Mass Flow Meter Model: MAS. Design

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Mass Flow Meter and Controller for Gases measuring monitoring analysing MS / MFC OMeasuring O range: 0-10 Nml/min... 0-500 Nl/min O O ccuracy: ±1.5% f.s. OO p max 35 bar; t max 50 C Onalogue O output: 0-5 V or 4-20 m ODigital O display OO Material: Nylon, stainless steel O O ypass measuring system laminar flow KOOLD companies worldwide: RGENTIN, USTRI, ELGIUM, ULGRI, CND, CHILE, CHIN, COLoMI, CZECHI, DOMINICN REPULIC, EGYPT, FRNCE, GERMNY, GRET RITIN, HUNGRY, INDI, INDO- NESI, ITLY, MLYSI, MEXICO, NETHERLNDS, PERU, POLND, ROMNI, SINGPORE, SOUTH KORE, SPIN, SWITZERLND, TIWN, THILND, TUNISI, turkey, US, VIETNM KOOLD Messring GmbH Nordring 22-24 D-65719 Hofheim/Ts. Head Office: +49(0)6192 299-0 +49(0)6192 23398 info.de@kobold.com www.kobold.com 1

Mass Flow Meter Model: MS Fields of application The KOOLD MS model mass flow meter makes very precise measurements of the mass flow rate of gases in different measuring ranges from 0-10 Nml/min to 0-500 Nl /min nitrogen. The operation of the meter is based on the calorimetric principle. For indication of 98% of the actual flow, the response time is 2 s. The meter may be installed in any position. In contrast with most volumetric flowmeters, no temperature or pressure correction is required. This means that the MS model is ideally suited for almost every gas flow application. Typical industrial applications are process control, laboratory measuring tasks, OEM applications, gas indication panels, leakage and filter monitoring. The MS is available either with analogue output only, or in addition with digital indication. The 3½-digit LCD display is infinitely rotatable through 180. Glass-fibre-reinforced Nylon or stainless steel may be used in the manufacture of wetted parts. Seal materials is FPM (Kalrez or Neoprene upon request). Design Tilting indicator may be tilted through 180, 9 adjustments Output connector 9 Pin»D«Sub-type, Output signal 0-5 V DC or 4-20 m optional analogue output Mains plug Input voltage 12 V DC or 24 V DC Pipe unions possible with ¼ FNPT or ¼" Swagelok connections Direct indication of mass flow rate no temperature or pressure correction needed Flow meter body Wetted parts either Nylon or steel Digital display shows the mass flow rate in Nml/min or Nl/min. (other units upon request) Zero-point and span potentiometers adjustable from outside Measuring tube Laminar flow bypass comes in 20 ranges from 0-10 Nml/min to 0-500 l/min The MS model may be operated with 12-15 V DC (24 V DC optional). MS-5100, MS-5105, MS-5000 or MS-8100 are recommended as power supplies. Typically, a 0-5 V DC (or 4-20 m optional) analogue signal is available as output signal. This allows recording, data storage, and control functions to be implemented. Theory of operation The medium flows through the bypass measuring system. The resulting differential pressure between P1 and P2 causes a small amount of gas to flow through the overhead measuring tube. The separation ratio is constant. Two resistance temperature detectors (RTD elements) transferring a constant amount of heat to the gas stream are mounted on the measuring tube. Under flow conditions, the gas molecules absorb and transport the heat away. This gives rise to a temperature difference between the two detector coils, which causes a change in resistance in the detector coils, whereby R1 <> R2. The electronics converts the signal for indication. The temperature difference increases as the flow increases. Special advantages OODirect mass flow measurement OONo pressure or temperature correction needed OOLarge measuring range OONegligible pressure loss OO May be fitted in any position OOHigh degree of repeatability O O nalogue output 0-5 V DC, option 4-20 m Measuring tube design coils Flow diagram coils Measuring tube Constant heat transfer 2 www.kobold.com Laminar flow bypass

