Low Torque Rotary Joint

Similar documents
Low Torque Rotary Joint

Rotary Actuators Precautions 1 Be sure to read this before handling.

Two Hand Control Valve

How to Order. Nozzle. Nil Connection size N02 N03 F02 F H06 H08 H10 H07 H09 H11

Added 100 mm and 150 mm lengths. Actuators 10% Air leakage 20% Air blow 70% Current model

Series AV2000/3000/4000/5000

Soft Start-up Valve. AV2000/3000/4000/5000 Series

10 VQ F. Nil Latching type: Push-locking type (Tool required) B. Nil. Electrical entry

ACTUATORS GENERAL CATALOG

OPERATION MANUAL. Diaphragm Pump. TD/TD2 Series TD-08, 15, 20/TD2-25. Introduction

ø20, ø32 ø50, ø63, ø80 How to Order Piping direction Flange side Nil Cylinder stroke 15mm 15 (RSH20) 20mm 20 (RSH32) 30 D L Cylinder stroke

Pressure Relief 3 Port Valve With Locking Holes

Speed Controller with Uni One-touch Fitting Push-lock type. New-stand male threads for piping that reduces the screw-in time by 1/3. Model.

Vacuum pump system type

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve

ROD SLIDERS INDEX ACTUATORS GENERAL CATALOG. Characteristics 779. Handling Instructions, and Precautions 783

Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve

3/4/5-Port Solenoid Valves Precautions 1 Be sure to read this before handling products.

ITVX Series. Stepless control of air pressure proportional to an electrical signal. Supply pressure: 5.0 MPa

Transmitters: Relay Valve VR4151/4152

Speed Controller with One-touch Fitting

1 Pneumatics. Transmitters VR4151 VR4152 VR1210 VR1220 VR1210F VR1220F VR1211F VR VR3200 VR3201 VR3100 VR3110

Doc. No.VQ1000V-OMM0002-B. Solenoid Valve PRODUCT NAME. VQ1000/2000 Series (PILOT VALVE : V100) MODEL/ Series

Doc. no.vn-omm0001-c. Coolant valve PRODUCT NAME. VNC/VNH Series MODEL / Series / Product Number

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve

ACTUATORS GENERAL CATALOG

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve

Speed Controller with One-touch Fitting

INSTALLATION, OPERATION AND MAINTENANCE INSTRUCTIONS

For Pneumatic Piping/Fittings & Tubing Prior to Use

Vacuum applications possible (up to 100kPa) Base mounted. Cylinder bore size (mm) Series CM2. Pressure: 0.5MPa Load ratio: 50% Cylinder stroke: 300mm

Doc. no.vn -OMA0002-D. Process valve PRODUCT NAME. VNA Series MODEL / Series / Product Number

High Vacuum Solenoid Valve PRODUCT NAME. XSA Series MODEL/ Series

Direct Operated 3-port solenoid valve

Conventional specification. External Pilot air specification 0 ~ 0.7. Compact, yet keeps large capacity.» Limited space can be utilized.

Precision Clean Regulator

Specifications VH600. Ambient temperature and operating fluid temperature Operating angle Lubrication

Doc. no.cm2*-om0064p. PRODUCT NAME Air cylinder. MODEL / Series / Product Number

MICRO EJECTORS. Micro ejector single unit (without solenoid valve) ME. Micro ejector with solenoid valve DC24V. Block-off plate ME MA-BP

No. MGP*-OM0047P-B PRODUCT NAME. Remodeled. MODEL / Series / Product Number. Series MGP-Z

Coolant valve. SGC/SGH Series

Series VP4 50/4 70. Large Size 5 Port Solenoid Valve Rubber Seal SJ SY SY SV SYJ SZ VF VP4 S0700 VQ VQ4 VQ5 VQC VQC4 VQZ SQ VFS VFR VQ7 VP4

Automatic exchange of robot hand tools, FMS (flexible manufacturing system) implemented for assembly lines.

