ll-metal gate valve Series For extreme UHV and/or aggressive media Bakeable to 300 C in open and closed position Radiation resistant Maintenance-free up to 000 cycles Opening possible up to 1 bar differential pressure Body material stainless steel Manual actuator handwheel Pneumatic actuator double acting with position indicator 0 C with solenoid compact actuator valve C CF-F Ordering numbers CF-F 1-CE01 13-CE01 ½ 3-CE01 -CE01 0 -CE01 1-CE01 with position indicator 0 C: - E0 with position indicator C: - E05 Ordering numbers (specify control voltage) extended actuator valve 300 C CF-F 1-CE 13-CE ½ 3-CE7 3-CE -CE7 -CE 0 -CE7 -CE 1-CE7 1-CE 1-CE7 1-CE actuator modules see page 3 1 1-XE7 1-XE X = customer specific with position indicator 0 C, without solenoid: - E7 (compact actuator) - E (extended actuator) further versions: see pages and 3 Bake-out jacket For bake-out we recoend coercial controllers with settable heating rate and temperature limiting device The bake-out jacket is without thermocouples and thermostats Details see page Ordering number on request 0 K1 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom
Sealing materials Gate: metal Bonnet: metal Feedthrough Bellows Series 1 valve gate 3 guide plate 5 leaf spring 7 VTRING counter plate spring stop support valve seat side Features Technical data Continued next page 1) Maximum values: depending on operating conditions and sealing materials VTRING configuration (see glossary) Sealing surfaces are only elastically deformed Locked in closed position Leak rate: body, valve seat < 1 - mbar Is -1 Pressure range Differential pressure on the gate UHV to bar (abs) bar in either direction Differential pressure at opening - - 1 bar - - 0 mbar (1 bar with reduced cycle life) - 3 0 mbar with reduced cycle life Cycles until first service - - / - 3 000 / 5 000 Temperature 1) - Valve body 300 C - Manual actuator 1 C (option: C) - Pneumatic actuator C - Position indicator 0 C (option: C) - Solenoid 0 C - Flexible bake-out jacket 300 C (valve), 115, 30 V, /0 Hz Heating and cooling rate - / - 0 / - 3 0 C h -1 / C h -1 / 5 C h -1 Material - Valve body, mechanism ISI 3L (135, 1) - Bellows ISI 3L (135) Seal: bonnet, gate Mounting position: - Solenoid metal any V DC, 5 W (others see «Options») Position indicator: contact rating 0 C C - Voltage V C / DC V C / DC - Current 1 1 Valve position visual (mechanical) VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom K1 1
ll-metal gate valve Series ctuators modular selection 1 Body, valve mechanism, bellows : Gy, bakeable to 300 C Pneumatic actuator compact : 5 Gy, bakeable to C option: Gy, bakeable to 1 C 3 Pneumatic actuator extended : 5 Gy, bakeable to C option: Gy, bakeable to 1 C Manual actuator : 5 Gy, bakeable to 1 C option: 5 Gy, bakeable to C 5 Special pneumatic actuator for hot zone : Gy, bakeable to 0 C solenoid 0 C position indicator 0 C position indicator C position indicator 0 C C) (1 C) C) (1 C) C) (1 C) 300 C 0 C 1 C) ( C) 300 C 300 C 300 C C (1 C) bakeability Maximum values: depending on operating conditions and sealing materials ccessories Seal kit - Fittings for installation of the valve: series 33 - Flexible bake-out jacket: see page Consisting of seals for gate (VTRING) and bonnet Ordering No: see operating manual or price list Technical data manual pneumatic (nominal ID) CF-F flange molecular flow conductance turns per stroke weight compressed air pressure min - max overpressure volume of air cylinder closing or opening time weight OD ls -1 n kg lbs bar psi l ft 3 s kg lbs 1 ⅓ 19 5-55 - 115 01 0003 1 3 ¾ 1 55 1-55 - 115 07 001 1 7 ½ ½ 0 3 35-55 - 115 05 001 173 3 35 5-55 - 115 1 009 3 7 0 0 3-55 - 115 3 015 3 0 75-55 - 115 3 093 1 19 1 1 700-55 - 115 7 037 15 3 3 1 X 3 0-55 - 115 19 055 19 3 9 K1 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom
Series Options ctuator: - ccessory for pneumatic actuator for faster closing 1) Maximum values: depending on operating conditions and sealing materials - Pneumatic actuator compact or extended Gy, bakeable to 1 C 1) - Pneumatic actuator for hot zone: radiation resistant to Gy, bakeable to 0 C - Manual actuator bakeable to C 1) - Solenoid for impulse actuation: actual valve position is maintained at power failure - Solenoid for 1, V DC,,, 115,, 30 V Hz,, 115,, 30 V 0 Hz - Solenoid radiation resistant to Gy (standard Gy) - Position indicator for pneumatic actuator bakeable to C - Position indicator for manual actuator bakeable to 0 C or C Dia 1 - Double position indicator ( switches each for the positions «open» and «closed») Valve: - Customer specified flanges - Larger diameters on request - ntimagnetic version with defined permeability: see page - Window in valve gate: see specification below - Ports (diagram 1) for roughing (by-pass), venting or for gauges valve recoended port CF-F X Y 157 1 071 70 7 1 071 ½ 115 53 135 531 197 0 197 1 197 35 137 197 3 1 173 197 Ordering information for options: Ordering No of valve-x (e g -CE-X, X = port CF-F in positions and B) Gate valve with window window welded into valve gate window retrofitable at VT window material: sapphire Options: - special glass qualities - other materials (e g berillium) - other window sizes 1 valve body VTRING 3 valve gate window valve optically free diameter «S» thickness of glass 03 00 ½ 1 071 00 3 13 00 0 3 13 00 3 13 00 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom K1 3
ll-metal gate valve Series Main dimensions Valve with manual actuator (") (1½") Valve with manual actuator - 0 (½" - ") Valve with manual actuator (") required for dismantling d leak detection hole j bake-out area Projection E Flange dimensions see page 5 K L M N O O1 P Q T U U1 V W X Y Z 5 191 1 5 17 70 7 1 3 0 315 13 5 73 7 1 59 1 5 13 77 30 35 37 ½ 11 55 1713 35 9 3 19 7 15 1 77 303 1 9 97 31 39 5 13 7 9 111 37 95 37 933 197 77 9 37 3 1 3 17 97 31 0 3 0 5 73 337 1 57 39 195 7 113 53 99 93 3 177 37 1 97 31 0 3 33 13 5 5 79 311 11 9 5 7 307 11 333 1 3 1 35 13 3 1 11 9 570 73 1 97 31 77 155 1 77 91 157 30 11 1 5 K1 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom
Flange dimensions CF-F,, (", 1½", ") CF-F - 0 (½" - ") Series Projection E OD B B1 C D E x F G H1 H ½ 1 ⅓ ¾ ½ 197 15 7 3 95 73 7 0 57 31 157 75 95 1135 7 70 91 3 5 335 15 59 73 1303 513 39 0 975 3 5 797 1133 11 713 1 59 1 551 77 9 31 91 77 x M x M x M x M x M x M 031 1 0 15 07 039 3 19 15 1 07 5 35 77 305 1 055 15 75 1155 55 0 1715 75 53 17 07 3 75 17 5 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom K1 5
ll-metal gate valve Series Main dimensions Valve with pneumatic actuator - (" - 1½") Valve with pneumatic actuator - 0 (½" - ") Valve with pneumatic actuator - 3 (" - 1") mechanical position indication compressed air connection leak detection hole emergency operation required for dismantling electrical connection j bake-out area Projection E L1 and R for extended actuator / flange dimensions see page 7 K L L1 M N O O1 P Q R S T U U1 V W X x Y 5 191 70 7 31 1 5 17 37 15 0 315 13 5 73 7 1 59 5 15 059 35 3 37 70 7 5 13 77 339 9 9 3 0 35 ½ 11 3 157 57 75 35 9 3 19 7 15 1 77 303 1 1 19 57 9 3 5 13 73 1 597 35 111 37 95 37 933 197 77 9 37 3 1 1 1 7 135 531 0 5 5 7 913 1 57 39 195 7 113 53 99 93 3 177 1 953 1 591 7 307 770 3031 9 35 1 3 1 35 13 3 1 11 9 535 1 315 1 30 35 97 37 71 17 5 07 55 7 175 1 1 9 75 57 1 377 1 30 3 1 5 13 111 3 13 7 95 5 3 0 19 11 555 00 31 1 3 17 30 155 1 77 91 x 30 157 x 11 7 1 173 x 197 x 197 5 95 511 1 0 x 0 3 x 3 K1 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom
Flange dimensions CF-F,,, (", 1½", ", ") CF-F - 0 (½" - ") Series 3 customer specific Projection E OD B B1 C D E x F G H1 H ½ 1 ⅓ ¾ ½ 1 197 15 7 3 95 73 7 0 57 31 157 75 95 1135 7 70 91 3 5 335 15 59 73 1303 513 39 0 975 3 5 797 1133 11 713 1 59 1 551 77 9 1 591 30 19 3 1 170 9 17 31 91 77 111 9 x M x M x M x M x M x M 3 x M 031 1 0 15 07 039 3 19 15 1 07 5 35 77 305 1 055 15 75 1155 55 0 1715 75 53 17 07 3 75 17 5 17 07 7315 75 7 51 3 1 VT Vakuumventile G, CH-99 Haag, Switzerland Tel +1 1 771 1 1 Fax +1 1 771 30 wwwvatvalvecom K1 7