The MiCS-2714 is a compact MOS sensor.

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Transcription:

Rs/R0 Data Sheet The is a compact MOS sensor. The is a robust MEMS sensor for nitrogen dioxide and leakage detection. Features Smallest footprint for compact designs (5 x 7 x 1.55 mm) Robust MEMS sensor for harsh environments High-volume manufacturing for low-cost applications Short lead-times 100.00 10.00 NO2 Hydrogen 1.00 NO 0.10 Detectable gases Nitrogen dioxide NO 2 0.05 10ppm Hydrogen H 2 1 1000ppm 0.01 0.01 0.1 1 10 100 Concentration [ppm] Continuous power ON, 25 C, 50% RH For more information please contact: info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondrèche Switzerland www.sgxsensortech.com Page 1 of 5

Performance sensor Characteristic OX sensor Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R 0-0.8 20 k Typical NO 2 detection range FS 0.05 10 ppm Sensitivity factor (see note 2) S 60-2 - - Notes: 1. Sensing resistance in air R 0 is measured under controlled ambient conditions, i.e. synthetic air at 23 ±5 C and 50 ± 10% RH. Sampling test. 2. Sensitivity factor is defined as Rs at 0.25 ppm NO 2, divided by R S in air. Test conditions are 23 ± 5 C and 5% RH. Indicative values only. Sampling test. IMPORTANT PRECAUTIONS: Read the following instructions carefully before using the described here to avoid erroneous readings and to prevent the device from permanent damage. The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours. The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or cigarette-smoke in order to avoid poisoning the sensitive layer. Heater voltage above the specified maximum rating will destroy the sensor due to overheating. This sensor is to be placed in a filtered package that protects it against water and dust projections. SGX sensortech strongly recommends using ESD protection equipment to handle the sensor. Page 2 of 5

with recommended supply circuit (top view) Power circuit and measurement circuit R is 131. This resistor is necessary to obtain the right temperature on the heater while using a single 5 V power supply. The resulting voltages is typically VH = 1.7 V. with measurement circuit (top view) The voltage measured on the load resistor is directly linked to the resistance of the sensor. RLOAD must be 820 W at the lowest in order not to damage the sensitive layer. Parameter Symbol Typ Min Max Unit Heating power P H 43 30 50 mw Heating voltage V H 1.7 - - V Heating current I H 26 - - ma Heating resistance at nominal power R H 66 59 73 Rating Symbol Value / Range Unit Maximum heater power dissipation P H 50 mw Maximum sensitive layer power dissipation Ps 8 mw Voltage supplyheating current Vsupply 4.9 5.1 V Relative humidity range RH 5 95 %RH Ambient operating temperature Tamb -30 85 C Storage temperature range Tsto -40 120 C Storage humidity range RHsto 5-95 %RH Page 3 of 5

Package outline dimensions The package is compatible with SMD assembly process. Pin Connection Operating conditions A Rh1 B Rs1 C D E F G H J K Rh2 Rs2 configuration (bottom view) Sensor configuration The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top. The internal connections are shown above. Page 4 of 5

Power circuit The two resistors (82 ohm for RED and 51+82 Packaging ohm for OX) are necessary to obtain the right temperatures The sensors are on packaged the two independent a tape and heaters reel for while expedition. using a 5V power supply. The sensors are placed in a carrier type. The dimensions of the cavity are 5.5 x 7.5 x 2.55 mm (the tolerance is +/- 0.2 mm). The outside dimension of the reel is either 178 +- mm (for a maximum of 700 sensors ) or 330 + 0.25 / -4 mm (for a maximum of 2000 sensors). For more information please contact: info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondrèche Switzerland www.sgxsensortech.com Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein. Page 5 of 5