The filters for hydraulic fluids are used to protect each component in a hydraulic circuit. Port size. Micromesh 74, 105, 149

SLIDE TABLES CONTENTS

3 Port Solenoid Valve Pilot Operated Poppet Type. External pilot

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve

Pneumatic components (Electro pneumatic Regulator) Safety Precautions. 3 When releasing secondary control pressure,

Doc. no.ck1*-om0066p. PRODUCT NAME Clamp Cylinder. MODEL / Series / Product Number

PVC Quick Drain Valve

Vacuum / Release Unit

AP212 Gear Pumps. Standard and Low Noise series. Reference: 200-P EN-03 1/60. Issue:

Float Dynamic Steam Trap J10

Body width of 10mm, Nl/min (49.08) 2W (Standard) Nl/min (78.52) 4W (U type: Large flow) Vacuum applications possible (up to 100kPa) 3 S.

Doc. No.VT307 -OMH0001-C. 3 Port Direct Operated Solenoid Valve PRODUCT NAME. VT307 Series MODEL/ Series

Hydraulic Filters. Element (µm) nominal filtration. Port size. Micromesh 74, 105, 149 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4

25% reduction in volume * PB1013A/Air-operated type without foot

3 Port Solenoid Valve Direct Operated Poppet Type 02 1 G VT325. For manifold: Enter VO. Valve option. Nil Standard V For vacuum Option.

Related vacuum products

ZFC Series. Air Suction Filter. In-line Type with One-touch Fittings

Rotary Table/Vane Style

Low Maintenance Filter

High Vacuum Solenoid Valve PRODUCT NAME. XSA Series MODEL/ Series

Series MSU. Rotary Table Vane Style. High Precision. Size: 1, 3, 7, 20 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D mm or less.

ITVH Series. 3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator. 3.0 MPa 0.2 to 2.0 MPa. 3 W or less L /min (ANR)*

Diaphragm Valve Type 14 Pneumatic Actuated Type AP. User s Manual. Contents H-A065-E. Serial No.

Exhaust Cleaner for Clean Room. Body size. Symbol Nil. Size 1/4 standard 3/8 standard 1/2 standard. Element construction. Stage 2 stage.

Doc. No.VQ4000V-OMV0001. Solenoid Valve PRODUCT NAME. VQ4000/5000 (Pilot Valve V100) MODEL/ Series

Diaphragm Valve Type 16 (Pneumatic Model Type AD)

Rotary Table/Vane Style

Pressure sensor with built-in amplification and temperature compensation circuit

Surplussing Valve SP-COSR-16

SUB-LINE FILTERS CONTENTS

Air Suction Filter / In-line Type With One-touch Fittings. Model ZFC ZFC ZFC ZFC ZFC ZFC ZFC ZFC051-03

The mechanism that generates mist (moisture) Principles of water removal valve operation

MULTISTAGE MICRO EJECTORS CONTENTS ACCESSORIES GENERAL CATALOG AIR TREATMENT, AUXILIARY, VACUUM, AND FLUORORESIN PRODUCTS. Caution

Low Maintenance Filter

Gear Pumps - AP05. Reference: 200-P EN-05 1/26. Issue:

MULTI SLIDERS CONTENTS

Compact Slide. Series MXH ø6, ø10, ø16, ø20

Air Suction Filter. Series ZF. Prevent from occurring vacuum equipment trouble due to dust from vacuum pad ZFA ZFB ZFC

13 msec (at 500 mm )/18.5 msec (at 1000 mm )

Series AN /Series AMC

Precision Cylinder. MTS Series. ø8, ø12, ø16, ø20, ø25, ø32, ø40 MXH MXS MXQ MXQ MXF MXW MXJ MXP MXY MTS D- -X. Series Variations MTS8

3-Way Ball Valve Type 23H

Valve for Water and Chemical Base Fluids

KV series. Innovatively detachable Manifold Block. Smart Solenoid Valve (plug-in type, D-SUB multi-connector type)

Miniature Fittings Stainless Steel 316. Hose nipple. Barb Configuration for easy insertion into the tube Holds the tube tightly.

