Flowsensor for compressed air - PDF Free Download

TOTAL OUT1 ERROR Nkm 3 Nm3 N Nm 3/min Flowsensor for compressed air Ideal for plant energy-saving control This sensor is ideal for controlling and checking the flow of compressed air at plants and equipment lines, etc. Flow rate sensor - FLUEREX PF500D to PF16000E Series. Sensor section IP64 drip-proof-compatible This sensor can be installed in position. A straight piping section is not needed when installing the flow meter (excluding the PF16000E). Monitor Easy-to-read digital display Display functions are switched with one-touch key operations. PF500D PF1000D PF2000D PF4000D PF8000D PF16000E PFK500D PFK1000D PFK2000D PFK4000D PFK8000D The separated type enables operation at random sites. Covering a wide range of flow rates with 11 models 25 50 100 200 400 500 1000 800 2000 4000 Major applications Flow rate control at plants Flow rate control in manufacturing lines or devices Energy-saving measures at plants Model series system Port size Flow rate range NL/min FLUEREX Tester kit 10A 15A 25A 40A 50A 10 100 1,000 10,000 100,000 8000 16000 Optimum for ISO14001 acquisition Monitor functions Instantaneous flow display (Standard) Cumulative flow display (Standard) Peak flow display (Standard) Flow load display (Standard) Pressure range 1.5 P Output function ISO14001 Large flow rate types compatible with controlling energy saving in the each plant are available. This component is indispensable for acquiring International Standard Organization ISO14001 certification for your environment management system. This sensor also functions as a flow sensor for different devices. Eliminate compensation - read directly with a digital gauge Bothersome pressure compensation and temperature correction are not required. The digitally displayed value can be directly read in. Pressure compensation not necessary: detection of mass flow Temperature correction not necessary: Automatic temperature correction function integrated High practical precision at ±3%F.S. A practical precision of ±3%F.S. is realized without correction at temperatures from 0 to 40 C and pressures from to 1.5. Practical precision expresses linearity, pressure, and temperature with a composite error based on JIS Standards JISZ8103. Easily estimate working air capacity The standard estimate function makes it easy to measure working air capacity. Variety of output functions Four analog output types and a pulse output type ideal for networking, are available in addition to switch output. Portable kit Five types of tester kits (PFK) containing a sensor, monitor, and piping, etc., in a trunk are available. This kit is used for different applications. Quick wiring and piping connections are used. 40 Temperature range 0 AIR FLOW MONITOR FLUEREX CHANGE PF SERIES Switch output (Standard) Analog output 0 to 5 VDC (Standard) 4 to 20 madc (Option) 1 to 5 VDC (Option) 0 to 10 VDC (Option) Pulse output (option) Perfect for networks connecting personal computers, etc. Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air Note: Only the port sizes indicated with are available for the tester kit. 1004 1005

PF Series Applications For flow rate control in paint lines For flow rate control in automobile manufacturing lines For flow rate control per line! Cost conversion by integrating flow rate display For semiconductor manufacturing equipment For flow rate control of expensive air with low dew point! Ready detection of trouble such as "overflow", etc.! For flow rate control of loom plant For low pressure casting devices For control of die cooling temperature! Ejection cylinder Die Compressed air Molten metal Stoke Crucible 1006

