CTLH32M Precision Positioning Table LH TSLH12M/J Table with bellows 12 -M Depth 1( 1 ) 1( 1 ) 32 29 29 18 19 -M8 Depth 16 13 (3.7) (7.3) L 1( 2 ) (2.3) E S/2 13 S/2 E (2.3) 1 1 12 TSLH M CTLH M 28 7 Hole for 8-M1 unit: -M1 Depth 2 S Overall length L E MassRef. TSLH12M-1/J 8 27 27. 13 32 TSLH12M-1/J 12 32 32. 1 TSLH12M-2/J 16 37 37. 1 TSLH12M-2/J 2 2 2. 16 TSLH12M-3/J 2 7. 17 Notes 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer than the depth of the through hole. 2 When selecting AT32 or AT38, 21 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For bed mounting dimensions, see the dimension table for TSLH12M. 12 2 1.2 2 (2) A 28 A 2 L X 1( 1 ) S Overall length Mounting holes of bed X-axis Y-axis L X A unit: MassRef. CTLH32M-33 3 3 6 6 16 199 CTLH32M-3 3 7 6 21 29 CTLH32M- 7 7 21 218 CTLH32M- 8 7 26 227 CTLH32M- 8 8 26 236 Note 1 When selecting AT3, 26 is applied. When selecting AT313, 2 is applied. Remark: As a combination of stroke length other than listed above and a table of different size is possible, please consult. 13 1N=.12f=.228lbs. 1=.3937inch 1
Precision Positioning Table LH TSLH22M/J, TSLH32M/J, TSLH2M/J Table with bellows CTLH12M/J Table with bellows W (t) L 1( 1 ) (3.2) E S/2 W S/2 E (3.2) S Overall length L TSLH22M- 1/J 11 W H E t unit: MassRef. TSLH22M- 2/J 1 36 TSLH22M- 2/J 18 38 TSLH22M- 3/J 22 22 9 8.2 TSLH22M- /J 3 6 6 TSLH22M- /J 37 7 8 9 TSLH22M- 6/J 8 9 3 TSLH32M- 3/J 23 6 TSLH32M- /J 31 7 6 113 TSLH32M- /J 8 6 129 32 12 9.2 TSLH32M- 6/J 8 9 7 131 TSLH32M- 8/J 6 1 1 9 11 TSLH32M-1/J 8 1 3 11 169 TSLH2M- /J 1 9 TSLH2M- 6/J 1 6 19 2 1 1. TSLH2M- 8/J 66 1 2 8 219 TSLH2M-1/J 83 1 1 2 Note 1 When selecting AT3, 26 is applied. When selecting AT36, 27 is applied. When selecting AT313, 2 is applied. When selecting AT31, 23 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. If you are interested in a product of identification number shown in, please contact. 3. For mounting dimensions, see the dimension tables for TSLH22M, TSLH32M, and TSLH2M. 3 6 W 33 1 183 H (7.3) 1( 1 ) 1 (7.3) L X 1( 1 ) 7 S Overall length of bed MassRef. X-axis Y-axis L X CTLH12M-11/J 8 8 27 27 2 CTLH12M-21/J 16 8 37 27 27 CTLH12M-22/J 16 16 37 37 29 CTLH12M-32/J 2 16 7 37 31 CTLH12M-33/J 2 2 7 7 33 Note 1 When selecting AT32 or AT38, 21 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For mounting dimensions, see the dimension table for TSLH12M. 1 12 13 12 -M Depth 1 unit: TSLH M CTLH M 1 1N=.12f=.228lbs. 1=.3937inch 16
Precision Positioning Table LH CTLH22M/J Table with bellows CTLH32M/J Table with bellows (8.2) 1 L X (8.2) 1 (9.2) 1( 1 ) (9.2) L X 1( 1 ) TSLH M CTLH M 9 18 12 2 unit: S Overall length of bed MassRef. X-axis Y-axis L X CTLH22M-22/J 1 1 71 CTLH22M-32/J 22 1 7 CTLH22M-33/J 22 22 8 CTLH22M-3/J 3 22 6 8 CTLH22M-/J 3 3 6 6 88 Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For mounting dimensions, see the dimension table for TSLH22M. unit: S Overall length of bed MassRef. X-axis Y-axis L X CTLH32M-33/J 23 23 6 6 27 CTLH32M-3/J 31 23 7 6 216 CTLH32M-/J 31 31 7 7 226 CTLH32M-/J 31 8 7 23 CTLH32M-/J 8 8 2 Note 1 When selecting AT3, 26 is applied. When selecting AT313, 2 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For mounting dimensions, see the dimension table for TSLH32M. 17 1N=.12f=.228lbs. 1=.3937inch 18
TXM CTXM 19 1