Mass Flow Meter Model: MS Technical Data Field of application: Suited only for dry, oil-free gases Measuring accuracy: ±1.5% f.s. (with calibrated performance characteristics, otherwise observe pressure and temperature coefficients) Option: ±1 % f.s. (only to 0-100 Nml/min measuring range with stainless steel case) Standard calibration: 1013.25 mbar abs., 0 C option: to customer specification Temperature coefficient: 0.15% f.s. / C Pressure coefficient: 0.3% f.s. / bar Repeatability: ± 0.5% f.s. Response time: 800 ms time constant; 6 s (typical) to within ±2% of final value over 25-100% of full scale Max. medium, and ambient temperature: 50 C Max.operating pressure: Nylon : 10 bar Stainless steel: 35 bar Installation position: ny Gas leak rate: 1 x 10-4 ml/s He (Nylon ) 1 x10-7 ml/s He (st. steel case) Wetted parts: 5% either glass-fibre-reinforced Nylon or stainless steel material no. 1.4401 Seals: FPM (others upon request) Supply voltage: 12-15 V DC, 24 V DC optional Output: Linear 0-5 V DC (load min. 2000 Ω) Option: 4-20 m (load max. 500 Ω) Connection diagram 6 7 8 9 PIN No. function 1 No connection 2 Flow rate signal ground 3 0-5 V DC flow rate signal 1) 2) 4 + mains supply (12 or 24 V DC ) 5 External display signal 6 External display ground 7 Mains supply ground 8 nalogue output 4-20 m ground 9 nalogue output 4-20 m signal 1 2 3 4 5 1) Devices powered with 24 V DC only, when the 24 V-feature is built in, otherwise damage may be caused by overvoltage! 2) Do not connect if the device is already supplied from the mains socket. Dimensions [mm] Case L (Stainless steel and Nylon ) Case M (Stainless steel) Case H (Stainless steel) 34,3 107,4 107,4 132,3 101,9 without ohne nzeige indication 144,0 113,5 without ohne nzeige indication 174,0 143,5 ohne without nzeige indication 122 162 288,5 8-32 UNC-2 () M4 X.7 8-32 UNC-2 () M6 X 1 () 10-32 UNC-2 () M6 X 1 () 1/11-2013 3,3 69,9 76,2 3,0 19,1 25,4 50,8 8,9 5,8 108 www.kobold.com 50,5 5,8 76,2 50,8 177,8 3

Mass Flow Meter Model: MS Order details Nylon version (example: MS-1002 00 V2 0) Measuring Max. Model Connection Voltage range for N 2 pressure loss with display with counter without display supply 0-20 Nml/min 1 mbar MS-1002 MS-1102 MS-2002 0-50 Nml/min 1 mbar MS-1003 MS-1103 MS-2003 0-100 Nml/min 1 mbar MS-1004 MS-1104 MS-2004 0-200 Nml/min 1 mbar MS-1005 MS-1105 MS-2005 0-500 Nml/min 1 mbar MS-1006 MS-1106 MS-2006 0-1 Nl/min 1 mbar MS-1007 MS-1107 MS-2007 0-2 Nl/min 6 mbar MS-1008 MS-1108 MS-2008 0-5 Nl/min 6 mbar MS-1009 MS-1109 MS-2009 0-10 Nl/min 6 mbar MS-1010 MS-1110 MS-2010 0-20 Nl/min 25 mbar MS-1011 MS-1111 MS-2011 0-30 Nl/min 47 mbar MS-1012 MS-1112 MS-2012 0-40 Nl/min 88 mbar MS-1013 MS-1113 MS-2013 on customer specification MS-10XX MS-11XX MS-20XX 00 = ¼" NPT female C2 = Swagelok ¼" 00 = 12 V DC V2 = 24 V DC Output 0 = 0-5 V DC = 4-20 m Order details stainless steel version (example: MS-3001 C1 V2 0) Measuring range for N 2 Max. pressure loss Case size Model Connection Voltage with display with without supply counter display 0-10 Nml/min 6 mbar L MS-3001 MS-3101 MS-4001 0-20 Nml/min 6 mbar L MS-3002 MS-3102 MS-4002 0-50 Nml/min 6 mbar L MS-3003 MS-3103 MS-4003 0-100 Nml/min 6 mbar L MS-3004 MS-3104 MS-4004 0-200 Nml/min 6 mbar L MS-3005 MS-3105 MS-4005 0-500 Nml/min 6 mbar L MS-3006 MS-3106 MS-4006 0-1 Nl/min 6 mbar L MS-3007 MS-3107 MS-4007 0-2 Nl/min 6 mbar L MS-3008 MS-3108 MS-4008 0-5 Nl/min 6 mbar L MS-3009 MS-3109 MS-4009 C1= Swagelok ⅛" C2=Swagelok ¼" C3=Swagelok ⅜" 0-10 Nl/min 105 mbar L MS-3010 MS-3110 MS-4010 C2=Swagelok ¼" 0-15 Nl/min 105 mbar L MS-3011 MS-3111 MS-4011 C3=Swagelok ⅜" 0-20 Nl/min 40 mbar M MS-3012 MS-3112 MS-4012 C2=Swagelok ¼" 0-30 Nl/min 60 mbar M MS-3013 MS-3113 MS-4013 0-50 Nl/min 80 mbar M MS-3014 MS-3114 MS-4014 0-100 Nl/min 105 mbar M MS-3015 MS-3115 MS-4015 0-100 Nl/min 6 mbar H MS-3016 MS-3116 MS-4016 0-200 Nl/min 6 mbar H MS-3017 MS-3117 MS-4017 0-300 Nl/min 140 mbar H MS-3018 MS-3118 MS-4018 0-400 Nl/min 140 mbar H MS-3019 MS-3119 MS-4019 C3=Swagelok ⅜" C4=Swagelok ½" C3=Swagelok ⅜" C4=Swagelok ½" C4=Swagelok ½" 0-500 Nl/min 140 mbar H MS-3020 MS-3120 MS-4020 on customer specification L MS-30LX MS-31LX MS-40LX C1 / C2 / C3 on customer specification M MS-30MX MS-31MX MS-40MX C2 / C3 / C4 on customer specification H MS-30HX MS-31HX MS-40HX C3 / C4 00 = 12 V DC V2 = 24 V DC When placing an order, please specify detailed service conditions (type of gas, flow rate, pressure, temperature etc.) Output 0 = 0-5 V DC = 4-20 m ccessories: Connector power supply Model Input Output MS-5100 230 V C 12 V DC /1.9 W MS-5105 230 V C 24 V DC /1.9 W MS-5000 110 V C 12 V DC /1.9 W 4 www.kobold.com