Compressor air flow sensor PF and PFK Series DANGER Working fluid 1 Do not use this product for flammable fluids. Work environment 1 Explosion-proof environment Do not use this product in an atmosphere containing flammable gas. It does not have an explosion-proof structure, so flame or fires could occur. WARNING Working fluid 1 This product is not to be used as a business meter. This product does not conform to Measuring Laws, and thus cannot be used for commercial purposes. Use this sensor for industrial applications. 2 Compressed air or nitrogen can be used. Do not use other fluids or the precision cannot be guaranteed. 3 Compressed air from the compressor contains drainage water, oil oxide, foreign substances, etc. so install a filter, air dryer, and oil mist filter on the primary side (upper stream side) of the sensor. The sensor's meshing rectifies flow in the pipe. It does not filter out foreign substances, so provide a filter. Filter Air dryer Oil mist filter Valve CAUTION 1 Sensor and monitor combination With the conventional PF4000/8000, the sensor and monitor were used as a non interchangeable pair. The PF500D, 1000D, 2000D, 4000D, 8000D, and 16000D Series have independent sensors and monitors. Sections within the same model series can be interchanged. (1) PF4000/8000 <Example> PF4000 monitor A PF4000 monitor A Pneumatic components (Sensor devices) Safety Precautions Read this before starting use. Please refer to Intro 43 for general details on the pneumatic components, and to " Precautions" in this section for detailed cautions pertaining to each series. PF4000 sensor A PF4000 sensor B Only sensor A can be connected to monitor A. Sensor B cannot. Design & Selection 2 Applicable fluids There is a risk of oxygen deficiency if nitrogen gas is used for the applicable fluid. Observe the following points when handling: (1) Use this product in a well-ventilated place. (2) Ventilate the area while using nitrogen gas. (3) Regularly check nitrogen gas piping for leaks. Design & Selection Working environment 1 Corrosive environment Do not use this product in an environment containing corrosive gases such as sulphur dioxide. 2 Fluid temperature Keep the fluid temperature within 0 to 40 C. Do not use this product where temperature suddenly changes, even if ambient temperature is within specifications. Otherwise, dew could form. 3 Maximum working pressure and specified flow rate range Applications exceeding the maximum working pressure and specified flow rate range may result in faults. Use this product only within the specified range. 4 Drip-proof environment. Only the sensor conforms to IP64. The sensor is dust-proof and drip-proof, so problems do not occur if water gets on the sensor during maintenance or cleaning. The sensor should not be exposed to water for long periods or used in places where water and oil scatter with force. Design & Selection (2) PF500D/1000D/2000D/4000D/8000D/16000E <Example> PF500D monitor A PF500D sensor A PF500D monitor A PF500D monitor A PF1000D monitor PF4000 monitor Sensors A, B, and C can be freely interchanged and connected with monitor A if sensors are from the same model. Differing models cannot be interchanged. Old and new models cannot be interchanged. 2 Use within an ambient temperature range 0 to 50 C. 3 Avoid using in areas where vibration exceeds 49m/s 2 and impact 294m/s 2. Vibration of 49 m/s 2 and over PF500D sensor B PF500D sensor C PF500D sensor PF4000D sensor Safety Impact of 294 m/s 2 and over Desiccant High polymer membrane dryer 1007 Refrigerating Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air

Pneumatic components (Sensor devices) Safety Precautions Read this before starting use. Please refer to Intro 43 for general details on the pneumatic components, and to " Precautions" in this section for detailed cautions pertaining to each series. Safety Compressor air flow sensor PF and PFK Series DANGER Installation, Piping & Wiring 1 Set the power voltage and output at the specified voltage. Application of voltage exceeding the specified voltage could result in malfunctions, sensor damage, electrical shock, or fire. Do no use a load exceeding the output rating. Failure to observe this could result in output damage or fire. Wiring WARNING 1 Check the wire color and terminal numbers when wiring. Incorrect wiring connections could result in sensor damage, problems, and malfunctions, so check wire color and terminal numbers against the instruction manual before wiring. Use a wire with the same or higher performance than the 600 V vinyl wire for the power supply and other wiring. Insert a noise filter if required. 2 Ground the FG terminal with Class 3 grounding (100Ω or less). Do not use a common ground with the power distribution system. Installation, Piping & Wiring 3 Check wiring insulation. Check that wires do not contact other circuits and that there are no ground faults or insulation faults across terminals. Overcurrent could flow in and damage the sensor. 4 Separate the monitor from high-voltage wires, high voltage devices, and powered devices such as motors. 5 Check that there are no swarf or wire scraps on the monitor's gland and sensor connectors before wiring. CAUTION Installation, Piping & Wiring Piping 1 This sensor can be installed vertically, horizontally, or in any other position. 2 When adjusting the flow with a metering valve (globe valve, ball valve, etc.), install the metering valve on the secondary side of the sensor (downstream). If the metering valve is installed on the primary side, drift (turbulent flow) could occur and result in an error. 4 Do not install a regulator before the sensor (on the primary side). 5 When using an elbow or bushing (up to 1 port size rank difference) in piping for the PF16000E Series, install a 10D or larger straight pipe on the upstream side and a 5D or larger straight piping section on the downstream side. If there is no straight piping section, drift (turbulent flow) could occur and result in an error. * "D" here refers to the piping material bore. Metering valve Metering valve 3 When installing a stop valve on the primary side of the sensor for maintenance, use the stop valve fully open or fully closed. 10 D 5 D Using an elbow 10 D 5 D Using a bushing 1008

