ZSE30A(F) ISE30A. 105 to 105 kpa 10 to 105 kpa to 1.05 MPa. (0 to 50 C) ±0.2% F.S. ±1 digit. NPN/PNP open collector

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Pressure Switch Model Selection Table Self-contained Type ZSE20(F) ZSE30A(F) ISE30A ZSE40A(F) ISE40A ZSE10(F) Model Fluid Calibration method Set pressure range Power supply voltage 105 to 105 kpa 10 to 105 kpa 0.105 to 1.05 MPa General pneumatic Push-button calibration 12 to 24 VDC ±10% (Ripple ±10%) Temperature characteristics (based on 25 C) ( 5 to 50 C) ( 5 to 50 C) Repeatability ±0.2% F.S. ±1 digit Hysteresis Hysteresis mode: Variable Window comparator mode: Variable Output Analog current output Display 1-color display Enclosure IP65 Note Sub screen setting Copy Auto shift Copy DIN rail mountable Copy 2 Page P.15 P.31 P.45 P.67

Best Pneumatics 8 ISE75 ISE75H General fluids ZSE80(F) ISE80(H) PS1000 PS1100 PS1200 General pneumatic ZSE20 ZSE30 ISE30 ZSE40 ISE40 ZSE10 Trimmer calibration Push-button calibration ZSE80 ISE80 0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa 110 to 110 kpa 10 to 111 kpa 0.105 to 1.1 MPa 0.105 to 2.2 MPa 0.1 to 0.45 MPa 0.1 to 0.4 MPa 100 to 0 kpa 0.1 to 1 MPa PS ISA3 ISA2 ( 5 to 50 C) (0 to 60 C) PSE IS ±0.5% F.S. ±0.2% F.S. ±1 digit ±1% F.S. ISG Fixed 4% F.S. or less Fixed 10% F.S. or less Hysteresis mode: Variable Window comparator mode: Variable 1 setting 2 settings PNP Analog current output 2-wire type IP67 IP65 R thread, URJ, TSJ Auto shift Modular type mountable Series ARM10/11 mountable Selectable pressure unit P.79 P.89 P.105 P.126 3

Pressure Switch Model Selection Table Sensor PSE53 PSE54 PSE550 PSE56 PSE57 Model Fluid General pneumatic General pneumatic General fluids Calibration method Set pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa 101 to 101kPa 0 to 1MPa 0 to 101kPa 100 to 100kPa 0 to 2kPa 0 to 1MPa 0 to 101kPa 100 to 100kPa 0 to 500kPa 100 to 100kPa 0 to 500kPa 0 to 1MPa Power supply voltage 12 to 24 VDC ±10% (Ripple ±10%) Temperature characteristics (based on 25 C) ( 10 to 60 C) PSE570 ( 10 to 60 C) PSE573/574 ±4% F.S. ( 10 to 60 C) Repeatability ±1% F.S. ±0.2% F.S. ±0.3% F.S. ±0.2% F.S. Hysteresis Output Analog current output Display Enclosure IP65 Note 4 Page P.134 P.137 P.140 P.143 P.146

Best Pneumatics 8 Model Selection Table Controller Model Sensor input amount Calibration method Set pressure range Power supply voltage Temperature characteristics (based on 25 C) Repeatability Hysteresis PSE200 4 inputs 0.1 to 1 MPa 10 to 101 kpa 101 to 101 kpa 10 to 101 kpa Push-button calibration ±0.1% F.S. ±1 digit PSE300 1 input 12 to 24 VDC ±10% (Ripple ±10%) Hysteresis mode: Variable Window comparator mode: Fixed (3 digits) ±0.5% F.S. (0 to 50 ) 0.1 to 1 MPa 10 to 101 kpa 101 to 101 kpa 10 to 100 kpa ±0.1% F.S. 50 to 500 kpa 0.2 to 2 kpa Hysteresis mode: Variable Window comparator mode: Fixed (3 digits) ZSE20 ZSE30 ISE30 ZSE40 ISE40 ZSE10 ZSE80 ISE80 PS ISA3 ISA2 PSE IS ISG Output 1 CH: 2 outputs 2 to 4 CH: 1 output 2 outputs Analog current output Display 1-color display Enclosure Note Front only IP65 The rest Auto shift Channel to channel copy Selectable pressure unit DIN rail mountable Auto shift Selectable pressure unit Current input possible Page P.149 P.155 5

