O P E R A T I N G M A N U A L CrystalSix Sensor
O P E R A T I N G M A N U A L CrystalSix Sensor www.inficon.com 2001 INFICON reachus@inficon.com
Trademarks The trademarks of the products mentioned in this Operating Manual are held by the companies that produce them. INFICON, CrystalSix and Composer are trademarks of INFICON Inc. ConFlat is a registered trademark of Varian Associates. Teflon is a registered trademark of Dupont. Scotch-Brite is a trademark of 3M. SWAGELOK and CAJON are registered trademarks of Swagelok, Co. Inconel is a registered trademark of International Nickel Co. Microdot is a registered trademark of Microdot Corp. All other brand and product names are trademarks or registered trademarks of their respective companies. Disclaimer The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product. Due to our continuing program of product improvements, specifications are subject to change without notice. Copyright 2001 All rights reserved. Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than one (1) year from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification. THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid. No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer. This manual is intended for private use by INFICON Inc. and its customers. Contact INFICON before reproducing its contents. NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON. www.inficon.com reachus@inficon.com
CrystalSix Sensor Operating Manual Table Of Contents Chapter 1 Sensor Specifications 1.1 Specifications for CrystalSix Sensor 750-446-G1.................... 1-1 1.1.1 Installation Requirements....................................... 1-2 1.1.1.1 Feedthrough................................................. 1-2 1.1.1.2 Other....................................................... 1-2 1.1.1.3 Utilities..................................................... 1-2 1.1.2 Materials.................................................... 1-3 1.1.3 Unpacking Instructions......................................... 1-3 1.1.4 Inventory.................................................... 1-3 IPN 074-155K Chapter 2 Sensor Installation 2.1 Crystals in the CrystalSix Sensor................................. 2-1 2.1.1 Handle the Crystal with Care.................................... 2-1 2.1.2 Care of the Ceramic Retainer.................................... 2-2 2.2 Pre-installation Sensor Check................................... 2-4 2.2.1 IC/5 Deposition Controller...................................... 2-4 2.2.2 XTC/2 or XTC/C Deposition Controller............................. 2-5 2.2.3 IC/4 or IC/4 PLUS Deposition Controller........................... 2-5 2.2.4 IC-6000 or XTC Deposition Controller............................. 2-6 2.3 General Guidelines for CrystalSix Sensor.......................... 2-6 2.3.1 Crystal Sensor Installation..................................... 2-10 2.4 CrystalSix Sensor Installation when used with an IC/5............................................ 2-12 2.4.1 Programming the Relay Outputs................................ 2-12 2.4.2 Wiring the Relay Outputs with Relay I/O Boards 760-162-G1 or 760-162-G1/G2................................. 2-12 2.5 CrystalSix Sensor Installation when used with an XTC/2 or XTC/C....................................... 2-12 2.6 CrystalSix Sensor Installation when used with an IC/4 or IC/4 PLUS..................................... 2-13 2.6.1 Programming the Relay Outputs................................ 2-13 2.6.2 Wiring the Relay Outputs with Relay I/O Boards 755-122-G1 or 755-122-G1/G2................................. 2-13 2.7 CrystalSix Sensor Requirement when Not Installed with an IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS.......................... 2-15 TOC - 1
CrystalSix Sensor Operating Manual Chapter 3 Installation of the Solenoid Valve Assembly 3.1 Installation with 1 Bolts........................................ 3-2 3.2 Installation with 2 3/4 Feedthrough............................... 3-3 3.3 Electrical and Pneumatic Connections............................. 3-3 3.3.1 Electrical.................................................... 3-3 3.3.2 Pneumatic.................................................. 3-4 Chapter 4 Maintenance 4.1 General Precautions........................................... 4-1 4.1.1 Maintain the Temperature of the Crystal........................... 4-1 4.1.2 Use the Optimum Crystal Type.................................. 4-1 4.1.3 Crystal Concerns when Opening the Chamber...................... 4-1 4.2 Crystal Holder Maintenance..................................... 4-1 4.3 Retainer Spring Adjustment Instructions........................... 4-2 4.4 Alignment Instruction for INFICON CrystalSix Sensor (IPN 750-446)................................................ 4-3 4.4.1 Alignment Instructions......................................... 4-4 4.4.2 Disassembly Instructions....................................... 4-6 4.4.3 Assembly Instructions......................................... 4-7 4.5 Troubleshooting the CrystalSix Sensor............................ 4-9 4.6 Replacing the Bellows Assembly [lpn 750-286-P2]............................................ 4-12 4.7 How To Contact Customer Support.............................. 4-15 4.8 Returning Your Instrument to INFICON........................... 4-15 Chapter 5 Feedthrough Outline Drawings IPN 074-155K TOC - 2
