Pendulum control & isolation valve with extended control range with Logic interface

Pendulum control & isolation valve with extended control range with Logic interface This manual is valid for the valve ordering number(s): 651.. -.. GC -.... (1 sensor input) 651.. -.. GE -.... (2 sensor inputs) 651.. -.. AC -.... (1 sensor input / ±15V SPS) 651.. -.. AE -.... (2 sensor inputs / ±15V SPS) 651.. -.. HC -.... (1 sensor input / PFO) 651.. -.. HE -.... (2 sensor inputs / PFO) 651.. -.. CC -.... (1 sensor input / ±15V SPS / PFO) 651.. -.. CE -.... (2 sensor inputs / ±15V SPS / PFO) SPS = Sensor Power Supply configured with firmware 651P.1E.05 PFO = Power Failure Option The fabrication number is indicated on each product as per the label below (or similar): made in Switzerland Fabrication No.:.. patented 651.......... /.... A...... Fabrication number sample picture Explanation of symbols: Read declaration carefully before you start any other action! Keep body parts and objects away from the valve opening! Attention! Hot surfaces; do not touch! Product is in conformity with EC guidelines, if applicable! Loaded springs and/or air cushions are potential hazards! Disconnect electrical power and compressed air lines. Do not touch parts under voltage! Wear gloves! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! 1/53

Contents: 1 Use of product... 3 1.1 Technical data... 3 2 Installation... 6 2.1 Unpacking... 6 2.2 Installation into the system... 6 2.3 Tightening torque... 8 2.3.1 Mounting with centering rings... 8 2.3.2 Mounting with O-ring in grooves... 9 2.4 Admissible forces... 9 2.5 Requirements to sensor connection... 10 2.6 Electrical connection... 10 2.6.1 Sensor supply concepts... 10 2.6.2 Power and sensor connection (+24 VDC sensors)... 11 2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module... 12 2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module... 13 2.6.5 Logic interface connection... 14 2.6.6 Service port connection... 14 3 Operation... 15 3.1 Introduction... 15 3.1.1 Local operation... 15 3.1.2 Remote operation... 16 3.1.3 Safety mode... 16 3.2 Operation under increased temperature... 16 3.3 Behavior during power up... 16 3.4 Behavior in case of power failure... 17 3.5 Display information... 17 3.6 Setup procedure... 19 3.6.1 Interface configuration... 19 3.6.2 Valve and sensor configuration... 20 3.6.3 ZERO... 20 3.6.4 LEARN... 21 3.7 Close valve... 23 3.8 Open valve... 23 3.9 Position control... 23 3.10 Pressure control... 23 3.10.1 Operation with 2 sensors... 24 3.10.2 Tuning of control performance... 25 3.11 Logic interface... 28 3.11.1 Functions and Wiring... 29 3.11.2 Digital inputs... 31 3.11.3 Digital outputs... 33 3.11.4 Analog inputs and outputs... 34 4 Trouble shooting... 35 5 Maintenance & repairs... 37 5.1 Maintenance procedures... 38 5.2 Option board... 44 5.2.1 Durability of power fail battery... 44 5.2.2 Retrofit / replacement procedure... 45 6 Drawing... 48 7 Spare parts... 49 7.1 Control unit... 49 7.2 Valve unit... 50 7.3 Accessories... 51 7.3.1 Centering ring with Viton o-ring... 52 8 Warranty... 53 2/53

1 Use of product This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. 1.1 Technical data Control and actuating unit Power input 1) (α) +24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] [651.. -.. A. -.... / 651.. -.. G. -.... ] [651.. -.. C. -.... / 651.. -.. H. -.... ] 50 W max. (operation of valve with max. load) without PFO 4) 50 W plus 10 W for PFO 4) Sensor power supply 2) (β) [651.. -.. A. -.... / 651.. -.. C. -.... ] Input Output +24 VDC / 1500 ma max. ±15 VDC (±5%) / 1000 ma max. [connector: POWER] [connector: SENSOR] Sensor power supply 2) (β) [651.. -.. G. -.... / 651.. -.. H. -.... ] Input Output + 24 VDC resp. ± 15 VDC same as input but: 2.0 A max. at ± 15 VDC 1.5 A max. at + 24 VDC [connector: POWER] [connector: SENSOR] Calculation of complete power consumption: P tot = α + β whereas β depends on sensor supply concept and sensor power consumption. 3/53

Control and actuating unit (continuation) Sensor input Signal input ADC resolution Sampling time 0-10 VDC / Ri>100 kω 0.23 mv 10 ms [connector: SENSOR] Digital inputs 3) ±24 VDC max. [connector: INTERFACE] Digital outputs 3) Input voltage Input current Breaking capacity 70 VDC or 70 V peak max. 0.5 ADC or 0.5 A peak max. 10 W max. [connector: INTERFACE] Analog outputs 3) 0-10 VDC / 1 ma max. [connector: INTERFACE] PFO 4) battery pack [651.. -.. C. -.... / 651.. -.. H. -.... ] Charging time Durability 2 minutes max. up to 10 years @ 25 C ambient; refer to «Durability of power fail battery» for details Compressed air supply 4-7 bar / 55-100 psi (above ATM) Ambient temperature Pressure control accuracy 0 C to +50 C max. (<35 C recommended) 0.1% of sensor full scale DN 320 12" (65150 -...) DN 350 14" (65151 -...) DN 400 16" (65152 -...) Position resolution / position control capability 13333 steps 13422 steps 13511 steps (full stroke) (full stroke) (full stroke) Closing time throttling only 1.1 s typ. (full stroke) 1.3 s typ. (full stroke) 1.5 s typ. (full stroke) Opening time throttling only 1.1 s typ. (full stroke) 1.3 s typ. (full stroke) 1.5 s typ. (full stroke) Closing time throttling & isolation 6 s typ. (full stroke) 6 s typ. (full stroke) 6 s typ. (full stroke) Opening time throttling & isolation 6 s typ. (full stroke) 6 s typ. (full stroke) 6 s typ. (full stroke) 1) Internal overcurrent protection by a PTC device. 2) Refer to chapter «Sensor supply concepts» for details. 3) Refer to chapter «Schematics» for details. 4) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. 4/53