Refrigerating Desiccant High polymer membrane dryer Air filter CAUTION Installation, Piping & Wiring 6 When installing the sensor on piping, use the following torque so that excessive screw-in torque or load torque is not applied to the connection port: Model No. PFS500D PFS1000D PFS2000D PFS4000D PFS8000D PFS16000E A. max. screw torque N m 29 29 29 48 72 80 B. max. load torque N m 14 14 14 38 48 60 Resin cover Load torque Screw torque 7 Align the fluid direction and the direction shown on the body when piping. The indicated flow rate increases if connected in reverse. Flow direction 8 Clean out piping to remove foreign substances and swarf, etc., before piping. The rectifying unit or platinum sensor could be damaged if a large amount of foreign substances or swarf, etc., enters. 9 Check that force is not applied to resin parts when piping. 10 Check that sealing tape or adhesive does not get inside when piping. When winding fluorine resin sealing tape around threads, wind sealing tape 1 to 2 times, leaving 2 to 3 threads open at the end of the screw. Press down on tape to stick it to threads. When using liquid sealing agent, leave 1 to 2 threads open from the end, and avoid applying too much. Check that the sealing agent does not get on the device's threads. Sealing tape Solid/liquid sealing agent Solid/ Solid/ liquid liquid sealing sealing agent agent Acceptable Not acceptable Acceptable Not acceptable Wiring 1 Separate the cable from sources of noise such as power distribution wires. Failure to do so could result in malfunctions caused by noise. 2 Use the enclosed cable PF-FL-280774 (3 m) to wire the sensor to the monitor. Use the CKD extension cable PF-FL-280775 (length 3 m) to extend the cable. The enclosed cable can be connected to the extension cable for a maximum of 6 m. Contact CKD if longer distances are required. The extension cable is compatible with all models. 14.5 dia. 6.7 dia. 3000 3 Do not short-circuit the output contact. 4 Do not use this product for loads generating surge voltage. When directly driving a load that generates a surge, such as a relay or solenoid valve, use a sensor with integrated surge absorbing element. Similarly, use surge countermeasures if there is a source of surge in the power supply line. (Refer to "Protection circuit for monitor contact" on the following page.) 5 Do not repeatedly bend or tension to leads or wires could disconnect. Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air 1009

