Huntington Mechanical Labs, Inc.

R Huntington Mechanical Labs, Inc. Huntington Mechanical Labs, Inc. 155 Nevada ity venue Grass Valley,. 95945 Toll Free: 800-227-8059 Local: 50-27-415 FX: 50-27-4165 Sales email: vacman@huntvac.com Website: www.huntvac.com VUUM VLVES TLOG 02.16 U.S. List Pricing ULTR-HIGH VUUM OMPONENTS

VLVES Sec on EV Series BF Series HT Series THIS SETION: VUUM VLVES ITEM PGE NGLE VLVES, MNUL & PNEUMTI BUTTERFLY VLVES 4, 5 PNEUMTILLY TUTED BUTTERFLY VLVES 6 BKEBLE LL METL VLVES 7 www.huntvac.com 800 227 8059 vacman@huntvac.com 1

Sec on VLVES Hun ngton Valves Uniquely Designed for: 100% onductance Fast Pump down Easy Maintenance Superior Seal Integrity Fail Safe Features Our standard pneuma c valves up to 2 1 / 2 are configured as air to open / spring to close, automa cally closing in the event of power or pressure failure. Standard Opera on Pneuma c valves operate at 60 to 100 psi @ 115 to 120V (60hz.) as standard. Op onal inputs can be configured upon request. Standard / Op onal Sealing Systems Hun ngton angle valves feature tapered seats, fullstroke actuators, and Unibody construc on with threaded actuator to body assembly. These unique design features provide important func onal benefits including superior seal integrity, maximum conductance, and faster pump down me. Less hance of a Virtual Leak Hun ngton ngle Valves are machined of solid bar stainless steel specifically selected for ultra high vacuum applica ons. The Unibody design requires fewer weld seams, thus elimina ng chances for a virtual leak. Outstanding Serviceability Hun ngton s machine threaded actuator to body connec on means there is no need to remove the valve body from the system when cleaning or replacing O rings. For pneuma cally operated valves our design completely isolates the spring and piston grease from the bellows and poppet when removing the actuator to change O rings. Standard sealing systems for Hun ngton valves include Viton O rings and OFE copper gaskets, op onally other seals may be specified. Viton is a widely used sealing material for vacuum applica ons due to it s demonstrated reliability at pressures ranging from atmosphere to 1 x 10 9 Torr. Viton is a fluorocarbon elastomer with broad spectrum chemical compa bility and a working temperature range of 29 to 204. The combina on of low cost and physical characteris cs suitable for most applica ons makes Viton one of the most common choices for vacuum valves. Op ons and Special Designs Hun ngton can modify most any standard valve listed to meet customer specifica ons, where possible. If op onal or modifica ons to a standard valve will not meet your requirements, please talk to our engineers about designing a special valve to your specifica ons. 2 www.huntvac.com 800 227 8059 vacman@huntvac.com

VLVES NGLE Sec on Dimensions: inches (mm) Material: 04 Stainless Steel w/viton O ring OPEN/ LOSE NGLE / MNULLY OPERTED TUBE / FLNGE TUBE ID OPEN LOSED PRT NUMBER PRIE $ NO FLNGES / 4 0.62 2.00.7 2.67 1.0 EV 07 90 1 1 / 2 1.7 2.25 5.50.77.0 EV 15 55 V U FLNGE Flanges (rotatable) 1 1 / 0.62 2.50.7 2.67 1.0 EV 075 445 2 / 4 1.7 2.46 5.50.77 4.0 EV 150 595 SPEED SYSTEM (KF) Flanges KF 16 0.62 2.50.7 2.67 1.0 EV 075 SF 45 KF 40 1.7 2.46 5.50.77.5 EV 150 SF 575 Other sizes available upon request, please call for quote. Material: 04 Stainless Steel w/viton O ring NGLE / PNEUMTILLY OPERTED TUBE / FLNGE TUBE ID H PRT NUMBER PRIE $ NO FLNGES 1 / 2 0.4 2.00 2.80 1.0 PV 05 525 / 4 0.62 2.00 4.62 1.0 PV 07 525 H 1 1 / 2 1.7 2.25 5.2.0 PV 15 690 V U FLNGE Flanges (rotatable) 1 1 / 0.4 2.05 2.80 2.0 PV 050 525 1 1 / 0.62 2.50 4.62 2.0 PV 075 580 2 / 4 1.7 2.46 5.2 5.5 PV 150 750 SPEED SYSTEM (KF) Flanges KF 16 0.4 2.50 2.80 1.0 PV 050 SF 525 KF 16 0.62 2.50 4.62 1.0 PV 075 SF 570 KF 40 1.7 2.46 5.2.5 PV 150 SF 70 Other sizes available upon request, please call for quote. Specifica ons Sealing Material: Viton O ring Bakeout Temperature: 200, maximum (solenoid removed) Opera ng Temperature: 29 to 200 w/solenoid: 29 to 40 Pressure Vacuum Range: tmosphere to 1 x 10 9 Torr Material Exposed to Vacuum: Stainless Steel, Viton Power Requirements (Pneuma c): 110V Std., Op onal: 220V, 12VD & 24VD Solenoids ctuator: ir to Open, Spring to lose Working ir Pressure: 60 to 120psi (4.1 to 8. bar) www.huntvac.com 800 227 8059 vacman@huntvac.com