Chapter 1 Sensor Specifications 1.1 Specifications for CrystalSix Sensor 750-446-G1 CAUTION Incorrect rotation direction with the stops disabled will cause permanent damage rendering transducer inoperative. See Figure 1-2 on page 1-5 for proper direction of rotation. The CrystalSix sensor is a (six crystal) quartz crystal deposition monitor transducer. When the monitor crystal being used fails a new crystal is advanced into position, fully replacing that crystal s function. The mechanism used for providing this motion is pneumatically powered. The logic for automatic operation of this transducer is conveniently provided on most current INFICON Deposition Controllers. It is manufactured under US Patent #5,025,644, with foreign patents pending. Figure 1-1 CrystalSix Sensor Table 1-1 Sensor specification Maximum bakeout temp with no water 130 C Maximum operating isothermal environment temperature with minimum water flow Size (maximum envelope) 400 C 3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high 1-1
Table 1-1 Sensor specification (continued) Water, air and coax length Crystal exchange Mounting Standard 30" (76 cm) Front-loading, extraction tool required (supplied with unit) Six #4-40 tapped holes on the back of the sensor body 1.1.1 Installation Requirements 1.1.1.1 Feedthrough 1.1.1.2 Other 1.1.1.3 Utilities Qty (1) 2-3/4" ConFlat with two coaxial feedthroughs, two pass water, one air IPN 002-080, See Figure 5-2 on page 5-2 or, Qty (1) 1" bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1, see Figure 5-1 on page 5-1. User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022" restrictor orifice installed by the user. (Orifice included with CrystalSix accessory kit.) See Table 1-3 on page 1-3. XIU or Oscillator designed to interface with the deposition controller. Deposition controller must have been designed for this specific crystal sensor (INFICON XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5). Minimum water flow 150-200 cc/min, 30 C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kpa - 620 kpa] 2 meter maximum length of 1/8" tubing between bellows assembly and the control valve. CAUTION Do not allow water tubes to freeze. This may happen if the tubes pass through a cryogenic shroud and the fluid s flow is interrupted. 1-2
1.1.2 Materials Table 1-2 Materials Plate, Holders, Material Shield, Mechanical Parts 304 type stainless steel Springs, Electrical Contacts Au plated Be-Cu, Au Plate Inconel, 303 stainless steel Water and air tubes S-304, 0.125" (0.32 cm) O.D. x.016" (.04 cm) Wall Thickness 30" Long (76 cm) Seamless Stainless Steel Tubing Connector (Microdot) Stainless steel Insulators >99% A1 2 O 3 Cable Crystal Body and Carousel Teflon insulated copper 0.550" Diameter 2024 T351 Aluminum 1.1.3 Unpacking Instructions 1.1.4 Inventory The CrystalSix sensor and accessories are packaged in a single cardboard carton with rigid foam inserts. Carefully remove the packaged accessories before removing the sensor, then remove the red shipping plug from the sensor carousel. In addition to the basic transducer, the complete shipping package includes an accessory kit (IPN 750-268-G1) which consists of the following: Table 1-3 Contents of Accessory Kit Qty IPN Description X 750-268-G1 Accessory Kit, CrystalSix Sensor 1 750-254-G1 Assembly, Alignment Tool 1 750-279-P1 Crystal Puller 1 074-5000-G1 Thin Film Manuals CD 1 008-010-G10 Assembly, Sensor Crystal 6MHz 1 059-189 CC-1010-0225 Orifice 0.0225" diameter 2 070-201 #4 Split Lock Washer, Stainless Steel 2 084-032 #4-40x0.375" Long Socket Head Cap Screw, Stainless Steel 1-3
Table 1-3 Contents of Accessory Kit (continued) Qty IPN Description 2 084-039 #4-40x0.500" Long Socket Head Cap Screw, Stainless Steel 2 084-084 #4-40x0.688" Long Socket Head Cap Screw, Stainless Steel 1 070-828 Hex Wrench 1/16" SC9-3 1 070-829 Hex Wrench 3/32" SC9-5 1 070-1175 Hex Wrench 5/64" SC9-4 1 750-037-G1 Spring Tube Bender Kit 1 008-007 Crystal Snatcher 1 750-191-G1 Molybdenum disulfide in Alcohol 1-4
Figure 1-2 Outline Multi Crystal Sensor 1-5
Figure 1-3 Assembly CrystalSix Sensor 1-6
Chapter 2 Sensor Installation Successful operation of any crystal sensor depends on proper placement, compatibility of its construction with its operating environment and connection to proper utilities. NOTE: The sensor head, water tubes, cable, etc. should be clean and grease free when installed in the vacuum chamber. These parts should be handled while wearing clean nylon gloves. If parts do become contaminated, clean them thoroughly using a suitable solvent to avoid outgassing and excessive peeling of deposition material from the sensor s surfaces. CAUTION Incorrect rotation direction will cause permanent damage rendering transducer inoperative. Refer to Figure 1-2 on page 1-5 for proper direction of rotation. 2.1 Crystals in the CrystalSix Sensor 2.1.1 Handle the Crystal with Care Always use clean nylon lab gloves and clean plastic tweezers when handling the crystal. Handle the crystals only by their edges. Anything that comes in contact with the crystal surfaces may leave contamination, which may lead to poor film adhesion. Poor film adhesion will result in high rate noise and premature crystal failure. CAUTION Do not use metal tweezers to handle crystals. Metal tweezers may chip the edge of the crystal. 2-1
2.1.2 Care of the Ceramic Retainer CAUTION Do not use excessive force when handling the Ceramic Retainer Assembly since breakage may occur. Always use the crystal snatcher. To prevent scratching the crystal electrode, do not rotate the ceramic retainer after installation. Always use clean nylon lab gloves and plastic tweezers for handling the crystal. This avoids contamination which may lead to poor adhesion of deposited material to the electrode. Follow the procedure below to install or replace the crystals in the CrystalSix sensor. (Reference Figure 1-3 on page 1-6). CAUTION Rotating the unit in the wrong direction with the stops disabled will cause severe damage! Do not rotate the unit by hand to install the crystals or to check indexing. 1 Remove the heat shield (item #8) by gently pulling on the outside circumference of the shield. The shield should snap off. 2 Since the crystal holders are packaged separately, skip the remainder of this step for first-time installations. Using the crystal puller (IPN 750-279-P1, provided in ship kit 750-268), remove the crystal holder by pushing the tips of the crystal puller over the outside circumference of the crystal holder (see Figure 2-2 on page 2-4). Gently pull the crystal holder from its receptacle. A slight amount of pressure applied to collapse the tips of the crystal puller may be required to extract the crystal holder. 3 Insert the tapered end of the crystal snatcher (part number 008-007) into the ceramic retainer (A) and apply a small amount of pressure. This locks the retainer to the snatcher and allows the retainer to be pulled straight out (B). See Figure 2-1. 2-2
