TE B. Points. Precision Positioning Table TE. Comparison with Precision Positioning Table TU. Major product specifications.

Similar documents
TE B. Points. Precision Positioning Table TE. Comparison with Precision Positioning Table TU. Major product specifications.

Precision Positioning Table TU

E B. TE With high-strength aluminum alloy bed

TS / CT TS / CT Ⅱ 195 Ⅱ 196

2Fully closed loop control is configure and the positioning. 4 Simple system configuration is available

1This is a positioning module developed for alignment stage by. 2 Height adjustment is not required.

TE B. Precision Positioning Table. Now available with a longer stroke! IKO THOMPSON ASIA CO., LTD. (THAILAND)

Precision Positioning Table LH

3 X-axis stroke length. 4 Y-axis stroke length

See page 3-050, "Motor Brackets," for a list of applicable motors. Elongated hole (detail)

Linear Alignment. motion. 2 Flexible combination of XY. 4 High resolution and high responsiveness. accuracy. Optical linear encoder scale head

Inner block. Grease nipple. Fig.1 Structure of LM Guide Actuator Model KR

Ball. Ball cage. Fig.1 Structure of Caged Ball LM Guide Actuator Model SKR

NEW Compact series. New KSF10 Size, Now Available Top Cover Type / Open Cover Type Lineup. For details, visit THK at Compact Series KSF

504E. LM Guide Actuator General Catalog

506E. LM Guide Actuator General Catalog

Electric Actuators. New. Motorless Type. Series LE. Your motor and driver can be used together! Manufacturers of compatible motors: 8 companies

Your motor and driver can be used together! Manufacturers of compatible motors: 8 companies. Ball screw drive. Series LEJS. Size

Caged Ball LM Guide Actuator SKR

Precision Positioning Table

Miniature Monocarrier MCM02, MCM03

Ballscrews / Linear Guideway General Catalog

Precision Positioning Table

Caged Ball LM Guide Actuator SKR

GTB Series. Table of Contents IN-GTB-#

Crossed Roller Ways. Description of each series and Table of dimensions. Anti-Creep Cage Crossed Roller Way

Тел. (495) Miniature LM Guide Actuators Featuring Caged Ball Technology

240 g. 290 g. Compact and lightweight. Electric Actuators. Series LEPY/LEPS. Miniature Rod Type/Miniature Slide Table Type

Support Units. FA Units

Miniature LM Guide Actuators Featuring Caged Ball Technology

SLIDER ELECTRIC CYLINDER - BALL SCREW DRIVE (WITHOUT MOTOR) Specification. Repeatability (mm) ±0.01. Belt lead (mm)

Electric Actuator/Slider Type Motor Parallel Type

KR15. LM Guide Miniature Actuator. KR Series Actuators with Integrated LM Guide and Ball Screw in a Compact Stainless Steel Body. CATALOG No.

Precision Modules PSK

RE-CIRCULATING BALL BEARING LINEAR GUIDES (SERIES LP)

C-Lube Linear Way MUL Linear Way U MUL LWU

240% 19% reduced. Compact Slide. MXH Series. Improved by up to. With new high rigidity linear guide. 369g. ø6, ø10, ø16, ø g.

NEW LM Actuator. US Only. Optimal for high speed and long stroke Long term maintenance-free operation is actualized Lightweight, compact structure

SRS. Caged Ball LM Guide Miniature Type Model SRS. Point of Selection. Point of Design. Options. Model No. Precautions on Use

NEW Compact series KRF. For details, visit THK at Product information is updated regularly on the THK website. CATALOG No.

C-Lube Linear Way MV

Precision Modules PSK

Guide plate. Fig. 1 Construction of Slide Pack Type FBW-RUU

12.4 Miniature Type, MSC MSD Stainless Steel Series

C-Lube Linear Way MLV MLV

Stopping Accuracy of Brushless

LM Guide Actuator KR. For details, visit THK at CATALOG No E. Product information is updated regularly on the THK website.

Characteristics of Mechatronics Series

Super Precision Positioning Table

Single Axis Actuator. 1-1 Structure and Features of TBI MOTION Actuator... E Basic Structure of TBI MOTION Actuator...E02

Linear Drive with Toothed Belt and Integrated Guide with Recirculating Ball Bearing Guide with Roller Guide Series OSP-E..BHD

SHS. Caged Ball LM Guide Global Standard Size Model SHS. Point of Selection. Point of Design. Options. Model No. Precautions on Use

Linear Drive with Toothed Belt Series OSP-E..B. Contents Description Overview Technical Data Dimensions Order Instructions 46

Precision Modules PSK. The Drive & Control Company

ACTUATORS GENERAL CATALOG

Compact Slide. Series MXH ø6, ø10, ø16, ø20

NSK Standard Ball Screws High Speed SS Series

SLIDE TABLES CONTENTS

Linear Actuator with Toothed Belt Series OSP-E..B

Linear Actuator with Ball Screw Series OSP-E..S. Contents Description Overview Technical Data Dimensions 89

MULTI SLIDERS CONTENTS

Linear Drive with Ball Screw Drive Series OSP-E..SB

NEW Press series PCT/PC. For details, visit THK at Product information is updated regularly on the THK website. CATALOG No.

