new fields in fundamental physics and gravitational physics to applications in medical science, material study and nuclear material management. These laser beams travel through multiple amplifiers to produce powerful pulses in the shortest interval possible. However, operation of these high intensity laser beams requires careful consideration in the design and building of the large vacuum systems to ensure maximum stability. Vacuum requirements are for high vacuum and often includes the evacuation of very large chambers and possibly flows of explosive (e.g. Hydrogen) or rare gases (e.g. Xenon, Krypton). As such as well as the common laboratory pumps like nxds scroll pumps and next turbomolecular pumps, recommended pumps also include high throughput STP magnetically levitated turbomolecular pumps and GXS dry screw pumps. 32. R&D

32 Space Simulation From the earliest rocket developments in the mid 20th Century through to the latest research into ionic thrusters, we have gained vast experience in space simulation applications globally. Whether you are using small vacuum systems for component testing or large chambers for satellite testing, our broad portfolio of pump mechanisms ensures we have the vacuum pumping solution for your needs. Recommended Technology: RV Rotary Vane Pumps High vapour handling quicker process Superior particulate handling high reliability Fast acting inlet valve for best in class anti-suck back protection safe process and systems Mode selector and two position gas ballast configured to meet your vacuum needs Designed for easy maintenance no unplanned downtime Quiet running better work environment next Turbomolecular Pumps Exceptional pumping speeds and compression ratios value for money Field proven reliability in the most demanding environments no unplanned downtime Standard fit in many scientific instruments easy integration Over 200,000 turbo pumps installed reliability for peace of mind End user serviceable low cost of ownership STP Turbomolecular Pumps Self-adjustment and re-balancing zero maintenance, low cost of ownership Lubricant free no contamination, clean process Intelligent and easy to use controls simple operation Low noise and vibration levels stable process and work environment TS75 Compact Turbomolecular Pumping Station Compact minimal footprint Fully assembled no systemisation required Robust construction, long service life low cost of ownership nxds Scroll Pumps Quiet operation better work environment and low environmental impact Intelligent and easy to use controls simple operation Hermetically sealed for a lubricant-free vacuum environment no contamination and no oil to dispose of Long service interval and low power consumption low cost of ownership Ion Pumps Vibration-free operation stable process Bakeability clean vacuum environment Ease of use of controllers simple operation Specialised variants available configured to your needs Widest portfolio of ultra-high vacuum pumps optimum solution for your needs Vacuum Measurement Instruments Measurement over the range 2000 to -11 mbar correct gauge to meet your needs Advanced microprocessor based controllers robust and reliable Calibration of instruments to UK national standards right vacuum measurement Turbopumping Carts Wide choice of turbomolecular and backing pumps configured to your needs Fully assembled no systemisation required Intelligent and easy to use controls with serial communications simple operation Shop online at shop.edwardsvacuum.com Contact our customer service team R&D 33.

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34 SCIENTIFIC INSTRUMENTS THE INTELLIGENT CHOICE Scientific Instruments 36 Electron Microscopy and Surface Analysis 36 Mass Spectrometry 36 Shop online at shop.edwardsvacuum.com Contact our customer service team Scientific Instruments 35.

35 SCIENTIFIC INSTRUMENTS We are a technology leader in the manufacture of vacuum pumps, gauging and systems with products specifically designed to meet the evolving challenges of new techniques and more cost effective instruments. Using leading edge vacuum technology, our high quality vacuum pumps and controllers provide a clean vacuum environment with enhanced performance and excellent reliability. Benefits: Variety of choice total vacuum spectrum from UHV to atmospheric pumping Configured to your need bespoke vacuum solutions Right solution advanced modelling capability Peace of mind comprehensive product and applications support Applications: Gas Analysis Leak Detection Sample Preparation Surface Science XRF/XRD RGA and other techniques Electron Microscopy and Surface Analysis Advances in Electron Microscopy have created new challenges for vacuum equipment. The requirement for higher image resolution means that any vibration caused by vacuum equipment can be a limiting factor. Edwards has risen to this challenge and produced a range of low vibration turbomolecular pumps which, in combination with vibration isolation techniques, allow OEMs to achieve the results they require. In addition, the newly introduced nxds dry scroll pumps with their intelligent run modes, will enhance the user experience with lower acoustic noise and vibration levels. Mass Spectrometry Recent developments in the analytical marketplace have driven the need for bespoke vacuum solutions to solve their respective challenges. We have invested considerable time and resource in advanced vacuum system modelling capabilities. When used in collaboration with our customer base, our vacuum modelling tools have allowed OEMs to streamline their development and manufacturing processes, resulting in a quicker time to market and reduction in both project and manufacturing costs. 36. Scientific Instruments

36 Recommended Technology: RV Rotary Vane Pumps High vapour handling quicker process Patented inlet valve for best in class anti-suck back protection safe process and systems Mode selector and two position gas ballast configured to meet your vacuum needs Designed for easy maintenance no unplanned downtime Quiet running better work environment next Turbomolecular Pumps Exceptional pumping speeds and compression ratios value for money Field proven reliability in the most demanding environments no unplanned downtime Standard fit in many scientific instruments easy integration Splitflow variants available with bespoke envelopes End user serviceable low cost of ownership nxds and XDS Scroll Pumps Quiet operation more comfortable work environment Intelligent and easy to use controls simple operation Hermetically sealed for a lubricant-free vacuum environment no contamination and no oil to dispose of Long service interval and low power consumption low cost of ownership STP Turbomolecular Pumps Self-adjustment and re-balancing zero maintenance, low cost of ownership Lubricant free no contamination, clean process Intelligent and easy to use controls simple operation and quick installation Low noise and vibration levels stable process and work environment UHV Pumps Titan Ion Pumps CV, DI and TR elements available Non-Evaporable Getters 50 to 300 l/s sizes Titanium Sublimation Pumps for reactive gas pumping Multiple controller option SPC, LPC and MPC options Vacuum Measurement Instruments Measurement over the range 2000 to -11 mbar correct gauge to meet your needs Advanced microprocessor-based controllers robust and reliable Calibration of instruments to UK national standards right vacuum measurement Shop online at shop.edwardsvacuum.com Contact our customer service team Scientific Instruments 37.

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38 SEMICONDUCTOR PROCESSING MAXIMISING POTENTIAL Semiconductor Processing 40 Lithography 41 Chemical Vapour Deposition 41 Etching 43 Physical Vapour Deposition 43 Metrology 44 Ion Implantation 44 Diffusion/Epitaxy/ALD 44 Shop online at shop.edwardsvacuum.com Contact our customer service team Semiconductor Processing 39.

39 SEMICONDUCTOR PROCESSING We continue to innovate leading technology solutions which will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emissions and extended product lifetimes with a reduction in on-going service costs. Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, our systems are designed to meet the specific requirements of existing and developing processes. A variety of systems, such as dry vacuum pumps, turbomolecular pumps and point-of-use abatement systems are offered to optimise performance across the range of applications, from light duty to the heaviest duty processes. Applications Load Lock Transfer Metrology Lithography PVD Process PVD Pre-clean RTP Strip/Ashing Oxide Etch Silicon Etch Metal Etch Implant Source HDP-CVD RP SACVD MOCVD PECVD LPCVD ALD CLEAN APPLICATIONS HARSH APPLICATIONS Dry Pumps ixh igx ixl EPX Turbomolecular Pumps STP-iXR Series STP-iX Series STP-iXA Series STP-iXL STP-L Abatement Systems ATLAS GRC Integrated Solutions EZENITH 40. Semiconductor Processing

40 Lithography Lithography, patterning of the wafers, is a critical step in the semiconductor process. Although conventional and even immersion lithography generally do not require vacuum environments, extreme ultraviolet (EUV) lithography and electron beam (e-beam) lithography do require vacuum pumps. Edwards has you covered for both of these applications. EUV Lithography Pumping Solutions Multi-patterning techniques have their place, but the future will likely require the use of EUV lithography due to the extremely short wavelength of light EUV systems deliver. The vacuum environment is absolutely critical for optimum performance of your system. Cleanliness of the vacuum system is particularly important and helps to extend service intervals. We have worked with EUV Lithography OEMs and light-source OEMs to develop precision vacuum systems that deliver the maximum reliability for the large investment you make. E-Beam Lithography Solutions E-beam lithography has an important role to play in patterning of silicon wafers. Clean vacuum with low vibration is essential to ensure precision and high up-time of your system. Our Product Solutions You will likely require a turbomolecular pump (TMP) to deliver the ultra-high vacuum on your process tool. Our STP range of TMPs have fully magnetically-levitated rotors to reduce the risk of contamination to the chamber and extend service intervals. Today s products have been developed to reduce total costs and footprint through integration of the controller into the pump itself, removing the need for an external controller and hefty control cable between the controller and pump. Chemical Vapour Deposition Chemical Vapour Deposition (CVD) systems come in a variety of configurations to deposit numerous types of films. The processes also operate at different pressures and flow regimes, many using fluorine-containing dry clean processes. All of these variables mean you will want to consult with one of our application engineers to select the right pump and gas abatement system to maximise your product s service interval and increase the up-time of your process. Dry Pump Selection CVD processes generally have four specific challenges to overcome that will drive your dry pump product selection. These challenges are: Powder Many processes can generate large amounts of powder by-product. The vacuum pump needs to be designed to handle this powder without seizing. In some cases, the powder may actually be sticky or require high temperature operation to ensure that other by-products entrained in the powders do not condense inside the pump and jam the mechanism. For nearly all powder-producing processes, you will be driven toward using a pump employing a high-torque motor to be sure that the pump keeps rotating under stress. Condensation Some of the by-products of the semiconductor process contain gases that will change from gas phase to solid phase as the partial pressure of the gas increases, or the material comes in contact with cold surfaces. When pumping these by-products, you will need a very hot pump and, preferably, a pump that has a uniform temperature profile from inlet to outlet as much as possible. Shop online at shop.edwardsvacuum.com Contact our customer service team Semiconductor Processing 41.

41 Corrosion Some processes will require the pumping of halides. In particular, fluorine-containing cleaning processes will be required to maintain the cleanliness of your chamber, but the activated fluorine radicals can attack the internal surfaces of the pump. If the process is mostly using chemicals that can corrode the pump, you will want to be sure that the pump temperature can be set to a low value to reduce the risk of corrosion. Our pumps are designed with selectable temperature set points and high rotational speeds to reduce the risk of corrosion and reduce the overall rate of inevitable material loss that can occur within the pump. For some CVD processes, a balance is struck with the temperature set point to be sure that any condensation issues are avoided without undue rates of corrosion. Product reliability is an imperative. Our products incorporate the latest innovations in metallurgy and advanced materials science to bolster our defence against the aggressive nature of the pumped gases. Metal Plating Some of today s processes use metal-organic precursors that, as they pass through the chamber, can result in byproducts that have a high risk of depositing their metal contents onto the pump surfaces. A low temperature pump is usually best to ensure long service intervals for these applications. Gas Abatement Selection Every CVD process will require some form of gas abatement device so that the toxic and dangerous by-products of the process can be safely converted into disposable elements. We pride ourselves on our fuel-fired exhaust gas management devices because of their ability to efficiently force recombination of the by-products into safe compounds. Being fuel-fired with multiple-inlet capability, you can get rapid deployment of Green Mode by turning off the main burner when you do not need to abate your process exhaust. Integrated Systems and Sub-Fab Solutions With just a pump and a gas abatement device, you are still not ready to run your process. You will need to connect the pump exhaust, connect up your line heaters where required, run your water, purge and electrical lines, and then get all of your control signals ready. You will also have to consider double-enclosure, gas leak detection, and how you want to conduct leak checks after your tool maintenance. All of these things will cost you design time and money. We understand the problem so we have developed integrated, process-specific solutions. Our integrated systems are already pre-designed for most semiconductor CVD processes. The exhaust heaters are set for the correct temperature to minimise cost and maximise up-time. We put leak check ports and gate valves where they are required. We can mount toxic gas sensors within the unit and get the whole system enclosed and, most importantly, you only need to provide one of each of the required utilities. We distribute the purge, water, electricity, and control signals where they are needed and create a ready-to-go system. All of our integrated systems have been designed based on global experience. We are leaders in vacuum and abatement, so we know what works. We constantly innovate and improve what we do because you demand excellence from Edwards. Fleet Management With all of our equipment deployed in your fab, you will want to know what s going on all of the time. You want to know if any product is in trouble or in need of maintenance. To answer this question, we offer our FabWorks computer monitoring system. The FabWorks system can use Ethernet connectivity to all of our products to constantly retrieve status signals and store them in an automated database. More than tracking trends in such parameters as input power, current, temperature, or purge flow, you also can see warnings or alarms, all of this data can be graphed and exported. With FabWorks you do not need to be in the fab to monitor the equipment, once connected to your intranet, you can be confident you have your finger on the pulse of the sub-fab. For CVD processing, there will always be products that become stressed and will need maintenance, in worst case scenarios, products can suddenly fail. To prevent unwanted failures, we can work with you and deploy our automated predictive diagnostics models. These models, matched to your process, can provide warnings to you in advance of processing your next batch of wafers so that you can maintain the pump or abatement device and reduce the risk of stoppage mid-process. 42. Semiconductor Processing

42 Etching Etch processes have become increasingly complex due to the fine feature size of many semiconductors. Moreover, the proliferation of MEMS devices and 3D structures has increased the use of silicon etch processes for structures with high aspect ratio. Traditionally, etch processes could be grouped into silicon, oxide, and metal categories. The lines between these categories have become blurred with the use of more hard masks and high-k materials being deployed in devices today. Some of the materials used in devices today stubbornly resist vapourising during the etch process leading to deposition within the vacuum components. Today s processes really have become more challenging than they were several years ago. We keep a close eye on industry and process changes and maintain the pace of product innovation to deliver class-leading performance. Vacuum Pump Selection Nearly every dry etch process will require a turbomolecular pump (TMP) to deliver the low pressure you require for your reactive ion etch (RIE) system. Edwards invented the first TMP and we continue to challenge the industry with new technology and performance. We offer a range of products to match your application requirements. For example, for extremely low pressure, you can use one of our all-bladed TMPs and marvel at the achieved compression ratios and low base pressure. You can select a hybrid product that combines blades and Holweckdesigned rotors for high flow operation. We even have products tuned for excellent hydrogen performance because, at molecular speeds, not all molecules behave the same as they travel through the TMP. We recognise that space is at a premium so for many of our TMPs we have integrated the controller with the pump. Not only do you no longer need to worry about routing of cumbersome control cables, you save on rack space and spare pump management. We have also developed advanced heating technology to reduce the risk of stubborn gases from sticking to the pump internal surfaces. We have even pioneered new high-emissivity coatings for really difficult applications that need high running temperatures. For dry pumps, Edwards will help you select your product to be sure that maximum up-time is achieved. Etch processes can be very challenging to the pump because of the various gases used. For example, will your process be mostly corrosive to the pump, likely to condense within the pump, or neither of these? The process gases you use and the likely by-products need to be considered carefully. Gas Abatement Selection Dry etch processes will require some form of gas abatement to be sure you comply with your local emissions requirements. Moreover, oxide etch, in particular, generates perfluorocarbon (PFC) emissions and you want to be sure that your gas abatement can handle the flow rate of PFCs in your process recipe. PFCs are a known contributor to global warming, so your abatement strategy is important for all of us. Our inward-fired burners are particularly adept at creating a hot flame that can break down the incoming gases and reduce emissions of unwanted chemicals. Physical Vapour Deposition Physical Vapour Deposition (PVD) continues to be an important process in semiconductor manufacturing. Liners and barriers continue to make use of this well established semiconductor process. If you are using a cluster tool, you will require a pump for your load-lock chamber and also the transfer chamber. If your PVD tool makes use of cryo pumps, you will also need to prepare a pump to regenerate your cryo pump once it gets full. In many cases, the pump used for the transfer chamber can also be used to regenerate your cryo pump. Many PVD tools used for semiconductor processing deploy cryo pumps. However, increasingly, turbomolecular pumps (TMPs) are used because the TMPs do not need maintenance and they do not need regeneration. These two factors reduce your running costs. Traditionally, gas abatement is not required for PVD processes. However, if your PVD process tool also includes ALD or CVD chambers, you will need process-ready vacuum pumps and gas abatement. Our application engineers and product specialists will assist you in further information related to these process types and help you determine the optimum size of pump for your system. We can also make recommendations about pipe sizes to help you optimise your PVD system. Shop online at shop.edwardsvacuum.com Contact our customer service team Semiconductor Processing 43.

43 Metrology Today s metrology tools represent years of advanced development and continue to play a vital role to high yield and early detection of process deviation. Clean, quiet vacuum is an important enabler to advanced metrology tools. We provide a range of dry pumps and turbomolecular pumps (TMPs) to match your vacuum environment conditions. An example of our application of advanced technology is our EPX range of dry pumps. These single-axis pumps rotate at high speeds and can deliver final vacuum pressures up to three orders of magnitude lower than conventional dry pump and booster combinations. In many cases, using one EPX pump can eliminate the need for a TMP. Another example of clean vacuum is our nxds range of dry scroll pumps. Edwards patented technology makes use of a precision engineered bellows that guarantees that no grease from the bearings can ever outgas into the vacuum space. Moreover, advances in tip seal engineering means significantly extended service intervals. Ion Implantation Ion implant tools still have a significant role to play in front end-of-line processing. The vacuum challenges associated with ion implantation have not become easier with time and we recognise the challenges of operating a vacuum pump in an electrically noisy environment. We are never satisfied by testing for bare minimum conformance to established electromagnetic immunity test standards. We know that pumps used on implant tools will require greater immunity and special design features to be sure that the high voltage sections of the implant tool do not interfere with pump reliability. We also take particular care in the design of our turbomolecular pumps (TMPs) to be sure that we can provide integrated heating to high temperatures so that maximum reliability is achieved. Our application engineers will help you to select the right products for your implant tool, whether those products are mounted on your tool or beneath your tool in the sub-fab. We want to be sure you experience the quality and reliability you demand from Edwards. Diffusion/Epitaxy/ALD Diffusion, epitaxy, and ALD processes are critical in the manufacture of advanced semiconductor devices. Each of these applications, well understood by Edwards, can represent challenges slightly different to normal CVD processes. Diffusion furnaces will continue to be required as the industry follows Moore s Law and also if it diverges into More-than-Moore technologies. In general, large capacity pumps are required to provide rapid chamber evacuation, chamber environment exchange, and high throughput capability. Epitaxial film deposition equipment continues to be challenging. In many cases, very high flows of hydrogen at low chamber pressures may be required. You will need a reliable pump with high hydrogen gas throughput capability. More than this, you will want to take advantage of our global application experience to be sure that you design your entire vacuum system for safe operation. By-products of the epitaxy processes can be very hazardous and will require special attention for safe operation. Atomic Layer Deposition (ALD) processes are becoming more common as device feature size decreases. Whether your system processes wafers one wafer at a time, or in a batch, you will want to use our products that are designed to minimise gas residence time and optimise pump thermal profiles and purge locations to be sure you can achieve the longest service interval possible. ALD processes can be rather challenging. For all of the diffusion, epitaxy, and ALD processes, we are able to give you the facts to help you select the right gas abatement device. The materials you use in your processes and maximum flow rates will need to be considered in configuring your abatement device. Where appropriate an integrated system that incorporates our global knowledge and best operating practice should be the preferred solution. Our integrated systems provide excellent value and make managing your process tools much easier via connection to our fab-wide monitoring systems. 44. Semiconductor Processing

44 STEEL DEGASSING OUR EXTENSIVE EXPERIENCE IS KEY TO YOUR SUCCESS Steel Degassing 46 VD and VOD Processes 47 RH Processes 47 Shop online at shop.edwardsvacuum.com Contact our customer service team Steel Degassing 45.

45 STEEL DEGASSING Our leading market position as a vacuum supplier for steel degassing is built on our understanding of customers processes and expertise in providing vacuum solutions for vacuum degassing (VD), vacuum oxygen decarburising (VOD) and Ruhrstahl Heraeus (RH) processes. We have by far the largest installed base of dry pumps in the global steel industry with a global footprint of manufacturing, sales and service. Benefits: Fast return on investment no waste disposal and lower energy cost than steam ejectors Trusted and proven technology largest dry pump installed base in the global steel industry Configured to your process modular design with different pump ranges for all heat sizes Ease of adoption simple installation, fast commissioning, reliable production High productivity system design concept ensures high uptime Low cost of ownership robust pump design with minimal routine maintenance Your partner throughout the journey all your vacuum requirements provided by a single source, from pump manufacturing, system design, testing to service Pumping Technology Maxx Steel Degassing System Standard Steel Degassing System Sport Steel Degassing System Super Steel Degassing System Vacuum Degassing (VD) Applications Vacuum Oxygen Decarburising (VOD) Vacuum Degassing with Oxygen Blow (VD OB) Ruhrstahl Heraeus (RH) Ruhrstahl Heraeus with Oxygen Blow (RH OB) Recommended Technology 46. Steel Degassing

46 VD and VOD Processes Processes in the growing secondary metallurgy sector depend on several vacuum-based treatments: Vacuum Degassing (VD) for alloy steels; Vacuum Oxygen Decarburising (VOD) for stainless steels; and combinations of both treatments, for example Vacuum Degassing Oxygen Blowing (VDOB) and Vacuum Carbon Decarburising (VCD), for low and ultra-low carbon steels. Our vacuum systems have been successfully applied to all these secondary metallurgy processes at customers production facilities around the world. With the proven modular system design we enable degassing and decarburising melt sizes up to 200 tonnes in electric steelmaking facilities (mini-mills). RH Processes In large integrated steelmaking facilities, typically equipped with basic oxygen converters, secondary metallurgical processing is carried out mainly in Ruhrstahl Heraeus (RH) systems. We have developed a super degasser module to address the high volume flow rates needed to successfully degas and decarburise steel products, using multiple high volumetric flow boosters in parallel to handle the gas loads produced, while optimising the total number of system elements required. Recommended Technology: Standard Steel Degassing Modules (SSDM) Modular design with different pump ranges for all heat sizes configured to your needs No water disposal and lower energy cost than steam ejectors low cost of ownership Simple installation, fast commissioning, reliable production MAXX Modules Easy to upgrade whenever you need more capacity Easy integration with other systems reduced installation cost Low utilities and energy usage costs substantial savings Shop online at shop.edwardsvacuum.com Contact our customer service team Steel Degassing 47.

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48 SMALL PUMPS AND PUMPING SYSTEMS THE INTELLIGENT CHOICE Small Pumps and Pumping Systems 50 Electrical Data 51 Small Pumps and Accessories: Frequently Asked Questions 57 Small Pumps: Application and Accessory Information 58 Shop online at shop.edwardsvacuum.com Contact our customer service team Small Pumps and Pumping Systems 49.

49 Small Pumps and Pumping Systems To meet the diverse needs of applications ranging from analytical instrumentation, wet chemistry and R&D to light industrial, Edwards offers a comprehensive range of pumping technologies. Dry Scroll Pumps Scroll pumps are an excellent alternative to rotary vane pumps where oil free pumping is desirable. The innovative XDS/nXDS pumps in particular use a bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapour handling is enabled by a gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to scroll pumps. 2 x -2 mbar / 1.5 x -2 Torr 5 to 35 m 3 h -1 / 2.9 to 20.6 ft 3 min -1 Oil Sealed Rotary Vane Pumps -3 mbar / -3 Torr 0.9 to 32.3 m 3 h -1 / 0.5 to 19.5 ft 3 min -1 This wide range of rugged pumps offers an excellent ultimate with good pumping speed. RV pumps have superior vapour handling capabilities, while operating quietly. Dry scroll pumps Oil sealed rotary vane pumps Diaphragm Pumps 2 mbar / 1.5 Torr 0.6 to 2.0 m 3 h -1 / 0.35 to 1.2 ft 3 min -1 Oil free D-LAB diaphragm pumps are made of corrosion resistant materials to withstand attack from chemicals. They are ideal for applications such as gel drying and other wet chemistry processes. The XDD1 diaphragm pumps provide oil free backing for compound turbomolecular pumps. Easy to Service All Edwards pumps are designed for easy routine maintenance. Key components are easily accessible and, with RV and XDS/nXDS pumps, no special tools are required. Service kits of guaranteed parts are available for routine service by the user. Worldwide support from the Edwards service organisation is also available. Quality Manufacture Edwards pumps are manufactured on state of the art machine tools for high consistency of components. For example, RV rotors are manufactured in a robotic cell to remove errors and inconsistencies from the manufacturing process. Applications Edwards high performance pumps are used in many industrial and laboratory applications, including the following: Electron microscopes, mass spectrometry, residual gas analysers and surface analysis Epoxy degassing, powder materials processing Solvent concentration Sterilisation, distillation and centrifuges Gel dryers and glove boxes Atomic emission spectrometers, nuclear physics, fusion technology and space research Vacuum ovens TV tube evacuation Automotive system filling Freeze drying Vacuum metallurgy 50. Small Pumps and Pumping Systems

50 Electrical Data The table shows current data and suggests a suitable fuse rating. Starting current is drawn for less than one second and slow blow fuses should be used to prevent unnecessary rupture during starting. Pump outfits are rated for operation above 12 C. Pump starting at temperatures lower than 12 C will increase the current drawn due to the higher start torque required. This may cause the motor thermal overload to trip. Rotary Valve Pump Accessories This diagram shows the accessories available for oilsealed pumps. Refer to the following pages for details of each accessory. Note that the E-LAB2 pump is supplied with all required accessories Three-phase motors should be protected by a starter consisting of a suitably rated contactor and thermal overload. The trip current regulator on the thermal overload should be set according to the starter manufacturer s instructions. 3 7 Electrical supply Full load current (A) Start current (A) Suggested fuse rating (A) 2 1 E2M V 1-ph 50/60 Hz V 1-ph 50/60 Hz E2M V 1-ph 50/60 Hz V 1-ph 50/60 Hz RV3 and RV V 1-ph 50/60 Hz V 1-ph 50/60 Hz 200 V 1-ph 50/60 Hz V 3-ph 50/60 Hz /460 V 3-ph 50/60 Hz OIL 11 RV8 and RV V 1-ph 50/60 Hz V 1-ph 50/60 Hz 200 V 1-ph 50/60 Hz V 3-ph 50/60 Hz /460 V 3-ph 50/60 Hz E1M18 and E2M V 1-ph 50/60 Hz V 1-ph 50/60 Hz 200 V 1-ph 50/60 Hz 0 V 1-ph 50/60 Hz V 3-ph 50/60 Hz /460 V 3-ph 50/60 Hz E2M V 1-ph 50/60 Hz V 1-ph 50/60 Hz 200 V 1-ph 50/60 Hz 0 V 1-ph 50/60 Hz V 3-ph 50/60 Hz /460 V 3-ph 50/60 Hz XDS35i V 1-ph 50/60 Hz V 1-ph 50/60 Hz XDS46i and XDS0B V 1-ph 50/60 Hz V 1-ph 50/60 Hz nxds V 1-ph 50/60 Hz V 1-ph 50/60 Hz (13 UK) (13 UK) Outlet mist filter * 2 Oil return kit 3 Small volume inlet liquid catchpot 4 ITO20K inlet liquid catchpot 5 ITC20K inlet chemical trap 6 ITF20K inlet dust filter 7 FL20K foreline trap 8 Vibration isolators 9 Oil drain kit OB20 oil box purge adaptor 11 Oil change reminder card 12 RV gas ballast adaptor ** 13 EBV20 solenoid operated gas ballast valve * EMF filter shown RV adjustable gas ballast oil return kit shown RV pump extension kit shown ** Not required for EM pumps 9 Shop online at shop.edwardsvacuum.com Contact our customer service team Small Pumps and Pumping Systems 51.

51 Outlet Mist Filters Benefits of the mist filter include: Protection from oil mist emissions as required by COSHH and health and safety regulations Use of optional oil return kits results in reduced oil level maintenance and savings in pump oil If the oil element becomes blocked, an integral pressure relief valve opens EMF Filters The EMF3, EMF and EMF20 mist filters are suitable for all small rotary vane pumps up to E2M18. (The EMF20 can be used with an E2M28 on low pressure/throughput applications; contact Edwards). They are very efficient at % DOP test and are also azide proof. The white bottom half of the body is semitransparent, allowing the oil level to be monitored. The EMF filters have a unique odour element which neutralizes the smell of oil mist. MF30 Filter The MF30 is suitable for E2M28 pumps. It is very efficient at 99.85% DOP test. Dimensions EMF filters Ordering information Model EMF3 mist filter (0.315 kg) * Model EMF mist filter (0.500 kg) Model EMF20 mist filter (0.700 kg) Model MF30 mist filter (1.30 kg) * A A A A Supplied with NW clamp, centring-ring and O-ring, NW to ⅜ inch BSP adaptor. Supplied with NW25 clamp, centring-ring and O-ring, NW25 to ¾ inch BSP adaptor. Supplied with NW25 elbow, NW25 clamp, NW25 to ¾ inch BSP adapter and NW25 Co-Seal. Spares Odour element (pack of 5) EMF3 EMF EMF20 Oil element EMF3 EMF EMF20 MF30 Body seal EMF3 EMF EMF20 A A A A A A A A A A Oil return kits A These conserve the pump oil, by returning the oil trapped in the mist filter to the pump. The gas ballast oil return kit, for example, allows extended operation of the pump with gas ballast. FLOW B A B square Inlet/outlet EMF3 128 mm (5.03 ) 82 mm (3.22 ) NW EMF 171 mm (6.73 ) 97 mm (3.81 ) NW25 EMF mm (7.51 ) mm (4.66 ) NW25 Ordering information Clean application oil return kit (RV, Speedivac 2 to E2M0.7, E2M1.5) Adjustable gas ballast oil return kit (RV) Clean application oil return kit (E1M18 to E2M28) ITO20K Inlet Liquid Catchpot A A A MF30 filters 31 (1.22) Ø150 (5.91) 83 (3.27) NW (9.76) 296 (11.65) 308 (12.13) These catchpots minimize the entry of condensable vapours into the pump. Benefits of the catchpots include: Capture condensable vapours, which would otherwise condense in the pipelines or in the pump Prevents froth or spray from the process from carrying over to the pump Corrosion-resistant body Visual indication of trapped liquid level Hand-tightened drain plug, for easy drainage 52. Small Pumps and Pumping Systems

52 Ordering information ITO20K inlet catchpot, 1.84 litres capacity, weight 3.2 kg Small volume inlet catchpot 0.1 litre capacity, weight 0.3 kg Both supplied with NW25 clamp, centring-ring and O-ring. ITD20K Inlet Desiccant Trap The ITD desiccant trap is intended for use when pumping limited quantities of water vapour at high pumping speeds to a low vapour pressure using phosphorous pentoxide (P 2 O 5 ) as the desiccant. P 2 O 5 (not supplied by Edwards) absorbs more than 20% (by weight) of water whilst still maintaining a low vapour pressure. The trap body is an aluminium casting which contains a tray assembly made of stainless steel. The condition of the desiccant can be observed through a glass cover fitted to the top of the trap. Ordering information A A ITF20K Inlet Dust Filter The ITF inlet dust filters prevent the entry of dust particles into the pump. The impedance of a clean filter reduces the pumping speed of a pump by about % at mbar and 25% at 0.1 mbar. Depending on your application, you can normally clean the filter element with a vacuum cleaner or a clean air blast, and then re-use the element. The benefits of the ITF filters include: Thick aluminium casting, to withstand abrasion Tangential entry port, to promote centrifugal separation of dust particles Filter efficiency better than 96% (tested to BS2831, dust number 2). Dimensions ITO20K, ITD20K, ITC20K and ITF20K Ø171 (6.73) 124 (4.88) ITD20K Inlet Desiccant Trap ITC20K Inlet Chemical Traps A (8.07) 143 (5.63) NW25 6 (4.17) 68.5 (2.70) NW 45 The ITC series of chemical traps provides the following benefits: Protection against various aggressive vapours, which may attack the pump or pump oil Prevent high molecular weight vapours (such as might arise in a resin treatment plant), from reaching the pump. These vapours could cause lacquering or clogging The standard sorbent (activated charcoal), has relatively high trapping properties (absorbs around 25% of its own weight), even when large amounts of water vapour are being pumped When filled with activated alumina on two-stage pumps, backstreaming of pump oil can be controlled See also ITO catchpots for design advantages of the body Ordering information ITC20K inlet chemical trap charcoal charge 0.4 kg, A weight 3.5 kg Sorbent charge not supplied. Supplied with NW25 clamp, centring ring and O-ring. Ordering information ITF20K inlet dust filter (3.4) kg ITF20K element and gasket kit (0.3 kg) EBV Gas Ballast Control Valves Fit the EBV 20 valve to allow remote operation of the pump s gas ballast control. Ordering information EBV20 1 V 1-ph 50/60 Hz EBV20 (0.5 kg) V 50/60 Hz Suits the E2M0.7 to E2M28 including RV For RV and XDS pumps an adaptor is required For the E1M18/E2M28 an adapter is required A A A A A A Spares 0.5 kg activated charcoal H kg activated charcoal H kg activated alumina H kg activated alumina H Shop online at shop.edwardsvacuum.com Contact our customer service team Small Pumps and Pumping Systems 53.

53 FL20K Foreline Trap The FL20K foreline trap has been developed for use in clean pumping systems, to prevent the back-migration of rotary pump oil mist into the system. The activated alumina sorbent has the following benefits: Exceptional trapping properties for oil mist (99.7%) A very long life before it is saturated Can be rejuvenated by baking the basket containing the sorbent for 2 hours at C. The FL20K is most useful with two-stage rotary pumps, operating below 1 mbar. To maximize sorbent life, install the FL20K near the vacuum system. In common with other types of sorbent, activated alumina absorbs water. This does not affect the oil vapour trapping properties but may tend to prolong the roughing time on successive pump downs. To minimize vapour absorption, we recommend you fit a valved by-pass line. The trap body is made of aluminium and is fitted with a removable basket containing the sorbent. Dimensions Vibration Isolators FL20K Dimensions Vibration Isolators 41 (1.61) 30 (1.18) 5 (0.20) Ø25 (0.98) 74 (2.91) 60 (2.36) 2 x Ø6 (0.24) RV Pumps, E1M18, E2M18 and E2M28 Ordering information Vibration isolators E2M0.7, E2M1.5 (0.3 kg) RV, E1M/E2M18 (0.45 kg) E2M28 (0.45 kg) Oil Box Drain Kits 18 (0.71) 3.5 (0.14) 37 (1.46) Ø22 (0.97) 61 (2.40) 50 (1.97) 2 x Ø5 (0.20) E2M0.7, E2M1.5 A A A Ø82.5 (3.25) Ordering information 130 (5.12) FL20K foreline trap weight 1 kg (Supplied with 0.2 kg sorbent charge) 50 (1.97) 6.5 (0.26) 50 (1.97) NW25 A Two kits are available: RV easy oil box drain kit. This kit includes an oil drain extension tube for use when the oil is gravity drained. Fits E2M0.7, E2M1.5, RV, E1M18, E2M18, E2M28. ODP20, for use with the E1M18, E2M18 and E2M28 pumps. This accessory provides alternative methods for draining oil where access to the pump drain plug is difficult, or where there is no room for a receptacle under the drain outlet. The pack includes an oil drain extension tube for use when oil is gravity drained, and a pressure drain device with which the oil can be discharged at a high level. Ordering information Spares 0.45 kg activated alumina H kg activated alumina H RV easy oil box drain kit ODP20 oil box drain kit A A Vibration Isolators Oil Box Purge Adaptor You may need to fit vibration isolators to your pump if you mount it into a frame or a system, if the mounting points are not level or if you need to minimise the transmission of vibration and noise in your application. You must fit flexible bellows or other flexible pipes to the pump inlet and outlet. The height of these neoprene rubber isolators reduces by about 1 mm when the pump is fitted. This stainless steel adaptor enables a flow of dry inert gas to be introduced into the oil box to provide large scale dilution of process gases which cannot be dealt with sufficiently by the standard gas ballast facility. The adaptor replaces the oil filler plug, on the RV and E1M18/E2M18 pumps only. Ordering information OB20 oil box purge adaptor A Small Pumps and Pumping Systems

54 Oil Change Reminder Tag The oil change reminder tag is a useful reminder for users to change the oil when it starts to go brown. Brown oil indicates that the oil is contaminated or degraded, and must be changed to prevent mechanical wear or failure of the pump. Tie the tag onto the pump exhaust so that it hangs over the oil box. Ordering information Oil change reminder tag (pack of ) A Scroll Pump Vibration Isolators You may need to fit vibration isolators to your pump if you mount it into a frame or a system, if the mounting points are not level or if you need to minimise the transmission of vibration and noise in your application. You must fit flexible bellows or other flexible pipes to the pump inlet and outlet. The height of these neoprene rubber isolators reduces by about 1 mm when the pump is fitted. Dimensions nxds/xds35i Ø25 (0.98) 41 (1.61) 30 (1.18) 5 (0.20) 74 (2.91) 60 (2.36) 2 x Ø6 (0.24) Ordering information XDS35i (0.45 kg) nxds (0.45 kg) A A Exhaust Silencers For use on XDS pumps that are not connected to a house exhaust system. These silencers also offer exhaust filtration. Ordering information nxds XDS35i Spares Silencer spares kit nxds XDS35i A A A A A Gas Ballast Adaptor 1 Gas-ballast adaptor blank 2 Gas-ballast adaptor 3a Inlet/exhaust filter 3b Inlet/exhaust filter 4 Silencer * General view (O-ring seals not shown) 5 Exhaust nozzle 6 Vibration isolators 7 Chemical resistance conversion kit 8 Pump-to-controller cable (not shown) Gas Ballast adaptor blank (nxds) Gas Ballast adaptor (nxds) 0.25mm hole Gas ballast adaptor (nxds) no restrictor Gas Ballast adaptor with 0.25 mm hole (XDS35i/46i) A A A A Shop online at shop.edwardsvacuum.com Contact our customer service team Small Pumps and Pumping Systems 55.

55 Inlet/outlet filter with 5 micron element Technical Data NW25 Inlet Outlet filter NW40 Inlet Outlet filter (XDS35i/46i) A A Mass (RV-EM/XDS) Electrical supply for cooling fans Voltage Fuse rating Connector 23 kg/37 kg V/ V 5 A Type T 20 mm IEC320 socket Spares XDS 5 Micron filter element kit XDS 1 Micron filter element kit A A Approximate noise reduction RV E2M28 XDS35i/46i 7dBA 7dBA 9dBA Exhaust nozzle Dimensions Acoustic Enclosure Exhaust nozzle kit ¾ to 15 mm A Chemical Resistance Conversion Unit nxds6i, i &15i Chemical resistance conversion unit A nxds20i Chemical resistance conversion unit A Acoustic Enclosures Designed for use in a laboratory or an industrial environment, Edwards new acoustic enclosures are compatible with all EM, RV and nxds/xds pumps ranging up to the E2M28 series/xds46i. The acoustic enclosure reduces the noise level by up to 9dBA and incorporates internal fans to ensure adequate air cooling is provided to the pump. The design of the enclosure allows for it to be easily assembled or disassembled without tooling. A removable front panel also allows for quick access to the oil sight glass and if required a side panel can be removed allowing access to the oil filler cap (EM/RV only). The enclosure is powered via a power cable fitting into an IEC 320 socket. Simple slot together assembly means no tools are required Designed to attenuate the noise of an E2M28 by 7dBA or an XDS35i/46i by 9dBA Integrated cooling fans to maintain optimum pump running temperature Castor wheels with brakes for easy manoeuvrability Fully compatible with Edwards inlet traps, exhaust mist filters and nxds/xds silencer with extension spools (available separately) Over temperature buzzer alarm with battery back-up Dimension RV/EM nxds/xds A 790 mm 778 mm B 285 mm 442 mm C 460 mm 580 mm Ordering information RV/EM acoustic enclosure V NRD RV/EM acoustic enclosure V NRD nxds/xds acoustic enclosure V NRY5C0000 nxds/xds acoustic enclosure V NRD Accessories & Spares 2 m Electrical supply cable, UK 3 pin plug A m Electrical supply cable, N. Europe plug A m Electrical supply cable, USA/Japan plug A m Electrical supply cable, no plug A NW25 Aluminium nipple 0 mm long C NW40 Aluminium nipple 130 mm long C Small Pumps and Pumping Systems

56 Small Pumps and Accessories: Frequently Asked Questions Oil Mist Question: What accessory do I use to trap oil mist (which all oil sealed pumps emit during pump down or with gas ballast)? Answer: To meet regulations and preserve pump oil, fit a recommended Edwards oil mist filter (EMF) to the pump outlet, and connect the exhaust to an exhaust line. Question: If I operate an RV pump continuously or with high inlet pressure, what accessories do I need? Answer: Fit an Edwards mist filter (EMF) and a gas ballast oil return (GBOR) kit. Then the pump can be operated with the mode switch open and gas ballast oil return. The oil condensed in the filter will be continuously returned to the pump oil box. Vapour Processes Question: Which pump and accessories should I use if my process generates vapours which could condense in the pump? Answer: You can choose either an nxds/xds pump, or rotary pump. Gas ballast should be used with both pumps; to sweep the vapour through the pump. This prevents condensation and oil contamination. Operate the pump with gas ballast for at least an hour before and after use. Choose the size of pump taking into account the vapour pumping rate. If you selected a rotary pump, then you should fit a gas ballast oil return kit and mist filter. Change the oil frequently and keep an oil change reminder tag on the pump. DLAB would also be a suitable alternative depending on required pumping speed. Dust and Particle Processes Question: Which pump and accessory should I use if my process generates dust or grit, which could clog or damage the pump? Answer: Use a rotary pump fitted with an inlet dust filter. We do not recommend the use of scroll pumps or XDD1 pumps for these applications. Special Chemical Cleaning Processes Question: Which pump and accessory should I use if my process generates oxygen or ozone? Answer: Use a rotary pump adapted to run with Fomblin oil or nxds/ XDS. Contact Edwards for more information. Question: Are there any special considerations if my pump will be used in the vicinity of organic gases, like propane? Answer: Use a rotary pump fitted with a flameproof motor. Contact Edwards for more information. Contamination Question: Which pump and accessories should I use if I must ensure that my process and process chamber (operated below 0.1) are not contaminated with oil from the pump? Answer: Use an nxds/xds scroll pump. Alternatively, you can use a rotary pump with a FL20K foreline trap fitted to the system inlet. The trap contains activated alumina which traps the oil molecules. To maintain the alumina charge, bake the charge basket or replace as required. Question: How can I reduce the noise level of my pump? Answer: If the noise is only obvious during pumping down then fitting the exhaust with a silencer (nxds/xds pumps), or fitting an exhaust line will reduce the level. An alternative is to fit an acoustic enclosure. Contact Edwards for more information. Fomblin is a registered trademark of Solvay Solexis Shop online at shop.edwardsvacuum.com Contact our customer service team Small Pumps and Pumping Systems 57.

57 Small Pumps: Application and Accessory Information Use the information in the list below to select the best pump and accessories for your application. The information is given as a guide only; the optimum set-up may depend on your specific method of operation. Note that you need to buy the accessories separately, unless otherwise stated. ATEX and Flammable Gases The following standard pump models have an internal ATEX classification of II 3 G c IIB T4: E2M0.7, E2M1.5 E1M18, E2M18 & E2M28 RV3, RV5, RV8, RV12 nxds6i, nxdsi, nxds15i, nxds20i, XDS35i The following standard pump models operating on hydrocarbon oil can be supplied with flameproof motors providing an external classification of II 2 G IIB T4 (or IIC): RV3, RV5, RV8, RV12 E1M18, E2M18 Gel Dryers Recommended pump: nxds/xds or DLAB. Suggested accessories for DLAB: Separator. Optional accessories for DLAB: Condenser, gas ballast valve. Rotary Evaporation and Vacuum Ovens Recommended pump: nxds/xds or DLAB. Suggested accessories for DLAB: Separator. Optional accessories for DLAB: Condenser, gas ballast valve. Centrifugal Concentration Recommended pump: nxds/xds. Vacuum Filtration Recommended pump: nxds/xds or DLAB. Suggested accessories for DLAB: Separator. Optional accessories for DLAB: Condenser, gas ballast valve. Distillation/Extraction Apparatus Recommended pump: nxds/xds or DLAB. Suggested accessories for DLAB: Separator. Optional accessories for DLAB: Condenser, gas ballast valve. Freeze Dryers Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories: Mist filters, oil return. MS Inlet Systems (like Electro-Spray) Recommended pump: XDS35i or E2M28. Suggested accessories for rotary vane pumps: Mist filter, oil return. Suggested accessories for nxds/xds: Silencer. Load Locks, Fume Hoods and Glove Boxes Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: Mist filter, oil return. Suggested accessories for nxds/xds: Silencer. Ultra High Speed Centrifuges Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories: Mist filter Suggested accessories for rotary pumps: Mist filters, oil return. Leak Detection, Electron Microscopes, Mass Spectrometers and Lasers Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for nxds/xds: Silencer. Surface Science and Particle Size Analysers Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for nxds/xds: Silencer. 58. Small Pumps and Pumping Systems

58 High Energy Physics Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for nxds/xds: Silencer. Helium or Rare Gas Recirculation Recommended pumps: nxds/xds Backing Turbomolecular Pumps Recommended pump: nxds/xds, XDD1 or rotary vane pumps. Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for nxds/xds: Silencer. Refrigeration, Air Conditioning Systems Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for nxds/xds: Silencer. Vacuum Furnace Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: ITF20K, Mist filter. Suggested accessories for nxds/xds: Silencer. Azide Forming Applications Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: Mist filter. Suggested accessories for nxds/xds: Silencer. Backing Diffusion Pumps Recommended pump: nxds/xds or rotary vane pumps. Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for nxds/xds: Silencer. Notes FL20K is an inlet trap, to prevent oil back-streaming. ITF20K is an inlet trap, to capture dust particles. The gas ballast facility allows atmospheric air into the pump, minimising the formation of condensates (which contaminate the oil in rotary pumps). An oil return kit is available for all RV and EM rotary vane pumps to allow oil to be returned from the mist filter to the pump. A gas ballast oil return is also available to allow oil to return and have gas ballast flow. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Pumps and Pumping Systems 59.

