Flow Controllers Instrument / Analyzer Products Catalog 4513/USA April 2005
Flow Controllers Veriflo A Leading Manufacturer of Precision Valves, Regulators & Surface Mount Components, Parker Hannifin Corporation is a leading manufacturer of precision valves, regulators and surface mount components for the control and application of liquids and gases used in the fabrication of semiconductors, as well as in the chemical and petrochemical industries. Veriflo has maintained industry leadership over the past 95 years through innovative engineering, manufacturing and by placing a premium on quality customer care. The division maintains two state-of-the-art Class 10 Clean Rooms at its Richmond, CA, facility and has adopted a corporate wide Lean Manufacturing philosophy, which is delivering greater value to the customer by eliminating wasteful steps through continuous improvement activities. s two manufacturing facilities develop and manufacture applications for the Semiconductor/High Purity and Instrument/Analyzer industries. WARNING FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE. This document and other information from Parker Hannifin Corporation, its subsidiaries and authorized distributors provide product and/or system options for further investigation by users having technical expertise. It is important that you analyze all aspects of your application and review the information concerning the product or system in the current product catalog. Due to the variety of operating conditions and applications for these products or systems, the user, through its own analysis and testing, is solely responsible for making the final selection of the products and systems and assuring that all performance, safety and warning requirements of the application are met. The products described herein, including without limitation, product features, specifications, designs, availability and pricing, are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice. Offer of Sale The items described in this document are hereby offered for sale by Parker Hannifin Corporation, its subsidiaries or its authorized distributors. This offer and its acceptance are governed by the provisions stated in the Offer of Sale. 2003, 2005 Parker Hannifin Corporation 2 Parker Hannifin Corporation
Flow Controllers Placing a Premium on Quality Customer Care With the focus of maintaining the highest industry standards, has achieved an ISO 9001 registration at both its Richmond, CA, manufacturing plant and at its Carson City, NV, facility. This certification confirms Veriflo's commitment to quality and excellence as recognized by the international community. The Instrumentation Group of Parker Hannifin specializes in high quality, critical flow components for world-wide process instrumentation, ultra-high purity, medical, analytical and biopharmaceutical applications. Parker s Instrumentation Group has ten manufacturing plants and over 300 authorized distributor locations around the world to provide local inventory and technical support. Key markets for the Instrumentation Group include: Chemical Process, Power Generation, Oil and Gas Exploration, Semiconductor Manufacturing, Biomedical, and Analytical Equipment. Visit Us on the Web For further information on and or its product line visit the division web site at www.veriflo.com. For more information on Parker Hannifin Corporation visit the corporation s web site at www.parker.com. Hastelloy C-22 is a registered trademark of Haynes International, Inc. Kalrez is a registered trademark of the DuPont Company. Tefzel is a registered trademark of the DuPont Company. Eligiloy is a registered trademark of Elgiloy Corp. 3 Parker Hannifin Corporation