Valve unit Pressure range at 20 C - Aluminum (651.. -. A.. -.... ) 1 x 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized (651.. -. H.. -.... ) 1 x 10E-6 mbar to 1.2 bar (abs) - Aluminum nickel coated (651.. -. I.. -.... ) 1 x 10E-8 mbar to 1.2 bar (abs) Leak rate to outside at 20 C - Aluminum (651.. -. A.. -.... ) 1 x 10E-9 mbar l/s - Aluminum hard anodized (651.. -. H.. -.... ) 1 x 10E-5 mbar l/s - Aluminum nickel coated (651.. -. I.. -.... ) 1 x 10E-9 mbar l/s Leak rate valve seat at 20 C - Aluminum (651.. -. A.. -.... ) 1 x 10E-9 mbar l/s - Aluminum hard anodized (651.. -. H.. -.... ) 1 x 10E-4 mbar l/s - Aluminum nickel coated (651.. -. I.. -.... ) 1 x 10E-9 mbar l/s Cycles until first service - Isolation cycles (open - closed - open) - Throttling cycles (open - max. throttle - open) Admissible operating temperature Mounting position 200 000 (unheated and under clean conditions) 1 000 000 (unheated and under clean conditions) 10 C to +150 C horizontally only Wetted materials - Body (651.. -. A.. -.... ) Aluminum 3.2315 (AA6082) - Body (651.. -. H.. -.... ) Aluminum 3.2315 (AA6082) hard anodized - Body (651.. -. I.. -.... ) Aluminum 3.2315 (AA6082) nickel coated - Pendulum plate (651.. -. A.. -.... ) Aluminum 3.2315 (AA6082), 1.4310 (301), PTFE - Pendulum plate (651.. -. H.. -.... ) Aluminum 3.2315 (AA6082) hard anodized, 1.4310 (301), PTFE - Pendulum plate (651.. -. I.. -.... ) Aluminum 3.2315 (AA6082) nickel coated, 1.4310 (301), PTFE - Sealing ring (651.. -. A.. -.... ) Aluminum 3.2315 (AA6082), 1.4306 (304L) - Sealing ring (651.. -. H.. -.... ) Aluminum 3.2315 (AA6082) hard anodized, 1.4306 (304L) - Sealing ring (651.. -. I.. -.... ) Aluminum 3.2315 (AA6082) nickel coated, 1.4306 (304L) - Other parts Stainless steel 316L (1.4404 or 1.4435), 1.4122, 1.4310 (301), 1.4303 (304), 1.4571, A2 (304) - Seals Viton (standard). Other materials available. Seal materials are declared on dimensional drawing of specific valve ordering number. Max. differential pressure on plate during isolation Max. differential pressure on plate during opening and throttling Min. controllable conductance (N 2 molecular flow) Dimensions DN 320 12" (65150 -...) 1200 mbar in either direction DN 350 14" (65151 -...) 1200 mbar in either direction DN 400 16" (65152 -...) 1200 mbar in either direction 5 mbar 5 mbar 5 mbar 3.2 l/s 3.5 l/s 4.0 l/s Refer to dimensional drawing of specific valve ordering number (available on request) 5/53

2 Installation 2.1 Unpacking As this valve is a heavy component you should lift it with adequate equipment to prevent any injury to humans. Valves DN200 (8 ) and larger are equipped with attachment points (tapped holes). Add eyebolts to these attachment points for lifting. The attachment points are indicated on the dimensional drawing of the specific valve part number (available on request). Never lay the valve down with control and actuating unit downwards as it may be damaged. 2.2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts. The valve plate may start to move just after power is supplied. Do not connect or disconnect sensor cable when device is under power. Do not disconnect air supply when device is under power. Compressed air pressure must be in the range of: 4-7 bar / 55-100 psi (above ATM). Use only clean, dry or slightly oiled air. 6/53

1. Install valve [1] into the vacuum system. Valve seat side should face process chamber. The valve seat side is indicated by the symbol " " on the valve flange. Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque». Caution: Do not admit higher forces to the valve than indicated under «Admissible forces». Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated on the dimensional drawing. 2. Connect compressed air supply to connection labeled IN located at actuator, see Figure 1 below. Connect compressed air return line connection labeled OUT located at actuator, see Figure 1 below. Caution: Compressed air pressure must be in the range of: 4-7 bar / 55-100 psi (above ATM). Note: Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8 ISO/NPT internal threads. 3. Install pressure sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under «Requirements to sensor connection». 4. Connect sensor cable [3] to sensor(s) and then to valve (connector: SENSOR). Refer to chapter «Electrical connection» for correct wiring. Note: Input for second sensor is available on 651.. -... E -.... versions only. 5. Connect valve to Logic [4] (connector: INTERFACE). Refer to «Logic schematics» for correct wiring. 6. Connect power supply [5] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring. Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». 7. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8 ISO/NPT) could be connected to the vacuum line, see Figure 2 below. 8. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device. 9. Perform «Setup procedure» to prepare valve for operation. Note: Without performing the setup procedure the valve will not be able to do pressure control. OUT IN intermediate pumping port Fig. 1 Fig. 2 7/53

2.3 Tightening torque Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve. 2.3.1 Mounting with centering rings Valve size DN320 / 12 (65150 -.... -.... ) DN350 / 14 (65151 -.... -.... ) DN400 / 16 (65152 -.... -.... ) DN320 / 12 (65150 -.... -.... ) DN350 / 14 (65151 -.... -.... ) DN400 / 16 (65152 -.... -.... ) ISO-F max. tightening torque (Nm) ISO-F max. tightening torque (lbs. ft) 17-20 13-15 17-20 13-15 hole depth (mm) hole depth (inch) 18 0.71 20 0.79 Caution: Make sure that screws are not too long otherwise the valve body may be damaged. Note: Use slightly lubricated screws. Refer to «Spare parts and accessories» for centering rings ordering numbers. 8/53