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60 SMALL DRY PUMPS THE ULTIMATE DRY CHOICE nxds Dry Scroll Pump 62 XDS Scroll Vacuum Pump 68 XDD1 Diaphragm Vacuum Pump 72 D-LAB Diaphragm Vacuum Pump 75 Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 61.

61 nxds DRY SCROLL PUMP THE ULTIMATE DRY CHOICE With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features, the nxds dry scroll pump is the best performing pump in its class. nxds improves on the original XDS pump technology by offering increased pumping speeds, combined with lower ultimate pressures, low power consumption and reduced noise. The gas ballast allows for pumping of condensable vapours, including water, solvents, dilute acids and bases. nxds pumps feature the very latest in tip seal technology, giving a significantly longer life between tip seal changes. nxds-c has been modified so that it is more suitable for use on vapour handling processes and may be used in some applications involving corrosive substances. This chemically resistant version is fitted with Chemraz internal valve pads and stainless steel fittings. nxds-r has the gas ballast blanked off so it cannot be accidently opened. This is useful for applications such as rare gas recirculation or gas recovery. Features and Benefits Lubricant-free within the vacuum envelope and hermetically sealed means a totally clean and dry vacuum to prevent cross contamination. Advanced scroll-form and tip-seal technologies deliver best in-class vacuum performance and unrivalled ultimate vacuum levels. Unique tip seal design significantly reduces wear to minimise maintenance and extend service life. Quiet operation with typical noise during operation < 52 db(a) for minimal environmental impact. Advanced interface providing a variety of traditional and analogue and digital control methods enabling remote control/monitoring via RS232 or RS485. Integrated inverter drive with auto sensing input delivers optimised pumping performance globally. Pump range includes 6,, 15 and 20 m 3 h -1. Applications Backing turbomolecular pumps. Chamber evacuation. Chemical applications including gel dryers and solvent recovery. Electron microscopy. High energy physics. Mass spectrometry. Pump Range nxds6i nxds6i nxds6ic nxds6ir nxdsi nxdsi nxdsic nxdsir nxds15i nxds15i nxds15ic nxds15ir nxds20i nxds20i nxds20ic nxds20ir Chemraz is a registered trademark of Greene Tweed 62. Small Dry Pumps

62 Performance Curves nxds6i Dry Scoll pump nxds6i nxds6i Performance Curve Peak pumping speed 6.2 m 3 h -1 (3.6 ft 3 min -1 ) Ultimate Pressure mbar (0.015 Torr) Ordering information nxds6i V, V, 1ph Hz nxds6ic V, V, 1ph Hz nxds6ir V, V, 1ph Hz A A A Normal Pumping Speed 4 min Standby Power 2 Normal Full Power 5 min Standby Speed 3 Normal GB speed nxdsi Dry Scoll pump nxdsi Peak pumping speed 11.4 m 3 h -1 (6.7 ft 3 min -1 ) Ultimate Pressure mbar (0.005 Torr) nxdsi Performance Curve Ordering information nxdsi V, V, 1ph Hz nxdsic V, V, 1ph Hz nxdsir V, V, 1ph Hz A A A Normal Pumping Speed 4 min Standby Power 2 Normal Full Power 5 min Standby Speed 3 Normal GB speed Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 63.

63 nxds15i Dry Scoll pump nxds15i Performance Curve nxds15i Peak pumping speed 15.1 m 3 h -1 (8.9 ft 3 min -1 ) Ultimate Pressure mbar (0.005 Torr) 1 Normal Pumping Speed 4 min Standby Power 2 Normal Full Power 5 min Standby Speed 3 Normal GB speed nxds15i V, V, 1ph Hz nxds15ic V, V, 1ph Hz nxds15ir V, V, 1ph Hz A A A nxds20i Dry Scoll pump nxds20i Performance Curve Peak pumping speed 22.0 m 3 h -1 (13.0 ft 3 min -1 ) Ultimate Pressure mbar (0.022 Torr) nxds20i 1 Normal Pumping Speed 4 min Standby Power 2 Normal Full Power 5 min Standby Speed 3 Normal GB speed nxds20i V, V, 1ph Hz nxds20ic V, V, 1ph Hz nxds20ir V, V, 1ph Hz A A A Small Dry Pumps

64 Dimensions nxds dimensions Pump views A B A 9 mm wide slots 4 off B Rubber feet 4 off All nxds variants are of the same dimensions. Dimensions in mm (inch). Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 65.

65 Technical Data Units nxds6i nxdsi nxds15i nxds20i Nominal rotational speed rpm 1800 Displacement m 3 h -1 / ft 3 min / / / / 16.5 Peak pumping speed m 3 h -1 / ft 3 min / / / / 13.0 Ultimate vacuum (total pressure) mbar / Torr / / / Minimum standby rotational speed rpm 1200 Speed control resolution (percentage of full rotation speed) 1% Max water vapour pumping rate gh Maximum continuous inlet pressure mbar Voltage input V 0-127, (+/-%) Voltage frequency Hz 50/60 Motor power 1-ph* W Power connector 1-ph IEC EN60320 C13 Weight kg / lb 26.2 / / / / 56 Inlet flange NW25 Exhaust flange NW25 Noise level** db(a) 52 Vibration at inlet flange mms -1 (rms) < 4.5 Leak tightness (static) mbar ls -1 < 1 x -6 Operating temperature range o C / F to 40 / 41 to 4 * Typical. ** For low fan speed, typical at ultimate end when load/ambient conditions allow. 66. Small Dry Pumps

66 Service, Spares and Accessories The control cable is used to connect the nxds pump directly to the RS485 or RS232 serial input on your control equipment or a PC, or alternatively, to an Edwards controller such as a TIC (Turbo Instrument Controller) or TAG (Turbo & Active Gauge controller). Pump to TIC/TAG Controller Cable Interface cable 1.0 m D m electrical supply cable for 1-ph pumps, UK, three-pin plug A Interface cable 2.0 m D m electrical supply cable for 1-ph pumps, North European plug A Interface cable 5.0 m D m electrical supply cable for 1-ph pumps, North America/Japan plug A m electrical supply cable for 1-ph pumps, no plug A Gas Ballast Adaptor Gas Ballast adaptor blank Gas Ballast Adaptor 0.25mm restrictor Gas Ballast Adaptor no restrictor A A A Exhaust Exhaust silencer Silencer spares kit Exhaust nozzle kit ¾ to 15 mm NW25 inlet/outlet filter 5 micron XDS Filter 5 micron element kit XDS Filter 1 micron element kit A A A A A A Vibration Isolator nxds Vibration isolator (0.45 kg) A Chemical Resistance Conversion Unit nxds6i, i & 15i Chemical resistance conversion unit nxds20i Chemical resistance conversion unit A A nxds Service kits nxds Exhaust and gas ballast kit nxds Tip seal service kit A A nxds Bearing replacement kit Service A Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 67.

67 XDS SCROLL VACUUM PUMP THE ULTIMATE DRY CHOICE XDS scroll pumps have become industry standard when dry pumping is essential, proving to be a robust and clean vacuum pump solution in a range of applications and processes. The XDS35i pump has an innovative bearing shield that isolates the vacuum environment from all forms of lubricant, making it not only lubricant-free but hermetically sealed. XDS35iNGB variant has had the gas ballast feature removed for applications such as rare gas recirculation and gas recovery. The XDS46i shares many of the same features of the XDS35i but with a peak speed of 40 m 3 h -1. The pump has been optimised for maximum pumping speed at inlet pressures between 1 mbar and mbar, making it ideally suited for LCMS and ICPMS applications requiring higher pumping speeds. The C variant has been modified so that it is more suitable for use on vapour handling processes and may be used in some applications using corrosive substances. The C version is fitted with Chemraz internal valve pads and stainless steel exhaust port. Chemraz is a registered trademark of Greene Tweed Features and Benefits Lubricant-free within the vacuum envelope and hermetically sealed means a totally clean and dry vacuum to prevent cross contamination. No atmosphere to vacuum shaft seals means bearings are completely isolated, this prevents process attack and enable the bearings to run cooler and last longer. No oil to change eliminating cost of contaminated oil disposal. Simple single sided scroll design allows maintenance to be done in minutes for low cost of ownership and maximum up time. Inverter drive for consistent pumping speeds worldwide. Pump range includes 35 and 40 m 3 h -1. Applications Automotive; brake line and air conditioning evacuation. Backing turbomolecular pumps. Chemical applications including gel dryers and solvent recovery. Coating systems. High energy physics. Mass spectrometry. Pump Range XDS XDS35i XDS35iNGB XDS35iC XDS46i XDS46iC 68. Small Dry Pumps

68 Performance Curves XDS35i Scroll vacuum pump XDS35i XDS35i Performance Curve Peak pumping speed m 3 h -1 (21 ft 3 min -1 ) Ultimate Pressure 1 x -2 mbar (8 x -3 Torr) (m 3 h -1 ) XDS35i (mbar) Ordering information (Pa) XDS35i 0-120/ V 1 ph 50/60 Hz set to 230V XDS35i NGB 0-120/ V 1 ph 50/60 Hz set to 230V XDS35iC 0-120/ V 1 ph 50/60 Hz set to 230V A A A Speed 2 Power Note: Mains leads must be ordered separately, please see accessories and spares at the end of this section for the relevant standard XDS pump for the correct mains lead. XDS46i Scroll vacuum pump XDS46i XDS46i Performance Curve Peak pumping speed 40 m 3 h -1 (23.5 ft 3 min -1 ) Ultimate Pressure 5 x -2 mbar (m 3 h -1 ) (W) (4 x -2 Torr) XDS46i (mbar) Ordering information (mbar) (Pa) XDS46i 0-120/ V 1 ph 50/60 Hz set to 230V XDS46iC 0-120/ V 1 ph 50/60 Hz set to 230V A A Note: Mains leads must be ordered separately, please see accessories and spares at the end of this section for the relevant standard XDS pump for the correct mains lead. 1 Speed 2 Power Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 69.

69 Dimensions XDS35i/46i dimensions Pump views 333 (13.11) 180 (7.09) 50 (1.97) 397 (15.63) 224 (8.82) 388 (15.28) 290 (11.42) 212 (8.35) 476 (18.74) 1 2 A B 353 (13.90) XDS35i / 46i A 150 (5.91) B (9.74) 1 NW40 2 NW25 Dimensions in mm (inch). 70. Small Dry Pumps

70 Technical Data Units XDS35i XDS46i Displacement 50 or 60 Hz m 3 h -1 / ft 3 min / / 35 Peak pumping speed 50 or 60 Hz m 3 h -1 / ft 3 min / / 23.5 Ultimate vacuum (Total pressure) mbar / Torr 1 x -2 / 8 x -3 5 x -2 / 4 x -2 Max inlet pressure for water vapour mbar / Torr 35 / / 30 Max water vapour pumping rate GB I gh Max water vapour pumping rate GB II gh Max allowed outlet pressure bar gauge / psig* 0.2 / 2.9 Max allowed inlet and GB pressure bar gauge / psig* 0.5 / 7 Motor power kw 0.52 Power connector IEC EN60320 C19 Nominal rotation speed rpm 1750 Weight kg / lb 48 / 5 Inlet flange NW40 Exhaust flange NW25 Noise level db(a) Vibration mms -1 (rms) < 4.5 Leak tightness (static) mbar ls -1 < 1 x -6 Operating temperature range C / F to 40 / 50 to 4 *1 bar gauge / 14 psig for short period of time only Service, Spares and Accessories XDS Accessories Exhaust silencer XDS35i Gas Ballast Adapter with 0.25 mm hole XDS NW25 Inlet Outlet filter XDS NW40 Inlet Outlet Filter XDS Filter 5 micron Element kit XDS Filter 1 micron Element kit Vibration Isolator A A A A A A A XDS kits Tip seal kit XDS35i Tip seal kit XDS46i Silencer spares kit Electrical Supply Cable A A A m Electrical supply cable, no plug A m Electrical supply cable, North America/ A Japan plug 2 m Electrical supply cable, North European plug A m Electrical supply cable, UK, three-pin plug A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 71.

71 XDD1 DIAPHRAGM VACUUM PUMP THE ULTIMATE DRY CHOICE XDD1 diaphragm pumps are used for backing small compound turbomolecular pumps in clean, high vacuum applications, and also designed to be free standing bench top units. A typical ultimate pressure of better than 5 x -8 mbar can be achieved when using an XDD1 to back a 70 ls -1 turbomolecular pump. The 24 V version is designed to provide a complete pumping package using the Edwards Turbo and Instrument Controller (TIC). The d.c. voltage motor runs on 24 V via a 15 pin DIN connector. By selecting the appropriate mode the pump speed can be controlled by the user to provide variable pumping speed. This version is suited to the customer who is building their own a system. The pump is a compact and efficient. Under normal conditions the XDD1 is virtually maintenance free, the lifetime of the diaphragms and valves is typically >,000 operating hours, depending on the application. Features and Benefits Dry pumping, lubricant free technology eliminating the need for costly oil changes and disposal. Lightweight and compact with a small footprint allowing flexibility of use. Ideal backing pump for small turbomolecular pumps. Complies with EN6, EN12, CSA/UL standards. Worldwide 115/230 V or 24 V options. IEC C14 connector on a.c. pumps. Applications Residual gas analysis. Mass spectrometers. Cryostat and Dewar evacuation. Ion pump evacuation. Surface science. Pump Range XDD1 XDD1 115/230 V AC XDD1 24 V DC 72. Small Dry Pumps

72 Performance Curves XDD1 Diaphragm vacuum pump XDD1 XDD1 Performance Curve Pumping speed a.c. 1.2 m 3 h -1 50Hz 1.4 m 3 h Hz d.c. 0.6 m 3 h rpm 1.4 m 3 h rpm (factory setting) 1.7 m 3 h rpm Ultimate vacuum (typical) < 2 mbar (m 3 h -1 ) XDD1 A.C (mbar) (Pa) Ordering information XDD1 Diaphragm pump V/ V 50/60 Hz XDD1 Diaphragm pump 24 V d.c. A A Hz 2 60 Hz Pumps are not supplied with connection cables. A suitable cable should be ordered with the pump. (m 3 h -1 ) XDD1 D.C (mbar) (Pa) Dimensions rpm rpm XDD1 a.c. dimensions XDD1 d.c. dimensions Inlet 2 Outlet Dimensions in mm (inch). Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 73.

73 Technical data a.c. d.c. Units Pumping speed XDD1 50 Hz m 3 h Hz m 3 h rpm (factory settings) m 3 h rpm (factory settings) m 3 h rpm m 3 h Ultimate vacuum (typical) mbar < 2 Ambient temperature limit C to 40 Inlet connection Exhaust connection NW16 The pump is fitted with a silencer which can be removed and an exhaust line connected with a ⅛ BSP fitting Max allowed inlet pressure bar (abs) 1 Power connector IEC EN60320 C13 Units XDD1 Motor power a.c. W 80 d.c. W 64 Weight a.c. kg 6.5 d.c. kg 4.1 Service, Spares and Accessories Service kit XDD1 diaphragm service kit 2 m Electrical Supply Cable A m electrical supply cable for 1-ph pumps, UK plug 3A A m electrical supply cable for 1-ph pumps, North European plug A m electrical supply cable for 1-ph pumps, North America/Japan plug A m electrical supply cable for 1-ph pumps, no plug A Extension cable XDD/DX/EXDC Extension cable 1 m XDD/DX/EXDC Extension cable 2 m XDD/DX/EXDC Extension cable 5 m D D D Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. 74. Small Dry Pumps

74 D-LAB DIAPHRAGM VACUUM PUMP PERFORMANCE YOU CAN RELY ON D-LAB membrane pumps with their chemically resistant Teflon heads, diaphragms and Kalrez valves, offer the chemical or pharmaceutical laboratory user a wide range of choice. The one head, 0 mbar ultimate vacuum pumps are suitable for use with drying equipment or for replacing water-jet pumps, whilst the two head, 8 mbar ultimate vacuum pumps are suitable for rotary evaporation, gas transfer and a wide range of medium vacuum applications. Features and Benefits Applications 0% lubricant free, maintenance free and quiet. Six different pumping capacities and modular expansion the D-LAB can be optimised for any application. All parts of the pump head in contact with gases being pumped are resistant against aggressive substances (PTFE, FFKM, PVDF). Rotary evaporation. Gel drying. Vacuum desiccation. Vacuum filtration. Vacuum degassing. Pump Range D-LAB D-LAB -0 D-LAB 20-0 D-LAB 34-0 D-LAB -8 D-LAB 20-8 D-LAB 34-8 Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 75.

75 Performance Curves D-LAB Diaphragm vacuum pump D-LAB Pumping speed (air) -0, m 3 h -1, lmin , m 3 h -1, 20 lmin , m 3 h -1, 34 lmin -1 Ultimate vacuum, 50 Hz (60 Hz) -0, 20 0, mbar (75 mbar) -8, 20-8, mbar (6 mbar) 1 V pumps are supplied with USA plug; V pumps are supplied with an IEC connector but mains cable with correct plug must be ordered separately. Ordering information D-LAB -0, diaphragm pump, 1 V, 60 Hz, 1-ph D-LAB -0, diaphragm pump, V, 50 Hz, 1-ph D-LAB 20-0, diaphragm pump, 1 V, 60 Hz, 1-ph D-LAB 20-0, diaphragm pump, V, 50 Hz, 1-ph D-LAB 34-0, diaphragm pump, 1 V, 60 Hz, 1-ph D-LAB 34-0, diaphragm pump, V, 50 Hz, 1-ph D-LAB -8, diaphragm pump, 1 V, 60 Hz, 1-ph D-LAB -8, diaphragm pump, V, 50 Hz, 1-ph D-Lab 20-8, diaphragm pump, 1 V, 60 Hz, 1-ph D-Lab 20-8, diaphragm pump, V, 50 Hz, 1-ph D-LAB 34-8, diaphragm pump, 1 V, 60 Hz, 1-ph D-LAB 34-8, diaphragm pump, V, 50 Hz, 1-ph A A A A A A A A A A A A D-LAB Performance Curve (m 3 h -1 ) D-LAB, 50Hz (m 3 h -1 ) D-LAB, 50Hz (mbar) (mbar) (Pa) (Pa) (ft 3 min -1 ) D-LAB, 60Hz (Torr) (ft 3 min -1 ) D-LAB, 60Hz (Torr) 1 D-LAB D-LAB D-LAB -0 1 D-LAB D-LAB D-LAB Small Dry Pumps

76 Dimensions DLAB dimensions One head pump Two head pump D F E A B C A B C D E F Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 77.

77 Technical Data Units D-LAB Pumping speed (air) -0, -8 m 3 h -1 / lmin / 20-0, 20-8 m 3 h -1 / lmin / , 34-8 m 3 h -1 / lmin -1 2 / 34 Ultimate vacuum -0, 20-0, 34-0 mbar, Hz / mbar, Hz 0, 50 / 75, 60-8, 20-8, 34-8 mbar, Hz / mbar, Hz 8, 50 / 6, 60 Inlet and outlet connection Riffled nozzle, suitable for 9 mm i.d. hose Maximum inlet pressure bar 1 Motor power and current -0, 1 V 60 Hz W / A 1 / 1.3-0, V 50Hz W / A 0 / , 1 V 60 Hz W / A 145 / , V 50Hz W / A 130 / , 1 V 60 Hz W / A 220 / , V 50Hz W / A 180 / 1.4-8, 0 V 60 Hz W / A 1 / 1.3-8, V 50Hz W / A 90 / , 1 V 60 Hz W / A 130 / , V 50Hz W / A 120 / , 1 V 60 Hz W / A 250 / , V 50 Hz W / A 200 / 1.5 Enclosure rating IP44 Operating temperature o C 5-40 Weight -0 kg / lbs 5.8 / kg / lbs 7.1 / kg / lbs.3 / kg / lbs 6.9 / kg / lbs 9.3 / kg / lbs 12.6 / Small Dry Pumps

78 Service, Spares and Accessories D-LAB Accessories D-LAB Controller 230 V D-LAB Controller 0/1 V D-LAB Baseplate +20-x Baseplate for D-LAB pumps 34-0, 34-8 D-LAB Separator D-LAB Condenser Gas Ballast for D-LAB pumps -0, -8 Gas Ballast for D-LAB pumps Electrical Supply Cable A A A A A A A A m electrical supply cable for 1-ph pumps, UK, three-pin plug A m electrical supply cable for 1-ph pumps, North European plug A m electrical supply cable for 1-ph pumps, no plug A Service kits Service kit for D-LAB -0 Service kit for D-LAB 20-0 Service kit for D-LAB 34-0 Service kit for D-LAB -8 Service kit for D-LAB 20-8 Service kit for D-LAB 34-8 A A A A A A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 79.

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80 SMALL OIL SEALED PUMPS PERFORMANCE YOU CAN RELY ON E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps 82 RV Oil Sealed Rotary Vane Pumps 86 RV ATEX Oil Sealed Rotary Vane Pumps 94 EM18 and 28 Oil Sealed Rotary Vane Pumps 97 EM18 and E2M18 Atex Oil Sealed Rotary Vane Pumps 3 Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 81.

81 E2M0.7 AND 1.5 OIL SEALED ROTARY VANE PUMPS PERFORMANCE YOU CAN RELY ON E2M0.7 and E2M1.5 two stage oil sealed rotary vane pumps are renowned for achieving high ultimate vacuum and rapid pumping speeds, with quiet operation and compact size. Providing long term reliability, these pumps have become the industry standard in range of scientific and laboratory applications, and the ideal partner for your tubomolecular pump. The drive is provided through and Oldham coupling by a single phase motor. The motor is totally enclosed and cooled by the motor cooling fan which directs the air along the motor fins. A thermal overload device is fitted to the motor which switches off the pump if the motor gets too hot, this will automatically reset when the motor cools down and restarts the pump. Features and Benefits Pumping speeds of either 0.7 to 1.5 m 3 h 1. Industry proven long term reliable performance. Free standing, compact design providing flexibility of use. Alternate side inlet connection port so that overall installation height can be reduced to minimum when required. Low noise, with the E2M0.7 at just 43 db(a). Low energy consumption, with the E2M0.7 at 0.09 kw. O ring sealed sight glass allows visual inspection of oil level and condition. Gas ballast valve for large water vapour handling capacity. Simple installation and operation with no customer wiring. Forced air cooling ensures low pump surface temperature. Internal ATEX classification of Ex II 3 G c IIB T4. Approved EN6, CSA22.2 and UL6. Applications Analytical instruments. Leak detectors, helium. Research and development. Backing turbomolecular pumps. Laboratory bench top vacuum. Pump Range EM E2M0.7 E2M Small Oil Sealed Pumps

82 Performance Curves E2M0.7 Rotary vane pump E2M0.7 E2M0.7 Performance Curve Displacement 0 50 Hz 0.9 m 3 h 1/ 0.5 ft 3 min 1 60 Hz 1.1 m 3 h 1/ 0.6 ft 3 min 1 Speed (m 3 h -1 ) Hz 0.75 m 3 h 1/ 0.4 ft 3 min Hz 0.95 m 3 h 1/ 0.5 ft 3 min Hz 2 (mbar) (Pa) 0 E2M V, 1 ph, 50/60 Hz, IEC connectors A E2M V, 1 ph, 50/60 Hz, IEC connectors A Each EM0.7 pump is supplied with 1 litre of Ultragrade 15 oil, O ring and centering ring, two Allen keys and spare seals for oil drain and filter plugs. 3-1 (ft min ) Hz 2 (Torr) E2M1.5 Rotary vane pump E2M1.5 E2M1.5 Performance Curve Displacement 50 Hz 1.8 m 3 h 1/ 1 ft 3 min 1 60 Hz 2.2 m 3 h 1/ 1.3 ft 3 min 1 Speed 50 Hz 1.6 m 3 h 1/ 0.8 ft 3 min 1 60 Hz 2.0 m 3 h 1/ 1.2 ft 3 min 1 (m 3 h -1 ) Hz (mbar) (Pa) E2M V, 1 ph, 50/60 Hz, IEC connectors A E2M V, 1 ph, 50/60 Hz, IEC connectors A E2M1.5 interstage V, 1 ph, 50/60 Hz, IEC connectors E2M1.5 interstage V, 1 ph, 50/60 Hz, IEC connectors A A (ft 3 min -1 ) Hz (Torr) Each EM1.5 pump is supplied with 1 litre of Ultragrade 15 oil, O ring and centering ring, two Allen keys and spare seals for oil drain and filter plugs. 1 Without Gas Ballast 2 With Gas Ballast Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 83.

83 Dimensions E2M0.7/1.5. dimensions 155 (6.) 142 (5.59) (8.91) (6.55) 155 (6.) 323 (12.71) 85 (3.34) 75 (2.95) 1 (4.33) 11.5 (0.45) (5.51) 125 (4.92) 2 19 (0.75) 18 (0.70) 134 (5.27) 46.5 (1.83) 54 (2.12) 25 (0.98) 30 (1.18) V motor 2 Handle can be removed 3 Alternative inlet position Technical Data Units E2M0.7 E2M1.5 Displacement (swept volume) 50 Hz m 3 h 1 /ft 3 min 1 0.9/ /1 60 Hz m 3 h 1 /ft 3 min 1 1.1/ /1.3 Speed (Pneurop 6602) 50 Hz m 3 h 1 /ft 3 min / / Hz m 3 h 1 /ft 3 min / /1.2 Ultimate vacuum (total pressure) without gas ballast mbar/torr 3.0 x 3/ 2.3 x 3 3 x 3/ 2.3 x 3 with full gas ballast mbar/torr 2.0 x 1/ 1.5 x x 2/ 1.9 x 2 Inlet connection NW flange Outlet connection Nozzle 11 mm external Ø removable from ⅜" BSP tapped hole Maximum permitted pressure at outlet 0.5 bar gauge/7 psig Maximum inlet pressure for water vapour mbar/torr 15/11 Maximum water vapour pumping rate gh Motor power kw Nominal rotational speed 50/60 Hz rpm 1400/ /3400 Power connector IEC EN60320 C13 Operating temperature range C Weight, without oil kg/lbs /22 Noise db(a) 50 Hz 50 Hz Noise with acoustic enclosure db(a) E2M Hz E2M Hz Oil capacity maximum litre 0.28 Oil capacity minimum litre 0.2 Recommended oil (supplied) Ultragrade Small Oil Sealed Pumps

84 Service, Spares and Accessories Model EMF3 mist filter A Ultragrade 15 oil 1 litre H Ultragrade 15 oil 4 litre H m electrical supply cable for 1 ph pumps, UK, three pin plug A m electrical supply cable for 1 ph pumps, North European plug A m electrical supply cable for 1 ph pumps, North America/Japan plug A m electrical supply cable for 1 ph pumps, no plug A Spares Kit C&O E2M0.7/1/1.5 A Spares Kit Blade E2M0.7/1.5 A NW Centring Nitrile S/S Pk1 C NW O Ring Viton Pk 5 H NW x ⅜'' BSP adapter A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 85.

85 RV OIL SEALED ROTARY VANE PUMPS PERFORMANCE YOU CAN RELY ON The RV series of small oil sealed rotary vane pumps deliver excellent ultimate vacuum pressure, high pumping speeds and superior vapour handling capabilities with quiet operation. With over 300,000 units produced, these pumps offer proven performance that sets the industry standard for R&D and scientific pumping applications. All RV pumps are approved to UL and CSA standards by an external test house and feature our unique mode selector switch, meaning one model is suitable for both high vacuum or high throughput applications. In summary, you can rest assured that when you choose an Edwards RV oil sealed rotary vane pump you are choosing a product you can rely on from a company you can trust. Features and Benefits High reliability generous lubrication of moving parts. Safe process and systems fast acting inlet valve for best in class anti suck back protection. Configured to meet your vacuum needs mode selector and two position gas ballast. No unplanned downtime designed for easy maintenance. Better work environment quiet running and intrusive frequencies minimised. Two position gas ballast allows either 60 g/hr or a class leading 220 g/hr (290 g/hr on RV12) of water vapour to be handled. Universal motor to cover the widest possible voltage and frequency range from a single variant. Smooth controlled inlet valve opening by oil pressure to eliminate pressure surges. Rapid closing inlet valve within 0.4 seconds of pump stopping. Applications Analytical instruments. Laboratory bench top vacuum. Backing turbomolecular pumps. Freeze drying. Research and development. Pump Range RV3 RV3 PFPE RV3 RV5 RV5 PFPE RV5 RV8 RV8 PFPE RV8 RV12 RV12 PFPE RV Small Oil Sealed Pumps

86 Performance Curves RV3 Oil Sealed Rotary Pump RV3 RV3 Performance Curve Ordering information Displacement 50 Hz 3.7 m 3 h ft 3 min 1 60 Hz 4.5 m 3 h ft 3 min 1 Speed (Pneurop 6602) 50 Hz 3.3 m 3 h ft 3 min 1 60 Hz 3.9 m 3 h ft 3 min 1 (m 3 h -1 ) RV3, 50Hz (mbar) (Pa) RV3 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe A (ft 3 min -1 ) RV3 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz factory set to 380/460 V A A RV3, 60Hz (Torr) RV3 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for USA A PFPE RV3 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe PFPE RV3 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan PFPE RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz, factory set to 380/460 V A A A High vacuum mode, gas ballast = 0 2 High throughput mode, gas ballast mode = 0 and High vacuum mode, gas ballast = I 3 High vacuum and throughput mode, gas ballast = II PFPE RV3 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for USA A Each RV pump is supplied with 1 litre of Ultragrade 19 oil, inlet filter and O ring. For PFPE prepared pumps Fomblin oil to be ordered separately. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 87.

87 RV5 Oil Sealed Rotary Pump RV5 Performance Curve RV5 (m 3 h -1 ) (ft 3 min -1 ) RV5, 50Hz (mbar) RV5, 60Hz (Torr) 1 High vacuum mode, gas ballast = 0 2 High throughput mode, gas ballast mode = 0 and High vacuum mode, gas ballast = I 3 High vacuum and throughput mode, gas ballast = II (Pa) Displacement 50 Hz 5.8 m 3 h ft 3 min 1 60 Hz 7.0 m 3 h ft 3 min 1 Speed (Pneurop 6602) 50 Hz 5.1 m 3 h ft 3 min 1 60 Hz 6.2 m 3 h ft 3 min 1 Ordering information RV5 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe RV5 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz, factory set to 380/460 V RV5 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for USA PFPE RV5 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe PFPE RV5 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan PFPE RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz, factory set to 380/460 V PFPE RV5 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for USA A A A A A A A A Each RV pump is supplied with 1 litre of Ultragrade 19 oil, inlet filter and O ring. For PFPE prepared pumps Fomblin oil to be ordered separately. 88. Small Oil Sealed Pumps

88 Performance Curves RV8 Oil Sealed Rotary Pump RV8 RV8 Performance Curve Displacement 50 Hz 9.7 m 3 h ft 3 min Hz 11.7 m 3 h ft 3 min 1 (m 3 h -1 ) -1 Speed (Pneurop 6602) 50 Hz 8.5 m 3 h ft 3 min 1 60 Hz m 3 h 1 RV8, 50Hz (mbar) (Pa) Ordering information 5.9 ft 3 min 1 1 RV8 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe RV8 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz, factory set to 380/460 V RV8 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for USA PFPE RV8 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe PFPE RV8 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan PFPE RV / V, 3 ph, 50 Hz, and /460 V, 3 ph, 60 Hz, factory set to 380/460 V PFPE RV8 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for Europe A A A A A A A A (ft 3 min -1 ) 0-1 RV8, 60Hz (Torr) 1 High vacuum mode, gas ballast = 0 2 High throughput mode, gas ballast mode = 0 and High vacuum mode, gas ballast = I 3 High vacuum and throughput mode, gas ballast = II Each RV pump is supplied with 1 litre of Ultragrade 19 oil, inlet filter and O ring. For PFPE prepared pumps Fomblin oil to be ordered separately. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 89.

89 RV12 Oil Sealed Rotary Pump RV12 Performance Curve RV12 (m 3 h -1 ) RV12, 50Hz (mbar) (Pa) Displacement 50 Hz 14.2 m 3 h ft 3 min 1 60 Hz 17 m 3 h 1 ft 3 min 1 Speed (Pneurop 6602) 50 Hz 12 m 3 h ft 3 min 1 60 Hz 14.2 m 3 h ft 3 min 1 1 Ordering information (ft 3 min -1 ) 0 RV12, 60Hz High vacuum mode, gas ballast = 0 2 High throughput mode, gas ballast mode = 0 and High vacuum mode, gas ballast = I 3 High vacuum and throughput mode, gas ballast = II (Torr) RV12 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe RV12 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz, factory set to 380/460 V RV12 115/230 V, 1 ph, 50/60 Hz, factory set to 115 V for USA PFPE RV12 115/230 V, 1 ph, 50/60 Hz, factory set to 230 V for Europe PFPE RV12 0/200 V, 1 ph, 50/60 Hz, factory set to 200 V for Japan PFPE RV / V, 3 ph, 50 Hz and /460 V, 3 ph, 60 Hz, factory set to 380/460 V PFPE RV12 two stage Rotary vane pump 115/230 V 1 ph 50/60 Hz, factory set to 115 V for USA A A A A A A A A Each RV pump is supplied with 1 litre of Ultragrade 19 oil, inlet filter and O ring. For PFPE prepared pumps Fomblin oil to be ordered separately. 90. Small Oil Sealed Pumps

90 Dimensions RV Dimensions (1.46) (1.26) 1 3 A B C F NW25 NW (8.70) E D 120 (4.72) 4 x Ø9 (0.35) 78 (3.07) 158 (6.22) 230 (9.06) (0.39) RV3/5 RV8 RV12 A 430 (16.93) 470 (18.50) 490 (19.29) B 127 (5) 161 (6.34) 181 (7.13) C 29 (1.14) 35 (1.38) 35 (1.38) D 4 (0.16) 4 (0.16) 4 (0.16) E 267 (.51) 261 (.28) 261 (0.28) F 429 (16.89) 469 (18.46) 489 (19.25) Dimensions in mm (inch). 1 1 Phase motor 2 3 Phase motor 3 Retractable handle RV3 and 5 only. RV8 and 12 have lifting eye Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 91.

91 Technical Data Displacement Units RV3 RV5 RV8 RV12 50 Hz m 3 h 1 /ft 3 min 1 3.7/ / / / Hz m 3 h 1 /ft 3 min 1 4.5/ / /6.9 17/ Speed (Pneurop 6602) 50 Hz m 3 h 1 /ft 3 min 1 3.3/2 5.1/ /5 12/ Hz m 3 h 1 /ft 3 min 1 3.9/ /3.7 / /8.4 Ultimate pressure mbar/torr 2.0 x 3 /1.5 x 3 Ultimate pressure GB I mbar/torr 3.0 x 2 /2.3 x 2 Ultimate pressure GB II mbar/torr 1.2 x 1 / 9.1 x x 1 / 7.5 x 2 Ultimate Pressure with Fomblin mbar/torr 2 x 2 /1.5 x 2 6 x 2 /4.6 x 2 Max inlet pressure for water vapour mbar/torr 80/60 50/38 38/ /24 Max water vapour pumping rate GB I gh 1 60 Max water vapour pumping rate GB II gh Max allowed outlet pressure bar gauge/psig 0.2/2.8 Max allowed inlet and gas ballast pressure bar gauge/psig 0.5/7 Motor power 50/60 Hz W 450/550 Power connector 1 ph IEC EN60320 C13 Nominal rotation speed 50/60 Hz rpm 1500/1800 Weight (without oil) kg/lb 25/55 28/ /63.8 Oil capacity min/max litres 0.42/ / /1 Recommended oil Ultragrade 19 Inlet flange Exhaust flange NW25 NW25 Noise level db(a) 50 Hz Operating temperature range C Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. 92. Small Oil Sealed Pumps

92 Service, Spares and Accessories Also see p60. RV Accessories 2 m electrical supply cable for 1 ph pumps, UK, three pin plug A m electrical supply cable for 1 ph pumps, North European plug A m electrical supply cable for 1 ph pumps, North America/Japan plug A m electrical supply cable for 1 ph pumps, no plug A Ultragrade 19 oil 1 litre H Ultragrade 19 oil 4 litre H Model EMF mist filter A Gas Ballast adaptor A Clean application oil return kit A Adjustable gas ballast oil return kit A RV easy oil box drain kit A Exhaust nozzle kit ¾ to 15 mm A Acoustic Enclosure RV acoustic enclosure V RV acoustic enclosure V NRD NRD Vibration Isolator RV Vibration isolator (0.45 kg) A Spares Kits Spares Kit Cartridge RV3 A Spares Kit Cartridge RV5 A Spares Kit Cartridge RV8 A Spares Kit Cartridge RV12 A Spares Kit Blade RV3 A Spares Kit Blade RV5 A Spares Kit Blade RV8 A Spares Kit Blade RV12 A Spares Kit Inlet valve RV3/5/8/12 A Spares Kit clean and overhaul kit A Spares Kit clean and overhaul kit (Nitrile) A Spares Kit outer shaft seal kit RV A Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 93.

93 RV ATEX OIL SEALED ROTARY VANE PUMPS PERFORMANCE YOU CAN RELY ON ATEX RV pumps have an external ATEX classification of Ex II 2G IIC T4 and are suitable for use in potentially explosive atmospheres. They share the same internal ATEX classification as our standard RV pumps, namely Ex II 3G c IIB T4. ATEX pumps with flameproof motors require the user to provide 2 off hazardous area cable glands and cables. In addition, connection of the thermistors to an appropriate safety circuit must be made to switch off the pump if overheating occurs. The pumps are supplied with the Gas Ballast port plugged. When pumping flammable gasses or vapours you must fit an inert gas purge to this port to dilute such gases or vapours below the lower explosive limit. Features and Benefits ATEX rated spot voltage motor. Dual mode. Suitable for high throughput and high vacuum applications. Fast acting inlet valve for system protection. Efficient high pressure lubrication. Oil tight with printed gaskets, effective shaft seals. Clamped in sight glass. Oil box well contains filling spills. Hi tech polymer blades, large diameter, easy clean oil passages. Consistent, built in quality, cast bar construction. 94. Small Oil Sealed Pumps

94 Performance Curves RV ATEX Oil sealed rotary pump RV ATEX RV ATEX Performance Curve 2 1 (m 3 h -1 ) 0-1 RV3 RV5 RV8 RV (mbar) (Pa) RV3 RV5 RV8 RV12 Displacement 50 Hz 3.7 m 3 h m 3 h m 3 h m 3 h ft 3 min ft 3 min ft 3 min ft 3 min 1 60 Hz 4.5 m 3 h m 3 h m 3 h 1 17 m 3 h ft 3 min ft 3 min ft 3 min 1 ft 3 min 1 Speed (Pneurop 6602) 50 Hz 3.3 m 3 h m 3 h m 3 h 1 12 m 3 h ft 3 min ft 3 min ft 3 min ft 3 min 1 60 Hz 3.9 m 3 h m 3 h 1 m 3 h m 3 h ft 3 min ft 3 min ft 3 min ft 3 min 1 (ft 3 min -1 ) (Torr) -2 Blue Red No gas purge With inert gas purge RV3 RV5 RV8 RV12 Ordering information ATEX RV3 115V, 1-ph, 60 Hz ExII 2G IIC T4 * ATEX RV3 230 V, 1 ph, 50 Hz Ex II 2G IIC T4 ATEX RV3 400 V, 3 ph, 50 Hz Ex II 2G IIC T4 ATEX RV5 115V, 1-ph, 60 Hz ExII 2G IIC T4 * ATEX RV5 230 V, 1 ph, 50 Hz Ex II 2G IIC T4 ATEX RV5 400 V, 3 ph, 50 Hz Ex II 2G IIC T4 ATEX RV8 115V, 1-ph, 60 Hz ExII 2G IIC T4 * ATEX RV8 230 V, 1 ph, 50 Hz Ex II 2G IIC T4 ATEX RV8 400 V, 3 ph, 50 Hz Ex II 2G IIC T4 ATEX RV12 115V, 1-ph, 60 Hz ExII 2G IIC T4 * ATEX RV V, 1 ph, 50 Hz Ex II 2G IIC T4 ATEX RV V, 3 ph, 50 Hz Ex II 2G IIC T4 A A A A A A A A A A A A * 750W motor Each ATEX RV pump is supplied with 1 litre of Ultragrade 19 oil, inlet filter and O ring. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 95.

95 Dimensions RV ATEX Dimensions Pump A B C RV3 520 mm (20.47 ) 127 mm (5 ) 29 mm (1.06 ) RV5 520 mm (20.47 ) 127 mm (5 ) 29 mm (1.06 ) RV8 560 mm (22.05 ) 161 mm (6.34 ) 35 mm (1.38 ) RV mm (22.83 ) 181 mm (7.13 ) 35 mm (1.38 ) Dimensions in mm (inch). Technical Data Units RV3 ATEX RV5 ATEX RV8 ATEX RV12 ATEX Displacement 50 Hz m 3 h 1 /ft 3 min 1 3.7/ / / / Hz m 3 h 1 /ft 3 min 1 4.5/2.6 7/ /6.9 17/ Speed (Pneurop 6602) 50 Hz m 3 h 1 /ft 3 min 1 3.3/2 5.1/3 8.5/5 12/ Hz m 3 h 1 /ft 3 min 1 3.9/ /3.6 / /8.4 Max allowed outlet pressure bar gauge/psig 0.2/2.8 Max allowed inlet and gas purge pressure bar gauge/psig 0.5/7 Nominal rotation speed 50/60 Hz rpm 1430/17 Motor power 50/60 Hz W 550 (750 for 115V 1ph 60Hz) Weight (without oil) kg/lb 28/ /68.2 Inlet flange NW25 Exhaust flange NW25 Operating temperature range C Small Oil Sealed Pumps

96 EM18 AND 28 OIL SEALED ROTARY VANE PUMPS PERFORMANCE YOU CAN RELY ON The EM range of oil sealed rotary pumps renowned for their high ultimate vacuum, rapid pumping speed, quiet operation and ability to handle vapour have become the industry standard for laboratory and light industrial applications. The pump is a freestanding unit with the drive provided through a flexible coupling by either a single phase or three phase (four pole) motor. Features and Benefits The pump is designed for reliable, long term operation. Thermal overload device prevents overheating (single phase only). The drive is provided through a flexible coupling by a single phase or three phase (four pole) motor. The motors are totally enclosed and are cooled by the motor cooling fan. Full height O ring sealed oil sight glass for easy checking of oil level and condition. Large sight glass and operating oil range. IE3 energy efficient 3 phase motor used with E2M28. Applications Analytical instruments. Leak detectors, helium. Research and development. Backing turbomolecular pumps. Automotive. Beam lines and high energy physics. Centrifuges, ultra high speed. Coating. Pump Range EM E1M18 single stage. E1M18 FX single stage. E2M18 two stage. E2M18 FX two stage. E2M28 two stage. E2M28 FX two stage. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 97.

97 Performance Curves E1M18 One stage, E2M18 two stage rotary vane pumps E1/E2M18 E1/E2M18 Performance Curve Displacement 2 50 Hz 20.5 m 3 h 1 (12.1 ft 3 min 1 ) 60 Hz 25 m 3 h 1 (14.7 ft 3 min 1 ) 1 Speed (Pneurop 6602) 50 Hz 17 m 3 h 1 ( ft 3 min 1 ) 60 Hz 20.4 m 3 h 1 (12.1 ft 3 min 1 ) (m 3 h -1 ) Hz E2M18 E1M (mbar) Ordering information E1M / V, 3 ph, 50 Hz or /460 V, 3 ph, 60 Hz E1M18 0/200 V, 1 ph, 50 Hz or 0 5/200 2 V, 1 ph, 60 Hz E1M18 115/ V, 1 ph, 50/60 Hz with IEC60320 connector, factory set to 230V E1M18 FX 115/ V, 1 ph, 50/60 Hz with IEC60320 connector E2M / V, 3 ph, 50 Hz or /460 V, 3 ph, 60 Hz E2M18 0/200 V, 1 ph, 50 Hz or 0 5/200 2 V, 1 ph, 60 Hz E2M18 115/ V, 1 ph, 50/60 Hz with IEC60320 connector E2M18 FX / V, 3 ph, 50 Hz or /460 V, 3 ph, 60 Hz E2M18 FX 0/200 V, 1 ph, 50 Hz or 0 5/200 2 V, 1 ph, 60 Hz E2M18 FX 115/ V, 1 ph, 50/60 Hz with IEC60320 connector fitted A A A A A A A A A A (ft 3 min -1 ) Hz E2M E1M Without gas ballast 2 With gas ballast (Pa) (Torr) Each EM pump is supplied with 1 litre of Ultragrade 19 oil, O ring and centering ring, two Allen keys and spares seal for oil drain and filter plugs. For PFPE prepared FX pumps Fomblin to be ordered separately. 98. Small Oil Sealed Pumps

98 E2M28 two stage Rotary vane pump E2M28 Performance Curve E2M28 (m 3 h -1 ) Hz 3 (mbar) Displacement 50 Hz 32.2 m 3 h 1 (19 ft 3 min 1 ) 60 Hz 38.9 m 3 h 1 (22.3 ft 3 min 1 ) Speed (Pne urop 6602) 50 Hz 27.5 m 3 h 1 (16.2 ft 3 min 1 ) 60 Hz 33 m 3 h 1 (19.5 ft 3 min 1 ) (Pa) Ordering information 2 (ft 3 min -1 ) Hz 3 (Torr) E2M28 115/ V, 1ph, 50/60 Hz with IEC60320 connector fitted E2M28 0/200V, 1ph, 50 Hz or 0-5/200-2V, 1ph 60Hz E2M28 HC 3PH IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M28 HC 3PH IE3 EU/US 50/60HZ V 50HZ, 230 / 460V 60HZ A A A A E2M28 FX 115/ V, 1ph, 50/60 Hz with IEC60320 connector fitted A Without gas ballast 2 With gas ballast E2M28 FX 3PH IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M28 FX 3PH IE3 EU/US 50/60HZ V 50HZ, 230 / 460V 60HZ A A Each EM pump is supplied with 1 litre of Ultragrade 19 oil, O ring and centering ring, two Allen keys and spares seal for oil drain and filter plugs. For PFPE prepared FX pumps Fomblin to be ordered separately. Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 99.

