To order spares for systems not under warranty contact:

Press the model number to link to desired product 600 623, 626 655, 656 681, 682, 683 691 693 950 Holders To order spares for systems under warranty contact: To order spares for systems not under warranty contact: jeanies@gatan.com lperry@gatan.com

Service Parts, Spares and Consumables - Model 600 P/N Description Picture Category & Products Model 600 Standard Octogun 600.01021 Cathode Cover 600 Standard Octogun 600.01070 High Voltage End Cap Assembly (Excludes Teflon Connector 600.05310) 600 Standard Octogun 600.01120 Ceramic Insulator 600 Standard Octogun 600.01130 Anode 600 Standard Octogun 600.01153 Eight Aperture Cathode, Stainless Steel, Standard 600 Standard Octogun 600.01160 Cathode Screw, 1/Pack 600 Standard Octogun 600.15002 Octogun O-Ring kit, Viton (For all 4 guns) 600 Standard Octogun Page 2 of 86

Service Parts, Spares and Consumables - Model 600 Model 600 Whisperlok Raise/Lower System 04516 Flanged Fluoroseal with Lip 600 Whisperlok Raise/Lower System 600.15004 Whisperlok O-Ring kit (2 Assemblies, compatible with RIBE) 600 Whisperlok Raise/Lower System Model 600 Specimen Chamber 05517 Viewing Port Window, 50mm Diameter x 3mm Thickness 600 Specimen Chamber 06225 Sputter Shield Window, 32mm Diameter x 2.5mm Thickness 600 Specimen Chamber 600.05310 Teflon Connector 600 Specimen Chamber 600.15006 Airlock O-ring Kit Viton (For 2 assemblies) (2x#026, 2x#117, 2x#120, 2x#122, 2x#136, 4x#154, 2x#224) Missing Image 600 Specimen Chamber 600.15011 Main Work Chamber O-Ring Kit Viton 600 Specimen Chamber Page 3 of 86

Service Parts, Spares and Consumables - Model 600 Model 600 Penning Gauge 600.22150 Penning Gauge Repair Kit (Batch #'s 26-28, o-rings x3 & P/N 600.22130 cathode) Missing Image 600 Penning Gauge 600.22160 Penning Gauge Repair Kit (Batch #'s 29 & up, o-rings x3 & P/N 600.22030 cathode) (Also used in PIPS and IBC, Batch #'s 1-6) 600,681,691 Gauges - MDP Manifold Model 600 Specimen Holders 600.380A3 Standard Specimen Holder, 3mm 600 Specimen Holders 600.380B3 Cold Stage Specimen Holder, 3mm 600 Specimen Holders 600.380C3 Specimen Holder Short Base, 3mm Missing Image 600 Specimen Holders 600.38200 Plate Retaining Screw (00 90x1/8) x12 600 Specimen Holders 600.38211 Specimen Support Plate, 3mm Molybdenum, 5/Pack 600 Specimen Holders Page 4 of 86

Service Parts, Spares and Consumables - Model 600 600.38221 Specimen Clamping Plate, 3mm Molybdenum, 5/Pack 600 Specimen Holders Page 5 of 86

Service Parts, Spares and Consumables - Model P/N Description Picture Category & Products 03368 28V, 170mA Lamp (Used in old Disc Cutter also in old 656 Dimple Grinder and Microscope),656 Lamps 656.07510 18V Lamp for Stereo Microscope on Dimple Grinder, 5/Pack, 656 Lamps 05300 Microscope Power Cord Electronics.03004 Ultrasonic Cutting Head (Includes Threaded Adapter) Electronics.04050 Coil Assembly (Transformer) Electronics.01240 Dial Indicator (Includes adapter) Mechanical.03590 Washers, Copper, 5/Pack Mechanical Page 6 of 86

Service Parts, Spares and Consumables - Model.01090 Specimen Table (Standard, non-magnetic).01101 Slurry Retaining Ring (Includes o-ring).07580 Slotted Specimen Mount, 4/Pack.06300 Cutting Tool Wrench.05082 Magnetic Base.06031 Base for Hexagonal Indexing Specimen Table.05070 Specimen Table (X-Y Positioning) Page 7 of 86

Service Parts, Spares and Consumables - Model.07020 Rectangular Alignment Plate 4X5mm (Teflon jaw). (This item fits the.07100 Vice below).07100 Clamping Vice.07110 Brass Tubes, 3mm Dia x 33mm Long, 10/Pack.07130 Epoxy Mixing Cup (Teflon).07140 Teflon Mold.06200 Syringe Kit.03031 Circular Cutting Tool, 3.0mm Disc Diameter Cutting Tools Page 8 of 86

Service Parts, Spares and Consumables - Model.03032 Circular Cutting Tool, 2.7mm Disc Diameter Cutting Tools.03033 Circular Cutting Tool, 2.3mm Disc Diameter Cutting Tools.03034 Circular Cutting Tool, 0.25mm Hole Diameter Cutting Tools.03035 Circular Cutting Tool, 0.5mm Hole Diameter Cutting Tools.03036 Circular Cutting Tool, 2mm Hole Diameter Cutting Tools.03037 Circular Cutting Tool, 4mm Hole Diameter Cutting Tools.03038 Circular Cutting Tool, 1mm Hole Diameter Cutting Tools Page 9 of 86

Service Parts, Spares and Consumables - Model.03039 Circular Cutting Tool, 1.1mm Hole Diameter Cutting Tools.03151 Rectangular Cutting Tool, 1mm x 2mm Cutting Tools.03152 Rectangular Cutting Tool, 1mm x 4mm Cutting Tools.03153 Rectangular Cutting Tool, 1.4mm x 2.16mm Cutting Tools.03154 Rectangular Cutting Tool, 2mm x 15mm Cutting Tools.03155 Rectangular Cutting Tool, 2.8mm x 7.6mm Cutting Tools.03156 Rectangular Cutting Tool, 3.5mm x 6.5mm Cutting Tools Page 10 of 86

Service Parts, Spares and Consumables - Model.03157 Rectangular Cutting Tool, 4mm x 8mm Cutting Tools.03158 Square Cutting Tool, 5mm Cutting Tools.03159 Square Cutting Tool, 10mm Cutting Tools.03160 Square Cutting Tool, 12mm Cutting Tools.03161 Rectangular Cutting Tool, 2.1mm x 8mm Cutting Tools.03168 Rectangular Cutting Tool, 0.8mm x 4.5mm Cutting Tools.03200 Circular Cutting Tool, 0.4mm Hole Diameter Cutting Tools Page 11 of 86

Service Parts, Spares and Consumables - Model.03201 Circular Cutting Tool, 0.6mm Hole Diameter or 0.3mm Disc Diameter Cutting Tools.03209 Circular Cutting Tool, 2.5mm Disc Diameter Cutting Tools.03210 Circular Cutting Tool, 0.8mm Hole Diameter or 0.5mm Disc Diameter Cutting Tools.03211 Circular Cutting Tool, 8mm Hole Diameter Cutting Tools.03212 Circular Cutting Tool, 1.3mm Hole Diameter Cutting Tools.03301 Rectangular Cutting Tool, 1mm x 3mm Cutting Tools.03302 Rectangular Cutting Tool, 1.5mm x 4mm Cutting Tools Page 12 of 86