Super Precision Positioning Table TX TX M Ball screw Linear Slide table Points Ultimate high accuracy table of rolling guide type 1 Ball screw Linear Roller Way High precision, high rigidity Precision Positioning Table LH based positioning table with positioning accuracy almost the same as Air Stage with ultimate rolling guide C-Lube Linear Roller Way Super MX incorporated and by a thorough investigation of the accuracy of each part. Head 2 Positioning accuracy μm Scale Y-table Bed CTX M 3 Fully closed loop control is configure and the positioning accuracy of the entire stroke is guaranteed with a direct feed back of positional information from a super high accuracy linear encoder with resolution of.16μm. Test portion: CTX22M-3 X-axis Y-axis Ultimate running accuracy is achieved since components processed and assembled with high accuracy are combined with C-Lube Linear Roller Way Super MX that exhibits the highest level of running performance with a rolling guide. Test portion: CTX22M-3 X-axis pitching X-axis yawing Y-axis pitching Y-axis yawing Attitude accuracy sec Ultimate high running performance produced by adopting roller type linear motion rolling guide Stroke Stroke Simple system configuration is available System configuration is made simple, and space saving and cost reduction of the device can be realized since air supply device for driving is not required like Air Stage. Variation X-table Shape Major product specifications Accuracy Table width TX12M 12 TX22M 6 8 22 TX32M 32 TX2M 2 12 1 1 2 2 3 unit: Driving method Precision ball screw Positioning repeatability ±..1 Linear motion rolling guide Linear Roller Way roller type Positioning accuracy.3.2 Built-in lubrication part Lubrication part "C-Lube" is built-in Lost motion.1 Material of table and bed Cast iron Parallelism in table motion A..11 Sensor Provided as standard Parallelism in table motion B Attitude accuracy 11sec Straightness.3.8 Backlash Ⅱ 11 22 32 2 1N=.12f=.228lbs. 1=.3937inch Ⅱ 12 TX M CTX M High positioning accuracy and resolution performance realized with an onboard super high accuracy linear encoder Limit sensor
Identification Number Example of an Identification Number (Single-axis specification) 1 2 1 3 6 TX 22 M - 1 / AT2 1 Identification Number Example of an Identification Number (Two-axis specification) 1 2 1 3 6 7 8 CTX 12 M - 3 2 / AT1 C 1 Page -1 1 Page -13 2 Size Page -1 2 3 6 Size Designation of motor attachment Ball screw lead Designation of linear encoder Page -13 Page -13 Page -13 Page -13 Page -13 Identification Number and Specification 1 2 3 6 Size Designation of motor attachment Ball screw lead Designation of linear encoder TXM: Super Precision Positioning Table TX (single-axis specification) Size indicates table width. Select a size from the list of Table 1. Select a stroke length from the list of Table 1. As for a motor attachment, select it from the list of Table 3. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. A coupling shown in Table is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. : Lead 1: Lead 1 No symbol : Without linear encoder : Resolution.16 to.m (For AC servomotor manufactured by YASKAWA ELECTRIC CORPORATION) 1 : Resolution.1 to.2m (AC servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) 2 : Resolution.1 to.m (AC servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) When specifying the attachment for a stepper motor, set "No symbol". For details on the resolution, please see the section of maximum speed. For linear encoder specification, please see Table 1. 