ULPA/EPA SERIES ULPA/EPA FILTER SERIES TERRACEL TERRAKLEEN LUNACEL LUNACEL C LUNACEL IE LUNAKLEEN LUNAKLEEN CF LUNAVEE LUNAVEE IE LUNAOO CLEAN FLO CLEAN FLO RSC CLEAN FLO F ZANNACEL ZANNACEL IE ZANNAVEE IE JAPAN AIR FILTER
ULPA/EPA FILTER SERIES Summary ULPA/EPA filters filter out extra-fine particles in the air stream. They are widely utilize when high purity of air are needed. Generally, these filters are used in clean room range from many industries such as semiconductor, food, pharmaceutical, surgery room at hospital, research laboratory, bio-hazardous facilities, etc. ue to recent high demands and awareness of the great importance of cleanliness or high purity air, there are more ULPA/EPA filter models, line-up with improved performance.
Product Category Performance Construction Features Product Name Product Introduction Page Separator ULPA filter is higher performance than EPA filter TerraCel 99.9995% and above @ 0.15µm isplay the effectiveness of super clean room for semiconductor, food, 4 hospital/medical room, microorganism research lab ULPA Mini Pleats TerraKleen Thin, light and compact type of ULPA filter ULPA filter is higher performance than EPA filter 99.9995% and above @ 0.15µm isplay the effectiveness of super clean room for semiconductor, food, hospital/medical room, microorganism research lab Space saving 5 6 Separator igh Air Capacity C Used in clean air and other advance clean room 99.99% and above @ 0.3µm 7 EPA Very igh Air Capacity ide 8 Mini Pleats LunaKleen Used in clean air and other advance clean room 99.99% and above @ 0.3µm Space saving 9 LunaKleen CF V-Bank LunaVee LunaVee ide 11 12 Ceiling Module isposable Permanent ousing Lunaood Space saving 13 Clean Flow 14 Room Side Changeable EPA filter Clean Flow RSC 15 Fan Filter Unit Clean Flow F Fan Filter Unit (FFU) 16 EPA Separator igh Air Capacity ZannaCel 17 ZannaCel ide 95% and above @ 0.3µm Pressure resistance is far more lower than EPA filter. as better performance than middle high performance filter. Running cost reduction. 18 V-Bank ZannaVee ide 19 3
Standard Type ULPA Filter TerraCel ULPA filter has better performance than EPA filter 99.9995% efficiency and above for 0.12µm particles Show effectiveness as super clean room for semiconductors, medical, microorganism lab field TerraCel (in) (mm) eight 12x12x6 12x24x6 24x24x6 x24x6 36x24x6 48x24x6 12x12x12 12x24x12 24x24x12 x24x12 5 5 1 5 6 1 6 6 1 762 6 1 915 6 1 12 6 1 5x5x292 5x6x292 6x6x292 762x6x292 3.5 7.0 17.5 21.0 7.0 35.0 3.5 5.0 7.5 9.0.5 13.5 6.0 8.5 13.5 15.5 Measuring method : JIS B 9927 (JIS B 9908 Format 1) IES-RP-CCO34-1 & EN 1822 (% @ 0.15µm) 99.9995 and above (U15) 249 498 Usage umidity Limit (Continuous) Please discuss for high temperature. %R umidity (no dew condensation) Cellside Anodized Aluminium, Stainless Steel, G.I, MF Media Glass Fiber Separator Aluminium Sealant Polyurethane Gasket EPM, Neoprene Standard position for gasket is upstream. iagram (Aluminium Frame) 0 1 2 3 1 2 3 5 1mm epth (U15) 1 5x6mm 3 12x6mm 0 292mm epth (U15) 1 5x6mm 1 2 1 2 3 5 4