Service Parts, Spares and Consumables - Model.03331 Circular Cutting Tool, 1.5mm Disc Diameter Cutting Tools.03334 Circular Cutting Tool, 1.8mm Disc Diameter Cutting Tools.03335 Circular Cutting Tool, 2mm Disc Diameter Cutting Tools.03336 Circular Cutting Tool, 1.8mm Hole Diameter Cutting Tools.03337 Circular Cutting Tool, 1.5mm Hole Diameter or 1.0mm Disc Diameter Cutting Tools.03338 Circular Cutting Tool, 5mm Disc Diameter Cutting Tools.03339 Circular Cutting Tool, 7mm Disc Diameter Cutting Tools Page 13 of 86

Service Parts, Spares and Consumables - Model.03340 Circular Cutting Tool, 10mm Disc Diameter Cutting Tools.03341 Circular Cutting Tool, 4mm Disc Diameter Cutting Tools.07010 Rectangular Cutting Tool, 4mm x 5mm Cutting Tools.07150 Rectangular Cutting Tool, 2mm x 3mm Cutting Tools.07180 Rectangular Cutting Tool, 2.5mm x 3mm Cutting Tools.07230 G-1 Epoxy with Hardener (18 grams resin, 2 grams hardener) Consumables.07270 G-2 Epoxy with Hardener (18 grams resin, 2 grams hardener - No Carcinogens) Consumables Page 14 of 86

Service Parts, Spares and Consumables - Model.00700 320 Cutting Grit, Container of 0.5kg Consumables.00710 600 Cutting Grit, Container of 0.5kg Consumables.00720 800 Cutting Grit, Container of 0.5kg Consumables 06445 Viton O-ring #033 for Slurry Retaining Ring O-Rings Page 15 of 86

Service Parts, Spares and Consumables - Models 623, 626 P/N Description Picture Category & Products Model 623 Disc Grinder 623.00071 Knob Assembly 623 Disc Grinder 623.00082 Specimen Mount, Pyrex, 4/Pack (Used with Dimple Grinder 15mm wheels) 623 623.00084 Specimen Mount, Stainless Steel, 4/Pack (Used with Dimple Grinder 15mm wheels) 623 623.00152 Specimen Mount, Pyrex, 4/Pack (Used with Dimple Grinder 20mm wheels) 623 623.00154 Specimen Mount, Stainless Steel, 4/Pack (Used with Dimple Grinder 20mm wheels) 623 623.40021 Mounting Spacer (Required for the Hot Plate with 623.00152 & 623.00154) 623 623.01100 Specimen Mounting Wax (Crystal Bond) (12 Rods, 3.5mmx32mm) 623,656,960,961 Supplies, Consumables Page 16 of 86

Service Parts, Spares and Consumables - Models 623, 626 623.30021 Glass Lapping Plates, 3/Pack 623 623.30030 Lapping Discs Kit of 5µm, 15µm and 40µm, 20/Pack Each Size 623 Consumables 623.30031 Lapping Discs, 5µm, 60/Pack 623 Consumables 623.30032 Lapping Discs, 15µm, 60/Pack 623 Consumables 623.30033 Lapping Discs, 40µm, 60/Pack 623 Consumables Model 626 Cryotransfer System 626.13361 Clipring, +/- 70 Degrees 626 Cryotransfer 626.53204 Clipring Tool, +/- 70 Degrees 626 Cryotransfer Page 17 of 86

Service Parts, Spares and Consumables - Models 623, 626 626.03141 Specimen Grid Holder, 5/Pack (Lid not included) 626 626.03151 Specimen Grid Holder Transfer Tool, 5/Pack 626 626.04046 Clipring, Aluminum, 5/Pack 3mm inner diameter 626 626.04047 Clipring, Phosphor Bronze, 5/Pack 3mm inner diameter 626 626.04190 Clipring Insertion Tool 626 626.07000 Cryo-Storage System with 5 Liter Dewar for up to 100 Specimens 626 626.07040 Specimen Grid Holder Top Cover, 5/Pack 626 Page 18 of 86

Service Parts, Spares and Consumables - Models 623, 626 626.07101 Cryo-Storage Bottle with Dewar Hook, 5/Pack Missing Image 626 Page 19 of 86

Service Parts, Spares and Consumables - 655, 656 P/N Description Picture Category & Products Model 655 Dry Pumping Station 655.00005 O-ring Kit Missing Image 655 655.00361 Spare Diaphragms, 4/Pack (Supplied with 04213 screws for KNF pumps) 655 Consumables Model 656 Dimple Grinder 656.07520 Fuse 1/2A Slow Blow 120V, 5/Pack 656 Fuses 656.07530 Fuse 1/4A Slow Blow 220V, 5/Pack 656 Fuses 03368 28V, 170mA Lamp (Used in old Disc Cutter also in old 656 Dimple Grinder and Microscope),656 Lamps 656.07510 18V Lamp for Stereo Microscope on Dimple Grinder, 5/Pack, 656 Lamps 09165 Rocker On-Off Switch 250V, 15A 656 Electronics Page 20 of 86

Service Parts, Spares and Consumables - 655, 656 05074 Push Button Switch, Momentary (For lamp) 656 Electronics 05075 Push Button Switch, Alternate Action (Arm, Table, Auto) 656 Electronics 656.01050 Grinding Wheel Motor 656 Electronics 656.03140.FR Turntable Motor Assembly (batch 1-3) (O-ring coupling) (For very old 656 - Dating back to 1986) 656 Electronics 656.03160 Turntable Motor with Gear Head (For batch 8 & up, after around 1990) 656 Electronics 656.03170.FR Turntable Motor with Gear Head (Batch 4 through 7 only, until around 1990) (Hex Nut coupling) 656 Electronics 656.03300 Main PC Board, CE 656 Electronics Page 21 of 86

Service Parts, Spares and Consumables - 655, 656 04488 Bearing, 10mmX19mmX7mm 656 Mechanical 656.01260 Grinding Wheel Clamping Screw 656 Mechanical 656.01500 Grinding Wheel Bearing Assembly 656 Mechanical 656.03150 Turntable Motor Housing for 656.03160 (Batch 8 & up) 656 Mechanical Page 22 of 86

Service Parts, Spares and Consumables - 655, 656 Model 656 Grinding/Polishing Wheels 656.07061 Spherical Grinding Wheel, Phosphor Bronze, 10mm, 4/Pack Missing Image 656 Polishing Wheels 656.07062 Spherical Grinding Wheel, Stainless Steel, 10mm, 4/Pack 656 Polishing Wheels 656.07063 Spherical Grinding Wheel, Phosphor Bronze, 15mm, 4/Pack 656 Polishing Wheels 656.07064 Spherical Grinding Wheel, Stainless Steel, 15mm, 4/Pack 656 Polishing Wheels 656.07065 Spherical Grinding Wheel, Phosphor Bronze, 20mm, 4/Pack 656 Polishing Wheels 656.07066 Spherical Grinding Wheel, Stainless Steel, 20mm, 4/Pack 656 Polishing Wheels 656.07350 Flat Grinding Wheel, Phosphor Bronze, 15mm, 4/Pack 656 Polishing Wheels Page 23 of 86

