An Innovative Flow Sensor

NEW Separate-amplifier type digital flow sensor FD-V7 Series An Innovative Flow Sensor PPS PFA 5 liters 2 liters 5 liters 4 liters 2 liters

The debut of an innovative, Ultimate convenience has been separate-amplifier type flow First-in-the-world Featuring a flow indicator for visual display of the flow Flow display Alarm display Displays the flow condition with indicator movement that visually shows the instantaneous flow rate Displays the condition of detected errors such as water shortage Compact sensor head FD-P/F Industry thinnest Space-saving 2-mm width The sensor head has achieved the thinnest width in the industry 2 mm wide.* The housing width was shrunk to be as close as possible to the diameter of a pipe, saving piping space. This helps with downsizing the facility because several sensor heads can be mounted side-by-side onto pipes that are in close proximity to each other. * FD-Fxx model (PFA head) High-accuracy Hybrid detection system using eddy + ultrasonic The FD-V7 Series has adopted the eddy + ultrasonic detection method. It ensures stable and accurate flow rate measurement by detecting eddies with an ultrasonic device instead of a piezoelectric device that is easily affected by vibration. The fluidpassing section has a one-piece structure that makes maintenance easy. Conventional model: The sensor head requires a large mounting space. FD-P/F: The sensor head requires an extremely small mounting space. Internal structure Can be mounted onto pipes installed in close proximity to each other Receiver Eddy generator Flow Housing Transmitter Ultrasonic wave The sensor uses ultrasonic waves to detect eddies that are generated when the liquid flow hits the eddy generator. & Wide range of sensor head variations The sensor heads are divided into two types: The PPS head, a general-purpose type that is resistant to oil and chemicals, and the PFA (fluorine plastic) head that can be used for acids, alkalis or ultrapure water. The optimal sensor head can be selected from five models according to the target liquid and the flow rate. PPS PFA PPS head PFA head FD-P5 FD-P2 FD-P5 Type Detectable flow rate PPS.5 to 5 liters/min. 2 to 2 liters/min. 5 to 5 liters/min. FD-F4 FD-F2 Type PFA Detectable flow rate.4 to 4 liters/min. 2 to 2 liters/min. General-purpose type resistant to oil and chemicals [: FD-Pxx] (PPS: Polyphenylene sulfide) One-piece structure of fluorine plastic including tubes All surfaces in contact with liquid are made of fluorine plastic. The PFA head is suitable for controlling the flow of various strong chemicals such as the pure water used in the semiconductor manufacturing line. [: FD-Fxx] Heat resistant Up to 1 C The FD-V7 Series sensor head resists temperatures up to 1 C, enabling detection of hot liquid such as the hot water for heating plastic molding dies. Easy maintenance Convenient joint connector (PPS head only) The joint connector design facilitates screwing the sensor head side into the connector during the piping installation or replacing the sensor head for maintenance. * A 1 m extension cable is also available (optional, OP-51475). Clean pack The sensor head is shipped in a clean pack (vacuum-sealed pack). There is no problem with using it for flow control in the semiconductor process line. 2

separate-amplifier type flow sensor realized in the form of a space-saving, sensor that can be mounted anywhere. Fixing ring Connector-type wiring Connector cover A connector with a protection cover has been adopted. Easy-to-use, digital display amplifier FD-V First-in-its-class 2-level display & direct access The bright, viewer-friendly 2-level display allows you to adjust the setting value while checking the current flow. Pressing the manual button enables direct access to the setting value for adjustment. Selectable mounting DIN-rail and panel mounting available Two types of mounting methods can be selected: DIN-rail mounting and panel