99 Dimensions E1M18 and E2M18 dimensions 170 (6.69) 16.5 (0.65) (8.9) (9.55) G A B C Ø15 (0.59) E 27.4 (1.08) 39 (1.53) 43 (1.69) 75 (0.39) (2.95) 150 (5.9) F 20 (0.79) 280 (11.02) 260 (.24) (0.39) D 4 x Ø9 (0.35) 39 (1.53) A B C D E F G A A A A A A E2M28 Dimensions 180 (7.09) 170 (6.69) 16.5 (0.65) (8.9) 241 (9.49) C A B 331 (13.03) Ø15 (0.59) NW (6.) (9.47) 111 (4.37) 25.5 (1.00) 39.3 (1.55) 43 (1.69) (0.79) (2.36) 120 (4.7) 160 (6.29) 20 (0.79) 13 (0.51) 347 (13.66) 373 (14.68) 4 x Ø9 (0.35) 38.7 (1.52) A B C A A A Small Oil Sealed Pumps

100 Technical Data Displacement Units E1M18 E2M18 E2M28 50 Hz m 3 h 1 /ft 3 min / /19 60 Hz m 3 h 1 /ft 3 min / /22.3 Speed (Pneurop 6602) 50 Hz m 3 h 1 /ft 3 min / 27.5/ Hz m 3 h 1 /ft 3 min / /19.5 Ultimate vacuum (total pressure) without gas ballast mbar/torr 3 x 2 /2.2 x 2 1 x 3/ 7.4 x 4 1 x 3/ 7.5 x 4 with gas ballast mbar/torr 6.5 x 1 /4.8 x x 1/ 1.1 x x 2 /1.1 x 2 with Fomblin mbar/torr 3 x 1 /2.56 x 2 1 x 2/ 7.5 x 3 1 x 2 /7.5 x 3 Inlet connection Outlet connection* NW25 Nozzle 15 mm external Ø removable from 3/4 in BSP tapped hole Max permitted pressure at outlet bar gauge/psig 0.5/7 Max inlet pressure for water vapour mbar/torr 50/38 20/15 30/23 Max water vapour pumping rate kg h Operating temp range C Nominal Rotation speed 50/60 Hz rpm 1440/1720 rpm Power connector 1 ph** IEC EN60320 C19 Motor power 50 Hz kw 0.55 kw 0.75 kw Motor power 60 Hz kw 0.75 kw 0.90 kw Weight kg/lbs 37/82 39/86 44/97 50 Hz db(a) 57 Oil capacity max litre Oil capacity min litre Recommended oil (supplied) Ultragrade 19 * The FX are supplied with NW25 outlet connection ** pumps listed with IEC connector only Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 1.

101 Service, Spares and Accessories EM Accessories 2 m electrical supply cable, UK, three pin plug A m electrical supply cable, North European plug A m electrical supply cable, North America/Japan plug A m electrical supply cable, no plug A EMF20 mist filter (suitable for E2M28 on low throughput applications) A Ultragrade 19 oil 1 litre H Ultragrade 19 oil 4 litre H Model MF30 mist filter A NW25 to 28mm bore tube adaptor C ¾" BSP to NW25 outlet adaptor C Spares Kits Spares kit C&O E1M18/E2M18 Spares kit Blade E1M18 Spares kit Blade E2M18 Spares kit Blade E2M28/30 Spares kit clean and overhaul kit E2M28 A A A A A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. 2.Small Oil Sealed Pumps

102 EM18 AND E2M18 ATEX OIL SEALED ROTARY VANE PUMPS PERFORMANCE YOU CAN RELY ON ATEX EM18 pumps have an external ATEX classification of Ex II 2G IIC T4 and are suitable for use in potentially explosive atmospheres. They share the same internal ATEX classification as our standard EM18 pumps, namely Ex II 3G c IIB T4. ATEX pumps with flameproof motors require the user to provide 2 off hazardous area cable glands and cables. In addition, connection of the thermistors to an appropriate safety circuit must be made to switch off the pump if overheating occurs. The Pumps are supplied with the gas ballast port plugged. When pumping flammable gasses or vapours you must fit and inert gas purge to this port to dilute such gasses or vapours below the lower explosive limit. Supplied with ultragrade 19 oil, NW25 O ring and centering ring. Performance Curves E1M18 One Stage, E2M18 two stage Rotary vane ATEX pumps E1/E2M18 ATEX E1/E2M18 ATEX Performance Curve Displacement 2 50 Hz 20.5 m 3 h 1 (12.1 ft 3 min 1 ) 60 Hz 25 m 3 h 1 (14.7 ft 3 min 1 ) 1 Speed (Pneurop 6602) 50 Hz 17 m 3 h 1 ( ft 3 min 1 ) 60 Hz 20.4 m 3 h 1 (12.1 ft 3 min 1 ) (m 3 h -1 ) Hz E2M18 E1M (mbar) Ordering information E1M18 ATEX 115 V, 1ph, 60 Hz Ex II 2G IIC T4 E1M18 ATEX 230 V, 1ph, 50 Hz Ex II 2G IIC T4 E1M18 ATEX 400 V, 3ph, 50 Hz Ex II 2G IIC T4 E2M18 ATEX 115 V, 1ph, 60 Hz Ex II 2G IIC T4 E2M18 ATEX 230 V, 1ph, 50 Hz Ex II 2G IIC T4 E2M18 ATEX 400 V, 3ph, 50 Hz Ex II 2G IIC T4 A A A A A A Without gas ballast 2 With gas ballast (Pa) (ft 3 min -1 ) Hz E2M E1M (Torr) 1 Without gas ballast 2 With gas ballast Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 3.

103 Dimensions E1M18 and E2M18 ATEX dimensions 170 (6.69) A B Ø15 (0.59) D 27.4 (1.08) 16.5 (0.65) (8.9) 280 (11.02) 39 (1.53) 43 (1.69) 39 (1.53) 75 (0.39) (2.95) 150 (5.9) E 20 (0.79) 280 (11.02) (0.39) 260 (.24) C 4 x Ø9 (0.35) A B C D E E1M E2M Technical Data Units E1M18 ATEX E2M18 ATEX Displacement 50 Hz m 3 h 1 /ft 3 min / / Hz m 3 h 1 /ft 3 min / /14.7 Speed (Pneurop 6602) 50 Hz m 3 h 1 /ft 3 min / 17.0/ 60 Hz m 3 h 1 /ft 3 min / /12.1 Ultimate vacuum (total pressure) without gas purge mbar/torr 3 x 2 /2.2 x 2 1 x 3/ 7.4 x 4 with gas purge mbar/torr 6.5 x 1 /4.8 x x 1 /1.1 x 2 with Fomblin mbar/torr Inlet connection NW25 Outlet connection Nozzle 15 mm external Ø removable from 3 / 4 in BSP tapped hole Max permitted pressure at outlet bar gauge/psig 0.5/7 Max inlet pressure for water vapour mbar/torr 50/38 20/15 Max water vapour pumping rate kg h Operating temp range C Nominal rotation speed 50/60 Hz rpm 1440/1720 Motor power 50 Hz 0.55 kw 0.55 Motor power 60 Hz 0.75 kw 0.75 Weight kg/lbs 37/82 39/86 50 Hz db(a) 57 Oil capacity max litre Oil capacity min litre Recommended oil (supplied) Ultragrade 19 4.Small Oil Sealed Pumps

104 MEDIUM AND LARGE DRY PUMPS AND SYSTEMS THE INTELLIGENT CHOICE Drystar 80 Pump and Booster Package 9 ixl Dry Pump Systems 112 GX Dry Pump Systems 115 ixh Dry Pump Systems 118 GXS Dry Pump 121 GXS/pXH Dry Pump 131 IDX 00/1300 Dry Pump 137 EPX High Vacuum Primary Pump 141 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 5.

105 Medium and Large Dry Pumps and Systems Mid-Range Dry Vacuum Pumps GXS Dry Vacuum Pumps IDX Dry Vacuum Pumps Edwards is a market leader in dry pump technology and has pioneered the use of dry vacuum in some of the harshest applications. Why Dry? The competitive nature of today s business means changes are required to improve performance, lower costs, and provide optimal process solutions. The dry pumping solution is the change from traditional oil sealed pumps to a proven technology for this industry. Edwards, a world leader in dry pump technology, has demonstrated the ability to provide a low-cost, tailored solution to your vacuum application. The benefits offered by Edwards dry pumping solutions are: Maintenance Low capital cost and minimal maintenance requirements lead to lowest cost of ownership Extended periods between user interventions Lower consumable costs Environmental No oil disposal No oil emissions into atmosphere Performance Very stable pumping speed gives repeatability to processes Continuous pumping at atmosphere Ability to handle particulates Dry eliminates back streaming, thus protecting reactive alloys from contamination Significantly higher capacity for water vapour pumping than traditional oil sealed pumps Safety Unobtrusive noise levels No unsightly oil spills No hazardous oil vapours All Edwards dry pump ranges are ideally suited to: Heat treatment Metallurgy Coating Solar Drying and many more. With such a range of pumping speeds, combinations and applications available, Edwards retains a comprehensive Applications Engineering capability and are able to offer a solutions package that includes: Process design Equipment specification and selection Safety and operating procedures Vacuum system and control integration Commissioning advice. 6. Medium and Large Dry Pumps and Systems

106 Solutions Engineering The range and complexity of industrial applications means a one size fits all policy does not result in system optimisation. A detailed appreciation of the process, environmental and safety issues is required to tailor systems to match performance and process. Applications Design and Support Edwards comprehensive design service is based on in-depth knowledge of the industries and applications involved. This expertise is held in the highly focused and experienced applications team, which consists of a Central Applications Group supported by a regional network of Applications Specialists. Proprietary software is used to define pumping requirements and a suite of optional accessories or modules are available. For larger or more unusual applications a custom engineering service is available. Solutions could cover: Process design Equipment selection Safety and Operating Parameters Integration with plant control system(s) Co mmissioning advice and more Contact your local office to request an initial discussion with an Applications Specialist. Typically, discussions will include gases/materials to be pumped, cycle times and duty pressures, system capacities, control systems, utilities, system footprint and all other aspects of the vacuum system to ensure that we are able to offer the most effective solution for your application. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 7.

107 Product range Mid-Range Dry Vacuum Pumps Several industrial processes require mid-range vacuum pumps. Small scale or pilot processes are the ideal size to try a dry vacuum technology for the first time and to discover the many benefits that dry pumping delivers. Edwards, with the largest installed base of dry vacuum pumps in the world, is able to offer the most appropriate solution to your needs in this performance range. Entry Level Dry Pumping Drystar80 the robust and highly reliable Drystar80 is the most cost effective introduction to dry pumping. Intelligent Dry Vacuum Pumps Edwards is offering 3 models of intelligent and compact dry pumps delivered with a fully enabled on board controller providing: Automated start up and shut down routines. Vacuum speed control with inverter driven motors. Smart co mmunications via Ethernet, Profibus or hardwired interfaces. Green mode energy-saving with reduced power consumption during idle periods. ixl for clean applications GX for medium applications ixh for harsh applications GXS Dry Vacuum Pumps The new range of GXS dry vacuum pumps takes vacuum performance to the next level. With unique screw technology and world leading high efficiency drives our customers are granted best in class pumping speeds, reliable operation even in harsh applications and low running costs for many years to come. GXS is available in sizes from 160 to 750 m 3 h -1 and can be systemised with inverter driven mechanical booster pumps from 1750 to 4200 m 3 h -1 displacement. Every pump and pumping system is supplied with on-board controller with extensive co mmunication and automated control capabilities for a true plug and pump solution. IDX Dry Vacuum Pumps Available in sizes from 00 to 1300 m 3 h -1 IDX are the pumps optimised for demanding processes requiring large pumping speeds. Installed mainly in large, high productivity environments, these pumps have been designed to withstand process malfunctions and to minimise down time from line maintenance to overhaul. 8. Medium and Large Dry Pumps and Systems

108 DRYSTAR 80 PUMP AND BOOSTER PACKAGE MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE Drystar80 is the most cost effective introduction to basic dry pumping. It is available as a standalone unit for 80 m 3 h -1 repeatable pumping performance; or in a combination with the respected EH500 hydrokinetic drive mechanical booster, offering 500 m 3 h -1 displacement for applications where increased pumping speed and/or lower vacuum levels are required. Depending upon the application the Drystar80 can be supplied with mineral oil or PFPE lubrication. Features and Benefits Specifically designed for demanding industrial applications. Industry proven, tried and tested. Consistent and repeatable performance. High and repeatable product quality. No oil changes and waste oil disposal. No disposal cost, environmentally friendly. Applications R&D/others Backing of turbomolecular pumps. House/central vacuum. Drying Freeze drying. Refrigeration/air conditioning drying. Transformer drying. Automotive drying/filling. Transformer vapour phase drying. Bush filling. Coating Load lock pump down. Plasma deposition. Plasma cleaning/sterilising. Reflective/decorative coating. Optical/ophthalmic coating. Roll/web coating. Hard coating/cvd. Surface activation. Heat Treatment Tempering/annealing. Oil or gas quenching. Metallurgy. EB welding/vacuum brazing. Plasma nitriding. LPN (nitriding) and nitrocarburising. LPC with acetylene. Plasma beam welding. MIM/vacuum sintering. PIC (investment casting). Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 9.

109 Performance Curves Drystar80/EH500 Booster Pump and Booster Package Drystar 80/EH500 Drystar 80 Performance Curve Peak pumping speed 50 Hz 80/390 m 3 h -1 47/230 cfm GV80 50Hz GV80 60Hz GV80/EH500 50Hz GV80/EH500 60Hz 60 Hz 94/471 m 3 h -1 m ³ h /277 cfm Ultimate Pressure mbar < 3 x mbar Torr < 2-2 GV80 50Hz 250 GV80 60Hz GV80/EH500 50Hz Ordering information Drystar80 SSP V 50 Hz Drystar80 SSP V 60 Hz NR NR80300 ft 3 min GV80/EH500 60Hz Drystar80 PFPE SSP V 50 Hz Drystar80 PFPE SSP V 60 Hz NR NR Torr Drystar80/EH500 SSP V 50 Hz NRY0400 Drystar80/EH500 SSP V 60 Hz NRY Drystar80/EH500 PFPE SSP V 50 Hz NRY Drystar80/EH500 PFPE SSP V 60 Hz NRY Technical Data Units Drystar80 Drystar80/EH500 Peak pumping speed 50 Hz m 3 h -1 /cfm 80/47 390/230 Peak pumping speed 60 Hz m 3 h -1 /cfm 94/56 471/277 Ultimate pressure mbar/torr 3 x -2 /2 x -2 3 x -3 /2 x -3 ultimate kw Motor Power kw Inlet connection ISO40 ISO0 Outlet connection NW40 NW40 Cooling water connection ½ Quick Connect ½ Quick Connect Nitrogen connection ¼ Quick Connect ¼ Quick Connect Water flow lmin Typical purge flow slm Weight kg Noise level db(a) < 78 < Medium and Large Dry Pumps and Systems

110 Dimensions Drystar dimensions 1 Process inlet 2 Process exhaust 3 Estimated centre of gravity Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 111.

111 IXL DRY PUMP SYSTEMS THE INTELLIGENT CHOICE ixl is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations, with extremely low power consumption. It is available as the ixl120n stand-alone unit, or as the ixl00n combination, which includes an inverter-driven booster delivering 930 m 3 h -1 peak pumping speed Features and Benefits Integral controller and safety systems for Plug and Pump, flexible operation. Low installation costs. Minimal power consumption. Best in class cost of ownership. Applications R&D/others Backing of turbomolecular pumps. Drying Freeze drying. Coating Load lock pump down. Plasma deposition. Plasma cleaning/sterilising Medium and Large Dry Pumps and Systems

112 Performance Curves ixl ixl ixl Performance Curve m³h ixl120 ixl mbar Ordering information ft³min ixl120 ixl00 ixl120n V 50/60 Hz A Torr ixl00n V 50/60 Hz A Dimensions ixl120n dimensions ISO ixl00n dimensions NW Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 113.

113 Technical Data Units ixl120n ixl00n Peak pumping speed m 3 h -1 /cfm 1/65 930/547 Ultimate pressure mbar/torr 1.3 x -2 /9 x x -3 /7.5 x -4 ultimate (1) kw green mode kw Motor Power kw Inlet connection Vertical/Horizontal ISO63/NW50 ISO0 Outlet connection NW25 NW25 Cooling water connection ⅜" Quick Connect ⅜" Quick Connect Nitrogen connection ¼" tube fitting ¼" tube fitting Water flow (2) lmin Typical purge flow slm 0-5 slm 0-40 (default ) Weight kg Noise level db(a) < 55 < 55 (1) Average power at 700T exhaust pressure (2) Flow with Constant Flow Valve accessory fitted 114. Medium and Large Dry Pumps and Systems

114 GX DRY PUMP SYSTEMS THE INTELLIGENT CHOICE GX is the ideal choice for medium duty applications and sets new standards for zero maintenance between overhauls and low cost of ownership. It is available as the stand-alone GX0N pump, or combined with an inverter-driven booster as the GX600N (620 m 3 h -1 peak speed) and GX00N (800 m 3 h -1 peak speed) units. Features and Benefits Integral controller and safety systems for Plug and Pump flexible operation. Low installation costs. No preventive maintenance between major overhauls. Maximum uptime for high productivity. Applications R&D/others House/central vacuum. Drying Refrigeration/air conditioning drying. Transformer drying. Automotive drying/filling. Coating Reflective/decorative coating. Optical/ophthalmic coating. Heat Treatment Tempering/annealing Oil or gas quenching Metallurgy EB welding/vacuum brazing Plasma nitriding LPN (nitriding) and nitrocarburising Pump range GX GX0N GX600N GX00N Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 115.

115 Performance Curves GX Dry pump system GX GX Performance Curve Peak pumping speed 90 m 3 h m 3 h cfm 471 cfm Ultimate Pressure GX0N 5.0 x -3 mbar m³h GX0 N GX600 N GX00 N mbar GX600N GX00N 3.75 x -3 Torr 1.0 x -3 mbar 7.5 x -4 Torr 1.0 x -3 mbar ft³min GX0 N GX600 N GX00 N 7.5 x -4 Torr Torr Ordering information GX0N V 50/60 Hz GX0N V 50/60 Hz GX600N V 50/60 Hz GX600N V 50/60 Hz GX00N V 50/60 Hz GX00N V 50/60 Hz A A A A A A Medium and Large Dry Pumps and Systems

116 Dimensions GX dimensions 284 (11.2) 435 (17.1) 258 (.2) 650 (25.6) 644 (25.4) 45 (1.8) 694 (27.3) 350 (13.8) 346 (13.6) 45 (1.8) (8.6) (11) 5 (20) 52 (2) 216 (8.5) 195 (7.7) 5 (20.1) (27.3) (4.7) 153 (6.0) 5 (20.1) 695 (27.4) (4.7) GX0 GX600, 00 Length Width Height Inlet flange 2 Exhaust flange Technical Data Units GX0N GX600N GX00N Peak pumping speed m 3 h -1 /cfm 90/53 600/ /471 Ultimate pressure mbar/torr 5.0 x -3 /3.75 x x -3 /7.5 x x -3 /7.5 x -4 ultimate (1) kw green mode kw Motor Power kw Inlet connection ISO63 ISO0 ISO0 Outlet connection NW25 NW25 NW25 Cooling water connection ⅜" quick connect ⅜" quick connect ⅜" quick connect Nitrogen connection ¼" compression fitting ¼" compression fitting ¼" compression fitting Water flow (2) lmin Typical purge flow slm 4 to 39 4 to 39 4 to 39 Weight kg Noise level db(a) < 60 < 55 < 55 (1) Average power at 700T exhaust pressure (2) Flow with Constant Flow Valve accessory fitted Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 117.

117 IXH DRY PUMP SYSTEMS THE INTELLIGENT CHOICE ixh sets new standards for really harsh process capabilities, reliability, and low cost of ownership. ixh pumps offer greatly increased dust and powder handling capabilities. A wide pump temperature range allows optimisation to minimise by-product accumulation from condensation and plating reactions. ixh is available as primary pump at 0 m 3 h -1 (the ixh0) or combined with inverter-driven boosters delivering peak speeds of 665 m 3 h -1 (ixh6) or 25 m 3 h -1 (ixh12). Features and Benefits Integral controller and safety systems for Plug and Pump, flexible operation. Low installation costs Cutting edge reversed claw technology for corrosionfree operation and robust dust and powder handling capabilities. Robust and reliable Metallurgy LPC with acetylene. Plasma beam welding. MIM/vacuum sintering. PIC (investment casting). Applications Drying Transformer vapour phase drying. Coating Roll/web coating. Hard coating/cvd. Surface activation. Plasma spray Medium and Large Dry Pumps and Systems

118 Performance Curves ixh ixh ixh Performance Curve m³h ixh0 ixh6 ixh mbar Ordering information ft³min ixh0 ixh6 ixh12 0 ixh /60 Hz AC Torr ixh /60 Hz ACA21200 ixh Hz AC ixh V 50/60 Hz ACB21210 ixh /60 Hz AC ixh /60 Hz ACD Dimensions ixh dimensions H W L Type L W H ixh ixh ixh Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 119.

119 Technical Data Units ixh0 ixh6 ixh12 Peak pumping speed m 3 h -1 /cfm 0/59 665/391 25/603 Ultimate pressure mbar/torr 2.0 x -2 /1.5 x x -3 /3.7 x x -3 /3.7 x -3 ultimate (1) kw green mode kw Motor Power kw Inlet connection ISO63 ISO0 ISO0 Outlet connection NW40 NW40 NW40 Cooling water connection ⅜" quick connect ⅜" quick connect ⅜" quick connect Nitrogen connection ¼" compression fitting ¼" compression fitting ¼" compression fitting Water flow (2) lmin Typical purge flow slm 28 or or or 44 Weight kg Noise level db(a) (1) Average power at 700 T exhaust pressure (2) Water consumption varies with pump operating temperature; figures at 1 o C 120. Medium and Large Dry Pumps and Systems

120 GXS DRY PUMP THE INTELLIGENT CHOICE The competitive nature of today s business means changes are required to improve performance, lower costs, and provide optimal process solutions. The dry pumping solution is the change from traditional oil sealed pumps to a proven technology for this industry. Edwards, a world leader in dry pump technology, has demonstrated the ability to provide a low-cost, tailored solution to your vacuum application. Features and Benefits Maintenance Low capital cost and minimal maintenance requirements lead to lowest cost of ownership. Extended periods between user intervention. Lower consumable costs. Environmental No oil disposal. No oil emissions into atmosphere. Performance Very stable pumping speed gives repeatability to processes. Continuous pumping at atmosphere. Ability to handle particulates. Dry eliminates back-streaming, thus protecting reactive alloys from contamination. Safety Unobtrusive noise levels. No unsightly oil spills. No hazardous oil vapours. Applications Metallurgy. Coating. Drying. Solar. Vacuum chamber evacuation. Pump Range GXS160 GXS160 GXS160/1750 GXS250 GXS250 GXS250/2600 GXS450 GXS450 GXS450/2600 GXS450/4200 GXS750 GXS750 GXS750/2600 GXS750/4200 (GXSXXX/YYYY where XXX = backing screw pump and YYYY = roots booster ) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 121.

121 Performance Curves GXS160 Dry pump GXS160 & GXS160/1750 GXS160 & GXS160/1750 Performance Curve Peak Pumping Speed 160 m 3 h m 3 h cfm 706 cfm Ultimate Pressure with purge 1.2 x -2 mbar 7 x -4 mbar without purge (9 x -3 Torr) (5.3 x -4 Torr) 7 x -3 mbar 7 x -4 mbar (5.3 x -3 Torr) (5.3 x -4 Torr) Ordering information G Applications Industrial S Pump Mechanism Screw Pumps / Boosters (7.5 kw) (7.5 kw) / 1750 (5.5 kw) Lubrication 1 PFPE (Drynet 25/6) G S Electrical Low volt V 3Ø 50/60 Hz 2 High volt V 3Ø 50/60 Hz 5 Cooling TMS Standard 0 Pump purges Light duty (SSP +HVP) 0 Medium duty (SSP + HVP + Inlet + GB + Exh PM) 3 Medium duty + High Flow Purge / Solvent Flush 4 Installation Side Exhaust and Skids 0 Rear Exhaust and Casters Medium and Large Dry Pumps and Systems

122 GXS250 & GXS250/2600 Performance Curve GXS250 Dry Pump GXS250 & GXS250/2600 Peak Pumping Speed 250 m 3 h m 3 h cfm 1118 cfm Ultimate Pressure with purge 9 x -3 mbar 5 x -4 mbar without purge (6.8 x -3 Torr) (3.8 x -4 Torr) 4 x -3 mbar 5 x -4 mbar (3 x -3 Torr) (3.8 x -4 Torr) Ordering information G Applications Industrial Pump Mechanism S Screw Pumps / Boosters (7.5 kw) A 250 (7.5 kw) / 2600 (5.5 kw) Lubrication 1 PFPE (Drynet 25/6) G S Electrical Low volt V 3Ø 50/60 Hz 2 High volt V 3Ø 50/60 Hz 5 Cooling TMS Standard 0 Pump purges Light duty (SSP +HVP) 0 Medium duty (SSP + HVP + Inlet + GB + Exh PM) 3 Medium duty + High Flow Purge / Solvent Flush 4 Installation Side Exhaust and Skids 0 Rear Exhaust and Casters 5 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 123.

123 Performance Curves GXS450 Dry Pump GXS450, GXS450/2600 & GXS450/4200 GXS450, GXS450/2600 & GXS450/4200 Performance Curve Peak Pumping Speed 450 m 3 h m 3 h m 3 h cfm 1295 cfm 1781 cfm Ultimate Pressure with purge 1 x -2 mbar 5.4 x -4 mbar 5.4 x -4 mbar (7.5 x -3 Torr) (3.8 x -4 Torr) (3.8 x -4 Torr) without purge 5 x -3 mbar 5 x -4 mbar 5 x -4 mbar (3.8 x -3 Torr) (3.8 x -4 Torr) (3.8 x -4 Torr) Ordering information 1 Fast 2 Slow G Applications Industrial Pump Mechanism S Screw Pumps / Boosters D 450 (11 kw) F 450 (11 kw) / 2600 (7.5 kw) G 450 (11 kw) / 4200 (7.5 kw) Lubrication 1 PFPE (Drynet 25/6) G S Electrical Low volt V 3Ø 50/60 Hz 2 High volt V 3Ø 50/60 Hz 5 Cooling TMS Standard 2 Pump purges Light duty (SSP +HVP) 0 Medium duty (SSP + HVP + Inlet + GB + Exh PM) 3 Medium duty + High Flow Purge / Solvent Flush 4 Installation Side Exhaust and Skids 0 Rear Exhaust and Casters Medium and Large Dry Pumps and Systems

124 GXS750, GXS750/2600 & GXS750/4200 Performance Curve GXS750 Dry Pump GXS750, GXS750/2600 & GXS750/4200 Peak Pumping Speed 1 Fast 2 Slow 740 m 3 h m 3 h m 3 h cfm 1354 cfm 2031 cfm Ultimate Pressure with purge 8 x -3 mbar 5 x -4 mbar 5 x -4 mbar (6 x -3 Torr) (3.8 x -4 Torr) (3.8 x -4 Torr) without purge 3 x -3 mbar 5 x -4 mbar 5 x -4 mbar (2.3 x -3 Torr) (3.8 x -4 Torr) (3.8 x -4 Torr) Ordering information G Applications Industrial Pump Mechanism S Screw Pumps / Boosters L 750 (22 kw) N 750 (22 kw) / 2600 (7.5 kw) P 750 (22 kw) / 4200 (7.5 kw) Lubrication 1 PFPE (Drynet 25/6) G S Electrical Low volt V 3Ø 50/60 Hz 2 High volt V 3Ø 50/60 Hz 5 Cooling TMS Standard 2 Pump purges Light duty (SSP +HVP) 0 Medium duty (SSP + HVP + Inlet + GB + Exh PM) 3 Medium duty + High Flow Purge / Solvent Flush 4 Installation Side Exhaust and Skids 0 Rear Exhaust and Casters 5 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 125.

125 Dimensions GXS dimensions Pump views ( mm) A B C D E F G H J K L M GXS GXS160/ GXS GXS250/ GXS GXS450/ GXS450/ GXS GXS750/ GXS750/ Medium and Large Dry Pumps and Systems

126 GXS dimensions Pump views (inches) A B C D E F G H J K L M GXS GXS160/ GXS GXS250/ GXS GXS450/ GXS450/ GXS GXS750/ GXS750/ Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 127.

127 Technical Data Units GXS160 GXS160/1750 GXS250 GXS250/2600 Peak Pumping Speed m 3 h -1 (cfm) 160 (94) 1200 (706) 250 (147) 1900 (1118) Ultimate Pressure (without purge) mbar (Torr) 7x -3 (5.3x -3 ) 7x -4 (5.3x -4 ) 4x -3 (3.0x -3 ) 5x -4 (3.8x -4 ) Full Load ultimate pressure kw (hp) 3.8 (5.1) 5.1 (6.8) 4.0 (5.4) 5.3 peak pumping load kw (hp) 5.0 (6.7) 7.4 (9.9) 9.0 (12.1) 9.7 (13.0) Electrical Supply options High volt V 3Ø 50/60 Hz V 3Ø 50/60 Hz Low volt V 3Ø 50/60 Hz V 3Ø 50/60 Hz Connection High volt Harting Han K 4/4-F Harting Han K 4/4-F Low volt Vacuum Couplings Inlet ISO63 ISO0 ISO63 ISO160 Exhaust NW40 NW40 Cooling Water Supply pressure (max) bar (psig) 6.9 (0) 6.9 (0) DP across pump (min) bar (psig) 1.0 (14.7) 1.0 (14.7) min DP lmin -1 (gal/min) 4.0 (1.1) 7.0 (1.9) 4.0 (1.1) 7.0 (1.9) Temperature C ( F) 5-40 (41-4) All variants 5-40 (41-4) All variants Connection ⅜" BSP Male (G ⅜ ) ⅜" BSP Male (G ⅜ ) Purge Gas* Pressure bar (psig) (36-0) (36-0) Light Duty sl/min Medium Duty sl/min Connection Swagelok Ø ¼ tube with olive Swagelok Ø ¼ tube with olive High Flow Purge/ Solvent Flush Supply pressure bar (psig) (36-0) (36-0) Control valve Swagelok Ø ⅜" tube with olive Swagelok Ø ⅜" tube with olive connection Filter connection ½" NPT Male ½" NPT Male Solvent connection ⅜" BSP Male (G ⅜") ⅜" BSP Male (G ⅜") Mass kg (lbs) 305 (672) 475 (47) 305 (672) 515 (35) Noise (with suitable exhaust pipe) db(a) < 64 < 64 Operating Temperature C ( F) 5-40 (41-4) 5-40 (41-4) Exhaust Back Pressure (MAX) mbar (psia) 1400 (20) 1400 (20) System IP rating Standard 21D 21D Lubrication Type PFPE Drynert 25/6 PFPE Drynert 25/6 Volume l (gal) 0.7 (0.2) 1.4 (0.4) 0.7 (0.2) 1.4 (0.4) Monitoring & Control *Pump combinations Standard Control Front panel "Dashboard" Serial RS232 Front panel "Dashboard" Serial RS232 Monitoring Ethernet Webserver Ethernet Webserver Option Control Parallel MCM MicroTIM Parallel MCM MicroTIM Control & Monitoring Profibus DP Pump Display Terminal (PDT) Profibus DP Pump Display Terminal (PDT) Monitoring FabWorks FabWorks Light duty Shaft Seal Purge only Shaft Seal Purge only Medium duty Medium duty + Shaft Seal Purge, High Vac Purge, Inlet Purge, variable Gas Ballast & Exhaust Purge (with Exhaust Pressure Sensor) As Medium duty, plus High Flow Purge/Solvent Flush Shaft Seal Purge, High Vac Purge, Inlet Purge, variable Gas Ballast & Exhaust Purge (with Exhaust Pressure Sensor) As Medium duty, plus High Flow Purge/Solvent Flush * Purge Gas information Light duty: shaft seal purge only Medium duty: Shaft seal purge, inlet purge, variable gas ballast & exhaust purge (with exhaust pressure sensor) Medium duty plus: as Medium duty, plus High Flow Purge/Solvent Flush 128. Medium and Large Dry Pumps and Systems

128 GXS450 GXS450/2600 GXS450/4200 GXS750 GXS750/2600 GXS750/ (265) 2200 (1295) 3026 (1781) 740 (436) 2300 (1354) 3450 (2031) 5 x -3 (3.8x -3 ) 5 x -4 (3.8x -4 ) 3 x -3 (2.3x -3 ) 5 x -4 (3.8x -4 ) 7.2 (9.6) 8.8 (11.8) 9.4 (12.6).0 (13.4) 11.1 (14.9) 11.5 (15.4) 17.3 (23.2) 20.0 (26.8) 21.1 (28.3) 37.0 (49.6) 40.0 (53.6) 40.0 (53.6) V 3Ø 50/60 Hz V 3Ø 50/60 Hz V 3Ø 50/60 Hz V 3Ø 50/60 Hz Harting Han K 4/4-F Harting Han 0A-F Harting Han 0A-F Harting Han 200A-F ISO0 ISO160 ISO0 ISO160 NW50 NW (0) 6.9 (0) 1 (15) 1 (15) 1 (15) 0.75 (11) (2.6) 12 (3.2) 12 (3.2) 15 (4) 5-40 (41-4) All variants 5-40 (41-4) High Volt variants 5-30 (41-86) Low Volt variants ⅜" BSP Male (G ⅜ ) ⅜" BSP Male (G ⅜ ) (36-0) (36-0) Swagelok Ø ¼ tube with olive Swagelok Ø ¼ tube with olive (36-0) (36-0) Swagelok Ø ⅜" tube with olive Swagelok Ø ⅜" tube with olive ½" NPT Female ½" NPT Female ½" BSP Male (G ½") ½" BSP Male (G ½") 546 (1204) 760 (1676) 818 (1804) 679 (1497) 918 (2024) 976 (2152) < 64 < (41-4) 5-40 (41-4) 1400 (20) 1400 (20) 21D 21D PFPE Drynert 25/6 PFPE Drynert 25/6 1.8 (0.5) 2.5 (0.7) 3.6 (1.0) 2.4 (0.6) 3.1 (0.8) 4.2 (1.1) Front panel "Dashboard" Serial RS232 Ethernet Webserver Parallel MCM MicroTIM Profibus DP Pump Display Terminal (PDT) Front panel "Dashboard" Serial RS232 Ethernet webserver Parallel MCM MicroTIM Profibus DP Pump Display Terminal (PDT) FabWorks FabWorks Shaft Seal Purge & High Vac Purge only Shaft Seal Purge & High Vac Purge only Shaft Seal Purge, High Vac Purge, Inlet Purge, variable Gas Ballast & Exhaust Purge (with Exhaust Pressure Sensor) As Medium duty, plus High Flow Purge/Solvent Flush Shaft Seal Purge, High Vac Purge, Inlet Purge, variable Gas Ballast & Exhaust Purge (with Exhaust Pressure Sensor) As Medium duty, plus High Flow Purge/Solvent Flush Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 129.

129 Service, Spares and Accessories Fully Integrated Inlet Valves Silencer Mounts and Connection Kits Carbon Steel Stainless Steel GXS Inlet valve 4 ASSY - M GXS Inlet valve 6 ASSY - M GXS Inlet valve 8 ASSY - M Inlet Dust Filters Carbon Steel Stainless Steel GXS Filter 4 ASSY M M GXS Filter 6 ASSY M M GXS Filter 8 ASSY M M Cleanable & Drainable Discharge Silencers Carbon Steel Stainless Steel GXS Silencer 0 ctrs ASSY M M GXS Silencer 150 ctrs ASSY C-STL M M Drain valve ASSY - M Inlet Spools for Valves and Filters Carbon Steel Stainless Steel ISO63 4 ANSI Spool ASSY M M ISO63-ISO0 Spool ASSY M M ISO0 4 ANSI Spool ASSY M M ISO0-ISO0 Spool ASY M M packed ISO0 6 ANSI Spool ASSY M M ISO0 ISO160 Spool ASSY M M ISO160 6 ANSI Spool ASSY M M ISO160 ISO160 Spool ASSY M M ISO160 8 ANSI Spool ASSY M M C-STL ISO160 ISO200 Spool ASSY C-STL M M Horizontal silencer mount 0CTR Rear silencer MT HORIZ 0CTR Horizontal silencer mount 150CTR Rear silencer MT HORIZ 150CTR Check Valves C-VALVE HOR silencer 0CTR C-VALVE HOR silencer 150CTR Instrumentation Pressure Indicator Assembly 90 deg Pressure Transducer Assembly (ASG) Temp Trans Assy GXS Pump Only Temp Trans Assy GXS Combi GXS N2 STD flow switch kit GXS N2 HIGH fow switch kit Cooling water flow monitoring switch GXS Auxiliary gauge cable (0- V) GXS Pressure input cable (4-20 ma) MCM MicroTIM Connector kit for MCM MicroTIM Profibus module M M M M M M M M M M A A A D D D D D Medium and Large Dry Pumps and Systems

130 GXS/pXH DRY PUMP MAXX DRY VACUUM SYSTEM For high capacity applications our proven GXS dry pump range is available with pxh pumps, the new generation of large mechanical boosters for an integrated flexible modular skid design. pxh booster pumps are provided with high efficiency motor and inverter drives that integrate directly into the GXS pump control system with a single connection. With our unique screw technology and world leading high efficiency booster, you are guaranteed best-in-class pumping speeds and low running cost for many years to come. Features and Benefits Flexible integrated modular skid design. Fast reduced pump down times with ultimate vacuum < 5 x -4 mbar. Robust reliable operation even in harsh industrial applications. Intelligent on board controller with extensive and automated control capabilities. Economical affordable capital investment and low cost of ownership. Environmental smooth, quiet running with low power and utilities consumption. Applications Metallurgy. Coating. Vacuum packaging. Drying. Plasma processes. Steel degassing. Vacuum chamber evacuation. Other applications. Pump Range GXS250 GXS450 GXS750 pxh4500 pxh6000 GXS250/2600 GXS450/2600 GXS750/2600 GXS450/4200 GXS750/4200 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 131.

131 Performance Curves GXS/pXH Combinations GXS/pXH Combinations Performance Curve m 3 h Torr GXS450/ x pxh GXS750/ x pxh6000 GXS750/ x pxh mbar ft 3 min -1 m 3 h Torr GXS450/ pxh6000 GXS450/ pxh GXS750/ pxh6000 GXS750/ pxh mbar ft 3 min -1 m 3 h Torr 2x GXS250 + pxh x GXS450 + pxh x GXS750 + pxh mbar ft 3 min -1 m 3 h Torr x GXS250 + pxh x GXS450 + pxh6000 2x GXS750 + pxh mbar ft 3 min -1 m 3 h Torr GXS450 + pxh GXS750 + pxh mbar ft 3 min -1 m 3 h Torr x GXS250/ pxh6000 2x GXS450/ pxh x GXS750/ pxh mbar ft 3 min -1 m 3 h Torr GXS x pxh4500 GXS450/ x pxh4500 GXS450/ x pxh4500 GXS750/ x pxh4500 GXS750/ x pxh mbar ft 3 min -1 m 3 h Torr GXS250/ pxh GXS450/ pxh GXS750/ pxh4500 GXS750/ pxh mbar ft 3 min -1 m 3 h Torr ft 3 min mbar Medium and Large Dry Pumps and Systems GXS450 + pxh6000 GXS750 + pxh

132 GXS/pXH Combinations 2x GXS250 GXS450 2x GXS450 PXH4500 pxh x pxh x pxh6000 GXS750 2x GSX750 GXS250/2600 2x GXS250/2600 GXS450/2600 2x GXS450/2600 GXS450/4200 GXS750/2600 2x GXS750/2600 GXS750/4200 MAXX system 1+1 straight spool MAXX system 3 sets of 1+1 straight spool MAXX system 2x GXS x pxh MAXX system 1x GXS x pxh Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 133.

133 Technical Data Units GXS450 & pxh kw 2x GXS750 & pxh kw GXS750/2600 & pxh kw Peak pumping speed m 3 h -1 (cfm) 4250 (2501) 5350 (3149) 6820 (4914) Ultimate pressure mbar (Torr) 1.6 x -3 (1.2) 1.6 x -3 mbar ( ) 2.8 x -4 ( ) Motor rating power kw (hp) 18.5 (24.8) 51.5 (69.0) 37 (49.6) Full ultimate kw (hp) 7.9 (.6) 19.2 (25.7) 12.0 (16.09) power peak pumping kw (hp) 16.8 (22.5) 56.2 (75.4) 30.6 (41.03) load Electrical Supply options High volt (GXS & pxh) V 3Ø 50/60 Hz Low volt (GXS & pxh) V 3Ø 50/60 Hz Connections High volt (GXS & pxh) Harting han K 4/4-F Harting han 0A-F Low volt (GXS & pxh) Harting han K 4/4-F Harting han 200A-F pxh Harting han K 4/4-F Vacuum pxh Inlet pxh4500/iso200 pxh6000/iso250 pxh6000/iso250 couplings GXS Exhaust GXS450/NW50 GXS750/NW50 GXS750/2600/NW50 Cooling water Flow GXS/pXH 12 lmin -1 (3.2 galmin -1 ) (-25 C) Supply pressure GXS/pXH (max) DP across pump (min) 26 lmin -1 (6.9 galmin -1 ) (-25 C) 6.9 bar (0 psig) 18 lmin -1 (4.8 galmin -1 ) (-25 C) GXS/pXH 1.25 bar (18 psig) 2 bar (29 psig) 2.5 bar (36 psig) Operating C ( F) 5-40 (41-4) temperature N 2 pressure (supply pressure) bar (psig) (36-0) Light duty slm 12 Medium duty slm Control valve connection Swagelok Ø ⅜ tube with olive Solvent Filter connection ½" NPT Male flush Solvent connection ⅜" BSP Male (G ⅜") Noise db (A) < 64 < 70 GXS exhaust back pressure mbar (psia) 1400 (20) (max) System IP rating 21D (IEC60529) Lubrication Type PFPE Drynert 25/6 (reco mmended), Fomblin 25/6 (alternative), Krytox 1525 (alternative) Volume l (US gal) 3.6 (0.9) 6.8 (1.8) 4.9 (1.3) Monitoring & Control Profibus DP Weight kg (lbs) 1191 (2625) 2038 (4493) 1598 (3523) 134. Medium and Large Dry Pumps and Systems

134 Units GXS750/4200 & pxh kw GXS750/2600 & 2x pxh kw GXS750/4200 & 2x pxh kw Peak pumping speed m 3 h -1 (cfm) 7040 (4143) (7357) (7781) Ultimate pressure mbar (Torr) 2.7 x -4 ( ) 3.1 x -4 ( ) 2.9 x -4 ( ) Motor rating power kw (hp) 37 (49.6) 44.5 (59.7) 44.5 (59.7) Full ultimate kw (hp) 12.7 (16.96) 14.0 (18.82) 14.7 (19.74) power peak kw (hp) 29.9 (40.09) 31.3 (41.95) 30.5 (40.95) pumping load Electrical Supply options High volt (GXS & pxh) V 3Ø 50/60 Hz Low volt (GXS & pxh) V 3Ø 50/60 Hz Connections High volt (GXS & pxh) Harting han 0A-F Low volt (GXS & pxh) Harting han 200A-F pxh Harting han K 4/4-F Vacuum pxh Inlet pxh6000/iso250 pxh6000/iso250 pxh6000/iso250 couplings GXS Exhaust GXS750/4200/NW50 GXS750/2600/NW50 GXS750/4200/NW50 Cooling water Flow GXS/pXH 18 lmin -1 (4.8 galmin -1 ) (-25 C) Supply GXS/pXH pressure (max) 24 lmin -1 (6.3 galmin -1 ) (-25 C) 6.9 bar (0 psig) 24 lmin -1 (6.3 galmin -1 ) (-25 C) DP across pump (min) GXS/pXH 2.5 bar (36 psig) 2.5 bar (36 psig) 2.5 bar (36 psig) Operating C ( F) 5-40 (41-4) temperature N 2 pressure (supply pressure) bar (psig) (36-0) Light duty slm 12 Medium duty slm Control valve connection Swagelok Ø ⅜ tube with olive Solvent Filter connection ½" NPT Male flush Solvent connection ⅜" BSP Male (G ⅜") Noise db (A) < 70 GXS exhaust back pressure mbar (psia) 1400 (20) (max) System IP rating 21D (IEC60529) Lubrication Type PFPE Drynert 25/6 (reco mmended), Fomblin 25/6 (alternative), Krytox 1525 (alternative) Volume l (US gal) 6.0 (1.6) 6.6 (1.7) 7.7 (2.0) Monitoring & Control Profibus DP Weight kg (lbs) 1556 (3430) 2033 (4482) 2021 (4455) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 135.