Service Parts, Spares and Consumables - 655, 656 656.07511 Polishing Wheel, 10mm, 4/Pack (Requires Felt Ring 656.07541) Missing Image 656 Polishing Wheels 656.07512 Polishing Wheel, 15mm, 4/Pack (Requires Felt Ring 656.07542) 656 Polishing Wheels 656.07513 Polishing Wheel, 20mm, 4/Pack (Requires Felt Ring 656.07543) Missing Image 656 Polishing Wheels 656.07541 Felt Polishing Ring, 10mm, 15/Pack (For Polishing Wheel 656.07511) 656 Polishing Wheels 656.07542 Felt Polishing Ring, 15mm, 15/Pack (For Polishing Wheel 656.07512) 656 Polishing Wheels 656.07543 Felt Polishing Ring, 20mm, 15/Pack (For Polishing Wheel 656.07513) 656 Polishing Wheels Model 656 Specimen Platforms 623.00082 Specimen Mount, Pyrex, 4/Pack (For 15mm wheels) 656 Platforms Page 24 of 86

Service Parts, Spares and Consumables - 655, 656 623.00084 Specimen Mount, Stainless Steel, 4/Pack (For 15mm wheels) 656 Platforms 623.00088 Specimen Mount, Stainless Steel, 4/Pack (For 22mm Disc Grinder) Missing Image 656 Platforms 623.00152 Specimen Mount, Pyrex, 4/Pack (For 20mm wheels) 656 Platforms 623.00154 Specimen Mount, Stainless Steel, 4/Pack (For 20mm wheels) 656 Platforms 656.01160 Specimen Mount, Stainless Steel (For 10mm wheels) 656 Platforms 656.01400 Centering Ring (For use with 623-0008X Specimen Mount) 656 Platforms 656.01410 Centering Ring (For use with 623-0015X Specimen Mount) 656 Platforms Model 656 Consumables Page 25 of 86

Service Parts, Spares and Consumables - 655, 656 06995 Cubic Boron Nitride (KGBN) Polishing Compound, 5gm syringe 0-2µm (#1MUS) 656 Consumables 06996 Cubic Boron Nitride (KGBN) Polishing Compound, 5gm syringe 2-4µm (#5MUS) 656 Consumables 06527 Cubic Boron Nitride (KGBN) Polishing Compound, 5gm syringe 4-6µm (#3MUS) 656 Consumables 623.01100 Specimen Mounting Wax (Crystal Bond) (12 Rods, 3.5mmx32mm) 623,656,960,961 Supplies, Consumables 656.04010 Alumina Polishing Suspension 0.05µm (2oz) 656 Consumables Page 26 of 86

Service Parts, Spares and Consumables - 681, 682, 683 P/N Description Picture Category & Products 03072 Fuse 5 x 20mm, 3.15A (MDP Driver Card) Cabinet, Electronics Fuses 03511 Fuse 1.0A Slow Blow (5x20mm) (Distribution Board) Cabinet, Electronics Fuses 03602 Fuse, Plug-in Type, 3.0A (Distribution Board) Cabinet, Electronics Fuses 03718 Fuse 3AG Slow Blow 3A, 110V Cabinet, Electronics Fuses 03722 Fuse 3AG Slow Blow 1-1/2A, 220V Cabinet, Electronics Fuses 681.01260 Lamp 2.7V T-1, Trimmed (Used in IBC, PIPS and in Ilion+ Microscope) 681, Electronics, Lamps 07643 Lamp, Lens end 682 Electronics, Lamps Page 27 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.00220 Solenoid Valve Assembly Electronics 03667 Solenoid Valve 2-Way Electronics 03668 Solenoid valve 3-Way Electronics 04847 Solenoid Valve 3-Way (SV4 or SV5 Shutter or Whisperlok ) Electronics 04822 Solenoid valve 2-Way (SV6 or SV7) Electronics 691.04001 Chell Needle Valve Assembly Electronics 691.02060.FR Argon Gas Regulator Assembly (Specify if PIPS, Ilion+ or PECS) Cabinet Page 28 of 86

Service Parts, Spares and Consumables - 681, 682, 683 06066 Cabinet Cooling Fan, 120VAC - 50 / 60Hz Cabinet 03293 Vent or Vacuum Switch (SW1 or SW3) Cabinet, Electronics 10042 In-Out Switch - Old Style Being used on systems built before May 2008 Note: A replacement for this part should be a modified 11919 rather than the newer 12689 681,682,683 Cabinet, Electronics New replacement for 10042 In-Out Switch This is a modified P/N 11919 This is a replacement for P/N 10042 on systems built before May 2008 681,682,683 Cabinet, Electronics 12689 In-Out Switch - New Style Being used on systems built after May 2008 681,682,683 Cabinet, Electronics 07660 Argon Gas Switch For Sputter Gun 681,682,683 Cabinet, Electronics 11919 Argon Gas Switch For Etching Gun 681,682,683 Cabinet, Electronics Page 29 of 86

Service Parts, Spares and Consumables - 681, 682, 683 04143 Motor Speed or KeV Control 681 Cabinet, Electronics 04144 Motor Speed Control/Switch 681 Cabinet, Electronics 681.19080 Rotate Motor Cable Assembly 681,682,683 Electronics, Cables 681.06000.FR Ion Beam Coater HV Power supply 681 Cabinet, Electronics, Power Supplies 682.06001 PECS HV Power Supply 682,683 Cabinet, Electronics, Power Supplies 682.06651 PECS Switching Module, Tri-HV 682 Cabinet, Electronics, Power Supplies 05588 MDP Controller Board TCP 035 (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards Page 30 of 86

Service Parts, Spares and Consumables - 681, 682, 683 691.00500 Power Distribution Board (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards 691.00510 Power Distribution Board (For new instruments shipped since Jan. 2003) Cabinet, Electronics, Boards 682.02653 Microscope Switch Board 681,682,683 Cabinet, Electronics, Boards 682.02800 LCD Display Board 681,682,683 Front Panel, Electronics, Boards 681.02500 Rock/Rotate PC Board 681,682,683 Front Panel, Electronics, Boards 682.02805 LCD Display 681,682,683,693 Front Panel, Electronics 681.02452 Loadlock Control 681,682,683 Front Panel, Electronics Page 31 of 86