Mass Flow Meter Model: MFC Fields of application In addition to accurately measuring the gas flow rate, it is also necessary to maintain a constant flow rate with varying inlet or outlet pressures in many processes. Previously this has been achieved by having separate flow meter, electronic controller and valve, we can now combine these functions. The new model MFC mass flow controller is a compact device composed of mass flow meter, controller and valve. The user is thus provided with a controlling system that maintains a constant flow rate over a wide range, independent of variations in pressure and temperature. Theory of operation The medium flows through the MS mass flow meter, which measures the actual flow rate. The control electronics compares the measured value with the setpoint value. When deviations occur, the control electronics outputs an altered actuating signal to the builtin proportional valve which changes the passage opening, thereby maintaining a constant flow rate. The desired flow rate (setpoint value) may be adjusted with a built-in potentiometer or via an external 0-5 V DC (4-20 m optional) signal. Technical Data Field of application: Suited only for dry, oil-free gases Measuring accuracy: ±1.5% f.s. (with 10-100% of flow rate range) Repeatability: ± 0.25% f.s. Temperature coefficient: 0.8% f.s. / C Pressure coefficient: 0.07% f.s. / bar Response time (within 20-100% of measuring range): 1 s until 63% of actual flow rate is indicated Max. medium and ambient temperature: 50 C Max. medium pressure: Nylon : 10 bar Gas density: mbient: 1 x 10-4 ml/s Valve: not suitable as shut-off valve Material: case: 10% glass-fibre-reinforced Nylon Swagelok: stainless steel, seal: FPM Control range: 2-100% of measuring range (valve closes below 2% ) Supply voltage: 24 V DC Output: 0-5 V DC (load min. 2000 Ω) 4-20 m (load max. 1000 Ω) Control signal: 0-5 V DC or 4-20 m, adjustable Order details Nylon version (example: MFC-5101 00 00) Measuring range for N 2 Min. required diff. pressure with display Model Connection Output without display 0-10 Nml/min 0.35 bar MFC-5101 MFC-5202 0-20 Nml/min 0.35 bar MFC-5102 MFC-5203 0-50 Nml/min 0.35 bar MFC-5103 MFC-5204 0-100 Nml/min 0.35 bar MFC-5104 MFC-5205 0-200 Nml/min 0.35 bar MFC-5105 MFC-5206 0-500 Nml/min 0.35 bar MFC-5106 MFC-5207 0-1 Nl/min 0.55 bar MFC-5107 MFC-5208 0-12 Nl/min 0.55 bar MFC-5108 MFC-5209 0-5 Nl/min 1.00 bar MFC-5109 MFC-5210 0-10 Nl/min 1.38 bar MFC-5110 MFC-5211 0-20 Nl/min 1.38 bar MFC-5111 MFC-5212 0-30 Nl/min 1.38 bar MFC-5112 MFC-5201 0-40 Nl/min 1.38 bar MFC-5113 MFC-5213 0-50 Nl/min 1.38 bar MFC-5114 MFC-5214 on customer specification MFC-51xx MFC-52xx 00 = ¼" NPT female C1 = Swagelok ⅛" C2 = Swagelok ¼" K1 = 6 mm compression fitting 00 = 0-5 V DC V4 = 4-20 m When placing an order, please specify detailed service conditions (type of gas, flow rate, pressure, temperature etc.). ccessories: Connector power supply 1/11-2013 Model Input Output ZU-SNT035L 100-240 V C 24 V DC / 500 m www.kobold.com 5

Mass Flow Meter Model: MFC Dimensions [mm] 136 3,3 83 102 FLOW 14 19 "C" "" "" 30 15 70 Connection "" "" "C" ⅛" Swagelok 29 186 128 ¼" Swagelok 28 184 128 ¼" NPT - - 128 6 www.kobold.com