Figure 2-1 Using the Crystal Snatcher 4 Invert the crystal holder and the crystal will drop out. (Skip this step for first-time installations.) 5 Install the new crystal per section 2.1.1 on page 2-1 and section 2.1.2 on page 2-2. 6 Using clean nylon gloves, grasp the edge of the new crystal with a clean pair of plastic tweezers. Orient the crystal so the patterned electrode is facing up. Gently insert the edge of the crystal beneath one of the wire segments that protrude into the crystal cavity. Release the crystal. 7 Replace the ceramic retainer. Initially orient it at an angle to displace the spring wire segments in the crystal holder. 8 Release the crystal snatcher with a slight side-to-side rocking motion. Using the backside of the crystal snatcher, push on the ceramic retainer to ensure it is completely seated. 9 Position the crystal holder between the tips of the crystal puller as illustrated in Figure 2-2. 10 Push the crystal holder into the receptacle of the CrystalSix sensor until completely seated. Snap the crystal puller to one side to release the crystal holder from the crystal puller. Using the non-slotted end of the crystal puller, apply pressure to the crystal holder until it is completely seated. Verify that the crystal fail signal on the controller display disappears. If the crystal fail signal does not disappear, consult section 4.5 on page 4-9. 11 Press the crystal switch button on the hand held controller or the controller front panel. The sensor will advance to the next crystal position. Repeat procedure from Step 2 until all six new crystals have been installed. 12 Install the heat shield (item #8) by first orienting the slot in the heat shield to accommodate the water tubes, then secure the heat shield by applying pressure near the center of the shield. The shield should snap in place. 2-3
Figure 2-2 Using the Crystal Puller 2.2 Pre-installation Sensor Check Prior to installing the sensor in the vacuum system, you should make certain that it is in proper working condition by following the procedure outlined below. 2.2.1 IC/5 Deposition Controller 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (microdot/bnc). 2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector of the feedthrough. 3 Connect the other end of the 6" XIU cable to the connector of the XIU/5 (IPN 760-600-G1). 4 Connect one end of the XIU/5 cable (IPN 600-1039-Gxx) to the mating connector of the XIU/5. 5 Connect the other end of the XIU/5 cable to a sensor channel at the rear of the controller. 6 Connect power to the controller and set power switch to ON. Set density at 1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal life should read from 0 to 5%. 7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. 2-4
2.2.2 XTC/2 or XTC/C Deposition Controller 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (microdot/bnc). 2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector or the feedthrough. 3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN 757-302-G1). 4 Connect one end of the XX' long XIU cable (IPN 757-303-GXX) to the mating connector of the XIU. 5 Connect the other end of the XIU cable to a sensor channel at the rear of the controller. 6 Connect power to the controller and set power switch to ON. Set density at 1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal life should read from 0 to 5%. 7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. 2.2.3 IC/4 or IC/4 PLUS Deposition Controller 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (microdot/bnc). 2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector or the feedthrough. 3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN 755-252-G1). 4 Connect one end of the 15' long XIU cable (IPN 755-258-G15) to the mating connector of the XIU. 5 Connect the other end of the XIU cable to a sensor channel at the rear of the controller. 6 Connect power to the controller and set power switch to ON. Set density at 1.00 gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal life should read from 0 to 5%. 7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. 2-5
2.2.4 IC-6000 or XTC Deposition Controller NOTE: See section 2.7 on page 2-15. 1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter (Microdot/BNC). 2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on the feedthrough. 3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL on the oscillator (IPN 013-001). 4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the remaining BNC receptacle on the oscillator. 5 Connect the other end of the OSC source/sensor cable to the receptacle marked OSC on the rear panel of the controller. 6 Connect power to the controller and set power switch to ON. Set density at 1.00 gm/cc, and zero the thickness. The display should indicate 0/ or +/-0.001 KÅ. Crystal life should read from 0 to 5%. 7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ should appear on the display. When the moisture evaporates, the thickness indication should return to approximately zero. If the above conditions are observed, you can assume the sensor is in proper working order and may be installed. 2.3 General Guidelines for CrystalSix Sensor Figure 2-3, Figure 2-4, and Figure 2-5 show the typical installation of an INFICON water-cooled crystal sensor in the vacuum process chamber. Use the illustration and the following guidelines to install your sensors for optimum performance and convenience. 2-6