Linear Actuator with Ball Screw Series OSP-E..S. Contents Description Overview Technical Data Dimensions 79

RCS Series ROBO CYLINDER

Linear Actuator with Toothed Belt and Integrated Roller Guide Series OSP-E..BHD

Unfinished Shaft Ends Precision Ball Screw

Vertical Linear Drive with Toothed Belt and Integrated Recirculating Ball Bearing Guide Series OSP-E..BV

LS Linear Heads. Standard AC Motors A-259. Standard AC Motors Introduction. Induction Motors. Reversible Motors. Brake Motors.

Environment Clean Room Specification

TM A / T

Electric Rotary Table

RE-CIRCULATING BALL BEARING LINEAR GUIDES (SERIES LM)

RE-CIRCULATING BALL BEARING LINEAR GUIDES (SERIES LL)

SRG. Caged Roller LM Guide Ultra-high Rigidity Type Model SRG. Point of Selection. Point of Design. Options. Model No. Precautions on Use

Vertical Linear Drive with Toothed Belt and Integrated Recirculating Ball Bearing Guide Series OSP-E..BV

STEPPING MOTOR SINGLE-AXIS ROBOTS

RoHS Directive-Compliant Motorized Linear Slides EZS Series for Clean Room Use. Features

Single Axis Robot KK Series

Single-axis Robot. ISB/SSPA Series. S, M sizes added to the SSPA Series

240 g. 290 g. Electric Actuators Series LEPY/LEPS. Miniature Rod Type/Miniature Slide Table Type

HPN Gearhead Series. 5 Sizes. Easy mounting to a wide variety of servomotors

CKR Compact Modules with Ball Rail Guides and Toothed Belt Drive. The Drive and Control Company

Motorless type. Belt Driven

High Power. EZA Series. High Thrust Force. Large Transportable Mass. Motorized Cylinders. Features

Product overview. 10 Bosch Rexroth Corporation Compact Modules R310A 2602 ( ) Compact Modules CKK. Compact Modules with ball screw drive (CKK)

Linear Actuator with Toothed Belt and Integrated Guide with Roller Guide with Recirculating Ball Bearing Guide. Series OSP-E..BHD

5-Phase Stepper Motor

V SWISS MADE LINEAR TECHNOLOGY

RSR. LM Guide Miniature Types Model RSR. Point of Selection. Point of Design. Options. Model No. Precautions on Use

Actuator specifications

Electric Actuator/Slider Type with auto switch mounting bracket / LEF**-*C

ROTARY MODULES. Rotary modules

NSK Linear Guides. HA Series for Machine Tools

Precision Cylinder. MTS Series. ø8, ø12, ø16, ø20, ø25, ø32, ø40 MXH MXS MXQ MXQ MXF MXW MXJ MXP MXY MTS D- -X. Series Variations MTS8

C-Lube Linear Way MUL Linear Way U

Stepper Motors ver ver.5

240 g. 290 g. Compact and lightweight. Electric Actuators. LEPY/LEPS Series. Miniature Rod Type/Miniature Slide Table Type

SSR. Caged Ball LM Guide Radial Type Model SSR. Point of Selection. Point of Design. Options. Model No. Precautions on Use

Electric Rotary Table

Transcription:

TEB 4

Precision Positioning Table TE TE B Ball screw inear Points Table specification is selectable according to your use 1 Slide table ight weight, low profile and compact positioning table using high-strength aluminum alloy for its main components with a slide table assembled inside a U-shaped bed. The mass of the entire table is reduced to about 40% of TU series. ow cross sectional height (mm for, mm for, and 4mm for ). Moreover, the structure of various sensors directly installable on sensor mounting groove of the bed contributes to the miniaturization. Ball screw There are two types in the shape of slide table: standard and with flange. The number of slide tables, motor folding back specification, ball screw lead, with or without a dust protection cover, installation of various sensors can be selected, you can select an optimal product for the specifications of your machine and device. Excellent cost performance The excellent cost performance is realized by reducing the number of parts, and optimizing the part shapes. Comparison with Precision Positioning Table TU Sectional height TU TU TU Sensor mounting groove Bed inear Way Mass End bracket Major product specifications and size ccuracy Stroke length mm Overall length mm Mass kg Mass / mm kg 1 0.5 0.4 TU 1. 0.0 9 1.0 0.7 TU 9. 1. 00 5.7 0.71 TU 49.9.19 Driving method Precision ball screw Positioning repeatability ±0.00 0.00 inear motion rolling guide inear Way ball type Positioning accuracy 0.05 0.05 Built-in lubrication part ubrication part "C-ube" is built-in ost motion Material of table and bed High-strength aluminum alloy Parallelism in table motion Sensor Select by identification number Parallelism in table motion B 0.00 0.01 ttitude accuracy Straightness Backlash 0.005 Ⅱ 5 Variation Shape Bed width mm Standard S With flange F 1N=0.kgf=0.4lbs. 1mm=0.097inch Ⅱ ight weight, low profile and highprecision positioning table