Service Parts, Spares and Consumables - 681, 682, 683 09725 Digital Timer (Refer to document 691.02810 for instruction of modifying a new timer for an old system) 681,682,683,691 Front Panel, Electronics 691.02810.FR Digital Timer - Upgraded. (Used on older systems) 681,682,683,691 Front Panel, Electronics 07988 Chamber Vacuum Analog Meter 681,682,683,691 Front Panel, Electronics 03371 Power Switch 240V Front Panel, Electronics 03372 Power switch 120V Missing Image 681 Front Panel, Electronics 691.03551 IKR 251 Cold Cathode Gauge (For instruments shipped since Jan. 1996) Gauges 691.03555 CC Gauge Maintenance Kit (For instruments shipped since Jan. 1996) Gauges Page 32 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.20200.FR Thickness Probe Front Entry 681,682 Gauges 691.03220.FR Penning Gauge Baffle Assembly (PIPS and IBC Shipped Before Jan.1996) Missing Image 681,691 Gauges 600.22160 Penning Gauge Tube Repair Kit (PIPS and IBC Shipped Before Jan.1996) 600,681,691 Gauges - MDP Manifold 10221 Pfeiffer MVP 015-2 Diaphragm Pump only. No isolation table 681,682,683,691 Pumps 691.00650 Pfeiffer MVP 015-2 Diaphragm Pump Assembly (With isolation table - Upgrade of ASF or KNF version to MVP015-2) Missing Image 681,682,683,691 Pumps 691.00650.FR Pfeiffer MVP 015-2 Diaphragm Pump Assembly (With isolation table - Upgrade of MVP012 or 015 to MVP015-2) Missing Image 681,682,683,691 Pumps 691.00651 Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps Page 33 of 86

Service Parts, Spares and Consumables - 681, 682, 683 10543 Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps 10542 TMH071 Turbo MDP Pump,950 Pumps 11536 Centering Ring, Splinter Shield,950 Pumps 04410 Diaphragm Pump Isolator,950 Pumps 05517 Airlock Window, Quartz, 25mm Diameter 681 Chamber 691.11000 Liquid Nitrogen Trap Chamber 681.19012.FR Potentiometer Assembly (For Rocker Assembly) 681,682,683 Mechanical Model 681, 682, 683 Gun Assembly Page 34 of 86

Service Parts, Spares and Consumables - 681, 682, 683 682.09001.FR Sputter (Coating) Gun Assembly Complete 681,682 Ion Gun Assembly 682.25100.FR Etching Gun Assembly Complete 682,683 Ion Gun Assembly 681.09180.FR HV Feed Through Assembly (For Sputter Gun) 681,682, Ion Gun Assembly 682.09180.FR HV Feed Through Assembly (For Etching Gun) 681,682,683 Ion Gun Assembly 681.09030 Front Polepiece (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly 681.09070 Rear Polepiece (For Sputter Gun) 681,682 Ion Gun Assembly 682.25101 Rear Polepiece (For Etching Gun) 682,683 Ion Gun Assembly Page 35 of 86

Service Parts, Spares and Consumables - 681, 682, 683 682.25104 Anode Cup Insulator (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly 682.25099 Anode Cup (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly 691.09131 Magnet Assembly (For Sputter & Etching Guns) Ion Gun Assembly 681.09120 Contact Pin (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly Model 681, 682, 683 & Holders 682.30018 Cutting Screen Clamp 682,683 Slope Cutter, Holders 682.30320 Hex Tool 682,683 Slope Cutter, Holders 682.40200 Cutting Fixture 682,683 Slope Cutter, Holders Page 36 of 86

Service Parts, Spares and Consumables - 681, 682, 683 682.19050 Sample Stage 1.25" 681,682,683 Holders 691.00200 Gas Supply Tubing with Fittings,950 04071 Tygon Tubing 1/4"OD, 1/8"ID 2ft 682.15200 Spanner Wrench (For changing oil cartridge in Turbo Pumps),950 682.19090 Vise Mount 681,682,683 681.19100 Specimen Mount 2-Position 681,682,683 681.19102 Specimen Mount 3-Position 681,682,683 Page 37 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.19104 Stub Mount Adapter (Holds four 10mm stubs) 681,682,683 681.19105 Adapter 1.0 inch to 1.25 inch 681,682,683 681.19106 Pin Stub Mount (Holds three 12mm pin stubs) 681,682,683 Model 681, 682, 683 Targets 682.10001.FR Field Replacement Target Actuator Assembly, Left 681,682 Chamber, Targets 682.10002.FR Field Replacement Target Actuator Assembly, Right 681,682 Chamber, Targets 681.01060 Target Port Blanking Plug 681 Chamber, Targets 681.10040 Blank Target Mount (Holds 2 Targets) 681,682 Chamber, Targets Page 38 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.10050 Standard Dual Target Set Carbon/Chromium (Includes target mount 681.10040) 681,682 Chamber, Targets 681.10051 Dual Target Set Chromium/Chromium (Includes target mount 681.10040) 681,682 Chamber, Targets 681.10061 Target - Carbon 681,682 Consumables, Targets 681.10062 Target - Chromium 681,682 Consumables, Targets 681.10063 Target - Gold/Palladium 50/50 681,682 Consumables, Targets 681.10064 Target - Iridium 681,682 Consumables, Targets 681.10065 Target - Platinum 681,682 Consumables, Targets Page 39 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.10066 Target - Tantalum 681,682 Consumables, Targets 681.10067 Target - Titanium 681,682 Consumables, Targets 681.10068 Target - Tungsten 681,682 Consumables, Targets 681.10069 Target - Tin 681,682 Consumables, Targets 681.10070 Target - Quartz 681,682 Consumables, Targets 681.10071 Target - Gold 681,682 Consumables, Targets 681.10072 Target - Aluminum Oxide (Al2O3) Missing Image 681,682 Consumables, Targets Page 40 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.10074 Target - Nickel 681,682 Consumables, Targets 681.10075 Target - Platinum/Iridium. 90% Pt. and 10% Ir. Missing Image 681,682 Consumables, Targets 681.10076 Target - Silver 99.98% Missing Image 681,682 Consumables, Targets 681.10077 Target - Palladium 99.95% Missing Image 681,682 Consumables, Targets 681.10078 Target - Aluminum 99.99% Missing Image 681,682 Consumables, Targets 681.10079 Target - Molybdenum 99.95% Missing Image 681,682 Consumables, Targets 681.10080 Target - Niobium 99.95% 681,682 Consumables, Targets Page 41 of 86

Service Parts, Spares and Consumables - 681, 682, 683 681.10083 Target - Nickel Oxide 681,682 Consumables, Targets 681.10084 Target - Platinum/Palladium (80% Pt - 20% Pd) Missing Image 681,682 Consumables, Targets 681.10085 Target - Cobalt 99.95% Missing Image 681,682 Consumables, Targets 681.10086 Target - Copper 99.99% Missing Image 681,682 Consumables, Targets 681.10087 Target - Zinc 99.95% Missing Image 681,682 Consumables, Targets 682.1001C Target Gluing Kit (Customer Installed) 681,682 Consumables, Targets Model 681, 682, 683 Consumables 09680 Krytox Grease, 1/2 oz. Syringe,950 Consumables Page 42 of 86