Series VCHR. Direct Operated Regulator for 6.0 MPa (Relieving Type) Service life: 10 million cycles. How to Order

Diaphragm Valve Type 14 Pneumatic Actuated Type AV

Compact direct acting precision regulator

Series VP3145/3165/3185

HEAVY DUTY STOPPER CYLINDER

MULTISTAGE MICRO EJECTORS

Pressure Sensor No Series

Suction Filter with Case. Specifications. Fluid Operating pressure Operating temperature Cover/Case. Model/Rated Flow Rate. Model

SERIES PC INSTRUCTION AND OPERATION MANUAL

Axial Piston Fixed Motor A2FNM for Fan Drives and Flywheel Mass

3 Port Solenoid Valve Direct Operated Poppet Type

Transcription:

Low Torque Rotary Joint Series MQR Metal Seal Type K Long service life billion rotations MQR : billion rotations MQR : 0. billion rotations MQR : 0. billion rotations MQR8 : 0. billion rotations MQR: 0. billion rotations MQR6: 0. billion rotations * Under SMC's life test conditions. Fixed Flexible Coupling Fixed (Body) Rotary Joint Turntable M H KK D MS LQ MQR T Low rotational torque 0.00 to 0.0 N.m or less Allowable RPM 00 to 000 min - (r.p.m) Drive (Adapter plate) Drive motor Application of adapter plate drive * Not suitable for transmission of drive

Low Torque Metal Seal Type Rotary Joint Series MQR Ball bearing Rotational torque unaffected by supply pressure and temperature fluctuations Spool (Metal seal) Sleeve (Metal seal) Use of metal seals prevents the spool from sticking to the rotating surface even after a long period of non-operation. Body Operating pressure 00 kpa to MPa Adapter plate Piping ports are aligned in a spiral line for easy piping Applications: Air supply to rotary/pivot shafts of turntables and robot arms Drive motor Drive motor Turntable Fixed Flexible coupling Refer to page 9. Flexible coupling Drive body Refer to page 9. Piping support Fixed (Body) Rotary joint Direction of rotation Rotary joint ( circuit) Rotary joint Drive adapter plate Fixed (Adapter plate) Flange Drive motor * This series cannot be used for drive transmission. (Refer to page 9.) Example of circuit Example of adapter plate drive Example of body drive Made to Order Contact SMC if you wish to use rotary joints at temperatures outside the range of 0 C to 80 C or to have joints made with 0 circuits or more or a through hole specification.

Metal Seal Type Low Torque Rotary Joint Series MQR circuit, circuits, circuits, 8 circuits, circuits, 6 circuits MQR F M Low torque rotary joint (Metal seal type) Options Nil Standard F Note) Flange Note: No flange type in circuit system How to Order Connection diameter M M x 0.8 Number of circuits 8 6 circuit circuits circuits 8 circuits circuits 6 circuits K M H KK D MS LQ MQR T Options/Mounting Bracket Number of circuits Flange part number circuits MQR-F circuits MQR-F 8 circuits MQR8-F circuits MQR-F 6 circuits MQR6-F Specifications Model MQR-M MQR-M MQR-M MQR8-M MQR-M Number of circuits (Number of ports) 8 Fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R /8 Female M x 0.8 M x 0.8 Flow rate characteristics Lubrication C b Cv 0.0 [dm /(s. bar)] 0.0 0. Not required MQR6-M 6 Min. operating pressure 00 kpa Max. operating pressure.0 MPa Ambient temperature and operating fluid 0 to 80 C temperature Note ) Maximum start-up rotation torque Note ) 0.00 N m or less 0.0 N m or less 0.0 N m or less 0.0 N m or less 0.0 N m or less 0.0 N m or less Allowable rotation number 000 min - (r.p.m.) or less Note ) 000 min - (r.p.m.) or less 00 min - (r.p.m.) or less 900 min - (r.p.m.) or less 600 min - (r.p.m.) or less 00 min - (r.p.m.) or less Allowable radial load (allowable coupling axis reaction) Note ) N or less N or less 0N or less 0N or less 0N or less 0N or less Allowable axial load Weight 0.0kg 0.6kg 0.9kg 0.6kg.6kg.80kg Note ) The temperature 80 C includes temperature rise during rotation. Note ) The start-up torque does not change with the supply pressure or with non-use (remains within the maximum start-up rotation torque), but it does change with the rotation number. (Refer to page 6). Note ) If using at a speed above 600 min - (r.p.m.), ensure rotation is in the direction in which the joint is fastened. Note ) Rubber / resin couplings are recommended due to their excellent absorption of off center, shocks, and vibrations.

