Gas regulating valve EVR 116, motorized, DN 16 ISO-KF High gas throughput Very broad regulating range With integrated motor control electronics Characteristic Gasflow [mbar l/s] 1000 100 10 1 10-1 10-2 10-3 10-4 Gas Down-stream control EVR 116 control valve system M gauge IF 200 Gas IF 200 EVR 116 control valve M Up-stream control system pump gauge 10-5 10-6 0 1 2 3 4 5 6 7 8 9 10 U STG [V] pump PC PC EVR 116, Gas regulating valve IF 200, Interface for EVR 116 IF 200, Interface for EVR 116 Dimensions EVR 116, Gas regulating valve IF 200, Interface for EVR 116 Page 286 / Part 3.3
Technical data EVR 116 IF 200, Interface for EVR 116 Connection Terminals Flange (out) DN 16 ISO-KF Flange (in) DN 16 ISO-KF Control RVC 300 or IF 200 Control 60 C Bakeout temperature: actuator 80 C Bakeout temperature: housing Mounting rail Fixation 2500 hpa (abs.) Operating pressure max. 1 10-8 hpa Operating pressure min. 1 10-10 Pa m 3 /s Tightness FKM Seal Fluorplastomer Dosing sleeve 1250 hpa l/s 5 10-6 hpa l/s Stainless steel Housing/needle/filter 0.75 kg 40 g Weight 0-10 V DC Control voltage < 3 / 4 s Closing/opening time RS-232-C Interface 5-40 C Ambient temperature 0.5 A Supply 24 V DC 24 V DC Supply: Voltage 12 W Order number Gas regulating valves PF I39 931 PF I00 091 Accessories RVC-EVR, connection cable, 3 m PT 583 115-T PT 583 115-T RVC-EVR, connection cable, 5 m PT 583 116-T PT 583 116-T RVC-EVR, connection cable, 10 m PT 583 117-T PT 583 117-T RVC-EVR, connection cable, 15 m PT 583 118-T PT 583 118-T RVC-EVR, connection cable, 20 m PT 583 119-T PT 583 119-T Part 3.3 / Page 287
Gas regulating valves, solenoid actuated, RME 005 A, DN 5 Two connections required as accessories Including connector Drive: Solenoid Regulating range from 0.85 to 85 hpa l/s Normally closed (n.c.) Characteristic Gas flow [sccm] Gas flow [sccm] 6000 Control valve open 1200 Control valve open 5000 1000 4000 800 3000 600 2000 1000 Control valve closed 0 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 Current (solenoid coil) [ma] 400 200 Control valve closed 0 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 Current (solenoid coil) [ma] RME 005 A, Gas regulating valve RME 005 A, Gas regulating valve Dimensions 23.5 49 2.8 0.5 35 17 M14 1 49 6.5 8 (17) 8 33 AF 17 Page 288 / Part 3.3
Technical data Flange (in) Flange (out) Response time RME 005 A DN 5 mm M14x1 DN 5 mm M14x1 < 30 ms Control RVC 300 Bakeout temperature: actuator, powerless 80 C Operating pressure max. Operating pressure min. 2000 hpa (abs.) 1 10-8 hpa Tightness 1 10-10 Pa m 3 /s Seal FKM Mounting orientation Any, preferably perpendicular Duty cycle (ED) 100 % Housing Stainless steel Weight 96 g Control voltage 0-24 V DC Ambient temperature 5-50 C Supply: Power consumption max. 2.5 W RME 005 A 85 hpa l/s 0.85 hpa l/s Order number PF I13 931 17 hpa l/s 0.17 hpa l/s Order number PF I13 932 8.5 hpa l/s 0.085 hpa l/s Order number PF I13 933 1.7 hpa l/s 0.017 hpa l/s Order number PF I13 934 0.8 hpa l/s 0.008 hpa l/s Order number PF I13 935 0.17 hpa l/s 0.0017 hpa l/s Order number PF I13 936 Accessories Connection, for ¼" tube O.D. PT 420 913-T Connection, for 6 mm tube O.D. PT 420 914-T Connection, DN 10 ISO-KF PT 420 912-T RVC 300 - RME 005, connection cable, 3 m PT 250 003-T RVC 300 - RME 005, connection cable, 5 m PT 250 005-T RVC 300 - RME 005, connection cable, 10 m PT 250 010-T RVC 300 - RME 005, connection cable, 15 m PT 250 015-T RVC 300 - RME 005, connection cable, 20 m PT 250 020-T RVC 300 - RME 005, connection cable, 25 m PT 250 025-T Part 3.3 / Page 289