ULPA/EPA SERIES Standard Type ULPA Filter TerraKleen TerraKleen Thin, light, compact type, ULPA filter ULPA filter has better performance than EPA filter 99.9995% efficiency and above for 0.12µm particles Show effectiveness for semiconductors, food, medical and microorganism research lab as super cleanroom (in) (mm) eight (% @ 0.15µm) 12x12x3 5 5 69 2.0 2 12x24x3 5 6 69 4.5 3 24x24x3 x24x3 6 6 69 762 6 69.0 12.5 5 6 99.99995 (U16) 140 400 36x24x3 915 6 69 15.0 7 48x24x3 12 6 69.5 9 12x12x3 5 5 69 2.0 2 12x24x3 5 6 69 4.5 3 24x24x3 x24x3 6 6 69 762 6 69.0 12.5 5 6 99.9995 (U15) 1 400 36x24x3 915 6 69 15.0 7 48x24x3 12 6 69.5 9 Measuring method : JIS B 9927 (JIS B 9908 Format 1) IES-RP-CC034-1 & EN 1822 Usage umidity Limit (Continuous) %R umidity (no dew condensation) 0 69mm epth 1 5x6mm (U16) (U16) Cellside Media Separator Sealant Gasket Anodized Aluminium Glass Fiber ot Melt Polyurethane EPM, Neoprene, Gel 1 2 3 3 12x6mm (U16) Faceguard Anodized Aluminium, EG Powder Baked Standard position for gasket is both up & downstreams. iagram (Aluminium Frame) 1 2 3 5 0 69mm epth 1 5x6mm (U15) (U15) 1 2 3 3 12x6mm (U15) 1 2 3 5 5
ULPA/EPA SERIES Standard Type EPA Filter EPA filter for clean air and other advanced cleanroom 99.99% efficiency and above for 0.3µm particles (in) 12x12x6 12x24x6 24x24x6 x24x6 36x24x6 48x24x6 12x12x12 12x24x12 24x24x12 x24x12 (mm) 5 5 1 5 6 1 6 6 1 762 6 1 915 6 1 12 6 1 5 5 292 5 6 292 6 6 292 762 6 292 3.5 7.0 17.5 21.0 7.0 35.0 eight 3.0 4.5 6.5 8.0 9.5 12.0 5.5 8.0 13.0 15.0 Measuring method : JIS B 9908 Format 1. IES-RP-1 & EN 1822 99.99 and above (13) 249 700 Usage umidity Limit (Continuous) Please discuss for high temperature. %R (no dew condensation) (however, craft paper: 85%R) 0 1mm epth (13) 1 5x6mm Cellside Media Separator Sealant Gasket Plywood, MF, G.I, Stainless Steel, Aluminium Glass Fiber Aluminium, PET Polyurethane EPM, Neoprene Standard position for gasket is upstream. 1 2 3 3 12x6mm iagram (Aluminium Frame) 1 2 3 5 0 292mm epth (13 Eff.) 1 5x6mm 1 2 1 2 3 5 6
ULPA/EPA SERIES igh Air Capacity EPA Filter C igher air capacity than standard EPA filter Smaller space requirement than standard EPA filter of the same air capacity 99.99% efficiency and above 0.3µm particles (in) 12x12x6 12x24x6 24x24x6 x24x6 36x24x6 48x24x6 12x12x12 12x24x12 24x24x12 x24x12 (mm) 5 5 1 5 6 1 6 6 1 762 6 1 915 6 1 12 6 1 5 5 292 5 6 292 6 6 292 762 6 292 7.0 35.0 42.0 56.0 56.0 70.0 eight 3.5 5.0 7.5 9.0.5 13.5 6.0 9.5 16.0 19.0 Measuring method : JIS B 9908 Format 1. IES-RP-1 & EN 1822 99.99 and above (13) 3 700 Usage umidity Limit (Continuous) %R (no dew condensation) (however, craft paper: 85%R) 0 1mm epth (13) Please discuss for high temperature. 1 5x6mm Cellside Media Separator Sealant Gasket Plywood, MF, G.I., Stainless Steel, Aluminium Glass Fiber Aluminium, PET Polyurethane EPM, Neoprene 1 2 3 3 12x6mm 4 5 6 Standard position for gasket is upstream. iagram (Aluminium Frame) 1 2 3 5 0 292mm epth (13) 1 5x6mm 1 2 1 2 3 5 7