mounting. Since the amplifier is separate from the sensor head, it can be mounted to any viewer-friendly location according to the facility. Output indicator Current value display (red) MODE button Setting value To switch between the display (green) display and operation modes FD-V7 (P): DIN-rail mounting type Manual buttons To adjust the sensitivity manually DIRECT ACCESS To access the setting value directly FD-V75 (P): Panel mounting type 48 mm Easy connection, easy maintenance Connector-type wiring Both the sensor head cable and the power supply/input cable can be easily connected or disconnected with connectors. This design allows efficient cable connection and sensor mounting as well as easy maintenance. The FD-V7 (P) can be mounted easily onto the DINrail. It can be added to the existing facility easily. The FD-V75 (P) is designed to be mounted on a control panel. The amplifiers can be mounted in 24 mm 48 mm 24 mm contact with each other, thus saving space when several amplifiers are mounted. Selectable detection modes Various detection modes are featured as standard. The upper/lower limit detection mode produces independent outputs when upper and lower limit values are detected, the window mode indicates whether the detected value is within the upper and lower limit values, the cumulative flow mode checks the cumulative value, and the bank switching mode allows two settings to be switched with external input. The optimal mode can be selected according to the application. Upper/lower limit detection Selectable output modes Window Cumulative flow Bank switching Several output modes are featured as standard. The free-range analog output allows the range of analog outputs to be specified as desired, and the multiplied pulse output allows 5 selections of multiplication factors and can be used for the control of minute flow. Various needs for flow control can be satisfied. Abnormal alarm output ALM When detection is disabled due to water shortage or bubbles, the abnormal alarm is output. This output can be used to cancel the detection signal or to manage the error history. Power save function Eco If the numeral value display is unnecessary, the display can be turned off to be in economy mode. Normal display Shifts to economy mode in three minutes (The green bar display flashes.) Returns automatically to the normal display with the press of any button. Economy display Free-range analog output Multiplied pulse output 3

variations Sensor head Shape Type Detectable flow rate Inled/outled diameter FD-P5.5 to 5 liters /min. PT3/8 (1A) FD-P2 PPS 2 to 2 liters /min. PT1/2 (13A) FD-P5 5 to 5 liters /min. PT3/4 (2A) FD-F4.4 to 4 liters /min. ø3/8 inch (9.5 mm) PFA FD-F2 2 to 2 liters /min. ø1/2 inch (12.7 mm) Amplifier Shape Type Shape Type FD-V7 DIN-rail mounting FD-V75 Panel mounting Applications Hot liquid Cooling water Pure water/chemicals Controlling the flow in a mold heater Controls the flow of hot water sent from a mold heater. The FD-V7 Series resists temperatures up to 1 C, enabling detection of hot liquid such as the hot water for heating plastic molding dies. Pure water/chemicals Controlling the flow supplied to die casting dies Controls the flow of cooling water supplied to die casting dies through thin pipes. Since the sensor head is compact, several heads can be installed onto pipes installed in close proximity to each other. Controlling the supply of solution in a PC board cleaner Controls the flow of cleaning solution used in a single wafer processing cleaner. Since the PFA type sensor head is made of fluorine plastic, it can be used for detection of various chemical solutions and pure water. 4 Controlling the supply of wafer cleaning solution Controls the flow of the cleaning solution used for effective wafer cleaning and the pure water used for rinsing. Since the PFA type sensor head is made of fluorine plastic, it can be used for detection of various chemical solutions and pure water.