Identification Number Example of an Identification Number 1 1 4 5 7 9 1 Page -7 Size Page -7 Shape of slide table Page -7 4 Bed length Page -7 5 Designation of motor attachment Page -7 Ball screw lead Page - 7 Number of slide tables Page - specification Page - 9 Sensor specification Page - 1 TEB: Precision Positioning Table TE Size Size indicates bed width. Select a size from the list of Table 1. Shape of slide table S: Standard table F: Flange type standard table 4 Bed length Select a bed length from the list of Table 1. Table 1 Sizes and bed lengths and size Bed width Bed length 1, 00,, 00 1, 00, 00, 400, 0, 0 40, 440, 540, 40, 740, 40, 940 Remark: For stroke length, please see the dimension tables shown in pages of 19 or later. 5 Designation of motor attachment TE B F 00 / T001 S C Identification Number and Specification T000 : Motor inline specification Without motor attachment T001 to T0 : Motor inline specification With motor attachment R000 : Motor folding back specification Without motor attachment R001 to R00 : Motor folding back specification With motor attachment To specify the motor attachment, select it from the list of Table.1 and Table.. Please specify motor folding back specification and motor attachment applicable to motor for use. If motor inline specification with motor attachment is specified, the main body is shipped with a coupling indicated in the Table mounted. However, the final position adjustment should be made by customer since it is only temporarily fixed. For a product without motor attachment (T000), no coupling is attached. If motor folding back specification with motor attachment is specified, "housing applicable to the specified motor, pulley (on motor side and ball screw side), cover, motor bracket, belt and bolts necessary for assembly" are supplied. Motor mounting bolts should be prepared by customer. Identification Number and Specification Table.1 pplication of motor attachment (motor inline specification) Motor to be used Flange Motor attachment Rated output size Type Manufacturer Series W mm SGMJV-5 T001 T00 SGMV-5 T001 T00 YSKW 40 SGMJV-01 T00 EECTRIC - SGMV-01 T00 CORPORTION SGMJV-0 T00 00 SGMV-0 T00 HF-MP05, HG-MR05 T001 T00 HF-KP05, HG-KR05 T001 T00 Mitsubishi 40 HF-MP1, HG-MR1 T00 Electric J, J4 HF-KP1, HG-KR1 T00 C servo Corporation HF-MP, HG-MR T00 motor 00 HF-KP, HG-KR T00 MSMD5 T004 T005 MSME5 T004 T005 Panasonic MSMD01 T005 MINS 5 Corporation MSME01 T005 MSMD0 T00 00 MSME0 T00 Hitachi Industrial DM-R5 T001 T00 40 Equipment D DM-01 T00 Systems Co., td DM-0 00 T00 R4 4 T007 step R T00 R9 T00 Stepper motor ORIENT MOTOR Co., td. RK CRK Note 1 pplicable to the outer diameter of motor output shaft. Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. RK54CRK54 4 T009 RK5CRK5 1 T0 T0 Table. pplication of NEM motor attachment (motor inline specification) Motor to be used Motor attachment Flange Rated size Type Manufacturer Series output inch W TY-1 type 41 40 T001 T00 TY- type 40 T001 T00 TYmetric TY- type 140 40 T001 T00 TY-0 type T00 TY-0 type 440 T00 TY-N type 4 TE904- TE17 1 C servo motor Servo or Stepper llen-bradley TY-N type 140 4 TE904- TE17 1 TYNEM TY-0N type 5.4 TE9017- TE15 1 TY-0N type 440 5.4 TE9017- TE15 1 TY-N type 90 TE905- TE14 1 TY-540N type TE905- TE14 1 NEM17C TE904- TE1 1 NEMD TE9017- TE9017- TE09 TE09 1 1 TE9017- TE097 1 NEM4D TE905- TE095 1 Note 1 The TE part numbers are the part number of motor attachment component sold separately. In the TE part number, please choose motor attachment code T000. No Coupling is included. It is required to consider customers operation patterns for these motor attachment. Please confirm the length and the diameter of the motor shaft etc., and check the usability of the motor attachment with your motor beforehand. It is required to change the delivered coupling to XGS-0C-1 which is for the 1mm motor shaft by customer. Remark: For detailed motor specifications, please see respective motor manufacturers catalog. 7 1N=0.kgf=0.4lbs. 1mm=0.097inch