3 6 7 8 X-axis stroke length Y-axis stroke length Designation of motor attachment Ball screw lead Designation of combination direction Designation of linear encoder Page -1 Page -1 Page -1 Page -1 Page -1 Page -1 Identification Number and Specification 1 2 3 6 7 8 Size X-axis stroke length Y-axis stroke length Designation of motor attachment Ball screw lead Designation of combination direction Designation of linear encoder CTXM: Super Precision Positioning Table TX (two-axis specification) Size indicates table width. Select a size from the list of Table 2. Tables of different sizes can also be combined. Select a stroke length from the list of Table 2. s of respective axes are displayed in cm. Different stroke lengths can be specified for X- and Y-axes. As for a motor attachment, select it from the list of Table 3. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. A coupling shown in Table is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. : Lead 1: Lead 1 No symbol : Standard configuration C : Reverse configuration Standard configuration: A direction under the condition where X-axis motor side is placed at the front and Y-axis motor side is placed on the right side respectively. Reverse configuration: A direction under the condition where X-axis motor side is placed at the front and Y-axis motor side is placed on the left side respectively. Specify "No symbol" if 2 is selected for Y-axis stroke length for CTX22M. No symbol : Without linear encoder : Resolution.16 to.m (For AC servomotor manufactured by YASKAWA ELECTRIC CORPORATION) 1 : Resolution.1 to.2m (AC servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) 2 : Resolution.1 to.m (AC servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) When specifying the attachment for a stepper motor, set "No symbol". For details on the resolution, please see the section of maximum speed. For linear encoder specification, please see Table 1. 13 1N=.12f=.228lbs. 1=.3937inch 1
Identification Number and Specification Specifications Table 1 Sizes and stroke lengths Table width Table 2 Sizes, table width dimensions, and stroke lengths Table width CTX12M 12 CTX22M 22 Table 3 Application of motor attachment s of motor to be used Type Manufacturer Series AC servo motor Stepper motor YASKAWA ELECTRIC CORPORATION Mitsubishi Electric Corporation Panasonic Corporation ORIENTAL MOTOR Co., Ltd. TX12M 12 1, 1, 2, 2, 3 TX22M 22 1, 2, 2, 3, TX32M 32 3,, TX2M 2, 6, 8 Rated output W SGMAV-2A 2 X-axis Y-axis 1 1 2 1 2 2 3 2 2 2 3 2 3 3 3 Flange size TX12M CTX12M Motor attachment TX22M CTX22M TX32M TX2M AT1 - SGMAV-A 6 AT2 SGMAV-6A AT3 SGMAV-8A 7 8 AT HF-KP23, HG-KR23 2 AT1 6 J3, J HF-KP3, HG-KR3 AT2 AT3 HF-KP73, HG-KR73 7 8 AT MSME2 2 AT 6 MINAS A MSME AT6 AT7 MSME8 7 8 AT8 step AR66 AT9 6 AR69 AT9 AR98 AT11 AT12 8 AR911 AT11 AT12 RK RK6RKS6 6 AT1 RK9RKS9 8 AT11 AT12 Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. Table Accuracy Single-axis specification Two-axis specification TX12M TX22M TX32M TX2M CTX12M CTX22M X-axis 1 1 2 2 3 1 2 2 3 Y-axis Positioning Positioning Repeatability accuracy..1..1.3.6..8.3.6..8..13 3...8.1..13..13 6 8 1 1 2 1 2 2 3 2 2 2 3 2 3 3 3..1..1..1.6.16.8.2..7..1.6.1.8.1 Lost motion 1 Notes 1 When no linear encoder is used, this represents the value for backlash. 2 This represents accuracy in pitching and yawing. Remark: The values in indicate values without a linear encoder..1.1.1.1 Parallelism in table motion A Straightness in Attitude vertical accuracy 2 Straightness in sec horizontal..3.6 6...3.6 6..7 7..6 6..7 7..7 7..8 8.6.9 9.8.1.8 8..1.9 9.6.11 11.8 unit: Squareness of XY motion..1..1 Table Coupling models Motor attachment Coupling models Manufacturer Coupling inertia J C 1 - m 2 AT1 RA-3C- 81 Sakai Manufacturing Co., Ltd.281 AT2 RA-3C-121 Sakai Manufacturing Co., Ltd.87 AT3 RA-3C-11 Sakai Manufacturing Co., Ltd.87 AT RA-C-119 Sakai Manufacturing Co., Ltd 1.36 AT RA-3C- 811 Sakai Manufacturing Co., Ltd.281 AT6 RA-3C-121 Sakai Manufacturing Co., Ltd.87 AT7 RA-3C-11 Sakai Manufacturing Co., Ltd.87 AT8 RA-C-119 Sakai Manufacturing Co., Ltd 1.36 AT9 RA-3C- 81 Sakai Manufacturing Co., Ltd.281 AT1 RA-3C- 8 8 Sakai Manufacturing Co., Ltd.281 AT11 RA-3C-121 Sakai Manufacturing Co., Ltd.87 AT12 RA-3C-11 Sakai Manufacturing Co., Ltd.87 Remark: For detailed coupling specifications, please see respective manufacturer's catalog. 1 1N=.12f=.228lbs. 1=.3937inch 16