Pressure Switch IS10 IS3000 Model Selection Table Positive Pressure ISG11 /ISG21 Model Fluid General pneumatic Calibration method Set pressure range 0.1 to 0.4 MPa (Option 0.1 to 0.6 MPa) 0.1 to 0.7 MPa 0.02 to 0.3 MPa Voltage Up to 100 VDC Up to 100 VAC Up to 125 VDC Up to 250 VAC Repeatability ±0.05 MPa ±0.05 MPa ±3%F.S. Hysteresis (Calibration range of ISG) 0.08 MPa or less 0.05 MPa or less 0.015 to 0.2 MPa Contacts 1a 1ab Drip-proof type Note Micro-load type available Available indicator light Page Page 167 Page 170 6

Best Pneumatics 8 Negative Pressure ISG12 /ISG22 ISG13 /ISG23 ISG19 /ISG29 Pressure adjustment screw General fluids Up to 220 VDC Up to 440 VAC General pneumatic 0.05 to 0.7 MPa 0.1 to 1.0 MPa 10 to 100 kpa 27 to 80 kpa 4.5 to 28 VDC (-115) 100 VAC/DC or less (-121) ±10% F.S. ZSE20 ZSE30 ISE30 ZSE40 ISE40 ZSE10 ZSE80 ISE80 PS ISA3 ISA2 PSE IS ISG 0.02 to 0.35 MPa (Without pointer scale) 0.02 to 0.45 MPa (With pointer scale) 0.03 to 0.4 MPa (Without pointer scale) 0.03 to 0.6 MPa (With pointer scale) 7 to 53kPa 15 kpa or less (-115) 20 kpa or less (-121) 1a1b NPN (-115) 1a (-121) Possible with ISG2 (Equivalent to IP44) 2ab contact type (Semi-standard) With light (Refer to Series IS2761.) Compliant with ZM ejector Page 172 Page 178 7

Pressure Switch Application Example When selecting a model, please thoroughly review and confirm beforehand, that the model will meet the necessary specification. Suction Verification Sensor installed close to a pad (No. 1) PSE54 + PSE200 Series Sensor installed close to a pad (No. 2) PS1100 Series Due to the small size, the sensor can be installed close to a pad. Calibration is easy with the auto-preset. Easy suction verification is possible. Response delays, caused by piping will not be a factor, due to the close proximity of the sensor to the pad. Suction verification of workpieces containing moisture ZSE80F Series Suction verification of workpieces containing moisture PSE570 Series Suction of a stainless diaphram enables to detect, even though water or oil is adhered to a workpiece and then made ingress to the sensing part. Installation of a group of sensors in a manifold style PSE54 Series Placement Verification Confirmation of workpieces placement easily ZSE40AF Series Easy placement verification is possible by detecting the back pressure at the nozzle. 8

Pressure Switch Application Example Supply Pressure Confirmation Confirmation of supply pressure in air line Series The line pressure can be adjusted by monitoring the digital readout. Which provides a visual verification of the operating pressure. The output can be programmed to respond to supply pressure drops, etc. Confirmation of atmospheric pressure for a load lock chamber ZSE80F Series Confirmation of supply pressure of cleaning lines PSE560 + PSE300 Series The supply pressure of water, oil, etc. can be confirmed by using a sensor for gas and fluids. Confirmation of working pressure of hydraulic cylinder ISE80 Series ZSE20 ZSE30 ISE30 ZSE40 ISE40 ZSE10 ZSE80 ISE80 PS ISA3 ISA2 PSE IS ISG Verification of pressure in a load lock chamber (vacuum spare chamber of the main chamber) Discharge pressure control for compressor PSE570 Series Leak Test Inspection of a radiator PSE532 + PSE300 Series A low pressure sensor (PSE532- ) is used to detect minute differences. The auto shift reduces the influence of fluctuations in the supply pressure. 9

Pressure Switch Application Example Liquid Coolant Pressure Control Liquid pressure control of a gun drill ISE75(H) Series Liquid coolant pressure control PSE570 Series Monitoring Filter Clogging Liquid Level Detection PSE550 Series PSE550 Series The filtration and replacement periods can be controlled by monitoring the clogging of the filter. Can detect the level of a liquid through changes in the purge pressure. Air Flow Control PSE550 Series Can monitor the air flow in the duct and control air blasts. 10