SC420 Series Catalog 4513/US Low Flow Controller Parker Hannifin Corporation s presents the SC420 Series low flow controller. The SC420 is manufactured for precise flow control of corrosive and non-corrosive gases at extremely low flow rates. SC423S_T Materials of Construction Stainless Steel Wetted Body... 316L Stainless Steel Seat... 316 Stainless Steel Seals...PTFE and Fluorocarbon Diaphragm Plate... 316L Stainless Steel Diaphragm... PCTFE Range Spring...17-7PH Stainless Steel Filter... Stainless Steel Brass Wetted Body...Brass Seat...Brass Seal...Fluorocarbon Diaphragm Plate... Aluminum Diaphragm... PCTFE Range Spring...17-7PH Stainless Steel Filter... Stainless Steel Non-Wetted Cap... Aluminum Cap Nut...Brass Nickel Plated Micrometering Valve Wetted Body... Stainless Steel Washer... Stainless Steel Valve Stem... Stainless Steel O-Ring...PTFE Gasket... Silver Features Corrosion resistant. Precise control at extremely low flows. Tamper-proof and Panel Mount options available. O 2 Cleaned. SC423 Repeatability: Flow is stable within ±2% of the flow value under the following conditions: 1. Reference pressure varies no more than ±1%. 2. The difference between inlet and outlet pressure is a minimum on 10 psig. 3. Ambient temperature varies no more than ±10 F. Operating Conditions Inlet Pressure...150 psig (10 barg) Temperature...-40 F to 150 F (-40 C to 66 C) Functional Performance Flow range: Ratio of maximum to minimum is 100 to 1 for any given inlet pressure. Supply Pressure Effect...0.6 psig (0.03 barg) per 100 psig (6.80 barg) Flow Control: Fine...to 1000 scc/min. (see chart) Extra Fine...to 500 scc/min. (see chart) Standard Connections 1/8 NPT female Approximate Weight Stainless Steel... 1.5 lbs Brass... 1 lb 4 Parker Hannifin Corporation
Catalog 4513/US SC420 Series Dimensional Data Micrometering Cartridges Flow Curves Ordering Information SC423 B XF PM Basic Series SC421 Constant Downstream SC423 Constant Upstream Materials B Brass S 316L Stainless Steel Micrometering Valve F Fine Metering XF Extra Fine Metering Optional Features PM Panel Mount T Tamper Proof Cover 5 Parker Hannifin Corporation
SC423XL Series Catalog 4513/US Precision Low Flow Control Parker Hannifin Corporation s presents the SC423XL. The SC423XL is a unique device which supplies a constant flow with a self correcting action to compensate for changes in downstream pressure. The SC423XL was designed for air and analyzer sampling systems which require very low flow rates (less than 10 sccm). Connected to a vacuum cylinder, the SC423XL provides consistent flow control despite changes in the vacuum. Materials of Construction Wetted Body... 316L Stainless Steel Seat...Fluorocarbon Seals...Fluorocarbon Piston... 316L Stainless Steel Diaphragm...Hastelloy C-22 Inlet Fitting... 316 Stainless Steel Outlet Fitting... 316 Stainless Steel Non-wetted Cap... 316L Stainless Steel Filter...Sintered Hastelloy Cap Nut... 316 Stainless Steel Retaining Ring... Stainless Steel O-Ring...Fluorocarbon Plug... Stainless Steel Operating Conditions Inlet pressure...atmospheric Outlet pressure... Vacuum Flow... As low as 1 sccm (See Flow Curve) Functional Performance Design Leak Rate: (outboard)...1x10-6 scc/sec He Features Rugged Design. Reliable Precision Flow Control as low as 1 sccm. Adjustable Flows. Hastelloy C-22 Diaphragms. Stable flows as vacuum pressure changes from 28 in Hg to 5 in Hg. Stable flows over a wide temperature band. Color coded orifices. Special CFC Free Cleaning. Tamper Proof. O 2 Cleaned. Temperature Range -40 F to 200 F (-40 C to 94 C) Standard Configurations 1/4" NPT Female...Inlet and Outlet Connections Inlet (Atmosphere)... 1/4" NPT x 1/4" Compression Fitting Outlet (Vacuum)...1/4" NPT X 1/4" Tube Adapter Approximate Weight 1.75 lbs. (.80 kg) 6 Parker Hannifin Corporation
Catalog 4513/US SC423XL Series Flow Curves Dimensional Data Ordering Information SC423XL S 24 4T 4TS Basic Series SC423XL Material S 316L Stainless Steel Inlet Connection 4T 1/4" Compression Fitting (includes Flow Restrictor) Outlet Connection X No Connections 4TS 1/4" Tube Fitting Sample Time / Flow Rate Hours Flow Rate 3 = 27.1-27.7 sccm (Yellow) 8 = 10.0-10.4 sccm (Green) 12 = 6.5-6.9 sccm (Blue) 24 = 3.1-3.4 sccm (Red) 7 Parker Hannifin Corporation