Service Parts, Spares and Consumables - 681, 682, 683 03173 Thickness Probe Crystals 5/Pack 681,682 Tools, Consumables 682.30017 Cutting Screen x1 682,683 Consumables, Slope Cutter 691.00132 Pfeiffer MVP 015 and 015-2 Diaphragm Pump, Repair kit + Procedure (4 valves, 2 diaphragms, 8 seals) 681,682,683,691 Pumps - Consumables 10546 Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables 07536 KnF Pump, Replacement Diaphragms (Batch 2-4) 681,682,683,691 Pumps, Consumables 07537 KnF Pump, Replacement Valve Plates (Batch 2-4) 681,682,683,691 Pumps, Consumables 05577 MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Model 681, 682, 683 Page 43 of 86

Service Parts, Spares and Consumables - 681, 682, 683 682.14080 Complete O-ring Kit - PECS 681,682,683 691.06422 O-Ring kit Viton (#005 X10) (Used in Chamber & Whisperlok ) 682.06425 O-Ring kit Viton (#010 X10) (Used in Main Assembly & MDP Manifold) 691.06427 O-Ring kit Viton (#012 X10) (Used in Chamber, MDP Manifold, Faraday Cage & Needle Valve) 682.06435 O-Ring kit Viton (#022 X5) (Used in Chamber & Faraday Cage) 682.06444 O-Ring kit Viton (#032 X5) (Used in Chamber & 36mm Stage) 681,682,683 691.06448 O-Ring kit Viton (#039 X5) (Used in MDP Manifold & Cold Stage) Page 44 of 86

Service Parts, Spares and Consumables - 681, 682, 683 682.06451 O-Ring kit Viton (#047 X5) (Used in 15mm Holder) 681,682,683 691.06459 O-Ring kit Viton (#118 X5) (Used in MDP Manifold) 691.06464 O-Ring kit Viton (#123 X5) (Used in MDP Manifold) 682.06467 O-Ring kit Viton (#129 X5) (Used in 15mm Stage & 36mm Stage) 681,682,683 691.06472 O-Ring kit Viton (#136 X5) (Used in MDP Manifold) 682.08286 Quad-Ring kit Viton (#028 X5) (Used in 36mm Stage) 681,682,683 682.08287 Quad-Ring kit Viton (#110 X10) (Used in 36mm Stage) 681,682,683 Page 45 of 86

Service Parts, Spares and Consumables - 681, 682, 683 682.06433 O-Ring kit Viton - Penning Ion Gun (#020 X3, #022 X6) 681,682,683, 681.14082 O-Ring kit - Chamber (3x#010, 1x#012, 1x#022, 2x#028, 1x#030, 2x#032, 1x#033, 1x#044) 681,682 681.14091 O-Ring kit - 36mm Stage (1x#028 Quad Ring, 1x#030, 1x#031, 2x#032, 1x#110 Quad Ring, 1x#129, 1x#133) 681,682 681.14092 O-Ring kit - Thickness Probe (2x#006, 3x#018, 1x#028) 681,682 682.14093 O-Ring kit - Etching Chamber (1x#005, 1x#010, 2x#014, 1x#020, 1x#043, 1x#045) 682,683 Page 46 of 86

Service Parts, Spares and Consumables - 691 P/N Description Picture Category & Products 03072 Fuse 5 x 20mm, 3.15A (MDP Driver Card) Cabinet, Electronics Fuses 03511 Fuse 1.0A Slow Blow (5x20mm) (Distribution Board) Cabinet, Electronics Fuses 03602 Fuse, Plug-in Type, 3.0A (Distribution Board) Cabinet, Electronics Fuses 03718 Fuse 3AG Slow Blow 3A, 110V Cabinet, Electronics Fuses 03722 Fuse 3AG Slow Blow 1-1/2A, 220V Cabinet, Electronics Fuses 681.01260 Lamp 2.7V T-1, Trimmed (Used in IBC, PIPS and in Ilion+ Microscope) 681, Electronics, Lamps 09585 Lamp, Halogen, PIPS CCD Illuminator Electronics, Lamps Page 47 of 86

Service Parts, Spares and Consumables - 691 681.00220 Solenoid Valve Assembly Electronics 03667 Solenoid Valve 2-Way (SV3) Electronics 03668 Solenoid valve 3-Way (SV2) Electronics 04847 Solenoid Valve 3-Way (SV4 or SV5 Shutter or Whisperlok ) Electronics 04822 Solenoid valve 2-Way (SV6 or SV7) Electronics 691.04001 Chell Needle Valve Assembly Electronics 691.02060.FR Argon Gas Regulator Assembly (Specify if PIPS, Ilion+ or PECS) Cabinet Page 48 of 86

Service Parts, Spares and Consumables - 691 06066 Cabinet Cooling Fan, 120VAC - 50 / 60Hz Cabinet 03293 Vent or Vacuum Switch (SW1 or SW3) Cabinet, Electronics 691.06003.FR High Voltage Power Supply Cabinet, Electronics, Power Supplies 691.06651 Switching Module, Dual-HV Cabinet, Electronics, Power Supplies 10562 DC Power Supply, 24VDC - 160W Electronics, Power Supplies 05588 MDP Controller Board TCP 035 (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards 691.00470 Pressure/Vac Sensor Board Cabinet, Electronics, Boards Page 49 of 86

Service Parts, Spares and Consumables - 691 05914 Pressure/Vacuum Sensor (Foreline) Cabinet, Electronics 691.00500 Power Distribution Board (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards 691.00510 Power Distribution Board (For new instruments shipped since Jan. 2003) Cabinet, Electronics, Boards 691.02653 Microscope Switch Board Cabinet, Electronics, Boards 691.02150 LED Display Panel Board 691 Front Panel, Electronics, Boards 691.02700.FR Dual Beam Modulation Board (Batch 6 and up) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards 691.02450 Load-Lock PCA Board only - No switches Front Panel, Electronics, Boards Page 50 of 86

Service Parts, Spares and Consumables - 691 691.02302 Pressure Test Board (Replaces 691.02300) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards 09725 Digital Timer (Refer to document 691.02810 for instruction of modifying a new timer for an old system) 681,682,683,691 Front Panel, Electronics 691.02810.FR Digital Timer - Upgraded. (Used on older systems) 681,682,683,691 Front Panel, Electronics 07988 Chamber Vacuum Analog Meter 681,682,683,691 Front Panel, Electronics 03371 Power Switch 240V Front Panel, Electronics 691.03551 IKR 251 Cold Cathode Gauge (For instruments shipped since Jan. 1996) Gauges 691.03555 CC Gauge Maintenance Kit (For instruments shipped since Jan. 1996) Gauges Page 51 of 86