Figure 2-3 Typical CrystalSix Installation for IC/5 G IPN 750-420-G1 2-7
Figure 2-4 Typical CrystalSix Installation for XTC/2 and XTC/C G IPN 750-420-G1 2-8
Figure 2-5 Typical CrystalSix Installation for IC/4 PLUS G IPN 750-420-G1 2-9
2.3.1 Crystal Sensor Installation Generally, install the sensor as far as possible from the evaporation source (a minimum of 10" or 25.4 cm) while still being in a position to accumulate thickness at a rate proportional to accumulation on the substrate. Figure 2-6 shows proper and improper methods of installing sensors. Figure 2-6 Sensor Installation Guidelines Correct Incorrect Obstruction Incorrect Correct Incorrect Source To guard against spattering, use a source shutter to shield the sensor during the initial soak periods. If the crystal is hit with even a minute particle of molten material, it may be damaged and stop oscillating. Even in cases when it does not completely stop oscillating, it may immediately become unstable, or shortly after deposition begins instability may occur. Plan the installation to insure that there are no obstructions blocking a direct path between the sensor and the source. Install sensors in such a manner that the center axis of the crystal is aimed directly at the source to be monitored. Verify that the angle of the sensor location (with reference to the source) is well within the evaporant stream. Attach the sensor with a mounting bracket anchored to the deposition chamber. With the bracket in place, temporarily position and attach the sensor head as outlined in the general guidelines above. Next, temporarily install the feedthrough. You may now form, measure, and mark the sensor tubes (use the bending tool (IPN 750-036) to form tubes in the system). 2-10
Build the Sensor/Feedthrough Assembly. Remove the sensor and the feedthrough, cut the water cooling tubes and air tubes to the proper length and connect them directly to the feedthrough or use vacuum rated couplings. CAUTION To prevent damage to the feedthrough or sensor during welding or brazing, insure that at least one inch of water tube is left between the sensor and the feedthrough. After cutting the water and air tubes, verify that they are clear of metal particles by forcing compressed air through the tubing. Heliarc welding is recommended (torch brazing may also be acceptable) for connecting the sensor to the feedthrough water tube. Vacuum rated connectors such as CAJON are recommended for use between the sensor and the feedthrough to speed maintenance. If brazing adapters are to be used, attach them to the sensor water-cooling tubes prior to connection to the feedthrough. Make connections as follows: 1 Clean the water tube and adapter surfaces with solvent if necessary. 2 Apply brazing flux to surfaces being joined. 3 Braze the connections using a flame temperature appropriate for the brazing material being used. CAUTION Excessive application of brazing material, or excessive heat due to brazing, may result in blockage of the water tube. 4 Verify that each joint is not blocked by blowing compressed air through the cooling tubes. 5 Thoroughly clean the braze joint and helium leak test before installing the sensor and feedthrough into the process chamber. Once all water and air tube connections are fabricated, install the sensor and feedthrough assembly into the process system and secure all retaining hardware. Shield the coax cable from heat radiating from the evaporant source or the substrate heater. You can do this very simply, if your process allows, by wrapping aluminum foil around the cable and water tubes. Connect the external water tubes from the feedthrough to your water supply system and flow controller. We recommend using detachable couples (Swagelok or equivalent) for external water tube connections. Apply water pressure to verify flow and tightness. 2-11
Because of geometric factors, variations in surface temperature, and differences in electrical potential, the crystal and substrates often do not receive the same amount of material. If you want the thickness indication on the unit to represent the thickness on the substrates, calibration is required to determine the tooling. Consult your controller s manual for the proper procedure for obtaining the tooling factor. CAUTION Use of more than 80" (2 meters) of 1/8" tubing between the valve and the bellows may cause a switcher failure because of the time required to bleed out sufficient air during de-pressurization. If tubing greater than 1/8" is used, the maximum length must be reduced proportional to the additional volume. 2.4 CrystalSix Sensor Installation when used with an IC/5 2.4.1 Programming the Relay Outputs 1 From the program menu select Source/Sensor Directory (F4). 2 Select Sensor board 1, 2, 3 or 4 (depending upon unit configuration). 3 Enter the edit mode. (F5) 4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the Crystal Switch output (Switch Out (0, 1-38). 5 Select a CrystalSwitch output depending upon which I/O board is used. 2.4.2 Wiring the Relay Outputs with Relay I/O Boards 760-162-G1 or 760-162-G1/G2 On the relay connector, connect the leads of the solenoid valve across the one side of a 24 volt supply (see Table 11.5 of IC/5 Operating Manual) and one side of a relay (1-8, 1-16, or 1-24 whichever was programmed). Refer to Table 11.3 of the IC/5 Operating Manual. Connect a jumper between the second side of the 24 volt supply and the second side of the selected relay. 2.5 CrystalSix Sensor Installation when used with an XTC/2 or XTC/C Follow the instructions of Section 3.5.2 of the XTC/2 - XTC/C Operating Manual (074-183). 2-12