135 Ordering information Booster 0 None 1 pxh pxh x pxh x pxh6000 Vacuum Instrumentation 0 None 1 GXS / GMB Interstage Active Pirani Gauge 2 pxh / GXS Interstage Active Pirani Gauge 3 GXS / GMB Interstage Active Strain Gauge 4 pxh / GXS Interstage Active Strain Gauge Interface Accessories 0 None 1 Full Profibus (2x Profibus Modules) 2 One Profibus Module + pxh Serial Link 3 Full MCMmicroTIM (2x TIMs) 4 One MCMmicroTIM + pxh Serial Link 5 Full SIM control by Ethernet M X Material option 1 Carbon steel 2 Stainless steel 1x pxh & 1x GSX, straight spool 3 Stainless steel 1x pxh & 1x GXS, cross spool 4 Stainless steel 1x pxh & 2x GXS 5 Stainless steel 2x pxh & 1x GXS 6 Stainless steel extension kit 1x GXS or 1x pxh only Pump 0 None 1 2x GXS250 2 GXS x GXS450 4 GXS x GXS750 6 GXS250/ x GXS250/ GXS450/ x GXS450/2600 A GXS450/4200 B GXS750/2600 C 2x GXS750/2600 D GXS750/4200 Pump Purge / Voltage 0 None 1 Light duty V 3Ø 50/60 Hz 2 Light duty V 3Ø 50/60 Hz 3 Medium duty V 3Ø 50/60 Hz 4 Medium duty V 3Ø 50/60 Hz 5 Medium duty V 3Ø 50/60 Hz 6 Medium duty V 3Ø 50/60 Hz 7 Light duty EES V 3Ø 50/60 Hz 8 Light duty EES V 3Ø 50/60 Hz Spool & Manifold / Extension Kit 1 Straight spool * 2 Cross spool ** 3 Standard manifold 2x GXS & 1x pxh 4 Standard manifold 2x pxh & 1x GXS 5 Extension kit 1x GXS or 1x pxh only *** Notes * Cost effective variant ** Ready for future module extension *** Select, if already installed 1x GXS & 1x pxh with cross spool and want extension to module C or D. Extension kit includes necessary spool(s), frame for 2x pxh, valve, bellows, hardware etc. Important: the pump or booster you select for extension must be of the same size or type as bought previously Material Options 1: Carbon steel except GXS valve made of iron cast & stainless steel, bellows made of st. steel / flanges CS 2-6: Stainless steel except GXS valve made of iron cast & st. steel, bellows made of st. steel / flanges CS, recommended for chemical applications Pump Purge / Voltage include: Light duty: SSP Medium duty: SSP + Inlet + GB + Exh PM, pressure monitoring Medium duty+ : the same as medium duty with high flow purge / solvent flush Light duty EES includes SSP & external evacuation system Please contact your sales representative for more information 136. Medium and Large Dry Pumps and Systems

136 IDX 00/1300 DRY PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE The IDX00 is the benchmark in performance for fast pump-down of large chambers and high capacity pumping for industrial processes. Based on the double-ended screw technology, the IDX Dry Vacuum Pump will give you all the reliability and performance you want for your process. The IDX outperforms all other dry pumps in robustness, performance and ease of operation, giving you faster pump-down from atmosphere and managing higher throughput at low pressures. Dry pumping systems reduce energy costs, eliminate effluent and can give significant improvements in product quality, making them the ideal solution for many coating and metallurgy processes. Features and Benefits Improved performance and reliability. Continuous performance from atmosphere to ultimate. Excellent thermal profile and temperature control. Tolerates liquid and particles. Does not contaminate your process. Pump Range IDX IDX00 IDX1300 Applications Metallurgy. Vacuum Induction Melting (VIM). Vacuum Arc Refining (VAR). Precision Investment Casting (PIC). Steel Degassing. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 137.

137 Performance Curves IDX00 IDX00 IDX00 Performance Curve Peak Pumping Speed m 3 h (589 cfm) 00 Ultimate Pressure 5 x -2 mbar (3.75 x -2 Torr) (m 3 h -1 ) IDX (mbar) Ordering information IDX00 22 kw 50 Hz safe area IDX00 30 kw 50 Hz safe area extended performance IDX00 30 hp 60 Hz safe area IDX00 40 hp 60 Hz safe area extended performance A A A A IDX1300 IDX1300 IDX1300 Performance Curve Peak Pumping Speed 1300 m 3 h -1 (766 cfm) Ultimate Pressure 5 x -2 mbar (3.75 x -2 Torr) (m 3 h -1 ) IDX (mbar) Ordering information IDX kw DIN Safe Area IDX hp ANSI Safe Area A A Medium and Large Dry Pumps and Systems

138 Dimensions IDX Dimensions C B A IDX00 IDX1300 A 50 Hz 2250 mm (88.5 ) 2465 mm (97 ) 60 Hz 2290 mm (90.1 ) 2515 mm (99 ) B 854 mm (33.6 ) 05 mm (39.6 ) C 750 mm (29.5 ) 750 mm (29.5 ) Technical Data IDX00 IDX Hz kg (lb) 1560 (3439) 1590 (3506) 60 Hz kg (lb) 1630 (3594) 1660 (3660 lb) Pumping speed Nominal m 3 h -1 (cfm) 00 (589) 1300 (766) Actual m 3 h -1 (cfm) 900 (560) 1250 (736) Ultimate pressure mbar (Torr) 5 x -2 (3.75 x -2 ) Noise db(a) 82 Motor kw (hp) 30 (40 ) Optional kw (hp) 22 (30) - Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 139.

139 Service, Spares and Accessories Gear Box Oil Gear Box Oil 4 Ltr Mobil SHC 629 Coolant Coolant 0.9/2L Drystar * 0.9 litres (0.24 US gal) as supplied, 2.0 litres (0.53 US gal) when diluted. IDX Kit IDX Routine maintenance kit IDX Heat exchanger cleaning kit IDX Cooling system overhaul kit IDX Motor fitting kit IDX Drive coupling kit IDX Bearing and seal replacement kit IDX Oil pump replacement kit IDX Strip and rebuild kit IDX Flame arrestor cleaning kit IDX Hoses kit IDX Flame arrestor replacement kit (inlet) IDX Flame arrestor replacement kit (outlet) IDX Flame arrestor tooling kit H H A A A A A A A A A A A A A A number of accessories are available for the CDX and IDX pumps, as listed below. Contact your supplier or Edwards for details of these accessories. Exhaust Silencers (mild steel or stainless steel) Flame arrestors Acoustic enclosures and acoustic cover kits Gas ballast kits Inlet purge kit Exhaust purge kit Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part Medium and Large Dry Pumps and Systems

140 EPX HIGH VACUUM PRIMARY PUMP MODERNISING YOUR WORLD THROUGH VACUUM The EPX series uses a unique, patented, single-shaft regenerative/holweck stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of < 1x -4 mbar or < 1x -6 mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures. Features and Benefits Compact footprint the EPX is more compact than the equivalent turbomolecular pump and primary pump combination. Low cost of ownership zero routine maintenance with a 5 year service interval. Unique patent protected pumping mechanism the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate rough pumping required. Ultra clean mechanism EPX pumps have no grease or oil under vacuum and present no other source of potential contamination. Extremely reliable based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E) with service periods of around every 5 years to maximize the life of the pump. Water cooled low environmental heat load Low noise and vibration better working environment. Ideal for vibration sensitive environments. Applications Gas recirculation. Gas recovery. Beamlines. Distillation, drying and degassing. Pump Range EPX180 EPX180LE EPX180NE EPX500 EPX500LE EPX500NE Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 141.

141 Performance Curves EPX180LE Dry Pump EPX180LE EPX180LE Performance Curve Peak speed 170 m 3 h -1 5 ft 3 min lmin -1 Ultimate vacuum < 1 x -4 mbar < 7.5 x -5 Torr < 1 x -2 Pa Ordering information EPX180LE Dry Pump 208 V No TIM ⅜ water connector EPX180LE Dry Pump 400 V No TIM ⅜ water connectors EPX180LE Dry Pump 208 V No TIM ¼ water connector EPX180LE Dry Pump 400 V No TIM ¼ water connectors EPX180LE Dry Pump 208 V MCM TIM ⅜ water connector EPX180LE Dry Pump 400 V MCM TIM ⅜ water connectors EPX180LE Dry Pump 208 V MCM TIM ¼ water connector A A A A A A A Comparative pumping speeds from back to back testing 2 ISO pumping speed obtained using total pressure gauges EPX180NE Dry Pump EPX180NE EPX180NE Performance Curve Peak speed 170 m 3 h -1 5 ft 3 min lmin -1 Ultimate vacuum < 1 x -4 mbar < 7.5 x -5 Torr < 1 x -2 Pa Ordering information EPX180NE Dry pump 208 V MCM TIM ⅜ water connector EPX180NE Dry pump 400 V MCM TIM ⅜ water connectors EPX180NE Dry pump 400 V MCM TIM ¼ water connectors EPX180NE Dry pump 208 V No TIM ⅜ water connector EPX180NE Dry pump 400 V No TIM ⅜ water connector A A A A A Comparative pumping speeds from back to back testing 2 ISO pumping speed obtained using total pressure gauges 142. Medium and Large Dry Pumps and Systems

142 EPX500 Performance Curve EPX500LE Peak speed 500 m 3 h ft 3 min lmin -1 Ultimate vacuum < 1 x -6 mbar < 7.5 x -7 Torr < 1 x -4 Pa EPX500L Dry Pump Ordering information 1 Comparative pumping speeds from back to back testing 2 ISO pumping speed obtained using total pressure gauges EPX500LE Dry pump 208 V No TIM ⅜ water connector EPX500LE Dry pump 400 V No TIM ⅜ water connectors EPX500LE Dry pump 208 V MCM TIM ⅜ water connector A A A EPX500 Performance Curve EPX500NE Peak speed 500 m 3 h ft 3 min lmin -1 Ultimate vacuum < 1 x -6 mbar < 7.5 x -7 Torr < 1 x -4 Pa EPX500N Dry Pump Ordering information 1 Comparative pumping speeds from back to back testing 2 ISO pumping speed obtained using total pressure gauges EPX500NE 208 V No TIM ⅜ water connector EPX500NE 400 V No TIM ⅜ water connector EPX500NE 208 V No TIM ¼ water connector EPX500NE 208 V MCM TIM ⅜ water connector EPX500NE 400 V MCM TIM ⅜ water connectors A A A A A Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 143.

143 Dimensions LE variant Dimensions NE variant Dimensions Technical Data 144. Medium and Large Dry Pumps and Systems Units EPX180 LE EPX180NE EPX500LE EPX500NE Peak speed m 3 h ft 3 min lmin Ultimate vacuum mbar < 1 x 4 < 1 x -4 < 1 x -6 < 1 x -6 Warm-up time (to nominal performance) Torr < 7.5 x -5 < 7.5 x -5 < 7.5 x -7 < 7.5 x -7 Pa < 1 x -2 < 1 x -2 < 1 x -4 < 1 x -4 min Inlet flange ISO63 ISO63 ISO160 ISO160 Outlet flange NW25 NW25 NW25 NW25 Noise db(a) < 59 < 59 < 59 < 59 Water connectors ⅜ in Quick ⅜ in Quick Minimum cooling water lmin flow rate Cooling water temperature C Electrical Supply 200/208 V, 50/60 Hz 3 phase 400 V, 50/60 Hz 3 phase 200/208 V, 50/60 Hz 3 phase 200/208 V, 50/60 Hz 3 phase Power at ultimate kw Rated motor power kw TIM none None None None Weight kg Nitrogen supply interface - ¼ in (6.5 mm) tube - ¼ in (6.5 mm) tube Nitrogen supply pressure Pa - 3 x 5-7 x 5-3 x 5-7 x 5 Minimum nitrogen purity % %

144 Service, Spares and Accessories Foot Adapter IPX-EPX foot adapter Pump Display Terminal (PDT) Pump Display Terminal (PDT) Protection Box Accessory A D /208 V, 50/60 Hz D V, 50/60 Hz D Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Dry Pumps and Systems 145.

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146 MECHANICAL BOOSTERS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE EH Mechanical Booster Pumps 151 pxh Mechanical Booster Pumps 158 Stokes 6 Series Mechanical Booster Pumps 160 HV8000 Mechanical Booster Pump 169 HV30000/40000 Mechanical Booster Pumps 173 Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 147.

147 Mechanical Boosters EH Mechanical Booster Pumps pxh Mechanical Booster Pumps Stokes 6 Mechanical Booster Pumps HV Mechanical Booster Pumps Edwards provides a wide range of mechanical booster pumps to suit all the requirements of Industrial and Chemical processes. Product ranges The EH Mechanical Booster range gives our customers reassurance and peace of mind thanks to its large installed base, both in Industrial and Chemical markets. EH pumps, available in sizes from 250 to 4200 m 3 h -1 displacement, feature the unique hydrokinetic drive, providing an efficient power transmission with benefits in economy, performance and compactness. The pxh Pumps represent the new generation of large mechanical boosters providing high pumping capacity with reduced footprint. Available in sizes from 6965 to 8358 m 3 h -1 displacement, are packaged as separate pumps with inverter driven controls. They are designed to be easily integrated with GXS, the last generation Edwards Industrial on board controlled dry pumps, into a high pumping speed dry pumping system. The Stokes 6 Series features a rugged design for robust and reliable operation. Available in sizes from 40 to 6630 m 3 h -1 displacement is configurable to customer needs: bare shaft or direct drive, rpm, vertical or horizontal gas flow orientation with by-pass versions available. HV Pumps feature a rugged design for robust and reliable operation in very large scale processes in Industrial and Chemical markets. Available in sizes from 7200 to m 3 h -1 displacement, are configurable to customer needs: bare shaft or with direct drive motor fitted, can be specified with variable frequency drives for greater versatility Mechanical Boosters

148 ATEX ATEX classified EH boosters are annotated with the suffix T3 or T4. EH boosters may be supplied with ATEX classification either as part of a pump system or stand-alone. ATEX compliance is typically specified for use in Europe, but may also be required in other areas. ATEX compliant EH boosters are suitable for operation in ATEX systems: All of the EH250C, EH250 T4, EH500C, EH500 T3, EH1200C, EH1200 T4, EH2600C, EH2600 T3, EH2600 T4, EH4200C, EH4200 T3 and EH4200 T4 chemical EH pumps are fitted with flameproof motors: Pumps suitable for 50 Hz operation are fitted with a flameproof motor approved to EEx d. Gas Group IIA, lib, Temperature Class T4. Pumps suitable for 60 Hz operation are fitted with a flameproof motor approved to CSA, Division 1 area, Gas Class I Group C & D, and Dust Class II Group F & G, Temperature Class T3C. The 60Hz pumps with flameproof motors are designated C versions. Gas Auto-Ignition Temperature The temperature classifications applied to the chemical EH pumps relate to the auto-ignition temperature of flammable materials that can be pumped: The EH250C, EH500C, EH1200C, EH2600C, EH4200C and ATEX EH pumps that have a T3 classification are suitable for pumping flammable materials that have an auto-ignition temperature greater than 200 C. ATEX EH pumps that have a T4 classification are suitable for pumping flammable materials that have an auto-ignition temperature greater than 135 C. Flame Proof Chemical boosters are annotated with the suffix C. EH boosters may be ordered with Flame proof motors either individually, or as part of an Chemical system. Flame proof is generally applicable in N. America and the rest of the world (excluding Europe). Chemical boosters will be supplied with a flame proof motor (suitable for 60 Hz operation) approved to CSA, Division 1 area, Gas Class I Group C & D and Dust Class II Group F & G, Temperature Class T3C. Internal and External Classifications Internal External II 1 G bc T4 II 2 G IIB T4 or or II 1 G bc T3 EH500 II 1 G bc T3 Internal Atex is suitable for all gas types. II 2 G IIB T3 II 2 G IIB T3 The notations used in these ratings are as follows: Symbol Meaning Specifies that the chemical EH pump can be used in a potentially explosive atmosphere II Equipment group II 1 G Equipment category 1 b Control of ignition source c Constructional safety IIB Suitable to pump gas group IIB T3 / T4 Gas auto-ignition temperature Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 149.

149 EH Pumps with Hydrokinetic Drive EH booster pumps have a unique and patented hydrokinetic fluid drive, which couples the motor to the pumping mechanism. The hydrokinetic drive offers the following advantages: Pump down times cut by up to 50% Reduced capital and operating costs No pressure sensors, by-pass lines or valves Can operate continuously at all pressures when used with a backing pump. EH booster pumps have universal voltage, air-cooled motors and are available with effective pumping speeds of up to 4140 m 3 h -1 / 2440 ft 3 min -1. The pump bodies of the EH1200, EH2600 and EH4200 pumps are watercooled. Two versions of each EH booster pump are available, with different oils used for the lubrication of the seals and gears. The standard version uses mineral oils, such as Ultragrade 20. The alternative version has PFPE (perfluoropolyether) oils and is suitable for applications where oxygen or other reactive and corrosive gases are processed. Fomblin must be purchased separately for PFPE prepared pumps: Pump-Down Times cut by up to 50% The hydrokinetic drive allows the booster pump to be started at the same time as the backing pump (at atmospheric pressure) as it prevents motor overload. The EH booster pump therefore assists the pumping process from the start of pump-down. In comparison pumping systems with conventional, direct drive mechanical booster pumps (where the booster pump is switched on when the chamber pressure has been reduced to, typically, less than mbar / 7.5 Torr), the total evacuation time can be reduced by as much as 50%. The graph below shows data for a 2.8 m 3 / 0 ft 3 chamber, with a 2600 m 3 h -1 / 2600 ft 3 min -1 mechanical booster pump and a 255 m 3 h -1 / 150 ft 3 min -1 backing pump: Automatic Overload Protection The hydrokinetic drive automatically varies the rotational speed of the pump. This protects the motor from overload, prevents over-heating, and allows the pump to operate with high pressure differentials. Consequently, EH booster pumps are not damaged by sudden increases of inlet pressure and even by the entry of solid debris into the pump. Important Cost Savings When you use EH mechanical booster pumps, you save money on installation and operation. Your capital costs are reduced as you do not need valves, by-pass lines and pressure switches, and you can use a smaller backing pump than with conventional drive booster pumps. Operation costs are reduced because EH booster pumps have smaller motors than direct drive pumps and, when operating at full speed, they use only a fraction of the rated power Mechanical Boosters

150 EH MECHANICAL BOOSTER PUMP THE INTELLIGENT CHOICE The EH mechanical booster pumps feature the unique hydrokinetic drive, providing an efficient power transmission with benefits in economy, performance and compactness. The hydrokinetic drive provides pump down times cut by 50%, when compared with direct drive pumps, no bypass lines or pressure switches required, universal voltage motors, reduced capital and operating costs, air cooled motors with water cooled options, and quiet, minimum vibration. The EH mechanical booster pumps, based on the simple Roots principle, remain the favorite pumps for applications where high pumping speeds over 3000 m 3 h 1 /1776 ft 3 min -1 are required in the pressure region of 0.01 to 50 mbar/ to 37.5 Torr. These must always be backed by another pump which can deliver against a high pressure differential to atmospheric pressure. Operating at relatively low pressures, the mechanical booster pump is not exposed to the same concentrations of corrosive process media as is the backing pump, which makes it highly reliable. Features and Benefits Applications Performance fast pump down time due to unique hydrokinetic drive. Increased productivity faster pump down time. More performance for less larger displacement than equivalent competitor models. Stable operation optimised clearances and after coolers. Simplicity Continuous operation at all pressures. Simple installation no need for pressure switches, bypass lines or variable frequency drives. Reliability automatic overload protection, reliable shaft seal design. Safe operation automatic overload protection. Robust operation even for harsh duties proven shaft seal design to protect pumping mechanism and gearbox from cross-contamination. High uptime and low maintenance internal evacuation of gearboxes extends shaft seal life. Reassurance. Peace of mind industry proven with large installed base. Vacuum distillation. Vacuum packaging. Steel degassing. Thin film coating. Industrial freeze drying. Semiconductor processing. Pump Range EH EH250 EH500 EH1200 EH2600 EH4200 PFPE Prepared EH250FX EH500FX EH1200FX EH2600FX EH4200FX Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 151.

151 Performance Curves EH250 Mechanical Booster Pump EH250 EH250 Performance Curve Displacement 50 Hz 3 m 3 h ft 3 min Hz 375 m 3 h ft 3 min -1 (m 3 h -1 ) 3 2 Ordering information EH250, 50Hz E2M40 GV80 EH250 HC IE3 Asia 50 Hz 200 V 50 Hz EH250 HC IE3 EU/CN 50 Hz V 50 Hz A A (mbar) (Pa) EH250 HC IE3 Asia 60 Hz 200 V 60 Hz, 380 V60 Hz A EH250 HC IE3 US 60 Hz 230/460 V 60 Hz A EH250 FX IE3 Asia 50 Hz 200 V 50 Hz A EH250 FX IE3 EU/CN 50 Hz V 50 Hz EH250 FX IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz A A (ft 3 min -1 ) 2 EH250 FX IE3 US 60 Hz 230/460 V 60 Hz EH250C 460 V 3-ph 60 Hz 3 hp A NRA EH250, 60Hz E2M40 GV80 EH250T / V 3ph 50 Hz 2.2 kw NRA Please note that Fomblin must be purchased separately with PFPEprepared pumps. Fomblin YVac 16/6 is appropriate (Torr) EH500 Mechanical Booster Pump EH500 EH500 Performance Curve Displacement 50 Hz 505 m 3 h ft 3 min Hz 605 m 3 h ft 3 min -1 (m 3 h -1 ) 3 2 EH500, 50Hz Ordering information EH500 HC IE3 Asia 50 Hz 200 V 50 Hz EH500 HC IE3 EU/CN 50 Hz V 50 Hz EH500 HC IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz EH500 HC IE3 US 60 Hz 230/460 V 60 Hz EH500 FX IE3 Asia 50 Hz 200 V 50 Hz EH500 FX IE3 EU/CN 50 Hz V 50 Hz EH500 FX IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz EH500 FX IE3 US 60 Hz 230/460 V 60 Hz EH500C 460 V 3-ph 60 Hz 3 hp EH500T / V 3ph 50 Hz 2.2 kw A A A A A A A A NRA NRA Please note that Fomblin must be purchased separately with PFPEprepared pumps. Fomblin YVac 16/6 is appropriate (ft 3 min -1 ) EH500, 60Hz E2M80 GV (Torr) E2M80 GV (mbar) 4 5 (Pa) 152. Mechanical Boosters

152 EH1200 Performance Curve EH1200 Mechanical Booster Pump EH1200 (m 3 h -1 ) 3 2 Displacement 50 Hz 1195 m 3 h ft 3 min Hz 1435 m 3 h ft 3 min -1 EH1200, 50Hz E2M175 E2M80 (ft 3 min -1 ) EH1200, 60Hz E2M175 E2M (Torr) (mbar) (Pa) Ordering information EH1200 HC IE3 Asia50 Hz 200 V50 Hz EH1200 HC IE3 EU/CN50 Hz V50 Hz EH1200 HC IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz EH1200 HC IE3 US60 Hz 230 / 460 V60 Hz EH1200 FX IE3 Asia50 Hz 200 V50 Hz EH1200 FX IE3 EU/CN50 Hz V50 Hz EH1200 FX IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz EH1200 FX IE3 US60 Hz 230 / 460 V60 Hz EH1200C 230/460 V 3-ph 60 Hz 4 hp EH1200T V 3ph 50 Hz 3 kw A A A A A A A A A A Please note that Fomblin must be purchased separately with PFPE-prepared pumps. Fomblin YVac 16/6 is appropriate EH2600 Performance Curve EH2600 Mechanical Booster Pump EH2600 (m 3 h -1 ) 4 3 EH2600, 50Hz E2M175 E2M275 Displacement 50 Hz 2590 m 3 h ft 3 min Hz 31 m 3 h ft 3 min -1 Ordering information (ft 3 min -1 ) EH2600, 60Hz E2M175 E2M (Torr) (mbar) (Pa) EH2600 HC IE3 Asia50 Hz 200 V50 Hz EH2600 HC IE3 EU/CN50 Hz V50 Hz EH2600 HC IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz EH2600 HC IE3 US60 Hz 230 / 460 V60 Hz EH2600 FX IE3 Asia50 Hz 200 V50 Hz EH2600 FX IE3 EU/CN50 Hz V50 Hz EH2600 FX IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz EH2600 FX IE3 US60 Hz 230 / 460 V60 Hz EH2600C 230/460 V 3-ph 60 Hz 15 hp EH2600T V 3ph 50 Hz 11 kw EH2600T V 3ph 50 Hz 11 kw A A A A A A A A A A A Please note that Fomblin must be purchased separately with PFPEprepared pumps. Fomblin YVac 16/6 is appropriate Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 153.

153 Performance Curves EH4200 Mechanical Booster Pump EH4200 EH4200 Performance Curve Displacement 50 Hz 4140 m 3 h ft 3 min Hz 4940 m 3 h ft 3 min -1 (m 3 h -1 ) 4 3 EH4200, 50Hz E2M275 Ordering information EH4200 HC IE3 Asia 50 Hz 200 V 50 Hz EH4200 HC IE3 EU/CN 50 Hz V 50 Hz EH4200 HC IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz EH4200 HC IE3 US 60 Hz 230/460 V 60 Hz EH4200 FX IE3 Asia 50 Hz 200 V 50 Hz EH4200 FX IE3 EU/CN 50 Hz V 50 Hz EH4200 FX IE3 US 60 Hz 230/4 60 V 60 Hz EH4200 FX IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz EH4200C 230/460 V, 3-ph, 60 Hz, 15 hp EH4200T V, 3-ph, 50 Hz, 11 kw EH4200T V, 3ph, 50 Hz, 11 kw Dimensions EH250 dimensions A A A A A A A A A A A (ft 3 min -1 ) EH4200, 60Hz E2M (Torr) (mbar) (Pa) 775 (30.51) 138 (5.43) ISO (.63) 125 (4.92) 231 (9.09) Ø177 (6.97) 140 (5.51) 292 (11.50) 3 x M x 15 (0.59) ISO (7.38) 98 (3.86) 8 (0.32) EH500 dimensions 861 (33.90) ISO0 179 (7.05) 222 (8.74) 196 (7.72) 234 (9.21) 6 (4.17) 212 (8.35) Ø (4.52) 292 (11.50) 146 (5.75) M x 15 (0.59) ISO (8.74) 98 (3.86) 196 (7.72) 4 x M8 x 16 (0.63) 154. Mechanical Boosters

154 EH1200 dimensions 18 (40.08) ISO (.91) 380 (14.96) 334 (13.15) Ø198 (7.80) M12 x 15 (0.59) 230 (9.06) 1 (4.33) 220 (8.66) ISO0 (1.89) (5.20) 268 (.55) Ø18 (0.71) 260 (.24) EH2600 dimensions 155 (6.) 1245 (49.02) 312 (12.28) 481 (18.94) Ø236 EH4200 dimensions M16 x (20.63) 275 (.83) 1 (4.33) 220 (8.66) 285 (11.22) 461 (18.15) 236 (9.29) 4 x Ø (14.57) 533 (20.98) 155 (6.) 375 (14.76) ISO0 155 (6.) 1425 (56.) 402 (15.83) 481 (18.94) Ø (18.15) 237 (9.33) 375 (14.76) M16 x (20.98) 290 (11.42) 185 (7.28) 370 (14.57) 285 (11.22) 4 x Ø (14.57) ISO0 Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 155.

155 Technical Data 156. Mechanical Boosters Displacement (swept volume) Units EH250 EH500 EH1200 EH2600 EH Hz m 3 h -1 /ft 3 min -1 3/ / / / / Hz m 3 h -1 /ft 3 min / / /845 31/ /2935 Effective pumping speed with backing pump E2M40 m 3 h -1 /ft 3 min / / / E2M80 m 3 h -1 /ft 3 min / / / E2M175 m 3 h -1 /ft 3 min / / /31 - E2M275 m 3 h -1 /ft 3 min /271 20/ / /1825 Pressure differential across pump + 50 Hz mbar/torr 0-180/ / / / / Hz mbar/torr 0-150/ / / / /0-38 Inlet connection ISO63 ISO0 ISO160 ISO160 ISO250 Outlet connection ISO40 ISO63 ISO0 ISO0 ISO0 Rotational speed 50 Hz rpm rpm 60 Hz rpm rpm Operating continuous inlet pressure mbar/torr 0-00 mbar/0-760 Torr Maximum outlet pressure mbar/torr 00 mbar/760 Torr Recommended backing pumps GV80, E2M40, E2M80, ES0, 212J GV80, E2M80, ES0, ES200, ES300, 212J, 412J GXS160, GXS250, E2M80, E2M175, ES200, ES300, ES630, 212J, 412J, IDX00, IDX1300 GXS250, GXS400, E2M175, E2M275, ES300, ES630, 412J, IDX00, IDX1300 GXS450, E2M275, ES300, ES630, 412J, IDX00, IDX1300 Electrical supply voltage, 3-ph 50 Hz 200 V/ V 60 Hz 200 V/380 V/230 V/460 V Motor power Hydrocarbon kw/hp 2.2/3 3/4 11/15 PFPE kw/hp 2.2/3 3/4 11/15 ATEX kw Explosion proof Ambient temperature range Operating C/F 5 to 40/40 to 4 Storage C/F - to 80/14 to 176 Maximum operating humidity RH 90% Cooling method Air cooled Air cooled Water cooled+ Water cooled Water cooled Recommended oil Standard version Ultragrade 20 PFPE version Fomblin YVAC 16/6 Oil capacity Gear case litre Coupling cover litre l Shaft seal reservoir litre Weight kg/lb 75/165 85/ / / /900 + Depends on pressure

156 Service, Spares and Accessories EH Accessories Inlet Mesh Assy ISO63 EH250 Inlet Mesh Assy ISO0 EH500 Inlet Mesh Assy ISO160 EH1200/2600 Inlet Mesh Assy ISO250 EH4200 OLM500 oil level monitor* A A A A A * Not suitable for ATEX boosters Fomblin YVAC16/6 Fomblin YVAC16/6 1 kg H kg H Ultragrade Oil Ultragrade 20 Oil (1 litre) H Ultragrade 20 Oil (12 x 1 litre) H Ultragrade 20 Oil (4 litre) H Ultragrade 20 Oil (4 x 4 litre) H Service kits Spares Kit Con C&O EH/QMB250/500A A Spares Kit Module EH/QMB250/500A A Spares Kit Shim EH/QMB250/500A A Spares Kit Con C&O EH/QMB1200 A Spares Kit Module EH/QMB1200 A Spares Kit Con C&O EH/QMB26/4200 A Spares Kit Module EH/QMB26/4200 A Spares Kit Shim EH/QMB12/26/4200 A Spares Kit Con C&O EH/QMB26/4200 A Spares Kit Module EH/QMB26/4200 A Spares Kit Shim EH/QMB12/26/4200 A Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 157.

157 pxh MECHANICAL BOOSTER PUMPS THE INTELLIGENT CHOICE The pxh pumps represent the new generation of large mechanical boosters providing high pumping capacity with reduced footprint. Available in sizes from 6965 to 8358 m 3 h -1 displacement, are packaged as separate pumps with inverter driven controls. Designed to withstand harsh processes, they have a field proven reliability from the large installed base. pxh can be easily integrated with GXS, the last generation Edwards Industrial on board controlled dry pumps, into a high pumping speed dry pumping system. Features and Benefits Inverter driven control for Plug and Pump, flexible operation and automated control of your process. Low installation costs. Consistent output. Designed to withstand harsh industrial applications. Robust and reliable. Applications R&D/others Space simulation chambers evacuation. Load lock evacuation. Oil treatment. Vacuum packaging. Drying Transformer drying. Transformer vapour phase drying. Pipeline drying. Capacitor drying. Li Ion battery drying. Coating Glass coating. Roll/web coating. Hard coating/cvd. Surface activation. Plasma spray. Steel Degassing VD vacuum degassing. VOD vacuum oxygen decarburising. Metallurgy VIM vacuum induction melting. VAR vacuum arc remelting. MIM/vacuum sintering. PIC (investment casting). Electroslag remelting. Carbon vapour impregnation Mechanical Boosters

158 Performance Curves pxh Mechanical Booster Pump pxh Dimensions pxh dimensions H Ordering information W L pxh V pxh V pxh V pxh V ACG AC ACH AC pxh4500 pxh6000 Length mm Width mm Height mm Technical data Units pxh4500 pxh6000 Displacement m 3 h System inlet connection ISO200 ISO250 System outlet connection ISO160 NW160 Noise db (A) 66 Mass kg Cooling water Cooling water connection ⅜ BSP quick connect Maximum supply pressure barg 6.9 Supply temperature C -25 Minimum pressure differential barg 1.25 Typical water cooling flow rate lmin -1 6 Electrical supply type V 50/60 Hz/ V 50/60 Hz Han K 4/4 Motor rating kw (hp) 7.5 (.0) Power at ultimate pressure ( kw) kw (hp) 1.9 (2.5) Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 159.

159 STOKES 6 SERIES MECHANICAL BOOSTER PUMPS THE INTELLIGENT CHOICE Stokes 6 series mechanical boosters are designed to be used in conjunction with rotary piston, dry vacuum, rotary vane, liquid ring or on the inlet of the backing pump to create a compact integrated package to increase pumping speed at working pressures and reduce the pump down time significantly. The 6 Series are available in bare-shaft or direct drive motor variants, horizontal or vertical gas flow and with a single mechanical seal or a Process Isolation variant with 5 mechanical seals for optimum protection from dust and particulate contamination in arduous applications. Also By-pass variants are available which eliminate the need for pressure switches making the 6 Series one of the most versatile and flexible boosters. Features and Benefits Robust Over 80 years of time tested proven performance with experienced service and technical support. Increased lifetime, reliability and simple to use large diameter shafts, ring feeder keyless gear locking system and dynamically balanced impellers. Reliable Easy to maintain single mechanical seal. Increased productivity 5 seal design for optimal process protection. Versatile Configured for your needs bare shaft or direct drive, rpm. Vertical or horizontal gas flow orientation with by-pass versions available. Simple to service simple maintenance requirements result in long term reliability. Applications Automotive. Chemical processing. Heat treatment. Leak detection. Metallurgy. PET processing. Pharmaceuticals. Thermal processing. Transformer drying and cable fluid conditioning. Vacuum coating. Vacuum melting. Many other industrial applications. Pump Range Stokes B Mechanical Boosters

160 Performance Curves Stokes 607 Stokes 607 Series Mechanical Booster Stokes 607 Series Process Isolation Booster Displacement Displacement Direct drive 1800 rpm 40 m 3 h cfm Direct drive 1800 rpm 40 m 3 h cfm Direct drive 3000 rpm 1733 m 3 h cfm Direct drive 3000 rpm 1733 m 3 h cfm Direct drive 3600 rpm 2080 m 3 h cfm Direct drive 3600 rpm 2080 m 3 h cfm * Note: H = Horizontal Gas Flow V = Vertical Gas Flow * Note: H = Horizontal Gas Flow V = Vertical Gas Flow Ordering information 607 MHR CE, IE3 7.5 kw, EU/US/CH 50/60Hz v 50Hz /230/460v 60Hz (3000/3600 rpm) 607 MHR CE, IE3 7.5 kw, Asia 50/60Hz 200v 50/60Hz 380v 60Hz (3000/3600 rpm) 607 MVR CE, IE3 7.5 kw, EU/US/CH 50/60Hz v 50Hz /230/460v 60Hz (3000/3600 rpm) 607 MHR CE, IE3 7.5 kw, Asia 50/60Hz 200v 50/60Hz 380v 60Hz (3000/3600 rpm) MHR MHR MVR MVR MHR (bare shaft) Horizontal flow MHR 607 MHR (bare shaft) Horizontal flow MHR1 (pfpe pre.) 607 MVR (bare shaft) Vertical flow MVR 607 MVR (bare shaft) Vertical flow (pfpe prep.) MVR1 607 MHR (bare shaft) Horizontal flow MHR 607 MVR (bare shaft) Vertical flow MVR 607 MH20, 20 hp, 230/460 V, 3-ph, MH rpm 607 MV05, 5 hp, 230/460 V, 3-ph, MV rpm 607 MV20, 20 hp, 230/460 V, 3-ph, MV rpm 607 MH05, 5 hp, 230/460 V, 3-ph, MH rpm Ordering information 607 5HR CE, IE3 7.5 kw, EU/US/CH 50/60Hz HR v 50Hz /230/460v 60Hz (3000/3600 rpm) 607 5HR CE, IE3 7.5 kw, Asia 50/60Hz HR v 50/60Hz 380v 60Hz (3000/3600 rpm) 607 5VR CE, IE3 7.5 kw, EU/US/CH 50/60Hz VR v 50Hz /230/460v 60Hz (3000/3600 rpm) 607 5HR CE, IE3 7.5 kw, Asia 50/60Hz VR v 50/60Hz 380v 60Hz (3000/3600 rpm) 607 5HR (bare shaft) Horizontal flow HR 607 5VR (bare shaft) Vertical flow VR 607 5H, hp, 230/460 V, 3-ph, H H_ rpm 607 5V, hp, 230/460 V, 3-ph, V rpm *Note: 607, B and 622 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 161.

161 Performance Curves Stokes 615 Series Mechanical Booster Stokes 615 Stokes 615 Series Process Isolation Booster V Belt 2750 rpm Direct drive 1800 rpm Direct drive 3000 rpm Direct drive 3600 rpm Displacement 3375 m 3 h cfm 22 m 3 h cfm 3685 m 3 h cfm 4420 m 3 h cfm V Belt 2750 rpm Direct drive 3000 rpm Direct drive 3600 rpm Displacement 3375 m 3 h cfm 3685 m 3 h cfm 4420 m 3 h cfm * Note: H = Horizontal Gas Flow V = Vertical Gas Flow * Note: H = Horizontal Gas Flow V = Vertical Gas Flow Ordering information 615 MHR CE, IE3 11 kw, EU/US/CH 50/60Hz MHR v 50Hz /230/460v 60Hz (3000/3600 rpm) 615 MHR CE, IE3 11 kw, Asia 50/60Hz MHR v 50/60Hz 380v 60Hz (3000/3600 rpm) 615 MVR CE, IE3 11 kw, EU/US/CH 50/60Hz MVR v 50Hz /230/460v 60Hz (3000/3600 rpm) 615 MVR CE, IE3 11 kw, Asia 50/60Hz MVR v 50/60Hz 380v 60Hz (3000/3600 rpm) 615 MHR (bare shaft) Horizontal flow MHR 615 MHR (bare shaft) Horizontal flow (pfpe pre.) MHR1 615 MVR (bare shaft) Vertical flow MVR 615 MVR (bare shaft) Vertical flow (pfpe prep.) MVR1 615 MH, hp, 230/460 V, 3-ph, MH rpm 615 MH15, 15 hp, 230/460 V, 3-ph, MH rpm 615 MV, hp, 230/460 V, 3-ph, MV rpm 615 MV15, 15 hp, 230/460 V, 3-ph, MV rpm Ordering information 615 5HR CE, IE3 11 kw, EU/US/CH 50/60Hz HR v 50Hz /230/460v 60Hz (3000/3600 rpm) 615 5HR CE, IE3 11 kw, Asia 50/60Hz HR v 50/60Hz 380v 60Hz (3000/3600 rpm) 615 5VR CE, IE3 11 kw, EU/US/CH 50/60Hz VR v 50Hz /230/460v 60Hz(3000/3600 rpm) 615 5VR CE, IE3 11 kw, Asia 50/60Hz VR v 50/60Hz 380v 60Hz (3000/3600 rpm) 615 5HR (bare shaft) Horizontal flow HR 615 5VR (bare shaft) Vertical flow VR 615 5H15, 15 hp, 230/460 V, 3-ph, MH rpm 615 5V15, 15 hp, 230/460 V, 3-ph, V rpm For performance curves of the various Stokes 6 booster coupled with a backing pump please consult Edwards *Note: 607, B and 622 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit Mechanical Boosters

162 Stokes 61B Stokes 61B Series By-Pass Mechanical Booster Stokes 61B Series Process Isolation Booster Displacement Displacement V Belt 2750 rpm 3375 m 3 h cfm V Belt 2750 rpm 3375 m 3 h cfm Direct drive 1800 rpm 22 m 3 h cfm Direct drive 3000 rpm 3685 m 3 h cfm Direct drive 3000 rpm 3685 m 3 h cfm Direct drive 3600 rpm 4420 m 3 h cfm Direct drive 3600 rpm 4420 m 3 h cfm Ordering information Ordering information 61B MHR CE, IE kw, EU/US/CH 50/60Hz v 50Hz /230/460v 60Hz (3000/3600 rpm) 61B MHR CE, IE kw, Asia 50/60Hz 200v 50/60Hz 380v 60Hz (3000/3600 rpm) 61B MVR CE, IE kw, EU/US/CH 50/60Hz v 50Hz /230/460v 60Hz (3000/3600 rpm) 61B MVR CE, IE kw, Asia 50/60Hz 200v 50/60Hz 380v 60Hz (3000/3600 rpm) 61B MHR (bare shaft) Horizontal flow 90061BMHR BMHR BMVR BMVR B-MHR 61B 5HR CE, IE kw, EU/US/CH 50/60Hz v 50Hz /230/460v 60Hz (3000/3600 rpm) 61B MHR CE, IE kw, Asia 50/60Hz 200v 50/60Hz 380v 60Hz (3000/3600 rpm) 61B 5VR CE, IE kw, EU/US/CH 50/60Hz v 50Hz /230/460v 60Hz (3000/3600 rpm) 61B 5VR CE, IE kw, Asia 50/60Hz 200v 50/60Hz 380v 60Hz (3000/3600 rpm) 61B 5HR (bare shaft) Horizontal flow 90061B5HR B5HR B5VR B5VR B-5HR 61B MVR (bare shaft) Vertical flow B-MVR 61B 5VR (bare shaft) Vertical flow B-5VR 61B MH, hp, 230/460 V, 3-ph, rpm 61B MH25, 25 hp, 230/460 V, 3-ph, rpm 61B MV, hp, 230/460 V, 3-ph, rpm B-MH B-MH B-MV 61B 5H25, 25 hp, 230/460 V, 3-ph, rpm 61B 5V25, 25 hp, 230/460 V, 3-ph, rpm B-5H B-5V25 61B MV25, 25 hp, 230/460 V, 3-ph, rpm B-MV25 *Note: 607, B and 622 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 163.

163 Performance Curves Stokes 622 Stokes 622 Series Mechanical Booster Stokes 622 Series Process Isolation Booster Displacement Displacement V Belt 2750 rpm 2750 m 3 h cfm V Belt 2750 rpm 2750 m 3 h cfm Direct drive 3000 rpm 5525 m 3 h cfm Direct drive 3000 rpm 5525 m 3 h cfm Direct drive 3600 rpm 6528 m 3 h cfm Direct drive 3600 rpm 6528 m 3 h cfm Ordering information 622 MHR CE, IE kw, EU/US/CH 50/60Hz MHR v 50Hz /230/460v 60Hz (3000/3600 rpm) 622 MHR CE, IE kw, Asia 50/60Hz MHR v 50/60Hz 380v 60Hz (3000/3600 rpm) 622 MVR CE, IE kw, EU/US/CH 50/60Hz MVR v 50Hz /230/460v 60Hz(3000/3600 rpm) 622 MVR CE, IE kw, Asia 50/60Hz MVR v 50/60Hz 380v 60Hz (3000/3600 rpm) 622 MHR (bare shaft) Horizontal flow MHR 622 MVR (bare shaft) Vertical flow MVR 622 MH25, 25 hp, 230/460 V, 3-ph, MH rpm 622 MV25, 25 hp, 230/460 V, 3-ph, MV rpm Ordering information 622 5HR CE, IE kw, EU/US/CH 50/60Hz HR v 50Hz /230/460v 60Hz (3000/3600 rpm) 622 5HR CE, IE kw, Asia 50/60Hz HR v 50/60Hz 380v 60Hz (3000/3600 rpm) 622 5VR CE, IE kw, EU/US/CH 50/60Hz VR v 50Hz /230/460v 60Hz (3000/3600 rpm) 622 5VR CE, IE kw, Asia 50/60Hz VR v 50/60Hz 380v 60Hz (3000/3600 rpm) 622 5HR (bare shaft) Horizontal flow HR 622 MVR (bare shaft) Vertical flow VR 622 5H25, 25 hp, 230/460 V, 3-ph, H rpm 622 5V25, 25 hp, 230/460 V, 3-ph, V rpm * Note: 607, B and 622 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit For performance curves of the various Stokes 6 booster coupled with a backing pump please consult Edwards 164. Mechanical Boosters

164 Dimensions Stokes 607 dimensions Ø241 (Ø9.49) A 406 (15.98) 543 (21.38) 216 (8.50) 83 (3.27) TYP. 203 (7.99) 318 (12.52) 1 LC 292 (11.50) 16 (0.63) 114 (4.49) 80 (42.52) (5 HP) Ø241 (9.49) 4 x 19 (0.75) B 135 (5.31) 965 (37.99) 1276 (50.24) (20 HP) 74 (2.91) 1184 (46.61) (7.5 KW) A 502 (19.76) 432 (17.00) (9.88) LC (6.89) 349 (13.74) 394 (15.51) 203 (8.00) 406 (15.98) 4 x 19 (0.75) B LC 254 (.00) 324 (12.76) 80 (42.52) (5 HP) 127 (5.00) 1276 (50.24) (20 HP) 965 (37.99) 1184 (46.61) (7.5 KW) A B 6 pipe flange connection 11 (279 mm) OD x (152 mm) ID 8 x ¾ - NC-2B x 1 ⅛ (29 mm) holes straddle both CL both flanges DIA. Holes 1 STD Inlet 2 Optional feet Stokes 615 dimensions A Ø298 (11.74) 406 (15.98) 203 (7.99) A Ø298 (11.74) LC 1 LC 543 (21.38) 216 (8.50) 1 LC 292 (11.50) 432 (17.00) 203 (7.99) 406 (15.98) 83 (3.27) 318 (12.52) 16 (0.63) 114 (4.49) 4 x 19 (0.75) B 74 (2.91) 1372 (54.02) 1391 (54.76) 235 (9.25) 529 (20.83) 1515 (59.65) (3.50) (6.89) (2.76) 394 (15.51) 502 (19.76) 1372 (54.02) ( HP) 227 (8.94) (54.76) 4 x 19 (0.75) B 1515 (59.65) A B 8 pipe flange connection 13 ½ (343 mm) OD x 8 (203 mm) ID 8 x ¾ - NC-2B x 1 ⅛ (29 mm) holes straddle both CL both flanges DIA. Holes 1 STD Inlet 2 Optional feet Product length may vary due to motor variant, contact Edwards for specific size for specific regions and voltage variants. Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 165.