ULPA/EPA SERIES Very igh Air Capacity EPA Filter ide igher air capacity than high capacity EPA filter Smaller space requirement than high capacity EPA filter of the same air capacity 99.99% efficiency and above 0.3µm particles (in) 12x12x6 12x24x6 24x24x6 x24x6 36x24x6 48x24x6 12x12x12 12x24x12 24x24x12 x24x12 (mm) 5 5 1 5 6 1 6 6 1 762 6 1 915 6 1 12 6 1 5 5 292 5 6 292 6 6 292 762 6 292 7.0 35.0 42.0 56.0 56.0 70.0 eight 4.0 5.5 8.0 9.5 11.0 7.0.5 17.0.0 Measuring method : JIS B 9908 Format 1. IES-RP-1 & EN 1822 99.99 and above (13) 249 700 Usage umidity Limit (Continuous) %R (no dew condensation) (however, craft paper: 85%R) 0 1mm epth (13) Please discuss for high temperature. 1 5x6mm Cellside ide Media Separator Sealant Gasket Plywood, MF, G.I., Stainless Steel, Aluminium Glass Fiber Aluminium, PET Polyurethane EPM, Neoprene Standard position for gasket is upstream. 1 2 3 3 12x6mm iagram (Aluminium Frame) 1 2 3 5 0 292mm epth (13) 1 5x6mm 1 2 1 2 3 5 8
ULPA/EPA SERIES Standard Type EPA Filter LunaKleen LunaKleen Used in clean air and other advance clean room 99.99% efficiency and above for 0.3µm particles Space saving (in) 12x12x3 5 5 69 2.0 2 12x24x3 5 6 69 4.5 3 24x24x3 6 6 69.0 5 x24x3 762 6 69 12.5 6 36x24x3 915 6 69 15.0 7 48x24x3 12 6 69.5 9 12x12x3 5 5 69 2.0 2 12x24x3 5 6 69 4.5 3 24x24x3 6 6 69.0 5 x24x3 762 6 69 12.5 6 36x24x3 915 6 69 15.0 7 48x24x3 12 6 69.5 9 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN1822 (mm) eight 99.999 (14) 99.99 (13) 1 5 400 Usage umidity Limit (Continuous) %R umidity (no dew condensation) Cellside Anodized Aluminium Media Glass Fiber Separator ot Melt Faceguard Anodized Aluminium, E.G Powder Baked Sealant Polyurethane Gasket EPM, Neoprene, Gel, Knife-edge own stream side attached with face guard. Standard position for gasket is both up & downstreams. iagram (Aluminium Frame) 0 1 2 3 0.7 1 2 3 5 69mm epth (14) 1 5x6mm 3 12x6mm 0 69mm epth (13) 1 5x6mm 1 2 3 3 12x6mm 0.7 1 2 3 5 9
ULPA/EPA SERIES Standard Type EPA Filter For FFU LunaKleen CF Used in clean air and other advance clean room 99.99% efficiency and above for 0.3µm particles For fan filter unit LunaKleen (in) 24x24x9 24x48x9 24x24x14 (mm) 600x600x2 600x12x2 600x600x345 9.5 19.5 9.5 eight 7 11 8 24x48x14 600x12x345 19.5 12 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN 1822 99.99 and above (13) 5 498 Usage umidity Limit (Continuous) %R umidity (no dew condensation) Cellside Galvalume, Aluminium, Stainless Steel Media Glass Fiber Separator ot Melt Faceguard Anodized Aluminium, E.G Powder Baked Sealant Polyurethane Gasket EPM, Neoprene own stream side attached with face guard. Standard position for gasket is both up & downstreams. iagram (Aluminium Frame) 0 1 600x600 (13) 2 600x12 (13) 1 2 1 2 3 5