2.6 CrystalSix Sensor Installation when used with an IC/4 or IC/4 PLUS 2.6.1 Programming the Relay Outputs CrystalSix Operating Manual 1 From the program menu select Source/Sensor (F4). 2 Select Sensor board 1 or Sensor board 2. 3 Enter the edit mode. (F5) 4 Select Sensor type six (6) for the CrystalSix Sensor. This will enable the CrystalSwitch output. 5 Select a CrystalSwitch output (Relay 1-8 or 1-16) depending upon which I/O board is used. 6 Turn the instrument s power OFF, then ON, to ensure that the change takes place permanently. 2.6.2 Wiring the Relay Outputs with Relay I/O Boards 755-122-G1 or 755-122-G1/G2 1 On the relay connector, see Figure 2-7 on page 2-14, connect the leads of the solenoid valve across the one side of a 24 volt supply (see listing) and one side of a relay (1-16 whichever was programmed). Connect a jumper between the second side of the 24 volt supply and the second side of the selected relay. Refer to Figure 2-5 on page 2-9 for a typical installation utilizing relay 1 to perform the crystal advance function for the relay I/O board. Table 2-1 Wiring Connectors (P4) Top Relay Connector (P5) Input Lines Relay Pins Input Pins 1 24, 28 1 1, 20 2 23, 27 2 2, 21 3 22, 26 3 3, 22 4 13, 19 4 4, 23 5 12, 18 5 5, 24 6 11, 17 6 6, 25 7 10, 16 7 7, 26 8 3, 7 8 8, 27 2-13
Table 2-1 Wiring Connectors (continued) (P3) (available on G2 only) Bottom Relay Connector Relay Pins 9 47, 50 9 13, 32 10 14, 17 10 14, 33 11 59, 63 11 15, 34 12 53, 60 12 16, 35 13 34, 36 13 12, 31 14 28, 30 14 11, 30 15 4, 11 15 10, 29 16 1, 5 16 9, 28 Isolated 24 V(dc) source is available with a maximum of 0.4 amps total on connector P4 at Pins 4, 9, 15 and 21 with Pins 8, 14, 20 and 25 used as returns. 2 In similar fashion, connect the Pneumatic Actuator for the source shutter if required. 3 Connect the oscillator cable to the appropriate channel of the sensor board programmed. 4 Connect the source one or source two cable (whichever has been programmed) to the source controller. Figure 2-7 Relay outputs: typical connector configuration utilizing relay #1 NOTE: Contact arrangements shown are of pin mating face (plug or receptacle). The socket mating face is a mirror image of Figure 2-7. 2-14
2.7 CrystalSix Sensor Requirement when Not Installed with an IC/5, XTC/2, XTC/C, IC/4, or IC/4 PLUS The CrystalSix can be manually operated with other Deposition Controllers. The user must, however, be aware of the functional requirements for operation. These include, but are not limited to: 1 The solenoid assembly must be energized and de-energized twice per crystal position. Twelve pulses complete one revolution. 2 The electrical pulse applied to the solenoid valve must be at least one second in duration during both the pressurization and de-pressurization phase. 3 A 24 volt AC or DC supply is required to energize the solenoid assembly. Consult Figure 3-1 on page 3-4 for wiring assignments. 4 The user should provide some means of determining the quantity of good crystals when initially loaded, and quantity of good crystals remaining at any time. 5 Follow the guidelines shown in section 2.3 on page 2-6 for installation. 6 You will need to keep track of the total thickness as a manually generated sum of the deposit accumulated on each crystal. 2-15
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Chapter 3 Installation of the Solenoid Valve Assembly The solenoid valve assembly (IPN 750-420-G1) and the feedthrough should be installed at the same time. The same valve assembly is used for both the 1" and the (recommended) 2 3/4" feedthroughs. However, if the assembly is to be used with the 2 3/4" feedthrough, you will need to modify the valve bracket as follows. For the following steps, see Figure 3-2 on page 3-5. (DWG. 750-420-G1) 1 Align the score line on the valve assembly bracket (item #5) over the edge of a table or other square edge. 2 Using pliers, grasp the part of the bracket extending over the edge and push down. The bracket will break along the score line. Use a file to smooth any rough edges which occur along the break. NOTE: In order for the CrystalSix sensor to operate properly, a.022" diameter orifice (IPN 059-189 provided in Kit 750-268) must be installed in line between the air supply and the solenoid valve assembly. This is accomplished by the following procedure. See Figure 3-1 on page 3-4. 1 Unthread the tube fitting attached to the normally closed (N.C.) P Supply port of the 3-way solenoid valve (item #7). 2 Install the orifice by threading it into the normally closed (N.C.) port of the 3-way solenoid valve. 3 Thread the tube fitting previously removed into the orifice. NOTE: Do not install the orifice into the normally open output port. This will require a longer time interval for depressurization of the bellows assembly and may lead to an apparent sensor failure. 3-1
3.1 Installation with 1 Bolts Installation of the solenoid valve assembly for the CrystalSix sensor requires one 1" bolt feedthrough (IPN 750-030-G1, see Figure 5-1 on page 5-1). Follow these steps: 1 Ensure that the o-ring is in placed on the bolt. Insert the 1" bolt such that the hexagonal shaped end of the bolt is on the vacuum side of the chamber. 2 Add the Bracket. 3 Add the Washer. 4 Add the Nut. 5 Tighten the feedthrough nut. 6 Add the air fitting to the tube which has the female thread adapter installed. 7 Connect 1/8" diameter tubing from the valve output (A) to the feedthrough fitting. CAUTION Use of more than 80" (2 meters) of 1/8" tubing between the valve and the bellows may cause switcher failure because of the time required to bleed out sufficient air during de-pressurization. If tubing greater than 1/8" is used, the maximum length must be reduced proportional to the additional volume. 8 Attach the valve s supply (normally closed (NC) port) to the 80-90 PSIG (5.5 bar - 6.2 bar) [550 kpa - 620 kpa] source of air. Verify that the orifice (IPN 059-189) has been installed into this NC valve port. (See Figure 3-1b of Figure 3-1 on page 3-4.) 3-2