Specifications Sensor head Detectable flow rate Pressure resistance Detectable fluid Acceptable fluid temperature Applicable pipe diameter Display Ambient temperature Relative humidity Vibration Shock Material Weight Enclosure rating Accessory FD-P5.5 to 5 liters PT 3/8 The sensor head may become damaged when the liquid freezes inside the piping. FD-P2 2 to 2 liters 1. MPa Liquid (which does not erode PPS plastic) FD-F4.4 to 4 liters 1. MPa Liquid (including chemicals, corrosive liquid, and ultrapure water) PT1/2 PT3/4 ø3/8 inch (9.5 mm) Flow indicator: Green LED, Error display: Red LED to +6 C, No condensation 5 to 8%, No condensation 1 to 55 Hz, 1.5 mm double-amplitude in X, Y and Z directions, 4 hours respectively 1 m/s 2 in X, Y and Z directions, 1 times respectively (Total: 6 times) Glass-fiber reinforced PPS Approx. 175 g Approx. 18 g Approx. 2 g Including an M12 connector and.3-m cable M12 joint connector cable (3 m), one head connector FD-P5 5 to 5 liters to +1 C (No boiling) IP65 Piping section: New PFA, Housing: Polysulfone Approx. 135 g FD-F2 2 to 2 liters.7 MPa ø1/2 inch (12.7 mm) Approx. 14 g Including a connector and 3-m cable One head connector, two mounting brackets Amplifier NPN output PNP output Sensor head combination Power supply FD-V7 (DIN-rail mounting type)/fd-v75 (Panel-mounting type) FD-V7P (DIN-rail mounting type)/fd-v75p (Panel-mounting type) FD-P5 FD-P2 FD-P5 12 to 24 VDC, ripple (P-P) 1% max. FD-F4 FD-F2 At 12 V At 24 V Current consumption Normal display 15 mw (125 ma) max. 2 mw (83 ma) max. Economy mode 132 mw (11 ma) max. 17 mw (7 ma) max. Display method Operation indicator Detectable flow rate Resolution teresis Response time (chattering prevention function) Factors for multiplied display Cumulation reset/bank input Control output/multiplied pulse output Abnormal alarm output Analog output Repeatability Ambient temperature Relative humidity Vibration Material Weight Accessory 2-level display with a 3-digit, 7-segment LED (Character height: Upper level: 8 mm, red, Lower level: 5.7 mm, green), Display cycle: 5 updates/sec. (1 updates/sec. when the response time is.5 sec.) Red LED x 3 (for control output 1, control output 2 and abnormal alarm output).5 to 5 liters 2 to 2 liters.5 to 5 liters.4 to 4 liters 2 to 2 liters.1 liter.1 liter.1 liter.1 liter Adjustable Selectable from.5, 1, 2 and 5 seconds Selectable from 1x, 1x, 1x, 1x and 1x (based on resolution) Non-voltage input (contact, solid-state), input interval: 2 ms min. (can be switched between analog output/abnormal alarm input) NPN (PNP) open-collector 5 ma max. (NPN: 4 V max., PNP: 3 V max.), residual voltage: 1 V max., 2 outputs (N.O./N.C. selectable) NPN open-collector 2 ma max. (27 V max.), residual voltage: 1 V max. (can be switched between N.O. fixed/analog output and cumulation reset/bank input) 4 to 2 ma, Maximum load resistance: 26 Ω. The analog output range can be set as desired in increments of 1% of F.S. ±.5% of F.S. max. (at a fluid temperature of 2 C, and an ambient temperature of 25 C) to +5 C, No condensation 35 to 85%, No condensation 1 to 55 Hz, 1.5 mm double-amplitude in X, Y and Z directions, 2 hours respectively Housing and cover: Polycarbonate, Key top: Silicone rubber FD-V7: Approx. 85 g (including the power supply cable), FD-V75: Approx. 85 g (including the panel mounting bracket, front protection cover and power supply cable) FD-V7: DIN-rail mounting bracket, power supply cable, FD-V75: Panel mounting bracket, front protection cover and power supply cable Options Specification OP-51475 1-m connector cable (for the PPS head) OP-51476 Panel mounting kit for the FD-V75 (front protection cover and panel mounting bracket) 5

