Technoogy VACUUM Vacuum wands Accessories Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 1
Vacuum wands Features The unique vave* ensures reiabe suction and instantaneous reease of a wafer. The we-poished inner wa of the vave minimizes partice generation. The opticay poished wafer tip provides exceent adhesion to a wafer. The wand body can be easiy detached from the tubing. C series for ESD protection The conductive nyon body reduces eectrostatic effects towards a wafer. The wafer tip is made of conductive poyetheretherketone (PEEK). A resistance of 10 6 10 8 Ohms provides optimum static protection. F series for ow partice emission Wand body of poytetrafuoroethyene (PTFE) for chemica resistance. A arge seection of wafer tips is avaiabe in PCTFE, PEEK and Vespe (for high temperature appications). *US patent 4767142, Japanese patents 1698352 and 1885465. Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 2
Body Tip C: C series F: F series Vave Connection Tip materia 3F: PCTFE (poychortrifuorethyene) CP: conductive PEEK (poyetheretherketone) PK: PEEK (poyetheretherketone) VP: Vespe (poyimide) SS: SUS (stainess stee) PPS: poyphenyene suphide Vespe and Tefon are registered trademarks of DuPont K.K. 1: NC (normay cosed) Push the button to pick up the wafer. : ba swive joint Y: fixed joint Z: coet chuck joint 2: NO (normay open) Push the button to reease the wafer. Size 248 mm 3: NO/S (normay open with on/off switch) Push the button to reease the wafer. The switch maintains the system vacuum when not in use. Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 3
C series The conductive nyon covered body reduces eectrostatic effects towards a wafer. The wafer tip is made of conductive PEEK. The resistance of 10 6 10 8 Ohms provides optimum static protection. 90 95 Tips C series bodies 91 96 C001--97-CP C002-Y-92-CP 92 97 C003-Y-92-CP 98 connection C series tips L1 W T Seection chart, avaiabe Mode Materia W afer Size (mm) 5 " 6 " 8 " 12" T W L1 Tip C001- C002- C003- Body C001-Y C002-Y C003-Y 90-CP 3 16 26 82 90-CP 91-CP 3 26 33 89 92-CP 5 32 39 95 95-CP Conductive 7 15 28 37 96-CP PEEK 7 27 32 42 97-CP 6 31 37 43 98-CP 0 32 39 128 99-CP 4. 0 48 58 141 91-CP 92-CP 95-CP 96-CP 97-CP 98-CP 99-CP Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 4
Stands Stands for C series wands are mouded in acryic resin. Avaiabe in vertica position (wa mounting) and horizonta position (tabe-top). The 658 and 659 types are designed for NO, normay open wands, and incoporate am auto-off feature which maintains system vacuum when the wand is not in use. 658, 659 651 658 To be mounted on the wa with adhesive tape/screws. For use in horizonta position Mode Materia Body C001 C002 651 652 659 652 Conductive nyon + 658* acryic resin 659* Tubing, avaiabe *Vacuum turns on when removed from the stand and shuts off when returned. L1 L3 D1 D2 Mode Materia Size (mm) D1 D2 L1 L3 Weight (g) 851-L Conductive poyurethane estmer 6 4 500 400 1900 118 851-M 5 3 500 400 1900 84 Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 5
F series The body is made of PTFE for chemica resistance. A arge seection of wafer tips is avaiabe in PCTFE, PEEK or Vespe (for high temp.). F series bodies 01 02 06 Tips 13 12 11 F001--01-3F 09 F003-Z-05-3F F002-Y-14-3F 03 05 F series tips 04 14 15-3F connection 15-PK PCTFE PEEK Vespe 3F PK VP 15-VP Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 6
F series tips L1 Mode W afer Size (mm) M ateria 4 " 5 " 6 " 8 " 12" T W L1 W 01-5 15 26 35 02-5 13 21 30 03-5 26 31 40 04-5 40 18 25 05-7 31 34 41 06-5 10 21 30 09-7 26 30 35 11-2 15 25 77 12-1. 7 20 22 60 13- SS 0. 9 16 21 63 14-6 31 34 86 15-3F 4 47 55 162 15- PK 0 47 55 162 15- VP 0 51 61 180 T, avaiabe Seection chart Tip Body Materia F001- F002- F003- F001-Y F002-Y F003-Y F001-Z F002-Z F003-Z 01-02- 03-04- 05-06- 09-11- 12-13- SS 14-15- Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 7
Stands Stands are designed to hod the wand in a safe, readyto-use position. Mouded in acryic resin, they are avaiabe for wa (vertica position: 651, 658) or tabetop (horizonta position: 652, 659) use. See iustrations on page 5. Mode 651 Materia Body F001 F002 652 Conductive nyon + 658* acryic resin 659* 601 602 Accessories (For stands and tubing see page 5 and above), avaiabe *Vacuum turns on when removed from the stand and shuts off when returned. Condition tester - 901 Leaks (indicating the wand tip requires repacing) are detected by measuring the vacuum eve. The testing surface is made of PPS. Dimensions (mm): D, 120; W, 60; H, 45. Weight: 350 g. Vacuum pumps Oi-free for cean-room use. Long-term high reiabiity. Designed to minimise noise generation. Specifications Mode FV-30 FV-60 FV-30 Pumping power (/min) 2. 5 2. 5 Utimate pressure (mm Hg) 300 600 Power consumption (W) 5 10 Dimensions (mm) (D x W x H) 132 x 76 x 67 140 x 80 x 140 Weight (g) 800 1900 FV-60 Static-dissipative grounding kit 858 Windrush Technoogy Ltd. Te: +44 1993 774499. Fax: +44 870 123 6263. Emai: enquiries@windrush.net 8