Specifications Table 6 Maximum speed attained when a motor manufactured by YASKAWA ELECTRIC CORPORATION is used (with linear encoder) Resolution m/pulse Lead Maximum speed /s Lead 1.16 62. 62..312 12 12.62 222 222.12 222 8.2 222 8. 222 8 Serial conversion unit 1 JZDP-D3--E YASKAWA ELECTRIC CORPORATION Note 1 Serial conversion unit is attached. Remarks 1. The values in are applicable to TX32M and TX2M. 2. Practical maximum speed varies depending on load condition. 3. To change the maximum speed, the resolution needs to be changed by setting the electronic gear for driver. Table 7 Maximum speed attained when a motor manufactured by Panasonic Corporation is used (with linear encoder) Resolution Maximum speed /s m/pulse Lead Lead 1 signal conversion unit 1.1 26. 26..2 2 2 APE371TTL. 1 1. 132 132.1 222 26 APE371TTL1.2 222 8 Note 1 A linear encoder signal conversion unit corresponding to resolution is attached. Remarks 1. The values in are applicable to TX32M and TX2M. LIP81 LIP81 2. Practical maximum speed varies depending on load condition. 3. When you wish to change the maximum speed, change the resolution using the internal switch of linear encoder signal conversion unit attached to the main body. Table 8 Maximum speed attained when a motor manufactured by Mitsubishi Electric Corporation is used (with linear encoder) Resolution Maximum speed /s m/pulse Lead Lead 1 signal conversion unit 1.1.2 8 8 APE371TTL. 16 16. 2 2.1 222 APE371TTL1.2 222 8 Note 1 A linear encoder signal conversion unit corresponding to resolution is attached. Remarks 1. The values in are applicable to TX32M and TX2M. LIP81 2. Practical maximum speed varies depending on load condition. 3. When you wish to change the maximum speed, change the resolution using the internal switch of linear encoder signal conversion unit attached to the main body. Table 1 specification Item Content LIP81R Manufacturer Material of scale main body Glass Coefficient of linear expansion / 81-6 Accuracy class m/m 1 Output signal Sine wave Signal cycle Vpp/m 1 Maximum operation speed m/s 1.2 Cord diameter. Cord bending radius or more Table 11 Serial conversion unit specification for YASKAWA ELECTRIC CORPORATION Item Content Manufacturer YASKAWA ELECTRIC CORPORATION JZDP-D3--E Signal resolution 1/26 of input two phase sine wave pitch Maximum responding frequency khz 2 Size 9623 Mass.1 Table 12 signal conversion unit specification for Panasonic Corporation and Mitsubishi Electric Corporation Item Content Manufacturer APE371TTL APE371TTL1 Signal resolution Depends on the internal switch setting Maximum responding frequency Depends on the internal switch setting Converter section 8217 Size Connector section 8217 Cord length 1 Mass.2 Table 13 Maximum carrying mass TX12M TX22M TX32M TX2M Ball screw lead Maximum carrying mass Horizontal Vertical 2 28 1 1 28 382 3 1 187 29 36 27 1 2 2 19 1 1 237 8 Table 9 Maximum speed attained when no linear encoder is used Maximum speed /s Motor type Lead Lead 1 AC servo motor TX12M TX22M 2 TX32M TX2M 22 8 TX12M Stepper motor TX22M TX32M 1 3 Remark: The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. 17 1N=.12f=.228lbs. 1=.3937inch 18