Construction MQR-M Component Parts/(MQR - M, circuit) No. Name Material Remarks Body Stainless steel Spool Special stainless steel Sleeve Special stainless steel Plate Aluminium O-ring H-NBR 6 Retaining ring Carbon steel Retaining ring Carbon steel 8 Radial bearing MQR to 6-M Allowable leakage according to differential pressure Port-to-port leakage [cm /min] 0000 9000 8000 000 6000 000 MQR6 MQR 000 MQR8 000 MQR 000 MQR 000 MQR ( 800) 0 0 0. 0. 0. 0. 0. 0.6 0. 0.8 0.9 Component Parts/(MQR to 6 - M, to 6 circuits) No. Name Material Remarks Body Aluminum Adapter plate Aluminum Spool Special stainless steel Sleeve Special stainless steel Gasket H-NBR 6 Bearing holder 8 9 0 Gasket Plate Flange Parallel pin O-ring Bolt Bolt Bolt Radial bearing Stainless steel H-NBR Aluminum Aluminum Carbon steel H-NBR Carbon steel Carbon steel Carbon steel 6 circults only 6 circults only 6 circults only Except for circuits 6 circults only e.g.: If adjacent ports are connected to vacuum pressure of -0. MPa and positive pressure of 0. MPa in MQR6, then differential pressure is 0. MPa, and leakage is 800 (cm /min). Differential pressure [MPa] Temperature rise with rotation number 0 MQR MQR Temperature rise [ C] 0 0 MQR MQR6 MQR8 Rotation number [min - (r.p.m)] MQR 0 0 00 000 00 000 00 000 00 Change in rotational torque with rotation number 0.6 MQR6 0. 0. 0. MQR MQR8 0. MQR MQR 0. MQR 0 0 00 000 00 000 00 000 Rotation number [min - (r.p.m)] Rotational torque [N.m] Note : Value when no pressure applied. Temperature rise is reduced by supply of air. 6

Low Torque Rotary Joint Metal Seal Type Series MQR Dimensions: Standard Type/Flange Type symbol indicates flange dimensions MQR-M MQR-M Width across flats: Width across flats: ø +0. 0 depth 0 9 M x 0. thread length 8 Flange: MQR-F (for MQRF-M) K (6.) ø ø.6 M x 0.8 x M x 0. thread length 6 P.C.D.9 x M x 0.8 ø0 counter bore depth. 8. ±0.0. øh8 (0 from end) x ø. mounting hole øh8 M H KK D () 0 MS 6 LQ R /8 (8) M x 0.8 6.. øh8 (6) MQR T x M x 0. thread length 8 P.C.D.9 MQR-M M x 0.8 thread length 0. ±0.0 x M x 0. thread length 6 P.C.D.8 MQR8-M M6 x thread length 0 ø. ±0.0 depth 0 ±0.0 x M x 0. thread length 6 P.C.D. Flange: MQR-F (for MQRF-M) 0 Flange: MQR8-F (for MQRF8-M) x ø. mounting hole ø +0. 0 depth 0 8. x =.6 P = 8. 6... x M x 0. thread length 8 P.C.D.8 øh8 (0 from end) ø0h8 (ø8) x ø. mounting hole ø0h8 () º 0 8 x M x 0.8 ø0 counter bore depth. 0 øh8 0.0 9 8. x =. P = 8... ø9h8 (0 from end) 6 8 6 8 øh8 6 6 x M x 0.8 ø0 counter bore depth. (8) 0 (ø0) P = º. x M x 0. thread length 8 P.C.D.