2.3.2 Mounting with O-ring in grooves Valve size DN320 / 12 (65150 -.... -.... ) DN350 / 14 (65151 -.... -.... ) DN400 / 16 (65152 -.... -.... ) DN320 / 12 (65150 -.... -.... ) DN350 / 14 (65151 -.... -.... ) DN400 / 16 (65152 -.... -.... ) ISO-F JIS ASA-LP ISO-F JIS ASA-LP max. tightening torque (Nm) max. tightening torque (lbs. ft) 65-70 65-70 80-90 48-52 48-52 59-67 65-70 48-52 65-70 115-120 230-240 48-52 85-89 170-178 hole depth (mm) hole depth (inch) 18 18 18 0.71 0.71 0.71 18 0.71 20 25 25 0.79 0.98 0.98 Caution: Make sure that screws are not too long otherwise the valve body may be damaged. Note: These torques are valid if depth of the mounting screws is min. 1 x thread diameter. Make sure that screws in use are capable to withstand applied torques. Lubricate screws slightly. 2.4 Admissible forces Forces from evacuating the system, from the weight of other components, and from baking can lead to deformation and malfunctioning of the valve. Stress has to be relieved by suitable means, e.g. bellows sections. Valve size DN320 / 12 (65150 -.... -.... ) DN350 / 14 (65151 -.... -.... ) DN400 / 16 (65152 -.... -.... ) Axial tensile or Bending moment «M» compressive force «F A» N lb. Nm lbf. 3000 660 120 90 3500 770 140 105 4000 880 160 120 For a combination of both forces (F A and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. M F A 9/53

2.5 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: Inner diameter of connection pipe: Length of connection pipe: > = 10 mm < = 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present. Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. 2.6 Electrical connection 2.6.1 Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC. Concepts: External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors. Refer to chapter «2.6.2 Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring. External ±15 VDC supplied to POWER connector is feed through to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module» for schematic and correct wiring. External + 24 VDC supplied to POWER connector is converted into ±15 VDC by the valve internal SPS and supplied to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module» for schematic and correct wiring. Valve versions: 651.. -.. G. -.... / 651.. -.. H. -.... SPS module not included 651.. -.. A. -.... / 651.. -.. C. -.... SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. 10/53

2.6.2 Power and sensor connection (+24 VDC sensors) [651.. -.. G. -.... / 651.. -.. H. -.... versions recommended] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 11/53

2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module [651.. -.. G. -.... / 651.. -.. H. -.... versions only] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 12/53

2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module [651.. -.. A. -.... / 651.. -.. C. -.... versions only] Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. Note: Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! 13/53

2.6.5 Logic interface connection Refer to «Schematics» for wiring information. 2.6.6 Service port connection The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and a software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'. Alternatively the VAT Service Box 2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control. Refer also to «Local Operation» for details and to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. Connector: Use only screws with 4-40UNC thread for fastening the service port connector! 14/53

3 Operation Operation is allowed after completion of the installation procedure only. 3.1 Introduction This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. 3.1.1 Local operation Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from www.vatvalve.com or purchase our 'Control Performance Analyzer'. These software are beneficial especially for setup, testing and maintenance. How to start: Connect service cable, start software and push button LOCAL to enable for operation. Then enter menu Setup/Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed. Control view supports: - parameter setup - manual control - numeric monitoring - basic diagnostic 'Control Performance Analyzer' supports: - parameter setup - manual control - sequence control - numeric and graphical monitoring - data recording - data analysis - advanced diagnostic When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control. Refer to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. 15/53

3.1.2 Remote operation This product is equipped with a Logic interface to allow for remote operation. See section «Logic Interface» for details. Control View software, 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. Note: In case Control View or Control Performance Analyzer software is connected to valve make sure REMOTE button is pushed to enable for remote operation. In case Service Box 2 is connected to valve make sure the LED on button LOCAL is OFF for remote operation. 3.1.3 Safety mode By means of an external switch (see connection diagrams «Electrical connection») the motor power supply can be interrupted. In this case the valve enters the safety mode. This motor interlock prevents the valve from moving (e.g. maintenance work). Data reading from the control unit remains possible. When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize. Display shows D C or D999. In this case synchronization cycle will be done when motor interlock is deactivated. Then Display shows INIT for a moment followed by SYNC. When safety mode is entered from operation (i.e. pressure control mode), the unit will automatically switch to position control mode and remain at current position. Once motor interlock is deactivated the unit remains in position control mode. 3.2 Operation under increased temperature This valve may be operated in the temperature range mentioned in chapter «Technical data». 3.3 Behavior during power up Valve position before power up: Closed (isolated) All other than closed (not isolated) Refer also to chapter «Display information». Reaction of valve: Valve power up configuration = closed Valve power up configuration = open (default) Valve remains closed. Valve runs to max. throttle position to Display shows alternately C C and detect the limit stops to synchronize. INIT. Display shows configuration of product Synchronization will be done when first resp. SYNC until synchronization is movement command is received. done. Valve position after power up is open. Valve runs to max. throttle position to detect limit stop for synchronization. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is closed Valve position after power up is open 16/53

3.4 Behavior in case of power failure Valve position before Reaction of valve: power failure: Without Power Failure Option (PFO) 651.. -.. G. -.... 651.. -.. A. -.... 651.. -.. T. -.... With Power Failure Option (PFO) 651.. -.. H. -.... 651.. -.. C. -.... 651.. -.. U. -.... 651.. -.. V. -.... 651.. -.. W. -.... Closed (isolated) Valve remains closed. Valve will close or open depending Valve open or in any intermediate position Sealing ring moves down and blocks the pendulum plate at the current position. on valve configuration *). Default is not defined. Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. 3.5 Display information There is a 4 digit display located on the panel. It displays configuration, status and position information. For details refer to following tables. 1 2 3 4 Display 17/53

