Standard Linear Shift Mechanism LSM/HLSM Series

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Technical Datasheet Standard Linear Shift Mechanism LSM/HLSM Series Production-proven linear motion along the port axis (Z) for sample positioning and production applications. Comprehensive series offering true UHV performance with a vast range of flange sizes, strokes, actuation and encoder options. LSM KEY ADVANTAGES 2x flange parallelism compared with conventional designs 2x load-carrying capability compared with conventional units Smooth kinematic motion 10,000 cycle lifetime guarantee Demountable bellows assembly Bakeable to 250 C Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications. UHV Design has the largest range of LSMs in the world, ranging from CF35 to CF150 flanges, up to 1m stroke, tilt & X alignment versions with manual, pneumatic and motorisation options, all available with a range of position encoders. Bakeable to 250 C, the range is supplied on CF flanges and provides true UHV performance. The LSM is the most comprehensive series in the range, offering the largest number of flange, stroke and actuation options. CF38 and CF64 flanges within the series are supplied with tapped bolt holes as standard. Actuation methods The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or stepper motor. Each LSM/HLSM can also be fitted with a digital linear scale, offering visual position indication with 10 micron resolution. Motorised LSM/HLSMs are fitted with bakeable limit and home switches, pre-wired to a single bakeable connector mounted on the frame ( UP option must be selected). LSM/HLSMs are compatible with UHV Design s SADC and Stepper motor controller range, details of which can be found in our catalogue. The HLSM series is available as an alternative. This version has clear holes on the mounting flange (fixed) and is available in CF38, CF64, CF100 and CF150 flanges.

LSM38/HLSM38 Technical Data LSM fixed flange size HSLM fixed flange size FC38 (2-3/4 ) metric tapped straddled FC38 (2-3/4 ) metric tapped straddled FC38 (2-3/4 ) clear holes straddled 38 mm Leadscrew pitch 2.54mm (0.1 ) 150N and 50N Pneumatic option 32 mm 6mm tube push fit Flying leads Upgrade stepper motor - motor wiring lemo socket to diagram 11-1-25 2.54 mm/second 0.000254 mm 4 mm/second Motor gearbox type and ratio spur and 25:1

LSM64/HLSM64 Technical Data LSM series fixed flange size HLSM series fixed flange size FC64 (4 1/2 ) metric tapped straddled FC64 (4 1/2 ) metric tapped straddled FC64 (4 1/2 ) clear holes straddled 65 mm Leadscrew pitch 2.54mm (0.1 ) Upgrade stepper motor - motor wiring 245N and 200N Pneumatic option 63 mm 6mm tube push fit 23 frame 8 wires 3.9A / phase Flying leads Built in UTO motor 23HT18C230 (3A / Phase) 1.95 mm/second Motor gearbox type and ratio spur and 50:1

HLSM100 Technical Data Fixed flange size Leadscrew pitch FC100 (6 ) metric tapped straddled FC100 (6 ) clear holes straddled 102 mm 2mm Internal gearbox - manual option only 5:1 200N and 150N Pneumatic option 80 mm 8mm tube push fit Buit in UTO motor 23HT18C230 1.86 mm/second Motor gearbox type and ratio Planetary and 50:1

HLSM150 Technical Data Fixed flange size Leadscrew pitch Internal gearbox - manual option only 5:1 FC150 (8 ) metric tapped straddled FC150 (8 ) clear holes straddled 150 mm 2mm 200N and 100N Pneumatic option 100 mm 10mm tube push fit Built in UTO motor 23HT18C230 1.86 mm/second Motor gearbox type and ratio Planetary and 50:1 For more information: UHV Design Ltd Judges House, Lewes Road, Laughton, East Sussex, BN8 6BN, UK T: +44(0)1323 811188 E:sales@uhvdesign.com www.uhvdesign.com UHV Design Ltd Judges House, Lewes Road, To find your Laughton, nearest East UHV Sussex, Design BN8 6BN, UK representative T: +44(0)1323 please 811188 visit www. uhvdesign.com E:sales@uhvdesign.com and click Contact. www.uhvdesign.com Feb 2015