Solutions for a Solar Powered World From R&D to Production

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Solutions for a Solar Powered World From R&D to Production 12. Fachkongress Zukunftsenergien Essen 19. Februar 2008 Detlev Koch, Head of Oerlikon Solar Thin Film

Solutions for a Solar Powered World Oerlikon Solar Introduction Solar Market Grid Parity Oerlikon Solar Solutions Page 2 February 19, 2008 From R&D to Production - Detlev Koch

Oerlikon Group at a Glance 5.25 billion CHF revenue in 2007 19,750 employees worldwide - 2500 global support - 1500 scientist and engineers 35 countries - 170 global locations 250 million CHF R&D investment in 2007-6700 living patents Page 3 February 19, 2008 From R&D to Production - Detlev Koch

Oerlikon Solar - Key Member of the Oerlikon Group Oerlikon Textile Oerlikon Coating Oerlikon Vacuum Oerlikon Drive Systems Oerlikon Components Oerlikon Oerlikon Solar Solar Page 4 February 19, 2008 From R&D to Production - Detlev Koch

Solutions for a Solar Powered World Agenda Oerlikon Solar Introduction Solar Market Grid Parity Oerlikon Solar Solutions Page 5 February 19, 2008 From R&D to Production - Detlev Koch

Different Technologies Different Cost Saving Potential Wafer based Base material Raw material Differentiation Silicon wafer Silicon wafer Higher efficiency Low saving potential Thin-Film Base material Glas Raw material Silan gas Differentiation Higher power per $ High saving potential Source: MRS Bulletin, Vol. 30, No. 1, Jan 2005 Distributed fossil fuel refers to off-grid generation of power, using for instance gas-driven generators. Page 6 February 19, 2008 From R&D to Production - Detlev Koch

2 Primary Production Technologies for Solar Cells Technology Substrate Cell Issues Crystalline Silicon Cost Silicon Supply Thin Films Large Scale Mfg. Efficiency Page 7 February 19, 2008 From R&D to Production - Detlev Koch

Grid-Connected Applications are >85% of the PV market Commercial and residential buildings Connected to utility grid using Net Metering Solar power system acts as mini power station. Source NREL Net Metering Scheme for Commercial and Residential Buildings Page 8 February 19, 2008 From R&D to Production - Detlev Koch

Solar Market Segments and Applications Segment Remote Industrial Remote Habitation Consumer Power Consumer Indoor Grid Connected Sample Applications Communications, Signals, Security Water Pumping, Village Power, Outdoor Lighting Recreational, Automotive, etc Consumer and Novelty items Residential, Commercial, Utility Page 9 February 19, 2008 From R&D to Production - Detlev Koch

PV Module Forecast and Growth Rates GWp 16 14 12 10 8 6 4 2 0 c-si Thin Film Total 2004 2005 2006 2007 2008 2009 2010 2005-2010 CAGR Total market 44% C-Si 41% Thin Film 66% Source: Solar Annual 2006 Report Page 10 February 19, 2008 From R&D to Production - Detlev Koch

Oerlikon Solar as First Mover in Thin Film Silicon Milestones Sept 03 June 04 Dec 04 May 06 Dec 06 July 07 Sept 07 Oct 07 Dec 07 Oerlikon Solar R&D Lab with Dr. J. Meier and Dr. U. Kroll, cooperation with IMT First 1.4m 2 a-si thin-film module presented Research facility delivered to SCHOTT Solar TÜV Rheinland 1,4m 2 module tests passed 40 MW facility delivered to ersol Thin Film Start of ramp-up of the ersol Thin Film line first modules reach nominal power on-time Introducing Micromorph Tandem (9+% stab.) 40 MWp ramp-up at SCHOTT Solar 40 MW facility delivered to Sunwell, Taiwan Page 11 February 19, 2008 From R&D to Production - Detlev Koch

Solutions for a Solar Powered World Oerlikon Solar Introduction Solar Market Grid Parity Oerlikon Solar Solutions Page 12 February 19, 2008 From R&D to Production - Detlev Koch

Grid Parity Lowering the Cost per Watt $ = W p Total Cost Throughput x Power Oerlikon Advantage Turnkey Advanced Manufacturing Lines Micromorph High Efficiency Tandem Solar Cells Page 13 February 19, 2008 From R&D to Production - Detlev Koch

Cost of Ownership Development to Grid Parity Thin Film Si Roadmap 100% 80 60 2007 for 20 MWp fabs < 1.5 $/Wp 2010 for GWp fabs < 0.7 $/Wp 40 20 0 Current small fabs Equipment cost decrease Material cost decrease Other cost decrease Tact time decrease Cell efficiency increase Economies of scale 2010 large fabs Page 14 February 19, 2008 From R&D to Production - Detlev Koch