Power up: Description Digit 1 Digit 2 Digit 3 Digit 4 At first all dots are illuminated then configuration is displayed: Firmware version [e.g. 1E00] (1 st information for about 2s) Controller configuration (2 nd information for about 2s) In case D C or D999 is displayed, motor interlock is active. Refer to «Safety mode» for details. If valve is closed (isolated) display shows alternately C C and INIT. Synchronization will be done when first movement command is received. SYNC indicates that synchronization is running. 1 E 0 0 1 = Logic interface 0 = basic 1 = with SPS 1) 2 = with PFO 2) 3 = with SPS 1) and PFO 2) 1 = 1 sensor version 2 = 2 sensor version S Y N C 1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = optional Power Failure Option Operation: Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode P POSITION CONTROL mode Valve closed Valve open HOLD (position frozen) activated ZERO running LEARN running Safety mode established. Refer to «Safety mode» for details. Power failure V C O H Z L D F 0... 100 = valve position (%, 0 = closed / 100 = open) Service request 1) S R 1) If SR is blinking alternatively with the actual mode display (e.g. P.11..SR) the valve requires cleaning. 18/53

Errors: Description Digit 1 Digit 2 Digit 3 Digit 4 Compressed air failure (< 4 bar / 55 psi) A I R f Compressed air on exhaust A I R x Fatal error occurred E Error code. Refer to «Trouble shooting» for details 3.6 Setup procedure To enable this valve for pressure control setup steps 1 to 5 must be performed. In case position control is required only it s sufficient to perform steps 1 and 2. Setup step 1 POWER UP 2 3 INTERFACE CONFIGURATION VALVE CONFIGURATION 4 ZERO 5 LEARN Description Turn on external + 24VDC power supply (and external ±15 VDC for sensor power supply if required). Refer to chapter «Behavior during power up» for details. Refer to chapter «Interface configuration» for details. Basic configurations of the valve must be adapted according to application needs. Refer to chapter «Valve configuration» for details. Compensation of the sensor offset voltage. Refer to chapter «ZERO» for details. Determination of the vacuum system characteristic to accommodate the PID controller. Refer to chapter «LEARN» for details. Note: Without LEARN the valve is not able to run pressure control 3.6.1 Interface configuration Interface configuration must be adapted according to application needs. Functionality of digital inputs CLOSE VALVE and OPEN VALVE must be selected. These may be configured as not inverted or inverted. Default is not inverted. LEARN range configuration for remote operation must be selected. This may either be full range or pressure limit according of analog SETPOINT input. Default is full range. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Do configuration in menu Setup / Interface. Remote operation: Note: It s not possible to do Interface configuration via remote operation. 19/53

3.6.2 Valve and sensor configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position (CLOSE or OPEN) after power up sequence. Default is close. Definition of valve plate position (CLOSE or OPEN) in case of a power failure. Default is not defined. Only for versions that have Power Fail Option equipped [651.. -.. C. -.... or 651.. -.. H. -.... ]. ZERO function. This may be disabled or enabled. Default is enabled. Refer also to «ZERO». Sensor configuration for 2 sensor version [651.. -... E -....]. Refer also to «Pressure control operation with 2 sensors». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) 1. Do power up configuration in menu Setup / Valve. 2. Do power fail configuration in menu Setup / Valve. 3. Enable or disable ZERO function in menu Setup / Sensor. Remote operation: Note: It s not possible to do Valve and sensor configuration via remote operation. 4. Do 2 sensor configuration in menu Setup / Sensor. 3.6.3 ZERO ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/-1.4V can be compensated. The offset value can be read via local and remote operation. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to menu Zero / ZERO and follow instructions. Remote operation: (Refer to chapter «Digital inputs» for details) 1. Send OPEN VALVE 2. Wait until process chamber is evacuated and sensor signal is not shifting anymore. 3. Send ZERO Note: Do not perform ZERO as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result. Refer to manual of sensor manufacturer for warm up time. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1 of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. 20/53

3.6.4 LEARN LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles. This characteristic depends on various parameters such as chamber volume, conductance and flow regime. Therefore it must be performed with a specific gas flow according to instruction below. The result of LEARN is a pressure versus valve position data table. This table is used to adapt the PID parameters. The data table is stored in the device memory which is power fail save. The data table can be up-/downloaded via Control Performance Analyzer software or remote interface. Due to encoding the data may not be interpreted directly. By an OPEN VALVE, CLOSE VALVE, POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Learn / LEARN menu and follow instructions. Note: Gasflow calculation according to recommendation below is done automatically based on inputs. Remote operation: (Refer to chapter «Digital inputs» for details) 1. Set OPEN VALVE 2. Set specific gas flow according to calculation below and wait until flow is stable. Autolearn does not need to be performed with the process gas. Instead N 2 or Ar may be used. 3. Set SETPOINT ( = pressure limit for learn) to p max (max. pressure to control during process) 4. Set LEARN 5. Reset OPEN VALVE Note: Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. 21/53

Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Note: Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 1. At first it is necessary to find out about the required control range respectively its conductance values. Each working point (pressure / flow) must be calculated with one following formulas. Choose the applicable formula depending on units you are familiar with. 1000 q WP C WP = p WP C WP q WP p WP required conductance of working point [l/s] gasflow of working point [Pa m 3 /s] pressure of working point [Pa] C WP = q WP p WP C WP q WP p WP required conductance of working point [l/s] gasflow of working point [mbar l/s] pressure of working point [mbar] q WP C WP = 78.7 p WP C WP q WP p WP required conductance of working point [l/s] gasflow of working point [sccm] pressure of working point [Torr] 2. Out of these calculated conductance values choose the lowest. C R = min(c WP1, C WP2,..., C WPn) C R required lower conductance [l/s] C WPx required conductance of working points [l/s] Note: To make sure that the valve is capable to control the most extreme working point verify that C R C min of the valve (refer to «Technical data»). 3. Calculate gasflow for learn. Choose the applicable formula depending on units you are familiar with. q L = p max C R 2000 q L gasflow for learn [Pa m 3 /s] p max max. pressure to control [Pa] C R required lower conductance [l/s] q L = p max C R 2 q L gasflow for learn [mbar l/s] p max max. pressure to control [mbar] C R required lower conductance [l/s] q L = 39.4 p max C R q L gasflow for learn [sccm] p max max. pressure to control [Torr] C R required lower conductance [l/s] 22/53