3.2 Installation with 2 3/4 Feedthrough CrystalSix Operating Manual Installation of the solenoid valve requires a 2 3/4" feedthrough inclusive of two coaxial feedthroughs (IPN 002-080, see Figure 5-2 on page 5-2). The second coaxial feedthrough is not used, and should be protected from damage as a result of process material. Follow the steps below: 1 Install the Feedthrough. 2 Add the valve bracket (modified) to the desired location as illustrated in Figure 3-3 on page 3-6. 3 Tighten the feedthrough bolts. 4 Install the air fitting to the female thread adapter. 5 Connect 1/8" diameter tubing from the valve output (A) to the feedthrough fitting. See the CAUTION in section 3.1 above. 6 Attach the valve s supply (P) (normally closed (NC) port) to the 80-90 PSIG (5.5 bar - 6.2 bar) [550 kpa - 620 kpa] source of air. Verify that the orifice (IPN 059-189) has been installed into this NC valve port. (See Figure 3-1b of Figure 3-1 on page 3-4.) NOTE: Maximum temperature for the solenoid valve assembly is 105 C for bakeout and operation. 3.3 Electrical and Pneumatic Connections 3.3.1 Electrical To complete installation of the assembly, make electrical connections where indicated in Figure 3-3 on page 3-6 to either 24 V(ac) or V(dc). Current required is approximately 70 ma. CAUTION Maximum applied voltage must not exceed 26 V(ac). 3-3
3.3.2 Pneumatic Figure 3-1 Pneumatic Solenoid Tube Connections Figure 3-1a Solenoid Valve Without Orifice (As Supplied) EXHAUST (Normally Open) 80-90 PSIG AIR SUPPLY P SUPPLY (Normally Closed) A OUTPUT PORT TO AIR FITTING OF FEEDTHROUGH TUBE FITTING (Provided with Valve) Figure 3-1b Solenoid Valve With Orifice (Installed by User) EXHAUST (Normally Open) Figure 3-1b shows the proper installation for all CrystalSix applications. 80-90 PSIG AIR SUPPLY P SUPPLY (Normally Closed) A OUTPUT PORT TO AIR FITTING OF FEEDTHROUGH TUBE FITTING (Provided with Valve) ORIFICE (059-189) (Provided with Accessory Kit 750-268-G1) 3-4
Figure 3-2 Solenoid Valve Assembly 3-5
Figure 3-3 2 3/4 Dual Coaxial Feedthrough & Valve Assembly 3-6
Chapter 4 Maintenance 4.1 General Precautions 4.1.1 Maintain the Temperature of the Crystal Periodically measure the water flow rate through the crystal sensor to verify that it meets or exceeds the value specified in chapter one. Depending upon the condition of the cooling water used, the addition of an in-line water filtering cartridge system may be necessary to prevent flow obstructions. Many system coaters use parallel water supply taps that provide high total flows. An obstruction or closed valve in the pipe that supplies water to the sensor head would not result in a noticeable reduction of total flow. The best test is to directly monitor the flow leaving the sensor. The crystal requires sufficient water cooling to sustain proper operational and temperature stability. Ideally, a constant heat load is balanced by a constant flow of water at a constant temperature. INFICON quartz crystals are designed to provide the best possible stability under normal operating conditions. No crystal can completely eliminate the effects of varying heat loads. Sources of heat variation include radiated energy emanating from the evaporant source and from substrate heaters. 4.1.2 Use the Optimum Crystal Type Certain materials, especially dielectrics, may not adhere strongly to the crystal surface and may cause erratic readings. For many dielectrics, adhesion is improved by using crystals with silver coated electrodes. Gold is preferred for other applications. 4.1.3 Crystal Concerns when Opening the Chamber Thick deposits of some materials, such as SiO, Si and Ni will normally peel off the crystal when it is exposed to air, due to changes in film stress caused by gas absorption. When peeling material is observed, replace the crystal. 4.2 Crystal Holder Maintenance In dielectric coating applications, the surface where the crystal contacts the crystal holder may require periodic cleaning. Since most dielectrics are insulators, any buildup due to blow-by will eventually cause erratic or poor electrical contact 4-1
between the crystal and the sensor body. This buildup will also cause a reduction in thermal transfer from the crystal to the sensor body. Both of these will result in noisy operation and early crystal failure. Cleaning may be accomplished by gently buffing the crystal holder to crystal seating surface with a white Scotch-Brite pad followed by an ultrasonic bath in soap solution followed by thorough rinsing in deionized water and drying or by ultrasonic cleaning and rinsing only. NOTE: The crystal holder seating surface is machined to a very fine finish (16 micro inches rms). This high quality finish is essential to provide good electrical and thermal contact with the crystal. Applying excessive force during cleaning or using overly abrasive cleaning materials may damage this finish and reduce sensor performance. 4.3 Retainer Spring Adjustment Instructions Occasionally you may become dissatisfied with the way the ceramic retainer is secured in the crystal holder. To alter the magnitude of the retaining force, use the following procedure. Tools required: Scribe or other pointed tool. Needle nose pliers (two required). 1 Position the crystal holder with the crystal aperture oriented downward. 2 Insert the point of the scribe between the inside edge of the crystal holder cavity and one of the two wire segments that protrude into the crystal cavity (Figure 4-1-a). 3 Using the scribe, gently remove the spring from its groove in the crystal holder cavity. 4 Consult Figure 4-1-b to determine the direction in which the 'transition point' must be relocated, to attain the desired retention forces. Moving this transition point approximately 1/8" is generally sufficient. 5 Grasp the spring, with the pliers, just below the transition point. Using the second set of pliers, bend the spring as illustrated by the dashed line in Figure 4-1-c to remove the existing transition point. 4-2