Service Parts, Spares and Consumables - 691 691.03220.FR Penning Gauge Baffle Assembly (PIPS and IBC Shipped Before Jan.1996) Missing Image 681,691 Gauges 600.22160 Penning Gauge Tube Repair Kit (PIPS and IBC Shipped Before Jan.1996) 600,681,691 Gauges - MDP Manifold 10221 Pfeiffer MVP 015-2 Diaphragm Pump (No isolation table) 681,682,683,691 Pumps 691.00650 Pfeiffer MVP 015-2 Diaphragm Pump Assembly (With isolation table - Upgrade of ASF or KNF version to MVP015-2) Missing Image 681,682,683,691 Pumps 691.00650.FR Pfeiffer MVP 015-2 Diaphragm Pump Assembly (With isolation table - Upgrade of MVP012 or 015 to MVP015-2) Missing Image 681,682,683,691 Pumps 691.00651 Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps 10543 Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps Page 52 of 86

Service Parts, Spares and Consumables - 691 10542 TMH071 Turbo MDP Pump,950 Pumps 11536 Centering Ring, Splinter Shield,950 Pumps 04410 Diaphragm Pump Isolator,950 Pumps 691.01040 Viewing Port 691 Chamber 07874 Airlock Window, Quartz, 25mm Diameter,950 Chamber 691.01090.FR Shutter Assembly, Blade & Bracket 691 Chamber 691.01110 Shutter Blade 691 Chamber Page 53 of 86

Service Parts, Spares and Consumables - 691 691.01350 Sputter Shield Assembly 691 Chamber 691.11000 Liquid Nitrogen Trap Chamber 691.11100 Cold Stage Dewar Assembly (For systems with Cold Stage) 691 Chamber 691.08060 Rotation Motor Assembly Whisperlok 691.08700 Whisperlok Board Assembly (For instruments shipped since Jan. 1996) Whisperlok 691.08102 Piston Bellows Assembly 691 Whisperlok 691.08103 Piston Bellows Assembly (For Pips with Cold Stage) 691 Whisperlok Page 54 of 86

Service Parts, Spares and Consumables - 691 691.08401 Spring Specimen Mount Assembly 691 Whisperlok 691.17300 Hinged Conductor Assembly (For Pips with Cold Stage) 691 Whisperlok Model 691 Gun Assembly 691.09407.FR Standard Gun (Includes magnet assembly but no housing) Ion Gun Assembly 691.09413.FR Broad Beam Gun Conversion kit x2 Missing Image 691 Ion Gun Assembly 691.09411.FR Standard Gun Conversion kit x2 Missing Image 691 Ion Gun Assembly 691.09480.FR Potted End Cap, HV Feed Through and Rear Pole Piece Ion Gun Assembly 691.09401.FR Complete Ion Gun Assembly - Left 691 Ion Gun Assembly Page 55 of 86

Service Parts, Spares and Consumables - 691 691.09402.FR Complete Ion Gun Assembly - Right 691 Ion Gun Assembly 691.09405.FR Complete Broad-Beam Ion Gun Assembly - Left 691 Ion Gun Assembly 691.09406.FR Complete Broad-Beam Ion Gun Assembly - Right 691 Ion Gun Assembly 691.09701 Ion Gun Knob Assembly, Left 691 Ion Gun Assembly 691.09702 Ion Gun Knob Assembly, Right 691 Ion Gun Assembly 691.09530 Potted End Cap Assembly Ion Gun Assembly 691.09550 HV Feed Through Ion Gun Assembly Page 56 of 86

Service Parts, Spares and Consumables - 691 691.09030 Front Pole Piece Ion Gun Assembly 691.09610 Rear Pole Piece Ion Gun Assembly 691.09040 Anode Cup Insulator Ion Gun Assembly 691.09050 Anode Cup Ion Gun Assembly 691.09131 Magnet Assembly Ion Gun Assembly 691.09120 Contact Pin Ion Gun Assembly Model 691 & Holders 691.08470.FR Beam Alignment Screen 691,, Whisperlok Page 57 of 86

Service Parts, Spares and Consumables - 691 691.08510.FR Rimmed Specimen Post (molybdenum) 691 691.08630 Specimen Post (Copper) x5 691 691.08600.FR Duo Post, Glue Type, 3mm, (one post) Aluminum 691 691.08.FR Duo Post, Clamp Type, 3mm, (one post) Aluminum 691 691.08605.FR Duo Post, Glue Type, 2.3mm, (one post) Aluminum 691 691.08606.FR Duo Post, Clamp Type, 2.3mm, (one post) Aluminum 691 691.08610 Duo Post Loading Dock, includes tweezers 691 Page 58 of 86

Service Parts, Spares and Consumables - 691 691.08650 Graphite loading dock with LED illuminator 691 691.08645 Graphite Specimen Holder (One) 691 691.14051 Specimen Post Storage Block 691 691.14070.FR Specimen Post Carrier x1 691 691.14030 Precision Point Tweezers 691.08460 Multi Purpose Tool 691.00200 Gas Supply Tubing with Fittings,950 Page 59 of 86

Service Parts, Spares and Consumables - 691 04071 Tygon Tubing 1/4"OD, 1/8"ID 2ft 682.15200 Spanner Wrench (For changing oil cartridge in Turbo Pumps),950 07884 Coupling - Quick Connect with Shutoff - Male, Gas-Line Supplies 09438 Coupling - Quick Connect with Shutoff - Female, Gas-Line Supplies 691.05682 12VDC Power Supply for CCD Camera, Power Supplies Model 691 Consumables 09680 Krytox Grease, 1/2 oz. Syringe,950 Consumables 691.17305 MOS2 Powder Lubricant (1 Gram) (For Quad Seal used in Cold Stage) 691 Consumables Page 60 of 86

Service Parts, Spares and Consumables - 691 691.00132 Pfeiffer MVP 015 and 015-2 Diaphragm Pump, Repair kit + Procedure (4 valves, 2 diaphragms, 8 seals) 681,682,683,691 Pumps - Consumables 10546 Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables 07536 KnF Pump, Replacement Diaphragms (Batch 2-4) 681,682,683,691 Pumps, Consumables 07537 KnF Pump, Replacement Valve Plates (Batch 2-4) 681,682,683,691 Pumps, Consumables 05577 MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Model 691 691.06422 O-Ring kit Viton #005 X10 (Used in Chamber & Whisperlok ) 682.06425 O-Ring kit Viton - #010 X10 (Used in Main Assembly & MDP Manifold) Page 61 of 86

Service Parts, Spares and Consumables - 691 691.06427 O-Ring kit Viton - #012 X10 (Used in Chamber, MDP Manifold, Faraday Cage & Needle Valve) 691.06429 O-Ring kit Viton - #015 X10 (Used in Faraday Cage) 682.06435 O-Ring kit Viton - #022 X5 (Used in Chamber & Faraday Cage) 691.06448 O-Ring kit Viton - #039 X5 (Used in MDP Manifold & Cold Stage) 691.06459 O-Ring kit Viton - #118 X5 (Used in MDP Manifold) 691.06464 O-Ring kit Viton - #123 X5 (Used in MDP Manifold) 691.06472 O-Ring kit Viton - #136 X5 (Used in MDP Manifold) Page 62 of 86