Input/output circuits FD-V7/75 input/output circuit Over-current protection circuit Input/output circuit Brown 12 to 24 VDC Black Load 5 to 4 VDC White Load 5 to 4 VDC V Analog output/external input/abnormal alarm output (switchable) Analog output circuit Main circuit Analog output (4 to 2 ma) V External input circuit (Cumulation reset/bank switching) Approx. 1 ma 22 K 22 K (Short-circuit current: 1 ma) Abnormal alarm output circuit Over-current protection circuit Load 5 to 27 VDC V FD-V7P/75P input/output circuit Analog output circuit External input circuit (Cumulation reset/bank switching) Over-current protection circuit Input/output circuit Brown 12 to 24 VDC Black (Control output1) (Control White output2) Load Load V Analog output/ external input (switchable) Main circuit Analog output (4 to 2 ma) V (shorting current 2mA) Brown 12 to 24 VDC *FD-V7P/V75P does not have abnormality alarm output. Selectable operation mode/output mode F-1 (Upper/lower limit detection mode) F-2 (Window mode) F-3 (Cumulative flow mode) Two detection points of instantaneous flow rate can be specified as desired. The hysteresis range can also be specified. The upper limit value (P2) and the lower limit value (P1) can be specified as desired. When the instantaneous flow rate goes out of range between P2 and P1, the sensor turns off. The hysteresis range can also be specified. This mode provides a pulse output proportional to the flow rate. This mode is used to specify two detection points of the cumulative flow rate. P2 P2 P2 P1 P1 Output 2 Output 1 P1 Output 1 Output 2 Output 1 Output 2 External input/ Reset from the control panel F-4 (Bank switching mode) Analog output/free-range analog output The upper/lower limit detection like the F-1 mode can be specified as two settings. These settings can be switched by turning the external input on or off. The hysteresis range can also be specified. When the external input is turned off P2 P1 When the external input is turned on B2 B1 In the F-1/F-2 mode, disabling the abnormal alarm output enables the analog output. The analog output produces output between 4 and 2 ma for values between the lower limit (A-L) and upper limit (A-H). A-L and A-H can be specified in 1% increments to full scale. The initial values are: A-L is % and A-H is 1%. When A-L is % and A-H is 1% (initial setting) Analog output (ma) 2 When A-L is 3% and A-H is 8% Analog output (ma) 2 Output 2 Output 1 Output 2 Output 1 4 4 Function selection for the pink cable The function of the pink cable in each mode varies as follows: (A-L) 1 (%) (A-H) 3 8 1 (%) (A-L) (A-H) Note: Accuracy is not guaranteed for values lower than the minimum value of the detectable flow rate. Detection mode F-1/F-2 F-3 F-4 When the abnormal alarm output is set to off When the abnormal alarm output is set to on Analog output Abnormal alarm output Cumulation reset input Bank input (The abnormal alarm output cannot be selected.) 6