165 Stokes 61B dimensions 406 (15.99) A Ø298 (11.75) 203 (7.99) A LC (29.75) 216 (8.50) 1 CL 292 (11.50) 432 (17.00) 203 (7.99) 406 (15.98) 83 (3.27) 229 (9.00) 318 (12.52) 16 (0.63) 114 (4.49) 4 x 19 (0.75) B 1372 (54.02) 74 (2.91) 1524 (60.00) 235 (9.25) 470 (18.50) 528 (20.79) 1521 (59.88) (3.27) (6.89) 394 (15.51) 2 4 x 19 (0.75) B 70 (2.76) 1372 (54.02) 1524 (60.00) 227 (8.94) 524 (20.63) 1521 (59.88) A 8 pipe flange connection 13 ½ (343 mm) OD x 8 (203 mm) ID 8 x 3/4 - NC-2B x 1 ⅛ (29 mm) holes straddle both CL both flanges B DIA. Holes 1 STD Inlet 2 Optional feet Stokes 622 dimensions Ø298 (11.74) A 438 (17.24) 219 (8.62) 1200 Ø298 (11.74) A (9.88) 648 (25.51) LC (21.38) 216 (8.50) 83 (3.27) 228 (9.00) 318 (12.52) 1 CL 292 (11.50) 16 (0.63) 114 (4.49) 4 x 19 (0.75) B 74 (2.91) 1702 (67.00) 1696 (66.77) 324 (12.76) 706 (27.80) 473 (18.62) (6.89) (3.50) 394 (15.51) 219 (8.62) 438 (17.24) 2 4 x 19 (0.75) B 74 (2.91) 1702 (67.00) 711 (27.99) 1696 (66.77) 324 (12.76) A 8 pipe flange connection 13 ½ (343 mm) OD x 8 (203 mm) ID 8 x ¾ - NC-2B x 1 ⅛ (29 mm) holes straddle both CL both flanges B DIA. Holes 1. STD Inlet 2. Optional feet 166. Product length may vary due to motor variant, contact Edwards for specific size for specific regions and voltage variants. Mechanical Boosters

166 Technical Data Units PIB PIB Displacement V belt 2750 rpm m 3 h -1 /ft 3 min / / / /2000 Direct drive 1800 rpm m 3 h -1 /ft 3 min -1 40/612-22/ Direct drive 3000 rpm m 3 h -1 /ft 3 min / / / /2170 Direct drive 3600 rpm m 3 h -1 /ft 3 min / / / /2600 Inlet/outlet flanges ASA/ANSI flange 6 8 Motor power hp ( kw) 5/20 (7.5) (7.5) (11) 15 (11) Cooling method Air cooled - Air cooled - By-pass available Cooling water l min -1 /gal min / / 2-3 Oil capacity (horizontal flow) litre/gal 1.9/ / / /0.51 Oil capacity litre/gal 4.1/1.1 (vertical flow) Max pressure differential mbar/torr 506/380 Max temp rise C/F 135/275 Max discharge temp C/F 191/375 Weight bare shaft kg/lbs 215/ /515 Weight TEFC direct drive kg/lbs 408/ / / /875 Recommended oil V- Lube H Units 61B 61B PIB PIB Displacement V belt 2750 rpm m 3 h -1 /ft 3 min / / / /3000 Direct drive 1800 rpm m 3 h -1 /ft 3 min -1 22/ /2350 Direct drive 3000 rpm m 3 h -1 /ft 3 min / / / /3900 Direct drive 3600 rpm m 3 h -1 /ft 3 min / /3900 Inlet/outlet flanges ASA/ANSI flange 8 Motor power hp ( kw) 1 /25 (8.5) 25 (18.5) Cooling method Air cooled Air cooled By-pass available Yes - - Cooling water l min -1 /gal min / /2-3 Oil capacity litre/gal 1.9/ / / /4.1 (horizontal flow) Oil capacity litre/gal 4.1/ / / /8.8 (vertical flow) Max pressure differential mbar/torr 333/ /250 Max temp rise C/F 135/ /27 121/250 Max discharge temp C/F 191/ /350 Weight bare shaft kg/lbs 284/ /740 Weight TEFC direct drive kg/lbs 530/ / / /1370 Recommended oil - V-Lube H Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 167.

167 Service, Spares and Accessories Spares 6 Inch MSeal seal kit Inch MSeal maintenance kit * Process Isolation 6XX-5HR kit Vertical gas flow mounting feet * This kit is the same as kit , but with bearings. This kit is for process isolation booster pumps, and must be used in conjunction with Kit or Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part Mechanical Boosters

168 HV8000 MECHANICAL BOOSTER PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE The Edwards HV8000 high vacuum mechanical booster has been developed to provide high reliability operation in aggressive environments. With a nominal pumping speed of 7200 m 3 h 1 (4241 ft 3 min -1 ) at 50 Hz, it is ideal for large industrial and chemical applications. IE3 energy efficiency 3 phase motors are now fitted to our standard motor pumps Features and Benefits Applications Performance Stable process for consistent output suitable for continuous operation over wide pressure ranges on heavy duty large scale applications. Reliability No unplanned downtime high performance water cooled mechanical shaft seal, large diameter shaft and large helical gears. Adaptability Easy integration and safe optional water cooled exhaust gas after cooler, shaft seal safety purge, temperature monitoring and VFD available. Flexibility Configured to your needs can be supplied with standard motor or without motor to allow a local motor to be fitted. Horizontal or vertical flow to suit application and system design. Steel degassing. Metallurgy. Coating. Process engineering industries. Pump Range HV HV8000 Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 169.

169 Performance Curves HV8000 Mechanical booster pump HV8000 Ordering information HV8000 VF IE3 Asia 50/60 Hz 200 V 50/60 Hz 380 V 60 Hz HV8000 VF IE3 EU/USA 50/60 Hz 18.5 kw V 50 Hz 230/460 V 60 Hz HV8000 VF IE3 Asia 50/60 Hz 380 V 60 Hz HV8000 VF IE3 EU/USA 50/60 Hz 18.5 kw V 50 Hz HV8000IND VF bare shaft HV8000IND HF bare shaft A A A A A A Dimensions HV8000 dimensions Horizontal Flow Vertical Flow HV8000 pumps tend to be used in large pumping systems rather than simple combinations Mechanical Boosters

170 Technical Data Displacement (swept volume) Units HV Hz m 3 h -1 /ft 3 min / Hz m 3 h -1 /ft 3 min /5089 Max rotation speed 50 Hz rpm Hz rpm 3600 Max pressure differential 50 Hz mbar/torr 190/ Hz mbar/torr 120/90 Ultimate (depends on backing set) 50 Hz mbar/torr 1.5 x -4 /1 x Hz mbar/torr 2 x -4 /1.5 x -4 Standard motor power kw/hp 18.5/25 Standard backing set speed m 3 h -1 /ft 3 min /1530 requirements Recommended oil Mobil SHC 629 Max oil capacity litre/us gal 8.3/2.18 (vertical gas flow config) Inlet/outlet connection class 150 ASME B16.5 Inlet/outlet cooling water Rp ½ ISO 7-1 (½ BSP) connection End cover purge gas inlet Rp ⅜ ISO 7-1 (⅜ BSP) Max cooling water supply pressure bar/psi 4/58 Max cooling water supply temp C/F 35/95 Cooling water flow rate lmin -1 /US gal min -1 15/3.96 Noise level 82 db(a) Weight (without motor) kg/lb 570/1257 Weight (with standard motor) kg/lb 670/1474 Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 171.

171 Service, Spares and Accessories HV Kit HV8000 VF motor mounting kit IEC HV8000 VF motor mounting kit NEMA HV8000 HF motor mounting kit IEC HV8000 HF motor mounting kit NEMA After cooler kit HV8000 Gear Box Oil Gear Box Oil 4 Ltr Mobil SHC 629 Spares HV8000 Set of O-Rings spare HV8000 mech seal kit spare HV8000 mech seal + sleeve kit spare HV8000 gear set spare HV8000 bearings kit spare HV8000 rotors kit spare HV8000 oil reservoir spare HV8000 sight glass spare A3102 A3106 A A A H A A A A A A A A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part Mechanical Boosters

172 HV30000/40000 MECHANICAL BOOSTER PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE HV30000/40000 is a high capacity mechanical booster used in the manufacture and assembly of large industrial vacuum systems. These pumps are backed by Edwards dry pumps or mechanical booster pumps. This range of high capacity booster pumps is designed to operate reliably for long periods with no need for maintenance. The HV pumps can be fitted with an inverter to allow them to be started at atmospheric pressure, at the same time as the dry pumps. Features and Benefits Water cooled oil boxes and after cooler. Vertical flow, direct drive. Control with inverter or interlock with a pressure switch input. Very reliable with little maintenance. Pump Range HV HV30000 HV40000 Applications Steel degassing. Metallurgy. Coating. Process engineering industries. Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 173.

173 Performance Curves HV30000/40000 Mechanical Booster Pump HV30000 HV40000 Displacement (supply) 50 Hz m 3 h -1 (17660 ft 3 min -1 ) 60 Hz m 3 h -1 (21200 ft 3 min -1 ) Displacement (supply) 50 Hz m 3 h -1 (19620 ft 3 min -1 ) 60 Hz m 3 h -1 (23540 ft 3 min -1 ) Ordering information Ordering information HV30000 Vertical Flow Vacuum Booster Pump On request HV40000 Vertical Flow Vacuum Booster Pump On request Dimensions HV30000/40000 dimensions Unit HV30000 HV30000 HV30000 HV30000 HV40000 HV40000 HV40000 HV40000 Motor size 200 l (30 kw) 250 m (55 kw) A (77.14) B (41.29) (77.14) (41.29) 324 td (40 hp) (77.14) (41.29) 365 td (75 hp) (77.14) (41.29) 200 l (30 kw) 250 m (55 kw) (82.65) (44.04) (82.65) (44.04) 324 td (40 hp) (82.65) (44.04) 365 td (75 hp) (82.65) (44.04) C (8.58) (9.72) (9.72) (9.72) (8.58) (9.72) (9.72) (9.72) D Shaft Ø E (0.78) (1.92) (1.92) (1.92) (0.78) (1.92) (1.92) (1.92) F (0.80) (0.84) (0.82) (0.57) (0.80) (0.84) (0.82) (0.57) 1 Motor face to back of coupler. 2 End of shaft to front of coupler Mechanical Boosters

174 Technical Data Units HV30000 HV40000 Displacement 50 Hz m 3 h -1 /ft 3 min / / Hz m 3 h -1 /ft 3 min / /23540 Maximum pressure differential 50 Hz mbar Hz mbar Recommended backing pumps IDX1300 and HV8000 IDX1300 and HV8000 Maximum motor power kw/hp 55/75 55/75 Ambient operating temperature C/ F -20 to 40/-4 to to 40/-4 to 140 Cooling water supply Maximum supply temperature C/ F 30/85 30/85 Maximum supply pressure bar/psi 5/73 5/73 Maximum operating humidity 90% RH 90% RH Weight( without motor) kg/lb 3017/ /7495 Shop online at shop.edwardsvacuum.com Contact our customer service team Mechanical Boosters 175.

175 Service, Spares and Accessories HV30000/40000 Accessories For HV30000/40000 accessories and spares please refer to the manual on our website Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part Mechanical Boosters

176 MEDIUM AND LARGE OIL SEALED PUMPS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE ES Rotary Vane Pumps 179 ES Pump and Booster Combinations 187 E2M40 and 80 Oil Sealed Rotary Vane Pumps 194 E2M175 and 275 Oil Sealed Rotary Vane Pumps 199 EM Pump and EH Booster Combinations 207 Stokes Microvac Series Oil Sealed Rotary Piston Pumps 208 Stokes Microvac ESI Series Oil Sealed Rotary Piston Pumps 214 MV Series Vertically Oriented Microvac Booster Combinations 220 MV Series Oil Sealed Piston Pumps and Mechanical Booster Combinations 221 Stokes 1700 Series Mechanical Booster Combinations 222 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 177.

177 Medium and Large Oil Sealed Pumps and Systems ES Single Stage Oil Sealed Rotary Vane Pumps E2M Two Stage Oil Sealed Rotary Vane Pumps Stokes Microvac Oil Sealed Rotary Piston Pumps Edwards believes in delivering results that bring value to our customers by using our breath of industry experience to identify and apply solutions to your problems. Using the most up-to-date and innovative modelling techniques, and selecting the right pumps from a wide range of dry and wet products, we can optimise the pumping configuration to provide a system design giving the maximum performance in the most reliable and cost effective way. Edwards is providing a wide range of wet pumps to suit the requirements of customers carefully looking to a good ratio between process results and investment cost. Product ranges The ES Single Stage Oil Sealed Rotary Vane Pump range provides a good ultimate vacuum performance in sizes from 65 to 630 m 3 h -1 ES represents a step ahead in single stage oil technology with class leading ultimate vacuum level and extended operating pressure range. The E2M Two Stage Oil Sealed Rotary Vane Pump is the tried and tested solution for applications when better ultimate vacuum down to -3 mbar is needed. Available in sizes from 40 to 275 m 3 h -1 features a robust design for reliable and stable high vacuum performance The Stokes Microvac Oil Sealed Rotary Piston Pump Range, available in sizes from 255 to 1240 m 3 h -1, features a rugged design for robust and reliable operation even in the harshest processes. With over 80 years of time tested proven performance Stokes Microvac low rotational speed and simple mechanism has demonstrated longest pump life cycle, high reliability and ease of rebuild. Medium and Large 178. Sealed Oil Pumps

178 ES ROTARY VANE PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE The Edwards ES range of pumps represents the advanced single stage oil sealed rotary vane pumps. The pump mechanism has been refined to produce a better quality of vacuum. It extends the pressure range over which the pump operates giving an unrivalled ultimate vacuum level. The vacuum performance is stable without the pressure fluctuations that are often seen in single stage pumps. Extended service intervals and easy in-house maintenance make the ES range a flexible vacuum solution for a wide range of industrial applications. The ES range of pumps is designed to be used in a wide range of industrial applications. They can be used individually or with mechanical booster pumps to increase both performance and ultimate vacuum. Features and Benefits Applications Enhanced performance class leading ultimate vacuum level and extended operating pressure range. Stability stable vacuum performance, with no pressure fluctuations. Convenience combined ISO/BSP connection, easily serviceable on site. Flexibility use individually or with mechanical booster pumps, for a wide range of applications. Simple and easy fully assembled package with EH boosters, suits a variety of performance requirement. Heat treatment. Drying. Coating. General industrial. Pump Range ES ES65 ES0 ES200 ES300 ES630 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 179.

179 Performance Curves ES65 Rotary Vane Pump ES65 ES65 Performance Curve Pumping speed 50 Hz 59 m 3 h cfm 60 Hz 70 m 3 h cfm Ultimate vacuum With gas ballast 1 mbar Without gas ballast 0.15 mbar (m 3 h -1 ) (Torr) ES Hz 60Hz Hz 60Hz (mbar) (ft 3 min -1 ) Ordering information (Pa) ES65 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 ES65 EU/US/CN V(50 Hz) & 230/460 V (60 Hz) IE3 Order no. A A Without gas ballast 2 With gas ballast ES0 Rotary Vane Pump ES0 ES0 Performance Curve Pumping speed 50 Hz 90 m 3 h cfm 60 Hz 5 m 3 h cfm Ultimate vacuum With gas ballast 2 mbar Without gas ballast 0.15 mbar (m 3 h -1 ) (Torr) ES Hz 60Hz Hz 60Hz (mbar) (ft 3 min -1 ) Ordering information (Pa) ES0 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 ES0 EU/US/CN V (50 Hz) & 230/460 V (60 Hz) IE3 Order no. A A Without gas ballast 2 With gas ballast Medium and Large 180. Sealed Oil Pumps

180 ES200 Performance Curve ES200 Rotary Vane Pump ES200 (m 3 h -1 ) (Torr) ES Hz 60Hz Hz 60Hz (mbar) (ft 3 min -1 ) (Pa) Pumping speed 50 Hz 190 m 3 h -1 Ordering information 112 cfm 60 Hz 225 m 3 h cfm Ultimate vacuum With gas ballast 1 mbar Without gas ballast 0.08 mbar 1 Without gas ballast 2 With gas ballast ES200 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 ES200 EU/US/CN V (50 Hz) & 230/460 V (60 Hz) IE3 Order no. A A ES300 Performance Curve ES300 Rotary Vane Pump ES300 (m 3 h -1 ) (Torr) ES Hz 60Hz 2. 50Hz 60Hz (mbar) (ft 3 min -1 ) (Pa) Pumping speed 50 Hz 275 m 3 h -1 Ordering information 162 cfm 60 Hz 320 m 3 h cfm Ultimate vacuum With gas ballast 2 mbar Without gas ballast 0.08 mbar 1 Without gas ballast 2 With gas ballast ES300 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 ES300 EU/US/CN V (50 Hz) & 230/460 V (60 Hz) IE3 Order no. A A ES630 Performance Curve ES630 Rotary Vane Pump ES630 (m 3 h -1 ) (Torr) ES Hz 60Hz Hz 60Hz (mbar) (ft 3 min -1 ) (Pa) Pumping speed 50 Hz 575 m 3 h -1 Ordering information 338 cfm 60 Hz 674 m 3 h cfm Ultimate vacuum With gas ballast 1 mbar Without gas ballast 0.1 mbar 1 Without gas ballast 2 With gas ballast ES630 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 ES630 EU/US/CN V(50 Hz) & 230/460 V (60 Hz) IE3 Order no. A A Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 181.

181 Dimensions ES65 dimensions ES0 dimensions ES200 dimensions mm (inches) ES (2236) ES (23.64) ES (28.11) A B C D E F G H I J K L M N O P 3.8 (0.15) 3.8 (0.15) 2.8 (0.11) 8.6 (0.34) 8.6 (0.34) 19 (0.75) (28.56) 8 (3188) 990 (39.01) 346 (13.62) 353 (13.89) 198 (7.8) 171 (6.73) 171 (6.73) 2 (8.27) 361 (14.21) 361 (14.21) 471 (17.87) 387 (15.24) 387 (15.24) 462 (18.19) 270 (.63) 275 (.83) 517 (20.35) 276 (.87) 277 (.9) 323 (1271) 340 (13.39) 340 (13.39) 373 (14.69) 224 (8.82) 226 (8.9) 176 (6.93) 1 (3.98) 1 (3.98) 118 (4.65) 68 (268) 68 (268) 373 (14.69) 270 (.63) 270 (.63) 490 (19.29) 237 (9.33) 237 (9.33) 3 (12.2) Medium and Large 182. Sealed Oil Pumps

182 ES300 dimensions ES630 dimensions mm (inches) ES (32.36) ES (48.58) A B C D E F G H I J K L M N O P 7.4 (0.29) 1149 (45.24) 19 (0.75) 9 (0.35) 13 (43.42) 8 (0.31) 198 (7.8) 1649 (64.92) 2 (8.27) 589 (23.19) 471 (18.54) 681 (26.81) 462 (18.19) 329 (1295) 517 (20.35) 432 (17.01) 323 (12.71) 507 (19.96) 373 (14.69) 377 (14.84) 222 (8.74) 145 (5.71) 118 (4.65) 225 (8.86) 375 (14.76) 334 (13.15) 492 (19.37) 512 (20.16) 356 (14.02) 524 (20.63) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 183.

183 Technical Data Units ES65 ES0 ES200 ES300 ES630 Maximum displacement 50 Hz m 3 h -1 /cfm 64/38 96/56 198/ / / Hz m 3 h -1 /cfm 77/45 115/68 240/ / /453 Pumping speed 50 Hz m 3 h -1 /cfm 59/35 90/53 190/ / / Hz m 3 h -1 /cfm 70/41 165/62 225/ / /397 Ultimate vacuum (total pressure) no gas ballast mbar/torr 0.15/ / /0.08 Ultimate vacuum (total pressure) mbar/torr 1/0.8 2/15 1/0.8 2/15 1/0.8 with gas ballast Inlet connection ISO40/1 BSP ISO63/2 BSP ISO0/3 BSP Outlet connection ISO40/11/2 BSP ISO40/2 BSP ISO0/3 BSP Max permitted outlet pressure bar gauge 0.5 Max water vapour pumping rate 50 Hz kgh -1 /lbh / / / / / Hz kgh -1 /lbh / / /6.7 3/ /17.8 Weight kg/lb 77/170 94/ / / /1138 Motor protection rating IP55 Motor power 50 Hz kw/hp 6/7.5 6/7.5 6/7.5 6/8.0 6/ Hz kw/hp 1.8/2.4 3/ / /.0 15/20.1 Noise level 50 Hz db(a) Hz db(a) Oil refill capacity litre Recommended oil Ultragrade 20 Medium and Large 184. Sealed Oil Pumps

184 Service, Spares and Accessories ES Spares The ES series of pumps is designed for simple and easy maintenance that can be conducted by anyone with mechanical equipment maintenance skills. With this product design the ES series has 2 standard available kits to support a self-service approach. The usual maintenance kits consist of the basic consumable items such as Oil, filters and ballast elements and these are recommended to be changed at approximately 3000 hour intervals. The preventative maintenance kits consist of the additional parts required to conduct a full specification service such as bearings, interior seals and rotary vane blades. Service Tools Seal assembly tool ES65/0 Mounting base for shaft seals ES65/0 Bearing removal tool ES 65/0 Mounting base for bearing removal ES65/0 D000 complete set of tools for preventive maintenance ES65/0 Seal 1st assembly tool ES200/300 Mounting base for shaft seal ES200/300 Rotor holding tool ES200/300 Seal 2nd assembly tool ES200/300 Seal 2nd assembly additional tool ES200/300 Complete set of tools for preventive maintenance ES200/300 Bearing removal tool ES630 Mounting base for bearing removal ES630 Mounting base for seal and bearing ES630 Shaft seal assembly tool ES630 Coupling assembly tool ES630 Bearing 1st assembly tool ES630 Complete set of tools for preventive maintenance ES630 Order no. A2220 A A A A A A A A A A A A A A A A A Service Spares Order no. Suction valve spring ES65/ES0 A Exhaust valve ES65/ES0 A Bowex coupling ring ES65/ES0 A2730 Exhaust valve ES200 A Suction valve spring ES200/ES300 A Suction valve spring ES630 A Exhaust valve ES300 A Exhaust valve ES630 A Additional exhaust valve ES630 A Bowex plastic ring ES630 A Bowex coupling ring ES200/ES300 A Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 185.

185 Maintenance Kits Minor service kit ES65/ES0 Minor service kit ES200 Minor service kit ES300 Minor service kit ES630 Major service kit ES65 Major service kit ES0 Major service kit ES200 Major service kit ES300 Major service kit ES630 Order no. A A A A A A A A A ES Accessories There are a range of accessories available for ES pumps. ES65/ES0 Oil level sensor ES65/ES0 Oil level & 120 o C sensor ES65/ES0 Oil level sensor & PT0 ES65/ES0 PT0 Temperature sensor ES200/ES300 Oil level sensor ES200/ES300 Oil level & 120 o C sensor ES200/ES300 Oil level sensor & PT0 ES200/ES300 PT0 Temperature sensor ES630 Oil level sensor ES630 Oil level & 120 o C sensor ES630 Oil level sensor & PT0 ES630 PT0 Temperature sensor ITO0 Inlet catchpot ITO300 Inlet catchpot ITO800 Inlet catchpot ITM0 Inlet dust filter ITM300 Inlet dust filter ITM800 Inlet dust filter Order no. A A A A A A A A A A A A A A A A A A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Medium and Large 186. Sealed Oil Pumps

186 ES PUMP AND BOOSTER COMBINATIONS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE Edwards is able to offer a range of ES rotary vane pumps and mechanical boosters, complete with combination kits to mount the mechanical booster. The fitting of a mechanical booster to an ES rotary vane pump significantly increases the pumping speed and vacuum performance of your system, as well as increasing the ultimate vacuum attainable by approximately one decade of pressure. Edwards applications specialists are able to assist in the selection of the combination most suited to your requirements. Individual data sheets are available on request for all combinations showing the pumping speed of each combination together with an installation drawing to assist in the design of your system. Features and Benefits The performance of ES pump is enhanced by the integration with our range of EH boosters to increase both performance and ultimate vacuum thus adaptable to a wide range of applications. The EH range of mechanical boosters ( m 3 h -1, cfm), with their unique hydrokinetic drive allowing continuous operation from atmosphere to ultimate vacuum, cuts pump down times by up to 50%. They are available as fully assembled systemised unit ready to use. Alternatively connection kits can be supplied separately as a kit. Applications Heat treatment. Drying. Coating. General industrial. Pump Range ES0/EH250 ES0/EH500 ES200/EH500 ES200/EH1200 ES300/EH500 ES300/EH1200 ES300/EH2600 ES300/EH4200 ES630/EH1200 ES630/EH2600 ES630/EH4200 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 187.

187 Performance Curves ES0 combination ES0 ES0 Performance Curve (without gas ballast) Pumping speed With gas ballast ES0/EH mbar ES0/EH mbar Without gas ballast ES0/EH mbar ES0/EH mbar (m 3 h -1 ) ES0 EH ES0 EH (Torr) (ft 3 min -1 ) (mbar) (Pa) Ordering information ES0 Performance Curve (with gas ballast) (Torr) Please see ordering matrix at the end of this section 1 50 Hz (m 3 h -1 ) ES0 EH ES0 EH (ft 3 min -1 ) 2 60 Hz (mbar) (Pa) ES200 Combination ES200 ES200 Performance Curve (without gas ballast) Pumping speed With gas ballast ES200/EH mbar ES200/EH mbar Without gas ballast ES200/EH mbar ES200/EH mbar (m 3 h -1 ) ES200 EH ES200 EH (Torr) (ft 3 min -1 ) (mbar) (Pa) Ordering information ES200 Performance Curve (withgas ballast) Please see ordering matrix at the end of this section 1 50 Hz 2 60 Hz (m 3 h -1 ) ES200 EH ES200 EH (Torr) (ft 3 min -1 ) (mbar) (Pa) Medium and Large 188. Sealed Oil Pumps

188 ES300 Combination ES300 Performance Curve (without gas ballast) ES300 (m 3 h -1 ) (Torr) 2354 ES300 EH ES300 EH ES300 EH ES300 EH (mbar) (Pa) (ft 3 min -1 ) Pumping speed With gas ballast ES300/EH mbar ES300/EH mbar ES300/EH mbar ES300/EH mbar Without gas ballast ES300/EH mbar ES300/EH mbar ES300/EH mbar ES300/EH mbar ES300 Performance Curve (with gas ballast) Ordering information (m 3 h -1 ) ES300 EH ES300 EH ES300 EH ES300 EH (Torr) (ft 3 min -1 ) Please see ordering matrix at the end of this section 1 50 Hz 2 60 Hz (mbar) (Pa) ES630 Combination ES630 Performance Curve (without gas ballast) ES630 (m 3 h -1 ) ES630 EH ES630 EH ES630 EH (Torr) (ft 3 min -1 ) Pumping speed With gas ballast ES630/EH mbar ES630/EH mbar ES630/EH mbar Without gas ballast (mbar) ES630/EH1200 ES630/EH2600 ES630/EH mbar mbar mbar (Pa) ES630 Performance Curve (with gas ballast) Ordering information (m 3 h -1 ) ES630 EH ES630 EH ES630 EH (Torr) (ft 3 min -1 ) Please see ordering matrix at the end of this section 1 50 Hz 2 60 Hz (mbar) (Pa) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 189.

189 Technical Data Pump Type Without gas ballast With gas ballast ES0/EH mbar 0.07 mbar ES0/EH mbar 0.07 mbar ES200/EH mbar 0.04 mbar ES200/EH mbar 0.04 mbar ES300/EH mbar 0.06 mbar ES300/EH mbar 0.06 mbar ES300/EH mbar 0.06 mbar ES300/EH mbar 0.06 mbar ES630/EH mbar 0.04 mbar ES630/EH mbar 0.04 mbar ES630/EH mbar 0.04 mbar A-weighted sound pressure level* ES0/EH db(a) ES0/EH db(a) ES200/EH db(a) ES200/EH db(a) ES300/EH db(a) ES300/EH db(a) ES300/EH db(a) ES300/EH db(a) ES630/EH db(a) ES630/EH db(a) ES630/EH db(a) *Noise level with 50 Hz supply at ultimate pressure, running at 60 Hz or at a higher inlet pressure will increase noise level Ordering information ES Pump 1 ES0 2 ES200 3 ES300 4 ES630 EH Booster 1 EH250 2 EH500 3 EH EH EH4200 Combination Kit 1 ES0/EH250 2 ES0/EH500 3 ES200/EH500 or ES300/EH500 4 ES200/EH1200 or ES300/EH ES300/EH2600 or ES300/EH ES630/EH ES630/EH2600 or ES630/EH4200 ET - - Pump Accessories 0 None 1 PT0 Temperature Sensor 2 Oil Level Sensor 3 Oil Level Sensor o C 4 Oil Level Sensor + PT0 Booster Oil Level Monitor 0 None 1 OLM500 oil level Monitor Electrical Supply 1 EU_400v, 50Hz 2 USA_230/460v, 60 Hz 3 Asia_200/380v, 50 Hz 4 Asia_200/380v, 60 Hz Booster Inlet Seal with Mesh Screen 0 None 1 ISO63 2 ISO0 3 ISO160 Medium and Large 190. Sealed Oil Pumps

190 EM Oil Sealed Rotary Vane Pumps Edwards rugged two stage mechanical oil sealed pumps are available in sizes from m 3 h -1 / ft 3 min -1 They feature: Advanced oil lubrication circuit High reliability Accessories to match your application needs Application and Accessory Information EM Rotary Pumps The use of Edwards rotary pumps with our comprehensive range of accessories will result in enhanced performance and reliability. The information below will help you to select the correct accessories for your application. However, we recommend that you treat this as a guide only, because the final selection of components can be influenced by the operation of your vacuum system and the process by-products. If in doubt, please contact Edwards or your local supplier for further advice from an Edwards application specialist. When you select accessories for your system, the major aim is to prolong the life and the safe operation of the pumps and to ensure that the system continues to perform at its ultimate specification. To do this, you need to ensure that the system is able to accommodate the process media and any process by-products, including vapours, liquids or particulates, which may damage the pumps. At the same time, you should ensure that any materials discharged from the system to atmosphere are not harmful to the environment and to people nearby. Broad Application Coverage Industrial Industrial EM primary pumps are annotated with the suffix IND. EM primary pumps are safe to handle non-flammable gases and vapours within the normal operating parameters of the pump. Flammable gases and vapours may also be pumped, provided they are outside the flammable range, please consult Edwards for advice. PFPE EM primary pumps may be supplied for use with PFPE oil. This enables them to be used in harsh corrosive processes, or where the presence of Oxygen will result in rapid degradation of hydrocarbon oils. Fomblin must be purchased separately for PFPE prepared pumps. ATEX EM primary pumps (hydrocarbon oil only) may be supplied with ATEX classification either as part of a pump system or stand-alone. Please consult Edwards. ATEX compliance is typically specified for use in Europe, but may also be required in other areas. ATEX compliant EM primary pumps are suitable for operation in ATEX systems rated as follows: Pump classification Internal classification External classification E2M40 & E2M80 II 3 Gc IIB T4 II 2 G IIB T4 E2M175 & E2M275 II 3 Gc IIB T3 II 2 G IIB T160 Where the following classification: Symbol Meaning Specifies that an ATEX-compliant EM pump can be used in a potentially explosive atmosphere II Equipment Group II = non-mining equipment 3 (Int) 2 (Ext) G Equipment Category 3 (or 2) G = Gas c Constructional safety IIB Gas group suitable to pump gases in gas group IIB Where no gas group is mentioned, there are no limitations T4 T160 T3 Temperature Class Gas auto-ignition temperature greater than: T4 =135 C, T160 = 160 C, T3 = 200 C Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 191.

191 A four-pole, three-phase ATEX approved flameproof motor provides direct drive through an ATEX certified flexible coupling to the E2M40, E2M80, E2M175 and E2M275 pumps. A cooling fan is attached to the drive coupling on the E2M40 and E2M80 pumps. The E2M175 and E2M275 pumps are water-cooled. Lubrication is provided by a sliding vane oil pump, which delivers pressurised oil to the vacuum pumping mechanism. Pumps are supplied with sealed gas ballast. Plugs have been fitted to prevent flammable atmospheres accidentally entering the pump. If the gas ballast facility is required, an N 2 purge must be used, or clean air supplied from a safe area. For much of the operating cycle the pump operates at pressures significantly below 0.8 bar (116 psi) absolute. However, the final stage of the pump will exhaust to atmosphere and there is a startup and shutdown period where the whole pump is briefly operating at atmospheric pressure. A surface temperature thermal snap switch is fitted to the body of the E2M175 and E2M275 rotary pumps. This must be connected to an intrinsically safe circuit suitable for the hazardous zone in which it may be located; otherwise it must be located in a safe area. If the pump temperature should rise due to a fault condition, the snap switch activates and the pump will shut-off. Trapping Particulates In any application, first ensure that particulates in the process stream are trapped before they get into the pump: use the ITM or ITF inlet filters which are suitable for use with oil-sealed and dry pumps. However, in processes which generate or contain large amounts of particulates, some will enter the pump: use our EOF, an external oil filter, to remove particulates from the pump oil during operation. ITF inlet dust filters If the mechanical pump is a backing pump for a diffusion pump, the diffusion pump will trap particulates during normal operation, but the diffusion pump will not trap dust during the roughing stage of the process cycle. We recommend you fit an ITF filter to the mechanical pump inlet (that is, in the foreline): this filter has a replaceable element. Note that the impedance of a clean filter will cause the pumping speed to decrease by about % at 1 mbar and 20% at -2 mbar. The ITF filter is more that 96% efficient, when tested in accordance with BS2831 ITM High Capacity Inlet Dust Filters use an ITM filter for applications where there is a high load of dust and particulates. Fit the ITM directly to the inlet of a rotary or mechanical booster pump. This filter has a stainless steel mesh element that can be washed and reused. It is ideal for use when backing diffusion pumps or for wet processes where a paper filter may become blocked quickly. The ITM filter has high conductance and is therefore ideal for applications which require fast pump down times. The ITM filter has an efficiency of 90%, when tested in accordance with BS3831 EOF External Oil Filters Use the EOFs with the EM oil-sealed rotary pumps to remove particulates trapped in the pump oil. The EOFA and EOFM filters use the internal pressurized oil system of the pump to continually filter a proportion of the pump oil. These filters are only suitable for hydrocarbon oil. The EOFM filter removes particulates down to 0.5 microns, and the EOFA filter both removes particulates and includes an active element to remove acidic and other aggressive contaminants from the oil. Pumping Vapours The use of gas ballast significantly improves vapour handling capability of oil sealed rotary pumps. We offer a number of accessories to improve the utility of gas ballast. EBV Gas Ballast Control Valve Fit EBV gas ballast control valve to allow remote or automated control of gas ballast. TCV Temperature Control Valve The vapour pumping performance of the larger oil sealed pumps can be enhanced by fitting a TCV. Use the TCV both to warm-up the pump faster (which reduces the amount of condensation in the pump) and to reduce water usage and cost. ITC Inlet Chemical Traps Fit an ITC trap to the inlet of the pump to protect against the aggressive process vapours that may corrode the pump or degrade the oil. Medium and Large 192. Sealed Oil Pumps

192 Trapping Liquids The use of gas ballast allows an oil sealed pump to process significant quantities of vapour. However, oil sealed pumps cannot pump liquid streams and it is important both to remove liquids before they reach the pump inlet and to prevent condensed liquids from flowing back into the pump outlet. The following accessories may be suitable for your application: ITO Inlet Trap The ITO inlet trap is ideal for processes where there is a risk of liquids in the process entering the pump inlet. Fit the ITO trap to the pump inlet or elsewhere in the foreline. CP Catchpot Process vapours passing through the pump may condense after the pump outlet, in the exhaust line. Fit a CP catchpot to the pump outlet to trap the condensates and prevent them flowing back into the pump. Exhaust Management You should aim to minimise the impact of gases and vapours which exhaust from the pump outlet. Edwards offers a range of exhaust management systems for the most exacting applications. However, for most straightforward applications of oil sealed rotary pumps, we recommend that you fit an oil mist filter to the pump outlet to remove oil mist vapour. A mist filter is not required if you vent the exhaust gases remotely or pass them through exhaust scrubbing equipment. MF Oil Mist Filters The MF filters remove oil mist (vapour) from the process gases exhausted from the outlet of an oil sealed pump. The filters remove both odour and oil vapour and so prevent it from reaching the atmosphere and the workplace. Back Migration When operated at ultimate pressure for extended periods of time, any oil sealed pump allows oil vapour to back migrate into the process chamber. The backmigration of oil vapour could contaminate your process or your vacuum system. ITC Inlet Chemical Trap Fit an ITC inlet chemical trap (filled with an alumina charge) to the pump inlet to trap oil vapour and to prevent back migration. Applications Refrigeration dehydration Brake line evacuation TV aluminisers Vacuum metallurgy Fluorescent light tube pumping Thin film coating IT hard disc coating Vacuum distillation Cryogenic vessel evacuation Transformer and cable drying Pharmaceutical freeze drying Space simulation Crystal growing Automotive Chemical processing Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 193.

193 E2M40 AND 80 OIL SEALED ROTARY VANE PUMPS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE Edwards E2M series two stage oil sealed rotary vane vacuum pumps are renowned for their high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handle water vapour. These direct drive rotary vane pumps are inherently compact and vibration free, and with their finger-proof fan and coupling housings they offer excellent operator protection. A comprehensive range of accessories is available to allow use on a wide variety of vacuum applications. Features and Benefits Reliability Reliable and stable process effective lubrication even under high gas loads. Robust No contamination of process oil and air suck back protection. Performance Long and trouble free life industrial roller bearings on drive shaft. Reassurance Peace of mind tried, tested and industry standard for years. Reliable and stable high vacuum performance. Applications Vacuum metallurgy processes. Thin film coating technologies. Pharmaceutical freeze drying. Refrigeration and air conditioning system evacuation, drying, and backfilling. Pump Range E2M40 E2M40 E2M40FX E2M40T4 E2M80 E2M80 E2M80FX E2M80T4 E2M175 E2M175 E2M175FX E2M175T3 E2M275 E2M275 E2M275FX E2M275T3 Medium and Large 194. Sealed Oil Pumps

194 Performance Curves E2M40 Oil Sealed Rotary Pump E2M40 E2M40 Performance Curve Displacement 2 50 Hz 42.5 m 3 hr/25 ft 3 min Hz 50.5 m 3 h -1 /29.7 ft 3 min -1 1 Speed (Pneurop) 50 Hz 37 m 3 h -1 /21.8 ft 3 min -1 (m 3 h -1 ) 1 60 Hz 44 m 3 h -1 /25.9 ft 3 min Hz 1 2 (mbar) Ordering information (Pa) Order no. E2M40 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M40 HC IE3 EU/US 50/60HZ V 50HZ, 230 / 460V 60HZ A A Without gas ballast 2 With gas ballast E2M40 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ A E2M40 FX IE3 EU/US 50/60HZ V 50HZ, 230 / 460V 60HZ E2M40 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ A A (ft 3 min -1 ) 1 1 E2M40 AZ IE3 EU/US 50/60HZ V 50HZ, 230 / 460V 60HZ A Hz 1 2 (Torr) Each EM pump is supplied Ultragrade 70 oil. For PFPE prepared FX pumps Fomblin to be ordered separately. 1 Without gas ballast 2 With gas ballast Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 195.

195 E2M80 Performance Curve (m 3 h -1 ) Hz (mbar) E2M80 Oil Sealed Rotary Pump E2M80 Displacement 50 Hz 80 m 3 h -1 /47.1 ft 3 min Hz 96 m 3 h -1 /56.5 ft 3 min -1 Speed (Pneurop) 50 Hz 74 m 3 h -1 /43.6 ft 3 min Hz 90 m 3 h -1 /53 ft 3 min (Pa) Ordering information Order no. 1 Without gas ballast 2 With gas ballast E2M80 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M80 HC IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ A A E2M80 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ A (ft 3 min -1 ) 1 1 E2M80 FX IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ E2M80 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ A A Hz (Torr) E2M80 AZ IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ A Without gas ballast 2 With gas ballast Each EM pump is supplied Ultragrade 70 oil. For PFPE prepared FX pumps Fomblin to be ordered separately. Medium and Large 196. Sealed Oil Pumps

196 Technical Data Units E2M40 E2M80 Displacement 50 Hz m 3 h -1 /ft 3 min /25 80/ Hz m 3 h -1 /ft 3 min / /56.5 Speed (Pneurop) 50 Hz m 3 h -1 /ft 3 min -1 37/218 74/ Hz m 3 h -1 /ft 3 min -1 44/ /53 Number of stages 2 Ultimate vacuum (total pressure) without gas ballast mbar/torr 1 x -3 /7.7 x -4 with gas ballast mbar/torr 7 x -3 /5.4 x -3 Ultimate with Fomblin without gas ballast mbar 1 x -2 Inlet connection ISO40 Outlet connection 25 mm flange suitable for NW25 Max outlet pressure 0.5 bar gauge Max inlet pressure for water vapour mbar/torr 7/5.3 5/3.8 Max water vapour pumping rate kg h -1/ lb h / /0.7 Weight kg/lb 75/165 2/224 Motor protection rating IP55 Motor power 50 Hz kw/hp 11/15 22/3 60 Hz kw/hp 15/2 3/4 Standard oil capacity maximum litre minimum litre 22 4 PFPE oil capacity maximum litre 4.0 minimum litre 22 Recommended oil Ultragrade 70 Noise level db(a) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 197.

197 Dimensions E2M40 dimensions E2M80 dimensions Service and Spares Maintenance Kits E2M40 Clean and overhaul kit Blade Kit Major service kit Interior assembly Order no. A A A A E2M80 Interior assembly Clean and overhaul kit Blade kit Major service kit All models Fine oil-filter Common seals kit A A A A A A Medium and Large 198. Sealed Oil Pumps

198 E2M175 AND 275 OIL SEALED ROTARY VANE PUMPS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE Edwards E2M175/275 series two stage oil sealed rotary vane vacuum pumps are renowned for their high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handle water vapour. These direct drive rotary vane pumps are inherently compact and vibration free, and with their finger-proof fan and coupling housings they offer excellent operator protection. This pump is suitable for most duties and is safe to handle non-flammable gases and vapours within the normal operating parameters of the pump. Features and Benefits Reliability Reliable and stable process effective lubrication even under high gas loads. Robus No contamination of process oil and air suck-back protection. Performance Long and trouble free life industrial roller bearings on drive shaft. Reassurance Peace of mind tried, tested and industry standard for years. Reliable and stable high vacuum performance. Applications Vacuum metallurgy processes. Thin film coating technologies. Pharmaceutical freeze drying. Refrigeration and air conditioning system evacuation, drying, and backfilling. Pump Range E2M175 E2M175 E2M175FX E2M175T3 E2M275 E2M275 E2M275FX E2M275T3 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 199.