Identification Number and Specification Table. pplication of motor attachment (motor folding back specification) Motor to be used Flange Motor attachment Rated output size Type Manufacturer Series W mm SGMJV-5 R001 R00 SGMV-5 R001 R00 YSKW 40 SGMJV-01 R00 EECTRIC - SGMV-01 R00 CORPORTION SGMJV-0 R00 00 SGMV-0 R00 HF-MP05, HG-MR05 R001 R00 HF-KP05, HG-KR05 R001 R00 Mitsubishi 40 HF-MP1, HG-MR1 R00 Electric J, J4 HF-KP1, HG-KR1 R00 C servo Corporation HF-MP, HG-MR R00 motor 00 HF-KP, HG-KR R00 MSMD5 R004 R005 MSME5 R004 R005 Panasonic MSMD01 R005 MINS 5 Corporation MSME01 R005 MSMD0 R00 00 MSME0 R00 Hitachi Industrial DM-R5 R001 R00 40 Equipment D DM-01 R00 Systems Co., td DM-0 00 R00 ORIENT step R4 4 R007 Stepper MOTOR RK motor RK54CRK54 4 R00 Co., td. CRK Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. 7 9 Ball screw lead Number of slide table specification Specification of sensor 4: 4mm (applied to ) 5: 5mm (applied to ) : mm (applied to ) : mm (applied to and ) 0: 0mm (applied to ) S: One unit C: Two units 0: Without cover C: With bridge cover (applied to TEBF) 0: Without sensor : Two units of sensor mounted (limit) : Three units of sensor mounted (limit, pre-origin) 4: Four units of sensor mounted (limit, pre-origin, origin) 5: Two sensors attached (limit) : Three sensors attached (limit, pre-origin) 7: Four sensors attached (limit, pre-origin and origin sensors) If sensor mounting (symbol,, or 4) is specified, the sensor is mounted into the mounting groove on the side of bed, and two detecting plates are attached onto the slide table. If sensor attachment (symbol 5,, or 7) is specified, specified number of sensors are attached including mounting screws for sensors, nuts, two detecting plates, and mounting screws for the detecting plates. Table Coupling models (motor inline specification) Motor attachment Coupling models Manufacturer Coupling inertia J C -5 kgm T001 XGS-19C- 5 Nabeya Bi-tech Kaisha 0.0 T00 XGS-19C- 5 Nabeya Bi-tech Kaisha 0.0 T00 XGS-0C- 14 Nabeya Bi-tech Kaisha 0.55 T004 XGS-19C- 5 Nabeya Bi-tech Kaisha 0.0 T005 XGS-19C- 5 Nabeya Bi-tech Kaisha 0.0 T00 XGS-0C- Nabeya Bi-tech Kaisha 0.55 T007 XGS-19C- 5 Nabeya Bi-tech Kaisha 0.0 T00 XGS-0C- Nabeya Bi-tech Kaisha 0.55 T009 XGS-19C- 5 5 Nabeya Bi-tech Kaisha 0.0 T0 XGS-19C- 5 Nabeya Bi-tech Kaisha 0.0 T0 XGS-0C- Nabeya Bi-tech Kaisha 0.55 TE904-TE17 XGS-19C- 5.5 Nabeya Bi-tech Kaisha 0.0 TE9017-TE15 XGS-0C- 1.7 Nabeya Bi-tech Kaisha 0.55 TE905-TE14 XGS-4C- 15.75 Nabeya Bi-tech Kaisha 1.0 Remark: For detailed coupling specification, please see the manufacturer's catalog. 9 1N=0.kgf=0.4lbs. 1mm=0.097inch