Service Parts, Spares and Consumables - 691 691.40138 Quad-Ring kit Viton - #012 X10 (Used in Cold Stage) 691.06985 Quad-Ring kit Viton - #111 X5 (Used in Cold Stage) 691.14082 O-Ring kit - Chamber (1x#005, 1x#011, 2x#012, 1x#019, 1x#022, 1x#030, 1x#042, 2x#044, 1x#012-Quad Ring) 691.14086 O-Ring kit - Whisperlok (1x#005, 1x#008, 1x#031, 1x#035, 1x#135) 691.14087 O-Ring kit - Penning Ion Gun (2x#020, 2x#023, 2x#024, 4x#030) 691.14088 O-Ring kit - Cold Stage (1x#008, 1x#012-Quad Ring, 1x#014, 1x#031, 1x#039, 1x#111- Quad Ring, 1x#135) Page 63 of 86

Service Parts, Spares and Consumables - 693 P/N Description Picture Category & Products 03072 Fuse 5 x 20mm, 3.15A (MDP Driver Card) Cabinet, Electronics Fuses 03511 Fuse 1.0A Slow Blow (5x20mm) (Distribution Board) Cabinet, Electronics Fuses 03602 Fuse, Plug-in Type, 3.0A (Distribution Board) Cabinet, Electronics Fuses 03718 Fuse 3AG Slow Blow 3A, 110V Cabinet, Electronics Fuses 03722 Fuse 3AG Slow Blow 1-1/2A, 220V Cabinet, Electronics Fuses 681.01260 Lamp 2.7V T-1, Trimmed (Used in IBC, PIPS and in Ilion+ Microscope) 681, Electronics, Lamps 09585 Lamp, Halogen, PIPS CCD Illuminator Electronics, Lamps Page 64 of 86

Service Parts, Spares and Consumables - 693 681.00220 Solenoid Valve Assembly Electronics 03667 Solenoid Valve 2-Way (SV3) Electronics 03668 Solenoid valve 3-Way (SV2) Electronics 04847 Solenoid Valve 3-Way (SV4 or SV5 Shutter or Whisperlok ) Electronics 04822 Solenoid valve 2-Way (SV6 or SV7) Electronics 691.04001 Chell Needle Valve Assembly Electronics 691.02060.FR Argon Gas Regulator Assembly (Specify if PIPS, Ilion+ or PECS) Cabinet Page 65 of 86

Service Parts, Spares and Consumables - 693 06066 Cabinet Cooling Fan, 120VAC - 50 / 60Hz Cabinet 03293 Vent or Vacuum Switch (SW1 or SW3) Cabinet, Electronics 691.06003.FR High Voltage Power Supply Cabinet, Electronics, Power Supplies 691.06651 Switching Module, Dual-HV Cabinet, Electronics, Power Supplies 10562 DC Power Supply, 24VDC - 160W Electronics, Power Supplies 691.00470 Pressure/Vac Sensor Board Cabinet, Electronics, Boards 05914 Pressure/Vacuum Sensor (Foreline) Cabinet, Electronics Page 66 of 86

Service Parts, Spares and Consumables - 693 691.00510 Power Distribution Board Cabinet, Electronics, Boards 691.02653 Microscope Switch Board Cabinet, Electronics, Boards 691.02700.FR Dual Beam Modulation Board (Batch 6 and up) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards 691.02302 Pressure Test Board (Replaces 691.02300) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards 693.02200 Relay Board 693 Front Panel, Electronics, Boards 693.02806 LCD Display Board 693 Front Panel, Electronics, Boards 682.02805 LCD Display 681,682,683,693 Front Panel, Electronics Page 67 of 86

Service Parts, Spares and Consumables - 693 03371 Power Switch 240V Front Panel, Electronics 691.03551 IKR 251 Cold Cathode Gauge Gauges 691.03555 CC Gauge Maintenance Kit Gauges 691.00651 Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps 10543 Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps 10542 TMH071 Turbo MDP Pump,950 Pumps 11536 Centering Ring, Splinter Shield,950 Pumps Page 68 of 86

Service Parts, Spares and Consumables - 693 04410 Diaphragm Pump Isolator,950 Pumps 693.01040 Viewing Port 693 Chamber 07874 Airlock Window, Quartz, 25mm Diameter,950 Chamber 693.01110 Shutter Blade 693 Chamber 691.11000 Liquid Nitrogen Trap Chamber 693.01410 O-Ring Shield 693 Chamber 693.11100 Cold Stage Dewar Assembly 693 Chamber Page 69 of 86

Service Parts, Spares and Consumables - 693 691.08060 Rotation Motor Assembly Whisperlok 691.08700 Whisperlok Board Assembly Whisperlok 693.08002 Whisperlok Assembly (For Cold Stage and non Cold Stage units) 693 Whisperlok 693.17300 Hinged Conductor Assembly 693 Whisperlok Model 693 Gun Assembly 691.09407.FR Standard Gun (Includes magnet assembly but no housing) Ion Gun Assembly 691.09480.FR Potted End Cap, HV Feed Through and Rear Pole Piece Ion Gun Assembly 693.09401 Complete Ion Gun Assembly - Left 693 Ion Gun Assembly Page 70 of 86

Service Parts, Spares and Consumables - 693 693.09402 Complete Ion Gun Assembly - Right 693 Ion Gun Assembly 693.09701 Ion Gun Knob Assembly, Left 693 Ion Gun Assembly 693.09702 Ion Gun Knob Assembly, Right 693 Ion Gun Assembly 691.09530 Potted End Cap Assembly Ion Gun Assembly 691.09550 HV Feed Through Ion Gun Assembly 691.09030 Front Pole Piece Ion Gun Assembly 691.09610 Rear Pole Piece Ion Gun Assembly Page 71 of 86

Service Parts, Spares and Consumables - 693 691.09040 Anode Cup Insulator Ion Gun Assembly 691.09050 Anode Cup Ion Gun Assembly 691.09131 Magnet Assembly Ion Gun Assembly 691.09120 Contact Pin Ion Gun Assembly Model 693 & Holders 693.14400 SEM Stub for 1 sample 693 693.14500 SEM Stub for 6 samples 693 693.08500 Sample Blade Kit (10 Pieces) Page 72 of 86

Service Parts, Spares and Consumables - 693 693.08510 Sample Blade Kit (100 Pieces) 10 X 693.14300 Beam Alignment Screen 693 691.14030 Precision Point Tweezers 691.08460 Multi Purpose Tool 691.00200 Gas Supply Tubing with Fittings,950 04071 Tygon Tubing 1/4"OD, 1/8"ID 2ft 682.15200 Spanner Wrench (For changing oil cartridge in Turbo Pumps),950 Page 73 of 86