Sec on VLVES BUTTERFLY Patented Bu erfly Design Provides Uniquely Superior Seal t last there is a truly viable and economical alterna ve to the gate valve for many high vacuum applica ons. Unlike other manufacturer s bu erfly valves that use only a thro le plate to limit the conductance through the opening of the valve, Hun ngton s patented bu erfly design provides a vacuum ght O ring seal. The new design allows the sealing plate to float within the valve orifice so that in closing it centers itself with even pressure around the O ring seal. This design also reduces scuffing or rolling of the O ring. This design has proven effec ve for isola ng a turbo pump, for example. In this applica on a flexible coupling may be fi ed between the valve and the pump to provide vibra on isola on and assure that the valve flapper remains clear of the pump blades in the fully open posi on. The patented design of these valves provides important func onal benefits for the vacuum scien st as well as benefits in economy and serviceability to the OEM. vailable in both manual and pneuma cally operated versions, this valve warrants serious considera on for many high vacuum applica ons. In short, you can count on Hun ngton s patented bu erfly valves to provide effec ve isola on, high conductance and long term reliability at substan al cost savings. Unique features include: Seal integrity to 1 x 10 9 Torr Excellent vacuum isola on Substan al cost savings over gate valves Dimensions: inches (mm) BUTTERFLY / MNUL / V U FLNGE VLVE SIZE FLNGE SIZE FIG. B D PRT NUMBER PRIE $ / 4 1 1 / 1 0.75 2.01 0.75 1.0 BF 075 0 1 1 / 2 2 / 4 1 0.75 1.4.71 1.25 2.0 BF 150 420 1 1.5.71 1.25 2.5 BF 150 1 450 2 / 8 1 1.00 1.90 4.90 1.75 4.0 BF 200 485 2 1 / 2 4 1 / 2 2 0.68 2.1 6.84 4.90 6.0 BF 250 880 4 6 2 0.98.8 8.01 4.90 8.0 BF 400 1440 D D B B THRU HOLES FIG. 1 FIG. 2 4 www.huntvac.com 800 227 8059 vacman@huntvac.com

VLVES BUTTERFLY Sec on Dimensions: inches (mm) VLVE SIZE FLNGE SIZE BUTTERFLY / MNUL / KF SPEED FLNGE FIG. B D PRT NUMBER PRIE $ / 4 KF 16 1.75 0.75 2.01 0.75 1.0 BF 075 SF 05 1 KF 25 2.00 1.00 2.75 1.00 1.5 BF 100 SF 0 1 1 / 2 KF 40 2.25 1.7.71 1.25 2.0 BF 150 SF 95 2 KF 50 2.25 1.00 4.90 1.75 4.0 BF 200 SF 445 D FIG. B Specifica ons Sealing Material: Viton O ring Bakeout Temperature: 200, maximum Opera ng Temperature: 29 to 100 Pressure Vacuum Range: tmosphere to 1 x 10 9 Torr Material Exposed to Vacuum: Stainless Steel & Viton BUTTERFLY VLVE GSKET KITS VLVE SIZE VLVE MODELS PRT NUMBER PRIE $ / 4 Fits BF 075, BF 075 SF, PBF 075 Models 0.5 BF 075 G 15 1 Fits BF 100, BF 100 SF, PBF 100 Models 0.5 BF 100 G 15 1 1 / 2 Fits BF 150, BF 150 SF, BF 150 1, PBF 150 Models 0.5 BF 150 G 15 2 Fits BF 200, BF 200 SF, PBF 200 Models 0.5 BF 200 G 20 2 1 / 2 Fits BF 250, BF 250 SF, PBF 250 Models 0.5 BF 250 G 25 4 Fits BF 400, BF 400 SF, PBF 400 Models 0.5 BF 400 G 0 www.huntvac.com 800 227 8059 vacman@huntvac.com 5