Specifications Table 1 Specifications of linear motion rolling guide L L/2 L/2 Table 1.1 Specifications of ball screw 1 TX12M TX22M TX32M TX2M Slide unit 2 Slide unit Basic dynamic load rating 1 C N Ball screw type Ground screw Ground screw Ground screw Ground screw Y l/2 l/2 l Z Basic static load rating 1 C N Lead Slide unit 1 Slide unit 3 Shaft dia. Axial clearance Arrangement TX12M 6 12 1 88 82 2 TX22M 11 2 17 1 1 TX32M 32 1 6 3 2 21 6 TX2M 38 2 7 3 3 29 Note 1 Represent the value per slide unit. Remark: The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. Basic dynamic load rating C N Basic static load rating C N 7 7 12 8 1 1 7 7 12 8 8 23 17 1 2 1 1 9 21 7 16 7 3 2 1 1 8 32 7 16 7 3 2 1 1 8 32 7 Remark: The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. L X X R Z Driving position(y d, Z d ) Y d Y Z d Table 1.2 Specifications of ball screw 2 Table 16 Table inertia and starting torque Single-axis specification Two-axis specification Shaft dia. Overall length TX12M TX22M TX32M TX2M TX12M TX22M TX32M TX2M CTX12M CTX22M X-axis 1 26 1 36 2 1 36 2 6 3 6 1 37 2 2 2 2 7 3 2 62 3 616 2 716 816 916 6 2 1 16 8 1 216 Y-axis Lead Table inertia J T 1 - m 2 Lead 1 1 1.3 1.8 1 1. 2. 2 1.6 2.2 2 1.8 2. 3 2. 2.6 1.2 7. 2.8 7.6 2 6. 8.2 3 7.1 8.8 8.3 1 3 2 26 23 29 26 32 3 39 6 33 2 8 39 8 1 1 2.1.7 2 1 2..1 2 2 2..8 3 2 2.9 6.2 2 2 8.2 16.9 3 2 9. 18.1 3 3 9.8 19.3 3 11. 2. Coupling inertia J C 1 - m 2 Starting torque T S Nm.29.7.8.12.8.26.8.3.29.7.8.13 Remark: As for tables of two-axis specification, the figures represent values in X-axis. For values in Y-axis, see the table for single-axis specification. unit: Mounting For the processing accuracy of the Precision Positioning Table mounting surface and the tightening torque of the fixing screws, see page -29. 19 1N=.12f=.228lbs. 1=.3937inch 16
Sensor Specification Table 17 Sensor timing chart Dimensions of Motor Attachment TX12M, CTX12M TX22M, CTX22M 2 37 1 6 -. Through(machined on motor attachment) -M Through(machined on motor bracket) PCD7, Evenly distributed at 9 6 3 2 18 φ +.39 -M Depth 1 PCD7, Evenly distributed at 9 C W CCW AT1 φ8 φ3 +.39 φ AT2 φ12 8 1 A Motor bracket 2 1 21 37 1 6 Motor attachment -. Through(machined on motor attachment) -M Depth 8(machined on motor bracket) PCD7, Evenly distributed at 9 6 3 2 18 φ12 φ +.39 -M Depth 8 PCD7, Evenly distributed at 9 8 B ON AT φ8 φ3 +.39 φ AT6 1 ON G C OFF S/2( 1 ) S/2( 1 ) OFF Origin(without linear encoder) Origin(linear encoder) Pre-origin(photo sensor) CW limit(photo sensor) AT9 AT1 Motor bracket 1 21 Indicates the extent 2 31 of coupling insertion in the case ( 9.) of with origin sensor. Motor attachment φ8 +.39 φ36 -M Depth 8 6 AT11 Indicates the extent of coupling insertion in the case of with origin sensor. 3 2 ( 1) 1 φ12 φ 1 φ6 +.6 18 7 -M6 Through 8 OFF CCW limit(photo sensor) 1 Mechanical stopper TX32M TX2M Ball screw lead A B C E F G TX12M TX22M TX32M TX2M (E) 3 L/2 1 1 1 7.. 6 3 1 1 L/2 1 1 1 7 12 1 8 3 L/2 1 1 1 7 2 1 8 3 L/2 1 1 1 7 18 1 1 Note 1 See the dimension tables on page -163 to -168. Remarks 1. For detailed specifications of respective sensors, please see the section of sensor specification in General Explanation. 2. The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. (F) unit: AT3 AT7 Indicates the extent of coupling insertion in the case of with origin sensor. 3 3 3 ( 12) φ1 1 φ1 1 1 φ1 φ φ +.39 φ +.39 φ6 +.6 18 18 18 7 -M Depth 1 PCD7, Evenly distributed at 9 8 -M Depth 8 PCD7, Evenly distributed at 9 8 -M6 Through 8 AT AT8 3 2. 1 -M6 Depth 12 PCD9, Evenly distributed at 9 3 2. φ1 1 φ1 1 φ7 +.6 φ7 +.6 1 12 -M Depth 1 PCD9, Evenly distributed at 9 12 AT12 1 161 1N=.12f=.228lbs. 1=.3937inch 162