Service Parts, Spares and Consumables - 693 07884 Coupling - Quick Connect with Shutoff - Male, Gas-Line Supplies 09438 Coupling - Quick Connect with Shutoff - Female, Gas-Line Supplies 691.05682 12VDC Power Supply for CCD Camera, Power Supplies Model 693 Consumables 09680 Krytox Grease, 1/2 oz. Syringe,950 Consumables 10546 Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables 05577 MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Model 693 14485 Quad-Ring Buna - #4116 (Used in Chamber) 693 Page 74 of 86

Service Parts, Spares and Consumables - 693 691.06422 O-Ring kit Viton #005 X10 (Used in Chamber & Whisperlok ) 682.06425 O-Ring kit Viton - #010 X10 (Used in Main Assembly & MDP Manifold) 691.06427 O-Ring kit Viton - #012 X10 (Used in Chamber, MDP Manifold, Faraday Cage & Needle Valve) 691.06429 O-Ring kit Viton - #015 X10 (Used in Faraday Cage) 682.06435 O-Ring kit Viton - #022 X5 (Used in Chamber & Faraday Cage) 691.06448 O-Ring kit Viton - #039 X5 (Used in MDP Manifold & Cold Stage) 691.06459 O-Ring kit Viton - #118 X5 (Used in MDP Manifold) Page 75 of 86

Service Parts, Spares and Consumables - 693 691.06464 O-Ring kit Viton - #123 X5 (Used in MDP Manifold) 691.06472 O-Ring kit Viton - #136 X5 (Used in MDP Manifold) 691.40138 Quad-Ring kit Viton - #012 X10 (Used in Cold Stage) 691.06985 Quad-Ring kit Viton - #111 X5 (Used in Cold Stage) 691.14082 O-Ring kit - Chamber (1x#005, 1x#011, 2x#012, 1x#019, 1x#022, 1x#030, 1x#042, 2x#044, 1x#012-Quad Ring) 691.14086 O-Ring kit - Whisperlok (1x#005, 1x#008, 1x#031, 1x#035, 1x#135) 691.14087 O-Ring kit - Penning Ion Gun (2x#020, 2x#023, 2x#024, 4x#030) Page 76 of 86

Service Parts, Spares and Consumables - 693 691.14088 O-Ring kit - Cold Stage (1x#008, 1x#012-Quad Ring, 1x#014, 1x#031, 1x#039, 1x#111- Quad Ring, 1x#135) Page 77 of 86

Service Parts, Spares and Consumables - 950 P/N Description Picture Category & Products 950.20100 I/O Expansion Board 950 Cabinet, Electronics, Boards 950.21000 VGX Single Board Computer 950 Cabinet, Electronics, Boards 950.50400 RF Generator Assembly 950 Cabinet, Electronics 100152 Mass Flow Controller, Alicat, for O2 or AR Starting October 2010, this will be installed on new systems, replacing the Brooks. The Brooks will still be used for service. 950 Cabinet, Electronics 100153 Mass Flow Controller, Alicat, for H2 Starting October 2010, this will be installed on new systems, replacing the Brooks. The Brooks will still be used for service. 950 Cabinet, Electronics 950.00100.FR Mass Flow Controller Kit, Alicat, for O2 or AR This is an upgrade kit for replacing a Brooks MFC with an Alicat MFC 950 Cabinet, Electronics 950.00101.FR Mass Flow Controller kit, Alicat, for H2 This is an upgrade kit for replacing a Brooks MFC with an Alicat MFC 950 Cabinet, Electronics Page 78 of 86

Service Parts, Spares and Consumables - 950 11282 Mass Flow Controller, Brooks, 40SCCM, for O2 or AR (New) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics 14573 Mass Flow Controller, Brooks, 40SCCM, for O2 or AR (Rebuilt) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics 11547 Mass Flow Controller, Brooks, 20SCCM, for H2 (New) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics 14572 Mass Flow Controller, Brooks, 20SCCM, for H2 (Rebuilt) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics 950.00651 Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps 10543 Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps 10542 TMH071 Turbo MDP Pump,950 Pumps Page 79 of 86

Service Parts, Spares and Consumables - 950 11536 Centering Ring, Splinter Shield,950 Pumps 04410 Diaphragm Pump Isolator,950 Pumps 07874 Airlock Window, Quartz, 25mm Diameter,950 Chamber 10546 Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables 05577 MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables 691.00200 Gas Supply Tubing with Fittings,950 682.15200 Spanner Wrench (For changing oil cartridge in Turbo Pumps),950 Page 80 of 86

Service Parts, Spares and Consumables - 950 09680 Krytox Grease, 1/2 oz. Syringe,950 Consumables 18605 Chamber Seal Conductive O-Ring 139" X 3.734" 950 682.06458 O-Ring kit Viton, (#117 X5) 950 Page 81 of 86

Service Parts, Spares and Consumables - Holders P/N Description Picture Category & Products 562.30200 Anti-Twist Washers x10 - Beryllium 562.30201 Anti-Twist Washers mo/set of 10 Missing Image 562.30202 Anti-Twist Washers x10 - copper 608.00020 Hexring - Phosphor Bronze 608.00021 Hexring - Beryllium 608.00022 Hexring - Beryllium (.02 thick with no lip) 608.00024 Hexring - Stainless Steel Page 82 of 86

Service Parts, Spares and Consumables - Holders 608.00050 Hexring Tool, Beryllium (For use with 608.0002 series Hexrings) 608.00070 Hexring Tool Non Beryllium Style 613.05070 Power Supply/Cooling Holder Connecting Cable, 5-Pin Missing Image 626.50060 Power Supply/Cooling Holder Connecting Cable, 7-Pin 626.54035 Molecular Sieve Charge for 626.DH, 613, 651, 636.DH Missing Image 628.02130 Loading Ring 628.02242 Hexring - Tantalum Page 83 of 86

Service Parts, Spares and Consumables - Holders 628.02233 x10 Specimen Washers - Inconel Missing Image 628.02234 x10 Specimen Washers - Tantalum 628.02241 Hexring - Inconel Missing Image 628.02250 Hexring Tool (For use with 628.0224 series Hexring) 628.05070 Power Supply/Heating Holder Connecting Cable, 5-pin 630.00001 Specimen Grids, Set of 25 25X 646.01781 Hexring Beryllium (Used with JEOL URP) Page 84 of 86

Service Parts, Spares and Consumables - Holders 646.01782 Hexring - Phosphor Bronze (Used with JEOL URP) 646.01900 Hexring Tool (For use with 646.0178 series Hexrings) 646.00730 Cable for FEI Compustage 646.51764 Cable for JEOL Microactive Goniometer 654.00033 Hexlock x2, Phosphor Bronze 654.00034 Hexlock x2, Tantalum 654.00043 Washer x2, Phosphor Bronze Page 85 of 86

Service Parts, Spares and Consumables - Holders 654.00044 Washers x2, Tantalum 654.53000 Hexlock Tool 910.00006 X4 Phosphor Bronze 2-Specimen Cartridges with 8 Splitrings 4 X 910.00005 Set of 5 Splitrings 910.00027 Splitring Tool Missing Image 910.53005 Splitring Seating Tool Page 86 of 86