Specifications Table 4 ccuracy and size Bed length Positioning repeatability Positioning accuracy 1 Parallelism in table motion B Backlash 1 1 00 0.00 0.05 0.00 00 0.040 0.00 0.005 1 0.05 00 0.00 00 0.00 0.040 0.005 400 0.00 0.045 0 0.0 0 0.0 40 0.040 0.00 440 0.045 0.0 540 0.00 0.0 40 0.005 0.00 0.01 740 0.055 40 0.014 0.05 940 0.01 Note 1 This does not apply to table of motor folding back specification. Remark: The values in are reference values provided that the timing belt tension is properly adjusted in motor folding back specification table. Table 7 Maximum carrying mass and size Ball screw lead Maximum carrying mass kg mm Horizontal Vertical 4 1 1 7 5 17 1 17 1 0 9 Remark: The value is for one flange type standard table. Table oad rating of linear motion rolling guide and size Basic dynamic load rating C N Basic static load rating C 0 N Static moment rating 1 Nm T 0 T X T Y 490 1 0 4 99.5 99.5 1 400 17 54 70 151 795 151 795 00 5 900 1 1 0 47 400 47 400 Note 1 In directions indicated in the following figures, the value in ( ) is for two slide tables in close contact. T 0 T X T Y Table 5 Maximum speed Motor type C servomotor Stepper motor and size Bed length mm 4mm 5mm Maximum speed mm/s mm mm 0mm 400 00 0 or less 0 1 000 0 7 540 or less 90 1 40 0 1 740 590 1 170 40 440 0 940 40 90 40 1 00 940 or less 00 0 Remark: To measure the practical maximum speed, it is required to consider operation patterns based on the motor to be used and load conditions. Table llowable moment llowable moment Nm and size T 0 T X T Y 9. 1.7 49.0 Remark: The value is for one slide table. Table 9.1 Specifications of ball screw 1 and size mm 4 Shaft dia. mm Basic dynamic load rating C N Basic static load rating C 0 N 90 575 1 4 155 5 70 4 4 1 70 745 0 40 1 0 00 90 Table 9. Specifications of ball screw and size Bed length Shaft dia. Overall length 1 19.5 00 4.5 9.5 00 4.5 1 194 00 44 00 44 400 444 0 544 0 44 40 95 440 495 540 595 40 1 95 740 795 40 95 940 995 1N=0.kgf=0.4lbs. 1mm=0.097inch 1

Specifications Motor Folding Back Specification Table Moment of inertia of sectional area of bed e Y-axis X-axis Motor folding back specification is available for Precision Positioning Table TE, space can be saved by folding back the motor and reducing the overall length of the table. For dimensions of motor folding back specification, please refer to respective dimension table. For motor folding back specification, assembly should be made by customer since "housing applicable to the specified motor, pulley (on motor side and ball screw side), cover, motor bracket, belt and bolts necessary for assembly" are supplied. However, motor mounting bolts should be prepared by customer. The motor attachment can be attached in 4 directions as indicated in the following figure. There is difference in dimension between where the motor attachment or the motor is lower than the bottom of the bed depending on the motor folding back direction. Do the design ensuring that the peripheral components do not interfere and that enough allowance is provided according to the approximate values in the dimension table shown in Page 5 to 0. and size Moment of inertia of sectional area mm 4 I X I Y Center of gravity e mm 1. 4 1. 5.4 4.7 4. 5..0 5 1. 1.0 Motor folding back upward Motor folding back to left Table Table inertia and starting torque and size Bed length mm Standard table Table inertia J T -5 kgm Flange type standard table 4mm 5mm mm mm 0mm 4mm 5mm mm mm 0mm 1 0.057 0.071 0.0 0.04 00 0.09 0.0 0.07 0.09 0.05 0.099 0.0 0. 00 0.097 0.1 0. 0.14 1 0.1 0.17 0.14 0.0 00 0.19 0. 0.0 0. 00 0. 0.0 0.7 0. 400 0. 0. 0.4 0.40 0 0.40 0.44 0.41 0.47 0 0.47 0.51 0.4 0.54 40 0.7 1.19 0.1 1. 440 0. 1.5 0.95 1.4 540 1.0 1. 1. 1.0 40 1.1 1.4 1.5 1.95 740 1. 1.79 1.41. 40 1.4 1.94 1.5.5 940 1.. 1.71.40 Notes 1 When two units of slide table are used, it is about 1.5 times as long as that of one unit, and when table of motor folding back specification is used, it is about twice. For motor folding back specification, please add the following value to the value in the table. : 0.17-5 kgm, : 0.9-5 kgm, : 0. -5 kgm Starting torque T S 1 Nm 0.0 0.0 0.05 Motor folding back downward Two Slide Table Specification Motor folding back to right Two slide table specification is available for Precision Positioning Table TE. Ball screw nuts are mounted on slide table at the motor side, and it can be driven by the motor (driving table). Ball screw nuts are not mounted on slide table at the opposite motor side, and it is free condition (driven table). It is possible to make the structure resistant to moment load by using two slide tables in combination (Table ). When combining slide tables, allow more clearance than "Minimum center distance between two slide tables in close contact" described in the dimension table shown in pages 19 to 0. (Enlarging the span will shorten the stroke.) Minimum center distance between two slide tables in close contact Mounting For the processing accuracy of the Precision Positioning Table mounting surface and the tightening torque of the fixing screws, see page -9. Driven table Driving table 1 1N=0.kgf=0.4lbs. 1mm=0.097inch 14