Dimensions: Standard Type/Flange Type MQR-M MQR-F M6 x thread length 0 +0.0 ø. depth0 x M x 0.8 ø0 counter bore depth. 8. x = 90. P = 8. 9. x ø. mounting hole ø 8 ±0.0 øh8 (0 from end) 0 ø0h8 0.0 8 9 0 x M x 0. thread length 6 P.C.D.8 Flange: MQR-F (for MQRF-M) 6 0 0 (ø0) ø0h8 0 9 8 6 Mounting Bracket/Flange P=0 x ø8 counter bore. ø. mounting hole x M x 0. thread length 8 P.C.D.8 MQR-F MQR6-M M8 x. thread length 0 ø. ±0.0 depth 8 0 ±0.0 x M x 0. thread length 6 P.C.D.8 8. x =. 6 Flange: MQR6-F (for MQRF6-M) 6 x M x 0.8 ø. counter bore P=8. 0... 6 x M x 0.8 ø0 counter bore. 8 x M x 0. thread length 6 P.C.D. x ø. mounting hole ø symbol indicates flange dimensions ø6h8 (0 from end) øh8 6 (ø9) ø0h8 6 6 0 9 8 6 6 6 6. 6 0 9 8 MQR8-F x ø8 counter bore. ø. mounting hole P=. 8. x ø. mounting hole ø MQR-F 9 x ø. mounting hole x ø8 counter bore. ø MQR6-F x ø. mounting hole x ø8 counter bore. ø 0 8 6

Rotary Joint/Precautions Be sure to read before handling. Design. A protective cover is recommended to minimize the risk of human injury. If a moving part poses a risk of human injury and/or damage to machinery/equipment, then a structure which prevents direct contact with that part should be adopted.. Securely tighten all stationary parts and connected parts so that they will not become loose. Secure fastening is particularly important when the rotary joint has a high operating frequency.. Provide safety devices in drive circuit. Collisions, or foreign material introduced by the air source, may cause scuffing or burning of rotating parts, which in turn leads to increased rotational torque. Install safety devices in the drive circuit accordingly.. Pressure Air leakage occurs in these products. They cannot be used for pressure holding in pressure vessels, etc.. Do not use in an emergency shutdown air circuit. These products are not designed for use in a safety circuit performing emergency shutdown. Other reliable safety protection means should be adopted for such systems. 6. Ensure room for maintenance. Leave sufficient space for maintenance work.. Releasing residual pressure. Provide a residual pressure release function in order to carry out maintenance work. 8. Using vacuum supply. When using a vacuum air supply, install a suction filter, or equivalent, to prevent infiltration of dirt and foreign material via the absorption pad or exhaust port. Selection. Confirm the specifications. The products advertised in this catalog are designed according to use in industrial compressed air systems. If the products are used in conditions where pressure, temperature, etc., are out of specification, damage and/or malfunction may be caused. Do not use in these conditions. (Refer to specifications.). Do not use for power transmission. These products are not designed to be used as bearings for transmitting power from a drive source, such as a motor. Such use may lead to rotation faults, or damage. Mounting. Prevent impacts on shaft when drive source is started. If excessive offset load is applied to the product, it may cause malfunction, breakdown, or personal injury or damage to machinery and equipment. Use a flexible coupling as illustrated below, to avoid direct radial load or axial load on the shaft. A rubber/resin coupling is recommended, due to its excellent absorption of off cente, shocks, and rvibrations. Please consult the coupling manufacturer to discuss the detailed operating conditions. Drive (motor) Flexible coupling Absorbs miscentering of drive coupling and start-up shocks Drive on body Rotary joint Fixed on adapter plate Flange. Do not make additions to this product. Any additions made to this product will weaken it and may cause product failure, leading to human injury and/or damage to machinery/equipment.. Allow freedom of movement when securing the shaft. If you do not allow some freedom of movement when fixing the shaft, then any eccentricity will cause abnormal wear, leading to malfunction, breakdown, and possible human injury and/or damage to machinery/equipment.. When the top is fixed, install a relief port (ø or more). This product leaks air to the outside. When the top is made airtight, an excessively large load may occur. This may lead to malfunction.. Confirm the model and size before installation. Check that there are no scratches, impact marks, cracks, or the like, on the product.. When connecting tubes, take account of variations in pressure according to tube length.. Do not wipe model designation on nameplate with organic solvents, etc. This will cause designation to disappear.. Do not knock rotary shaft when main unit is fixed, or knock main unit when rotary shaft is fixed. This may bend the rotary shaft and cause damage to the bearings. The rotary shaft should be fixed when attaching a load, etc. to it. K M H KK D MS LQ MQR T 9