Control unit RVG 050 C for UDV 140 and UDV 146 For creating a control section in conjunction with UHV gas dosing valves UDV 140 or UDV 146 Characteristic Dimensions Page 290 / Part 3.3
Technical data RVG 050 C Output for valve heater: Voltage 20 V DC Output for valve heater: Current 0.5 A Weight 2.3 kg Actual value input: Analog voltage 10 V DC Actual value input: Impedance 100 kω Power consumption 20 VA Mains requirement: voltage (selectable) 115/230 V AC for 1 bar N 2, inlet side 1 10-9 - 100 hpa l/s Control characteristic (proportional-integral) PI Set point input: External 10 V DC Set point input: Impedance 100 kω Set point input: Internal (scale division) 0-1000 Ambient temperature 5-50 C Time constant, adjustable 2-30 s Order number Gas regulating valves PF I00 795 Accessories UDV 146, All-metal gas regulating valve, PF I52 034 DN 16 CF-F RVG-UDV, extension cable, 2 m, 200 C PT 519 953 -T RVG-UDV, connection cable, 3 m, 80 C PT 519 178 -T RVG-UDV, connection cable, 12 m, 80 C PT 519 343 -T Part 3.3 / Page 291
Control unit RVC 300 for EVR 116 and RME 005 A For creating a control section in conjunction with EVR 116 or RME 005 A regulating valves Simple operation Self-explanatory LCD display and function keys Analog/digital inputs/outputs and interfaces Settable PID regulating algorithm For system manufacturers, as a supplement to their own control unit Characteristic Up-stream control Down-stream control Gas EVR 116 control valve M system gauge system gauge pump EVR 116 control valve M RVC 300 controller RVC 300 controller acuum pump RVC 300, Control unit gas regulating valves Dimensions RVC 300, Control unit gas regulating valves C Page 292 / Part 3.3
Technical data RVC 300 Output: Analog 4 channels: Pressure sensor signal/ valve signal (0-10 V DC)/ valve position EVR 116/ + 10 V DC reference voltage (10 ma) Output: Digital 8 channels: Valve closed/ valve open/ valve in position/ valve error/ sensor error/ ready/ emission ON/ sensor status Input: Analog 2 channels: Pressure setpoint (nominal value)/ flow setpoint (nominal value) Input: Digital 8 channels: Flow decrease/ flow increase/ external CLOSE/ external OPEN/ flow mode/ pressure mode/ emission ON/ Degas ON Weight 1.65 kg Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 50 VA Mains requirement: voltage (range) 90-250 V APR 250/260: 1-1100 hpa CMR 361/371: 1-1100 hpa TPR 280/281: 5 10-4 - 1000 hpa PCR 280: 5 10-4 - 1500 hpa CMR 362/372: 0.1-110 hpa CMR 363/373: 1 10-2 - 11 hpa CMR 364/374: 1 10-3 - 1.1 hpa CMR 365/375: 1 10-4 - 0.11 hpa IKR 251/261: 2 10-9 - 1 10-2 hpa IMR 265: 2 10-6 - 1000 hpa PBR 260: 5 10-10 - 1000 hpa PKR 251/261: 5 10-9 - 1000 hpa Interface: Baud rates 9600 Bd Interface: Type RS-232, RS-485 Temperature: Operating 5 to 50 C Temperature: Storage -40 to 60 C Order number Gas regulating valves PF I00 792 Accessories RVC 300 - RME 005, connection cable, 3 m PT 250 003-T RVC 300 - RME 005, connection cable, 5 m PT 250 005-T RVC 300 - RME 005, connection cable, 10 m PT 250 010-T RVC 300 - RME 005, connection cable, 15 m PT 250 015-T RVC 300 - RME 005, connection cable, 20 m PT 250 020-T RVC-EVR, connection cable, 3 m PT 583 115-T RVC-EVR, connection cable, 5 m PT 583 116-T RVC-EVR, connection cable, 10 m PT 583 117-T RVC-EVR, connection cable, 15 m PT 583 118-T RVC-EVR, connection cable, 20 m PT 583 119-T PF I13 936 regulating range from 0.0017 to 0.17 hpa l/s PF I13 935 regulating range from 0.008 to 0.8 hpa l/s PF I13 934 regulating range from 0.017 to 1.7 hpa l/s PF I13 933 regulating range from 0.085 to 8.5 hpa l/s PF I13 932 regulating range from 0.17 to 17 hpa l/s PF I13 931 regulating range from 0.85 to 85 hpa l/s EVR 116, Gas regulating valve PF I39 931 Part 3.3 / Page 293