3.7 Close valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push CLOSE button Remote operation: (Refer to chapter «Digital inputs» for details) Send CLOSE VALVE 3.8 Open valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Push OPEN button Remote operation: (Refer to chapter «Digital inputs» for details) Send OPEN VALVE 3.9 Position control The valve position is directly controlled according to the position setpoint. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter position setpoint Remote operation: (Refer to chapter «Digital inputs» and «Analog inputs and outputs» for details) 1. Set CONTROL MODE to POSITION CONTROL 2. Set position SETPOINT Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority. 3.10 Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas type). Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter pressure setpoint Remote operation: (Refer to chapter «Digital inputs» and «Analog inputs and outputs» for details) 1. Set CONTROL MODE to PRESSURE CONTROL 2. Set pressure SETPOINT Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority. 23/53

3.10.1 Operation with 2 sensors [applicable with 651.. -... E -.... version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges. Max. ratio is 100:1. It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input. Between 90 and 100% of the low range sensor full scale, the low range sensor is phased out while high range sensor is phased in. This maintains a functional response behavior in case of small calibration errors between the two sensors. The pressure output in this range is a blend between both sensors. For monitoring purpose each sensor signal may be read out individually. Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. 24/53

3.10.2 Tuning of control performance Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. Start Set all paramters to default Pressure control ok? No Reset gain factor to 1.0 Gain factor adjustment Sensor delay adjustment Setpoint ramp adjustment Valve speed adjustment Gain factor adjustment Pressure control ok? No Pressure control ok? No Pressure control ok? No Pressure control ok? No End Contact VAT Required information for support: Go to Tools / Create Diagnostic File in Control View resp. Control Performance Analyzer and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 25/53

3.10.2.1 Gain factor adjustment The gain factor effects: Stability Response time Default value is 1. Adjustment range is from 0.0001 to 7.5. Higher gain results in: faster response higher over- / undershoot of pressure Lower gain results in: slower response lower over- / undershoot of pressure Adjustment procedure: 1. Start with gain factor 1.0 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with lower (higher) gain factors until optimal pressure response is achieved and stability is ok. Note: Normally adjustments down to gain factors of 0.42 should lead to good results. Otherwise you may need to improve sensor connection. Refer to «Requirements to sensor connection». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Do configuration in menu Setup / Control Parameter. Remote operation: Note: It s not possible to do Interface configuration via remote operation. 3.10.2.2 Sensor delay adjustment Sensor delay adjustment effects: Stability Default value is 0. Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure. Note: Whenever possible sensors should be attached to the chamber according to «Requirements to sensor connection». This is the most effective measure against stability issues. If your gauge attachment fulfills these criteria do not use this parameter. Adjustment procedure: 1. Start with gain factor 1.0 and sensor delay 0s. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with higher sensor delays until best possible stability is achieved. 5. Adjustment gain factor again. Refer to «Gain factor adjustment». Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Do configuration in menu Setup / Control Parameter. Remote operation: Note: It s not possible to do Interface configuration via remote operation. 26/53

3.10.2.3 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure Response time Default value for S RAMP is 1. Adjustment range for S RAMP is from 0 to 10 s. This parameter affects the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time. Pressure chart Without setpoint ramp optimizing With setpoint ramp optimizing P SFS P START P END t Choose the applicable formula depending on units you are familiar with. t = S P RAMP SFS P START P END t ramptime [s] P SFS sensor full scale pressure S RAMP setpoint ramp [s] P START pressure start pressure end P END Adjustment procedure: 1. Start with optimal gain factor and sensor delay time according to preceding tuning steps. 2. Control a typical pressure / flow situation. 3. Control a lower pressure. 4. Repeat from step 2 with longer setpoint ramps until best response is achieved. 5. Verify pressure control response for a setpoint raise situation. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Do configuration in menu Setup / Control Parameter. Remote operation: Note: It s not possible to do Interface configuration via remote operation. 27/53

3.10.2.4 Valve speed adjustment Valve speed effects: Response time Default value is 1000. Adjustment range is from 1 to 1000. This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Note: Normally best pressure control response is achieved with max. valve speed. In particular applications it may be of advantage to have a slower valve response. Note: OPEN and CLOSE are always done with max. speed. Adjustment procedure: 1. Use optimal gain factor, sensor delay time and setpoint ramp according to preceding tuning steps. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with slower valve speed until required response is achieved. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Do configuration in menu Setup / Control Parameter. Remote operation: Note: It s not possible to do Interface configuration via remote operation. 3.11 Logic interface Default configuration: OPEN input CLOSE input OPEN output CLOSE output not inverted not inverted open close 28/53

3.11.1 Functions and Wiring Logic interface allows for remote operation by means of digital and analog signals. Digital inputs may be operated either by switches or by voltage sources. a) Configuration with switches for digital inputs: Note: Use a shielded cable for analog inputs. Do not connect other pins than indicated above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! 29/53

b) Configuration with voltage source for digital inputs: Note: Use a shielded cable for analog inputs. Do not connect other pins than indicated above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! 30/53

3.11.2 Digital inputs Pin Function Signal type Description Priority 7 CONTROL MODE Digital Input 1) This pin selects the control mode. This valve may either be operated as pressure controller or as position controller. PRESSURE CONTROL is activated as long as optocoupler is on. The PID controller controls the chamber pressure according to the pressure SETPOINT by means of the valve position. POSITION CONTROL is activated when optocoupler is off. The valve position is directly controlled according to the position SETPOINT. 6 2) This pin selects the SETPOINT RANGE. Low range extension is activated as long as optocoupler is on. It s effective in pressure control mode only. This function extends the lower 10% range of sensor full scale (SFS) to the full 0-10V for SETPOINT input. Herewith you can achieve better resolution, especially in case of a 2 sensor system. Example with SFS = 100mTorr: Not active (10V=100%) >> 10V setpoint = 100mTorr Active (10V=10%): >> 10V setpoint = 10mTorr 5 SETPOINT RANGE Digital input 1) N/A 16 HOLD Digital input 1) This function stops the valve at the current position. After release of the signal the valve will return to the selected CONTROL MODE. This function is activated as long as optocoupler is on. 5 2) This function will open the valve. 17 OPEN VALVE Digital input 1) This function is activated as long as optocoupler is on in non inverted configuration. This function is activated as long as optocoupler is off in inverted configuration. 3 2) Configuration can be done in local operation via service port. Default settings is not inverted This function will close the valve. 15 CLOSE VALVE Digital input 1) This function is activated as long as optocoupler is on in non inverted configuration. This function is activated as long as optocoupler is off in inverted configuration. 2 2) Configuration can be done in local operation via service port. Default settings is not inverted 1) All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to «Function and wiring» for details about input circuit. 2) Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. 31/53