199 Performance Curves E2M175 Oil Sealed Rotary Pump E2M175 E2M175 Performance Curve Displacement 50 Hz 178 m 3 h -1 /5 ft 3 min Hz 214 m 3 h -1 /126 ft 3 min -1 Speed (Pneurop) 50 Hz 160 m 3 h -1 /94 ft 3 min -1 Ordering information 60 Hz 196 m 3 h -1 /115 ft 3 min -1 E2M175 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M175 HC IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ E2M175 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M175 FX IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ E2M175 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M175 AZ IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ Order no. A A A A A A Each EM pump is supplied Ultragrade 70 oil. For PFPE prepared FX pumps Fomblin to be ordered separately. 1 Without gas ballast 2 With gas ballast E2M275 Oil Sealed Rotary Pump E2M275 E2M275 Performance Curve Displacement 50 Hz 292 m 3 h -1 /172 ft 3 min Hz 350 m 3 h -1 /206 ft 3 min -1 Speed (Pneurop) 50 Hz 255 m 3 h -1 /150 ft 3 min Hz 306 m 3 h -1 /180 ft 3 min -1 Ordering information E2M275 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M275 HC IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ E2M275 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M275 FX IE3 EU/US5 0/60HZ V 50HZ, 230/460V 60HZ E2M275 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V 60HZ E2M275 AZ IE3 EU/US 50/60HZ V 50HZ, 230/460V 60HZ Order no. A A A A A A Each EM pump is supplied Ultragrade 70 oil. For PFPE prepared FX pumps Fomblin to be ordered separately. 1 Without gas ballast 2 With gas ballast Medium and Large 200. Sealed Oil Pumps

200 Technical Data Units E2M175 E2M275 Displacement 50 Hz m 3 h -1 /ft 3 min /5 292/ Hz m 3 h -1 /ft 3 min / /206 Speed (Pneurop) 50 Hz m 3 h -1 /ft 3 min /94 255/ Hz m 3 h -1 /ft 3 min / /180 Number of stages 2 Ultimate vacuum (total pressure) with gas ballast mbar/torr 1 x -3 /7.7 x -4 without gas ballast mbar/torr 7 x -3 /5.4 x x -3 /3.8 x -3 Ultimate with Fomblin without gas ballast mbar 1 x -2 - Inlet connection ISO63 blank flange with seal Outlet connection ISO40 flange centre tapped Max outlet pressure 0.5 bar gauge Max inlet pressure for water vapour mbar/torr 20/15 12/9 Max water vapour pumping rate kg h -1/ lb h /0.7 23/5.1 Weight kg/lb 204/ /488 Motor protection rating IP44 Motor power 50 Hz kw/hp 5.5/ / 60 Hz kw/hp 6.5/ /11 Standard oil capacity maximum litre/qt 25/26 28/29.5 minimum litre/qt 16/17 19/20 PFPE oil capacity maximum litre/qt 18/19 - minimum litre/qt 6.5/6.9 TBA Recommended oil Ultragrade 70 Noise level db(a) 75 Water cooling requirement lmin Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 201.

201 Dimensions E2M175/275 dimensions 226 B C D E A F A B C D E F E2M (1142) 11 (39.80) 55 (217) 329 (1295) 196 (7.72) 237 (9.33) E2M (1142) 1152 (45.35) 55 (217) 425 (16.73) 294 (1158) 333 (13.11) Service and Spares Maintenance Kits E2M175 Maintenance kit Seals kit Complete interior assembly E2M275 Maintenance kit Seals kit Complete interior assembly Order no. A A A A A A Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Medium and Large 202. Sealed Oil Pumps

202 Large Pump Accessories MF Outlet Mist Filters The MF0 and MF300 mist filters are suitable for pumps from E2M40 to E2M275. They are very efficient at 99.85% DOP test (pre-wetted filter; 99.5% with dry element). The oil level sight-glass provides easy monitoring of mist filter status. The MF0AE is a version of the MF0, designed for use with corrosive gases and vapours and for greater security when processing toxic substances. It is very efficient at 99.1% DOP test (pre-wetted; 98.4% with dry element). This version is leak tested to 1-4 mbar l s -1 / 3.8 x -3 Torr. The filter element, sight-glasses and seals are resistant to chemical attack. The MF0AE is fitted with an acrylic sight-glass (for use with fluorinated processes); a glass sight-glass is also supplied with the filter (for use with chlorinated processes). A version of the EMF clean application oil return kit is available for all the MF filters, except the MF0AE. Ordering Information Order no. Model MF0 mist filter (12 kg/26.5 lb)* A Model MF0AE mist filter (12 kg/26.5 lb)* A Model MF300 mist filter (28 kg/62 lb) A *Supplied with two NW25 C clamps, NW25 elbow, two NW25 centring-ring and O-rings, bolts, washers, mounting brackets and studs. 2 Supplied with two ISO40 C clamps, ISO40 elbow, two 40 mm Co-Seals, bolts, washers, mounting brackets and studs. CP Outlet Catchpots In some industrial applications it is desirable for pumps to be provided with piped exhaust arrangements to carry gases and vapours to the outside of the building. There is always a risk that some vapour carried out with the effluent gas will cool and condense as it travels up the exhaust line and the liquid produced will drain back into the pump causing serious contamination. For this reason, it is good practice to use a catchpot between the pump outlet and the exhaust line to prevent this from happening. These catchpots are designed for fitting directly to the pump outlet, or can be remotely mounted if required. A high level sight glass is provided to indicate the need for draining the catchpot when the nominal capacity is reached. A drain plug is also provided. Note: When an oil mist filter is used, a separate catchpot is generally unnecessary. Ordering Information Model CP0 outlet catchpot, 6.5 litre/6.2 qt capacity (12.0 kg/26.5 lb)* Model CP300 outlet catchpot, 23.0 litre/22 qt capacity (28.0 kg/62 lb) Order no. A A *Supplied with two NW25 C clamps, NW25 elbow, two NW25 centringrings and O-rings, bolts, washers, mounting bracket and studs. Supplied with two ISO40 C clamps, ISO40 elbow, two 40 mm O-rings and centringrings, bolts, washers, mounting brackets and studs. Accessories Clean application oil return kit (E2M40 to E2M80) Clean application oil return kit (E2M175 to E2M275) Order no. A A Spares MF0 MF0AE MF300 Order no. A A A Spares kits MF0, MF0AE MF300 MF0AE sight-glass kit A A A Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 203.

203 External Oil Filters: EOF0A/300A (Chemical) and EOF0M/300M (Dust) These filters are operated by the internal pressurized oil system of the pump, which by-passes a proportion of the oil through the filter. The filters are easy to install just connect the flexible hoses supplied to the oil outlet and return connectors on the pump. The oil capacities are approximately 6 litres / 5.7 qt (EOF0) and 15 litres / 14.3 qt (EOF300). The EOF0A and EOF300A chemical filters have a renewable highcapacity, activated earth element. The filters purify the oil by removing acidic and other aggressive contaminants. These filters are intended for use with hydrocarbon oils, and they will greatly increase the interval between oil changes. The EOF0M and EOF300M dust filters have pleated paper elements which trap small dust particles (down to 0.5 micron diameter). Use these filters for applications which produce large quantities of abrasive dust (for example, vacuum furnaces). Ordering Information Product Description External oil filter, without connection kit EOF0A EOF0M External oil filter, with E2M175 and 275 connection kit EOF300A EOF300M Connection kit for E2M40 and 80 EOF0A and M EOF300A and M Product Description Activated earth element EOF0A EOF300A Dust filter element EOF0M EOF300M Order no. A A A A A A Order no. A A A A Vibration Isolators You may need to fit vibration isolators to your pump if you mount it into a frame or system, if the mounting points are not level or if you need to minimise the transmission of vibration and noise in your application. You must fit flexible bellows or other flexible pipes to the pump inlet and outlet. Ordering Information Pump Approximate Reduction in Height with Pump Fitted (mm) Weight Set of Four Order No E2M kg/1.3 lb A E2M kg/1.3 lb A E2M kg/2 lb A E2M kg/2 lb A Details of vibration isolators for use with rotary/mechanical booster pump combinations are available on request. OLM0 Oil Level Monitor Fit the OLM0 in place of the oil sight glass on the E2M 40 and 80 pumps. The OLM0 continues to allow visual inspection of the oil level and condition, while also providing a switched output for remote indication. Technical data: 24 V a.c. or d.c., maximum current 0.5 A, switching power W (12 VA). Ordering Information OLM0 oil level monitor EBV Gas Ballast Control Valves Order no. A Fit the EBV300D for E2M40, 80, 175 and 275) to allow remote operation of the pump s gas ballast control. For example, the EBV can be configured to switch off the gas ballast when the pump is switched off, to provide suckback protection. The EBV can also be configured to prevent the 175 and 275 from running backwards when the gas ballast valve is open and the pumps are stopped under vacuum. Ordering Information EBV300D (1.0 kg) V s.ph 50/60 Hz Order no. A Medium and Large 204. Sealed Oil Pumps

204 TCV300 Temperature Control Valve Use the TCV300 with the E2M175 and 275 pumps. The valve facilitates rapid pump warm-up and higher operation temperatures. This improves the pump s vapour pumping performance. The TCV300 also reduces the use of cooling water and reduces operation costs. Ordering Information TCV300 (1.2 kg/2.6 lb) ITF Inlet Dust Filters Order no. A The ITF inlet dust filters prevent the entry of dust particles into the pump. The impedance of a clean filter reduces the pumping speed of a 20 m 3 h -1 / 12 ft 3 min -1 pump by about 20% at 1 mbar / 0.75 Torr and 25% at mbar / 7.5 Torr. Depending on your application, you can normally clean the filter element with a vacuum cleaner or a clean air blast, and then re-use the element. The benefits of the ITF filters include: Thick aluminium casting, to withstand abrasion. Tangential entry port, to promote centrifugal separation of dust particles. Filter efficiency better than 96% (tested to BS2831, dust number 2). Ordering Information ITM High Capacity Inlet Dust Filters The ITM deep, stainless steel mesh elements are ideal for applications where fast pump-down times are required and which produce high levels of dust and grit (which would normally clog the ITF filters very quickly). You can wet the stainless steel mesh element with oil to improve dust adhesion. You can wash the mesh elements and re-use them indefinitely. The benefits of the ITM filters include: Thick aluminium casting, to withstand abrasion. Tangential entry port, to promote centrifugal separation of dust particles. Filter efficiency better than 90% (tested to BS2831, dust number 2). Glass cover, to allow a visual check of the filter element. Ordering Information ITM0 high capacity dust filter (7.2 kg/16 lb)* ITM300 high capacity dust filter (8.7 kg/19 lb) ITM800 inlet dust filter (20.2 kg/44 lb)** ITM3000 inlet dust filter ITM5000 inlet dust filter *Supplied with bolts, washers, 40 mm O-ring and centring-ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with 0 mm Co-Seal, bolts and washers Supplied with 160 mm Co-Seal, bolts and washers Order no. A A A A A ITF0 inlet dust filter (7.0 kg/15 lb)* ITF300 inlet dust filter (8.3 kg/18 lb) ITF800 inlet dust filter (20.2 kg/44 lb) ** ITF3000 inlet dust filter *Supplied with bolts, washers, 40 mm O-ring and centring-ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with 0 mm Co-Seal, bolts and washers Supplied with 160 mm Co-Seal, bolts and washers Order no. A A A A Spares ITM0 filter element ITM300 filter element ITM800 filter element ITM3000 filter element (2 required) Order no. A A A A Spares ITF0 element and gasket kit ITF300 element and gasket kit ITF800 element and gasket kit ITF3000 element (2 required) Order no. A A A A Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 205.

205 ITO Inlet Catchpots These catchpots minimise the entry of condensable vapours into the pump. Benefits of the catchpots include: Capture condensable vapours. Helps prevent froth or spray from the process from carrying over to the pump. Corrosion-resistant body. Visual indication of trapped liquid level. Hand-tightened drain plug, for easy drainage. Ordering Information ITO0 inlet catchpot, 5.47 litres/5.2 qt capacity (6.8 kg, 15 lb)* ITO300 inlet catchpot, 7.87 litres/7.5 qt capacity (8.0 kg/18 lb) IT0800 inlet catchpot, 9.5 litres/ qt capacity (19.5 kg/43 lb) ** *Supplied with bolts, washers, 40 mm O-ring and centring-ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with 0 mm Co-Seal, bolts and washers Order no. A A A ITC Inlet Chemical Traps The ITC series of chemical traps provides the following benefits: Protection against various aggressive vapours, which may attack the pump or pump oil. Prevent high molecular weight vapours (such as might arise in a resin treatment plant), from reaching the pump. These vapours could cause lacquering or clogging. The standard sorbent (activated charcoal), has relatively high trapping properties (absorbs around 25% of its own weight), even when large amounts of water vapour are being pumped. When filled with activated alumina on two-stage pumps, backstreaming of pump oil can be controlled. Ordering Information ITC0 inlet chemical trap* Charcoal charge 0.75 kg/1.7 lb, weight 16.5 kg/ 1.7 lb ITC300 inlet chemical trap Charcoal charge 1.1 kg/2.4 lb, weight 9 kg/20 lb ITC800 inlet chemical trap** Charcoal charge 3.3 kg/2.4 lb, weight 21 kg/20 lb * Supplied with bolts, washers, 40 mm O-ring and centring-ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with 0 mm Co-Seal, bolts and washers Order no. A A A Spares Order no. 0.5 kg/1.1 lb activated charcoal H kg/6.6 lb activated charcoal H kg/1 lb activated alumina H kg/0.5 lb activated alumina H Medium and Large 206. Sealed Oil Pumps

206 EM PUMP AND EH BOOSTER COMBINATIONS R D 0 Rotary Pump (Includes pump, frame and coupling components) 2 E2M40 - with Ultragrade Oil 5 E2M80 - with Ultragrade Oil 8 E2M175 - with Ultragrade Oil B E2M275 - with Ultragrade Oil D E2M40FX - PFPE prepared no oil E E2M80FX - PFPE prepared no oil F E2M175FX - PFPE prepared no oil Voltage 1 EU_400v, 50Hz 2 USA_460v, 60 Hz 3 Japan/Korea_200/380v, 60Hz 4 Japan/China_200/380v, 50Hz 5 USA_230v, 60 Hz Booster Pump (Includes booster and coupling components) 1 EH250 - with Ultragrade Oil 3 EH500 - with Ultragrade Oil 5 EH with Ultragrade Oil 7 EH with Ultragrade Oil B EH250FX - PFPE prepared no oil C EH500FX - PFPE prepared no oil D EH1200FX - PFPE prepared no oil E EH2600FX - PFPE prepared no oil Mist Filter 0 No Mist Filtr 1 MF0 2 MF0AE 3 MF300 4 MF0 with clean Oil Return Kit 5 MF0AE with clean Oil Return Kit 6 MF300 with clean Oil Return Kit Oil Level Monitor 0 No oil level monitor 1 Oil level monitor rotary pump only 2 Oil level monitor booster pump only 3 Oil level monitors both pumps On-line Starter 0 No on-line starter 1 Starter Box E2M40 / E2M80 2 Starter Box E2M175 / E2M275 Oil Filtration (Includes connection kit) 0 No oil filtration 1 EOF0A 2 EOF0M 3 EOF300A 4 EOF300M Note: Please copy the link: and order your pump and booster combination. In North America, frame-mounted systems are also available. Please contact Edwards for further details. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 207.

207 STOKES MICROVAC SERIES OIL SEALED ROTARY PISTON PUMPS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE The Stokes Microvac rotary piston pump has set the standard for performance, efficiency, reliability and repairability in the industry for over 80 years. The Stokes Microvac J series rotary piston pump has been improved, upgraded, and fine-tuned to deliver even better dependability and productivity combined with minimal maintenance and process downtime. The integral oil distribution system eliminates external piping and delivers leak-free operation in a stylised design. A stiffer motor mounting platform cuts flexibility to minimise motor belt wear. A stylised oil reservoir cover and side cover O rings improve sealing to eliminate oil leakage. An integral gas ballast valve built into the side cover allows quick adaptation to automatic gas ballast. A wide range of versatile accessories are available along with the ability to integrate with a range of mechanical boosters making the Stokes Microvac easily adaptable to suit your application and pumping requirements. Features and Benefits Reliable Over 80 years of time tested proven performance with experienced service and technical support. Dependability low rotational speed enables longest pump life cycle. Robust Easy on-site maintenance robust simple mechanism for high reliability and ease of rebuild. Flexible Configured for you choice of pumping combinations available with a variety of boosters. Reassurance Up to date technology continued investment in design and technology improvements. No unplanned downtime worry free pumping backed by full warranty and after sales support. Application Automotive. General applications. Metallurgy. Vacuum coating. Vacuum melting. Chemical processing. Heat treatment. Leak detection. PET processing. Pharmaceuticals. Transformer drying and cable fluid conditioning. Pump Range Stokes microvac 212J 412J 612J Medium and Large 208. Sealed Oil Pumps

208 Performance Curves Stokes Microvac Model 212J 212J 212J Performance Curve Pumping speed m 3 h -1 (138 ft 3 min -1 ) Displacement (swept volume) 255 m 3 h -1 (ft 3 min -1 ) (m 3 h -1 ) (150 ft 3 min -1 ) J Ordering information (Torr) Order no. 212J 230/460 V, 3Ø, 60 Hz (230/460 V coil) Without gas ballast Explosion Proof 460V Class 1 Div 1 Group C&D 460v Coil With gas ballast 575v 60 Hz 575v Coil /460v 60 Hz 1v Coil v 60 Hz 380v Coil J 230/460 V 3 PH 60 Hz (230/460 V coil) with water miser J 400 V, 3-ph, 50 Hz, IEC motor, 380 V coil (CE compliant) J 400 V, 3-ph, 50 Hz, IEC motor, 415 V coil (CE compliant) J 400 V, 3-ph, 50 Hz, IEC motor, 380 V coil with water miser (CE compliant) J 400 V, 3-ph, 50 Hz, IEC motor 415 V coil with water miser (CE compliant) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 209.

209 Stokes Microvac Model 412J 412J 412J Performance Curve Pumping speed m 3 h (260 ft 3 min -1 ) Displacement (swept volume) (ft 3 min -1 ) (m 3 h -1 ) 5 m 3 h (300 ft 3 min -1 ) J 85 Ordering information (Torr) Order no. 412J 230/460 V, 3Ø, 60 Hz (230/460 V coil) /460V 60Hz 15 hp 230/460v coil Explosion Proof 460V Class 1 Div 1 Group C&D 460v Coil 575v 60 Hz 575v Coil /460v 60 Hz 1v Coil v 60 Hz 380v Coil J 230/460 V 3 PH 60 Hz (230/460 V coil) with water miser 212J 230/460 V 3 PH 60 Hz (230/460 V coil) with water J 400 V, 3-ph, 50 Hz, IEC motor 380 V coil (CE compliant) 412J 400 V, 3-ph, 50 Hz, IEC motor 415 V coil (CE compliant) 412J 400 V, 3-ph, 50 Hz, IEC motor, 380 V Coil with water miser (CE compliant) 412J 400 V, 3-ph, 50 Hz, IEC motor 415 V coil with water miser (CE compliant) 1 Without gas ballast 2 With gas ballast 612J Performance Curve Stokes Microvac Model 612J 612J (ft 3 min -1 ) (m 3 h -1 ) Pumping speed 884 m 3 h -1 (520 ft 3 min -1 ) Displacement (swept volume) m 3 h J 170 (600 ft 3 min -1 ) (Torr) Ordering information 1 Without gas ballast Order no. 612J 230/460 V, 3-ph, 60 Hz (230/460 V coil) With gas ballast Medium and Large 2. Sealed Oil Pumps

210 Dimensions Stokes 212J dimensions P L R B N A K S M D G C J F H I E T U V W Y Z A B C D E F G H I J K L M N P R S T U V W Y Z Stokes 412J dimensions K M N A P L B C Z R S H D G J I F E T U V Y A B C D E F G H I J K L M N P R S T U V Y Z Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 211.

211 Stokes 412ESI dimensions Stokes 612J dimensions H D A E F G C B J K L A B C D E F G H J K L Medium and Large 212. Sealed Oil Pumps

212 Technical Data Pumping speed Units 212J 412J/ESI 612J Displacement (swept volume) m 3 h -1 /ft 3 min /150 5/300 20/600 m 3 h -1 /ft 3 min / / /520 Ultimate vacuum (total pressure) without gas ballast mbar/torr < 3.3 x -2/ < 25 x -2 with gas ballast mbar/torr < 26 x -2/ < 2 x -2 < 26 x -1 /< 2 x -1 Motor size (TEFC) 50 Hz kw IEC (CE variant) (x2) 60 Hz hp TEFC 7.5 /15 (x2) Motor speed rpm 1800 Inlet connection inch ASA/ANSI flange Exhaust connection 2 inch ASA/ANSI flange or 2 inch NPT 3 inch ASA/ANSI flange or 3 inch NPT 2 x 3 inch ASA/ANSI flange or 3 inch NPT Water inlet/outlet connection inch NPT ½ ½ 2 x ½ Recommended cooling flow lmin -1 /galmin /15 7.6/15 7.6/15 85 C/30 F Water vapour pumping rate kg h -1 /11 lb h / /46 Oil capacity litre/gal 15/4 46/12 92/24 Recommended oil V lube F V lube F V lube F Noise db(a) < 77 < 83 < 85 Weight kg/lbs 431/ / /3800 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 213.

213 STOKES MICROVAC ESI SERIES OIL SEALED ROTARY PISTON PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE The Stokes Microvac ESI series (Extended Service Interval) sets the standard for reduced maintenance and extended service intervals in arduous applications. The ESI series incorporates all the time proven design features of the Stokes Microvac 412J while integrating key accessories and features for improved performance in the most demanding applications. The ESI series can be retrofitted with any Microvac and or mechanical booster combination to suit your special application and pumping requirements. Features and Benefits Time Proven Stokes Microvac Robust Design Extended Periods of User Intervention Suited for Metal Meting and Casting, Heat Treatment, Brazing, Sintering or any corrosive or particulate generating applications On board ( Integral) Positive Feed Large capacity Oil Filter (Single or Dual Canister. Particulate and Acid Neutralization Elements) Filter Pressure Gauge for Filter Change Notification Internal By-pass enables Filter change out while operational Filter Visual Oil flow Indication 15 hp High Efficiency Motor 4 Point Motor Platform for Consistent Belt Tension Integral Oil Piping Ease of Clean Oil and No Leakage Application Automotive. General applications. Metallurgy. Vacuum coating. Vacuum melting. Chemical processing. Heat treatment. Leak detection. PET processing. Pharmaceuticals. Transformer drying and cable fluid conditioning. Pump Range 412ESI Medium and Large 214. Sealed Oil Pumps

214 Stokes Microvac Model 412ESI 412ESI 412ESI Performance Curve Pumping speed m 3 h (260 ft 3 min -1 ) Displacement (swept volume) 5 m 3 h -1 (300 ft 3 min -1 ) (ft 3 min -1 ) ESI (m 3 h -1 ) Ordering information (Torr) Order no. 412ESI 230/460 V, 3Ø, 60 Hz (230/460 V coil) NRY4Q Without gas ballast 2 With gas ballast Refer to pages 212 and 213 for technical dimension drawings and technical data. For regional variants/voltages of the Stokes Microvac 412ESI contact your local Edwards representative. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 215.

215 Accessories Water Miser Features and Benefits Saves cooling water, improves efficiency. Remote bulb temperature sensor in oil reservoir of vacuum pump. Throttles valve on cooling water to control oil temperature. Fits most water cooled vacuum pumps. Ordering Information Product Description For pump Order no. Water miser 149H-612J Gas Ballast Silencer Features & benefits. Cuts noise level. Simple thread-in unit reduces noise level. Filters gas ballast intake air. Ordering Information Product Description For pump Order no. 151 Series gas ballast silencer/filter # required 1 146H, 148H, H/S 1 212J or 4 412J/612J Min-Max Cooler The Edwards Model mini-max compact cooler provides closed circuit cooling specially designed for mobile pumping systems. It includes pump, radiator, fan, motor (115/60/1), on-off switch, connection kit for the microvac pumps, and has a cooling capacity of BTU/hr. The mini-max cooler is ideal when cooling water is not convenient or clean enough to ensure peak performance. Technical Data For use with Model 149, 212 & 412 Rotary Piston Pumps Motor ¼ hp (pump and fan) Motor voltage 115 V, 1-ph, 60 Hz 230 V, 1-ph, 60 Hz Cooling capacity BTU/hour Hose length 5 feet Reservoir tank capacity 3 gallons Overall dimensions Weight 12 ¼ W x 23 ¼ l X 13 ¼ H 50 lbs Ordering Information Product Description Order no. Minimax cooling system Includes: pump, radiator, fan, motors, on-off switch, piping, wiring and hoses. Oil Mist Separators The 291 series oil mist separators are high performance air/oil coalescing separators that will virtually eliminate all liquids and solids from a gas stream. These units produce exhaust liquid levels as low as 0.05 PPMW and solids removal in excess of 99.79% efficiency for particulate as small as 0.3 micron. Features & benefits. Clean pump exhaust, saves oil. Two-stage design removes ail smog and traps particles as small as 0.3 microns. Standard and heavy models available. Heavy Duty Oil Mist Filter Heavy-duty oil mist separators are designed to handle the most severe oil exhaust situations from rotary oil sealed mechanical pumps. For true measure of efficiency, it is important to go beyond the weight to consider the actual number of particles collected. The heavy-duty oil mist separators efficiency by weight approaches 0% and total particle collection 97.8%. Edwards guarantees to collect and remove the stated percentage of particles by size, not by weight alone. The HD mist separator will effectively prevent fume emissions unlike existing separators that do not remove the sub micron particles. Ordering Information Product Description For pump CFM Replacement elements Oil mist separators with fibreglass element Order no S 146H S 148H S 149H S 212H J 212J only J S 412H, 612H ⅜ J 412J only J MB 612 MB Oil mist separator with polypropylene element SO 146H SO 148H SO 149H SO 212H SO 412H, 612H SO 612MB Heavy duty oil mist separators HD 212H and smaller HD 412H HD 612H HD Combinations HD Combinations Medium and Large 216. Sealed Oil Pumps

216 Oil Reservoir Heater Edwards model 212 and 412 oil reservoir heaters are recommended for pre-heating oil in the reservoir prior to pump start up at temperatures below 55 F. Below 1 Torr., it will help maintain the oil at a temperature high enough to prevent condensation of water vapour in the oil when running with full gas ballast. The 212 and 412 oil reservoir heaters consist of an immersion heater to be inserted into the oil reservoir and an over-temperature switch with sensing bulb to control power to the heater. The heater arrangement can be factory or field installed. Ordering Information Product Description For Pump Order no. Oil reservoir heater 600 W 120 V Vacuum Break Solenoid Features & Benefits 2-way 240 V ⅜ inch FNPT 2-way 1 V ⅜ inch FNPT Ordering Information Product Description For Pump Order no. Vacuum break solenoid All 240 V All 1 V Gask-O-Seal Features & Benefits For tight joint seals Combination anodised aluminium retainer with Buna-N seals Range to microns Ordering Information Product Description Order no. Gask-O-Seal, Pipe size (inch) Flex Hose The model 820 high vacuum hose from Edwards is an all-plastic hose with aluminium flanges tough enough for easy handling streamline use. This rugged, reliable hose is suitable for use in a temperature range of -50 F to 150 F, tested to -2 Torr absolute pressure Ordering Information Product Description For Pump Order no. Series 820 high vacuum hose Size 2" x 20' long " x 20' long " x 20' long Flex Connectors Model 315 flexible connectors feature rugged type 321 stainless steel bellows to sharply ease potential alignment and thermal expansion problems, while significantly reducing vibration transmissions from other equipment. They are designed to provide years of troublefree service. Features & benefits. Free-formed bellows minimise stress concentration. Solve alignment problems. Convoluted bellows of AISI 321 stainless steel. ASA standard carbon steel flanges. Sizes from 15 inch to 24 inch. Ordering Information Product Description Order no. Type Standard: Flexible connector, vacuum service, convoluted, stainless steel bellows, carbon steel pipe flange, 150# ASA both ends 63 micro finish, Mass spec tested. Pipe size (inch) 1-1/ Type CE: Flexible connector, vacuum service, convoluted, stainless steel bellows, carbon steel weld band one end to fit over ASA pipe for lap weld, carbon steel pipe flange, 150# ASA one end 63 micro finish, Mass spec tested. Pipe size (inch) 1-1/ Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 217.

217 Type PP: Flexible connector, vacuum service, convoluted, stainless steel bellows, carbon steel pipe ends both ends for butt welding, Mass spec tested. Pipe size (inch) 1-1/ Type EE: Flexible connector, vacuum service, convoluted, stainless steel bellows, carbon steel weld band both ends to fit over ASA pipe for lap weld, Mass spec tested. Pipe size (inch) Type CP: Flexible connector, vacuum service, convoluted, stainless steel bellows, carbon steel pipe end one end for butt welding, carbon steel pipe flange, 150# ASA one end 63 micro finish, Mass spec tested. Pipe size (inch) High Volume Inlet Filters Features & Benefits Traps particulates ahead of pump Recommended ahead of all vacuum pumps Provide protection to pump internals Extends the change interval up to times Variety of filter elements available 146H pump has a 2 inch flange A has a 1 inch flange A (2 inch flange) can be used as an option 1754 and 1755 have 8 inch flange. Customer must supply an adaptor to mate with inch flange on filter Polyester replacement element max temp 200 F, Glastex replacement element 450 F 1700 Series requires 2 replacement elements Ordering Information Product For Pump CFM Order no. Description Intake Pipeline Filters A* 146H A 148H A 149H A 212J A 412J A 612J, 912J A 1721, 1722, A 1739, 1733, Spares Order no. Replacement Glastex Elements A* A A A A A A ** A ** Replacement Polyester Elements A* A A A A A A ** A ** * 146H Pump has a 2 Flange, Filter A has a 1 Flange. Use Filter 333-0A w/2 Flange as an Option and 1755 have 8 Flange. Customer must supply an adapter to mate w/ Flange on Filter. Replacement Element is Polyester w/maximum Temp of 200 F, Glastex has a Maximum Temp. of 450 F. ** Two Elements Are Required. Small Volume Inlet Filter Features & Benefits For small volumes and fast pump down cycles Effective protection from harmful solid particles of 0.01 inch or larger Less expensive than conventional filters Ordering Information Product Description Flange Size For Pump Replacement Elements Order no. Small Volume Inlet Filters J J J - 912J Medium and Large 218. Sealed Oil Pumps

218 Oil Purifiers Oil purifiers continuously supply clean oil to the vacuum pump to assure peak uptime while prolonging the life of both the oil and the pump. Oil purifiers from Edwards are designed for use with rotary oil sealed pumps used in dirty applications or for corrosive and hazardous gases. These oil purifiers are commonly used in heat creating, annealing, sintering, brazing, nitriding, and metal melting. The Edwards models are available to handle hydrocarbon and inert oils for rotary oil sealed pumps up to 750 ft 3 min -1 and can filter out solids to 3 microns. Features & Benefits Keep pump fluids cleaner Self-contained and portable Suitable for mechanical vacuum pumps up to 730 ft 3 min -1 Models available for hydrocarbon and inert oils Ordering Information Product Description For Pump GPM Elements Order no. Required Vacuum Pump Oil Purifiers (115 V, 1-ph, 60 Hz) 146, 148, CE (230 V, 1-ph, 50 Hz) 146, 148, CE (200/400 V, 3-ph, 50 Hz) 146, 148, (115 V, 1-ph, 60 Hz) 212, CE (200/400 V, 3-ph, 50 Hz) 212, (115v 1 ph. 60 Hz) All Special service (all pumps) (115 V,1-ph, 60 Hz)* 146, 148, (115 V, 1-ph, 60 Hz) (115 V, 1-ph, 60 Hz) Spares Order no. Standard 339 Filter Fullers Earth microns Standard 339 Filter Pleated Paper 3 microns Standard 339 Filter Activated Alumna Special Service 339 Pleated Paper 3 microns Special Service 339 Activated Alumna Note: the 215 is the only one that is dual canister all the above are single canister * Single element canister Double element canister Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 219.

219 MV SERIES VERTICALLY ORIENTED MICROVAC BOOSTER COMBINATIONS Edwards multi-stage pumping systems, backed by over a century of in-depth applications knowledge and technical experience. These compact, efficient pumping systems feature a Stokes Microvac pump and rugged, proven Stokes 6" Series boosters or the Edwards EH series with patented hydrokinetic drive. The MV Series Mechanical Booster Pump Packages comprises of either the Stokes 212J or 412J rotary piston pump. Each can be directly coupled with a range of mechanical booster pumps. The range includes Edwards EH series offering the patented Hydrokinetic Drive or the full range of Stokes 6" series. All are vertical gas flow orientation for a compact space saving design. The MV Series offers a broad selection of configurations which enables the flexibility to mix and match the complete range of Stokes Microvac accessories along with various electrical control options. This enables the user to customise the pumping package to meet their application requirements. Medium and Large 220. Sealed Oil Pumps

220 MV Series Oil Sealed Piston Pumps and Mechanical Booster Combinations M Y CE Marking Motor Control Module 0 No CE mark required 1 CE marked system Microvac Pump 1 212J No CE Marked System 2 212J CE Marked System 3 412J No CE Marked System 4 412J CE Marked System 5 212J with base No CE Marked System 6 212J with base CE Marked System 7 412J with base No CE Marked System 8 412J with base CE Marked System Booster 0 No Booster 1 EH250 2 EH500 3 EH EH EH EH250 with 3" ASA inlet (for EH250) 7 EH500 with 4" ASA inlet (for EH500) 8 EH1200 with 6" ASA inlet 9 EH2600 with 8" ASA inlet A 607 low speed low power B 607 low speed high power B 607 low speed high power C 615 low speed D 615 high speed E 61B low speed F 61B high speed G 622 high speed H 607 high speed (EU and Asia) Oil Mist Filter 0 No mist filter 1 MF J 2 MF J 0 No Motor Control / No Pressure Switch 1 Motor starter control box pedestal mount without pressure 2 Motor starter control box wall mount without pressure 3 Motor starter control box pedestal mount with pressure 4 Pressure switch only 5 Motor starter control box wall mount with pressure Coil Voltage 1 Coil Voltage 24 V AC 50 Hz 2 Coil Voltage 24 V AC 60 Hz 3 Coil Voltage 120 V 60 Hz / 1 V 50 Hz 4 Coil Voltage 240 V 60 Hz / 220 V 50 Hz 5 Coil Voltage 380 V 50 Hz (CE) 6 Coil Voltage 415 V 50 Hz (CE) 7 Coil Voltage 480 V 60 Hz / 440 V 50 Hz 8 Coil Voltage 380 V 60 Hz Motor Voltage 1 230V 3-ph 60 Hz 2 460V 3-ph 60 Hz (for Non CE marked systems) 3 400V 3-ph 50 Hz (only for CE Marked systems) 4 220V 3-ph 50 Hz (for Non CE marked systems) 5 380V 3-ph 50 Hz (for Non CE marked systems) 6 440V 3-ph 50 Hz (for Non CE marked systems) 7 380V 3-ph 60 Hz (for Non CE marked systems) 8 200V 3-ph 60Hz (for Non CE marked systems) 9 200V 3-ph 50Hz (for Non CE marked systems) Gas Ballast Silencer & Vacuum Break 0 No Gas ballast, No Silencer 1 Gas Ballast Silencer (212J / 412J) 2 Auto gas ballast 24 V AC 60 Hz 3 Auto gas ballast 24 V DC DIN 4 Auto gas ballast 120 V 60 Hz / 1 V 50 Hz 0 No cooling options 1 Water miser (TCV) 2 Min max cooler 115 V 1-ph 60 Hz 3 Min max cooler 230 V 1-ph 60 Hz 0 No oil purifier 1 OP V 1-ph 60 Hz 2 OP CE 230 V 1-ph 50 Hz 3 OP CE 200/400 V 3-ph 50 Hz 4 OP V 1-ph 60 Hz Note* Above booster combinations are direct mount vertical flow. Note** Oil mist filters and min max coolers will ship separately unless ordered with base frame. Note*** Oxygen service pumps are available, please contact your local Edwards representative to discuss your requirements. Note**** Not applicable in CE versions. For other possible combinations, please contact your local Edwards representative to discuss your requirements. Note: please click on the link: to order your pump & booster combination or a system. Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 221.

221 STOKES 1700 SERIES MECHANICAL BOOSTER COMBINATIONS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE Whether you need to increase the capacity of your existing system or achieve peak performance for a new installation; Edwards makes taking advantage of the latest technology easy. These field-proven pumping systems are the workhorse of countless industrial and large chamber applications. Each Stokes1700 series mechanical booster pump combination includes a Stokes Microvac backing pump and a belt driven, horizontal flow, high vacuum Stokes 6 series mechanical booster pump. In harsh applications where chemical or particulate contamination is present, process isolation boosters are available as an option. Controls for Stokes 1700 series mechanical booster pump combination include a pressure switch, motor starters, overloads, remote booster selection switch and lights for pump running and fault indication. Features and Benefits Reliable Over 80 years of time tested proven performance with experienced service and technical support. Robust Easy on-site maintenance robust simple mechanism for high reliability and ease of rebuild Highly reliable ability to handle harsh processes. Flexible Configured for you choice of pumping combinations available with a variety of 6 boosters and rotational speed Optimise the configuration for your process. Reassurance Up to date technology continued investment in design and technology improvements. Applications Vacuum Heat Treatment Vacuum Melting Metallurgical Transformer Drying Vacuum Coating General Industrial Applications Leak Detection Pump Range Stokes S S HC HC 1738BP 1738HCBP HC 1739BP 1739HCBP HC Medium and Large 222. Sealed Oil Pumps

222 Performance Curves 1721 & 1721S 1721 & 1721S 1721 Performance Curve Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 255 m 3 h -1 (150 ft 3 min -1 ) (ft 3 min -1 ) (m 3 h -1 ) 15 Torr (Torr) Ordering information 1721S Performance Curve Order no /460V, 3-ph, 60 Hz (230/460 V coil) S 230/460V, 3-ph, 60 Hz (230/460 V coil) (ft 3 min -1 ) (m 3 h -1 ) (Torr) Torr 1722 & 1722S 1722 & 1722S 1722 Performance Curve Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement (ft 3 min -1 ) (m 3 h -1 ) 25 Torr Ordering information 1722S Performance Curve Order no /460V, 3-ph, 60 Hz (230/460 V coil) S 230/460V, 3-ph, 60 Hz (230/460 V coil) (ft 3 min -1 ) (m 3 h -1 ) 5 m 3 h -1 (300 ft 3 min -1 ) (Torr) (Torr) 15 Torr Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 223.

223 1738 & Performance Curve 1738 & 1739 (ft 3 min -1 ) Torr (Torr) (m 3 h -1 ) Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 5 m 3 h -1 (300 ft 3 min -1 ) 1739 Performance Curve Ordering information (ft 3 min -1 ) (m 3 h -1 ) Order no /460 V, 3-ph, 60 Hz (230/460 V coil) /460 V, 3-ph, 60 Hz (230/460 V coil) Torr (Torr) 1738 HC Performance Curve 1738 HC & 1739 HC 1738 HC & 1739 HC Booster Displacement m 3 h -1 (ft 3 min -1 ) 25 Torr (m 3 h -1 ) (Torr) ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 20 m 3 h -1 (600 ft 3 min -1 ) 1739 HC Performance Curve Ordering information (ft 3 min -1 ) (m 3 h -1 ) 1738HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) 1739HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) Order no C C Torr (Torr) Medium and Large 224. Sealed Oil Pumps

224 Performance Curves 1738 BP & 1739 BP 1738 BP & 1739 BP 1738 BP Performance Curve Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 5 m 3 h -1 (300 ft 3 min -1 ) (ft 3 min -1 ) (m 3 h -1 ) (Torr) Ordering information 1739 BP Performance Curve 1738BP 230/460V, 3-ph, 60 Hz (230/460 V coil) 1739BP 230/460V, 3Ø, 60 Hz with 230/460V Coil Order no B B (ft 3 min -1 ) (m 3 h -1 ) (Torr) 1738 HCBP & 1739 HCBP 1738 HCBP & 1739 HCBP 1738 HCBP Performance Curve Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 20 m 3 h -1 (600 ft 3 min -1 ) (ft 3 min -1 ) (m 3 h -1 ) (Torr) Ordering information 1739 HCBP Performance Curve 1738HCBP 230/460V, 3-ph, 60 Hz (230/460 V coil) Order no C-38B 1739HCBP 230/460V, 3-ph, 60 Hz (230/460 V coil) C-39B (ft 3 min -1 ) (m 3 h -1 ) (Torr) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 225.

225 1733 Performance Curve 1733 & & 1754 (ft 3 min -1 ) 1754 Performance Curve 5 Torr (m 3 h -1 ) (Torr) Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 5 m 3 h -1 (300 ft 3 min -1 ) Ordering information (ft 3 min -1 ) (m 3 h -1 ) Order no /460 V, 3-ph, 60 Hz (230/460 V coil) S /460 V, 3-ph, 60 Hz (230/460 V coil) Torr (Torr) 1733 HC Performance Curve 1733 HC & 1754 HC 1733 HC & 1754 HC (ft 3 min -1 ) Torr (m 3 h -1 ) (Torr) Booster Displacement m 3 h -1 ( ft 3 min -1 ) Booster Speed rpm Pump Displacement 20 m 3 h -1 (600 ft 3 min -1 ) 1754 HC Performance Curve Ordering information (ft 3 min -1 ) (m 3 h -1 ) Order no. 1733HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) S HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) Torr (Torr) Medium and Large 226. Sealed Oil Pumps

226 Dimensions 1721/1721S dimensions 452 (17.81) 919 (36.18) 821 (32.31) 13 (0.5) 35 (40.75) 1286 (50.62) 921 (36.25) 14 (55.5) 216 (8.5) Ø51 (2) 99 (43.25) 1353 (53.25) 127 (5) 762 (30) 1722/1722S/1738/1739 dimensions 924 (36.37) 19 (40.12) 2 (8.25) 575 (22.62) 60 (41.75) 13 (0.5) 1413 (55.62) 35 (40.75) 879 (34.62) 1416 (55.75) 216 (8.5) Ø51 (2) 99 (43.25) 127 (5) 762 (30) 1353 (53.25) 1738HC/1739HC dimensions 1800 (70.87) 16 (40) 216 (8.50) ~ 391 (15.37) 1778 (70) 391 (15.37) 889 (35) 35 (40.75) 1413 (55.62) 16 (0.63) 76 (3) 6 (24) 762 (30) 29 (1.13) 438 (17.25) 495 (19.50) 45 (1.77) 469 (18.45) 2 (4) 559 (22) 762 (30) 1738BP/1739BP dimensions 924 (36.37) 19 (40.12) 575 (22.62) 209 (8.25) 60 (41.75) 13 (0.50) 1499 (59) 35 (40.75) 879 (34.62) 1416 (55.75) 216 (8.50) 127 (5) Ø51 (2) 99 (43.25) 1353 (53.25) 762 (30) Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 227.

227 1738HCBP/1739HCBP dimensions 1800 (70.87) 16 (40) 216 (8.50) 1778 (70) 889 (35) 60 (41.75) 35 (40.75) 1499 (59) 76 (3) 600 (23.62) 749 (29.50) 432 (17) 349 (13.75) 489 (19.25) 29 (1.12) 98 (3.87) 549 (21.62) 505 (19.87) 749 (29.50) 1754/1733 dimensions 1111 (43.75) 565 (22.25) 83 (40.87) 1695 (66.75) 343 (13.5) 124 (4.87) 1445 (56.87) Ø51 (2) 460 (18.12) 737 (29) 737 (29) 89 (3.5) 1651 (65) 20 (0.75) 953 (37.5) 67 (42) 991 (39) 1754HC/1733HC dimensions 889 (35) 1778 (70) 1473 (58) 67 (42) 1111 (43.75) 1899 (74.75) 2134 (84) 187 (7.37) 457 (18) 76 (3) 600 (23.62) (29.50) (12.50) 800 (31.50) 486 (19.12) 899 (35.37) 1778 (70) Medium and Large 228. Sealed Oil Pumps

228 Technical Data Units S S Booster displacement m 3 h -1 /ft 3 min -1 22/ / / /1600 Booster speed rpm Booster orientation Horizontal Pump displacement m 3 h -1 /ft 3 min /150 5/300 Pressure switch required Yes Yes Yes Yes Normal cut-in pressure mbar/torr 20/ 13/ 33/25 20/15 Continuous operation pressure limit mbar/torr 4/3 26/2 20/15.7/8 Booster drive kw/hp 5.6/ / 5.6/ / Pump drive (TEFC) kw/hp 5.6/ / / 7.5/ Inlet connections 8 inch ASA/ANSI flange Discharge connections 2 inch ASA/ANSI flange, 2 inch NPT 3 inch ASA/ANSI flange, 3 inch NPT Water inlet/outlet connection ½ inch NPT Recommended cooling 30 C/85 F lmin -1 /galmin /15 7.6/2 Booster oil capacity (V lube H) litre/us gal 19/0.51 Microvac oil capacity (V lube F) litre/us gal 15/4 46/12 Inlet height mm/inch 35/40.75 Footprint (L x W x H) mm 1419 x 919 x x 48 x 1438 inch x x x 4126 x Weight kg/lbs 1225/ / / /3600 Units HC 1739HC Booster displacement m 3 h -1 /ft 3 min / / / /2600 Booster speed rpm Booster orientation Horizontal Pump displacement m 3 h -1 /ft 3 min -1 5/300 20/600 Pressure switch required Normal cut-in pressure mbar/torr 13/ 13/15 33/25 33/20 Continuous operation pressure limit mbar/torr 4/3 27/2 6.7/5 3.4/25 Booster drive kw/hp 7.5/ 224/30 7.5/ 18.6/25 Pump drive (TEFC) kw/hp 7.5/ 7.5/ 7.5 (x2)/ (x2) 7.5 (x2)/ (x2) Inlet connections Yes 8 inch ASA/ANSI flange Discharge connections 3 inch ASA/ANSI flange, 3 inch NPT 3 inch ASA/ANSI flange, 3 inch NPT (x2) Water inlet/outlet connection ½ inch NPT ½ inch NPT (x2) Recommended cooling 30 C/85 F lmin -1 /galmin /2 7.6 (x2)/2 (x2) Booster oil capacity (V lube H) litre/us gal 19/0.51 Microvac oil capacity (V lube F) litre/us gal 46/12 92/24 Inlet height mm/inch 35/ /42 Footprint (L x W x H) mm 1407 x 48 x 1438 inch x 4126 x x 1270 x x 50 x 5189 Weight kg/lbs 1633/ / / /6025 Shop online at shop.edwardsvacuum.com Contact our customer service team Medium and Large Sealed Oil Pumps 229.