Contact protection circuit for monitor The monitor has an integrated switch contact. Provide the following protection circuit to protect the contact from inductive loads: CR Diode Diode and Zener diode Variable resistor Power supply Application Circuit example Features and other items Selecting the element AC DC Monitor (OUT1) C Load Monitor (OUT1) C Power supply Monitor (OUT1) Power supply Monitor (OUT1) Power supply Monitor (OUT1) Power supply Monitor (OUT1) Power supply Inductive load Inductive load Inductive load Inductive load Inductive load Avoid using the following arc suppressors: R C R * These are extremely effective for extinguishing arcs at cut off, but capacity is accumulated in C when the contact is opened. C's shortcircuit current flows when the contact is tripped and causes the contact to melt easily. * When using with an AC voltage, check that load impedance is sufficiently smaller than CR impedance. When the load is a relay or solenoid, recovery time is delayed. Connect the circuit between loads when using a 24 or 48 V power voltage and across contacts for a 100 to 200 V power voltage for maximum effect. Energy accumulated in coils is passed as current by the parallel diode, and consumed as Joule heating by inductive load resistance. Recovery for this takes even longer than for C This is effective when recovery of the diode is too slow. This uses the constant voltage of the variable resistor to prevent very high voltage from being applied across contacts. Recovery is also slower with this method. Connect the circuit between loads when using a 24 to 48 V power voltage and across contacts for a 100 to 200 V power voltage for maximum effect. Power supply Monitor (OUT1) C Load PF/PFK Series Contact protection circuit for monitor The guide for C and R is: C: 1 to 0.5 (uf) of the contact current 1 A R: 0.5 to 1 (W) of the contact voltage 1 V. These may not necessarily match due to dispersion in load characteristics, etc. Test the state while considering that C is affected by discharge suppression when the contact is opened, and R plays a role in suppressing current when power is turned ON next. Generally, C should have a withstand voltage between 200 and 300 V. When an AC circuit is involved, use an AC capacitor (no polarity). Use a diode with a reverse withstand voltage that is 10-fold or more than circuit voltage and for which forward current is larger than load current. If circuit voltage is not that high for the electronic circuit, a diode with a reverse withstand voltage 2 to 3 times larger than the power voltage can be used. The Zener voltage of the Zener diode is approximately the same as the power voltage. Select cut voltage Vc to satisfy the following condition: When using alternating current, voltage must be multiplied by 2. Maximum contact voltage > Vc > Power voltage This is extremely effective for extinguishing arcs at cutoff, but charged current flows to C when the contact is tripped, causing the contact to melt easily. It is usually more difficult to switch a DC induction load than to a resistance load, so performance can be increased to the same level as the resistance load by using an appropriate arc suppressor. Keep wiring short to prevent effects from noise. Separate wire from sources of noise such as power distribution cables. Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air 1011

PF/PFK Series PF and PFK Series electrical wiring 1 Switch output The monitor has 1 independent contact. Observe the following precautions when using this contact: Contact specifications Load Descriptions RatedLoad Rated energizing current Maximum contact voltage Maximum contact current Maximum contact capacitance Resistance load (COS φ = 1) Inductive load (COS φ = 0.4, L/R = 7ms) AC110V 0.5A AC110V 0.2A DC24V 1A DC24V 0.3A 2A AC125V, DC60V 1A 60VA, 30W 30VA, 15W Integrated relay: G2Q-187P-V, OMRON 2 Analog output (Option symbol: No symbol, -A1, -A2, -A3) Analog output (V) Analog output (V) Analog output (ma) Analog output (V) If the ratings at left are exceeded, use an auxiliary relay to turn the load ON and OFF. When using an inductive load, such as an auxiliary relay, on the relay contact's output, use a CR filter as the arc suppressor circuit (when using AC), or protect the circuit with a diode, etc. (Refer to the Contact protection circuit for monitor section on page 1011.) Load resistance for analog output Descriptions Analog output DC0 to 5V DC4 to 20mA DC1 to 5V DC0 to 10V PF500D PFK500D PF1000D PFK1000D PF2000D PFK2000D PF4000D PFK4000D PF8000D PFK8000D PF16000E Load resistance 1MΩ or more 500Ω or less 1MΩ or more 1MΩ or more Model no. Min. value (N /min) FS(N /min) 25 50 100 200 400 800 500 1000 2000 4000 8000 16000 The relation of the flow and analog output is shown in the graphs at left. Analog output is not output correctly when lower than the minimum. Note that flow is displayed on the monitor even when less than the minimum. Do not short-circuit the analog output terminal (AO) with other terminals. Failure to observe this could result in problems. Keep wiring short to prevent the effect of noise. Separate the wire from sources of noise such as power distribution cables. 3 Cumulative pulse output (Option symbol: -A6) The cumulative pulse outputs the pulse at the following cumulative value: [N ] Model No. PF500D PF1000D PF2000D PF4000D PF8000D PF16000E Cumulative flow rate per pulse 10 100 Example: The pulse waveform for the PF8000D is shown below. When the cumulative display exceeds When the cumulative display exceeds 100N 200N 40msec 40msec 40msec Electrical specifications Output circuit Transistor output Internal circuit OUT21 Rating across OUT21 and 22 Maximum rated voltage: 35 VDC Maximum rated current: 50 ma ON ON 40 msec Common GND OUT22 OFF OFF Time Time 1022 Note that the cumulative display is updated at 1 s intervals.