Pin Function Signal type Description Priority This function compensates the pressure gauge offset voltage and sets the pressure value to zero. In case of a 2 sensor system both sensor inputs will be adjusted. 3 ZERO Digital Input 1) This function is initiated by the off to on transition of the optocoupler. If on remains established this will not re-initiate the function and does also not block functions with lower priorities. Note: Do not perform ZERO as long as pressure gauge voltage is shifting. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1%o of sensor full scale. We recommend disabling ZERO function in this case. You can disable the function in local operation via service port. 1 2) The LEARN routine determines the control characteristic of the vacuum system. 19 LEARN Digital Input 1) This function is initiated by the off to on transition of the optocoupler. A transition from on to off while the routine is running would stop it. While running, the routine may not be interrupted by another function with higher priority. If on remains established after completion this will not re-initiate the function and does also not block functions with lower priorities. Note: Without a LEARN data set the PID controller is not able to perform pressure control. 4 2) 18 LOCK Digital input 1) This function locks the valve in remote operation. In case the valve is in local operation it will turn to remote operation. Local operation via service port is not possible when LOCK is activated. When the signal is released the valve remains in remote operation but local operation may be activated via service port. N/A 6 DIGITAL GROUND Digital ground Ground for all digital inputs. Ground is used when digital inputs are operated by switches. Connect switches to ground. Refer also to «Function and wiring» configuration a). 4 DIGITAL COMMON Digital common Common for all digital inputs. Common is used when digital inputs are driven by voltage sources. Connect + or terminal of source with common (input optocouplers are capable of bidirectional operation). Refer also to «Function and wiring» configuration b). 1) All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to «Function and wiring» for details about input circuit. 2) Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. 32/53

3.11.3 Digital outputs Pin Function Signal type Description This output is active in all operation modes and indicates either that the valve is open or that a service is requested. 8 VALVE OPEN SERVICE REQUEST Digital output 1) A service request is indicated when the valve requires cleaning due to contamination. Configuration of the functionality of this output can be done in local operation via service port. By default the output indicates open This output is active in all operation modes and indicates either that the valve is close or that a service is requested. 9 VALVE CLOSED SERVICE REQUEST Digital output 1) A service request is indicated when the valve requires cleaning due to contamination. Configuration of the functionality of this output can be done in local operation via service port. By default the output indicates close The meaning of the alarm output depends on the operation mode. 22 ALARM 21 READY 20 COMMON Digital output 1) Digital output 1) Digital common LEARN: LEARN is not completed yet. PRESSURE CONTROL: Actual pressure is out of ±2% range of SETPOINT POSTION CONTROL: Actual position is out of ±0.1% range of SETPOINT This signal indicates that the valve is ready for remote operation. If this signal is not active the valve is in one of the following modes: Synchronization during power up Local operation via service port Safety mode. Refer to «Safety mode» for details. Common for all digital outputs. 1) Refer to «Function and wiring» for details about output circuit. 33/53

3.11.4 Analog inputs and outputs Pin Function Signal type Description The meaning of the setpoint input depends on the operation mode. LEARN: A voltage of 0-10V shall be applied to this input as pressure limit for learn. The limit pressure is in linear relation to the applied voltage. 10V relates to sensor full scale. In case of 2 sensor operation 10V relates to sensor 1 full scale (high range). Note: To activate pressure limit function for remote operation it must be configured accordingly. Refer to «Interface configuration» 25 SETPOINT 12 PRESSURE 11 POSITION 13 ANALOG GROUND 1 CHASSIS GROUND Analog input 1) Analog output 1) Analog output 1) Analog ground Chassis ground PRESSURE CONTROL: A voltage of 0-10V shall be applied to this input as pressure setpoint. The pressure setpoint is in linear relation to the applied voltage. Depending on selected SETPOINT RANGE 10V means either sensor full scale or 10% of sensor full scale. In case of 2 sensor operation 10V relates to sensor 1 full scale (high range). POSITION CONTROL: A voltage of 0-10V shall be applied to this input as position setpoint. The position setpoint is in linear relation to the applied voltage. 0V is closed but not isolation function and 10V is open position. (Use digital input for isolation function) This output indicates the current pressure as 0-10V. The output voltage is in linear relation to the pressure. Depending on the selected SETPOINT RANGE 10V means either sensor full scale or 10% of sensor full scale. In case of 2 sensor operation sensor full scale relates to sensor 1 (high range). This output indicates the current valve position as 0-10V voltage range. The voltage is in linear relation to the valve position. 0V is closed but not isolation function and 10V is open position. (Use digital output for isolation function) Ground for analog input and analog outputs. Chassis ground connected to case. Shall be used to connect cable shield. 1) Refer to «Function and wiring» for details about input / output circuit. 34/53

4 Trouble shooting Failure Check Action No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Remote operation does not work Display shows «E 20» (fatal error - limit stop of valve unit not detected) Display shows «E 22» (fatal error - rotation angle of valve plate limited during operation) Display shows «E 40» (fatal error - motor driver failure detected) Display shows «D C» or «D999» Motor Interlock is open Display shows «SR» (Service Request) CLOSE VALVE does not work OPEN VALVE does not work Display shows «M C» Maintenance mode active Display shows «M100» Maintenance mode active POSITION CONTROL does not work COMPRESSED AIR FAILURE - Local operation via service port active - Safety mode active, check for D on display? - Valve plate mechanically obstructed? - Switch to remote operation. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Replace actuator according to «Maintenance procedures». - Resolve obstruction. - Replace control unit according to «Maintenance procedures». - Motor power supplied? - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Valve unit heavy contaminated or gate seal heavyly sticking? - Safety mode active, check for D on display? - Maintenance mode active - Safety mode active, check for D on display? - Maintenance mode active - Safety mode active, check for D on display? - POSITION CONTROL selected, check for V on display? - No or too less air pressure on air input of valve - Clean valve and/or replace gate seal according to «Maintenance procedures». - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Refer to Display shows «M C» in this table - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Refer to Display shows «M100» in this table - Pin 14 of service connector is connected to ground. Plate will close. Further movement of plate is blocked. 1) - Pin 13 of service connector is connected to ground. Plate will open. Further movement of plate is blocked. 1) - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select POSITION CONTROL mode. Refer to «Position control» for details. - Connect air or increase air pressure. Make sure that the air pressure is more than 4 bar (55 psi). 1)Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8. 35/53