Sensor Specification Dimensions of Motor ttachment Table 1 Sensor timing chart Motor inline specification Motor inline specification CW CCW ON Origin Remark: Motor attachment for NEM, please see the pages -1 or later. T000 (without attachment) φ5 9 +0.0 φ 4-.4 Through 15.5 1.5 0 17 1 40 0 4-M Depth 4-.4 Through.5 Counterbore depth.5 TE904-TE1 TE904-TE9 TE9017-TE09 φ +0.0 4 4 1 17 1 47.15 0 4-M Through 15.5 1.5 4-.4 Drilling.5 Counter bore depth 4 (Machining from opposite side) 14 B T001 φ +0.0 φ0 OFF Pre-origin PCD4, Evenly distributed at 90 φ 0 φ.15 +0.0 OFF (D) Stroke length C (E) OFF CCW limit CW limit Mechanical stopper T004 9 φ φ0 +0.0 40 0 4-.4 Through.5 Counterbore depth.5 TE904-TE17 9 φ 4 17 15.5 1.5 4-.4 Drilling.5 Counter bore depth.5 4-4.5 Drilling 7.5 Counterbore Depth 5 (Opposite Side) PCD4., Evenly distributed at 90 Motor folding back specification 4-M Through PCD45, Evenly distributed at 90 4 1 17 4-M Through 1 4-M Through T007 T009 φ +0.0 15.5 1.5 CCW CW 1 4-.4 Through.5 Counterbore depth 4 ON Origin T000 (without attachment) 0 4-M Through TE9017-TE09 4 47.15 0 14 B φ5 φ +0.0 OFF Pre-origin 9 40 φ φ.15 +0.01 C OFF CW limit 0 4-.4 Through.5 Counterbore depth.5 4-.4 Drilling.5 Counter bore depth.5 OFF Stroke length CCW limit T00 φ φ0 +0.0 TE9017-TE097 47.15 (D) (E) Mechanical stopper 4 0 4-M5 Through PCD4, Evenly distributed at 90 and size Ball screw lead B C D 1 E 4 5 44 7 7 0 1 9 5 0 9.5.5 9 0 Note 1 The value in ( ) represents dimensions for two slide tables. Remarks 1. Mounting a sensor is specified using the corresponding identification number.. For the specifications of respective sensors, please see the section of sensor specification in General Explanation.. For the motor folding back specification, CW and CCW will invert. T005 T0 9 φ φ φ0 +0.0 +0.05 φ +0.05 40 0 4-.4 Through.5 Counterbore depth.5 4-M Through PCD45, Evenly distributed at 90 0 4-.4 Through.5 Counterbore depth 5.5 φ φ.15 +0.01 4-.4 Drilling.5 Counter bore depth.5 15 1N=0.kgf=0.4lbs. 1mm=0.097inch 1

0 0 Dimensions of Motor ttachment T000 (without attachment) 15 5 φ φ7 +0.0 4-M4 Depth 0 TE905-TE095 1 4 5 9. 4-M5 Through R000 (without attachment) 1.5 0.00 φ5 5 4 4-M4 Depth 0 R000 (without attachment).5 15 0-0.009 55 77 4 0 4-M4 Depth 1 1 0.5 1 T00.5 φ +0.05 φ +0.01 4-4.5 Through Counterbore depth 0 φ φ7.0 +0.01 0 0 PCD4, Evenly distributed at 90 +0.01 -φ5 0 Depth.5.. 4-M5 Through PCD70, Evenly distributed at 90 +0.01 -φ5 0 Depth 4 1. 7.5. 4-M5 Through PCD70, Evenly distributed at 90 TE905-TE14 5 4-4.5 Drilling Counter bore depth 4.5 R00 R00.5 4-4.5 Through Counterbore depth 4-M5 Depth PCD9.4, Evenly distributed at 90 4-φ4.5 Through hole dia. φ hole dia. φ14 T00 T00 T0 φ +0.05 φ +0.01 φ +0.05 φ +0.05 0 PCD70, Evenly distributed at 90 4-4.5 Through Counterbore depth 7 0 TE9017-TE15 1 φ5 φ7.0 4-4.5 Drilling Counterbore Depth 7.5 0 R005 4-M Through PCD45, Evenly distributed at 90..5. hole dia. φ R00 PCD70, Evenly distributed at 90 4 1. 7.5. hole dia. φ Motor folding back specification φ φ.1 0 4-M5 Depth PCD.7, Evenly distributed at 90 1.5 9 7 R000 (without attachment) -0.00 φ5 4 4-M4 Depth 4-.4 Through 1..5 1.5 4 R007 0.5 4 +0.01 -φ5 0 Depth hole dia. φ 7 7 PCD4, Evenly distributed at 90..5 4-.4 Through 1..5 R001 R00 hole dia. φ hole dia. φ5 4-M Through PCD45, Evenly distributed at 90 7..5 R004 hole dia. φ 17 1N=0.kgf=0.4lbs. 1mm=0.097inch 1