Achieving Grid Parity Fab nominal capacity effective output* Module efficiency GW/p 300% 13% 1 12% capacity 0.3 0.12 0.08 0.04 *yield, uptime, tact time, efficiency improvements 200% output 100% 11% 10% 9% 8% 7% Amorph Micromorph Tandem Next Generation Thin-Film 2006 2007 2008 2009 2010 2011 2012 2006 2007 2008 2009 2010 2011 2012 $/W 4.00 3.50 3.00 2.50 2.00 CapEx per Watt GigaFab 1.50 2007 2008 2009 2010 Page 15 February 19, 2008 From R&D to Production - Detlev Koch 60 MW Fab 2011 2012 $/Wp 1.5 1.0 0.7 0.5 Cost of ownership 2006 2007 Grid Parity 2008 2009 Solar market 2010 ~80 billion $ 2010 2012

Solutions for a Solar Powered World Oerlikon Solar Introduction Solar Market Grid Parity Oerlikon Solar Solutions Page 16 February 19, 2008 From R&D to Production - Detlev Koch

Thin Film Solar Cell Basics Thin Film Solar Modules Thin Film Solar Cell Structure Manufacturing Order Glass Front Contact PV Material Back Contact Lamination Glass Thin Films Page 17 February 19, 2008 From R&D to Production - Detlev Koch

Micromorph Process Technology Up to 50% more Power a-si a-si µc-si a-si:h µc-si:h Amorph Single Junction Micromorph Tandem Junction Visible Amorph Near IR 50% More Energy Absorbed Micromorph Tandem Page 18 February 19, 2008 From R&D to Production - Detlev Koch

TCO 1200 - Higher Efficiency and Lower COO TCO 1200 The Proprietary principle LPCVD of light technology trapping - Best High Commercial conductivity TCO - Transparent conductor deposition and texturing in a single step - Legacy processes require PVD Oerlikon plus wet TCOetch Integral Optimized to Micromorph Haze = process - Optimized High transmission Performancein visible and near IR light spectrums Clean TCO Laser PECVD Laser TCO Laser Assembly a-si/µc-si Page 19 February 19, 2008 From R&D to Production - Detlev Koch

KAI 1200 - Proven Product for PV Layers KAI 1200 with Plasma Box reactor - 40 MHz for higher rate and quality - Amorph & microcrystaline PIN layers - Single production step (p & n doping) - Auto-clean after every step Result - High film quality - High throughput - High system flexibility & utilization - More power per unit area KAI 1200 Clean TCO Laser PECVD Laser TCO Laser Assembly a-si/µc-si Page 20 February 19, 2008 From R&D to Production - Detlev Koch

LSS 1200 - Efficient and Reproducible Laser Scribing LSS 1200 Only production proven thin film PV Laser scribing system - Excellent linearity - Narrow scribe lines - Reliable, stable platform Result: - Minimal PV area removal for more power per modules - Low cost of ownership Clean TCO Laser PECVD Laser TCO Laser Assembly a-si/µc-si Pattern 1 Pattern 2 Pattern 3 Page 21 February 19, 2008 From R&D to Production - Detlev Koch

Oerlikon Turn Key Services Equipment Move-In System Installation Testing & Syst. Qualification Process Integration Production Ramp-up Coordinated Maintenance Uptime Improvement Service every 3 month Equipment top condition PM adapt to the production Page 22 February 19, 2008 From R&D to Production - Detlev Koch

Integrated Path to Turnkey KAI 1200 TCO 1200 LSS 1200 Page 23 February 19, 2008 From R&D to Production - Detlev Koch

Integrated Path to Turnkey Line Automation Glass Preparation and Cleaning Manufacturing Execution System KAI 1200 TCO 1200 Contacted Tested Device Encapsulation Lamination Assembly LSS 1200 Page 24 February 19, 2008 From R&D to Production - Detlev Koch

Integrated Path to Turnkey Line Automation Glass Preparation and Cleaning Manufacturing Execution System Contacted Tested Device FAB 1200 Encapsulation Lamination Assembly Page 25 February 19, 2008 From R&D to Production - Detlev Koch

GigaFab the Future of Thin Film Silicon Page 26 February 19, 2008 From R&D to Production - Detlev Koch

Solutions for a Solar Powered World Thin Film is Solar s fastest growing segment creating a 16B total Solar Market opportunity by 2010 On track to achieve grid parity by 2010 Proven thin film solutions for high volume solar cell module production Page 27 February 19, 2008 From R&D to Production - Detlev Koch

Page 28 February 19, 2008 From R&D to Production - Detlev Koch

Thin-Film Silicon Mass Production A Reality, Here and Now Thank you for your attention Page 29 February 19, 2008 From R&D to Production - Detlev Koch