4 Wiring the sensor and monitor Observe the following precautions when wiring Gland layout PF/PFK Series Electric wiring Use the CKD dedicating connector cable (PF-FL-280774). Specifications : For DC applications 4-core 0.5 mm 2 Equivalent : X2S2F-D421-G80-A, OMRON Note that the cable is 5 m long. Use the CKD extension cable (PF-FL-280775) to extend the cable. The dedicating cable can be connected with the extension cable to achieve a maximum length of 6 m. Extending the cable any longer results in errors. Cumulative flow is cleared by connecting the RES terminal to the GND terminal. Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. Pulse output (Option symbol: -A6) generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air PFK500D to 8000D Total air system Coupler storage section Cable and power cord storage section Switch output terminal Recorder terminal Cable (3m) Water cooling refrigerator for water For compressed air Power cord (2. 5m) Power switch AC100V 1023

PF/PFK Series Explanation of monitor functions and operations Bar graph Sensor error light Shows the peak value and load factor. Indicates errors in the sensor section. The sensor's power is shut off when this light is ON. 5-digit digital display <MEASUREMENT MODE> Displays the instantaneous and Switch output light cumulative flows. <WRITE MODE> < MODE> Indicates the switch's output state. Displays the switch setting, bar graph setting, peak value, etc. Unit display light Read key Indicates the unit for the "5-digit digital Reads the setting value. display". Shifts to the < MODE>. CHANGE key <MEASUREMENT MODE> Toggles between instantaneous and Shift key UP key cumulate flows. <WRITE MODE> <WRITE MODE> Shifts the blinking digit to the right. <WRITE MODE> Increments the blinking digit. Changes the setting. * The unit of instantaneous flow displayed for the PF16000E is Nm 3 /min. <MEASUREMENT MODE> The normal flow is measured and displayed. Switch operation : Operating state Analog output : Operating state Flow display changeover Instantaneous flow <Unit> N N N N Cumulative flow <Unit> N N N N Cumulative flow <Unit> N N N N Cumulative flow <Unit> N N N N N N N N PF/PFK Series Explanation of functions and operation Changing the flow temporarily Use this to show cumulative flow rate for a short time, while show the instantaneous flow normally. 1) The display shown at left is displayed when the CHANGE key is pressed. Note that only the unit matching the current cumulative flow is displayed when this display is opened first. 2) The unit light blinks when the temporary value is displayed. 3) The original display is returned to after 10 seconds. Changing the normally displayed flow Use this to select the flow to be displayed at all times. 1) Press the CHANGE key. When the required display is displayed, hold down the CHANGE key for 5 seconds. 2) The changeover is completed when the unit light changes from blinking to continuously lit. 3) The instantaneous flow is displayed at shipment. Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Switch parameters Three types of parameters are selected based on the application. < MODE> Hold down the and keys simultaneously for 3 seconds. The switch setting, bar graph setting, etc., are read out. CHANGE Peak display Switch operation : Operating state Analog output : Operating state Switch parameter display Switch Low display Switch High display Hysteresis display Bar graph 100% display Cumulative value display Hold down the and keys simultaneously for 3 seconds. Hold down the and keys simultaneously for 10 seconds. <WRITE MODE> The switch setting, bar graph setting value, etc., are set or changed. Switch operation: Stopped Analog output: Operating state Switch parameter setting Switch Low setting Switch High setting Hysteresis setting Bar graph 100% setting Peak value cleared Cumulative value cleared Set the required value by pressing the (SHIFT key) and (UP key) at the (Up Key) blinking digit. 1024 1025 (Shift Key) CHANGE CHANGE CHANGE CHANGE CHANGE Hysteresis A wide setting can be made randomly. Hysteresis Flow (Hysteresis is set with parameters 0 and 1.) Hysteresis Bar graph 100% setting The load factor is displayed on the bar graph when the 100% flow rate is set. Displaying and clearing the peak value The peak value within 24 hours after power ON or after the peak value was cleared is displayed. To clear the value, hold down the and keys simultaneously for 10 seconds, then change to MEASUREMENT MODE. Data is cleared. Displaying and clearing the cumulative value The cumulative flow from the value at shipment is displayed. To clear the value, hold down the and keys simultaneously for 10 seconds, then change to MEASUREMENT MODE. Data is cleared. Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air