Precision Positioning Table TE S (Motor inline specification) F (Motor inline specification) 7(minimum center distance between 4-M Depth 5( 1 ) 0 4-M4 Depth ( 1 ) 7(minimum center distance between 0 4-M4 Depth n-4.5 Through Counterbore depth 4 (5) S/ S/ () (C) (n 1) 0 C 1 5.9 5 1 4..5 5.5. n-4.5 Through Counterbore depth 4 4-M Depth (both ends) S/ S/ () (.) 5.5 5.5 1.5 (C) (n 1) 0 C 1.5 1 5 55 47 7. 1 40. 1.5 5 1.5 5 - Sectional dimension - Sectional dimension Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S C n kg 1 1 5 0.5 00 1 40 0 0. 1 1 90 45 0.7 00 140 0 4 0. Notes 1 Too deep insertion depth of the mounting bolt may affect the running performance of the slide table, so never insert a bolt longer than the depth of the through hole. The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.07kg heavier with two slide tables. Remarks 1. Motor attachment for C servomotor is.5mm lower than the bottom of the bed.. Motor attachment for stepper motor is 4.5mm lower than the bottom of the bed. 19 Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S 1 C n kg 1 1 5 0.5 00 1 40 0 0.75 1 1 90 45 0.5 00 140 0 4 0.94 Notes 1 The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.1kg heavier with two slide tables. Remarks 1. Motor attachment for C servomotor is.5mm lower than the bottom of the bed.. Motor attachment for stepper motor is 4.5mm lower than the bottom of the bed. 1N=0.kgf=0.4lbs. 1mm=0.097inch 0

Precision Positioning Table TE S (Motor inline specification) F (Motor inline specification) 7(minimum center distance between 4-M Depth ( 1 ) 0 4-M5 Depth 7.5( 1 ) 7(minimum center distance between 4-M Depth (From back side) 0 4-M5 Depth (7) n-5.5 Through 9.5 Counterbore depth 5.4 S/ 54 S/ (4) 1 4.5 C (n 1) (C) 1 5 40. 0.1 0 1. 0 n-5.5 Through 9.5 Counterbore depth 5.4 S/ 54 S/ (4) 4.5 1 4.5 C (n 1) (C) 1 5 74 4.1 0 4 4 15 0 7 - Sectional dimension 15 0 7 - Sectional dimension Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S C n kg 1 19 5 0.9 00 9 1.0 00 9 0015 1. 400 49 005 4 1. 0 59 4005 5 1.9 0 9 045. Notes 1 Too deep a fixing thread depth of the mounting bolt may affect the running performance of the slide table, so never insert a bolt longer than the depth of the tapped hole. The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.1kg heavier with two slide tables. Remark: Motor attachment for stepper motor is 9mm lower than the bottom of the bed. 1 Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S 1 C n kg 1 19 5 1.1 00 9 1. 00 9 0015 1.5 400 49 005 4 1.9 0 59 4005 5. 0 9 045.5 Notes 1 The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.kg heavier with two slide tables. Remark: Motor attachment for stepper motor is 9mm lower than the bottom of the bed. 1N=0.kgf=0.4lbs. 1mm=0.097inch

Precision Positioning Table TE S (Motor inline specification) 1(minimum center distance between 4-M Depth ( 1 ) 4 4-M Depth 9( 1 ) F (Motor inline specification) 1(minimum center distance between 4-M5 Depth 4 0 4-M Depth 1 S/ 1 S/ 45 1 1 70 (n 1) (70) 1 70 1. 4 4.5 4.5 4 44. 4 9. (9) n-. Through Counterbore depth.5 4-M Depth (from back side) n-. Through Counterbore depth.5 S/ 1 S/ (0) (0) 1 1 1 70 (n 1) (70) 1 1 1 70 0 4 - Sectional dimension Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S n kg 40 4 00 90.1 440 5 00190 4.7 540 40090 5 4. 40 7 090 4.7 740 0490 7 5. 40 9 700590 5.7 940 1 0 0090 9. Notes 1 Too deep a fixing thread depth of the mounting bolt may affect the running performance of the slide table, so never insert a bolt longer than the depth of the tapped hole. The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.kg heavier with two slide tables.. 4.5 0 4 4.5 - Sectional dimension Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S 1 n kg 40 4 00 90.7 440 5 00190 4 4. 540 40090 5 4.9 40 7 090 5.5 740 0490 7.1 40 9 700590.7 940 1 0 0090 9 7. Notes 1 The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.kg heavier with two slide tables.. 4 1N=0.kgf=0.4lbs. 1mm=0.097inch 4

