Illustrated Parts Guide for Axcelis GSD ELS Source Liner Systems
Tungsten.00 Arc Chamber Liner System 0 P/N SKT Ball Joint B Compression Spring, Inconel 00 Ball Joint, Graphite 0 CG Thermal Barrier Vaporizer Heat Shield No OEM Reference A Heat Shield Retainer, Stainless 000 ELS AC Liner With Vaporizer for Ø. Repeller Hole, Tungsten 0 W Filament End Liner, Tungsten 0 AW Repeller End Liner, Ø. Repeller, Tungsten 0 W Base Liner,.00 Thick, Tungsten No OEM Reference W- Side Liner.00 Thick, Vaporizer Version, Right, Tungsten No OEM Reference 0 W- Side Liner.00 Thick,Vaporizer Version, Left, Tungsten No OEM Reference Gas Sleeve Liner, Tungsten No OEM Reference
Molybdenum.00 Arc Chamber Liner System 0 P/N SKT Ball Joint B Compression Spring, Inconel 00 Ball Joint, Graphite 0 CG Thermal Barrier Vaporizer Heat Shield No OEM Reference A Heat Shield Retainer, Stainless 000 Filament End Liner, Molybdenum 0 Repeller End Liner, Ø.0 Repeller, Molybdenum 0 Base Liner,.00 Thick, Molybdenum No OEM Reference - Side Liner.00 Thick, Vaporizer Version, Right, Molybdenum No OEM Reference - Side Liner.00 Thick,Vaporizer Version, Left, Molybdenum No OEM Reference 0 ELS AC Liner With Vaporizer for Ø.0 Repeller Hole, Molybdenum 0 M Gas Sleeve Liner, Molybdenum No OEM Reference
Hybrid.00 Arc Chamber Liner System 0 P/N SKT Ball Joint B Compression Spring, Inconel 00 Ball Joint, Graphite 0 DG Vaporizer Heat Shield With Grafoil Inserts, Stainless No OEM Reference A Heat Shield Retainer, Stainless 000 W Filament End Liner, Tungsten 0 W Repeller End Liner With Ø.0 Repeller Hole, Tungsten 0 W Base Liner,.00 Thick, Tungsten No OEM Reference W- Side Liner.00 Thick, Vaporizer Version, Right, Tungsten No OEM Reference W- Side Liner.00 Thick,Vaporizer Version, Left, Tungsten No OEM Reference 0 B ELS AC Liner With Vaporizer for Ø.0 Repeller Hole, Graphite 00 Gas Sleeve Liner, Tungsten No OEM Reference Cathode Sleeve Liner, Tungsten No OEM Reference
Hybrid.00 Arc Chamber Liner System 0 CG- Arc Chamber Plug, Graphite No OEM Reference 0DW Face Plate, R0, Tungsten No OEM Reference CW Standard Slit Aperture R0, Tungsten No OEM Reference DW Reduced Slit Aperture, Tungsten No OEM Reference DW End Liner, Cathode, Tungsten No OEM Reference DW End Liner, Repeller, Tungsten No OEM Reference BW Base Liner,.00 Thick, Tungsten No OEM Reference BW- Side Liner.00 Thick, Vaporizer Version, Right, Tungsten No OEM Reference BW- Side Liner.00 Thick, Vaporizer Version, Left, Tungsten No OEM Reference 0 Cathode Sleeve Liner, Tungsten No OEM Reference - Arc Chamber Body, Hybrid, Graphite No OEM Reference
Hybrid.00 Arc Chamber Liner System P/N SKT Ball Joint A Compression Spring, Inconel 00 Ball Joint, Graphite 0 B Heat Shield Assembly, Stainless 0 0 Repeller Screw, Molybdenum 0 Gas Sleeve Liner, Tungsten No OEM Reference - Flange, Hybrid Arc Chamber, Tungsten No OEM Reference
.00 Arc Slit Aperture Options P/N W No OEM Reference Arc Slit Liner T,.00 Thick, Tungsten Shark Skin Surface Finish Front View Back View Designed to reduce flaking from process build-up. This texturized finish is a feature for all Glemco.00 liners. P/N W No OEM Reference Face Plate T,.00 Thick Liner Version, Tungsten Front View Back View