PF/PFK Series Explanation of functions Piping adapter Fluid direction Pressure loss characteristics Rectifier Platinum membrane sensor (fluid temperature detection resistor) Platinum membrane sensor (heater temperature detection resistor) Flow path The sensor section consists of a rectifier that passes an even amount of compressed air, a heater temperature detection resistor with integrated heater, and fluid temperature detection resistance for detecting fluid temperature. When compressed air is not flowing, electricity flows to the heater at the heater temperature detection resistor to maintain it at a set temperature. When compressed air flows, heat is lost in proportion to the air mass, so current flows to the heater temperature detection resistor to maintain the set temperature. The monitor receives a signal indicating the amount of electricity that has flowed, and displays the air's instantaneous and cumulative flows obtained by converting to 0 C with practical atmospheric pressure. The fluid temperature detection resistor measures and compensates for the temperature of compressed air. 0.080 PF500D / PF1000D-10 0.080 PF1000D-15 / PFK500D / PFK1000D 0.080 PF2000D-10 Pressure loss () Pressure loss () 0.060 0.040 0.020 0.4 0.7 0.000 0 250 500 750 1000 Flow (N /min) PF2000D-15 / PFK2000D 0.080 0.060 0.040 0.020 0.000 0 500 0.080 PF8000D-25 1000 1500 2000 Flow (N /min) 0.4 0.7 Pressure loss () Pressure loss () 0.060 0.040 0.020 0.000 0 250 0.080 0.060 0.040 0.020 PF4000D-15 500 750 1000 Flow (N /min) 0.4 0.7 0.4 0.7 0.000 0 1000 2000 3000 4000 Flow (N /min) 0.080 PF8000D-40 / PFK8000D Pressure loss () Pressure loss () 0.060 0.040 0.020 0.4 0.7 0.000 0 500 1000 1500 2000 Flow (N /min) PF4000D-25 / PFK4000D 0.080 0.060 0.040 0.020 0.4 0.7 0.000 0 1000 2000 2000 4000 Flow (N /min) 0.080 PF16000E-50 Pressure loss () 1020 0.060 0.040 Pressure loss () 0.060 0.040 0.020 0.4 0.020 0.4 0.020 0.7 0.7 0.4 0.7 0.000 0.000 0.000 0 2000 4000 6000 8000 0 2000 4000 6000 8000 0 4000 8000 12000 16000 Flow (N /min) Flow (N /min) Flow (N /min) Pressure loss () 0.060 0.040

for compressed air (flow rate sensor) PF500D to PF8000D / PF16000E Series for compressed air with various functions Flow rate range: 25 to 500, 50 to 1000, 100 to 2000 200 to 4000, 400 to 8000 and 800 to 16000N /min CAD DATA AVAILABLE. Specifications Descriptions Spec. Working conditions Accuracy Output Installation Diversion range Port size Applicable fluid Working air quality N /min Max. working pressure Min. working pressure Withstanding pressure Ambient temperature and humidity Fluid temperature C Linearity Pressure characteristics Temperature characteristics Output response time sec Display Min. display flow rate * 3 Integrating flow rate Analog output Switch output Pulse output (option) * 4 Power supply Cable Set value holding function Installation attitude Installation strait piping section Protective structure Mass kg PF500D -10 PF500D -15 PF1000D -10 PF1000D -15 PF2000D -10 25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000 800 to 16000 Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc1/2 Rc1 Rc1 Rc1 1 /2 Rc2 Compressed air / N2 gas Atmospheric dew point -17 C or less (* 1) 1.5 2.25 0 to 50 C, 85%RH or less 0 to 40 ± 1.5%F.S (0.7, 20 C) ± 2.5%F.S. * 2 ± 1.5%F.S ( to 1.5, 0.7 standard) ± 2.0%F.S (0 to 40 C, while 20 C standard) Approx. 1.25 Approx. 2.5 10N /pulse PF2000D -15 5 digits LED display 10N /min 20N /min 30N /min 50N /min 100N /min 0.2Nm 3 /min Max. 9 digits However, display switched by change key Standard: DCO to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V Relay contact (1ch, a contact) AC100V ± 10%(Max. 10W) Auxiliaries (3m connector, 0.5mm 2 conductor) Semipermanent due to EEPROM Both vertical and horizontal (resin cover facing downward excluded) Not required PF4000D -15 PF4000D -25 PF8000D -25 100N /pulse Upper stream: 10D Down stream : 5D * 5 Equivalent to IP64 (sensor section only) 1.5 2.0 2.2 5.0 * 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so " sensor error " is displayed. Install a filter, refrigerating and oil mist filter before a flow sensor. * 2: Same conditions as PF8000D; 0.7, 20 C are applied. * 3: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed. * 4: Refer to descriptions of integrating pulse output on Page 1022 for details of pulse output. * 5: 1D shows pipe inner diameter, so prepare 10D= approx. 530mm and 5D= approx. 265mm long strait piping section. PF8000D -40 PF16000E -50 JIS symbol 1012