ULPA/EPA SERIES igh Air Capacity Mini-pleat EPA Filter LunaVee Box Type LunaVee More air processing capacity compare with high capacity EPA filter In case of using with same air capacity as high capacity EPA filter, possible for smaller space requirement 99.99% efficiency and above for 0.3µm particles (in) (mm) eight 12x24x12 24x24x12 5 6 292 6 6 292 25.0 66.0 9.5 16.0 99.99 and above (13) 270 498 Measuring method : JIS B 9908 Format 1. IES-RP-1 & EN1822 Cellside G.I., Stainless Steel Usage umidity Limit (Continuous) %R (no dew condensation) Media Separator Glass Fiber ot Melt Sealant Polyurethane Gasket EPM, Neoprene Gasket is optional. iagram 0 292mm epth (13) 1 5x6mm 1 2 1 2 3 5 11
ULPA/EPA SERIES igh Air Capacity Mini-Pleat EPA Filter LunaVee ide More air processing capacity compare with high capacity EPA filter In case of using with same air capacity as high capacity EPA filter, possible for smaller space requirement 99.99% efficiency and above for 0.3µm particles LunaVee (in) (mm) eight 24x12x12 592x289x292 28 5.0 24x24x12 592x592x292 56 8.5 Measuring method : JIS B 9908 Format 1 (calulation method) IES-RP-1 & EN 1822 Average (%) 99.99 and above (13) 280 498 Usage umidity Limit (Continuous) Please discuss for high temperature. %R (no dew condensation) Cellside ABS Media Glass Fiber Separator ot Melt Sealant Polyurethene Gasket Neoprene, EPM Gasket is optinal. iagram (ABS Frame) 0 1 592x289x292 2 592x592x292 1 2 1 2 3 5 12
ULPA/EPA SERIES Standard Type Ceiling Module Lunaood Lunaood Used in clean air and other advance clean room 99.99% & 99.999% efficiencies for 0.3µm particles Space saving capability (in) 24x24x6 36x24x6 48x24x6 24x24x6 36x24x6 48x24x6 24x24x6 36x24x6 48x24x6 (mm) 600x600x152 900x600x15 12x600x152 600x600x152 900x600x152 12x600x152 600x600x152 900x600x152 12x600x152.0 15.0.0.0 15.0.0.0 15.0.0 eight 5.0 8.0 12.0 5.0 8.0 12.0 5.0 8.0 12.0 Measurement standard : JISB9908 FORMAT 1 (calculation method) IES-RP-1 & EN 1822 imension stated is without gasket. Please further inquire if need other than standard dimension. pressure is based on energy efficiency. Add 15Pa to Resistance for module construction. 99.9995 (U15) 99.999 (14) 99.99 (13) 1 1 400 5 Usage Max Temperature (Continuous) Cellside Anodized Aluminium Usage Max umidity Limit (Continuous) %R (no condensation) Media ater Proof Non-Combustible Glass Fiber Separator ot Melt Faceguard Anodized Aluminium, E.G. Powder Baked Sealant Polyurethane Gasket Neoprene, EPM Collar, 12 External imension rawing (Aluminium Frame) 0 1 3 5 2 4 6 U15 1 600x600x1mm 2 12x600x1mm 14 3 600x600x1mm 4 12x600x1mm 13 5 600x600x1mm 6 12x600x1mm 0.7 1 2 3 5 13
