Managing Current Issues in the Cleanroom

Transcription

1 St Louis, MO Thursday May 4, NAFA Technical Seminar Managing Current Issues in the Cleanroom

2 St Louis, MO Thursday May 4, NAFA Technical Seminar David Brande (919) A part of NNE-US, Inc Highway 70 West Suite B Clayton, North Carolina 27520

3 Background on HEPA Filters

4 Background on HEPA Filters Most Penetrating Particle Size (MPPS) early on thought to be 0.3um now considered to be 0.12um

5 HEPA Filter Mechanisms RELATIVE EFFECT OF PARTICLE COLLECTION MECHANISMS OVERALL EFFICIENCY 95 COLLECTION EFFICIENCY(%) INTERCEPTION DIFFUSION IMPACTION PARTICLE DIAMETER (MICRONS)

6 HEPA Filter Mechanisms THEORETICAL HEPA FILTER COLLECTION EFFICIENCY 0.3µm 99 COLLECTION EFFICIENCY(%) µm PARTICLE DIAMETER (MICRONS)

7 HEPA Filter Mechanisms THEORETICAL HEPA FILTER COLLECTION EFFICIENCY COLLECTION EFFICIENCY(%) 90 Actual PARTICLE DIAMETER (MICRONS)

8 HEPA Filter Mechanisms ACTUAL HEPA FILTER COLLECTION EFFICIENCY COLLECTION EFFICIENCY(%) PARTICLE DIAMETER (MICRONS)

9 Background on HEPA Filters

10 Background on HEPA Filters Testing at the FACTORY for grading of the filters A, B, C, D, E, F and G

11 Background on HEPA Filters

12 Background on HEPA Filters

13 Background on HEPA Filters

14 Filter Integrity Testing Unexplained High Background address the problem of mass leakage through the HEPA filter media when leak testing with a thermally-generated, oil-based aerosol challenge.

15 Filter Integrity Testing a phenomena we have coined as BLEEDTHROUGH not site specific, cannot be pinpointed

16 Filter Integrity Testing Bleedthrough area Bleedthrough area

17 Filter Integrity Testing Leakage directly through the media When comparing the thermal generator to Laskin nozzle type generators Leakage is not present when using the Laskin nozzle generators addressed in IEST 34.2-section 5.2, page 10

18 Filter Integrity Testing

19 Filter Integrity Testing

20 Filter Integrity Testing

21 Filter Integrity Testing FACTOR #1 Test equipment Thermal generator output had MMD distribution shift from 0.49 µm to 0.27 µm

22 Filter Integrity Testing FACTOR #2 Filter Manufacturers Push toward thin paper with a relationship between filter efficiency and pressure drop

23 Filter Integrity Testing Introduction of the Condensation Nuclei Counter Has revolutionized the industry

24 Filter Integrity Testing CNC 1.8 cm/sec (3.5 fpm) Grade 0.3 µm 0.26 µm mpps

25 Filter Integrity Testing CNC 2.5 cm/sec (5.0 fpm) Grade 0.3 µm 0.26 µm mpps

26 Filter Integrity Testing ACTUAL HEPA FILTER COLLECTION EFFICIENCY µm COLLECTION EFFICIENCY(%) 90 Test Aerosol PARTICLE DIAMETER (MICRONS)

27 Filter Integrity Testing CNC 0.26µm (Test aerosol) Grade 1.8 cm/sec 2.5 cm/sec

28 Filter Integrity Testing The production of HEPA media has moved away from MIL-STD-282 (sic MIL-F-51079B) media to a commercial HEPA product line. The HEPA product line includes traditional HEPA products as well as additional media designed to meet HEPA requirements at application conditions.

29 What Can You Do Today? Inform your people that HEPA filters have changed and buy ULPA filters in the future

30 Filter Integrity Testing ULPA ACTUAL HEPA FILTER COLLECTION EFFICIENCY COLLECTION EFFICIENCY(%) PARTICLE DIAMETER (MICRONS)

31 Airflow Pattern Testing

32 Nitrogen and Carbon Dioxide

33 CO 2 and Unidirectional Flow QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.

34 Polyethylene Glycol

35 QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.

36 QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.

37 Airflow Pattern Visualization LEGEND: HEPA Filter Blank

38 QuickTime and a DV - NTSC decompressor are needed to see this picture.

39 QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.

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46 Silicone Gel Issues QuickTime and a YUV420 codec decompressor are needed to see this picture.

47 Silicone Gel Issues QuickTime and a YUV420 codec decompressor are needed to see this picture.

48 Silicone Gel Issues QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.

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50 Silicone Gel Issue

51 Silicone Gel Issue

52 Silicone Gel Issue

53 Silicone Gel Issue

54 Who Ya Gonna Call Controlled Environment Testing Association 1500 Sunday Drive, Suite 102 Raleigh, NC (919)

55 Thank You St Louis, MO Thursday May 4, NAFA Technical Seminar