Detectable flow rate accuracy (Detectable flow rate according to the liquid viscosity) FD-P5 FD-P2 FD-P5 FD-F4 FD-F2 Minimum flow rate (liter/min) Dynamic viscosity of target fluid (x 1-6 m 2 /s).3.5.7 1 2 3 4 5 7.3 1. 2.5.3 1..3 1. 2.5.3 1..4 1.4 3.5.3 1.4.5 2. 5..4 2. 1. 4. 1..8 4. 1.5 6. 15. 1.2 6. 2. 8. 2. 1.6 8. 2.5 1. 25. 2. 1. 3.5 14. 35. 2.8 14. Maximum flow rate (liter/min) 5. 2. 5. 4. 2. Flow characteristics (pressure loss) FD-P5 FD-P2 FD-P5 FD-F4 FD-F2.6.5.4.3.2.1 1 2 3 4 5 6 Flow (liter/min.) Dimensions FD-P5 (PPS type).6.5.4.3.2.1.6.5.4.3.2.1 5 1 15 2 25 1 2 3 4 5 6.5 1 1.5 2 2.5 3 3.5 4 4.5 5 1 15 2 25 Flow (liter/min.) Flow (liter/min.) Flow (liter/min.) Flow (liter/min.) 2-R (PT) 3/8.6.5.4.3.2.1 FD-F4 (PFA type) Cable length: 3 m (oil-resistant, flexible) ø3.6 (4-core x.18 mm 2 ).6.5.4.3.2.1 Unit: mm ø9.5 (3/8" pipe diameter) (Inner diameter 6.3) ø14 44.5 51.4 Cable length:.3 m (oil-resistant, flexible) ø3.6 (4-core x.18 mm 2 ) 45.4 26.3 11.5 R15 7.5 41.2 12.85 22 44.3 41.8 9.3 2 55 61 (175) 11.25 22.5 57.7 73 1 When mounting brackets are attached 7 min. Mounting brackets (2 pieces, included in the package) 24 17 Mounting hole position 9 5 4 x M3, d=4 4 x ø4.6 14 22 7 17.8 11.5 FD-P2 (PPS type) 2-R (PT) 1/2 FD-F2 (PFA type) ø12.7 (1/2" pipe diameter) (Inner diameter 9.5) Cable length: 3 m (oil-resistant, flexible) 51.4 ø3.6 (4-core x.18 mm 2 ) 14.2 11.25 24 ø14 44.5 47 Cable length:.3 m (oil-resistant, flexible) ø3.6 (4-core x.18 mm 2 ) 45.4 44.5 57.7 29 12.85 9.3 2 R15 7.5 55 61 (175) 43.9 22.5 Mounting hole position 77 112 9 When mounting brackets are attached 7 min. Mounting brackets (2 pieces, included in the package) 27 2 5 4 x M3, d=4 4 x ø4.6 14 22 7 2.7 12.85 7

Dimensions Unit: mm FD-P5 (PPS type) 2-R (PT) 3/4 Extension cable (included with the FD-P5/P2/P5) 51.4 16.7 ø14 11.3 ø14 44.5 Cable length:.3 m (oil-resistant, flexible) ø3.6 (4-core x.18 mm 2 ) 45.4 8.7 26.9 47.6 Cable length: 3 m (oil-resistant, flexible) ø3.6 (4-core x.18 mm 2 ) 16.9 27 52.4 49.9 Power supply cable (included with the FD-V7(P)/V75(P)) 13.7 22.5 27.7 57.7 77 114 19 25.5 ø3.9 (5-core x.2 mm 2 ) Cable length: 2 m 5 6.75 4 x M3, d=4 9 8.1 Amplifier FD-V7(P) (DIN-rail mounting type) When the DIN-rail is attached (83.8) When the mounting bracket is attached (77) Maximum when the cover is opened 24 12.9 1.5 (38.2) 33.2 15.2 135 max. 11.4 (41.3) 5 8.2 14.9 15 35.4 19.5 8.1 2 x ø3.4 22 28.5 15 2 x (4.4 x 3.4) Stainless steel 4.2 16 35.4 49.3 18.5 FD-V75(P) (Panel mounting type) Amplifier unit (78.2) 48 24 12.9 1.5 When attached to the panel (73 max.) Panel cutout 11.3 2 16 18.5 2 7.4 24.7 Panel thickness: 1 to 6 29.6 7.6 X 45 X = 24 x (A-1) + 22.2 A: No. of amplifiers to be mounted in contact Front protection cover 7.5 Panel mounting bracket 23.5 22.2 45 83.1 23.8 49 5 24.3 Visit our website for other Keyence products at http://world.keyence.com KEYENCE CORPORATI 1-3-14, Higashi-Nakajima, Higashi-Yodogawa-ku, Osaka, 533-8555, Japan Phone: 81-6-6379-2211 Fax: 81-6-6379-2131 Specifications are subject to change without notice. KEYENCE CORPORATI OF AMERICA Phone: 21-93-1 Fax: 21-93-99 KEYENCE DEUTSCHLAND GmbH Phone: 612-36 89- Fax: 612-36 89-1 KEYENCE (UK) LIMITED Phone: 198-6969 Fax: 198-696777 KEYENCE FRANCE S.A. Phone: 1 56 37 78 Fax: 1 56 37 78 1 KEYENCE ITALIA S.p.A. Phone: 2-668-822 Fax: 2-668-2599 KEYENCE SINGAPORE PTE LTD Phone: 6392-111 Fax: 6392-555 KEYENCE (MALAYSIA) SDN BHD Phone: 3-292-2211 Fax: 3-292-2131 KEYENCE (THAILAND) CO., LTD Phone: 2-369-2777 Fax: 2-369-2775 KEYENCE TAIWAN CO., LTD Phone: 2-2627-31 Fax: 2-2798-8925 KEYENCE (HG KG) CO., LTD Phone: 314-11 Fax: 314-18 KEYENCE INTERNATIAL TRADING (SHANGHAI) CO., LTD. Phone: 21-687575 Fax: 21-6875755 KEYENCE KOREA CORPORATI Phone: 2-563-127 Fax: 2-563-1271 KEYENCE CORPORATI, 23 113-1 B6E Printed in Japan