Figure 4-1 Location of the Transition Point 6 Use both pliers to form a new transition point according to Figure 4-1-b, thus returning the spring to a shape similar to the solid line delineation of Figure 4-1-c. 7 Reinstall the spring into the groove provided in the crystal cavity. 8 Determine if the retention force is acceptable and that the wire does not impede crystal insertion. Repeat these instructions if unacceptable retention forces persist. 4.4 Alignment Instruction for INFICON CrystalSix Sensor (IPN 750-446) During shipment, units may vibrate slightly out of position. This does not mean alignment is required. The unit will return to the centered position the first time it is pneumatically activated. The unit in the shipped condition has been aligned at the factory, no further alignment is required. NOTE: Realignment is only required if the unit has been disassembled for any reason, such as evaporant material removal, or any electrical problem that may occur, or if the ratchet (item #22 DWG 750-446 shown on Figure 1-3 on page 1-6) is loosened, or removed. This procedure is critical and must be carefully undertaken. 4-3
CAUTION Incorrect rotation direction with the stops disabled will cause permanent damage rendering transducer inoperative. Refer to Figure 1-2 on page 1-5 for proper direction of rotation. The unit, when properly aligned, will index the crystal to a position that is centered within the aperture provided in the heat shield. The unit must be aligned if this condition does not exist. Reference Figure 1-3 on page 1-6. Equipment Required: 5/64" allen wrench (Included in 750-268 Kit) 1/16" allen wrench (Included in 750-268 Kit) 3/32" allen wrench (Included in 750-268 Kit) Alignment tool assembly 750-254-G1 (Included in 750-268 kit) Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kpa - 620 kpa] 4.4.1 Alignment Instructions NOTE: 75 PSIG (5.2 bar) [520 kpa] for alignment purposes only) With the required equipment at hand, proceed as follows: 1 Temporarily connect an air supply to the bellows assembly supply tube. Regulate the air pressure to 75 PSIG (5.2 bar) [520 kpa]. 2 Remove the actuator cover (item 15) and related hardware. 3 Insert the 0.125" diameter alignment pin (of the 750-254-G1 assembly) in the alignment hole (if not already installed) as shown in Figure 4-2 on page 4-6. The carousel may need to be rotated to achieve the alignment condition shown in Figure 4-2. 4 Loosen the set screws (two set screws per item) of the ratchet (item #22) and the stop ratchet (item #38). 5 Loosen the #2 fastener (item #42) that attaches the detent (item #41) to the bellows assembly item #19). Do NOT remove detent. 6 Actuate the bellows assembly by applying 24 volts to the leads of the solenoid valve of the solenoid valve assembly. Consult Figure 3-1 on page 3-4 for wiring assignments. The air pressure must be sustained. 4-4
7 Rotate the ratchet (item #22) counterclockwise until one tooth contacts the pin of the pawl and actuator stem assembly (item #24). Secure the ratchet to the 0.25" diameter shaft of the carousel assembly (item #5) utilizing the #6-32 x.125" long socket set screw (item #33). 8 Rotate the stop ratchet (item #38) CW (clockwise) until it contacts the stem of the pawl and actuator stem assembly (item #24) as shown in Figure 4-3 on page 4-14. Secure the stop ratchet to the 0.25 diameter shaft of the carousel utilizing the #6-32 x.125 long socket set screws (item #33). 9 Rest the detent spacing tool on the top of the alignment pin as shown in Figure 4-4 on page 4-14. Position the detent spacing tool (of the 750-254-G1 assembly) between the detent (item #41) and ratchet (item #22) as shown in Figure 4-4. Pull the detent against the detent spacing tool and subsequently against the tooth of the ratchet. Tighten the #2 fastener (item #42) to secure the detent to the bellow assembly. 10 Remove the detent spacing tool. 11 Release air pressure from the bellows assembly (item #19). 12 Remove the 0.125 diameter alignment pin of the 750-254-G1 alignment tool assembly from the hole. 13 Prior to installation of the crystal holder assembly, check the continuity between the center contact of the connector and the electrical contacts associated with the carousel assembly (item #5). Install the crystal holder assembly when electrical continuity is verified. If electrical continuity is not verified, the unit should be disassembled (see section 4.4.2 on page 4-6). The electric contact associated with the carousel will have to be adjusted to ensure electrical contact when assembled. 14 Press the crystal switch button on the handheld controller or the instrument front panel. The sensor will advance to the next crystal position. Each crystal should be centered in the aperture. Repeat step #10 for each crystal position. Make certain the detent drops in to engage each tooth of the ratchet (item #22) on each pulse. 15 Secure the actuator cover (item #15) to the top plate (item #10) using two #4-40 x 0.187" long socket head cap screws (items #16 and #17). 16 Install the heat shield (item #8) by first orienting the slot in the heat shield to accommodate the water lines, then secure the heat shield by applying pressure near the center of the shield. The shield should snap in place. 17 Regulate the air supply to 80-90 PSIG (5.5 bar - 6.2 bar) [550 kpa - 620 kpa] for operation. Unit is now ready for operation. 4-5