Rotary Joint/Precautions Be sure to read before handling. Piping. Preparation before piping. Before piping is connected, it should be thoroughly blown out with air (flushed), to remove chips, cutting oil and other debris from inside the piping.. Wrapping of pipe tape. When screwing together pipes and fittings, etc., be certain that chips from the pipe threads and sealant material do not get inside the piping. Also, when pipe tape is used, leave approximately Expose approx. threads Wrapping direction Pipe tape thread ridges exposed at the end of the threads.. Screw tightening and tightening torque. Use the tightening torques in the table below, when screwing a fitting onto a piping port. Particular attention is required in the case of MQR ( circuit), as this joint supports the piping. Tightening Torque for Piping Connecting threads M Rc /8 Comments Fastening M thread fittings Tighten manually, and then tighten a further quarter-turn using the fastening tool. If using miniature fittings, tighten manually, and then tighten a further quarter-turn using the fastening tool. If there are two gaskets, such as a universal elbow or universal tee, the final tightening should be doubled to a half-turn. Note: Over-tightening of fittings may cause fracturing of the thread sections or deformation of the gaskets, leading to air leaks. If the fittings are under-tightened, the loosening of thread and air leaks may occur. Suitable tightening torque. to N m to 9 N m Lubrication. Lubrication. Due to the initial lubricant provided, the product can be used without lubrication.. Do not lubricate if using the product at low torque. Lubrication may cause an increase in the rotational torque, due to the viscosity and surface tension of the oil.. In the event that lubrication is applied, use turbine oil class (without additives) ISO VG. Refer to the brands of each turbine oil class (without additives) ISO VG manufacturer shown below. Turbine Oil Class (Without Additives) ISO VG Viscosity ISO viscosity Viscosity ISO viscosity cst (0 C) grade cst (0 C) grade Idemitsu Kosan Co., Ltd. Nippon Oil Co., Ltd. Cosmo Oil Co., Ltd. Turbine oil P- Turbine oil Cosmo turbine oil Kyushu Oil Co., Ltd. Mitsubishi Oil Co., Ltd. Showa Shell Sekiyu K.K. Stork turbine Mitsubishi turbine Turbine oil Japan Energy Corp. Kyoseki turbine TonenGeneral Sekiyu K.K General R turbine oil KYGNUS Turbine oil Fuji Kosan Co., Ltd. Fucoal turbine Please consult SMC regarding use of turbine oil class (with additives) ISO VG. 60 Air Supply. Use clean air. Do not use compressed air containing chemicals, synthetic oils containing organic solvents, salts, or corrosive gases, etc., as these can cause damage or malfunction.. Use the product within the range of specifications for fluid and ambient temperature. Take measures to prevent freezing when used at C or less, since moisture in circuits can freeze, causing malfunction.. Install air filters. Install air filters near valves on their upstream side. The filtration degree should be μm or less. Furthermore, when using at low friction, it is also recommended to use clean air (atmospheric pressure dew point temperature of 0 C) and install mist separator series AM (filtration degree 0. μm or less) or series AM + AMD (filtration degree 0.0 μm or less).. Install an after-cooler, air dryer or water separator (Drain Catch), etc. Air containing excessive drainage can cause malfunction of valves and other pneumatic equipment. To prevent this, install an after-cooler, air dryer or water separator, etc. Refer to the SMC s Air Cleaning Equipment catalog for further details on compressed air quality. Operating Environment. Do not use in environments where there is a danger of corrosion. Refer to the construction drawings regarding rotary joint materials.. Do not use in dusty locations or where water, oil, etc., will splash on the equipment. Maintenance. Perform maintenance according to the procedures indicated in the instruction manual. If handled improperly, malfunction and damage of machinery or equipment may occur.. During maintenance, do not perform any disassembly or assembly whilst the air supply is connected.. Drain flushing Remove condensate from air filters at regular intervals. Disassembly. The component parts of these products are manufactured to precision tolerances, and therefore cannot be disassembled.