ULPA/EPA SERIES Permanent ousing Ceiling Module Clean Flow Used in clean air and other advance clean room 99.99% efficiency and above for 0.3µm particles Space saving Room side changeable EPA filter Ease of change Clean Flow ousing Size (mm) Filter Size (mm) 600x12x 600x600x 5x1140x69 5x5x69 16.0 7.5 1 294 600x12x280 600x600x280 600x12x4 5x1140x1 5x5x1 5x1140x290 22.5.5 45.0 99.99 (13) 2 498 600x600x4 5x5x290 21.0 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN1822 Usage umidity Limit (Continuous) %R umidity (no dew condensation) Casing G.I Powder Baked, Aluminium, Stainless Steel Collar, 12 Filter LunaKleen or own stream side attached with face guard. Standard position for gasket is upstream. iagram (Aluminium Frame) ry Seal/Gasket 0 4 6 3 5 13 1 5x1140x69mm 3 LunaKleen Filter Media 2 1 2 5x5x69mm LunaKleen 3 5x1140x1mm 4 5x5x1mm 5 5x1140x290mm 6 5x5x290mm 0.7 1 2 3 5 14
ULPA/EPA SERIES Permanent ousing Ceiling Module RSC Clean Flow RSC Used in clean air and other advance clean room 99.99% efficiency and above for 0.3µm particles Space saving Room side changeable EPA filter Ease of change Clean Flow ousing Size (mm) Filter Size (mm) Pressure 600x600x152 600x905x152 600x12x152 570x570x81 570x875x81 570x1180x81 7.5 12.0 16.0 99.9995 (U15) 145 600x600x152 600x905x152 600x12x152 570x570x81 570x875x81 570x1180x81 7.5 12.0 16.0 99.999 (14) 125 294 600x600x152 600x905x152 600x12x152 570x570x81 570x875x81 570x1180x81 7.5 12.0 16.0 99.99 (13) 1 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN 1822 Please discuss for other dimension than standard. Usage umidity Limit (Continuous) %R umidity (no dew condensation) Casing Anodized Aluminium Collar, 12 Filter LunaKleen Gasket Gel own stream side attached with face guard. iagram (Aluminium Frame) Fluid Seal/Gel 0 epth 69mm 1 5x5 (U15) 2 5x1140 (U15) Filter Media 1 3 5 2 4 6 3 5x5 (14) 4 5x1140 (14) 5 5x5 (13) 6 5x1140 (13) 0.7 1 2 3 5 15
ULPA/EPA SERIES Fan Filter Unit Clean Flow F Low noise and energy consumption and vibration igh total static pressure Versatile and compatible to various ceiling grid system Low off-gassing components Clean Flow Motor AC Type 3 AP 355 AK 355 AL EC Type 3 EC 355 EC 400 EC Module (ft) 2x2 2x4 2x4 3x4 3x4 4x4 2x2 2x4 2x4 3x4 3x4 4x4 eight (mm) 275 275 295 295 315 315 2 2 295 295 315 315 Power Consumption (w) 90 140 190 2 245 275 60 1 140 160 240 270 eight GL SS AL 14 14 25 26 17 26 28 18 40 40 25 40 42 25 55 58 35 14 14 25 26 17 26 28 18 40 40 25 41 42 26 55 58 35 OPTIONAL ACCESSORIES - Pre-filter - Cost effective remote monitoring system - 5 speed transformer type or stepless speed controller - Pressure gauge post Usage umidity Limit (Continuous) %R (no dew condensation) iagram (Aluminium Frame) Cellside Media Separator Sealant Gasket Noise (dba) 52 53 53 53 55 52 53 53 53 55 Standard position for gasket is upstream. 0.45m/s 2 190 2 180 260 190 2 180 2 180 2 TSP @ Stainless Steel, Aluminium, Galvalume Glass Fiber ot Melt Polyurethane Neoprene, EPM 0.3m/s 240 3 2 290 2 240 3 2 340 3 Connector Speed Controller Safety Guard irection of Airflow Inlet Cone Safety Guard Inlet Cone irection of Airflow Plan View irection of fan rotation andle Filter EPA/ULPA Filter Section Side View Plan View Speed Controller Power Supply ire (3M Length) Eyebolt Fan Air istribution Plate EPA/ULPA Media Filter 12 Section Side View 345 40 0 LunaKleen (13) 1 6x6x69mm 2 12x6x69mm 0 TerraKleen (U15) 1 6x6x69mm 2 12x6x69mm 1 2 1 2 0.7 1 2 3 5 1 2 3 5 16