Figure 4-2 Alignment Pin Installation 4.4.2 Disassembly Instructions In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page 4-6. 1 Remove the two #4 fasteners that secure the actuator cover (item #15) to the top plate (item #10). 2 Remove the actuator cover. Remove the heat shield (item #8) by gently pulling on the outside of the shield, the shield should snap off. 3 Remove the extension spring from the pawl and actuator stem assembly (item #24). 4 Remove the two #4 fasteners (item #20) that secure the bellows assembly (item #19) to the top plate (item #10). 5 Carefully remove the bellows assembly. The pawl and actuator stem assembly (item #24) and the detent (item #41) will be removed with the bellows assembly. 6 Using the 1/16" allen wrench, loosen the set screws (item #33) that secures the ratchet (item #22) and the stop ratchet (item #38) to the carousel assembly (item #5). Remove the ratchet (item #22) and the stop ratchet (item #38). 7 Remove the three #4 fasteners (item #14) that secure the top plate (item #10) to the sensor body (item #11). 8 Remove the top plate (item #10). 9 Remove the Teflon washer (item #39). 4-6
CAUTION When removing the top plate make certain the connector terminal does not become damaged. 10 Remove the compression spring (item #28). 11 Remove the carousel assembly (item #5) CAUTION When removing the carousel make certain the 0.126" diameter ball (item #27) does not become lost. 4.4.3 Assembly Instructions In the following steps, reference Figure 1-3 on page 1-6 and Figure 4-2 on page 4-6. 1 Place the 0.126" diameter ball (item #27) in the countersunk hole of the sensor body (item #11). 2 Attach the corrugated springs (item #31) if not already attached to the sensor body (item #11), as illustrated in detail "F" of Figure 1-3 on page 1-6, utilizing the 0-80 pan head screws (item #45). CAUTION Be extremely careful when handling the corrugated springs to avoid distortion. The successful operation of this apparatus is dependent on this component's integrity. 3 With the free end of each corrugated spring outside the sensor body, install the carousel assembly (item #5) so that it rests on the.126" diameter ball. Insert the corrugated springs into the space between the carousel (item #5) and the body (item #11). Make certain that the corrugated springs are not damaged upon installation. 4 Rotate the carousel clockwise until the alignment hole in the carousel lines up with the alignment hold of the body. Insert the 0.125" diameter alignment pin of the alignment tool assembly (750-254) provided. Refer to Figure 4-2 on page 4-6. 4-7
5 Place the compression spring (item #28) in the cavity surrounding the 0.25" diameter shaft of the carousel assembly. Install the Teflon washer (item #39) onto the.25" diameter shaft. 6 With the connector facing outward, pass the top plate (item #10) over the 0.25" diameter shaft of the carousel assembly (item #5) and the.125" diameter alignment pin. 7 Secure the top plate to the sensor body utilizing the three #4-40 screws (items #14 and 17). 8 Install the pawl and actuator stem assembly (item #24) into the bellows assembly (item #19) by threading the actuator stem into the mating hole located in the bore of the bellows assembly. Continue to thread the actuator stem until the shoulder of the actuator stem is approximately.035" away from the bellows assembly. This.035" distance specification is for reference only; the actuator stem position may have to be adjusted to obtain the desired condition, as illustrated in Figure 1-3 on page 1-6. 9 Fasten the bellows assembly to the top plate utilizing the two #4-40 x 1.125" long screws (item #20). Do not tighten the screws. Position the bellows assembly in such a fashion as to allow the actuator stem to come in contact with the ball bearings (item #25) as illustrated in Figure 1-3 on page 1-6. Tighten the screws. Loosen the #2 screw (item #42) which secures the detent to the bellow assembly (item #19). 10 Slide the ratchet (item #22) and the stop ratchet (item #38) onto the 0.25" diameter shaft of the carousel assembly (item #5) as illustrated. Do not tighten the #6-32 set screws (item #33). 11 Attach the loop of the extension spring in the hole provided in the pawl of the pawl and actuator stem assembly (item #24). 12 Position the ratchet (item #22) such that it engages the pin of the pawl and actuator stem assembly (item #24). 13 Position the detent (item #41) so it engages the ratchet (item #22). Unit is now ready to be aligned, refer to section 4.4.1 on page 4-4. 4-8
4.5 Troubleshooting the CrystalSix Sensor Table 4-1 Troubleshooting CrystalSix Operating Manual Symptom Cause Remedy 1. Crystal fail signal on front panel of unit will not disappear even though crystal can be seen through heat shield aperture. 1a. Damaged Crystal. 1a. Replace crystal. 1b. Loss of electrical signal. 1b. Check for electrical continuity between feedthrough and leaf springs that make contact with the crystal holder in the sensor.* If electrical problem originates in the sensor, consult Chapter 4 for disassembly instructions, if necessary. 2. Unit will not advance when crystal switch key is pressed. 3. Crystal not centered in aperture. 2a. Loss of pneumatic supply, or pressure is insufficient for proper operation. 2b. Operation has been impaired as a result of peeling of the material accumulated on the face of the cover. * Make certain the leaf springs in the carousel assembly are bent up far enough to contact the crystal holder when installed. 2a. Establish air supply and regulate to 80-90 PSIG for operation. 2b. Consult Chapter 4 for disassembly instructions to remove material or to correct mechanical failure. 3a. Improper alignment. 3a. Realign per alignment instructions in Chapter 4. 3b. 0.0225 diameter orifice not installed inline to the supply side of the solenoid valve assembly. 3b. Install orifice where shown on Figure 2-3 on page 2-7. 4-9