LC221S Series Catalog 4513/US Liquid Flow Controller Parker Hannifin Corporation s presents the LC221S Liquid Flow Controller. The LC221S is designed to control a constant downstream pressure. This is accomplished by maintaining a constant pressure differential across the unit s flow restrictor (customer supplied). The LC221S is ideally suited for applications in liquid chromatography, chemical injection, sampling systems, research labs and purge flows to instrumentation. Specifications Materials of Construction Wetted Body... 316L Stainless Steel Seat... PCTFE Diaphragm... 316L Stainless Steel Seals: LC221S...PTFE LC221SK... Kalrez Gaskets...PTFE Screen... 316 Stainless Steel Nonwetted Cap... Stainless Steel Cap Nut... Stainless Steel Stem... Stainless Steel Bushing... Stainless Steel Operating Conditions Maximum Inlet Pressure...4000 psig (275 barg) Maximum Downstream Pressure...3800 psig (262 barg) Operating Temperature... -20 F to 200 F (-29 C to 94 C) Operating Differential Pressure... 100 psig maximum (7 barg) Functional Performance Flow Range... Less than 0.1 sccm to 1 slpm established by flow restrictor (user supplied) Features Constant liquid flow with varying downstream pressure. Stable flow with upstream pressure variations. Wide flow range: less than 0.1 sccm to 1 slpm. Wide pressure range: 200 to 4000 psig (14 to 275 barg). Flow trimming adjustment: 2-1/2 to 1 with preselected flow restrictor (user supplied). Corrosion resistant. O 2 cleaned. Repeatability: Flow is stable within ±0.5% of flow value under the following conditions: 1. Ambient temperature varies no more than 1 F. 2. Inlet pressure does not vary by more than 100 psig. 3. Downstream pressure does not vary by more than 15% of established value. Internal Volume Dome... 3.2 cc Body... 1.9 cc Standard Configuration Ports... Body and Dome 1/8" NPT female Less than 0.1 sccm to 1 lpm 8 Parker Hannifin Corporation
Catalog 4513/US LC221S Series Dimensional Data Ordering Information LC221S PCTFE and PTFE...421 00 500 LC221SK PCTFE and Kalrez...421 00 550 9 Parker Hannifin Corporation
LC223S Series Catalog 4513/US Gas or Liquid Flow Controller Parker Hannifin Corporation s presents the LC223S. The LC223S is a high pressure gas or liquid flow controller for liquid chromatography, chemical injection and sampling. Specifications Materials of Construction Wetted Body... 316L Stainless Steel Seat... Tefzel Spring... 316L Stainless Steel O-Rings: LC223S...Fluorocarbon LC223SK... Kalrez Diaphragm... 316L Stainless Steel Diaphragm Gaskets...PTFE Screen... 316 Stainless Steel Nonwetted Cap... Stainless Steel Cap Nut... Stainless Steel Operating Conditions Maximum Inlet Pressure...5000 psig (345 barg) Maximum Dome Pressure...5000 psig (345 barg) Required Differential Pressure...200 psig (14 barg) Operating Temperature... -20 F to 200 F (-29 C to 94 C) Functional Performance Flow Range...25 sccm to 40 slpm Established by customer supplied flow restriction device. Features Constant flow with varying downstream pressure. Wide flow range: from 25 sccm to 40 slpm. Wide pressure range: 200 to 5000 psig (14 to 345 barg). Corrosion resistant. O 2 cleaned. Repeatability: Flow is stable within ±0.2% of flow value under the following conditions: 1. Ambient temperature varies no more than 10 F. 2. Inlet pressure remains constant. 3. Downstream pressure does not vary by more than 70% of established value. Internal Volume Dome... 2.0 cc Body... 2.1 cc Standard Configuration Body Ports...1/8" NPT female Dome Port...1/8" NPT female 10 Parker Hannifin Corporation
Catalog 4513/US LC223S Series Dimensional Data Example Test Setup Ordering Information LC223K Kalrez...423 00 249 LC223S Fluorocarbon...423 00 250 11 Parker Hannifin Corporation
Quantum FS 190 Series Catalog 4513/US Excess Flow Shut-Off Valve Parker Hannifin Corporation s presents the FS190. The FS190 is a non-attitude sensitive, excess flow shut-off valve designed to operate with a wide range of inlet pressures. The capability of operating from 10 to 3500 psig allows it to be used either between a high pressure source at the inlet to the pressure regulator, or in the low pressure delivery line to a process. In both applications, this control valve will automatically shut off the delivery of gas if the flow exceeds a preset limit. The functional components of the FS190 are incorporated within the body style of a 1-1/4 inch Quantum valve. An actuating knob has been designed to manually operate the valve and clearly indicate the relative operating position - either Open (Reset) or Auto (Shut Off). A pneumatic actuator may be substituted for the knob, which makes it possible to reset the valve by sending a pressure signal from a remote source. The FS190 is offered with six different pressure/ flow limits: A,B,C,D,E, and F (see flow curve). The nominal differential pressure created at the flow limit is 5 psig for limit values A,B,C, and D. For limit values E and F, the differential pressure is 12 psig. The differential pressure that is created is not affected by mounting orientation (non-attitude sensitive). Specifications Materials of Construction Wetted Body... VeriClean, Veriflo s custom high purity type 316L Stainless Steel Compression Member... 