ULPA/EPA SERIES Standard Type EPA Filter ZannaCel ZannaCel 95% efficiency and above for 0.3µm particles Resistance is largely lower compared to EPA filter yet having better efficiency than middle-high efficiency filter, which can contribute lower running cost (in) 12x12x6 12x24x6 24x24x6 x24x6 36x24x6 48x24x6 12x12x12 12x24x12 24x24x12 x24x12 (mm) 5 5 1 5 6 1 6 6 1 762 6 1 915 6 1 12 6 1 5 5 292 5 6 292 6 6 292 762 6 292 3.5 7.0 17.5 21.0 7.0 35.0 eight 3.0 4.5 6.5 8.0 9.5 12.0 5.5 8.0 13.0 15.0 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN1822 95 and above (E) 125FPM 2FPM 0FPM 75 45 1-237 0 375 Usage umidity Limit (Continuous) Please discuss for high temperature. %R (no dew condensation) (craft paper: 85%R) 0 1mm epth (E) 1 5x6mm Cellside Plywood, G.I., Stainless Steel, Aluminium, MF Media Glass Fiber Separator Aluminium, PET Sealant Polyurethane Gasket Neoprene 1 2 3 3 12x6mm Standard position for gasket is upstream. iagram (Aluminium Frame) 1 2 3 5 0 292mm epth () 1 5x6mm 1 2 1 2 3 5 17
ULPA/EPA SERIES igh Type EPA Filter ZannaCel ide ZannaCel ide 95% efficiency and above for 0.3µm particles Resistance is largely lower compared to EPA filter yet having better efficiency than middle-high efficiency filter, which can contribute lower running cost STANAR TYPE with high air flow capacity (in) (mm) eight 12x12x6 5 5 1 7.0 3.5 12x24x6 5 6 1 5.0 24x24x6 6 6 1 7.5 x24x6 762 6 1 35.0 9.0 36x24x6 915 6 1 42.0.5 48x24x6 12 6 1 56.0 13.5 12x12x12 5 5 292 6.0 12x24x12 5 6 292 9.5 24x24x12 6 6 292 56.0 16.0 x24x12 762 6 292 70.0 19.0 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN1822 95 and above (E) 137 245 157 392 Usage umidity Limit (Continuous) Please discuss for high temperature. %R (no dew condensation) (craft paper: 85%R) 0 1mm epth (E) 1 5x6mm Cellside Plywood, G.I., Stainless Steel, Aluminium, MF Media Glass Fiber Separator Aluminium, PET Sealant Polyurethane Gasket Neoprene Standard position for gasket is upstream. 1 2 3 3 12x6mm iagram (Aluminium Frame) 1 2 3 5 0 292mm epth (E) 1 5x5mm 2 5x6mm 1 2 3 4 3 6x6mm 4 762x6mm 1 2 3 5 18
ULPA/EPA SERIES igh Type EPA Filter ZannaVee ide ZannaVee ide 95% efficiency and above for 0.3µm particles Resistance is largely lower compared to EPA filter yet having better efficiency than middle-high efficiency filter, which can contribute lower running cost STANAR TYPE with high air flow capacity (in) (mm) eight 24x12x12 592x289x292 28 5.0 24x24x12 592x592x292 56 8.5 Measuring method : JIS B 9908 Format 1 (calulation method). IES-RP-1 & EN1822 95 and above (E) 2 498 Usage umidity Limit (Continuous) Please discuss for high temperature. %R (no dew condensation) (craft paper: 85%R) 0 292mm epth (E) 1 592x289mm Cellside ABS Media Glass Fiber Separator ot Melt Sealant Polyurethane Gasket Neoprene Gasket is optional. 1 2 2 592x592mm iagram (ABS Frame) 1 2 3 5 19