Specific Product Precautions Be sure to read before handling. Refer to front matters 8 and 9 for Safety Instructions.. The metal seal structure means that port-to-port leaking occurs. Therefore, please note the following points when using different pressures at neighbouring ports. When using different pressures at normal pressure Use relieving type regulators. Leaks between ports are to be exhausted via the relief port of the regulator on the lower pressure side. Leak relieved via regulator on lower pressure side Low pressure High pressure Operation Using different pressures in vacuum As neither the ejector nor the vacuum pump has a relief function, pressure interference may occur. Install an atmospheric release port (blanking port) or normal pressure circuit between the pressure ports having different vacuum pressures. Low pressure High pressure K M H KK D MS LQ MQR T If neighbouring ports are used at different vacuum pressures, the vacuum pressure on the lower vacuum side will increase and hence it cannot be used. When combination of vacuum and normal pressures When using a compact vacuum ejector (suction flow rate approx. 0 L/min), the vacuum pressure drop is several kpa or so, depending on the supply source characteristics and the piping conditions. For more details, please refer to the flow rate characteristics graph provided in the vacuum pump catalogue, instruction manual, etc. High vacuum Atmospheric release Low vacuum Leak absorbed by ejector or pump For the rate of decline in the vacuum pressure, see suction flow rate characteristics graph for ejector and pump. Using atmospheric release port Vacuum Pressure High vacuum Normal pressure Low vacuum Using normal pressure port If using two or more ports at different vacuum pressures, an atmospheric release port or a normal pressure supply should be provided between the ports. 6

Specific Product Precautions Be sure to read before handling. Refer to front matters 8 and 9 for Safety Instructions. Mounting Drive (Motor) Spool Body Fixed Example of circuit Piping support Take care not to apply tension in a radial direction when installing the piping support. Direction of rotation If the rotation speed is fast, rotate the flexible coupling in a direction so that the rotary joint is tightened, namely, counterclockwise when the body rotates and clockwise when the spool rotates. Turn table Drive (motor, etc.) Fixed Example of adapter plate drive Flexible coupling If it is not possible to install the coupling on the drive side, install it on the fixed side. Do not use a piping support. Fixed (Body) Rotary joint Drive adapter plate Drive (Motor) Drive body Flexible coupling For absorbing center misalignment at the drive motor connection and shock at startups. Rotary joint Adapter plate Fixed Fixed flange (option) Example of body drive. Although the center misalignment of the drive shaft and fixed shaft is different due to the flexible coupling type and size, keep adjustments to 0. mm or less as a guide. Do not use piping support for or more circuits. If used for or more circuits, excessive radial load may occur momentarily (particularly at the start) due to piping tension and deflection, and it may cause excessive abrasion.. This product has a floating mechanism on the sleeve in order to keep the surface pressure of the metal seal part at a lower level even when rotating with the accumulated center misalignment of parts. If instantaneous shock occurs when starting and stopping rotation, the surface pressure may rise without working the floating mechanism and excessive abrasion may occur. Flexible coupling should be installed at the drive motor connection in order to protect the rotary joint from direct shocks. The recommended coupling is made by rubber or resin. These are excellent in center misalignment and adsorption of impact and vibration. (Reference coupling: Bellow Flex (Plastic bellows coupling) CHP model produced by Miki Pulley Co., Ltd.) For applicable reaction force of the coupling, refer to specifications on page. Select coupling with twice the safety factor against the value supplied by the coupling maker as the reaction force may be applied as a drive load especially with intermittent operation.. When the rotary joint is secured, align the drive shaft and the fixed shaft using the slip fit of the body adapter plate. Using the slip fit facilitates alignment of the axes. Relief port over ø should be installed when securing the top side. Since this product has slight air leakage, offset load may occur if sealing top side when mounting, and excessive abrasion may occur. Reference coupling/bellow Flex (Plastic bellows coupling) CHP Model produced by Miki Pulley Co., Ltd. Rotary joint type MQR MQR MQR8 MQR MQR6 CHP-0 CHP-6 Coupling part no. CHP-0 CHP-0 CHP- CHP-6 CHP- 6 Coupling reaction force Slip fit Slip fit Rubber or resin coupling Reference: CHP model produced by Miki Pulley Co., Ltd. Center misalignment Relief port Spool Sleeve (Floating mechanism) For absorbing center misalignment rubber O-ring Metal seal (Metal touch)