316L Stainless Steel Seat... PCTFE Diaphragm... Elgiloy or equivalent Spring...Hastelloy C-22 Poppet... 316L Stainless Steel Orifice... 316L Stainless Steel Nonwetted Knob... Anodized Aluminum (Red) Stem...416 Stainless Steel (Lubricated) Cap... 316L Stainless Steel Operating Conditions Supply Pressure: A - D Flow Limit Setting...10 psig to 3,500 psig (.7 barg to 241 barg) E - F Flow Limit Setting...20 psig to 3,500 psig (1.4 barg to 241 barg) Differential Pressure...5 psig or 12 psig (.3 barg or.8 barg) Flow Limit Settings... 6 available Temperature... -10 F to 150 F (-23 C to 66 C) Functional Performance Design Leak Rate: Outboard...2 x 10-9 scc/sec He Inboard... 2 x 10-10 scc/sec He Internal Volume 1.86 cc (including face seal fittings) Surface Finishes Standard Ra... 15-20 micro in (.38 to.5 micrometer) or less Optional Ra... EX = 10 micro in (.25 micrometer) or less Welded units only Standard Configuration 1/4" NPT female, 1/4" face seals or 1/4" tube stubs Approximate Weight 12.5 oz. (.32 kg) O 2 Cleaned 12 Parker Hannifin Corporation
Catalog 4513/US Quantum FS 190 Series Dimensional Data Sizing Chart Ordering Information FS190 S A FSFM AOP Basic Series FS190 Flow Limit Setting Nominal Flow Limit at: 1000 psig Inlet 30 psig Inlet A = 5 SLPM B = 9 SLPM C = 21 SLPM D = 40 SLPM E = 72 SLPM F = 121 SLPM Material S 316L Stainless Steel 0.3 SLPM 2 SLPM 4 SLPM 9 SLPM 15 SLPM 22 SLPM Options AOP TH Connection (Inlet & Outlet) P 1/4" NPTF FSMM 1/4" FS Male In - Male Out FSFF 1/4" FS Female In - Female Out FSFM 1/4" FS Female In - Male Out FSMF 1/4" FS Male In - Female Out TS 1/4" Welded Tube Stubs Air Operated Hastelloy C-22 Trim internals* 3.70 FLV 120 Dimensional Replacement 3.46 FLV 110 Dimensional Replacement * Includes: Hastelloy C-22 Compression member, poppet, spring and orifice. 13 Parker Hannifin Corporation
VR7 Series Catalog 4513/US Pressure Relief Valve Parker Hannifin Corporation s presents the VR7 Series relief valve. The VR7 is an economical relief valve designed to vent excess pressure from a regulator should a minor seat leak occur. The VR7 is recommended for use with regulators to protect the regulator and outlet pressure gauge. The VR7 is not intended for applications where repeated or frequent venting is required. Features Choice of seal materials for system compatibility. Hex body provides wrench flats. Available with a variety of connections, seat materials, and pressure settings. O 2 cleaned. Specifications Materials of Construction Wetted Body... 316L Stainless Steel, Brass Seal...Fluorocarbon or Kalrez Spring... 302 Stainless Steel Poppet... 316L Stainless Steel, Brass Screw...316L Stainless Steel, Delrin Operating Conditions Maximum Pressure...750 psig (52 barg) Adjustable Ranges... 10-20 psig (.6-1.4 barg), 20-100 psig (1.4-7 barg), 100-250 psig (7-17 barg), 250-500 psig (17-34 barg) Temperature Range Fluorocarbon and Kalrez... -30 F to 400 F (-35 C to 204 C) Functional Performance Flow Capacity... C v = 0.37 (SEMI Flow Coefficient Test #F-32-0998) Standard Connections 1/4" pipe threads male inlet, female outlet (NPT). 1/4" female pipe thread outlet, FS male or female fitting inlet. Approximate Weight 2.0 oz. (.06 kg) Note: The VR7 SHOULD ONLY be used to protect Article 3, Paragraph 3 category equipment as defined in Pressure Equipment Directive 97/23/EC Dated: 29, May 1997. 14 Parker Hannifin Corporation
Catalog 4513/US VR7 Series Dimensional Data Performance Curve Ordering Information VR7 44MF 1 S V Basic Series VR7 Connection (Inlet & Outlet) 44MF 4FSF 4FSM 1/4" NPTM X 1/4" NPTF 1/4" FSF X 1/4" NPTF (Stainless Steel Body Only) 1/4" FSM X 1/4" NPTF (Stainless Steel Body Only) Adjustable Range 1 = 10-20 psig 2 = 20-100 psig 3 = 100-250 psig 4 = 250-550 psig Seal K Kalrez V Fluorocarbon Material S 316L Stainless Steel B Brass Note: After relieving, service is required. 15 Parker Hannifin Corporation
Parker Hannifin Corporation 250 Canal Boulevard Richmond, CA 94804-0034 Tel: (510) 235-9590 Fax: (510) 232-7396 Catalog 4513, 04/05