Precision Positioning Table TE S (Motor folding back specification) F (Motor folding back specification) 7(minimum center distance between 7(minimum center distance between 0 0 4-M4 Depth 17.5 4-M Depth 5( 1 ) 4-M4 Depth ( 1 ) 17.5 4.7 0 S/ S/ () (C) (n 1) 0 C 1.9 5 1 4.. 0 (5) 1 n-4.5 Through Counterbore depth 4 1 1 n-4.5 Through Counterbore depth 4 1 4-M Depth (both ends) S/ S/ () 5 5.5 1.5 (5) (.) 5.5 (C) (n 1) 0 C 1.5 (9.5) (5) (9.5) 1 55 47 7. 1 40. 1.5 5 1.5 5 - Sectional dimension - Sectional dimension Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S C n kg 1 177.5 5 0.7 00 7.5 1 40 0 0. 77.5 1 90 45 0.9 00 7.5 140 0 4 1.0 Notes 1 Too deep insertion depth of the mounting bolt may affect the running performance of the slide table, so never insert a bolt longer than the depth of the through hole. The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.07kg heavier with two slide tables. Remarks 1. Parts for motor attachment are appended, and this figure indicates a finished state after assembled by the customer.. If folded back to right and left, motor attachment is about 9.5mm lower than the bottom of the bed. In addition, it is about.5 to.5mm lower than the bottom of the bed if C servomotor is mounted by customers, and about 4.5mm lower if stepper motor is mounted.. If folded back upward, motor attachment is about.5mm lower than the bottom of the bed. 5 Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S 1 C n kg 1 177.5 5 0.5 00 7.5 1 40 0 0.95 77.5 1 90 45 1.05 00 7.5 140 0 4 1.15 Notes 1 The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.1kg heavier with two slide tables. Remarks 1. Parts for motor attachment are appended, and this figure indicates a finished state after assembled by the customer.. If folded back to right and left, motor attachment is about 9.5mm lower than the bottom of the bed. In addition, it is about.5 to.5mm lower than the bottom of the bed if C servomotor is mounted by customers, and about 4.5mm lower if stepper motor is mounted.. If folded back upward, motor attachment is about.5mm lower than the bottom of the bed. 1N=0.kgf=0.4lbs. 1mm=0.097inch

Precision Positioning Table TE S (Motor folding back specification) 7(minimum center distance between F (Motor folding back specification) 7(minimum center distance between 4-M Depth ( 1 ) 0 4-M5 Depth 7.5( 1 ) 17.5 9 4-M Depth (from back side) 0 4-M5 Depth 17.5 9 0 (7) n-5.5 Through 9.5 Counterbore depth 5.4 4 0 17 n-5.5 Through 9.5 Counterbore depth 5.4 0 4 17 S/ 54 S/ (4) S/ 54 S/ (4) C (n 1) (C) 1 (.5) (5) (4.4) 4.5 C (n 1) (C) 1 1 (.5) (5) 1 40. 0 74 4.1 0 1. 4.1 0 4 15 0 - Sectional dimension Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S C n kg 1 17.5 5 1. 00.5 1. 00.5 0015 1. 400 4.5 005 4 1.9 0 5.5 4005 5. 0.5 045.5 Notes 1 Too deep a fixing thread depth of the mounting bolt may affect the running performance of the slide table, so never insert a bolt longer than the depth of the tapped hole. The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.1kg heavier with two slide tables. Remarks 1. Parts for motor attachment are appended, and this figure indicates a finished state after assembled by the customer.. If folded back to right and left, motor attachment is about.5mm lower than the bottom of the bed.. If folded back upward, motor attachment is about 9mm lower than the bottom of the bed. 7 7 15 0 - Sectional dimension 7 Bed length Overall length Stroke length Mounting holes of bed MassRef. 1 S 1 C n kg 1 17.5 5 1.4 00.5 1.5 00.5 0015 1. 400 4.5 005 4. 0 5.5 4005 5.5 0.5 045. Notes 1 The value indicates the allowable stroke when limit sensors are mounted. The value in represents dimension for two slide tables in close contact. The value shows the mass of the entire table with one slide table, and it is 0.kg heavier with two slide tables. Remarks 1. Parts for motor attachment are appended, and this figure indicates a finished state after assembled by the customer.. If folded back to right and left, motor attachment is about.5mm lower than the bottom of the bed.. If folded back upward, motor attachment is about 9mm lower than the bottom of the bed. 1N=0.kgf=0.4lbs. 1mm=0.097inch