Failure Check Action Pressure reading is wrong - Sensor(s) connected? - Refer to «Electrical connection». or pressure reading is negative - 2 sensor version present at valve controller? ZERO does not work Pressure is not 0 after ZERO PRESSURE CONTROL does not work PRESSURE CONTROL not optimal - Check valve version on page 1. Verify configuration. Refer to «Setup procedure». - ZERO done? - Perform ZERO when base pressure is reached. Refer to «ZERO» for details. - Does sensor power supply provide enough power for sensor(s)? - Valve in open position, check for O on display? - Verify sensor supply voltage. - OPEN VALVE and bring chamber to base pressure before performing ZERO. - ZERO disabled? - Enable ZERO. Refer to «Valve and sensor configuration» for details. - Sensor voltage shifting? - Wait until sensor does not shift any more before performing ZERO. - System pumped to base pressure? - Sensor offset voltage exceeds ±1.4V - Safety mode active, check for D on display? - PRESSURE CONTROL selected, check for P on display? - OPEN VALVE and bring chamber to base pressure before performing ZERO. - Replace pressure gauge. - Provide power to motor to allow for operation. - Refer to «Electrical connection» for details. - Select PRESSURE CONTROL mode. Refer to «Pressure control» for details. - LEARN done? - Perform LEARN. Refer to «Setup procedure» for details. - Setup done completely? - Perform «Setup procedure» completely. - LEARN done? - Perform LEARN. Refer to «LEARN» for details. - ZERO performed before LEARN? - Perform ZERO then repeat LEARN. Refer to «Setup procedure» for details. - LEARN interrupted? - Repeat LEARN. Refer to «LEARN» for details. - Was gas flow stable during LEARN? - Repeat LEARN with stable gas flow. Refer to «LEARN» for details. - Tuning done? - Tune valve for application. - Refer to «Tuning of control performance» for details. - Is sensor range suited for application? - Use a sensor with suitable range (controlled pressure should be >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch 36/53

5 Maintenance & repairs Under clean operating conditions, the valve does not require any maintenance during the specified cycle life. Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:.. patented............. /.... A...... Fabrication number has always to be specified. All supplies (e. g. compressed air, electrical power) must be disconnected for removal/installation of the valve from/into the system. Even with disconnected supply, loaded springs and/or air cushions in cylinders can be potential hazards. Keep fingers and objects away from the valve opening! Products returned to VAT must be free of harmful substances such as e.g. toxical, caustic or micro-biological ones. If products are radioactively contaminated, fill in the VAT form «Contamination and Radiation Report» and send it with the product. The form is available at VAT. The maximum values indicated in the form must not be exceeded. 37/53

5.1 Maintenance procedures Keep fingers out of the valve during maintenance work. Use cleanroom gloves during maintenance work. Two preventive maintenance procedures are defined for this valve. These are: Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning Replacement of actuator or actuator shaft seals Required frequency of cleaning and replacement of seals is depending on process conditions. A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: unheated *) heated 80 C *) heated > 80 C *) isolation seals (gate and body seal of sealing ring) 200 000 cycles 6 months but max. 200 000 cycles 3 months but max. 200 000 cycles actuator shaft seals 1 000 000 cycles 6 months 3 months *) This figures are reference values for clean conditions under various temperatures. These values do not include any impact of the process. Therefore preventive maintenance schedule has finally to be checked for the actual process conditions. Prevent gap between body and sealing ring from air gun cleaning. Otherwise vacuum grease may be distributed and contaminate the valve. valve body gap sealing ring pendulum plate Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning Replacement of actuator or actuatorshaft seals 38/53

Note: Electrical power and compressed air is required to perform steps 2 to 9 during disassembly respectively 9 to 2 during assembly. D e s c r i p t i o n Required tool 1. Vent both valve chambers. 2. Open bonnet screws. Press snap in fixation on one side and pull bonnet a little bit on that side. Than press snap in fixation on other side and remove valve bonnet. snap in fixation Caution: Weight of valve bonnet is approx. DN320 / 12 13.0 kg (65150 -.... -....) Allen wrench 8mm DN350 / 14 (65151 -.... -....) DN400 / 16 (65152 -.... -....) 15.0 kg 18.0 kg 3. Open valve Caution: Stand away from valve pendulum plate moves out of the valve body. 4. Unfasten mounting screw for pendulum plate. 5. Remove pendulum plate. open end wrench 13mm pendulum plate mounting screw for pendulum plate 6. With one hand press the MAINTENANCE BUTTON to lower the sealing ring, with your second hand unlock the sealing ring by pressing the handle. 7. Release MAINTENANCE BUTTON. 8. Remove sealing ring. 9. To prevent the shaft and retaining pins from moving during work, switch the valve to safety mode. Refer to «Safety mode» for details. Note: Retaining pins will move up. maintenance button 39/53