229 Units 1738 BP 1739 BP 1738 HCBP 1739 HCBP Booster displacement m 3 h -1/ ft 3 min / / / /2600 Booster speed rpm Booster orientation Horizontal Pump displacement m 3 h -1/ ft 3 min -1 5/300 20/600 Pressure switch required No No No No Continuous operation pressure limit mbar/torr 4/3 27/2 6.7/5 4/3 Booster drive kw/hp 11/15 22/30 112/ /25 Pump drive (TEFC) kw/hp 7.5/ 7.5 (x2)/ (x2) Inlet connections 8 inch ASA/ANSI flange Discharge connections 3 inch ASA/ANSI flange, 3 inch NPT 3 inch ASA/ANSI flange, 3 inch NPT (x2) Water inlet/outlet connection ½ inch NPT ½ inch NPT (x2) Recommended cooling 30 o C/85 o F lmin -1 /galmin /2 7.6 (x2)/2 (x2) Booster oil capacity (V lube H) litre/us gal 19/0.51 Microvac oil capacity (V lube F) litre/us gal 46/12 92/24 Weight kg/lbs 1690/ / / /60 Units HC 1754 HC Booster displacement m 3 h -1/ ft 3 min / / / /3000 Booster speed rpm Booster orientation Horizontal Pump displacement m 3 h -1/ ft 3 min -1 5/300 20/600 Pressure switch required Yes Yes Yes Yes Normal cut-in pressure mbar/torr 6.7/5 20/ / 40/30 Continuous operation pressure limit kw/hp 0.8/0.6 13/1 13/1 4/3 Booster drive kw/hp 18.5/25 15/20 225/ /25 Pump drive 7.5/ 7.5 (x2)/ (x2) Inlet connections 8 inch ASA/ANSI flange Discharge connections 3 inch ASA/ANSI flange, 3 inch NPT 3 inch ASA/ANSI flange, 3 inch NPT (x2) Water inlet connection ½ inch NPT (2) ½ inch NPT (x2) Water outlet connection ½ inch NPT Recommended cooling 30 o C/85 o F lmin -1 /galmin / (x2)/2 (x2) Booster oil capacity (V lube H) litre/us gal 19/ /0.51 Microvac oil capacity (V lube F) litre/us gal 46/12 92/24 Weight kg/lbs 17/ / / /6000 Medium and Large 230. Sealed Oil Pumps

230 DRY PUMPS AND SYSTEMS FOR HAZARDOUS APPLICATIONS MORE THAN PUMPS, COMPLETE VACUUM SOLUTIONS CXS Chemical Dry Pumps 233 CDX Dry Vacuum Pumps 239 EDP Chemical Dry Pumps 244 Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 231.

231 Product ranges EDP Chemical Dry Pumps and Systems CXS Chemical Dry Pumps and Systems CDX00 Dry Vacuum Pumps Edwards is a market leader in dry pump technology and pioneer of dry vacuum for the chemical process, pharmaceutical and fine chemical industries. Why Dry? Dry running pumps have no oil, steam or water in the process volume. This eliminates, at source, the pollution traditionally associated with wet sealed vacuum systems and provides cost and materials handling benefits as the sealing medium does not have to be replenished: No contamination of the process stream No polluted effluent No messy oil drums Improved processing with reduced down time Lower utility and consumable costs The proven and rugged non contacting designs, both screw and reverse claw mechanisms, include the ability to control pump body and internal gas temperatures allowing a comprehensive range of solvents, flammables and corrosives to be pumped. Systemised variants address the EU s explosive atmospheres (ATEX) directive for Category (Zone 0) T4 operation. The mechanisms are both highly tolerant to liquids and particles in the gas stream and are suitable for many applications including: Distillation Drying Evaporation and crystallisation Filter/dryers Solvent recovery Reactor service House/Central vacuum Applications Engineering is a core competence and Edwards are able to offer a comprehensive solutions package that includes: Process design Equipment specification and selection Safety and operating procedures Vacuum system and control integration Commissioning advice EDP Chemical Dry Pumps and Systems In the early 1980 s, the EDP range pioneered the use of environmentally friendly dry vacuum pumps in the Chemical Process Industries. Based on the award-winning reverse claw mechanism this pump range has been designed and tested with reliability and safety in mind. With a large global installed base, the EDP model has been tried and tested over many years on its long life and easy maintenance and on its ability to pump flammable gases safely, to pump corrosive gases without corroding and to handle liquid or particulate carry over. We offer a range of four pumps with m 3 h -1 capacity and ultimate vacuums of below 1 mbar. CXS Chemical Dry Pumps and Systems CXS is Edwards most advanced chemical dry pump incorporating our many years of experience while adding more features and benefits designed to address the increased requirements coming from the CPI market. The patented screw technology delivers excellent liquid and solids handling and pumps corrosive vapours without deterioration. CXS features an integral hazardous area controller which allows for start-up and shut down procedures, pressure control, solvent flushing and multiple communications options. The integral PID pressure control with inverter delivers flexible process control and communications options for full monitoring of process parameters. The CXS lowers cost of ownership with low use of power and other utilities and stand by operation between processes. The CXS lowers maintenance bills with up to 5 years between services. The CXS lowers noise level< 64dB(A) for quieter operation. CXS is available now in two models 160 and 250 m 3 h -1, with -3 mbar ultimate. CDX Dry Vacuum Pumps CDX00 is the pump optimised for processes requiring large pumping speeds, delivering a 900 m 3 h -1 pumping speed and an ultimate vacuum of mbar. Installed mainly in continuous, large, high throughput environments, this pump has been designed to withstand process malfunctions and to minimise down time from line maintenance to overhaul. Edwards have a full range of dry pumps with a set of characteristics suited to most applications Dry Pumps & Systems for Hazardous Applications

232 CXS CHEMICAL DRY PUMP SIMPLY RELIABLE Edwards is synonymous with vacuum. Having over 90 years experience and over 150,000 dry pumps installed worldwide, our high quality products and application know-how are renowned in the world of vacuum technology. CXS is Edwards most advanced chemical dry pump featuring tapered-screw technology for exceptional energy efficiency and performance. It offers high reliability and effluent-free pumping even in the most difficult of harsh chemical and pharmaceutical processing applications. The CXS pumps up to one litre of liquid per minute continuously or up to 25 litre-slugs without stopping, and provides an ultimate vacuum down to -2 mbar. CXS is available in two sizes, with capacities of 160 m 3 h -1 and 250 m 3 h -1. Features and Benefits Applications Environmental No oil disposal. No oil emissions into atmosphere. Performance Very stable pumping speed gives repeatability to processes. Continuous pumping at atmosphere. Ability to handle particulates. Dry eliminates back-streaming, thus protecting reactive alloys from contamination. Safety Unobtrusive noise levels. No unsightly oil spills. No hazardous oil vapours. Hazardous area ATEX certification for T4 and IIB3 gas groups. Drying Degassing Deodorisation Distillation Solvent recovery Pump Range CXS160 CXS160 CXS160/1200 CXS250 CXS250 CXS250/1200 CXS250/2600 Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 233.

233 Performance Curves CXS160 Dry Pump CXS160 CXS160 Performance Curve Maximum pumping speed 160 m 3 h ft 3 min -1 Capacity at mbar (7.5 Torr) 132 m 3 h ft 3 min -1 Ultimate vacuum < 0.02 mbar < Torr Ordering information CXS160 ATEX CAT2 T3 Light Duty CXS160 ATEX CAT2 T3 Medium Duty + CXS160/EH1200 ATEX CAT2 Light Duty CXS160/EH1200 ATEX CAT2 Medium Duty + CS CS CS CS Light Duty includes Shaft Seal Purges (SSP) only for clean applications Medium Duty + includes SSP, gas ballast, inlet purge, solvent flush and exhaust pressure monitoring for harsh processes. The above products are our standard offering. A comprehensive matrix of CXS products are available including the following: Containment safety ATEX CAT2 products with integral Flame Arrestors Fully systemised ATEX CAT 1 external/cat2 external products T160 and T4 products Please consult your Edwards Sales or Applications specialist for assistance with the correct product selection Dry Pumps & Systems for Hazardous Applications

234 CXS250 Performance Curve CXS250 Dry Pump CXS250 CXS250+EH1200 (60Hz) CXS250+EH1200 (50Hz) CXS250/2600 (60Hz) CXS250/2600 (50Hz) CXS250 Maximum pumping speed 250 m 3 h ft 3 min -1 Capacity at mbar (7.5 Torr) 230 m 3 h ft 3 min -1 Ultimate vacuum < mbar < Torr Ordering information CXS250 ATEX CAT2 T3 Light Duty CXS250 ATEX CAT2 T3 Medium Duty + CXS250/EH1200 ATEX CAT2 T3 Light Duty CXS250/EH1200 ATEX CAT2 T3 Medium Duty + CXS250/EH2600 ATEX CAT2 T3 Light Duty CS CS CSB CSB CSD Light Duty includes Shaft Seal Purges (SSP) only for clean applications Medium Duty + includes SSP, gas ballast, inlet purge, solvent flush and exhaust pressure monitoring for harsh processes. The above products are our standard offering. A comprehensive matrix of CXS products are available including the following: Containment safety ATEX CAT2 products with integral Flame Arrestors Fully systemised ATEX CAT 1 external/cat2 external products T160 and T4 products Please consult your Edwards Sales or Applications specialist for assistance with the correct product selection. Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 235.

235 Dimensions Standard CXS pump CXS with booster combination Pump view Pump view This example shown is for a CXS160 or CXS250 with an EH1200 booster Dry Pumps & Systems for Hazardous Applications

236 Technical Data Specification Units CXS160 CXS250 Maximum pumping speed m 3 h -1 /ft 3 min /95 250/148 Capacity at mbar (7.5 Torr) m 3 h -1 /ft 3 min /78 230/135 Ultimate vacuum mbar/torr < 0.02/< < 0.015/< Maximum back pressure standard mbar/psig 1,200/2.7 Power consumption at mbar (7.5 Torr) kw/hp 3.6/ /5.1 Standard motor ( V ±%, 3 ph, 50/60 Hz) kw/hp 7.5/ Cooling water flow rate, (adjustable) lmin -1/ gal min -1 4-/ Cooling water temperature* C/F 5-35*/41-95* Maximum cooling water supply pressure barg/psig 6.9/0 Cooling water supply differential pressure* bar/psi /9-25 Seal purge flow (maximum) std l min -1/ std ft 3 min -1 12/0.424 Seal purge supply pressure, (minimum maximum) barg/psig /36-0 Noise (maximum) with silencer db(a) 64 Weight (with frame and standard motor) kg/lbs 470/1,034 Process connection, inlet ANSI/DIN 3"/DN80 Process connection, outlet ANSI/DIN 2"/DN50 * Data for T3. Contact Edwards for T160 and T4 options Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 237.

237 Service, Spares and Accessories CXS Accessories Exhaust manual isolation valve kit Solvent flush assembly Exhaust silencer assembly Water pump assembly CXS Exhaust temperature transmitter accessory kit CXS Inlet pressure transmitter CXS Gas purge flow meter accessory kit CXS Inlet pressure indicator accessory kit CXS Exhaust pressure indicator accessory kit CXS Inlet temperature indicator accessory kit CXS Exhaust temperature indicator accessory kit M M M M M M M M M M M Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part Dry Pumps & Systems for Hazardous Applications

238 CDX DRY VACUUM PUMP MORE THAN PUMPS, COMPLETE VACUUM SOLUTIONS Edwards CDX00 represents the latest generation of dry pump technology. The CDX00 is a double-ended screw mechanism for the chemical process, pharmaceutical and petrochemical industries. This innovative technology leverages Edwards latest manufacturing and design philosophies. The CDX00 is suited to larger processes where repeatability and reliability are key. Technologies and manufacturing techniques have been carefully selected to produce a robust, high performance machine that is simple to operate and maintain. Features and Benefits Performance Continuous from atmosphere to ultimate. Excellent temperature control. Large liquid slug capability. Environment No effluent generated. Dry running mechanism. Efficient solvent recovery. Low power. Maintenance On-site seal and bearing change. Flushable with water, solvent or steam. Low rotational speed. Cooled and filtered oil. Integral accessory modules. Simplicity Low parts count. Balanced rotor design. No compression plate. Industry standard motors. Applications Processes. Distillation. Drying. Evaporation/Crystallisation. Solvent/Vapour Recovery. Pump Range CDX CDX00 Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 239.

239 Performance Curves CDX00 Dry Vacuum Pump CDX00 CDX00 Performance Curve Maximum pumping speed 900 m 3 h ft 3 min -1 Ultimate vacuum 5 x -3 mbar 4 x -3 Torr A Ordering information CDX00, 30 kw, 50 Hz, flame proof with integral flame arrestors CDX00 Dry vacuum pump, 30 kw, 50 Hz, flame proof (without integral flame arrestors) CDX00 Dry vacuum pump, 40 HP, 60 Hz, flame proof with integral flame arrestors CDX00 Dry vacuum pump, 40 HP, 60 Hz, flame A proof (without integral flame arrestors) Dimensions A A A A Power 2 Speed B CDX dimensions A C D B B C D Note: this diagram shows a CDX with integral flame arrestors. C D A Side view 1 Pump inlet B Plan view 2 Pump outlet C End view 3 Fixing-holes: Ø18 mm (0.71 inch), 2 holes on each mounting foot D Front fixing dimensions with mounting feet removed 4 Fixing-holes: Ø17 mm (0.67 inch), 2 holes on each mounting bracket 240. Dry Pumps & Systems for Hazardous Applications

240 Technical data Units CDX00 Maximum pumping speed m 3 h ft 3 min Capacity at mbar (7.5 Torr) m 3 h ft 3 min Ultimate vacuum mbar 5 x -3 Torr 4 x -3 Maximum back pressure standard (optional*) mbara 1150 psig 2.0 Power consumption at mbar (7.5 Torr) kw 17.1 Hp 23.2 Standard motor ( V, 3 ph, 50 Hz) kw 30 Standard motor ( V, 3 ph, 60 Hz) hp 40 Cooling water flow rate (adjustable) lmin gal min Cooling water supply temperature range o C/ o F 5-35/41-95 Cooling water supply pressure barg 2- psig Seal purge flow (maximum), regulated to barg, (5 7 psig) lmin ft 3 min Seal purge supply pressure (minimum maximum) barg 2- psig Noise (max. with exhaust silencer) db(a) 82 Weight (with frame and standard motor) kg 17 lbs 3765 Process connection, inlet ANSI/DN150 6 Process connection, outlet ANSI/DN80 3 Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 241.

241 Systemisation Because no two installations are identical, Edwards offers a custom systemisation design and build service, exactly matched to customer needs, using pre-engineered modules together with an extensive CAD capability. This also allows subsequent expansion or reconfiguration. A wide range of modules is available, including: EH* and HV mechanical booster pumps Condensers Receivers Knockout pots Dust filters Solvent purging Flame arrestors Isolation and throttle control valves Instrumentation Silencers Inverter drives and pressure controls Electrical control panels Air blast closed-loop cooling Base skids The requirement for these or other accessories is clarified through expert applications engineering. Work can be carried out to a customer s specifications, or to local or industry standard codes and practices. Full documentation is provided, and full certification can be obtained if necessary. *Edwards EH Series boosters feature our unique hydrokinetic drive which provides significant cost and performance advantages over direct drive machines. The hydrokinetic drive removes any need for pressure sensors or bypass lines or inverters, and allows the booster to run from atmospheric pressure to ultimate vacuum, giving faster pump-down and more flexible operation with less maintenance. Systemisation to match your process CDX00 + HV8000 booster combination Pre-engineered modules Customised systems Tailored applications support to match performance to process HV8000 CDX Dry Pumps & Systems for Hazardous Applications

242 Service, Spares and Accessories Flame Arrestor Kit Flame Arrestor replacement kit (inlet) Flame Arrestor replacement kit (outlet) Flame Arrestor tooling kit Flame Arrestor cleaning kit Replacement Kit Air bleed filter replacement kit Bearing and seal replacement kit Oil pump replacement kit Kit Routine maintenance kit Heat exchanger cleaning kit Cooling system overhaul kit Motor fitting kit Drive coupling kit Strip and rebuild kit Hoses kit Mobil SHC 629 Oil Mobil SHC 629 oil: 4 litres (1.06 US gal) Coolant Container of coolant* A A A A A A A A A A A A A A H * 0.9 litres (0.24 US gal) as supplied, 2.0 litres (0.53 US gal) when diluted. H Note: You will need 25 containers of coolant to completely fill a pump with coolant Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 243.

243 EDP CHEMICAL DRY PUMP MORE THAN PUMPS, COMPLETE VACUUM SOLUTIONS EDP pumps are based on Edwards oil-free, non-contacting, award-winning, reverse claw mechanism. They provide consistent vacuum at high efficiencies and low costs of ownership. Dry pumps completely eliminate all problems of process contamination and creation of polluted effluent, which are experienced with traditional wet vacuum pump technologies. Features and Benefits Staged compression for optimum temperature profile within the pump and no requirement for cooling gas injection. Inherently free draining. Able to handle liquid or particulate carry-over. Short gas path eliminates particulate build-up and corrosion Edwards patented design. Can flush with solvents, water or steam No internal valves to block or corrode and no interstage condensers to create potential for corrosion. Simple robust construction with ample power ensures reliable operation even during process upsets. Non-contacting mechanisms gives long life and high reliability. Pump flammable gases safely. Pump corrosive gases without corroding. Designed for long life and easy maintenance. Minimum of 25 years life expectancy. Lower cost of ownership. Applications Drying Distillation Reactor service Solvent recovery House/central vacuum Pump Range EDP EDP80 EDP160 EDP250 EDP Dry Pumps & Systems for Hazardous Applications

244 Performance Curves EDP80 Chemical Dry Pump EDP80 EDP80 Performance Curve Peak speed 50 Hz 83 m 3 h -1 /49 ft 3 min Hz 2 m 3 h -1/ 60 ft 3 min -1 Ultimate Vacuum 50 Hz 0.5 mbar/0.4 Torr 60 Hz 0.2 mbar/0.2 Torr Ordering information EDP80 50 Hz EDP80 60 Hz A A EDP160 Chemical Dry Pump EDP160 EDP160 Performance Curve Peak speed 50 Hz 163 m 3 h -1 /96 ft 3 min Hz 202 m 3 h -1 /119 ft 3 min -1 Ultimate Vacuum 50 Hz 0.5 mbar/0.4 Torr 60 Hz 0.2 mbar/0.2 Torr Ordering information EDP Hz EDP Hz A A Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 245.

245 EDP250 Performance Curve EDP250 Chemical Dry Pump EDP250 Peak speed 50 Hz 260 m 3 h -1 /320 ft 3 min Hz 153 m 3 h -1 /188 ft 3 min -1 Ultimate Vacuum 50 Hz 0.5 mbar/0.4 Torr 60 Hz 0.2 mbar/0.2 Torr Ordering information EDP Hz EDP Hz A A EDP400 Performance Curve EDP400 Chemical Dry Pump EDP400 Peak speed 50 Hz 377 m 3 h -1 /222 ft 3 min Hz 427 m 3 h -1 /251 ft 3 min -1 Ultimate Vacuum 50 Hz 0.4 mbar/0.3 Torr 60 Hz 0.2 mbar/0.2 Torr Ordering information EDP Hz EDP Hz A A Dry Pumps & Systems for Hazardous Applications

246 Dimensions EDP dimension Key EDP80 EDP160 EDP250 EDP Hz EDP Hz A 1423 (56.0) 1458 (57.4) 1681 (66.2) 1730 (68.1) 1721 (67.8) 1 Pump inlet B 1254 (49.4) 1289 (50.7) 1514 (59.6) 1562 (61.5) 1549 (61.0) 2 Pump outlet C 974 (38.3) 974 (38.3) 1148 (45.2) 1148 (45.2) 1149 (45.2) 3 Fixing hole: Ø18 mm (4 off) D 353 (13.9) 353 (13.9) 377 (14.8) 377 (14.8) 349 (13.7) 4 Cooling water outlet connection E 443 (17.4) 448 (17.6) 359 (14.1) 359 (14.1) 362 (14.3) 5 Cooling water inlet connection F 350 (13.8) 350 (13.8) 500 (19.7) 500 (19.7) 476 (18.7) 6 Nitrogen supply inlet connection G 350 (13.8) 350 (13.8) 475 (18.7) 475 (18.7) 476 (18.7) H 700 (27.6) 700 (27.6) 00 (39.4) 00 (39.4) 997 (39.3) J 850 (33.5) 850 (33.5) 950 (37.4) 950 (37.4) 946 (37.2) Shop online at shop.edwardsvacuum.com Contact our customer service team Dry Pumps & Systems for Hazardous Applications 247.

247 Technical Data Units EDP80 EDP Hz 60 Hz 50 Hz 60 Hz Maximum pumping speed m 3 h -1/ ft 3 min -1 83/49 2/60 163/ /119 Capacity at mbar (7.5 Torr) m 3 h -1/ ft 3 min -1 75/44 2/60 153/90 198/117 Ultimate vacuum mbar/torr 0.5/ / / /0.2 Maximum back pressure standard (optional*) mbar/psig 1150 (1300*)/2.2 (4.4*) Power consumption at mbar (7.5 Torr) kw/hp 3.3/ / /6.6 Standard motor ( V, 3 ph, 50 Hz) kw/hp 5.5/ / /15.0 Cooling water flow rate, (adjustable) l min -1/ gal min / / / / Cooling water supply pressure barg/psig 2-/ Seal purge flow (maximum), regulated to barg, (5-7 psig) lmin -1/ ft 3 min -1 20/0.7 Seal purge supply pressure, (minimum maximum) barg/psig 2-/ Noise (max. with exhaust silencer) psig Weight (with frame and standard motor) kg/lbs 648/ / / /1667 Process connection, inlet 2 /DN50 3 /DN80 Process connection, outlet 1.5 /DN40 Pumping mechanism 3 stage reversed claw Units EDP250 EDP Hz 60 Hz 50 Hz 60 Hz Maximum pumping speed m 3 h -1/ ft 3 min / / / /251 Capacity at mbar (7.5 Torr) m 3 h -1/ ft 3 min / / / /248 Ultimate vacuum mbar/torr 0.5/ / / /0.2 Maximum back pressure standard (optional*) mbar/psig 1150 (1300*)/2.2 (4.4*) Power consumption at mbar (7.5 Torr) kw/hp 6.0/ /9.4 Standard motor ( V, 3 ph, 50 Hz) kw/hp 11.0/ / / /30.0 Cooling water flow rate, (adjustable) lmin -1/ gal min -1 1-/ / / / Cooling water supply pressure barg/psig 2-/ Seal purge flow (maximum), regulated to barg, (5-7 psig) lmin -1/ ft 3 min -1 20/0.7 Seal purge supply pressure, (minimum maximum) barg/psig 2-/ Noise (max. with exhaust silencer) psig Weight (with frame and standard motor) kg/lbs 848/ / / /2116 Process connection, inlet 3 /DN80 Process connection, outlet 2 /DN50 Pumping mechanism 3 stage reversed claw 248. Dry Pumps & Systems for Hazardous Applications

248 TURBOMOLECULAR PUMPS ULTIMATE VACUUM SOLUTIONS EXT/nEXT Turbo Pumps next Turbomolecular Pumps 253 EXT Turbomolecular Pumps 258 T-Station 75 Turbopumping System 262 next Turbopumping Station 265 Turbo and Active Gauge (TAG) Controller 267 TIC Turbo and Instrument Controller 269 TIC Relay Boxes 272 STP Turbo Pumps STP Magnetically Levitated Turbomolecular Pumps 275 STP Integrated Controller Pumps 278 STP Ultra High Vacuum Pumps 293 STP High Throughput Pumps 300 Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 249.

249 EXT and next Turbomolecular Pumps and Controllers Our range of EXT and next compound turbomolecular pumps and TIC Controllers use state-of-the-art technology to provide reliable, high and ultra high vacuum. Key Performance Factors A turbomolecular pump (TMP) is a multi-stage axial flow turbine in which high speed rotating blades provide compression by increasing the probability of gas molecules moving in the pumping direction. The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump to exhaust to atmosphere. A compound molecular pump (CMP) is based on the concept of combining bladed turbomolecular stages with molecular drag stages on the same rotor. This design allows: High critical foreline pressures (typically up to mbar) Options to use smaller backing pumps or dry diaphragm backing pumps Pumping Speed (volume flow rate) is determined by the rotor diameter, inlet flange size and rotational speed. The pumping speed reduces at high inlet pressures to a value determined by the size of the backing pump. As the inlet pressure rises, the motor power dissipation and pump temperature increase. Maximum continuous inlet pressure sets the maximum throughput limit for steady state pumping and depends on the cooling method used. Above this pressure, the rotational speed of the pump reduces as temperature sensors limit the pump power. With a water-cooled pump, the actual maximum throughput depends on the size of the backing pump. Quiescent Electrical Power is the nominal power dissipated by a pump operating normally at full rotational speed and with low gas throughput (inlet pressure below the 3 mbar range). During the run-up time, or when operating at high gas throughput or above the critical backing pressure, the pump power dissipation will rise and approach the maximum power output for the turbo controller used. Critical backing pressure for compound turbomolecular pumps is typically up to mbar. Compression Ratio is determined by the rotational speed, the number of pump stages and the molecular weight of the pumped gas. It is higher for heavier gases which explains why the suppression of hydrocarbon backstreaming is so effective and why the ratio for hydrogen is important for ultra high vacuum applications. Ultimate Pressure measured according to Pneurop standards, is the lowest pressure achieved in the test system, 48 hours after bakeout. The system is backed only by a two-stage rotary vane pump. Fluoroelastomer inlet seals are used with ISO-flanged pumps and metal seals are used with CF-flanged pump models Turbomolecular Pumps

250 Motor Technology EXT pumps use brushless d.c. motors and are available in 24 (EXT75DX), 24 to 48 (next) volt variants. For the 24 volt pumps the TIC line of controllers are available with the added benefit of integrated instrument controllers. The drives incorporate a regenerative back-up supply which provides power in the event of electrical supply failure to keep the vent-valve closed for several minutes. Purge Port The EXT and next pumps all have purge-ports which can be used to purge the motor and bearing cavity with an inert gas (such as nitrogen). We recommend that you purge the pump when you pump corrosive and abrasive gas mixtures or those with an oxygen content over 20%. You can use our PRX purge-restrictor to set the purge gas flow rate. This typically adds up to 25 sccm to the total gas load and the backing pump must be sized accordingly. Bearing and Suspension Technologies We use two basic technologies: magnetic bearings and mechanical ceramic ball bearings. Ceramic bearings, which are lubricated by oil, have replaced conventional steel bearings. The silicon nitride ceramic balls are lighter, harder and smoother than steel equivalents, leading to longer life and lower vibration characteristics. Reliability is increased because the ball and race materials are different, which prevents micro pitting. Magnetic bearings further increase reliability. Our EXT and next turbomolecular pumps use a hybrid bearing arrangement with a permanent magnet upper bearing and an oil lubricated ceramic lower bearing. Rotor Technologies We use two basic technologies: Compound molecular (combining turbomolecular and drag stages) on all EXT and next D variant pumps. The T variants (combining turbomolecular, drag and fluid dynamic stages ) are available on next 'T' variant pumps. These have the highest compression for light gases where this may be needed on UHV applications. Venting To maintain the cleanliness of your vacuum system, we recommend that you vent a turbomolecular pump at or above half rotational speed, when the rotor is still spinning fast enough to suppress any backstreaming of hydrocarbons from the backing line. The vent port on the EXT and next pump is part way up the rotor stack to ensure maximum cleanliness even with fluoroelastomer sealed vent-valves. Each pump is supplied with a manual vent-valve. If you use this manual valve care must be taken not to open it too quickly, especially if the system volume is small (typically less than the approximate volume of the turbomolecular pump), because if the rate of pressure rise is too high, the pump bearing life may be reduced. In a small volume system, the rate of pressure rise will be greater than in a large volume for a given vent flow rate, and it may be necessary to restrict the vent gas flow. We offer the VRX range of vent restrictors which you can fit to your EXT or next pump. Since the rate of pressure rise cannot be accurately controlled by the manual vent-valve, we recommend that, unless you fit a suitable VRX restrictor to the vent port, you must wait until the turbomolecular pump has slowed down to 50% speed, as indicated by the controller, before you open the manual vent-valve. The maximum rate of pressure rise varies by pump model, and the Instruction Manual supplied with the pump gives further guidance on this, and the size of vent restrictor needed to meet the fastest pressure rise allowed. Control of the rate of venting is particularly important with pumps using fully magnetic bearings, otherwise the safety bearings may be damaged. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 251.

251 The manual vent-valve can be replaced with a TAV solenoid valve driven by the Controller to allow venting after a 2 second delay on shut-off, or delaying vent until the rotational speed has dropped to 50%. The Controller can also control the TAV vent-valve in the event of power or pump failure. You can choose from two solenoid vent-valve options; the TAV5 which covers most autoventing applications, and the TAV6 which has a higher conductance than the TAV5 and is designed either for use on larger chambers (typically with a volume greater than litres), or when you want to use a two-stage venting procedure for the fastest possible vent times. For two-stage venting you need two TAV valves. By using the appropriately restricted flow for the first stage vent-valve you can start venting when the pump is still at full rotational speed. Once the pump has slowed to half rotational speed you can then introduce higher flow rates from the second stage vent-valve. EXT75DX and next also have the facility for pulsed venting to allow rapid yet controlled venting of a system. Inlet-screen A coarse inlet-screen is fitted as standard to all EXT pumps and supplied with next pumps. The inlet screen prevents debris from falling into the pump-inlet. Coarse and fine inlet-screens are available. Cooling For most applications, we recommend that you use forced-air cooling with the appropriate ACX air-cooler connected to your EXT or next pump. NB: high gas load, high backing pressure and rapid cycling require more cooling. However, if the ambient temperature is above 35 C you must water-cool the pump. Water cooling reduces the running temperature of the pump motor and bearings and is particularly recommended when you operate the pump with a continuous high throughput (that is, inlet pressure above 1 x -3 mbar) or when you bake the pump to above 115 C (measured at the system flange). Water cooling accessories need to be purchased separately. Scope of Supply For end users desiring front panel controls and indications we suggest the following: TIC controller with EXT75DX and next TAG controller with EXT75DX and next Each EXT or next pump is supplied with an inlet screen, elastomer or copper gasket inlet seal (as appropriate) and manual vent valve. Where required a water cooling accessory is available. Turbo controllers require the appropriate mains cable to be selected. Corrosive Applications For maximum life and reliability in the exacting process conditions encountered in semiconductor wafer processing applications, we recommend that you use turbomolecular pumps from our Edwards STP-C and STP-H-C series. These Maglev pumps have magnetic bearings and are ideal for these harsh duty applications Turbomolecular Pumps

252 next TURBOMOLECULAR PUMP THE NEW EXPERIENCE IN TURBOMOLECULAR PUMPS The next is a hybrid bearing compound turbomolecular pump. next pumps combine our proven bearing technology (oil lubricated ceramic lower bearing with dry permanent magnetic upper bearing), an improved rotor design with a new molecular drag stage to deliver improved pumping speed and compression ratios, and user serviceability. They feature 24 V to 48 V d.c. sensor less motors with a built in drive that is fully compatible with our range of TAG and TIC controllers. They are available pre-set for either 80 W or 160 W maximum power, the former enabling use with our 0 W TIC controllers are also recommended for pumping Argon, but with a longer ramp time to full operating speed. RoHS compliant and CSA/UL approved. Features and Benefits Applications Value for money exceptional pumping speeds and compression ratios No unplanned downtime field proven reliability in the most demanding environments Easy integration standard fit in many scientific instruments Reliability for peace of mind over 200,000 turbomolecular pumps installed Low cost of ownership end user serviceable Mass spectrometry Electron microscopy Research and development High energy physics Industrial Pump Range next next240 next300 next400 Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 253.

253 Performance Curves RoHS compliant and CSA/UL approved. next240 Turbomolecular Pump next240 Inlet pumping speed ls -1 next240 Performance Curve N He next240d H 2 Compression ratio > 1 x 11 (ft 3 min -1 ls -1 ) x 5 50 Ordering information 1 x (mbar) next240d Turbomolecular Pump ISO0 Inlet Flange 160 W next240d Turbomolecular Pump ISO0 Inlet Flange, 80 W next240d Turbomolecular Pump CF0 Inlet Flange 160W next240d Turbomolecular Pump CF0 Inlet Flange, 80 W next 240T HC Turbomolecular Pump ISO0 Inlet Flange 160 W next 240T HC Turbomolecular Pump ISO0 Inlet Flange 80 W next 240T HC Turbomolecular Pump CF0 Inlet Flange 160 W next 240T HC Turbomolecular Pump CF0 Inlet Flange 80 W B B B B B B B B Argon 2 Nitrogen 3 Helium 4 Hydrogen next300 Turbomolecular Pump next300 next300 Performance Curve Inlet pumping speed ls N He 280 H 2 ls (ft -1 3 min -1 ) next300d Compression ratio 150 Ordering information > 1 x 11 1 x 6 5 x (mbar) next300d Turbomolecular Pump ISO0 Inlet Flange 160 W next300d Turbomolecular Pump ISO0 Inlet Flange, 80 W next300d Turbomolecular Pump CF0 Inlet Flange 160 W next300d Turbomolecular Pump CF0 Inlet Flange, 80 W next 300T HC Turbomolecular Pump ISO0 Inlet Flange 160 W next 300T HC Turbomolecular Pump ISO0 Inlet Flange 80 W next 300T HC Turbomolecular Pump CF0 Inlet Flange 160 W next 300T HC Turbomolecular Pump CF0 Inlet Flange 80 W B B B B B B B B Argon 2 Nitrogen 3 Helium 4 Hydrogen 254. Turbomolecular Pumps

254 next400 Inlet pumping speed ls N He 325 H 2 Compression ratio > 1 x 11 1 x 8 5 x 5 Ordering information next400d Turbomolecular Pump ISO160 Inlet Flange 160 W next400d Turbomolecular Pump ISO160 Inlet Flange, 80 W next400d Turbomolecular Pump CF160 Inlet Flange 160 W next400d Turbomolecular Pump CF160 Inlet Flange, 80 W next 400T HC Turbomolecular Pump ISO160 Inlet Flange 160 W next 400T HC Turbomolecular Pump ISO160 Inlet Flange 80 W next 400T HC Turbomolecular Pump CF160 Inlet Flange 160 W next 400T HC Turbomolecular Pump CF160 Inlet Flange 80 W B B B B B B B B next400 Performance Curve next400 Turbomolecular Pump next400d (mbar) 1 Argon 2 Nitrogen 3 Helium 4 Hydrogen Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 255.

255 Dimensions Envelope Vent Port 1/8 BSP (Interstage) (20x) Ø8.4 18º Electrical Drive Unit Body Purge Port 1/8 BSP 30º 4 holes M8 x 12 deep base mounting holes and fan mountings (supplied with feet fitted but not shown) 22.5º (32x) R4.2 R69.2 R65.1 R V Supply Envelope Vent Port 1/8 BSP Backing Port NW25 15 Ø124 PCD mounting points 45º Ø Ø Ø 152 Ø A D E (to ports) F (to purge) B (to vent) C (C of G) G (to ports) (to purge) 83.1 (to vent) 116 (C of G) (C of G) 12 P next dimension next240 Dimension next300/400 Dimension Ø H Ø K M N L (CofG) EARTH POINT (M5) A B C D E F G H J K L M N P next next Turbomolecular Pumps

256 Technical Data Inlet flange Units next240 next300 next400 DN0 ISO-K or DN0CF DN0 ISO-K or DN0CF DN160 ISO-K or DN160-CF Inlet pumping speed ls -1 N He H Compression ratio D / T N 2 > 1 x 11 > 1 x 11 > 1 x 11 Backing port He 3 x 5 / 1 x 6 1 x 6 / 3 x 6 1 x 8 / >1 x 8 H 2 1 x 4 / 1.5 x 4 5 x 4 / 1 x 5 5 x 5 / 1 x 6 Vent/purge port BSPP ⅛ Critical backing pressure D / T mbar 9.5 / / 20 / 20 Maximum continuous inlet flow (nitrogen) Water cooling (40 C ambient) sccm Forced air cooling (35 C ambient) sccm Natural convection (30 C ambient) sccm Maximum continuous backing pressure Water cooling (40 C ambient) mbar Forced air cooling (35 C ambient) mbar Natural convection (30 C ambient) mbar Recommended backing pump* NW25 RV12/nXDSi Normal rotational speed rpm 60,000 Start time to 90% speed D / T 160 W sec 115 / / / 200 Sound pressure level at 1 m db(a) < 45 (+/-3) Mass (kg) D (T) ISO 5.7 (6) 6.5 (6.8) Recommended controller Maximum temperature CF flange Water cooled/air cooled C 120/115 CF 8.8 (9.1) 8.5 (8.8) 9.5 (9.8) TIC200 Turbo and Instrument Controller or TAG Ultimate pressure with RV backing pump ISO/CF mbar < 6 x -8 /< 5 x - < 6 x -8 /< 5 x - < 1 x -8 /< 1 x - Maximum magnetic field pump can tolerate mt 5 Quiescent electric power W (Power set to 160 W) Typically 20 Min water cooling flow rate (water 15 C) ls Water temperature range C to 20 * a smaller backing pump may be used depending on application. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 257.

257 EXT TURBOMOLECULAR PUMP PERFORMANCE YOU CAN RELY ON Edwards is a world leader in the design and manufacture of turbomolecular pumps with over 200,000 units installed worldwide. The range of products includes the EXT75DX compound turbomolecular pumps that combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board controller and a 24 V d.c. motor. Features and Benefits Compact design with high performance for efficient systemisation. Permanent magnetic upper bearing and oil lubricated bottom bearing for reliable running. Compatible with Edwards TAG and TIC turbo and instrument controller meaning you can add up to 3 vacuum gauges without the need of an additional gauge controller. RoHS compliant and CSA/UL approved. Applications Mass spectrometry. Electron microscopy. Research and development. High energy physics. Industrial. Pump Range EXT75DX 258. Turbomolecular Pumps

258 Performance Curves EXT75DX Turbomolecular Pump EXT75DX Ordering information Inlet pumping speed ls -1 ISO63/CF63, DN40NW) (ISO0) 61, 42, 66 N 2 57, 49, 59 He 53, 48, 54 H 2 Compression ratio > 1 x 11 1 x 6 5 x 4 EXT75DX DN63ISO-K EXT75DX DN63CF EXT75DX DN40NW EXT75DX DN0ISOK EXT75DX DN0ISO-K (DN25NW Backing) EXT75iDX Turbo Pump DN40NW EXT75iDX Turbo Pump DN63ISO-K EXT75iDX Turbo Pump DN63ISO-K (NW25 Interstage) B B B B B B B B EXT75DX Performance Curve ( ls -1 ) EXT75DX (mbar) mbar (ls -1 ls ) (Pa) -2 1 Nitrogen 2 Helium 3 Hydrogen EXT75DX (mbar) (Pa) Dimensions EXT Dimension 1 Nitrogen 2 Helium A Manual vent valve in vent port D Backing port G Podule connector socket B Podule E Purge port (blanked off) H Earth connection C Logic interface connector F Interstage port (EXT75iDX only) Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 259.

259 Technical Data Inlet flange Outlet flange Units EXT75DX DN40NW, DN63ISO-K, DN63CF or DN0ISO-K DN16NW Pumping speed NW40 ISO/CF63 ISO0 N 2 ls He ls H 2 ls Compression ratio N 2 > 1 11 He 1 x 6 H 2 5 x 4 Recommended backing pump E2M0.7/XXD1/RV5/nXDS6i Vent port inch BSP ⅛ Purge port inch BSP ⅛ Maximum continuous inlet pressure (light gas pumping) Water cooling mbar 2-2 (water at 15 C, ambient temp at 40 C) Forced air cooled, 35 C ambient mbar 1-2 Pump rotational speed Nominal rotational speed rpm Standby rotational speed rpm Variable from to (63000 default) Programmable power limit settings W Variable from (80 W default) Start time to 90% speed sec 1 Analogue outputs Pump rotational speed; Power consumption; Pump temperature; Controller temperature Cooling method Δ Forced air/water Ambient air temperature for forced air cooling C 5-35 Minimum cooling water flow rate (water 15 C) lh Water temperature range C -20 Maximum inlet flange temperature C 0 Operating attitude Vertical and upright, through to horizontal Noise level at 1 m db(a) < 50 Maximum magnetic field pump can tolerate mt 5 Recommended controller TIC0 turbo and instrument controller or TAG Quiescent electrical power W Weight kg Above this inlet pressure, rotational speed drops to below nominal. Power limit set to 80 W. Δ Air and water cooling accessories must be ordered separately Turbomolecular Pumps

260 Service, Spares and Accessories Water-cooler Pump next water cooler next240/300/400 B WCX water-cooler WCX250 EXT75DX B Inlet Screens Spares Pump Inlet Flange Size Inlet flange seals with integrated inlet screen 0 coarse next240/300 DN0ISO B fine next240/300 DN0ISO B coarse next400 DN160ISO B fine next400 DN160ISO B ISX inlet-screen 0 coarse next240/300 DN0CF B fine next240/300 DN0CF B coarse next400 DN160CF B fine next400 DN160CF B EXT75DX DN63ISO/ B DN63CF 0 EXT75DX DN0ISO B Inlet flange seals DN40NW Co-seal, fluoroelastomer ISO63 Trapped O-ring, fluoroelastomer 63CF copper compression gasket (pack of ) 0CF copper compression gasket (pack of ) 160CF copper compression gasket (pack of 5) BX bake out band on application Vibration isolator on application Pump-to-controller cables B B C C C m cable D m cable D m cable D Air-cooler Pump ACX75 EXT75DX B next Axial air cooler next240/300/400 B next Radial air cooler next240/300/400 B next Axial air cooler next240/300/400 B with connector next Radial air cooler with connector next240/300/400 B Vibration Isolator DN63CF DN63ISO-K DN0ISO-K DN0CF VRX Vent-Restrictor B5800 B B B Orifice Diameter (mm) VRX 0.1 B VRX B VRX B VRX B VRX B TAV vent-valve TAV5 vent-valve TAV6 vent-valve Vent-port adaptor Vent-port adaptor next bearing service parts and tools Oil cartridge tool kit Bearing tool kit Oil cartridge Bearing and oil cartridge B B B B B B B DX/nEXT pump profibus communications module D Purge-Restrictors PRX purge-restrictor Interface cables TIC logic interface cable TIC RS232 interface cable 2 m Active gauge cables B D D m D m D0000 Other cable lengths also available Please contact Edwards for further details Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 261.

261 T-STATION 75 TURBOPUMPING SYSTEM PERFORMANCE YOU CAN RELY ON The T-Station 75 is Edwards s entry level Turbopumping system. It combines our proven EXT75DX with a choice of either an oil sealed E2M1.5 backing pump or an XDD1 diaphragm pump where a totally dry solution is desired. The T-Station comes with our TAG (Turbo and Active Gauge) controller fitted as standard which enables single button start/stop of the system, the ability to control one of our Active Gauges*, vent valve control*, and delayed start to either time or pressure if a gauge is fitted making the T-Station ideal for general laboratory needs. * Gauges and TAV5 vent valve must be purchased separately. Features and Benefits Fully assembled and ready to use. Control of turbopump, backing pump and optional gauge from integrated controller. NW40, ISO63 or CF63 inlet flanges. Choice of backing pumps, E2M1.5 oil sealed pump. T-Station 75W or XDD1 diaphragm pump T-Station 75D. Delayed turbo start option for pumping larger volumes. Applications General laboratory applications. Spectroscopy. Surface analysis. Small coating systems. Vacuum tube manufacturing Turbomolecular Pumps

262 Dimensions T-Station Dimension Pumping system view T-Station 75W 395 T-Station 75D Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 263.

263 Technical Data Units T-Station 75 Pumping speed for N 2 NW40 ls ISO63/CF63 ls Compression ratio for N 2 > 1 x 11 Backing pump 50 Hz E2M1.5 m 3 h XDD1 m 3 h Ultimate pressure mbar < 5 x -8 Inlet flange NW40, ISO63 or CF63 Exhaust flange Weight E2M1.5 XDD1 Units T-Station mm OD Nozzle or ⅜ inch BSP Fitted silencer or ⅛ inch BSP E2M1.5 kg/lb 22/48 XDD1 kg/lb 18/40 Noise level db(a) 55.4 Leak tightness ls -1 < 1 x -6 mbar Operating temperature range C/F to 40/50 to 4 T-Station 75 Ordering information T-Station 75D NW V 50/60 Hz TS75D01 T-Station 75D NW V 50/60 Hz TS75D02 T-Station 75D ISO V 50/60 Hz TS75D2001 T-Station 75D ISO V 50/60 Hz TS75D2002 T-Station 75D CF V 50/60 Hz TS75D3001 T-Station 75D CF V 50/60 Hz TS75D3002 T-Station 75W NW V 50/60 Hz TS75W01 T-Station 75W NW V 50/60 Hz TS75W02 T-Station 75W ISO V 50/60 Hz TS75W2001 T-Station 75W ISO V 50/60 Hz TS75W2002 T-Station 75W CF V 50/60 Hz TS75W3002 T-Station 75W CF V 50/60 Hz TS75W3001 Gauge AIM-X Active inverted magnetron gauge D APG0 Active Pirani vacuum gauge D APGX-H Active Linear convection gauge D WRG-S Active wide range gauge D Active gauge cable 0.5 m Active gauge cable D m Active gauge cable D m Active gauge cable D m Active gauge cable D Electrical supply cable 2 m electrical supply cable for 1-ph pumps, no plug 2 m electrical supply cable for 1-ph pumps, North America/Japan plug 2 m electrical supply cable for 1-ph pumps, North European plug 2 m electrical supply cable for 1-ph pumps, UK, Three-pin plug Mist filter Model EMF3 mist filter Vent valve TAV5 Vent valve 24 V DC ¼ Bsp A A A A A B Turbomolecular Pumps

264 next TURBOPUMPING STATION PERFORMANCE YOU CAN RELY ON Our range of next turbopumping stations build on our previous generation, but with a simplified ordering matrix and expanded range to include turbopumps with speeds from 42 ls -1 to 400 ls 1. For pumping speeds from 42 ls -1 to 66 ls -1 we offer our trusted EXT75DX pump with a choice of various wet and dry backing pumps and a Turbo and Instrument TIC0. For pumping speeds of 240 ls -1 to 400 ls -1 the next turbopumping stations are based on our next pumps offering the additional flexibility of end-user serviceability plus a choice of backing pumps and a Turbo and Instrument TIC200. Features and Benefits Value for money exceptional pumping speeds and compression ratios. No unplanned downtime field proven reliability in the most demanding environments. Easy integration standard fit in many scientific instruments. Reliability for peace of mind over 200,000 turbo pumps installed. Low cost of ownership end user serviceable. Turbopumping stations fitted with E2M1.5 or RV pumps come with an EMF mist filter fitted, and those fitted with our class leading nxds scroll pumps have an isolation valve fitted between the turbopump and backing pump as standard. All turbopumping stations include 4 locking castor wheels, a bench-top mounting kit, built in air cooling and come configured to suit a wide variety of applications such as: UHV systems; beam lines; load locks; surface science; high energy physics. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 265.