How to order PF 4000D 15 A1 A Flow rate range B Port size C Output [Example of model number] PF4000D-15-A1 Model: PF4000D A Flow rate range : 200 to 4000N /min B Port size : Rc1/2 C Output : Analog output DC4 to 20mA Symbol Descriptions A Flow rate range 500D 25 to 500N /min 1000D 50 to 1000N /min 2000D 100 to 2000N /min 4000D 200 to 4000N /min 8000D 400 to 4000N /min 16000E 800 to 16000N /min B Port size 10 15 25 40 50 C Output Blank A1 A2 A3 A6 Rc3/8 Rc1/2 Rc1 Rc1 1 /2 Rc2 Analog output DC0 to 5V (standard) Analog output DC4 to 20mA Analog output DC1 to 5V Analog output DC0 to 10V Integrating pulse output Above circled combination can be manufactured. PF500D PF1000D Model PF2000D PF Series How to order PF4000D PF8000D PF16000E Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air 1013

PF Series Internal structure and parts list PF500D to PF8000D 8 10 11 7 5 12 13 8 4 6 9 3 1 2 6 4 No. Parts name Material No. Parts name Material 1 Platinum thin film sensor 1 Ceramic / platinum 8 O ring NBR Nitrile rubber 2 Platinum thin film sensor 2 Ceramic / platinum 9 Mesh SUS304 Stainless steel 3 Body A6063 Aluminum alloy 10 Collar A6063 Aluminum alloy 4 Attachment A6063 Aluminum alloy 11 Gasket NBR Nitrile rubber 5 Sensor base PBT PBT 12 Sensor circuit board 6 O ring NBR Nitrile rubber 13 Sensor cover ABS ABS resin 7 O ring NBR Nitrile rubber PF16000E 1 6 2 4 5 6 10 7 8 5 9 4 3 No. Parts name Material No. Parts name Material 1 Separate flow sensor section Refer to the figure above. 6 Sub attachment SUS304 Stainless steel 2 Body 1 A6063 Aluminum alloy 7 O ring NBR Nitrile rubber 3 Body 2 A6063 Aluminum alloy 8 Orifice C3604 Copper alloy 4 Spacer A6063 Aluminum alloy 9 Aspirator C3604 Copper alloy 5 O ring NBR Nitrile rubber 10 O ring NBR Nitrile rubber 1014