10. Remove gate and body o-ring from sealing ring carefully with a soft tool. 11. Remove grease residues at sealing ring with alcohol. Clean sealing ring and pendulum plate with alcohol or in an ultrasonic bath. D e s c r i p t i o n Required tool 12. Clean out valve body with alcohol. Use an appropriate non metal tool with a cloth to enter valve body. Do not enter valve body with hands! Then blow out valve body with clean air. Do not directly expose seals (actuator and retaining pin feedthroughs) to air stream! 13. Clean or replace gate seal if necessary. Install gate o-ring to sealing ring without grease. Valve size 14. Clean or replace body seal if DN320 / 12 necessary. (65150 -.... -....) Lubricate body o-ring with the DN350 / 14 quantity of vacuum grease listed in (65151 -.... -....) the table to the right. DN400 / 16 (65152 -.... -....) 15. Install body o-ring into sealing ring. 16. Deposit vacuum grease on the bottom side of the body seal according to drawing below. Pay attention that the quantity of vacuum grease listed in the table to the right is distributed constantly over the whole circumference. Valve size DN320 / 12 (65150 -.... -....) DN350 / 14 (65151 -.... -....) DN400 / 16 (65152 -.... -....) gate seal body seal Quantity of grease [ml] 0.3 0.4 0.4 Quantity of grease [ml] 0.5 0.7 1.1 Apply grease deposit on this side Note: For Replacement of actuator or actuator shaft seals, proceed with step 18 otherwise go to step 17. 17. Reassembly the valve in reverse order, step 9 3. 18. Close the valve bonnet, see step 40. 40/53

D e s c r i p t i o n Required tool CV software 19. Release the valve from safety mode. Refer to «Safety mode» for details 20. Move the valve to position 50% (half opened) This is necessary, in order to dismount the actuator. See step 24. 21. Disable PFO option feature via 'Power Fail Status' in menu 'System' of CV or CPA software, and turn off the power CPA software or Service Box 2 22. Disconnect 24VDC power. Wait for 60s, then disconnect cable and compressed air from valve actuator. 23. Unfasten all 4 controller screws and lift controller carefully from actuator. Allen Wrench 4 mm 24. Unfasten all 3 actuator screws and remove actuator. Allen Wrench 5 mm 41/53

D e s c r i p t i o n Required tool 25. Remove actuator shaft seals carefully with a soft tool. 26. Clean actuator feedthrough with alcohol. 27. Lubricate each o-ring groove with 0.1 ml vacuum grease. Pay attention that grease is distributed constantly over the whole circumference. Soft tool (o-ring remover) Vacuum grease 28. Clean or replace seals if necessary. Lubricate each o-ring with 0.05 ml vacuum grease. 29. Install o-rings. 30. Deposit 0.1 ml vacuum grease on each o-ring. Pay attention that grease is distributed constantly over the whole circumference. 31. Remove fixation kit and mounting screw for pendulum plate. 32. Clean screw and slightly lubricate thread with 0.1 ml vacuum grease, then reinstall fixation kit. 33. Clean actuator shaft and lubricate it with 0.1 ml vacuum grease. 34. Install actuator Tighten actuator screws with 6 Nm. Remove vacuum grease from actuator shaft face after installation. Allen Wrench 5mm 35. Install controller Tighten the controller screws with 1 Nm. Connect cables at controller Connect compressed air at actuator Allen Wrench 4mm 42/53

D e s c r i p t i o n 36. Turn on power of controller. Note: valve moves to close position. 37. Open valve and install sealing ring and pendulum plate in reverse order as they had been disassembled (steps 9 to 3). If actuator was replaced, proceed with point 38, otherwise go to point 40. 38. Close valve and check if pendulum plate is in center of flange. Check can be done either visual or by measurement. When the valve is mounted to a tool, the bonnet has to be removed and the center position can be measured by a depth gauge (see picture). If the centering (or distance) is not correct, proceed with point 39. D DN Required tool open end wrench 13mm Distance D [mm] between bonnet flange surface and pendulum plate 320 60.5 ±0.5 350 59.0 ±0.5 400 62.0 ±0.5 39. f necessary adjust pendulum plate: a. Move pendulum plate a little towards open (e.g. position 1% of full stroke) b. Use adjustment screw at flange side of actuator (1 turn clockwise adjusts pendulum plate by about 3mm towards open). c. Restart valve in menu System/Recovery d. Check pendulum plate position according point 38 38and redo adjustment procedure if necessary. Adjusting screw mounted either in actuator position «B1 standard» or «B2 option» Allen wrench 3mm 40. Clean valve bonnet sealing surface and o-ring Mount valve bonnet, see step 2. Tightening torques for bonnet screws, see in table to the right. Max. torque 16 Nm Allen wrench 8mm 43/53

5.2 Option board The option board may or may not be equipped in your valve depending on the order. Refer to page 1 of this manual to check valve version. This board includes the optional modules for the valve which are: ±15VDC sensor power supply (SPS) Power failure option (PFO) It is available in 3 versions. These are: SPS module only PFO module only SPS and PFO module The modules may be retrofitted or replaced easily. The battery lifetime of the PFO module depends on the ambient temperature (see below). To assure PFO function the option board must be replaced after battery life has expired. For ordering number of the modules refer to «Spare parts and accessories». 5.2.1 Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 degree C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 degree C, the corresponding life time curve will be somewhere in between the upper and the lower curve. Therefore please determine the equivalent maintenance period for replacing the UltraCap battery (Option board). 120 100 Durability [months] 80 60 40 w/o SPS module, valve unheated with SPS module, valve unheated w/o SPS module, valve heated with SPS module, valve heated 20 0 20 25 30 35 40 45 50 Ambient temperature [ C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. 44/53

5.2.2 Retrofit / replacement procedure ESD Precaution! All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage! Top view on control and actuating unit with panel removed: Master board Option board Interface board Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! 45/53

Description Required tool 1. Remove female screw locks from POWER, SENSOR and INTERFACE connectors. Open end wrench 4.5 mm 2. Remove the panel screws. Pozidriv screw driver size 1 3. Lift the panel carefully. 4. Push the connector release (1) a little down and disconnect fan cable (2) from option board. 2 1 46/53

Description Required tool 5. Remove or replace interface board. 6. Remove or replace master board. 7. Remove or replace option board. 8. Insert master board and interface board in reverse order as disassembled at correct positions (seesteps 6 to 5). 9. Reconnect fan cable to option board (see step 4). 10. Insert option board (see step 7). 11. Place the panel and tighten panel screws with 1.1 Nm (see steps 3 to 2). 12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with 1.1 Nm (see step 1). Pozidriv screw driver size 1 Open end wrench 4.5 mm 47/53