265 Ordering Plug and play turbopumping station Everything about our new range of next turbopumping stations has been developed to provide a comprehensive vacuum solution with the latest technological advances for easy installation and operation. A simplified ordering matrix and expanded range, to include turbopumps with speeds from 42 ls -1 to 400 ls -1, enables you to select the most appropriate combination for your application, fully assembled and ready to go. 1. Choose your turbopump 2. Choose your backing pump 3. Select your voltage OIL SEALED DRY E2M1.5 XDD1 1.6 m 3 h m 3 h -1 EXT75DX next240 D or T 75 ls ls -1 RV5 5.1 m 3 h -1 nxds6i 6.2 m 3 h -1 next300 D or T next400 D or T 300 ls ls -1 RV12 12 m 3 h -1 nxdsi 11.4 m 3 h -1 nxds15i 15.1 m 3 h -1 nxds20i 22 m 3 h -1 Ordering matrix T S 0 0 Turbopump * M EXT75DX B next240d C next300d D next400d E next240t F next300t G next400t Inlet Flange * 1 DN40NW (EXT75DX) 2 DN63ISO-K (EXT75DX) 3 DN63CF (EXT75DX) 4 DN0ISO-K (next240/300) 5 DN0CF (next240/300) 6 DN160ISO-K (next400) 7 DN160CF (next400) Backing Pump 1 E2M1.5 2 RV5 3 RV12 A XDD1 D nxds6i E nxdsi F nxds15i G nxds20i 0 Manual Vent 1 TAV5 Vent Valve Electrical Supply V 50/60 Hz (Europe) V 50/60 Hz (USA) V 50/60 Hz (Japan) V 50/60 Hz (UK) * Turbopump and inlet flange must match as shown For Japan low volts on E2M1.5 please order the USA voltage variant, for all other pumps please order Japan version and specify pumps please order Japan version and specify low volts on your order 266. Turbomolecular Pumps

266 TURBO AND ACTIVE GAUGE (TAG) CONTROLLER Edwards Turbo and Active (TAG) controller is a small low cost pumping system controller, suitable for a wide range of vacuum applications, and compatible with all Edwards EXT and next turbomolecular pumps. The large LED display shows the pump speed or vacuum pressure, and an easy to use push button interface enables ease of operation and control. The TAG controller will also run a backing pump, air vent valve, an air cooler and an Edwards active gauge, making the TAG a versatile system controller. This compact 24 V controller is ideal for use on bench tops or suitable mobile platforms where space is limited, yet functionality and reliability are essential. NOTE: TAG controller does not contain an in-built power source, a 24 V power supply is available from Edwards or users must supply their own. Features and benefits Turbopump control capabilities Turbopump start/stop. Display pump speed as % of full speed. Visual performance display; acceleration, deceleration or normal running. Control of a single vent valve when connected to the turbopump controller with choice of three vent modes. Vent when pumping speed drops below 50% Controlled vent from full speed then hard vent at 50%. Fan mode, continuous power to the vent port so the system will not vent. Alternatively it may be used to power an air cooler connected directly to the pump. Gauge control and display functions Control of a single Active gauge: APG, AIM, ASG or WRG gauge. Choice of pressure display: mbar, Torr, Pascal or volts. Zero adjustment/calibration of gauges. Use of gauge signal to start/stop the turbopump. Backing pump control, plus more TAG has the additional capability to control a backing pump. 24 V XDD1 may be connected directly and will share power with TAG/turbopump. nxds and XDS35i pumps can be controlled by the TAG logic interface. Other mains backing pumps may need a relay (see instruction manual for details). A single 24 V isolation valve can be controlled and powered from the TAG. For pumping large chambers the TAG allows delayed start of the turbopump to either a time or pressure set point. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 267.

267 Dimensions TAG Controller Configuration E A B TAG controller Mains cable/line cord J F H G D K B C D E F G H J K WRG-S-NW25 Backing pump Turbomolecular pump Air-cooler XDD/DX/EXDC extension cable XDD/DX/EXDC extension cable (optional) Active gauge cable Power supply C A B Technical Data Max input power Mains input Electrical supply Power consumption (max) Auxiliary terminals Air cooling fan Turbo pump Dimensions Mass 240 W 24 V d.c. 5 W 24V d.c. 3.6 W max 24V d.c. 160 W max 96 x 48 x 165 mm 0.3 kg Operating temp 0 to 40 C Storage temp -30 to 70 C Max ambient operating humidity Max operating altitude Enclosure rating 90% RH non-condensing at 40 C 2000 m IP20 IP40 when panel mounted TAG Controller Ordering information TAG Turbo and active gauge controller Linecord Linecord 2 m North Euro Plug Linecord 2 m UK Plug Linecord 2 m with US Plug Extension Cable XDD/DX/EXDC Extension Cable 1 m XDD/DX/EXDC Extension Cable 2 m XDD/DX/EXDC Extension Cable 5 m Power Supply D D D D D D D W power supply D Turbomolecular Pumps

268 TIC TURBO AND INSTRUMENT CONTROLLER A compact turbo controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control and data logging functions via a new Windows based PC program. The controller automatically recognises and supports one 24 V turbomolecular pump from the EXT/nEXT range. Cooling and vent valve support is provided directly from the controller. Mains backing pumps (up to nxds20i/rv12) may be controlled via an optional relay box. Two different power variants are available, 0W or 200W which determines the ramp speed of the turbo pump. In addition 200W models have the ability to power a 24V d.c. backing pump such as our XDD1 or nxds through a 15-way D socket. Turbo and instrument models add the ability to control up to 3 of our range of Active gauges. Features and Benefits TIC automatically recognises and controls one 24 V turbomolecular pump from either the next, DX or EXDC ranges. next and DX turbos have full serial communication with TIC and may be both configured and report status via TIC. Both mains and 24 V backing pumps may be controlled by TIC. For larger vacuum systems the TIC may control mains backing pumps, up to and including nxdsi and RV12, via the optional relay box. The optional external relay box enables mains backing pumps to be controlled and also provides interfaces for a turbo heater band, a backing line isolation valve and a logic bypass. See relay box section. In most instances, TIC systems may be simply and quickly configured using the range of standard cables on offer, there is therefore no need for the customer to prepare loom assemblies or relay boxes and special interfaces. TIC is packaged in a compact case and may be panel or rack (¼ 19 inch rack 3U) or bench mounted. With the addition of the bezel it becomes an attractive bench top instrument. The large 128 x 64 pixel backlit graphics LCD and mobile phone style menu system simplifies programming and with a choice of summary screens excellent visibility of displayed parameters is assured. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 269.

269 Technical Data TIC Turbo and Instrument Controller Back view Gauge inputs (FCC68 (RJ45) (turbo & instrument only) 2 Logic interface (25-way 'D' socket) 3 Backing pump 24 V (15-way 'D' socket) (TIC200 only) 4 Turbo Pump 24 V (15-way 'D' socket) 5 RS232/485 (9-way 'D' socket) 6 Earth stud (M4) 7 Mains input (CEE/IEC 320 plug) 8 Mains on/off switch 9 Auxiliary vent valve and fan terminals (24 V supply) 4-way screw term TIC Turbo and Instrument Configuration A TIC turbo and instrument controller, 200 W E F H G D B B C D E F G H J Mains cable/line cord WRG-S-NW25 Backing pump Turbomolecular pump Air-cooler XDD/DX/EXDC extension cable XDD/DX/EXDC extension cable (optional) Active gauge cable J C A B 270. Turbomolecular Pumps

270 Technical Data Units TIC Turbo and Instrument Controller Pump/TIC power W 0/200 EXT75DX Fast/Fast next 80 W Slow/Slow next 160 W Slow/Fast Mains input Electrical supply 90 to 264 V a.c. 47 to 63 Hz Power consumption (max) 215 VA Peak inrush current.3 1 V a.c./ V a.c. Earth stud M4 Auxiliary terminals Air cooling fan 24 V d.c. 3 W max, ACX70, ACX75 & ACX250H Vent valve 24 V d.c. 2 W max, TAV5 & TAV6 Dimensions Electronics housing mm 1 high x 5 wide x 245 deep Front panel mm 6 wide x 128 high Weight kg 3.5 Operating temp C +0 to +40 Storage temp C -30 to +70 Max ambient operating humidity 90% RH non-condensing at 40 C Max operating altitude m 3000 Electronic Design EN 6-1 Electromagnetic Compatibility EN Industrial Location, Class B Emissions Enclosure rating IP20 TIC Turbo and Instrument Controller Ordering information TIC Turbo & Instrument Controller, 0 W RS232 TIC Turbo & Instrument Controller, 200 W RS232 TIC Turbo Controller, 0 W RS232 TIC Turbo Controller, 200 W RS232 Extension Cable XDD/DX/EXDC Extension Cable 1 m XDD/DX/EXDC Extension Cable 2 m XDD/DX/EXDC Extension Cable 5 m Linecord Linecord 2 m UK Plug Linecord 2 m North Euro Plug Linecord 2 m With US Plug D D D D D D D D D D Communications Module TIC Profibus Communications Module D Active gauge cable 0.5 m Active gauge cable D m Active gauge cable D m Active gauge cable D m Active gauge cable D m Active gauge cable D Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 271.

271 TIC RELAY BOXES Two relay boxes are available for use with our TIC controllers: - A small backing pump relay box is compatible with TIC turbo only and turbo and instrument controllers - A small backing pump and instruments relay box is compatible with TIC turbo and instrument controllers The small backing pump relay boxes are able to control mains backing pumps up to RV12/ nxdsi. The relay box also controls a mains heater band and backing line isolation valve. In addition the small backing pump and instrument relay box includes three 250 V a.c. 3 A changeover relays, which are activated by the gauge open collector set point outputs. Features and Benefits Enables TIC to control mains backing pumps, up to and including nxdsi and RV12. Provides interfaces for a turbo heater band, a backing line isolation valve and a logic bypass. All relay boxes include a logic bypass facility for further system integration. TIC relay is packaged in a compact case and may be panel or rack (¼ 19 rack 3U) or bench mounted. TIC relay will operate from mains supplies with voltages up to 240 V a.c. Product Range TIC Relay Box 272. Turbomolecular Pumps

272 TIC Configuration A TIC200 turbo and instrument B Mains cable/line cord J C Relay box D APG0 Pirani gauge E AIGX Ion gauge F AIM Penning gauge H K G G H nxds scroll pump EXT/nEXT turbopump L N J K BX heater band TAV5 vent valve L ACX air cooler M M TIC logic interface cable Q N IEC320 M/F cable P P TIC logic interface cable T R Q XDD/DX/EXDC extension cable R TIC RS232 interface cable S Active gauge cable S C T PC with RS232 interface S A E D B B F Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 273.

273 TIC Relay Boxes Ordering information TIC Relay Box Sml Bkg TIC Relay Box Inst & Sml Bkg D D Linecord Linecord 2 m North Euro Plug Linecord 2 m UK Plug Linecord 2 m With US Plug Interface Cable TIC Logic Interface Cable 2 m TIC RS232 Interface Cable 2 m Extension Cable XDD/DX/EXDC Extension Cable 1 m XDD/DX/EXDC Extension Cable 2 m XDD/DX/EXDC Extension Cable 5 m D D D D D D D D Technical Data Mains input Connector type Max rating Earth stud Heater band outlet Connector type Max rating Fuse Backing pump outlet Connector type Max rating Fuse Setpoint connector Connector type Max rating Mating half (supplied) Backing line isolation valve connector Connector type Max rating TIC Relay Boxes CEE/IEC320 inlet 240 V a.c. M4 CEE/IEC320 inlet 240 V a.c. 1 A 20 mm x 5 mm, 250 V, 1 A type F CEE/IEC320 inlet 240 V a.c. A 20 mm x 5 mm, 250 V, A type T 12-way positronic PLC plug 250 V a.c. 3 A (resistive) Dry non conducting atmosphere only or 30 V d.c. 3 A (resistive) 12-way positronic PLC socket with hood 3-way DIN socket 24V d.c. 0.5 A Lead type 3 core 0,5 mm 2 Weight Operating temperature Storage temperature Max ambient operating humidity Max operating altitude Electronic design Enclosure rating 695 g 0 to 40 C -30 to +70 C 90% RH non-condensing at 40 C 3000 m EN6-1 IP Turbomolecular Pumps

274 STP MAGNETICALLY LEVITATED TURBOMOLECULAR PUMPS THE INTELLIGENT CHOICE The STP magnetically levitated turbomolecular pumps are the first choice for high-up time, hydrocarbon fre275e pumping. The multi-axis magnetic bearing system is used to suspend the rotor during operation, ensuring there is no risk of contamination while minimising vibration, noise and maintenance requirements. The STP pumps can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. They offer class leading pumping performance demonstrating exceptional levels of reliability, and are widely accepted in the market with the installed base of over 140,000 units worldwide. Features & Benefits Excellent pumping performance with speeds from 300 to 4500l/s covers all potential turbo pump applications. Advanced material and designs provide class leading performance in all classes. Automatic Balancing System (ABS) and Automatic Vibration Reduction (AVR) offer very low noise and vibration. Magnetic bearing system will allow installation in any angle. Field proven reliability. Low cost of ownership. Wide range of remote signal available- I/O Remote, RS232, RS485, Profibus (optional). RoHS Compliant and UL approved. Shop online at shop.edwardsvacuum.com Applications Metal/Oxide/Silicon Etch. Ion Implant. Film deposition CVD. Metrology and analytical instruments. Load lock and transfer chambers. PVD coating system. R&D applications. Heat treatment. Pump Range STP Turbo Pump Range Integrated controller Series - STP-iX455, STP-iXL455, STP-iXR1606, STP-iXR2206, STP-iXA2206, STP-iXA3306 and STP-iXA4506. Ultra High Vacuum (UHV) Series- STP-301, STP-451, STP- 603, STP-03. UHV Low Vibration Series - STP-L301, STP-L451. Advanced High Throughput Series - STP-H301, STP-H451, STP-A803, STP-A1303, STP-A1603, STP-A2203, STP-XA2703, STP-XA3203, STP-XA4503. STP turbo pump series provide a wide range of product offering to suit all high vacuum pumping applications. Turbomolecular Contact our customer service team Pumps 275.

275 STP series have 4 basic product ranges Integrated Controller Series The integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. STP-iX455, STP-iXL455, STP-iXR1606, STP-iXR2206, STP-iXA2206, STP-iXA3306, and STP ixa4506. Ultra High Vacuum (UHV) Series The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios. STP-301, STP-451, STP-603, STP-03. UHV Low Vibration Series The low vibration series has been designed to meet the low vibration requirements of advanced spectroscopy and metrology tools. It provides the advantage of having the vibration system built into the pump body. STP-L301, STP-L451. High Throughput Series The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 300 l s -1 to 4500 l s -1. STP-H301, STP-H451, STP-A803, STP-A1303, STP-A1603, STP-A2203, STP XA2703, STP-XA3203, STP-XA Turbomolecular Pumps

276 Proven magnetic bearing technology The rotor is entirely suspended by multi-axis magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. Oil Free All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements). Maintenance Free Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination. Vibration Free Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics. Safety Backup Bearings STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation. Corrosion Resistant To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput pumps have nickel coated rotors/stators and pump internals suitable for corrosive applications. Further enhanced levels of protection are available on request. Nitrogen Purging The corrosion resistant (C) pumps and the high throughput pumps have a nitrogen purge facility as standard, a constant flow of nitrogen through the pump dilutes corrosive gases minimising their damage to the pumps motor and sensor coils. TMS System The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life. Higher temperature setting option is available for even more harsh processes. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 277.

277 STP INTEGRATED CONTROLLER PUMP THE INTELLIGENT CHOICE The STP integrated controller pump series provide industry-leading performance and features a compact size integrated on-board control unit. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The pumping performance is improved by the newest developed revolutionary rotor design. This fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. Features & Benefits Excellent pumping performance with speeds from 300 to 4500 l/s. Compact design with fully integrated controller and power supply eliminates cabling requirement. Advanced rotor design technology offers class leading performance with compact size for all classes. Magnetic bearing system will allow installation in any angle. Automatic Balancing System (ABS) and Automatic Vibration Reduction (AVR) reduces vibration levels and provide stable operation. Various communication available- I/O Remote, RS232C, RS485, STP Link are standard ports, Profibus available as option. Protection level IP 54 (expect STP-iX455/iXL455). Easy installation. Applications Metrology and microscopic applications. Pre-clean process. Glass coating systems. Inline/Batch coating systems. Steel Degassing. Solid State Lighting. Semiconductor and FPD Etching systems. On-board Pump Range STP-iX STP-iX455 STP-iXL455 STP-iXR1606 STP-iXR2206 STP-iXA2206 STP-iXA3306C STP-iXA4506C 278. Turbomolecular Pumps

278 STP Integrated Series and the Environment Reducing Energy Use Reducing global energy consumption is key in the fight against global warming. In addition to minimising the energy our production facilities and offices consume, STP integrated series enable our customers to meet their energy reduction targets. Future proofing against carbon taxes and potentially qualifying for Green Giants. Example: In the production of coated products, existing vacuum pump energy could account for >50% of the total energy consumed by the process tool. With an installed base of 140,000 maglev turbo pumps globally in a wide range of applications, Edwards STP Maglevs typically reduce the power consumption of Diffusion by < 90%. Switching from Diffusion pumps to the latest Maglev turbos from Edwards on an 80 pump glass coating line will dramatically reduce your carbon footprint by over 3,000 tonnes of CO 2 e / year. Economising by switching to the new generation of STP Maglev turbo pumps Benefits of STP Maglev turbo pumps: Lower utility cost (Power and Water). No yearly services or oil changes. Increase pumping performance. Very low ambient noise and low vibration. Reduced space requirements. Edwards HT Diffusion Pump vs Magnetically Levitated Turbo Pump HT Diffusion Pump STP-iXA2206 % reduction CO 2 reduction per year (tonnes)** Power consumption 5.1 kw 0.2 kw* 96% 25.2 pa** Water consumption 400 lh lh -1 70% EHT16 Diffusion Pump vs Magnetically Levitated Turbo Pump HT16 Diffusion Pump STP-iXA3306 % reduction CO 2 reduction per year (tonnes)** Power consumption 9 kw 0.3 kw* 97% Pa** Water consumption 700 lh lh -1 83% 44.8 * At 300 sccm gas load power = 0.3 kw. ** Energy source units vs kw/h kg CO 2 = kwh Source: Department for Environment, Food, Rural Affairs, UK. STP-iX455 STP-iXL455 STP-iXR1606 STP-iXR2206 STP-iXA2206 STP-iXA3306 STP-iXA4506 Metrology PVD Process PVD Pre-Clean Glass Coating Inline/Batch coating Solid State Lighting Oxide Etch Metal Etch Solar Cells A photovoltaic solar cell (PV cell) is a semiconductor device which, in the presence of light, generates electricity. Solar cells provide clean renewable energy, producing zero air pollution, hazardous waste or noise. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 279.

279 Enabling Environmental Technology Biofuel Production The term biofuel applies to any solid, liquid or gaseous fuel produced from organic (once-living) matter. The word biofuel covers a wide range of products, some of which are commercially available today and some of which are still in research and development. Glass Coating Vacuum coated glass is primarily used to control the solar generated thermal energy load on buildings. Multiple layers comprising exotic metal oxides create infrared reflecting properties. Reducing the heat load on buildings reduces the need for electrical power to run air conditioning in hot countries. Conversely in cold countries these same reflective properties are used to retain heat and reduce fuel used for heating. We expect the trend to accelerate as sustainable building principles become part of International building design standards. offer considerable energy savings compared to the traditional multi-stage steam ejector systems, backed with liquid ring pumps. Solid State Lighting Solid-state lighting sources, such as light emitting diodes (LEDs), offer energy savings and environmental benefits compared to traditional incandescent or fluorescent lamps. In some cases they can offer a 95% energy saving over conventional lighting systems. Steel Degassing Vacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are used in the production of speciality steel alloys to reduce the levels of hydrogen, carbon and other impurities during the secondary steel making process. Edwards dry mechanical vacuum pumps STP-iXA4506 STP-iXR1606 STP-iXA4506 Peak Pumping Speed N ls -1 / 4000ls -1 / 4300ls -1 H ls -1 / 2700ls -1 / 2700ls -1 Compression Ratio N 2 > 8 H 2 3 Ultimate pressure STP-iXR1606 Peak Pumping Speed N 2 00 ls -1 / 1600 ls -1 H ls -1 / 1200 ls -1 Compression Ratio N 2 > 8 H 2 1 x 3-7 Pa STP-iXA2206C STP-iXA3306C STP-iXA2206C STP-iXA3306C Peak Pumping Speed Peak Pumping Speed N ls -1 N ls -1 / 3200 ls -1 H ls -1 H ls -1 / 2300 ls -1 Compression Ratio Compression Ratio N 2 > 8 N 2 > 8 H 2 1 x 4 H 2 1 x 3 Order Info Pg- 283 Order Info Pg- 281 Order Info Pg- 282 Order Info Pg Turbomolecular Pumps

280 STP Sectional View Showing Key Features Key 1. Advanced design rotor realizes high performance and compact size. (Reduced pump height and diameter) 2. Latest magnetic bearing technology provides lower power consumption compare to the existing models and stable operation 3. Upper and lower safety back up bearings support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush 4. Optimised holweck stages (except for STP-iX455 and ixl455 which have whole bladed rotor) bring high throughput performance. 5. Reliable on-board platform with reduced power consumption and optimum heat structure 6. IP54 rated specification for protection against water and dust. It is innovatively designed to work in humid and high ambient temperatures. 7. Efficient motor technology enables to reduce power consumption at high flow condition 8. Purge port can be fitted as an option for all models. (Standard on STP-iXA3306C and STP-iXA4506C) 9. Flexible communication interface - I/O remote, RS232C/RS485 and STP-link port are equipped as standard, Profibus is available as an option. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 281.

281 Performance Curves STP-iX455 Turbomolecular Vacuum Pump STP-iX455 Peak Pumping Speed N ls -1 /450 ls -1 H ls -1 /460 ls -1 Compression Ratio N 2 > 8 H 2 1 x 4 Ultimate pressure 6.5 x -6 order Pa Ordering information STP-iXL455 Turbomolecular Vacuum Pump STP-iXL455 Peak Pumping Speed N ls -1 /380 ls -1 H ls -1 /380 ls -1 Compression Ratio N 2 > 8 H 2 1 x 4 Ultimate pressure 6.5 x -6 order Pa Ordering information STP-iX455 Turbomolecular pump ISO0K STP-iX455 Turbomolecular pump ISO160K STP-iX455 Turbomolecular pump DN0CF PT640Z0 PT640Z020 PT640Z050 STP-iXL455 Turbomolecular pump ISO0K STP-iXL455 Turbomolecular pump ISO160K YT642Z030 PT642Z020 STP-iX455 Turbomolecular pump DN160CF PT640Z060 STP-iX455 Performance Curve STP-iXL455 Performance Curve (Torr) (Torr) (CR) 1 He (CR) 1 He H H (mbar) (mbar) (pa) (pa) (Torr) ( ls -1 ) 3 (ls -1 ) (pa) (Pa) (Torr) 282. Turbomolecular Pumps 1 N ls -1 (ISO160, VG150) 2 H ls -1 (ISO160, VG150) 3 N ls -1 (ISO0, VG0) 4 H ls -1 (ISO0, VG0) 1 N ls -1 (ISO160, VG150) 2 H ls -1 (ISO160, VG150) 3 He 390 ls -1 (ISO160, VG150) 4 N ls -1 (ISO0, VG0) 5 H ls -1 (ISO0, VG0) 6 He 280 ls -1 (ISO0, VG0)

282 STP-iXR1606 Turbomolecular Vacuum Pump STP-iXR1606 Peak Pumping Speed N 2 00 ls -1 /1600 ls -1 H ls -1 /1200 ls -1 Compression Ratio N 2 > 8 H 2 1 x 3 STP-iXR2206 Turbomolecular Vacuum Pump STP-iXR2206 Peak Pumping Speed N ls -1 H ls -1 Compression Ratio N 2 > 8 H 2 1 x 3 Ordering information Ordering information STP-iXR1606 Turbomolecular pump ISO160F YT790Z070 STP-iXR2206 Turbomolecular pump ISO250F YT850Z000 STP-iXR1606 Turbomolecular pump VG150 YT790Z080 STP-iXR2206 Turbomolecular pump VG250 YT850Z0 STP-iXR1606 Turbomolecular pump ISO200F YT790Z0 STP-iXR2206 Turbomolecular pump DN250CF YT850Z020 STP-iXR1606 Turbomolecular pump VG200 YT790Z020 STP-iXR2206 Turbomolecular pump ISO250F Profibus YT850Z030 STP-iXR1606 Performance Curve STP-iXR2206 Performance Curve Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 283.

283 STP-iXA2206 Turbomolecular Vacuum Pump STP-iXA2206 Peak Pumping Speed N ls -1 Ar 1900 ls -1 Compression Ratio N 2 > 8 H 2 1 x 4 STP-iXA3306C Turbomolecular Vacuum Pump STP-iXA3306C Peak Pumping Speed N ls -1 /3200 ls -1 H ls -1 /2300 ls -1 Compression Ratio N 2 > 8 H 2 2 x 3 Ultimate pressure > -7 Pa Ordering information Ordering information STP-iXA2206C ISO250F STP-iXA2206C VG250 STP-iXA2206C DN250CF STP-iXA2206C ISO250F Profibus YT8Z0 YT8Z020 YT8Z030 YT8Z040 STP-iXA3306C ISO250F STP-iXA3306C VG250 STP-iXA3306C ISO320F STP-iXA3306C VG300 STP-iXA3306C ISO250F with Profibus YT820Z020 YT820Z030 YT820Z040 YT820Z050 YT820Z060 STP-iXA3306C ISO320F with Profibus YT820Z070 STP-iXA2206 Performance Curve STP-iXA3306C Performance Curve 4 3 ls -1 STP-iXA3306 ISO250F/VG ls -1 H ls -1 Ar 2650 ls -1 N Pa Torr 4 3 ls -1 STP-iXA3306 ISO320F/VG ls -1 H ls -1 Ar ls -1 N Pa Torr 284. Turbomolecular Pumps

284 STP-iXA4506C Turbomolecular Vacuum Pump STP-iXA4506 Peak Pumping Speed N ls -1 /4000 ls -1 /4300 ls -1 H ls -1 /2700 ls -1 /2700 ls -1 Compression Ratio N 2 > 8 H 2 3 Ultimate pressure -7 Pa Ordering information STP-iXA4506C Turbomolecular pump ISO320F STP-iXA4506C Turbomolecular pump VG300 STP-iXA4506C Turbomolecular pump VG350 STP-iXA4506C Turbomolecular pump VG400 STP-iXA4506C Turbomolecular pump ISO320F Profibus STP-iXA4506C Turbomolecular pump VG300 Profibus STP-iXA4506C Turbomolecular pump VG350 Profibus YT780Z0 YT780Z0 YT780Z090 YT780Z030 YT780Z050 YT780Z1 YT780Z060 STP-iXA4506 Performance Curve 4 3 ls -1 2 STP-iXA4506C VG ls -1 H ls -1 Ar 3800 ls -1 N Pa Torr 4 3 ls -1 STP-iXA4506C ISO320F 2700 ls -1 H ls -1 Ar 4000 ls -1 N Pa Torr 4 3 ls -1 STP-iXA4506C VG350, VG ls -1 H ls -1 Ar 4300 ls -1 N Pa Torr Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 285.

285 Dimensions STP-iX455/iX455C Dimensions Ø160 D B A A Ø 180 B x M12 x 25 C 120 Inlet Flange ISO0 DN0CF VG0 ISO160 DN160CF VG150 A 130 (5.12) 152 (5.98) 182 (7.17) 180 (7.09) 203 (7.99) 235 (9.25) B 12 (0.47) 21 (0.83) 12 (0.47) 12 (0.47) 22 (0.87) 12 (0.47) C D STP-iXL455 Dimensions Power Cable Connector Outlet Port KF25 STP-iXR Inlet port flange VG150 VG200 VG250 ISO160F ISO200F ICF250F ICF203 ICF253 ICF305 ØA ØB C D ØE F G 8-Ø12 8-Ø15 12-Ø15 8-Ø12 12-Ø11 12-Ø11 20-Ø Ø Ø8.4 H I Turbomolecular Pumps

286 STP-iXR2206 Dimensions Inlet port flange VG200 VG250 ISO200F ISO250F ISF253 ICF305 A B C D E F G H I STP-iXA2206 Dimensions Inlet port flange VG250 ISO250F ICF305 ØA ØB C D E F G H I Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 287.

287 STP-iXA3306C Dimensions ØA 213 C 18º 19º º ØB D E F G I H Inlet port flange VG250 ISO250F VG300 ISO320F ICF305 ICF356 ØA ØB C D E F G H I STP-iXA4506C Dimensions No. Item 1 Height of water cooling port (IN) 2 Control Unit 3 Height of the purge port 4 Outlet port flange 5 Screw hole for securing the base 6 Purge port 7 Cooling water port 8 Height of water coolilng port (OUT) Inlet port flange VG300 VG350 VG400 ISO320F ISO400F ICF458 ØA ØB C D E F G H I Turbomolecular Pumps

288 Technical Data STP-iX455 STP-iXL455 Inlet flange ISO0K ISO160K ISO0K ISO160K Backing port size KF25 KF25 Pumping Speed N ls ls ls ls -1 H ls ls ls ls -1 Compression ratio N 2 > 8 H 2 > 1 x 4 Ultimate pressure Max working pressure Allowable backing pressure Rated speed 6.5 x -6 Pa 5 x -8 Torr 1.3 x -1 Pa 67 Pa rpm Run-up time to 90% rated speed Starting time < 6 min Mounting position Any orientation Cooling method Natural cooling (Air cooling Fan when baking or gas pumping) Lubricating oil Not necessary Backing pump 240 lmin -1 Leakage Magnetic Flux Axial direction 0 mgauss Radial direction 0 mgauss Ambient temperature range 0 to 40 C Storage temperature range -25 to 55 C Input voltage 48 V a.c. Maximum input current Weight 16 kg * The maximum gas flow is applicable under conditions that N 2 or Ar gas is pumped continuously with water cooling temperature between C and the backing pump (,000 lmin -1 size) is used. It is changed on condition. Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 289.

289 Inlet flange VG150/ISO160F /ICF203 STP-iXR1606 VG200/VG250/ISO200F /ISO250F/ICF253/ICF305 VG200/ISO200F /ICF253 STP-iXR2206 VG250/ISO250F /ICF305 Backing port size KF40 KF40 KF40 KF40 Pumping Speed N 2 00 ls ls ls ls -1 H ls ls ls ls -1 Ar ls ls -1 Compression ratio N 2 > 8 H 2 > 1 x 3 Ultimate pressure -7 Pa ( -9 Torr) Max working pressure - Allowable backing pressure Rated speed 266 Pa (2 Torr) 36,500 rpm Run-up time to 90% rated speed Starting time 8 min min Mounting position Any orientation Cooling method Water Cooling Lubricating oil Not necessary Backing pump - Leakage Magnetic Flux Axial direction - Radial direction - Ambient temperature range 0 to 40 C Storage temperature range -5 to 55 C Input voltage 200 to 240 V a.c. Maximum input current 750 VA Weight 48 kg * The maximum gas flow is applicable under conditions that N 2 or Ar gas is pumped continuously with water cooling temperature between C and the backing pump (,000 lmin -1 size) is used. It is changed on condition Turbomolecular Pumps

290 Inlet flange Backing port size Pumping Speed STP-iXA2206C ISO250F/VG250/ICF305 KF40 N ls -1 H ls -1 Ar 1900 ls -1 Compression ratio N 2 > 8 H X 4 Ultimate pressure -7 Pa ( -9 Torr) Max working pressure - Allowable backing pressure Rated speed 266 Pa (2 Torr) rpm Run-up time to 90% rated speed - - Starting time Mounting position Cooling method Lubricating oil 8 min Any orientation Water cooling Not necessary Backing pump - - Leakage Magnetic Flux - - Axial direction - - Radial direction - - Ambient temperature range 0 to 40 C Storage temperature range -25 to 55 C Input voltage - - Maximum input power Weight 1200 VA * The maximum gas flow is applicable under conditions that N 2 or Ar gas is pumped continuously with water cooling temperature between C and the backing pump (,000 lmin -1 size) is used. It is changed on condition. 62 Kg Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 291.

291 Inlet flange Backing port size Pumping Speed ISO250F/VG250/ ICF305 STP-iXA3306C ISO320F/VG300/ ICF356/VG350 STP-iXA4506C VG300 ISO320F VG350/VG400 N ls ls ls ls ls -1 H ls ls ls ls ls -1 Ar 2300 ls ls ls ls ls -1 Compression ratio KF40 N 2 > 8 H 2 2 x 3 1 x 3 Ultimate pressure -7 Pa ( -9 Torr) Max working pressure - - Allowable backing pressure 266 Pa (2 Torr) Rated speed rpm rpm Run-up time to 90% rated speed - Starting time minutes 11 minutes Mounting position Cooling method Lubricating oil Any orientation Water cooling Not necessary Backing pump > 1300 lmin -1 Leakage Magnetic Flux Axial direction < 0m Gauss Radial direction < 0m Gauss Ambient temperature range 0 to 40 C Storage temperature range -25 to 55 C Input voltage 200 to 240 ±% ACV Maximum input power 1500 VA 1700 VA Weight 80 kg 83 kg 9 kg 111 kg 4 kg/111 kg * The maximum gas flow is applicable under conditions that N 2 or Ar gas is pumped continuously with water cooling temperature between C and the backing pump (,000 lmin -1 size) is used. It is changed on condition Turbomolecular Pumps

292 STP ULTRA HIGH VACUUM PUMP THE INTELLIGENT CHOICE A new turbomolecular pump for use in surface science or high energy physics in research applications. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. Edwards rotor technology gives class-leading performance for maximum process flexibility. The low vibration STP-L series has been designed to meet the low vibration requirements of advanced spectroscopy and metrology tools. It provides the advantage of having the vibration system built into the pump body. Features and Benefits Advanced rotor technology. Oil free. Low vibration. Compact size. High reliability. Maintenance free. Corrosion resistant option available. RoHS compliant and UL approved. Applications Electron microscope Surface analysis tool Mass spectrometer Nuclear fusion tool Accelerator R&D Semiconductor tool Pump Range STP-Series STP-301/STP-451 STP-603/STP-03 STP-L Series STP-L301/L451 Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 293.

293 Performance Curves STP-301 Turbomolecular Vacuum Pump STP-301 Peak pumping speed N ls -1 H ls -1 Compression ratio N 2 > 8 H 2 > 2 x 4 Ultimate pressure -8 Pa STP-451 Turbomolecular Vacuum Pump STP-451 Peak pumping speed N ls -1 H ls -1 Compression ratio N 2 > 8 H 2 > 2 x 4 Ultimate pressure -8 Pa STP-301 Performance Curve STP-451 Performance Curve (Torr) N 2 2 He 4 1 N 2 2 He (CR) H 2 pumping speed (l s -1 ) H (Pa) (Torr) l s-1 N l s He l s H ( ls -1 ) STP-L N (mbar) (pa) Ordering information STP-451 Turbomolecular pump ISO160K STP-451 Turbomolecular pump VG150 STP-451 Turbomolecular pump DN160CF STP-451C Turbomolecular pump ISO160K Corrosion resistant STP-451C Turbomolecular pump VG150 Corrosion resistant STP-451C Turbomolecular pump DN160CF Corrosion resistant YT21B0460 YT2Z000 YT21B0080 YT21B0790 YT21AZ001 YT21B (Torr) Ordering information STP-301 Turbomolecular pump ISO0K STP-301 Turbomolecular pump VG0 STP-301 Turbomolecular pump DN0CF STP-301C Turbomolecular pump ISO0K Corrosion resistant STP-301C Turbomolecular pump VG0 Corrosion resistant STP-301C Turbomolecular pump DN0CF Corrosion resistant YT21B0350 YT21B0190 YT21B00 YT21B0660 YT21AZ000 YT21B Turbomolecular Pumps

294 STP-603 Turbomolecular Vacuum Pump STP-603 Peak pumping speed N ls -1 H ls -1 Compression ratio N 2 > 8 H 2 > 4 Ultimate pressure KF40 STP-03 Turbomolecular Vacuum Pump STP-03 Peak pumping speed N 2 00 ls -1 H ls -1 Compression ratio N 2 > 8 H 2 > 5 Ultimate pressure KF40 STP-603 Performance Curve STP-03 Performance Curve (Torr) (Torr) N 2 2 He N 2 2 He 3 H 2 3 H (CR) 6 (CR) (mbar) (mbar) (pa) N ( ls -1 ) 2 STP603 ( ls -1 ) 3 STP (pa) (Torr) (pa) (Torr) Ordering information Ordering information STP-603 Turbomolecular pump ISO160F YT39B0030 STP-03 Turbomolecular pump ISO200F YT390Z001 STP-603 Turbomolecular pump VG150 YT390Z003 STP-03 Turbomolecular pump VG200 YT390Z004 STP-603 Turbomolecular pump DN160CF YT390Z005 STP-03 Turbomolecular pump DN200CF YT39B00 STP-603C Turbomolecular pump ISO160F Corrosion resistant YT39B01 STP-03C Turbomolecular pump ISO200F Corrosion resistant YT39B0130 STP-603C Turbomolecular pump VG150 Corrosion resistant YT39AZ000 STP-03C Turbomolecular pump VG200 Corrosion resistant YT39AZ001 STP-603C Turbomolecular pump DN160CF Corrosion resistant YT39AZ002 STP-03C Turbomolecular pump DN200CF Corrosion resistant YT39AZ003 Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 295.

295 STP-L301 Turbomolecular Vacuum Pump STP-L301 Peak pumping speed N ls -1 H ls -1 Compression ratio N 2 > 8 H 2 > 2 x 4 Ultimate pressure -6 Pa STP-L451 Turbomolecular Vacuum Pump STP-L451 Peak pumping speed N ls -1 H 2 4 ls -1 Compression ratio N 2 > 8 H 2 > 2 x 4 Ultimate pressure -6 Pa STP-L301 Performance Curve (Torr) STP-L451 Performance Curve N 2 2 He 3 H 2 pumping speed (l s -1 ) N 2 2 He 3 H 2 (CR) (Pa) (Torr l s-1 N l s He 3 4 l s H -1 Ordering information N 2 (mbar (pa) STP-L451 Turbomolecular pump ISO160K STP-L451 Turbomolecular pump VG150 STP-L451 Turbomolecular pump DN160CF YT47B0150 YT47B0050 YT47B00 ( ls -1 ) 3 2 STP-L (pa) Ordering information (Torr) STP-L301 Turbomolecular pump ISO0K STP-L301 Turbomolecular pump VG0 STP-L301 Turbomolecular pump DN0CF STP-L301C ISO0 inlet STP-L301 ISO0 inlet STP-L301 DN0CF inlet STP-L301C DN0CF inlet YT47B0030 YT47B0020 YT470Z000 B B PT470Z000 PT47AZ Turbomolecular Pumps

296 Ø9 Ø145 Dimensions Ø9 STP-301 Dimensions Ø145 A Electrical connector Ø Ø9 8 x M8 x A Ø160 B 1 8 B C Outlet port Purge Port (only for corrosion resistance type) 99.5 C 8 x M8 x 16 B STP-451 Dimensions 45 A 99.5 Ø160 C 1 8 No. 1 Inlet port flange Item Bending dimension of the STP connection 2 cable 3 Screw hole of legs 4 Outlet port flange 5 Screw hole for earth 6 STP connector 7 Viewed from arrow A STP-451 Series ICF203 VG150 ISO160 ØA B C D STP-603 Dimensions A B C Electrical connector Outlet port Purge Port (only for corrosion resistance type) ISO200F Ø ISO200F STP-03 Dimensions Ø A Electrical connector ISO200F B Outlet port Ø260 C Purge Port (only for corrosion resistance type) Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 297.

297 Ø180 STP-L301 Dimensions Ø ISO0 ICF152 VG x Ø A B C Electrical connector Outlet port Purge Port (only with STP-L301C) Ø Ø160 Ø130 Ø x Ø Ø Ø160 Ø x Ø Ø185 VG0 35 Ø115 Ø152 ICF Ø1 Ø115 Ø130 ISO Ø Ø B 20 8 x M8 x 16 M4 x 8 ISO0 ICF152 VG x Ø Ø148.5 Ø x Ø Ø185 VG0 Ø115 Ø152 ICF152 Ø Ø Ø1 Ø115 ISO A 99.5 Ø115 Ø180 Ø156 Ø B 20 8 x M8 x 16 M4 x 8 STP-L451 Dimensions 20 A 99.5 Ø160 No. 1 Inlet port flange Item Bending dimension of the STP connection 2 cable 3 Screw hole of legs 4 Outlet port flange 5 Screw hole for earth 6 STP connector 7 Viewed from arrow A STP-L451 Series VG150 ISO0160 ICF203 ØA ØB ØC D E F G Turbomolecular Pumps

298 Technical Data Inlet flange STP-301 STP-451 STP-603 STP-03 STP-L301 STP-L451 ISO0 VG0 ICF152 ISO160 VG150 ICF203 ISO160F ISO200F ISO0 VG0 ICF152 Outlet port KF25 KF40 KF25 Purge port Pumping speed KF (only for corrosion resistance type) VG150 ISO160 ICF203 N ls ls ls ls ls ls -1 H ls ls ls ls ls -1 4 ls -1 Ar Compression ratio N 2 > 8 He 5 x 5 5 x 5 H 2 2 x 4 > 5 2 x 4 Ultimate pressure with bake out heating (VG/ISO flange) Ultimate pressure with bake out heating (ICF flange) Max allowable inlet pressure (ambient cooled) Max continuous outlet pressure (ambient cooled) 6.5 x -6 Pa (5 x -8 Torr) -6 Pa ( -8 Torr) -8 Pa ( - Torr) -7 Pa ( -9 Torr) -8 Pa ( - Torr) -6 Pa ( -8 Torr) 6.7 x -4 Pa (5 x -4 Torr) 6.7 x -4 Pa (5 x -4 Torr) 13 Pa (0.1 Torr) Rated speed rpm rpm rpm Starting time 3 min 6 min 3 min Max inlet flange temperature Input voltage Power consumption at start up AC 0~240 V ±% V a.c. 120 C 0 to 120 ±% V a.c. or 200 to 240 ±% V a.c. AC 0~240 V ±% V a.c. 350 VA 800 VA 350 VA Pump weight 11 kg 12 kg 31 kg 31 kg 14 kg Controller weight 8 kg 9 kg 8 kg Shop online at shop.edwardsvacuum.com Contact our customer service team Turbomolecular Pumps 299.

299 STP HIGH THROUGHPUT PUMP THE INTELLIGENT CHOICE Edwards high performance high throughput series, STP-H, STP-A and STP-XA pump series incorporate a Holweck drag stage that increases the pump throughput at low pressure. They have been designed for use in the harshest of semiconductor and flat panel applications. The pumps field proven reliability and class leading performance increase the maximum process flow capability and provide process flexibility. They give a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases. The range contains pumps with throughput speeds from 300 ls -1 to 4500 ls -1. Features and Benefits Advanced rotor technology gives industry leading pumping performance. Higher gas throughput gives maximised process flexibility. Optimised temperature distribution provides low deposition and increased operating life. Harsh process compatible. TMS (Temperature Management System) reduces particle accumulation inside the pump and provides extended overhaul intervals. Higher temp setting TMS is available for very harsh process. High reliability. RoHS Compliant and UL approved. Applications Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon. Film deposition CVD, PECVD, ECRCVD, MOCVD. Sputtering. Ion implantation source, beam line pumping end station. FPD Etch. Pump Range STP-H STP-H301C STP-H451C STP-A STP-A803C STP-A1303C STP-A1603C STP-A2203C STP-XA STP-XA2703C STP-XA3203C STP-XA4503C 300. Turbomolecular Pumps