Sec on VLVES BUTTERFLY Dimensions: inches (mm) BUTTERFLY / PNEUMTI / V U FLNGE VLVE SIZE FLNGE SIZE B D PRT NUMBER PRIE $ / 4 1 1 / 1.00 0.64.82 1.65 1.8 PBF 075 840 1 1 / 2 2 / 4 1.00 1.4 5.9 1.97 2.6 PBF 150 90 2 / 8 1.00 1.90 6.58 1.97 4.4 PBF 200 1050 2 1 / 2 4 1 / 2 1.00 2.1 7.68 1.97 6.6 PBF 250 4 6 0.98.81 10.91 2.48 8.0 PBF 400 1250 1600 Specifica ons Sealing Material: Viton O ring Bakeout Temperature: 200, maximum (with ctuator removed) Opera ng Temperature: 29 to 60 Pressure Vacuum Range: tmosphere to 1 x 10 9 Torr Material Exposed to Vacuum: Stainless Steel, Viton Pneuma c ctuator: Port Size: #10 2 c va on: Rotary Vane Working ir Pressure: 60 to 120psi (4.1 to 8. bar) maximum Please see solenoid/switch op ons below. D lso available in Speed Flange (KF) models. Please call for quote. B Hun ngton s pneuma cally actuated bu erfly valves feature all the design and quality construc on advantages of our patented manual valves with the ability to automate processes per your applica on requirements. sturdy, compact actuator has been integrated to the valve while s ll offering manual opera on via a built in knob. Op ons include solenoids, indica on & limi ng switches, speed control valves and more. all Technical Sales today to spec out your system. SOLENOID OPTIONS POSITION SWITH OPTIONS OPTION ODE DD TO PRIE OPTION ODE DD TO PRIE SOLENOID, 110 V SOLENOID, 240 V SOLENOID, 12 VD SOLENOID, 24 VD 1 2 1D 2D $100 REED SWITH SR $210 6 www.huntvac.com 800 227 8059 vacman@huntvac.com

VLVES BKEBLE NGLE Sec on Bakeable ll Metal Valves Hun ngton s EV HT Series Provides a High Integrity opper Seal Even er Bakeout reliable seal is guaranteed with Hun ngton s cu ng edge design for all metal bakeable valves. EV HT series valves combine a high purity copper gasket and proprietary knife edge profile to provide a more versa le and longer las ng seal. EV HT copper gaskets can be easily replaced with nothing more than simple hand tools once the valve is removed from service. The robust all metal construc on includes stainless steel bellows, thick wall body and TIG welded connec ons for a long service life. The 5/8 hex nut a ached to our an seize lead screw easily applies the sealing force needed with the help of a torque wrench. En re Unit Bakeable The seal integrity of Hun ngton s patented all metal valves is not affected by bakeout temperatures up to 450. When baked, the valves must be under vacuum to prevent oxide buildup on seal surfaces. EV HT series valves have ample cycle life but are dependent on actual process parameters. Please contact customer service for more informa on. Dimensions: inches (mm) BKEBLE / NGLE / V U FLNGE FLNGE SIZE TUBE SIZE O (OPEN) (LOSED) PRT NUMBER PRIE $ 1 1 /.75 1.50 4.14.76.2 EV 075 HT 845 2 / 4 1.50 2.46 4.88 4.1 4.0 EV 150 HT 845 GSKET KITS VLVE MODEL PRT NUMBER PRIE $ EV 075 HT 0.5 EV 075 HT G 100 EV 150 HT 0.5 EV 150 HT G 100 Specifica ons Sealing Material: OFE opper Bakeout Temperature: 450 Torque to Seal: Procedure Detailed in Provided Instruc ons Pressure Vacuum Range: tmosphere to 1 x 10 11 Torr Material Exposed to Vacuum: Stainless Steel, OFE opper OPEN/LOSED (EV 150 HT Shown) www.huntvac.com 800 227 8059 vacman@huntvac.com 7

Sec on NOTES 8 www.huntvac.com 800 227 8059 vacman@huntvac.com