Dimensions PF500D to PF8000D Sensor section Entrance (File name: Page 1026 or Ending 30) A 60 F 7 dia. Exit 3000 End of model no. -10-15 -25-40 PF Series Dimensions Port size Rc3/8 Rc1/2 Rc1 Rc1 1 /2 Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Bracket 6.5 K J 4.5 L B 47 Small F. Precise Electro pneumatic Model no. PF500D / 1000D / 2000D-** PF4000D-** PF8000D-** Monitor section N 24 M D E Port size A B C D E F G H I J K L M N 135 176 188 52 57 66 82 91 99 22.5 27 31 59.5 64 68 24 38 44 72 72 84 64 64 74 3 33 33 42 36 36 40 I H G 26 26 28 36 49.5 70 74 C 8 55.5 76 82 M4 thread length 4.5 M4 thread length 4.5 M5 thread length 3.6 Auxiliary Flow control valve Silencer Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. 72 Panel cut dimension Standard panel cut dimension is shown as below. (Note) Appropriate panel plate thickness is 1 to 4mm. 80 and over 80 and over 80 and over 72 76 80 and over 68 68 68 16 68 68 5 108 122 52 Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air 1015

PF Series Dimensions PF16000E Sensor section (File name: Page 1026 or Ending 30) Note 1: This product is always used with applicable monitor PFM16000E. Note 2: When installation, the flow direction must be as same as flow direction on name plate. 59.5 2-Rc2 (S) 37.5 75 128.5 300 79 99 Monitor section 72 Panel cut dimension Standard panel cut dimension is as shown below. (Note) Appropriate panel plate thickness is 1 to 4mm. 80 and over 72 76 68 16 68 68 5 108 122 52 80 and over 80 and over 80 and over 68 68 68 1016

for compressed air, tester kit PFK Series Air flow rate measuring component kit is available to measure the flow rate instantly at workshop. Flow rate range: 25 to 500, 50 to 1000, 100 to 2000, 200 to 4000, 400 to 8000N /min Specifications Descriptions PFK500D PFK1000D PFK2000D PFK4000D PFK8000D Flow rate range N /min 25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000 Port size Applicable fluid Rc1/2 Rc1/2 Rc1/2 Compressed air / N2 gas Rc1 Rc1 1 /2 Working air quality Max. working pressure Min. working pressure Withstanding pressure Ambient temperature and humidity Atmospheric dew point -17 C or less (* 1) 1.5 2.25 0 to 50 C 85%RH or less Fluid temperature C 0 to 40 Linearity ± 1.5%F.S (0.7 and 20 C) Pressure characteristics Temperature characteristics ± 1.5%F.S ( to 1.5, 0.7 standard) ± 2.0%F.S (0 to 40 C, 20 C standard) Response time sec Approx. 1.25 Analog output Switch output Power voltage Cable Standard DC0 to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V Relay contact (1ch, a contact) AC100V ± 10% (10W or less) Auxiliaries (3m connector, 0.5mm 2 conductor) * 2 Set value holding function Installation attitude Installation strait piping section Protective structure Semipermanent due to EEPROM Both vertical and horizontal (resin cover facing downward excluded) Not required Equivalent to IP64 (sensor section only) Mass kg 5.6 7.4 9.2 * 1: If foreign matter, water or oil is contained in the compressed air, detecting flow rate could be failed, so " sensor error " is displayed. Always install a filter, refrigerating and oil mist filter before a flow sensor. * 2: Extension cable (3m) can be connected. Model no. PF-FL-280775 Installation Output Accuracy Working conditions Spec. Product structure How to order PFK 4000D Case (Monitor) A Flow rate range Symbol Descriptions A Flow rate range 500D 25 to 500N /min 1000D 50 to 1000N /min 2000D 100 to 2000N /min 4000D 200 to 4000N /min 8000D 400 to 8000N /min Sensor Coupler (2 pieces) Cable (3m) Power cable (2.5m) 1018

Dimensions PFK Sensor section Case C Coupler B A Sensor for PFK500D to 2000D Sensor for PFK4000D Sensor for PFK8000D Knob PFK Series Dimensions A B C 215 251 Rc1/2 292 338 Rc1 338 390 Rc1 1 /2 Refrigerating Desiccant High polymer membrane dryer Air filter Automatic drain other F.L (Module) F.L (Separate) Small F. Precise Electro pneumatic Auxiliary 245 Flow control valve Silencer 389 220 Check valve / others Joint / tube F. generator auxiliary / pad Mechanical pressure pressure dif. pres. Seating / close contact conf. Pressure for coolant for air Total air system Water cooling refrigerator for water For compressed air 1019